WO2015071270A1 - Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque - Google Patents

Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque Download PDF

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Publication number
WO2015071270A1
WO2015071270A1 PCT/EP2014/074288 EP2014074288W WO2015071270A1 WO 2015071270 A1 WO2015071270 A1 WO 2015071270A1 EP 2014074288 W EP2014074288 W EP 2014074288W WO 2015071270 A1 WO2015071270 A1 WO 2015071270A1
Authority
WO
WIPO (PCT)
Prior art keywords
medium
printhead
flushing
valve element
outlet openings
Prior art date
Application number
PCT/EP2014/074288
Other languages
German (de)
English (en)
Inventor
Maximilian Pospischil
Harald Gentischer
Martin KUCHLER
Markus KLAWITTER
Florian Clement
Daniel Biro
Jan Specht
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Priority to EP14795843.3A priority Critical patent/EP3068626B1/fr
Publication of WO2015071270A1 publication Critical patent/WO2015071270A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • B41J2/16526—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head by applying pressure only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B05B1/3026—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the controlling element being a gate valve, a sliding valve or a cock
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/05—Heads having a valve

Definitions

  • Printhead printing device and method for applying a printing medium to a substrate, in particular a photovoltaic solar cell
  • the invention relates to a print head, a printing device and a method for applying a printing medium to a substrate, in particular a semiconductor structure such as a photovoltaic solar cell, according to the preambles of claims 1, 9 and 11.
  • Such a printing medium may be a printing paste, which in particular contains a dopant for doping one or more regions of the semiconductor structure, which serves for forming a mask for subsequent process steps and / or which contains metal particles for forming a metallic contact structure.
  • the substrate may be a semiconductor structure in the manufacturing process, for example for producing a photovoltaic solar cell or an LED structure such as an OLED structure or an inorganic LED structure.
  • a print head according to claim 1 a printing device comprising such a print head according to claim 9 and a method according to claim 12, preferably embodiments of the print head are in claims 2 to 8, the printing device in claims 10 to 1 1 and the method in claims 13 to 16.
  • the wording of all claims is explicitly incorporated by reference into the description.
  • the inventive method is preferably designed for implementation by means of the print head according to the invention and / or the printing device according to the invention, in particular a preferred embodiment of the print head and / or the printing device.
  • the printhead according to the invention and the printing device according to the invention are preferably designed to be carried out by means of the method according to the invention, in particular a preferred embodiment thereof.
  • the printhead according to the invention is designed for applying a printing medium to a substrate, in particular for application to a semiconductor structure such as, for example, a photovoltaic solar cell during its production.
  • the printhead has a printhead housing and a valve element.
  • the printhead housing includes at least one supply port for supplying the print medium and a plurality of discharge ports for discharging the print medium.
  • the valve element is rotatably supported in the printhead housing to control between a first pressure operating condition in which the supply port is fluidly connected to the exhaust ports and a second reverse operation state in which there is no fluid communication between the supply port and the exhaust ports. It is essential that the print head has at least one rinsing medium connection and the valve element is designed and rotatable in the pressure chamber.
  • W is mounted head housing, is fiuid scoredd connected to the Ausiassö réelleen and in the first and second operating state no connection, in particular no fluit considerde connection between Spülmediuman gleich and the outlet openings.
  • the invention is based on the knowledge that, for the precise dispensing of the pressure medium at the plurality of outlet openings, in particular when using highly viscous pressure media having flow limits, the flow path between valve and outlet opening is advantageously made short. Furthermore, experiments have shown that a precise control of the pressure medium flow at several parallel outlet openings through a central valve arranged in a common feed channel is not possible with sufficient precision. By contrast, if a separate separate valve is arranged for each outlet opening, the influence of elasticities in the system is reduced, and the formation of pressure gradients between the outlet opening during startup and shutdown processes is also prevented. Therefore, the print head according to the invention has a rotatably mounted in the print head housing valve element, wherein by rotating the valve element, the pressure medium output at the outlet openings can be allowed or prevented.
  • a further advantage of the device according to the invention is a self-reinforcing effect wherein the overpressure of the pressure medium in conjunction with the characteristic shaping of the closure shaft causes a force directed in the direction of the outlet openings, whereby the tightness of the valve increases with increasing pressure.
  • the printhead according to the invention enables quick cleaning by turning over the valve element in the purge operating state via the Spüimeöiuman gleich flushing medium can be guided to the plurality of outlet openings in a simple manner, so that rinsing takes place, in particular the flow paths immediately in front of the outlet openings.
  • the change between the individual operating states takes place in a simple manner by turning the valve element, so that in rapid succession, a cleaning of the print head z. B. between two Druckmediumaufbringvor réellen can take place,
  • a flushing medium line is formed in the print head, with a flushing medium connection and at least one flushing medium outlet, so that in the flushing operating state the flushing medium outlet of the valve element is arranged in the region of at least one outlet opening and fluidically connected to it.
  • the supply of flushing medium to the outlet opening is ensured in a simple manner.
  • the scavenging medium outlet of the valve element is arranged in the region of the plurality of outlet openings and connected in a fluid-conducting manner to the latter.
  • the flushing medium outlet thus covers a larger area, so that in the flushing operating state, the plurality of outlet openings are fluid-conductively connected to the flushing medium outlet of the flushing medium line.
  • the flushing medium line has a flushing medium outlet for each of the plurality of outlet openings, so that in the flushing operating state each flushing medium outlet is arranged in the region of a respective outlet opening and is connected to the latter in a fluid-conducting manner. As a result, a defined supply of flushing medium is achieved at each outlet opening.
  • the purge line is at least partially formed in the valve element. This ensures reliable separation of the flow paths between the pressure medium on the one hand and the flushing medium on the other hand.
  • the purge line at least partially formed as an axial line, in particular as an axial bore in the valve element.
  • the rinsing agent can be supplied in a simple manner in the valve element via the axial bore.
  • an approximately radially arranged recesses, in particular radial bores are preferably provided, which connect the axial bore in the flushing operating state in each case to an outlet opening in a fluid-conducting manner.
  • the flushing medium line can be formed in a simple manner by an axial and for each outlet opening in each case a radial bore in the valve element.
  • the flushing medium line between an inner wall of the pressure head housing facing the valve and the valve element is formed, preferably by a trench-like recess of the valve element.
  • the flushing medium line is at least partially formed as a partial hollow cylinder between the printhead housing and Ventiiele- ment, in particular by a partially hollow cylindrical recess of the valve element.
  • the flushing medium connection is preferably formed in the print head housing and arranged such that in the flushing operating state, the flushing medium connection is fluid-conductively connected to the flushing agent line.
  • all of the plurality of outlet openings are turned off simultaneously, i. a switching between the operating states B and C for all outlet openings takes place simultaneously.
  • some outlet openings are preferably switched off in time with respect to others; in particular, switching between the operating states B and C takes place for a partial amount of the outlet openings (4) offset in time to the remaining outlet openings.
  • non-rectangular semiconductor structures such as semiconductor structures on so-called pseudo-square wafers to separately connect and disconnect marginal outlet openings so that a pressure medium output of only the marginal outlet openings is avoided these are not yet above the semiconductor substrate.
  • the valve element is therefore preferably designed such that in a fourth partial pressure operating state, the feed opening is fluid-conductively connected only to a subset of the plurality of outlet openings, in particular that peripheral outlet openings are not contained in the subset. Sn this advantageous embodiment can thus also be achieved by turning the valve element in a simple manner, an output of the pressure medium only at the subset of the plurality of outlet openings. It is within the scope of the invention to provide additional partial pressure operating states in further advantageous embodiments in which different subsets of the plurality of outlet openings are fluid-conductively connected to the feed opening, whereas the outlet openings not belonging to the respective subset are not fluid-conductively connected to the feed opening are. This can be achieved by a plurality of partial pressure
  • an adaptation to the desired shape of the substrate, in particular the semiconductor structure can be achieved, in particular, for example, an order of printing medium lines on round or polygonal substrates possible,
  • a common fluidization is formed between the feed opening and a plurality of outlet openings.
  • a fluid line with a constant cross-section and preferably the same channel geometry between the feed opening and the outlet opening is preferably formed for each outlet opening.
  • a pressure medium channel is formed for each outlet opening, which is connected fluidieitend with the supply port in the pressure-operating state and each pressure medium channel preferably has at least between the valve element and outlet a constant cross-section.
  • each pressure medium channel is at least partially formed as a recess of the valve element, preferably for each pressure medium channel formed by the valve member portion of the pressure medium channel and the portion of the pressure medium channel between the valve element and outlet a constant cross-section.
  • the object underlying the invention is further achieved by a printing device according to claim 10.
  • the printing device according to the invention for applying a printing medium to a substrate in particular to a semiconductor structure, such as a photovoltaic solar cell, has a pressure medium reservoir and a Druckmediumpumpsch and a printhead according to the invention, in particular a preferred embodiment thereof on.
  • the pressure medium pumping means is fluidly connected to the pressure medium reservoir and the supply port of the printhead to supply pressure medium to the printhead.
  • the printing device comprises an actuating center! for the valve element. This actuating means is preferably designed for rotating the valve element relative to the printhead housing.
  • the actuating means is preferably designed to rotate the valve element at a peripheral speed in the range of 10 mm / s to 10 m / s and / or switching times between the operating conditions in the range 150 ps -. 1 50 ms to allow. It is within the scope of the invention to provide per se übiiche control means, in particular a control unit such as a microprocessor and / or a computer to control the printing process and in this case in particular by means of control signals to rotate the valve member by means of the actuating means to the respective to set the desired operating state.
  • a control unit such as a microprocessor and / or a computer
  • the object underlying the invention is further achieved by a method for applying a printing medium to a substrate according to claim 13.
  • the method according to the invention for applying a printing medium to a substrate, in particular to a semiconductor structure such as a solar photovoltaic line, is effected by means of a printhead according to the invention, in particular an advantageous embodiment thereof.
  • the method comprises the following method steps:
  • step A the printhead is set up in the printing operating state.
  • a method step B the printing medium is fed to the print head and the print medium is discharged from the outlet openings onto the substrate.
  • the printhead is set in the blocking operating state and the supply of printing medium to the printhead is ended. It is essential that, in a method step D, the printhead is set into the rinsing operating state and a supply or removal of rinsing medium to the rinsing medium connection occurs, so that the rinsing medium flows through the printhead and exits at the outlet openings, and thus a rinsing process takes place.
  • the flushing medium is preferably supplied via the flushing medium connection, so that the flushing medium connection acts as flushing medium inlet for the print head and the flushing medium is discharged at the outlet openings. It is likewise within the scope of the invention to remove the flushing medium via the flushing medium connection, in particular to suck it off, so that the flushing medium is supplied via the outlet openings and removed via the flushing medium connection (as sink indium outlet).
  • compressed air is used as flushing medium.
  • the compressed air can be supplied via the flushing medium connection, so that it is likewise within the scope of the invention to use a solvent, in particular acetone, isopropyl alcohol and / or terpineol, as the flushing medium.
  • the printhead according to the invention, the printing device according to the invention and the method according to the invention can be used for coating any desired substrates, for example silicon wafers, in particular in the production of various types of semiconductor structures.
  • a use in the production of large-area semiconductor structures, such as LED, OLED or photovoltaic solar cells is advantageous because here often line-like structures should be generated by applying pressure medium, in particular a printing paste.
  • metallic contact structures are used in particular in photovoltaic solar cells.
  • a metal contacting grid for discharging the charge carriers is arranged on the side facing the incident radiation when the solar line is used.
  • the grid typically has a plurality of line-like, parallel contacting fingers.
  • the print head according to the invention, the printing device according to the invention and the method according to the invention are particularly suitable.
  • the print head is preferably designed such that no further line for the print medium is arranged between the outlet openings and the semiconductor substrate, i. H. that the pressure medium is applied directly to the semiconductor substrate after exiting the outlet openings.
  • the print head is designed such that the flow path between the valve element and Ausiassö réelle in each of the plurality of outlet openings each smaller than 5 cm, preferably less than 1 cm, particularly preferably less than 0.3 cm.
  • the printing process can be carried out in a manner known per se, in particular as described in EP 2 196 316 B1.
  • the printhead is moved relative to the semiconductor substrate and, more particularly, moved perpendicularly to a longitudinal extent of the printhead during the printing operation to achieve application of a plurality of parallel, fin-like print media strands on the semiconductor substrate.
  • the execution openings are preferably arranged along a straight line.
  • Figures 1 a to 1 c a first embodiment of a print head according to the invention
  • Figure 3 is a perspective view of an application example of a third embodiment of a printhead according to the invention.
  • FIGS. 1-10 A first embodiment of a printhead according to the invention is shown schematically in FIGS.
  • Figures 1 a and 1 b and 2a and 2b show radial sectional views; Figure c and 2c each show an axial sectional view.
  • the printhead according to the first embodiment has a printhead housing 1 which has a cylindrical recess.
  • a valve element 2 is rotatably mounted in the cylindrical recess.
  • the rotation can take place in FIGS. 1 a and 1 b in clockwise or counterclockwise direction about a pivot point D shown in FIG. 1 a. Accordingly, the axis of rotation D of the valve element 2 is shown in Figure 1 c.
  • the printhead housing 1 has a feed opening 3 for supplying pressure medium. Furthermore, the printhead housing 1 has a plurality of outlet openings 4 for discharging the pressure medium. By way of example, in FIG. 1c, the peripheral outlet openings 4a and 4b and two central outlet openings 4 are identified.
  • valve element 2 is rotatably mounted in the housing 1 Druckkopfge.
  • Figure 1 a shows here the rotational position of a printing operating state: In this rotational position, a pressure medium as example, a printing paste via the supply port 3 are fed (flow path indicated by arrows), the pressure medium passes through a conduit path which is formed between the valve element 2 and an inner wall of the printhead housing 1 and finally exits at the outlet openings 4.
  • the feed opening 3 in the axial direction covers the entire pressure-active width of the print head.
  • the valve element 2 in contrast, has for each outlet opening 4 in each case a part-ring-like recess (in the form of a hollow part cylinder with a rectangular cross-section), see for example the reference numerals 2a and 2b for the marginal teüringartigen recesses of the valve element 2 in Figure 1 c).
  • the pressure medium is thus supplied by means of a feed opening 3 and fed through the part-ring-like recesses 2 a, 2 b in each case an outlet opening 4.
  • valve element 2 In a second blocking operating state, the valve element 2 is rotated relative to the printhead housing 1, so that the region of the valve element 2 labeled S in FIG. 1 a covers the outlet openings 4 and thus the pressure medium output is interrupted.
  • FIG. 1 b shows a third rinse operating state
  • the valve element 2 has a flushing medium connection 5, which in the exemplary embodiment according to FIG. 1 is designed as an axial bore of the valve element 2. Furthermore, the valve element 2 has in each case a radial flushing medium line 6 designed as a radial bore for each outlet opening 4.
  • valve element 2 is rotated in the flushing operating state such that the radial flushing medium line 6 is in each case fluid-conductively connected to the associated outlet opening 4.
  • rinsing agent can thus be supplied via the flushing medium connection 5, which passes through the axial rinsing agent line and reaches the outlet openings 4 via the respective radial rinsing agent lines 4, so that rinsing of the printing head takes place.
  • the printhead according to FIG. 1 thus enables an output of printing medium as well as a precise shutdown and a flushing only depending on the rotational pitch of the valve element 2 relative to the printhead housing 1.
  • the distance A between the valve element 2 and the outlet openings 4 is low. In the embodiment shown in Figure 1, the distance A is 0.5 mm.
  • the dashed line 7 according to FIG. 1 a describes a preferably modification of the first exemplary embodiment with edge shutoff.
  • the part-ring-like recesses 2 a, 2 b of the valve element 2 are designed differently from the remaining part-ring-like recesses.
  • the marginal part-ring-like recesses overlap a smaller angular range compared to FIGS remaining part-ring-like recesses.
  • the part-ring-like recess not shown in dashed lines overlaps an angular range over 200 °, whereas the partial ring-like recess 2b, which ends at the dashed line 7, covers an angle range smaller than 200 °.
  • a partial pressure operating state is thus represented: the marginal outlet openings 4a and 4b are closed by the valve element (there is no fluid-conducting connection between the feed opening 3 and the outlet openings 4a and 4b, as in FIG 1 a, the flow path of the printing paste ends at the dashed line 7,
  • FIG. 2 shows a second exemplary embodiment of a printhead according to the invention. To avoid repetition, only the essential differences from the first exemplary embodiment will be discussed below:
  • the flushing medium line is partially formed between the valve element 2 and the inner wall of the printhead housing 1. Accordingly, the flushing medium connection 5 is formed in the print head housing, so that in the flushing operating position according to FIG. 2 b there is a fluid-conducting connection between flushing medium connection 5 and outlet opening 4. The flow path between the feed opening 3 and outlet opening 4 is blocked accordingly in this operating state.
  • printing paste containing metal particles on a pseudo-squared wafer W is applied in a plurality of parallel lines in order to form metallic contacting fingers.
  • the wafer W is moved through under the print head housing 1 in the dispensing direction indicated by an arrow.
  • the print head can be designed according to FIG. 1 or FIG.
  • the print head is part of a printing device according to the invention, which further comprises a pressure medium reservoir 7 with integrated pressure medium pumping means, so that pressure medium of the feed opening 3 of the print head housing 1 can be fed via a line.
  • a pressure medium reservoir 7 with integrated pressure medium pumping means so that pressure medium of the feed opening 3 of the print head housing 1 can be fed via a line.
  • the printing operating state is set in which over all Auslassöffn openings 4 pressure medium is output.
  • the partial pressure operating state is again set by turning the valve element 2, so that pressure medium is emitted solely via the non-edge outlet openings.
  • the blocking operating state is again set by turning the valve element 2 so that no pressure medium escapes from the outlet openings.
  • the actuating means can also be designed as a magnetic switch or pneumatic cylinder.
  • the actuating means is formed around
  • Rinse medium line is passed to all Ausiassö Maschinenen 4, so that a cleaning of the print head and in particular all Ausiassö Maschinenen 4 follows.

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Abstract

L'invention concerne une tête d'impression, servant à déposer un fluide d'impression sur un substrat, en particulier sur une structure semi-conductrice telle qu'une cellule solaire photovoltaïque, qui comprend un boîtier de tête d'impression et un élément formant soupape. Le boîtier de tête d'impression comporte au moins un orifice d'alimentation de fluide d'impression et une pluralité d'orifices de sortie servant à distribuer le fluide d'impression. L'élément formant soupape est supporté en rotation dans le boîtier de tête d'impression afin de permuter entre un premier état fonctionnel d'impression, dans lequel l'orifice d'alimentation est en liaison fluidique avec les orifices de sortie, et un deuxième état fonctionnel de blocage, dans lequel il n'y a pas de liaison fluidique entre l'orifice d'alimentation et les orifices de sortie. L'invention est caractérisée en ce que la tête d'impression comporte au moins un raccord de fluide de purge et en ce que l'élément formant soupape est configuré et supporté en rotation dans le boîtier de tête d'impression de telle façon que, dans un troisième état fonctionnel de purge, le raccord de fluide de purge est en liaison fluidique avec les orifices de sortie et, dans le premier et le deuxième état fonctionnel, il n'y a pas de liaison fluidique entre le raccord de fluide de purge et les orifices de sortie.
PCT/EP2014/074288 2013-11-14 2014-11-11 Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque WO2015071270A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP14795843.3A EP3068626B1 (fr) 2013-11-14 2014-11-11 Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013223250.0 2013-11-14
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US11154892B2 (en) 2016-12-14 2021-10-26 Dürr Systems Ag Coating device for applying coating agent in a controlled manner
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US11440035B2 (en) 2016-12-14 2022-09-13 Dürr Systems Ag Application device and method for applying a multicomponent coating medium
US11504735B2 (en) 2016-12-14 2022-11-22 Dürr Systems Ag Coating device having first and second printheads and corresponding coating process
US11944990B2 (en) 2016-12-14 2024-04-02 Dürr Systems Ag Coating device for coating components
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DE102019115009A1 (de) 2019-06-04 2020-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Druckkopf und Verfahren zur Herstellung eines Druckkopfs
DE102019122131B4 (de) 2019-08-16 2021-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Parallelextrudieren von Druckmedium auf ein Substrat
DE102019135208B4 (de) * 2019-12-19 2022-02-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Druckeinheit, Druckvorrichtung und Verfahren zum Parallelextrudieren von Druckmedium auf ein Substrat
DE102020129305B3 (de) 2020-11-06 2022-05-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung und Verfahren zum segmentierten Paralleldispensen

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US11203030B2 (en) 2016-12-14 2021-12-21 Dürr Systems Ag Coating method and corresponding coating device
US11813630B2 (en) 2016-12-14 2023-11-14 Dürr Systems Ag Coating method and corresponding coating device
US11298717B2 (en) 2016-12-14 2022-04-12 Dürr Systems Ag Print head having a temperature-control device
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US11154892B2 (en) 2016-12-14 2021-10-26 Dürr Systems Ag Coating device for applying coating agent in a controlled manner
US11167308B2 (en) 2016-12-14 2021-11-09 Dürr Systems Ag Print head for the application of a coating agent on a component
US11167297B2 (en) 2016-12-14 2021-11-09 Dürr Systems Ag Print head for the application of a coating agent
US11167302B2 (en) 2016-12-14 2021-11-09 Dürr Systems Ag Coating device and associated operating method
US11975345B2 (en) 2016-12-14 2024-05-07 Dürr Systems Ag Coating installation and corresponding coating method
WO2018108577A1 (fr) * 2016-12-14 2018-06-21 Dürr Systems Ag Tête d'impression et procédé de fonctionnement associé
US11944990B2 (en) 2016-12-14 2024-04-02 Dürr Systems Ag Coating device for coating components
US11440035B2 (en) 2016-12-14 2022-09-13 Dürr Systems Ag Application device and method for applying a multicomponent coating medium
US11504735B2 (en) 2016-12-14 2022-11-22 Dürr Systems Ag Coating device having first and second printheads and corresponding coating process
US11878317B2 (en) 2016-12-14 2024-01-23 Dürr Systems Ag Coating device with printhead storage
WO2020046311A1 (fr) * 2018-08-30 2020-03-05 Hewlett-Packard Development Company, L.P. Buses de distribution rotatives
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WO2020046308A1 (fr) * 2018-08-30 2020-03-05 Hewlett-Packard Development Company, L.P. Joints d'étanchéité d'interface d'accouplement
WO2020201177A1 (fr) * 2019-04-03 2020-10-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Dispositif et procédé d'application, sur un substrat, d'une structure en moyen d'impression

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