EP3068626B1 - Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque - Google Patents
Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque Download PDFInfo
- Publication number
- EP3068626B1 EP3068626B1 EP14795843.3A EP14795843A EP3068626B1 EP 3068626 B1 EP3068626 B1 EP 3068626B1 EP 14795843 A EP14795843 A EP 14795843A EP 3068626 B1 EP3068626 B1 EP 3068626B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- print head
- outlet openings
- medium
- flushing
- valve element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007639 printing Methods 0.000 title claims description 70
- 238000000034 method Methods 0.000 title claims description 30
- 239000000758 substrate Substances 0.000 title claims description 21
- 238000011010 flushing procedure Methods 0.000 claims description 89
- 239000004065 semiconductor Substances 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 17
- 239000012530 fluid Substances 0.000 claims description 12
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 2
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 229940116411 terpineol Drugs 0.000 claims description 2
- 239000003085 diluting agent Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000003570 air Substances 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000002923 metal particle Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000002000 scavenging effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
- B41J2/16526—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head by applying pressure only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16552—Cleaning of print head nozzles using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
- B05B1/3026—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the controlling element being a gate valve, a sliding valve or a cock
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/05—Heads having a valve
Definitions
- the invention relates to a print head, a printing device and a method for applying a printing medium to a substrate, in particular a semiconductor structure such as a photovoltaic solar cell, according to the preambles of claims 1, 9 and 11.
- Such a printing medium may be a printing paste, which in particular contains a dopant for doping one or more regions of the semiconductor structure, which serves for forming a mask for subsequent process steps and / or which contains metal particles for forming a metallic contact structure.
- the substrate may be a semiconductor structure in the manufacturing process, for example for producing a photovoltaic solar cell or an LED structure such as an OLED structure or an inorganic LED structure.
- a printing device is known with a printhead, which printhead has a plurality of outlet openings, which can be closed by means of a valve element arranged in the printhead.
- the present invention is based on the object, the prior art printhead, the printhead comprehensive printing device and the method to improve the application of the printing paste so that increased precision and reliability is achieved.
- a printhead according to claim 1 a printing apparatus comprising such a printhead according to claim 9 and a method according to claim 11.
- a printing apparatus comprising such a printhead according to claim 9 and a method according to claim 11.
- embodiments of the printhead can be found in claims 2 to 8, the printing apparatus in claims 10 to 11 and Method in claims 12 to 14.
- the wording of all claims is explicitly included by reference in the description.
- the inventive method is preferably designed for implementation by means of the print head according to the invention and / or the printing device according to the invention, in particular a preferred embodiment of the print head and / or the printing device.
- the printhead according to the invention and the printing device according to the invention are preferably designed to be carried out by means of the method according to the invention, in particular a preferred embodiment thereof.
- the printhead according to the invention is designed for applying a printing medium to a substrate, in particular for application to a semiconductor structure such as, for example, a photovoltaic solar cell during its production.
- the printhead has a printhead housing and a valve element.
- the printhead housing includes at least one supply port for supplying the print medium and a plurality of discharge ports for discharging the print medium.
- the valve member is rotatably supported in the printhead housing to control between a first pressurized operating condition in which the supply port is fluid-conductively connected to the exhaust ports and a second inhibit operating condition in which there is no fluid communication between the supply port and the exhaust ports.
- the print head has at least one flushing medium connection and the valve element is designed and rotatable in the pressure lid housing is stored, is fluid-conductively connected to the outlet openings and in the first and second operating state no connection, in particular no fluit considerde connection between flushing medium connection and the outlet openings.
- the invention is based on the knowledge that, for the precise dispensing of the pressure medium at the plurality of outlet openings, in particular when using highly viscous pressure media having flow limits, the flow path between valve and outlet opening is advantageously made short. Furthermore, experiments have shown that a precise control of the pressure medium flow at several parallel outlet openings through a central valve arranged in a common feed channel is not possible with sufficient precision. If, however, a separate separate valve is arranged for each outlet opening, the influence of elasticities in the system is reduced and, moreover, the formation of pressure gradients between the outlet opening during startup and shutdown processes is prevented. Therefore, the print head according to the invention has a rotatably mounted in the print head housing valve element, wherein by rotating the valve element, the pressure medium output at the outlet openings can be allowed or prevented.
- a further advantage of the device according to the invention is a self-reinforcing effect wherein the overpressure of the pressure medium in conjunction with the characteristic shaping of the closure shaft causes a force directed in the direction of the outlet openings, whereby the tightness of the valve increases with increasing pressure.
- the printhead according to the invention enables quick cleaning by turning over the valve element in the purge operating state via the Rinsing medium connection flushing medium can be performed in a simple manner to the plurality of outlet openings, so that a rinse takes place, in particular the flow paths immediately in front of the outlet openings.
- the changeover between the individual operating states takes place in a simple manner by turning the valve element, so that cleaning of the print head, for example between two Druckmediumaufbringvor réellen can be done in rapid succession.
- a flushing medium line is formed in the printhead, with a flushing medium connection and at least one flushing medium outlet, so that in the flushing operating state the flushing medium outlet of the valve element is arranged in the region of at least one outlet opening and fluid-conductively connected thereto.
- the supply of flushing medium to the outlet opening is ensured in a simple manner.
- the scavenging medium outlet of the valve element is arranged in the region of the plurality of outlet openings and connected in a fluid-conducting manner to the latter.
- the flushing medium outlet thus covers a larger area, so that in the flushing operating state, the plurality of outlet openings are fluid-conductively connected to the flushing medium outlet of the flushing medium line.
- the flushing medium line has a flushing medium outlet for each of the plurality of outlet openings, so that in the flushing operating state each flushing medium outlet is arranged in the region of an outlet opening and fluid-conductively connected thereto. As a result, a defined supply of flushing medium is achieved at each outlet opening.
- the purge line is at least partially formed in the valve element.
- the purge line at least partially formed as an axial line, in particular as an axial bore in the valve element.
- the rinsing agent can be supplied in a simple manner in the valve element via the axial bore.
- an approximately radially arranged recesses, in particular radial bores are preferably provided, which connect the axial bore in the flushing operating state in each case to an outlet opening in a fluid-conducting manner. This results in the advantage that the flushing medium line can be formed in a simple manner by an axial and for each outlet opening in each case a radial bore in the valve element.
- the flushing medium line is formed between a valve wall facing the inner wall of the print head housing and the valve element, preferably by a trench-like recess of the valve element.
- the flushing medium line is at least partially formed as a partial hollow cylinder between the printhead housing and the valve element, in particular by a partially hollow cylindrical recess of the valve element.
- the flushing medium connection is preferably formed in the print head housing and arranged such that in the flushing operating state, the flushing medium connection is fluid-conductively connected to the flushing agent line.
- all of the plurality of outlet openings are turned off simultaneously, i. a switching between the operating states B and C for all outlet openings takes place simultaneously.
- one or more of the outlet openings be selectively shut off separately from the remaining outlet openings.
- some outlet openings are preferably switched off in time with respect to others; in particular, switching between the operating states B and C takes place for a subset the outlet openings (4) offset in time to the remaining outlet openings.
- non-rectangular semiconductor structures such as semiconductor structures on so-called pseudo-square wafers to separately connect and disconnect marginal outlet openings so that a pressure medium output of only the marginal outlet openings is avoided these are not yet above the semiconductor substrate.
- the valve element is therefore preferably designed such that in a fourth partial pressure operating state, the feed opening is fluid-conductively connected only to a subset of the plurality of outlet openings, in particular that marginal outlet openings are not included in the subset.
- the feed opening is fluid-conductively connected only to a subset of the plurality of outlet openings, in particular that marginal outlet openings are not included in the subset.
- a common fluid line is formed between the feed opening and a plurality of outlet openings.
- the common fluid line between the feed opening and the subset of the plurality of outlet openings is formed, in particular for the not contained in the subset outlet preferably a further fluid line, in particular preferably each formed a further fluid line.
- a fluid line with a constant cross-section and preferably the same channel geometry between the feed opening and the outlet opening is preferably formed for each outlet opening.
- a pressure medium channel is preferably formed for each outlet opening, which is fluid-conductively connected to the feed opening in the pressure operating state, and each pressure medium channel preferably has a constant cross-section at least between the valve element and outlet opening.
- each pressure medium channel is at least partially formed as a recess of the valve element, preferably for each pressure medium channel formed through the valve member portion of the pressure medium channel and the portion of the pressure medium channel between the valve element and outlet opening has a constant cross-section.
- the object underlying the invention is further achieved by a printing device according to claim 10.
- the printing device for applying a printing medium to a substrate, in particular to a semiconductor structure, such as a photovoltaic solar cell, has a pressure medium reservoir and a Druckmediumpumpsch and a printhead according to the invention, in particular a preferred embodiment thereof on.
- the pressure medium pumping means is fluid-conductively connected to the pressure medium reservoir and the supply port of the print head to supply print medium to the print head.
- the pressure device comprises an actuating means for the valve element.
- This actuating means is preferably designed for rotating the valve element relative to the printhead housing.
- the actuating means is preferably designed to rotate the valve element at a peripheral speed in the range of 10 mm / s to 10 m / s and / or switching times between the operating states in the range 150 ⁇ s - 150 ms to enable.
- control means in particular a control unit such as a microprocessor and / or a computer to control the printing process and in this case in particular by means of control signals to rotate the valve member by means of the actuating means to the respective to set the desired operating state.
- the object underlying the invention is further achieved by a method for applying a printing medium to a substrate according to claim 13.
- the inventive method for applying a printing medium to a substrate, in particular to a semiconductor structure such as a photovoltaic solar cell by means of a printhead according to the invention in particular an advantageous embodiment thereof.
- the method comprises the following method steps: In a method step A, the printhead is set up in the printing operating state.
- step B the printing medium is fed to the print head and the print medium is discharged from the outlet openings onto the substrate.
- step C the printhead is set in the blocking operating state and the supply of printing medium to the printhead is ended.
- step D the printhead is set up in the scavenging operating state and a supply or removal of flushing medium takes place to the flushing medium connection, so that the flushing medium flows through the pressure crucible and exits at the outlet openings and thus a flushing process takes place.
- the flushing medium is preferably supplied via the flushing medium connection, so that the flushing medium connection acts as flushing medium inlet for the print head and the flushing medium is discharged at the outlet openings.
- compressed air is used as flushing medium.
- the compressed air can be supplied via the flushing medium connection, so that it is likewise within the scope of the invention to use as the flushing medium a solvent, in particular acetone, isopropyl alcohol and / or terpineol.
- the printhead according to the invention, the printing device according to the invention and the method according to the invention can be used for coating any desired substrates, for example silicon wafers, in particular in the production of various types of semiconductor structures.
- a use in the production of large-area semiconductor structures, such as LED, OLED or photovoltaic solar cells is advantageous because here often line-like structures should be generated by applying pressure medium, in particular a printing paste.
- metallic contact structures are used in particular in photovoltaic solar cells.
- a metal contacting grid for discharging the charge carriers is arranged on the side facing the incident radiation when the solar cell is used.
- the grid typically has a plurality of line-like, parallel contacting fingers.
- the print head according to the invention, the printing device according to the invention and the method according to the invention are particularly suitable.
- the print head is preferably designed such that no further line for the print medium is arranged between the outlet openings and the semiconductor substrate, i. H. that the pressure medium is applied directly to the semiconductor substrate after exiting the outlet openings.
- the print head is formed such that the flow path between the valve element and the outlet opening at each of the plurality of outlet openings is in each case less than 5 cm, preferably less than 1 cm, particularly preferably less than 0.3 cm.
- the printing process can be carried out in a manner known per se, in particular as in EP 2 196 316 B1 be executed described.
- the print head is moved relative to the semiconductor substrate and, in particular, moved perpendicularly to a longitudinal extent of the print head during the printing operation to achieve application of a plurality of parallel, line-like print media strands on the semiconductor substrate.
- the execution openings are preferably arranged along a straight line.
- FIGS. 1a to 1c a first embodiment of a printhead according to the invention is shown schematically,
- FIGS. 1a and 1b and FIGS. 2a and 2b show radial sectional views; Figure 1c and 2c each show an axial sectional view.
- the printhead according to the first embodiment has a printhead housing 1 which has a cylindrical recess.
- a valve element 2 is rotatably mounted in the cylindrical recess.
- the rotation can be in the FIGS. 1a and 1b clockwise or counterclockwise around an in FIG. 1a shown pivot point D done. Accordingly, in Figure 1c the axis of rotation D of the valve element 2 is shown.
- the printhead housing 1 has a supply port 3 for supplying pressure medium. Furthermore, the printhead housing 1 has a plurality of outlet openings 4 for discharging the pressure medium. Exemplary are in Figure 1c the marginal outlet openings 4a and 4b and two middle outlet openings 4 characterized.
- FIG. 1a in this case shows the rotational position of a printing-operating state: In this rotational position, a printing medium such as a printing paste via the supply port 3 are supplied (flow path indicated by arrows), the pressure medium passes through a conduit path which is formed between the valve element 2 and an inner wall of the printhead housing 1 and finally exits at the outlet openings 4.
- the feed opening 3 in the axial direction covers the entire pressure-active width of the print head.
- the valve element 2 in contrast, has for each outlet opening 4 in each case a part-ring-like recess (in the form of a partial hollow cylinder with a rectangular cross-section), see for example the reference numerals 2a and 2b for the marginal part-ring-like recesses of the valve element 2 in FIG Figure 1c ).
- the pressure medium is thus supplied by means of a feed opening 3 and fed through the part-ring-like recesses 2 a, 2 b in each case an outlet opening 4.
- valve element 2 In a second blocking operating state, the valve element 2 is rotated relative to the printhead housing 1, so that the in FIG. 1a S marked area of the valve element 2, the outlet openings 4 covered and thus the pressure medium output is interrupted.
- the valve element 2 has a flushing medium connection 5, which in the embodiment according to FIG. 1 is formed as an axial bore of the valve element 2. Furthermore, the valve element 2 has in each case a radial flushing medium line 6 designed as a radial bore for each outlet opening 4.
- valve element 2 is rotated in the purge operating state such that the radial flushing medium line 6 is in each case fluidly connected to the associated outlet opening 4.
- rinsing agent can thus be supplied via the flushing medium connection 5, which passes through the axial rinsing agent line and reaches the outlet openings 4 via the respective radial rinsing agent lines 4, so that rinsing of the printing head takes place.
- the printhead according to FIG. 1 thus enables an output of pressure medium as well as a precise shutdown and a purge only depending on the rotational position of the valve element 2 relative to the printhead housing.
- the distance A between the valve element 2 and the outlet openings 4 is low. At the in FIG. 1 illustrated embodiment, the distance A is 0.5 mm.
- the dashed line 7 according to FIG. 1a describes a preferred modification of the first embodiment with edge shutdown:
- the part-ring-like recesses 2a, 2b of the valve element 2 are designed differently from the remaining part-ring-like recesses:
- the marginal part-ring-like recesses overlap a smaller angular range compared to the other part-ring-like recesses.
- the partial ring-shaped recess not shown in phantom overlaps an angular range over 200 °
- the part-ring-like recess 2b which ends at the dashed line 7, covers an angular range less than 200 °.
- valve element 2 continues in the clockwise direction FIG. 1a rotated, so that the area indicated by the dashed line 7 is arranged on the left edge of the outlet opening 4, so pressure medium from all the outlet openings 4 can be output.
- FIG. 2 a second embodiment of a Drucckopfs invention is shown. To avoid repetition, only the essential differences from the first exemplary embodiment will be discussed below:
- the flushing medium line is partially formed between the valve element 2 and the inner wall of the printhead housing 1. Accordingly, the flushing medium connection 5 is formed in the printhead housing, so that in the flushing operating position according to FIG. 2b there is a fluid-conducting connection between flushing medium connection 5 and outlet opening 4. The flow path between the feed opening 3 and outlet opening 4 is blocked accordingly in this operating state.
- FIG. 3 Finally, an application example is shown schematically and in perspective to explain an embodiment of a printing device according to the invention and a method according to the invention:
- printing paste containing metal particles on a pseudo-square wafer W is applied in a plurality of parallel lines in order to form metallic contacting fingers.
- the wafer W is moved through under the print head housing 1 in the dispensing direction indicated by an arrow.
- the printhead can work according to FIG. 1 or FIG. 2 be educated.
- the print head is part of a printing device according to the invention, which further comprises a pressure medium reservoir 7 with integrated pressure medium pumping means, so that pressure medium of the feed opening 3 of the print head housing 1 can be fed via a line.
- a partial pressure operating state is initially set by turning the valve element 2 by means of an actuating device 8 designed as an electric motor, so that no pressure medium is dispensed at the marginal outlet openings.
- an actuating device 8 designed as an electric motor
- the printing operating state is set, in which printing medium is discharged via all the outlet openings 4.
- the partial pressure operating state is again set by turning the valve element 2 so that pressure medium is dispensed only via the non-bordered outlet openings.
- the blocking operating state is again set by turning the valve element 2 so that no pressure medium escapes from the outlet openings.
- the actuating means may also be designed as a magnetic switch or pneumatic cylinder.
- the actuating means is designed to enable switching times between the operating states in the range of 150 ⁇ s to 150 ms.
- a rinsing medium collecting tray After passing through the wafer, a rinsing medium collecting tray is moved under the print head and by turning the valve element 2, the rinsing operating state is established.
- compressed air source 9 compressed air is passed to a flushing medium connection 5 of the print head, which is passed via the flushing medium line to all outlet openings 4, so that a cleaning of the print head and in particular all the outlet openings 4 takes place.
- the partial pressure operating state is set again by turning the valve element 2 and the next wafer can be printed.
Landscapes
- Coating Apparatus (AREA)
Claims (14)
- Tête d'impression dévolue au dépôt d'un fluide d'impression sur un substrat, notamment une structure semi-conductrice telle qu'une cellule solaire photovoltaïque, munie d'un boîtier (1) et d'un élément de distribution (2), ledit boîtier de la tête d'impression comprenant au moins un orifice d'alimentation (3) affecté à l'amenée de fluide d'impression, et une pluralité d'orifices de décharge (4) affectés à la délivrance dudit fluide d'impression,
ledit élément de distribution étant monté à rotation dans le boîtier (1) de la tête d'impression, en vue d'un pilotage entre un premier état de fonctionnement en mode pression, dans lequel l'orifice d'alimentation est en liaison fluidique avec les orifices de décharge (4), et un deuxième état de fonctionnement en mode blocage, dans lequel aucune liaison fluidique n'est instaurée entre ledit orifice d'alimentation (3) et lesdits orifices de décharge,
caractérisée par le fait
que ladite tête d'impression est dotée d'au moins un raccord (5) à fluide de rinçage, la réalisation de l'élément de distribution (2), et son montage rotatif dans le boîtier (1) de ladite tête d'impression, étant conçus de telle sorte que, dans un troisième état de fonctionnement en mode purge, ledit raccord à fluide de rinçage soit en liaison fluidique avec les orifices de décharge (4), et qu'aucune liaison fluidique ne soit instaurée entre ledit raccord (5) à fluide de rinçage et lesdits orifices de décharge (4), dans les premier et deuxième états de fonctionnement ; et
par le fait que ladite tête d'impression est intérieurement pourvue d'un conduit à fluide de rinçage comprenant un raccord (5) à fluide de rinçage et au moins une sortie de fluide de rinçage, de façon telle qu'à l'état de fonctionnement en mode purge, la sortie de fluide de rinçage de l'élément de distribution soit située dans la région d'au moins un orifice de décharge (4), et soit en liaison fluidique avec ce dernier. - Tête d'impression selon la revendication 1,
caractérisée par le fait
qu'à l'état de fonctionnement en mode purge, la sortie de fluide de rinçage de l'élément de distribution est située dans la région de la pluralité d'orifices de décharge (4), et est en liaison fluidique avec ces derniers ; et/ou
par le fait que le conduit à fluide de rinçage est respectivement muni d'une sortie de fluide de rinçage pour chaque orifice de décharge, et qu'à l'état de fonctionnement en mode purge, chaque sortie de fluide de rinçage est située dans la région d'un orifice respectif de décharge, et est en liaison fluidique avec ce dernier. - Tête d'impression selon la revendication 1 ou 2,
caractérisée par le fait
que le conduit à fluide de rinçage est ménagé au moins en partie dans l'élément de distribution (2), notamment sous la forme d'un conduit axial, de préférence d'un alésage axial pratiqué dans ledit élément de distribution (2). - Tête d'impression selon la revendication 1 ou 2,
caractérisée par le fait
que le conduit à fluide de rinçage est ménagé entre l'élément de distribution (2) et une paroi intérieure du boîtier de ladite tête d'impression, tournée vers ledit élément de distribution (2), notamment en tant qu'évidement du type saignée pratiqué dans ledit élément de distribution. - Tête d'impression selon la revendication 4,
caractérisée par le fait
que le raccord (5) à fluide de rinçage est ménagé dans le boîtier (1) de ladite tête d'impression, et est agencé de façon telle que ledit raccord (5) à fluide de rinçage soit en liaison fluidique avec le conduit à fluide de rinçage à l'état de fonctionnement en mode purge. - Tête d'impression selon l'une des revendications précédentes,
caractérisée par le fait
que, dans un quatrième état de fonctionnement en mode pression partielle, l'orifice d'alimentation (3) est en liaison fluidique uniquement avec un sous-ensemble, au sein de la pluralité d'orifices de décharge (4) ; notamment par le fait que des d'orifices de décharge (4) occupant des emplacements marginaux ne sont pas inclus dans ledit sous-ensemble. - Tête d'impression selon l'une des revendications précédentes,
caractérisée par le fait
qu'un conduit commun de circulation de fluide est ménagé entre l'orifice d'alimentation (3) et une pluralité d'orifices de décharge (4). - Tête d'impression selon la revendication 6 et la revendication 7,
caractérisée par le fait
que le conduit commun de circulation de fluide est ménagé entre l'orifice d'alimentation (3) et le sous-ensemble, au sein de la pluralité d'orifices de décharge (4) ; notamment par le fait qu'au moins un conduit additionnel de circulation de fluide est ménagé pour les orifices de décharge (4) non inclus dans ledit sous-ensemble ; de préférence par le fait qu'un conduit additionnel respectif de circulation de fluide est ménagé pour chaque orifice de décharge non inclus dans ledit sous-ensemble. - Dispositif d'impression dévolu au dépôt d'un fluide d'impression sur un substrat, notamment une structure semi-conductrice telle qu'une cellule solaire photovoltaïque,
comprenant un réservoir (7) de fluide d'impression, un moyen de pompage dudit fluide d'impression, et une tête d'impression,
laquelle tête d'impression est munie d'un boîtier (1) et d'un élément de distribution (2), ledit boîtier de la tête d'impression comprenant au moins un orifice d'alimentation (3) affecté à l'amenée de fluide d'impression, et une pluralité d'orifices de décharge (4) affectés à la délivrance dudit fluide d'impression,
ledit élément de distribution étant monté à rotation dans le boîtier (1) de la tête d'impression, en vue d'un pilotage entre un premier état de fonctionnement en mode pression, dans lequel l'orifice d'alimentation est en liaison fluidique avec les orifices de décharge (4), et un deuxième état de fonctionnement en mode blocage, dans lequel aucune liaison fluidique n'est instaurée entre ledit orifice d'alimentation (3) et lesdits orifices de décharge,
ladite tête d'impression étant dotée d'au moins un raccord (5) à fluide de rinçage, la réalisation de l'élément de distribution (2), et son montage rotatif dans le boîtier (1) de ladite tête d'impression, étant conçus de telle sorte que, dans un troisième état de fonctionnement en mode purge, ledit raccord à fluide de rinçage soit en liaison fluidique avec les orifices de décharge (4), et qu'aucune liaison fluidique ne soit instaurée entre ledit raccord (5) à fluide de rinçage et lesdits orifices de décharge (4), dans les premier et deuxième états de fonctionnement,
sachant que ledit moyen de pompage du fluide d'impression est en liaison fluidique avec ledit réservoir (7) de fluide d'impression et avec ledit orifice d'alimentation (3) de la tête d'impression, en vue de l'amenée de fluide d'impression vers ladite tête d'impression, caractérisé par le fait
que ledit dispositif d'impression est équipé d'un moyen d'actionnement dédié à l'élément de distribution (2) et réalisé de manière à faire tourner ledit élément de distribution par rapport au boîtier (1) de la tête d'impression. - Dispositif d'impression selon la revendication 9,
caractérisé par le fait
que ledit dispositif d'impression inclut une unité de commande réalisée pour coopérer avec le moyen d'actionnement de façon telle qu'une position de l'élément de distribution, prise par rotation vis-à-vis du boîtier (1) de la tête d'impression, puisse être préétablie pour chaque état de fonctionnement, au moyen de ladite unité de commande. - Procédé dévolu au dépôt d'un fluide d'impression sur un substrat, notamment une structure semi-conductrice telle qu'une cellule solaire photovoltaïque, au moyen d'une tête d'impression munie d'un boîtier (1) et d'un élément de distribution (2), ledit boîtier de la tête d'impression comprenant au moins un orifice d'alimentation (3) affecté à l'amenée de fluide d'impression, et une pluralité d'orifices de décharge (4) affectés à la délivrance dudit fluide d'impression, ledit élément de distribution étant monté à rotation dans le boîtier (1) de la tête d'impression, en vue d'un pilotage entre un premier état de fonctionnement en mode pression, dans lequel l'orifice d'alimentation est en liaison fluidique avec les orifices de décharge (4), et un deuxième état de fonctionnement en mode blocage, dans lequel aucune liaison fluidique n'est instaurée entre ledit orifice d'alimentation (3) et lesdits orifices de décharge,
incluant les étapes opératoires suivantes :A configuration de la tête d'impression à l'état de fonctionnement en mode pression ;B amenée du fluide d'impression vers ladite tête d'impression et déversement dudit fluide d'impression sur le substrat, à partir des orifices de décharge (4) ;C configuration de ladite tête d'impression à l'état de fonctionnement en mode blocage, et arrêt de l'amenée de fluide d'impression vers ladite tête d'impression ;caractérisé par le fait
qu'une configuration de la tête d'impression à l'état de fonctionnement en mode purge, et une amenée de fluide de rinçage vers le raccord (5) à fluide de rinçage, sont effectuées lors d'une étape opératoire D. - Procédé selon la revendication 11,
caractérisé par le fait
qu'une commutation entre les états de fonctionnement B et C a lieu, en simultanéité, pour tous les orifices de décharge (4). - Procédé selon la revendication 11,
caractérisé par le fait
qu'une commutation entre les états de fonctionnement B et C a lieu, pour un sous-ensemble des orifices de décharge (4), avec décalage dans le temps par rapport aux orifices de décharge restants. - Procédé selon l'une des revendications 11 à 13,
caractérisé par le fait
qu'une ou plusieurs substance(s) du groupe- des gaz, en particulier de l'air,- des solvants, en particulier de l'acétone et/ou un terpinéol,- des diluants, en particulier une substance déjà contenue dans le fluide d'impression,est (sont) utilisée(s) en tant que fluide de rinçage ; et/ou par le fait qu'une évacuation par aspiration dudit fluide de rinçage, au niveau du raccord (5) à fluide de rinçage, est effectuée lors de l'étape opératoire D.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013223250.0A DE102013223250A1 (de) | 2013-11-14 | 2013-11-14 | Druckkopf, Druckvorrichtung und Verfahren zum Aufbringen eines Druckmediums auf ein Substrat, insbesondere eine photovoltaische Solarzelle |
PCT/EP2014/074288 WO2015071270A1 (fr) | 2013-11-14 | 2014-11-11 | Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque |
Publications (2)
Publication Number | Publication Date |
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EP3068626A1 EP3068626A1 (fr) | 2016-09-21 |
EP3068626B1 true EP3068626B1 (fr) | 2019-10-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP14795843.3A Active EP3068626B1 (fr) | 2013-11-14 | 2014-11-11 | Tête d'impression, dispositif d'impression et procédé de dépôt d'un fluide d'impression sur un substrat, en particulier sur une cellule solaire photovoltaïque |
Country Status (3)
Country | Link |
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EP (1) | EP3068626B1 (fr) |
DE (1) | DE102013223250A1 (fr) |
WO (1) | WO2015071270A1 (fr) |
Cited By (11)
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CN110072629A (zh) * | 2016-12-14 | 2019-07-30 | 杜尔系统股份公司 | 印刷头和相关的操作方法 |
US11154892B2 (en) | 2016-12-14 | 2021-10-26 | Dürr Systems Ag | Coating device for applying coating agent in a controlled manner |
US11167302B2 (en) | 2016-12-14 | 2021-11-09 | Dürr Systems Ag | Coating device and associated operating method |
US11167308B2 (en) | 2016-12-14 | 2021-11-09 | Dürr Systems Ag | Print head for the application of a coating agent on a component |
US11167297B2 (en) | 2016-12-14 | 2021-11-09 | Dürr Systems Ag | Print head for the application of a coating agent |
US11203030B2 (en) | 2016-12-14 | 2021-12-21 | Dürr Systems Ag | Coating method and corresponding coating device |
US11298717B2 (en) | 2016-12-14 | 2022-04-12 | Dürr Systems Ag | Print head having a temperature-control device |
US11440035B2 (en) | 2016-12-14 | 2022-09-13 | Dürr Systems Ag | Application device and method for applying a multicomponent coating medium |
US11504735B2 (en) | 2016-12-14 | 2022-11-22 | Dürr Systems Ag | Coating device having first and second printheads and corresponding coating process |
US11944990B2 (en) | 2016-12-14 | 2024-04-02 | Dürr Systems Ag | Coating device for coating components |
US11975345B2 (en) | 2016-12-14 | 2024-05-07 | Dürr Systems Ag | Coating installation and corresponding coating method |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6954056B2 (ja) * | 2017-11-30 | 2021-10-27 | セイコーエプソン株式会社 | 液体噴射装置 |
WO2020046311A1 (fr) * | 2018-08-30 | 2020-03-05 | Hewlett-Packard Development Company, L.P. | Buses de distribution rotatives |
WO2020046308A1 (fr) * | 2018-08-30 | 2020-03-05 | Hewlett-Packard Development Company, L.P. | Joints d'étanchéité d'interface d'accouplement |
DE102019108763A1 (de) * | 2019-04-03 | 2020-10-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Aufbringen einer Struktur aus Druckmedium auf ein Substrat |
DE102019115009A1 (de) | 2019-06-04 | 2020-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Druckkopf und Verfahren zur Herstellung eines Druckkopfs |
DE102019122131B4 (de) | 2019-08-16 | 2021-06-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Parallelextrudieren von Druckmedium auf ein Substrat |
DE102019135208B4 (de) * | 2019-12-19 | 2022-02-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Druckeinheit, Druckvorrichtung und Verfahren zum Parallelextrudieren von Druckmedium auf ein Substrat |
DE102020129305B3 (de) | 2020-11-06 | 2022-05-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Vorrichtung und Verfahren zum segmentierten Paralleldispensen |
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JP4784657B2 (ja) * | 2009-02-04 | 2011-10-05 | ブラザー工業株式会社 | 記録装置 |
DE102010044349A1 (de) * | 2010-09-03 | 2012-04-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Herstellung einer metallischen Kontaktstruktur zur elektrischen Kontaktierung einer photovoltaischen Solarzelle |
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- 2013-11-14 DE DE102013223250.0A patent/DE102013223250A1/de not_active Withdrawn
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110072629A (zh) * | 2016-12-14 | 2019-07-30 | 杜尔系统股份公司 | 印刷头和相关的操作方法 |
US11154892B2 (en) | 2016-12-14 | 2021-10-26 | Dürr Systems Ag | Coating device for applying coating agent in a controlled manner |
US11167302B2 (en) | 2016-12-14 | 2021-11-09 | Dürr Systems Ag | Coating device and associated operating method |
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US11167297B2 (en) | 2016-12-14 | 2021-11-09 | Dürr Systems Ag | Print head for the application of a coating agent |
US11203030B2 (en) | 2016-12-14 | 2021-12-21 | Dürr Systems Ag | Coating method and corresponding coating device |
US11298717B2 (en) | 2016-12-14 | 2022-04-12 | Dürr Systems Ag | Print head having a temperature-control device |
US11338312B2 (en) | 2016-12-14 | 2022-05-24 | Dürr Systems Ag | Print head and associated operating method |
US11440035B2 (en) | 2016-12-14 | 2022-09-13 | Dürr Systems Ag | Application device and method for applying a multicomponent coating medium |
US11504735B2 (en) | 2016-12-14 | 2022-11-22 | Dürr Systems Ag | Coating device having first and second printheads and corresponding coating process |
US11813630B2 (en) | 2016-12-14 | 2023-11-14 | Dürr Systems Ag | Coating method and corresponding coating device |
US11878317B2 (en) | 2016-12-14 | 2024-01-23 | Dürr Systems Ag | Coating device with printhead storage |
US11944990B2 (en) | 2016-12-14 | 2024-04-02 | Dürr Systems Ag | Coating device for coating components |
US11975345B2 (en) | 2016-12-14 | 2024-05-07 | Dürr Systems Ag | Coating installation and corresponding coating method |
Also Published As
Publication number | Publication date |
---|---|
EP3068626A1 (fr) | 2016-09-21 |
WO2015071270A1 (fr) | 2015-05-21 |
DE102013223250A1 (de) | 2015-05-21 |
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