WO2014090113A1 - 一种具有防撞功能的硅片台 - Google Patents

一种具有防撞功能的硅片台 Download PDF

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Publication number
WO2014090113A1
WO2014090113A1 PCT/CN2013/088729 CN2013088729W WO2014090113A1 WO 2014090113 A1 WO2014090113 A1 WO 2014090113A1 CN 2013088729 W CN2013088729 W CN 2013088729W WO 2014090113 A1 WO2014090113 A1 WO 2014090113A1
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Prior art keywords
silicon wafer
wafer stage
airbags
platform
gas
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Ceased
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PCT/CN2013/088729
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English (en)
French (fr)
Inventor
朱煜
张鸣
刘召
杨开明
徐登峰
田丽
张利
秦慧超
王平安
尹文生
胡金春
穆海华
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Tsinghua University
Shanghai Micro Electronics Equipment Co Ltd
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Tsinghua University
Shanghai Micro Electronics Equipment Co Ltd
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Priority to US14/651,385 priority Critical patent/US20150311099A1/en
Publication of WO2014090113A1 publication Critical patent/WO2014090113A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/18—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Definitions

  • the invention relates to a lithography machine wafer table double-station exchange system, which is applied to a semiconductor lithography machine and belongs to the technical field of semiconductor manufacturing equipment.
  • the position measurement of the wafer stage on the balance block is completely controlled by the position measurement of the sensor; Due to the precise structure of the silicon wafer stage,
  • the collision avoidance system needs to be equipped with a stable buffer structure, so that the silicon wafer table that can collide can
  • the prior art anti-collision structure adopts a cantilever rod on both sides, and a position sensor is added on the cantilever rod. If the distance between the two wafer stages is too close, the sensor generates an alarm, and the reaction can be quickly reacted to quickly stop the moving wafer stage. However, if the control system is out of control, it will hit the cantilever rod first and then hit the wafer table, which will not achieve double protection.
  • a bumper bar, a distance sensor, a bumper, etc. are added to the periphery of the wafer stage, the size of the wafer stage becomes large, and a large number of components and sensors are added, for integration. In the case of extremely demanding equipment, structural changes can become very complicated, which undoubtedly greatly increases the design difficulty.
  • the object of the present invention is to provide a silicon wafer stage with anti-collision function, that is, an airbag and a cushioning element are used as an anti-collision structure, so that when two wafer stages are exchanged or the control system fails, on the one hand, the silicon wafer is not made.
  • the related components of the station are damaged, the measuring system works normally, and the working efficiency is further improved.
  • the structure is simple and easy to maintain.
  • a silicon wafer stage having an anti-collision function comprising a silicon wafer stage body and a cable station, wherein the cable stage is mounted on one side of the silicon wafer stage, characterized in that: the silicon wafer stage There are also three airbags, four damping cushioning elements and a gas source.
  • the three airbags are arranged in series and are respectively fixed on the other three sides of the wafer table by the airbag bracket;
  • the damping cushioning element is in communication with the gas line, the gas line is in communication with the gas source, and the gas line is fixed on the cable station.
  • the damping cushioning member has at least one elongated orifice.
  • the air bag of the present invention is made of a rubber material.
  • the rubber airbag has good elasticity.
  • the damping cushion element flows through the damping hole to the adjacent two. Airbags, and then enter the gas circulation system, the orifice can locally change the flow area of the fluid to generate pressure loss, to achieve throttling, pressure regulation, buffering, Anti-vibration and other purposes.
  • the invention adopts an elongated hole structure, and has a simple structural form. When it is in a stable laminar flow state, the pressure difference between the two ends of the element has a good proportional relationship with the flow rate in the hole, effectively increasing the damping and maximizing the occurrence of the mitigation.
  • the rebound after the collision can make the two wafer stages stop moving quickly after the collision.
  • the airbag air pressure and the damping hole parameters By designing the airbag air pressure and the damping hole parameters, the positioning accuracy of the two silicon wafer stages can meet the requirements of the control system, so that it is not necessary to re-zero , improve production efficiency.
  • FIG. 1 is a schematic view showing the structure of an embodiment of a silicon wafer stage having an anti-collision function according to the present invention.
  • FIG. 2 is a schematic view showing the working state of two silicon wafer stages with anti-collision function when the collision occurs.
  • FIG. 3 is a schematic diagram of another working state when two silicon wafer stages with anti-collision function are collided according to the present invention.
  • 1 silicon wafer platform 2 - cable station; 3 airbag; 4 a damping cushioning component; 5 - airbag bracket; 6 - air source; 7 - base; Sa - first silicon wafer table; The second wafer stage.
  • FIG. 1 is a schematic structural diagram of an embodiment of a silicon wafer stage having a collision avoidance function according to the present invention.
  • the wafer stage comprises a silicon wafer stage 1 and a cable station 2, the cable station is mounted on one side of the wafer stage, and the wafer stage further comprises three air cells 3, four damping buffer elements 4 and a gas source 6,
  • the airbag is made of rubber material, three airbags are arranged in series, and are respectively fixed on the other three sides of the silicon wafer table by the airbag bracket 5; the adjacent two airbags are connected with the gas pipeline through a damping buffer element,
  • the gas line is fixed to the cable station and communicates with the gas source 6.
  • the damping cushioning element is preferably throttled by a plurality of elongated orifices, which can locally change the flow area of the fluid to generate pressure loss, and achieve the purpose of throttling, pressure regulation, buffering, anti-vibration, etc., especially the thin diameter ratio of more than 10
  • the long orifice has good cushioning properties.
  • the slender damping hole has a simple structure, and when it is in a stable laminar flow state, the pressure difference between the two ends of the element has a good proportional relationship with the flow rate in the hole.
  • FIG. 2 is a schematic view showing the working state of two silicon wafer stages with anti-collision function when the collision occurs.
  • the first wafer stage 8a and the second wafer stage 8b move in the X direction and collide
  • the first wafer stage 8a moving in the X-axis direction moves toward the normally operating second wafer stage 8b, first contacting It is two airbags arranged in the Y direction of the two silicon wafer anti-collision airbag structures.
  • the rubber airbag is squeezed, the flexible airbag is deformed to buffer the impact force generated by the collision; meanwhile, due to the impact of the impact The force causes the air inside the two airbags to be squeezed, and the airbags respectively connected thereto generate a gas pressure difference.
  • the gas in the airbag flows through the elongated orifices on both sides to the airbags connected thereto, and the pressure flow is released. And the pressure relief speed is slow, so that the airbag has a certain rigidity, and the excess gas is recovered through the gas pipeline out of the airbag structure.
  • the decompression speed of the slender orifice can be calculated by the magnitude of the impact force, the relevant parameters of the material of the airbag, and the impact velocity, etc., just because the two wafer stages can be flexible due to the airbag after the collision. Stopping the movement in a short time and not rebounding due to a certain stiffness. Through the above process, double protection can be achieved when two wafer stages collide.
  • FIG. 3 is a schematic diagram of another working state when two silicon wafer stages with anti-collision function are collided according to the present invention.
  • the first wafer stage 8a and the second wafer stage 8b move in the Y direction and collide, the first silicon wafer moves in the Y-axis direction
  • the table 8a moves to the second working wafer stage 8b, and firstly contacts two airbags arranged in the X direction of the anti-collision airbag structure.
  • the rubber-made airbag is squeezed, the flexible airbag is deformed and buffered.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种具有防撞功能的硅片台，含有硅片台台体（1）和线缆台（2），线缆台（2）安装在硅片台的一个侧面，硅片台含有三个气囊（3）、四个阻尼缓冲元件（4）和气源（6），三个气囊（3）串联布置，并分别通过气囊支架（5）固定在硅片台的另外三个侧面上；相邻两个气囊（3）之间通过一个阻尼缓冲元件（4）和气体管路相连通，气体管路固定在线缆台（2）上与气源（6）相连通。当两个硅片台发生碰撞时，两个硅片台的气囊首先撞上，内部气体受到挤压，部分通过两侧阻尼缓冲元件的调节排出气囊，既缓冲了冲击力，又使得了硅片台不被反弹出去。由于这种防撞结构具有可伸缩性，与机械式防撞相比刚度低，且结构简单紧凑，可应用于光刻机双台交换系统。

Description

一种具有防撞功能的硅片台
技术领域
本发明涉及一种光刻机硅片台双台交换系统， 该系统应用于半导体光刻机中， 属于半导 体制造设备技术领域。
背景技术
在光刻机磁浮硅片台双台交换系统中， 由于两个硅片台没有推杆或是其它限位， 完全依 靠传感器的位置测量来控制硅片台在平衡块上的位置和姿态； 此外， 由于硅片台结构精密，
说
所以， 若在交换时或者控制系统失灵时， 两个硅片台发生碰撞， 损失将无法估量， 因此， 硅 片台的防撞结构非常重要。 另外， 在两个硅片台发生碰撞时， 除了会损坏零部件之外， 还有 可能发生反弹， 如果发生这种情况时， 测量系统将无法正常工作， 必须重新寻向和归零， 严 重影响生产效率， 因此， 防撞系统需要安装有稳定的缓冲结构， 可使发生碰撞的硅片台可以
书
迅速停止运动。
现有技术的防撞结构采用在双侧加装悬臂杆， 在悬臂杆上加装位置传感器， 如果两个硅 片台距离过近， 传感器发生报警， 可以快速反应使运动的硅片台迅速停止， 但如果控制系统 失控， 则会先撞坏悬臂杆， 再撞到硅片台， 无法实现双重保护。 在结构设计上， 如果在硅片 台外围加装防撞杆、 距离传感器和缓冲器等， 就会使硅片台的尺寸变得很大， 并且增加了大 量的零部件和传感器， 对于集成度要求极高的设备来说， 结构变更会变得非常复杂， 无疑是 大大增加了设计难度。
发明内容
本发明的目的是提供一种具有防撞功能的硅片台，即采用气囊和缓冲元件作为防撞结构， 从而当两个硅片台在交换时或者控制系统失灵时， 一方面不使硅片台相关部件受到损坏， 使 测量系统正常工作， 进一步提高工作效率， 另一方面具有结构简单， 便于维护的优点。
一种具有防撞功能的硅片台， 该硅片台含有硅片台台体和线缆台， 所述的线缆台安装在 硅片台的一个侧面， 其特征在于： 所述硅片台还含有三个气囊、 四个阻尼缓冲元件和气源， 所述的三个气囊串联布置， 并分别通过气囊支架固定在硅片台的另外三个侧面上； 相邻两个 气囊之间通过一个阻尼缓冲元件和气体管路相连通， 所述的气体管路与气源相连通， 气体管 路固定在线缆台上。
本发明的技术特征还在于： 所述的阻尼缓冲元件上至少有一个细长阻尼孔。
本发明所述的气囊采用橡胶材质制成。
本发明与现有技术相比， 具有以下优点及突出性效果： 橡胶材质的气囊具有良好的弹性， 当发生碰撞时， 气体被挤压后， 通过阻尼缓冲元件——阻尼孔流至相邻两个气囊， 再进入气 体循环系统， 阻尼孔可以局部改变流体的流通面积产生压力损失， 达到节流、 调压、 缓冲、 防振等目的。 本发明采用的是细长孔结构， 其结构形式简单， 当其处于稳定的层流状态时， 元件两端压差与孔内流量具有良好的比例关系， 有效增加了阻尼并最大限度的缓解发生碰撞 后的反弹， 可使两个硅片台在碰撞后迅速停止运动， 通过对气囊气压和阻尼孔参数的设计， 可使两个硅片台的定位精度满足控制系统要求， 从而不必重新归零， 提高了生产效率。
附图说明
图 1为本发明提供的具有防撞功能的硅片台的实施例的结构原理示意图。
图 2为本发明提供的具有防撞功能的两个硅片台发生碰撞时的工作状态示意图。
图 3为本发明提供的具有防撞功能的两个硅片台发生碰撞时的另一种工作状态示意图。 图中： 1 硅片台台体； 2—线缆台； 3 气囊； 4一阻尼缓冲元件； 5—气囊支架； 6— 气源； 7—基座； Sa—第一硅片台； 8b—第二硅片台。
具体实施方式
图 1为本发明提供的一种具有防撞功能的硅片台的实施例的结构原理示意图。 该硅片台 含有硅片台台体 1和线缆台 2， 线缆台安装在硅片台的一个侧面， 硅片台还含有三个气囊 3、 四个阻尼缓冲元件 4和气源 6， 气囊采用橡胶材质制成， 三个气囊串联布置， 并分别通过气 囊支架 5固定在硅片台的另外三个侧面上； 相邻两个气囊之间通过一个阻尼缓冲元件和气体 管路相连通， 气体管路固定在线缆台上， 并与气源 6相连通。 阻尼缓冲元件优选采用多个细 长阻尼孔进行节流， 它可以局部改变流体的流通面积产生压力损失， 达到节流、 调压、 缓冲、 防振等目的， 特别是长径比超过 10的细长阻尼孔具有良好的缓冲性能。细长阻尼孔结构形式 简单， 当其处于稳定的层流状态时， 元件两端压差与孔内流量具有良好的比例关系。
图 2为本发明提供的具有防撞功能的两个硅片台发生碰撞时的工作状态示意图。 当第一 硅片台 8a和第二硅片台 8b沿 X方向运动并发生碰撞时， 沿 X轴方向运动的第一硅片台 8a 向正常工作的第二硅片台 8b运动， 首先接触的是两个硅片台防撞气囊结构的沿 Y方向布置 的两个气囊， 当橡胶材质的气囊受到挤压， 具有柔性的气囊发生变形， 缓冲了碰撞产生的冲 击力； 同时， 由于撞击的冲击力使得两个气囊内部气体受到挤压， 则分别与其相连的气囊产 生了气压差， 此时， 气囊内的气体就会通过两侧的细长阻尼孔分别向与其相连的气囊流动， 泄压流量和泄压速度缓慢， 使得气囊具有一定的刚度， 多余的气体则通过气体管路流出气囊 结构回收。
细长阻尼孔的减压速度可通过碰撞冲击力的大小、 气囊材质的相关参数， 以及撞击速度 等计算获得最佳取值， 恰好既使两个硅片台在发生碰撞后由于气囊的柔性可在短时间内停止 运动而又由于一定的刚度不会发生反弹。 通过上述过程， 可以实现两个硅片台发生碰撞时的 双重保护。
图 3为本发明提供的具有防撞功能的两个硅片台发生碰撞时的另一种工作状态示意图。 当第一硅片台 8a和第二硅片台 8b沿 Y方向运动并发生碰撞时， 沿 Y轴方向运动的第一硅片 台 8a向正常工作的第二硅片台 8b运动， 首先接触的是防撞气囊结构的沿 X方向布置的两个 气囊， 当橡胶材质的气囊受到挤压， 具有柔性的气囊发生变形， 缓冲了碰撞产生的冲击力； 同时， 由于撞击的冲击力使得两个气囊内部气体受到挤压， 则分别与其相连的气囊产生了气 压差， 此时， 气囊内的气体就会通过两侧的细长阻尼孔分别向与其相连的气囊流动， 泄压流 量和泄压速度缓慢， 使得气囊具有一定的刚度， 多余的气体则通过气体管路流出气囊结构回 收。

Claims

权 利 要 求 书
1. 一种具有防撞功能的硅片台， 该硅片台含有硅片台台体 （1 ) 和线缆台 （2)， 所述的 线缆台安装在硅片台的一个侧面， 其特征在于： 所述硅片台还含有三个气囊 （3)、 四个阻尼 缓冲元件 （4) 和气源 （6)， 所述的三个气囊串联布置， 并分别通过气囊支架 （5 ) 固定在硅 片台的另外三个侧面上； 相邻两个气囊之间通过一个阻尼缓冲元件 （4) 和气体管路相连通， 所述的气体管路与气源 （6) 相连通， 气体管路固定在线缆台上。
2. 按照权利要求 1所述的一种具有防撞功能的硅片台， 其特征在于： 所述的阻尼缓冲元 件上至少有一个细长阻尼孔。
3. 按照权利要求 1或 2所述的一种具有防撞功能的硅片台， 其特征在于： 所述的气囊采 用橡胶材质制成。
PCT/CN2013/088729 2012-12-11 2013-12-06 一种具有防撞功能的硅片台 Ceased WO2014090113A1 (zh)

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US14/651,385 US20150311099A1 (en) 2012-12-11 2013-12-06 Wafer Stage Having Function of Anti-Collision

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CN201210533774.1 2012-12-11
CN2012105337741A CN103019045A (zh) 2012-12-11 2012-12-11 一种具有防撞功能的硅片台

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