WO2015020085A1 - 環境監視システム - Google Patents
環境監視システム Download PDFInfo
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- WO2015020085A1 WO2015020085A1 PCT/JP2014/070723 JP2014070723W WO2015020085A1 WO 2015020085 A1 WO2015020085 A1 WO 2015020085A1 JP 2014070723 W JP2014070723 W JP 2014070723W WO 2015020085 A1 WO2015020085 A1 WO 2015020085A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
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- the present invention relates to an environment monitoring system including a gas detection unit that detects a gas component existing inside a closed space.
- VOC gas volatile organic compound
- VOC gas contains, for example, formaldehyde, toluene and the like, and may cause symptoms such as irritation to eyes, nose and throat.
- VOC gas can be detected by, for example, a gas detection device including a semiconductor type gas detection element.
- alcohol for disinfection or cleaning was frequently used, particularly in a clean clean room in which air with controlled temperature and humidity is circulated.
- a gas such as VOC gas or ethanol may float in the atmosphere.
- VOC gas when the VOC gas is detected by the gas detection device, ethanol is detected as an interference gas, It may be difficult to selectively detect VOC gas.
- ethanol when trying to detect a desired gas to be detected in addition to the VOC gas, ethanol is detected as an interference gas, and there is a problem that the gas to be detected cannot be accurately detected.
- an object of the present invention is to provide an environmental monitoring system that can identify a plurality of gas components.
- the atmosphere around the gas detection means that has detected the detection value greater than or equal to the predetermined value is collected and collected. It is possible to detect and analyze (identify) the type and concentration of gas components by introducing the atmosphere into the analysis unit.
- the timing which analyzes the said gas component by an analysis part can be prescribed
- any of the gas detection means detects a detection value that is equal to or greater than a predetermined value, it means that a desired gas component has been detected.
- the atmosphere around the gas detection means is analyzed by the analysis unit. In this case, since the desired gas component is analyzed by the analysis unit, the analysis of the gas component can be reliably performed in detail.
- the gas detection unit includes a first gas detection unit and a second gas detection unit, both of which have different detection characteristics of the gas to be detected.
- a desired gas component is detected, analyzed and monitored based on the detection output of the one gas detection means and the detection output of the second gas detection means.
- the first gas detection means and the second gas detection means are provided, and the gas components corresponding to the characteristics of the detection means can be detected by making the detection characteristics of the gas to be detected different in both. .
- the detection output for the alcohol component of the first gas detection means is lower than that in the second gas detection means when the alcohol concentration increases in the detection target space.
- the detection output for the alcohol component of the second gas detection means is high.
- the output of the first gas detection means is larger than the predetermined detection output, it is identified that gas components other than alcohol can be detected, and the output of the second gas detection means is larger than the predetermined detection output. If a value is obtained, it can be identified that alcohol has been detected, so that alcohol and other gas components can be simultaneously detected, analyzed and monitored.
- alcohol and other gas components can be simultaneously identified only by providing two detection means (first gas detection means and second gas detection means) having different alcohol detection sensitivities. It is possible to detect, analyze and monitor, and it is possible to construct an environmental monitoring system that is simple and excellent in cost performance.
- the third characteristic configuration of the environmental monitoring system according to the present invention is that the gas detection means in the gas detection unit sets a zero point using clean gas. Also, since the zero point state becomes the ideal state of the closed space, it is possible to set the zero point as a target and easily understand how far the current state is from the ideal state can do.
- a fourth characteristic configuration of the environmental monitoring system is a monitoring unit that monitors the change of the gas component, and captures the atmosphere around the gas detection unit, and sends the collected atmosphere to the analysis unit.
- a collecting means and when any of the gas detection means detects a detection value greater than or equal to a predetermined value, the monitoring unit instructs the collection means to collect the atmosphere around the gas detection means that has detected a predetermined value or more.
- the analysis unit is instructed to analyze the atmosphere sent from the collecting means.
- the monitoring unit can control to issue an atmosphere analysis command to the analysis unit after issuing the collection command. That is, if the monitoring unit is configured so that these collection commands and analysis commands can be executed, for example, the monitoring unit may be provided in the vicinity of the gas detection unit or in a separated position. Even when provided outside the closed space, the collection command and the analysis command can be executed at a desired timing.
- the first gas detection means includes a noble metal wire, a metal oxide that covers the noble metal wire, and that includes tin oxide or indium oxide as a main component and molybdenum oxide added thereto.
- a gas sensitive part formed using a semiconductor, and a catalyst layer having at least one selected from alumina, silica, silica alumina, and zeolite as a support are provided on the outer peripheral side of the gas sensitive part.
- the first semiconductor gas detection element has at least one of tungsten oxide and molybdenum oxide supported on the layer.
- Example 3 changes in gas sensitivity in an environment where silicone gas was present were examined for Invention Example 2 and Comparative Example 1.
- the semiconductor gas detection element of Comparative Example 1 shows unstable gas sensitivity particularly in the initial exposure of the silicone gas (FIG. 6), whereas the semiconductor gas detection element of Invention Example 2 has a silicone sensitivity. It was recognized that stable (substantially constant) gas sensitivity could be obtained even in the presence of gas (FIG. 5).
- the semiconductor gas detection element of this configuration can detect the odor component with high sensitivity by adding molybdenum oxide to the gas sensitive part, and can accurately detect the odor component even in an environment where silicone gas exists. It can be detected.
- the catalyst layer is composed of a carrier using at least one selected from alumina, silica, silica alumina, and zeolite, and at least one of tungsten oxide or molybdenum oxide is supported on the catalyst layer.
- the semiconductor gas detection element of this configuration can detect an odor component with high sensitivity while suppressing the sensitivity to alcohol.
- the sixth characteristic configuration of the environmental monitoring system according to the present invention is that the second gas detection means is configured not to include a catalyst layer in the first gas detection means.
- This configuration makes it possible for the second gas detection means to be more sensitive to alcohol components than the first gas detection means.
- the seventh characteristic configuration of the environmental monitoring system according to the present invention is that at least one of lanthanum oxide and lead oxide is added to the metal oxide semiconductor.
- the metal oxide semiconductor part by adding at least one of lanthanum oxide and lead oxide to the metal oxide semiconductor part, for example, it is highly sensitive to odor components such as toluene and acetone, and also has hydrogen, methane.
- a semiconductor type gas detection element excellent in selectivity with other gas such as ethylene can be obtained.
- FIG. 6 is a graph showing measurement results of various gases by a semiconductor type gas detection element of Inventive Example 2 (tin oxide-molybdenum oxide). It is the graph which showed the measurement result of various gases by the semiconductor type gas detection element of the comparative example 1 (tin oxide). It is the graph which showed the measurement result of various gas by the semiconductor type gas detection element of the example 2 of this invention in silicone gas presence. 6 is a graph showing measurement results of various gases by the semiconductor gas detection element of Comparative Example 1 in the presence of silicone gas.
- FIG. 6 is a graph showing measurement results of various gases by a semiconductor type gas detection element of Inventive Example 3 (indium oxide-molybdenum oxide). It is the graph which showed the measurement result of various gases by the semiconductor type gas detection element of the comparative example 2 (indium oxide). It is the graph which investigated the gas sensitivity at the time of detecting ethanol and acetone with the semiconductor type gas detection element of the example 2 of this invention, respectively. It is the graph which showed the change rate of the gas sensitivity at the time of detecting ethanol by the semiconductor type gas detection element of this invention example 2 in presence of silicone gas. It is the table
- the semiconductor type gas detection element of this invention it is the graph which investigated about the relationship between the sensitivity with respect to 9 types of gas, and gas concentration.
- the semiconductor type gas detection element of Example 2 of this invention it is the graph which investigated about the relationship between the sensitivity with respect to 9 types of gas, and gas concentration. It is the graph which showed the result when installing an environmental monitoring system in the clean room of a semiconductor manufacturing factory, and detecting the gas which exists in the said clean room. It is the schematic of a bridge circuit.
- the environmental monitoring system Z of the present invention includes a gas detection unit A that detects gas components existing in a closed space, and the gas detection unit A is located in different regions of the closed space.
- a plurality of gas detection means 10 and 20 disposed, and when any of the gas detection means 10 and 20 detects a detection value greater than or equal to a predetermined value, the gas detection means detects a detection value greater than or equal to the predetermined value;
- the analysis part E which analyzes the gas component contained in the atmosphere around 10 and 20 is provided.
- the environment monitoring system Z of the present invention includes a monitoring unit F that monitors a change in the component amount of the gas component.
- Closed space refers to a closed space in which the atmosphere inside and outside is controlled.
- the environment monitoring system Z of this invention demonstrates the case where it installs in the clean clean room which the air by which the temperature and humidity were controlled circulates as the said closed space, for example.
- the clean room is, for example, equipment installed in a semiconductor manufacturing factory.
- the gas detection part A of the present invention includes the first gas detection means 10 and the second gas detection means 20, and the detection sensitivity of alcohol is different between the two.
- the gas detection part A of this embodiment demonstrates the case where the 2nd gas detection means 20 has higher alcohol detection sensitivity, and alcohol is ethanol, it is not limited to this aspect. In this embodiment, the case where two gas detection means are provided will be described. However, the number of gas detection means is not limited to this mode.
- One first gas detection means 10 includes one first semiconductor gas detection element X
- one second gas detection means 20 includes one second semiconductor gas detection element X '.
- Each of the first semiconductor gas detection element X and the second semiconductor gas detection element X ′ is a detection element that can detect a plurality of gas components with one detection element.
- the first gas detection means 10 and the second gas detection means 20 can be installed apart from each other. In this case, the first gas detection means 10 and the second gas detection means 20 are close to each other so that the gas existing in the same area can be detected in the clean room. It is good to arrange.
- the first gas detection means 10 has a first semiconductor type gas detection element X.
- the first semiconductor gas sensing element X includes a noble metal wire 1 and a gas sensitive part formed by using a metal oxide semiconductor that covers the noble metal wire 1 and contains tin oxide or indium oxide as a main component and molybdenum oxide added. 2 and a catalyst layer 3 using at least one selected from alumina, silica, silica alumina, and zeolite as a support on the outer peripheral side of the gas sensitive portion 2, and tungsten oxide is provided on the catalyst layer 3. Alternatively, at least one of molybdenum oxide is supported.
- Examples of the first semiconductor gas detection element X include, but are not limited to, a hot wire semiconductor gas detection element and a substrate type semiconductor gas detection element. This embodiment demonstrates the case where it is set as a hot wire type
- the hot wire type semiconductor gas detection element X includes a coil-like noble metal wire 1 and a gas sensitive portion 2.
- a noble metal wire for example, a wire such as platinum, palladium, platinum-palladium alloy, or the like can be used.
- the wire diameter, the coil diameter, the number of coil turns, etc. of the noble metal wire 1 are the same as those used in the conventional hot-wire semiconductor gas detection element, and are not particularly limited.
- the content of lead oxide (PbO) is preferably 0.01 to 1 mol%, for example.
- sensitivity other than VOC gas such as hydrogen, methane, and ethylene, can be reduced, and an odor component can be detected with higher sensitivity.
- a catalyst layer 3 having at least one selected from alumina, silica, silica alumina, and zeolite as a carrier is provided on the outer peripheral side of the gas sensitive portion 2, and tungsten oxide (WO 3 ) or At least one of the molybdenum oxides is supported.
- the content of tungsten oxide or molybdenum oxide is 0.1 to 10 mol%, the sensitivity of alcohol can be sufficiently suppressed.
- the alcohol that has reached the surface of the catalyst layer 3 is decomposed by tungsten oxide or molybdenum oxide contained in the catalyst layer 3. Thereby, even when alcohol is mixed in the gas to be detected, the sensitivity of the sensor to alcohol can be suppressed. Therefore, the first semiconductor gas detection element X of this configuration can detect the odor component with high sensitivity while suppressing the sensitivity to alcohol.
- the hot-wire semiconductor gas detection element X can be incorporated into a bridge circuit together with fixed resistors R0, R1, and R2 to constitute a gas sensor.
- the bridge circuit is energized constantly or intermittently by a power source E so that the hot-wire semiconductor gas detection element X has a temperature suitable for detection.
- the resistance value of the hot-wire semiconductor gas sensing element X changes when the gas to be sensed is adsorbed. For this reason, in the gas sensor according to the present embodiment, the change in resistance value of the hot-wire semiconductor gas detection element X is extracted as a deviation voltage, and this is used as the sensor output V to measure the concentration of the detected gas (odor component). can do.
- the second gas detection means 20 also has a second semiconductor type gas detection element X ′.
- the second semiconductor type gas detection element X ′ includes the above-described noble metal wire 1 and the gas sensitive part 2.
- the second semiconductor type gas detection element X ′ used for the second gas detection means 20 does not include the catalyst layer 3, the sensitivity to the alcohol component is higher than that of the first gas detection means 10.
- both the first gas detection means 10 and the second gas detection means 20 are arranged in the detection target space, and based on the gas detection output of each detection means, a plurality of gas components (in the detection target space ( Alcohol and other gas components) can be discriminated.
- the environmental monitoring system Z is configured so that when any one of the gas detection means 10 and 20 detects a detection value greater than or equal to a predetermined value, An analysis unit E for analyzing gas components contained in the atmosphere is provided.
- the analysis unit E may be in any form as long as it can analyze (identify) a plurality of gas components contained in the atmosphere.
- the analysis unit E includes a gas chromatogram separation column, a suction pump for circulating a gas such as carrier gas through the gas chromatogram separation column, an introduction path for introducing gas into the gas chromatogram separation column, and an exhaust path for discharging gas.
- a gas component detection means for detecting a gas component separated by the gas chromatogram separation column.
- Gas components contained in the atmosphere around the gas detection means 10 and 20 are transported to the analysis unit E and analyzed by the analysis unit E.
- a collecting means (not shown) may be provided that collects the atmosphere around the gas detection means 10 and 20 and sends the collected atmosphere to the analysis unit E.
- the collecting means may be any means as long as it can collect atmospheric gas and transport it to a desired site.
- the atmosphere around each gas detecting means 10 and 20 by a syringe or the like. Can be configured to include a pump device and a pipe that can collect the collected atmosphere and send the collected atmosphere to the analysis unit E under positive pressure or negative pressure.
- the atmosphere around the gas detection means 10 or 20 that has detected the detection value greater than or equal to the predetermined value is collected and collected.
- the atmosphere is sent to the analysis unit E by, for example, collection means.
- the atmosphere sent at this time is introduced into the analysis unit E from the introduction path of the collecting means, the atmosphere is developed in the gas chromatogram separation column, and is sequentially separated for each contained gas component. Is eluted and discharged. Each eluted gas component is sequentially input to the gas component detection means, and the type of the gas component can be detected and analyzed (identified).
- the concentration of the gas component can be configured to be performed by, for example, a calculation unit B described later.
- the timing at which the gas component is analyzed by the analysis unit E can be defined. That is, when any of the gas detection means 10 and 20 detects a detection value that is equal to or greater than a predetermined value, a desired gas component (either alcohol or any other gas component) can be detected. If the atmosphere around the gas detection means 10 and 20 is analyzed at the timing by the analysis unit E, a desired gas component (either alcohol or any other gas component) is analyzed by the analysis unit E. The analysis can be performed in detail reliably.
- the monitoring unit F By providing the monitoring unit F as in this configuration, it is possible to easily grasp the change in the gas component inside the closed space.
- the monitoring unit F may be provided inside the closed space or may be provided outside the closed space.
- the gas component inside the closed space can be easily changed regardless of whether the monitoring unit F is provided in the vicinity of the gas detection unit A or in a separated position. Can grasp.
- the monitoring unit F is provided outside the closed space, it is possible to easily grasp the change in the gas component inside the closed space even outside the closed space.
- the monitoring unit F instructs the collection means to collect the atmosphere around the gas detection means that has detected the predetermined value or more.
- the analysis unit E may be instructed to analyze the atmosphere sent from the collecting means.
- the monitoring unit F can recognize the detection values of the gas detection means 10 and 20 and control the desired gas detection means to issue an atmosphere collection command to the collection means according to the detection values. . Further, the monitoring unit F can be controlled to issue an atmosphere analysis command to the analysis unit E after issuing a collection command. That is, if the monitoring unit F is configured so that these collection commands and analysis commands can be executed, for example, the monitoring unit F is provided in the vicinity of the gas detection unit A or in a separated position, or Even when the monitoring unit F is provided outside the closed space, the collection command and the analysis command can be executed at a desired timing.
- the monitoring unit F may be configured to have a microcomputer that can execute these collection commands and analysis commands.
- the environment monitoring system Z of the present invention can be configured to detect, analyze and monitor a desired gas component based on the detection output of the first gas detection means 10 and the detection output of the second gas detection means 20.
- the difference between the outputs of the first gas detection means 10 and the second gas detection means 20 may be calculated to determine the detected gas component.
- both normal outputs ( ⁇ V sensitivity) are about 0 to 300 and the alarm level is set to 1000 or more.
- the detected gas component is an alcohol such as ethanol. If it is determined to be 400 or less, it can be determined that it is other than the alcohol.
- the gas detection means 10 and 20 in the gas detection unit A may set a zero point using clean gas. Thereby, the zero point adjustment of the gas detection means 10 and 20 can be performed reliably.
- the environmental monitoring system Z includes a calculation unit B that calculates a gas concentration based on an output from which the gas detection unit A detects a desired gas component.
- the calculation unit B may use a microcomputer that can calculate the gas concentration based on the output signal from the gas detection unit A.
- the notification unit C receives the warning signal from the calculation unit B and issues a warning by sound based on the selected warning sound signal.
- the alarm sound can be set differently when the detected gas component is alcohol such as ethanol and when it is other than alcohol. Thereby, since the user can recognize the gas component detected easily, the cause of an alarm can be identified quickly.
- the notification unit C is composed of a speaker and its drive circuit, and converts an alarm sound signal into an alarm sound and outputs it.
- the environmental monitoring system Z of the present invention displays each of the first gas detection means 10 and the second gas detection means 20 in association with each other, the respective detection output values, and the respective detection dates and times. Part D is provided. With this configuration, the user can easily grasp the status of each detection means.
- the gas component in the atmosphere around the gas detection means that is detected more or less times the predetermined value or more is analyzed. Also good.
- gas detection means when there are a plurality of gas detection means that detect a detection value that is equal to or greater than a predetermined value, it may be determined based on the past detection tendency which gas detection means is to be analyzed. .
- the gas components in the atmosphere around the gas detection means are analyzed in the set order.
- the ambient atmosphere around the gas detection means may be temporarily collected by the collection means and stored until the turn is reached.
- all or part of the collected atmosphere may be accommodated in a storage unit having an appropriate space.
- the semiconductor gas detection element includes a first gas detection means 10 (invention example 1) including a noble metal wire 1, a gas sensitive portion 2 and a catalyst layer 3, and a second gas including a noble metal wire 1 and a gas sensitive portion 2.
- a first gas detection means 10 invention example 1
- a second gas including a noble metal wire 1 and a gas sensitive portion 2.
- a tin oxide (SnO 2 ) semiconductor paste doped with 0.1 mol% of antimony (Sb + 5) to obtain a predetermined conductivity is applied to a platinum coil to form a sphere with a diameter of about 0.5 mm. After drying, the platinum coil was energized and heated by Joule heat, and tin oxide was sintered at 650 ° C. for 1 hour.
- a tin oxide semiconductor was impregnated with 1 mol / L of ammonium molybdate droplets and dried at 20 ° C. for 60 minutes. After drying, the platinum coil was energized (for 1 hour) and subjected to heat decomposition treatment at about 600 ° C., and molybdenum oxide was supported on the surface of the metal oxide semiconductor (gas sensitive part).
- the thus obtained second semiconductor type gas sensing element X ′ (Invention Example 2: Used for the second gas detection means 20) was incorporated in a bridge circuit and used for sensitivity evaluation with respect to the gas to be detected.
- a tin oxide semiconductor when adding a lanthanum oxide to a metal oxide semiconductor, a tin oxide semiconductor is impregnated with, for example, a 1 mol / L lanthanum nitrate aqueous solution, and when a lead oxide is added to a metal oxide semiconductor, tin oxide is added.
- the semiconductor may be impregnated with a 0.5 mol / L aqueous lead nitrate solution.
- the catalyst layer 3 was produced as follows. To 100 g of alumina powder, an aqueous solution of ammonium tungstate (0.1 mol / L) was added by an impregnation method so as to be 0.1 to 10 mol% (optimum addition amount 2 mol%), dried, and then dried in an electric furnace at 700 Baked at 2 ° C. for 2 hours. This is pulverized and kneaded with water to form a paste, which is applied to the entire surface of the metal oxide semiconductor. Further, after drying at room temperature, it is heated at 600 ° C. for 1 hour to be sintered and formed.
- the thus obtained first semiconductor type gas sensing element X of the present invention (invention example 1: used in the first gas detection means 10) was incorporated into a bridge circuit and used for sensitivity evaluation with respect to the gas to be detected.
- Example 2 Second semiconductor gas detection element X ′ of Invention Example 2 (adding 2 mol% of molybdenum oxide to the gas sensitive part) and semiconductor gas having a gas sensitive part mainly composed of tin oxide as Comparative Example 1 With respect to the sensing element (without adding molybdenum oxide to the gas sensitive part), the detection sensitivity of various gases (at the time of DC 2.4 V energization (10 ohm load)) was examined.
- the gases used were ethanol, methane, isobutane, hydrogen, carbon monoxide, toluene, acetone, and ethyl acetate.
- FIG. 3 shows the measurement result of the second semiconductor type gas detection element X ′ of Example 2 of the present invention
- FIG. 4 shows the measurement result of the semiconductor type gas detection element of Comparative Example 1.
- Example 3 A change in gas sensitivity in an environment where silicone gas (OMCTS: Octamethylcyclotetrasiloxane, 10 ppm) was present in the second semiconductor gas detection element X ′ of Invention Example 2 and the semiconductor gas detection element of Comparative Example 1 was examined.
- the gas to be detected was air and ethanol (5 to 100 ppm).
- FIG. 5 shows the measurement results of the second semiconductor gas detection element X ′ of Example 2 of the present invention
- FIG. 6 shows the measurement results of the semiconductor gas detection element of Comparative Example 1.
- Example 4 In the manufacturing method of the second semiconductor type gas detecting element X ′ according to Example 2 of the present invention described in Example 1, the semiconductor gas used instead of the semiconductor paste of tin oxide used was replaced with the semiconductor paste of indium oxide (In 2 O 3 ). A sensing element was produced.
- the second semiconductor type gas sensing element X ′ thus obtained (Example 3 of the present invention: 2 mol% molybdenum oxide added to the gas sensitive part) is incorporated in the bridge circuit and used for the sensitivity evaluation for the gas to be sensed. did.
- Example 5 Second semiconductor gas detection element X ′ of Invention Example 3, and semiconductor gas detection element having a gas sensitive part mainly composed of indium oxide as Comparative Example 2 (no molybdenum oxide added to the gas sensitive part) , The sensitivity of various gases (DC 2.4 V energized (10 ohm load)) was examined.
- the gases used were ethanol, hydrogen, toluene, acetone and ethyl acetate.
- FIG. 7 shows the measurement results obtained by using the second semiconductor type gas detection element X ′ of Invention Example 3
- FIG. 8 shows the measurement results obtained by the semiconductor type gas detection element of Comparative Example 2.
- Example 8 In the second semiconductor type gas detection element X ′ of Invention Example 2, the effective concentration of molybdenum oxide added to the gas sensitive part was examined.
- the rate of change in gas sensitivity is about 1.0 to 1.5 before and after the semiconductor gas detection element is exposed to silicone gas, it is recognized that the gas detection element has good gas sensitivity.
- the rate of change in gas sensitivity was within the range of 1.0 to 1.5.
- the rate of change in gas sensitivity was within the range of 1.0 to 1.2, and thus it was recognized that the gas sensitivity was better. Therefore, it has been found that when the molybdenum oxide content is 0.5 to 10 mol%, the odor component can be accurately detected even in an environment where silicone gas is present.
- Example 9 In the second semiconductor gas sensing element X ′ of Invention Example 2, the effective concentration of lanthanum oxide added to the gas sensitive part was examined.
- the rate of change in gas sensitivity (after exposure to silicone gas) before and after exposure to silicone gas (10 ppm, 100 hours exposure) with 0 to 3 mol% lanthanum oxide added to a metal oxide semiconductor with molybdenum oxide added (100 ppm sensitivity / 100 ppm sensitivity before exposure to silicone gas) was examined in the range of 1.0 to 1.5. As described above, if the rate of change in gas sensitivity is about 1.0 to 1.5 before and after the semiconductor gas sensing element is exposed to the silicone gas, it is recognized that the gas is not affected by the silicone gas.
- the rate of change is 1.0 to 1.5 because the content of lanthanum oxide is generally in the range of 0.05 to 1 mol%. Therefore, when the content of the lanthanum oxide is in the range of 0.05 to 1 mol%, it is recognized that it is not affected by the silicone gas.
- the sensitivity (mV) to 100 ppm of ethanol was measured in the range of 0 to 3 mol% of lanthanum oxide.
- the metal oxide semiconductor is added with 2 mol% of molybdenum oxide, and the catalyst layer 3 with 2 mol% of tungsten oxide is used.
- the presence or absence of the catalyst layer 3 and the content of lead oxide are set to 0.
- Measurements were made using a semiconductor gas sensing element varied between 0.01 and 1 mol%. The results are shown in FIG.
- the highest sensitivity of ethanol was 251 mV measured when the lanthanum oxide was 0.1 mol% in the second semiconductor gas sensing element X ′ without the catalyst layer 3 (Invention Example 2).
- the sensitivity is good if it is 70% (175 mV) or more of this measured value, and the sensitivity of the first semiconductor gas detection element X with the catalyst layer 3 (Invention Example 1) is high.
- the ethanol removal performance was excellent when it was 1 ⁇ 2 or less of the second semiconductor type gas detection element X ′ without the catalyst layer 3 (Example 2 of the present invention).
- the content of lanthanum oxide was in the range of 0.05 to 1 mol%, these conditions were satisfied and the ethanol removal performance was excellent.
- Example 10 In the second semiconductor type gas sensing element X ′ of Invention Example 2, the effective concentration of lead oxide added to the gas sensitive part was examined.
- the content of molybdenum oxide supported on the surface of the gas sensitive part is 0.5, 2.0, and 10 mol%
- the content of lead oxide is in the range of 0.005 to 5 mol%.
- 7 types (Table 3) of the second semiconductor type gas detection elements X ′ were manufactured in each case (21 types in total). With respect to these second semiconductor type gas detection elements X ', the gas sensitivities when ethanol 100 ppm and hydrogen 100 ppm were detected were examined.
- the effective concentration of the lead oxide may be in a range where the selectivity of the odor component is excellent. In the range where the selectivity of the odor component is excellent, the ratio of combustible gas sensitivity / ethanol sensitivity is set to 1 or less. The results are shown in Table 3.
- the ratio of hydrogen sensitivity / ethanol sensitivity was 1 or less when the content of lead oxide was in the range of 0.01 to 5 mol%.
- the upper limit of the lead oxide content is the highest sensitivity of the odor component (ethanol) (when the molybdenum oxide content is 0.5 mol% and the lead oxide content is 0.5 mol%).
- the maximum is preferable.
- the lead oxide content is preferably in the range of 0.01 to 1 mol%.
- Example 11 It was examined how the sensitivity to 100 ppm of ethanol and the sensitivity to 100 ppm of acetone change when the amount of tungsten oxide added to the catalyst layer 3 is changed between 0 to 10 mol%.
- the metal oxide semiconductor one containing 2 mol% molybdenum oxide, 0.5 mol% lanthanum oxide and 0.5 mol% lead oxide was used. The results are shown in Table 4.
- Example 12 First semiconductor type gas sensing element X of Invention Example 1 (Invention Example 1, metal oxide semiconductor: 2 mol% of molybdenum oxide, 1 mol% of lanthanum oxide, 0.5 mol% of lead oxide, catalyst In the layer: containing 2 mol% of tungsten oxide, the relationship between the gas concentration and the sensitivity to nine gases (ethanol, styrene, xylene, toluene, trimethylamine, ammonia, isobutanol, methyl acetate, acetone) was examined ( FIG. 12). From FIG. 12, it was recognized that sufficient sensitivity was obtained from 1 ppm for all gases, ethanol sensitivity was the lowest, and separation between ethanol and other gases was sufficiently good. Thus, the 1st semiconductor type gas detection element X of this structure can detect an odor component (hydrogen sulfide) with a sufficient sensitivity in the state which suppressed the sensitivity with respect to alcohol.
- an odor component hydrogen sulfide
- Example 13 First semiconductor type gas sensing element X (Invention Example 1: used for first gas detection means 10) and second semiconductor type gas detection element X ′ (Invention Example 2: used for second gas detection means 20) ), And an environmental monitoring system Z having the gas detector A is installed in a clean room of a semiconductor manufacturing factory, and gas present in the clean room is detected (FIG. 14).
- VOC gas as an odor component was always detected at a low level ( ⁇ V sensitivity of about 200 to 600).
- ethanol was used for cleaning between AM 10:00 and 12:00.
- the ethanol component was detected by the second gas detection means 20 in this time zone with an output having a ⁇ V sensitivity of about 1500.
- this environmental monitoring system Z was able to identify and detect both ethanol and VOC gas at the same time by installing it in a clean room.
- the alarm level is when the ⁇ V sensitivity is 1000 or more. Therefore, in order to analyze the gas component contained in the atmosphere around the second gas detection means 20 that has detected the detection value above the alarm level, the atmosphere around the second gas detection means 20 is collected by the collection means. The collected atmosphere was sent to the analysis unit E for analysis.
- the analysis section E as a gas chromatogram separation column, a fluororesin column tube having an inner diameter of 4 mm and a total length of 20 cm is packed with a polyphenyl ether (PPE) packing material 5 ring Uniport-HP (manufactured by GL Science) with a particle diameter of 80 to 100 ⁇ m.
- PPE polyphenyl ether
- the analysis result of the gas component obtained by the analysis of the analysis unit E was monitored by the monitoring unit F in real time. In this way, by monitoring the analysis result with the monitoring unit F, it is possible to easily grasp the change in the gas component inside the closed space.
- the present invention can be used for an environmental monitoring system including a gas detection unit that detects a gas component existing inside a closed space.
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Abstract
Description
この結果、比較例1,2の半導体式ガス検知素子では、におい成分と可燃性ガスとにおいて、ガス感度の明瞭な差異は認められなかったのに対して(図4,8)、本発明例2,3の半導体式ガス検知素子では、エタノール、トルエン、アセトン、酢酸エチルといったにおい成分の検知感度を増感できたと認められた(図3,7)。
この結果、比較例1の半導体式ガス検知素子では、特にシリコーンガスの曝露初期において不安定なガス感度を示す(図6)のに対して、本発明例2の半導体式ガス検知素子では、シリコーンガス存在下であっても安定した(ほぼ一定の)ガス感度が得られるものと認められた(図5)。
この反応(C2H5OH→C2H4+H2O)は比較的高温(300℃程度以上)で起こる。このときエチレンが生成されるが、エチレンに対する本願のセンサの感度は非常に低いため、本願のセンサはアルコールに対する感度は極めて低い。
図1に示したように、本発明の環境監視システムZは、閉鎖空間の内部に存在するガス成分を検知するガス検知部Aを備え、当該ガス検知部Aは、閉鎖空間の異なった領域に配設される複数のガス検出手段10,20を備え、ガス検出手段10,20のいずれかが所定値以上の検出値を検出した場合に、当該所定値以上の検出値を検出したガス検出手段10,20の周囲の雰囲気に含まれるガス成分を分析する分析部Eを備える。
また、本発明の環境監視システムZは、ガス成分の成分量の変化を監視する監視部Fを備える。
このように判定された結果を、監視部Fにてモニタリングすることで、ガス成分の成分量の変化を容易に監視することができる。
第二ガス検出手段20のみが、警報レベル以上のガス成分を検知している場合には、アルコールを検知していると判断し、報知部Cから警報を発さない構成としてもよい。また、第一ガス検出手段10および第二ガス検出手段20の少なくとも一方が、警報レベル以上のガス成分を所定時間以上継続して検知した場合に、警報を発する態様としてもよい。
上述した実施形態において、複数のガス検出手段10,20のいずれかが所定値以上の検出値を検出した場合に、当該所定値以上の検出値を検出したガス検出手段10,20の周囲の雰囲気に含まれるガス成分を分析する態様について説明した。しかし、所定値以上の検出値を検出したガス検出手段が複数存在する場合は、前回の捕集から最も期間があいているガス検出手段の周囲の雰囲気のガス成分を分析するようにしてもよい。
本発明の環境監視システムZで使用する半導体式ガス検知素子の製造方法を以下に説明する。当該半導体式ガス検知素子は、貴金属線材1、ガス感応部2および触媒層3を備える第一ガス検出手段10(本発明例1)、および、貴金属線材1およびガス感応部2を備える第二ガス検出手段20(本発明例2)に使用するものをそれぞれ作製した。
尚、金属酸化物半導体にランタン酸化物を添加する場合は、酸化スズの半導体に例えば1mol/Lの硝酸ランタン水溶液を含浸させ、金属酸化物半導体に鉛酸化物を添加する場合は、酸化スズの半導体に例えば0.5mol/Lの硝酸鉛水溶液を含浸させるとよい。
アルミナの粉末100gに、タングステン酸アンモニウムの水溶液(0.1mol/L)を含浸法により0.1~10mol%(最適添加量2mol%)になるように添加した後、乾燥し、電気炉で700℃で2時間焼成した。これを粉砕し、水で練ってペースト状とし前述の金属酸化物半導体の表面全周に塗布する。さらに室温で乾燥後、600℃で1時間加熱し、焼結させ形成する。
このようにして得られた本発明の第一半導体式ガス検知素子X(本発明例1:第一ガス検出手段10に使用する)をブリッジ回路に組み込み、被検知ガスに対する感度評価に使用した。
本発明例2の第二半導体式ガス検知素子X’(ガス感応部に2モル%のモリブデン酸化物を添加)と、比較例1として酸化スズを主成分とするガス感応部を有する半導体式ガス検知素子(ガス感応部にモリブデン酸化物を添加しない)とにおいて、各種ガスの検知感度(DC2.4V通電時(10オーム負荷))を調べた。使用したガスは、エタノール、メタン、イソブタン、水素、一酸化炭素、トルエン、アセトン、酢酸エチルであった。
よって、第二半導体式ガス検知素子X’において、ガス感応部にモリブデン酸化物を添加することにより、におい成分を感度よく検出することができるものと認められた。
本発明例2の第二半導体式ガス検知素子X’と、比較例1の半導体式ガス検知素子とにおいて、シリコーンガス(OMCTS:Octamethylcyclotetrasiloxane、10ppm)が存在する環境におけるガス感度の変化を調べた。検知対象のガスは、空気、エタノール(5~100ppm)とした。
実施例1で説明した本発明例2の第二半導体式ガス検知素子X’の作製方法において、使用した酸化スズの半導体ペーストを酸化インジウム(In2O3)の半導体ペーストに替えて半導体式ガス検知素子を作製した。このようにして得られた第二半導体式ガス検知素子X’(本発明例3:ガス感応部に2モル%のモリブデン酸化物を添加)をブリッジ回路に組み込み、被検知ガスに対する感度評価に使用した。
本発明例3の第二半導体式ガス検知素子X’と、比較例2として酸化インジウムを主成分とするガス感応部を有する半導体式ガス検知素子(ガス感応部にモリブデン酸化物を添加しない)とにおいて、各種ガスの感度(DC2.4V通電時(10オーム負荷))を調べた。使用したガスは、エタノール、水素、トルエン、アセトン、酢酸エチルであった。
本発明例2の第二半導体式ガス検知素子X’において、ガス感応部に添加するモリブデン酸化物の有効濃度を調べた。
従って、モリブデン酸化物の含有量が0.5~10モル%であれば、シリコーンガスが存在する環境でもにおい成分を正確に検出できることが判明した。
本発明例2の第二半導体式ガス検知素子X’において、ガス感応部に添加するランタン酸化物の有効濃度を調べた。
本発明例2の第二半導体式ガス検知素子X’において、ガス感応部に添加する鉛酸化物の有効濃度を調べた。
触媒層3に添加したタングステン酸化物の添加量を0~10モル%の間で変化させた場合に、エタノール100ppmに対する感度およびアセトン100ppmに対する感度がどのように変化するかを調べた。金属酸化物半導体にはモリブデン酸化物2モル%、ランタン酸化物0.5モル%および鉛酸化物0.5モル%を添加したものを使用した。結果を表4に示した。
尚、本実施例では触媒層3に担持される担持物としてタングステン酸化物を使用した場合について説明したが、モリブデン酸化物であっても同様の結果を示した(結果は示さない)。
本発明例1の第一半導体式ガス検知素子X(本発明例1、金属酸化物半導体:モリブデン酸化物2モル%、ランタン酸化物1モル%、鉛酸化物0.5モル%を含有、触媒層:タングステン酸化物2モル%を含有)において、9種のガス(エタノール、スチレン、キシレン、トルエン、トリメチルアミン、アンモニア、イソブタノール、酢酸メチル、アセトン)に対する感度とガス濃度との関係について調べた(図12)。図12より、全てのガスに対して1ppmから感度が十分得られ、また、エタノールの感度が最も低く、エタノールと他のガスとの分離も十分良いものと認められた。
このように本構成の第一半導体式ガス検知素子Xは、アルコールに対する感度を抑制した状態で、におい成分(硫化水素)を感度よく検出することができる。
第一半導体式ガス検知素子X(本発明例1:第一ガス検出手段10に使用する)と、第二半導体式ガス検知素子X’(本発明例2:第二ガス検出手段20に使用する)とを備えたガス検知部Aを作製し、このガス検知部Aを有する環境監視システムZを半導体製造工場のクリーンルーム内に設置し、当該クリーンルーム内に存在するガスを検知した(図14)。
そのため、警報レベル以上の検出値を検出した第二ガス検出手段20の周囲の雰囲気に含まれるガス成分を分析するべく、捕集手段によって第二ガス検出手段20の周囲の雰囲気を捕集して捕集した雰囲気を分析部Eに送って分析を行った。分析部Eにおいて、ガスクロマトグラム分離カラムとして、内径4mm全長20cmのフッ素樹脂製カラム管に、粒径80~100μmのポリフェニルエーテル(PPE)製充填材5ring Uniport-HP(GLサイエンス社製)を充填したものを用い、カラム温度25℃、キャリアガス流量60ml/分の条件でガス成分の分析を行った。
X 第一半導体式ガス検知素子
X’ 第二半導体式ガス検知素子
A ガス検知部
E 分析部
F 監視部
1 貴金属線材
2 ガス感応部
3 触媒層
10 第一ガス検出手段
20 第二ガス検出手段
Claims (7)
- 閉鎖空間の内部に存在するガス成分を検知するガス検知部を備えた環境監視システムであって、
前記ガス検知部は、前記閉鎖空間の異なった領域に配設される複数のガス検出手段を備え、
前記ガス検出手段のいずれかが所定値以上の検出値を検出した場合に、当該所定値以上の検出値を検出したガス検出手段の周囲の雰囲気に含まれるガス成分を分析する分析部を備える環境監視システム。 - 前記ガス検知部は、第一ガス検出手段および第二ガス検出手段を備え、両者において被検知ガスの検知特性を異ならせてあり、
前記第一ガス検出手段の検知出力および前記第二ガス検出手段の検知出力に基づいて所望のガス成分を検知、分析および監視する請求項1に記載の環境監視システム。 - 前記ガス検知部におけるガス検出手段は、清浄ガスを用いてゼロ点を設定する請求項1または2に記載の環境監視システム。
- 前記ガス成分の変化を監視する監視部と、
前記ガス検出手段の周囲の雰囲気を捕集し、捕集した雰囲気を前記分析部に送る捕集手段を備え、
何れかのガス検出手段が所定値以上の検出値を検出すると、前記監視部は、前記捕集手段に所定値以上を検出したガス検出手段の周囲の雰囲気の捕集を指示し、前記捕集手段から送られる雰囲気の分析を前記分析部に指示する請求項1~3の何れか一項に記載の環境監視システム。 - 前記第一ガス検出手段は、
貴金属線材と、
当該貴金属線材を覆い、酸化スズあるいは酸化インジウムを主成分としてモリブデン酸化物を添加した金属酸化物半導体を用いて形成したガス感応部と、
当該ガス感応部の外周側に、アルミナ、シリカ、シリカアルミナ、ゼオライトの中から選択された少なくとも1種を担体とする触媒層と、を設け、当該触媒層にタングステン酸化物或いはモリブデン酸化物の少なくとも一方を担持させた第一半導体式ガス検知素子を有する請求項2に記載の環境監視システム。 - 前記第二ガス検出手段は、前記第一ガス検出手段における触媒層を含まない構成とした第二半導体式ガス検知素子を有する請求項5に記載の環境監視システム。
- 前記金属酸化物半導体にランタン酸化物および鉛酸化物の少なくとも何れかを添加してある請求項5または6に記載の環境監視システム。
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