WO2015055012A1

WO2015055012A1 - Friction generator and vibration sensor using dipolymer composite film and preparation method therefor

Info

Publication number: WO2015055012A1
Application number: PCT/CN2014/078938
Authority: WO
Inventors: 常林荣; 王竹; 赵豪; 林同福
Original assignee: 纳米新能源（唐山）有限责任公司
Priority date: 2013-10-18
Filing date: 2014-05-30
Publication date: 2015-04-23

Abstract

Provided are a friction generator and a vibration sensor using a dipolymer composite film and a preparation method therefor. The friction generator using a dipolymer composite film comprises a first electrode layer, a first macromolecular polymer insulating layer and a second electrode layer which are all arranged in a stacked manner, wherein the material adopted for the first macromolecular polymer insulating layer is the dipolymer composite film. A frame structure capable of vibration is arranged between the first macromolecular polymer insulating layer and the second electrode layer of the vibration sensor or between the first macromolecular polymer insulating layer and a second macromolecular polymer insulating layer. An intermediate electrode layer or an intermediate thin film layer may also be further added between the first macromolecular polymer insulating layer and the second macromolecular polymer insulating layer, and the frame structure capable of vibration may be formed between every two of these layers. The friction generator and the vibration sensor using a dipolymer composite film can improve vibration performance and acoustic sensing performance remarkably and have outstanding low-frequency response performance.

Description

Friction generator, vibration sensor and preparation method thereof using double polymer composite film

The invention relates to the field of composite materials, in particular to a friction generator, a vibration sensor and a preparation method thereof using the double polymer composite membrane, in particular to a respiratory and heartbeat vibration sensor and a preparation method thereof. Background technique

At present, energy issues are one of the major issues affecting human progress and sustainable development. Various researches around renewable energy development and renewable energy are being carried out in hot places around the world.

Energy harvesting and conversion devices built with friction technology play a key role in self-powered nanosystems. Moreover, due to its environmental protection, low cost, and self-driving characteristics, it has received extensive attention. Since the piezoelectric friction generator developed by Professor Wang Zhonglin's research group has realized the conversion of mechanical energy into electrical energy, friction generators of different structures and materials based on piezoelectric and triboelectricity have been successively introduced. Currently, friction generators have been able to drive small LCDs, low-power LEDs, and microelectronics and modules, but the output performance of friction generators remains a key factor limiting their development and application.

A vibration sensor, or a piezoelectric sensor, is a sensor made by utilizing the piezoelectric effect generated by the piezoelectric material. It has been widely used in many fields such as acoustics, medical, industrial, transportation, security, etc., and is gradually changing people's lives. And the way of working, has become a trend of social development. When a piezoelectric material is deformed by an external force in a certain direction (including bending and telescopic deformation), a charge is generated on the surface due to polarization of internal charges. Piezoelectric materials can be divided into piezoelectric single crystals, piezoelectric polycrystalline and organic piezoelectric materials. The prior art generally uses polarized polyvinylidene fluoride (PVDF), polyvinylidene fluoride and polytrifluoroethylene copolymer as pressure. Electrical material. Since the operating frequency of the piezoelectric transducer is affected by factors such as the geometry and elastic properties of the material, the operating frequency of most piezoelectric transducers is higher than 100 Hz, and due to the influence of harmonics, the piezoelectric transducer is followed. Signal filtering also has high requirements. At present, there is no vibration sensor with excellent low frequency response performance.

In particular, vibration sensors are currently one of the commonly used tools for detecting breathing and heartbeat, but It is because the existing vibration sensors generally have a problem of poor low-frequency response performance, and thus the sensitivity to detection of low-frequency vibrations such as breathing and heartbeat is poor. Summary of the invention

At present, membrane materials such as polydidecylsiloxane (PDMS) used in friction generators have good triboelectric performance, vibration performance and acoustic induction properties, but when these membrane materials are, for example, polydiphenylsiloxane membranes When it is thinner, its mechanical properties are poor and it is easy to break, which brings a lot of inconvenience to large-scale production.

The first technical problem to be solved by the present invention is: to overcome the defect that the polymer material layer used in the existing friction generator is easily broken, and to provide a friction generator using a double polymer composite film, the double polymer composite film It is not easy to break, and can significantly improve the friction power generation performance, vibration performance and acoustic induction performance of the friction generator.

A second technical problem to be solved by the present invention is to provide a vibration sensor having excellent low frequency response performance in view of the drawbacks existing in the prior art.

In order to solve the above technical problem, the first technical solution provided by the present invention is a friction generator using a dual polymer composite film, comprising a first electrode layer, a first polymer insulating layer and a second electrode laminated a layer, wherein the material used for the first polymer insulating layer is a double polymer composite film; the double polymer composite film comprises: a polymer porous film layer and a polymer coating layer, wherein the polymer coating layer covers the polymer The porous membrane layer is filled into the pores of the polymer porous membrane layer; the first electrode layer and the second electrode layer are the output ends of the friction generator.

A second technical solution for use in the present invention is a friction generator using a dual polymer composite film, comprising a first electrode layer stacked, a first polymer insulating layer, an intermediate film layer, and a second polymer a polymer insulating layer and a second electrode layer, wherein at least one of the first polymer insulating layer and the intermediate film layer, and/or at least one of the second polymer insulating layer and the intermediate film layer The material used is a dual polymer composite film; the dual polymer composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled with the polymer porous layer The pores of the film layer; the first electrode layer and the second electrode layer are outputs of the friction generator. A third technical solution for use in the present invention is a method for preparing a friction generator using a dual polymer composite membrane, the method comprising the following steps:

(1) Preparation of double polymer composite membrane

Preparing a liquid solution for the polymer coating layer, and then uniformly coating the polymer coating layer on the surface of the polymer porous membrane layer with a liquid solution; coating the polymer porous membrane layer with the polymer coating layer with one side of the liquid solution in the template Then, the polymer porous film layer and the polymer coating layer are dried together with the liquid solution and the template, and after the polymer coating layer is solidified, the template is separated to obtain a double polymer composite film; wherein the polymer coating layer covers the polymer porous layer On the film layer and filled into the pores of the polymer porous membrane layer;

(2) Assembly of friction generator

The double polymer composite film obtained according to the step (1) is made into a friction generator,

The friction generator includes a first electrode layer, a first polymer insulating layer and a second electrode layer which are laminatedly disposed; or the friction generator includes a first electrode layer and a first polymer insulation which are laminated a layer, a second polymer insulating layer and a second electrode layer; or the friction generator comprises a first electrode layer, a first polymer insulating layer, an intervening electrode layer, and a second polymer layer laminated The insulating layer and the second electrode layer; or the friction generator includes a first electrode layer, a first polymer insulating layer, an intermediate film layer, a second polymer insulating layer and a second electrode layer;

Wherein, the first polymer insulating layer, and/or the second polymer insulating layer, and/or the intermediate film layer are composed of the double polymer composite film obtained in the step (1).

A fourth technical solution for use in the present invention is a vibration sensor including a first electrode layer, a first polymer insulating layer, and a second electrode layer which are sequentially stacked, wherein the first electrode layer is disposed at a first side surface of the first polymer insulating layer, a second side surface of the first polymer insulating layer facing the second side surface of the second electrode layer;

Providing at least one convex structure on the second side surface of the first polymer insulating layer or the second side surface of the second electrode layer, so that the second polymer insulating layer is second The side surface and the second side surface of the second electrode layer are fixedly connected to each other, thereby forming a cavity; the first polymer insulating layer, the second electrode layer and the protruding structure are jointly formed Vibrating frame structure; The first electrode layer and the second electrode layer are two output ends of the vibration sensor; wherein the material used for the first polymer insulating layer is a double polymer composite film; the double polymer The composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled in the pores of the polymer porous film layer.

A fifth technical solution for use in the present invention is a vibration sensor comprising a first electrode layer, a first polymer insulating layer, a second polymer insulating layer and a second electrode layer, which are sequentially stacked; The first electrode layer is disposed on a first side surface of the first polymer insulating layer, and the second electrode layer is disposed on a first side surface of the second polymer insulating layer, The second side surface of the second polymer insulating layer is disposed toward the second side surface of the first polymer insulating layer;

The second side surface of the first polymer insulating layer or the second side surface of the second polymer insulating layer is provided with at least one convex structure to insulate the first polymer a second side surface of the layer and a second side surface of the second polymer insulating layer are fixedly connected to each other, thereby forming a cavity; the first polymer insulating layer and the second polymer are polymerized The insulating layer and the raised structure together form a vibratable frame structure;

The first electrode layer and the second electrode layer are two output ends of the vibration sensor; wherein, the material used for the first polymer insulating layer and/or the second polymer insulating layer is double polymerization The composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled in the pores of the polymer porous film layer .

A sixth technical solution for use in the present invention is a vibration sensor comprising a first electrode layer, a first polymer insulating layer, an intervening electrode layer, a second polymer insulating layer, and a second layer which are sequentially stacked. An electrode layer; wherein the first electrode layer is disposed on a first side surface of the first polymer insulating layer, and the second electrode layer is disposed on the first polymer polymer layer On the side surface; the intervening electrode layer is disposed between the second side surface of the first polymer insulating layer and the second side surface of the second polymer insulating layer, and the intervening electrode a first side surface of the layer is disposed opposite to a second side surface of the first polymer insulating layer, and a second side surface of the intervening electrode layer and a second side of the second polymer insulating layer Relative surface setting;

Providing at least one convex structure on the second side surface of the first polymer insulating layer or the first side surface of the intervening electrode layer, so that the second side of the first polymer insulating layer The surface and the first side surface of the intervening electrode layer are fixedly connected to each other, thereby forming a cavity, and the first polymer insulating layer, the intervening electrode layer and the protruding structure together form a vibratable frame Structure, and/or, the second side surface of the second polymer insulating layer or the second side surface of the intervening electrode layer is provided with at least one convex structure, so that the second polymer a second side surface of the insulating layer and a second side surface of the intervening electrode layer are fixedly connected to each other, thereby forming a cavity, the second polymer insulating layer, the intervening electrode layer and the protruding structure Forming a vibratable frame structure together;

Any two or three of the intervening electrode layer, the first electrode layer and the second electrode layer form an output end of the vibration sensor;

The material used for the first polymer polymer insulating layer and/or the second polymer polymer insulating layer is a double polymer composite film; the double polymer composite film comprises: a polymer porous film layer and a polymer coating layer. Wherein the polymer cover layer covers the polymer porous film layer and is filled in the pores of the polymer porous film layer.

A seventh technical solution for use in the present invention is a vibration sensor comprising a first electrode layer sequentially stacked, a first polymer insulating layer, an intermediate film layer, a second polymer insulating layer, and a second An electrode layer; wherein the first electrode layer is disposed on a first side surface of the first polymer insulating layer, and the second electrode layer is disposed on the first polymer polymer layer On the side surface; the intervening film layer is a polymer film layer disposed between the second side surface of the first polymer insulating layer and the second side surface of the second polymer insulating layer And the first side surface of the intervening film layer is disposed opposite to the second side surface of the first polymer insulating layer, and the second side surface of the intervening film layer and the second polymer The second side surfaces of the insulating layer are oppositely disposed;

Providing at least one convex structure on the second side surface of the first polymer insulating layer or the first side surface of the intermediate film layer, so that the second side of the first polymer insulating layer a surface and a first side surface of the intervening film layer are fixedly connected to each other, thereby forming a cavity, the a high molecular polymer insulating layer, the intervening film layer and the raised structure together form a vibratable frame structure, and/or a second side surface of the second polymer insulating layer or the intervening The second side surface of the film layer is provided with at least one convex structure, so that the second side surface of the second polymer insulating layer and the second side surface of the intermediate film layer are fixedly connected to each other, thereby forming a cavity, the second polymer insulating layer, the intervening film layer and the raised structure together form a vibratable frame structure;

The first electrode layer and the second electrode layer are two output ends of the vibration sensor; wherein at least one of the first polymer insulating layer and the intermediate film layer, and/or the second highest The material used for at least one of the molecular polymer insulating layer and the intermediate film layer is a dual polymer composite film; the dual polymer composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers On the polymer porous membrane layer, and filled into the pores of the polymer porous membrane layer.

An eighth technical solution for use in the present invention is a method for preparing a vibration sensor, the method comprising:

(1) preparing a liquid solution for the polymer coating layer, and then coating the polymer coating layer on the surface of the polymer porous film layer with a liquid solution; coating the polymer porous film layer with a liquid solution for the polymer coating layer Sidely placed on the template; then the polymer porous film layer, the polymer cover layer is dried together with the liquid solution and the template, and after the polymer cover layer is solidified, the template is separated to obtain a double polymer composite film; wherein the polymer cover layer is covered On the polymer porous membrane layer, and filled into the pores of the polymer porous membrane layer;

Providing at least one convex structure on one surface of the double polymer composite film to obtain a polymer polymer insulating layer with a convex structure;

(2) providing at least one convex structure on one surface of the electrode layer to obtain an electrode layer having a convex structure;

Wherein, only step (1) or step (2) is performed;

(3) preparing a vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, and a second electrode layer;

Wherein, the polymer polymer insulating layer with a convex structure obtained by the step (1) is used as the first polymer polymer insulating layer, or the electrode layer with the convex structure obtained by the step (2) is used as the electrode layer Second electrode layer;

And disposed between the first polymer insulating layer and the second electrode layer according to the convex structure, the second electrode layer is disposed on the first polymer insulating layer, and the convex structure and the side surface facing the same Performing a fixed connection, thereby forming a cavity; the first polymer insulating layer, the second electrode layer and the convex structure together form a vibratable frame structure;

Then, a first electrode layer is provided on the side surface of the first polymer insulating layer where the second electrode layer is not provided, thereby obtaining a vibration sensor.

A ninth technical solution for use in the present invention is a method for preparing a vibration sensor, the method comprising:

(1) preparing a liquid solution for the polymer coating layer, and then uniformly coating the polymer coating layer on the surface of the polymer porous film layer with a liquid solution; coating the polymer porous film layer with one side of the liquid solution for the polymer coating layer Placed on the template; then the polymer porous film layer, the polymer cover layer is dried together with the liquid solution and the template, and after the polymer cover layer is solidified, the template is separated to obtain a double polymer composite film; wherein the polymer cover layer is covered a polymer porous membrane layer, and filled into the pores of the polymer porous membrane layer;

(2) preparing a vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, a second polymer insulating layer and a second electrode layer;

Wherein, the polymer polymer insulating layer with a convex structure obtained by the step (1) is used as the first polymer polymer insulating layer, and the side surface having the convex structure faces the second polymer insulating layer, and Fixing the bump structure to the second polymer insulating layer, thereby forming a cavity; the first polymer polymer insulating layer, the second polymer polymer insulating layer and the convex structure together form a vibrating frame structure ;

Then, a first electrode layer is disposed on a side surface of the first polymer polymer insulating layer without a convex structure, and a second electrode is disposed on a side surface of the second polymer polymer insulating layer not fixedly connected to the protruding structure Layer, thereby obtaining a vibration sensor.

A tenth technical solution for use in the present invention is a method for preparing a vibration sensor, the method package Includes:

(2) providing at least one convex structure on at least one surface of the electrode layer to obtain an electrode layer having a convex structure;

Wherein, only step (1) or step (2) is performed, or step (1) and step (2) are simultaneously performed;

(3) preparing a vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, an intermediate electrode layer, a second polymer insulating layer and a second electrode layer;

Wherein, the first polymer polymer insulating layer and/or the second polymer polymer insulating layer are coated with the polymer structure insulating layer with a convex structure obtained by the step (1); or, the intermediate electrode layer is used for the step ( 2) obtaining the electrode layer with a convex structure, at least one layer of the first polymer polymer insulating layer and the second polymer polymer insulating layer, and the polymer having the convex structure obtained by the step (1) An insulating layer having a convex structure on at most one of the opposite side surfaces of the adjacent two layers;

The protrusion is disposed between the first polymer insulating layer and the intervening electrode layer, and/or the protrusion structure is disposed between the second polymer insulating layer and the intervening electrode layer, and the first polymer is a polymer insulating layer, an intervening electrode layer and a second polymer insulating layer are assembled, and the protruding structure is fixedly connected to a side surface thereof, thereby forming a cavity; the first polymer insulating layer, The intervening electrode layer and the raised structure therebetween, and/or the second polymer insulating layer, the intervening electrode layer and the raised structure therebetween form a vibrating frame structure together; Then, a first electrode layer and a second electrode layer are respectively disposed on the side surfaces of the first polymer insulating layer and the second polymer insulating layer that are not facing the intervening electrode layer, thereby obtaining a vibration sensor.

An eleventh technical solution for use in the present invention is a method for preparing a vibration sensor, the method comprising:

(2) at least one convex structure is respectively disposed on both side surfaces of the other polymer polymer insulating layer, and a polymer polymer insulating layer having a convex structure on both sides is obtained;

Wherein, only step (1) or step (2) is performed;

(3) preparing a vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, an intermediate film layer, a second polymer insulating layer and a second electrode layer;

Wherein the first polymer polymer insulating layer, the intermediate film layer and the second polymer polymer insulating layer are any one or two layers, and the polymer structure insulating layer with the convex structure obtained by the step (1) is used. And having a convex structure on at least one of the opposite side surfaces of the adjacent two layers; or, the intermediate film layer is obtained by using the polymer insulating layer with the convex structure on both sides of the step obtained by the step (2);

And disposed between the first polymer insulating layer and the intervening film layer according to the convex structure, and/or the protruding structure is disposed between the second polymer insulating layer and the intervening film layer, and the first polymer a polymer insulating layer, an intermediate film layer and a second polymer polymer insulating layer are assembled, and the protruding structure is fixedly connected to a side surface thereof, thereby forming a cavity; the first polymer insulating layer, Intervening film layer and raised structure therebetween, and/or second polymer polymerization The insulating layer, the intervening film layer and the convex structure between the two together form a vibrating frame structure;

Then, a first electrode layer and a second electrode layer are respectively disposed on the side surfaces of the first polymer insulating layer and the second polymer insulating layer which are not oriented toward the intermediate film layer, thereby obtaining a vibration sensor.

The invention can prepare a flexible double polymer composite film of several micrometers to several tens of micrometers, the film has good electrostatic properties, vibration performance and acoustic sensitivity, and has stable structure, high mechanical strength, is not easy to be broken, easy to process, and low in cost. . The film is applied to a friction generator, and the friction power generation performance, the vibration performance, and the acoustic induction performance are better.

In addition, the vibration sensor of the present invention is based on the forced vibration of the polymer film, and the polymer film is damped and vibrated, thereby effectively reducing the harmonic influence in the transducer structure of the vibration sensor, and having excellent low-frequency response performance. And signal waveforms, especially suitable for the detection of low frequency vibrations such as heartbeat and breathing. DRAWINGS

Figure 1 is a micrograph of a polypropylene porous film (SEM image, 20000 magnification). 2 is a schematic view showing the structure of a double polymer composite membrane of the present invention.

3 is a schematic perspective view showing a specific embodiment of a friction generator of the present invention.

4 is a schematic cross-sectional structural view of the friction generator of FIG. 3 of the present invention.

FIG. 5 is a schematic perspective structural view of another embodiment of the friction generator of the present invention.

Figure 6 is a cross-sectional structural view of the friction generator of Figure 5 of the present invention.

7 is a schematic perspective view showing another embodiment of the friction generator of the present invention.

Figure 8 is a perspective view showing the structure of the friction generator of Figure 7 of the present invention.

9 is a schematic perspective view showing another embodiment of the friction generator of the present invention.

Figure 10 is a perspective view showing the structure of the friction generator of Figure 9 of the present invention.

11 is a schematic perspective view showing a specific embodiment of a vibration sensor of the present invention.

Figure 12 is a cross-sectional structural view of the vibration sensor of Figure 11 of the present invention.

FIG. 13 is a schematic perspective structural view of another embodiment of the vibration sensor of the present invention. Figure 14 is a cross-sectional structural view of the vibration sensor of Figure 13 of the present invention.

Figure 15 is a perspective view showing another embodiment of the vibration sensor of the present invention. Figure 16 is a perspective view showing the structure of the vibration sensor of Figure 15 of the present invention.

17 is a schematic perspective view showing another embodiment of the vibration sensor of the present invention. Figure 18 is a perspective view showing the structure of the vibration sensor of Figure 17 of the present invention.

Figure 19 shows the vibration performance of the PVDF sensor.

Figure 20 shows the sensor detecting vibration performance of the present invention.

Figure 21 shows the PDMS sensor for detecting vibration performance.

Figure 22 is a schematic diagram of acoustic vibration testing.

Figure 23 (a) is the experimental measurement signal diagram of the PVDF piezoelectric sensor; Figure 23 (b) is the filtered signal diagram of the PVDF piezoelectric sensor.

Figure 24 (a) is an experimental measurement signal diagram of the vibration sensor of the present invention; and Figure 24 (b) is a filtered signal diagram of the vibration sensor of the present invention.

Figure 25 is a diagram showing the frequency signal of the vibration sensor of the present invention.

Figure 26 is a frequency signal diagram of a PVDF piezoelectric sensor. detailed description

In order to fully understand the objects, features and advantages of the present invention, the invention will be described in detail.

The present invention provides a dual polymer composite film comprising: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and fills the pores of the polymer porous film layer in.

The material for the polymer porous film layer is a polypropylene porous film, a polyethylene porous film, a polyimide porous film, a polyvinyl chloride porous film or a polytetrafluoroethylene porous film. The material used for the polymer cover layer is polydisiloxane or polyvinylidene fluoride. Figure 1 shows the microstructure of a polypropylene porous film (scanning electron micrograph, 20000 magnification).

The polypropylene porous film used in the present invention is an isotactic polypropylene having a weight average molecular weight of 300 to 700 kg/mol, a porosity of 42% ± 3%, and a tensile strength of more than 200 kg/cm ² . The polyethylene porous film used in the present invention has a weight average molecular weight of 100 to 500 kg/mol, a porosity of 42% ± 3%, and a tensile strength of more than 200 kg/cm ² .

The polyimide porous film used in the present invention has a weight average molecular weight of 100 to 600 kg/mol, a porosity of 42% ± 3 %, and a tensile strength of more than 1000 kg/cm ² .

The polyvinyl chloride porous film used in the present invention has a weight average molecular weight of 50 to 120 kg/mol and a porosity of 42%.

± 3 %, tensile strength greater than 600 kg/cm ² .

The polytetrafluoroethylene porous membrane used in the present invention has a weight average molecular weight of 200 to 800 kg/mol, a porosity of 42% ± 3 %, and a tensile strength of more than 70 kg/cm ² .

The above double polymer composite film has a thickness of 7 μm - 34 μm, and if the polymer coating layer of the double polymer composite film is provided with a micro/nano structure, the thickness including the micro/nano structure is 7 μπι - 34 μ m. Further, the polymer porous film layer has a thickness of 5 μm to 30 μm.

Preferably, the polymer coating layer of the dual polymer composite film is provided with a micro/nano structure. The micro/nano structure is a micro/nano structure having a convex height of 200 nm to 20 μm. As shown in FIG. 2, the bi-polymer composite film includes a polymer porous film layer a, a polymer coating layer b, and a micro-nano structure c, wherein the polymer coating layer b covers the polymer porous film layer a, and is filled therein. In the pores of the polymer porous membrane layer a.

The preparation method of the above double polymer composite membrane will be described in detail below. The method comprises: (1) preparing a liquid solution for the polymer cover layer.

The material used for the polymer cover layer is polydisiloxane or polyvinylidene fluoride. Specifically, polyvinylidene fluoride is dissolved in dimercaptoacetamide (DMA) to form a liquid solution. The polydithiosiloxane itself is liquid and can be directly applied to step (2). When the polymer cover layer is made of polydisiloxane, it is necessary to use a polydithiosiloxane and a curing agent (vulcanizing agent, usually in a ratio of 10:1), and the curing agent used is a commercially available conventional curing agent. For example, Dow Corning 184.

(2) The polymer coating layer is uniformly applied to the surface of the polymer porous film layer with a liquid solution. The material for the polymer porous film layer is a polypropylene porous film, a polyethylene porous film, a polyimide porous film, a polyvinyl chloride porous film or a polytetrafluoroethylene porous film. The polymer porous film layer has a thickness of 5 μm to 30 μm.

(3) The polymer porous film layer is coated with a side of the polymer coating with a liquid solution placed on the template, and pressure is applied. The thickness of the bipolymer composite film is determined by the thickness of the polymer porous film layer and the applied Pressure control. The template used may be a flat template or a template having a micro/nano structure, so that a double polymer composite film having a flat surface or a micro/nano structure can be obtained. The template used in the present invention is a template made of a conventional material such as a silicon template, a plexiglass template, or the like.

(4) The polymer porous film layer, the polymer coating layer is baked with a liquid solution and a template at 70-90 ° C for 90 min-120 min to cure the polymer cover layer; then the template is separated to obtain a double polymer composite film. Wherein the polymer cover layer covers the polymer porous film layer and is filled into the pores of the polymer porous film layer. The resulting double polymer composite film has a thickness of from 7 μm to 34 μm.

The above dual polymer composite membrane can be used in a friction generator. 3 and 4 show a friction generator 1 according to an embodiment of the present invention. The friction generator 1 includes a first electrode layer 11, a first polymer insulating layer 12, and a second electrode layer 13, which are stacked, and the first electrode layer 11 and the second electrode layer 13 are output terminals of a friction generator. The material of the first polymer insulating layer 12 is the above-mentioned double polymer composite film, and has a thickness of 7 μπι - 34 μππ.

In this embodiment, the micro-nano structure 14 is provided on at least one of the two faces on which the first polymer insulating layer 12 and the second electrode layer 13 are opposed to each other. The micro/nano structure 14 disposed on the surface of the first polymer insulating layer 12 is a micro/nano structure having a protrusion height of 200 nm to 20 μm. The micro/nano structure (not shown) disposed on the surface of the second electrode layer is a micro/nano structure having a protrusion height of 200 ηπι-100 μπι.

In this embodiment, the first electrode layer 11 is not specifically defined for the material used, and the material capable of forming the conductive layer is within the scope of the present invention, such as indium tin oxide, graphite wafer, silver nanowire film, metal or Alloy, wherein the metal comprises gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, molybdenum, tungsten or vanadium; alloys include aluminum alloys, titanium alloys, magnesium alloys, niobium alloys, copper Alloy, alloy, manganese alloy, nickel alloy, lead alloy, tin alloy, cadmium alloy, niobium alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or niobium alloy;

In this embodiment, the material used for the second electrode layer 13 is a metal or an alloy, wherein the metal includes gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, molybdenum, tungsten or vanadium; Alloys include aluminum alloys, titanium alloys, niobium alloys, niobium alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, Niobium alloy or niobium alloy. The thickness of the second electrode layer 13 is preferably 100 μm - 500 μm, more preferably 200 μm. Figure 5 and FIG. 6 show a friction generator 2 according to another embodiment of the present invention. The friction generator 2 includes a first electrode layer 21, a first polymer insulating layer 22, a second polymer insulating layer 23, and a second electrode layer 24, a first electrode layer 21 and a second electrode. Layer 24 is the output of the friction generator. The material used for at least one of the first polymer insulating layer 22 and the second polymer insulating layer 23 is a double polymer composite film having a thickness of 7 μπι - 34 μπι.

In this embodiment, at least one of the two faces of the first polymer insulating layer 22 and the second polymer insulating layer 23 disposed opposite each other is provided with a micro/nano structure.

When the first polymer polymer insulating layer 22 and/or the second polymer polymer insulating layer 23 are doped with a double polymer composite film, the micro/nano structure 25 provided on the surface thereof (the second polymer is not shown in the drawing) The micro/nano structure on the polymer insulating layer 23 is a micro/nano structure having a bump height of 200 nm to 20 μm.

In this embodiment, the first electrode layer 21 and the second electrode layer 24 are not specifically defined for the materials used, and the materials capable of forming the conductive layer are all within the protection scope of the present invention, and may be combined with the embodiments of FIGS. 3 and 4. The material used for the first electrode layer 11 is the same.

The material used for at least one of the first high molecular polymer insulating layer 22 and the second high molecular polymer insulating layer 23 is a double polymer composite film. When the first polymer insulating layer 22 or the second polymer insulating layer 23 does not use the double polymer composite film, the material used is selected from the group consisting of a polyimide film, an aniline furfural resin film, and a polyacetal. Film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly neighbor Diallyl benzoate film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polydecyl methacrylate Film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film Any one of a natural rubber film, a polyacrylonitrile film, and an acrylonitrile vinyl chloride copolymer film. At this time, the thickness of the first polymer insulating layer 22 or the second polymer insulating layer 23 is 100 μm - 500 μm.

In addition, in this case, when the micro-nano structure is provided on the surface of the first polymer insulating layer 22 and/or the second polymer insulating layer 23, the micro-nano structure 25 is provided on the surface thereof (in the figure) The micro/nano structure on the second polymer insulating layer 23 is not shown) is a bump height of 200 ηι - 100 μ Micro-nano structure of m.

7 and 8 show a friction generator 3 according to still another embodiment of the present invention. The friction generator 3 includes a first electrode layer 31, a first polymer insulating layer 32, an intermediate film layer 33, a second polymer insulating layer 34, and a second electrode layer 35, a first electrode layer 31 and a first electrode layer The two electrode layer 35 is the output end of the friction generator. Wherein at least one of the first polymer insulating layer 32 and the intermediate film layer 33, and/or at least one of the second polymer insulating layer 34 and the intermediate film layer 33 is a double polymer. The composite film has a thickness of 7 μ πι -34 μ πι.

In this embodiment, at least one of the two faces of the first polymer insulating layer 32 and the intermediate film layer 33 disposed opposite each other is provided with a micro/nano structure (not shown), and/or a second polymer polymerization. A micro/nano structure (not shown) is disposed on at least one of the two faces of the insulating layer 34 and the intermediate film layer 33 disposed opposite each other.

When the first polymer insulating layer 32, the intermediate film layer 33, and/or the second polymer insulating layer 34 are made of a double polymer composite film, a micro/nano structure is provided on the surface thereof (not shown). It is a micro/nano structure with a raised height of 200 nm to 20 μm.

In this embodiment, the materials used for the first electrode layer 31 and the second electrode layer 35 are as shown in Figs. 5 and

The first electrode layer 21 and the second electrode layer 24 of the embodiment are made of the same material.

The material of at least one of the first polymer insulating layer 32 and the intermediate film layer 33, and/or at least one of the second polymer insulating layer 34 and the intermediate film layer 33 is a double polymer composite film. . When the first polymer insulating layer 32, or the intermediate film layer 33, or the second polymer insulating layer 34 does not use the double polymer composite film, the materials used are the same as those in the embodiment of FIGS. 5 and 6. The materials used in the dual polymer composite film are the same.

9 and 10 show a friction generator 4 according to still another embodiment of the present invention. The friction generator 4 includes a first electrode layer 41, a first polymer insulating layer 42, an intermediate electrode layer 43, a second polymer insulating layer 44, and a second electrode layer 45, a first electrode layer 41 and a first electrode layer After the two electrode layers 45 are connected, the intermediate electrode layer 43 constitutes an output end of the friction generator. The material used for at least one of the first high molecular polymer insulating layer 42 and the second high molecular polymer insulating layer 44 is the above double polymer composite film having a thickness of 7 μπι - 34 μπι.

The first polymer polymer insulating layer 42 and the intervening electrode layer 43 are disposed opposite each other A micro-nano structure (not shown) is provided on at least one of the two faces, and/or at least one of the two faces of the second polymer insulating layer 44 and the intermediate electrode layer 43 disposed opposite each other. The micro/nano structure provided on the intervening electrode layer 43 is a micro/nano structure having a convex height of 200 nm to 100 μm.

When the first polymer insulating layer 42 and/or the second polymer insulating layer 44 are made of a double polymer composite film, the micro/nano structure (not shown) disposed on the surface thereof has a protrusion height of 200 nm. -20 μ πι micro-nano structure.

In this embodiment, the materials used for the first electrode layer 41 and the second electrode layer 45 are the same as those of the first electrode layer 21 and the second electrode layer 24 of the embodiment of Figs. 5 and 6.

The intervening electrode layer 43 is a metal or an alloy, and the specific metal or alloy is the same as that used in the second electrode layer 13 of the specific embodiment of FIGS. 3 and 4, and details are not described herein again.

The material used for at least one of the first high molecular polymer insulating layer 42 and the second high molecular polymer insulating layer 44 is the above double polymer composite film. When the first polymer insulating layer 42 or the second polymer insulating layer 44 does not use the double polymer composite film, the material used is the same as the double polymer in the embodiment of FIGS. 5 and 6. The materials used in the composite film are the same. And the thickness and the arrangement of the micro-nano concave structure are also the same as described above.

When the layers of the friction generator of the present invention are bent downward, between the first polymer insulating layer and the second electrode layer in the friction generator, or the first polymer polymer insulating layer and the second polymer are polymerized Between the insulating layers, or the first polymer insulating layer and the second polymer insulating layer are respectively rubbed with the intervening electrode layer or the intervening film layer to generate an electrostatic charge, thereby causing the first electrode layer and the second electrode layer A potential difference occurs between the electrode layers, or between the first electrode layer and the intervening electrode layer, and between the intervening electrode layer and the second electrode layer. Due to the potential difference between the electrode layers, free electrons will flow from the side with the lower potential to the side with the higher potential through the external circuit, thereby forming a current in the external circuit. When the layers of the friction generator of the present invention are restored to the original state, the sub-forms formed between the electrode layers at this time form a reverse current through the external circuit. By repeated friction and recovery, periodic alternating current signals can be formed in the external circuit. In this embodiment of the invention, the double polymer composite film is used as the first polymer polymer insulating layer, and/or the second polymer polymer insulating layer, and/or the intermediate film layer, which improves the mechanical strength and has a very high Good electrostatic properties and vibration and acoustic sensitivity. The dual polymer composite film of the present invention and a friction generator using the double polymer composite film can be used for a vibration sensor, and the structure of the vibration sensor of the present invention will be described in detail below.

11 and 12 show a vibration sensor 5 according to an embodiment of the present invention. The vibration sensor 5 includes a first electrode layer 51, a first polymer insulating layer 52, and a second electrode layer 53 which are laminated in this order. Specifically, the first electrode layer 51 is disposed on the first side surface of the first polymer insulating layer 52, and the second side surface of the first polymer insulating layer 52 faces the second electrode layer 53. The second side surface is disposed, and the second side surface of the first polymer insulating layer 52 or the second side surface of the second electrode layer 53 is provided with at least one convex structure 54 such that the first polymer insulating layer The second side surface of the 52 and the second side surface of the second electrode layer 53 are fixedly connected to each other, thereby forming a cavity, and the first polymer insulating layer 52, the second electrode layer 53, and the convex structure 54 are collectively formed. The vibrating frame structure; the first electrode layer 51 and the second electrode layer 53 are outputs of the vibration sensor 1.

In this embodiment, the height of the raised structure 54 is 1 μ πι-1πιπι. The plurality of convex structures 54 are preferably plural, so that a plurality of cavities can be formed. The arrangement of the plurality of raised structures 54 may be regular or irregular. For example, the plurality of raised structures 54 may be formed in a stripe structure, a well-shaped structure, a diamond-shaped structure, a Ζ-shaped structure or An array of interdigitated structures, the distance between adjacent two raised structures is 0.1 mm - 1 mm.

The raised structures 54 are connected over the surface of at least one of their fixedly connected surfaces, for example, over the second side surface of the first polymeric insulating layer 52 and/or the second side surface of the second electrode layer 53, each The width of the face connection is 0.1mm-5mm.

Preferably, the protruding structure 54 is connected above the surface on which one side is fixedly connected, and the surface of the other side of the fixed connection is point-connected or wire-connected, for example, on the second side surface of the first polymer insulating layer 52. Connected on the second side surface of the second electrode layer 53 or connected in a line; or, connected on the second side surface of the second electrode layer 53, second in the first polymer insulating layer 52 Point connection or wire connection on the side surface. The side surface supported by the point connection or the wire connection projection structure 54 has a thickness direction displacement and a radial direction displacement by a cavity formed by the convex structure and its fixed connection surface. The surface radial displacement is much larger than the thickness direction displacement, so that the vibration sensor has excellent low frequency vibration characteristics. Therefore, a good low frequency response can be achieved by the radial vibration of the cavity. The first polymer polymer insulating layer 52 has a thickness of 1 μm to 1πm, and may be a single polymer layer or a composite polymer layer, particularly the above-described double polymer composite film.

The material used for the single polymer layer is selected from the group consisting of polydisiloxane siloxane films, polyimide films, polypropylene films, aniline phthalic acid resin films, polyacetal films, ethyl cellulose films, polyamide films, melamine ruthenium. Aldehyde film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly(phenylene terephthalate film), cellulose sponge film , regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polydecyl methacrylate film, polyvinyl alcohol film, polyisobutylene film, polyparaphenylene Ethylene glycol diacetate film, polyvinyl butyral film, furfural phenol polycondensate film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride Any one of the copolymer films, preferably from any one of a polydimethicone film, a polyimide film, and a polypropylene film, and is optimal Yue is polydimethyl siloxane film.

The material used for the composite polymer layer is a polydisiloxane film, a polyimide film, a polypropylene film, an aniline resin film, a polyacetal film, an ethyl cellulose film, a polyamide film, a melamine furfural. Film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly(phenylene terephthalate film), cellulose sponge film, Recycled sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polydecyl methacrylate film, polyvinyl alcohol film, polyisobutylene film, polyparaphenylene Ethylene phthalate film, polyvinyl butyral film, furfural phenol polycondensate film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride copolymer A composite polymer film composed of any two of the film, preferably a polyethylene terephthalate film and a polydisiloxane film structure Composite polymer film, polyethylene terephthalate film and polyimide film composite polymer film, or polyethylene terephthalate film and polypropylene film composite polymerization Film.

In this embodiment, the materials used for the first electrode layer 51 and the second electrode layer 53 are the same as those of the first electrode layer 11 of the embodiment of Figs. 3 and 4.

Next, a convex structure is provided only on the second side surface of the first polymer insulating layer 52. The case of 54 is an example of a method of preparing the vibration sensor of this embodiment.

A bump structure 54 is formed on the second side surface of the first polymer polymer insulating layer 52. The bump structure 54 is made of the same material as the first polymer polymer insulating layer 52. This step can be used, but not Limited to, the screen printing method; the height of the prepared convex structure 54 is controlled to be 1 μ πι-1πιπ, and can be formed into a convex array of a stripe structure, a well-shaped structure, a diamond-shaped structure, a Ζ-shaped structure or an interdigitated structure. The distance between two adjacent raised structures is controlled to be 0.1 mm-lmm. The raised structures 54 are joined on the surface of the first polymer insulating layer 52, and each of the faces has a width of 0.1 mm to 5 mm.

The raised structure 54 is then fixedly joined to the second side surface of the second electrode layer 53 by a plasma treatment fixed connection or a pressure sensitive adhesive fixing connection to form a cavity. The raised structure 54 may be a face-to-face connection on the surface of the second electrode layer 53, or may be a dot connection or a wire connection. The fixed connection of the point connection or the line connection can better achieve a good low frequency response through the radial vibration of the cavity.

Then, a first electrode layer 51 is prepared by sputtering metal on the first side surface of the first polymer insulating layer 52.

The plasma processing fixed connection refers to processing the surface to be fixedly connected by using a plasma processor, and then performing a fixed connection. Specifically, the specific embodiment means that the second side surface of the second electrode layer 53 is first used by the plasma processor. After processing, the bump structure 54 is fixedly connected to the second side surface of the second electrode layer 53, and the plasma processor can use, for example, a single gun of the model CSM-SSC1 produced by Dongguan Yaotian Electric Technology Co., Ltd. Vertical plasma surface treatment machine; Pressure sensitive adhesive (PSA) is an abbreviation for pressure sensitive adhesive. It is a kind of pressure sensitive adhesive. To this specific embodiment, the use of pressure sensitive adhesive fixed connection means pressure sensitive adhesive. Applying to the second side surface of the second electrode layer 53 to be cooled and solidified, the second side surface of the first polymer insulating layer 52 is directed toward the second side surface of the second electrode layer 53, and is lightly bonded. A person skilled in the art can select a suitable pressure sensitive adhesive according to the actual operation, for example, can be purchased from Suzhou Jinfeng Pressure Sensitive Co., Ltd. The method of fabricating the vibration sensor in other cases in this embodiment is similar.

13 and 14 show a vibration sensor 6 according to another embodiment of the present invention. The vibration sensor 6 includes a first electrode layer 61, a first polymer insulating layer 62, a second polymer insulating layer 63, and a second electrode layer 64 which are sequentially stacked. Specifically, the first electrode layer 61 is disposed on the first side surface of the first polymer insulating layer 62, and the second electrode layer 64 is disposed on the second surface. On the first side surface of the polymer polymer insulating layer 63, the second side surface of the second polymer polymer insulating layer 63 is disposed toward the second side surface of the first polymer polymer insulating layer 62; the first polymer polymerization The second side surface of the material insulating layer 62 or the second side surface of the second polymer insulating layer 23 is provided with at least one convex structure 65 such that the second side surface of the first polymer insulating layer 62 is The second side surface of the second polymer insulating layer 63 is fixedly connected to each other, thereby forming a cavity, and the first polymer insulating layer 62, the second polymer insulating layer 63 and the protruding structure 65 are formed together. The vibrating frame structure; the first electrode layer 61 and the second electrode layer 64 are outputs of the vibration sensor 6.

In this embodiment, the specific height, arrangement, and pitch of the raised structures 65 are the same as those of the raised structures of the embodiments of Figures 11 and 12.

The raised structure 65 is joined over a surface to which at least one side thereof is fixedly joined, for example, on the second side surface of the first polymer insulating layer 62 and/or the second side surface of the second polymer insulating layer 63. Connection, the width of each face connection is 0.1mm-5mm.

Preferably, the protruding structure 65 is connected above the surface on which one side is fixedly connected, and on the other side of the fixed connecting surface, a point connection or a wire connection, for example, on the second side surface of the first polymer insulating layer 62. Connecting, connecting or connecting on the second side surface of the second polymer insulating layer 63; or connecting on the second side surface of the second polymer insulating layer 63, in the first polymer polymerization The second side surface of the insulating layer 62 is connected by dots or wires. The side surface supported by the point connection or the wire connection projection structure 65 has a thickness direction displacement and a radial direction displacement by a cavity formed by the convex structure and its fixed connection surface. The surface radial displacement is much larger than the thickness direction displacement, so that the vibration sensor has low frequency vibration characteristics. Therefore, a good low frequency response can be achieved by the radial vibration of the cavity.

The thickness of the first polymer insulating layer 62 and the second polymer insulating layer 63 are both 1 μm - 1 mm, and both may be a single polymer layer or a composite polymer layer, especially the above-mentioned double polymer. Composite film.

The materials used for the single polymer layer and the materials used for the composite polymer layer are the same as those of the specific embodiments of Figs. 11 and 12, and will not be described again.

In this embodiment, the materials used for the first electrode layer 61 and the second electrode layer 64 are as shown in FIG. 3 and The material of the first electrode layer 11 of the specific embodiment is the same.

The preparation method of the vibration sensor of the present embodiment is basically the same as the preparation method of the vibration sensor of the above-described FIG. 11 and FIG. 12, and on the basis of the above, the vibration sensor required by the person skilled in the art is easily required according to the embodiment. The specific structure is adjusted to the corresponding preparation method.

15 and 16 show a vibration sensor 7 according to still another embodiment of the present invention. The vibration sensor 7 includes a first electrode layer 71, a first polymer insulating layer 72, an intermediate film layer 73, a second polymer insulating layer 74, and a second electrode layer 75 which are laminated in this order. Specifically, the first electrode layer 71 is disposed on the first side surface of the first polymer insulating layer 72; the second electrode layer 75 is disposed on the first side surface of the second polymer insulating layer 74, and The intermediate film layer 33 is disposed between the second side surface of the first polymer insulating layer 72 and the second side surface of the second polymer insulating layer 74, and the first side surface of the intermediate film layer 73 and the first side surface A second side surface of the high molecular polymer insulating layer 72 is opposite to each other, and a second side surface of the intermediate film layer 73 is opposite to the second side surface of the second polymer insulating layer 74; the first polymer insulating layer 72 The second side surface or the first side surface of the intermediate film layer 73 is provided with at least one convex structure 76 such that the second side surface of the first polymer insulating layer 72 and the first side surface of the intermediate film layer 73 The first polymer sealing layer 72, the intermediate film layer 73 and the protruding structure 76 together form a vibrating frame structure, and/or the second polymer insulation is fixedly connected to each other. The second side surface of the 74 or the second side surface of the intermediate film layer 73 is provided with at least one convex structure 77 such that the second side surface of the second polymer insulating layer 74 and the second side of the intermediate film layer 73 The surfaces are fixedly connected to each other, thereby forming a cavity, and the second polymer insulating layer 74, the intermediate film layer 73 and the convex structure 77 collectively form a vibratable frame structure; the first electrode layer 71 and the second electrode layer 75 are Two outputs of the vibration sensor 7.

In this embodiment, the specific height, arrangement, and pitch of the raised structures are the same as those of the raised structures 54 of the embodiment of Figures 11 and 12.

The raised structures are joined over a surface to which at least one side thereof is fixedly joined, for example, over the second side surface of the first polymeric insulating layer 72 and/or the first side surface of the intermediate film layer 73, and/or, The second side surface of the second high molecular polymer insulating layer 74 and/or the second side surface of the intermediate film layer 73 are joined, and the width of each surface connection is 0.1 mm to 5 mm. Preferably, the raised structure is connected above the surface on which one side is fixedly connected, and the point on the other side of the fixed connection surface is connected or connected, for example, on the second side surface of the first polymer insulating layer 72. a point connection or a wire connection on the first side surface of the intervening film layer 73; or, on the first side surface of the first polymer polymer insulation layer 72 of the intervening film layer 73, in the first polymer insulation The second side surface of the layer 72 is connected by dots or wires; or, connected to the second side surface of the second polymer insulating layer 74, on the second side surface of the intermediate film layer 73, or connected by wires Alternatively, it is connected over the second side surface of the intermediate film layer 33, and is connected or line-connected on the second side surface of the second polymer insulating layer 74.

The first polymer insulating layer 72, the intermediate film layer 73 and the second polymer insulating layer 74 may be a single polymer layer or a composite polymer layer, especially the above-described double polymer composite film. The thickness of each polymer film layer is 1 μ πι-1πιπι.

In this embodiment, the materials used for the first electrode layer 71 and the second electrode layer 75 are the same as those of the first electrode layer 11 of the embodiment of Figs. 3 and 4.

17 and 18 show a vibration sensor 8 according to still another embodiment of the present invention. The vibration sensor 8 includes a first electrode layer 81, a first polymer insulating layer 82, an intermediate electrode layer 83, a second polymer insulating layer 84, and a second electrode layer 85 which are sequentially stacked. Specifically, the first electrode layer 81 is disposed on the first side surface of the first polymer insulating layer 82; the second electrode layer 85 is disposed on the first side surface of the second polymer insulating layer 84, intervening The electrode layer 83 is disposed between the second side surface of the first polymer insulating layer 82 and the second side surface of the second polymer insulating layer 84, and the first side surface of the intermediate electrode layer 83 is first The second side surface of the high molecular polymer insulating layer 82 is oppositely disposed, and the second side surface of the intermediate electrode layer 83 is opposite to the second side surface of the second polymer insulating layer 84; the first polymer insulating layer At least one raised structure 86 is disposed on the second side surface of the 82 or the first side surface of the intervening electrode layer 83, The second side surface of the first polymer insulating layer 82 and the first side surface of the intervening electrode layer 83 are fixedly connected to each other, thereby forming a cavity, a first polymer insulating layer 82, an intervening electrode layer 83, and The raised structures 86 together form a vibratable frame structure, and/or the second side surface of the second polymer insulating layer 84 or the second side surface of the intervening electrode layer 83 is provided with at least one raised structure 87, The second side surface of the second polymer insulating layer 84 and the second side surface of the intervening electrode layer 83 are fixedly connected to each other, thereby forming a cavity, a second polymer insulating layer 84, an intervening electrode layer 83, and The raised structures 87 together form a vibratable frame structure. The first electrode layer 81 and the second electrode layer 85 are connected in series as one output end of the vibration sensor 8, and the intervening electrode layer 83 is the other output end of the vibration sensor 8, or the first electrode layer 81, the second electrode layer 85, and the intermediate layer Any two of the electrode layers 83 serve as the output ends of the vibration sensor 8.

In this embodiment, the specific height, arrangement, and pitch of the raised structures are the same as those of the protrusions of the embodiment of Figures 11 and 12.

The raised structures are joined over a surface to which at least one side thereof is fixedly joined, for example, over the second side surface of the first polymer insulating layer 82 and/or the first side surface of the intervening electrode layer 83, and/or The second side surface of the second high molecular polymer insulating layer 84 and/or the second side surface of the intermediate electrode layer 83 are connected to each other, and the width of each surface connection is 0.1 mm to 5 mm.

Preferably, the raised structure is connected above the surface on which one side is fixedly connected, and the surface of the other side of the fixed connection is point-connected or wire-connected, for example, on the second side surface of the first polymer insulating layer 82. Connecting, point-connecting or wire-bonding on the first side surface of the inter-electrode layer 83; or, connecting on the first side surface of the inter-electrode layer 83, on the second side surface of the first polymer insulating layer 82 Point connection or line connection; or, connected on the second side surface of the second polymer insulating layer 84, on the second side surface of the intervening electrode layer 83, or connected in a line; or, in the intervening electrode layer 83 The second side surface is connected to the upper side, and is connected or line-connected on the second side surface of the second polymer insulating layer 84. The side surface supported by the point connection or the wire connection projection structure has a thickness direction displacement and a radial direction displacement by a cavity formed by the convex structure and its fixed connection surface. The surface radial displacement is much larger than the thickness direction displacement, so that the vibration sensor has low frequency vibration characteristics. Therefore, a good low frequency response can be achieved by the radial vibration of the cavity.

The thicknesses of the first polymer insulating layer 82 and the second polymer insulating layer 84 are both 1 μπι-lmm, and both may be a single polymer layer or a composite polymer layer, preferably the above-described double polymer composite film.

In this embodiment, the materials used for the first electrode layer 81 and the second electrode layer 85 are as shown in Figs. 3 and

The material of the first electrode layer 11 of the specific embodiment is the same.

The intervening electrode layer 83 is a metal or an alloy. Herein, the metal or alloy is the same as that used for the first electrode layer 13 of the specific embodiments of Figs. 3 and 4, and will not be described again. The thickness of the intervening electrode layer 83 is preferably from 100 μm to 500 μm, more preferably 200 μm.

Under the action of external vibration, the convex structure vibrates, so that between the first polymer insulating layer and the second electrode, or between the first polymer insulating layer and the second polymer insulating layer The first polymer polymer insulating layer and the second polymer polymer insulating layer are respectively in contact with the intervening electrode layer or the intervening film to generate an electrical signal, thereby causing a first electrode layer and a second electrode layer, or A potential difference occurs between an electrode layer and the intervening electrode layer and between the intervening electrode layer and the second electrode layer. Due to the potential difference between the electrode layers, free electrons will flow from the side with the lower potential to the side with the higher potential through the external circuit, thereby forming a current in the external circuit. When the layers of the vibration sensor are restored to the original state, the internal potential formed between the electrode layers disappears at this time, and a reverse potential difference is again generated between the balanced electrode layers, and the free electrons are formed by the external circuit. To the current. By repeating the above process, a periodic alternating current signal can be formed in the external circuit.

The frequency response of the vibration sensor of the present invention is mainly concentrated in the low frequency band, and the response bandwidth is mainly concentrated between 0 Hz and 55 Hz. As can be seen from the spectral comparison of Fig. 25 and Fig. 26, the vibration sensor of the present invention is much more responsive to 0 Hz and 5 Hz than the polyvinylidene fluoride (PVDF) sensor. For heartbeat and respiratory vibration, the frequency is mainly concentrated below 5 Hz. Since the vibration sensor of the present invention has more excellent low-frequency response performance, it is more suitable for detecting low-frequency vibrations such as heartbeat and breathing. In the above various embodiments, when the composite polymer layer is used, the preparation method thereof: optional step, (1) when the polymer base material is a solid material, such as polyvinylidene fluoride, the polymer base material is used. Forming a liquid solution of a polymer base material in a conventional organic solvent such as dimercaptoacetamide (DMA);

(2) coating a liquid solution of the polymer base material, drying and solidifying to obtain a polymer base layer; and when the polymer base material is a liquid material such as polydisiloxane, directly performing step (2);

(3) treating the surface of one side of the polymer base layer with a plasma, then applying a liquid solution of another polymer layer material thereon (prepared to a liquid solution of the polymer base material), and then drying and solidifying to obtain a composite Polymer layer.

When the above double-polymer composite film is used, the preparation method is as described above, that is, preparing a liquid solution for the polymer coating layer, and then coating the polymer coating layer on the surface of the polymer porous film layer with a liquid solution; The polymer porous membrane layer is coated with a polymer coating layer on one side of the liquid solution on the template; then the polymer porous membrane layer, the polymer coating layer is dried together with the liquid solution and the template, and the polymer coating layer is cured. Separating the template to obtain a two-polymer composite film; wherein the polymer coating layer covers the polymer porous film layer and is filled in the pores of the polymer porous film layer.

The process of the present invention employs, in addition to the above, conventional methods or devices in the art. It is understood that this should not be construed as limiting the scope of the claims.

Example

Example 1

The friction generator has a size of 3 cm x l .2 cm and a total thickness of about 300 μm. The friction generator 1 includes a first electrode layer 11, a first polymer insulating layer 12, and a second electrode layer 13, which are laminated. The material used for the first polymer insulating layer 12 is a double polymer composite film. The preparation method of the friction generator will be described in detail below.

1. Preparation of double polymer composite membrane

Adding a curing agent (Dow Corning 184) to polydidecylsiloxane (Dow Corning) (mass ratio) For example, 1: 10), a liquid solution for the polymer cover layer is obtained. The polymer coating layer was uniformly applied to the surface of the polymer porous membrane layer (polypropylene porous membrane, Xinxiang Zhongke GRE-16P) with a liquid solution. The thickness of the polymer porous film layer was 15 μm. The polymer porous membrane layer was coated with a polymer coating layer on one side of the liquid solution on a flat plate template, and pressure was applied. Then, the polymer porous film, the polymer cover layer was baked with a liquid solution and a template together at 80 ° C for 100 minutes to cure the polymer cover layer. The template was separated to obtain a two-polymer composite film in which a polymer coating layer was coated on the polymer porous film layer and filled into the pores of the polymer porous film layer. The obtained double polymer composite film had a thickness of 20 μm.

2. Preparation of friction generator

The above double polymer composite film is used as the first polymer polymer insulating layer 12, and the surface of the polymer porous film layer is plated with an aluminum film having a thickness of 100 nm, which is the first electrode layer 11.

A copper foil having a thickness of ΙΟΟμπι is used as the second electrode layer 13. The second electrode layer 13 is laminated on the first polymer insulating layer 12 in accordance with the surface of the polymer cover layer toward the second electrode layer 13, to obtain a friction generator 1#. The edge of the friction generator is sealed with a common tape.

The friction generator exhibits a typical open circuit characteristic in the measurement of I-V (current-voltage).步进 The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) causes the friction generator to periodically bend and release. The open circuit voltage and closed circuit current of the friction generator are 20V and 4μΑ, respectively.

Example 2

The friction generator has a size of 3 cm x 1.2 cm and a total thickness of about 300 μm. The friction generator 1 includes a first electrode layer 11, a first polymer insulating layer 12, and a second electrode layer 13, which are laminated. The material used for the first polymer insulating layer 12 is a double polymer composite film. The preparation method of the friction generator will be described in detail below.

1. Preparation of double polymer composite membrane

A curing agent (Dow Corning 184) was added to polydisiloxane (Dow Corning) (mass ratio of 1:10) to obtain a liquid solution for the polymer coating. The polymer coating layer was uniformly applied to the surface of the polymer porous membrane layer (polypropylene porous membrane, Xinxiang Zhongke GRE-16P) with a liquid solution. The thickness of the polymer porous film layer was 15 μm. The polymer porous film was coated with a polymer coating layer on one side of the liquid solution on a template having a micro/nano structure, and pressure was applied. Then, the polymer porous membrane, The polymer cover layer was baked with a liquid solution and a template at 80 ° C for 100 min to cure the polymer cover layer. The template was separated to obtain a two-polymer composite film in which a polymer coating layer was coated on the polymer porous film layer and filled into the pores of the polymer porous film layer. The obtained double-polymer composite film had a thickness of 20 μm, and a micro-nano structure having a protrusion height of 500 nm was provided on the surface of the polymer cover layer.

2. Preparation of friction generator

The friction generator exhibits a typical open circuit characteristic in the measurement of I-V (current-voltage).步进 A stepper motor with periodic oscillations (0.33 Hz and 0.13% deformation) causes the friction generator to periodically bend and release. The open circuit voltage and closed circuit current of the friction generator are 25V and 6μΑ, respectively.

Example 3-6

The preparation methods of Examples 3 to 6 were basically the same as those of Example 2, and the differences are shown in Table 1.

Table 1

The stepping motor using periodic oscillation (0.33 Hz and 0.13% deformation) causes the friction generator 3#-6# to undergo periodic bending and release, and the open circuit voltage and closed circuit current of the 3# friction generator are 22 V and 5 μΑ, respectively. The open circuit voltage and closed circuit current of the 4# friction generator are 23V and 5μΑ, respectively. 5# friction power generation The open circuit voltage and closed circuit current of the machine are 23V and 5μΑ, respectively. The open circuit voltage and closed circuit current of the 6# friction generator are 22 V and 5 μΑ, respectively.

Example 7

1. Preparation of double polymer composite membrane

The polyvinylidene fluoride is dissolved in dimercaptoacetamide to form a liquid solution for the polymer coating layer. The polymer coating layer was coated with a liquid solution on the surface of a polymer porous membrane (polypropylene porous membrane, Xinxiang Zhongke GRE-16P). The thickness of the polymer porous film layer was 15 μm. The polymer porous film was coated with a polymer coating layer on one side of the liquid solution on a template having a micro/nano structure, and pressure was applied. Then, the polymer porous film, the polymer cover layer was baked with a liquid solution and a template together at 80 ° C for 100 minutes to cure the polymer cover layer. The template was separated to obtain a two-polymer composite film in which a polymer coating layer was coated on the polymer porous film layer and filled into the pores of the polymer porous film layer. The obtained double-polymer composite film had a thickness of 20 μm, and a micro-nano structure having a projection height of 500 nm was provided on the surface of the polymer cover layer.

2. Preparation of friction generator

The friction generator exhibits a typical open circuit characteristic in the measurement of IV (current-voltage). The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) causes the friction generator to periodically bend and release. The open circuit voltage and closed circuit current of the friction generator are 18V and 4μΑ, respectively. Examples 8 and 9

The preparation methods of Examples 8-9 were basically the same as those of Example 2, and the differences are shown in Table 2.

Table 1

The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) causes the friction generator 8#-9# to undergo periodic bending and release, and the open circuit voltage and closed circuit current of the 8# friction generator are 17V and 4 μΑ, respectively. . The open circuit voltage and closed circuit current of the 9# friction generator are 17V and 4μΑ, respectively.

The double-polymer composite film of the present invention can be controlled to a thickness of 7 μm to 34 μm, which avoids the defects that the film material of the original friction generator is easily broken and the thickness is hard to be reduced. In addition, the dual polymer composite membrane is applied to a friction generator with an open circuit voltage of 17-25 V and a closed circuit current of 4-6 μΑ, which improves the friction power generation performance.

One of the important uses of the friction generator of the present invention is as a vibration sensor. Figure 19 shows the acoustic properties of a conventional polyvinylidene fluoride (PVD F) sensor. Fig. 20 is a view showing the vibration detecting performance of the friction generator of the first embodiment of the present invention as a sensor. 21 is a polydimercaptosiloxane friction generator used as a sensor for detecting vibration performance, and the friction generator structure is basically the same as that of the friction generator of Embodiment 1, except that the first polymer insulating layer 12 The material used was a polydithiosiloxane rather than a dual polymer composite membrane.

The above sensors were respectively taped to the culture sub-edge, and the middle of the culture iii was tapped with a force of 1 N, 0.9 Hz, and the sensor signal was collected by an oscilloscope. As can be seen from FIG. 19, FIG. 20 and FIG. 21, the frictional power generation of the present invention. The machine is used as a sensor with good vibration sensitivity. Example 10

The vibration sensor of this embodiment has a size of 30 mm x 12 mm and a total thickness of about 400 μm. The vibration sensor includes a first electrode layer 61, a first polymer insulating layer 62, a second polymer insulating layer 63, and a second electrode layer 64, which are sequentially stacked, as shown in Figs. 13 and 14.

The material of the first electrode layer 61 and the second electrode layer 64 is aluminum foil and has a thickness of 50 μm. The first polymer insulating layer 62 is a composite polymer layer, and the material used is a composite polymerization of a polyethylene terephthalate film (Yongtai plastic) and a polydisiloxane film (Yongtai plastic). The film has a thickness of 150 μm. The second polymer insulating layer 63 is a single polymer layer, and the material used is a polyethylene terephthalate film (Yongtai Plastic) having a thickness of 100 μm. A stripe-like convex structure is disposed on a side of the first polymer polymer insulating layer 62 opposite to the second polymer polymer insulating layer 63, the protrusion height is 30 μm, the width of the stripe pattern is 5 mm, and the adjacent two stripes The pattern is spaced 1mm apart. The first polymer insulating layer 62 and the second polymer insulating layer 63 are integrally provided in one body.

Fig. 22 is a view showing the acoustic performance test of the polyvinylidene fluoride piezoelectric sensor (PVDF piezoelectric sensor, Jinzhou Kexin Electronic Material Co., Ltd.) and the vibration sensor shown in this embodiment. The PVDF piezoelectric sensor has an area of 30mm X 1.2mm and a PVDF thickness of 30 μm.

The two sensors are fixed in parallel, under the same sound source conditions (lkHz, 40dB), and tested with a low-pass filter. Figure 23 (a) shows the PVDF piezoelectric sensor to detect the acoustic wave performance measurement signal, and Figure 23 (b) shows the PVDF piezoelectric sensor to detect the acoustic wave performance filter signal. Fig. 24(a) is a diagram showing the sound wave performance measurement signal of the vibration sensor of the present embodiment, and Fig. 24(b) is a filter signal for detecting the sound wave performance of the vibration sensor of the embodiment. Comparing Fig. 23(b) and Fig. 24(b), it can be seen that the PVDF piezoelectric sensor output signal output voltage is lmV, which has obvious harmonic interference, resulting in signal distortion, and the output voltage of the vibration sensor of this embodiment is 1.5mV. And keep the output signal intact, there is no signal distortion.

Fig. 25 is a frequency signal diagram of the vibration sensor of the present embodiment, and Fig. 26 is a frequency signal diagram of the PVDF piezoelectric sensor. Comparing Fig. 25 and Fig. 26, it can be seen that the frequency response of the PVDF piezoelectric sensor has a wide bandwidth, and the response bandwidth is mainly between 50 Hz and 200 Hz, and the vibration sensing of this embodiment The frequency response of the device is mainly concentrated in the low frequency band, and its response bandwidth is mainly concentrated between 0 Hz and 55 Hz. For heartbeat and respiratory vibration, mainly concentrated below 5 Hz. It can be seen from the above frequency comparison that the vibration sensor of this embodiment is much stronger than the PVDF piezoelectric sensor for the response between 0 Hz and 5 Hz, so it is more suitable. For the detection of low frequency vibrations such as heartbeat and breathing. Example 11

The vibration sensor of this embodiment has a size of 30 mm x l2 mm and a total thickness of about 400 μm. The vibration sensor includes a first electrode layer 51, a first polymer insulating layer 52, and a second electrode layer 53, which are sequentially stacked, as shown in Figs. 11 and 12.

The material of the first electrode layer 51 and the second electrode layer 53 is a copper foil having a thickness of 100 μm. The first polymer insulating layer 52 is a composite polymer layer, and the material used is a composite polymer film (Yongtai Plastic) composed of a polyethylene terephthalate film and a polypropylene film, and has a thickness of 130 μm. A side of the first polymer insulating layer 52 opposite to the second electrode layer 53 is provided with a rhombic convex structure, the protrusion height is 50 μπι, and the long diagonal length of the rhombus is 0.1 mm, and the adjacent two diamonds The spacing is 0.1mm. The first polymer insulating layer 52 and the second electrode layer 53 are integrally provided in one body.

The vibration sensor of this embodiment was fixed in parallel on the culture sub-field, and under a condition of 1 kHz, 40 dB sound source, the test was carried out using a low-pass filter. After filtering, the output voltage is 1.2mV, and the vibration sensor of this embodiment has excellent low-frequency detection effect.

The frequency response of the vibration sensor of this embodiment is mainly concentrated in the low frequency band, and the response bandwidth is mainly concentrated between 0 Hz and 55 Hz. Suitable for the detection of low frequency vibrations such as heartbeat and breathing. Example 12

The vibration sensor of this embodiment has a size of 30 mm x 12 mm and a total thickness of about l mm. The vibration sensor 7 includes a first electrode layer 71, a first polymer insulating layer 72, an intermediate film layer 73, a second polymer insulating layer 74, and a second electrode layer 75, which are sequentially stacked, as shown in FIG. Figure 16 shows.

The material used for the first electrode layer 71 is a copper foil having a thickness of 70 μm, which is used for the second electrode layer 75. The material is tungsten and its thickness is 130 μm. The first polymer insulating layer 72 and the second polymer insulating layer 74 are both single polymer layers, and the materials used are all polyethylene terephthalate film (Yongtai Plastic), and the thickness is 100. μ πι. The intermediate film layer 73 is a composite polymer layer, and the material used is a composite polymer film composed of a polyethylene terephthalate film (Yongtai Plastic) and a polypropylene film (Yongtai Plastic), and has a thickness of 150 μm. The two side surfaces of the intermediate film layer 73 are provided with a stripe-like convex structure having a protrusion height of 0.9 mm, a stripe pattern having a width of 4 mm, and an adjacent two stripe pattern having a pitch of 0.5 mm. The first polymer insulating layer 72, the intermediate film layer 73 and the second polymer insulating layer 34 are integrally provided in one body.

The vibration sensor of this embodiment is fixed in parallel on the culture sub-field, and is tested with a low-pass filter under the condition of 1 kHz, 40 dB sound source. After filtering, the output voltage is 1.2mV. The vibration sensor of this embodiment has excellent low-frequency detection effect.

The frequency response of the vibration sensor of this embodiment is mainly concentrated in the low frequency band, and the response bandwidth is mainly concentrated between 0 Hz and 55 Hz. Suitable for the detection of low frequency vibrations such as heartbeat and breathing. Example 13

The vibration sensor of this embodiment has a size of 30 mm x 12 mm and a total thickness of about l mm. The vibration sensor 8 includes a first electrode layer 81, a first polymer insulating layer 82, an intermediate electrode layer 83, a second polymer insulating layer 84, and a second electrode layer 85, which are sequentially stacked, as shown in FIG. Figure 18 shows.

The material used for the first electrode layer 81 and the second electrode layer 85 is a copper foil having a thickness of 100 μm, and the material of the intervening electrode layer 83 is an aluminum foil having a thickness of ΙΟΟμπι; the first polymer insulating layer 82釆Composite polymer film composed of polyethylene terephthalate film (Yongtai plastic) and polydisiloxane film (Yongtai plastic), thickness 150 μπι, second polymer insulation layer 84 The material used is polyethylene terephthalate film (Yongtai Plastic) with a thickness of 150 μm. The side surface of the first polymer insulating layer 82 opposite to the intervening electrode layer 83 is provided with a U-shaped convex structure, the height of the protrusion is 1 mm, the width of the zigzag pattern is 5 mm, and the pitch of the adjacent two zigzag patterns is Lmm. The first polymer insulating layer 82 and the intermediate electrode layer 83 are integrally provided in a single body. The vibration sensor of the present embodiment was fixed in parallel on the culture sub-field, and was tested with a low-pass filter under a condition of 1 kHz, 40 dB sound source. After the filtering process, the output voltage is 1.0 mV, and the vibration sensor of this embodiment has an excellent low-frequency detection effect.

The frequency response of the vibration sensor of this embodiment is mainly concentrated in the low frequency band, and the response bandwidth is mainly concentrated between 0 Hz and 55 Hz. Suitable for the detection of low frequency vibrations such as heartbeat and breathing.

Claims

Claim

A friction generator using a dual polymer composite film, comprising: a first electrode layer, a first polymer insulating layer and a second electrode layer, wherein the first polymer insulation is laminated The material used for the layer is a double polymer composite film; the double polymer composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled into the polymer The pores of the porous membrane layer; the first electrode layer and the second electrode layer being the output ends of the friction generator.

2. The friction generator using a dual polymer composite film according to claim 1, wherein the friction generator further comprises a second polymer insulating layer, and the second polymer insulating layer is disposed Between the first polymer insulating layer and the second electrode layer.

The friction generator of the double polymer composite film according to claim 2, wherein the material for the second polymer insulating layer is a double polymer composite film; the double polymer composite film The method comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled into the pores of the polymer porous film layer.

The friction generator using a dual polymer composite film according to claim 2 or 3, wherein the friction generator further comprises an intermediate electrode layer, and the intermediate electrode layer is disposed on the first polymer Between the insulating layer and the second polymer insulating layer; the first electrode layer and the second electrode layer are connected to form an output end of the friction generator.

A friction generator using a dual polymer composite film, comprising: a first electrode layer, a first polymer insulating layer, an intermediate film layer, a second polymer insulating layer and a second electrode layer, wherein at least one of the first polymer insulating layer and the intermediate film layer, and/or at least one of the second polymer insulating layer and the intermediate film layer is double-polymerized Composite membrane;

The dual polymer composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled into the pores of the polymer porous film layer; An electrode layer and the second electrode layer are outputs of the friction generator.

6. The friction generator using a dual polymer composite film according to any one of claims 1 to 5, The material for the polymer porous film layer is a polypropylene porous film, a polyethylene porous film, a polyimide porous film, a polyvinyl chloride porous film or a polytetrafluoroethylene porous film.

The friction generator using a double polymer composite film according to claim 6, wherein the polypropylene porous film is an isotactic polypropylene having a weight average molecular weight of 300 to 700 kg/mol, and a porosity of 42 %±3%, tensile strength greater than 200 kg/cm ² ; the polyimide porous film has a weight average molecular weight of 100-600 kg/mol, a porosity of 42%±3%, and a tensile strength of more than 1000 kg/cm ² The polyethylene porous film has a weight average molecular weight of 100-500 kg/mol, a porosity of 42%±3%, a tensile strength of more than 200 kg/cm ² ; and a weight average molecular weight of the polyvinyl chloride porous film of 50-120 Kg/mol, porosity is 42%±3%, tensile strength is greater than 600kg/cm ² ; the polytetrafluoroethylene porous membrane has a weight average molecular weight of 200-800 kg/mol and a porosity of 42% 3%. The tensile strength is greater than 70 kg/cm ² .

The friction generator using a dual polymer composite film according to claim 6 or 7, wherein the material of the polymer coating layer is polydisiloxane or polyvinylidene fluoride.

The friction generator using a dual polymer composite film according to any one of claims 1 to 8, wherein the double polymer composite film has a thickness of 7 μm to 34 μm, and the polymer porous film layer The thickness is 5μπι-30μπι.

The friction generator using a dual polymer composite film according to any one of claims 1 to 9, wherein when the first polymer insulating layer, or the intermediate film layer, or the second highest When the molecular polymer insulating layer is a double polymer composite film, the micro/nano structure disposed on the surface thereof is a micro/nano structure having a protrusion height of 200 ηπι-20 μπ; when the first polymer polymer insulating layer or the intermediate film layer When the second polymer insulating layer is not used in the double polymer composite film, the micro/nano structure disposed on the surface thereof is a micro/nano structure having a convex height of 200 nm - 1 ΟΟμπι.

11. A method of preparing a friction generator using a dual polymer composite membrane, the method comprising the steps of:

(1) Preparation of double polymer composite membrane

Preparing a liquid solution for the polymer coating layer, and then uniformly coating the polymer coating layer on the surface of the polymer porous membrane layer with a liquid solution; coating the polymer porous membrane layer with the polymer coating layer with one side of the liquid solution in the template Then, the polymer porous film layer and the polymer coating layer are dried together with the liquid solution and the template, and after the polymer coating layer is solidified, the template is separated to obtain a double polymer composite film; wherein the polymer coating layer covers the polymer porous layer On the film layer and filled into the pores of the polymer porous membrane layer; (2) Assembly of friction generator

The method for preparing a friction generator of a double polymer composite membrane according to claim 11, wherein the material for the polymer porous membrane layer is a polypropylene porous membrane, a polyethylene porous membrane, and a polyaluminum. An amine porous membrane, a polyvinyl chloride porous membrane or a polytetrafluoroethylene porous membrane; the material used for the polymer coating layer is polydisiloxane or polyvinylidene fluoride.

The method for preparing a friction generator using a dual polymer composite film according to claim 12, wherein the polypropylene porous film is an isotactic polypropylene having a weight average molecular weight of 300 to 700 kg/mol, and pores The ratio is 42%±3%, and the tensile strength is more than 200 kg/cm ² ; the polyimide porous film has a weight average molecular weight of 100-600 kg/mol, a porosity of 42%±3%, and a tensile strength of more than 1000 kg. /cm ² ; the polyethylene porous film has a weight average molecular weight of 100-500 kg/mol, a porosity of 42% ± 3%, a tensile strength of more than 200 kg/cm ² ; and a weight average molecular weight of the polyvinyl chloride porous film 50-120 kg/mol, porosity: 42%±3%, tensile strength greater than 600 kg/cm ² ; the polytetrafluoroethylene porous membrane has a weight average molecular weight of 200-800 kg/mol, and a porosity of 42% 3%, tensile strength greater than 70 kg/cm ² .

The method for preparing a friction generator using a dual polymer composite film according to any one of claims 11 to 13, wherein the thickness of the obtained double polymer composite film is (1)

7 μπι-34 μπι, the polymer porous film layer has a thickness of 5 μm to 30 μm.

The method for preparing a friction generator using a dual polymer composite film according to any one of claims 11 to 14, wherein at least one surface of the dual polymer composite film is provided with a convex A micro-nano structure having a height of 200ηπι-20μπι.

The method of producing a friction generator using a dual polymer composite film according to claim 11, wherein the polyvinylidene fluoride is dissolved in dimercaptoacetamide to form a liquid solution for a polymer coating layer.

A method of producing a friction generator using a dual polymer composite film according to claim 11, wherein a curing agent is added to the polydithiosiloxane to form a liquid solution for the polymer coating layer.

The method for preparing a friction generator using a dual polymer composite film according to any one of claims 11 to 17, wherein in the step (1), the polymer porous film layer and the polymer coating layer are used. The liquid solution and the template are baked together at 70-90 ° C for 90 min-120 min to cure the polymer cover.

19. A vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, and a second electrode layer, which are sequentially stacked; wherein the first electrode layer is disposed at the first high a first side surface of the molecular polymer insulating layer, a second side surface of the first polymer insulating layer is disposed toward a second side surface of the second electrode layer;

Providing at least one convex structure on the second side surface of the first polymer insulating layer or the second side surface of the second electrode layer, so that the second polymer insulating layer is second The side surface and the second side surface of the second electrode layer are fixedly connected to each other, thereby forming a cavity; the first polymer insulating layer, the second electrode layer and the protruding structure are jointly formed Vibrating frame structure;

The first electrode layer and the second electrode layer are two output ends of the vibration sensor; wherein the material used for the first polymer insulating layer is a double polymer composite film; the double polymer The composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled in the pores of the polymer porous film layer.

A vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, a second polymer insulating layer and a second electrode layer, which are sequentially stacked; wherein the first electrode a layer disposed on a first side surface of the first polymer insulating layer, the second electrode layer being disposed on a first side surface of the second polymer insulating layer, the second high a second side surface of the molecular polymer insulating layer is disposed toward the second side surface of the first polymer insulating layer;

A vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, an intervening electrode layer, a second polymer insulating layer, and a second electrode layer; The first electrode layer is disposed on the first side surface of the first polymer insulating layer, and the second electrode layer is disposed on the first side surface of the second polymer insulating layer; The intervening electrode layer is disposed between the second side surface of the first polymer insulating layer and the second side surface of the second polymer insulating layer, and the first side of the intervening electrode layer The surface is opposite to the second side surface of the first polymer insulating layer, and the second side surface of the intermediate electrode layer is opposite to the second side surface of the second polymer insulating layer; Providing at least one convex structure on the second side surface of the first polymer insulating layer or the first side surface of the intervening electrode layer, so that the second side surface of the first polymer insulating layer And The first side surfaces of the inter-electrode electrode layers are fixedly connected to each other, thereby forming a cavity, and the first polymer insulating layer, the intervening electrode layer and the convex structure together form a vibrating frame structure, and Or, the second side surface of the second polymer insulating layer or the second side surface of the intervening electrode layer is provided with at least one convex structure, so that the second polymer insulating layer The second side surface and the second side surface of the intervening electrode layer are fixedly connected to each other, thereby forming a cavity, and the second polymer insulating layer, the intervening electrode layer and the protruding structure are common Forming a vibratable frame structure;

A vibration sensor, comprising: a first electrode layer, a first polymer insulating layer, an intermediate film layer, a second polymer insulating layer and a second electrode layer; The first electrode layer is disposed on the first side surface of the first polymer insulating layer, and the second electrode layer is disposed on the first side surface of the second polymer insulating layer; The intermediate film layer is a polymer film layer disposed between the second side surface of the first polymer insulating layer and the second side surface of the second polymer insulating layer, and the intermediate layer a first side surface of the film layer is disposed opposite to the second side surface of the first polymer insulating layer, and the second side surface of the intermediate film layer and the second polymer insulating layer are second The side surfaces are oppositely disposed;

Providing at least one convex structure on the second side surface of the first polymer insulating layer or the first side surface of the intermediate film layer, so that the second side of the first polymer insulating layer The surface and the first side surface of the intervening film layer are fixedly connected to each other, thereby forming a cavity, and the first polymer insulating layer, the intervening film layer and the convex structure together form a vibratable frame Structure, and/or, the second side surface of the second polymer insulating layer or the second side surface of the intervening film layer is provided with at least one convex structure, so that the second polymer a second side surface of the insulating layer and a second side surface of the intervening film layer are fixedly connected to each other, thereby forming a cavity, the second polymer insulating layer, the intervening film layer and the protruding structure Forming a vibratable frame structure together;

The first electrode layer and the second electrode layer are two output ends of the vibration sensor; wherein at least one of the first polymer insulating layer and the intermediate film layer, and/or the second highest The material used for at least one of the molecular polymer insulating layer and the intermediate film layer is a double polymer composite The double polymer composite film comprises: a polymer porous film layer and a polymer cover layer, wherein the polymer cover layer covers the polymer porous film layer and is filled into the pores of the polymer porous film layer.

The vibration sensor according to any one of claims 19 to 22, wherein the fixed connection is a fixed connection by a plasma treatment fixed connection or a pressure sensitive adhesive fixed connection.

The vibration sensor according to any one of claims 19 to 23, wherein the height of the protruding structure is 1 μπι -1πιπι.

The vibration sensor according to any one of claims 19 to 24, wherein the convex structure constitutes a stripe-like structure, a cross-shaped structure, a diamond-shaped structure, a 结构-shaped structure or an interdigitated structure. Array.

The vibration sensor according to any one of claims 19 to 25, wherein the protruding structure is connected on a surface to which at least one side thereof is fixedly connected, and each of the surface connections has a width of 0.1 mm to 5 mm.

The vibration sensor according to claim 26, wherein the convex structure is connected above a surface to which one side is fixedly connected; a connection or a wire connection is formed on a surface to which the other side is fixedly connected.

The vibration sensor according to any one of claims 19 to 27, characterized in that the large separation between the adjacent two convex structures is 0.1 mm - 1 mm.

The vibration sensor according to any one of claims 19 to 28, wherein the polypropylene porous film is an isotactic polypropylene having a weight average molecular weight of 300 to 700 kg/mol, and has a porosity of 42% ± 3 %, tensile strength is greater than 200 kg / cm ² ; the polyimide porous film has a weight average molecular weight of 100-600 kg / mol, a porosity of 42% ± 3%, and a tensile strength of more than 1000 k _g / cm ² ; The polyethylene porous film has a weight average molecular weight of 100-500 kg/mol, a porosity of 42%±3%, a tensile strength of more than 200 kg/cm ² , and a weight average molecular weight of the polyvinyl chloride porous film of 50-120 kg/mol. , the porosity is 42%±3%, the tensile strength is greater than 600 kg/cm ² ; the polytetrafluoroethylene porous film has a weight average molecular weight of 200-800 kg/mol, a porosity of 42%±3%, tensile strength More than 70kg/cm ² .

The vibration sensor according to any one of claims 19 to 29, wherein the material for the polymer coating layer is polydimethenylsiloxane or polyvinylidene fluoride.

The vibration sensor according to any one of claims 19 to 30, wherein the double polymer composite film has a thickness of 7 μm to 34 μm, and the polymer porous film layer has a thickness of 5 μm to 30 μm.

32. A method of preparing a vibration sensor, the method comprising:

Wherein, only step (1) or step (2) is performed;

Wherein, the polymer insulating layer with a raised structure obtained by the step (1) is used as the first polymer insulating layer, or the electrode layer with the convex structure obtained by the step (2) is used as the first Two electrode layer;

33. A method of preparing a vibration sensor, the method comprising:

(1) preparing a liquid solution for the polymer coating layer, and then uniformly coating the polymer coating layer on the surface of the polymer porous film layer with a liquid solution; coating the polymer porous film layer with a polymer coating layer for liquid One side of the solution is placed on the template; then the polymer porous film layer, the polymer cover layer is dried together with the liquid solution and the template, and after the polymer cover layer is solidified, the template is separated to obtain a double polymer composite film; wherein the polymer The cover layer is coated on the polymer porous film layer and filled into the pores of the polymer porous film layer;

34. A method of preparing a vibration sensor, the method comprising:

Wherein, only step (1) or step (2) is performed, or step (1) and step are simultaneously performed. ( 2 );

Wherein, the first polymer polymer insulating layer and/or the second polymer polymer insulating layer are used in steps

(1) The obtained polymer polymer insulating layer with a convex structure; or, the intermediate electrode layer, the electrode layer with a convex structure obtained by the step (2), the first polymer polymer insulating layer and the second high At most one layer of the molecular polymer insulating layer, the high molecular polymer insulating layer with the convex structure obtained by the step (1), and having a convex structure on at most one of the opposite side surfaces of the adjacent two layers;

The protrusion is disposed between the first polymer insulating layer and the intervening electrode layer, and/or the protrusion structure is disposed between the second polymer insulating layer and the intervening electrode layer, and the first polymer is a polymer insulating layer, an intervening electrode layer and a second polymer insulating layer are assembled, and the protruding structure is fixedly connected to a side surface thereof, thereby forming a cavity; the first polymer insulating layer, The intervening electrode layer and the raised structure therebetween, and/or the second polymer insulating layer, the intervening electrode layer and the raised structure therebetween form a vibrating frame structure together;

Then, a first electrode layer and a second electrode layer are respectively disposed on the side surfaces of the first polymer insulating layer and the second polymer insulating layer which are not facing the intermediate electrode layer, thereby obtaining a vibration sensor.

35. A method of preparing a vibration sensor, the method comprising:

Providing at least one convex structure on one surface of the double polymer composite film to obtain a polymer polymer insulating layer with a convex structure; (2) at least one convex structure is respectively disposed on both side surfaces of the other double polymer composite film, and a polymer polymer insulating layer having a convex structure on both sides is obtained;

Wherein, only step (1) or step (2) is performed;

And disposed between the first polymer insulating layer and the intervening film layer according to the convex structure, and/or the protruding structure is disposed between the second polymer insulating layer and the intervening film layer, and the first polymer a polymer insulating layer, an intermediate film layer and a second polymer insulating layer are assembled, and the protruding structure is fixedly connected to a side surface thereof, thereby forming a cavity; the first polymer insulating layer, The intervening film layer and the raised structure therebetween, and/or the second polymer insulating layer, the intervening film layer and the raised structure therebetween form a vibrating frame structure;

The method of manufacturing a vibration sensor according to any one of claims 32 to 35, wherein the fixed connection is achieved by a fixed connection by plasma treatment or a fixed connection using a pressure sensitive adhesive.

The method of manufacturing a vibration sensor according to any one of claims 32 to 35, wherein the setting of the convex structure is achieved by a screen printing method.

The method of manufacturing the vibration sensor according to any one of claims 32 to 37, wherein the convex structure is disposed to be connected on a surface fixedly connected to at least one side thereof, and each surface is connected The width is from 0.1mm to 5mm.

The method of manufacturing a vibration sensor according to claim 38, wherein the convex structure is disposed to be connected above a surface to which one side is fixedly connected, and to be connected at a surface of the other side of the fixed connection. Or line connection.

The method for manufacturing a vibration sensor according to any one of claims 32 to 39, wherein the first polymer insulating layer, the second polymer insulating layer or the intermediate film layer is double-polymerized Composite film prepared by preparing a liquid solution for a polymer coating layer, and then uniformly coating the polymer coating layer on the surface of the polymer porous film layer with a liquid solution; coating the polymer porous film layer with a polymer coating layer One side of the liquid solution is placed on the template; then the polymer porous film layer, the polymer cover layer is dried together with the liquid solution and the template, and after the polymer cover layer is solidified, the template is separated to obtain a double polymer composite film; The polymer cover layer is coated on the polymer porous film layer and filled into the pores of the polymer porous film layer.

The method for producing a vibration sensor according to any one of claims 32 to 40, wherein the material for the polymer porous film layer is a polypropylene porous film, a polyethylene porous film, and a polyimide porous film. , a polyvinyl chloride porous film or a polytetrafluoroethylene porous film; the material used for the polymer coating layer is polydisiloxane or polyvinylidene fluoride.

The method for preparing a vibration sensor according to claim 41, wherein the polypropylene porous film is an isotactic polypropylene having a weight average molecular weight of 300 to 700 kg/mol, and the porosity is 42%±3%. The tensile strength is greater than 200 kg/cm ² ; the polyimide porous film has a weight average molecular weight of 100-600 kg/mol, a porosity of 42%±3%, and a tensile strength of more than 1000 kg/cm ² ; The porous membrane has a weight average molecular weight of 100-500 kg/mol, a porosity of 42%±3%, a tensile strength of more than 200 kg/cm ² , and a weight average molecular weight of the polyvinyl chloride porous membrane of 50-120 kg/mol, pores. The ratio is 42%±3%, and the tensile strength is more than 600 kg/cm ² ; the polytetrafluoroethylene porous film has a weight average molecular weight of 200-800 kg/mol, a porosity of 42% 3%, and a tensile strength of more than 70 kg. /cm ² .

The method for preparing a vibration sensor according to any one of claims 32 to 42, wherein the thickness of the double polymer composite film obtained in the step (1) is 7 μm to 34 μm, and the thickness of the polymer porous film layer is It is 5μπι-30μπι.

The method of producing a vibration sensor according to claim 32, wherein the polyvinylidene fluoride is dissolved in dimercaptoacetamide to form a liquid solution for a polymer coating layer.

The method of producing a vibration sensor according to claim 32, wherein a curing agent is added to the polydithiosiloxane to form a liquid solution for the polymer coating layer.

The method for preparing a vibration sensor according to any one of claims 32 to 46, wherein in the step (1), the polymer porous film layer, the polymer coating layer, and the template are together at 70- Bake at 90 ° C for 90 min - 120 min to cure the polymer cover.