WO2015107202A1 - Procédé d'obtention par fluage d'au moins une structure approximant une structure souhaitée - Google Patents
Procédé d'obtention par fluage d'au moins une structure approximant une structure souhaitée Download PDFInfo
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- WO2015107202A1 WO2015107202A1 PCT/EP2015/050906 EP2015050906W WO2015107202A1 WO 2015107202 A1 WO2015107202 A1 WO 2015107202A1 EP 2015050906 W EP2015050906 W EP 2015050906W WO 2015107202 A1 WO2015107202 A1 WO 2015107202A1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/002—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00269—Fresnel lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2025/00—Use of polymers of vinyl-aromatic compounds or derivatives thereof as moulding material
- B29K2025/04—Polymers of styrene
- B29K2025/06—PS, i.e. polystyrene
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
- B29K2033/04—Polymers of esters
- B29K2033/12—Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
- B29L2011/005—Fresnel lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
Definitions
- the present invention relates to a process for obtaining three-dimensional patterns of micrometric or nanometric size having complex profiles. It relates more particularly to the simultaneous realization, at the level of a wafer (slice or plate in French), matrices of patterns with complex profiles. It finds advantageous but not limitative application the formation of optical lenses of micrometric or nanometric size and in particular aspherical optical lenses.
- a first known solution is to approximate any complex profile by a profile formed of a multitude of steps, that is to say formed by a stack of discrete volumes.
- the techniques usually used require either several successive stages of lithography or long sequential lithography techniques, complex and expensive.
- the number of height levels that can be achieved remains limited, typically a few tens of levels for the most complex forms.
- optical micro-lens matrices have been obtained in a single creep operation of a resin layer in which UV-patterned units of simple shape, typically rectangular section pads arranged on a substrate, had previously been formed by UV lithography.
- This type of process was for example proposed in 1988 by ZD Popovic and his co-authors in an article published in Applied Optics, No. 27, pages 1281-1284, under the title "Technique for monolithic manufacture of microlens arrays" (1988). ).
- This type of method does not allow to obtain after creep any arbitrary complex shape.
- matrices of micro lenses of hemispherical shape obtaining aspherical micro lens matrices whose optical properties are much better is not simply achievable by this technique.
- spherical lenses unlike aspherical lenses, induce optical aberrations because the rays passing through the center of the lens do not converge exactly at the same point as those passing by the edges, which causes a blur at large openings and an enlargement of the focus spot.
- the invention relates to a method for determining at least one creep parameter for obtaining a structure approximating a desired structure by creep of an initial structure different from the desired structure.
- the initial structure is made of at least one pattern formed in a thermo-deformable layer disposed on a substrate.
- the thermo-deformable layer forms a residual layer surrounding each pattern and from which extends each pattern so that each pattern has an interface only with the surrounding medium.
- the method comprises at least the following steps implemented by at least one microprocessor:
- a step of predicting the evolution over time of the geometry of the initial structure subjected to creep so as to obtain a plurality of predicted structure geometries each associated with creep parameters comprising at least one creep time and a creep temperature;
- the invention makes it possible to precisely determine the parameters that will make it possible to obtain shapes with arbitrary and possibly complex profiles by creep, thanks in particular to the presence of a residual layer at the base of each of the patterns of the initial structure. and deterministically controlling the profile of the initial patterns and / or the thermal annealing conditions to obtain a very good approximation of the desired structure.
- the identified creep parameters are intended to be applied to a creep stage of the initial structure.
- the invention makes it possible to respond to each of the following problems:
- the invention makes it possible to determine the optimum creep conditions in order to obtain the final structure closest to the desired structure;
- the invention makes it possible to determine what is the optimal initial structure for obtaining, after a creep under these imposed conditions of temperature and time, the structure closest to the desired structure;
- the invention also makes it possible to define both the initial structure and the optimum creep conditions so as to obtain the structure closest to the desired structure.
- the invention makes it possible to define the shape of the initial structure and the temperature of the creep.
- the invention thus makes it possible to considerably reduce the costs of obtaining complex structures, for example structures with three-dimensional patterns.
- the most desirable initial structure is often a pyramid which is then fired and not an initial structure. made of stacked cubes approximating a dome.
- the invention makes it possible to obtain various profiles and in particular profiles having curves or profiles whose tangents evolve continuously while traversing the profile. It makes it possible to obtain angles, albeit a little rounded due to creep, but does not make it possible to obtain truly sharp edges, that is to say profiles whose tangents do not evolve in a continuous manner.
- this method according to the invention may furthermore have the following optional steps and characteristics:
- the residual layer completely covers the substrate.
- the residual layer surrounds each pattern so that all the lines or edges taken on the contour of each pattern are only in contact with an environment in which the initial structure is located and are therefore not in contact with the surface. substrate on which the thermo-deformable layer rests.
- the initial structure has no line or edge taken on the contour of the layer thermo-deformable and which is in contact with both the ambient environment and the substrate on which the thermo-deformable layer rests.
- the initial structure has only double points also called double lines or double interfaces.
- a double point is a point in the envelope of a structure (also referred to as a pattern) that is in contact with a single medium.
- all the points of the envelope of the layer forming the initial structure are in contact with only one material: the surrounding air. This surface is in no way in contact with another material such as the substrate on which the initial structure rests.
- the initial structure has triple points or triple lines, in contact with both an ambient medium and the substrate on which the layer of thermo-deformable material rests, the triple points being distant from each pattern. a distance at least equal to Dmini, with
- the height of a pattern is measured between the highest point of the pattern and the base of the pattern.
- thermo-deformable layer covers the entire substrate, none of the patterns has an interface with the substrate or with a layer underlying it.
- the residual layer apart from the patterns, has a substantially constant thickness. That is to say a thickness that does not vary by more than 10% relative to the average thickness of the residual layer located under the patterns.
- This non-limiting embodiment facilitates the implementation of the invention.
- thermo-deformable layer forms a residual layer extending substantially in a plane, each pattern extending from this plane so that each pattern has only an interface with the surrounding medium.
- the patterns are hollow or projecting patterns.
- the steps of prediction, calculation of correlation values and identification of the creep parameters are repeated with a plurality of initial structures whose geometries are different from each other.
- one identifies, among the plurality of initial structures, the initial structure making it possible to obtain the highest correlation value.
- the steps of prediction, calculation of correlation values and identification of creep parameters are repeated with a plurality of initial structures whose geometries are different from each other only if the highest correlation value for a structure considered is less than a predetermined correlation threshold.
- a maximum creep temperature is imposed.
- a maximum creep time is imposed.
- the step of predicting the evolution over time of the geometry of the initial structure subjected to creep depends on the thickness of the residual layer.
- At least two creep modes are defined: one starting from a thick residual layer where the capillarity phenomena are predominant, the other starting from a thin layer where the nonlinear lubrication phenomena dominate.
- the initial structure is formed at least in part by superimposed cubes or blocks.
- the initial structure has a triangular section in a section perpendicular to the plane of the substrate.
- the mold of triangular section patterns is obtained by preferential chemical etching according to the crystallographic planes of a semiconductor material comprising silicon.
- the final structure comprises one or more aspherical lenses or one or more Fresnel lenses.
- the predicted structure (S3) offering the highest correlation value forms a topography making it possible to reinforce the light emission in the LED devices.
- the steps of prediction, calculation of correlation values and identification of the creep parameters of the method are performed by at least one microprocessor.
- the predicted structure (S3) offering the highest correlation value is a structure for a tool for manufacturing a microelectronic device or a structure of a microelectronic device.
- microelectronic device any type of device made with microelectronics means. These devices include, in addition, devices for purely electronic purposes, micromechanical or electromechanical devices (MEMS, NEMS, etc.) as well as optical or optoelectronic devices (MOEMS, etc.).
- MEMS micromechanical or electromechanical devices
- MOEMS optical or optoelectronic devices
- the method according to the invention based on a simulation from a very specific structure, that is to say without “triple point” near the grounds, performs technical functions specific to engineering modern by predicting, in a concrete manner, creep conditions to obtain a shape very close to that desired.
- the invention enables to orient the design process of the initial shape and the manufacturing process (including settings of "PC and creep time) with an accuracy such that one can estimate the chances of a successful creep operation even before carrying out this operation concretely.
- the method according to the invention makes it possible to determine the optimal initial shape that will be suitable for flowing to obtain the desired structure.
- the present invention is therefore a concrete and practical tool for expert creep.
- the method according to the invention is implemented by a computer comprising at least one microprocessor.
- the present invention relates to a computer program product or to a computer-readable non-transitory medium, comprising instructions, which when performed by at least one processor, execute the steps of the method according to the invention mentioned above. These steps are at least the steps of prediction, calculation of correlation values and identification of creep parameters.
- the invention relates to a method for obtaining at least one structure approximating a desired structure from at least one initial structure, different from the desired structure, the initial structure being made of at least one pattern formed in a thermo-deformable layer disposed on a substrate, characterized in that the thermo-deformable layer forms a residual layer surrounding and from which each pattern extends so that each pattern has only one interface with the surrounding medium and in that the method comprises at least the following steps:
- a step of predicting the evolution over time of the geometry of the initial structure subjected to creep so as to obtain a plurality of predicted structure geometries each associated with creep parameters comprising at least one creep time and a creep temperature;
- said identified creep parameters are provided to creep equipment. and in that it comprises a creep step of the initial structure, the creep step being performed by applying the creep parameters to obtain the predicted structure with the highest correlation value.
- the creep equipment performs the creep step. Preferably, during the creep step, said equipment applies said identified creep parameters. Creep equipment includes:
- thermo-deformable layer a device for bringing the thermo-deformable layer to a given temperature
- thermo-deformable layer a device for controlling the temperature of the thermo-deformable layer
- thermo-deformable layer a device for controlling the duration during which the temperature of the thermo-deformable layer is subjected to a given temperature; a computer device for reading instructions in order to apply parameters, in particular temperature and time, during a creep step.
- this method according to the invention may further have the following optional steps and features.
- the steps of prediction, calculation of correlation values and identification of the creep parameters are repeated with a plurality of initial structures whose geometries are different from each other.
- one identifies, among the plurality of initial structures, the initial structure making it possible to obtain the highest correlation value.
- the creep step is carried out by taking said identified initial structure as well as the creep parameters making it possible to reach the highest correlation value for this identified initial structure.
- the initial structure is obtained by printing the resin layer from a mold.
- the initial structure is obtained by grayscale photolithography including the presence of a residual layer.
- the invention relates to a method for simultaneous obtaining by creep, at a wafer, three-dimensional pattern matrices with possibly arbitrary arbitrary profiles.
- the method comprises the following steps:
- an initial profile of the patterns formed in a thermo-deformable resin is determined by simulation, the said initial profile comprising a residual layer of non-zero controlled thickness
- the two preceding steps are repeated until, by successive approximations, a predetermined correlation value is obtained between the profile obtained and the one desired, by simultaneously or successively correcting either the initial profile and the residual thickness, or the creep conditions, or both ;
- the simulation results are accumulated and the profile and / or creep conditions are determined to obtain the best correlation value.
- the present invention relates to a computer program product or to a computer-readable non-transitory medium, comprising instructions, which when performed by at least one processor, execute the steps of the process mentioned above.
- the invention relates to a method for manufacturing a nanoscale printing mold carrying a plurality of structures intended to penetrate a deformable material in order to print in said material said plurality of structures, the method of characterized in that the structures are obtained by performing the steps of the method according to the invention.
- FIGURE 1 illustrates the prior art and standard formation of microlenses by creep.
- FIG. 2 illustrates the process of the invention in which a residual layer is provided during creep.
- FIGURE 3 discusses the characteristics of aspherical lenses.
- FIGURES 4a and 4b illustrate a simulation of the effect of the annealing step after printing in the resin of a simple structure of rectangular section leaving in place, respectively, a thick layer and a residual thin layer of resin.
- FIG. 5 illustrates steps of an exemplary method according to the invention which makes it possible to determine the creep conditions suitable for obtaining a structure identical or close to a desired structure.
- FIGURES 6a and 6b illustrate two types of initial profiles, one rectangular and the other pyramidal, used to form a network of aspherical microlenses.
- FIGURES 6c and 6d illustrate simulation results for defining the conditions for forming an aspherical microlens array from the two types of initial profiles illustrated in FIGS. 6a and 6b.
- FIGURES 7a and 7c briefly describe an example of a method suitable for forming pyramidal-shaped initial patterns in a polymer resin.
- FIGURES 8a to 8e show results of annealing experiments carried out from pyramidal patterns resting on a thin residual layer.
- FIGS. 9a to 9e illustrate an implementation of the method of the invention for the production of microlenses of the Fresnel type.
- FIG. 10 illustrates steps of an exemplary method according to one embodiment of the invention and which make it possible to obtain complex forms by creep.
- FIG. 11 describes the details of the simulation steps used as a function of the structure of the pattern to be fluted.
- the drawings are given by way of examples and are not limiting of the invention. They constitute schematic representations of principle intended to facilitate the understanding of the invention and are not necessarily at the scale of practical applications. In particular, the relative dimensions of the different patterns and layers are not representative of reality.
- the term “over”, “overcomes”, “covers” or “underlying” or their equivalent do not necessarily mean “in contact with”.
- the deposition of a layer on a substrate does not necessarily mean that the layer and the substrate are in direct contact with one another, but that means that the layer at least partially covers the substrate while being directly to its contact either by being separated from it by another layer or another element.
- a three-dimensional pattern designates a pattern having in a given layer, for example a resin, at least two height levels above an upper face of the layer when the pattern is in protrusion or at least two depth levels below the upper face of the layer when the pattern is recessed.
- the three-dimensional pattern may have a curved profile.
- the annealing is performed on a structure having triple lines, or so-called triple points, 150 where three elements interact: the air, the polymer resin and the substrate material.
- the envelope of the structure 1 10, 140 has in fact at its base a contour (rectangular for the linear structure 1 10 or circular for the cylindrical structure 1 10 and for the spherical structure 140) formed of a multitude of points which are in contact with two materials in addition to the material of the structure itself. Thus, each point of this contour is in contact with the surrounding air and the substrate.
- the free surface of the thermosetting layer forming the pattern 1 10, 140 is in contact with the substrate 120 at the base of the pattern.
- the invention provides a solution to these problems by describing a method in which the creep of a material (usually referred to as "reflow" in English) is always carried out while maintaining a residual layer 201.
- the initial structure 200 is continuous.
- the triple points are replaced by points here double 215 formed by the single interface thermo-deformable layer / surrounding environment.
- the surrounding medium, referenced 217 here is typically air.
- a double point 215 is defined as a point on the envelope of the structure 200 which is in contact with a single medium (air) 217 in addition to the material of the thermo-deformable layer.
- the free surface of the layer forming the initial structure 200 is not in contact with another medium such as the substrate on which the initial structure 200 rests and this even at the base of the initial structure 200.
- the initial structure 200 has no line or edge taken on the contour of the thermo-deformable layer and which is in contact with both the environment 217 and the substrate 120 on which the thermo-deformable layer rests.
- a network of three-dimensional patterns 210 formed in the same material, without there being discontinuity of the material between the reliefs of the three-dimensional patterns formed before creep is a continuous profile.
- a continuous profile according to the invention is therefore most generally characterized, as mentioned above, by the presence of a continuous residual layer 201.
- the patterns 210, here protruding reliefs formed before creep can be generally of any shape. They may be, for example, of triangular shape as illustrated in Figure 2 or comprise one or more discrete levels 212 as shown in dashed lines. In general, their shape is chosen to obtain, after creep, the form 240 best suited for the application in question.
- a shape is considered non-continuous if the layer in which the pattern is formed, typically the resin, is interrupted. Such would be the case with a network of pads 1 10 arranged on a substrate 120 without continuity of material.
- the presence of the residual layer 201 makes it possible to predict with reliability and reproducibility the final shape 240 obtained after annealing 130.
- the evolution of the shape of the initial patterns 230 which occurs during the annealing operation 130, is the same regardless of the underlying substrate while it strongly influences the dynamics of the triple points in the case of a creep without residual layer.
- the choice of the thickness of the residual layer gives an additional degree of freedom to control the final profile 240 of the microlenses as will be seen below.
- the invention relates to plates, usually designated in English wafers, a substrate is completely covered with a layer in which the patterns are formed. It nevertheless extends to wafers whose substrate is partially covered with such a layer. In general, this layer extends in all the reasons which must be subjected to a controlled creep (reasons which will have an operational function after creep). More specifically, this layer extends under all the patterns that must be creep controlled and up to a minimum distance separating these patterns from any triple points born from an interruption of the layer.
- the pattern closest to this triple point must be distant from this triple point by a distance greater than or equal to the distance Dmini, with Dmini defined by the equation next :
- the height of a pattern is measured between the highest point of the pattern and the base of the pattern.
- the base of the pattern 210, 240 is at the free surface 216 of the residual layer between two patterns.
- the thicknesses and heights are taken in a direction perpendicular to the main faces of the substrate on which the layer in which the patterns are formed rests. In the figures, the direction of measurement of the thicknesses and heights is vertical.
- the invention extends to the wafers whose layer defining the patterns form one or more separate zones and partially covering the underlying substrate.
- the invention is not limited to stacks of layers in which the layer in which the patterns to be flowing are formed is in direct contact with the substrate. It also extends to the stacks of layers in which one or more layers or other elements are arranged between the substrate and the layer in which the patterns to be fluted are formed.
- the method of the invention makes it possible, for example, to form so-called aspherical microlenses whose profile and its mathematical expression 320 are illustrated in FIG. 3.
- the aspherical lenses are conventionally defined using two main parameters: their radius of curvature "R” 312 and their degree of conicity "k” according to equation 320.
- Diagram 310 of FIG. 3 illustrates the difference between a spherical profile 314 and an aspherical profile 316. In equation 320 the constants of aspherical deformation higher than two have been neglected.
- the lenses qualified as aspherical are all those where k is not zero.
- the invention provides a simple solution to the manufacture of aspherical microlens arrays by allowing the optimal profile of the microlenses can be obtained directly after a creep operation and without subsequent shaping of each lens.
- the method of the invention is not limited to this application example and is likely to be generally suitable for the formation of complex 3D shapes for all kinds of applications.
- the creep method of the invention will advantageously be used for the manufacture of printing molds of micrometric or nanometric size patterns.
- FIGS. 4a and 4b illustrate a simulation of the effect of the annealing step after printing in the resin of a simple structure of rectangular section, 410 and 440 respectively, each comprising only two different printing levels 412 and 442 of 414 and 444.
- FIGS. 4a and 4b make it possible to compare the effect of a thick residual layer 430 and that of a thin layer 460 on the final shapes obtained after creep; ie 420 and 450.
- a thick residual layer 430 produces a rounded pattern background 422 while a thin residual layer 460 produces a flat pattern background 452.
- the residual thickness is therefore, as already mentioned above, an important factor for controlling the final shape of the profiles 420 and 450.
- the diagrams of Figures 4a and 4b use on the abscissa and on the ordinate dimensionless normalized values which are, respectively, those of the width and the height simulated patterns.
- FIG. 5 illustrates steps of an exemplary method according to the invention for determining the creep conditions suitable for obtaining a structure identical or close to a desired structure.
- a step 101 consists in defining a desired shape, also designated desired structure S1, which one wishes to obtain ideally.
- This form can be freely chosen. For example, one can choose a form of aspherical microlens.
- Step 1102 includes selecting an initial form S2 from which the creep operation will be performed.
- This step also comprises the representation numerically or mathematically of this form S2.
- this form has a residual layer as defined above, that is to say a layer which extends under the patterns to remove any triple point or push back possible triples at a sufficient distance from each of the patterns whose evolution must be controlled by creep.
- the choice of the initial form S2 depends on many parameters and in particular the techniques and practical constraints for the realization. This form will differ for example depending on the lithography technique used. Moreover, for the same lithography technique this form will depend on the equipment used. For example, if the realization involves nano-printing, this form will depend on the number of levels of the mold.
- Creep parameters such as creep temperature (step 103) and time can also be defined. This step makes it possible, for example, to define a maximum temperature which makes it possible not to damage other layers or components of the stack of layers to which the layer to be flowed belongs.
- a simulation of the evolution in time of the initial form S2 during creep is carried out.
- the simulation predicts a shape S3.
- n forms S3 each corresponding to a moment of creep.
- the equation mentioned above is advantageously used.
- a computing unit equipped with a microprocessor makes these predictions and uses the equations adapted to the initial form S2.
- Step 1 illustrates the calculation of a correlation factor between the forms S3i predicted by simulation and the desired form S1. This is typically the ratio of covariances and nonzero product of standard deviations. These calculations may be performed at the end of the simulation as illustrated on the graph or be carried out in parallel with the simulation of step 1 104, ie as and when the predicted forms S3i are determined.
- Step 1 106 performed at the end of simulation or in parallel with step 1, comprises the identification of the predicted form S3i which makes it possible to obtain the best correlation factor.
- step 1 106 leads directly to step 1 108 at which the creep parameters are determined which make it possible to obtain this form S3i for which the correlation is the best.
- the creep parameters are taken from: creep temperature, creep time.
- the method comprising the preceding steps thus makes it possible to determine the optimal creep conditions from a given initial form S2.
- the invention makes it possible to identify the optimum temperature and the optimal creep time for this initial structure.
- This step 110 which follows the simulation process, may or may not be integrated into the invention.
- the simulation method comprises additional and optional steps that make it possible to optimize the initial structure by performing successive iterations.
- step 1 it is determined whether the highest correlation factor obtained from the initial form S2 is greater than or equal to a predetermined correlation threshold (step 1 107).
- step 1 108 is performed.
- the initial shape S2 and the optimal creep parameters are retained.
- the method of predicting and determining the parameters then ends and the creep operation 1109 can be performed.
- an additional step 11 of modifying the initial form S2 is performed.
- steps 1 103 to 1 107 are performed again based on the modified initial form S2. These iterations are repeated until a correlation factor higher than the threshold is obtained.
- This embodiment then makes it possible to determine both the initial structure and at the same time the creep parameters which make it possible to obtain a final shape S3 that is identical or similar to the desired shape S1.
- this method can be performed by modifying the initial form S2 (step 1 1 10) without using a correlation threshold. Indeed, it will be possible to make as many iterations as the initial number of shapes that one wishes to test.
- step 1 103 the creep parameters of step 1 103 and in particular the creep temperature and the creep time.
- the invention thus makes it possible to determine the ideal creep temperature and creep time for a given initial shape S2.
- the invention makes it possible to identify the optimum creep temperature for a given structure.
- the invention makes it possible to identify the optimal creep time for a given structure.
- steps 1 104 to 1 108 are performed by a microprocessor.
- FIGS. 6a to 6d illustrate simulation results that can for example be obtained by following the steps of FIG. 5.
- these simulations are intended to define the conditions for forming a network of aspherical microlenses starting from two initial profiles, one rectangular 510 and the other pyramid 520 as shown respectively in Figures 6a and 6b.
- the geometrical parameters that will influence the final shape after creep are, as indicated, the thickness of the residual layer hr, the height of the patterns hd and their width. hb.
- the other parameters that condition the final shape of the lenses are of course the temperature and creep time.
- FIGS. 6c and 6d show, using diagrams 530 and 540, the concomitant evolution, during the creep phase, of the taper parameters (R and k) of the aspherical lenses respectively obtained starting from a profile. rectangular 510 and a pyramidal profile 520 for various values of the geometric parameters: hr, hd and hb.
- the six curves in FIGS. 6c and 6d correspond to six different hd values which are: 3.5 ⁇ , 8 ⁇ , 12.5 ⁇ , 17 ⁇ , 21.5 ⁇ and 26 ⁇ , as indicated directly thereon.
- the evolution curves of the parameters R and k present mainly the same type of behavior in the two diagrams. Referring for example to the diagram 540, it is found, in a first step 541, with the increase of the annealing time, a simultaneous increase of the two parameters R and k. The positioning of the different curves depends essentially on the initial profile chosen and the associated geometrical parameters.
- the correlation at the beginning of annealing (zone 531 of the diagram 530) is lower in the case where one starts with rectangular shapes.
- FIGS. 7a to 7c briefly describe an example of a method suitable for forming in a polymer resin pyramids of the type of those of FIG. 6b or of those of FIG. 8a.
- a method well known to those skilled in the art consists of producing, using standard photolithography and etching processes developed by the microelectronics industry, a printing mold 610.
- the mold is preferably made of crystalline silicon. having a so-called crystalline orientation (1 1 1) which is the corresponding Miller index.
- a hard mask 620 is previously and conventionally created on the surface of a silicon substrate. This hard mask 620 will be used for etching 630 of the patterns to be printed in the silicon.
- the conditions of the etching are adapted so that it is preferably done along the crystalline plane (1 1 1).
- An etching with inclined flanks 640 is thus obtained as shown in FIG. 7a.
- the etching angle is then substantially 54.7 degrees which corresponds to the crystalline orientation (1 1 1) of the substrate.
- Figure 7b shows the mold 610 after etching, removal of the hard mask and reversal. It is then ready to be used to print pyramids in a polymer resin to manufacture, for example, a network of aspherical microlenses as previously described.
- FIG. 7c shows a structure of pyramidal patterns 210 before annealing as already shown in FIG. 2. It is obtained in this embodiment by printing the mold 610 in a polymer resin previously deposited on a substrate 120. The printing leaves in place a residual layer 201 so as to obtain a continuous profile consisting of a single material as discussed above.
- a release layer consisting of a monolayer of molecules containing fluorinated atoms is deposited on the surface of the mold for facilitate its withdrawal after printing.
- the substrate to be structured 120 is for example covered with a heat-curable thermoplastic polymer film or by exposure to UV radiation.
- a thermoplastic is for example polymethyl methacrylate (PMMA) or polystyrene (PS).
- a UV-curable polymer is typically a photosensitive resin such as, for example, the so-called SU-8 resin which is widely used in lithography.
- the mold and the substrate are heated to a temperature above the glass transition temperature (Tg) of the polymer used.
- the heating temperature is typically selected in a temperature range of 10 to 50 ° C above the glass transition temperature.
- the mold is then pressed into the polymer film until the cavities are completely filled. The pressure exerted ranges from a few bars to forty bars. Then, the mold and the substrate are cooled to a temperature below the glass transition temperature and then separated.
- FIGS. 8a to 8e show results of annealing experiments carried out from pyramidal patterns resting on a thin residual layer forming a structure similar to that of Figure 7c.
- the pyramids were printed in a SU-8 type resin using a silicone mold as described in FIGS. 7.
- the samples were then heated at 65 ° C for different periods of time and then cooled rapidly to at room temperature.
- FIGS. 8a to 8d are images obtained using a scanning electron microscope (SEM) for increasing annealing times:
- FIG. 8a shows the initial pyramidal pattern after printing in the resin.
- FIGS. 8b to 8c show the evolution of the shape of the pyramidal pattern, respectively: after an annealing of a duration of 1 minute, after 2.5 minutes and after 10 minutes. By increasing the annealing time one would obtain a flat shape, without motive.
- the taper parameters (R and k) were calculated for the different shapes observed. As shown in FIG. 8e, we find the same type of evolution of the pairs of conicity parameters R, k as a function of the annealing time 710 (in minutes) than that obtained by simulation in FIG. 6d.
- the invention thus makes it possible to simulate obtaining the aspherical microlens arrays having the desired conicity. It follows that on the basis of the results of these simulations it is possible to determine the optimal parameters which will allow us to effectively obtain the desired conicity at the end of a real creep operation. It is therefore known to produce with the method of the invention networks of aspherical microlenses whose conicity can be precisely controlled.
- FIGS. 9a to 9e illustrate an implementation of the method of the invention for the production of microlenses of the so-called Fresnel type.
- FIG. 9a illustrates a large lens 810 (relative to the dimensions of the microlens arrays to which the invention is directed), the thickness of which may have to be significant in order to obtain the desired optical properties. It has been known since the beginning of the 19th century (A. Fresnel) that a convex plane lens can be cut into concentric annular sections 820 which together provide the same optical properties as a single thick lens.
- concentric rings 830 are initially formed, for example in a polymer resin disposed on a substrate 120, the profiles of which are at first approximated by steps of different levels, in greater or lesser numbers. These initial patterns are therefore formed of a stack of discrete volumes. At this stage, therefore, the initial patterns intended to be polished are formed, at the end of which they will acquire their final form. We always note the presence of the residual layer 201.
- grayscale lithography Another way to obtain the discrete levels of the initial patterns is to use a particular type of lithography known as "gray-scale lithography", that is, grayscale lithography.
- grayscale lithography a particular type of lithography known as “gray-scale lithography”
- FIG. 9c illustrates the shape obtained after creep.
- the creep conditions are predictively determined.
- FIG. 9d is a photograph carried out using a scanning electron microscope (SEM) which shows initial patterns in stair steps, produced for example by grayscale lithography, which make it possible, after annealing, to obtain , a Fresnel lens as shown in Figure 9c.
- SEM scanning electron microscope
- FIG. 9e illustrates the evolution of an initial staircase profile 840 after different creep times 850.
- a smoothing of the initial shape is obtained which makes it possible to approximate with a good precision the ideally desired shape by carrying out simulations such as the allows the presence of a residual layer and by acting as previously on the various geometric and physical parameters available: in particular, shape and dimensions of the initial profile, thickness of the residual layer, temperature and duration of the annealing.
- the 3D forms produced using the method of the invention are used for the production of a printing mold which will itself be used by a production method of a particular device.
- the realization of the mold may include the steps necessary for the deposition of a release layer.
- the production of a mold may also require stabilization of the resin, or the thermoplastic material used, and a treatment ensuring its longevity of use as a metallization of the exposed surfaces during printing.
- FIG. 10 illustrates the steps of a method of the invention that make it possible to obtain possibly complex forms by creep.
- obtaining the final shape 1010 of the patterns that it is desired to obtain firstly passes through the definition 1010 thereof as a function of the application in question.
- the definition 1010 for example, in the case of a microlens array, it is known very precisely to define the shape of the microlenses required for the application in question as a function of the desired focal length and aperture.
- the initial form 1020 is then selected from which the creep operation will be performed. This choice depends on many parameters including the definition of the means with which the initial shape can be obtained, for example, using standard photolithography operations or by using the so-called grayscale photolithography or starting from a mold printing. The choice will be done in an iterative manner by predicting the final form by simulation 1030 using a library of possible initial shapes 1025 already tested and possibly using a convergence algorithm 1035 to obtain by simulation a shape, otherwise absolutely identical, at least very close to the desired final shape. The appreciation of the proximity between form The desired shape and shape can be defined rigorously, for example, by using a correlation coefficient between the two forms and continuing the above iterations until the goal is reached or exceeded.
- the 1025 form library can be enriched by all previous experiments. It will be recalled here that the simulation step is made possible by the presence of the residual layer.
- the means for obtaining this initial shape are set up.
- This step may include the manufacture of lithography masks or a printing mold. It will not be necessary if the means for forming the initial patterns does not require a mask or mold, which would be the case if these initial patterns are obtained by electron beam lithography for example.
- This embodiment step includes controlling the thickness of the residual layer.
- the creep operation itself is then carried out at a temperature and for a time defined by the simulation.
- the results obtained are then validated 1090 with, possibly, corrective actions applied at the iterative simulation loop 1020, 1025, 1030 and 1035.
- Figure 11 describes the simulation steps according to the structure of the pattern to be fluted.
- the choice of the creep model to be applied depends on the geometry of the pattern, in particular by comparing the values of the average residual thickness (hr), the average height of the pattern (hd) and the horizontal extension (hb) of the pattern.
- closure equation or law of behavior
- VT riV 2 v (E8) where ⁇ is a physical parameter called Newtonian viscosity.
- the simulation of a creep that is to say the simulation of the topographic evolution of the patterns, amounts to solving the movement of the free interface (fluid-air interface). This movement is determined by the flow of the fluid, and its simulation requires the resolution of the system bringing together the equations (E1), (E3), (E4), (E6) and (E7), which we will call complete system.
- step 1220 the average height of the pattern (hd) and the horizontal extension (hb) of the pattern are compared.
- ratio hd / hb is not low, that is to say if it is not less than 1 then we use the first simulation model 1230 where we proceed to the resolution of the equation Stokes and the complete system. Indeed, if the form ratio hd / hb is medium or large, that is to say in practice greater than 1, then no approximate model exists and the resolution of the complete system is necessary.
- a finite element or finite volume calculation code can be used, for example, using commercially available software such as: COMSOL, FLUENT and OPENFOAM. The calculation time on a personal computer is of the order of a few minutes to several hours depending on the size and complexity of the pattern.
- V 2 where h is the Laplacian of the local thickness.
- Two models can then be used which correspond to steps 1250 and 1260 of FIG.
- the lubrication theory 1250 can be applied. Typically, if hd / hr ⁇ 0.5 then, step 1250 is applied. This theory is widely used in the field of thin films [cf.
- the fluid is considered to be a fluid
- the Reynolds equation can be solved by a finite volume method [cf. Y. Ha, Y.-J. Kim and T. G. Myers. Journal of Computational Physics 227, 7246-7263 (2008)].
- the calculation time on a personal computer is of the order of a few seconds to several minutes depending on the size and complexity of the pattern.
- the wave theory capillaires is a physical model for describing the evolution of a free liquid interface subjected to a small deformation. On a human scale this can be likened to wrinkles caused on the surface of a lake by the wind or a stone's throw. This theory can adapt to the creep of a nanometric or micrometric pattern. If the deformations of the interface are small, then the pressure at the interface can be approximated by that at the level of the average thickness (denoted Hm) p ⁇ h) ⁇ p ⁇ Hm) (E1 1)
- the calculation consists in decomposing the topography of the free surface into plane waves (capillary waves of wave vector k), and studying the dynamics of the flow in the frequency domain (of frequency ⁇ ).
- the study in the frequency domain is not essential for a Newtonian fluid, but it allows to take into account viscoelastic fluids whose viscosity depends on the frequency (this viscosity, noted ⁇ ( ⁇ ), is called in general complex viscosity ).
- This process makes it possible to transform the partial differential equations (E1) and (E6) into algebraic equations. The details of the calculations are not reported here [cf. E. Rognin, S. Landis, and L. Davoust. Physical Review E 84, 041805 (201 1)].
- i is the imaginary unit
- k is the norm of the wave vector
- f is a dimensionless function of the wave vector normalized by the mean thickness Hm:
- Ti (k, t) is the amplitude of the wave vector mode k at time t.
- Simulating the topographic evolution of the film is therefore, in this case, to decompose the topography into plane waves by a Fourier transform algorithm, using software such as MATLAB or OCTAVE, and to apply to each mode the exponential multiplying coefficient of Equation (E14).
- the computing time on a personal computer is less than the second.
- the invention thus makes it possible to accurately predict the evolution over time of a form subjected to creep. It therefore makes it possible to considerably reduce the number of experiments that were necessary with the existing solutions, in particular to obtain complex structures.
- the form obtained by annealing may be used as a polymeric mold or etched in a substrate to form the mold itself.
- the method of the invention provides the field of producing aspherical microlens array solutions or significantly improves the following points:
- the focusing distance can be chosen as close as possible to the aspherical microlens, which is not the case with hemispherical or spherical microlenses;
- the invention is not limited to the production of microlenses and extends to the realization of all types of devices for electronic, micromechanical, electromechanical (MEMS, NEMS ...), optical or optoelectronic (MOEMS. ..)
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US15/112,375 US10739583B2 (en) | 2014-01-20 | 2015-01-19 | Method for obtaining at least one structure approximating a sought structure by reflow |
JP2016564408A JP6800753B2 (ja) | 2014-01-20 | 2015-01-19 | 所望の構造に近似する少なくとも一つの構造をリフローによって得るための方法 |
EP15700594.3A EP3097048A1 (fr) | 2014-01-20 | 2015-01-19 | Procédé d'obtention par fluage d'au moins une structure approximant une structure souhaitée |
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FR1450410A FR3016700A1 (fr) | 2014-01-20 | 2014-01-20 | Procede d'obtention par fluage d'au moins une structure approximant une structure souhaitee |
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US6909930B2 (en) | 2001-07-19 | 2005-06-21 | Hitachi, Ltd. | Method and system for monitoring a semiconductor device manufacturing process |
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JP4527967B2 (ja) | 2003-11-17 | 2010-08-18 | オリンパス株式会社 | 焦点板原盤及びその製造方法 |
JP2006235084A (ja) | 2005-02-23 | 2006-09-07 | Fuji Photo Film Co Ltd | マイクロレンズの製造方法 |
FR2958750B1 (fr) | 2010-04-13 | 2012-03-30 | Commissariat Energie Atomique | Procede de determination de la viscosite d'un film mince. |
WO2011138237A1 (fr) | 2010-05-07 | 2011-11-10 | Paul Scherrer Institut | Fabrication de structures nanométriques et micrométriques à reliefs continus |
DE102010034020A1 (de) | 2010-08-11 | 2012-02-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Oberflächenstruktur sowie Fresnel-Linse und Werkzeug zur Herstellung einer Oberflächenstruktur |
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Non-Patent Citations (1)
Title |
---|
SUNG-KIL LEE ET AL: "Glass Reflowed Microlens Array and its Optical Characteristics", OPTICAL MEMS AND NANOPHOTONICS, 2007 IEEE/LEOS INTERNATIONAL CONFERENC E ON, IEEE, PI, 1 August 2007 (2007-08-01), pages 75 - 76, XP031155575, ISBN: 978-1-4244-0641-8 * |
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