WO2015093210A1 - 光源装置及び波長変換方法 - Google Patents
光源装置及び波長変換方法 Download PDFInfo
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- WO2015093210A1 WO2015093210A1 PCT/JP2014/080364 JP2014080364W WO2015093210A1 WO 2015093210 A1 WO2015093210 A1 WO 2015093210A1 JP 2014080364 W JP2014080364 W JP 2014080364W WO 2015093210 A1 WO2015093210 A1 WO 2015093210A1
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- 238000000034 method Methods 0.000 title claims description 38
- 230000003287 optical effect Effects 0.000 claims abstract description 267
- 239000004065 semiconductor Substances 0.000 claims abstract description 95
- 230000007246 mechanism Effects 0.000 claims abstract description 85
- 239000013078 crystal Substances 0.000 claims abstract description 78
- 230000005284 excitation Effects 0.000 claims abstract description 73
- 238000006243 chemical reaction Methods 0.000 claims abstract description 65
- 238000002789 length control Methods 0.000 claims abstract description 65
- 238000001514 detection method Methods 0.000 claims description 21
- 238000005086 pumping Methods 0.000 claims description 14
- 238000012937 correction Methods 0.000 description 10
- 230000010355 oscillation Effects 0.000 description 10
- 230000006870 function Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000001151 other effect Effects 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0092—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3542—Multipass arrangements, i.e. arrangements to make light pass multiple times through the same element, e.g. using an enhancement cavity
Definitions
- the present disclosure relates to a light source device and a wavelength conversion method.
- a pulse laser capable of intermittent light emission can greatly increase its peak power, and can be used for various processes such as optical processing and nonlinear optics. Used in the field.
- MOPA Master Oscillation Power Amplifier
- the wavelength of the semiconductor pulse laser disclosed in Non-Patent Documents 1 and 2 above is a fixed wavelength such as 405 nm due to the semiconductor element. Therefore, if it is possible to perform wavelength conversion based on the existing nonlinear optics, it is possible to reduce the size and price of the light source as compared with the solid-state laser.
- Non-Patent Documents 1 and 2 With the peak power of several hundred W of the semiconductor pulse laser as disclosed in Non-Patent Documents 1 and 2 described above, sufficient nonlinear phenomenon cannot be obtained, and the laser output is also unstable. .
- the present disclosure proposes a light source device and a wavelength conversion method capable of performing stable wavelength conversion using a semiconductor laser.
- a semiconductor laser unit that emits excitation light having a predetermined wavelength and amplifying the resonance by resonating the excitation light and generating output light having a wavelength different from that of the excitation light using a predetermined nonlinear crystal
- a wavelength conversion unit including a first optical path for amplifying the excitation light and a second optical path for generating the output light, and an optical path length of the first optical path
- a light source device comprising: a first optical path length control mechanism that controls the optical path length; and a second optical path length control mechanism that controls the optical path length of the second optical path.
- the pumping light having a predetermined wavelength emitted from the semiconductor laser unit is amplified by resonating the pumping light, and an output having a wavelength different from that of the pumping light using a predetermined nonlinear crystal.
- Light is generated and guided to a wavelength conversion unit configured by a first optical path for amplifying the excitation light and a second optical path for generating the output light; Controlling a first optical path length control mechanism for controlling an optical path length of the first optical path to optimize an optical path length of the first optical path; and controlling an optical path length of the second optical path.
- a wavelength conversion method is provided, including: controlling a two-optical path length control mechanism to optimize an optical path length of the second optical path.
- the first optical path length control mechanism and the second optical path length control mechanism are controlled to optimize separately the first optical path for amplifying the excitation light and the second optical path for generating the output light.
- the wavelength conversion is performed in the wavelength conversion unit by the nonlinear optical effect while amplifying the excitation light from the semiconductor laser unit.
- FIG. 1 is an explanatory view schematically showing an example of the configuration of the light source device according to the present embodiment.
- the light source device 1 includes a semiconductor laser 10 that is an example of a semiconductor laser unit, a wavelength conversion resonator 20 that is an example of a wavelength conversion unit, a reflected light detection unit 30, and the like.
- a correction optical system 40, a control unit 50, and a nonlinear crystal control mechanism 60 are examples of the semiconductor laser 10 and the semiconductor laser 10 in the present embodiment.
- the semiconductor laser 10 is a device that emits light of a predetermined wavelength used as excitation light under the control of the control unit 50 described later.
- the semiconductor laser 10 is not particularly limited, and a known laser can be used, but a semiconductor pulse laser is preferably used.
- a CW laser using a semiconductor can be used as long as sufficient peak power can be realized.
- FIG. 2 is a schematic diagram showing the configuration of a MOPA system that is a semiconductor pulse laser that can be suitably used as the semiconductor laser 10 according to the present embodiment.
- MOPA system applied to the light source device 1 according to the present embodiment is not limited to the configuration shown in FIG. Any known MOPA system may be applied to the light source device 1.
- the semiconductor laser 10 includes a mode-locked oscillator 110, lenses 120a, 120b, and 120c, an isolator 130, a prism pair 140, a ⁇ / 2 plate 150, a semiconductor amplifying device (Semiconductor). (Optical Amplifier: SOA) 160.
- FIG. 2 illustrates a configuration of a semiconductor pulse laser that emits blue pulsed light (pulsed light having a wavelength of about 350 nm to about 500 nm) as an example of the semiconductor pulsed laser according to the present embodiment.
- the semiconductor pulse laser according to the present embodiment is not limited to one emitting blue pulsed light, and may emit pulsed light in other wavelength bands.
- the optical characteristics of the respective constituent members of the semiconductor pulse laser may be appropriately adjusted according to the wavelength band of the emitted pulsed light.
- blue light indicates light having a wavelength between about 350 nm and about 500 nm.
- the mode-locked oscillator 110 emits pulsed laser light by resonating the output of a semiconductor laser that emits light of a predetermined wavelength with a resonator structure.
- the mode-locked oscillator 110 includes a laser diode 111, a collimator lens 113, a band pass filter (BPF) 115, and an output mirror 117.
- BPF band pass filter
- the laser diode 111 is a split-type laser diode (BS-LD) using GaInN as a main raw material.
- the laser diode 111 functions as a mode-locked laser diode (MLLD) and can emit pulsed light in a wavelength band between about 350 nm and about 500 nm.
- BS-LD split-type laser diode
- MLLD mode-locked laser diode
- the pulsed light emitted from the laser diode 111 passes through the collimator lens 113, the band pass filter 115, and the output mirror 117, and is emitted from the mode-locked oscillator 110.
- the wavelength of the pulsed light emitted from the mode-locked oscillator 110 is adjusted to, for example, about 405 nm by the bandpass filter 115.
- the pulsed light emitted from the laser diode 111 passes through the lens 120a, the isolator 130, the prism pair 140, the ⁇ / 2 plate 150, and the lens 120b provided in the subsequent stage in order, and enters the SOA 160.
- the polarization direction of the pulsed light is adjusted by the ⁇ / 2 plate 150. Further, by passing through the prism pair 140, the coupling efficiency of pulsed light incident on the SOA 160 is improved.
- the pulsed light amplified by the SOA 160 is emitted to the outside through the lens 120c.
- the configuration example of the MOPA system which is a semiconductor pulse laser that can be suitably used as the semiconductor laser 10 according to the present embodiment has been described with reference to FIG.
- the semiconductor pulse laser having the MOPA system as described above can generate pulsed light having an output of about several hundred W and a pulse time width of about 3 ps.
- the semiconductor pulse laser may not include the SOA 160.
- the wavelength conversion resonator 20 which is an example of the wavelength conversion unit will be described.
- the wavelength conversion resonator 20 amplifies the pumping light emitted from the semiconductor laser 10 by resonating under the control of the control unit 50 which will be described later. Produces different output lights.
- the wavelength conversion resonator 20 is a so-called pump resonant type wavelength conversion resonator, and includes a first optical path for amplifying excitation light, a second optical path for generating output light, It is composed of Hereinafter, the configuration of the wavelength conversion resonator 20 will be described in detail.
- the wavelength conversion resonator 20 is an example of a nonlinear crystal 201, curved mirrors 203 and 205, a pumping light input coupler 207, a pumping light mirror 209, a signal light output coupler 211, and a first optical path length control mechanism. It has the 1st servo mechanism 213 and the 2nd servo mechanism 215 which is an example of a 2nd optical path length control mechanism. Further, the wavelength conversion resonator 20 includes a dichroic mirror DM for branching the first optical path and the second optical path, and a photodetector PD for detecting the intensity of the signal light in the wavelength conversion resonator 20. , Is provided.
- the nonlinear crystal 201 is a crystal used for wavelength conversion of excitation light, and converts the wavelength of incident excitation light into another wavelength different from the wavelength of excitation light due to the birefringence of the crystal. Such a non-linear crystal 201 is determined according to the wavelength of the excitation light. For example, when blue light as described above is used as the semiconductor laser 10, the non-linear crystal 201 includes BBO ( ⁇ -BaB 2 O 4 ), LBO (LiB 3 O 5 ), BiBO (BiB 3 O 6 ), LN.
- Known non-linear crystals for blue light such as (LiNbO 3 ), LT (LiTaO 3 ), KTP (KTiOPO 4 ), etc. can be used.
- a known nonlinear crystal corresponding to such a wavelength may be used.
- the nonlinear crystal 201 By transmitting the excitation light through the nonlinear crystal 201, output light having a wavelength different from that of the excitation light can be obtained. Note that the wavelength of the output light generated by the nonlinear crystal 201 can be switched by controlling the temperature or the installation angle of the nonlinear crystal. The temperature and installation angle of the nonlinear crystal are controlled by a nonlinear crystal control mechanism 60 described later.
- the curved mirrors 203 and 205, the excitation light input coupler 207, the excitation light mirror 209, and the signal light output coupler 211 are not particularly limited, and known ones may be used.
- the dichroic mirror DM is not particularly limited as long as it has a low loss with respect to both excitation light and output light, and a known one can be used.
- the excitation light emitted from the semiconductor laser 10 is guided from the excitation light input coupler 207 to the inside of the wavelength conversion resonator 20 via the mirror M, the focusing lens L, and the like. Thereafter, the excitation light follows an optical path of the curved mirror 203, the nonlinear crystal 201, the curved mirror 205, the excitation light mirror 209, the curved mirror 205, the nonlinear crystal 201, the curved mirror 203, the excitation light input coupler 207,.
- Such an optical path corresponds to the first optical path and functions as a resonator that amplifies the excitation light.
- the excitation light passes through the nonlinear crystal 201, signal light and idler light having a wavelength different from that of the excitation light is generated.
- the signal light can be taken out and used as a light source, or idler light can be taken out and used as a light source. The case where signal light is extracted to the outside will be described as an example.
- the signal light generated from the nonlinear crystal 201 follows the optical path of the curved mirror 205, the excitation light mirror 209, the signal light output coupler 211, the curved mirror 203, the nonlinear crystal 201, the curved mirror 203,.
- Such an optical path corresponds to the second optical path, and functions as a resonator that generates output light (signal light in this description) and amplifies the intensity of the output light.
- the wavelength conversion resonator 20 is a biaxial optical system having the above two optical paths inside.
- the first resonator corresponding to the first optical path and the second resonator corresponding to the second optical path are configured such that one end portion of the optical element constituting each resonator is an excitation light mirror 209. The other end is the pumping light input coupler 207 in the case of the first resonator, and the signal light output coupler 211 in the case of the second resonator.
- the wavelength conversion resonator 20 introduces such a pan resonant system so that excitation light and OPO (Optical Parametric Oscillator) light (more specifically, in the wavelength conversion resonator 20). It is required to resonate at least one of the two oscillation lights.
- OPO Optical Parametric Oscillator
- a resonator is used so that each light circulates in the resonator at a timing that completely coincides with the oscillation period of a semiconductor laser (for example, a semiconductor pulse laser) that is an excitation light source. It is required to adjust the length (that is, the optical path lengths of the two types of optical paths) (oscillation condition A).
- the wavelength conversion resonator 20 includes the nonlinear crystal 201 as described above, the optical distance changes according to the wavelength of light due to chromatic dispersion of the crystal. As a result, it is effective to introduce the biaxial optical system as described above with different optical paths so that the excitation light and the OPO light having different wavelengths satisfy the oscillation condition A.
- a first servo mechanism 213 is provided for the excitation light mirror 209 located at one end of the first optical path, and the other optical path length of the second optical path is adjusted.
- a second servo mechanism 215 is provided for the signal light output coupler 211 located at the end.
- the control of the optical path length of the first optical path by the first servo mechanism 213 is performed according to the intensity of the reflected light obtained by detecting the reflected light of the excitation light from the wavelength conversion resonator 20.
- the optical system for detecting the reflected light is the reflected light detection unit 30 shown in FIG. The reflected light detection unit 30 will be described later again.
- a method for controlling the first servo mechanism 213 will also be described below.
- control of the optical path length of the second optical path by the second servo mechanism 215 is performed by detecting the intensity of the signal light inside the wavelength conversion resonator 20 with the photodetector PD and depending on the obtained intensity of the signal light. To be implemented. In order to implement such control, information regarding the intensity of the signal light detected by the photodetector PD is output to the control unit 50 described later. A method for controlling the second servo mechanism 215 will be described later.
- the first servo mechanism 213 and the second servo mechanism 215 as described above are not particularly limited, and a known drive mechanism such as a voice coil motor or a piezoelectric element can be used.
- the reflected light detection unit 30 guides the excitation light emitted from the semiconductor laser 10 to the wavelength conversion resonator 20, and detects the reflected light from the wavelength conversion resonator 20 for the intensity of the reflected light. It has a function of branching to a detection optical system.
- the excitation light from the semiconductor laser 10 is separated with an isolator for separating the reflected light so as not to return to the semiconductor laser 10, and a ⁇ / 2 plate (Half-Wave Plate: HWP). ) And is guided to the wavelength conversion resonator 20.
- the reflected light from the wavelength conversion resonator 20 passes through the ⁇ / 2 plate and the isolator, and then is guided to the photodetector PD via the mirror M, the neutral density filter ND, and the lens L. Is done.
- An optical system including the mirror M, the neutral density filter ND, the lens L, and the photodetector PD is a detection optical system for detecting the intensity of the reflected light.
- Information regarding the intensity of the reflected light detected by the photodetector PD is output to the control unit 50 described later and used to control the first servo mechanism 213.
- the correction optical system 40 is an optical system provided as necessary to correct the excitation light emitted from the semiconductor laser 10.
- the correction optical system 40 is provided for correcting the beam shape, aberration, and the like of the excitation light emitted from the semiconductor laser 10 and improving the coupling efficiency to the wavelength conversion resonator 20.
- the detailed configuration of the correction optical system 40 is not particularly limited, and a known optical system can be used.
- an optical system combining a lens and an anamorphic lens may be used, or an optical system including a cylindrical lens may be used.
- the correction optical system 40 need not be provided.
- the control unit 50 controls the operation of the light source device 1 according to the present embodiment as a whole, and controls the operations of the semiconductor laser 10, the first servo mechanism 213, the second servo mechanism 215, and the nonlinear crystal control mechanism 60.
- the control unit 50 is a semiconductor chip or circuit board that is mounted on the light source device 1 and includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like.
- Alternatively, various computers or servers having a CPU, a ROM, a RAM, and the like that can communicate with the light source device 1 may be used.
- the detailed configuration of the control unit 50 will be described in detail below.
- the nonlinear crystal control mechanism 60 maintains the temperature of the nonlinear crystal 201 provided in the wavelength conversion resonator 20 at a desired temperature. Further, the nonlinear crystal control mechanism 60 changes the temperature of the nonlinear crystal 201 or installs the nonlinear crystal 201 in order to switch the wavelength of the output light from the wavelength conversion resonator 20 under the control of the control unit 50. Change the angle.
- nonlinear crystal control mechanism 60 a known heating mechanism or cooling mechanism can be used.
- a known drive such as various motors or piezoelectric elements is used.
- a mechanism can be used.
- FIGS. 3 to 7. are block diagrams illustrating an example of a configuration of a control unit included in the light source device according to the present embodiment.
- 4 and 7 are explanatory diagrams for explaining an example of servo control performed by the control unit according to the present embodiment.
- FIG. 5 is an explanatory diagram for explaining an optical path optimization process performed by the light source device according to the present embodiment.
- control unit 50 includes an overall control unit 501, a nonlinear crystal control unit 503, a first optical path length control unit 505, a second optical path length control unit 507, and a storage. Unit 509.
- the overall control unit 501 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the overall control unit 501 generally controls various operations of the light source device 1 by transmitting and receiving various control signals to and from various devices and various mechanisms constituting the light source device 1 according to the present embodiment. To do. Further, the nonlinear crystal control unit 503, the first optical path length control unit 505, and the second optical path length control unit 507 can perform various controls in cooperation with each other via the overall control unit 501.
- the nonlinear crystal control unit 503 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the nonlinear crystal control unit 503 controls the state of the nonlinear crystal 201 provided in the wavelength conversion resonator 20 by controlling the operation of the nonlinear crystal control mechanism 60. That is, the nonlinear crystal control unit 503 outputs various control signals to the nonlinear crystal control mechanism 60, thereby switching the temperature of the nonlinear crystal 201 to a predetermined temperature, maintaining the temperature of the nonlinear crystal 201, The installation angle of the nonlinear crystal 201 is changed.
- the temperature control of the nonlinear crystal 201 by the nonlinear crystal control unit 503 is appropriately performed when the light source device 1 according to the present embodiment is driven. Further, the temperature switching control and the installation angle switching control of the nonlinear crystal 201 by the nonlinear crystal control unit 503 are appropriately performed when an operation for switching the wavelength of the output light is performed by the user.
- nonlinear crystal control unit 503 may refer to various control parameters stored in the storage unit 509 when controlling the nonlinear crystal 201 as described above. Such control parameters may be stored in the storage unit 509 in advance as various databases or the like. Further, the control parameters when the control is performed may be held in the storage unit 509 and used for the next control.
- the first optical path length control unit 505 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the first optical path length control unit 505 controls the driving of the semiconductor laser 10 based on the information on the reflected light intensity from the photodetector PD provided in the reflected light detection unit 30, and controls the first servo mechanism 213.
- a control signal is output to control the optical path length of the first optical path.
- Non-Patent Document 3 As a method for controlling the driving of the semiconductor laser 10 and the optical path length of the first optical path, for example, a known control method such as the PDH method disclosed in Non-Patent Document 3 can be applied. is there.
- FIG. 4 is an explanatory diagram for explaining a drive control method of the semiconductor laser 10 and a servo control method of the first servo mechanism using the PDH method.
- the PDH method modulates an excitation light source (reference light source) at a predetermined frequency (for example, about 1 to several tens of MHz) and performs feedback control using a servo signal obtained by correlation with a resonator. is there.
- a predetermined frequency for example, about 1 to several tens of MHz
- an optical element such as a light modulation element is separately required, and extra space and cost are required.
- the light source device 1 according to the present embodiment uses the semiconductor laser 10 as an excitation light source, the modulation information is transmitted to the semiconductor laser (for example, a semiconductor as shown in FIG. 2) by utilizing the modulation characteristics of the semiconductor element.
- MLLD pulse laser
- the first optical path length control unit 505 performs frequency modulation on the excitation light emitted from the semiconductor laser 10 using the modulation signal having the predetermined modulation frequency as described above, and also reflects the reflected light detection unit.
- the current applied to the DC gain section of the semiconductor laser 10 is feedback controlled according to the detection result from the photodetector PD provided at 30.
- the first optical path length control unit 505 generates a control signal for driving the first servo mechanism 213 according to the detection result from the photodetector PD, and outputs the control signal to the first servo mechanism 213.
- the first servo mechanism 213 moves the excitation light mirror 209 in the wavelength conversion resonator 20 by a predetermined amount along the optical axis based on the control signal from the first optical path length control unit 505 to Change the optical path length.
- the second optical path length control unit 507 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the second optical path length control unit 507 controls the optical path length of the second optical path based on information on the intensity from the signal light intensity detection photodetector PD provided in the wavelength conversion resonator 20. More specifically, the second optical path length control unit 507 generates a control signal for driving the second servo mechanism 215 according to the detection result from the photodetector PD, and sends the control signal to the second servo mechanism 215. Output.
- the second servo mechanism 215 moves the signal light output coupler 211 in the wavelength conversion resonator 20 by a predetermined amount along the optical axis on the basis of the control signal from the second optical path length control unit 507, so that the second optical path The optical path length is changed.
- the servo control method by the second optical path length control unit 507 is not particularly limited, and a known method such as a “mountain climbing method” by monitoring the output can be used as appropriate.
- first optical path length control unit 505 and the second optical path length control unit 507 may refer to various control parameters stored in the storage unit 509 when performing the servo control as described above. Such control parameters may be stored in the storage unit 509 in advance as various databases or the like. Further, the control parameters when the control is performed may be held in the storage unit 509 and used for the next control.
- the light source device 1 according to the present embodiment is based on the pan resonant method and the biaxial optical system, and it is required to consider the servo control procedure in order to maximize the wavelength conversion characteristic. It is done.
- a servo control procedure in the light source device 1 according to the present embodiment will be described with reference to FIG.
- the wavelength setting of the output light in the wavelength conversion resonator 20 is performed according to the crystal temperature or the installation angle of the nonlinear crystal 201 as described above. Therefore, when the light source device 1 is started up or when the wavelength is switched, the temperature and angle corresponding to the designated wavelength are set by the nonlinear crystal control mechanism 60 under the control of the nonlinear crystal control unit 503.
- the temperature of the nonlinear crystal 201 is changed by ⁇ T from the initial state (temperature T) by the nonlinear crystal control unit 503.
- the refractive index and optical path length of the nonlinear crystal 201 with respect to the excitation light are n1 + ⁇ n1 and L1 + ⁇ L1, respectively, and the refractive index and optical path of the nonlinear crystal 201 with respect to the signal light.
- the lengths are assumed to be n2 + ⁇ n2 and L2 + ⁇ L2, respectively.
- the overall control unit 501 first instructs the first optical path length control unit 505 to optimize the optical path length of the first optical path, and the first optical path length control unit 505 is as described above. In this way, the first optical path length is optimized. This control is performed by changing the position of the excitation light mirror 209 via the first servo mechanism 213 as shown in FIG.
- the overall control unit 501 continues to the second optical path length control unit 507.
- An instruction is given to optimize the optical path length of the second optical path.
- the second optical path length control unit 507 optimizes the second optical path length by the method as described above. As shown in FIG. 5C, this control is performed by changing the position of the signal light output coupler 211 via the second servo mechanism 215 while the position of the excitation light mirror 209 is fixed.
- the storage unit 509 is realized by, for example, a RAM or a storage device.
- the overall control unit 501, the nonlinear crystal control unit 503, the first optical path length control unit 505, and the second optical path length control unit 507 various databases used when performing various controls, When performing various programs including applications used for various arithmetic processes executed by the overall control unit 501, the nonlinear crystal control unit 503, the first optical path length control unit 505, and the second optical path length control unit 507, or when performing some processing
- Various parameters that need to be saved, progress of processing, or various databases may be recorded as appropriate.
- the storage unit 509 can be freely accessed by each processing unit such as the overall control unit 501, the nonlinear crystal control unit 503, the first optical path length control unit 505, and the second optical path length control unit 507 to write and read data. can do.
- control unit 50 an example of the function of the control unit 50 according to the present embodiment has been shown.
- Each component described above may be configured using a general-purpose member or circuit, or may be configured by hardware specialized for the function of each component.
- the CPU or the like may perform all functions of each component. Therefore, it is possible to appropriately change the configuration to be used according to the technical level at the time of carrying out the present embodiment.
- the first servo mechanism 213 is used to control the optical path length of the first optical path, but the first method is used to control the first optical path length. It is also possible to control the optical path length of the optical path.
- the 1st modification of the control part 50 which concerns on this embodiment is demonstrated easily, referring FIG.6 and FIG.7.
- the control unit 50 includes an overall control unit 501, a nonlinear crystal control unit 503, a first optical path length control unit 551, An optical path length control unit 507 and a storage unit 509 are provided.
- the overall control unit 501, the nonlinear crystal control unit 503, the second optical path length control unit 507, and the storage unit 509 have the same functions as the processing units described in FIG. Detailed explanation is omitted.
- the first optical path length control unit 551 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the first optical path length control unit 551 controls the driving of the semiconductor laser 10 based on the information on the reflected light intensity from the photodetector PD provided in the reflected light detection unit 30, so that the first optical path of the first optical path is controlled. Control the optical path length.
- the first optical path length control unit 551 performs frequency modulation on the excitation light emitted from the semiconductor laser 10 with a modulation signal having a predetermined modulation frequency. Further, the first optical path length control unit 551 generates a control signal for changing the refractive index in the semiconductor element of the semiconductor laser 10 in accordance with the detection result from the photodetector PD, and the laser of the semiconductor laser 10 Output to the driver 170.
- the laser driver 170 generates a feedback gain based on the input control signal from the first optical path length control unit 551, and feedback-controls the current applied to the DC gain unit of the semiconductor laser 10.
- the optical path length of the first optical path can be directly controlled without using the first servo mechanism 213.
- the semiconductor laser 10 used there is a semiconductor laser having a narrow stable oscillation region in which excitation light can be stably emitted. Since the control as described above directly controls the output of the semiconductor laser 10, when the semiconductor laser 10 having a narrow stable oscillation region is used, the state of the semiconductor laser 10 is controlled as a stable oscillation region. It can also happen that it falls out of the range. Therefore, when the semiconductor laser 10 having a narrow stable oscillation region is used, the driving of the light source device 1 can be controlled more safely by the control by the first servo mechanism 213 shown in FIG.
- control unit 50 The first modification of the control unit 50 according to the present embodiment has been briefly described above with reference to FIGS. 6 and 7.
- FIG. 8 is a flowchart showing an example of the flow of the wavelength conversion method according to the present embodiment.
- the nonlinear crystal control mechanism 60 sets the nonlinear crystal 201 to a desired condition under the control of the nonlinear crystal control unit 503, and then the semiconductor laser 10 pumps a predetermined wavelength. Light is oscillated (step S101).
- the first optical path length control unit 505 optimizes the optical path length of the first optical path (that is, the optical path length of the excitation light) without moving the signal light output coupler 211 by the method described above (Ste S103).
- the second optical path length control unit 507 controls the signal light output coupler 211 via the second servo mechanism 215 by the method described above, so that the optical path length of the second optical path (that is, the signal light) ) Is optimized (step S105).
- the signal light having a desired wavelength is stably oscillated (step S107).
- the overall control unit 501 determines whether or not the signal light wavelength switching operation has been performed by the user (step S109). When the wavelength switching operation of the signal light is performed by the user, the control unit 50 returns to Step S101 and performs wavelength switching control.
- the overall control unit 501 determines whether or not the user has stopped driving the light source device 1 (step S111). When the driving stop operation of the light source device 1 is performed by the user, the driving of the device is stopped. On the other hand, if the drive stop operation of the light source device 1 has not been performed by the user, the overall control unit 501 returns to step S109 and waits for the signal light wavelength switching process.
- the light source device 1 can convert the wavelength of the output light.
- a semiconductor laser unit that emits excitation light of a predetermined wavelength; Amplifying the pumping light by resonating, and generating output light having a wavelength different from that of the pumping light using a predetermined nonlinear crystal; a first optical path for amplifying the pumping light; A second optical path for generating the output light, and a wavelength conversion unit comprising: A first optical path length control mechanism for controlling an optical path length of the first optical path; A second optical path length control mechanism for controlling the optical path length of the second optical path; A light source device.
- a reflected light detection unit for detecting reflected light of the excitation light from the wavelength conversion unit;
- a controller that controls the first optical path length control mechanism and the second optical path length control mechanism independently of each other; Further comprising In the semiconductor laser unit, the excitation light is modulated at a predetermined frequency,
- the control unit controls a modulation frequency of the excitation light according to reflected light detected by the reflected light detection unit, and outputs a first control signal for controlling an optical path length of the first optical path.
- the light source device according to (1), which is generated.
- the first optical path length control mechanism is a first servo mechanism mounted on an optical element constituting the first optical path
- the control unit generates a second control signal for changing an optical path length of the second optical path based on the intensity of the output light inside the wavelength conversion unit, and the second control signal is generated as the second control signal.
- the light source device according to (3) which outputs to the second servo mechanism.
- the second optical path length control mechanism is a second servo mechanism attached to an optical element constituting the second optical path, The control unit outputs the first control signal to a laser control unit that controls the operation of the semiconductor laser unit, and controls an optical path length of the first optical path by controlling a driving current of the excitation light.
- a storage unit for storing control parameters set for controlling the optical path length of the first optical path and the optical path length of the second optical path;
- the light source device according to any one of (2) to (7), wherein the control unit generates a control signal using the control parameter stored in the storage unit.
- the semiconductor laser section includes a semiconductor pulse laser using a mode-locked laser in which the semiconductor laser is operated in the form of an external resonator.
- the semiconductor laser unit further includes a semiconductor optical amplifier that amplifies the output of the mode-locked laser.
- a non-linear crystal control mechanism for controlling the temperature or angle of the non-linear crystal The light source device according to any one of (2) to (10), wherein the control unit sets a wavelength of the output light by controlling a temperature or an angle of the nonlinear crystal.
Abstract
Description
なお、上記の効果は必ずしも限定的なものではなく、上記の効果とともに、または上記の効果に代えて、本明細書に示されたいずれかの効果、または本明細書から把握され得る他の効果が奏されてもよい。
1.第1の実施形態
1.1.光源装置の全体的な構成について
1.2.制御部の構成について
1.3.波長変換方法について
<光源装置の全体的な構成について>
まず、図1を参照して、本開示の第1の実施形態に係る光源装置の全体的な構成について、詳細に説明する。図1は、本実施形態に係る光源装置の構成の一例を模式的に示した説明図である。
半導体レーザ10は、後述する制御部50による制御のもとで、励起光として用いられる所定波長の光を射出する装置である。かかる半導体レーザ10は特に限定されるものではなく、公知のものを利用することが可能であるが、半導体パルスレーザを用いることが好ましい。また、十分なピークパワーが実現できるのであれば、半導体を用いたCWレーザを用いることも可能である。
再び図1に戻って、波長変換部の一例である波長変換共振器20について説明する。
波長変換共振器20は、後述する制御部50による制御のもとで、半導体レーザ10から射出された励起光を共振させることで増幅するとともに、所定の非線形結晶を用いて、励起光とは波長の異なる出力光を生成する。この波長変換共振器20は、いわゆるパンプレゾナント(pump resonant)方式の波長変換共振器であり、励起光を増幅させるための第1の光路と、出力光を生成するための第2の光路と、から構成されている。以下、この波長変換共振器20の構成について、詳細に説明する。
次に、本実施形態に係る光源装置1が備える反射光検出部30について説明する。
この反射光検出部30は、半導体レーザ10から射出された励起光を波長変換共振器20へと導光するとともに、波長変換共振器20からの反射光を、反射光の強度を検出するための検出光学系へと分岐させる機能を有している。
次に、補正光学系40について説明する。
補正光学系40は、半導体レーザ10から射出された励起光を補正するために、必要に応じて設けられる光学系である。この補正光学系40は、半導体レーザ10から射出された励起光のビーム形状や収差等を補正して、波長変換共振器20への結合効率を向上させるために設けられる。この補正光学系40の詳細な構成については特に限定されるものではなく、公知の光学系を利用することができる。例えば、かかる補正光学系40として、レンズとアナモルフィックレンズとを組み合わせた光学系を利用しても良いし、シリンドリカルレンズを含む光学系を利用しても良い。なお、半導体レーザ10から射出された励起光が、補正が不要である程の高品質な光である場合には、かかる補正光学系40を設けなくても良いことは言うまでもない。
次に、本実施形態に係る光源装置1が備える制御部50について説明する。
制御部50は、本実施形態に係る光源装置1の動作を統括して制御するとともに、半導体レーザ10、第1サーボ機構213、第2サーボ機構215及び非線形結晶制御機構60の動作を制御する処理部である。この制御部50は、光源装置1に実装された、CPU(Central Processing Unit)、ROM(Read Only Memory)、RAM(Random Access Memory)等からなる半導体チップや回路基板等のようなものであってもよいし、光源装置1と相互に通信の可能な、CPU、ROM、RAM等を有する各種のコンピュータやサーバ等であってもよい。この制御部50の詳細な構成については、以下で詳述する。
続いて、本実施形態に係る光源装置1が備える非線形結晶制御機構60について説明する。
非線形結晶制御機構60は、波長変換共振器20内に設けられた非線形結晶201の温度を所望の温度に保持する。また、非線形結晶制御機構60は、制御部50による制御のもとで、波長変換共振器20からの出力光の波長を切り替えるために、非線形結晶201の温度を変化させたり、非線形結晶201の設置角度を変化させたりする。
続いて、図3~図7を参照しながら、本実施形態に係る光源装置1が備える制御部50の構成について、詳細に説明する。図3及び図6は、本実施形態に係る光源装置が備える制御部の構成の一例を示したブロック図である。図4及び図7は、本実施形態に係る制御部で実施されるサーボ制御の一例を説明するための説明図である。図5は、本実施形態に係る光源装置で実施される光路の最適化処理を説明するための説明図である。
記憶部509は、例えば、RAMやストレージ装置等により実現される。記憶部509には、統括制御部501、非線形結晶制御部503、第1光路長制御部505及び第2光路長制御部507が、各種の制御を実施する際に利用される各種のデータベースや、統括制御部501、非線形結晶制御部503、第1光路長制御部505及び第2光路長制御部507が実行する各種の演算処理に用いられるアプリケーションを含む各種のプログラムや、何らかの処理を行う際に保存する必要が生じた様々なパラメータや処理の途中経過等、又は、各種のデータベース等が、適宜記録されてもよい。
以上説明した制御部50による制御では、第1サーボ機構213を利用して第1の光路の光路長を制御するものであったが、以下で説明するような方法を利用して、第1の光路の光路長を制御することも可能である。以下では、図6及び図7を参照しながら、本実施形態に係る制御部50の第1変形例について、簡単に説明する。
続いて、図8を参照しながら、本実施形態に係る光源装置1で実施される波長変換方法の流れについて、簡単に説明する。図8は、本実施形態に係る波長変換方法の流れの一例を示した流れ図である。
以上説明したように、本開示の実施形態に係る光源装置1及び波長変換方法によれば、ピークパワーが十分ではない半導体レーザを励起光源として用いた場合であっても、波長変換後の出力光の出力を最適にした、安定した波長変換を実現することが可能となる。
(1)
所定波長の励起光を射出する半導体レーザ部と、
前記励起光を共振させることで増幅するとともに、所定の非線形結晶を用いて当該励起光とは波長の異なる出力光を生成するものであり、前記励起光を増幅させるための第1の光路と、前記出力光を生成するための第2の光路と、から構成される波長変換部と、
前記第1の光路の光路長を制御する第1光路長制御機構と、
前記第2の光路の光路長を制御する第2光路長制御機構と、
を備える、光源装置。
(2)
前記波長変換部からの前記励起光の反射光を検出する反射光検出部と、
前記第1光路長制御機構及び前記第2光路長制御機構を、互いに独立に制御する制御部と、
を更に備え、
前記半導体レーザ部では、前記励起光が所定の周波数で変調されており、
前記制御部は、前記反射光検出部で検出される反射光に応じて、前記励起光の変調周波数を制御するとともに、前記第1の光路の光路長を制御するための第1の制御信号を生成する、(1)に記載の光源装置。
(3)
前記第1光路長制御機構は、前記第1の光路を構成する光学素子に装着された第1サーボ機構であり、
前記第2光路長制御機構は、前記第2の光路を構成する光学素子に装着された第2サーボ機構である、(1)又は(2)に記載の光源装置。
(4)
前記制御部は、前記波長変換部の内部における前記出力光の強度に基づいて前記第2の光路の光路長を変化させるための第2の制御信号を生成し、当該第2の制御信号を前記第2サーボ機構へと出力する、(3)に記載の光源装置。
(5)
前記制御部は、前記第1の光路の光路長を最適化した後に、前記第2の光路の光路長を最適化する、(1)~(4)の何れか1項に記載の光源装置。
(6)
前記制御部は、前記第1の制御信号を前記第1サーボ機構へと出力し、前記第1の光路の光路長を制御する、(3)~(5)の何れか1項に記載の光源装置。
(7)
前記第2光路長制御機構は、前記第2の光路を構成する光学素子に装着された第2サーボ機構であり、
前記制御部は、前記第1の制御信号を前記半導体レーザ部の動作を制御するレーザ制御部へと出力し、前記励起光の駆動電流を制御することで前記第1の光路の光路長を制御する、(2)、(4)、(5)の何れか1項に記載の光源装置。
(8)
前記第1の光路の光路長及び前記第2の光路の光路長を制御するために設定された制御パラメータを格納する記憶部を更に備え、
前記制御部は、前記記憶部に格納された前記制御パラメータを利用して、制御信号を生成する、(2)~(7)の何れか1項に記載の光源装置。
(9)
前記半導体レーザ部は、半導体レーザを外部共振器の形態で動作させたモードロックレーザを利用した半導体パルスレーザを有する、(1)~(8)の何れか1項に記載の光源装置。
(10)
前記半導体レーザ部は、前記モードロックレーザの出力を増幅させる半導体光増幅器を更に有する、(9)に記載の光源装置。
(11)
前記非線形結晶の温度又は角度を制御する非線形結晶制御機構を更に備え、
前記制御部は、前記非線形結晶の温度又は角度を制御することで、前記出力光の波長を設定する、(2)~(10)の何れか1項に記載の光源装置。
(12)
半導体レーザ部から射出された所定波長の励起光を、当該励起光を共振させることで増幅するとともに、所定の非線形結晶を用いて前記励起光とは波長の異なる出力光を生成するものであり、前記励起光を増幅させるための第1の光路と、前記出力光を生成するための第2の光路と、から構成される波長変換部へと導光することと、
前記第1の光路の光路長を制御する第1光路長制御機構を制御して、前記第1の光路の光路長を最適化することと、
前記第2の光路の光路長を制御する第2光路長制御機構を制御して、前記第2の光路の光路長を最適化することと、
を含む、波長変換方法。
10 半導体レーザ
20 波長変換共振器
30 反射光検出部
40 補正光学系
50 制御部
60 非線形結晶制御機構
Claims (12)
- 所定波長の励起光を射出する半導体レーザ部と、
前記励起光を共振させることで増幅するとともに、所定の非線形結晶を用いて当該励起光とは波長の異なる出力光を生成するものであり、前記励起光を増幅させるための第1の光路と、前記出力光を生成するための第2の光路と、から構成される波長変換部と、
前記第1の光路の光路長を制御する第1光路長制御機構と、
前記第2の光路の光路長を制御する第2光路長制御機構と、
を備える、光源装置。 - 前記波長変換部からの前記励起光の反射光を検出する反射光検出部と、
前記第1光路長制御機構及び前記第2光路長制御機構を、互いに独立に制御する制御部と、
を更に備え、
前記半導体レーザ部では、前記励起光が所定の周波数で変調されており、
前記制御部は、前記反射光検出部で検出される反射光に応じて、前記励起光の変調周波数を制御するとともに、前記第1の光路の光路長を制御するための第1の制御信号を生成する、請求項1に記載の光源装置。 - 前記第1光路長制御機構は、前記第1の光路を構成する光学素子に装着された第1サーボ機構であり、
前記第2光路長制御機構は、前記第2の光路を構成する光学素子に装着された第2サーボ機構である、請求項2に記載の光源装置。 - 前記制御部は、前記波長変換部の内部における前記出力光の強度に基づいて前記第2の光路の光路長を変化させるための第2の制御信号を生成し、当該第2の制御信号を前記第2サーボ機構へと出力する、請求項3に記載の光源装置。
- 前記制御部は、前記第1の光路の光路長を最適化した後に、前記第2の光路の光路長を最適化する、請求項2に記載の光源装置。
- 前記制御部は、前記第1の制御信号を前記第1サーボ機構へと出力し、前記第1の光路の光路長を制御する、請求項3に記載の光源装置。
- 前記第2光路長制御機構は、前記第2の光路を構成する光学素子に装着された第2サーボ機構であり、
前記制御部は、前記第1の制御信号を前記半導体レーザ部の動作を制御するレーザ制御部へと出力し、前記励起光の駆動電流を制御することで前記第1の光路の光路長を制御する、請求項2に記載の光源装置。 - 前記第1の光路の光路長及び前記第2の光路の光路長を制御するために設定された制御パラメータを格納する記憶部を更に備え、
前記制御部は、前記記憶部に格納された前記制御パラメータを利用して、制御信号を生成する、請求項2に記載の光源装置。 - 前記半導体レーザ部は、半導体レーザを外部共振器の形態で動作させたモードロックレーザを利用した半導体パルスレーザを有する、請求項1に記載の光源装置。
- 前記半導体レーザ部は、前記モードロックレーザの出力を増幅させる半導体光増幅器を更に有する、請求項9に記載の光源装置。
- 前記非線形結晶の温度又は角度を制御する非線形結晶制御機構を更に備え、
前記制御部は、前記非線形結晶の温度又は角度を制御することで、前記出力光の波長を設定する、請求項2に記載の光源装置。 - 半導体レーザ部から射出された所定波長の励起光を、当該励起光を共振させることで増幅するとともに、所定の非線形結晶を用いて前記励起光とは波長の異なる出力光を生成するものであり、前記励起光を増幅させるための第1の光路と、前記出力光を生成するための第2の光路と、から構成される波長変換部へと導光することと、
前記第1の光路の光路長を制御する第1光路長制御機構を制御して、前記第1の光路の光路長を最適化することと、
前記第2の光路の光路長を制御する第2光路長制御機構を制御して、前記第2の光路の光路長を最適化することと、
を含む、波長変換方法。
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