WO2014109368A1 - Film optique multicouche, corps stratifié et verre à double vitrage - Google Patents

Film optique multicouche, corps stratifié et verre à double vitrage Download PDF

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Publication number
WO2014109368A1
WO2014109368A1 PCT/JP2014/050247 JP2014050247W WO2014109368A1 WO 2014109368 A1 WO2014109368 A1 WO 2014109368A1 JP 2014050247 W JP2014050247 W JP 2014050247W WO 2014109368 A1 WO2014109368 A1 WO 2014109368A1
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layer
multilayer film
optical multilayer
oxide layer
transparent substrate
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PCT/JP2014/050247
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English (en)
Japanese (ja)
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すすむ 鈴木
史栄 坂本
秀文 小高
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旭硝子株式会社
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Publication of WO2014109368A1 publication Critical patent/WO2014109368A1/fr

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3647Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer in combination with other metals, silver being more than 50%
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/304Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/402Coloured
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/412Transparent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/416Reflective
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/418Refractive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00Optical elements

Definitions

  • the present invention relates to an optical multilayer film, a laminate, and a multilayer glass.
  • the metal-based optical multilayer film is used for a highly heat-insulating pair glass (Low-E glass) having a low emissivity and a high heat ray reflecting performance, and a heat ray reflecting glass having a high visible light transmittance.
  • these glasses include building window glass and automobile window glass.
  • the window glass for buildings may be subjected to heat treatment for strengthening from the viewpoint of wind resistance and the like.
  • heat treatment for bending may be performed on the window glass for automobiles.
  • the demand for such a silver-based optical multilayer film has increased with the reduction of greenhouse gases such as CO 2 and the increased awareness of energy saving.
  • greenhouse gases such as CO 2
  • it is used also as a transparent conductive film for a display.
  • Glass having a metallic optical multilayer film has a high reflectance and has various colors such as blue, green, brown and gray. When used in a building such as a building, the color of the glass is an important factor that determines the design of the building.
  • the heat ray reflective glass having a silver-based optical multilayer film has an appearance that is close to a neutral color and close to that of a basic glass. In recent years, since an appearance equivalent to that of a base glass is preferred, heat ray reflective glass having a silver-based optical multilayer film is often used.
  • a light absorption layer is added, or the metal layer itself is given light absorption.
  • the transparent substrate side it has an inner coat layer, a high absorption layer having a thickness of 100 mm or more, a middle coat layer, and an infrared reflecting layer made of silver or the like.
  • the ratio divided by the optical thickness of the coat layer is 0.15 to 0.32 (see, for example, Patent Document 1).
  • the color tone of transmitted light and reflected light on the transparent substrate side is not necessarily close to the color tone of the raw glass. For this reason, it is calculated
  • the present invention has been made in order to solve the above-described problems, and provides a metal-based optical multilayer film that has a high heat-shielding property and can provide an appearance close to that of raw glass.
  • the present invention also provides a laminate having such a metal-based optical multilayer film and a multilayer glass.
  • the optical multilayer film of the present invention is formed by forming at least a first oxide layer, a first metal layer, a second oxide layer, a second metal layer, and a third oxide layer in this order.
  • the first oxide layer has a refractive index of 1.95 to 2.05 and a geometric thickness of 40 to 50 nm.
  • the first metal layer has infrared reflective properties and has a geometric thickness of 8 to 16 nm.
  • the second oxide layer has a refractive index of 1.95 to 2.05 and a geometric thickness of 85 to 100 nm.
  • the second metal layer has infrared reflective properties and has a geometric thickness of 10-18 nm.
  • the third oxide layer has a refractive index of 1.95 to 2.05 and a geometric thickness of 20 to 40 nm.
  • the refractive index is a refractive index at a wavelength of 550 nm.
  • the refractive index at a wavelength of 550 nm is simply referred to as a refractive index.
  • the transparent substrate having the optical multilayer film has a visible light transmittance of 69 to 75%, and the color tone of the transmitted light is CIE1976L * a * b * chromaticity coordinates.
  • the solar heat gain (SHGC) of the multi-layer glass having an optical multilayer film is 0.36 to 0.42.
  • the laminated body and multilayer glass which have such an optical multilayer film can be provided.
  • Sectional drawing which shows one Embodiment of the film forming order of an optical multilayer film. Sectional drawing which shows the film forming position of a 1st, 2nd metal primer layer. Sectional drawing which shows the film forming position of a 3rd metal primer layer. Sectional drawing which shows one Embodiment of multilayer glass.
  • FIG. 1 is a cross-sectional view showing an embodiment of the order of forming the optical multilayer film.
  • the optical multilayer film 12 is formed on the transparent substrate 11 to constitute the laminate 10.
  • the optical multilayer film 12 includes, in order from the transparent substrate 11 side, a first oxide layer 121, a first metal layer 122, a second oxide layer 123, a second metal layer 124, and a third oxide layer 125. Is formed at least.
  • the first oxide layer 121 has a refractive index of 1.95 to 2.05 and a geometric thickness of 40 to 50 nm.
  • the first metal layer 122 has infrared reflection characteristics and has a geometric thickness of 8 to 16 nm.
  • the second oxide layer 123 has a refractive index of 1.95 to 2.05 and a geometric thickness of 85 to 100 nm.
  • the second metal layer 124 has infrared reflection characteristics and has a geometric thickness of 10 to 18 nm.
  • the third oxide layer 125 has a refractive index of 1.95 to 2.05 and a geometric thickness of 20 to 40 nm.
  • the first oxide layer 121, the second oxide layer 123, and the third oxide layer 125 may be simply referred to as oxide layers.
  • the first metal layer 122 and the second metal layer 124 are simply referred to as metal layers.
  • the optical multilayer film 12 is roughly classified into a non-heat treated product and a heat treated product.
  • the non-heat treated product is a finished product which is a final form by performing only film formation, and is not subjected to heat treatment for strengthening or bending after film formation.
  • the heat-treated product is a final product in a final form by performing heat treatment for strengthening or bending after film formation.
  • the optical multilayer film 12 may be either a non-heat treated product or a heat treated product.
  • the optical multilayer film 12 may be formed so that the geometric thickness of each layer is within the above range at the time of forming each layer, but in the case of a heat-treated product after the entire film formation.
  • a heat-treated product after heat treatment, there is a similar structure, specifically, an oxide layer having a predetermined refractive index and a geometric thickness and a metal layer having a predetermined geometric thickness having infrared reflection characteristics. It is preferable to have a structure in which the layers are stacked in a predetermined order.
  • the geometric thickness is simply referred to as thickness.
  • the transparent substrate 11 is not particularly limited.
  • a glass plate having an inorganic transparency such as a window glass for buildings, a commonly used float glass, or a soda-lime glass manufactured by a roll-out method is used. Can be used.
  • colorless glass such as clear glass and high transmission glass, and green colored glass such as heat ray absorption glass can be used. However, in consideration of visible light transmittance, clear glass, high transmission glass, etc. Colorless glass is preferred.
  • Various tempered glasses such as air-cooled tempered glass and chemically tempered glass can also be used.
  • various glasses such as borosilicate glass, low expansion glass, zero expansion glass, low expansion crystallized glass, and zero expansion crystallized glass can be used.
  • the thickness of the transparent substrate 11 is not necessarily limited, but is preferably 0.5 to 20 mm, for example.
  • the first oxide layer 121, the second oxide layer 123, and the third oxide layer 125 are reflected in the visible region by a light interference effect with the first metal layer 122 and the second metal layer 124. It is provided in order to adjust the rate and the like so that the optical characteristics of the optical multilayer film 12 become desired characteristics.
  • Each oxide layer independently has a refractive index of 1.95 to 2.05. By setting it as such a refractive index, the reflectance etc. in a visible region can be adjusted with the optical interference effect with a metal layer, and the optical characteristic of the optical multilayer film 12 can be made into a desired characteristic.
  • the thickness of the first oxide layer 121 is 40 to 50 nm
  • the thickness of the second oxide layer 123 is 85 to 100 nm
  • the thickness of the third oxide layer 125 is 20 to 40 nm.
  • each oxide layer is preferably in the following range from the viewpoint of making the optical characteristics of the optical multilayer film 12 desired optical characteristics.
  • the thickness of the first oxide layer 121 is preferably 48 nm or less, and more preferably 45 nm or less.
  • the thickness of the second oxide layer 123 is preferably 94 nm or less, and more preferably 93 nm or less.
  • the thickness of the third oxide layer 125 is preferably 23 nm or more, and more preferably 25 nm or more.
  • the ratio (D 3 / D 2 ) of the thickness (D 3 ) of the third oxide layer 125 to the thickness (D 2 ) of the second oxide layer 123 is preferably 0.2 to 0.40. .
  • the ratio (D 3 / D 2 ) is more preferably 0.23 or more, and further preferably 0.25 or more.
  • each oxide layer is not particularly limited as long as the refractive index is in the range of 1.95 to 2.05, and various oxides can be used.
  • the constituent materials of each oxide layer may be the same or different as long as the refractive index is in the range of 1.95 to 2.05.
  • Each oxide layer is not limited to a single layer, and although not shown, the oxide layer may include two or more layers, and the number of each oxide layer may be the same or different.
  • Each oxide layer preferably has at least one selected from an aluminum zinc oxide layer and a tin zinc oxide layer.
  • the aluminum zinc oxide layer is preferably one in which the ratio of aluminum to the total amount of zinc and aluminum is 1 to 30 atomic%.
  • the proportion of aluminum is more preferably 3 atomic% or more from the viewpoint of reducing internal stress.
  • the proportion of aluminum is more preferably 10 atomic percent or less, and even more preferably 7 atomic percent or less, from the viewpoint of suppressing the formation of hydroxide.
  • the thickness is 5 nm or more, and 10 nm or more is more preferable.
  • Such an aluminum-doped zinc oxide can be obtained, for example, by forming a film in an oxygen atmosphere using a zinc target containing 1 to 30 atomic% of aluminum.
  • the tin-zinc oxide layer a layer in which the ratio of tin to the total amount of zinc and tin is 10 to 90% by mass is preferable.
  • the ratio of tin By setting the ratio of tin to 10% by mass or more, crystallization can be suppressed and oxygen barrier properties and alkali barrier properties can be improved.
  • the adhesiveness with another layer can be made favorable by the ratio of tin being 90 mass% or less.
  • the proportion of tin is more preferably 40% by mass or more, and further preferably 45% by mass or more, from the viewpoint of improving oxygen barrier properties and alkali barrier properties. Further, the proportion of tin is more preferably 60% by mass or less, and further preferably 55% by mass or less, from the viewpoint of improving adhesion.
  • the thickness is preferably 5 nm or more, and more preferably 10 nm or more.
  • a zinc oxide doped with tin can be obtained, for example, by forming a film in an oxygen atmosphere using a zinc target containing 10 to 90% by mass of tin.
  • each oxide layer has an aluminum zinc oxide layer and a tin zinc oxide layer.
  • an aluminum zinc oxide layer is provided on the upper side. It is preferable to have.
  • an aluminum zinc oxide layer is provided in the lower side. It is preferable to have.
  • the first oxide layer 121 it is preferable to have a tin zinc oxide layer and an aluminum zinc oxide layer sequentially from the transparent substrate 11 side.
  • the second oxide layer 123 it is preferable to have a tin zinc oxide layer and an aluminum zinc oxide layer in order from the transparent substrate 11 side, and in particular, aluminum zinc oxide in order from the transparent substrate 11 side.
  • the 3rd oxide layer 125 it is preferable to have an aluminum zinc oxide layer and a tin zinc oxide layer in order from the transparent substrate 11 side, for example.
  • the first metal layer 122 and the second metal layer 124 are not particularly limited as long as they contain a metal element having infrared reflection characteristics as a main component, but have at least one selected from copper, silver, and gold as a main component. It is preferable to contain.
  • the content is preferably 0.1 to 20 atomic% in the total of the metal element other than the main component and the metal element other than the main component.
  • the first metal layer 122 and the second metal layer 124 preferably contain silver as a main component from the viewpoint of performance such as infrared reflection characteristics.
  • silver As what contains silver as a main component, what consists only of silver and what consists of silver and metal elements other than silver are mentioned.
  • the metal element other than silver at least one selected from palladium, platinum, and gold is preferable from the viewpoints of suppression of migration and thermal and chemical stability.
  • the content of the metal element other than silver is preferably 0.1 to 20 atomic% in the total amount of silver and the metal element other than silver.
  • the content of palladium is preferably 0.1 to 20 atomic%, more preferably 0.1 to 10 atomic% in the total amount of silver and palladium.
  • the thickness of the first metal layer 122 is 8 to 16 nm.
  • the thickness of the second metal layer 124 is 10 to 18 nm.
  • the transmittance in the infrared region can be reduced and the heat shielding property can be increased.
  • the optical characteristics of the optical multilayer film 12 can be set to desired characteristics.
  • the thickness of the second metal layer 124 is preferably 15 nm or less, and more preferably 13 nm or less.
  • the optical multilayer film 12 is formed of at least the first oxide layer 121, the first metal layer 122, the second oxide layer 123, the second metal layer 124, and the third oxide layer 125 in this order.
  • other layers can be formed as necessary and within the limits not departing from the spirit of the present invention.
  • a first metal primer layer 126 can be formed between the first metal layer 122 and the second oxide layer 123, and the second metal layer 124 and the third oxide layer 123 can be formed.
  • a second metal primer layer 127 can be formed between the oxide layer 125 and the oxide layer 125.
  • the first metal primer layer 126 is used for suppressing oxidation of the first metal layer 122 when the second oxide layer 123 is formed on the first metal layer 122, and for the first heat treatment. It is provided for protecting the metal layer 122 and for improving heat shielding properties by absorbing visible light.
  • the second metal primer layer 127 is used to suppress oxidation of the second metal layer 124 when the third oxide layer 125 is formed on the second metal layer 124, and also during heat treatment. It is provided for protecting the second metal layer 124 and for improving the heat shielding property by absorbing visible light.
  • each metal primer layer is not necessarily limited as long as it is a metal material, but a metal material having absorption in the visible light region is preferable, and specifically, selected from titanium, zirconium, hafnium, niobium, chromium, and nickel. It is preferable to contain at least one selected from the above as a main component.
  • An alloy can be used as such a thing, for example, a titanium zirconium alloy, a titanium hafnium alloy, a nickel chromium alloy, a nickel aluminum alloy, a nickel iron alloy etc. can be used.
  • the constituent material of each metal primer layer preferably contains titanium as a main component, more preferably contains 90% by mass or more of titanium, and more preferably contains 95% by mass or more of titanium.
  • the thickness of the first metal primer layer 126 and the second metal primer layer 127 is preferably 1 nm or more. By setting it as such thickness, it becomes easy to acquire the said effect. Further, the thickness of the first metal primer layer 126 is preferably 5 nm or less, and the thickness of the second metal primer layer 127 is preferably 8 nm or less. By setting it as such thickness, the optical characteristic of the optical multilayer film 12 can be made into a desired optical characteristic.
  • the thickness of the first metal primer layer 126 and the second metal primer layer 127 is preferably 4 nm or less, and more preferably 3 nm or less.
  • a third metal primer layer 128 can be formed on the optical multilayer film 12 between the second metal layer 124 and the second metal primer layer 127.
  • the first metal primer layer 126 and the second metal primer layer 127 are formed thick from the viewpoints of suppressing the oxidation of the first metal layer 122 and the second metal layer 124 and improving the heat shielding property. Is preferred. However, in the case of a heat-treated product, if the first metal primer layer 126 and the second metal primer layer 127 are thickened, haze is likely to occur when heat-treated. From the viewpoint of suppressing the occurrence of haze, it is preferable to provide the third metal primer layer 128.
  • the constituent material of the third metal primer layer 128 is not particularly limited as long as generation of haze can be suppressed, but preferably contains at least one selected from palladium, platinum, and gold as a main component, particularly palladium as a main component. It is preferable to contain as palladium, and it is more preferable to contain 90 atomic% or more of palladium. By setting it as such, generation
  • the thickness of the third metal primer layer 128 is preferably 1 nm or more. By setting the thickness to 1 nm or more, the generation of haze when heat-treated can be effectively suppressed, and the thermal and chemical stability of the second metal layer 124 can be improved. Moreover, the optical characteristic of the optical multilayer film 12 can be made into a desired characteristic by thickness being 5 nm or less.
  • the first metal layer 122, the second metal layer 124, and the like deteriorate due to oxygen or moisture diffused from the surface during storage until the finished product or heat treatment, or during use of the finished product.
  • a deterioration suppressing layer can be provided.
  • the deterioration suppressing layer is preferably provided in contact with the upper portion of the third oxide layer 125.
  • the deterioration suppressing layer may be composed of one layer, or may be composed of two or more layers.
  • the deterioration suppressing layer preferably has at least one selected from a titanium-containing metal layer, a titanium-containing nitride layer, and a titanium-containing oxide layer.
  • Examples of the titanium-containing metal layer in the deterioration suppressing layer include those composed of titanium or those composed of titanium and elements other than titanium.
  • Examples of elements other than titanium include zirconium, hafnium, silicon, and the like.
  • Examples of the titanium-containing nitride layer in the deterioration suppressing layer include those made of titanium nitride or those made of a composite nitride of elements other than titanium and titanium.
  • elements other than titanium include at least one selected from zirconium, hafnium, boron, aluminum, and silicon. Among these, at least one selected from zirconium, hafnium, aluminum, and silicon is preferable from the viewpoint of oxygen barrier properties.
  • Examples of the titanium-containing oxide layer in the deterioration suppressing layer include those made of titanium oxide or those made of a complex oxide of elements other than titanium and titanium.
  • Examples of elements other than titanium include at least one selected from zirconium, silicon, and tin. Among these, zirconium is preferable from the viewpoint of scratch resistance.
  • the thickness is preferably 0.5 nm or more.
  • the thickness is more preferably 1 nm or more.
  • the thickness is 10 nm or less, and 5 nm or less is more preferable.
  • the optical multilayer film 12 is formed on the third oxide layer 125 or the deterioration suppressing layer as necessary and in order from the transparent substrate 11 side as long as it does not contradict the gist of the present invention.
  • An adhesive layer and a protective layer can be provided.
  • the adhesive layer is provided as necessary in order to improve the adhesiveness between the protective layer and the base layer.
  • the thickness is preferably 0.5 nm or more. By setting the thickness to 0.5 nm or more, the adhesiveness between the protective layer and the base layer can be effectively improved.
  • the thickness of the adhesive layer is usually sufficient if it is 5 nm.
  • the protective layer is not particularly limited as long as it can improve the scratch resistance of the surface, and examples thereof include a carbon layer containing carbon as a main component. When the protective layer is a carbon layer, it disappears when heat treatment is performed, but the scratch resistance from film formation to heat treatment can be improved.
  • the thickness of the protective layer is preferably 1 nm or more. By setting the thickness of the protective layer to 1 nm or more, the scratch resistance can be effectively improved.
  • the thickness of the protective layer is more preferably 2 nm or more. Further, the thickness of the protective layer is preferably 10 nm or less, more preferably 7 nm or less, and further preferably 5 nm or less.
  • the optical multilayer film 12 is composed of oxides, nitrides, carbides, or composite compounds of various elements as necessary and within the limits of the gist of the present invention in addition to the above-described layers.
  • a layer can be provided. Specifically, a layer formed of oxide, nitride, carbide, or a composite compound of titanium, zirconium, niobium, tantalum, chromium, zinc, aluminum, gallium, indium, silicon, tin, or the like can be provided. Examples of the oxide constituting such a layer include zinc oxide containing aluminum, gallium, silicon, tin, and indium oxide containing tin. As the other, for example, SiO x C y, SiO x N y, SiAl x N y, and the like SiAl x O y N z.
  • the optical multilayer film 12 has the following optical characteristics.
  • the optical characteristics of the present invention can be obtained by measuring with “D65 light source 10 ° field of view” as a light source. Further, when the optical multilayer film 12 is a non-heat-treated product, it is sufficient that the optical characteristics after the entire film formation satisfy the following optical characteristics. On the other hand, when the optical multilayer film 12 is a heat-treated product, the optical properties after the heat treatment should satisfy the following optical properties.
  • the visible light transmittance of the transparent substrate 11 having the optical multilayer film 12 is 69 to 75%, and the color tone of the transmitted light is CIE1976L * a * b *.
  • a * ⁇ 5 to 1
  • b * ⁇ 4 to 3
  • the visible light reflectance on the transparent substrate 11 side is 5 to 11%
  • the color tone of the reflected light on the transparent substrate 11 side is the above coordinates .
  • the optical multilayer film 12 preferably has the above characteristics when the transparent substrate 11 is a clear glass plate having a thickness of 6 mm.
  • the visible light transmittance and the visible light reflectance are both defined in JIS R3106: 1998.
  • the optical multilayer film 12 is provided on the air layer side surface of the first transparent substrate of the multilayer glass having an air layer between the first transparent substrate and the second transparent substrate.
  • the solar heat gain (SHGC) of the multilayer glass having the film 12 is in the range of 0.36 to 0.42.
  • SHGC solar heat gain rate
  • the first transparent substrate is an outer glass plate (thickness 6 mm)
  • the second transparent substrate is an inner glass plate (thickness 6 mm)
  • the thickness of the air layer is 6 mm. It is preferable to have the above-mentioned solar heat gain rate (SHGC).
  • the solar heat gain coefficient is a measure of the heat shielding property, that is, how much heat generated by sunlight is blocked.
  • the solar heat gain rate (SHGC) is the ratio of energy released to the indoor side with respect to the energy incident from the outdoor side in the multi-layer glass or single plate glass.
  • the solar heat acquisition rate is represented by a number between 0 and 1. The smaller the solar heat gain rate, the less solar heat is transmitted. According to the optical multilayer film 12, the solar heat acquisition rate can be reduced while maintaining an appearance close to that of a raw glass.
  • the solar heat gain rate (SHGC) is an index used by National ⁇ ⁇ ⁇ Fenestration Rating Council.
  • the non-heat treated product and the heat treated product usually have different appearance colors due to the different laminated structures.
  • the color tone of transmitted light is preferentially matched with the color tone of reflected light on the transparent substrate 11 side.
  • the difference ⁇ E is about 4.
  • such a mismatch ⁇ E can be made 3 or less.
  • SHGC solar heat gain
  • Such an optical multilayer film 12 is obtained by cleaning the surface of the transparent substrate 11 and forming each layer to a predetermined thickness.
  • the film forming method is not particularly limited, and a CVD method, a vapor deposition method, a sputtering method, or the like can be applied.
  • the area of the transparent substrate 11 is large, the uniformity of thickness is easy to control and the productivity is excellent, so the direct current or alternating current dual sputtering method is preferable.
  • the first oxide layer 121, the second oxide layer 123, and the third oxide layer 125 are formed by using, for example, a metal target containing a metal element contained in these oxide layers as a sputtering target and argon.
  • a film is formed by reactive sputtering in an oxidizing atmosphere containing oxygen and oxygen.
  • the first metal layer 122, the second metal layer 124, the first metal primer layer 126, the second metal primer layer 127, and the third metal primer layer 128 are included in these layers as a sputter target, for example.
  • a metal target containing a metal element a film is formed by sputtering in an atmosphere consisting only of argon.
  • the deterioration suppressing layer is formed by performing sputtering in an atmosphere including only argon, an atmosphere including argon and oxygen, or an atmosphere including argon and nitrogen using a metal target including titanium as a sputtering target. Form a film.
  • the adhesive layer is formed, for example, by sputtering in an atmosphere containing argon and nitrogen using a metal target containing a metal contained in the adhesive layer as a sputtering target.
  • the protective layer is formed by sputtering in a non-oxidizing atmosphere using a carbon target containing carbon as a main component as a sputtering target.
  • FIG. 4 shows an embodiment of the double glazing.
  • the multilayer glass 20 is disposed so that the laminate 10 and the counter substrate 21 are spaced apart from each other with a spacer 22 interposed therebetween.
  • a primary sealant 23 seals between the laminate 10 and the spacer 22 and between the counter substrate 21 and the spacer 22.
  • the peripheral edge between the laminated body 10 and the counter substrate 21 is sealed by the secondary sealing material 24.
  • a desiccant 27 for suppressing condensation in the hollow layer 26 through the through hole 25 is disposed inside the spacer 22.
  • the hollow layer 26 is usually sealed with air or argon gas.
  • the laminate 10 is disposed on the outdoor side with respect to the counter substrate 21.
  • the outer glass plate of the multilayer glass 20 becomes the transparent substrate 11 of the laminate 10, and the inner glass plate becomes the counter substrate 21.
  • the laminated body 10 is arrange
  • the double glazing 20 preferably has a solar heat gain (SHGC) of 0.36 to 0.42.
  • a laminated body is suitable for buildings, it is not necessarily limited to buildings, and can be used for vehicles such as automobiles as far as applicable.
  • the configuration of the laminated film is not limited to the above-described configuration, and other layers can be included as necessary and within the limits not departing from the object of the present invention.
  • each film was formed with the film configuration shown in Table 1 by a sputtering method, and the laminate 10 having the optical multilayer film 12 was manufactured.
  • the structure and thickness shown in Table 1 are those at the time of film formation of each film, and do not necessarily match the structure and thickness after film formation as a whole.
  • the titanium film to be the first metal primer layer 126 is partially or wholly oxidized during the formation of the second oxide layer 123 and during the heat treatment, so that titanium oxide (TiO 2 or TiO x (x ⁇ 2)).
  • the TiN x film which is an adhesive layer, is partially or wholly oxidized during heat treatment to become titanium oxide (TiO 2 or TiO x (x ⁇ 2)).
  • the carbon film as the protective layer disappears during the heat treatment.
  • An in-line sputtering apparatus was used for film formation, and a zinc target containing 5 atomic% aluminum, a zinc target containing 48 mass% tin, a titanium target, a silver target, and a palladium target were installed in the sputtering chamber. .
  • a cleaned 3 mm thick soda lime glass plate was introduced into this in-line type sputtering apparatus and evacuated until the degree of vacuum was 2 ⁇ 10 ⁇ 6 Torr or less in the load lock chamber. Subsequently, a soda lime glass plate is introduced into the sputtering chamber, and the first oxide layer 121, the first metal layer 122, the first metal primer layer 126, the second oxide layer 123, and the second metal layer. 124, third metal primer layer 128 (Example 2 only), second metal primer layer 127, third oxide layer 125, adhesive layer (Example 2 only), protective layer (Example 2 only) An optical multilayer film 12 was formed in this order. In Example 2, heat treatment was further performed in air at 730 ° C. for 4 minutes.
  • the 1st oxide layer 121 is a tin zinc oxide film
  • membrane what the ratio of tin with respect to the total amount of tin and zinc is 48 mass%), and aluminum zinc oxide in order from the soda-lime glass plate side.
  • a film (the ratio of aluminum to the total amount of aluminum and zinc was 5.0 atomic%) was used.
  • the refractive indexes of the tin zinc oxide film and the aluminum zinc oxide film are both in the range of 1.95 to 2.05.
  • the second oxide layer 123 includes, in order from the soda lime glass plate side, an aluminum zinc oxide film (a ratio of aluminum with respect to the total amount of aluminum and zinc of 5.0 atomic%), a tin zinc oxide film (The ratio of tin to 48% by mass with respect to the total amount of tin and zinc), aluminum zinc oxide film (the ratio of aluminum to the total amount of aluminum and zinc is 5.0 atomic%) .
  • the third oxide layer 125 includes, in order from the soda lime glass plate side, an aluminum zinc oxide film (a ratio of aluminum with respect to the total amount of aluminum and zinc of 5.0 atomic%), a tin zinc oxide film (The ratio of tin to the total amount of tin and zinc is 48% by mass).
  • the first metal layer 122 and the second metal layer 124 were pure silver films.
  • the first metal primer layer 126 and the second metal primer layer 127 were pure titanium films. These titanium films are partially or wholly oxidized when an aluminum zinc oxide film is formed thereon to become titanium oxide (TiO 2 or TiO x (x ⁇ 2)).
  • the third metal primer layer 128 was a pure palladium film.
  • the deterioration suppressing layer was a titanium oxide film (TiO 2 film, refractive index: more than 2.05).
  • the film forming conditions for each film are as shown below.
  • the film forming pressure was 3 to 5 mTorr.
  • the tin zinc oxide film uses a zinc target containing 48% by mass of tin, and the introduced gas is a mixed gas of argon and oxygen (the ratio of the gas pressure of argon and oxygen (P Ar / P O2 ) is 10 / As 9), the film was formed with a power density of 3.6 W / cm 2 .
  • the aluminum zinc oxide film uses a zinc target containing 5 atomic% of aluminum, and the introduced gas is a mixed gas of argon and oxygen (the ratio of the gas pressure of argon and oxygen (P Ar / P O2 ) is 10 / As 9), the film was formed with a power density of 3.6 W / cm 2 .
  • the titanium oxide film uses a titanium target, the introduced gas is a mixed gas of argon and oxygen (the ratio of the gas pressure of argon and oxygen (P Ar / PO 2 ) is 6/4), and the power density is 3. Film formation was performed at 6 W / cm 2 .
  • the silver film was formed using a silver target with an introduction gas of 100% argon and a power density of 0.7 W / cm 2 .
  • the titanium film was formed using a titanium target with an introduction gas of 100% argon and a power density of 0.7 W / cm 2 .
  • the palladium film was formed using a palladium target with an introduction gas of 100% argon and a power density of 0.5 W / cm 2 .
  • the TiN x film uses a titanium target, introduces the mixed gas of argon and nitrogen (the ratio of the argon and nitrogen gas pressure (P Ar / P N2 ) is 3/7), and the power density is 3.6 W / Film formation was performed with cm 2 .
  • the carbon film was formed using a carbon target with an introduction gas of 100% argon and a power density of 3.6 W / cm 2 .
  • the laminated body 10 of Example 1 (without heat treatment) and the laminated body 10 of Example 2 (with heat treatment) were subjected to spectroscopic measurement using a Hitachi spectrophotometer (U-3100 type) to transmit visible light.
  • the ratio (T v ), the visible light reflectance (R v1 ) on the transparent substrate 11 side, and the visible light reflectance (R v2 ) on the optical multilayer film 12 side were determined.
  • the visible light transmittance (T v ) and the visible light reflectance (R v1 , R v2 ) were determined in accordance with the provisions of JIS R3106: 1998.
  • the color tone of transmitted light and reflected light was measured according to JIS Z 8722 and determined according to JIS Z 8729.
  • the optical multilayer film 12 is provided on the air layer side surface of the outer glass plate of the multilayer glass having an air layer (thickness 12 mm) between the outer glass plate (thickness 6 mm) and the inner glass plate (thickness 6 mm).
  • SHGC solar heat acquisition rate
  • the laminates 10 of Examples 1 and 2 have a visible light transmittance of 69 to 75% and a color tone of transmitted light of CIE1976L * a * b * chromaticity coordinates
  • visible light reflectance on the soda lime glass plate side is 5 to 11%
  • color tone of reflected light on the soda lime glass plate side is the above coordinates
  • visible light reflectance on the optical multilayer film side is 8 to 15%
  • Appearance close to that of glass is obtained.
  • the solar heat gain rate (SHGC) is 0.36 to 0.42, and the heat shielding property is improved.
  • SYMBOLS 10 Laminated body, 11 ... Transparent substrate, 12 ... Optical multilayer film, 121 ... 1st oxide layer, 122 ... 1st metal layer, 123 ... 2nd oxide layer, 124 ... 2nd metal layer, 125 ... third oxide layer, 126 ... first metal primer layer, 127 ... second metal primer layer, 128 ... third metal primer layer, 20 ... multi-layer glass, 21 ... counter substrate, 22 ... spacer , 23 ... primary sealing material, 24 ... secondary sealing material, 25 ... through-hole, 26 ... hollow layer, 27 ... desiccant.

Abstract

L'invention concerne un film optique multicouche formé à partir de films d'au moins, dans l'ordre suivant, une première couche d'oxyde, une première couche métallique, une deuxième couche d'oxyde, une deuxième couche métallique, et une troisième couche d'oxyde. Lorsque le film optique multicouche est disposé sur un substrat transparent, le substrat transparent comportant le film optique multicouche présente une transmittance de lumière visible comprise entre 69 et 75 % ; la lumière transmise présente une couleur dont les coordonnées de l'espace chromatique (L*,a*,b*) CIE 1976 sont les suivantes : a* = -5 à 1 et b* = -4 à 3 ; le côté du substrat transparent a une réflectance de la lumière visible comprise entre 5 et 11 % ; la lumière réfléchie à partir du côté du substrat transparent a une couleur dont les coordonnées de l'espace chromatique, comme mentionné ci-dessus, sont les suivantes : a* = -5 à 0 et b* = -10 à 4; le côté film optique multicouche a une réflectance de la lumière visible comprise entre 8 et 15 % ; la lumière réfléchie par le côté du film optique multicouche a une couleur dont les coordonnées de l'espace chromatique, comme mentionné ci-dessus, sont les suivantes : a* = -12 à 0 et b* = 0 à 18. En outre, lorsque le film optique multicouche est utilisé avec du double vitrage, le double vitrage comportant le film optique multicouche a un coefficient d'apport par rayonnement solaire (SHGC) compris entre 0,36 et 0,42.
PCT/JP2014/050247 2013-01-11 2014-01-09 Film optique multicouche, corps stratifié et verre à double vitrage WO2014109368A1 (fr)

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WO2016153767A1 (fr) * 2015-03-20 2016-09-29 Cardinal Cg Company Revêtements à faible émissivité avec film bloquant de nickel-aluminium
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WO2016153767A1 (fr) * 2015-03-20 2016-09-29 Cardinal Cg Company Revêtements à faible émissivité avec film bloquant de nickel-aluminium
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US10067274B2 (en) 2015-03-20 2018-09-04 Cardinal Cg Company Nickel-aluminum blocker film low-emissivity coatings
EP4049983A1 (fr) * 2015-03-20 2022-08-31 Cardinal CG Company Revêtement à émission contrôlée à base de film de blocage en nickel-aluminium
US10465434B2 (en) 2015-03-20 2019-11-05 Cardinal Cg Company Nickel-aluminum blocker film multiple cavity controlled transmission coating
EP3929167A1 (fr) * 2015-03-20 2021-12-29 Cardinal CG Company Revêtement à transmission régulée à cavités multiples de film de blocage nickel aluminium
WO2016153768A1 (fr) * 2015-03-20 2016-09-29 Cardinal Cg Company Revêtement à émission contrôlée à base de film de blocage en nickel-aluminium
WO2016153769A1 (fr) * 2015-03-20 2016-09-29 Cardinal Cg Company Revêtement à transmission régulée à cavités multiples de film de blocage nickel aluminium
WO2018179908A1 (fr) * 2017-03-31 2018-10-04 パナソニックIpマネジメント株式会社 Procédé de fabrication d'unité de panneau en verre et procédé de fabrication de fenêtre en verre
JPWO2018179908A1 (ja) * 2017-03-31 2020-01-23 パナソニックIpマネジメント株式会社 ガラスパネルユニットの製造方法、およびガラス窓の製造方法
CN112424654A (zh) * 2018-07-17 2021-02-26 Agc株式会社 光学构件
CN112424654B (zh) * 2018-07-17 2023-09-19 Agc株式会社 光学构件
JPWO2020054762A1 (ja) * 2018-09-14 2021-09-16 Agc株式会社 電波透過性基板
JP7439760B2 (ja) 2018-09-14 2024-02-28 Agc株式会社 電波透過性基板
EP3851885A4 (fr) * 2018-09-14 2022-06-08 Agc Inc. Substrat transmettant les ondes radio
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