WO2014098486A1 - 기판처리장치 및 히터의 온도조절방법 - Google Patents
기판처리장치 및 히터의 온도조절방법 Download PDFInfo
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- WO2014098486A1 WO2014098486A1 PCT/KR2013/011839 KR2013011839W WO2014098486A1 WO 2014098486 A1 WO2014098486 A1 WO 2014098486A1 KR 2013011839 W KR2013011839 W KR 2013011839W WO 2014098486 A1 WO2014098486 A1 WO 2014098486A1
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- heater
- gas
- cooling ring
- substrate
- refrigerant
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (10)
- 기판에 대한 공정이 이루어지는 공정공간을 가지는 메인챔버;상기 공정공간에 설치되어 상기 기판이 상부에 놓여지며, 상기 기판을 가열하는 히터; 및상기 히터의 둘레를 따라 배치되며, 복수개의 가스유로들이 상기 히터의 둘레를 따라 이격형성되어 외부로부터 공급된 냉매가 흐르는 냉각링을 포함하는 것을 특징으로 하는 기판처리장치.
- 제1항에 있어서,상기 냉각링은 상기 가스유로에 연결되어 상기 냉각링의 내측 또는 외측을 향해 개방된 유출구를 가지는 것을 특징으로 하는 기판처리장치.
- 제2항에 있어서,상기 기판처리장치는,상기 공정공간에 설치되며, 외부로부터 공급된 냉매를 상기 유로들을 향해 각각 공급하는 가스공급관들을 가지는 가이드부재를 더 포함하되,상기 가이드부재는,상기 메인챔버의 바닥면을 따라 연결되는 바닥판;상기 바닥판의 측부를 따라 연결되는 측판; 및상기 히터를 향해 돌출되어 상기 측판에 연결되며, 상기 냉각링을 지지하는 지지부재를 더 포함하는 것을 특징으로 하는 기판처리장치.
- 제3항에 있어서,상기 가이드부재는 상기 측판의 상부에 기립설치되는 돌출부를 가지며,상기 기판처리장치는,상기 돌출부의 상부에 연결되어 샤워헤드를 통해 공급된 공정가스를 외부로 배출가능한 공정가스배출홀들 및 상기 유출구들과 대응되는 위치에 형성되어 상기 냉매를 외부로 배출가능한 냉매배출홀들을 가지는 배기링을 더 구비하는 것을 특징으로 하는 기판처리장치.
- 제3항에 있어서,상기 가스공급관들에 각각 연결되어 상기 가스공급관들을 개폐하는 밸브를 구비하는 것을 특징으로 하는 기판처리장치.
- 제3항에 있어서,상기 냉각링은 상기 가스유로의 상부에 배치되며, 샤워헤드를 통해 공급된 공정가스를 외부로 배출가능한 상부배출홀들을 가지는 것을 특징으로 하는 기판처리장치.
- 제1항에 있어서,상기 가스유로들은 상기 히터를 중심으로 등각을 이루어 배치되는 것을 특징으로 하는 기판처리장치.
- 제1항에 있어서,상기 냉각링은 상기 히터로부터 이격배치되는 것을 특징으로 하는 기판처리장치.
- 상부에 기판이 놓여진 히터의 둘레에 냉각링을 배치하며, 상기 냉각링은 상기 히터의 둘레를 따라 이격형성된 복수의 가스유로들을 가지는 배치단계; 및상기 히터의 온도분포에 따라 기설정된 온도보다 높은 온도를 가지는 상기 히터의 고온영역을 결정하고, 상기 가스유로들 중 상기 고온영역의 외측에 배치된 가스유로에만 냉매를 공급하여 상기 히터의 온도분포를 조절하는 조절단계를 포함하되,상기 조절단계는 복수의 가스공급관들을 각각의 상기 가스유로에 연결하고 복수의 밸브들을 각각의 상기 가스공급관에 설치하여, 상기 고온영역의 외측에 배치된 상기 가스유로 상의 상기 밸브는 개방하고 나머지 밸브는 폐쇄하는, 히터의 온도조절방법.
- 제9항에 있어서,상기 조절단계는 상기 냉각링의 내측 또는 외측에 형성되어 각각의 상기 가스유로에 연결된 복수의 유출구들 중 상기 고온영역의 외측에 배치된 상기 가스유로에 연결된 유출구를 통해 상기 냉매를 배출하는 단계를 더 포함하는, 히터의 온도조절방법.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015545382A JP6088659B2 (ja) | 2012-12-18 | 2013-12-18 | 基板処理装置及びヒータの温度調節方法 |
CN201380066374.7A CN104871292B (zh) | 2012-12-18 | 2013-12-18 | 基板处理装置及控制加热器的温度的方法 |
US14/646,079 US9758870B2 (en) | 2012-12-18 | 2013-12-18 | Substrate treatment apparatus, and method for controlling temperature of heater |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2012-0148665 | 2012-12-18 | ||
KR1020120148665A KR101375742B1 (ko) | 2012-12-18 | 2012-12-18 | 기판처리장치 |
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WO2014098486A1 true WO2014098486A1 (ko) | 2014-06-26 |
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PCT/KR2013/011839 WO2014098486A1 (ko) | 2012-12-18 | 2013-12-18 | 기판처리장치 및 히터의 온도조절방법 |
Country Status (5)
Country | Link |
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US (1) | US9758870B2 (ko) |
JP (1) | JP6088659B2 (ko) |
KR (1) | KR101375742B1 (ko) |
CN (1) | CN104871292B (ko) |
WO (1) | WO2014098486A1 (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US9963782B2 (en) * | 2015-02-12 | 2018-05-08 | Asm Ip Holding B.V. | Semiconductor manufacturing apparatus |
KR101930788B1 (ko) * | 2016-11-23 | 2018-12-24 | 주식회사 조인솔루션 | 기판 프로세싱 챔버의 냉각기 |
US10801106B2 (en) * | 2016-12-15 | 2020-10-13 | Asm Ip Holding B.V. | Shower plate structure for exhausting deposition inhibiting gas |
CN106987808B (zh) * | 2017-05-15 | 2019-04-09 | 成都西沃克真空科技有限公司 | 一种镀膜机用基片加热装置 |
JP7008602B2 (ja) * | 2018-09-27 | 2022-01-25 | 東京エレクトロン株式会社 | 成膜装置および温度制御方法 |
WO2020146047A1 (en) * | 2019-01-08 | 2020-07-16 | Applied Materials, Inc. | Pumping apparatus and method for substrate processing chambers |
Citations (4)
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JP2009170676A (ja) * | 2008-01-16 | 2009-07-30 | Toshiba Corp | エピタキシャルウェーハの製造装置及び製造方法 |
US20100002355A1 (en) * | 2008-07-02 | 2010-01-07 | Ngk Insulators, Ltd. | Wafer support device and component used for the same |
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2012
- 2012-12-18 KR KR1020120148665A patent/KR101375742B1/ko active IP Right Grant
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- 2013-12-18 WO PCT/KR2013/011839 patent/WO2014098486A1/ko active Application Filing
- 2013-12-18 JP JP2015545382A patent/JP6088659B2/ja active Active
- 2013-12-18 US US14/646,079 patent/US9758870B2/en active Active
- 2013-12-18 CN CN201380066374.7A patent/CN104871292B/zh active Active
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JP2009170676A (ja) * | 2008-01-16 | 2009-07-30 | Toshiba Corp | エピタキシャルウェーハの製造装置及び製造方法 |
US20100002355A1 (en) * | 2008-07-02 | 2010-01-07 | Ngk Insulators, Ltd. | Wafer support device and component used for the same |
Also Published As
Publication number | Publication date |
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CN104871292B (zh) | 2017-04-26 |
JP6088659B2 (ja) | 2017-03-01 |
US9758870B2 (en) | 2017-09-12 |
KR101375742B1 (ko) | 2014-03-19 |
JP2016506070A (ja) | 2016-02-25 |
US20150299860A1 (en) | 2015-10-22 |
CN104871292A (zh) | 2015-08-26 |
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