WO2014064026A2 - Luftmassenmesser mit einem sensorelement - Google Patents
Luftmassenmesser mit einem sensorelement Download PDFInfo
- Publication number
- WO2014064026A2 WO2014064026A2 PCT/EP2013/071917 EP2013071917W WO2014064026A2 WO 2014064026 A2 WO2014064026 A2 WO 2014064026A2 EP 2013071917 W EP2013071917 W EP 2013071917W WO 2014064026 A2 WO2014064026 A2 WO 2014064026A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor element
- air mass
- resistors
- mass flow
- temperature sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
Definitions
- the invention relates to an air mass meter with a sensor element, wherein an air mass flow to be measured moves across the sensor element and wherein the sensor element is designed as a microelectromechanical system having a membrane on which a heating element is formed, in front of and behind in the direction of the air mass flow the heating element is arranged in each case an electrical measuring resistor and at least two electrical comparison resistors, and wherein a first temperature sensor element and a second temperature sensor element s ⁇ by the electrical interconnection of a respective measuring resistor is formed with at least two comparison resistors.
- Such mass air flow sensors are used, for example, in power vehicles ⁇ for determining the intake of an internal combustion engine air mass.
- On the basis of the most reliable possible information about a sucked air mass combustion can be optimized by an electronic control of the internal combustion engine to the effect that a precisely matched to the air mass fuel quantity is supplied to the respective combustion chambers. As a result, a better energy utilization is achieved with reduced pollutant emissions.
- an air mass meter which is inserted into an intake passage for determining an air mass, wherein a defined proportion of the total flow passes through the air mass sensor.
- this is designed as a plug-in duct air mass meter.
- the air mass meter environmentally summarizes a valve disposed in a measuring channel sensor element, which is arranged in a housing electronics for evaluating and / or acquisition of measured values of the sensor element, and an off ⁇ flow channel beyond the sensor element.
- the said channels or air guide paths U-, S- or C-shaped so that a total of compact, designed as a plug-in device is formed.
- US 2008/0282791 A1 discloses an air mass meter with a sensor element, in which in each case temperature sensor elements are arranged in front of and behind a heating element formed on a membrane. The temperature sensor elements are arranged such that a characteristic shift due to dirt accumulation is suppressed.
- US 2003/0010110 A1 discloses a bidirectional mass flow sensor having a bridge circuit connected to a voltage potential, the bridge circuit including first and second temperature dependent sensors connected in series and disposed on a thermally insulating substrate.
- DE 42 08 135 AI discloses a device for measuring a gas or liquid flow.
- two temperature-sensitive resistance devices form a first sensor and two further temperature-sensitive resistance devices form a second sensor.
- the two sensors are arranged so that they do not influence each other thermally.
- the first temperature sensor element as a series circuit of resistors on the sensor element with a measuring resistor, which is based on the air mass flow upstream of the heating element, and two comparison resistances, which are arranged relative to the air mass flow behind the heating element formed
- the second temperature sensor element is as Series connection of resistors on the sensor element with a measuring resistor, which is arranged relative to the air mass flow behind the heating element, and two comparison ⁇ resistances, which are arranged relative to the air mass flow upstream of the heating element formed.
- the signal distortion due to dirt particles deposited on one side is compensated, and the signal from the air mass meter is not falsified by the contamination of the sensor element.
- the measurement results of the air mass meter remain stable over a long time, and a cyclical recalibration of the air mass meter can be omitted.
- the sensor element with the thin membrane is designed as a microelectromechanical system. Such sensor elements provide excellent measurement results, since the thin membrane is hardly thermally conductive and thus only the thermal conductivity of the passing air mass determines the measurement results.
- the resistance values of the individual measuring resistors are significantly greater than the resistance values of the individual comparative resistors.
- it is advantageous ⁇ way when the resistance values of the individual measuring resistors are at least a factor 10 greater than the resistance values of the individual comparison resistors.
- the comparison resistances are arranged in the edge region of the membrane.
- the measuring resistors are arranged in the inner region of the membrane.
- the measuring resistances of the contamination of the Messele ⁇ Mentes, which occurs especially in the edge region of the membrane, not affected, which also contributes to the stability of the measurement results.
- Figure 2 is a as a microelectromechanical system (MEMS), from ⁇ formed sensor element
- FIG 3 is a microelectromechanical (MEMS) formed from sensor element arranged in the auxiliary tube of the air mass meter 4 shows a situation in which the air mass flow flowing through the inlet port into the auxiliary tube of the mass air flow sensor,
- Figure 5 the as microelectromechanical system (MEMS) from ⁇ formed sensor element in an air-mass meter, which is integrated as an insertion finger in an intake pipe,
- Figure 6 the sensor element having the first temperature sensor element and the second temperature sensor element,
- FIG. 7 shows a possible electrical connection of the resistors
- FIG. 8 shows the sensor element known from FIG. 7 with a further electrical connection of the resistors
- Figure 1 shows an air mass meter 2.
- the air mass meter 2 is formed in this example as Einsteckfinger which is inserted into an intake pipe 1 and is firmly connected to the intake manifold.
- the intake pipe 1 carries an air mass flow 10 toward the cylinders of an internal combustion engine.
- the air mass meter 2 in FIG. 1 shows a first temperature sensor element 7 and a second temperature sensor element 8. The first temperature sensor element 7 and the second temperature sensor element 8 are arranged at different locations.
- the temperature sensor elements 7, 8 are usually made of resistance stalls formed different in accordance with the temperature prevailing at the sensor element temperature resistance values ⁇ accept. Between the first temperature sensor element 7 and the second temperature sensor element 8 is a heating element 12 is formed.
- the air mass flow 10 which enters through the inlet ⁇ opening 4 in the housing 3 of the air flow sensor 2, first flows over the first temperature sensor element 7, and then the heater 12, after which the air mass flow 10 reaches the second temperature sensor element 8 and along the auxiliary pipe 5 to the outlet 6 of the Air mass meter 2 is passed.
- the air mass flow 10 reaches the first temperature sensor element 7 at a certain temperature. This temperature is detected by the first temperature sensor element 7. After that, the smears over
- Air mass flow 10 the heating element 12, wherein the air mass flow 10 is heated more or less depending on the passing mass.
- the heated air mass flow reaches the second Tem ⁇ peratursensorelement 8 10, which is now present temperature of the air mass flow 10 is determined with the second temperature ⁇ tursensorelement.
- the mass air flow sensor 2 itself may include a transmitter 13, which evaluates the measuring signals of the first temperature sensor element 7 and the second Tem ⁇ peratursensoriatas. 8 The information thus obtained about the air mass flow 10 is forwarded to an engine control, not shown here.
- FIG. 2 shows a sensor element 15 for an air mass meter 1.
- the sensor element 15 is designed as a microelectromechanical system (MEMS) on a single silicon chip.
- MEMS microelectromechanical system
- the sensor element 15 operates on the differential temperature method, whereby the mass of the passing air quantity 10 is determined.
- a first temperature ⁇ tursensorelement 7 and a second temperature sensor element 8 formed on a thin membrane 17th
- the first and the second temperature sensor element 7, 8 are located at different locations on the surface 16 of the membrane 17.
- a heating element 12 is arranged between the first temperature sensor element 7 and the second temperature sensor element 8, a heating element 12 is arranged.
- an evaluation electronics 13 is integrated, which can evaluate the measurement signals of the temperature sensor elements 7, 8 immediately and in a signal that is proportional to the air mass flow 10, convert.
- the transmitter 13 may also be integrated in a downstream electronic device. The information about the air mass flow 10 are then forwarded via connection pads 19 and connecting wires 18 to a subsequent motor electric control unit (not shown here).
- FIG. 3 shows a sensor element 15 designed as a microelectromechanical system (MEMS) for an air mass meter 2, which is formed on a single substrate, the substrate being arranged in an auxiliary tube 5 of the air mass meter 2.
- MEMS microelectromechanical system
- FIG. 3 shows a sensor element 15 designed as a microelectromechanical system (MEMS) for an air mass meter 2, which is formed on a single substrate, the substrate being arranged in an auxiliary tube 5 of the air mass meter 2.
- MEMS microelectromechanical system
- FIG. 4 shows a situation in which an air mass flow 10 flows through the inlet opening 4 into the auxiliary pipe 5 of the air mass meter 2.
- the temperature distribution 20 around the heating element 12 is now clearly displaced in the direction of the second temperature sensor element 8.
- the second temperature ⁇ sensor element 8 measures a significantly higher temperature than the first temperature sensor element 7.
- the sum of the temperatures also reacts to the mass flow 10.
- the sum of the tem- temperatures on the thermal properties of the air mass such as the heat capacity and / or the thermal conductivity of the passing air mass flow 10.
- the system cools down and the sum of the temperatures is much lower.
- the differential temperature of the first temperature sensor element 7 and the second temperature sensor element Tempe ⁇ 8 remains un ⁇ changed in a first approximation.
- the sum signal of the first temperature sensor element 7 and the second temperature sensor element 8 a change in the thermal properties, such as the heat capacity, or the thermal conductivity of the air mass can be measured.
- the Diffe ⁇ ence temperature signal with the temperature signal sum can be closed to the changing thermal conductivity and / or the change in heat capacity of the air flowing past mass.
- FIG. 5 shows the air mass sensor element 15, which is designed as a microelectromechanical system (MEMS), in one
- Air mass meter 2 which is integrated as Einsteckfinger in an intake pipe 1.
- the air mass flow 10 reaches the inlet opening 4 and enters the auxiliary tube 5.
- the first temperature sensor element 7 and the second temperature sensor element 8 can be seen.
- the heating element 12 is arranged. The air mass flow 10 initially reaches the first temperature sensor element 7, then flows over the heating element 12, in order then to reach the second temperature sensor element 8.
- the air mass flow 10 also contains contaminants 9.
- contaminants 9 for example, water droplets 6, oil droplets 11 and / or
- the Soiling 9 in the region of the first temperature sensor element 7 and of the second temperature sensor element 8 may cause a massive falsification of the measured value for the air mass flow 10 over time. Since this adulteration continues to build up over a long period of time due to the accumulation of soiling on the sensor element 15, this is also referred to as a single drift of the air mass meter 2. This signal drift is undesirable and should be suppressed and / or compensated.
- FIG. 6 shows the sensor element 15 with the first temperature ⁇ tursensorelement 7 and the second temperature sensor element 8 and the disposed between the temperature sensing elements 7 and 8 the heating element 12.
- the direction of the air mass flow 10 is shown.
- the first temperature ⁇ tursensorelement 7 in front of the heating element 12 and the second Tem ⁇ peratursensorelement 8 12 behind the heating element both the first temperature sensor element 7 and the second temperature sensor element 8 are made up as a series electrical circuits a measuring resistor 22 which, for example, has a large resistance value, and at least two comparison Wider ⁇ stalls 21, for example, low resistance values aufwei ⁇ sen together.
- the measuring resistors 22 are arranged in the inner region of the thin membrane
- the comparison resistors 21 are arranged in the edge region of the membrane 17.
- FIG. 6 shows that contaminants 9, and in this case primarily oil droplets 11, with the mass flow 10 to the
- Figure 7 shows a possible electrical connection of the Ver ⁇ equal resistors 21 and the measuring resistors 22 on the Sen ⁇ sorelement 15.
- the first sensor element 7 comprises a series circuit of a measuring resistor 22, which is arranged in the direction of the air mass flow 10 in front of the heating element 12, and two comparison resistors 21, which are also arranged in the direction of the air mass flow 10 in front of the heating element 12 formed.
- the second temperature sensor element 8 is correspondingly formed from a series circuit of resistors, wherein the measuring resistor 22 with respect to the flow direction of the air mass flow 10 is disposed behind the heating element 12, and two comparison resistors 21 are also arranged in the direction of the air mass flow 10 behind the heating element 12.
- FIG. 8 shows the sensor element 15 known from FIG. 7, in which a heating element 12 is arranged centrally on a thin membrane 17.
- This heating element 12 may be formed, for example, as an electrical resistance heater.
- the sensor element 15 is designed as a microelectromechanical system, wherein the thin membrane 17 can be produced, for example, by etching a silicon substrate accordingly.
- the comparison resistors 21, for example, small Can have resistance values and the measuring resistors 22, which can have, for example, large resistance values, are processed up.
- the flow direction of the air mass flow 10 is indicated in FIG. 8 by an arrow.
- another two comparison resistors 21 and a further measuring resistor 22 are located behind the heating element.
- the first temperature sensor element 7 is formed by electrically connecting a measuring resistor 22, which is located in front of the heating element 12 on the thin membrane and two comparison resistors 21, which are located behind the heating element 12, in a series connection.
- the second temperature sensor element 8 is constructed as a series circuit of resistors.
- a comparison resistor 21 which is positioned in front of the heating element 12, is electrically connected to a measuring resistor 22, which is positioned behind the heating element 12 on the membrane 17.
- the measuring resistor 22 of the second temperature sensor element 8 is in turn electrically connected to a further comparison resistor 21, the reference resistor 21 in turn being positioned in front of the electrical heating element 12.
- the terms "low resistance value” and "high resistance value” are to be understood as meaning that the resistance value of each individual measuring resistor 22 is at least ten times greater than the resistance value of a single comparative resistor 21.
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015538392A JP6073489B2 (ja) | 2012-10-23 | 2013-10-21 | センサ素子を備えた空気質量流量計 |
KR1020157013192A KR20150070390A (ko) | 2012-10-23 | 2013-10-21 | 센서 소자를 갖는 공기 질량 계량기 |
US14/437,732 US9557202B2 (en) | 2012-10-23 | 2013-10-21 | Air mass meter with a sensor element |
CN201380055304.1A CN104736977B (zh) | 2012-10-23 | 2013-10-21 | 具有感应元件的空气质量流量计 |
EP13782682.2A EP2912414A2 (de) | 2012-10-23 | 2013-10-21 | Luftmassenmesser mit einem sensorelement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012219305.7 | 2012-10-23 | ||
DE102012219305.7A DE102012219305B3 (de) | 2012-10-23 | 2012-10-23 | Luftmassenmesser mit einem Sensorelement |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2014064026A2 true WO2014064026A2 (de) | 2014-05-01 |
WO2014064026A3 WO2014064026A3 (de) | 2014-07-03 |
Family
ID=49485711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2013/071917 WO2014064026A2 (de) | 2012-10-23 | 2013-10-21 | Luftmassenmesser mit einem sensorelement |
Country Status (7)
Country | Link |
---|---|
US (1) | US9557202B2 (de) |
EP (1) | EP2912414A2 (de) |
JP (1) | JP6073489B2 (de) |
KR (1) | KR20150070390A (de) |
CN (1) | CN104736977B (de) |
DE (1) | DE102012219305B3 (de) |
WO (1) | WO2014064026A2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014219541A1 (de) * | 2014-09-26 | 2016-03-31 | Continental Automotive Gmbh | Luftmassenmesser mit einem Sensorelement |
US10274353B2 (en) | 2017-03-22 | 2019-04-30 | A. O. Smith Corporation | Flow sensor with hot film anemometer |
DE102017119667B4 (de) | 2017-08-28 | 2023-05-25 | Dionex Softron Gmbh | Messung eines Fluidflusses |
EP3671139A1 (de) * | 2018-12-20 | 2020-06-24 | Sensirion AG | Detektion von kontaminationen auf einer erfassungsoberfläche eines thermischen sensors |
KR102177856B1 (ko) | 2020-07-13 | 2020-11-11 | (주)바이올 | 주위온도 의존성을 제거한 열질량 풍속센서를 이용한 풍속계 |
CN113513605B (zh) * | 2021-04-01 | 2023-03-24 | 青岛芯笙微纳电子科技有限公司 | 一种基于电磁控制阀的mems质量流量控制器及控制方法 |
CN113325198B (zh) * | 2021-06-09 | 2022-04-29 | 东南大学 | 一种柔性热对流式加速度传感器及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4407209A1 (de) * | 1994-03-04 | 1995-09-07 | Bosch Gmbh Robert | Vorrichtung zur Messung der Masse eines strömenden Mediums |
US5765432A (en) * | 1995-03-16 | 1998-06-16 | Robert Bosch Gmbh | Flow sensor |
WO2003089884A1 (de) * | 2002-04-22 | 2003-10-30 | Siemens Aktiengesellschaft | Vorrichtung zur messung der in einer leitung strömenden luftmasse |
EP1816446A2 (de) * | 2006-02-03 | 2007-08-08 | Hitachi, Ltd. | Thermischer Durchflussmesser |
DE102010002023A1 (de) * | 2009-02-18 | 2010-08-19 | Denso Corporation, Kariya-City | Luftdurchfluss-Messeinrichtung |
EP2320200A1 (de) * | 2009-11-06 | 2011-05-11 | Hitachi Automotive Systems, Ltd. | Thermischer Fluidströmungssensor und Herstellungsverfahren dafür |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4208135A1 (de) * | 1992-03-13 | 1993-09-16 | Siemens Ag | Vorrichtung zur messung einer gas- oder fluessigkeitsstroemung |
JP3475853B2 (ja) * | 1998-12-21 | 2003-12-10 | 三菱電機株式会社 | 流量測定装置 |
JP2000227352A (ja) * | 1999-02-08 | 2000-08-15 | Denso Corp | 熱式流量センサ |
JP3484372B2 (ja) * | 1999-06-10 | 2004-01-06 | 三菱電機株式会社 | 感熱式流量センサ |
US6508117B1 (en) * | 2001-07-12 | 2003-01-21 | Delphi Technologies, Inc. | Thermally balanced mass air flow sensor |
JP3817497B2 (ja) * | 2002-06-10 | 2006-09-06 | 株式会社日立製作所 | 熱式流量計測装置 |
JP3945385B2 (ja) * | 2002-11-15 | 2007-07-18 | オムロン株式会社 | フローセンサ及び流量計測方法 |
JP2006058078A (ja) * | 2004-08-18 | 2006-03-02 | Hitachi Ltd | 熱式空気流量計 |
JP4881554B2 (ja) * | 2004-09-28 | 2012-02-22 | 日立オートモティブシステムズ株式会社 | 流量センサ |
DE102005016447A1 (de) * | 2005-04-11 | 2006-10-12 | Robert Bosch Gmbh | Verfahren zum Betrieb von Heißfilmluftmassenmessern |
JP3878198B2 (ja) * | 2005-11-21 | 2007-02-07 | 株式会社日立製作所 | 熱式流量計測装置 |
EP1965179B1 (de) * | 2007-02-28 | 2017-04-12 | Sensirion Holding AG | Strömungsdetektorvorrichtung mit Eigenüberprüfung |
JP4836864B2 (ja) * | 2007-05-16 | 2011-12-14 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
DE102008032300A1 (de) * | 2008-07-09 | 2010-01-14 | Continental Automotive Gmbh | Vorrichtung zur thermischen Massenstrommessung, insbesondere zur Messung der einer Brennkraftmaschine zugeführten Luftmasse |
-
2012
- 2012-10-23 DE DE102012219305.7A patent/DE102012219305B3/de active Active
-
2013
- 2013-10-21 US US14/437,732 patent/US9557202B2/en active Active
- 2013-10-21 KR KR1020157013192A patent/KR20150070390A/ko not_active Application Discontinuation
- 2013-10-21 CN CN201380055304.1A patent/CN104736977B/zh active Active
- 2013-10-21 WO PCT/EP2013/071917 patent/WO2014064026A2/de active Application Filing
- 2013-10-21 JP JP2015538392A patent/JP6073489B2/ja active Active
- 2013-10-21 EP EP13782682.2A patent/EP2912414A2/de not_active Withdrawn
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4407209A1 (de) * | 1994-03-04 | 1995-09-07 | Bosch Gmbh Robert | Vorrichtung zur Messung der Masse eines strömenden Mediums |
US5765432A (en) * | 1995-03-16 | 1998-06-16 | Robert Bosch Gmbh | Flow sensor |
WO2003089884A1 (de) * | 2002-04-22 | 2003-10-30 | Siemens Aktiengesellschaft | Vorrichtung zur messung der in einer leitung strömenden luftmasse |
EP1816446A2 (de) * | 2006-02-03 | 2007-08-08 | Hitachi, Ltd. | Thermischer Durchflussmesser |
DE102010002023A1 (de) * | 2009-02-18 | 2010-08-19 | Denso Corporation, Kariya-City | Luftdurchfluss-Messeinrichtung |
EP2320200A1 (de) * | 2009-11-06 | 2011-05-11 | Hitachi Automotive Systems, Ltd. | Thermischer Fluidströmungssensor und Herstellungsverfahren dafür |
Also Published As
Publication number | Publication date |
---|---|
US20150285666A1 (en) | 2015-10-08 |
CN104736977A (zh) | 2015-06-24 |
DE102012219305B3 (de) | 2014-02-13 |
JP6073489B2 (ja) | 2017-02-01 |
EP2912414A2 (de) | 2015-09-02 |
JP2015532442A (ja) | 2015-11-09 |
KR20150070390A (ko) | 2015-06-24 |
CN104736977B (zh) | 2017-09-22 |
US9557202B2 (en) | 2017-01-31 |
WO2014064026A3 (de) | 2014-07-03 |
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