JP2014031865A - Air bearing device and application apparatus - Google Patents

Air bearing device and application apparatus Download PDF

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JP2014031865A
JP2014031865A JP2012174198A JP2012174198A JP2014031865A JP 2014031865 A JP2014031865 A JP 2014031865A JP 2012174198 A JP2012174198 A JP 2012174198A JP 2012174198 A JP2012174198 A JP 2012174198A JP 2014031865 A JP2014031865 A JP 2014031865A
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Prior art keywords
air bearing
coating
bearing device
exhaust
gas
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JP2014031865A5 (en
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Toshiyuki Ikeda
俊之 池田
Satoshi Ueda
智士 上田
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Oiles Industry Co Ltd
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Oiles Industry Co Ltd
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Priority to JP2012174198A priority Critical patent/JP2014031865A/en
Priority to CN201380041409.1A priority patent/CN104583618A/en
Priority to PCT/JP2013/067076 priority patent/WO2014024583A1/en
Priority to KR20157003630A priority patent/KR20150040924A/en
Priority to TW102127675A priority patent/TW201412409A/en
Publication of JP2014031865A publication Critical patent/JP2014031865A/en
Publication of JP2014031865A5 publication Critical patent/JP2014031865A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Abstract

PROBLEM TO BE SOLVED: To provide an air bearing device capable of enhancing thickness accuracy and flatness accuracy, and to provide an application apparatus including the air bearing device.SOLUTION: The air bearing device includes a pad part 114 allowed to be floated by floating force caused by discharge of gas and compressed air is supplied from a gas supply source to the pad part 114. The gas supplied to the pad part 114 is discharged from pores of a porous body 115 through an air supply passage 117 and collides on an upper surface 111a of a surface plate to apply floating force. The gas discharged from the porous body 115 is allowed to arrive at an exhaust groove 119 through a comparatively narrow space between a bearing face 103a and the upper surface 111a of the surface plate and exhausted from a non-bearing face 103b to the outside through an exhaust through passage 121. An exhaust passage 118 of the pad part 114 controls a flow direction of ejected gas and prevents gas from entering into an application area.

Description

本発明は、エアベアリング装置及び当該エアベアリング装置を備える塗布装置に関し、より具体的には、吐出される気体の流れを制御可能なエアベアリング装置及び当該エアベアリング装置を備える塗布装置に関する。   The present invention relates to an air bearing device and a coating device including the air bearing device, and more specifically, to an air bearing device capable of controlling the flow of discharged gas and a coating device including the air bearing device.

従来より、液晶パネルや半導体素子等の製造工程では、ガラス基板や半導体ウエハといった薄板状の被塗布物に、レジスト液等の塗液を塗布する塗布装置が用いられ、当該塗布装置にエアベアリング装置が利用されている。   2. Description of the Related Art Conventionally, in a manufacturing process of a liquid crystal panel or a semiconductor element, a coating apparatus that applies a coating solution such as a resist solution to a thin plate-like object to be coated such as a glass substrate or a semiconductor wafer has been used. Is being used.

例えば、引用文献１に開示される塗布装置は、塗液を塗布するノズルと、被塗布物が載置される直方体状の定盤と、定盤の短手方向に横切状態でノズルが装着されるガントリと、を備え、ガントリを構成する保持部材が、定盤に対してエアベアリングにより、非接触で支持されている。また、塗液が塗布される被塗布物は、真空引き吸着により定盤に固定される。上記構成の塗布装置において、定盤上に固定されている被塗布物に対してガントリを相対移動させることでノズルを走査するとともに、ノズルから塗液を吐出し被塗布物の表面に塗布する。   For example, the coating apparatus disclosed in the cited document 1 is equipped with a nozzle for applying a coating liquid, a rectangular parallelepiped surface plate on which an object to be coated is placed, and a nozzle in a transverse state in the short direction of the surface plate And a holding member constituting the gantry is supported in a non-contact manner on the surface plate by an air bearing. Further, the object to be coated with the coating liquid is fixed to the surface plate by vacuum suction. In the coating apparatus having the above-described configuration, the nozzle is scanned by moving the gantry relative to the coating object fixed on the surface plate, and the coating liquid is discharged from the nozzle and coated on the surface of the coating object.

特開２００８−１４９２３８号JP 2008-149238 A

ところで、近年、製品の小型化の要求に伴い、液晶パネルの厚さを薄くすること（薄厚化）や半導体素子の微細化が望まれている。しかし、従来のエアベアリング装置において浮上させるために吐出される気体は、現状の製品仕様の製造条件下における使用条件では問題とならないが、製品に対する更なる小型化の要求に応えられない恐れがある。また、従来のエアベアリング装置を用いた塗布装置で確保できる塗膜の厚さ精度や平坦精度では、塗膜のさらなる薄厚化や平坦化の実現が難しく、製品の小型化の要求に応えることが困難になることが予想される。具体的には、エアベアリング装置から吐出される気体が塗液に及ぼす影響により、塗膜の厚さに関し所期の精度が得られず、塗膜の厚さ精度及び平坦精度を実現できない恐れがある。   By the way, in recent years, with the demand for miniaturization of products, it has been desired to reduce the thickness of the liquid crystal panel (thinning) and miniaturize semiconductor elements. However, the gas discharged for floating in the conventional air bearing device does not cause a problem under the use conditions under the manufacturing conditions of the current product specifications, but may not meet the demand for further downsizing of the products. . In addition, with the coating film thickness accuracy and flatness accuracy that can be secured with a coating device using a conventional air bearing device, it is difficult to achieve further thinning and flattening of the coating film, which can meet the demands for product miniaturization. Expected to be difficult. Specifically, due to the effect of the gas discharged from the air bearing device on the coating liquid, the expected accuracy with respect to the coating thickness may not be obtained, and there is a risk that the thickness accuracy and flatness accuracy of the coating film cannot be realized. is there.

本発明は、かかる事情に鑑みてなされたものである。すなわち、塗膜の厚さ精度や平坦精度を高めることができるエアベアリング装置及び当該エアベアリング装置を備える塗布装置を提供することを目的とする。   The present invention has been made in view of such circumstances. That is, it aims at providing the coating device provided with the air bearing apparatus which can raise the thickness precision and flatness precision of a coating film, and the said air bearing apparatus.

上述した課題を解決し、目的を達成するために、本発明のエアベアリング装置の第１の態様は、気体を吐出することによる浮上力により浮上するパッド部を備え、前記パッド部は、気体を吐出するための噴出口が設けられるベアリング面と、前記噴出口から吐出される気体の流れ方向を制御する気流制御手段と、を有する。   In order to solve the above-described problems and achieve the object, a first aspect of an air bearing device of the present invention includes a pad portion that floats by a levitation force generated by discharging a gas, and the pad portion contains gas. It has a bearing surface provided with a jet outlet for discharging, and airflow control means for controlling the flow direction of the gas discharged from the jet outlet.

また、本発明のエアベアリング装置の第２の態様によれば、前記第１の態様のエアベアリング装置であって、前記気流制御手段は、前記噴出口を部分的に又は完全に取り囲むように不連続または連続して延在する前記ベアリング面に配置される排気溝を有する。   Further, according to a second aspect of the air bearing device of the present invention, the air bearing device according to the first aspect, wherein the air flow control means is not so surrounded as to partially or completely surround the ejection port. It has an exhaust groove disposed on the bearing surface that extends continuously or continuously.

また、本発明のエアベアリング装置の第３の態様によれば、前記第２の態様のエアベアリング装置であって、前記気流制御手段は、前記排気溝に連通し前記パッド部を貫通する排気貫通路を有する。   According to a third aspect of the air bearing device of the present invention, the air bearing device according to the second aspect, wherein the air flow control means communicates with the exhaust groove and passes through the pad portion. Has a road.

本発明のエアベアリング装置の第４の態様によれば、前記第２又は第３の態様のエアベアリング装置であって、前記排気溝は、前記ベアリング面の平面視で円環状である。   According to a fourth aspect of the air bearing device of the present invention, in the air bearing device according to the second or third aspect, the exhaust groove is annular in a plan view of the bearing surface.

さらに、上述した課題を解決し、目的を達成するために、本発明の塗布装置の第１の態様は、被塗布部材に塗液を塗布するための塗布手段と、前記塗布手段により塗液を塗布する際に前記被塗布部材が位置する塗布領域を有する載置物と、前記塗布手段を前記載置物から所定距離離間し浮上させるための気体を吐出するエアベアリング装置と、前記エアベアリング装置から吐出される気体の流れ方向を制御し、前記気体が前記塗布領域へ進入することを防止する気流制御手段と、を備える。   Furthermore, in order to solve the above-described problems and achieve the object, the first aspect of the coating apparatus of the present invention includes a coating unit for coating a coating liquid on a member to be coated, and a coating liquid by the coating unit. A placement object having a coating region where the member to be coated is located when coating, an air bearing device that discharges a gas for allowing the coating means to float a predetermined distance from the placement object, and a discharge from the air bearing device Air flow control means for controlling the flow direction of the gas to be prevented and preventing the gas from entering the application region.

また、本発明の塗布装置の第２の態様によれば、前記第１の態様の塗布装置であって、前記気流制御手段は、前記エアベアリング装置及び前記載置物の少なくとも一方に設けられ、前記エアベアリング装置から吐出された気体を排出するための排気経路である。   Moreover, according to the 2nd aspect of the coating device of this invention, it is a coating device of the said 1st aspect, Comprising: The said airflow control means is provided in at least one of the said air bearing apparatus and the said figurine, It is an exhaust path for exhausting the gas discharged from the air bearing device.

また、本発明の塗布装置の第３の態様によれば、前記第２の態様の塗布装置であって、当該塗布装置に用いられる前記エアベアリング装置は、前記気体を吐出する噴出口を備え、前記排気経路は、前記噴出口を部分的に又は完全に取り囲むように不連続または連続して延在する排気溝を有する。   Moreover, according to the 3rd aspect of the coating device of this invention, it is a coating device of the said 2nd aspect, Comprising: The said air-bearing apparatus used for the said coating device is equipped with the jet nozzle which discharges the said gas, The exhaust path has an exhaust groove that extends discontinuously or continuously so as to partially or completely surround the ejection port.

また、本発明の塗布装置の第４の態様によれば、前記第２又は第３の態様の塗布装置であって、前記排気経路は、前記エアベアリング装置及び前記載置物の少なくとも一方を貫通する排気貫通路を有する。   Moreover, according to the 4th aspect of the coating device of this invention, it is a coating device of the said 2nd or 3rd aspect, Comprising: The said exhaust path penetrates at least one of the said air bearing apparatus and said figurine. It has an exhaust passage.

また、本発明の塗布装置の第５の態様によれば、前記第４の態様の塗布装置であって、前記排気溝は、前記排気貫通路に連通している。   According to a fifth aspect of the coating apparatus of the present invention, in the coating apparatus according to the fourth aspect, the exhaust groove communicates with the exhaust through-passage.

また、本発明の塗布装置の第６の態様によれば、前記第２〜第４の態様の一の塗布装置であって、前記排気経路は、前記排気経路に負圧を供給できる吸引手段に連結されている。   Moreover, according to the 6th aspect of the coating device of this invention, it is a coating device of one of the said 2nd-4th aspect, Comprising: The said exhaust path is a suction means which can supply a negative pressure to the said exhaust path. It is connected.

また、本発明の塗布装置の第７の態様によれば、前記第１の態様の塗布装置であって、前記気流制御手段は、前記エアベアリング装置及び前記載置物の少なくとも一方に設けられ、前記エアベアリング装置及び前記載置物の少なくとも他方に当接するように延在する隔壁部材であり、前記隔壁部材により、前記エアベアリング装置と前記載置物との間の浮上空間は、正面視において前記塗布領域側が閉じている。   Further, according to a seventh aspect of the coating apparatus of the present invention, in the coating apparatus according to the first aspect, the air flow control means is provided in at least one of the air bearing device and the above-described figurine, A partition member extending so as to contact at least the other of the air bearing device and the above-described figurine, and the partition member allows a floating space between the air bearing device and the figurine to be the application region in a front view. The side is closed.

本発明にかかるエアベアリング装置は、エアベアリング装置から吐出される気体の流れを気流制御手段により制御できるので、当該エアベアリング装置の周辺物に対する吐出される気体の影響を防止することができる。さらに、本発明にかかる塗布装置の気流制御手段により、被塗布物に形成される塗膜に対する、吐出気体の影響を排除することができる。よって、塗膜の厚さ精度及び平坦精度を高めることができ、塗膜の薄厚化及び平坦化、ひいては製品の小型化を実現できる。   In the air bearing device according to the present invention, the flow of gas discharged from the air bearing device can be controlled by the air flow control means, so that the influence of the discharged gas on the peripheral object of the air bearing device can be prevented. Furthermore, the influence of the discharge gas on the coating film formed on the coating object can be eliminated by the airflow control means of the coating apparatus according to the present invention. Therefore, the thickness accuracy and flatness accuracy of the coating film can be increased, and the coating film can be thinned and flattened, and thus the product can be downsized.

第１の実施形態に係る塗布装置の一部を模式的に示す斜視図である。It is a perspective view showing typically a part of coating device concerning a 1st embodiment. 図１に示す塗布装置の主要な構成要素を示す正面図である。It is a front view which shows the main components of the coating device shown in FIG. 図１に示す塗布装置のパッド部の下面図である。It is a bottom view of the pad part of the coating device shown in FIG. 図３の線ＩＶ−ＩＶに沿ったパッド部の断面図である。FIG. 4 is a cross-sectional view of the pad portion taken along line IV-IV in FIG. 3. （ａ）は、第２の実施形態に係る塗布装置の定盤とパッド部の関係を示す平面図であり、（ｂ）は、図５（ａ）の線Ｖ−Ｖに沿った断面図である。(A) is a top view which shows the relationship between the surface plate and pad part of the coating device which concerns on 2nd Embodiment, (b) is sectional drawing along line VV of Fig.5 (a). is there. （ａ）は、第３の実施形態に係る塗布装置の定盤とパッド部の関係を示す平面図であり、（ｂ）は、図６（ａ）の線ＶＩ−ＶＩに沿った断面図である。(A) is a top view which shows the relationship between the surface plate and pad part of the coating device which concerns on 3rd Embodiment, (b) is sectional drawing along line VI-VI of Fig.6 (a). is there.

以下に、本発明に係るエアベアリング装置及び塗布装置の実施形態について図面を参照しつつ説明する。なお、この実施形態により本発明が限定されるものではない。   Embodiments of an air bearing device and a coating device according to the present invention will be described below with reference to the drawings. In addition, this invention is not limited by this embodiment.

〔第１の実施形態〕
図１は、実施形態に係る塗布装置１０１の一部を模式的に示す斜視図であり、図２は、図１に示す塗布装置１０１の主要な構成要素を模式的に示す正面図であり、図３は、図１に示す塗布装置１０１のパッド部１１４の下面図であり、図４は、図３の線ＩＶ−ＩＶに沿ったパッド部１１４の断面図である。なお、図２において、図１に示される支持部１０９ｂ及び支持部１０９ｂに装着される側面支持エアベアリング装置１０７は、図面の明瞭化のため割愛されている。 [First Embodiment]
FIG. 1 is a perspective view schematically showing a part of a coating apparatus 101 according to the embodiment, and FIG. 2 is a front view schematically showing main components of the coating apparatus 101 shown in FIG. 3 is a bottom view of the pad portion 114 of the coating apparatus 101 shown in FIG. 1, and FIG. 4 is a cross-sectional view of the pad portion 114 taken along line IV-IV in FIG. In FIG. 2, the support portion 109b and the side support air bearing device 107 attached to the support portion 109b shown in FIG. 1 are omitted for clarity of the drawing.

実施形態の塗布装置１０１は、主として、被塗布部材であるガラス基板１０２に塗液であるレジスト液１０４を塗布するための塗布手段を構成するスロットノズル１１３と、スロットノズル１１３によりレジスト液１０４を塗布する際にガラス基板１０２が配置される塗布領域１１２ａを有する載置物である定盤１１１と、スロットノズル１１３を定盤１１１から所定距離離間し浮上させるための気体を吐出するエアベアリング装置１０３と、エアベアリング装置１０３から噴出される気体の流れ方向を制御し、気体が塗布領域１１２ａへ進入することを防止する後述する気流制御手段と、を備える。   The coating apparatus 101 of the embodiment mainly applies a resist solution 104 by a slot nozzle 113 that constitutes a coating means for applying a resist solution 104 that is a coating solution to a glass substrate 102 that is a member to be coated, and the slot nozzle 113. A platen 111 having a coating region 112a on which the glass substrate 102 is placed, and an air bearing device 103 for discharging a gas to float the slot nozzle 113 at a predetermined distance from the platen 111; An airflow control unit that controls the flow direction of the gas ejected from the air bearing device 103 and prevents the gas from entering the application region 112a.

定盤１１１は直方体形状であり、その平坦な上面１１１ａは、平面視で矩形状の塗布領域１１２ａと、上面１１１ａの短手方向に関し塗布領域１１２ａを挟んで配置される支持領域１１２ｂと、を有する。塗布領域１１２ａは、定盤１１１の上面１１１ａに載置されるガラス基板１０２に対してスリットノズル１１３により塗布が行われる領域であり、支持領域１１２ｂは、上面支持エアベアリング装置１０５のパッド部１１４が移動する領域である。なお、本実施形態の定盤１１１の上面１１１ａは、定盤１１１の長手方向に延びる境界溝１５３により塗布領域１１２ａと支持領域１１２ｂとに分離されているが、境界溝１５３を備えない定盤を用いることも可能であることは言うまでもない。   The surface plate 111 has a rectangular parallelepiped shape, and the flat upper surface 111a includes a rectangular application region 112a in a plan view, and a support region 112b that is disposed across the application region 112a in the short direction of the upper surface 111a. . The application area 112a is an area where the glass substrate 102 placed on the upper surface 111a of the surface plate 111 is applied by the slit nozzle 113, and the support area 112b is the pad portion 114 of the upper surface support air bearing device 105. It is a moving area. The upper surface 111a of the surface plate 111 of the present embodiment is separated into the coating region 112a and the support region 112b by the boundary groove 153 extending in the longitudinal direction of the surface plate 111, but the surface plate without the boundary groove 153 is used. Needless to say, it can also be used.

ガントリ１０９は、スロットノズル１１３が装着されている水平保持部１０９ａと、水平保持部１０９ａの長手方向の両端部それぞれに連続する２つの支持部１０９ｂと、を備え、上面支持エアベアリング装置１０５により定盤１１１の上面１１１ａに接触せずに支持される。また、各支持部１０９ｂは、水平保持部１０９ａに対して垂直方向に延在し、各支持部１０９ｂの一端部は、水平保持部１０９ａの一端部に連結され、各支持部１０９ｂの他端部は、側面支持エアベアリング装置１０７に連結される。   The gantry 109 includes a horizontal holding portion 109 a on which the slot nozzle 113 is mounted and two support portions 109 b that are continuous to both ends in the longitudinal direction of the horizontal holding portion 109 a, and is fixed by the upper surface support air bearing device 105. It is supported without contacting the upper surface 111a of the board 111. Each support portion 109b extends in a direction perpendicular to the horizontal holding portion 109a. One end portion of each support portion 109b is connected to one end portion of the horizontal holding portion 109a, and the other end portion of each support portion 109b. Is coupled to the side support air bearing device 107.

また、水平保持部１０９ａと支持部１０９ｂにより画成される隅部には、台座部１０９ｃが装着され、台座部１０９ｃが従来より知られるボールジョイント（不図示）を介して上面支持ベアリング１０５のパッド部１１４に支持されている。このように、ガントリ１０９は、上面支持エアベアリング装置１０５及び側面支持エアベアリング装置１０７により、定盤１１１の上面１１１ａ及び側面１１１ｂから所定距離離間し浮上するともに、定盤１１１の短手方向（ガントリ１０９の水平保持部１０９ａの長手方向）に関する移動は、側面支持エアベアリング装置１０７により規制されている。   Further, a pedestal portion 109c is attached to a corner defined by the horizontal holding portion 109a and the support portion 109b, and the pedestal portion 109c is padded to the upper surface support bearing 105 via a conventionally known ball joint (not shown). Supported by the portion 114. As described above, the gantry 109 is levitated at a predetermined distance from the upper surface 111a and the side surface 111b of the surface plate 111 by the upper surface support air bearing device 105 and the side surface support air bearing device 107, and the gantry 109 The movement in the longitudinal direction of the 109 horizontal holding portions 109 a is regulated by the side support air bearing device 107.

本実施形態に係る塗布装置１０１に利用されているエアベアリング装置１０３の上面支持エアベアリング装置１０５及び側面支持エアベアリング装置１０７は、圧縮気体をエアベアリング装置１０３に供給するコンプレッサ等の気体供給源（不図示）と、パッド部１１４、１１６と、を備え、制御部１３１からの駆動信号により、所定量及び所定圧力の圧縮気体が気体供給源から多孔質体１１５へ供給され、多孔質体１１５が具備する細孔から圧縮気体を吐出させることにより、パッド部１１４、１１６に浮上力を付与する。なお、上面支持エアベアリング装置１０５、側面支持エアベアリング装置１０７は、パッド部１１４、１１６を除き同じ構成である。従って、エアベアリング装置１０３に関し、上面支持エアベアリング装置１０５を用いて説明する。   The upper surface support air bearing device 105 and the side surface support air bearing device 107 of the air bearing device 103 used in the coating apparatus 101 according to this embodiment are a gas supply source such as a compressor that supplies compressed gas to the air bearing device 103 ( (Not shown) and pad portions 114 and 116, and a predetermined amount and a predetermined pressure of compressed gas are supplied from the gas supply source to the porous body 115 by the drive signal from the control section 131. A levitation force is applied to the pad portions 114 and 116 by discharging compressed gas from the pores provided. The upper surface support air bearing device 105 and the side surface support air bearing device 107 have the same configuration except for the pad portions 114 and 116. Therefore, the air bearing device 103 will be described using the upper surface support air bearing device 105.

パッド部１１４は、図３に示されるように下面視において円形状であり、斜線部は、噴出口が設けられている領域であり、多孔質体１１５から構成される。多孔質体１１５は、気体を噴出させるための互いに連通する細孔を有する円盤状の部材である。また、不図示の気体供給源が、パッド部１１４の内部に形成されているエア供給路１１７を介して多孔質体１１５の細孔に連通し、気体供給源から供給される気体１２３が、多孔質体１１５の細孔から吐出することによりパッド部１１４が、定盤１１１の上面１１１ａから浮上する。   As shown in FIG. 3, the pad portion 114 has a circular shape in a bottom view, and the hatched portion is a region where a jet port is provided, and is composed of a porous body 115. The porous body 115 is a disk-shaped member having pores communicating with each other for ejecting gas. In addition, a gas supply source (not shown) communicates with the pores of the porous body 115 via an air supply path 117 formed inside the pad portion 114, and the gas 123 supplied from the gas supply source is porous. By discharging from the pores of the material body 115, the pad portion 114 floats from the upper surface 111 a of the surface plate 111.

パッド部１１４は、噴出する気体の流れ方向を制御し、気体が塗布領域１１２ａへ進入することを防止する気流制御手段である排気経路１１８を備えている。排気経路１１８は、排気溝１１９及び排気貫通路１２１を有する。排気溝１１９は、定盤１１１の上面１１１ａに対向するパッド部１１４のベアリング面１０３ａ上にあって、多孔質体１１５を多孔質体１１５の外周側で完全に取り囲むように、ベアリング面１０３ａと同心に環状に連続して刻設されている。   The pad unit 114 includes an exhaust path 118 that is an air flow control unit that controls the flow direction of the jetted gas and prevents the gas from entering the coating region 112a. The exhaust path 118 includes an exhaust groove 119 and an exhaust through path 121. The exhaust groove 119 is on the bearing surface 103a of the pad portion 114 facing the upper surface 111a of the surface plate 111, and is concentric with the bearing surface 103a so as to completely surround the porous body 115 on the outer peripheral side of the porous body 115. Are continuously engraved in a ring shape.

排気溝１１９には、所定の径を有しパッド部１１４を貫通する排気貫通路１２１の一端部が連通し、排気貫通路１２１の他端部はパッド部１１４の外部に連通（大気連通）している。排気貫通路１２１は、ベアリング面１０３ａの周方向に沿って等間隔に互いに離間して複数配置され、パッド部１１４の厚さ方向（図３の紙面に交差する方向、図４の上下方向）に延在している。また、図４に示すように排気溝１１９の断面形状（ベアリング面１０３ａの中心を通る鉛直面に沿った断面形状）は、四角形としているが、円形、楕円形、多角形等の種々の形状とすることができることは言うまでもない。   The exhaust groove 119 communicates with one end of an exhaust through passage 121 having a predetermined diameter and penetrating the pad portion 114, and the other end of the exhaust through passage 121 communicates with the outside of the pad portion 114 (atmospheric communication). ing. A plurality of exhaust through passages 121 are arranged spaced apart from each other at equal intervals along the circumferential direction of the bearing surface 103a, and in the thickness direction of the pad portion 114 (the direction intersecting the paper surface of FIG. 3, the vertical direction of FIG. 4). It is extended. In addition, as shown in FIG. 4, the cross-sectional shape of the exhaust groove 119 (the cross-sectional shape along the vertical plane passing through the center of the bearing surface 103a) is a quadrangle, but various shapes such as a circle, an ellipse, and a polygon can be used. It goes without saying that you can do it.

また、排気溝１１９は、連続したものであれば、環状である必要はなく、矩形、ジグザグ形状等、多孔質体１１５（若しくは吐出口を構成する細孔）を完全に取り囲むような形態であれば適用可能である。さらに、排気貫通路１２１の数や形状も適宜変更可能である。   Further, the exhaust groove 119 does not need to be annular as long as it is continuous, and may have a form that completely surrounds the porous body 115 (or the pores constituting the discharge port), such as a rectangle or a zigzag shape. If applicable. Furthermore, the number and shape of the exhaust through passage 121 can be changed as appropriate.

上記構成の上面支持エアベアリング装置１０５が、制御部１３１から駆動信号を受けると、気体供給源から圧縮気体がパッド部１１４に供給される。パッド部１１４に供給された気体（図４の参照符号１２３）は、エア供給路１１７を通り多孔質体１１５の細孔から吐出され（図４の参照符号１２５）、定盤１１１の上面１１１ａに衝突しパッド部１１４に浮上力を付与する。   When the upper surface supporting air bearing device 105 configured as described above receives a drive signal from the control unit 131, compressed gas is supplied from the gas supply source to the pad unit 114. The gas (reference numeral 123 in FIG. 4) supplied to the pad portion 114 passes through the air supply path 117 and is discharged from the pores of the porous body 115 (reference numeral 125 in FIG. 4), and is applied to the upper surface 111a of the surface plate 111. Colliding and applying levitation force to the pad portion 114.

多孔質体１１５から吐出した気体（図４の参照符号１２５）は、ベアリング面１０３ａと定盤１１１の上面１１１ａとの間の比較的狭い空間を通り、排気溝１１９へと到達する。排気溝１１９へ到達した気体（図４の参照符号１２７）は、排気溝１１９を介して排気貫通路１２１へと進入し、最終的にパッド部１１４のベアリング面１０３ａに対向する上面である反ベアリング面１０３ｂから外部へ排出される。   The gas discharged from the porous body 115 (reference numeral 125 in FIG. 4) passes through a relatively narrow space between the bearing surface 103a and the upper surface 111a of the surface plate 111 and reaches the exhaust groove 119. The gas (reference numeral 127 in FIG. 4) that has reached the exhaust groove 119 enters the exhaust through passage 121 via the exhaust groove 119 and is finally the anti-bearing that is the upper surface facing the bearing surface 103a of the pad portion 114. It is discharged from the surface 103b to the outside.

一方、側面支持エアベアリング装置１０７のパッド部１１６には、排気経路（すなわち排気溝及び排気貫通路）は設けられていない。しかし、側面支持エアベアリング装置１０７に供給される気体により、定盤１１１の上面１１１ａ上のガラス基板１０２上の塗膜に影響する恐れがある場合には、上面支持エアベアリング装置１０５と同様に排気溝及び排気貫通路を設ける構成とすることも可能である。   On the other hand, the pad portion 116 of the side support air bearing device 107 is not provided with an exhaust path (that is, an exhaust groove and an exhaust through path). However, if the gas supplied to the side support air bearing device 107 may affect the coating film on the glass substrate 102 on the upper surface 111 a of the surface plate 111, the exhaust gas is exhausted in the same manner as the upper surface support air bearing device 105. A configuration in which a groove and an exhaust through-passage are provided is also possible.

以上の構成において、塗布装置１０１は、制御部１３１からの駆動信号により、圧縮気体源から所定圧力の気体（すなわち圧縮気体）が、上面支持エアベアリング装置１０５及び側面支持エアベアリング装置１０７に供給されると、圧縮気体が多孔質体１１５の細孔から吐出し、ガントリ１０９が、定盤１１１の上面１１１ａ及び側面１１１ｂから所定距離離れた状態で支持される。ガラス基板１０２は、不図示の搬送手段により、定盤１１１の上面１１１ａの塗布領域１１２ａに載置されると、不図示の駆動手段によりガントリ１０９が、ガラス基板１０２に対して走査移動し、スリットノズル１１３からレジスト液１０４が塗布される。   In the above configuration, the coating apparatus 101 is supplied with a gas having a predetermined pressure (that is, compressed gas) from the compressed gas source to the upper surface support air bearing device 105 and the side surface support air bearing device 107 in accordance with a drive signal from the control unit 131. Then, the compressed gas is discharged from the pores of the porous body 115, and the gantry 109 is supported in a state of being separated from the upper surface 111a and the side surface 111b of the surface plate 111 by a predetermined distance. When the glass substrate 102 is placed on the coating region 112a of the upper surface 111a of the surface plate 111 by a conveying means (not shown), the gantry 109 is scanned and moved relative to the glass substrate 102 by a driving means (not shown), A resist solution 104 is applied from the nozzle 113.

スリットノズル１１３が走査移動する際、多孔質体１１５の細孔から吐出されている気体は、定盤１１１の上面１１１ａの支持領域１１２ｂに衝突し（図４の参照符号１２５）浮上力を発生させた後、ベアリング面１０３ａの外周方向へ流れ、さらに排気溝１１９へ到達する（図４の参照符号１２７）。排気溝１１９内へ進入した気体１２８は、排気貫通穴１２１を介してパッド部１１４の反ベアリング面１０３ｂから外部へ排出される。従って、ガラス基板１０２上のレジスト液１０４が、部分的に乾燥したり、又は飛ばされたりといった、ベアリング面１０３ａから吐出される気体による影響を排除することがきる。   When the slit nozzle 113 scans and moves, the gas discharged from the pores of the porous body 115 collides with the support region 112b of the upper surface 111a of the surface plate 111 (reference numeral 125 in FIG. 4) to generate a levitation force. After that, it flows in the outer peripheral direction of the bearing surface 103a and further reaches the exhaust groove 119 (reference numeral 127 in FIG. 4). The gas 128 that has entered the exhaust groove 119 is discharged from the opposite bearing surface 103 b of the pad portion 114 to the outside through the exhaust through hole 121. Therefore, it is possible to eliminate the influence of the gas discharged from the bearing surface 103a such that the resist solution 104 on the glass substrate 102 is partially dried or blown off.

なお、上記実施形態では、排気溝１１９が多孔質体１１５（若しくは吐出口を構成する細孔）を取り囲む閉じた形状であるが、必ずしも完全に取り囲む必要はなく、多孔質体１１５（若しくは吐出口を構成する細孔）を部分的に取り囲むように延在することも可能である。すなわち、例えば、円弧状、ジグザグ状等、吐出される気体が、被塗布物を載置する塗布領域１１２ａへ進入することを防ぐことができる位置に、排気溝１１９を設ける構成であればよい。また、パッド部１１４のベアリング面１０３ａも円形に限定されず、楕円形、多角形等、種々の形状を採用することが可能である。また、本実施形態の排気溝１１９は、単一の曲率半径を有し連続する円弧状（すなわち円形）の溝から構成されているが、曲率半径が同一又は異なる複数の円弧状で、不連続に延在する溝から構成することも可能である。また、直線状に延在する複数の溝から排気溝を構成することも可能である。   In the above-described embodiment, the exhaust groove 119 has a closed shape surrounding the porous body 115 (or the pores constituting the discharge port). However, it is not always necessary to completely surround the porous body 115 (or the discharge port). It is also possible to extend so as to partially enclose the pores constituting the. That is, for example, an exhaust groove 119 may be provided at a position where the discharged gas can be prevented from entering the application region 112a on which the object is placed, such as an arc shape or a zigzag shape. Further, the bearing surface 103a of the pad portion 114 is not limited to a circle, and various shapes such as an ellipse and a polygon can be employed. In addition, the exhaust groove 119 of the present embodiment is configured by a continuous arc-shaped (that is, circular) groove having a single radius of curvature. It is also possible to comprise a groove extending in the direction. Moreover, it is also possible to comprise an exhaust groove from a plurality of grooves extending linearly.

〔第２の実施形態〕
次に第２の実施形態に係る塗布装置について、図５（ａ）、（ｂ）を参照しつつ説明する。図５（ａ）は、第２の実施形態に係る塗布装置の定盤２１１の一部を示す平面図であり、定盤２１１とパッド部２１４との関係を示し、（ｂ）は、図５（ａ）の線ＩＶ−ＩＶに沿った断面図である。なお、以下の説明において、塗布装置の特に言及しない要素の構成及びその変形態様は、第１の実施形態に係る塗布装置と同じであるので割愛する。また、図５（ａ）には、エアベアリング装置のパッド部２１４と定盤２１１との関係を示すため、パッド部２１４が２点鎖線で示されている。 [Second Embodiment]
Next, a coating apparatus according to a second embodiment will be described with reference to FIGS. 5 (a) and 5 (b). FIG. 5A is a plan view showing a part of the surface plate 211 of the coating apparatus according to the second embodiment, showing the relationship between the surface plate 211 and the pad portion 214, and FIG. It is sectional drawing along line IV-IV of (a). In the following description, the configuration of elements that are not particularly mentioned in the coating apparatus and the modifications thereof are the same as those of the coating apparatus according to the first embodiment, and are therefore omitted. Further, in FIG. 5A, in order to show the relationship between the pad portion 214 of the air bearing device and the surface plate 211, the pad portion 214 is indicated by a two-dot chain line.

第２の実施形態の塗布装置は、気流制御手段である排気経路２５０を載置物である定盤２１１に備える構成である。パッド部２１４のベアリング面２０３ａが対向する定盤２１１の支持領域２１２ｂ内に、排気経路２５０が設けられている。すなわち、定盤２１１の上面２１１ａ上へ水平投影した、パッド部２１４の多孔質体２１５の水平投影位置が、多孔質体２１５に重ならず、ベアリング面２０３ａの外周２０３ｂ内に配置されるように形成される。ここで、水平投影位置とは、塗布装置をＺ方向（図５（ａ）の紙面に交差する方向）に視る際の部材の位置を意味する。   The coating apparatus according to the second embodiment has a configuration in which an exhaust path 250 that is an airflow control unit is provided on a surface plate 211 that is a placement object. An exhaust path 250 is provided in the support region 212 b of the surface plate 211 that faces the bearing surface 203 a of the pad portion 214. That is, the horizontal projection position of the porous body 215 of the pad portion 214, which is horizontally projected onto the upper surface 211a of the surface plate 211, is not overlapped with the porous body 215 and is disposed within the outer periphery 203b of the bearing surface 203a. It is formed. Here, the horizontal projection position means the position of the member when the coating device is viewed in the Z direction (direction intersecting the paper surface of FIG. 5A).

排気経路２５０を構成する排気溝２５１は、平面視において、互いに所定距離離れて配置される、２つの直線状の領域を有す。さらに、排気経路２５０を構成する複数の排気貫通路２５３は、排気溝２５１に連通し、互いに離間配置され、定盤２１１を貫通する。第１の実施形態と同様に、排気貫通路２５３は、塗液（図１の添付符号１０４を参照。）に影響を及ぼさない位置で、定盤２１１の外部、すなわち塗布装置２０１の外部と連通している。   The exhaust groove 251 constituting the exhaust path 250 has two linear regions that are arranged at a predetermined distance from each other in plan view. Further, the plurality of exhaust through passages 253 constituting the exhaust passage 250 communicate with the exhaust groove 251, are spaced apart from each other, and pass through the surface plate 211. As in the first embodiment, the exhaust passage 253 communicates with the outside of the surface plate 211, that is, the outside of the coating apparatus 201 at a position that does not affect the coating liquid (see the reference numeral 104 in FIG. 1). doing.

上記第２の実施形態の気流制御手段は、定盤２１１に設ける構成としたが、第１の実施形態と同様に排気溝（図３の参照符号１１９参照。）を備え、定盤２１１には、排気溝２５１を設けずに、排気貫通路２５３のみを設ける構成とすることも可能である。   The airflow control means of the second embodiment is configured to be provided on the surface plate 211, but has an exhaust groove (see reference numeral 119 in FIG. 3) as in the first embodiment. It is also possible to adopt a configuration in which only the exhaust passage 253 is provided without providing the exhaust groove 251.

〔第３の実施形態〕
次に第３の実施形態に係る塗布装置について、図６（ａ）、（ｂ）を参照しつつ説明する。図６（ａ）は、第２の実施形態に係る塗布装置の定盤３１１の一部を示す平面図であり、定盤３１１とパッド部３１４との関係を示し、（ｂ）は、図６（ａ）の線ＶＩ−ＶＩに沿った断面図である。なお、以下の説明において、塗布装置の特に言及しない要素の構成及び変形態様は、第１の実施形態に係る塗布装置と同じであるので割愛する。また、図６（ａ）、（ｂ）には、上面支持エアベアリング装置の一方（左側）に配置されているパッド部３１４のみを図示している。 [Third Embodiment]
Next, a coating apparatus according to a third embodiment will be described with reference to FIGS. 6 (a) and 6 (b). FIG. 6A is a plan view showing a part of the surface plate 311 of the coating apparatus according to the second embodiment, showing the relationship between the surface plate 311 and the pad portion 314, and FIG. It is sectional drawing along line VI-VI of (a). In the following description, the configuration and deformation modes of elements that are not particularly mentioned in the coating apparatus are the same as those of the coating apparatus according to the first embodiment, and are therefore omitted. FIGS. 6A and 6B show only the pad portion 314 disposed on one side (left side) of the upper surface support air bearing device.

第３の実施形態に係る塗布装置は、気流制御手段として隔壁部材３５１を備える。パッド部のベアリング面には、多孔質体から構成される吐出口を有するが、第１及び第２の実施形態と異なり、排気経路を備えない。   The coating apparatus according to the third embodiment includes a partition member 351 as airflow control means. Unlike the first and second embodiments, the bearing surface of the pad portion has a discharge port composed of a porous body, but does not have an exhaust path.

気流制御手段は、パッド部から吐出される気体が、支持領域３１２ｂから塗布領域３１２ａへ流れることを阻止するための隔壁部材３５１から構成される。また、隔壁部材３５１は、載置物である定盤３１１の上面３１１ａの塗布領域３１２ａと、パッド部３１４が通る支持領域３１２ｂとの境界に沿って配置される。   The airflow control means includes a partition member 351 for preventing the gas discharged from the pad portion from flowing from the support region 312b to the application region 312a. The partition member 351 is disposed along the boundary between the application region 312a on the upper surface 311a of the surface plate 311 that is a placement object and the support region 312b through which the pad portion 314 passes.

隔壁部材３５１の一端部は、定盤３１１の上面３１１ａに設けられている凹部３５３内に固定され、隔壁部材３５１の他端部は、パッド部３１４が定盤３１１の上面３１１ａから浮上している状態においてパッド部３１４の外周面３０３ｃに接するように寸法付けされている。すなわち、図６（ｂ）の正面視において、エアベアリング装置のパッド部３１４と定盤３１１の上面３１１ａとの間の浮上空間Ｓの塗布領域３１２ａ側が閉じられることになる。   One end portion of the partition wall member 351 is fixed in a recess 353 provided on the upper surface 311 a of the surface plate 311, and the pad portion 314 is levitated from the upper surface 311 a of the surface plate 311 at the other end portion of the partition wall member 351. In the state, it is dimensioned so as to contact the outer peripheral surface 303c of the pad portion 314. That is, in the front view of FIG. 6B, the application region 312 a side of the floating space S between the pad portion 314 of the air bearing device and the upper surface 311 a of the surface plate 311 is closed.

この構成により、パッド部３１４から吐出される気体が、塗布領域３１２ａへ進入することを阻止することが可能である。結果として、エアベアリング装置に利用される気体が、ガラス基板上の塗布された塗液へ影響することを防止することができる。なお、隔壁部材３５１は、例えば、樹脂又はゴム製の可撓性部材から構成することができる。   With this configuration, it is possible to prevent the gas discharged from the pad portion 314 from entering the application region 312a. As a result, it is possible to prevent the gas used in the air bearing device from affecting the applied coating liquid on the glass substrate. In addition, the partition member 351 can be comprised from resin or the flexible member made from rubber | gum, for example.

上記した第２及び第３の実施形態では、第１の実施形態と異なり、排気貫通路を定盤に設け、塗布装置が配置される床面の方向に排気する構成である。従って、塗布装置がクリーンルーム内で使用するときに、クリーンルーム内にダウンフローの気流流れを形成している場合であっても、その気流流れを乱すことを防止できる。   In the second and third embodiments described above, unlike the first embodiment, an exhaust through-passage is provided on the surface plate and exhausted in the direction of the floor surface on which the coating apparatus is disposed. Therefore, when the coating apparatus is used in a clean room, even when a downflow airflow is formed in the cleanroom, the airflow can be prevented from being disturbed.

上記した第１及び第２の実施形態の塗布装置では、気体の排出を、大気と連通する排気経路から行う構成であるが、負圧を供給するポンプ等の吸引手段を排気経路に連結する構成とすることも可能である。気体供給手段と吸引手段を制御手段により制御することにより、エアベアリング装置が噴出する気体が、被塗布物に着弾される塗液への干渉を効率的に防止することができる。   In the coating apparatus according to the first and second embodiments described above, the gas is discharged from the exhaust path communicating with the atmosphere, but the suction means such as a pump for supplying negative pressure is connected to the exhaust path. It is also possible. By controlling the gas supply means and the suction means by the control means, it is possible to efficiently prevent the gas ejected from the air bearing device from interfering with the coating liquid landed on the coating object.

上記した第１乃至第３の実施形態の塗布装置では、被塗布物を非接触支持する構成であるが、本発明はこの構成に限定されない。例えば、ガラス基板を定盤に吸着させる又は接触させた状態で載置される塗布装置であっても本発明の効果及び作用を奏することは言うまでもない。さらに、第１乃至第３の実施形態に係る気流制御手段を適宜組み合わせることも可能である。   In the coating apparatuses of the first to third embodiments described above, the object to be coated is supported in a non-contact manner, but the present invention is not limited to this structure. For example, it goes without saying that the effects and operations of the present invention can be achieved even with a coating apparatus that is placed in a state in which a glass substrate is adsorbed or brought into contact with a surface plate. Furthermore, the airflow control means according to the first to third embodiments can be appropriately combined.

上記した第１乃至第３の実施形態では、気体を吐出する噴出口に多孔質体を用いているが、多孔質体の代わりに、板部材に細孔を刻設することにより噴出口を構成することも可能である。   In the first to third embodiments described above, the porous body is used for the ejection port for discharging the gas. Instead of the porous body, the ejection port is configured by engraving fine holes in the plate member. It is also possible to do.

上記第１乃至第３の実施形態において、塗布領域を有する定盤１１１、２１１、３１１が載置物として用いられているが、本発明の載置物は、当該定盤に限定されない。塗布作業、測定作業などで使用するための所定の平面度を有する平面を備え、所定の剛性、硬度、耐摩耗性を有する種々の台が載置物として利用できる。また、定盤として、鋳鉄製の箱型定盤、ＪＩＳ定盤、石定盤等が利用できる。   In the first to third embodiments, the surface plates 111, 211, and 311 having an application region are used as the mounting object, but the mounting object of the present invention is not limited to the surface plate. Various platforms having a flat surface having a predetermined flatness for use in application work, measurement work, etc., and having a predetermined rigidity, hardness, and wear resistance can be used as a mounting object. As the surface plate, a cast iron box-type surface plate, a JIS surface plate, a stone surface plate, or the like can be used.

本発明のエアベアリング装置は、塗布装置のみならず、被支持物を非接触で支持するための装置に適用でき、その適用された装置は、本発明の効果及び作用を奏することは言うまでもない。   The air bearing apparatus of the present invention can be applied not only to a coating apparatus but also to an apparatus for supporting a supported object in a non-contact manner, and it goes without saying that the applied apparatus exhibits the effects and functions of the present invention.

１０１ 塗布装置
１０３ エアベアリング装置
１０３ａ、２０３ａ ベアリング面
１０５ 上面支持エアベアリング装置
１０７ 側面支持エアベアリング装置
１０９ ガントリ
１１１ 定盤
１１１ａ 上面
１１２ａ 塗布領域
１１２ｂ 支持領域
１１３ スロットノズル
１１４、１１６、２１４、３１４ パッド部
１１５、２１５ 多孔質体
１１８ 排気経路
１１９、２５１ 排気溝
１２１、２５３ 排気貫通路
１３１ 制御部
３５１ 隔壁部材 DESCRIPTION OF SYMBOLS 101 Application | coating apparatus 103 Air bearing apparatus 103a, 203a Bearing surface 105 Upper surface support air bearing apparatus 107 Side support air bearing apparatus 109 Gantry 111 Surface plate 111a Upper surface 112a Application area 112b Support area 113 Slot nozzle 114, 116, 214, 314 Pad part 115 215 Porous body 118 Exhaust path 119, 251 Exhaust groove 121, 253 Exhaust through path 131 Control unit 351 Partition member

Claims (11)

気体を吐出することによる浮上力により浮上するパッド部を備え、
前記パッド部は、気体を吐出するための噴出口が設けられるベアリング面と、前記噴出口から吐出される気体の流れ方向を制御する気流制御手段と、を有することを特徴とするエアベアリング装置。 Provided with a pad part that floats by levitation force by discharging gas,
The said pad part has an air bearing control means which controls the bearing surface in which the jet nozzle for discharging gas is provided, and the flow direction of the gas discharged from the said jet nozzle, The air bearing apparatus characterized by the above-mentioned. 前記気流制御手段は、前記噴出口を部分的に又は完全に取り囲むように不連続または連続して延在する前記ベアリング面に配置される排気溝を有することを特徴とする請求項１に記載のエアベアリング装置。   The said airflow control means has an exhaust groove arrange | positioned at the said bearing surface extended discontinuously or continuously so that the said jet nozzle may be surrounded partially or completely. Air bearing device. 前記気流制御手段は、前記排気溝に連通し前記パッド部を貫通する排気貫通路を有することを特徴とする請求項２に記載のエアベアリング装置。   3. The air bearing device according to claim 2, wherein the airflow control unit includes an exhaust passage that communicates with the exhaust groove and penetrates the pad portion. 前記排気溝は、前記ベアリング面の平面視で円環状であることを特徴とする請求項２ま又は３に記載のエアベアリング装置。   The air bearing device according to claim 2 or 3, wherein the exhaust groove has an annular shape in a plan view of the bearing surface. 被塗布部材に塗液を塗布するための塗布手段と、
前記塗布手段により塗液を塗布する際に前記被塗布部材が位置する塗布領域を有する載置物と、
前記塗布手段を前記載置物から所定距離離間し浮上させるための気体を吐出するエアベアリング装置と、
前記エアベアリング装置から吐出される気体の流れ方向を制御し、前記気体が前記塗布領域へ進入することを防止する気流制御手段と、を備えることを特徴とする塗布装置。 An application means for applying a coating liquid to a member to be coated;
A placement object having a coating region where the member to be coated is located when the coating liquid is coated by the coating means;
An air bearing device that discharges a gas for floating the coating means a predetermined distance away from the figurine;
A coating apparatus comprising: an airflow control unit that controls a flow direction of a gas discharged from the air bearing device and prevents the gas from entering the coating region. 前記気流制御手段は、前記エアベアリング装置及び前記載置物の少なくとも一方に設けられ、前記エアベアリング装置から吐出された気体を排出するための排気経路であることを特徴とする請求項５に記載の塗布装置。   The said airflow control means is provided in at least one of the said air bearing apparatus and the said figurine, and is an exhaust path for discharging | emitting the gas discharged from the said air bearing apparatus, The Claim 5 characterized by the above-mentioned. Coating device. 前記エアベアリング装置は、前記気体を吐出する噴出口を備え、前記排気経路は、前記噴出口を部分的に又は完全に取り囲むように不連続または連続して延在する排気溝を有することを特徴とする請求項６に記載の塗布装置。   The air bearing device includes a jet port for discharging the gas, and the exhaust path has an exhaust groove extending discontinuously or continuously so as to partially or completely surround the jet port. The coating apparatus according to claim 6. 前記排気経路は、前記エアベアリング装置及び前記載置物の少なくとも一方を貫通する排気貫通路を有することを特徴とする請求項６又は請求項７に記載の塗布装置。   The coating apparatus according to claim 6 or 7, wherein the exhaust path includes an exhaust through path that penetrates at least one of the air bearing device and the above-described figurine. 前記排気溝は、前記排気貫通路に連通していることを特徴とする請求項８に記載の塗布装置。   The coating apparatus according to claim 8, wherein the exhaust groove communicates with the exhaust through path. 前記排気経路は、前記排気経路に負圧を供給できる吸引手段に連結されていることを特徴とする請求項６〜９のいずれか一に記載の塗布装置。   The coating apparatus according to claim 6, wherein the exhaust path is connected to a suction unit that can supply a negative pressure to the exhaust path. 前記気流制御手段は、前記エアベアリング装置及び前記載置物の少なくとも一方に設けられ、前記エアベアリング装置及び前記載置物の少なくとも他方に当接するように延在する隔壁部材であり、前記隔壁部材により、前記エアベアリング装置と前記載置物との間の浮上空間は、正面視において前記塗布領域側が閉じていることを特徴とする請求項５に記載の塗布装置。   The air flow control means is a partition member that is provided on at least one of the air bearing device and the above-mentioned figurine, and extends so as to contact at least the other of the air bearing device and the above-mentioned figurine, The coating apparatus according to claim 5, wherein a floating space between the air bearing device and the above-mentioned figurine is closed on the coating region side in a front view.
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WO2014024583A1 (en) 2014-02-13
TW201412409A (en) 2014-04-01
CN104583618A (en) 2015-04-29

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