WO2015122088A1 - フィードバック制御装置 - Google Patents
フィードバック制御装置 Download PDFInfo
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- WO2015122088A1 WO2015122088A1 PCT/JP2014/082803 JP2014082803W WO2015122088A1 WO 2015122088 A1 WO2015122088 A1 WO 2015122088A1 JP 2014082803 W JP2014082803 W JP 2014082803W WO 2015122088 A1 WO2015122088 A1 WO 2015122088A1
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- 238000012545 processing Methods 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 12
- 238000004458 analytical method Methods 0.000 claims description 10
- 230000010354 integration Effects 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 claims description 2
- 238000000194 supercritical-fluid extraction Methods 0.000 claims description 2
- 230000003321 amplification Effects 0.000 abstract description 5
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 10
- 230000004044 response Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000003607 modifier Substances 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004808 supercritical fluid chromatography Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/28—Control of physical parameters of the fluid carrier
- G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/43—Programme-control systems fluidic
- G05B19/46—Programme-control systems fluidic hydraulic
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/024—Controlling the inlet pressure, e.g. back-pressure regulator
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/40—Selective adsorption, e.g. chromatography characterised by the separation mechanism using supercritical fluid as mobile phase or eluent
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/28—Control of physical parameters of the fluid carrier
- G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
- G01N2030/328—Control of physical parameters of the fluid carrier of pressure or speed valves, e.g. check valves of pumps
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41316—Piezo valve
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/42—Servomotor, servo controller kind till VSS
- G05B2219/42034—Pi regulator
Definitions
- the present invention relates to a device that performs feedback control of a controlled object by a PI control method.
- controlled objects are wide-ranging.
- pressure regulators, pressure regulators, back pressure regulators, back pressure regulators or flow controllers such as flow controllers in flow paths, or semiconductors in the field of manufacturing equipment are semiconductors.
- the controlled object to which the present invention is applied is not limited to these.
- a pressure control device used in a supercritical fluid chromatograph (SFC) or a supercritical fluid extractor (SFE) is used.
- the opening degree of the back pressure regulating valve of the pressure control device provided downstream of the path detector is feedback-controlled using the piezo element as a drive element to control the pressure of the fluid passing therethrough (see Patent Documents 1 and 2). .)
- the PI control method performs feedback control of a controlled object by a combination of a proportional component (P) and an integral component (I).
- the control circuit becomes complicated and large as described later, and the control may become unstable.
- the digital method takes time for AD conversion, DA conversion, and digital processing, there is a possibility that responsiveness cannot be satisfied depending on the control target.
- An object of the present invention is to provide a feedback control device that can be easily implemented and can satisfy responsiveness.
- P control is executed by an electric circuit in an analog manner
- I control is executed by digital processing. That is, analog P and digital I mixed PI control is performed.
- the feedback control device of the present invention includes a detector that detects an output value based on a control target, and a detection value and a target value of the detector as inputs of the differential amplifier circuit, and an output of the differential amplifier circuit.
- a P control circuit composed of an analog circuit that outputs a P control component V P to the output, an I control unit that outputs an I control component V I by integrating a deviation between the detected value and the target value by digital processing, And a drive element that is driven based on the P control component V P from the P control circuit and the I control component V I from the I control unit to control the control target.
- the P control can be executed by an electric circuit independent of the I control, the stability of the feedback control is high.
- I control is executed by digital processing, complicated processing can be easily implemented.
- Patent Document 3 or 4 that performs all PI control by digital processing has a problem in responsiveness depending on the control target.
- a response of about 1 millisecond is required for P control, so AD (analog-digital) / DA (digital-analog) conversion time, software or firmware speed limit
- AD analog-digital
- DA digital-analog
- software or firmware speed limit Such high-speed processing is difficult from the viewpoint. Therefore, it is desirable to execute the P control by an analog circuit.
- a response speed of about 10 milliseconds is sufficient for the integration element, and it is suitable to execute by digital processing which is good at complicated processing.
- the present invention is a system that effectively utilizes the excellent characteristics of both the analog system and the digital system.
- the I controller as I control component V I is input to one input terminal of the differential amplifier circuit with a detection value of the detector A P control circuit is connected, and an output terminal of the differential amplifier circuit is connected to the drive element.
- the I control unit includes a threshold value holding unit that holds a threshold value V P_upper for a deviation between the detected value and the target value, and a threshold value that holds the deviation in the threshold value holding unit. If V P_upper is exceeded, the output I-control component V I is reset to zero, and integration of the deviation is continued when the deviation is less than or equal to the threshold V P_upper held in the threshold holding unit. And 1 comparison unit.
- I controller the absolute value of the I control component V I
- a second comparison unit that regulates the absolute value
- the target to which the feedback control device of the present invention is applied is not particularly limited, but examples include a supercritical fluid chromatograph (SFC) or a supercritical fluid extraction device (SFE).
- the control target is a back pressure adjusting valve of a pressure control device provided downstream of the detector in the analysis flow path of SFC or SFE.
- the detector is a pressure gauge provided upstream of the back pressure adjustment valve in the analysis flow path, and the drive element is an actuator that controls the back pressure adjustment valve.
- the feedback control device performs PI control of the back pressure adjustment valve based on the detected value of the pressure gauge and the target value.
- a supercritical fluid is used as a mobile phase, and the analysis flow path is maintained at a constant high pressure in order to prevent vaporization of the mobile phase.
- a back pressure regulator BPR
- the back pressure regulating valve is regulated by a piezo element or solenoid as an actuator.
- the applied voltage to the piezo element or the solenoid is feedback-controlled so that the pressure detected by the pressure gauge provided immediately before the back pressure regulating valve becomes equal to the set value as the target value.
- BPR2 the opening degree of the valve 6 installed in the flow path 4 (specifically, the opening area of the valve is controlled), and the pressure of the fluid passing therethrough is controlled.
- the control device 12 uses the pressure signal value from the pressure gauge 8 installed in the flow path upstream of the BPR 2 as the monitor pressure P monitor , and if the monitor pressure P monitor is lower than the set pressure P set which is the target value, the control device 12 The valve 6 is pushed by a certain piezo element 10 to reduce the flow path cross-sectional area and increase the pressure. On the other hand, if the monitor pressure P monitor is higher than the set pressure P set , the control device 12 lowers the pressure by pulling the piezo element 10 to increase the flow path cross-sectional area.
- PI control is adopted for the pressure control method by feedback control in BPR.
- PI control is a method generally used for feedback control of pressure. The P control will be described before the description of the PI control, and then the PI control will be described.
- the operation amount for actually pushing and pulling the piezo element 10 is a constant multiple of the difference between the set pressure P set and the monitoring pressure P monitor .
- the voltage values obtained from the pressure gauge 8 and V P_mon, the set pressure P The set V a voltage value corresponding to P_set, when the gain and K P, tables voltage V PZT output to the piezoelectric element 10 in the formula (1) Is done.
- V PZT K P (V P_set ⁇ V P_mon ) (1)
- V P_mon 19.96 V
- This residual of 0.04 MPa is called a steady deviation (offset), and PI control is used to eliminate the steady deviation.
- PI control PI control is obtained by adding an integral term to Expression (1), and performs control represented by Expression (2). Even if the left side V PZT and the first term on the right side are suspended by the integral element of the second term in Expression (2), the second term on the right side is amplified until V P_set and V P_mon are equal to each other. By continuing to increase or decrease the pressing amount of 10, it is possible to continue to increase or decrease pressure until the pressure matches the target value.
- FIG. 2A and 2B show conceptual diagrams of step responses of P control (FIG. 2A) and PI control (FIG. 2B), respectively.
- P control P control
- PI control PI control
- FIG. 3 shows an example of an electric circuit for executing the P control.
- This is a differential amplifier circuit using an operational amplifier circuit (op-amp) 14 and amplifies the voltage difference between V P_mon and V P_set with a gain of the resistance ratio R P / R (corresponding to K P in equation (1)). Then, a voltage is output to the piezo element 10 (displayed as PZT Drive).
- op-amp operational amplifier circuit
- FIG. 4 shows an example of control functions necessary for PI control.
- a comparison circuit (s1) that compares the set value V P_set with the monitor value V P_mon , a proportional amplification circuit (s2) that amplifies it for P control, an integration circuit (s3) for I control, and P First, a circuit (s4) for adding the control component and the I control component is required.
- the P control is executed by an electric circuit as shown in FIG. 3, and the I control is digital processing (software (S / W), firmware (F / W) or FPGA (field programmable). The so-called analog P and digital I mixed PI control executed in the gate array)) is performed.
- FPGA is a kind of digital circuit, but uses a collection of logic LSIs.
- An FPGA can easily produce an electric circuit (integrated circuit) that exhibits exactly the same operation just by writing software, and is very easy to mount.
- an AD converter is provided on the input side and a DA converter is provided on the output side. Even if the FPGA for executing the I control has a complicated circuit configuration, it is connected to the analog circuit for P control via the DA converter, so that the stability of the P control is not affected.
- FIG. 5 shows a conceptual diagram of the control.
- the voltage value V P_mon from the pressure gauge 8 is input to the P control circuit 16 formed of an analog circuit and the I control unit 18 by digital processing.
- the P control circuit 16 is, for example, the electric circuit shown in FIG. P control circuit 16 outputs a voltage value V P_mon, the running P control of the set voltage value V P_set corresponding to the set pressure P control component V P.
- the I control unit 18 performs I control of the voltage value V P_mon and the set voltage value V P_set by digital processing, and outputs an I control component V I.
- the P control component V P and the I control component V I are added to drive the piezo element 10 of the actuator.
- SFC supercritical fluid chromatography
- CO 2 that can obtain a supercritical state at a relatively low temperature and low pressure
- a modifier mainly methanol
- liquid CO 2 obtained from the CO 2 cylinder 101 is fed by the CO 2 pump 103, and similarly, the modifier 102 is fed by the modifier pump 104 and mixed by the mixer 105 to form a mobile phase.
- the mobile phase into which the sample is injected by the autosampler 106 passes through the column 108 installed in the column oven 107, and the sample components are temporally separated in the column 108.
- the sample components separated in time are detected by the UV detector 109.
- the detection value of the UV detector 109 varies greatly depending on the density of the substance to be analyzed, and the supercritical fluid has a large pressure dependency on the density. For this reason, the pressure in the flow paths after the pumps 103 and 104 is configured to be maintained at a constant pressure of about 10 MPa or more by the pressure control valve 110 (back pressure regulator, BPR).
- BPR back pressure regulator
- the accuracy greatly contributes to the measurement stability of the UV detector 109. Therefore, a pressure control accuracy of about ⁇ 0.01 MPa with respect to the set pressure is required.
- SFC a gradient analysis in which the mixing ratio of the modifier is changed with time is generally performed, and the pressure changes due to a large change in the composition of the fluid during the analysis.
- a stainless steel tube 22 having an inner diameter of 0.1 mm generally used for SFC is connected to an inlet and an outlet of the body 21, respectively.
- a pipe flow path 31 having an inner diameter of 0.3 mm is formed, and both ends of the pipe flow path 31 are connected to the stainless steel pipes 22.
- the stainless steel tube 22 is centered by a ferrule 23 and is fixed to the body 21 by screws 24.
- the body 21 has a recess for cutting the flow path 31.
- a hole at the center of the recess is recessed in a conical shape so as to cut the flow path 31, and a lateral hole connected to the cut portion of the pipe flow path 31 is opened on the wall surface of the hole.
- the conical depression wall surface has an opening connected to the flow path on the inlet side and the outlet side.
- a conical lid 25 made of an elastic body is provided in the hole.
- the lid 25 has a structure in which the peripheral portion is pressed against the peripheral portion of the hole by the seal member 26, and the portion entering the hole opens and closes the opening of the wall surface of the hole.
- the wall surface of the conical hole that cuts the sealed minute flow path 31 is the valve seat portion 33, and the lid 25 is the valve body.
- the piezo element 28 is a piezo actuator that is displaced by about 10 ⁇ m when a voltage is applied from 0V to 100V.
- a stepping motor 29 is attached to the rear stage of the piezo element 28 as viewed from the valve body for coarse movement to displace the valve body in a larger range.
- the control of the piezo actuator will be described.
- the equilibrium pressure after the control is deviated from the set pressure by about ⁇ 0.1 MPa (steady deviation).
- the value of the steady deviation depends on the equilibrium potential of the piezo element, and the equilibrium pressure changes in response to the piezo potential that changes according to the fluid composition that changes every moment during the gradient analysis.
- the feedback control be PI control.
- PI control is performed by the electric circuit shown in FIG.
- Feedback control is performed by the differential amplifier circuit 14 using an operational amplifier so that the voltage value V P_mon from the pressure gauge is equal to the voltage value V P_set corresponding to the set pressure.
- the I control signal V I calculated by software or firmware is added to the input terminal to which the voltage value V P_mon from the pressure gauge is input.
- Equation (3) shows the calculation in software or firmware for obtaining the I control signal V I.
- K I is the integral gain, but appropriately adjusted in accordance with the control system, the gain of the entire I control is represented by K I R P / R I also to the amplification factor of the electric circuit shown in FIG. 8
- K I R P / R I the gain of the entire I control is represented by K I R P / R I also to the amplification factor of the electric circuit shown in FIG. 8
- the addition of the I component V I and the P component V P is not limited to the circuit shown in FIG. 8, and can be executed with a configuration as shown in FIG. 9 using a general addition circuit.
- an operational amplifier 14a for adding the I component V I and the P component V P is required, and the amplification stage is increased by one stage. Therefore, from the viewpoint of stability, the circuit configuration of FIG.
- the circuit of FIG. 8 does not perform an accurate addition process of the P control result and the I control result, and does not mathematically perform the operation represented by (2).
- the processing is the same in the sense that the piezo voltage continues to increase or decrease until V P_set and V P_mon become equal, and as a result, PI control is performed.
- the digital processing unit 20 is realized by an SFC or SFE dedicated computer or a general-purpose computer connected to the SFC or SFE for the purpose of data processing, for example, a personal computer.
- an analog voltage (V P_Mon ) obtained from the pressure gauge 8 is converted into a digital value by the AD converter 22.
- the AD conversion unit 22 may be an AD converter provided outside the digital processing unit 20, or may be realized as a function within the digital processing unit 20. Processing in the digital processing unit 20 is processed as a digital value.
- the obtained pressure value is averaged by the averaging unit 24.
- the averaging process is for removing noise generated in the pressure gauge 8 and noise generated during AD conversion.
- the pressure value V P_Mon after the averaging is compared with the set pressure value V P_set, and the first comparison unit 28 calculates the difference.
- Both the pressure value V P_mon and the set pressure value V P_set are voltage values corresponding to the pressure value.
- the set pressure value V P_set can be generated by a circuit that generates a constant voltage, such as a reference voltage generation circuit, and is given to the digital processing unit 20 from the outside.
- the set pressure value V P_set may be given each time when the first comparator 28 calculates the difference, or a set value holding unit 26 as shown in FIG. 10 is provided and held there. It may be.
- the I control value V I accumulated so far is reset to zero.
- the reason for this is that the I control is originally intended to eliminate the steady deviation of the P control.
- the P control is not performed, and it is meaningless to integrate when the pressure value is greatly deviated from the target. This is because if the value of the I control value V I is large when it falls within the control range, an unnecessary time is required until it converges to the appropriate I control value V I , which is inconvenient.
- the integration unit 34 performs integration. As used herein, the term integration and is to adding the difference value to the V I value that is currently held.
- the I control value V I after the addition is a numerical value within a reasonable range, it is directly converted into an analog value by the DA converter 40 and output to the electric circuit. If the I control value V I is outside the valid range, Limit to that range and output.
- an upper limit value (V I_MAX ) is held in the upper limit holding unit 36 and held in the second control unit 38 in the I control value V I after addition and the upper limit holding unit 36. The upper limit value (V I_MAX ) is compared.
- P_mon is a value slightly lower than P_set (a value that is apparently indistinguishable from a steady deviation by P control), but the fluid fills the switched flow path. It takes time, and the pressure may not increase easily. If the deviation continues to accumulate during that time (I control value V I continues to rise), the pressure rises by an amount corresponding to the I control value V I accumulated when the flow path is filled and the pressure rises, and (3 ) Since it takes time to reduce the I control value V I by calculating the equation and the pressure is not stable, it is desirable to set an upper limit value for restriction.
- FIG. 12 is a flowchart showing the processing of FIGS. 10 and 11 as a procedure.
- the initial value of the I control value V I is 0 (step s1), and the I control value V I is output together with the start of control (step s2).
- step s5 If the absolute value of the difference between the averaged V P_mon and the set pressure value V P_set is within ⁇ V P_upper , the held I control value V I is set to (V P_set ⁇ V P_mon ) and the gain K I Then, the product multiplied by the processing time dt is added (step s5).
- FIG. 13B shows the results of an experiment in which pressure control was performed in the examples of FIGS. 8 and 10 to 12.
- FIG. 13A shows the case of only P control.
- the pressure value (upper graph in each figure) and the piezo voltage (lower graph in each figure) as a result of performing feedback control with a set value of 10.00 MPa are shown. Yes.
- the piezo voltage changes in order to keep the pressure constant, and as a result, the value of the steady deviation changes, so the pressure It has changed slightly.
- the pressure In the state after about 6 minutes, the pressure is in equilibrium. In the case of only the P control in FIG. 13A, the balanced pressure does not coincide with 10.00 MPa, and an offset of about 0.02 MPa occurs. After that, when the flow rate is changed, it can be confirmed that the pressure changes stepwise.
- BPR Back pressure regulator
- control target 6
- valve 8 pressure gauge as detector 10
- piezo element 14 operational amplifier
- P control circuit 18 I control unit 20
- digital processing unit 28
- difference calculation unit 30
- threshold value holding unit 32
- first comparison unit 34
- integration unit 36
- upper limit value holding unit 38 Second comparison part
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Abstract
Description
ピエゾ素子10を実際に押し引きする動作量は設定圧力Psetとモニタリング圧力Pmonitorの差の定数倍である。圧力計8から得られる電圧値をVP_monとし、設定圧力Psetに対応する電圧値をVP_set、ゲインをKPとすると、ピエゾ素子10に出力される電圧VPZTは式(1)で表される。
VPZT=KP(VP_set-VP_mon) (1)
PI制御は式(1)に積分項を加えたもので、式(2)で表される制御を行う。
式(2)の第二項の積分要素によって、左辺VPZTと右辺第一項がつりあったとしても、右辺第二項はVP_setとVP_monが等しい値となるまで増幅されるため、ピエゾ素子10の押し量を増加又は減少させ続けることによって、圧力が目標値と一致するまで昇圧又は減圧させ続けることが可能となる。
ここでKIは積分ゲインであり、制御系に合わせて適当に調整するが、I制御全体のゲインは図8に示した電気回路の増幅率も合わせてKIRP/RIで表される。
ポンプによる送液開始の直後は状態が安定せず、P制御とPI制御のいずれの場合も圧力を一定に保つためにピエゾ電圧が変化し、結果的に定常偏差の値が変化するため圧力がわずかに変化している。
6 弁
8 検出器としての圧力計
10 ピエゾ素子
14 演算増幅器
16 P制御回路
18 I制御部
20 デジタル処理部
28 差分算出部
30 しきい値保持部
32 第1比較部
34 積分部
36 上限値保持部
38 第2比較部
Claims (5)
- 制御対象に基づく出力値を検出する検出器と、
前記検出器の検出値と目標値を差動増幅回路のそれぞれの入力とし、前記差動増幅回路の出力にP制御成分VPを出力するアナログ回路からなるP制御回路と、
前記検出値と前記目標値との偏差をデジタル処理により積分することによりI制御成分VIを出力するI制御部と、
前記P制御回路からのP制御成分VPと前記I制御部からのI制御成分VIに基づいて駆動されて前記制御対象を制御する駆動素子と、
を備えたフィードバック制御装置。 - 前記I制御成分VIが前記検出器の検出値とともに前記差動増幅回路の一方の入力端子に入力されるように前記I制御部と前記P制御回路が接続され、
前記差動増幅回路の出力端子が前記駆動素子に接続されている請求項1に記載のフィードバック制御装置。 - 前記I制御部は、前記検出値と前記目標値との偏差に対するしきい値VP_upperを保持するしきい値保持部と、
前記偏差が前記しきい値保持部に保持されたしきい値VP_upperを超えていれば出力のI制御成分VIをゼロにリセットし、前記偏差が前記しきい値保持部に保持されたしきい値VP_upper以下のときに前記偏差の積分を継続する第1比較部と、
をさらに備えている請求項1又は2に記載のフィードバック制御装置。 - 前記I制御部は、I制御成分VIの上限値VI_MAXを保持する上限値保持部と、
I制御成分VIを前記上限値保持部に保持された上限値と比較してI制御成分VI出力値が前記上限値を超えないように規制する第2比較部と、
をさらに備えている請求項1から3のいずれか一項に記載のフィードバック制御装置。 - 前記制御対象は超臨界流体クロマトグラフ装置又は超臨界流体抽出装置の分析流路の検出器の下流に設けられた圧力制御装置の背圧調整弁であり、
前記検出器は前記分析流路において前記背圧調整弁の上流に設けられた圧力計であり、
前記駆動素子は前記背圧調整弁を制御するアクチュエータであり、
前記圧力計の検出値と目標値に基づいて前記背圧調整弁をPI制御する請求項1から4のいずれか一項に記載のフィードバック制御装置。
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US15/118,517 US10184919B2 (en) | 2014-02-17 | 2014-12-11 | Feedback control apparatus |
EP14882634.0A EP3109714B1 (en) | 2014-02-17 | 2014-12-11 | Feedback control device |
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EP3109714A1 (en) | 2016-12-28 |
US20170045482A1 (en) | 2017-02-16 |
EP3109714B1 (en) | 2022-03-23 |
JPWO2015122088A1 (ja) | 2017-03-30 |
CN106233209B (zh) | 2019-08-09 |
EP3109714A4 (en) | 2017-10-11 |
JP6241483B2 (ja) | 2017-12-06 |
US10184919B2 (en) | 2019-01-22 |
CN106233209A (zh) | 2016-12-14 |
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