WO2014193175A1 - 외기 침투율 측정을 위한 반응 물질 카트리지 및 이를 포함하는 기판의 외기 침투율 측정 장치 - Google Patents
외기 침투율 측정을 위한 반응 물질 카트리지 및 이를 포함하는 기판의 외기 침투율 측정 장치 Download PDFInfo
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- WO2014193175A1 WO2014193175A1 PCT/KR2014/004802 KR2014004802W WO2014193175A1 WO 2014193175 A1 WO2014193175 A1 WO 2014193175A1 KR 2014004802 W KR2014004802 W KR 2014004802W WO 2014193175 A1 WO2014193175 A1 WO 2014193175A1
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- Prior art keywords
- substrate
- measuring
- cartridge
- outside air
- reactant
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims abstract description 140
- 239000000463 material Substances 0.000 title claims abstract description 56
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 47
- 230000035515 penetration Effects 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 32
- 230000008859 change Effects 0.000 claims abstract description 23
- 239000000376 reactant Substances 0.000 claims description 54
- 230000035699 permeability Effects 0.000 claims description 38
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical group [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 19
- 229910052791 calcium Inorganic materials 0.000 claims description 19
- 239000011575 calcium Substances 0.000 claims description 19
- 238000002834 transmittance Methods 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 3
- 240000000018 Gnetum gnemon Species 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 229920001621 AMOLED Polymers 0.000 abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 238000007796 conventional method Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 22
- 239000010410 layer Substances 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000004378 air conditioning Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 208000004434 Calcinosis Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/20—Investigating the presence of flaws
- G01N27/205—Investigating the presence of flaws in insulating materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
- G01N15/082—Investigating permeability by forcing a fluid through a sample
- G01N15/0826—Investigating permeability by forcing a fluid through a sample and measuring fluid flow rate, i.e. permeation rate or pressure change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Definitions
- the present invention relates to an apparatus and a method for measuring the penetration rate of external air including moisture, oxygen, and the like of a substance.
- AMOLED which is expected to be commercialized at present, uses various kinds of organic materials (ETL, EML, HIL, HTL, etc.) due to the characteristics of the technology.
- organic materials ETL, EML, HIL, HTL, etc.
- such organic materials are very vulnerable to moisture present in the air, so the moisture must be well protected from penetration into the panel to ensure the reliability of the panel.
- the measurement limit is 5x10 -4 g / m2-day, which does not meet the moisture permeability level (10 -6 g / m 2 -day) actually required in the AMOLED panel.
- Philips Electronics has proposed a method for traceback of moisture permeation rate using calcium that reacts very quickly with water (US 7,117,720, “Method for measuring a permeation rate, a test”). and an apparatus for measuring and testing ”).
- This analytical method called "calcium test” forms a calcium electrode on the substrate on which moisture permeability is to be measured, and exposes the exposed back part with metal or glass to extract the amount of gas entering through the substrate by analyzing the permeability of the calcium layer. It is a technique to do.
- the present invention has been made to solve the problems of the prior art, it is proposed to measure the substrate penetration rate of the outside air by manufacturing a component related to the measurement of calcium electrodes and resistance / permeability in the form of a cartridge (Cartridge).
- the present invention proposes an apparatus for improving the reliability and precision of measurement by cartridgeizing key components necessary for precision measurement.
- Reactive material cartridge for measuring the outdoor air permeability of the substrate according to the present embodiment for solving the technical problem is a reaction unit including a reaction material reacts in accordance with the contact with the outdoor air passing through the substrate; A cartridge body accommodating the reaction part, the cartridge body being detachable from the measuring part measuring a change according to contact with the outside air of the reaction material; And shielding means for shielding the cartridge body and peeled from the cartridge body for contact of the reactant with the outside air.
- the substrate may include a substrate cartridge body detachable from a supply pipe to which the outside air containing the moisture is supplied; And a substrate shielding means for shielding the substrate cartridge body, the substrate shielding means being peeled from the substrate cartridge body for contact between the substrate and the outside air or contact between the reaction material and the outside air passing through the substrate. It is preferable.
- an apparatus for measuring outside air permeability of a substrate may include: an outside air environment control chamber configured to control an environment of outside air supplied; A supply pipe for supplying the environmentally controlled outside air; A substrate mounting unit located in a first predetermined space of the supply pipe and mounted with a substrate for measuring penetration rate; And a cartridge mounting part mounted in a second predetermined space of the supply pipe and mounted with a reactant cartridge including a reactant reacting upon contact with external air that has passed through a substrate. It includes a measuring unit for measuring the change.
- the substrate may include a substrate cartridge body detachable from a supply pipe to which the outside air containing the moisture is supplied; And a substrate shielding means for shielding the substrate cartridge body, the substrate shielding means being peeled from the substrate cartridge body for contact between the substrate and the outside air or contact between the reactant and the outside air passing through the substrate.
- the substrate cartridge is preferably mounted with the substrate cartridge.
- the present invention by using a cartridgeized gas permeability measuring apparatus and method, it is possible to secure accurate and reliable data compared to the conventional technology, and thus it is easy to evaluate the reliability of a product required for a new application field such as a flexible AMOLED.
- the part in which the substrate is accommodated is also manufactured in the form of a cartridge, so that it is possible to easily work outside the apparatus when measuring a flexible substrate that is relatively free to mount and support, thereby reducing the uniformity error between the measurers.
- FIG. 1 is a view showing an external air permeability measuring apparatus of a substrate according to an embodiment of the present invention.
- FIG. 2 is a view showing a reactive material cartridge for measuring the air penetration rate of the substrate according to an embodiment of the present invention.
- FIG. 3 is a view showing a peeling example of the shielding means of the reactive material cartridge for measuring the outdoor air permeability of the substrate according to FIG.
- FIG. 4 is a view showing a reactive material cartridge for measuring the air penetration rate of the substrate according to an embodiment of the present invention.
- FIG. 5 is a view illustrating a reaction unit of a reactant cartridge for measuring the air permeability of the substrate according to FIG. 4.
- FIG. 6 is a view showing an example of mounting the substrate mounting portion of the substrate according to an embodiment of the present invention.
- FIG. 7 is a view showing a substrate cartridge for measuring the outdoor air penetration rate of the substrate according to an embodiment of the present invention.
- FIG. 1 is a view showing an external air permeability measuring apparatus of a substrate according to an embodiment of the present invention.
- the apparatus for measuring outside air permeability of a substrate includes an outside air environment control chamber 10, a supply tube 20, a substrate mounting unit 30, and a measurement unit 40.
- the outside air environment control chamber 10 is configured to form an environment for measuring the penetration rate of the substrate 200.
- the temperature of the current moisture is compared to the moisture that can absorb the saturation at each temperature as RH (Relative Humidity). Can be set according to.
- the outside air environment control chamber 10 supplies the outside air containing moisture according to the set environment.
- the apparatus for measuring the outside air permeability of the substrate according to the present embodiment may further include a shutter 15 at a connection portion between the outside environment control chamber 10 and the supply pipe 20. That is, the outside air according to the adjusted environment is opened to supply the supply pipe 20 by opening the shutter 15.
- the supply pipe 20 is formed between the outside air environment control chamber 10 and the measurement unit 40, and serves as a path through which outside air flows from the outside air environment control chamber 10 to the measurement unit 40. do.
- the inside of the supply pipe 20 is formed through a pump 5 in a predetermined low pressure state, preferably in a vacuum state, or filled with a gas having low chemical activity such as an inert gas, so as to improve the accuracy of the measurement value of the measuring device of penetration rate.
- a gas having low chemical activity such as an inert gas
- the substrate mounting unit 30 is located in the first predetermined space of the supply pipe 20 and is equipped with a substrate 200 for measuring penetration rate.
- the substrate 200 is a sample to be measured for the outdoor air permeability, and preferably the plastic substrate 200 of the display panel for measuring the moisture permeability or moisture permeability. That is, the plastic substrate 200 of the display panel may include a protective layer to prevent moisture from penetrating into the panel to secure the panel.
- the external air permeability measuring apparatus of the substrate 200 may include a protective layer. The moisture permeability of the substrate 200 is measured.
- the first predetermined space is a space between the outside air environment control chamber 10 and the measurement unit 40 to be described later, and the substrate 200 has a wide direction surface of the substrate 200 in the outside air environment control chamber 10. It is preferably formed in a direction orthogonal to the flow of outside air in the supply pipe 20 between the measuring unit 40 and. That is, outside air flowing through the supply pipe 20 comes into contact with the substrate 200 in the first predetermined space.
- the reactant is included in the reactant cartridge 100, and the reactant cartridge 100 is mounted to the cartridge mounting part 45 positioned in the second predetermined space of the supply pipe 20.
- the second predetermined space is an end of the supply pipe 20, and is preferably a connection part connecting the supply pipe 20 and the measurement part 40. Therefore, the cartridge mounting part 45 may be included in the measuring part 40 which measures a change in contact with the outside air.
- the reaction material was deposited on the substrate to determine the external air permeability of the substrate, and the penetration rate of the substrate was traced back through the change of the reaction material, but a separate vacuum was applied to deposit the reaction material on the substrate. Deposition equipment was needed.
- the reaction material instead of depositing the reaction material on the substrate, the reaction material is cartridgeized to be detachable to the outside air permeability measuring device, and thus, it is possible to secure accurate and reliable data compared to the conventional technology, thereby enabling new applications such as flexible AMOLED.
- the aim is to facilitate the reliability evaluation of products required in the field.
- the measurement unit 40 measures the change according to the contact of the reactant with the outside air.
- the measurement unit 40 directly measures the change of the reactant inside the reactant cartridge 100 mounted on the cartridge mounting unit 45 at the end of the supply pipe 20.
- the above-described pump 5 sets the environment of the space between the outside air condition chamber 10 of the supply pipe 20 and the first predetermined space and the space between the first predetermined space and the second predetermined space in the same manner. That is, it is preferable to fill with a low pressure state (preferably a vacuum state) of the same pressure or an inert gas of the same density.
- a low pressure state preferably a vacuum state
- FIG. 2 is a view showing the reactive material cartridge 100 for measuring the outdoor air penetration rate of the substrate according to an embodiment of the present invention.
- the reactive material cartridge 100 for measuring the outside air permeability of the substrate includes a reaction part 110, a cartridge body 120, and a shielding means 130.
- the shape of the reactant cartridge 100 may be variously determined.
- the reactant cartridge 100 is formed in the shape of a rectangular parallelepiped.
- the shape of the reactant cartridge 100 may vary depending on the measuring method of the measuring unit 40 or the shape of the cartridge mounting unit 45, and the elements such as the diameter of the supply pipe 20 and the size of the substrate to measure the penetration rate. Depending on the size can be determined.
- the reaction unit 110 of the reaction material cartridge 100 includes a reaction material that reacts according to contact with external air passing through the substrate.
- the reactant is illustrated as being formed of a reactant layer inside the cartridge.
- the measurement unit 40 may measure the optical transmittance according to contact with the outside of the reactant layer.
- the reactant material part 112b including the reactant material and the conductive part 112a including the conductive material may be formed to form a plurality of reactant material bars 112 spaced at predetermined intervals. May be When the reaction unit 110 is formed of the plurality of reactant bars 112, the measurement unit 40 may measure a change in electrical properties of the reactant bar 112 according to contact with the outside air. Further, the reactant bar 112 is preferably formed on the bottom surface of the cartridge body 120 made of a non-conductive material such as glass.
- the reactant bar 112 is formed of a conductive material at both ends, and the center portion is formed of a reactant material.
- Each of the conductive portions 112a at both ends is electrically connected to the measuring portion 40.
- the conductive portion 112a at the end may be made of or plated with a material that is difficult to oxidize, such as Au or Ag.
- the reactive material portion 112b formed of a highly oxidizing reactive material may be contacted with external air containing moisture. It causes a chemical reaction and thus a change in resistance or conductivity.
- the reactant of the reactant portion 112b is preferably calcium having a rapid reaction with water. That is, the measurement unit may measure the optical transmittance or resistance change described later through the calcium layer or the calcium bar.
- the apparatus for measuring the outside air permeability of the substrate is a device for securing the universality of the "calcium test" method described above. It aims to manufacture and supply parts related to measurement of permeability such as cartridge.
- the cartridge body 120 receives the reaction unit 110, and the cartridge body 120 is detachable from the measuring unit 40 measuring a change in response to contact of the reactant with the outside air.
- the reactant cartridge 100 is formed into a rectangular parallelepiped and is mounted on the measurement unit 40, and thus, the cartridge body 120 is preferably formed into a rectangular parallelepiped.
- the cartridge body 120 is preferably mounted such that the wide surface of the reaction unit 110 is orthogonal to the flow of outside air in the supply pipe 20 as in the above-described mounting of the substrate.
- the shielding means 130 shields the cartridge body 120 and is peeled off from the cartridge body 120 for contact of the reactant with the outside air. That is, in the present embodiment, the reactant cartridge 100 is mounted to the outside air permeability measuring device in a shielded state, and as described above, the environment of the spaces in both the first predetermined spaces in which the substrate is mounted by the pump 5 is the same. After the external air conditioning chamber 10 sets the humidity and temperature, the shielding means 130 is peeled off from the cartridge body 120. Furthermore, the cartridge body 120 is preferably in a vacuum state that satisfies a predetermined low pressure or filled with an inert gas.
- Peeling of the shielding means 130 may be formed in a glass to be removed from the cartridge body 120, or peeled off like a can lid.
- the measuring unit 40 measures the transmittance of the reactive material layer of the outside air, or the measuring unit 40 measures the transmittance of the reactive material layer of the outside air. That is, it can be measured through the optical transmittance measuring method or the resistance method for measuring the transmittance.
- the measurement unit 40 measures a change in transmittance of the reactant layer through a photo sensor or an image sensor. Furthermore, the resistance method analyzes the resistance change or the change in conductivity through the multi-point analysis through the plurality of reactant bars 112.
- FIG. 6 is a diagram illustrating an example of mounting the substrate mounting portion 30 of the substrate 200.
- the substrate 200 when the substrate 200 is mounted on the support parts 32 and 32 ′ formed in the substrate mounting part 30, no outside air passes through the space between the substrate 200 and the support parts 32 and 32 ′. Pass through 62, 62 '. This phenomenon may occur more and more as the display panel becomes more flexible since mounting and support of the substrate 200 to the substrate mounting unit 30 are not free compared with the relatively inflexible panel.
- the outside air passing through the substrate 200 without passing through the substrate 200 may react with the reactant. When contact occurs, an error occurs in the measurement of the air penetration rate of the substrate 200.
- a substrate cartridge accommodating a substrate may include a substrate cartridge body 210, a substrate 200, and substrate shielding means 220 and 230, similar to the reactive material cartridge 100 described above. It includes.
- the substrate cartridge body 210 may be configured to accommodate the substrate 200 and to be detachable from the supply pipe 20.
- the substrate cartridge body 210 may be mounted on the substrate mounting portion 30 formed in the first predetermined space.
- the substrate shielding means 220 and 230 shield the substrate cartridge body 210, and the substrate cartridge body for contact between the substrate 200 and the outside air or contact between the reactant and the outside air passing through the substrate 200. It is peeled off at 210.
- the substrate shielding means 220 and 230 are different from the reactant cartridge 100, and the outside air supplied from the environmental control chamber 10 contacts the substrate 200, and the outside air passing through the substrate 200 is discharged. It may be formed on both sides with respect to the surface.
- the environment of the spaces of both the first predetermined spaces in which the substrate 200 is mounted by the pump 5 is equalized, and then the outside air environment control chamber 10 sets the humidity and the temperature.
- the substrate shielding means 220 and 230 are peeled off from the substrate cartridge body 210.
- the reactant cartridge 100 and the substrate cartridge are mounted on the external air permeability measuring device of the substrate 200, and then made into a low pressure (preferably vacuum) state or a state filled with an inert gas (or dry N 2 atmosphere).
- the state at this time makes the spaces on both sides of the supply pipe 20 separated by the substrate cartridge in the state in which the shutter 15 of the outside environment control chamber 10 is closed to the same environment.
- the humidity and temperature environment of the outside air conditioning chamber 10 is set, and the substrate shielding means 220 and 230 of the substrate cartridge and the shielding means 130 of the reactant cartridge 100 are peeled off.
- the shutter 15 is opened and the outside air containing water is supplied through the supply pipe 20.
- the measurement unit 40 analyzes the resistance change of the reaction material when using the resistance method. That is, the average value of the resistance change of the plurality of reactant bars 112 is extracted. Alternatively, when the optical transmittance method is used, the change in transmittance of the reactant layer is recognized and analyzed by a photo sensor or an image sensor.
- reaction part reaction part
- 120 cartridge body
- 210 substrate cartridge body
- 220 substrate shielding means
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Abstract
Description
Claims (9)
- 기판을 투과한 외기와의 접촉에 따라 반응하는 반응 물질을 포함하는 반응부;상기 반응부를 수용하며, 상기 반응 물질의 상기 외기와의 접촉에 따른 변화를 측정하는 측정부에 탈착 가능한 카트리지 몸체; 및상기 카트리지 몸체를 차폐하며, 상기 반응 물질과 상기 외기의 접촉을 위하여 상기 카트리지 몸체에서 박리되는 차폐수단을 포함하는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 1 항에 있어서,상기 반응 물질과 접촉하는 외기는 상기 기판을 투과한 수분을 포함하는 외기인 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 1 항에 있어서,상기 반응부는 상기 반응 물질을 포함하는 반응 물질 층으로 형성되며,상기 측정부는 상기 외기의 반응 물질 층의 투과도를 측정하는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 1 항에 있어서,상기 반응부는 상기 반응 물질을 포함하는 반응 물질 부와 도전성 물질을 포함하는 도전부로 구성되어, 소정의 간격에 따라 이격되는 복수의 반응 물질 바로 형성되며,상기 측정부는 상기 반응 물질 바의 전기적 성질의 변화를 측정하는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 3 항에 있어서,상기 반응 물질 층은 칼슘을 포함하는 칼슘 층이고,상기 측정부는 상기 칼슘 층의 투과도를 측정하는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 4 항에 있어서,상기 반응 물질 바는 칼슘을 포함하는 칼슘 부와 상기 도전부로 구성되는 칼슘 바이고,상기 측정부는 상기 칼슘 바의 전도도 또는 저항의 변화를 측정하는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 제 1 항에 있어서 상기 기판은,상기 수분을 포함하는 상기 외기가 공급되는 공급관에 탈착 가능한 기판 카트리지 몸체;상기 기판 카트리지 몸체를 차폐하며, 상기 기판과 상기 외기의 접촉 또는 상기 반응 물질과 상기 기판을 투과한 상기 외기의 접촉을 위하여 상기 기판 카트리지 몸체에서 박리되는 기판 차폐수단을 포함하는 기판 카트리지에 수용되는 것을 특징으로 하는 기판의 외기 침투율 측정을 위한 반응 물질 카트리지.
- 공급되는 외기의 환경을 조절하는 외기 환경 조절 챔버;상기 환경 조절된 외기를 공급하는 공급관;상기 공급관의 제1 소정 공간에 위치하며 침투율 측정을 위한 기판이 장착되는 기판 장착부; 및상기 공급관의 제2 소정 공간에 위치하며 기판을 투과한 외기와의 접촉에 따라 반응하는 반응 물질을 포함하는 반응 물질 카트리지가 장착되는 카트리지 장착부를 구비하여 상기 반응 물질의 상기 외기와의 접촉에 따른 변화를 측정하는 측정부를 포함하는 것을 특징으로 하는 기판의 외기 침투율 측정 장치.
- 제 8 항에 있어서 상기 반응 물질 카트리지는,상기 기판을 투과한 외기와의 접촉에 따라 반응하는 반응 물질을 포함하는 반응부;상기 반응부를 수용하며, 상기 반응 물질의 상기 외기와의 접촉에 따른 변화를 측정하는 측정부에 탈착 가능한 카트리지 몸체; 및상기 카트리지 몸체를 차폐하며, 상기 반응 물질과 상기 외기의 접촉을 위하여 상기 카트리지 몸체에서 박리되는 차폐수단을 포함하는 것을 특징으로 하는 기판의 외기 침투율 측정 장치.
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US14/893,554 US20160109397A1 (en) | 2013-05-30 | 2014-05-29 | Reaction material cartridge for measuring outdoor air penetration rate and device for measuring outdoor air penetration rate of substrate, including same |
JP2016516449A JP2016522902A (ja) | 2013-05-30 | 2014-05-29 | 外気浸透率測定のための反応物質カートリッジ及びこれを含む基板の外気浸透率測定装置 |
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KR1020130061787A KR101469533B1 (ko) | 2013-05-30 | 2013-05-30 | 외기 침투율 측정을 위한 반응 물질 카트리지 및 이를 포함하는 기판의 외기 침투율 측정 장치 |
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JP2002184767A (ja) * | 2000-10-03 | 2002-06-28 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 内部の水分レベルを制御するための半導体処理装置および方法 |
JP2004531711A (ja) * | 2001-03-29 | 2004-10-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 浸透率の測定及び検査方法並びに測定及び検査装置 |
JP2008286701A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 透湿度評価装置および透湿度評価方法 |
JP2008286702A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 透湿度評価装置および透湿度評価方法 |
KR20130022068A (ko) * | 2011-08-24 | 2013-03-06 | 고려대학교 산학협력단 | 유연 전자 소자 보호층의 가스 침투율 측정 장치 및 이를 이용한 가스 침투율 측정 방법 |
-
2013
- 2013-05-30 KR KR1020130061787A patent/KR101469533B1/ko not_active IP Right Cessation
-
2014
- 2014-05-29 WO PCT/KR2014/004802 patent/WO2014193175A1/ko active Application Filing
- 2014-05-29 JP JP2016516449A patent/JP2016522902A/ja active Pending
- 2014-05-29 US US14/893,554 patent/US20160109397A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002184767A (ja) * | 2000-10-03 | 2002-06-28 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 内部の水分レベルを制御するための半導体処理装置および方法 |
JP2004531711A (ja) * | 2001-03-29 | 2004-10-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 浸透率の測定及び検査方法並びに測定及び検査装置 |
JP2008286701A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 透湿度評価装置および透湿度評価方法 |
JP2008286702A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 透湿度評価装置および透湿度評価方法 |
KR20130022068A (ko) * | 2011-08-24 | 2013-03-06 | 고려대학교 산학협력단 | 유연 전자 소자 보호층의 가스 침투율 측정 장치 및 이를 이용한 가스 침투율 측정 방법 |
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US20160109397A1 (en) | 2016-04-21 |
KR101469533B1 (ko) | 2014-12-05 |
JP2016522902A (ja) | 2016-08-04 |
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