WO2015081629A1 - 摇摆式传感器组件 - Google Patents

摇摆式传感器组件 Download PDF

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Publication number
WO2015081629A1
WO2015081629A1 PCT/CN2014/071029 CN2014071029W WO2015081629A1 WO 2015081629 A1 WO2015081629 A1 WO 2015081629A1 CN 2014071029 W CN2014071029 W CN 2014071029W WO 2015081629 A1 WO2015081629 A1 WO 2015081629A1
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WIPO (PCT)
Prior art keywords
sensor assembly
assembly according
swing sensor
swing
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2014/071029
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English (en)
French (fr)
Inventor
李嘉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US14/241,423 priority Critical patent/US9487369B2/en
Publication of WO2015081629A1 publication Critical patent/WO2015081629A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H7/00—Controlling article feeding, separating, pile-advancing, or associated apparatus, to take account of incorrect feeding, absence of articles, or presence of faulty articles
    • B65H7/02—Controlling article feeding, separating, pile-advancing, or associated apparatus, to take account of incorrect feeding, absence of articles, or presence of faulty articles by feelers or detectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/12—Means using fluid made only for exhausting gaseous medium producing gas blast
    • B65H2406/122—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2513/00—Dynamic entities; Timing aspects
    • B65H2513/40—Movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/60—Details of intermediate means between the sensing means and the element to be sensed
    • B65H2553/61—Mechanical means, e.g. contact arms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/003—Measuring characteristics of vibrations in solids by using direct conduction to the detector of rotating machines

Definitions

  • the present invention relates to the field of manufacturing liquid crystal display panels, and in particular to a rocking sensor assembly. Background technique
  • the glass substrate for manufacturing the liquid crystal panel passes through one or more chemical liquid chambers in the wet process, and the chemical liquid chamber is a strong acid or a strong alkali solution.
  • the information of the substrate is transmitted by the rocking sensor to the next process, that is, when the glass substrate passes through the rocking sensor, the rocking sensor vibrator in the bending chamber swings the vibrator by an angle, the glass substrate After separation from the sensor vibrator, the vibrator is reset to transmit a signal to the next process, and the next process is ready to receive the glass substrate.
  • the technical problem to be solved by the present invention is to provide a rocking type sensor assembly which makes the sensor vibrator less likely to adhere and which ensures the returning force of the sensor vibrator.
  • the technical solution of the present invention is to provide a rocking sensor assembly having the following structure, comprising a bracket and a sensor vibrator, the bracket is provided with a pin, and the sensor vibrator is connected to the pin shaft and can swing around the pin shaft, the bracket A vent tube is also connected to the vent tube to insufflate the sensor vibrator.
  • the rocking sensor assembly of the present invention has the following advantages:
  • the sensor vibrator can be blown through the vent tube, so that even if the sensor vibrator is not used for a long time, the liquid medicine is dry and the adhesion or the restoring force is insufficient.
  • the gas blown by the vent pipe can give the sensor vibrator power, so that the sensor vibrator is out of the stuck state, and has sufficient restoring force to ensure that the vibrator can be reset. Therefore, the state of the glass substrate can be more sensitively reacted when the glass substrate passes, the signal transmission is normal, the downtime and maintenance are reduced, and the product yield and the equipment utilization rate are improved.
  • the vent pipe is provided with a control valve. Control the valve to control the opening and closing of the snorkel, from It is possible to control what time to open the blowing pipe and the length of the blowing time.
  • control valve is electromagnetically controlled.
  • the electromagnetic control valve is used to control the opening and closing of the snorkel.
  • the electromagnetic control is easier than the manual control valve for remote control and remote operation, and it is easy to implement automatic control.
  • the vent tube is a fluoroplastic tube.
  • Fluoroplastic tubes are resistant to strong acids and bases and are not susceptible to corrosion in strong acid or base environments.
  • the fluoroplastic tube is a tetrafluoroethylene (all-gas alkoxy resin PFA) tube, and the PFA tube can be used in a strong acid and alkali environment, and is fixed on the stent and is not easily moved.
  • the vent tube has an inner diameter of 4 to '10 mm.
  • a vent pipe having an inner diameter of 5 mm is preferred.
  • the volume of gas passing through the vent tube is small and does not affect the pressure within the chamber.
  • the gas introduced into the snorkel is clean dry compressed air.
  • Clean and dry compressed air means that the atmosphere is decompressed by compression of a compressor, and then dust or hydrocarbon is removed by a filter or activated carbon to supply a clean room.
  • the clean and dry compressed air that is introduced has a small amount, is clean and has no pollution, and is not easy to affect the glass substrate.
  • the inlet of the control valve is connected to the supply end of the clean dry compressed air via a tube. Ensure a clean, dry compressed air supply.
  • the sensor vibrator is electrically coupled to a controller having a button for controlling the opening and closing of the solenoid control valve.
  • the control valve is controlled by a button on the controller, especially if the sensor is not used for a long time, and the sensor vibrator is directly controlled by the button to ensure the sensitivity of the rocking sensor.
  • the orifice of the snorkel is 10 to 60 mm from the sensor vibrator.
  • the venting tube has a slightly larger or slightly smaller amount of venting gas that can be blown to the sensor vibrator to ensure the sensitivity of the sensor vibrator, while the sensor vibrator does not hit the snorkel while rocking.
  • the orifice of the snorkel is 30 mm from the sensor vibrator. 30mm is the best distance tested, and the snorkel blows 'effectively for the stuck sensor vibrator. Insurance group description
  • Figure 1 shows a specific embodiment of the rocking sensor assembly of the present invention which is normally bent as the glass substrate passes.
  • Fig. 2 is a schematic view showing the hook of the rocking sensor assembly of Fig. 1 which cannot be normally bent and reset due to adhesion when the glass substrate passes.
  • Figure 3 shows a specific structure of the bracket in the pendulum sensor assembly of Figure 1 connected to the sensor frame.
  • the sensor assembly comprises a bracket i, a sensor vibrator 2 and a controller 3, the sensor vibrator 2 is electrically connected to the controller 3, the bracket 1 is provided with a pin 4, and the sensor vibrator 2 is connected to the pin shaft 4 and can be wound around the pin shaft 4 Reciprocating swing (as shown in FIG. 3), the bracket 1 is also connected with a vent pipe 5, and the vent pipe 5 can blow the sensor vibrator 2.
  • the vent pipe 5 is generally a corrosion-resistant hose having an inner diameter of 4 to 10 mm, and the outlet end of the vent pipe 5, that is, the blower end, is attached to the bracket 1.
  • the vent pipe 5 is: a PFA (all gas alkoxy resin) tube, and the PFA tube does not have a blowing quality.
  • the vent tube 5 has an inner diameter of 5 mm.
  • An electromagnetic control valve 6 is connected to the inlet end of the vent pipe 5.
  • the inlet of the solenoid control valve 6 is connected via a tube 7 to the supply end 8 of the clean dry compressed air.
  • the supply end 8 blows the clean and dry compressed air to the sensor vibrator 2 via the electromagnetic control valve 6 and the vent pipe 5.
  • the controller 3 is preferably a touch controller, and the touch screen of the controller 3 is provided with a button 3.1 for controlling the opening and closing of the electromagnetic control valve 6.
  • the electromagnetic control valve 6 is activated by the button 3.1, so that the air blow is blown, and after the air blow is completed, the electromagnetic control valve 6 is closed by the button 3.1, so that it is not necessary to operate at the electromagnetic control width 6 installation position.
  • the electromagnetic control valve 6 can realize remote control and is more convenient.
  • the distance between the nozzle end, that is, the blowing end and the sensor vibrator 2 is 10 to 60 mm after installation of the vent pipe 5, and within this range, the pass can be ensured. Clean, dry compressed air in the trachea 5 can be blown onto the sensor unit 2.
  • the distance between the nozzle of the vent 5 having an inner diameter of 5 mm and the sensor vibrator 2 is 30 mm i , and the blower amount is larger or smaller to reset the sensor vibrator 2 faster. That is, the sensor vibrator 2 which ensures the adhesion and/or insufficient restoring force can be quickly reset at this distance, and the signal can be normally transmitted to the glass substrate 9 through the sensor vibrator 2 to perform a process. At the same time, it is ensured that the sensor vibrator 2 does not collide with the vent pipe 5 while reciprocatingly swinging.
  • the sensor array 2 is blown through the vent pipe 5, and the operation is normal.
  • the glass substrate 9 passes, the glass substrate 9 can be bent normally.
  • the sensor array 2 can normally reset and send a signal to the next layer. Process.
  • the sensor unit 2 causes the sensor unit 2 to adhere due to the chemical liquid wind or the like, or the pin 4 resistance is too large, so that the restoring force of the sensor unit 2 is insufficient, and the glass substrate 9 cannot be bent normally, the glass substrate After the sensor unit 2 is detached from the sensor unit 2, the sensor unit 2 cannot transmit a signal.
  • the glass substrate 9 is immersed in a chamber of strong acid or alkali for a long time to be corroded.

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

一种摇摆式传感器组件，包括支架（1）和传感器振子（2），支架（1）上设有销轴（4），传感器振子（2）连接在销轴（4）上并能绕销轴（4）摆动，所述支架（1）上还连接有通气管（5），所述通气管（5）能对传感器振子（2）吹气。所述通气管（5）上设有控制阀（6），控制阀（6）的进口经管子（7）连接洁净干燥压缩空气的供应端（8）。该摇摆式传感器组件使传感器振子（2）不容易粘连、保证传感器振子（2）的回复力。

Description

擺式传慼器组件
技术领域
本发明涉及液晶显示面板制造领域， 具体涉及一种摇摆式传感器组件。 背景技术
在液晶面板的制造过程中，其中用于制造液晶面板的玻璃基板在湿制程中会通过一至多个 药液腔室， 药液腔室内为强酸或强碱溶液。玻璃基板在通过湿制程中的腔室时通过摇摆式传感 器来传递基板的信息给下一道工序，即玻璃基板经过摇摆式传感器时压弯腔室内的摇摆式传感 器振子使振子摆动一个角度， 玻璃基板与传感器振子分离后，振子复位从而传递信号给下一道 工序， 下一道工序做好接收玻璃基板的准备。但由于摇摆式传感器工作在药液环境中， 若传感 器振子较长^间不使用， 药液风干容易造成振子粘连和 /或回复力不够， 玻璃基板经过摇摆式 传感器后， 振子不能弯曲和复位， 不会发送信号给下一道工序的接收器。 下一道工序接收器未 接到信号，不能接收玻璃基板，导致玻璃基板长时间浸泡在强酸或强碱环境中，造成产品报废， 从而降低产品良率。而旦一旦摇摆式传感器出现故障而无法正常传递信号， 需要关闭设备进行 检修， 造成设备稼动率降低。 发明内容
本发明所要解决的技术问题是，提供一种使传感器振子不容易粘连、保证传感器振子的回 复力的摇摆式传感器组件。
本发明的技术解决方案是，提供一种具有以下结构的摇摆式传感器组件， 包括支架和传感 器振子， 支架上设有销轴， 传感器振子连接在销轴上并能绕销轴摆动， 所述支架上还连接有通 气管， 所述通气管能对传感器振子吹气。
与现有技术相比，本发明的摇摆式传感器组件具有以下优点： 通过通气管能对传感器振子 吹气， 从而即便是在传感器振子长时间不使用出现药液风干粘连或回复力不够的情况下，通气 管吹出的气体能给予传感器振子以动力， 使传感器振子脱离粘连状态， 具有足够的回复力， 保 证振子能复位。 因而， 在玻璃基板通过时能比较灵敏地反应玻璃基板的状态， 保证信号传送正 常， 减少宕机和检修， 提高产品良率和设备稼动率。
在 ·个实施倒中， 所述通气管上设有控制阀。通过控制阀来控制通气管的开启和关闭， .从 而能控制什么日 候来开启吹气管吹气， 以及吹气时间的长短。
在一个优选的实施例中 ,所述控制阀为电磁控制阔。使 ^电磁控制阀来控制通气管的开启 和关闭， 电磁控制阔相比手动控制阀方便迸行远程控制和远程操作， 容易实现自动化控制。
在优选的实施例中， 所述通气管为氟塑料管。 氟塑料管耐强酸和强碱， 在强酸或强碱的环 境中不容易被腐蚀。 进一步优选氟塑料管为四氟乙烯 （全氣烷氧基树脂 PFA) 管， PFA管能 在强酸和强碱环境下使用， 而旦固定在支架上^不容易移动.，
在一个实施倒中， 所述通气管的内径为 4〜'10mm。 在本实施例中优选内径为 5mm的通气 管。 在现有技术中称作细管， 经过该通气管的气体的体积量较少， 不会影响腔室内的压力。
在优选的实施例中， 所述通气管内通入的气体为洁净干燥压缩空气。洁净干燥压缩空气是 指，大气经压缩机压缩后除湿,再经过滤器或活性炭吸附去除粉尘及炭氢化合物以供给无尘室。 通入的洁净千燥压缩空气量少、 千净无污染， 不容易对玻璃基板造成影响。
在进一歩优选的实施倒中，控制阀的进口经管子连接洁净干燥压缩空气的供应端。保证洁 净干燥压缩空气的供应。
在一个实施倒中， 传感器振子电连接有控制器， 控制器上设有用于控制电磁控制阀的开启 与关闭的按钮。通过控制器上的按钮来对控制阀迸行控制， 尤其是传感器较长时间没使用， 通 过按钮直接控制对传感器振子进行吹扫以保证摇摆式传感器的灵敏度。
在一个实施例中， 通气管的管口距离传感器振子 10〜60mm。 在这个距离内， 通气管内通 气量稍大一些或者稍小一些都能吹到传感器振子以保证传感器振子的灵敏度，而旦传感器振子 在摇摆时不会碰撞到通气管。
在优选的实施例中， 通气管的管口距离传感器振子 30mm。 30mm是经过测试效果最好的 距离， 通气管吹气 '对粘连的传感器振子起到有效的作用。 險團说明
图 1所示是本发明的摇摆式传感器组件在玻璃基板经过时正常弯曲的一种具体实施例。 图 2所示是图 1中的摇摆式传感器组件在玻璃基板经过时由于粘连不能正常弯曲和复位的 结钩示意图。
图 3所示是图 1中的摆式传感器组件中的支架与传感器阵子连接的一种具体结构。 具体实施方式
下面结合附图和具体实施倒对本发明作进一步说明。
如图 1所示为本发明的摇摆式传感器组件的一种具体实施例。在该实施例中， 该摇摆式传 感器组件包括支架 i、 传感器振子 2和控制器 3， 所述传感器振子 2与控制器 3电连接， 支架 1上设有销轴 4, 传感器振子 2连接在销轴 4上并能绕销轴 4往复摆动 （如图 3所示） , 所述 支架 1上还连接有通气管 5 , 所述通气管 5能对传感器振子 2吹气。
所述通气管 5—般采用内径为 4〜10mm、 耐腐蚀的软管， 通气管 5的出口端即吹气端安装 圏定在支架 1上。 在本实施^中， 通气管 5采用的是: PFA (全氣烷氧基树脂） 管， PFA管不 吹气质量， 优选通气管 5的内径为 5mm
所述通气管 5的进口端连接有电磁控制阀 6。 电磁控制阀 6的进口经管子 7连接到洁净干 燥压缩空气的供应端 8。 电磁控制阀 6开启时， 所述供应端 8经电磁控制阀 6、 通气管 5向传 感器振子 2吹送洁净干燥压缩空气。
在本实施例中， 控制器 3优选为触摸式控制器， 控制器 3的触摸屏上设有 ¾于控制电磁控 制阀 6的开启与关闭的按钮 3.1。在需要进行吹气 ， 通过按钮 3.1来启动电磁控制阀 6， 从而 迸行吹气， 吹气结束后， 通过按钮 3.1来关闭电磁控制阀 6, 从而不需要到电磁控制阔 6的安 装位置去操作电磁控制阀 6, 可实现远程控制， 更方便。
在安装通气管 5时，根据不同的通气管 5的內径， 一般要求通气管 5安装后其管口即吹气 端距离传感器振子 2的距离为 10〜60mm, 在这个范 内， 能保证通气管 5内的洁净干燥压缩 空气能吹到传感器阵子 2上。
在本实施例中， 经过测试试验， 内径为 5mm的通气管 5的管口与传感器振子 2的距离为 30mm i , 吹气量大一些或者小一些都能使传感器振子 2较快地复位。 即在这个距离内能保证 吹气^使得粘连和 /或回复力不够的传感器振子 2较快地复位， 在玻璃基板 9经过 传感器 振子 2能正常传递信号给 一道工序。 同时， 又能保证传感器振子 2在往复摆动时不会碰撞到 通气管 5。
在图 i中， 所述传感器阵子 2在经过通气管 5吹气， 工作正常， 玻璃基板 9经过时能正常 弯曲， 玻璃基板 9脱离传感器阵子 2后， 传感器阵子 2能正常复位发送信号给下一道工序。
在图 2中，所述传感器阵子 2由于药液风千等原因造成传感器阵子 2粘连或者销轴 4阻力 过大导致传感器阵子 2的回复力不够，在玻璃基板 9经过时不能正常弯曲， 玻璃基板 9与传感 器阵子 2脱离后，传感器阵子 2不能发送信号。导致玻璃基板 9长时间浸泡在强酸或强碱的腔 室内被腐蚀。
虽然已经结合具体实施例对本发明进行了描述，然而可以理解，在不脱离本发明的范围的 情况下， 可以对其进行各种改进或替换。 尤其是， .只要不存在结构上的冲突， 各实施例中的特 征均可相互结合起来， 所形成的组合式特征仍属干本发明的范围内。本发明并不局限于文中公 开的特定实施例， 而是包括落入权利要求的范围內的所有技术 -宏.

Claims

棚要求书
1 . 一种摇摆式传感器组件， 包括支架和传感器振子， 支架上设有销轴， 传感器振子连接 在销轴上并能绕销轴摆动， 所述支架上还连接有通气管， 所述通气管能对传感器振子吹气。
2. 根据权利要求 1所述的摇摆式传感器组件， 其中， 所述通气管上设有控制阀。
3. 根据杈利要求 2所述的摇摆式传感器组件， 其中， 所述控制阀为电磁控制阔。
4. 根据权利要求 1所述的摇摆式传感器组件， 其中， 所述通气管为氟塑料管。
5. 根据权利要求 4所述的摇摆式传感器组件， 其中， 所述通气管为全氣烷氧基树脂管。
6. 根据权利要求 1所述的摇摆式传感器组件， 其中， 所述通气管的内径为 4〜i0mm。
7. 根据权利要求 2所述的摇摆式传感器组件， 其中， 所述通气管的內径为 4〜10mm。
8. 根据权利要求 3所述的摇摆式传感器组件， 其中， 所述通气管的内径为 4〜10mm。
9. 根据权利要求 4所述的摇摆式传感器组件， 其中， 所述通气管的內径为 4〜10mm。
10. 根据权利要求 5所述的摇摆式传感器组件， 其中， 所述通气管的内径为 4〜10mm。
1 1 . 根据权利要求 6所述的摇摆式传感器组件， 其中， 所述通气管内通入的气体为洁净干 燥压缩空气。
】2. 根据权利要求 7所述的摇摆式传感器组件， 其中， 所述通气管内通入的气体为洁净干 燥压缩空气。
】3. 根据权利要求 8所述的摇摆式传感器组件， 其中， 所述通气管内通入的气体为洁净干 燥压缩空气。
14. 根据权利要求 9所述的摇摆式传感器组件， 其中， 所述通气管内通入的气体为洁净干 燥压缩空气。
15. 根据权利要求 10所述的摇摆式传感器组件， 其中， 所述通气管內通入的气体为洁净 千燥压缩空气。
16. 根据权利要求 11所述的摇摆式传感器组件， 其中， 控制阔的进口经管子连接洁净干 燥压缩空气的供应端。
17. 根据权利要求 3所述的摇摆式传感器组件， 其中， 传感器振子电连接有控制器， 控制 器上设有用于控制电磁控制阀的幵启与关闭的按钮。
18. 根据权利要求 11所述的摇摆式传感器组件， 其中， 传感器振子电连接有控制器， 控 制器上设有用干控制电磁控制阀的幵启与关闭的按钮。
19. 根据权利要求 ： 所述的摇摆式传感器组件， 其中， 通气管的管口距离传感器振子 10-60mm
20. 根据权利要求 9 所述的摇摆式传感器组件， 其中， 通气管的管口距离传感器振子 Omni 0
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