WO2015093465A1 - Miroir de collecteur, dispositif de détection de particules de lumière/chargées, et dispositif d'analyse d'échantillon - Google Patents

Miroir de collecteur, dispositif de détection de particules de lumière/chargées, et dispositif d'analyse d'échantillon Download PDF

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Publication number
WO2015093465A1
WO2015093465A1 PCT/JP2014/083233 JP2014083233W WO2015093465A1 WO 2015093465 A1 WO2015093465 A1 WO 2015093465A1 JP 2014083233 W JP2014083233 W JP 2014083233W WO 2015093465 A1 WO2015093465 A1 WO 2015093465A1
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Prior art keywords
sample
light
charged particles
mirror body
charged particle
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PCT/JP2014/083233
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English (en)
Japanese (ja)
Inventor
粟田　正吾
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株式会社堀場製作所
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Publication of WO2015093465A1 publication Critical patent/WO2015093465A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Definitions

  • the present invention relates to a condenser mirror, a light / charged particle detector, and a sample analyzer for detecting light generated from a sample together with charged particles from the sample.
  • an electron microscope such as a scanning electron microscope or a transmission electron microscope may be used.
  • a sample irradiated with electrons by an electron microscope light is generated in addition to charged particles such as reflected electrons and secondary electrons.
  • the generated light is cathodoluminescence, and the characteristics of the sample can be analyzed by detecting the light.
  • a condensing mirror disposed so as to be able to collect light generated from a sample is used.
  • the light collected by the condenser mirror is detected by the detector.
  • a detector for charged particles is used to detect charged particles.
  • Patent Document 1 discloses a technique in which a condensing mirror is formed by providing a light reflecting film on the surface of a phosphor used in a scintillation type detector for detecting charged particles. This technique allows light to be collected and detected while detecting charged particles with a detector.
  • the reflecting surface of the condensing mirror is a curved surface such as a paraboloid or an ellipsoid in order to collect light efficiently.
  • the reflecting surface is formed by coating a light reflecting film on the surface of the phosphor formed into a curved surface, the surface of the phosphor is formed into a curved surface without unevenness.
  • it is difficult to uniformly coat the light reflecting film on the curved surface. For this reason, there are irregularities on the reflecting surface, and irregular reflection of light occurs on the reflecting surface, and the condensing mirror cannot sufficiently condense. Therefore, there is a problem that the generated light cannot be sufficiently detected.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to collect light that is sufficiently condensed and used for detection of charged particles, and light using the light collecting mirror. -To provide a charged particle detector and a sample analyzer.
  • a condensing mirror is a condensing mirror that reflects and collects light generated from a sample irradiated with electrons, the condensing mirror body formed of a conductive material, and the condensing mirror body. It is characterized by comprising a supporting body to be supported and an insulating member that is electrically insulated between the supporting body and the collector mirror body.
  • the condensing mirror according to the present invention further includes a Faraday cup for measuring the amount of electron irradiation, the position of the Faraday cup disposed on the electron irradiation path, and the Faraday cup from the electron irradiation path. It is configured to move between a position where the reflecting surface of the collector mirror body is opposed to a portion irradiated with electrons of the sample.
  • the condensing mirror according to the present invention is characterized in that the condensing mirror body has a notch formed from a side surface to a reflecting surface.
  • the light / charged particle detection apparatus includes a condensing mirror according to the present invention, a conductive wire connected directly or via a conductive member to a condensing mirror main body included in the condensing mirror, and the conductive wire.
  • the charged particles based on a current flowing from the collector mirror body through the conductive wires due to collision of charged particles generated from an external sample that is connected and irradiated with electrons collide with the collector mirror body.
  • a light incident end is disposed at a position where the light collecting mirror condenses, and an optical fiber that guides light incident on the light incident end to the light detection unit. Is further provided.
  • a through-hole intersecting a reflecting surface is formed in the collector mirror body, an irradiation unit for irradiating light to the sample through the through-hole, And a light receiving portion for receiving light through the through hole.
  • the support provided in the condensing mirror is cylindrical, and the through hole is formed along a central axis of the support, and the irradiation unit and the light receiving unit The portion is configured to allow light to pass inside the support.
  • the sample analyzer includes a photo / charged particle detector according to the present invention, an electron irradiation source, a sample that supports the sample, and moves the sample to change the position on the sample where the electrons are irradiated.
  • a support unit and a distribution image generation unit that generates a distribution image on the sample of light and charged particles generated from the sample irradiated with electrons based on a detection result of the light / charged particle detection device.
  • the light generated from the sample irradiated with electrons is reflected by the light collecting mirror body of the light collecting mirror, collected, and detected.
  • the condensing mirror body made of a conductive material can easily form the unevenness of the reflecting surface as much as possible, and condenses light effectively.
  • charged particles such as reflected electrons and secondary electrons generated from the sample irradiated with electrons collide with the collector mirror body. Since the conductive collector mirror body and the support are insulated by an insulating member, the charge of the charged particles colliding with the collector mirror body does not flow to the ground, but a current is generated, based on the current. Detection of charged particles is possible.
  • the condensing mirror is provided with the Faraday cup, it is possible to measure the electron irradiation amount without requiring other equipment.
  • the collector mirror body is formed with a cutout from the side surface to the reflecting surface.
  • the sample analyzer can be configured such that the electron beam passes through the notch by bringing the sample close to the condenser mirror.
  • the light collected by the condenser mirror is detected after being guided by an optical fiber. This facilitates light detection in parallel with detection of charged particles.
  • the photo / charged particle detector irradiates the sample with light through the through-hole of the collector mirror body and receives light from the sample. Thereby, the image of the sample irradiated with the electron beam can be generated.
  • the photo / charged particle detection apparatus performs light irradiation to the sample and reception of light from the sample through light inside the cylindrical support.
  • the sample analyzer irradiates electrons while moving the sample to detect charged particles and light from the sample, and displays a distribution image on the sample of charged particles and light generated by electron beam irradiation. Generate. Corresponding charged particle and light distribution images are generated.
  • the present invention it is possible to detect charged particles and light generated by irradiation of the same electron beam from the same part of the sample, and the present invention has excellent effects such as enabling detailed analysis of the sample. Play.
  • FIG. 1 is a block diagram illustrating a configuration of an electron microscope according to a first embodiment.
  • FIG. 3 is a perspective view showing an appearance of a condensing mirror according to Embodiment 1.
  • 3 is a schematic cross-sectional view showing the structure of the condenser mirror according to Embodiment 1.
  • FIG. 10 is a perspective view showing an appearance of a condenser mirror according to Embodiment 2.
  • FIG. 5 is a block diagram illustrating a configuration of a sample analyzer according to a second embodiment.
  • FIG. 5 is a block diagram illustrating a configuration of a sample analyzer according to a second embodiment.
  • FIG. 1 is a block diagram illustrating a configuration of an electron microscope according to the first embodiment.
  • the electron microscope corresponds to the sample analyzer of the present invention.
  • the electron microscope includes an electron gun (irradiation source) 41 that irradiates the sample 6 with an electron beam, an electron lens system 42, and a sample stage 43 on which the sample 6 is placed.
  • a sample stage driving unit 44 such as a stepping motor that moves the sample stage 43 is connected to the sample stage 43.
  • the sample stage drive unit 44 moves the sample stage 43 in the horizontal plane direction and moves the sample 6 in the horizontal plane direction.
  • the sample stage 43 and the sample stage drive unit 44 correspond to the sample support unit in the present invention.
  • the electron gun 41, the electron lens system 42, and the sample stage 43 are housed in a vacuum box (not shown). During operation of the electron microscope, the inside of the vacuum box is kept in a vacuum.
  • the condenser mirror 1 is disposed between the electron lens system 42 and the sample stage 43.
  • the condensing mirror 1 is for reflecting and condensing the light generated from the sample 6 irradiated with the electron beam.
  • FIG. 2 is a perspective view showing the appearance of the condenser mirror 1 according to the first embodiment
  • FIG. 3 is a schematic cross-sectional view showing the structure of the condenser mirror 1 according to the first embodiment.
  • the collector mirror 1 includes a collector mirror body 11 that reflects light, a holding body 15 that holds the collector mirror body 11, and a support body 12 that supports the collector mirror body 11 and the holder 15. ing.
  • the condensing mirror body 11 and the holding body 15 are formed of a conductive material, and can conduct each other.
  • the holding body 15 is a conductive member.
  • An insulating member 13 is provided between the holding body 15 and the support body 12.
  • the insulating member 13 insulates between the collector mirror body 11 and the holding body 15 and the support body 12, and cannot conduct between the collector mirror body 11 and the holder body 15 and the support body 12. Yes.
  • the support 12 is connected to a structure of an electron microscope such as a wall of a vacuum box, and supports the condenser mirror body 11, the holding body 15, and the insulating member 13.
  • the constituent parts of the collector mirror 1 at least the collector mirror body 11 is arranged in a vacuum box.
  • the support body 12 is formed in a cylindrical shape, and the insulating member 13 is formed in an annular shape having substantially the same diameter as the support body 12.
  • An annular insulating member 13 is connected to one end of the cylindrical support 12.
  • the holding body 15 includes a cylindrical portion and two arm portions protruding from one end of the cylindrical portion.
  • the cylindrical portion of the holding body 15 is substantially concentric with the support 12 and the insulating member 13 and has the same diameter, and the other end of the cylindrical portion is connected to the insulating member 13.
  • the two arm portions face each other with an extension line of the central axis of the cylindrical portion in between, and project from one end of the cylindrical portion in parallel to the extension line of the central axis of the cylindrical portion.
  • the condenser mirror body 11 is held between the two arms of the holder 15.
  • the two arms of the holding body 15 are connected to the condenser mirror body 11 so as to be conductive.
  • the condensing mirror body 11 is held by the holding body 15 and is disposed between the electron lens system 42 and the sample stage 43.
  • the collector mirror body 11 is formed in a shape in which a block of a conductive material such as metal is processed to have a reflection surface 111 that reflects light and a through hole 112 for passing an electron beam is provided. Yes.
  • the reflecting surface 111 is formed, for example, by polishing a part of a metal block, and is formed in a shape that easily collects reflected light, such as a parabolic surface or an elliptical surface.
  • the condensing mirror body 11 is disposed at a position where the reflecting surface 111 faces the surface of the sample 6 placed on the sample stage 43.
  • the through hole 112 is formed to penetrate from the portion of the condenser mirror body 11 facing the electron lens system 42 to the reflecting surface 111.
  • the condenser mirror body 11 is disposed at a position where the electron beam irradiated from the electron gun 41 to the sample 6 placed on the sample stage 43 passes through the through hole 112. 1 and 3, the electron beam is indicated by a broken-line arrow.
  • the collector mirror body 11 is positioned so that the electron irradiation point on the sample 6 is located near the focal point of the parabolic surface or one of the elliptical surfaces. Is preferably arranged.
  • the holding body 15 is provided with a connecting portion 151 to which the conducting wire 31 is connected.
  • the conducting wire 31 is connected to the connecting portion 151 so as to be electrically connected to the holding body 15.
  • the connecting portion 151 is a screw hole, and the conductive wire 31 is connected to the connecting portion 151 using a conductive screw.
  • the support 12 is connected to the ground through the structure of the electron microscope, since the insulating member 13 is interposed between the support 12 and the holding body 15, the condenser mirror body 11 and the holding body 15 are connected to the ground. Not connected to. For this reason, the charge of a charged particle does not flow to the ground. Charges of the charged particles move through the collector mirror body 11 and the holding body 15, flow out of the collector mirror 1 through the conducting wire 31, and a current flowing through the conducting wire 31 is generated.
  • the conducting wire 31 is connected to the charged particle detector 32.
  • the charged particle detector 32 is a signal processing circuit that converts the current flowing through the conducting wire 31 into a voltage signal, amplifies the voltage signal, and generates a signal corresponding to the amount of charge of the charged particles that collided with the collector mirror body 11. .
  • a current flows through the conducting wire 31, and the charged particle detection unit 32 generates a signal corresponding to the charge amount of the charged particles. That is, the charged particle detector 32 detects charged particles generated from the sample 6 irradiated with the electron beam based on the current flowing through the conducting wire 31.
  • the charged particle detector 32 may have a function of applying a predetermined voltage to the conducting wire 31 so that a current caused by the charged particles can easily flow.
  • the tips of the two arm portions of the holding body 15 are connected to each other, and the Faraday cup 14 is connected to the tips of the two arm portions.
  • the two arms of the holding body 15 are in contact with the Faraday cup 14 so as to be conductive.
  • the Faraday cup 14 is for measuring the amount of electron beam irradiation from the electron gun 41, and has an electron beam entrance 141 formed therein.
  • the condensing mirror 1 is movable, and the electron microscope includes a condensing mirror driving unit 45 such as an actuator for moving the condensing mirror 1.
  • the condensing mirror drive unit 45 moves between a position where the Faraday cup 14 is arranged on the electron beam irradiation path and a position where the electron beam passes through the through hole 112 of the condensing mirror body 11.
  • the condenser mirror 1 is moved.
  • the electron beam from the electron gun 41 enters the entrance 141 of the Faraday cup 14.
  • the collector mirror 1 is at a position where the electron beam passes through the through-hole 112
  • the Faraday cup 14 is removed from the irradiation path, and the reflecting surface 111 of the collector mirror body 11 faces the surface of the sample 6.
  • the condensing mirror 1 may be movable to an intermediate position between the two positions described above, or may be movable to a position outside the range between the two positions described above. .
  • the electron beam When measuring the irradiation amount of the electron beam, the electron beam enters the incident port 141 of the Faraday cup 14, and the charge of the electron beam moves through the Faraday cup 14 and the holding body 15, and the condenser mirror 1 through the conducting wire 31. A current flowing outside and flowing through the conducting wire 31 is generated. At this time, the charged particle detector 32 generates a signal corresponding to the amount of charge of the electron beam based on the current flowing through the conducting wire 31. That is, the charged particle detector 32 detects the irradiation amount of the electron beam irradiated to the sample 6 based on the current flowing through the conducting wire 31.
  • the electron microscope includes an optical fiber 21, and one end of the optical fiber 21 is a light incident end 211 on which light collected by the condenser mirror 1 is incident.
  • the light incident end 211 is disposed at a position where the light reflected by the reflecting surface 111 of the collector mirror body 11 is collected.
  • the reflecting surface 111 is an ellipsoid and the electron irradiation point on the sample 6 is located near one focal point of the ellipsoid
  • the light incident end 211 is disposed near the other focal point of the ellipsoid. It is desirable.
  • the light reflected by the reflecting surface 111 and collected at the light incident end 211 is indicated by a solid line arrow.
  • the other end of the optical fiber 21 is connected to the spectrometer 22.
  • the light collected by the condenser mirror 1 is guided to the optical fiber 21 and enters the spectroscope 22, and the spectroscope 22 splits the incident light.
  • the spectroscope 22 is connected to a detector 23 that detects the intensity of the dispersed light. Since the light condensed by the condenser mirror 1 is guided by the optical fiber 21, the spectroscope 22 and the detector 23 are arranged at positions different from the condenser mirror 1 and the charged particle detector 32. It has become easier. For this reason, light can be detected in parallel with detection of charged particles.
  • the spectroscope 22 and the detector 23 correspond to the light detection unit in the present invention. Moreover, the combination of the condensing mirror 1, the optical fiber 21, the spectroscope 22, the detector 23, the conducting wire 31, and the charged particle detector 32 corresponds to the light / charged particle detector in the present invention.
  • the charged particle detector 32, the spectroscope 22, and the detector 23 are connected to the analyzer 5 that analyzes the detection results of charged particles and light.
  • the analysis unit 5 is configured by a computer such as a personal computer. A signal corresponding to the charge amount of the charged particles is input from the charged particle detection unit 32 to the analysis unit 5, a signal indicating the wavelength separated from the spectroscope 22, and a signal indicating the light intensity from the detector 23. Entered.
  • the analysis unit 5 performs processing for calculating the amount of charged particles generated from the sample 6 irradiated with the electron beam based on the signal from the charged particle detection unit 32.
  • the analysis unit 5 When the Faraday cup 14 is irradiated with an electron beam, the analysis unit 5 performs a process of calculating an irradiation amount of the electron beam irradiated on the sample 6 based on a signal from the charged particle detection unit 32. Further, the analysis unit 5 performs a process of generating a spectrum that represents the relationship between the wavelength and the intensity of light of each wavelength based on the signals from the spectroscope 22 and the detector 23. Further, a sample stage driving unit 44 is connected to the analysis unit 5, and a signal indicating the position of the sample stage 43 is input from the sample stage driving unit 44.
  • the analysis unit 5 obtains the position irradiated with the electron beam on the sample 6 based on the signal from the sample stage driving unit 44, and associates the amount of charged particles and the spectrum of light with the position on the sample 6. A distribution image of charged particles and light generated by electron beam irradiation is generated. That is, the analysis unit 5 corresponds to the distribution image generation unit in the present invention.
  • the analysis unit 5 has a function of controlling the sample stage driving unit 44, and performs processing for obtaining a position on the sample 6 where the electron beam is irradiated based on a signal for controlling the sample stage driving unit 44. Form may be sufficient.
  • the condenser mirror driving unit 45 moves the condenser mirror 1 and arranges it at a position where the Faraday cup 14 is irradiated with the electron beam from the electron gun 41.
  • the electron gun 41 emits an electron beam
  • the electron lens system 42 adjusts the direction of the electron beam
  • the electron beam is irradiated to the Faraday cup 14.
  • a current corresponding to the amount of charge of the electron beam flows through the conducting wire 31
  • the charged particle detector 32 generates a signal corresponding to the amount of charge of the electron beam
  • the analysis unit 5 calculates the amount of irradiation of the electron beam.
  • the condensing mirror driving unit 45 moves the condensing mirror 1 and arranges it at a position where the electron beam from the electron gun 41 passes through the through hole 112 of the condensing mirror main body 11.
  • the electron gun 41 emits an electron beam
  • the electron lens system 42 adjusts the direction of the electron beam
  • the electron beam passes through the through hole 112 and the sample 6. Is irradiated.
  • the charged particles generated from the sample 6 collide with the collector mirror body 11, the charge of the charged particles moves through the collector mirror body 11 and the holding body 15, and a current corresponding to the amount of charge flows through the lead wire 31.
  • the charged particle detector 32 generates a signal corresponding to the amount of charge of the charged particles that collided with the collector mirror body 11 based on the current flowing through the conducting wire 31, and the analyzer 5 detects the charged particles generated from the sample 6. Calculate the quantity.
  • the light generated from the sample 6 is reflected by the reflecting surface 111 of the condenser mirror body 11 and is collected at the light incident end 211 of the optical fiber 21.
  • the light is guided to the optical fiber 21, the spectroscope 22 splits the incident light, the detector 23 detects the split light, and the analysis unit 5 generates a light spectrum.
  • the sample stage drive unit 44 moves the sample stage 43 and changes the position on the sample 6 where the electron beam is irradiated.
  • the electron gun 41 again irradiates the sample 6 with an electron beam, and charged particles and light are generated from the sample 6, and the analysis unit 5 calculates the amount of charged particles and generates a light spectrum.
  • the electron microscope repeats the movement of the sample stage 43, the calculation of the amount of charged particles, and the generation of a light spectrum.
  • the analysis unit 5 generates a distribution image of the charged particles and light generated by the electron beam irradiation on the sample 6 by associating the position irradiated with the electron beam on the sample 6 with the amount of charged particles and the light spectrum. To do.
  • the analysis unit 5 stores data representing a distribution image of charged particles and light on the sample 6.
  • the analysis unit 5 may be configured to perform processing for displaying a distribution image of charged particles or light on the sample 6 on a display (not shown).
  • the electron microscope condenses the light generated from the sample 6 irradiated with the electron beam with the condensing mirror 1, detects the light, and collects the charged particles generated from the sample 6 with the condensing mirror 1. And charged particles are detected.
  • the condensing mirror body 11 that reflects and collects light is formed by processing a block of a conductive material, so that it is easy to reduce the presence of unevenness on the reflecting surface 111 as much as possible. For this reason, irregular reflection is reduced as much as possible on the reflecting surface 111, the condenser mirror 1 can effectively collect light, and the electron microscope can detect sufficient light.
  • the condenser mirror body 11 and the holding body 15 are made of a conductive material and are insulated from the ground by the insulating member 13, the charge of the charged particles that collided with the condenser mirror body 11 flows as current, Based on this, the generation amount of charged particles can be obtained. It is possible to detect charged particles and light generated by irradiation of the same electron beam from the same portion of the sample 6, and by analyzing charged particles and light generated by irradiation of the same electron beam from the same portion, It becomes possible to analyze the characteristics of the sample in more detail.
  • the electron microscope can easily measure the irradiation amount of the electron beam without requiring other equipment. Based on the measured irradiation amount of the electron beam, a more detailed analysis of charged particles and light generated from the sample 6 becomes possible. It is also possible to adjust the electron beam dose while measuring the electron beam dose.
  • the electron microscope can generate a distribution image of charged particles and light generated by electron beam irradiation on the sample 6. The charged particles and light from each part on the sample 6 are surely charged particles and light generated by irradiation of the same electron beam from the same part. Distribution images are completely compatible and easy to compare. By comparing the distribution images of charged particles and light on the sample 6, it is possible to investigate the sample 6 in more detail.
  • the shape of the condensing mirror 1 shown in the figure is an example, and the condensing mirror 1 can take other shapes.
  • the condensing mirror 1 may have a form in which a part of the condensing mirror main body 11 is directly connected to the insulating member 13 without including the holding body 15.
  • the support body 12 showed the form which has comprised the cylindrical shape, if the structure of the support body 12 is the structure which can support the condensing mirror main body 11, Other configurations may be used.
  • the insulating member 13 may be directly connected to the wall of the vacuum box of the electron microscope, and the wall of the vacuum box may serve as the support 12.
  • the conducting wire 31 showed the form connected to the condensing mirror main body 11 via the holding body 15, this invention connects the conducting wire 31 directly to the condensing mirror main body 11.
  • FIG. It may be in the form.
  • the form which guides light using the optical fiber 21 is shown in this Embodiment, this invention may be a form which enables the detection of light using another optical system.
  • the form in which the spectroscope 22 performs the spectroscopy is shown, but the present invention may be in the form in which the spectrum is performed by a method other than the spectroscope 22 such as using a color filter. Further, the present invention may be in the form of measuring the light intensity without performing spectroscopy.
  • the electron microscope may be configured to further include a function of detecting electrons transmitted through the sample 6 after the sample 6 is irradiated with the electron beam.
  • FIG. 4 is a perspective view showing an appearance of the condenser mirror 1 according to the second embodiment.
  • the condenser mirror 1 is provided in the sample analyzer. Similar to the first embodiment, the condensing mirror 1 includes a condensing mirror main body 11, a cylindrical holder 15, an annular insulating member 13, and a cylindrical support 12.
  • the collector mirror body 11 is connected to one end of the holding body 15, and the insulating member 13 is connected to the other end of the holding body 15 substantially concentrically.
  • the condensing mirror body 11 and the holding body 15 are formed of a conductive material, and can conduct each other.
  • the insulating member 13 is connected substantially concentrically to one end of the support 12, and the support 12 is connected to a structure of the sample analyzer such as a wall of a vacuum box.
  • the holding body 15 and the support body 12 are insulated by an insulating member 13.
  • the collector mirror body 11 is arranged in a vacuum box.
  • the condensing mirror main body 11 has a reflecting surface 111, and a through hole 112 intersecting the reflecting surface 111 is formed.
  • the reflecting surface 111 is formed in a shape that easily collects reflected light such as a parabolic surface or an elliptical surface.
  • the through-hole 112 penetrates the collector mirror body 11 from the reflecting surface 111 to the opposite side in the direction along the central axis of the holding body 15 and the support body 12.
  • a groove-shaped notch 113 is formed along the central axis of the holding body 15 from the side surface of the collector mirror body 11 to a part of the end of the reflecting surface 111.
  • the holding body 15 is provided with a connection portion 151.
  • a conducting wire 31 is connected to the connecting portion 151.
  • FIGS. 5 and 6 are block diagrams showing the configuration of the sample analyzer according to the second embodiment. 5 and 6, a part of the configuration of the sample analyzer is omitted. The components shown in any of FIGS. 5 and 6 are all included in the sample analyzer. 5 and 6 are schematic cross-sectional views of the condenser mirror 1 along the central axis of the holding body 15.
  • FIG. 5 is a cross-sectional view of the VV cross section shown in FIG. 4, and the cross sectional view of the condensing mirror 1 shown in FIG. 6 is shown in FIG. It is sectional drawing of the shown VI-VI cross section.
  • the sample analyzer includes a sample stage 43 that supports the sample 6 at a position facing the reflecting surface 111. 5 and 6 show an example in which the sample 6 is supported horizontally, but the sample stage 43 may be configured to support the sample 6 in a direction other than horizontal. For example, the sample 6 is supported by being attached to the surface of the sample stage 43.
  • the sample analyzer includes a light source 71 that emits visible light and an optical system 72 that irradiates the sample 6 with light from the light source 71.
  • the light source 71 is, for example, a light emitting diode.
  • the optical system 72 passes the light from the light source 71 along the central axes of the holder 15 and the support 12 through the inside of the support 12, the insulating member 13, and the holder 15, and is formed in the condenser mirror body 11.
  • the sample 6 is irradiated through the through-hole 112 formed.
  • the light is irradiated almost perpendicularly on the surface of the sample 6.
  • the light irradiated to the sample 6 is reflected by the surface of the sample 6, and a part of the reflected light passes through the through hole 112 in the opposite direction to the irradiated light, and extends along the central axis of the holding body 15. It passes through the inside of the insulating member 13 and the support 12. 5 and FIG. 6, the irradiation light to the sample 6 and the reflected light from the sample 6 are indicated by a two-dot chain line with an arrow.
  • the sample analyzer includes an image sensor 73 that detects light from the sample 6 that has passed through the through hole 112.
  • the optical system 72 is configured so that light that has passed through the through hole 112 and has passed through the inside of the holding body 15, the insulating member 13, and the support body 12 is incident on the image sensor 73.
  • the image sensor 73 is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide Semiconductor) image sensor.
  • the image sensor 73 detects light and captures an image of the sample 6 illuminated by the light from the light source 71.
  • the image sensor 73 outputs a signal representing the captured image of the sample 6.
  • the optical system 72 is shown as one optical component, but actually, the optical system 72 is configured by a plurality of optical components such as a mirror and a lens.
  • the light source 71 and the optical system 72 correspond to the irradiation unit in the present invention.
  • the image sensor 73 and the optical system 72 correspond to the light receiving unit in the present invention.
  • the sample analyzer includes an electron gun 41 and an electron lens system 42.
  • the electron lens system 42 is configured to adjust the direction of the electron beam so that the electron beam from the electron gun 41 passes through the notch 113 formed in the collector mirror body 11 and is irradiated to the sample 6. Yes.
  • the electron beam is indicated by a broken-line arrow.
  • the electron irradiation point on the sample 6 is positioned near the focal point of the paraboloid or one of the ellipsoids. It is desirable that The electron gun 41, the electron lens system 42, and the sample stage 43 are housed in a vacuum box (not shown).
  • the sample table 43 is connected to a sample table driving unit 44 that moves the sample table 43.
  • the sample stage drive unit 44 moves the sample 6 in the direction intersecting the central axis of the holder 15 by moving the sample stage 43.
  • the conducting wire 31 is connected to the charged particle detector 32.
  • the light generated from the sample 6 by the electron beam irradiation is reflected by the reflecting surface 111 and collected.
  • the light reflected by the reflecting surface 111 is indicated by a solid arrow.
  • the sample analyzer includes a spectroscope 22 at a position where the collected light is incident, and the spectroscope 22 is connected to a detector 23 that detects the intensity of the split light.
  • the sample analyzer may be configured to cause the collected light to enter the spectroscope 22 using an optical fiber, as in the first embodiment.
  • the combination of the condensing mirror 1, the optical fiber 21, the spectroscope 22, the detector 23, the conducting wire 31, the charged particle detector 32, the light source 71, the optical system 72, and the image sensor 73 is used in the light / charged particle detector of the present invention. Correspond.
  • the image sensor 73, the charged particle detector 32, the spectrometer 22, the detector 23, and the sample stage driver 44 are connected to the analyzer 5. Signals from the charged particle detector 32, the spectrometer 22, the detector 23, the sample stage driver 44 and the image sensor 73 are input to the analyzer 5.
  • the analysis unit 5 performs a process of calculating the amount of charged particles generated from the sample 6 irradiated with the electron beam, and performs a process of generating a spectrum of light generated by the electron beam irradiation. Moreover, the analysis part 5 calculates
  • the analysis unit 5 performs a process of generating an image of the sample 6 illuminated by the light from the light source 71 based on the signal from the image sensor 73.
  • the image of the sample 6 generated by the analysis unit 5 is an optical microscope image of the sample 6.
  • the light source 71 emits light while the sample 6 is supported on the sample stage 43, and the optical system 72 irradiates the sample 6 with light through the through hole 112.
  • the reflected light from the sample 6 passes through the through hole 112 and is detected by the image sensor 73.
  • the analysis unit 5 generates an image of the sample 6 based on the signal from the image sensor 73.
  • the electron gun 41 emits an electron beam, the electron lens system 42 adjusts the direction of the electron beam, and the sample 6 is irradiated with the electron beam. From the sample 6, charged particles such as reflected electrons and secondary electrons are generated, and light is further generated.
  • the charged particles generated from the sample 6 collide with the collector mirror body 11, the charge of the charged particles moves through the collector mirror body 11 and the holding body 15, and a current corresponding to the amount of charge flows through the lead wire 31.
  • the charged particle detection unit 32 generates a signal corresponding to the charge amount of the charged particles based on the current, and the analysis unit 5 calculates the amount of charged particles generated from the sample 6.
  • the light generated from the sample 6 is reflected by the reflecting surface 111 of the collector mirror body 11 and is incident on the spectroscope 22.
  • the spectroscope 22 splits the light, the detector 23 detects the light, and the analysis unit 5 generates a light spectrum.
  • the sample stage drive unit 44 moves the sample 6.
  • the analysis unit 5 generates a distribution image on the sample 6 of charged particles and light generated by electron beam irradiation.
  • the sample analyzer since the electron beam passes through the notch 113 and is irradiated to the sample 6, the sample 6 can be arranged as close to the condenser mirror body 11 as possible. ing. Since the sample 6 is close to the collector mirror body 11, the ratio of the charged particles and light generated in the sample 6 colliding with the reflecting surface 111 is increased, and the detection efficiency of charged particles and light is increased.
  • the analysis unit 5 stores data representing a distribution image of charged particles and light on the sample 6 and data representing an image of the sample 6.
  • the sample analyzer performs the generation of the image of the sample 6 and the electron beam irradiation in parallel or alternately, displays the image of the sample 6 on a display (not shown), and receives an instruction from the user at a reception unit (not shown).
  • the analyzer 5 may control the sample stage driving unit 44 to position the electron beam irradiation.
  • the sample analyzer detects the charged particles and light generated by irradiating the sample 6 with the electron beam and generates an image of the sample 6. For this reason, the sample analyzer can generate a distribution image of charged particles such as reflected electrons, a distribution image of cathodoluminescence, and an optical microscope image for the same sample 6.
  • the sample analyzer can generate an optical microscope image of the same portion of the sample 6 in addition to detecting charged particles and light generated from the same portion of the sample 6 by irradiation with the same electron beam. For this reason, it becomes possible to position the electron beam irradiation while observing the sample 6 with an optical microscope, and it is possible to specify the position of the electron beam irradiation on the sample 6 on the optical microscope image. Become. By analyzing the obtained results, it is possible to analyze the characteristics of the sample in more detail than before.
  • the shape of the support body 12 and the holding body 15 may be a rectangular tube shape.
  • the sample analyzer may be configured to perform spectroscopy using a method other than the spectroscope 22, or may be configured to measure light intensity without performing spectroscopy.
  • the sample analyzer may be configured to irradiate the sample 6 with monochromatic light from the light source 71 and detect the photoluminescence or Raman light generated from the sample 6 with the image sensor 73.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
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Abstract

　L'invention concerne un miroir de collecteur permettant d'effectuer une collecte de lumière appropriée, et servant à détecter des particules chargées. Le miroir de collecteur (1) est agencé entre un système de lentilles d'électrons (42) et un étage d'échantillon (43). La lumière produite par un échantillon (6) irradié par des électrons est réfléchie et collectée par un corps (11) de miroir de collecteur, et détectée. Le corps (11) de miroir de collecteur est constitué d'un matériau électriquement conducteur, par exemple un métal ou similaire, présente peu d'aspérités sur la surface réfléchissante, et réfléchit efficacement la lumière. Des particules chargées produites par l'échantillon (6) quand il est irradié par des électrons entrent en collision avec le corps (11) de miroir de collecteur. Le corps (11) de miroir de collecteur est isolé du sol par un organe isolant (13), et les charges des particules chargées en collision circulent depuis le corps (11) de miroir de collecteur électriquement conducteur pour produire un courant électrique. La quantité de particules chargées est mesurée sur la base du courant électrique. Ce faisant, les particules chargées et la lumière produites par irradiation d'électrons sur la même partie de l'échantillon (6) sont détectées.
PCT/JP2014/083233 2013-12-17 2014-12-16 Miroir de collecteur, dispositif de détection de particules de lumière/chargées, et dispositif d'analyse d'échantillon WO2015093465A1 (fr)

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JP2013260433 2013-12-17
JP2013-260433 2013-12-17

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017207337A (ja) * 2016-05-17 2017-11-24 アズビル株式会社 粒子検出装置及び粒子検出装置の検査方法
EP3792952A1 (fr) * 2019-09-16 2021-03-17 FEI Company Ensemble de guidage de lumière pour un microscope électronique

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005056A (ja) * 2003-06-10 2005-01-06 Hitachi High-Technologies Corp 走査電子顕微鏡
WO2013063005A1 (fr) * 2011-10-25 2013-05-02 Gatan, Inc. Détecteur d'électrons rétrodiffusés intégré doté d'une optique de captage à cathodoluminescence

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005056A (ja) * 2003-06-10 2005-01-06 Hitachi High-Technologies Corp 走査電子顕微鏡
WO2013063005A1 (fr) * 2011-10-25 2013-05-02 Gatan, Inc. Détecteur d'électrons rétrodiffusés intégré doté d'une optique de captage à cathodoluminescence

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017207337A (ja) * 2016-05-17 2017-11-24 アズビル株式会社 粒子検出装置及び粒子検出装置の検査方法
EP3792952A1 (fr) * 2019-09-16 2021-03-17 FEI Company Ensemble de guidage de lumière pour un microscope électronique
US11335536B2 (en) 2019-09-16 2022-05-17 Fei Company Light guide assembly for an electron microscope

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