WO2015103931A1 - 基于流体力学原理的三坐标测头系统及三坐标测量方法 - Google Patents

基于流体力学原理的三坐标测头系统及三坐标测量方法 Download PDF

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WO2015103931A1
WO2015103931A1 PCT/CN2014/095454 CN2014095454W WO2015103931A1 WO 2015103931 A1 WO2015103931 A1 WO 2015103931A1 CN 2014095454 W CN2014095454 W CN 2014095454W WO 2015103931 A1 WO2015103931 A1 WO 2015103931A1
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air
probe
coordinate
tip
measured
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PCT/CN2014/095454
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English (en)
French (fr)
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于德弘
张旭超
庄健
王立忠
汪翔宇
张凡
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西安交通大学
于德弘
张旭超
庄健
王立忠
汪翔宇
张凡
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Publication of WO2015103931A1 publication Critical patent/WO2015103931A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids

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  • the invention belongs to the technical field of measurement, and particularly relates to a three-coordinate probe system and a three-coordinate measuring method based on the principle of fluid mechanics.
  • CMM Coordinate Measuring Machining
  • CMM can not only complete various complex measurements under computer control, but also exchange information with CNC machine tools to realize the control of processing, and can also realize reverse engineering based on measurement data.
  • CMM has been widely used in various sectors such as machinery manufacturing, automobile industry, electronics industry, aerospace industry and national defense industry, and has become an indispensable universal measuring device for modern industrial inspection and quality control.
  • the coordinate measuring machine picks up the signal with the probe, so the performance of the measuring head directly affects the measurement accuracy and measurement efficiency. Without the advanced probe, the function of the measuring machine cannot be fully utilized.
  • the probes used on the CMM can be divided into mechanical, optical and electrical according to the structural principle; and can be divided into contact and non-contact according to the measurement method.
  • the mechanical contact probe is a rigid probe. According to the shape of the touched part, it can be divided into a conical probe, a cylindrical probe, a spherical probe, a semi-circular probe, a point probe, a V-block probe, etc. .
  • Such probes are simple in shape and easy to manufacture, but the magnitude of the measurement force depends on the experience and skill of the operator, so the measurement accuracy is poor and the efficiency is low. At present, except for a few manual measuring machines, such measuring heads are used, and most measuring machines no longer use such measuring heads.
  • Electrical contact probes are currently used in most coordinate measuring machines and can be divided into dynamic probes and static probes according to their working principle.
  • the optical probe has no mechanical contact with the object to be measured.
  • This non-contact measurement has some outstanding advantages, mainly reflected in: 1) it is suitable for measuring various soft and thin ones because there is no measurement force. 2) Due to the non-contact measurement, the surface of the workpiece can be quickly scanned and measured; 3) Most optical probes have a relatively large range, which is difficult to achieve with general contact probes; 4) can detect general mechanical measurements on workpieces. A difficult part of the head. In recent years, optical probes have developed rapidly. At present, there are many types of optical probes used in coordinate measuring machines, such as triangulation probes, laser focusing probes, fiber optic probes, stereoscopic three-dimensional probes, and contact types. Raster probes, etc.
  • optical probes overcomes the shortcomings of mechanical and electrical probes to some extent, there are still some shortcomings, especially in the case of uneven optical properties of the surface of the object to be measured, the surface needs to be processed. The original surface of the measured object is changed, so that the measurement accuracy is lowered and the workload is increased.
  • the object of the present invention is to provide a three-coordinate probe system based on the principle of fluid mechanics and three coordinates Measurement methods.
  • the present invention adopts the following technical solutions.
  • a three-coordinate probe system based on the principle of fluid mechanics, the three-coordinate probe system includes a gas pipe and an air probe connected to one end of the gas pipe, and the gas path formed by the gas pipe and the air probe is provided for detecting the A pressure sensor having two different air pressures of the gas path, or a flow path formed by the air pipe and the air probe is provided with a flow sensor for detecting the air flow of the air path.
  • the three-coordinate probe system further includes a computer and a pressure chamber, the pressure sensor or the flow sensor being connected to the computer, and the other end of the air tube and the computer are respectively connected to the pressure chamber.
  • the air probe is tubular, and one end of the air probe is provided with a micro hole for taking in air or exhausting air, and the other end of the air probe is connected to the air pipe.
  • the air probe is disposed in any one-dimensional coordinate direction corresponding to the three-coordinate space, and can be controlled to move in a corresponding direction, for example, in the Z-axis direction of the gantry bridge type coordinate measuring instrument.
  • the above three-coordinate measuring method of the three-coordinate probe system based on the fluid mechanics principle comprises the following steps:
  • the tip of the air probe continuously draws in air from the outside or continuously discharges air to the outside, and at the same time, the tip of the air probe is controlled to approach the surface of the object to be measured; the tip of the air probe is close to the measured During the process of the surface of the object, the difference ⁇ P between the two air pressures of the gas path is obtained by using a computer. When the ⁇ P is changed from a constant value, the tip of the air probe is stopped near the surface of the object to be measured, and according to the air probe.
  • the tip of the tip calculates the distance between the tip of the air probe and the corresponding point on the surface of the object to be measured at the ⁇ P corresponding to the stop time, or acquires the air of the air path by using a computer during the process of the tip of the air probe approaching the surface of the object to be measured.
  • the flow rate when the air flow rate is changed from a constant value, causes the tip of the air probe to stop near the surface of the object to be measured, and calculates the tip of the air probe corresponding to the surface of the object to be measured according to the air flow rate of the tip of the air probe at the stop time. The distance of the point.
  • the air probe is moved in the horizontal direction, and the air probe is height-adjusted according to the change of ⁇ P or the air flow during the movement, and when the ⁇ P or the air flow becomes small, the air probe is moved upward, when ⁇ P or When the air flow becomes large, the air probe is moved downward, thereby achieving continuous distance scanning of the surface of the object to be measured by the air probe.
  • the three-coordinate probe system and the three-coordinate measuring method of the present invention work by inhaling or emitting air through an air probe, and the air static pressure inside the air passage pipe formed by the air probe and the air pipe is accompanied by the air probe to the detected object.
  • Distance measurement and feedback control for surface distance change, the three-coordinate probe system and the three-coordinate measuring method of the present invention overcome the existing mechanical, electrical contact probe and optical non-contact measurement
  • the shortcomings of the head also have the advantages of simple structure, high measurement accuracy, fast scanning speed and strong adaptability.
  • FIG. 1 is a schematic view showing the overall structure of a three-coordinate measuring system according to an embodiment of the present invention
  • FIG. 2 is a schematic structural view of a probe system of the three-coordinate measuring system shown in FIG. 1;
  • Figure 3 is a ⁇ P-d simulation result curve
  • Figure 4 is a graph showing the actual experimental results of ⁇ P-d
  • 1 is the measuring table
  • 2 is the gantry column
  • 3 is the beam
  • 4 is the center carriage
  • 5 is the Z axis
  • 6 is the probe
  • 7 is the measured object
  • 8 is the air pipe
  • 9 is the pressure chamber
  • 10 is The computer
  • 61 is an air probe
  • 62 is a first air pressure sensor
  • 63 is a second air pressure sensor
  • 64 is a micro hole
  • 91 is an air pump.
  • the invention provides a three-coordinate measuring method based on the principle of fluid mechanics, and designs a three-coordinate measuring head system, so that non-contact rapid continuous scanning can be realized on the basis of accurate measurement, and There are no special requirements for the material, physical properties and surface properties of the material to be tested.
  • the probe system using the present invention can be used in various coordinate measuring instruments.
  • the gantry bridge type three coordinate measuring instrument is taken as an example for description.
  • the coordinate measuring system is the most common gantry bridge structure, as shown in Figure 1.
  • the three-coordinate measuring system comprises a measuring table 1, a gantry column 2, a beam 3, a central carriage 4, a Z-axis 5, a probe 6, a gas pipe 8 and a pressure chamber 9, wherein the beam 3 is supported by the gantry column 2, below the beam 3.
  • the measured object 7 is placed on the measuring table 1
  • the central carriage 4 is placed on the beam 3
  • the Z-axis 5 is connected to the central carriage 4
  • the probe 6 is placed on the Z-axis 5, and the pressure chamber 9 is passed.
  • the trachea 8 is connected to the probe 6 to provide a stable pressure environment for the probe 6.
  • the pressure chamber 9 includes an air pump 91.
  • the air pump 91 measurement control unit is connected to the computer 10 for communication, and transmits pressure data in the pressure chamber to the computer.
  • the computer also sends a control signal to the air pump 91 to control the pressure of the pressure chamber 9.
  • the probe 6 and the measuring station 1 are also connected to the computer 10 and communicated to collect pressure and coordinate information and to control the movement of the probe.
  • the structure and working principle of the probe are mainly described below.
  • the structure of the probe 6 is as shown in FIG. 2, and includes an air probe 61, a first air pressure sensor 62 and a second air pressure sensor 63.
  • the air probe 61 is connected to the pressure chamber 9 through the air tube 8 to provide a stable pressure to the air probe 61.
  • the tip of the air probe 61 is provided with a micro hole 64, and during operation, the air is continuously sucked in or discharged due to the pressure difference (the working mode can be selected according to the characteristics of the object to be tested).
  • the first air pressure sensor 62 is embedded in the inner wall of the air probe 61 near the micro hole, and the second air pressure sensor 63 is embedded away from the micro hole, and is used to collect the static pressure of the two places and send it to the computer 10 respectively.
  • the working principle of the probe 6 is specifically described below: when the measuring instrument is working, the air probe 61 will gradually approach On the surface of the object 7 to be tested, when the distance of the tip of the air probe 61 from the surface of the object 7 is much larger than the radius of the tip of the air probe 61, the intake or exhaust resistance of the air probe 61 does not change, and the first air
  • the air pressure difference ⁇ P at the pressure sensor 62 and the second air pressure sensor 63 has no relationship with the tip distance d of the air probe 61 from the surface distance d of the object 7 to be measured, and ⁇ P is always stabilized at a constant value;
  • the intake or exhaust resistance of the air probe 61 is increased according to the principle of fluid mechanics, and the first air pressure sensor is increased.
  • the air pressure difference ⁇ P at the 62 and second air pressure sensor 63 changes significantly.
  • the closer the tip of the air probe 61 is to the surface of the object 7 to be measured the smaller the difference ⁇ P of the air pressure measured by the first air pressure sensor 62 and the second air pressure sensor 63 is.
  • the computer can obtain and control the distance of the tip of the air probe 61 from the surface of the object 7 by the change of the signal difference between the first air pressure sensor 62 and the second air pressure sensor 63, according to the obtained distance data.
  • the spatial coordinate distance of the X, Y, and Z axes is combined to obtain the spatial coordinate value of the corresponding point on the surface of the object to be measured, and then the shape data of the measured object 7 is measured. Since the method adopts the non-contact principle, the fast scanning type measurement can be realized in actual use, thereby overcoming the shortcoming of the slow measurement speed of the contact type probe jumping working mode. According to the working principle of the probe, the measurement accuracy is directly related to the size of the micropore at the tip of the air probe 61. Therefore, the size of the air probe 61 can be selected according to the accuracy requirement and the size of the object to be measured, thereby achieving both measurement speed and accuracy.
  • the measured air flow rate is related to the above ⁇ P. Therefore, the flow sensor can be used to replace the above two air pressure sensors to complete the measurement.
  • the probe system of the invention has inherent advantages over the conventional probe system, and has the advantages of simple structure, high measurement precision, strong adaptability, and high-level scanning of the air probe on the surface of the object to be tested, thereby greatly improving measurement efficiency. .

Abstract

一种基于流体力学原理的三坐标测头系统及三坐标测量方法，测头系统包括气管(8)以及与气管的一端相连的空气探针(61)，气路中设置有用于检测所述气路不同两点空气压力的压力传感器(62,63)，或者气路中设置有用于检测所述气路空气流量的流量传感器，该三坐标测头系统以及三坐标测量方法通过空气探针吸入或射出空气进行工作，利用空气探针以及气管构成的气路管道内部的空气静压会随空气探针到被探测物体表面距离的变化而变化这一特性进行反馈控制，克服了现有的机械式、电气式接触测头及光学非接触式测头的缺点，具有结构简单，测量精度高，扫描速度快、适应性强等优点。

Description

基于流体力学原理的三坐标测头系统及三坐标测量方法 技术领域
本发明属于测量技术领域，具体涉及一种基于流体力学原理的三坐标测头系统及三坐标测量方法。
背景技术
三坐标测量机(Coordinate Measuring Machining，简称CMM)是20世纪60年代发展起来的一种新型高效的精密测量仪器。它的出现，一方面是由于自动机床、数控机床高效率加工以及越来越多复杂形状零件加工需要有快速可靠的测量设备与之配套；另一方面是由于电子技术、计算机技术、数字控制技术以及精密加工技术的发展为三坐标测量机的产生提供了技术基础。1960年，英国FERRANTI公司研制成功世界上第一台三坐标测量机，到20世纪60年代末，已有近十个国家的三十多家公司在生产CMM，不过这一时期的CMM尚处于初级阶段。进入20世纪80年代后，以ZEISS、LEITZ、DEA、LK、三丰、SIP、FERRANTI、MOORE等为代表的众多公司不断推出新产品，使得CMM的发展速度加快。现代CMM不仅能在计算机控制下完成各种复杂测量，而且可以通过与数控机床交换信息，实现对加工的控制，并且还可以根据测量数据，实现反求工程。目前，CMM已广泛用于机械制造业、汽车工业、电子工业、航空航天工业和国防工业等各部门，成为现代工业检测和质量控制不可缺少的万能测量设备。
三坐标测量机是用测头来拾取信号的，因而测头的性能直接影响测量精度和测量效率，没有先进的测头就无法充分发挥测量机的功能。在三坐标测量机上使用的测头，按结构原理可分为机械式、光学式和电气式等；而按测量方法又可分为接触式和非接触式两类。
1.机械接触式测头
机械接触式测头为刚性测头，根据其触测部位的形状，可以分为圆锥形测头、圆柱形测头、球形测头、半圆形测头、点测头、V型块测头等。这类测头的形状简单，制造容易，但是测量力的大小取决于操作者的经验和技能，因此测量精度差、效率低。目前除少数手动测量机还采用此种测头外，绝大多数测量机已不再使用这类测头。
2.电气接触式测头
电气接触式测头目前已为绝大部分坐标测量机所采用，按其工作原理可分为动态测头和静态测头。
3.光学非接触式测头
在多数情况下，光学测头与被测物体没有机械接触，这种非接触式测量具有一些突出优点，主要体现在：1)由于不存在测量力，因而适合于测量各种软的和薄的工件；2)由于是非接触测量，可以对工件表面进行快速扫描测量；3)多数光学测头具有比较大的量程，这是一般接触式测头难以达到的；4)可以探测工件上一般机械测头难以探测到的部位。近年来，光学测头发展较快，目前在坐标测量机上应用的光学测头的种类也较多，如三角法测头、激光聚集测头、光纤测头、体视式三维测头、接触式光栅测头等。
虽然光学测头的出现在一定程度克服了机械式和电气式测头的缺点，但自身仍存在一些不足，特别是在被测物体表面光学特性不均匀情况下，需要对表面进行处理，这就改变了被测物原始表面，使得测量精度降低，而且增加了工作量。
发明内容
本发明的目的在于提供一种基于流体力学原理的三坐标测头系统及三坐标 测量方法。
为达到上述目的，本发明采用了以下技术方案。
一种基于流体力学原理的三坐标测头系统，该三坐标测头系统包括气管以及与气管的一端相连的空气探针，所述气管与空气探针形成的气路中设置有用于检测所述气路不同两点空气压力的压力传感器，或者所述气管与空气探针形成的气路中设置有用于检测所述气路空气流量的流量传感器。
所述三坐标测头系统还包括计算机以及压力室，所述压力传感器或者流量传感器与计算机相连，所述气管的另一端以及计算机分别与压力室相连。
所述空气探针为管状，空气探针的一端设置有用于吸入空气或排出空气的微孔，空气探针的另一端与气管相连。
所述空气探针设置于三坐标空间内对应的任意一维坐标方向上，可在对应方向上受控移动，例如在龙门桥式三坐标测量仪的Z轴方向上。
上述基于流体力学原理的三坐标测头系统的三坐标测量方法，包括以下步骤：
利用压差作用使空气探针的尖端从外界不断吸入空气或向外界不断排出空气，同时，使空气探针的尖端受控向被测物体表面上一点靠近；在空气探针的尖端靠近被测物体表面的过程中利用计算机获取所述气路不同两点空气压力的差值△P，当△P由恒定值变小时，使空气探针的尖端停止靠近被测物体表面，并根据空气探针的尖端在停止时刻对应的△P计算空气探针的尖端与被测物体表面对应点的距离，或者，在空气探针的尖端靠近被测物体表面的过程中利用计算机获取所述气路的空气流量，当空气流量由恒定值变小时，使空气探针的尖端停止靠近被测物体表面，并根据空气探针的尖端在停止时刻对应的空气流量计算空气探针的尖端与被测物体表面对应点的距离。
使空气探针沿水平方向移动，移动过程中使空气探针根据△P或者所述空气流量的变化进行高度调整，当△P或者空气流量变小时，使空气探针向上移动，当△P或者空气流量变大时，使空气探针向下移动，从而实现空气探针对被测物体表面连续的定距扫描。
本发明的有益效果体现在：
本发明所述三坐标测头系统以及三坐标测量方法通过空气探针吸入或射出空气进行工作，利用空气探针以及气管构成的气路管道内部的空气静压会随空气探针到被探测物体表面距离的变化而变化这一特性进行距离测量和反馈控制，使本发明所述三坐标测头系统以及三坐标测量方法克服了现有的机械式、电气式接触测头及光学非接触式测头的缺点，同时还具有结构简单，测量精度高，扫描速度快、适应性强等优点。
附图说明
图1是本发明实施例的三坐标测量系统的整体结构示意图；
图2是图1所示的三坐标测量系统的测头系统结构示意图；
图3为△P-d仿真结果曲线；
图4为△P-d实际实验结果曲线；
图中：1为测量台，2为龙门立柱，3为横梁，4为中央滑架，5为Z轴，6为测头，7为被测物，8为气管，9为压力室，10为计算机，61为空气探针，62为第一空气压力传感器，63为第二空气压力传感器，64为微孔，91为空气泵。
具体实施方式
下面结合附图和实施例对本发明作详细说明。
本发明提出一种基于流体力学原理的三坐标测量方法，并设计了一种三坐标测头系统，从而能在准确测量的基础上，实现非接触的快速连续扫描，且对 被测物材料、物理特性以及表面特性没有特殊要求。采用本发明的测头系统可用于各种三坐标测量仪，为了简要说明，以龙门桥式三坐标测量仪为例进行说明。
三坐标测量系统为最为常见的龙门桥式结构，如图1所示。该三坐标测量系统包括测量台1，龙门立柱2，横梁3，中央滑架4，Z轴5，测头6，气管8以及压力室9，其中，横梁3由龙门立柱2支撑，横梁3下方为测量台1，被测物7置于测量台1上，中央滑架4设置于横梁3上，Z轴5与中央滑架4相连，测头6设置于Z轴5上，压力室9通过气管8与测头6连接，为测头6提供稳定的压力环境。压力室9包含一个空气泵91，空气泵91测量控制单元与计算机10相连进行通讯，将压力室内压力数据传送给计算机，计算机同时也发送控制信号给空气泵91以控制压力室9压力。测头6以及测量台1也都与计算机10相连并进行通讯，以采集压力和坐标信息，并控制测头的运动。
下面重点说明测头的结构和工作原理，测头6的结构如图2所示，包括空气探针61，第一空气压力传感器62和第二空气压力传感器63。空气探针61通过气管8与压力室9连接，为空气探针61提供稳定压力。空气探针61尖端设置有微孔64，工作时由于压差作用会不断吸入空气或排出空气(可根据被测物的特点选择工作方式)。第一空气压力传感器62嵌于空气探针61的内壁靠近微孔处，而第二空气压力传感器63则嵌于远离微孔处，分别用来采集两处的空气静压力，并发送给计算机10。由流体力学原理可知两处的压差△P＝fLρV2/2D，其中L为压力测量点的距离，V为流体的平均流速，D为管道直径。所以为了能够在流速和管道直径一定的情况下增大压差(有利于提高测量灵敏度)，需要增大L，即将两个空气压力传感器相互远离。
下面具体说明测头6的工作原理：测量仪工作时，空气探针61会逐渐靠近 被测物7表面，当空气探针61尖端离被测物7表面的距离远大于空气探针61尖端微孔半径时，空气探针61的进气或排气阻力没有变化，而第一空气压力传感器62和第二空气压力传感器63处的空气压力差值△P与空气探针61尖端距离被测物7表面距离d没有任何关系，△P始终会稳定在一个恒定的数值；而当空气探针受控向下运动，其尖端离被测物7表面距离与其尖端微孔半径相当时，根据流体力学原理，空气探针61的进气或排气阻力会增大，第一空气压力传感器62和第二空气压力传感器63处的空气压力差值△P会发生明显变化。根据流体力学原理及仿真数据结果，当空气探针61尖端离被测物7表面越近，第一空气压力传感器62和第二空气压力传感器63测量的空气压力的差值△P越小。根据这一特点，计算机就可以通过第一空气压力传感器62和第二空气压力传感器63的信号差值变化来取得和控制空气探针61尖端离被测物7表面的距离，根据取得的距离数据结合X,Y,Z轴的空间移动距离从而获得被测物表面对应点的空间坐标值，进而测量出被测物7的外形数据。由于本方法采用非接触式原理，所以在实际使用中可以实现快速扫描式测量，从而克服接触式测头跳跃工作模式测量速度慢的缺点。根据测头工作原理可知其测量精度与空气探针61尖端微孔的大小直接相关，所以可以根据精度要求及被测物尺寸选择合适的空气探针61尺寸，从而实现测量速度与精度兼顾。
采用空气流量传感器时，测量到的空气流量与上述△P相关，因此，可以采用流量传感器替换上述两个空气压力传感器完成测量。
本发明所提出的方法和设计的测头系统已经使用大型计算流体力学软件进行过严格的仿真计算，并且进行了实验验证，参见图3和图4，在相同条件下(压力室压力为-0.7MPa，气管内径为2.5mm，微孔直径为0.4mm)，仿真结果和实验结果均表明，当d足够小时，△P与d存在函数关系。
本发明所述测头系统比传统测头系统具有先天的优点，不但结构简单，测量精度高，适应性强，而且可以实现空气探针在被测物表面的定高扫描，从而大大提高测量效率。

Claims (6)

  1. 一种基于流体力学原理的三坐标测头系统，其特征在于：该三坐标测头系统包括气管(8)以及与气管(8)的一端相连的空气探针(61)，所述气管(8)与空气探针(61)形成的气路中设置有用于检测所述气路不同两点空气压力的压力传感器，或者所述气管(8)与空气探针(61)形成的气路中设置有用于检测所述气路空气流量的流量传感器。
  2. 根据权利要求1所述一种基于流体力学原理的三坐标测头系统，其特征在于：所述三坐标测头系统还包括计算机(10)以及压力室(9)，所述压力传感器或者流量传感器与计算机(10)相连，所述气管(8)的另一端以及计算机(10)分别与压力室(9)相连。
  3. 根据权利要求1所述一种基于流体力学原理的三坐标测头系统，其特征在于：所述空气探针(61)为管状，空气探针(61)的一端设置有用于吸入空气或排出空气的微孔(64)，空气探针(61)的另一端与气管(8)相连。
  4. 根据权利要求1所述一种基于流体力学原理的三坐标测头系统，其特征在于：所述空气探针(61)设置于三坐标空间内对应的任意一维坐标方向上。
  5. 一种如权利要求1所述基于流体力学原理的三坐标测头系统的三坐标测量方法，其特征在于：包括以下步骤：
    利用压差作用使空气探针(61)的尖端从外界不断吸入空气或向外界不断排出空气，同时，使空气探针(61)的尖端受控向被测物体表面上一点靠近；在空气探针(61)的尖端靠近被测物体表面的过程中利用计算机获取所述气路不同两点空气压力的差值△P，当△P由恒定值变小时，使空气探针(61)的尖端停止靠近被测物体表面，并根据空气探针(61)的尖端在停止时刻对应的△P计算空气探针(61)的尖端与被测物体表面对应点的距离，或者，在空气探针(61)的尖端靠近被测物体表面的过程中利用计算机获取所述气路的空气流量， 当空气流量由恒定值变小时，使空气探针(61)的尖端停止靠近被测物体表面，并根据空气探针(61)的尖端在停止时刻对应的空气流量计算空气探针(61)的尖端与被测物体表面对应点的距离。
  6. 根据权利要求5所述一种基于流体力学原理的三坐标测头系统的三坐标测量方法，其特征在于：使空气探针(61)沿水平方向移动，移动过程中使空气探针(61)根据△P或者所述空气流量的变化进行高度调整，当△P或者空气流量变小时，使空气探针(61)向上移动，当△P或者空气流量变大时，使空气探针(61)向下移动，从而实现空气探针对被测物体表面连续的定距扫描。
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