WO2014162855A1 - Uneven film thickness inspection device - Google Patents

Uneven film thickness inspection device Download PDF

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Publication number
WO2014162855A1
WO2014162855A1 PCT/JP2014/057065 JP2014057065W WO2014162855A1 WO 2014162855 A1 WO2014162855 A1 WO 2014162855A1 JP 2014057065 W JP2014057065 W JP 2014057065W WO 2014162855 A1 WO2014162855 A1 WO 2014162855A1
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WO
WIPO (PCT)
Prior art keywords
diffusion plate
inspection
thickness
plate
led chips
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Application number
PCT/JP2014/057065
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French (fr)
Japanese (ja)
Inventor
恭史 小山
友施 吉田
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東レエンジニアリング株式会社
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Publication of WO2014162855A1 publication Critical patent/WO2014162855A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Definitions

  • the present invention relates to an apparatus for inspecting the film thickness unevenness of a resin material applied on a transparent substrate.
  • Color pixels are formed by coating on a glass substrate or film sheet serving as a transparent base material. Furthermore, between these color pixels, in order to prevent color bleeding and reduce leakage light, a layer of a lattice pattern (so-called BM layer) made of metal or a black resin material (that is, resin black) called a black matrix. ) Is formed by coating. In order to form this BM layer, a uniform material for the BM layer is once applied to the entire surface of the base material and patterned by a photolithographic method.
  • BM layer a lattice pattern
  • a black resin material that is, resin black
  • an inspection that is, an uneven film thickness inspection
  • an inspection is performed to determine whether the film thickness of the BM layer is uniform or uniform (for example, Patent Document 1).
  • This film thickness nonuniformity inspection apparatus irradiates illumination light from the lower side to a substrate after coating formation to be inspected, and takes an image with a camera disposed at a position facing the illumination light across the substrate. Thickness unevenness inspection is performed (so-called transmission illumination method). Further, the illumination light uses white illumination such as a fluorescent lamp or halogen illumination, and a band pass filter that transmits light of a specific wavelength, and the film thickness unevenness of the color film (R, G, B) to be inspected. The unevenness of the film thickness is inspected by determining the difference in light intensity caused by the above.
  • Patent Document 2 a technique for reducing luminance unevenness using two diffusion plates is disclosed (for example, Patent Document 2).
  • the illumination such as a fluorescent lamp used in the conventional inspection apparatus has a uniform in-plane brightness, and is suitable for inspecting the film thickness unevenness. However, since light of multiple wavelength components is emitted and light of wavelength components unnecessary for inspection is blocked by the filter, energy efficiency is not good.
  • an object of the present invention is to provide a film thickness nonuniformity inspection apparatus with high energy efficiency while ensuring a light amount effective for inspection.
  • one embodiment of the present invention provides: A device for inspecting the film thickness unevenness of the resin material of the inspection object in which the resin material is applied on the transparent substrate, An illumination unit that emits illumination light for inspection toward the inspection object; An imaging unit disposed at a position facing the illumination unit across the inspection object; The illumination unit is A plurality of LED chips, a first diffusion plate, and a second diffusion plate; An air layer is provided between the first diffusion plate and the second diffusion plate, The light emitted from the plurality of LED chips passes through the first diffusion plate, the air layer, and the second diffusion plate in this order, and is irradiated onto the inspection object.
  • the thickness of the first diffusion plate may be set larger than the thickness of the second diffusion plate.
  • At least one of the first diffusion plate or the second diffusion plate an actuator mechanism for moving in the thickness direction that can adjust the setting position of the first diffusion plate or the second diffusion plate in the thickness direction;
  • An inspection condition registration unit for registering inspection conditions;
  • the setting position of the actuator mechanism for moving in the thickness direction may be registered for each inspection type.
  • At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
  • a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
  • An inspection condition registration unit for registering inspection conditions;
  • the setting position of the plate thickness changing actuator mechanism may be registered for each inspection type.
  • the plurality of LED chips may be a plurality of infrared LED chips that emit light of infrared wavelengths.
  • the plurality of LED chips include a plurality of red LED chips that emit light of red wavelength and a plurality of infrared LED chips that emit light of infrared wavelength,
  • the red LED chips and the infrared LED chips may be alternately arranged in one row.
  • the plurality of LED chips include a plurality of red LED chips that emit light of red wavelength and a plurality of infrared LED chips that emit light of infrared wavelength,
  • the red LED chip and the infrared LED chip may be arranged adjacent to each other in one row.
  • the film thickness nonuniformity inspection apparatus 1 is an apparatus for inspecting the film thickness nonuniformity of the resin material F, with a transparent material K coated with the resin material F as an inspection object W.
  • the horizontal direction is the X and Y directions
  • the conveyance direction of the inspection object W is the X direction
  • the width direction orthogonal to the conveyance direction of the inspection object W is the Y direction.
  • the upward direction of gravity perpendicular to the X and Y directions is defined as the Z direction (hereinafter the same in each figure).
  • FIG. 1 is a side view showing an example of a form embodying the present invention.
  • FIG. 2 is a front view showing an example of a form embodying the present invention.
  • the film thickness unevenness inspection apparatus 1 includes an illumination unit 2 and an imaging unit 3.
  • the inspection object W exemplified here exemplifies a non-acrylic glass for a liquid crystal color filter as the transparent material K, and exemplifies a black resin material (so-called resin black) as the resin material F.
  • resin black a black resin in which a black pigment is dispersed and blended, and a portion exposed by pattern exposure with ultraviolet rays or the like is cured (so-called UV curable acrylic resin) or a photoresist.
  • UV curable acrylic resin a non-photosensitive polyimide resin that needs to be subjected to an etching treatment after the pattern exposure using the.
  • the resin material F is applied to almost the entire surface (excluding a few mm around the periphery necessary for handling) on the upper surface of the transparent material K of the inspection object W.
  • the illumination unit 2 irradiates the inspection illumination light toward the inspection object W.
  • the illumination unit 2 includes an illumination unit 20, a first diffusion plate 21, and a second diffusion plate 22.
  • the illumination unit 20 includes a box-shaped casing that has an opening on the top and is long in the Y direction, and a plurality of LED chips 20c arranged inside the casing.
  • the LED unit 20 is irradiated with light emitted from the plurality of LED chips 20c as inspection illumination light upward from the opening of the box. More specifically, the plurality of LED chips 20 c are arranged in the Y direction in the illumination unit 20.
  • the first diffusion plate 21 is intended to make uniform while transmitting the light emitted from the plurality of LED chips 20c. However, in this state, the state is not completely uniformed.
  • the second diffuser plate 22 is disposed at a predetermined interval from the first diffuser plate 21, with an air layer therebetween.
  • the second diffusion plate 22 is intended to further uniformize the light transmitted from the plurality of LED chips 20c and transmitted through the first diffusion plate 21.
  • the first diffusion plate 21 and the second diffusion plate 22 are white translucent plastic resin having a thickness of 2.5 mm, and the distance (air layer) between the first diffusion plate 21 and the second diffusion plate 22. Is set to 10 mm. Further, the first diffusion plate 21 and the second diffusion plate 22 are subjected to ground glass-like unevenness treatment on the surface, and further smoothed as necessary, so that the incident light is diffused and emitted ( So-called diffusibility).
  • the imaging unit 3 is disposed at a position facing the illumination unit with the inspection target W interposed therebetween, and images the imaging region R set on the inspection target W.
  • the imaging unit 3 includes an imaging camera 31 including an imaging element 30 and a lens 32.
  • the imaging camera 31 images the surface of the resin material F of the observation object W, and the inspection illumination light irradiated from the illumination unit 2 passes through the resin material F of the observation object W. It captures the intensity of light.
  • the imaging camera 31 is configured to observe the range of the angle of view indicated by the broken line 33.
  • the lens 32 is for imaging the imaging target of the imaging region R on the imaging device 30 of the imaging camera 31.
  • the lens 32 can be exemplified by a lens configured using a convex lens, a concave lens, or the like, and the number and setting position are determined as appropriate in accordance with the angle of view and imaging characteristics.
  • the imaging unit 3 may be configured by one set or a plurality of sets. That is, the number of observation units 3 may be appropriately selected and arranged in consideration of the angle of view of the imaging camera 31.
  • FIG. 3 is a luminance signal image diagram in one example embodying the present invention.
  • the horizontal axis indicates the imaging position P
  • the vertical axis indicates the luminance B.
  • FIG. 3 shows the luminance signal SL0 in the conventional form (when there is one diffuser plate with a thickness of 5 mm) and the form according to the present invention (two diffuser plates with a thickness of 2.5 mm and an air layer of 10 mm).
  • Luminance signal SL1 is shown.
  • the film thickness unevenness inspection apparatus 1 has such a configuration, even if the illumination unit 30 using a plurality of LED chips C is used, the two diffusion plates 26 and 27 and the air between them are provided.
  • the layer can improve luminance unevenness while preventing a decrease in light amount.
  • the inspection object W is exemplified by the resin material F applied on the transparent material K.
  • the resin material F1 there may be a case where brightness unevenness is included even if two diffusion plates are configured as in the above-described embodiment (hereinafter referred to as the first embodiment).
  • the thickness of the first diffusion plate is set to be larger than the thickness of the second diffusion plate.
  • the first diffusion plate 21 has a thickness of 3 mm
  • the second diffusion plate 22 has a thickness of 2 mm
  • the distance (air layer) is set to 10 mm.
  • the total thickness of the two diffusion plates 21 and 22 is the same as in the first embodiment.
  • the film thickness nonuniformity inspection apparatus to which the second mode is applied is configured such that the thickness of the first diffusion plate 21 close to the LED chip C is set to be thicker than the thickness of the second diffusion plate 22. In the region R, it is possible to improve the luminance unevenness while preventing the light amount from decreasing.
  • the position of the diffusion plate is set as appropriate, and may be appropriately adjusted or replaced according to the type to be inspected.
  • the film thickness unevenness inspection apparatus 1b further includes 1) only the first diffusion plate, and 2) the second diffusion plate. Only, 3) both the first diffusion plate and the second diffusion plate, and any one of 1) to 3) including a thickness direction moving actuator mechanism capable of adjusting the position of the diffusion plate in the plate thickness direction And an inspection condition registration unit for registering the inspection conditions.
  • FIG. 4 is a system configuration diagram showing a third example of a form embodying the present invention, and shows a specific system configuration of the film thickness nonuniformity inspection apparatus 1b.
  • the film thickness unevenness inspection apparatus 1b according to the present invention includes an illumination unit 2b, an imaging unit 3, an inspection condition registration unit 6, and a control unit 9.
  • the illumination unit 2b includes a first diffusion plate 21, a second diffusion plate 22, and an actuator mechanism for moving in the thickness direction.
  • the actuator mechanism for moving in the thickness direction adjusts the setting position of at least one side of the first diffusion plate 21 or the second diffusion plate 22 in the thickness direction of the diffusion plate.
  • a second thickness direction moving actuator mechanism 22d for adjusting the position is provided.
  • the inspection condition registration unit 6 is for registering the setting positions of the first and second thickness direction moving actuator mechanisms 21d and 22d for each inspection type.
  • the control unit 9 is connected to the inspection condition registration unit 6 in which the inspection conditions are registered, and is used to appropriately read the inspection conditions registered in advance in the inspection condition registration unit 6.
  • the controller 9 is connected to the first and second thickness direction moving actuator mechanisms 21d and 22d, and outputs control signals to these actuator mechanisms based on the inspection conditions. Further, the control unit 9 is connected to a lighting drive circuit 20d that controls lighting / extinguishing of the LED chip 20C in accordance with the timing at which the image capturing unit 3 acquires an image, and controls the amount of emitted light.
  • control unit 9 may be configured to connect to the image processing unit 4 that acquires an image acquired from the imaging unit 3 and performs image processing.
  • the thickness direction moving actuator mechanism may include a first thickness direction moving actuator mechanism 21d and a second thickness direction moving actuator mechanism 22d. Either one may be provided.
  • the film thickness nonuniformity inspection apparatus 1b Since the film thickness nonuniformity inspection apparatus 1b has such a configuration, even when the inspection object covers a wide variety, the inspection conditions registered in advance are read out appropriately, and the first diffusion plate 21 and the second diffusion plate 21 are read out.
  • the position of the diffusion plate 22 in the Z direction can be automatically set to an optimum position. Therefore, luminance unevenness can be improved according to the type to be inspected, and further, by combining with the second mode, the synergistic effect of improving luminance unevenness is increased. Further, manual adjustment and setup change are not necessary, and product switching can be performed quickly, and position reproducibility is improved compared to manual adjustment, which is preferable.
  • the following structure may be added to the structure of the film thickness unevenness inspection apparatus according to the first and second aspects described above.
  • the configuration includes 1) only the first diffusion plate, 2) only the second diffusion plate, 3) both the first diffusion plate and the second diffusion plate, and the plate of the diffusion plate for any one of 1) to 3).
  • the diffusion plate has a cross-sectional shape that increases continuously or stepwise, and the diffusion plate includes a plate thickness changing actuator mechanism that can adjust the setting position in the direction in which the thickness of the diffusion plate changes, and And an inspection condition registration unit for registering inspection conditions.
  • FIG. 5 is a front view showing a fourth example of the embodiment embodying the present invention, and shows a specific configuration of the illumination unit 2c of the film thickness unevenness inspection apparatus 1c according to the present invention.
  • FIG. 6 is a system configuration diagram showing a third example of the embodiment embodying the present invention, and shows a specific system configuration of the film thickness nonuniformity inspection apparatus 1c.
  • a film thickness unevenness inspection apparatus 1c according to the present invention includes an illumination unit 2c, an imaging unit 3, an inspection condition registration unit 6, and a control unit 9.
  • the illumination unit 2c includes the illumination unit 20, a first diffusion plate 26, a second diffusion plate 27, a first plate thickness changing actuator mechanism 26d, and a second plate thickness changing actuator mechanism 27d. Has been.
  • the first diffusion plate 26 has a cross-sectional shape in which the plate thickness changes stepwise (so-called step type), and is attached to the first plate thickness changing actuator mechanism 26d.
  • the first plate thickness changing actuator mechanism 26d adjusts the setting position of the first diffusion plate 26, and changes the plate thickness of the portion of the first diffusion plate 26 through which the light emitted from the LED chip 20C passes. belongs to.
  • the second diffusion plate 27 has a cross-sectional shape (so-called wedge shape) in which the plate thickness continuously changes, and is attached to the second plate thickness changing actuator mechanism 27d.
  • the second plate thickness changing actuator mechanism 27d adjusts the setting position of the second diffusion plate 27, and changes the plate thickness of the second diffusion plate 27 through which the light emitted from the LED chip 20C passes. belongs to.
  • the inspection condition registration unit 6 is for registering the setting positions of the first and second plate thickness changing actuator mechanisms 26d and 27d for each inspection type.
  • the control unit 9 is connected to the inspection condition registration unit 6 in which the inspection conditions are registered, and is used to appropriately read the inspection conditions registered in advance in the inspection condition registration unit 6.
  • the control unit 9 is connected to the first and second plate thickness changing actuator mechanisms 26d and 27d, and outputs a control signal to these actuator mechanisms based on the inspection conditions. Further, the control unit 9 is connected to a lighting drive circuit 20d that controls lighting / extinguishing of the LED chip 20C in accordance with the timing at which the image capturing unit 3 acquires an image, and controls the amount of emitted light.
  • control unit 9 may be configured to connect to the image processing unit 4 that acquires an image acquired from the imaging unit 3 and performs image processing.
  • the film thickness nonuniformity inspection apparatus 1c has such a configuration, even when the inspection object covers a wide variety, the inspection conditions registered in advance are read as appropriate, and the first diffusion plate 26 and the second diffusion plate 26 are read out.
  • the position of the diffusion plate 27 in the X direction can be automatically set to an optimum position. Therefore, the luminance unevenness can be improved according to the type to be inspected, and further, by combining with the second mode and the third mode, the synergistic effect of improving the luminance unevenness is increased. Further, manual adjustment and setup change are not necessary, and product switching can be performed quickly, and position reproducibility is improved compared to manual adjustment, which is preferable.
  • the film thickness nonuniformity inspection apparatus includes the illumination units 2, 2b, and 2c described above as illumination units having the following configuration when the object of film thickness nonuniformity inspection is a black resin material (so-called resin black). It may be 2d. That is, white LEDs or red LEDs can be used as the plurality of LED chips used for the inspection, but it is more preferable that the plurality of LED chips be configured with a plurality of infrared LED chips that emit light of infrared wavelengths.
  • the inspection when inspecting the film thickness nonuniformity with respect to the black resin material with a high visible light shading rate, the inspection can be performed using illumination light in the infrared wavelength region with higher transmittance. it can.
  • the image pickup device 30 used in the image pickup camera 31 can be a general-purpose product having infrared light reception sensitivity with visible light as the main light reception sensitivity. Or when using the general purpose goods with which the infrared cut filter is attached as the image pick-up element 30, you may remove and use the infrared cut filter.
  • the film thickness unevenness inspection apparatus when the inspection target of the film thickness unevenness is a black resin material (resin black), conventionally, a fluorescent lamp or halogen illumination is used as illumination light. Light emitted from the emitted infrared LED can be used as illumination light. Therefore, it can be said that the film thickness unevenness inspection apparatus according to the present invention is more energy efficient than the conventional embodiment. And by combining with any of the first to fourth aspects described above, the film thickness nonuniformity inspection apparatus according to the present invention can achieve a uniform luminance while ensuring a light amount effective for inspection, It can be said that it is preferable.
  • the illumination described above may be the illumination unit 2e having the following configuration.
  • FIG. 7 is a front view showing a sixth example of the embodiment embodying the present invention.
  • the illumination unit 20e of the illumination unit 2e includes, as a plurality of LED chips, a plurality of infrared LED chips 20ir that emit light of infrared wavelengths and a plurality of red LED chips 20r that emit light of red wavelengths. They are arranged alternately in a row in the Y direction.
  • a black resin material resin black
  • a plurality of infrared LED chips 20ir are used as illumination light.
  • a green resin material (G resist) or a blue resin material (B resist) a plurality of red LED chips 20r are used as illumination light.
  • the plurality of infrared LED chips 20ir and the plurality of red LED chips 20r are arranged at the same position in the X direction.
  • the illumination light emitted from the illumination unit 20e even when the inspection target of the film thickness unevenness is a mixture of a black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist).
  • the main optical axis and the imaging camera 31 do not shift in the X direction. Therefore, it is not necessary to adjust the relative position between the illumination unit 20e and the imaging camera 31, or to change the setup, which is preferable.
  • FIG. 8 is a luminance signal image diagram in the sixth example of the embodiment embodying the present invention.
  • the horizontal axis indicates the imaging position P, and the vertical axis indicates the luminance B.
  • the illumination unit 2e having the above-described form since the interval between the plurality of LED chips that emit light simultaneously at the time of inspection is widened, unevenness in luminance is likely to occur as indicated by the luminance signal SL6.
  • the luminance unevenness is improved as shown in the luminance signal SL7. Therefore, it can be said that it is preferable because the luminance can be made uniform while ensuring the amount of light effective for the inspection. Further, by combining with any of the second to fourth aspects described above, there is a synergistic effect of improving luminance unevenness.
  • a non-uniform film thickness inspection object includes a high concentration black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist), in the film thickness unevenness inspection apparatus according to the present invention
  • the illuminating units 2 to 2d described above may be an illuminating unit 2f having the following configuration.
  • FIG. 9 is a front view showing a seventh example of the embodiment embodying the present invention.
  • the illumination unit 20f of the illumination unit 2f includes a plurality of infrared LED chips 20ir that emit light having an infrared wavelength, and a plurality of red LED chips 20r that emit light having a red wavelength. They are arranged adjacent to each other in one direction in the direction. More specifically, the infrared LED chip 20ir and the red LED chip 20r are not in a state of being alternately arranged one by one, but are arranged in an arrangement of two / one alternate, two alternates, or the like. Can be illustrated.
  • a plurality of infrared LED chips 20ir are used as illumination light.
  • a green resin material (G resist) or a blue resin material (B resist) a plurality of red LED chips 20r are used as illumination light.
  • the plurality of infrared LED chips 20ir and the plurality of red LED chips 20r are arranged at the same position in the X direction.
  • the inspection target of the film thickness unevenness is a mixture of a high concentration black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist), it is emitted from the lighting unit 20e.
  • the main optical axis of the illumination light and the imaging camera 31 do not shift in the X direction. Therefore, it is not necessary to adjust the relative position between the illumination unit 20e and the imaging camera 31, or to change the setup, which is preferable.
  • the LED chip is arranged in this way, the interval between the LEDs that emit light is further widened, so that uneven brightness is more likely to occur.
  • the luminance unevenness is improved by combining with the first described above. Therefore, it can be said that it is preferable because the luminance can be made uniform while ensuring the amount of light effective for the inspection. Further, by combining with any of the second to fourth aspects described above, there is a synergistic effect of improving luminance unevenness.

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Abstract

The purpose of the present invention is to provide a transparent substrate holding device that can quickly release the held state of a transparent substrate, and do so reliably, without causing displacement of the transparent substrate during observation and inspection. More specifically, provided is a transparent substrate holding device provided with a substrate mounting stand for mounting the transparent substrate, and a substrate suction unit for suctioning the transparent substrate with negative pressure, wherein the present invention is characterized by the following: the substrate mounting stand has a surface which comes into contact with the transparent substrate and is formed of a flat and transparent material, and the stand has an opening at at least a portion thereof inward from the outer circumferential part of the transparent substrate when the substrate is mounted; and the substrate suction unit is connected to a negative pressure generating means and is provided at a portion of the stand that is inward from the outer circumferential part of the transparent substrate when the substrate is mounted and that is in contact with the transparent substrate.

Description

膜厚むら検査装置Film thickness unevenness inspection device
　透明基材上に塗布された樹脂材料の膜厚むらを検査する装置に関する。 The present invention relates to an apparatus for inspecting the film thickness unevenness of a resin material applied on a transparent substrate.
　透明基材となるガラス基板やフィルムシート上には、カラー画素（Ｒ，Ｇ，Ｂ）が塗布形成されている。さらに、これらカラー画素同士の間には、色にじみ防止・漏れ光低減のために、ブラックマトリクスと呼ばれる、金属又は黒色樹脂材料（つまり、樹脂ブラック）からなる格子状パターンの層（いわゆる、ＢＭ層）が塗布形成されている。このＢＭ層を形成するために、一度当該基材上の全面に均一なＢＭ層用の材料が塗布され、フォトリソ法によりパターン化されて形成されている。 Color pixels (R, G, B) are formed by coating on a glass substrate or film sheet serving as a transparent base material. Furthermore, between these color pixels, in order to prevent color bleeding and reduce leakage light, a layer of a lattice pattern (so-called BM layer) made of metal or a black resin material (that is, resin black) called a black matrix. ) Is formed by coating. In order to form this BM layer, a uniform material for the BM layer is once applied to the entire surface of the base material and patterned by a photolithographic method.
　このＢＭ層の塗布形成直後、当該ＢＭ層の膜厚にむらが無いか、均一であるか、という検査（つまり、膜厚むら検査）が行われている（例えば、特許文献１）。 Immediately after the formation of the BM layer, an inspection (that is, an uneven film thickness inspection) is performed to determine whether the film thickness of the BM layer is uniform or uniform (for example, Patent Document 1).
　この膜厚むら検査装置は、検査対象となる塗布形成後の基板に下方側から照明光を照射し、当該基板を挟んで当該照明光と対向する位置に配置されたカメラにて撮像し、膜厚むら検査を行っている（いわゆる透過照明方式）。さらに、当該照明光は、蛍光灯やハロゲン照明などの白色照明と、特定の波長の光を通過させるバンドパスフィルタとを用い、検査対象となるカラー皮膜（Ｒ，Ｇ，Ｂ）の膜厚むらに起因して発生する光の濃淡差を判定することで、膜厚むらの検査を行っている。 This film thickness nonuniformity inspection apparatus irradiates illumination light from the lower side to a substrate after coating formation to be inspected, and takes an image with a camera disposed at a position facing the illumination light across the substrate. Thickness unevenness inspection is performed (so-called transmission illumination method). Further, the illumination light uses white illumination such as a fluorescent lamp or halogen illumination, and a band pass filter that transmits light of a specific wavelength, and the film thickness unevenness of the color film (R, G, B) to be inspected. The unevenness of the film thickness is inspected by determining the difference in light intensity caused by the above.
　また、ＬＥＤを用いた面光源に関して、２枚の拡散板を用いて輝度むらを低減する技術が開示されている（例えば、特許文献２）。 In addition, regarding a surface light source using LEDs, a technique for reducing luminance unevenness using two diffusion plates is disclosed (for example, Patent Document 2).
特開２００４－２１９１０８号公報JP 2004-219108 A 特開２０００－１３３００６号公報JP 2000-133006 A
　従来の検査装置に用いられていた蛍光灯などの照明は、面内輝度が均一であり、膜厚むらを検査するのに適していた。しかし、多波長成分の光が発した後にフィルターで検査に不要な波長成分の光を遮へいしているため、エネルギー効率が良くない。 The illumination such as a fluorescent lamp used in the conventional inspection apparatus has a uniform in-plane brightness, and is suitable for inspecting the film thickness unevenness. However, since light of multiple wavelength components is emitted and light of wavelength components unnecessary for inspection is blocked by the filter, energy efficiency is not good.
　一方、２枚の拡散板を使用するだけでは、多品種の検査対象に対して共通する検査条件（つまり、拡散板の間隔や厚み）を設定することが難しく、検査対象となる品種毎に最適な間隔や厚みを、再設定する必要があった。 On the other hand, using only two diffusers makes it difficult to set common inspection conditions (that is, the distance and thickness of the diffusers) for many types of inspection objects, and is optimal for each type of inspection object. It was necessary to reset the proper interval and thickness.
　そこで本発明は、検査に有効な光量を確保しつつ、エネルギー効率の良い膜厚むら検査装置を提供することを目的とする。 Therefore, an object of the present invention is to provide a film thickness nonuniformity inspection apparatus with high energy efficiency while ensuring a light amount effective for inspection.
　以上の課題を解決するために、本発明の一態様は、
　透明基板上に樹脂材料が塗布された検査対象物の当該樹脂材料の膜厚むらを検査する装置であって、
前記検査対象物に向けて検査用照明光を照射する照明部と、
前記検査対象物を挟んで前記照明部と対向する位置に配置された撮像部とを備え、
　前記照明部は、
複数のＬＥＤチップと、第１拡散板と、第２拡散板とを備え、
第１拡散板と第２拡散板との間には空気層が設けられており、
前記複数のＬＥＤチップから発せられた光が、前記第１拡散板、前記空気層、前記第２拡散板の順に通過して、前記検査対象物に照射される構成とする。 In order to solve the above problems, one embodiment of the present invention provides:
A device for inspecting the film thickness unevenness of the resin material of the inspection object in which the resin material is applied on the transparent substrate,
An illumination unit that emits illumination light for inspection toward the inspection object;
An imaging unit disposed at a position facing the illumination unit across the inspection object;
The illumination unit is
A plurality of LED chips, a first diffusion plate, and a second diffusion plate;
An air layer is provided between the first diffusion plate and the second diffusion plate,
The light emitted from the plurality of LED chips passes through the first diffusion plate, the air layer, and the second diffusion plate in this order, and is irradiated onto the inspection object.
　このため、光量低下を防ぎつつ、輝度むらの改善を図ることができる。 For this reason, it is possible to improve the luminance unevenness while preventing the light quantity from decreasing.
　また、上記の態様において、
　前記第１拡散板の厚みが、前記第２拡散板の厚みよりも厚く設定されていても良い。 In the above aspect,
The thickness of the first diffusion plate may be set larger than the thickness of the second diffusion plate.
　また、上記の態様において、
　前記第１拡散板又は前記第２拡散板の少なくとも一方には、当該第１拡散板又は第２拡散板を厚み方向に設定位置を調整できる、厚み方向移動用アクチュエータ機構と、
検査条件を登録する検査条件登録部とを備え、
　検査条件登録部には、検査品種毎に前記厚み方向移動用アクチュエータ機構の設定位置が登録されていても良い。 In the above aspect,
At least one of the first diffusion plate or the second diffusion plate, an actuator mechanism for moving in the thickness direction that can adjust the setting position of the first diffusion plate or the second diffusion plate in the thickness direction;
An inspection condition registration unit for registering inspection conditions;
In the inspection condition registration unit, the setting position of the actuator mechanism for moving in the thickness direction may be registered for each inspection type.
　また、上記の態様において、
　前記第１拡散板又は前記第２拡散板の少なくとも一方は、板厚が連続的又は段階的に厚くなる断面形状をしており、
　当該第１拡散板又は第２拡散板には、当該第１拡散板又は第２拡散板の前記板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構と、
検査条件を登録する検査条件登録部とを備え、
　検査条件登録部には、検査品種毎に前記板厚変更用アクチュエータ機構の設定位置が登録されていても良い。 In the above aspect,
At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
In the first diffusion plate or the second diffusion plate, a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
An inspection condition registration unit for registering inspection conditions;
In the inspection condition registration unit, the setting position of the plate thickness changing actuator mechanism may be registered for each inspection type.
　また、上記の態様において、
　前記複数のＬＥＤチップは、赤外波長の光を発する複数の赤外ＬＥＤチップであっても良い。 In the above aspect,
The plurality of LED chips may be a plurality of infrared LED chips that emit light of infrared wavelengths.
　また、上記の態様において、
　前記複数のＬＥＤチップは、赤色波長の光を発する複数の赤色ＬＥＤチップと、赤外波長の光を発する複数の赤外ＬＥＤチップを備え、
　前記赤色ＬＥＤチップと前記赤外ＬＥＤチップとが、１列上に交互に配置されていても良い。 In the above aspect,
The plurality of LED chips include a plurality of red LED chips that emit light of red wavelength and a plurality of infrared LED chips that emit light of infrared wavelength,
The red LED chips and the infrared LED chips may be alternately arranged in one row.
　また、上記の態様において、
　前記複数のＬＥＤチップは、赤色波長の光を発する複数の赤色ＬＥＤチップと、赤外波長の光を発する複数の赤外ＬＥＤチップを備え、
　前記赤色ＬＥＤチップと前記赤外ＬＥＤチップとが、１列上に隣り合って配置されていても良い。 In the above aspect,
The plurality of LED chips include a plurality of red LED chips that emit light of red wavelength and a plurality of infrared LED chips that emit light of infrared wavelength,
The red LED chip and the infrared LED chip may be arranged adjacent to each other in one row.
　検査に有効な光量を確保しつつ、エネルギー効率が良い膜厚むら検査装置を提供できる。 It is possible to provide a film thickness nonuniformity inspection apparatus with good energy efficiency while ensuring an effective light quantity for inspection.
本発明を具現化する形態の一例を示す側面図である。It is a side view which shows an example of the form which embodies this invention. 本発明を具現化する形態の一例を示す正面図である。It is a front view which shows an example of the form which embodies this invention. 本発明を具現化する形態の一例における輝度信号イメージ図である。It is a luminance signal image figure in an example of the form which embodies the present invention. 本発明を具現化する形態の第３の例を示すシステム構成図である。It is a system block diagram which shows the 3rd example of the form which embodies this invention. 本発明を具現化する形態の第３の例における輝度信号イメージ図である。It is a luminance signal image figure in the 3rd example of the form which embodies the present invention. 本発明を具現化する形態の第４の例を示す正面図である。It is a front view which shows the 4th example of the form which embodies this invention. 本発明を具現化する形態の第６の例を示す正面図である。It is a front view which shows the 6th example of the form which embodies this invention. 本発明を具現化する形態の第６の例における輝度信号イメージ図である。It is a luminance signal image figure in the 6th example of the form which embodies the present invention. 本発明を具現化する形態の第７の例を示す正面図である。It is a front view which shows the 7th example of the form which embodies this invention.
　以下、本発明に係る膜厚むら検査装置１について、図を用いながら説明をする。
膜厚むら検査装置１は、透明材料Ｋ上に樹脂材料Ｆが塗布されたものを検査対象物Ｗとし、当該樹脂材料Ｆの膜厚むらを検査するものである。
図中、水平方向をＸ，Ｙ方向とし、検査対象物Ｗの搬送方向をＸ方向、検査対象物Ｗの搬送方向と直交する幅方向をＹ方向とする。また、Ｘ，Ｙ方向に直交する重力上方向をＺ方向とする（以下、各図において同じ）。 Hereinafter, the film thickness unevenness inspection apparatus 1 according to the present invention will be described with reference to the drawings.
The film thickness nonuniformity inspection apparatus 1 is an apparatus for inspecting the film thickness nonuniformity of the resin material F, with a transparent material K coated with the resin material F as an inspection object W.
In the figure, the horizontal direction is the X and Y directions, the conveyance direction of the inspection object W is the X direction, and the width direction orthogonal to the conveyance direction of the inspection object W is the Y direction. Further, the upward direction of gravity perpendicular to the X and Y directions is defined as the Z direction (hereinafter the same in each figure).
　図１は、本発明を具現化する形態の一例を示す側面図である。また、図２は、本発明を具現化する形態の一例を示す正面図である。
膜厚むら検査装置１は、照明部２、撮像部３を備えて構成されている。
ここで例示する検査対象物Ｗは、透明材料Ｋとして液晶カラーフィルタ用の無アクリルガラスを例示し、樹脂材料Ｆとして黒色樹脂材料（いわゆる、樹脂ブラック）を例示する。また、樹脂ブラックの類型としては、黒色顔料が分散配合された樹脂であって、紫外光線などをパターン露光することで露光した部分が硬化するもの（いわゆる、ＵＶ硬化型アクリル樹脂）や、フォトレジストを用いてパターン露光した後にエッチング処理を行う必要がある非感光ポリイミド系樹脂などが例示できる。 FIG. 1 is a side view showing an example of a form embodying the present invention. FIG. 2 is a front view showing an example of a form embodying the present invention.
The film thickness unevenness inspection apparatus 1 includes an illumination unit 2 and an imaging unit 3.
The inspection object W exemplified here exemplifies a non-acrylic glass for a liquid crystal color filter as the transparent material K, and exemplifies a black resin material (so-called resin black) as the resin material F. As a type of resin black, a resin in which a black pigment is dispersed and blended, and a portion exposed by pattern exposure with ultraviolet rays or the like is cured (so-called UV curable acrylic resin) or a photoresist. Examples thereof include a non-photosensitive polyimide resin that needs to be subjected to an etching treatment after the pattern exposure using the.
　検査対象物Ｗの透明材料Ｋの上面には、ほぼ全面（ハンドリングに必要な周囲数ｍｍを除く）に、樹脂材料Ｆが塗布されている。 The resin material F is applied to almost the entire surface (excluding a few mm around the periphery necessary for handling) on the upper surface of the transparent material K of the inspection object W.
　照明部２は、検査対象物Ｗに向けて検査用照明光を照射するものである。
照明部２は、照明ユニット２０と、第１拡散板２１と、第２拡散板２２とを備えて構成されている。
照明ユニット２０は、上方に開口部を有するＹ方向に長い箱状の筐体と、筐体内部に配列された複数のＬＥＤチップ２０ｃを備えている。ＬＥＤユニット２０は、複数のＬＥＤチップ２０ｃから発せられた光が、当該箱体の開口部から上方に向けて検査用照明光として照射される。さらに具体的には、複数のＬＥＤチップ２０ｃは、照明ユニット２０内にＹ方向に並べて配置されている。 The illumination unit 2 irradiates the inspection illumination light toward the inspection object W.
The illumination unit 2 includes an illumination unit 20, a first diffusion plate 21, and a second diffusion plate 22.
The illumination unit 20 includes a box-shaped casing that has an opening on the top and is long in the Y direction, and a plurality of LED chips 20c arranged inside the casing. The LED unit 20 is irradiated with light emitted from the plurality of LED chips 20c as inspection illumination light upward from the opening of the box. More specifically, the plurality of LED chips 20 c are arranged in the Y direction in the illumination unit 20.
　第１拡散板２１は、複数のＬＥＤチップ２０ｃから発せられた光を透過させつつ、均一化を図るものである。しかし、この状態では、完全に均一化はされていない状態である。 The first diffusion plate 21 is intended to make uniform while transmitting the light emitted from the plurality of LED chips 20c. However, in this state, the state is not completely uniformed.
　第２拡散板２２は、第１拡散板２１と所定の間隔を隔てて配置されており、間には空気層がある。第２拡散板２２は、複数のＬＥＤチップ２０ｃから発せられて第１拡散板２１を通過した光を透過させつつ、さらに均一化を図るものである。 The second diffuser plate 22 is disposed at a predetermined interval from the first diffuser plate 21, with an air layer therebetween. The second diffusion plate 22 is intended to further uniformize the light transmitted from the plurality of LED chips 20c and transmitted through the first diffusion plate 21.
　具体的には、第１拡散板２１及び第２拡散板２２は、厚さ２．５ｍｍの白色半透明のプラスチック樹脂で、第１拡散板２１と第２拡散板２２との間隔（空気層）が、１０ｍｍに設定されたものが例示できる。さらに、第１拡散板２１及び第２拡散板２２は、表面にすりガラス状の凹凸処理が施され、さらに必要に応じ平滑化が施されており、入射した光が拡散して出射される特性（いわゆる、拡散性）を備えている。 Specifically, the first diffusion plate 21 and the second diffusion plate 22 are white translucent plastic resin having a thickness of 2.5 mm, and the distance (air layer) between the first diffusion plate 21 and the second diffusion plate 22. Is set to 10 mm. Further, the first diffusion plate 21 and the second diffusion plate 22 are subjected to ground glass-like unevenness treatment on the surface, and further smoothed as necessary, so that the incident light is diffused and emitted ( So-called diffusibility).
　撮像部３は、検査対象物Ｗを挟んで照明部と対向する位置に配置されており、検査対象物Ｗ上に設定された撮像領域Ｒを撮像するものである。撮像部３は、撮像素子３０を備えた撮像カメラ３１と、レンズ３２を備えている。 The imaging unit 3 is disposed at a position facing the illumination unit with the inspection target W interposed therebetween, and images the imaging region R set on the inspection target W. The imaging unit 3 includes an imaging camera 31 including an imaging element 30 and a lens 32.
　撮像カメラ３１は、観察対象物Ｗの樹脂材料Ｆの表面を撮像するものであり、照明部２から照射された検査用照明光が、観察対象物Ｗの樹脂材料Ｆを通過した状態で、その光の強弱を撮像するものである。また、撮像カメラ３１は、破線３３で示す画角の範囲内を観察するように構成されている。 The imaging camera 31 images the surface of the resin material F of the observation object W, and the inspection illumination light irradiated from the illumination unit 2 passes through the resin material F of the observation object W. It captures the intensity of light. The imaging camera 31 is configured to observe the range of the angle of view indicated by the broken line 33.
　レンズ３２は、撮像領域Ｒの撮像対象を撮像カメラ３１の撮像素子３０に結像させるためのものである。具体的には、レンズ３２は、凸レンズや凹レンズなどを用いて構成されたものが例示でき、画角や結像特性に合わせて適宜枚数や設定位置を決定する。 The lens 32 is for imaging the imaging target of the imaging region R on the imaging device 30 of the imaging camera 31. Specifically, the lens 32 can be exemplified by a lens configured using a convex lens, a concave lens, or the like, and the number and setting position are determined as appropriate in accordance with the angle of view and imaging characteristics.
　なお、撮像部３は、２組で構成した場合を図示しているが、１組で構成しても良いし、複数組で構成しても良い。つまり、観察部３の組数は、撮像カメラ３１の画角との兼ね合いで適宜選択して配置すれば良い。 In addition, although the case where the imaging unit 3 is configured by two sets is illustrated, it may be configured by one set or a plurality of sets. That is, the number of observation units 3 may be appropriately selected and arranged in consideration of the angle of view of the imaging camera 31.
　図３は、本発明を具現化する形態の一例における輝度信号イメージ図である。図３において、横軸は撮像位置Ｐ、縦軸は輝度Ｂを示している。図３には、従来の形態（厚み５ｍｍの拡散板が１枚である場合）での輝度信号ＳＬ０と、本願発明に係る形態（厚み２．５ｍｍの拡散板が２枚で空気層が１０ｍｍの場合）での輝度信号ＳＬ１が示されている。 FIG. 3 is a luminance signal image diagram in one example embodying the present invention. In FIG. 3, the horizontal axis indicates the imaging position P, and the vertical axis indicates the luminance B. FIG. 3 shows the luminance signal SL0 in the conventional form (when there is one diffuser plate with a thickness of 5 mm) and the form according to the present invention (two diffuser plates with a thickness of 2.5 mm and an air layer of 10 mm). Luminance signal SL1 is shown.
　図示された輝度信号の比較から、従来の形態と比べて、板厚が半分の拡散板が２枚になったことで、輝度むらが改善されていることが判る。また、光量低下も起きていない。 From the comparison of the luminance signals shown in the figure, it can be seen that the luminance unevenness is improved by the fact that the number of diffusion plates having half the plate thickness is two compared to the conventional form. In addition, no reduction in the amount of light has occurred.
　本発明に係る膜厚むら検査装置１は、このような構成をしているため、複数のＬＥＤチップＣを用いた照明ユニット３０を用いても、２枚の拡散板２６，２７とその間の空気層により、光量低下を防ぎつつ、輝度むらの改善を図ることができる。 Since the film thickness unevenness inspection apparatus 1 according to the present invention has such a configuration, even if the illumination unit 30 using a plurality of LED chips C is used, the two diffusion plates 26 and 27 and the air between them are provided. The layer can improve luminance unevenness while preventing a decrease in light amount.
　（第２の態様）
上述では、検査対象物Ｗとして、透明材料Ｋ上に樹脂材料Ｆが塗布されたものを例示して説明を行った。しかし、別の樹脂材料Ｆ１の場合、上述の態様（以下、第１の態様という）と同様に拡散板を２枚構成としても、輝度むらを含む状態の場合がある。 (Second aspect)
In the above description, the inspection object W is exemplified by the resin material F applied on the transparent material K. However, in the case of another resin material F1, there may be a case where brightness unevenness is included even if two diffusion plates are configured as in the above-described embodiment (hereinafter referred to as the first embodiment).
　そのため、第２の態様においては、上記第１の態様の構成に加えて、さらに第１拡散板の厚みが第２拡散板の厚みよりも厚く設定することが好ましい。 Therefore, in the second aspect, in addition to the configuration of the first aspect, it is preferable that the thickness of the first diffusion plate is set to be larger than the thickness of the second diffusion plate.
　具体的には、第１拡散板２１を厚さ３ｍｍに、第２拡散板２２を厚さ２ｍｍにし、共に白色半透明のプラスチック樹脂で構成し、第１拡散板２１と第２拡散板２２との間隔（空気層）を１０ｍｍに設定されたものが例示できる。 Specifically, the first diffusion plate 21 has a thickness of 3 mm, the second diffusion plate 22 has a thickness of 2 mm, both are made of a white translucent plastic resin, and the first diffusion plate 21, the second diffusion plate 22, The distance (air layer) is set to 10 mm.
　この場合、２枚の拡散板２１，２２の総厚みは、第１の態様と同じである。しかし、第２の態様を適用させた膜厚むら検査装置は、ＬＥＤチップＣに近い第１拡散板２１の板厚を、第２拡散板２２の板厚より厚く設定されていることで、観察領域Ｒにおいて、光量低下を防ぎつつ輝度むらの改善を図ることができる。 In this case, the total thickness of the two diffusion plates 21 and 22 is the same as in the first embodiment. However, the film thickness nonuniformity inspection apparatus to which the second mode is applied is configured such that the thickness of the first diffusion plate 21 close to the LED chip C is set to be thicker than the thickness of the second diffusion plate 22. In the region R, it is possible to improve the luminance unevenness while preventing the light amount from decreasing.
　なお、上述した第１の態様、第２の態様において、拡散板の位置は適宜設定するものとし、検査対象となる品種に応じて、適宜調整したり段取り替えをしたりすれば良い。 In the first aspect and the second aspect described above, the position of the diffusion plate is set as appropriate, and may be appropriately adjusted or replaced according to the type to be inspected.
　（第３の態様）
本発明に係る膜厚むら検査装置１ｂは、上述の第１又は第２の態様に係る膜厚むら検査装置の構成に加えて、さらに、１）第１拡散板のみ、２）第２拡散板のみ、３）第１拡散板と第２拡散板の双方、１）～３）のいずれかについて、当該拡散板の位置を板厚方向に位置を調節できる、厚み方向移動用アクチュエータ機構を備える構成とし、さらに、検査条件を登録する検査条件登録部とを備える構成とすることができる。 (Third aspect)
In addition to the configuration of the film thickness unevenness inspection apparatus according to the first or second aspect described above, the film thickness unevenness inspection apparatus 1b according to the present invention further includes 1) only the first diffusion plate, and 2) the second diffusion plate. Only, 3) both the first diffusion plate and the second diffusion plate, and any one of 1) to 3) including a thickness direction moving actuator mechanism capable of adjusting the position of the diffusion plate in the plate thickness direction And an inspection condition registration unit for registering the inspection conditions.
　図４は、本発明を具現化する形態の第３の例を示すシステム構成図であり、膜厚むら検査装置１ｂの具体的なシステム構成が示されている。本発明に係る膜厚むら検査装置１ｂは、照明部２ｂ、撮像部３、検査条件登録部６、制御部９を備えて構成されている。
照明部２ｂは、第１拡散板２１と、第２拡散板２２と、厚み方向移動用アクチュエータ機構とを備えて構成されている。 FIG. 4 is a system configuration diagram showing a third example of a form embodying the present invention, and shows a specific system configuration of the film thickness nonuniformity inspection apparatus 1b. The film thickness unevenness inspection apparatus 1b according to the present invention includes an illumination unit 2b, an imaging unit 3, an inspection condition registration unit 6, and a control unit 9.
The illumination unit 2b includes a first diffusion plate 21, a second diffusion plate 22, and an actuator mechanism for moving in the thickness direction.
　厚み方向移動用アクチュエータ機構は、第１拡散板２１又は第２拡散板２２の少なくとも一方側を当該拡散板の厚み方向に設定位置を調整するものである。
図４に示す形態では、第１拡散板２１をその厚み方向（Ｚ方向）に位置調整する第１の厚み方向移動用アクチュエータ機構２１ｄと、第２拡散板２２をその厚み方向（Ｚ方向）に位置調整する第２の厚み方向移動用アクチュエータ機構２２ｄが備えられている。 The actuator mechanism for moving in the thickness direction adjusts the setting position of at least one side of the first diffusion plate 21 or the second diffusion plate 22 in the thickness direction of the diffusion plate.
In the form shown in FIG. 4, the first diffusion direction moving actuator mechanism 21d for adjusting the position of the first diffusion plate 21 in the thickness direction (Z direction) and the second diffusion plate 22 in the thickness direction (Z direction). A second thickness direction moving actuator mechanism 22d for adjusting the position is provided.
　検査条件登録部６は、検査品種毎に第１及び第２の厚み方向移動用アクチュエータ機構２１ｄ，２２ｄの設定位置を登録するためのものである。 The inspection condition registration unit 6 is for registering the setting positions of the first and second thickness direction moving actuator mechanisms 21d and 22d for each inspection type.
　制御部９は、検査条件が登録された検査条件登録部６と接続されており、検査条件登録部６に予め登録された検査条件を適宜読み出すためのものである。また、制御部９は、第１及び第２の厚み方向移動用アクチュエータ機構２１ｄ，２２ｄと接続されており、検査条件に基づいて、これらアクチュエータ機構に対して制御信号を出力するものである。また、制御部９は、撮像部３で画像取得するタイミングに合わせてＬＥＤチップ２０Ｃの点灯・消灯を制御し、発光光量を制御する点灯駆動回路２０ｄと接続されている。 The control unit 9 is connected to the inspection condition registration unit 6 in which the inspection conditions are registered, and is used to appropriately read the inspection conditions registered in advance in the inspection condition registration unit 6. The controller 9 is connected to the first and second thickness direction moving actuator mechanisms 21d and 22d, and outputs control signals to these actuator mechanisms based on the inspection conditions. Further, the control unit 9 is connected to a lighting drive circuit 20d that controls lighting / extinguishing of the LED chip 20C in accordance with the timing at which the image capturing unit 3 acquires an image, and controls the amount of emitted light.
　さらに、制御部９は、撮像部３から取得された画像を取得して画像処理を行う画像処理部４と接続するように構成しても良い。 Furthermore, the control unit 9 may be configured to connect to the image processing unit 4 that acquires an image acquired from the imaging unit 3 and performs image processing.
　なお、本発明に係る厚み方向移動用アクチュエータ機構は、第１の厚み方向移動用アクチュエータ機構２１ｄと、第２の厚み方向移動用アクチュエータ機構２２ｄとが、双方備えられている形態でも良いし、どちらか一方が備えられている形態であっても良い。 The thickness direction moving actuator mechanism according to the present invention may include a first thickness direction moving actuator mechanism 21d and a second thickness direction moving actuator mechanism 22d. Either one may be provided.
　膜厚むら検査装置１ｂは、このような構成をしているため、検査対象物が多品種に及ぶ場合であっても、予め登録された検査条件を適宜読み出し、第１拡散板２１や第２の拡散板２２のＺ方向の位置を自動的に最適な位置に設定することができる。そのため、検査対象となる品種に応じて、輝度むらの改善を図ることができ、さらに、第２の態様と組み合わせることで、輝度むら改善の相乗効果が増大する。また、手作業による調整や段取り替えが不要となり、品種切替を迅速に行うことができ、手動調整に比べて位置再現性が良くなるため、好ましいと言える。 Since the film thickness nonuniformity inspection apparatus 1b has such a configuration, even when the inspection object covers a wide variety, the inspection conditions registered in advance are read out appropriately, and the first diffusion plate 21 and the second diffusion plate 21 are read out. The position of the diffusion plate 22 in the Z direction can be automatically set to an optimum position. Therefore, luminance unevenness can be improved according to the type to be inspected, and further, by combining with the second mode, the synergistic effect of improving luminance unevenness is increased. Further, manual adjustment and setup change are not necessary, and product switching can be performed quickly, and position reproducibility is improved compared to manual adjustment, which is preferable.
　（第４の態様）
本発明に係る膜厚むら検査装置において、上述の第１～第２の態様に係る膜厚むら検査装置の構成に、次のような構成を加えても良い。
その構成とは、１）第１拡散板のみ、２）第２拡散板のみ、３）第１拡散板と第２拡散板の双方、１）～３）のいずれかについて、当該拡散板の板厚が連続的又は段階的に厚くなる断面形状をしており、当該拡散板には、当該拡散板の板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構を備え、さらに、検査条件を登録する検査条件登録部とを備えるものである。 (Fourth aspect)
In the film thickness unevenness inspection apparatus according to the present invention, the following structure may be added to the structure of the film thickness unevenness inspection apparatus according to the first and second aspects described above.
The configuration includes 1) only the first diffusion plate, 2) only the second diffusion plate, 3) both the first diffusion plate and the second diffusion plate, and the plate of the diffusion plate for any one of 1) to 3). The diffusion plate has a cross-sectional shape that increases continuously or stepwise, and the diffusion plate includes a plate thickness changing actuator mechanism that can adjust the setting position in the direction in which the thickness of the diffusion plate changes, and And an inspection condition registration unit for registering inspection conditions.
　図５は、本発明を具現化する形態の第４の例を示す正面図であり、本発明に係る膜厚むら検査装置１ｃの照明部２ｃの具体的な構成が示されている。
図６は、本発明を具現化する形態の第３の例を示すシステム構成図であり、膜厚むら検査装置１ｃの具体的なシステム構成が示されている。本発明に係る膜厚むら検査装置１ｃは、照明部２ｃ、撮像部３、検査条件登録部６、制御部９を備えて構成されている。 FIG. 5 is a front view showing a fourth example of the embodiment embodying the present invention, and shows a specific configuration of the illumination unit 2c of the film thickness unevenness inspection apparatus 1c according to the present invention.
FIG. 6 is a system configuration diagram showing a third example of the embodiment embodying the present invention, and shows a specific system configuration of the film thickness nonuniformity inspection apparatus 1c. A film thickness unevenness inspection apparatus 1c according to the present invention includes an illumination unit 2c, an imaging unit 3, an inspection condition registration unit 6, and a control unit 9.
　照明部２ｃは、照明ユニット２０と、第１拡散板２６と、第２拡散板２７と、第１の板厚変更用アクチュエータ機構２６ｄと、第２の板厚変更用アクチュエータ機構２７ｄを備えて構成されている。 The illumination unit 2c includes the illumination unit 20, a first diffusion plate 26, a second diffusion plate 27, a first plate thickness changing actuator mechanism 26d, and a second plate thickness changing actuator mechanism 27d. Has been.
　第１拡散板２６は、板厚が段階的に変化する（いわゆる、階段型の）断面形状をしており、第１の板厚変更用アクチュエータ機構２６ｄに取り付けられている。第１の板厚変更用アクチュエータ機構２６ｄは、第１拡散板２６の設定位置を調整し、第１拡散板２６において、ＬＥＤチップ２０Ｃから発せられた光が通過する部分の板厚を変化させるためのものである。 The first diffusion plate 26 has a cross-sectional shape in which the plate thickness changes stepwise (so-called step type), and is attached to the first plate thickness changing actuator mechanism 26d. The first plate thickness changing actuator mechanism 26d adjusts the setting position of the first diffusion plate 26, and changes the plate thickness of the portion of the first diffusion plate 26 through which the light emitted from the LED chip 20C passes. belongs to.
　一方、第２拡散板２７は、板厚が連続的に変化する（いわゆる、くさび形の）断面形状をしており、第２の板厚変更用アクチュエータ機構２７ｄに取り付けられている。第２の板厚変更用アクチュエータ機構２７ｄは、第２拡散板２７の設定位置を調整し、第２拡散板２７において、ＬＥＤチップ２０Ｃから発せられた光が通過する部分の板厚を変化させるためのものである。 On the other hand, the second diffusion plate 27 has a cross-sectional shape (so-called wedge shape) in which the plate thickness continuously changes, and is attached to the second plate thickness changing actuator mechanism 27d. The second plate thickness changing actuator mechanism 27d adjusts the setting position of the second diffusion plate 27, and changes the plate thickness of the second diffusion plate 27 through which the light emitted from the LED chip 20C passes. belongs to.
　検査条件登録部６は、検査品種毎に第１及び第２の板厚変更用アクチュエータ機構２６ｄ，２７ｄの設定位置を登録するためのものである。 The inspection condition registration unit 6 is for registering the setting positions of the first and second plate thickness changing actuator mechanisms 26d and 27d for each inspection type.
　制御部９は、検査条件が登録された検査条件登録部６と接続されており、検査条件登録部６に予め登録された検査条件を適宜読み出すためのものである。また、制御部９は、第１及び第２の板厚変更用アクチュエータ機構２６ｄ，２７ｄと接続されており、検査条件に基づいて、これらアクチュエータ機構に対して制御信号を出力するものである。また、制御部９は、撮像部３で画像取得するタイミングに合わせてＬＥＤチップ２０Ｃの点灯・消灯を制御し、発光光量を制御する点灯駆動回路２０ｄと接続されている。 The control unit 9 is connected to the inspection condition registration unit 6 in which the inspection conditions are registered, and is used to appropriately read the inspection conditions registered in advance in the inspection condition registration unit 6. The control unit 9 is connected to the first and second plate thickness changing actuator mechanisms 26d and 27d, and outputs a control signal to these actuator mechanisms based on the inspection conditions. Further, the control unit 9 is connected to a lighting drive circuit 20d that controls lighting / extinguishing of the LED chip 20C in accordance with the timing at which the image capturing unit 3 acquires an image, and controls the amount of emitted light.
　さらに、制御部９は、撮像部３から取得された画像を取得して画像処理を行う画像処理部４と接続するように構成しても良い。 Furthermore, the control unit 9 may be configured to connect to the image processing unit 4 that acquires an image acquired from the imaging unit 3 and performs image processing.
　なお、本発明の板厚変更用アクチュエータ機構を用いて板厚を変化させるのが、
１）第１拡散板のみであれば、第１の板厚変更用アクチュエータ機構２６ｄのみを備え、
２）第２拡散板のみであれば、第２の板厚変更用アクチュエータ機構２７ｄのみを備え、
３）第１拡散板と第２拡散板の双方であれば、双方の板厚変更用アクチュエータ機構２６ｄ，２７ｄを備える。 In addition, changing the plate thickness using the plate thickness changing actuator mechanism of the present invention,
1) If only the first diffusion plate is provided, only the first plate thickness changing actuator mechanism 26d is provided,
2) If only the second diffusion plate is provided, only the second plate thickness changing actuator mechanism 27d is provided,
3) If both the first diffusion plate and the second diffusion plate are provided, both plate thickness changing actuator mechanisms 26d and 27d are provided.
　また、上述の第２の態様に示す形態と組み合わせることができる。さらに、１）第１拡散板のみ、２）第２拡散板のみ、３）第１拡散板と第２拡散板の双方について、上述の第３の態様に示す様な、拡散板の厚み方向移動用アクチュエータ機構をさらに組み合わせても良い。 Also, it can be combined with the embodiment shown in the second aspect. Further, 1) only the first diffusion plate, 2) only the second diffusion plate, and 3) movement of the diffusion plate in the thickness direction as shown in the above-described third aspect for both the first diffusion plate and the second diffusion plate. The actuator mechanism may be further combined.
　膜厚むら検査装置１ｃは、このような構成をしているため、検査対象物が多品種に及ぶ場合であっても、予め登録された検査条件を適宜読み出し、第１拡散板２６や第２の拡散板２７のＸ方向の位置を自動的に最適な位置に設定することができる。そのため、検査対象となる品種に応じて、輝度むらの改善を図ることができ、さらに、第２の態様や第３の態様と組み合わせることで、輝度むら改善の相乗効果が増大する。また、手作業による調整や段取り替えが不要となり、品種切替を迅速に行うことができ、手動調整に比べて位置再現性が良くなるため、好ましいと言える。 Since the film thickness nonuniformity inspection apparatus 1c has such a configuration, even when the inspection object covers a wide variety, the inspection conditions registered in advance are read as appropriate, and the first diffusion plate 26 and the second diffusion plate 26 are read out. The position of the diffusion plate 27 in the X direction can be automatically set to an optimum position. Therefore, the luminance unevenness can be improved according to the type to be inspected, and further, by combining with the second mode and the third mode, the synergistic effect of improving the luminance unevenness is increased. Further, manual adjustment and setup change are not necessary, and product switching can be performed quickly, and position reproducibility is improved compared to manual adjustment, which is preferable.
　（第５の態様）
本発明に係る膜厚むら検査装置は、膜厚むらの検査対象が黒色樹脂材料（いわゆる、樹脂ブラック）である場合、上述の照明部２，２ｂ，２ｃを、次のような構成の照明部２ｄとしても良い。つまり、検査に用いる複数のＬＥＤチップとして、白色ＬＥＤや、赤色ＬＥＤを用いることができるが、赤外波長の光を発する複数の赤外ＬＥＤチップで構成することが、より好ましい。 (5th aspect)
The film thickness nonuniformity inspection apparatus according to the present invention includes the illumination units 2, 2b, and 2c described above as illumination units having the following configuration when the object of film thickness nonuniformity inspection is a black resin material (so-called resin black). It may be 2d. That is, white LEDs or red LEDs can be used as the plurality of LED chips used for the inspection, but it is more preferable that the plurality of LED chips be configured with a plurality of infrared LED chips that emit light of infrared wavelengths.
　この形態であれば、可視光線の遮光率が高い黒色樹脂材料に対して膜厚むらの検査を行うに際に、より透過率の高い赤外波長領域の照明光を用いて検査を行うことができる。また、撮像カメラ３１に用いられる撮像素子３０も、可視光線を主な受光感度として赤外波長の受光感度を持つ汎用品を使用することができる。或いは、撮像素子３０として、赤外線カットフィルタが取り付けられている汎用品を使用する場合には、その赤外線カットフィルタを取り外して使用しても良い。 If it is this form, when inspecting the film thickness nonuniformity with respect to the black resin material with a high visible light shading rate, the inspection can be performed using illumination light in the infrared wavelength region with higher transmittance. it can. In addition, the image pickup device 30 used in the image pickup camera 31 can be a general-purpose product having infrared light reception sensitivity with visible light as the main light reception sensitivity. Or when using the general purpose goods with which the infrared cut filter is attached as the image pick-up element 30, you may remove and use the infrared cut filter.
　そのため、膜厚むらの検査対象が黒色樹脂材料（樹脂ブラック）である場合、従来であれば照明光として蛍光灯やハロゲン照明を用いていたが、本発明を適用させることで、赤外光線を発する赤外ＬＥＤから発する光を照明光として用いることができる。そのため、本発明に係る膜厚むら検査装置は、従来の形態と比べて、エネルギー効率が良いといえる。そして、上述の第１～第４の態様のいずれかと組み合わせることで、本発明に係る膜厚むら検査装置は、検査に有効な光量を確保しつつ、輝度の均一化を図ることができるので、好ましいと言える。 Therefore, when the inspection target of the film thickness unevenness is a black resin material (resin black), conventionally, a fluorescent lamp or halogen illumination is used as illumination light. Light emitted from the emitted infrared LED can be used as illumination light. Therefore, it can be said that the film thickness unevenness inspection apparatus according to the present invention is more energy efficient than the conventional embodiment. And by combining with any of the first to fourth aspects described above, the film thickness nonuniformity inspection apparatus according to the present invention can achieve a uniform luminance while ensuring a light amount effective for inspection, It can be said that it is preferable.
　（第６の態様）
膜厚むらの検査対象が黒色樹脂材料（樹脂ブラック）、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）が混在する場合、本発明に係る膜厚むら検査装置において、上述の照明部２～２ｄを、次のような構成の照明部２ｅとしても良い。 (Sixth aspect)
When the inspection target of the film thickness unevenness includes a black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist), in the film thickness unevenness inspection apparatus according to the present invention, the illumination described above The units 2 to 2d may be the illumination unit 2e having the following configuration.
　図７は、本発明を具現化する形態の第６の例を示す正面図である。
具体的には、照明部２ｅの照明ユニット２０ｅは、複数のＬＥＤチップとして、赤外波長の光を発する複数の赤外ＬＥＤチップ２０ｉｒと、赤色波長の光を発する複数の赤色ＬＥＤチップ２０ｒとを備え、それらがＹ方向に一列上に交互に配置されて構成されている。 FIG. 7 is a front view showing a sixth example of the embodiment embodying the present invention.
Specifically, the illumination unit 20e of the illumination unit 2e includes, as a plurality of LED chips, a plurality of infrared LED chips 20ir that emit light of infrared wavelengths and a plurality of red LED chips 20r that emit light of red wavelengths. They are arranged alternately in a row in the Y direction.
　そして、黒色樹脂材料（樹脂ブラック）を検査する場合は、複数の赤外ＬＥＤチップ２０ｉｒを照明光として用いる。一方、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）を検査する場合は、複数の赤色ＬＥＤチップ２０ｒを照明光として用いる。このとき、複数の赤外ＬＥＤチップ２０ｉｒと、複数の赤色ＬＥＤチップ２０ｒとは、Ｘ方向に同じ位置に配置されている。 When inspecting a black resin material (resin black), a plurality of infrared LED chips 20ir are used as illumination light. On the other hand, when inspecting a green resin material (G resist) or a blue resin material (B resist), a plurality of red LED chips 20r are used as illumination light. At this time, the plurality of infrared LED chips 20ir and the plurality of red LED chips 20r are arranged at the same position in the X direction.
　そのため、膜厚むらの検査対象が黒色樹脂材料（樹脂ブラック）、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）が混在する場合であっても、照明ユニット２０ｅから発せられる照明光の主光軸と、撮像カメラ３１とがＸ方向にずれない。そのため、照明ユニット２０ｅと撮像カメラ３１の相対位置を調整したり段取り替えする必要がなくなるため、好ましいと言える。 Therefore, the illumination light emitted from the illumination unit 20e even when the inspection target of the film thickness unevenness is a mixture of a black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist). The main optical axis and the imaging camera 31 do not shift in the X direction. Therefore, it is not necessary to adjust the relative position between the illumination unit 20e and the imaging camera 31, or to change the setup, which is preferable.
　図８は、本発明を具現化する形態の第６の例における輝度信号イメージ図である。
横軸は撮像位置Ｐ、縦軸は輝度Ｂを示している。
上述の形態の照明部２ｅを用いた場合、検査時に同時に発光する複数のＬＥＤチップ同士の間隔が広くなるので、輝度信号ＳＬ６に示すように、輝度むらが生じやすくなる。
しかし、上述した第１と組み合わせることにより、輝度信号ＳＬ７に示すように、輝度むらが改善される。そのため、検査に有効な光量を確保しつつ、輝度の均一化を図ることができるので、好ましいと言える。また、上述の第２～第４の態様のいずれかと組み合わせることで、輝度むら改善の相乗効果を奏する。 FIG. 8 is a luminance signal image diagram in the sixth example of the embodiment embodying the present invention.
The horizontal axis indicates the imaging position P, and the vertical axis indicates the luminance B.
When the illumination unit 2e having the above-described form is used, since the interval between the plurality of LED chips that emit light simultaneously at the time of inspection is widened, unevenness in luminance is likely to occur as indicated by the luminance signal SL6.
However, in combination with the first described above, the luminance unevenness is improved as shown in the luminance signal SL7. Therefore, it can be said that it is preferable because the luminance can be made uniform while ensuring the amount of light effective for the inspection. Further, by combining with any of the second to fourth aspects described above, there is a synergistic effect of improving luminance unevenness.
　（第７の態様）
膜厚むらの検査対象が高濃度の黒色樹脂材料（樹脂ブラック）、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）が混在する場合、本発明に係る膜厚むら検査装置において、上述の照明部２～２ｄを、次のような構成の照明部２ｆとしても良い。 (Seventh aspect)
In the case where a non-uniform film thickness inspection object includes a high concentration black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist), in the film thickness unevenness inspection apparatus according to the present invention, The illuminating units 2 to 2d described above may be an illuminating unit 2f having the following configuration.
　図９は、本発明を具現化する形態の第７の例を示す正面図である。
具体的には、照明部２ｆの照明ユニット２０ｆは、赤外波長の光を発する複数の赤外ＬＥＤチップ２０ｉｒと、赤色波長の光を発する複数の赤色ＬＥＤチップ２０ｒとを備え、それらが、Ｙ方向に１列上に隣り合って配置されて構成されている。より具体的には、赤外ＬＥＤチップ２０ｉｒと、赤色ＬＥＤチップ２０ｒとが、１つずつ交互に配置する状態ではなく、２つ／１つの交互や、２つずつの交互などの配置とする形態が例示できる。 FIG. 9 is a front view showing a seventh example of the embodiment embodying the present invention.
Specifically, the illumination unit 20f of the illumination unit 2f includes a plurality of infrared LED chips 20ir that emit light having an infrared wavelength, and a plurality of red LED chips 20r that emit light having a red wavelength. They are arranged adjacent to each other in one direction in the direction. More specifically, the infrared LED chip 20ir and the red LED chip 20r are not in a state of being alternately arranged one by one, but are arranged in an arrangement of two / one alternate, two alternates, or the like. Can be illustrated.
　そして、高濃度の黒色樹脂材料（樹脂ブラック）を検査する場合は、複数の赤外ＬＥＤチップ２０ｉｒを照明光として用いる。一方、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）を検査する場合は、複数の赤色ＬＥＤチップ２０ｒを照明光として用いる。このとき、複数の赤外ＬＥＤチップ２０ｉｒと、複数の赤色ＬＥＤチップ２０ｒとは、Ｘ方向に同じ位置に配置されている。 And when inspecting a high concentration black resin material (resin black), a plurality of infrared LED chips 20ir are used as illumination light. On the other hand, when inspecting a green resin material (G resist) or a blue resin material (B resist), a plurality of red LED chips 20r are used as illumination light. At this time, the plurality of infrared LED chips 20ir and the plurality of red LED chips 20r are arranged at the same position in the X direction.
　そのため、膜厚むらの検査対象が高濃度の黒色樹脂材料（樹脂ブラック）、緑色樹脂材料（Ｇレジスト）又は、青色樹脂材料（Ｂレジスト）が混在する場合であっても、照明ユニット２０ｅから発せられる照明光の主光軸と、撮像カメラ３１とがＸ方向にずれない。そのため、照明ユニット２０ｅと撮像カメラ３１の相対位置を調整したり段取り替えする必要がなくなるため、好ましいと言える。 Therefore, even when the inspection target of the film thickness unevenness is a mixture of a high concentration black resin material (resin black), a green resin material (G resist), or a blue resin material (B resist), it is emitted from the lighting unit 20e. The main optical axis of the illumination light and the imaging camera 31 do not shift in the X direction. Therefore, it is not necessary to adjust the relative position between the illumination unit 20e and the imaging camera 31, or to change the setup, which is preferable.
　また、このようにＬＥＤチップを配置した形態の場合、発光するＬＥＤ同士の間隔がさらに広がるため、輝度むらがさらに発生しやすい。しかし、上述した第１と組み合わせることにより、輝度むらが改善される。そのため、検査に有効な光量を確保しつつ、輝度の均一化を図ることができるので、好ましいと言える。また、上述の第２～第４の態様のいずれかと組み合わせることで、輝度むら改善の相乗効果を奏する。 Further, in the case where the LED chip is arranged in this way, the interval between the LEDs that emit light is further widened, so that uneven brightness is more likely to occur. However, the luminance unevenness is improved by combining with the first described above. Therefore, it can be said that it is preferable because the luminance can be made uniform while ensuring the amount of light effective for the inspection. Further, by combining with any of the second to fourth aspects described above, there is a synergistic effect of improving luminance unevenness.
　１　　膜厚むら検査装置
　２　　照明部
　３　　撮像部
　４　　画像処理部
　６　　検査条件登録部
　９　　制御部
　２０　　照明ユニット
　２０ｃ　ＬＥＤチップ
　２０ｒ　赤色ＬＥＤチップ
　２０ｉｒ　赤外ＬＥＤチップ
　２０ｄ　電源装置
　２１　　第１拡散板
　２１ｄ　厚み方向移動用第１アクチュエータ
　２２　　第２拡散板
　２２ｄ　厚み方向移動用第２アクチュエータ
　２６　　第１拡散板（板厚が段階的に変化）
　２６ｄ　板厚変更用第１アクチュエータ
　２７　　第２拡散板（板厚が連続的に変化）
　２７ｄ　板厚変更用第２アクチュエータ
　３０　　撮像素子
　３１　　撮像カメラ
　３２　　レンズ
　３３　　画角端を示す破線
　Ｆ　　　皮膜
　Ｋ　　　透明材料
　Ｒ　　　撮像領域
　Ｗ　　　検査対象物
　Ｖ　　　矢印（基板搬送方向）
　Ｂ　　　輝度
　Ｐ　　　撮像位置
　ＳＬ０　輝度信号（拡散板固定）
　ＳＬ１　輝度信号（拡散板位置最適化）
　ＳＬ６　輝度信号（拡散板固定）
　ＳＬ７　輝度信号（拡散板位置最適化） DESCRIPTION OF SYMBOLS 1 Thickness nonuniformity inspection apparatus 2 Illumination part 3 Imaging part 4 Image processing part 6 Inspection condition registration part 9 Control part 20 Illumination unit 20c LED chip 20r Red LED chip 20ir Infrared LED chip 20d Power supply device 21 1st diffuser board 21d Thickness direction First actuator for movement 22 Second diffusion plate 22d Second actuator for movement in thickness direction 26 First diffusion plate (plate thickness changes stepwise)
26d Plate thickness changing first actuator 27 Second diffuser plate (Thickness changes continuously)
27d Second actuator for changing plate thickness 30 Imaging element 31 Imaging camera 32 Lens 33 Broken line indicating angle of view F Film K Transparent material R Imaging area W Inspection object V Arrow (substrate transport direction)
B Luminance P Imaging position SL0 Luminance signal (Diffusion plate fixed)
SL1 Luminance signal (diffuser position optimization)
SL6 Luminance signal (Diffusion plate fixed)
SL7 Luminance signal (diffuser position optimization)

Claims (11)

  1. 　透明基板上に樹脂材料が塗布された検査対象物の当該樹脂材料の膜厚むらを検査する装置であって、
    前記検査対象物に向けて検査用照明光を照射する照明部と、
    前記検査対象物を挟んで前記照明部と対向する位置に配置された撮像部とを備え、
    　前記照明部は、
    複数のＬＥＤチップと、第１拡散板と、第２拡散板とを備え、
    第１拡散板と第２拡散板との間には空気層が設けられており、
    前記複数のＬＥＤチップから発せられた光が、前記第１拡散板、前記空気層、前記第２拡散板の順に通過して、前記検査対象物に照射される
    ことを特徴とする、膜厚むら検査装置。     A device for inspecting the film thickness unevenness of the resin material of the inspection object in which the resin material is applied on the transparent substrate,
    An illumination unit that emits illumination light for inspection toward the inspection object;
    An imaging unit disposed at a position facing the illumination unit across the inspection object;
    The illumination unit is
    A plurality of LED chips, a first diffusion plate, and a second diffusion plate;
    An air layer is provided between the first diffusion plate and the second diffusion plate,
    The unevenness in film thickness, wherein light emitted from the plurality of LED chips passes through the first diffusion plate, the air layer, and the second diffusion plate in this order, and is irradiated onto the inspection object. Inspection device.
  2. 　前記第１拡散板の厚みが、前記第２拡散板の厚みよりも厚く設定されている
    ことを特徴とする、請求項１に記載の膜厚むら検査装置。     The thickness nonuniformity inspection apparatus according to claim 1, wherein a thickness of the first diffusion plate is set to be greater than a thickness of the second diffusion plate.
  3. 　前記第１拡散板又は前記第２拡散板の少なくとも一方には、当該第１拡散板又は第２拡散板を厚み方向に設定位置を調整できる、厚み方向移動用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記厚み方向移動用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項２に記載の膜厚むら検査装置。     At least one of the first diffusion plate or the second diffusion plate, an actuator mechanism for moving in the thickness direction that can adjust the setting position of the first diffusion plate or the second diffusion plate in the thickness direction;
    An inspection condition registration unit for registering inspection conditions;
    The film thickness nonuniformity inspection apparatus according to claim 2, wherein a setting position of the actuator mechanism for moving in the thickness direction is registered in the inspection condition registration unit for each inspection type.
  4. 　前記第１拡散板又は前記第２拡散板の少なくとも一方には、当該第１拡散板又は第２拡散板を厚み方向に設定位置を調整できる、厚み方向移動用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記厚み方向移動用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項１に記載の膜厚むら検査装置。
    At least one of the first diffusion plate or the second diffusion plate, an actuator mechanism for moving in the thickness direction that can adjust the setting position of the first diffusion plate or the second diffusion plate in the thickness direction;
    An inspection condition registration unit for registering inspection conditions;
    The film thickness nonuniformity inspection apparatus according to claim 1, wherein a setting position of the actuator mechanism for moving in the thickness direction is registered in the inspection condition registration unit for each inspection type.
  5. 　前記第１拡散板又は前記第２拡散板の少なくとも一方は、板厚が連続的又は段階的に厚くなる断面形状をしており、
    　当該第１拡散板又は第２拡散板には、当該第１拡散板又は第２拡散板の前記板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記板厚変更用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項１に記載の膜厚むら検査装置。     At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
    In the first diffusion plate or the second diffusion plate, a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
    An inspection condition registration unit for registering inspection conditions;
    The film thickness nonuniformity inspection apparatus according to claim 1, wherein a setting position of the plate thickness changing actuator mechanism is registered for each inspection type in the inspection condition registration unit.
  6. 　前記第１拡散板又は前記第２拡散板の少なくとも一方は、板厚が連続的又は段階的に厚くなる断面形状をしており、
    　当該第１拡散板又は第２拡散板には、当該第１拡散板又は第２拡散板の前記板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記板厚変更用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項２に記載の膜厚むら検査装置。     At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
    In the first diffusion plate or the second diffusion plate, a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
    An inspection condition registration unit for registering inspection conditions;
    3. The film thickness nonuniformity inspection apparatus according to claim 2, wherein a setting position of the plate thickness changing actuator mechanism is registered for each inspection type in the inspection condition registration unit.
  7. 　前記第１拡散板又は前記第２拡散板の少なくとも一方は、板厚が連続的又は段階的に厚くなる断面形状をしており、
    　当該第１拡散板又は第２拡散板には、当該第１拡散板又は第２拡散板の前記板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記板厚変更用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項３に記載の膜厚むら検査装置。     At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
    In the first diffusion plate or the second diffusion plate, a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
    An inspection condition registration unit for registering inspection conditions;
    4. The film thickness nonuniformity inspection apparatus according to claim 3, wherein a setting position of the plate thickness changing actuator mechanism is registered for each inspection type in the inspection condition registration unit.
  8. 　前記第１拡散板又は前記第２拡散板の少なくとも一方は、板厚が連続的又は段階的に厚くなる断面形状をしており、
    　当該第１拡散板又は第２拡散板には、当該第１拡散板又は第２拡散板の前記板厚が変化する方向に設定位置を調整できる、板厚変更用アクチュエータ機構と、
    検査条件を登録する検査条件登録部とを備え、
    　検査条件登録部には、検査品種毎に前記板厚変更用アクチュエータ機構の設定位置が登録されている
    ことを特徴とする、請求項４に記載の膜厚むら検査装置。
    At least one of the first diffusion plate or the second diffusion plate has a cross-sectional shape in which the plate thickness increases continuously or stepwise,
    In the first diffusion plate or the second diffusion plate, a plate thickness changing actuator mechanism capable of adjusting a setting position in a direction in which the plate thickness of the first diffusion plate or the second diffusion plate changes,
    An inspection condition registration unit for registering inspection conditions;
    The film thickness nonuniformity inspection apparatus according to claim 4, wherein a setting position of the plate thickness changing actuator mechanism is registered for each inspection type in the inspection condition registration unit.
  9. 　前記複数のＬＥＤチップは、赤外波長の光を発する複数の赤外ＬＥＤチップである
    ことを特徴とする、請求項１～８のいずれかに記載の膜厚むら検査装置。     9. The film thickness nonuniformity inspection apparatus according to claim 1, wherein the plurality of LED chips are a plurality of infrared LED chips that emit light having an infrared wavelength.
  10. 　前記複数のＬＥＤチップは、赤外波長の光を発する複数の赤外ＬＥＤチップと、赤色波長の光を発する複数の赤色ＬＥＤチップを備え、
    　前記赤外ＬＥＤチップと前記赤色ＬＥＤチップとが、１列上に交互に配置されている
    ことを特徴とする、請求項１～８のいずれかに記載の膜厚むら検査装置。     The plurality of LED chips include a plurality of infrared LED chips that emit light of infrared wavelengths and a plurality of red LED chips that emit light of red wavelengths,
    The film thickness nonuniformity inspection apparatus according to any one of claims 1 to 8, wherein the infrared LED chips and the red LED chips are alternately arranged in one row.
  11. 　前記複数のＬＥＤチップは、赤外波長の光を発する複数の赤外ＬＥＤチップと、赤色波長の光を発する複数の赤色ＬＥＤチップを備え、
    　前記赤外ＬＥＤチップと前記赤色ＬＥＤチップとが、１列上に隣り合って配置されていることを特徴とする、請求項１～８のいずれかに記載の膜厚むら検査装置。     The plurality of LED chips include a plurality of infrared LED chips that emit light of infrared wavelengths and a plurality of red LED chips that emit light of red wavelengths,
    9. The film thickness nonuniformity inspection apparatus according to claim 1, wherein the infrared LED chip and the red LED chip are arranged adjacent to each other in one row.
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