DE112015000841T5 - Röntgenanalysegerät und Computerprogramm - Google Patents

Röntgenanalysegerät und Computerprogramm Download PDF

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Publication number
DE112015000841T5
DE112015000841T5 DE112015000841.1T DE112015000841T DE112015000841T5 DE 112015000841 T5 DE112015000841 T5 DE 112015000841T5 DE 112015000841 T DE112015000841 T DE 112015000841T DE 112015000841 T5 DE112015000841 T5 DE 112015000841T5
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DE
Germany
Prior art keywords
ray
rays
sample
characteristic
intensities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112015000841.1T
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German (de)
English (en)
Inventor
Satoshi Ohashi
Takashi Komatsubara
Hiroyuki Koshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of DE112015000841T5 publication Critical patent/DE112015000841T5/de
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE112015000841.1T 2014-02-18 2015-02-04 Röntgenanalysegerät und Computerprogramm Pending DE112015000841T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014028673 2014-02-18
JP2014-028673 2014-02-18
PCT/JP2015/053100 WO2015125604A1 (fr) 2014-02-18 2015-02-04 Dispositif d'analyse et programme informatique

Publications (1)

Publication Number Publication Date
DE112015000841T5 true DE112015000841T5 (de) 2016-11-03

Family

ID=53878115

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112015000841.1T Pending DE112015000841T5 (de) 2014-02-18 2015-02-04 Röntgenanalysegerät und Computerprogramm

Country Status (3)

Country Link
JP (1) JP6472434B2 (fr)
DE (1) DE112015000841T5 (fr)
WO (1) WO2015125604A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916748B2 (ja) * 2018-01-12 2021-08-11 株式会社日立製作所 電子顕微鏡
JP7159700B2 (ja) * 2018-08-30 2022-10-25 株式会社島津製作所 Ｘ線分析装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3950642B2 (ja) * 2001-04-10 2007-08-01 日本電子株式会社 電子励起によるｘ線分析装置
JP2006177752A (ja) * 2004-12-22 2006-07-06 Kyocera Mita Corp Ｘ線分析装置
JP2012071115A (ja) * 2010-08-30 2012-04-12 Toshiba Corp 超音波診断装置
JP6355923B2 (ja) * 2011-12-09 2018-07-11 株式会社堀場製作所 Ｘ線分析装置
US9250201B2 (en) * 2011-12-09 2016-02-02 Horiba, Ltd. X-ray analyzer
JP6009963B2 (ja) * 2013-02-14 2016-10-19 日本電子株式会社 試料分析方法および試料分析装置

Also Published As

Publication number Publication date
JP6472434B2 (ja) 2019-02-20
JPWO2015125604A1 (ja) 2017-03-30
WO2015125604A1 (fr) 2015-08-27

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R012 Request for examination validly filed