WO2015125604A1 - Dispositif d'analyse et programme informatique - Google Patents

Dispositif d'analyse et programme informatique Download PDF

Info

Publication number
WO2015125604A1
WO2015125604A1 PCT/JP2015/053100 JP2015053100W WO2015125604A1 WO 2015125604 A1 WO2015125604 A1 WO 2015125604A1 JP 2015053100 W JP2015053100 W JP 2015053100W WO 2015125604 A1 WO2015125604 A1 WO 2015125604A1
Authority
WO
WIPO (PCT)
Prior art keywords
ray
sample
intensity
characteristic
rays
Prior art date
Application number
PCT/JP2015/053100
Other languages
English (en)
Japanese (ja)
Inventor
聡史 大橋
隆司 小松原
浩行 越川
Original Assignee
株式会社堀場製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社堀場製作所 filed Critical 株式会社堀場製作所
Priority to JP2016504021A priority Critical patent/JP6472434B2/ja
Priority to DE112015000841.1T priority patent/DE112015000841T5/de
Publication of WO2015125604A1 publication Critical patent/WO2015125604A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

Definitions

  • the present invention relates to an X-ray analyzer and a computer program for analyzing the intensity distribution of X-rays generated from a sample.
  • X-ray analysis is an element contained in a sample from the spectrum of characteristic X-rays or fluorescent X-rays by irradiating the sample with radiation such as electron beams or X-rays, detecting X-rays generated from the sample with an X-ray detector.
  • This is an analysis method for performing qualitative analysis or quantitative analysis. Further, by detecting X-rays from the sample while scanning the sample with a radiation beam, the intensity distribution of characteristic X-rays or fluorescent X-rays caused by a specific element can be examined. The intensity of the characteristic X-ray or fluorescent X-ray caused by a specific element corresponds to the amount of the specific element.
  • an X-ray analyzer using an electron beam may be incorporated in an electron microscope.
  • the intensity distribution of characteristic X-rays or fluorescent X-rays detected by the X-ray analyzer includes the influence of intensity change due to the shape of the sample, and an accurate element concentration distribution may not be obtained. In such a case, it was necessary to change the direction of observing the sample by a method such as rotating the sample.
  • Patent Document 1 discloses an X-ray analyzer using two X-ray detectors. A correction coefficient for correcting the added value of the X-ray intensities detected by the two X-ray detectors is obtained in advance from the intensity ratio of the X-rays incident on the two X-ray detectors. There is also disclosed a technique for reducing the influence of the shape of the sample by correcting the X-ray intensity using.
  • a plurality of X-ray intensity distributions can be obtained for one sample.
  • Any X-ray intensity distribution includes the influence of intensity change due to the shape of the sample. If the observation direction is different, the intensity change due to the shape of the sample is also different, so the X-ray intensity distributions do not match. For this reason, none of the plurality of X-ray intensity distributions corresponds to an accurate element concentration distribution. Therefore, a method for deriving an element concentration distribution from a plurality of X-ray intensity distributions is required.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to correct the X-ray intensity detected by a plurality of X-ray detectors by a simple calculation method, thereby obtaining the shape of the sample. It is an object to provide an X-ray analysis apparatus and a computer program that can obtain an X-ray intensity distribution with reduced influence by the above.
  • An X-ray analysis apparatus includes a scanning unit that scans a sample with a beam, and a plurality of X-ray detectors that detect X-rays generated from a portion irradiated with the beam by the scanning unit.
  • the X-ray analysis apparatus comprising: a plurality of X-ray intensities detected by the plurality of X-ray detectors for each of a plurality of portions irradiated with a beam on the sample by scanning by the scanning unit.
  • a calculation unit that calculates a weighted addition value obtained by multiplying each X-ray intensity by a weighting factor that simply increases with respect to the magnitude of the relative ratio, and each portion irradiated with the beam on the sample,
  • An intensity distribution generation unit that generates a corrected intensity distribution of X-rays by associating the weighted addition value calculated by the calculation unit with respect to the portion.
  • the X-ray analysis apparatus is characterized in that the calculation unit is configured such that a value obtained by dividing each X-ray intensity by the sum of the plurality of X-ray intensities is used as the weighting factor.
  • the calculation unit sets the weighting coefficient for the maximum X-ray intensity among the plurality of X-ray intensities to 1 and sets the weighting coefficient for other X-ray intensities to 0. It is configured.
  • the calculation unit calculates an integral value of a specific energy range or wavelength range of X-rays detected by each X-ray detector over the plurality of X-ray detectors.
  • a value obtained by dividing the value by the added value is configured as the weighting factor.
  • the calculation unit calculates the weighted addition value for a plurality of X-ray intensities detected by the plurality of X-ray detectors for X-rays caused by a specific element.
  • the intensity distribution generation unit is configured to generate an X-ray intensity distribution caused by the specific element.
  • An X-ray analyzer includes an irradiation unit that irradiates a sample with a beam, and a plurality of X-ray detectors that detect X-rays generated from the portion irradiated with the beam on the sample.
  • a calculation unit that calculates an added value, and a spectrum generation unit that generates a spectrum using the weighted addition value calculated by the calculation unit for each of X-ray energy or wavelength as an X-ray intensity. .
  • the computer program according to the present invention is a computer program for causing a computer to analyze the results of detecting X-rays generated from a sample scanned with a beam by a plurality of X-ray detectors. For each of the plurality of portions, a plurality of X-ray intensities detected by the plurality of X-ray detectors are set to each X-ray intensity with a weight coefficient that simply increases with respect to the relative ratio of each X-ray intensity. X-ray intensity distribution by associating a weighted addition value calculated for each part with a step of causing the computer to calculate a weighted addition value obtained by multiplication and adding each part irradiated with the beam on the sample Generating.
  • an X-ray analyzer detects X-rays generated from a sample irradiated with a beam with a plurality of X-ray detectors, and sets a weighting factor that simply increases with respect to the relative ratio of X-ray intensity.
  • a weighted addition value obtained by adding a plurality of X-ray intensities after multiplication is calculated.
  • the X-ray analyzer generates an X-ray intensity distribution using the weighted addition value as the X-ray intensity at each portion on the sample.
  • the weighted addition value of the X-ray intensity has an effect that the contribution of a relatively large intensity among the X-ray intensities detected by a plurality of X-ray detectors becomes large, and the X-ray attenuates according to the shape of the sample. Is reduced.
  • the X-ray analyzer calculates a weighted addition value of X-ray intensity using a value obtained by dividing each X-ray intensity by the sum of X-ray intensities detected by a plurality of X-ray detectors as a weighting factor. .
  • a weighting factor As the X-ray intensity at each part of the sample, an X-ray intensity with a large contribution of a relatively large intensity among the X-ray intensities detected by a plurality of X-ray detectors is generated. Is done.
  • the X-ray analyzer sets the weighting coefficient for the maximum X-ray intensity among the X-ray intensities detected by the plurality of X-ray detectors to 1, and sets the weighting coefficient for the other X-ray intensities to 0. A weighted addition value of the X-ray intensity is calculated. Thereby, the X-ray analyzer sets the maximum value among the X-ray intensities detected by the plurality of X-ray detectors as the intensity of the characteristic X-ray generated from the sample.
  • the X-ray analyzing apparatus divides each integral value by a value obtained by adding the integral values of the X-rays detected by the respective X-ray detectors over a plurality of X-ray detectors.
  • Get. Integration is performed over a specific energy or wavelength range.
  • the integration range is, for example, a range of all energy or all wavelengths in which X-rays can be detected, or a range including energy or wavelength of characteristic X-rays caused by a specific element.
  • the X-ray analyzer generates a characteristic X-ray intensity distribution corresponding to a specific element. Thereby, the concentration distribution on the sample of a specific element is obtained.
  • the X-ray analyzer generates a spectrum composed of a weighted addition value of the calculated X-ray intensity. Thereby, the X-ray spectrum which reduced the influence by the shape of a sample is obtained.
  • the X-ray analyzer can easily generate an intensity distribution of characteristic X-rays that is less affected by the shape of the sample. For this reason, the X-ray analyzer can obtain an accurate concentration distribution of elements contained in the sample, and the present invention has excellent effects.
  • FIG. 1 is a block diagram showing a configuration of an X-ray analysis apparatus according to Embodiment 1.
  • FIG. It is a typical top view of a X-ray detection part. It is a block diagram which shows the internal structure of a control apparatus. It is a schematic diagram which shows the example of intensity distribution of the characteristic X-ray which each X-ray detector detected. It is a flowchart which shows the procedure of the process which a control apparatus performs. It is a schematic diagram which shows the example of intensity distribution of the characteristic X-ray produced
  • FIG. 10 is a block diagram showing a configuration of an X-ray analyzer according to a fifth embodiment.
  • FIG. 1 is a block diagram showing the configuration of the X-ray analyzer according to the first embodiment.
  • the X-ray analyzer includes an electron gun 41 that irradiates a sample 5 with an electron beam (beam), an electron lens system 42, and a sample stage 43 on which the sample 5 is placed.
  • the electron lens system 42 includes a scanning coil that changes the direction of the electron beam.
  • the electron gun 41 and the electron lens system 42 correspond to the scanning unit in the present invention.
  • the electron gun 41 and the electron lens system 42 are connected to a control device 3 that controls the entire X-ray analyzer.
  • the X-ray detector 1 is disposed between the electron lens system 42 and the sample stage 43.
  • the X-ray detector 1 is formed in a shape provided with a hole for passing an electron beam.
  • FIG. 1 shows a cross section of the X-ray detector 1.
  • the X-ray detection unit 1 includes a plurality of X-ray detectors each using an SDD (Silicon Drift Detector).
  • FIG. 2 is a schematic plan view of the X-ray detection unit 1.
  • a plurality of X-ray detectors 11, 12, 13, and 14 are mounted on a substrate on which a hole 15 is formed, and the X-ray detectors 11, 12, 13, and 14 are disposed surrounding the hole 15. It becomes the composition.
  • the X-ray detection unit 1 is disposed at a position where the electron beam passes through the hole 15, and the X-ray incident surface intersects the electron beam axis.
  • the X-ray detection unit 1 is attached with a cooling mechanism (not shown) such as a Peltier element.
  • a cooling mechanism such as a Peltier element.
  • the X-ray detection unit 1 In a state where the sample 5 is placed on the sample stage 43, the X-ray detection unit 1 is disposed in front of the surface of the sample 5 that is irradiated with the electron beam.
  • the electron gun 41 emits an electron beam
  • the electron lens system 42 determines the direction of the electron beam
  • the electron beam passes through the hole 15 of the X-ray detection unit 1 on the sample table 43.
  • the sample 5 is irradiated.
  • a characteristic X-ray is generated in the portion irradiated with the electron beam on the sample 5.
  • Characteristic X-rays are detected by X-ray detectors 11, 12, 13, and 14 included in the X-ray detector 1. That is, characteristic X-rays simultaneously generated from the same portion on the sample 5 are detected independently by a plurality of X-ray detectors.
  • the electron beam is indicated by a solid line arrow
  • the characteristic X-ray is indicated by a broken line arrow.
  • the X-ray detectors 11, 12, 13, and 14 output a signal proportional to the detected characteristic X-ray energy.
  • the electron gun 41, the electron lens system 42, the X-ray detector 1 and the sample stage 43 are housed in a vacuum box (not shown).
  • the vacuum box is made of a material that shields electron beams and X-rays, and the inside of the vacuum box is kept in a vacuum during the operation of the X-ray analyzer.
  • Each of the X-ray detectors 11, 12, 13, and 14 is connected to a signal processing unit 2 that processes the output signal.
  • the signal processing unit 2 receives signals output from the X-ray detectors 11, 12, 13, and 14, counts the signals by value, and associates the characteristic X-ray energy indicated by the signal value with the count number. Processing to acquire an X-ray spectrum is performed. The count number associated with a certain energy is the intensity of characteristic X-rays having that energy.
  • the signal processing unit 2 is connected to the control device 3.
  • the electron beam scans the sample 5 by the electron lens system 42 sequentially changing the direction of the electron beam. As the electron beam scans the sample 5, the electron beam is sequentially irradiated to each portion in the scanning region on the sample 5.
  • the characteristic X-rays generated from the portion irradiated with the electron beam on the sample 5 are sequentially detected by the X-ray detectors 11, 12, 13, and 14.
  • the signal processing unit 2 sequentially generates a spectrum of characteristic X-rays generated at a plurality of portions irradiated with the electron beam on the sample 5 by sequentially performing signal processing.
  • the signal processing unit 2 individually generates a spectrum of characteristic X-rays detected by the X-ray detectors 11, 12, 13, and 14. That is, a plurality of spectra of characteristic X-rays are generated for each of a plurality of portions irradiated with an electron beam on the sample 5.
  • the signal processing unit 2 sequentially outputs the generated characteristic X-ray spectrum data to the control device 3.
  • FIG. 3 is a block diagram showing the internal configuration of the control device 3.
  • the control device 3 is configured using a computer such as a personal computer.
  • the control device 3 includes a CPU (Central Processing Unit) 31 for performing calculations, a RAM (Random Access Memory) 32 for storing temporary data generated along with the calculations, and a drive for reading information from a recording medium 6 such as an optical disk.
  • Unit 33 and a non-volatile storage unit 34 such as a hard disk.
  • the control device 3 includes an operation unit 35 such as a keyboard or a mouse that accepts a user operation, a display unit 36 such as a liquid crystal display, and an interface unit 37.
  • An electron gun 41, an electron lens system 42, and the signal processing unit 2 are connected to the interface unit 37.
  • the CPU 31 causes the drive unit 33 to read the computer program 61 recorded on the recording medium 6 and stores the read computer program 61 in the storage unit 34.
  • the computer program 61 is loaded from the storage unit 34 to the RAM 32 as necessary, and the CPU 31 executes processing necessary for the X-ray analyzer according to the loaded computer program 61.
  • the computer program 61 may be downloaded from outside the control device 3.
  • the control device 3 receives the characteristic X-ray spectrum data output from the signal processing unit 2 by the interface unit 37, and associates the position of the portion irradiated with the electron beam on the sample 5 with the characteristic X-ray spectrum. Data is stored in the storage unit 34. Further, the control device 3 controls the operation of the electron lens system 42 connected to the interface unit 37.
  • the control device 3 associates the characteristic X-ray spectrum data detected by the X-ray detectors 11, 12, 13, and 14 with each portion on the sample 5. Is stored in the storage unit 34. It is also possible to obtain the intensity distribution on the sample 5 of the characteristic X-rays detected by the X-ray detectors 11, 12, 13, and 14 from the stored data. However, the characteristic X-ray intensity detected by each X-ray detector is influenced by the shape of the sample 5. For this reason, the intensity distribution of characteristic X-rays detected by individual X-ray detectors does not correspond to the concentration distribution of elements in the sample 5.
  • the characteristic X-ray intensity is affected by the detection efficiency of each X-ray detector.
  • the detection efficiencies of the respective X-ray detectors are generally different from each other due to various factors. Factors that cause different detection efficiencies include, for example, the difference in detection solid angle determined from the effective area of the X-ray detector, the distance from the sample to the X-ray detector, and the incident angle of the characteristic X-ray from the sample to the X-ray detector. There is. Also, for example, the difference in detection sensitivity of the X-ray detector due to the difference in the material and thickness of the X-ray entrance surface of the X-ray detector or the X-ray incident surface of the X-ray detector.
  • the difference in detection efficiency of each X-ray detector can be corrected with a correction coefficient.
  • the correction coefficient is predetermined theoretically or experimentally and is stored in the storage unit 34.
  • the control device 3 stores, in the storage unit 34, characteristic X-ray spectrum data in which the influence of the detection efficiency of each X-ray detector is corrected.
  • FIG. 4 is a schematic diagram showing an example of the characteristic X-ray intensity distribution detected by each X-ray detector. It is assumed that the sample 5 has a spherical shape, and characteristic X-rays having the same intensity are generated from each part on the sample 5.
  • FIG. 4A shows the intensity distribution of characteristic X-rays detected by the X-ray detector 11. The dark hatched portions in FIGS. 4A to 4D indicate that the intensity of the detected characteristic X-ray is small.
  • the X-ray detector 11 detects characteristic X-rays from the sample 5 at a position obliquely above the sample 5.
  • the intensity of the characteristic X-rays from the portions hidden on the shadow of other portions when viewed from the X-ray detector 11 in each portion on the sample 5 is attenuated.
  • the lower right portion of the spherical sample 5 is detected by X-ray detection.
  • Hidden behind other parts as seen from the vessel 11. Therefore, as shown in FIG. 4A, in the intensity distribution of the characteristic X-ray detected by the X-ray detector 11, the characteristic X-ray intensity in the lower right part is smaller than in the other parts.
  • FIG. 4B shows the characteristic X-ray intensity distribution detected by the X-ray detector 12.
  • the X-ray detector 12 is located at the lower left position with respect to the sample 5, so as shown in FIG. 4B, in the intensity distribution of the characteristic X-ray detected by the X-ray detector 12, The characteristic X-ray intensity in the upper right part is smaller than in other parts.
  • FIG. 4C shows the characteristic X-ray intensity distribution detected by the X-ray detector 13.
  • the X-ray detector 13 is located at the upper right position with respect to the sample 5, so as shown in FIG.
  • the intensity distribution of the characteristic X-ray detected by the X-ray detector 13 is The characteristic X-ray intensity in the lower left part is smaller than in other parts.
  • FIG. 4D shows the intensity distribution of characteristic X-rays detected by the X-ray detector 14. In the plan view shown in FIG. 2, the X-ray detector 14 is located at the lower right position with respect to the sample 5. Therefore, as shown in FIG. 4D, the intensity distribution of the characteristic X-ray detected by the X-ray detector 14 is The characteristic X-ray intensity in the upper left part is smaller than in the other parts.
  • the control device 3 performs a calculation for correcting the intensity distribution of the characteristic X-ray so as to remove the influence due to the shape of the sample 5.
  • the position of each part irradiated with the electron beam on the sample 5 is indicated by (x, y).
  • N be the number of X-ray detectors
  • I i (x, y) be the intensity at which the characteristic X-ray generated at the position (x, y) is detected by the i-th X-ray detector.
  • I i (x, y) is a count number of characteristic X-rays, and is obtained for each energy.
  • N 4.
  • the control device 3 calculates a weighted addition value I (x, y) of characteristic X-ray intensities detected by a plurality of X-ray detectors by calculation according to the following equation (1).
  • w i (x, y) is a weighting factor for each X-ray detector.
  • the weighting factor w i (x, y) is the magnitude of the relative ratio of the detected characteristic X-ray intensity for each of a plurality of X-ray detectors that have detected the characteristic X-ray generated at the position (x, y). It is determined to increase simply.
  • the weight coefficient w i (x, y) is expressed by the following equation (2).
  • w i (x, y) is a sum of intensities obtained by detecting a characteristic X-ray generated at the position (x, y) with a plurality of X-ray detectors. This is a value obtained by dividing the intensity of the characteristic X-ray detected by the line detector.
  • the weighted addition value I (x, y) of the characteristic X-ray intensity measured by a plurality of X-ray detectors has a large contribution of relatively large intensity and a small contribution of small intensity, It is the characteristic X-ray intensity in which the influence of the shape is reduced.
  • FIG. 5 is a flowchart showing a procedure of processing executed by the control device 3.
  • the CPU 31 loads the computer program 61 from the storage unit 34 to the RAM 32 and executes the following processing according to the loaded computer program 61.
  • the control device 3 controls the electron gun 41 and the electron lens system 42 and scans the sample 5 with the electron beam, while detecting the characteristic X-ray spectrum data detected by the X-ray detectors 11, 12, 13, and 14. Are associated with each part on the sample 5 and stored in the storage unit 34 (S1).
  • the CPU 31 reads out the characteristic X-ray spectrum data stored in the storage unit 34 to the RAM 32 and uses the equations (1) and (2) to detect the characteristic X detected by the X-ray detectors 11, 12, 13, and 14.
  • the weighted addition value I (x, y) of the line intensity is calculated (S2).
  • the CPU 31 calculates a weighted addition value I (x, y) of the characteristic X-ray intensity for each energy included in the spectrum of the characteristic X-ray.
  • the CPU 31 associates the characteristic X-ray energy with the calculated I (x, y), and generates a characteristic X-ray spectrum in which the influence of the shape of the sample 5 is reduced.
  • the CPU 31 weights the characteristic X-ray intensity detected by the X-ray detectors 11, 12, 13, and 14 for each portion irradiated with the electron beam on the sample 5.
  • y) is calculated to generate a characteristic X-ray spectrum in which the influence of the shape of the sample 5 is reduced.
  • the CPU 31 generates the intensity distribution of the characteristic X-rays generated on the sample 5 by using the weighted addition value I (x, y) of the characteristic X-ray intensity as the intensity of the characteristic X-rays generated from the sample 5. (S3). Specifically, the CPU 31 associates the position of each portion irradiated with the electron beam on the sample 5 with the weighted addition value I (x, y) of the calculated characteristic X-ray intensity to thereby obtain the characteristic X-ray. Generate an intensity distribution of In S ⁇ b> 3, the CPU 31 associates the position of each portion on the sample 5 with the spectrum of the characteristic X-ray to generate a spectral distribution of the characteristic X-ray.
  • the CPU 31 associates the position of each portion on the sample 5 with I (x, y) of the specific energy included in the spectrum of the characteristic X-ray, and calculates the intensity distribution of the characteristic X-ray having the specific energy. It can also be generated.
  • the storage unit 34 stores data in which a specific element and characteristic X-ray energy caused by the element are associated with each other, and the CPU 31 calculates the intensity distribution of the characteristic X-ray having energy corresponding to the specific element. It may be generated.
  • the intensity distribution of the characteristic X-ray obtained in S3 is an intensity distribution corrected so as to reduce the influence of the shape of the sample 5.
  • the CPU 31 calculates the element concentration from the energy I (x, y) corresponding to the specific element, and generates an element concentration distribution in which the position of each part on the sample 5 is associated with the concentration of the specific element. May be. Further, the CPU 31 calculates the weighted addition value I (x, y) of the characteristic X-ray intensity only for the energy of the characteristic X-ray caused by the specific element, and the intensity distribution of the characteristic X-ray caused by the specific element Alternatively, a concentration distribution of a specific element may be generated. The CPU 31 can also display an image of the generated characteristic X-ray intensity distribution or element concentration distribution on the display unit 36. The CPU 31 stores data representing the intensity distribution or element concentration distribution of characteristic X-rays in the storage unit 34 and ends the process.
  • the X-ray analyzer detects characteristic X-rays generated from each part of the sample 5 irradiated with the electron beam by the X-ray detectors 11, 12, 13, and 14.
  • the weighted addition value I (x, y) of the characteristic X-ray intensity is calculated.
  • the X-ray analyzer generates the intensity distribution of the characteristic X-rays generated from the sample 5 by using the calculated weighted addition value I (x, y) as the characteristic X-ray intensity in each part of the sample 5.
  • the weighted addition value I (x, y) of the characteristic X-ray intensity greatly contributes to a relatively large intensity among the characteristic X-ray intensities detected by a plurality of X-ray detectors.
  • the reason why the intensity of the characteristic X-rays generated from the same part of the sample 5 detected by a plurality of X-ray detectors is different is that the attenuation of the characteristic X-rays due to the shape of the sample 5 differs depending on the position of the X-ray detector. is there. Since the relatively large intensity is close to the intensity of the characteristic X-rays without attenuation, the weighted addition value I (x, y) of the characteristic X-ray intensity has a large contribution of relatively large intensity and a small contribution of relatively small intensity. ) Is the characteristic X-ray intensity in which the influence of the shape of the sample 5 is reduced.
  • the X-ray analyzer generates a characteristic X-ray intensity distribution generated from the sample 5 using the weighted addition value I (x, y) as the characteristic X-ray intensity, thereby reducing the influence of the shape of the sample 5 An X-ray intensity distribution can be generated.
  • FIG. 6 is a schematic diagram showing an example of the intensity distribution of the characteristic X-ray generated in S3.
  • FIG. 6 shows the intensity distribution of characteristic X-rays generated by reducing the influence of the shape of the sample 5 from the characteristic X-ray detection results shown in FIGS. 4A to 4D. It is shown that there is no portion where the intensity of the characteristic X-ray is reduced due to the shape of the sample 5, and the characteristic X-ray is generated from each part on the sample 5 with a uniform intensity.
  • the calculation method of the weighted addition value I (x, y) of the characteristic X-ray intensity according to the present embodiment is a simple calculation method, and may be complicated even if the number of X-ray detectors increases. No. Therefore, even when the number of X-ray detectors is large, the X-ray analyzer can easily obtain an X-ray intensity distribution in which the influence of the sample shape is reduced.
  • the X-ray analysis apparatus can obtain an X-ray intensity distribution in which the influence of the shape of the sample is sufficiently reduced by using a large number of X-ray detectors.
  • the X-ray analysis apparatus can obtain an accurate concentration distribution of elements contained in the sample 5.
  • the X-ray analysis apparatus is not limited to the form in which the image of the characteristic X-ray intensity distribution or the element concentration distribution is displayed on the display unit 36, but may be in the form of displaying an image on an external display apparatus.
  • the signal processing unit 2 may be configured to execute a part of the processing of the control device 3 described in the present embodiment, and the control device 3 may include the signal processing unit 2 described in the present embodiment. The form which performs a part of process may be sufficient.
  • the X-ray analysis apparatus may have a form in which the signal processing unit 2 and the control device 3 are integrated.
  • the X-ray analyzer may be in a form incorporated in an SEM (scanning electron microscope) or TEM (transmission electron microscope).
  • the X-ray analyzer includes a detector for detecting electrons such as reflected electrons, secondary electrons, or transmitted electrons, and a signal processing unit for processing signals from the detector, for SEM or TEM. It is done.
  • the configuration of the X-ray analyzer according to the second embodiment is the same as that of the first embodiment.
  • the X-ray analyzer calculates the weighted addition value I (x, y) of the characteristic X-ray intensity by a method different from that in the first embodiment.
  • the X-ray analyzer irradiates the sample 5 with an electron beam and detects characteristic X-rays generated from each part of the sample 5 with the X-ray detectors 11, 12, 13, and 14.
  • a spectrum of characteristic X-rays is generated by the signal processing unit 2.
  • the control device 3 executes the processes of S1 to S3 as in the first embodiment. Among these processes, in S2, the CPU 31 performs calculation by another method without using the equation (2) in order to calculate the weighting coefficient w i (x, y).
  • the CPU 31 sets the weight coefficient for the maximum intensity to 1 among the intensities I i (x, y) obtained by detecting the characteristic X-rays generated at the position (x, y) on the sample 5 with a plurality of X-ray detectors.
  • the CPU 31 calculates the weighted addition value I (x, y) of the characteristic X-ray intensity in this way.
  • the X-ray analyzer is a characteristic generated from the sample 5 with the maximum value of the characteristic X-ray intensities detected by the X-ray detectors 11, 12, 13, and 14.
  • the intensity distribution of the characteristic X-ray generated on the sample 5 is generated with the X-ray intensity.
  • the maximum value of the characteristic X-ray intensities detected by the plurality of X-ray detectors has the minimum attenuation of the characteristic X-ray due to the influence of the shape of the sample 5. By setting this maximum value as the characteristic X-ray intensity, the X-ray analyzer can obtain characteristic X-ray intensity in which the influence of the shape of the sample 5 is reduced as much as possible.
  • the X-ray analyzer can generate an intensity distribution of the characteristic X-rays obtained, thereby generating an intensity distribution of the characteristic X-rays in which the influence of the shape of the sample 5 is reduced as much as possible.
  • the X-ray analyzer can obtain an accurate concentration distribution of elements contained in the sample 5 as in the first embodiment.
  • the characteristic X-ray intensity detected by a plurality of X-ray detectors is not actually added. Since the characteristic X-ray intensity is not smoothed by the addition, the SN ratio of the characteristic X-ray intensity distribution and the element concentration distribution is deteriorated as compared with the first embodiment. However, since addition, division, and multiplication of the characteristic X-ray intensity necessary for the first embodiment are unnecessary, the calculation load of the control device 3 is reduced in this embodiment. Therefore, in this embodiment, the X-ray analysis apparatus can be realized with smaller calculation resources.
  • the X-ray analysis apparatus sets a weighting factor for a predetermined number of characteristic X-ray intensities having relatively large values among characteristic X-ray intensities detected by a plurality of X-ray detectors as a positive value, and other characteristics.
  • the weighted addition value I (x, y) of the characteristic X-ray intensity may be calculated by setting the weighting coefficient for the X-ray intensity to 0.
  • the configuration of the X-ray analyzer according to the third embodiment is the same as that of the first embodiment.
  • the X-ray analyzer irradiates the sample 5 with an electron beam and detects characteristic X-rays generated from each part of the sample 5 with the X-ray detectors 11, 12, 13, and 14.
  • a spectrum of characteristic X-rays is generated by the signal processing unit 2.
  • the control device 3 executes the processes of S1 to S3 as in the first embodiment. Among these processes, in S2, the CPU 31 does not use the equation (2) to calculate the weighting factor w i (x, y), but instead uses the weighting factor w i ( x, y) is used.
  • E is the characteristic X-ray energy
  • Emin is the lower limit value of the characteristic X-ray energy that can be detected by the X-ray detectors 11, 12, 13, and 14, and Emax is the upper limit value.
  • S i (x, y) is the sum of the counts over the entire energy of the characteristic X-ray.
  • the CPU 31 calculates the weighting coefficient w i (x, y) using the equations (3) and (4), and uses the equation (1) to add the weighted addition value I (x , Y).
  • the CPU 31 performs the same process as in the first embodiment, and generates a characteristic X-ray intensity distribution.
  • the X-ray analyzer can obtain an accurate concentration distribution of elements contained in the sample 5 as in the first embodiment. Also in the present embodiment, the X-ray analyzer can generate a characteristic X-ray intensity distribution in which the influence of the shape of the sample 5 is reduced as much as possible. A concentration distribution can be obtained.
  • the weight coefficient w i (x, y) is calculated from the sum of the count numbers over the entire energy of the characteristic X-ray. As a result, the weighting coefficient w i (x, y) is the same for any energy.
  • I (x, y) of the characteristic X-ray intensity it is not necessary to calculate the weighting coefficient w i (x, y) for each energy included in the spectrum of the characteristic X-ray. The amount of calculation required is reduced.
  • the variation of the weighted addition value I (x, y) of the characteristic X-ray intensity is smaller than when the weighting coefficient is calculated for each energy, and the SN distribution of the characteristic X-ray intensity distribution and the element concentration distribution is reduced.
  • the ratio is improved.
  • the configuration of the X-ray analyzer according to the fourth embodiment is the same as that of the first embodiment.
  • the X-ray count number having a certain energy is set as the X-ray intensity.
  • the X-ray analyzer sets the X-ray count number in a specific energy range. The integrated value is taken as the X-ray intensity.
  • the X-ray analyzer irradiates the sample 5 with an electron beam and detects characteristic X-rays generated from each part of the sample 5 with the X-ray detectors 11, 12, 13, and 14.
  • a spectrum of characteristic X-rays is generated by the signal processing unit 2.
  • R i (x, y) be the intensity at which the characteristic X-ray generated at the position (x, y) is detected by the i-th X-ray detector.
  • R i (x, y) is a value obtained by integrating the count number of characteristic X-rays within a specific energy range.
  • R i (x, y) is expressed by the following equation (5).
  • the integration range of the formula (5) is a specific energy range including the energy of characteristic X-rays caused by specific elements.
  • E1 is a lower limit value of energy included in a specific energy range
  • E2 is an upper limit value.
  • An energy range corresponding to a specific element is a so-called ROI (region of interest). In the spectrum of characteristic X-rays, a peak corresponding to a specific element is included in the range of ROI.
  • a plurality of ROIs corresponding to a specific element can be set, and the integration range of equation (5) may include a plurality of ROIs.
  • the control device 3 executes the processes of S1 to S3 as in the first embodiment. Among these processes, in S2, the control device 3 calculates a weighted addition value R (x, y) of characteristic X-ray intensities detected by a plurality of X-ray detectors by calculation according to the following equation (6). calculate.
  • the weighting factor w i (x, y) for each X-ray detector in the present embodiment is expressed by the following equation (7).
  • the CPU 31 calculates the weighting coefficient w i (x, y) using the equations (5) and (7), and uses the equation (6) to add the weighted addition value R (x, y) of the characteristic X-ray intensity. Calculate When there are a plurality of specific elements for which the element concentration distribution is to be generated, the CPU 31 calculates the weighting coefficient w i (x, y) for the ROI of each element, and the weighted addition value R of the characteristic X-ray intensity. Calculate (x, y). In S3, the CPU 31 performs the same process as in the first embodiment, and generates a characteristic X-ray intensity distribution. In addition, the X-ray analyzer can obtain an accurate concentration distribution of elements contained in the sample 5 as in the first embodiment. Also in the present embodiment, the X-ray analyzer can generate a characteristic X-ray intensity distribution in which the influence of the shape of the sample 5 is reduced as much as possible. A concentration distribution can be obtained.
  • the value obtained by integrating the count number of characteristic X-rays within the ROI range corresponding to a specific element is set as the intensity of characteristic X-rays attributed to the specific element, and weighted addition is performed.
  • the value R (x, y) is calculated. Since the value obtained by integrating the count number within the ROI range is larger than the count number for each energy, the variation of the weighted addition value R (x, y) of the characteristic X-ray intensity is reduced. The SN ratio of the characteristic X-ray intensity distribution and the element concentration distribution is improved. Further, the weighted addition value of the weighting coefficient and the characteristic X-ray intensity may be calculated for the ROI corresponding to each element, and it is not necessary to calculate each energy one by one, so that the necessary calculation amount is reduced.
  • the CPU 31 may calculate the weighting coefficient w i (x, y) using the equation (3) instead of the equation (7) in S2. In this case, the weighting factors w i (x, y) are the same, and the required calculation amount is reduced. Further, in S2, the CPU 31 sets the integration range when calculating R i (x, y) for use in the calculation of the expression (7) as a range including a plurality of ROIs corresponding to a plurality of elements. The coefficient w i (x, y) may be calculated.
  • the weighting coefficients w i (x, y) are the same, and the elements other than the plurality of elements for which the element concentration distribution should be generated are compared with the case where the weighting coefficients are calculated using the equation (3). Can be reduced.
  • FIG. 7 is a block diagram showing the configuration of the X-ray analyzer according to the fifth embodiment.
  • the X-ray analyzer does not include the electron gun 41 and the electron lens system 42 but includes an X-ray source 44 and a drive unit 45 that moves the sample stage 43 in the horizontal direction.
  • the X-ray source 44 is configured using an X-ray tube.
  • the X-ray source 44 irradiates the sample 5 on the sample stage 43 with an X-ray beam.
  • the X-ray detection unit 1 is disposed between the X-ray source 44 and the sample stage 43.
  • the configuration of the X-ray detection unit 1 is the same as that of the first embodiment.
  • X-ray detectors 11, 12, 13, and 14 included in the X-ray detection unit 1 detect fluorescent X-rays generated from the sample 5 by irradiation with an X-ray beam.
  • the signal processing unit 2 acquires a spectrum of fluorescent X-rays based on signals output from the X-ray detectors 11, 12, 13, and 14.
  • the control device 3 controls the operation of the driving unit 45 to move the sample stage 43 in the horizontal plane direction, and irradiate the sample 5 on the moved sample stage 43 with the X-ray beam, whereby the sample 5 is irradiated with the X-ray beam.
  • the process of scanning is executed.
  • the X-ray source 44 and the drive unit 45 correspond to the scanning unit in the present invention.
  • the signal processing unit 2 generates a plurality of spectra of fluorescent X-rays for each portion on the sample 5 irradiated with the X-ray boom.
  • the X-ray analyzer may be in the form of an X-ray optical system (not shown) for guiding the X-ray beam to the sample 5.
  • the X-ray analyzer may be in a form including an X-ray source other than the X-ray source 44 using an X-ray tube, such as an X-ray source using an accelerator.
  • the control device 3 executes the same processing as S1 to S3 as in the first embodiment. That is, the control device 3 stores the fluorescent X-ray spectrum data detected by the X-ray detectors 11, 12, 13, and 14 in the storage unit 34 in association with each part on the sample 5.
  • the CPU 31 calculates a weighted addition value of the fluorescent X-ray intensity detected by the X-ray detectors 11, 12, 13, and 14. At this time, the CPU 31 calculates the weighted addition value I (x, y) of the fluorescent X-ray intensity by the same calculation method as in the first to third embodiments, or the fluorescence by the same calculation method as in the fourth embodiment.
  • a weighted addition value R (x, y) of the X-ray intensity is calculated.
  • the CPU 31 generates an intensity distribution of the fluorescent X-rays generated on the sample 5 using the weighted addition value of the fluorescent X-ray intensity as the intensity of the fluorescent X-rays generated from the sample 5. Specifically, the CPU 31 generates an intensity distribution of fluorescent X-rays by associating the position of each portion irradiated with the X-ray beam on the sample 5 with a weighted addition value of the calculated fluorescent X-ray intensity. To do. At this time, the CPU 31 can generate a spectral distribution of fluorescent X-rays. The CPU 31 can also generate an intensity distribution of fluorescent X-rays having specific energy.
  • the storage unit 34 stores data in which a specific element is associated with fluorescent X-ray energy caused by the element, and the CPU 31 generates fluorescent X-ray intensity having energy corresponding to the specific element. May be. Further, the CPU 31 may calculate the element concentration from the fluorescent X-ray intensity having energy corresponding to the specific element, and generate the concentration distribution of the specific element included in the sample 5. The CPU 31 can also display an image of the generated fluorescent X-ray intensity distribution or element concentration distribution on the display unit 36. The CPU 31 stores data representing the fluorescent X-ray intensity distribution or element concentration distribution in the storage unit 34.
  • the X-ray analyzer can obtain the fluorescent X-ray intensity with reduced influence of the shape of the sample 5 as in the first to fourth embodiments. Similarly, the X-ray analyzer can generate an intensity distribution of fluorescent X-rays that is less influenced by the shape of the sample 5 by generating an intensity distribution of the obtained fluorescent X-rays. Similarly, the X-ray analyzer can obtain an accurate concentration distribution of elements contained in the sample 5.
  • an X-ray intensity distribution is generated after generating X-ray spectra detected by a plurality of X-ray detectors.
  • An X-ray intensity distribution may be generated without generating an X-ray spectrum.
  • the X-ray analyzer may be configured to generate an intensity distribution of only X-rays having specific energy.
  • the X-ray intensity weighted addition value is calculated after the scanning of the sample 5 is completed. 5 may be a form in which a weighted addition value of the intensity of X-rays generated from each point on 5 is calculated.
  • the embodiment using the electron beam is shown in the first to fourth embodiments
  • the embodiment using the X-ray beam is shown in the fifth embodiment.
  • Energy rays may be used.
  • the X-ray analyzer may be configured to irradiate the sample 5 with a beam of charged particles.
  • the X-ray analyzer can determine the weighting coefficient by a method other than the methods shown in the first to fifth embodiments.
  • the weighting factor is determined so as to simply increase with respect to the magnitude of the relative ratio of the detected characteristic X-ray intensity for each of the plurality of X-ray detectors. Since it is a simple increase, when the intensity of the characteristic X-ray detected by one X-ray detector is larger than the intensity of the characteristic X-ray detected by another X-ray detector, the weighting factor for the one X-ray detector May be greater than or equal to the weighting factor of other X-ray detectors. For example, the weighting factor may be increased stepwise as the relative intensity ratio increases.
  • the weighting coefficient is the same for one X-ray detector as compared to another X-ray detector having a smaller relative intensity ratio.
  • the weighting factor may be larger.
  • the X-ray detectors 11, 12, 13, and 14 are semiconductor detectors using SDD. However, the X-ray detectors 11, 12, 13, and 14 are SDD. Other than the semiconductor detector, a detector other than the semiconductor detector may be used.
  • an energy dispersion type in which X-rays are separated and detected by energy is shown.
  • an X-ray analyzer is a wavelength dispersion type in which X-rays are separated and detected by wavelength. It may be a form. In this form, the X-ray analyzer generates a spectrum in which the wavelength of the X-ray is associated with the count number, and generates an X-ray intensity distribution having a wavelength corresponding to a specific element.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Cette invention porte sur un dispositif d'analyse à rayons X et sur un programme informatique, lesquels rendent possible d'obtenir une répartition d'intensités de rayons X dans laquelle l'impact de la géométrie du spécimen est réduit. Ledit dispositif d'analyse à rayons X utilise une pluralité de détecteurs de rayons X pour détecter des rayons X à partir de chaque partie d'un spécimen (5) exposé à un faisceau, et calcule des sommes pondérées par l'addition les unes aux autres de multiples intensités de rayons X multipliées chacune par un coefficient de poids, lesdits coefficients de poids augmentant de façon monotone par rapport aux grandeurs de rapport relatives. En utilisant les sommes pondérées calculées comme intensités de rayons X pour les parties respectives du spécimen (5), le dispositif d'analyse à rayons X génère une répartition d'intensités pour les rayons X venant du spécimen (5). La contribution des intensités de rayons X qui ont été atténuées en résultat de la géométrie du spécimen (5) aux sommes pondérées des intensités de rayons X est faible, et lesdites sommes pondérées sont par conséquent proches d'intensités de rayons X non atténuées. L'utilisation des sommes pondérées comme intensités de rayons X pour les parties respectives du spécimen (5) produit en résultat une répartition d'intensités de rayons X dans laquelle l'impact de la géométrie du spécimen (5) est réduit.
PCT/JP2015/053100 2014-02-18 2015-02-04 Dispositif d'analyse et programme informatique WO2015125604A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016504021A JP6472434B2 (ja) 2014-02-18 2015-02-04 Ｘ線分析装置及びコンピュータプログラム
DE112015000841.1T DE112015000841T5 (de) 2014-02-18 2015-02-04 Röntgenanalysegerät und Computerprogramm

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014028673 2014-02-18
JP2014-028673 2014-02-18

Publications (1)

Publication Number Publication Date
WO2015125604A1 true WO2015125604A1 (fr) 2015-08-27

Family

ID=53878115

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/053100 WO2015125604A1 (fr) 2014-02-18 2015-02-04 Dispositif d'analyse et programme informatique

Country Status (3)

Country Link
JP (1) JP6472434B2 (fr)
DE (1) DE112015000841T5 (fr)
WO (1) WO2015125604A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019124492A (ja) * 2018-01-12 2019-07-25 株式会社日立製作所 電子顕微鏡
CN110873725A (zh) * 2018-08-30 2020-03-10 株式会社岛津制作所 X射线分析装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310957A (ja) * 2001-04-10 2002-10-23 Jeol Ltd 電子励起によるｘ線分析装置
JP2006177752A (ja) * 2004-12-22 2006-07-06 Kyocera Mita Corp Ｘ線分析装置
JP2012071115A (ja) * 2010-08-30 2012-04-12 Toshiba Corp 超音波診断装置
WO2013084904A1 (fr) * 2011-12-09 2013-06-13 株式会社堀場製作所 Dispositif d'analyse par rayons x
WO2013084905A1 (fr) * 2011-12-09 2013-06-13 株式会社堀場製作所 Dispositif d'analyse par rayons x
JP2014153342A (ja) * 2013-02-14 2014-08-25 Jeol Ltd 試料分析方法および試料分析装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310957A (ja) * 2001-04-10 2002-10-23 Jeol Ltd 電子励起によるｘ線分析装置
JP2006177752A (ja) * 2004-12-22 2006-07-06 Kyocera Mita Corp Ｘ線分析装置
JP2012071115A (ja) * 2010-08-30 2012-04-12 Toshiba Corp 超音波診断装置
WO2013084904A1 (fr) * 2011-12-09 2013-06-13 株式会社堀場製作所 Dispositif d'analyse par rayons x
WO2013084905A1 (fr) * 2011-12-09 2013-06-13 株式会社堀場製作所 Dispositif d'analyse par rayons x
JP2014153342A (ja) * 2013-02-14 2014-08-25 Jeol Ltd 試料分析方法および試料分析装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019124492A (ja) * 2018-01-12 2019-07-25 株式会社日立製作所 電子顕微鏡
CN110873725A (zh) * 2018-08-30 2020-03-10 株式会社岛津制作所 X射线分析装置

Also Published As

Publication number Publication date
DE112015000841T5 (de) 2016-11-03
JP6472434B2 (ja) 2019-02-20
JPWO2015125604A1 (ja) 2017-03-30

Similar Documents

Publication Publication Date Title
US8106357B2 (en) Scanning electron microscope and method for processing an image obtained by the scanning electron microscope
JP6286535B2 (ja) 荷電粒子線分析装置および分析方法
Drera et al. Transmission function calibration of an angular resolved analyzer for X-ray photoemission spectroscopy: Theory vs experiment
JP5591107B2 (ja) 材料の組成分析の方法及び装置
US7533000B2 (en) Method and apparatus for analysing a dataset of spectra
JP2016015315A (ja) 分解能の改善された計算走査顕微鏡
JP6932004B2 (ja) 荷電粒子顕微鏡における３次元イメージング
CN109196340B (zh) 波长分散型荧光x射线分析装置和采用它的荧光x射线分析方法
US20100237242A1 (en) Device and method for crystal orientation measurement by means of an ion blocking pattern and a focused ion probe
EP3506332B1 (fr) Microscope électronique à balayage et procédé d'analyse
JP6472434B2 (ja) Ｘ線分析装置及びコンピュータプログラム
JP6009963B2 (ja) 試料分析方法および試料分析装置
JP6010547B2 (ja) Ｘ線分析装置
JP2017522571A (ja) 電子顕微鏡のためのターゲットサンプルの質量厚みを測定する方法
KR102001217B1 (ko) 엑스선 검출기를 교정하는 방법
US11282670B1 (en) Slice depth reconstruction of charged particle images using model simulation for improved generation of 3D sample images
US11674913B2 (en) Sample analysis apparatus and method
JP5904799B2 (ja) 試料の内部構造を観察する荷電粒子線装置および試料観察方法
JP2020060381A (ja) 元素マップの生成方法および表面分析装置
JP2008089325A (ja) 電子プローブマイクロアナライザによる地質年代測定法
JP4894491B2 (ja) 放射線透過測定装置及び放射線透過測定方法
JP2006118941A (ja) 面分析データを表示する電子プローブｘ線分析装置
CN104122279B (zh) 具有空间分辨能力的x射线微区吸收谱测量方法
JP4349146B2 (ja) Ｘ線分析装置
EP4123299B1 (fr) Analyseur et procédé de traitement d'images

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15752512

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2016504021

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 112015000841

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15752512

Country of ref document: EP

Kind code of ref document: A1