WO2014104461A1 - Procédé de préparation d'un matériau en vrac de ti2aln et procédé de micro-usinage par décharge électrique - Google Patents

Procédé de préparation d'un matériau en vrac de ti2aln et procédé de micro-usinage par décharge électrique Download PDF

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WO2014104461A1
WO2014104461A1 PCT/KR2013/000232 KR2013000232W WO2014104461A1 WO 2014104461 A1 WO2014104461 A1 WO 2014104461A1 KR 2013000232 W KR2013000232 W KR 2013000232W WO 2014104461 A1 WO2014104461 A1 WO 2014104461A1
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bulk material
max phase
phases
aln
aln bulk
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PCT/KR2013/000232
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English (en)
Korean (ko)
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강명창
김광호
허재영
성진우
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부산대학교 산학협력단
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Priority claimed from KR1020120158355A external-priority patent/KR101459196B1/ko
Priority claimed from KR1020130002735A external-priority patent/KR20140090750A/ko
Application filed by 부산대학교 산학협력단 filed Critical 부산대학교 산학협력단
Publication of WO2014104461A1 publication Critical patent/WO2014104461A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/58007Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides
    • C04B35/58014Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides based on titanium nitrides, e.g. TiAlON
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
    • C04B35/6261Milling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/105Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38Non-oxide ceramic constituents or additives
    • C04B2235/3852Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3886Refractory metal nitrides, e.g. vanadium nitride, tungsten nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40Metallic constituents or additives not added as binding phase
    • C04B2235/402Aluminium
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/666Applying a current during sintering, e.g. plasma sintering [SPS], electrical resistance heating or pulse electric current sintering [PECS]
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/77Density
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Definitions

  • the present invention relates to a method for manufacturing Ti 2 AlN bulk material having a MAX phase (Phases) by using a spark plasma sintering (SPS) method by mixing and synthesizing powders of Ti, Al and TiN.
  • SPS spark plasma sintering
  • the present invention relates to a micro discharge machining method for processing microstructures of hundreds to tens of micro units of materials thus produced.
  • Korean Patent Laid-Open Publication No. 10-2011-0131686 et al. Discloses a method of manufacturing a coating film for such TiAlN material, but a method of making a bulk material is not yet known. That is, the study of the MAX phase (Phases) Ti 2 AlN bulk material is in a state without any research, and recently, a study on the coating of Ti 2 AlN has been occasionally reported as in the publication.
  • titanium alloy material is a chemically active metal, it has a disadvantage of shortening the life of the tool during cutting and a long time due to the low electrical conductivity during discharge machining, and the burning of the bulk material due to the low thermal conductivity. There is a problem that occurs. Titanium alloys have been actively used in various industries as materials for high temperature structural components. In particular, there are many difficulties in processing fine and deep holes such as cooling holes in aircraft turbine blades.
  • an object of the present invention is to provide a method for producing a MAX phase Ti 2 AlN bulk material having both excellent heat resistance and wear resistance of the ceramic while maintaining the advantages of the existing titanium alloy.
  • EDM Electro Discharge Machining
  • the present invention provides a method for manufacturing a MAX phase Ti 2 AlN bulk material by milling and spark plasma sintering method using titanium (Ti), aluminum (Al) and titanium nitride (TiN) powder as a raw material. do.
  • the present invention by mixing the powder of Ti, Al and TiN to synthesize a hybrid powder,
  • the present invention in the above, the plasma sintering step, MAX phase (Phases) Ti 2 AlN bulk material manufacturing method, characterized in that proceeds at a temperature of 1000 to 1500 °C at a vacuum degree of 0.1 to 0.5Pa.
  • the present invention provides a method for manufacturing a MAX phase Ti 2 AlN bulk material, characterized in that the mechanical pressure is applied to the sintered body in the plasma sintering step to 10 to 50MPa.
  • the present invention in the above, the synthesis of the mixed powder is mixed with an abrasion mill or mixer, MAX phase (Phases) characterized in that the inert gas in the mixing chamber to prevent oxidation of the mixed powder during mixing It provides a Ti 2 AlN bulk material manufacturing method.
  • MAX phase Phases
  • the present invention also provides a method for manufacturing a MAX phase Ti 2 AlN bulk material, characterized in that the mixing efficiency is increased by putting a plurality of stainless steel balls in the mixing chamber.
  • a MAX phase (Phases) 2 Ti MAX phase (Phases) Ti 2 AlN bulk material processing method which is characterized in that AlN processing by applying a micro-electric discharge machining in the bulk material.
  • the applied voltage is 50 to 70V
  • the applied current is provided to the MAX phase (Phases) Ti 2 AlN bulk material processing method, characterized in that the processing to 1 to 75 A as a pulse current. do.
  • the pulse current is a peak current of 2 to 4 stages
  • the on time is 10 to 20 ⁇ s
  • the off time is 10 to 50
  • the processing time is 15 to 40 seconds, characterized in that the MAX phase ( Phases) Provides Ti 2 AlN bulk material processing method.
  • the micro-discharge machining MAX phase (Phases), characterized in that to form a 2D (Dimension), 2.5D (Dimension), 3D (Dimension) micro-shaped or fine holes of the level of 5 to 500 ⁇ m ) Provides Ti 2 AlN bulk material processing method.
  • the present invention can provide a heat resistant and wear resistant component characterized by being produced by the above processing method.
  • the present invention it is possible to replace the existing titanium alloy material by manufacturing the MAX phase (Tihas) Ti 2 AlN bulk material having the advantages of metal and non-metal at the same time.
  • micro-discharge drilling utilizing the excellent thermal conductivity and electrical conductivity of the Ti 2 AlN bulk material, it is possible to micro-shaped processing and micro-hole processing of 5 to 500 ⁇ m level which cannot be performed by general machining. do.
  • Figure 1 is a flow chart showing a series of processes for manufacturing a MAX phase (Phases) Ti 2 AlN bulk material.
  • Ti6242 is a table comparing the physical properties of Ti6242, Al 2 O 3 and the existing bulk material of Ti 2 AlN of the present invention.
  • FIG. 3 is a table diagram summarizing the conditions of micro-discharge machining on the Ti 2 AlN bulk material of the present invention.
  • Figure 4 is a graph comparing the processing time of the conventional bulk material Ti6242 and Ti 2 AlN of the present invention.
  • FIG. 5 is a schematic configuration diagram of an apparatus for performing micro discharge machining of Ti 2 AlN of the present invention.
  • a powder of Ti 99.5% purity, 10 ⁇ m
  • Al 99.8% purity, 3 ⁇ m
  • TiN 99.5% purity, 3 ⁇ m
  • the mixing chamber was first filled with argon (Ar) gas to protect the mixed powder from oxidation under vacuum, and a 5mm diameter stainless steel ball was placed in the chamber to increase the mixing efficiency. Put in.
  • the synthesized powder was pressed into a graphite mold having a diameter of 30 mm and pressed beforehand, and then sintered using a discharge plasma sintering furnace.
  • the sample was heated to 1000-1500 ° C., preferably 1250 ° C. for less than 20 minutes in 0.1-0.5 Pa, preferably, 0.3 Pa vacuum, while adjusting the applied current.
  • the mechanical pressure is applied to 10 to 50 MPa, preferably 30 MPa, and maintained for about 10 minutes to proceed with the sintering process. Therefore, MAX phase (Phases) Ti 2 AlN bulk material was prepared by maintaining the sintering temperature 1250 °C, mechanical pressure 30MPa, pressurization about 10 minutes.
  • the prepared material was compared with the conventional titanium alloy (Ti6242) by measuring the hardness, density, thermal conductivity and electrical conductivity.
  • the table shown in FIG. 2 shows data on material properties of MAX phase Ti 2 AlN bulk material, Ti6242 and Al 2 O 3 . This is to compare the workability of the MAX phase Ti 2 AlN bulk material and the conventional titanium alloy (Ti6242) prepared according to the embodiment of the present invention and the appropriate processing conditions of the MAX phase Ti 2 AlN bulk material It is to select.
  • Al 2 O 3 is a ceramic and has a non-conductive property, so discharge processing is impossible.
  • the present invention was compared with the conventional titanium alloy (Ti6242) in order to compare and evaluate the workability of the prepared MAX phase (Phases) Ti 2 AlN bulk material with respect to the processing time.
  • micro discharge drilling equipment was used to control control factors (voltage, peak current, on time, off time) using the Taguchi test method. Processing conditions were calculated.
  • the table shown in Figure 3 presents the basic processing conditions, based on this mixed orthogonal array table L 18 (2 1 to compare the machinability of the MAX phase (Phases) Ti 2 AlN bulk material and the conventional titanium alloy (Ti6242) The experiment was carried out using ⁇ 3 7 ). Discharge machining was performed using the micro discharge drilling equipment of FIG. 5 to obtain the following results.
  • the Taguchi method was used based on the results of the mixed orthogonal array L 18 (2 1 ⁇ 3 7 ) to select the appropriate processing conditions for the MAX phase Ti 2 AlN bulk material.
  • suitable processing conditions for MAX phase Ti 2 AlN bulk material are voltage 50 to 70V, more preferably 60V, peak current of 2 to 4 stages, on time of 10 to 20 mA, 10 to 50 mA It was found that the off time and the processing time was 15 to 40 seconds, the average 26 seconds. This corresponds to a very fast machining, Figure 4 shows the contrast of the machining time of the MAX phase (Tihas) Ti 2 AlN bulk material and Ti6242. For reference, we used Korea NSD-200.
  • the micro-discharge machining of the MAX phase Ti 2 AlN bulk material of the present invention is a few to several hundred ⁇ m level, that is, 5 to 500 ⁇ m level of 2D (Dimension), 2.5D (Dimension), 3D (Dimension) fine shape Alternatively, it is possible to perform fine holes with very high productivity and excellent processing shape and dimensional accuracy.
  • the present invention produces a MAX phase (Phases) Ti 2 AlN bulk material as follows.
  • High purity powders of Ti, Al and TiN are mixed and put into a mill or mixer to make a hybrid powder.
  • an attrition milling machine was used.
  • the process of making the mixed powder is carried out under an inert gas atmosphere to protect the mixed powder from oxidation in a vacuum, and a number of stainless steel balls can be placed in the chamber to increase the mixing efficiency.
  • argon (Ar) gas was filled and a stainless steel ball having a diameter of 5 mm was placed in the chamber.
  • the synthesized powder is put into a mold and pressed in advance, and then sintered using a discharge plasma sintering furnace.
  • the pressure in the sintering furnace is set to a vacuum degree of 0.1 to 0.5 Pa, and plasma sintering is performed within 20 minutes by the plasma generated at a temperature of 1000 to 1500 ° C. At this time, pressurized by 10 to 50 MPa by a mechanical press.
  • the micro discharge drilling equipment was used to control the control factors (voltage, peak current, on time, off time) by using the Taguchi test method. Discharge machining conditions were calculated.
  • suitable processing conditions for the MAX phase Ti 2 AlN bulk material include a voltage of 50 to 70 V, a pulse current of 1 to 75 A, and preferably a peak current of 2 to 4 stages.
  • the off time was 10 ⁇ 50 ⁇ s, and the processing time was 15 ⁇ 40 seconds, which resulted in very fast processing and improved processing shape and dimensional accuracy.
  • the MAX phase Ti 2 AlN bulk material of the present invention is heat and wear resistant parts requiring corrosion resistance against high temperature, that is, aircraft parts, automotive parts, power, chemical plant, marine, civil engineering, medical, welfare, internal combustion engine components
  • the micro-discharge machining method for the MAX phase Ti 2 AlN bulk material of the present invention can be used to form various fine shapes such as fine irregularities or fine nozzles on the MAX phase Ti 2 AlN bulk material. It can be widely applied to the field that requires the micromachining of such parts.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Powder Metallurgy (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

Le but de la présente invention est de fournir un matériau en vrac de Ti2AlN de phase MAX et un procédé de micro-usinage dudit matériau. La présente invention propose un procédé pour la préparation de matériau en vrac de Ti2AlN de phase MAX en mélangeant et en synthétisant de la poudre de titane (Ti), de la poudre d'aluminium (Al) et de la poudre de nitrure de titane (TiN) dans un rapport de Ti:Al:TiN = 1:1:1 au moyen d'un broyeur à attrition, et frittage par plasma la poudre synthétisée en utilisant un four à frittage par décharge plasma. La présente invention propose aussi un procédé d'usinage qui applique un micro-usinage par décharge électrique au matériau de Ti2AlN préparé de manière à réaliser rapidement un procédé d'usinage pour une microstructure de haute précision ayant un diamètre de plusieurs dizaines à plusieurs centaines de µm.
PCT/KR2013/000232 2012-12-31 2013-01-11 Procédé de préparation d'un matériau en vrac de ti2aln et procédé de micro-usinage par décharge électrique WO2014104461A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2012-0158355 2012-12-31
KR1020120158355A KR101459196B1 (ko) 2012-12-31 2012-12-31 TiAlN 벌크소재의 제조방법 및 마이크로 방전가공 방법
KR10-2013-0002735 2013-01-10
KR1020130002735A KR20140090750A (ko) 2013-01-10 2013-01-10 TiAlN 벌크소재의 제조방법 및 마이크로 방전가공 방법

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WO2014104461A1 true WO2014104461A1 (fr) 2014-07-03

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104402450A (zh) * 2014-10-13 2015-03-11 陕西科技大学 一种基于热爆反应低温快速制备Ti2AlN陶瓷粉体的方法
CN108585879A (zh) * 2018-05-07 2018-09-28 西安交通大学 一种快速制备各向异性氮化钛陶瓷块体材料的方法
CN112427650A (zh) * 2020-11-02 2021-03-02 哈尔滨工业大学 基于放电等离子体的熔丝沉积金属增/减材复合制造方法
CN115594504A (zh) * 2021-07-07 2023-01-13 北京科技大学(Cn) 一种max相燃料包壳元件用陶瓷材料、管件及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08225879A (ja) * 1995-02-15 1996-09-03 Agency Of Ind Science & Technol アルミニウムを助剤とした窒化チタン焼結体及びその製造法
JP2000154064A (ja) * 1998-11-17 2000-06-06 Sumitomo Electric Ind Ltd 導電性窒化ケイ素系焼結体及びその製造方法
JP2007131493A (ja) * 2005-11-11 2007-05-31 Doshisha Al添加TiNのバルク体を製造する方法
JP2010236060A (ja) * 2009-03-31 2010-10-21 Hitachi Tool Engineering Ltd 窒化物分散Ti−Al系ターゲット及びその製造方法
KR20110093504A (ko) * 2010-02-12 2011-08-18 한국과학기술원 질화물 강화 텅스텐 나노복합재료 및 그 제조방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08225879A (ja) * 1995-02-15 1996-09-03 Agency Of Ind Science & Technol アルミニウムを助剤とした窒化チタン焼結体及びその製造法
JP2000154064A (ja) * 1998-11-17 2000-06-06 Sumitomo Electric Ind Ltd 導電性窒化ケイ素系焼結体及びその製造方法
JP2007131493A (ja) * 2005-11-11 2007-05-31 Doshisha Al添加TiNのバルク体を製造する方法
JP2010236060A (ja) * 2009-03-31 2010-10-21 Hitachi Tool Engineering Ltd 窒化物分散Ti−Al系ターゲット及びその製造方法
KR20110093504A (ko) * 2010-02-12 2011-08-18 한국과학기술원 질화물 강화 텅스텐 나노복합재료 및 그 제조방법

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104402450A (zh) * 2014-10-13 2015-03-11 陕西科技大学 一种基于热爆反应低温快速制备Ti2AlN陶瓷粉体的方法
CN108585879A (zh) * 2018-05-07 2018-09-28 西安交通大学 一种快速制备各向异性氮化钛陶瓷块体材料的方法
CN108585879B (zh) * 2018-05-07 2020-08-28 西安交通大学 一种快速制备各向异性氮化钛陶瓷块体材料的方法
CN112427650A (zh) * 2020-11-02 2021-03-02 哈尔滨工业大学 基于放电等离子体的熔丝沉积金属增/减材复合制造方法
CN115594504A (zh) * 2021-07-07 2023-01-13 北京科技大学(Cn) 一种max相燃料包壳元件用陶瓷材料、管件及其制备方法

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