WO2015000199A1 - 超声波清洁装置 - Google Patents

超声波清洁装置 Download PDF

Info

Publication number
WO2015000199A1
WO2015000199A1 PCT/CN2013/079660 CN2013079660W WO2015000199A1 WO 2015000199 A1 WO2015000199 A1 WO 2015000199A1 CN 2013079660 W CN2013079660 W CN 2013079660W WO 2015000199 A1 WO2015000199 A1 WO 2015000199A1
Authority
WO
WIPO (PCT)
Prior art keywords
ultrasonic
cleaning device
servo shaft
cleaning
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/079660
Other languages
English (en)
French (fr)
Inventor
陈方甫
丁涛
刘明
宋涛
赵国栋
刘一俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Publication of WO2015000199A1 publication Critical patent/WO2015000199A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds

Definitions

  • the present invention relates to a liquid crystal manufacturing process, and more particularly to an ultrasonic cleaning device.
  • liquid crystal production process in the liquid crystal panel terminal and flip chip (Chip on After the combination of Flex and COF, in order to prevent the circuit or the water vapor from causing oxidation or corrosion of the circuit on the flip chip, glue is usually applied to the liquid crystal panel terminal and the flip chip to prevent damage to the product by air or moisture.
  • a liquid crystal film 900 is covered on a liquid crystal panel 700.
  • a glue 601 is applied to the glue needle 600.
  • the glue application needle 600 for applying glue is likely to retain residual glue after the completion of the application of the glue.
  • the residual glue 602 may affect the quality of the glue applied by the glue needle 600 for the next glue application operation, which may cause poor product quality.
  • the invention aims at solving the problem that the existing glue application needle is prone to residual glue during work and affects the quality of the next glue application of the glue application needle, and an ultrasonic cleaning device is provided to overcome the above defects.
  • the solution to the above problem is to construct an ultrasonic cleaning device comprising a power source for generating a high-frequency alternating current, an electrical connection with a power source, an ultrasonic magnetic field generator for generating ultrasonic vibration, and an ultrasonic magnetic field generator.
  • the ultrasonic brush head and the cleaning fixture with the sol agent are installed in the sol agent in the cleaning fixture.
  • the sol agent is water or an organic solvent.
  • a gap is provided between the ultrasonic brush head and the inner wall of the cleaning jig, and between the ultrasonic brush head and the bottom of the cleaning jig.
  • the ultrasonic cleaning device of the present invention has a gap between the ultrasonic magnetic field generator and the inner wall of the cleaning jig, and between the ultrasonic brush head and the cleaning jig and the bottom.
  • the ultrasonic magnetic field generator has a vibration frequency of 20 kHz or more.
  • the ultrasonic cleaning device of the present invention further comprises a servo shaft system for moving the glue application needle, the servo shaft system comprises two first servo shafts, a second servo shaft and a third servo shaft which are perpendicularly arranged with each other; the servo shaft system drives the coating The glue needle moves in the axial direction of the first servo shaft, the second servo shaft or the third servo shaft.
  • the ultrasonic cleaning device of the present invention further includes a positioning sensor disposed on at least one of the servo shaft system, the glue application needle, and the cleaning jig for determining a relative position of the glue application needle and the ultrasonic brush head.
  • the ultrasonic cleaning device of the present invention further includes a sol agent filtering device disposed on the cleaning jig.
  • the ultrasonic cleaning device of the present invention further includes a needle air drying device provided on one side of the cleaning jig.
  • the ultrasonic cleaning device embodying the present invention can perform the cleaning process of the glue application needle after the completion of the application of the glue or after the equipment has not been used for a long period of time. Thereby, the probability of equipment crashing due to the residual glue of the needle is reduced, the utilization rate of the glue coating equipment is increased, and the production efficiency is improved.
  • Figure 1 is a schematic view showing the operation of a conventional glue application needle
  • FIG. 2 is a schematic view showing the appearance of residual glue in a conventional glue application needle
  • FIG. 3 is a schematic structural view of a preferred embodiment of the ultrasonic cleaning device of the present invention.
  • FIG. 4 is a schematic structural view of the production line of the embodiment shown in FIG. 3;
  • FIG. 5 is a schematic view of the cleaning fixture with the sol agent filtering device installed in the embodiment shown in Figure 3;
  • Fig. 6 is a schematic view showing the needle air drying device mounted in the embodiment shown in Fig. 3.
  • the applicator needle 600 is used to apply the glue to the liquid crystal panel of FIG. 1, the applicator needle 600 is easily combined with the color filter 800 (Color Filter, The CF) is in contact with each other, or the glue is spilled due to the device crashing, resulting in the presence of the residual glue 602 in the glue application needle 600 as shown in Fig. 2, and these residual glue 602 will affect the quality of the next application.
  • the ultrasonic cleaning device provided by the invention processes the glued needle after the glue is applied to ensure the quality of the next glue.
  • FIG. 3 is a schematic structural view of a preferred embodiment of the present invention.
  • the ultrasonic cleaning device includes a power source 100.
  • the converted high-frequency alternating current is supplied to the ultrasonic magnetic field generator 200, and the ultrasonic magnetic field generator 200
  • the electrical energy is converted into ultrasonic mechanical energy and further transmitted to the ultrasonic brush head 300 connected thereto.
  • Ultrasonic brush head 300 Immersed in a cleaning fixture with a sol 500 Medium.
  • the glue needle 600 and the ultrasonic brush head 300 are used.
  • the upper part of the brush is in contact with each other, and the residual glue of the needle part is decomposed by the ultrasonic vibration and dissolved in the sol to achieve the purpose of cleaning the needle.
  • the sol agent 500 in the cleaning jig 400 can be flexibly changed for a specific different glue application.
  • the sol agent 500 can be used as pure water; and for the organic type, the corresponding organic solvent can be used, or the solvent of the sol can be achieved by uniformly using a solvent such as ethanol or isopropyl alcohol. .
  • the vibration frequency of the ultrasonic brush head 300 should be adjusted to 20 kHz or more.
  • the ultrasonic magnetic field generator 200 and the ultrasonic brush vibrating head 300 placed in the cleaning jig 400 are fixed on the external fixing device and are not in contact with the cleaning jig 400, thereby avoiding ultrasonic energy.
  • the attenuation also reduces the noise generated by the vibration of the cleaning jig 400.
  • the ultrasonic brush head 300 and the ultrasonic magnetic field generator 200 are detachably fixed together, and the position between the two can be flexibly adjusted according to the actual use environment, as long as the two are cleaned during the adjustment process.
  • the inner wall and the bottom of the 400 are not in contact, and a certain gap is left.
  • the glue application needle 600 is mounted on a servo shaft system.
  • the servo shaft system includes a first servo shaft 610, a second servo shaft 620, and a third servo shaft 630, and the axial directions of the three servo shafts are perpendicular to each other, that is, the first servo
  • the axis 610 is perpendicular to the moving direction of the second servo axis 620, and the two servo axes are respectively parallel to the long side and the wide side of the liquid crystal panel 700
  • the third servo axis 630 is mounted on the second servo axis 620, and the third servo axis 630 is mounted on the second servo axis 630.
  • the movement is performed in a direction perpendicular to the plane in which the liquid crystal panel 700 is located.
  • the liquid crystal panel 700 after the past process is completed and attached to the flip chip is transported to the servo axis system through the production line, and the glue needle 600 is transported to the upper side of the liquid crystal panel 700 through the first servo shaft 610 and the second servo shaft 620, so that The glue application operation of the liquid crystal panel 700 is completed.
  • the glue application needle moves to the top of the cleaning fixture through the second servo shaft 620, and then falls to contact with the ultrasonic brush vibration head 300 through the third servo shaft 630, waiting for the ultrasonic wave. Cleaning process.
  • the utility model converts the commercial power into a high-frequency alternating current through a power source, and the ultrasonic magnetic field generator can convert the high-frequency alternating current into a high-frequency ultrasonic vibration, and the ultrasonic energy is concentrated on the surface of the glue-coated needle by the brush and the sol agent, so that the residual glue is separated.
  • the needle achieves the purpose of automatically cleaning the needle.
  • FIG. 4 Since the structure of FIG. 4 is an improvement according to the existing servo axis system, it is not necessary to perform hardware modification or replacement of the existing equipment, and only the control software needs to be modified to perform after a certain amount of glue application work is completed. To remove the residual glue, you can also set the action to remove the residual glue when the equipment downtime reaches a certain threshold.
  • the glue applicator needle 600 is accurately positioned to the ultrasonic brush head 300.
  • Positioning sensors are provided at a plurality of positions such as the servo shaft system, the glue application needle 600, and the cleaning jig 400.
  • the positioning sensor detects that the glue application needle 600 is moved to the correct position, the servo shaft system stops moving the glue application needle. 600, at the same time, the ultrasonic brush head 300 starts to work, and the glue needle is cleaned.
  • the positioning sensor can also be disposed only on one of the servo shaft system, the glue application needle 600, and one of the cleaning fixtures 400, as long as it can accurately position the relative position of the glue application needle and the ultrasonic brush vibration head. .
  • a plurality of glue applicators 600 can be provided on the servo shaft system.
  • another glue applicator needle can take over. That is, the work of applying the glue and the work of removing the residual glue can be performed at the same time, further reducing the time consumed for cleaning the glued needle, thereby improving the efficiency of the glue application process.
  • a sol filter device 401 is also mounted on the cleaning jig 400, as shown in FIG.
  • the sol filter device 401 sucks the sol agent from the bottom of the cleaning jig 400, and after being filtered by the sol filter device 401, the undissolved residual glue is isolated, so that the sol agent is kept clean, and the glued needle can be cleaned efficiently.
  • a sol agent remains thereon.
  • These residual sols may affect the quality of the next application and cause defective products.
  • a needle air drying device 640 is provided on one side of the cleaning jig 400, as shown in FIG. The needle air drying device 640 sprays high-pressure air to the glue-coated needle 600 that removes the residual glue, so that the residual sol agent on the glue-coated needle 600 can evaporate, thereby avoiding the quality that affects the next application of the glue.

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Special Spraying Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

一种超声波清洁装置，包括电源（100），用于产生高频交流电流；与电源（100）电连接的超声波磁场发生器（200），用于产生超声波振动；超声波磁场发生器（200）上装设的超声波毛刷振头（300），超声波毛刷振头（300）设置在装有溶胶剂（500）的清洁治具（400）中。该超声波清洁装置，能够在涂胶完成后或者是设备较长时间未使用之后，进行涂胶针头的清洁处理，从而减少了涂胶设备因针头残胶而发生设备当机的几率，增加了涂胶设备的稼动率，进而提高了生产效益。

Description

超声波清洁装置 技术领域
本发明涉及液晶制造工艺，更具体地说，涉及一种超声波清洁装置。
背景技术
在液晶的生产流程中，在液晶面板端子与覆晶薄膜（Chip on Flex，COF）结合之后，为了防止空气或者水汽对覆晶薄膜造成线路氧化或者腐蚀，通常会在液晶面板端子与覆晶薄膜处涂胶，以防止空气或者水汽对于产品的损害。如图1所示，一现有液晶面板700的上方覆盖有覆晶薄膜900，为了防止外部的空气或者水汽，用涂胶针头600涂上涂胶601。
在上述的现有液晶面板中，用于涂胶的涂胶针头600在涂胶完成后容易出现留存有残胶。如图2所示，残胶602可能会影响涂胶针头600进行下一次的涂胶操作时的涂胶质量，容易造成产品质量不良。
发明内容
本发明针对现有的涂胶针头在工作中容易出现残胶，影响涂胶针头的下一次涂胶质量的问题，提供一种超声波清洁装置，以克服上述缺陷。
本发明解决上述问题的方案是，构造一种超声波清洁装置，包括用于产生高频交流电流的电源、与电源电连接，用于产生超声波振动的超声波磁场发生器、与超声波磁场发生器连接的超声波毛刷振头、以及装有溶胶剂的清洁治具，超声波毛刷振头装设在清洁治具内的溶胶剂中。
本发明的超声波清洁装置，溶胶剂为水或有机溶剂。
本发明的超声波清洁装置，超声波毛刷振头与清洁治具的内壁之间，以及超声波毛刷振头与清洁治具的底部之间均设有间隙。
本发明的超声波清洁装置，超声波磁场发生器与清洁治具的内壁之间，以及超声波毛刷振头与清洁治具的与底部之间均设有间隙。
本发明的超声波清洁装置，超声波磁场发生器的振动频率为20KHz或以上。
本发明的超声波清洁装置，还包括用于移动涂胶针头的伺服轴系统，伺服轴系统包括两两相互垂直设置的第一伺服轴、第二伺服轴和第三伺服轴；伺服轴系统带动涂胶针头沿着第一伺服轴、第二伺服轴或第三伺服轴的轴向移动。
本发明的超声波清洁装置，还包括设置在伺服轴系统、涂胶针头、清洁治具中至少一个上，用于确定所述涂胶针头与所述超声波毛刷振头相对位置的定位传感器。
本发明的超声波清洁装置，还包括设置在清洁治具上的溶胶剂过滤装置。
本发明的超声波清洁装置，还包括设置在清洁治具一侧的针头风干装置。
实施本发明的超声波清洁装置，能够在涂胶完成后或者是设备较长时间未使用之后，进行涂胶针头的清洁处理。从而减少了涂胶设备因针头残胶而发生设备当机的几率，增加了涂胶设备的稼动率，进而提高了生产效益。
附图说明
下面将结合附图及实施例对本发明作进一步说明，附图中：
图1为现有涂胶针头的工作示意图；
图2为现有涂胶针头出现残胶的示意图；
图3为本发明超声波清洁装置的一则较佳实施例的结构示意图；
图4为图3所示的实施例配合生产线的结构示意图；
图5为图3所示的实施例中安装有溶胶剂过滤装置的清洁治具示意图；
图6为图3所示的实施例中安装有针头风干装置的示意图。
具体实施方式
以下结合附图和具体实施方式对本发明进行详细的说明。
根据现有的涂胶技术，由于涂胶针头600在对图1的液晶面板进行涂胶的时候，涂胶针头600很容易与彩色滤光片800（Color Filter， CF）相接触，或者是由于设备当机而溢出涂胶，造成在涂胶针头600出现如图2中的残胶602，而这些残胶602会影响下一次涂胶的质量。本发明提供的超声波清洁装置则是在涂胶完成后对涂胶针头进行清除残胶的处理，以保证下一次涂胶的质量。
如图 3 所示为本发明的一则较佳实施例的结构示意图。在本实施例中，超声波清洁装置包括一个电源 100 ，用于将市电转换为高频交流电流；转换后的高频交流电流供应给超声波磁场发生器 200 ，超声波磁场发生器 200 将电能转换成超声波机械能，并进一步传递到与之相连的超声波毛刷振头 300 上。超声波毛刷振头 300 浸没在装有溶胶剂 500 的清洁治具 400 中。进行清洁涂胶针头 600 的时候，使涂胶针头 600 与超声波毛刷振头 300 上的刷子部分相接触，针头部分的残胶在超声波振动的作用下分解，并溶于溶胶剂中，达到清洁针头的目的。
为了达到最佳的清洁效果，清洁治具400中的溶胶剂500可以针对具体不同的涂胶进行灵活改变。例如对于水溶性的涂胶，溶胶剂500可以采用纯净水；而对于有机类的涂胶可以使用对应的有机溶剂，或者是统一采用乙醇、异丙醇等较为常用的溶剂也可实现溶胶的效果。
较佳的，为了使得清除溶胶的时间进一步缩短，以及使得清除溶胶的效果较佳，超声波毛刷振头300的振动频率应调节到20KHz或者以上。
较佳的，放入到清洁治具400中的超声波磁场发生器200和超声波毛刷振头300被固定在外置的固定装置上，并均与清洁治具400不接触，这样能够避免超声波能量的衰减，还能减少因为清洁治具400的振动所产生的噪音。
较佳的，超声波毛刷振头300与超声波磁场发生器200可拆卸地固定在一起，可以根据实际使用的环境灵活调节两者之间的位置，只要在调节的过程中保持两者与清洁治具400的内壁、底部均不接触，留有一定间隙即可。
如图4所示为图3实施例配合生产线的结构示意图，我们将图3的提供的超声波清洁装置放置在涂胶系统的一侧。涂胶针头600安装在伺服轴系统上，伺服轴系统包括第一伺服轴610、第二伺服轴620、第三伺服轴630，并且三个伺服轴的轴向两两垂直，即：第一伺服轴610与第二伺服轴620的运动方向垂直，且两个伺服轴分别与液晶面板700的长边和宽边平行，第三伺服轴630安装在第二伺服轴620上，第三伺服轴630以垂直于液晶面板700所在平面的方向进行移动。
前制程完成贴附覆晶薄膜之后的液晶面板700通过生产线运输到伺服轴系统下，通过在第一伺服轴610和第二伺服轴620，将涂胶针头600运送到液晶面板700的上方，以便完成液晶面板700的涂胶操作。当涂胶工作完成一定数量的液晶面板之后，涂胶针头通过第二伺服轴620移动到清洁治具上方，再通过第三伺服轴630下降到与超声波毛刷振头300相接触，等待进行超声波清洁流程。
通过电源将市电转换成高频交流电流，超声波磁场发生器能够将高频交流电转换成高频超声波的振动，通过毛刷和溶胶剂将超声波能量集中到涂胶针头的表面，使得残胶脱离针头，达到自动清洁针头的目的。
由于图4的结构是根据现有的伺服轴系统进行的改进，无需对现有的设备进行硬件上的改造或者更换，只需对控制软件进行修改，以便在完成一定量的涂胶工作后进行清除残胶的动作，还可以设定在设备停机时间达到一定阈值的时候进行清除残胶的动作。
较佳的，为了使得涂胶针头600能够准确地定位到超声波毛刷振头300。在伺服轴系统、涂胶针头600附近以及清洁治具400等多个位置上都设有定位传感器，当定位传感器检测到涂胶针头600移动到正确的位置时，伺服轴系统停止移动涂胶针头600，同时超声波毛刷振头300开始工作，对涂胶针头进行清洁。需要理解的是，定位传感器也可以只设置在伺服轴系统、涂胶针头600附近以及清洁治具400其中之一上，只要其能准确定位涂胶针头与超声波毛刷振头的相对位置即可。
较佳的，在伺服轴系统上可以设置多个涂胶针头600，当其中一个涂胶针头600需要进行清洁的时候，另外的涂胶针头可以接替工作。即，涂胶的工作与清除残胶的工作能够同时进行，进一步的减少因清洁涂胶针头所消耗的时间，进而提高涂胶过程的效率。
　　　　　　　　较佳的，在清洁治具400上还安装有溶胶剂过滤装置401，如图5所示。溶胶剂过滤装置401从清洁治具400的底部吸取溶胶剂，经过溶胶剂过滤装置401过滤后，未溶解的残胶被隔离出来，使得溶胶剂保持清洁，能够高效的对涂胶针头进行清洁。
　　　　　　　　较佳的，考虑到涂胶针头600在清除残胶之后，会有溶胶剂残留在上面。这些残留的溶胶剂有可能会影响下一次涂胶时的质量，造成不良品。为了解决这一问题，在清洁治具400的一侧设有针头风干装置640，如图6所示。针头风干装置640向清除完残胶的涂胶针头600喷出高压的空气，使得在涂胶针头600上残留的溶胶剂能够蒸发，避免了影响下一次涂胶时的质量。
　　　　　　　　以上仅为本发明的具体实施方式，不能以此来限定本发明的范围，本技术领域内的一般技术人员根据本创作所作的均等变化，以及本领域内技术人员熟知的改变，都应仍属本发明涵盖的范围。

Claims (16)

  1. 　　　一种超声波清洁装置，包括用于产生高频交流电流电源；与所述电源电连接，用于产生超声波振动的超声波磁场发生器；与所述超声波磁场发生器连接的超声波毛刷振头；以及装有溶胶剂的清洁治具，所述超声波毛刷振头装设在所述清洁治具内的溶胶剂中；
    　　　所述超声波毛刷振头与所述清洁治具的内壁之间，以及所述超声波毛刷振头与所述清洁治具的底部之间均设有间隙；
    　　　所述超声波磁场发生器与所述清洁治具的内壁之间，以及所述超声波磁场发生器与所述清洁治具的底部之间均设有间隙。
  2. 根据权利要求1所述的超声波清洁装置，其中，所述溶胶剂为水或有机溶剂。
  3. 根据权利要求1所述的超声波清洁装置，其中，所述超声波磁场发生器的振动频率为20KHz或以上。
  4. 　　　根据权利要求1所述的超声波清洁装置，其中，所述超声波清洁装置还包括用于移动涂胶针头的伺服轴系统，所述伺服轴系统包括两两相互垂直设置的第一伺服轴、第二伺服轴和第三伺服轴；所述伺服轴系统带动所述涂胶针头沿着所述第一伺服轴、第二伺服轴或第三伺服轴的轴向移动。
  5. 根据权利要求4所述的超声波清洁装置，其中，所述超声波清洁装置还包括设置在所述伺服轴系统、涂胶针头、清洁治具中至少一个上，用于确定所述涂胶针头与所述超声波毛刷振头相对位置的定位传感器。
  6. 　　　根据权利要求1所述的超声波清洁装置，其中，还包括设置在所述清洁治具上的溶胶剂过滤装置。
  7. 一种超声波清洁装置，包括用于产生高频交流电流电源；与所述电源电连接，用于产生超声波振动的超声波磁场发生器；与所述超声波磁场发生器连接的超声波毛刷振头；以及装有溶胶剂的清洁治具，所述超声波毛刷振头装设在所述清洁治具内的溶胶剂中；
    　　　所述超声波清洁装置还包括用于移动涂胶针头的伺服轴系统，所述伺服轴系统包括两两相互垂直设置的第一伺服轴、第二伺服轴和第三伺服轴；所述伺服轴系统带动所述涂胶针头沿着所述第一伺服轴、第二伺服轴或第三伺服轴的轴向移动。
  8. 　　　根据权利要求7所述的超声波清洁装置，其中，所述超声波清洁装置还包括设置在所述伺服轴系统、涂胶针头、清洁治具中至少一个上，用于确定所述涂胶针头与所述超声波毛刷振头相对位置的定位传感器。
  9. 根据权利要求7所述的超声波清洁装置，其中，还包括设置在所述清洁治具上的溶胶剂过滤装置。
  10. 根据权利要求7所述的超声波清洁装置，其中，所述溶胶剂为水或有机溶剂。
  11. 根据权利要求7所述的超声波清洁装置，其中，所述超声波磁场发生器的振动频率为20KHz或以上。
  12. 一种超声波清洁装置，包括用于产生高频交流电流电源；与所述电源电连接，用于产生超声波振动的超声波磁场发生器；与所述超声波磁场发生器连接的超声波毛刷振头；以及装有溶胶剂的清洁治具，所述超声波毛刷振头装设在所述清洁治具内的溶胶剂中；
    　　　所述超声波清洁装置还包括设置在所述清洁治具一侧的针头风干装置。
  13. 根据权利要求12所述的超声波清洁装置，其中，所述超声波毛刷振头与所述清洁治具的内壁之间，以及所述超声波毛刷振头与所述清洁治具的底部之间均设有间隙；所述超声波磁场发生器与所述清洁治具的内壁之间，以及所述超声波磁场发生器与所述清洁治具的底部之间均设有间隙。
  14. 根据权利要求12所述的超声波清洁装置，其中，所述超声波清洁装置还包括用于移动涂胶针头的伺服轴系统，所述伺服轴系统包括两两相互垂直设置的第一伺服轴、第二伺服轴和第三伺服轴；所述伺服轴系统带动所述涂胶针头沿着所述第一伺服轴、第二伺服轴或第三伺服轴的轴向移动。
  15. 根据权利要求12所述的超声波清洁装置，其中，所述溶胶剂为水或有机溶剂。
  16. 根据权利要求12所述的超声波清洁装置，其中，所述超声波磁场发生器的振动频率为20KHz或以上。
PCT/CN2013/079660 2013-07-01 2013-07-19 超声波清洁装置 Ceased WO2015000199A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310272456.9A CN103341463B (zh) 2013-07-01 2013-07-01 超声波清洁装置
CN201310272456.9 2013-07-01

Publications (1)

Publication Number Publication Date
WO2015000199A1 true WO2015000199A1 (zh) 2015-01-08

Family

ID=49276312

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/079660 Ceased WO2015000199A1 (zh) 2013-07-01 2013-07-19 超声波清洁装置

Country Status (2)

Country Link
CN (1) CN103341463B (zh)
WO (1) WO2015000199A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114472352A (zh) * 2022-02-18 2022-05-13 徐州振丰超声电子有限公司 一种超声波振动头
CN114833029A (zh) * 2022-03-22 2022-08-02 星源电子科技(深圳)有限公司 一种led模组制备用可调式点胶系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106079451A (zh) * 2016-08-10 2016-11-09 西安交通大学 旋转换槽式多材料面曝光增材制造装置及方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000084505A (ja) * 1998-09-14 2000-03-28 Hokushin:Kk 水晶素板洗浄装置
JP2002075944A (ja) * 2000-08-29 2002-03-15 Dainippon Screen Mfg Co Ltd 液中基板浸漬装置および液中基板浸漬処理方法
JP2003053286A (ja) * 2001-08-20 2003-02-25 Speedfam Clean System Co Ltd 感光体用ドラム基材の洗浄装置
CN101471077A (zh) * 2007-12-26 2009-07-01 日立环球储存科技荷兰有限公司 用于清洁磁盘驱动器的部件的清洁装置和清洁方法
CN201552158U (zh) * 2009-12-15 2010-08-18 武汉海王新能源工程技术有限公司 核电站主泵超声波清洗装置
CN101834118A (zh) * 2009-03-09 2010-09-15 株式会社日立高新技术 掩膜构件的清洗装置及清洗方法以及有机el显示器
CN101954362A (zh) * 2010-07-27 2011-01-26 中国核电工程有限公司 主泵水力部件专用去污装置
CN102310061A (zh) * 2011-07-07 2012-01-11 苏州赤诚洗净科技有限公司 能使硅料转动的硅料超声波清洗装置
CN102896110A (zh) * 2012-11-08 2013-01-30 北京泰拓精密清洗设备有限公司 钢网清洗机及清洗方法
CN202803671U (zh) * 2012-08-24 2013-03-20 阮于华 超声波清洁刷

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195651A (ja) * 1983-04-21 1984-11-06 Nec Corp ホトマスク洗浄装置
JPH0214443A (ja) * 1988-06-30 1990-01-18 Matsushita Electric Ind Co Ltd 光ディスク原盤用洗浄装置
JP2000292943A (ja) * 1999-04-02 2000-10-20 Kyocera Mita Corp 超音波照射とブラシ摺擦による素管表面上の凸欠陥除去方法
CN1778226A (zh) * 2004-11-18 2006-05-31 闫春雷 超声波刷子
JP2006192372A (ja) * 2005-01-13 2006-07-27 Shinka Jitsugyo Kk 洗浄物保持具、これを用いた洗浄物保持装置、洗浄装置、洗浄物洗浄方法
CN101154558A (zh) * 2006-09-30 2008-04-02 中芯国际集成电路制造(上海)有限公司 刻蚀设备组件的清洗方法
JP5366576B2 (ja) * 2009-02-04 2013-12-11 株式会社ミヤコシ 湿式現像装置
CN102178392B (zh) * 2011-01-13 2012-07-04 北京联合大学 超声喷水洗刷装置
CN102825030B (zh) * 2012-08-24 2015-04-08 无锡市恒英盛电子科技有限公司 超声波清洁刷

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000084505A (ja) * 1998-09-14 2000-03-28 Hokushin:Kk 水晶素板洗浄装置
JP2002075944A (ja) * 2000-08-29 2002-03-15 Dainippon Screen Mfg Co Ltd 液中基板浸漬装置および液中基板浸漬処理方法
JP2003053286A (ja) * 2001-08-20 2003-02-25 Speedfam Clean System Co Ltd 感光体用ドラム基材の洗浄装置
CN101471077A (zh) * 2007-12-26 2009-07-01 日立环球储存科技荷兰有限公司 用于清洁磁盘驱动器的部件的清洁装置和清洁方法
CN101834118A (zh) * 2009-03-09 2010-09-15 株式会社日立高新技术 掩膜构件的清洗装置及清洗方法以及有机el显示器
CN201552158U (zh) * 2009-12-15 2010-08-18 武汉海王新能源工程技术有限公司 核电站主泵超声波清洗装置
CN101954362A (zh) * 2010-07-27 2011-01-26 中国核电工程有限公司 主泵水力部件专用去污装置
CN102310061A (zh) * 2011-07-07 2012-01-11 苏州赤诚洗净科技有限公司 能使硅料转动的硅料超声波清洗装置
CN202803671U (zh) * 2012-08-24 2013-03-20 阮于华 超声波清洁刷
CN102896110A (zh) * 2012-11-08 2013-01-30 北京泰拓精密清洗设备有限公司 钢网清洗机及清洗方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114472352A (zh) * 2022-02-18 2022-05-13 徐州振丰超声电子有限公司 一种超声波振动头
CN114472352B (zh) * 2022-02-18 2022-12-02 徐州振丰超声电子有限公司 一种超声波振动头
CN114833029A (zh) * 2022-03-22 2022-08-02 星源电子科技(深圳)有限公司 一种led模组制备用可调式点胶系统

Also Published As

Publication number Publication date
CN103341463B (zh) 2015-05-06
CN103341463A (zh) 2013-10-09

Similar Documents

Publication Publication Date Title
CN104238202B (zh) 一种用于涂布封框胶的涂布装置、涂布系统及涂布方法
WO2015003417A1 (zh) 超声波清洗装置和具有该超声波清洗装置的涂布机
WO2015000199A1 (zh) 超声波清洁装置
CN213558102U (zh) 一种多层板材加工用的涂胶机
CN113843194A (zh) 一种tft-lcd玻璃基板清洗传输用清洁装置
CN201280517Y (zh) 一种瓷套坯件的外表面上釉装置
WO2014131218A1 (zh) 单层阵列玻璃基板的切割方法及切割系统
CN217857057U (zh) 一种杉木生态板加工用涂胶装置
CN219046252U (zh) 一种绝缘子用胶装工装
CN207466229U (zh) 一种自动化墙纸贴装系统的墙面贴纸装置
CN111965861B (zh) 一种tft液晶屏框贴带触摸功能贴合装置及方法
CN212596715U (zh) 一种摆杆式粘胶装置
CN206139432U (zh) 一种涂胶设备
CN214718758U (zh) 一种lcd减薄前清洗机
CN207782625U (zh) 自动补偿型淡金水涂覆机构
CN221789834U (zh) 一种导热绝缘胶膜涂布设备
CN211160426U (zh) 一种电路基板板材过胶机
CN221753710U (zh) 一种电池极片液体涂布装置
CN223171204U (zh) 一种胶带生产用单面涂胶装置
CN221619863U (zh) 线路板总成防水涂胶装置
CN117175322B (zh) 一种连接器绝缘组件的自动粘接设备及方法
CN216544714U (zh) 一种方便定位的玻璃生产用覆膜机
CN209199971U (zh) 一种双面玻璃清洗装置
CN218872648U (zh) 一种涂抹机
CN221288540U (zh) 一种汽车配件震荡式挂胶设备

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13888758

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13888758

Country of ref document: EP

Kind code of ref document: A1