WO2015104221A1 - Gasmessgerät - Google Patents
Gasmessgerät Download PDFInfo
- Publication number
- WO2015104221A1 WO2015104221A1 PCT/EP2015/000028 EP2015000028W WO2015104221A1 WO 2015104221 A1 WO2015104221 A1 WO 2015104221A1 EP 2015000028 W EP2015000028 W EP 2015000028W WO 2015104221 A1 WO2015104221 A1 WO 2015104221A1
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- Prior art keywords
- gas
- sensor
- unit
- measuring channel
- sensor unit
- Prior art date
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- 230000008929 regeneration Effects 0.000 claims abstract description 48
- 238000011069 regeneration method Methods 0.000 claims abstract description 48
- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 21
- 230000005669 field effect Effects 0.000 claims description 6
- 238000010897 surface acoustic wave method Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 163
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- 239000012080 ambient air Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0029—Cleaning of the detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
- G01N2291/0215—Mixtures of three or more gases, e.g. air
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2462—Probes with waveguides, e.g. SAW devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Definitions
- the present invention relates to a sensor unit for detecting a gas, a method for operating such a sensor unit, and a gas meter having such a sensor unit.
- Gas meters are used to detect and monitor gases and vapors in the ambient air of a human user. Gas meters are particularly important for detecting and monitoring toxic gases in industrial environments and at the workplace. In such applications there may be a very large number of toxic substances in the gas phase of the ambient air which endanger the health of persons present,
- PAM personal gas monitoring
- Each sensor consists of at least the receptor and the transducer.
- the receptor interacts at the molecular level with analyte molecules (that is, the gas molecules of the, for example, toxic substance to be detected). This changes a physicochemical property of the receptor. This change is detected by the transducer and converted into an electrical signal.
- FIG. 1 shows, by way of example, a gas sensor signal which is output when, in the region of the receptor, the analyte concentration assumes a rectangular course over time. The time is plotted on the x-axis and the intensity on the y-axis
- the sensor When the receptor is exposed to an analyte concentration K that develops over time, the sensor usually reacts with a rapid increase (response) of the tranducer signal S to a maximum, which essentially corresponds to the anolyte concentration K equivalent. This signal change takes place in the measurement phase.
- the response time of a sensor by definition (EN45544-1: 1999) is 90% or 50% of the maximum signal intensity (t 90 , t 50 ). The shorter the response time, the earlier a warning of the analyte can take place. If the analyte supply is turned off, usually also the transducer signal S approaches zero. This signal change takes place in the regeneration phase.
- the recovery time is used, which is defined as falling to 10% of the signal maximum.
- the size, weight and energy consumption play an important role especially in personal gas detectors. The same applies accordingly to the gas sensors used in the gas measuring instruments.
- CFET capacitively coupled field effect transistor
- US3906473 describes a semiconductor sensor for detecting carbon monoxide which is sensitive to CO at low sensor temperatures.
- US4012692 utilizes the differential reactivity of carbon monoxide and hydrocarbons at different sensor temperatures to distinguish the analytes.
- a semiconductor-based sensor is also operated at different temperatures. Modifications are described in US4399684, US4567475, EP0092068.
- WO2012100979A1 is a. Operating method of a breathing gas analyzer based on field effect transistor-based Sensors described that provides different temperatures for a measuring operation and up to one hour of regeneration phase.
- DE19926747 describes a receptor for the detection of ammonia.
- the invention relates to a sensor unit for detecting a gas comprising: a pressure-tight measurement channel, a gas inlet for introducing the gas into the measurement channel, a gas outlet for discharging the gas from the measurement channel, and a pump unit for evacuating the measurement channel; wherein the measurement channel comprises a gas sensor for detecting the gas and a heating unit for heating the gas sensor, and wherein the sensor unit is configured to be operated in a measurement mode and a regeneration mode, wherein in the regeneration mode the measurement channel is evacuated and the gas sensor is heated.
- the invention is based on the idea that a particularly early and reliable gas warning can be achieved if the sensor unit of a gas meter is regenerated particularly thoroughly and quickly. According to the invention this is achieved in that the gas sensor is not only heated, but also evacuated. These two desorption processes (thermal desprption and vacuum desorption) occur essentially simultaneously. During desorption of the receptor of the gas sensor, the atoms or molecules leave the analyte the surface of the receptor solid, so that the receptor is "purified.” According to the invention, desorption by simultaneous heating and evacuation of the receptor is particularly rapid and thorough in order to obtain the receptor Gas sensor for the next Prepare measuring process. Thus, significantly shortened response and regeneration times for adsorption-based sensors can be achieved.
- the measuring channel is designed to form a pressure-tight cavity, if both gas inlet and gas outlet are also sealed pressure-tight.
- the measuring channel can have a round, square, oblong, but also curved shape. Different geometric shapes of the measuring channel allow an advantageous adaptation of the sensor unit to spatial conditions. Thus, for example, with a curved measuring channel a particularly small design can be achieved.
- the gas inlet is designed to allow gas to enter the measuring channel in its open state (with or without the assistance of the pump unit) and to be sealed pressure-tight in its closed state, so that the pump unit can evacuate the measuring channel.
- the gas inlet is a valve.
- the valve is opened and closed by a control unit.
- the gas outlet is designed to allow gas to flow out of the measuring channel in its open state (with or without the assistance of the pump unit) and to be closed in a pressure-tight manner in its closed state, so that the pump unit can evacuate the measuring channel.
- the gas outlet preferably has a valve. It is conceivable that the valve is opened and closed by a control unit.
- the gas outlet is integrated into the pump unit, i.
- the pump unit is also designed to allow gas to flow out of the measuring channel in the open state (with or without the assistance of the pumping function) and to seal the measuring channel in a pressure-tight manner in the closed state.
- the pump unit is configured to evacuate the measurement channel. By evacuating the measuring channel and thus the gas sensor, the gas molecules detected in a current measuring process are desorbed from the receptor of the gas sensor, thus preparing the receptor for the next measuring process.
- the pump unit can also be operated to suck gas into or into the measurement channel hineinzupumpen. The penetration of gas into the measuring channel can thus be accelerated, which in turn allows a faster measurement.
- the pump unit is arranged at the gas outlet and designed to evacuate the measuring channel with the gas inlet closed. As a result, an evacuation of the measuring channel is achieved particularly quickly.
- the gas sensor is configured to detect a gas flowing past or abutting the gas sensor.
- the gas sensor is preferably designed to detect the gas at a sensor or sensor surface (also referred to herein as "receptor") of the gas sensor.
- the gas sensor is an adsorption-based gas sensor.
- a gas sensor in the sense of the present application is a functional unit which is capable of detecting a concentration of at least one chemical substance (gas or liquid) and converting this information into an electrical or optical signal.
- the gas sensor converts the information about the presence of the gas to be detected in the ambient air into an electrically usable signal.
- the gas sensor is a chemical sensor, in particular an electrochemical gas sensor.
- the gas sensor is designed to be reversibly used in measurement processes, i. the gas sensor is preferably a non-consuming gas sensor.
- the gas sensor preferably has a receptor and a transducer.
- the receptor is designed to interact at the molecular level with analyte molecules (i.e., the gas molecules to be detected), thereby altering the physicochemical properties of the receptor.
- the transducer is designed to detect these changes and convert them to an electrical signal, which then indicates the detection of the gas.
- the heating unit is designed to heat the gas sensor, in particular the receptor of the gas sensor. By heating the receptor, the gas molecules detected in a current measurement process are desorbed from the receptor, thus preparing the receptor for the next measurement process.
- heating means any relative increase in temperature, be it one or more Kelvin or even hundreds of Kelvin an increase in temperature (heating) takes place, is the temperature at which the gas sensor is operated in the measuring mode. The increase relative to this reference temperature takes place in the regeneration mode.
- the sensor unit can be operated in a measurement mode and a regeneration mode. In the regeneration mode, the measuring channel is evacuated and the gas sensor is heated. Preferably, the operation of the sensor unit is controlled by a control unit.
- control unit may be part of the sensor unit or be provided externally to this as hardware or software.
- Switching from the regeneration mode to the measurement mode deactivates the pump unit and the heating element and opens the gas inlet and gas outlet.
- the ambient air and the analyte therein are carried past the receptor of the gas sensor, thereby enabling detection.
- the gas inlet and gas outlet are closed and the pump unit and the heating element are activated.
- the ambient air and analyte present in the measurement channel are thus desorbed from the receptor and pumped out of the measurement channel, thereby cleaning and preparing the receptor for next detection of the gas.
- the gas sensor is based on a capacitively coupled field effect transistor (CCFET) sensor.
- CCFET capacitively coupled field effect transistor
- the gas sensor is a cantilever sensor.
- a cantilever sensor has at least one so-called cantilever (or microcantilever), which is a tiny tip, as it is also used in atomic force microscopes.
- the cantilever is coated with a material that specifically binds the gas molecules to be detected.
- Cantilevers can swing like a spring. If additional gas molecules bind to the cantilever, the mass of the cantilever changes and thus its oscillation frequency, which is recorded as a measured variable. If this measured variable changes, the gas is detected.
- Cantilever sensors have a particularly high sensitivity in the ppm range.
- the gas sensor is a Surface Acoustic Wave (SAW) sensor.
- SAW Surface Acoustic Wave
- a SAW gas sensor surface waves propagate on a piezoelectric crystal and are transformed into voltage fluctuations. If the analyte binds to a material arranged on the piezoelectric crystal, its mass and thus the wave characteristic (transit time or propagation velocity, amplitude, frequency) of the surface wave on the piezoelectric crystal changes. This change is reflected in the voltage fluctuations, whereby the analyte is detected.
- the SAW gas sensors also advantageously have a high sensitivity, a fast response and a long service life.
- the above-mentioned gas sensors have advantages in that they are very small, which in turn allows a smaller construction of the sensor unit and thus the gas meter. Furthermore, their energy consumption is low, so that the sensor unit can be operated over a longer period of time. Also, their response times for the measuring process and the temperature, ie the heating and the subsequent cooling are relatively short, so that a rapid measurement and preparation for the next measurement is possible. This is essential to ensure early warning of an existing gas.
- the sensor unit is operated shorter in the measurement mode than in the regeneration mode.
- the period of the measuring mode is thus shorter than the period of a regeneration mode.
- the sensor unit is operated in the measuring mode for less than one minute, preferably less than ten seconds, and more preferably less than one second.
- the sensor unit is operated in the regeneration mode for less than ten minutes, preferably less than one minute, and more preferably less than ten seconds.
- the sensor unit is preferably operated alternately in the measuring mode and in the regeneration mode.
- one cycle of measurement mode and regeneration mode lasts less than five minutes, and more preferably less than one minute. The shorter a cycle of Measuring mode and regeneration mode, the earlier it can be warned before exceeding a limit value of the gas to be detected.
- the heating unit is configured to heat the gas sensor to 20 ° C to 400 ° C, preferably 30 ° C to 150 ° C. As already explained above, but also lower and higher temperatures are possible; it is only essential that the gas sensor is heated in regeneration mode with respect to the measuring mode.
- the heating element is in particular designed to heat the sensor surface or the receptor of the gas sensor.
- the pump unit is configured to generate a negative pressure in the measuring channel of less than 500 mbar, preferably less than 100 mbar, and particularly preferably less than 5 mbar.
- the pump unit is in particular designed to generate a negative pressure of less than 500 mbar, preferably less than 100 mbar, and particularly preferably less than 5 mbar, at the sensor or receptor of the gas sensor.
- the mentioned negative pressures are absolute pressures, so that the respectively named pressure prevails in the measuring channel or at least in the region of the receptor.
- the sensor unit further has a computing unit for determining a gas concentration.
- the arithmetic unit is, for example, a computer unit.
- Determining the gas concentration includes calculating or otherwise deriving the gas concentration from measured quantities such as measurement time, signal change, temperature, pressure, etc.
- the computing unit is configured to determine the concentration of the gas based on the signal change over the measurement time.
- the arithmetic unit determines the gas concentration based on the slope of signal change versus measurement time.
- the invention in another aspect, relates to a gas meter having a sensor unit according to the present invention.
- a preferred gas meter for use with a sensor unit according to the present invention is described in DE 10 2005 050 914 A1 and B4, their descriptions and Teachings are hereby incorporated by reference.
- the gas meter is a portable device.
- the gas meter is a PAM device.
- the invention relates to a method of operating a sensor unit according to the present invention, the method comprising a measurement mode and a regeneration mode, and wherein the regeneration mode comprises evacuating the measurement channel, and heating the gas sensor.
- the embodiments described above may be combined as desired with one another and with the aspects described above in order to achieve advantages according to the invention.
- preferred combinations of embodiments described above will be described by way of example, wherein: FIG. 1 illustrates the principle of operation of a known chemical gas sensor;
- Figure 2 shows an embodiment of a sensor unit according to the invention
- Figure 3 shows an embodiment of a CCFET gas sensor according to the invention
- Figure 4 illustrates a process of detection of the analyte by a known chemical gas sensor
- FIG. 5 shows sensor signals at different desorption processes
- FIG. 6 shows sensor signals at different analyte concentrations
- Figure 7 shows the relationship between the slope of the sensor signals of Figure 6 and the analyte concentrations
- Figure 8 shows a timing diagram for the measurement and regeneration phases
- Figure 9 shows an embodiment of a gas meter according to the invention.
- FIG. 10 shows an embodiment of a method for operating a
- FIG. 2 illustrates a schematic representation of the structure of a sensor unit 10.
- the sensor unit 10 is designed to detect a gas and comprises: a pressure-tight measuring channel 11, a gas inlet 12 for introducing (shown by an arrow) of the gas into the measuring channel 1 1, a gas outlet 13 for performing (also shown by an arrow) of the gas from the measuring channel 11 and a pump unit 14 for evacuating the measuring channel. 1 1.
- the measuring channel 11 has a gas sensor 15 for detecting the gas and a heating unit 16 for heating the gas sensor 15.
- the sensor unit 10 is configured to operate in a measurement mode and a regeneration mode. In the regeneration mode, the measurement channel 11 is evacuated and the gas sensor 15 is heated, whereby rapid and thorough desorption is achieved.
- the gas sensor 15 is, for example, a CCFET (as shown in FIG. 3) integrated in the pressure-tight channel 11.
- This measuring channel 11 can be closed at its two sides: At the gas-supplying side with a shut-off valve 12 and on the gasabshareden side by a pump 14 which simultaneously forms the gas outlet 13.
- FIG. 3 shows a CCFET gas sensor.
- a field-effect transistor 21 with electrodes 22 and 23 in combination, which in turn are in capacitive coupling to a gas-sensitive layer (receptor) 24.
- the gas-sensitive layer 24 interacts with the gas molecules in the air gap 25 as a function of the analyte concentration.
- the adsorbed anal t molecules change the surface potential of the gas-sensitive layer 24. This change leads to a potential change between the electrodes 22 and 23 and is detected by the FET 21 and transmitted to the transducer 26.
- a heating unit 16 is provided in order to heat the gas-sensitive layer 24.
- a time-dependent signal S is obtained, as shown in FIG.
- the sensor operation is divided into two time periods: one measurement phase and one regeneration phase.
- the signal resulting from a rectangular course of the concentration K of the analyte initially exhibits a nearly linear increase, the slope A having as the load increases, it becomes smaller and eventually zero. The latter usually takes several hours.
- a gas sensor 15 according to the invention is temporarily thermally heated and evacuated substantially simultaneously. As a result, the desorption is much faster.
- FIG. 4 illustrates a detection process of an analyte with a determination of the gradient A of the sensor signal S as a measure of the analyte concentration K.
- the sample air to be analyzed is guided past the gas sensor 15 or its receptor 24 through the measurement channel 11.
- the pressure corresponds almost to the respective ambient pressure.
- the analyte molecules bind at the surface of the receptor 24 to suitable receptor structures, in particular to receptor molecules.
- the binding that results leads to a change in the surface properties of the receptor 24, which in turn is detectable in the form of a change in voltage.
- a signal is generated, the time course of which is shown in FIG.
- the slope A of the signal is also detected.
- the part of the signal curve S which is generated at a time, in which the number of sites of the receptor 24, which have already absorbed analytes, is still significantly smaller than the number of total available adsorption sites.
- the slope A is determined within this, quite short time interval (for example, less than 15 seconds).
- FIG. 5a shows a comparison of the sensor signals S at a gas sensor temperature (or the temperature on the receptor surface) of 40.degree. C. and at an elevated gas sensor temperature for a thermal desorption at 60.degree.
- the solid line R describes the curve at a receptor surface temperature of 40 ° C.
- the curve R initially increases almost linearly. Then, the analyte supply is undergebrocheh, the signal R drops significantly, but does not reach the zero value in the period considered. This leaves a residue of adsorbed analyte molecules.
- the dashed line TD60 describes the curve when, after interruption of the analyte supply, the gas sensor 15 is heated to 60 ° C. This results in the curve going faster to zero.
- FIG. 5b shows a comparison of the sensor signals S at an elevated gas sensor temperature for a thermal desorption at 60 ° C. and at a vacuum desorption at 40 ° C.
- FIG. 5b likewise shows the curve TD60 for the thermal desorption at 60.degree. It is compared with the curve VD40 when the measuring channel 11 is evacuated with the gas sensor 15. The VD40 signal drops much faster than the TD60 thermal desorption signal, but then crosses the TD60 thermal desorption curve and does not reach the zero value in the considered period.
- the sensor signals S which are generated at an elevated gas sensor temperature for thermal desorption at 60 ° C, and the sensor signals S, at a elevated gas sensor temperatures are observed during a combination of vacuum desorption and thermal desorption at 60 ° C.
- the thermal desorption curve TD60 at 60 ° C is compared with the vacuum desorption curve VD60 at 60 ° C.
- the signal VD60 drops significantly steeper than the signal TD60 and also reaches the zero value relatively early, which corresponds to a substantially complete desorption of the analyte molecules from the receptor surface. If the zero value is reached, after opening the shut-off valve at the gas inlet 12, the next measurement can be performed.
- FIG. 6 shows various sensor signals S at different analyte concentrations K.
- the time-dependent sensor signal curves S differ at various different analyte concentrations K, which is illustrated in FIG.
- a CCFET from Micronas was subjected to various ammonia concentrations.
- the signal change in mV is detected and the associated slope A is determined.
- the signal changes are dependent on the analyte concentration K. The higher the anolyte concentration K, the greater the associated slope A.
- FIG. 7 shows the dependence between the slope A of the sensor signals S of FIG. 6 and the analyte concentrations K.
- the slopes A determined after a measuring time of 10 seconds are plotted against the associated analyte concentrations K.
- the regeneration phase follows.
- the regeneration phase is usually longer in time than the measurement phase, eg 50 seconds.
- the supply of the sample gas is interrupted, the shut-off valve is closed and the gas phase located above the receptor 14 is sucked off with the pump 14. This is shown in Figures 5 and 6, in which the signal intensity I in the regeneration phase to zero decreases because the analyte molecules that have bound to the receptor 24 during the measurement phase, are at least almost completely desorbed in the subsequent regeneration phase.
- a regeneration mode offers the following advantages:
- the early determination of the analyte concentration K from the gradient A in comparison to a known t 90 determination (see FIG. 4) is advantageous in particular for gas warning devices 100, in which the speed of the measurement and warning has immediate relevance to the safety and health of the user.
- the combination of vacuum desorption and thermal desorption leads to a particularly effective cleaning or desorption of the receptor surface. Thorough desorption, in turn, is a prerequisite for using the described slope method.
- the receptor surface is generally contaminated with little analyte molecules. This also increases the life of the receptor.
- the portable gas meter 100 of Figure 9 has a housing which is composed of a plurality of housing parts, in particular of the front shell 1 and the rear shell 2. On the two housing inner sides in each case an annular retaining element 20 is provided for receiving the sensor unit 10. In front of and behind the sensor unit 10, damping intermediate elements 3, 4, for example made of a foamed polymer or of a cellular rubber, are arranged. Furthermore, the circuit board 6 has an opening 30 for receiving the sensor unit 10. On the circuit board 6, the arithmetic unit 17 is also provided, which, however, can also be integrated into the sensor unit 10.
- the sensor unit 10 is connected to the plug 6b via a flexible connecting element 5b.
- the openings 40 in the housing establish a gas flow connection to the environment.
- the component is an optional housing part, which serves as an electrical supply unit 7 (for example battery or rechargeable battery).
- an electrical supply unit 7 for example battery or rechargeable battery.
- a multiple gas analyzer 100 are in addition a plurality of electrochemical gas sensors 10 for specific measurement of certain gases, such as specifically 0 2 , Cl 2 , CO, C0 2 , H 2 , H 2 S, HCN, NH 3 , NO, N0 2 , PH 3 , S0 2 , amines, odorant, COCI 2 and organic vapors.
- the gas meter 100 is preferably designed by appropriate tightness of the assembled housing and / or by an explosion-proof design of the electrical components for use in an explosion protection area.
- FIG. 10 shows a sequence of measurement and regeneration phase.
- the sensor unit 10 is operated in the measuring mode and the measuring phase 31 durêtm to detect an analyte can.
- the sensor unit 10 is operated in the regeneration mode and the regeneration phase 32 is performed.
- the regeneration phase 32 comprises a step S3 of evacuating the measurement channel 11 or the receptor 24 and a step S4 of heating the gas sensor 15 or the receptor 24.
- the receptor 24 Upon completion of the regeneration phase 32, the receptor 24 is ready for a new measurement and the next cycle of the process begins with the execution of the next measurement mode 31.
- VD60 Sensor unit signal at vacuum desorption at 60 °
- Step 2 Regeneration during the regeneration phase 32
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Abstract
Description
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EP15700526.5A EP3092486A1 (de) | 2014-01-11 | 2015-01-09 | Gasmessgerät |
US15/110,238 US10191023B2 (en) | 2014-01-11 | 2015-01-09 | Gas-measuring device |
RU2016133009A RU2659141C2 (ru) | 2014-01-11 | 2015-01-09 | Газоанализатор |
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RU (1) | RU2659141C2 (de) |
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WO2018006932A1 (de) | 2016-07-04 | 2018-01-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Gerät mit mikrofluidaktor |
DE102020213386A1 (de) | 2020-06-09 | 2021-12-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Sensoranordnung und Verfahren zum Erfassen einer Menge oder einer Konzentration eines Zielfluids in einem Medium mit der Sensoranordnung |
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WO2018006932A1 (de) | 2016-07-04 | 2018-01-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Gerät mit mikrofluidaktor |
US10845274B2 (en) | 2016-07-04 | 2020-11-24 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Device having a micro fluid actuator |
DE102020213386A1 (de) | 2020-06-09 | 2021-12-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Sensoranordnung und Verfahren zum Erfassen einer Menge oder einer Konzentration eines Zielfluids in einem Medium mit der Sensoranordnung |
US11624741B2 (en) | 2020-06-09 | 2023-04-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensor arrangement and method for sensing an amount or a concentration of a target fluid in a medium with the sensor arrangement |
Also Published As
Publication number | Publication date |
---|---|
CN105874333B (zh) | 2019-12-31 |
US20160327532A1 (en) | 2016-11-10 |
US10191023B2 (en) | 2019-01-29 |
RU2016133009A (ru) | 2018-02-16 |
DE102014000343A1 (de) | 2015-07-16 |
EP3092486A1 (de) | 2016-11-16 |
RU2659141C2 (ru) | 2018-06-28 |
CN105874333A (zh) | 2016-08-17 |
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