WO2014053573A1 - Procédé et dispositif pour éclairer et mesurer un objet - Google Patents

Procédé et dispositif pour éclairer et mesurer un objet Download PDF

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Publication number
WO2014053573A1
WO2014053573A1 PCT/EP2013/070592 EP2013070592W WO2014053573A1 WO 2014053573 A1 WO2014053573 A1 WO 2014053573A1 EP 2013070592 W EP2013070592 W EP 2013070592W WO 2014053573 A1 WO2014053573 A1 WO 2014053573A1
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WO
WIPO (PCT)
Prior art keywords
optical sensor
illumination
illumination source
lighting
sensor
Prior art date
Application number
PCT/EP2013/070592
Other languages
German (de)
English (en)
Inventor
Ralf Christoph
Detlef Ferger
Original Assignee
Werth Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik Gmbh filed Critical Werth Messtechnik Gmbh
Priority to DE112013004895.7T priority Critical patent/DE112013004895A5/de
Publication of WO2014053573A1 publication Critical patent/WO2014053573A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the invention relates to a method and to a device for incident illumination and / or transmitted light illumination of an object by means of a lighting source.
  • the invention relates to a device for incident illumination and / or transmitted light illumination of an object by means of an illumination source, wherein the radiation emanating from the illumination source in the beam path of an optical sensor, preferably image processing sensor, coupled and imaged onto the object or a method for reflected illumination and / or transmitted light illumination of an object by means of an illumination source, wherein the radiation emanating from the illumination source is coupled into the beam path of an optical sensor, preferably image processing sensor, and imaged onto the object.
  • an optical sensor preferably image processing sensor
  • the invention also relates to a device and a method for incident illumination and / or transmitted illumination of an object by means of an illumination source, wherein depending on the position of the optical sensor, only a limited area of the illumination source is driven, preferably a range within a predetermined angular range to the optical axis of the optical sensor.
  • a change in position of an optical sensor is present in particular when used in a coordinate measuring machine.
  • the invention therefore preferably relates to the use of the illumination according to the invention in a coordinate measuring machine.
  • An embodiment of the invention relates to incident light illumination, in which a mark is projected onto the object surface in at least one working distance of an optics used with a variable working distance.
  • Areal trained lighting sources are already used in many areas of optics and metrology, for example, for the transmitted light illumination or incident illumination of samples. However, only luminous fields are consistently found here Use that provide the most homogeneous possible illumination and in which the brightness for all areas of the illumination source is changed together. This is to achieve a uniform illumination. These illuminations are used in particular in the field of coordinate metrology with optical sensors.
  • optical Elements used for collimation or tubular aperture arrays To avoid this and to produce an almost parallel to the imaging direction extending, also called telecentric illumination, optical Elements used for collimation or tubular aperture arrays.
  • the collimation by means of a lens has the disadvantage that it must be arranged almost centrally to the beam path of the optical sensor and thus moved with the sensor.
  • the size and in particular the distance between the illumination and the sensor whereby the luminous efficacy decreases.
  • the latter also applies to tubular diaphragm arrays, as can be seen from EP 1 618 349 A1.
  • a lighting arrangement can be used, as can be found in EP 1 373 827 Bl.
  • Light sources are arranged on concentrically arranged circles whose beam paths intersect the optical axis of the camera. There is thus no at least partially common course. Coupling therefore does not take place.
  • it is an arrangement of individual point-shaped light sources, which are arranged exclusively on rings, but which not form a coherent closed surface that passes through the optical axis.
  • this illumination arrangement it is not possible with this illumination arrangement to enable a bright field epi-illumination.
  • only the discreetly provided illumination angle are possible for a dark field incident light illumination, which are predetermined by the spatial orientation of the point-shaped light sources, so no free adjustment of the angle of inclination of the lighting possible.
  • Object of the present invention is to provide a flexible lighting device and a method for operating the device available that allows fast and simple means, and almost wear-free switching between different types of illumination such as brightfield, darkfield light different inclination angles and directions and transmitted light, wherein the contrast present is as high as possible in order to allow accurate dimensional measurements in the entire measuring range or field of view of an optical sensor.
  • Another object of the invention is to increase the contrast of the illuminated object surface.
  • the invention is also intended to illuminate objects which are to be subjected to a dimensional investigation, for example by determining edges or surface points.
  • Corresponding objects are usually larger than the area that can be detected by an optical sensor, such as the image processing sensor, in particular if it is provided with a magnifying imaging objective in order to achieve high accuracies.
  • the sensor and the object are brought into different positions relative to one another and respectively partial contours are determined and possibly combined to form an overall contour.
  • the illumination source is a flat formed illumination source and that the illumination source consists of a plurality of light elements which are independently switchable, in particular switched on and off or in their intensity are adjustable.
  • the illumination source which in the actual sense represents an illumination field, is formed by luminous elements which are arranged relative to one another such that a luminous field with preferably between 100 and 10,000 luminous elements per cm, preferably between 100 and 5,000 luminous elements per cm.
  • the illumination source so the illumination field can be an areal extent of z. B. 1 mm x 1 mm to z. B. 600 mm x 600 mm.
  • a planar extension can be provided, which corresponds to the measuring range of a coordinate measuring machine in the XY measuring plane.
  • planar illumination source two-dimensional LCD matrices (liquid crystal display), LED matrices (Light Emitting Diode), OLED matrices (Organic Light Emitting Diode), LCoS matrices (Liquid Crystal on Silicon) or fiber bundles, more precisely so-called ordered fiber bundles, used, whose elements are individually controlled.
  • LCD matrices liquid crystal display
  • LED matrices Light Emitting Diode
  • OLED matrices Organic Light Emitting Diode
  • LCoS matrices Liquid Crystal on Silicon
  • Flat includes in particular a circular, rectangular or oval shape, within which the light elements are arranged to form the surface.
  • the term light element also includes micromirrors, wherein a micromirror array forming a surface is an areally formed illumination source.
  • planar illumination sources for the projection of lines or patterns are known, which are focused in the object plane.
  • the shape of the projected patterns is then detected by an optical sensor and provides information about the surface shape of the object.
  • the so-called structured light must be sharply imaged in the object plane. It is therefore not an incident illumination in the sense of this invention, which would be suitable to illuminate a portion of an object completely and the direct evaluation, for example, by image processing, accessible. Rather, in this type of sensor, the object is measured indirectly, for example by triangulation, ie direction determination, and only at the points at which lines of the pattern are imaged.
  • the design of the structured illumination is usually done by fixed apertures in the form of masks, deflection of a light beam by rotating polygon mirror or modulation of the intensity of a point or surface light source.
  • the position of the projected patterns is not evaluated, but a parameter dependent on the focusing, ie the distance between sensor and object surface and thus the topography of the surface, such as the sharpness of the imaged pattern. It is determined, so to speak, which areas of the pattern are sharply imaged, for example by the intensity in the center of the respective areas of the pattern is determined, which are turned on, that is illuminated. If there is a focus in this area, the center is bright and the area around the center is darker. Outside the focused state, a brightened area forms around the center and the center itself is also darker than in the focused state.
  • the intensity in the center of the individual areas illuminated by the pattern it is possible according to the invention to determine the focusing state and thus the distance to the object and thus therefore each illuminated area by recording the intensity at different distances between the sensor and the object. So that the bright areas of the pattern do not influence one another, ie, that the blurred image of the adjacent bright area is overspread, the bright areas of the pattern are spaced apart and rather small in their diameter, e.g. B. only a few or even one pixel in size. Alternatively, the contrast in the area of the center and around it can be determined. This becomes maximum similar to the intensity in the focused state.
  • each illuminated measuring point is surrounded in all directions by exactly one unilluminated measuring point, ie in each case alternately lighting one measuring point in two directions and the next one being unlit.
  • a quarter of all measuring points can be determined in one measuring cycle.
  • the pattern is shifted in the first, then the second and finally in both directions, illuminating previously unlit measuring points and not illuminating the previously lit ones.
  • larger distances between the illuminated measuring points are possible, so it is a greater distance in the pattern needed.
  • the respective shifted patterns are referred to below as different patterns.
  • the different patterns are each shifted as often to each other or varied so many times until all sections were illuminated at least once within the surface illuminated by the pattern.
  • one or more of the partial regions used for the measurement, for example in the form of the patterns, of the light source are driven at a plurality of differing distances between the sensor system and the measurement object surface, wherein an overall image is preferably composed of the partial images per distance or distance region, and the distance between the sensor system and the measurement object surface per sub-area is determined by taking into account at least the position of the respective sub-image for which the respective sub-area such as pixel has the highest intensity or brightness.
  • reflected-light illumination in particular bright-field illumination
  • a mask such as chromium mask, with translucent glass regions and opaque chromium regions is arranged in the beam path of the reflected light illumination source before being reflected in the beam path of the optical sensor.
  • the mark is focused into an intermediate image plane.
  • This intermediate image plane or an image plane generated by means of a further optical system, in which the mark is sharply imaged, is, according to the invention, in at least one setting for the optical sensor used and detected by the Auflichtbeleuchtungsstrahlengang at least partially traversed optics from the optical sensor.
  • an increased contrast is artificially generated in the focal plane of the optical sensor, as a result of which the focusing method according to the invention provides improved results, in particular for object surfaces with a low structure.
  • the mark is imaged blurred in at least one modified working distance of the optics of the optical sensor in the then existing focal plane.
  • This embodiment can also be combined according to the invention with the idea that the illumination source consists of a multiplicity of luminous elements which can be switched independently of one another.
  • the illumination source itself may represent the mark by turning on only selected lighting elements.
  • the individual elements emit different wavelengths, ie colors.
  • corresponding matrices or fiber bundles are used, in which the individual elements discrete wavelengths are assigned, for example in the form of a Bayer pattern, as is also known in color cameras. Since all available colors are available over the entire surface, the colors can be varied in all areas. This makes it possible, as described later, set the color separately for the different types of lighting already mentioned.
  • micromirror arrays are used, the individual elements being mirrors which can be controlled in their orientation or direction or angle. This reflects the light from a light source directed at the array at a first or second angle, depending on the orientation of each individual mirror. As a result, it is either directed into a so-called light trap or emitted in a defined direction.
  • the principle is used for example in DLP beamers (Digital Light Processing).
  • the two adjustable angles can also be selected, or the array can be aligned to the light source so that the two angles are used for two different types of illumination.
  • a parallel Lighting for a transmitted light illumination realize and by the second tilt angle a Auflichtart.
  • the individual light elements or micro mirrors are subdivided into groups, with one or more groups being switchable independently of one another.
  • a group can consist of only a single light element.
  • Content of the method according to the invention is the selection and the switching or
  • a self-invented method step consists in the illumination restricted specifically to one area, which is selected as a function of the position of a moving optical sensor with respect to the areal illumination in such a way that the maximum occurring angle between illumination and optical axis of the optical sensor is limited in order to reduce aberrations ,
  • This can be advantageously used for measurements in transmitted light, wherein the illumination is arranged on the side remote from the optical sensor side of the object to be measured and in each case only the area is turned on or adjusted, which is opposite to the optics. As a result, illumination beams are avoided with a large angle to the optical axis of the optical sensor.
  • the method can be used for incident light illumination, preferably for the illumination in the bright field, that is coaxial with the optical axis of the optical sensor.
  • the illumination can be introduced via a deflection in the beam path or else be arranged directly in this.
  • transparent illumination sources such as OLEDs are suitable for this purpose.
  • the lighting is made possible by a single lighting device, which saves space and costs.
  • a further object of the invention is that surface points which contain positional information of the measurement points along the optical imaging direction are determined.
  • the known brightness or contrast evaluation according to the focus technique wherein the image recording in several distances between the sensor and Object is repeated.
  • the light source according to the invention is driven so that a pattern is shown that a produces similar image as the image produced by confocal apertures.
  • the object underlying the invention is essentially achieved by a device for incident illumination and / or transmitted light illumination of an object by means of a flat illumination source, the radiation emanating from the illumination source coupled into the beam path of an optical sensor, preferably image processing sensor, and coupled to the object is formed, wherein the illumination source is a flat formed illumination source and the illumination source is formed of at least a plurality of light elements, such as two-dimensional LCD matrix, LED matrix, OLED matrix, LCoS matrix, fiber bundles or at least one micromirror array, wherein the individual light-emitting elements or micromirrors can be switched independently of one another, preferably the light-emitting elements or micromirrors are subdivided into groups, one or more groups being able to be switched independently of one another.
  • a device for incident illumination and / or transmitted light illumination of an object by means of a flat illumination source the radiation emanating from the illumination source coupled into the beam path of an optical sensor, preferably image processing sensor, and coupled to the object is formed
  • the illumination source
  • the areally formed illumination source which can be referred to as the illumination field, is formed in particular by an arrangement of luminous elements, with 100 to 10,000 luminous elements per cm, preferably 100 to 5,000
  • Luminous elements per cm for the formation of the surface are arranged in particular regularly.
  • the total area of the areal trained illumination source can be z. B. dimensions between 1 mm x 1 mm to 600 mm x 600 mm.
  • the areally formed illumination source that is to say the luminous field, can also have a planar extent, which corresponds to the measuring range of a coordinate measuring machine in the XY plane.
  • a particular feature of the inventive device is that the radiation of the illumination source is not focused in the object plane, so no structured illumination takes place, as is the case with sensors based on the light projection such as triangulation sensors.
  • a further independent solution of the object underlying the invention is achieved by a device for incident illumination and / or transmitted light illumination of an object by means of an illumination source, wherein the radiation emanating from the illumination source radiation in the beam path of an optical sensor, preferably image processing sensor, can be coupled and imaged on the object or the illumination source is arranged on the side of the object facing away from the optical sensor, wherein the illumination source comprises a multiplicity of luminous elements, which can be switched independently of one another depending on the position of the optical sensor.
  • Coupling means that the beam path of the illumination source coincides at least in sections with that of the optical sensor, at least in the region in which the beam path strikes the region or point of the object to be measured.
  • a particular feature of the inventive device is that only the lighting elements are switchable, which are arranged within a fixed angular range to the optical axis of the optical sensor, preferably the angular range by a definable angle of for example 1 ° or 3 ° or 5 ° greater than that the numerical aperture of the lens associated with the optical sensor resulting acceptance angle.
  • this angular range can be different.
  • not only circular areas, but also otherwise shaped areas of the illumination can be switched, that is switched on or controllable, such as, for example, matched to the camera dimensions of the optical sensor rectangular areas.
  • the angle Phi between the optical axis of the sensor and the direction of the direct line connecting the light-emitting element and the optical sensor is ⁇ 10 °, preferably ⁇ 3 °, particularly preferably ⁇ 1 °.
  • the direct connecting line extends in particular between the center of the surface of the luminous element and the center of the object-side foremost optical element such as lens (also called front lens) of the optical sensor.
  • the optical sensor is movable at right angles or at least approximately at right angles to its imaging direction, and the optical sensor Lighting source has a greater extent than the detectable by the fixed optical sensor surface, preferably covering the entire detectable by the moving optical sensor area.
  • the invention is also characterized in that the illumination source is fixed and the optical sensor with respect to the illumination source in at least one direction is perpendicular or nearly perpendicular to its imaging direction movable, or that the illumination source in a first rectangular or nearly perpendicular to the imaging direction of optical sensor is movable and the optical sensor in a second, perpendicular or nearly perpendicular to the imaging direction of the optical sensor and at right angles or at right angles to the direction of movement of the illumination device extending direction is movable.
  • object and optical sensor are movable relative to one another in the direction of the imaging direction of the optical sensor and preferably at right angles or at right angles to the imaging direction of the optical sensor and the illumination source has an extension which detects at least the optical sensor fixed relative to the object Surface illuminated, and the illumination source is fixed relative to the optical sensor.
  • the movement in the direction of the imaging direction of the optical sensor serves to carry out the already described focus method for the determination of surface points.
  • the area covered by the sensor is illuminated by the illumination source.
  • the movement perpendicular to the optical axis makes it possible to determine surface points at different points on the object.
  • the invention is characterized in that the luminous elements forming a surface are at least luminous elements from the group LCD matrix, LED matrix, OLED matrix, LCoS matrix, fiber bundles, at least one micromirror array.
  • the light-emitting elements used are those from the group of two-dimensional LCD matrix, LED matrix, OLED matrix, LCoS matrix, fiber bundles or at least one micromirror array.
  • the radiation of the illumination source impinges unfocused on the object plane. This is intended to fiction, contemporary lighting, without limiting the invention so. In the case of the application of the focus method, however, a focus sation by means of a suitable optics.
  • the radiation of the illumination source can be focused into the focal plane of the optical sensor by means of an optical system which is connected to the optical sensor or is already contained in the optical sensor.
  • the invention is characterized in that a plurality of selected lighting elements of the illumination source are jointly controllable, which form a pattern, preferably several successive different patterns can be generated.
  • a plurality of selected lighting elements of the illumination source are jointly controllable, which form a pattern, preferably several successive different patterns can be generated.
  • the coupling with means for deflecting the radiation of the illumination source such as deflecting mirror, splitter cube, splitter plate or pellicle, preferably using partially transmissive optical layers or wavelength-selective layers or vibration direction-selective layers.
  • only a deflection of the radiation emitted by the planar illumination source takes place at the object-side end of the optical sensor, that is to say a coupling between the object and the side of the optical elements of the optical sensor facing the object.
  • the invention is characterized in that the areal trained illumination source, when all elements are turned on, forms a coherent, closed surface, which is traversed by the optical axis of the optical sensor after alignment as deflection on the object to be measured.
  • the planar illumination source taking into account the required optical elements for coupling in the rays emanating from the illumination source along the optical axis, can be implemented centrally from the optical axis.
  • a coherent, closed surface is penetrated by the optical axis of the sensor, the radiation of the luminous surface, which is deflected in the direction of the object, being essentially parallel and in the direction of the optical axis.
  • the device is characterized in that the coupling takes place between the optical elements of the optical sensor or between the optical elements and the image sensor of the optical sensor.
  • the radiation of the illumination source thus passes through the optical elements such as lenses and / or diaphragms and / or splitter layers of the optical sensor.
  • the invention is characterized in that the transmitted light illumination is arranged on the opposite side of the optical sensor of the object and is preferably coupled without deflection.
  • the illumination source is thus opposite the optical sensor and radiates in the opposite direction of the optical axis of the optical sensor.
  • the invention provides that between the illumination source and coupling an optical element such as lens and / or aperture and / or filter, the rays through smaller than a defined critical angle to the mean direction of the rays of the illumination source fürlas st, preferably formed by a plurality of arrangement in the radiation direction tubular or honeycomb-shaped and juxtaposed elements is arranged.
  • the optical elements such as lenses or diaphragms can be used to adapt the beam geometry of the illumination to the field of view of the sensor.
  • a parallelization of the radiation is carried out, preferably in the bright field Auflicht- or transmitted light illumination.
  • the illumination device is integrated in a coordinate measuring machine and the control of the illumination device and the optical sensor is connected to the control of the coordinate measuring machine, and preferably two illumination devices are used, which are arranged on opposite sides of the object, and preferably two optical sensors used, which are arranged on opposite sides of the object.
  • the lighting fulfills all the tasks of the various types of illumination used in coordinate metrology.
  • a second illumination device of the type mentioned above is required if only one sensor is present and should be realized for this incident illumination and transmitted light illumination. If these two illumination devices are present, however, a second sensor on the opposite side of the object can also be supplied with both types of illumination. This makes it possible to measure the object on both sides.
  • the plurality of light elements or fibers or micromirrors of the illumination source emit light of different wavelengths, preferably by using an RGB matrix illumination source.
  • the invention is characterized in that the lighting elements are arranged in a plane which is preferably parallel or perpendicular to the support surface of the object to be measured.
  • the invention provides that only the lighting elements are switched on, in which the angle Phi between the optical axis of the sensor and the direction of the direct line connecting the light-emitting element and the optical sensor ⁇ 10 °, preferably ⁇ 3 °, more preferably ⁇ 1 ° ,
  • Eigenerfinderisch a device is characterized in that in an illumination beam path, preferably bright field illumination beam path, before being reflected in the beam path of an optical sensor, preferably image processing sensor with focus sensor function, a brand, such as chrome mask, is arranged with translucent and opaque areas in the focal plane an optics associated with the optical sensor with adjustable working distance in a first setting for the working is focused from focused and mapped in at least one other focal plane of a modified working distance, preferably by the optics contains at least one adjustable to adjust the working distance of the optic lens, which is traversed by the illumination beam path only after the reflection on the object, that is arranged between reflection and the receiver of the optical sensor, wherein the mark is preferably formed by the Variety of lighting elements of the illumination source, with only selected lighting elements are turned on.
  • One or more objects underlying the invention are essentially also achieved by a method for incident illumination and / or transmitted light illumination of an object by means of an illumination source, wherein the radiation emanating from the illumination source is coupled into the beam path of an optical sensor, preferably an image processing sensor, and onto the object is formed, wherein the illumination source is formed flat and the illumination source is formed at least from a plurality of light-emitting elements, such as two-dimensional LCD matrix, LED matrix, OLED matrix, LCoS matrix, fiber bundles or at least one micromirror array, wherein the individual light elements or micromirrors are switched on or set independently of one another, preferably the individual light-emitting elements or micromirrors are subdivided into groups, and the individual or a plurality of groups are switched on or set independently of one another to achieve a bright field incident lighting or a dark field incident lighting or a transmitted light illumination or a mixture of lighting types.
  • a plurality of light-emitting elements such as two-dimensional LCD matrix, LED matrix, OLED
  • Another selffinderisch the task underlying the invention solving method consists in incident light illumination and / or transmitted light illumination of an object by means of an illumination source, wherein the illumination source is formed areal and emanating from the illumination source radiation in the beam path of an optical sensor, preferably image processing sensor, and is imaged on the object or the illumination source is arranged on the side facing away from the optical sensor side of the object, wherein the illumination source comprises a plurality of luminous elements, which are switched independently depending on the position of the optical sensor and / or adjusted such that a bright field incident illumination or a dark field incident illumination or a transmitted light illumination or a mixture of the illumination types is achieved.
  • a third selffinderisch the task underlying the invention solving method consists in a method for the determination of measuring points on the surface of an object with an optical sensor according to the focus principle, preferably confocal focus principle, consisting at least of a flat pronounced receiver or image sensor such as CCD or CMOS sensor having a plurality of photosensitive elements for taking two-dimensional images, using incident light illumination, wherein the radiation emanating from the illumination source is coupled into the beam path of the optical sensor and imaged onto the object, and wherein a parameter characteristic of the surface of the object how the contrast value and / or intensity value is determined in a plurality of relative positions between object surface and focal plane of the sensor varying in the direction of the optical axis of the optical sensor by taking two-dimensional images, and from the Rela and the characteristic parameter, the coordinate of at least one measuring point present along the optical axis is determined, wherein the measuring range determined by the images perpendicular to the optical axis is subdivided into partial regions, wherein the illumination source is flat and is formed from a
  • the invention is characterized in that the radiation emanating from the illumination source is focused into the focal plane of the optical sensor, preferably by an optics connected to the optical sensor or already contained in the optical sensor, and preferably the illumination source is fixed relative to the optical sensor.
  • the partial regions are assigned to individual pixels or groups of adjacent pixels of the receiver of the optical sensor
  • the respective plurality of partial regions illuminated by the respective pattern in the focused state are spaced from one another, preferably at a distance from one another which is at least twice, preferably at least 5 times, particularly preferably at least 10 times the side length of Subarea corresponds, preferably so that during the relative movement no superposition of the plurality of illuminated subregions takes place due to the occurring defocusing of the pattern.
  • the invention is distinguished by the fact that the respective plurality of partial regions illuminated by the respective pattern are spaced apart from one another such that during the relative movement no superimposition of the several illuminated partial regions occurs due to the defocusing of the pattern occurring.
  • the invention is also distinguished by the fact that the characteristic parameters and the resulting coordinate during the variation of the relative position between the object surface and focal plane of the sensor are determined simultaneously or substantially simultaneously for the subregions illuminated by the respective pattern, the perpendicular to the optical axis present coordinate is determined from the present perpendicular to the optical axis position of the sub-area in the image and the optical sensor relative to the object.
  • the invention is distinguished by the fact that for each distance or distance range, an overall picture is composed of the sub-images assigned to the sub-areas, and the distance between the optical sensor and the measuring object surface per sub-area is determined by taking into account at least the position of the respective sub-image the respective subarea such as pixels has the highest contrast or the highest intensity or brightness.
  • relative movements are carried out several times in succession when using different patterns or during a single relative movement different patterns are repeatedly set in several cycles, wherein each pattern several measurement points are determined, each selected sub-areas corresponding to the respective Pattern are set.
  • the invention is characterized in that the different patterns are each shifted to each other as often or are varied so often until all sections have been illuminated at least once.
  • the invention is characterized in that only the lighting elements are switched on or adjusted, which are arranged within a predetermined angular range to the optical axis of the optical sensor, preferably the angular range is greater by a definable angle of for example 1 ° or 3 ° or 5 ° as the acceptance angle resulting from the numerical aperture of the lens associated with the optical sensor.
  • the angle Phi between the optical axis of the sensor and the direction of the direct connecting line between the light-emitting element and the optical sensor is ⁇ 10 °, preferably ⁇ 3 °, particularly preferably ⁇ 1 °.
  • the direct connecting line extends in particular between the center of the surface of the luminous element and the center of the object-side foremost optical element such as lens (also called front lens) of the optical sensor.
  • the optical sensor is moved at least perpendicular or almost perpendicular to its imaging direction and the illumination source has a greater extent than the detectable by the fixed optical sensor surface, preferably the entire detected by the moving optical sensor Area covers.
  • the invention is characterized in that the illumination source is fixed and for measuring one or more features of the object the optical sensor is moved with respect to the illumination source in at least one direction perpendicular or nearly perpendicular to its imaging direction, or that for measuring one or more a plurality of features of the object, the illumination source is moved in a first direction perpendicular or substantially perpendicular to the imaging direction of the optical sensor and the optical sensor in a second, perpendicular or nearly perpendicular to the imaging direction of the optical sensor and at right angles or at right angles to the direction of movement of the illumination device extending direction is moved.
  • the invention is also characterized in that light elements in the middle of the illumination source are grouped to produce the bright field incident illumination, preferably circularly adjacent illumination elements.
  • the bright field incident illumination preferably circularly adjacent illumination elements.
  • the invention is characterized in that for generating the dark field incident lighting lighting elements are grouped outside the center of the illumination source, preferably in the form of circular rings, preferably a plurality of radially offset annuli are switchable to achieve different illumination angle of the dark field illumination, and preferably along the annuli the periphery are divided into segments to achieve different directions of the dark field illumination. In this case, only off-axis beams with a larger angle to the propagation direction of the illumination radiation arrive at the object and form a so-called dark field incident illumination.
  • all the illumination elements of the illumination source are preferably used, with micromirrors preferably being used whose directions are adjusted to produce parallel light, or the micromirrors are grouped to produce diffuse light and adjusted in different directions.
  • parallel transmitted light can also be generated without a tilting mirror by introducing a filter between an illumination source and the coupling, since the filter transmits only beams smaller than a defined critical angle to the mean direction of the beams of the illumination source, preferably formed by an arrangement of a plurality in the direction of radiation honeycomb-shaped and juxtaposed elements.
  • the directions of the micromirrors are changed in each case at least one group for switching between the on state and off state of the respective type of illumination or to switch between bright field and dark field illumination.
  • the invention is characterized in that transmitted light illumination and bright field illumination and / or dark field illumination is achieved by a single illumination source and two optical sensors, which are arranged on opposite sides of the object, are used to measure the object from two sides.
  • the invention is also characterized in particular by the fact that the color of the transmitted light illumination and / or incident light illumination is set by controlling the corresponding light elements, with different colors preferably being set for the types of illumination or the different dark field circles or segments.
  • the method is used in a coordinate measuring machine.
  • the lighting elements to be switched on are determined according to a preliminary measurement of the object contours or the object boundary with the optical sensor, preferably in different relative positions between sensor and object, wherein in the pre-measurement all the lighting elements of the respectively selected illumination type transmitted light or Incident light or at least the part of the luminous element which is necessary for a complete illumination of the object, are switched on and the contours or the boundary of the object roughly determined in their position, and then depending on the relative position between sensor and object only the light elements are turned on, contribute to the illumination of the detected by the sensor, roughly determined contour under the predetermined maximum angle Phi.
  • a selffinderisches method provides that to increase the contrast of the detected by an optical sensor surface of an object in an illumination beam path, preferably bright field illumination beam path, before the reflection in the beam path of an optical sensor, preferably image processing sensor with focus sensor function, a brand, such as chrome mask, with light-transmissive and opaque areas is arranged and is focused by adjusting a first working distance of the optical sensor associated optics with adjustable working distance in the focal plane of the optics, wherein the mark is blurred in at least one other focal plane of a modified working distance, preferably by the optics at least contains an adjustable lens for adjusting the working distance of the lens, which is traversed by the illumination beam path only after the reflection on the object, ie between reflection and the receiver it is arranged of the optical sensor, wherein preferably the mark is formed by only selected light elements are turned on from the plurality of light elements of the illumination source.
  • FIG. 1 shows a first preferred embodiment of a fiction, contemporary
  • Fig. 2 shows an extension of the first preferred embodiment by a
  • Fig. 3 shows an extension of the first preferred embodiment by a
  • Fig. 4 shows a second embodiment of a device according to the invention with
  • Fig. 5 shows the application of the inventive method for the production of
  • Fig. 6 shows the application of the inventive method for producing a first
  • Fig. 7 shows the application of the inventive method for producing a second
  • Fig. 8 shows the application of the inventive method for producing a
  • Fig. 9 shows the application of the inventive method for the production of
  • Fig. 12 shows an alternative arrangement for generating transmitted light
  • Fig. 13 shows an alternative arrangement for generating transmitted light
  • Fig. 15 is a particularly emphasized method using the inventive arrangement and
  • Fig. 16 is a particularly emphasized method using different patterns.
  • a first preferred embodiment of a device according to the invention with coupling in of the radiation of an illumination 1 consisting of areally illuminated source 2 and deflection device 3 between optical sensor 4 and object or measuring object 5 will be explained with reference to FIG.
  • the illumination source 2 according to the invention consists of individually controllable elements 6, of which three are marked by way of example in the figure. These elements 6 can be switched on and off separately, as well as their intensity control. The number of elements 6 is several hundred to several thousand elements 6 in both propagation directions.
  • two-dimensional LCD matrices Liquid Crystal Display
  • LED matrices Light Emitting Diode
  • OLED matrices Organic Light Emitting Diode
  • LCoS matrices Liquid Crystal on Silicon
  • ordered fiber bundles are suitable for this purpose.
  • the individual elements 6 emit white light.
  • colored radiating elements 6 are used.
  • the edge lengths between 1 mm and z. B. 600 mm.
  • the number of light elements per cm can be between 100 and 10,000, in particular between 100 and 5,000.
  • the radiation emitted diffusely but in the middle in the direction of an arrow 7 of the illumination source 2 is directed via a partially transparent mirror 3 in principle in the direction of the optical axis, characterized by an arrow 8, of the optical sensor 4 on the measuring object 5.
  • brightfield incident light and various dark field illuminations as explained in FIGS. 6 to 8, it is possible to flexibly switch over by controlling the corresponding elements 6. A mixture of different types of lighting is thus possible.
  • the invention may also be distinguished by the fact that the planar illumination source 2 spans a plane with a normal which intersects the optical axis 8 in particular perpendicularly or almost perpendicularly.
  • the optical sensor 4 comprises at least one or more imaging lenses 9 and a detector 10, usually a planar CCD or CMOS camera matrix.
  • the optical sensor 4 is preferably an image processing sensor which detects a planar region of the measurement object 5 in order to localize edges and / or surface points and assign them to these coordinates.
  • a further illumination source 2a can be arranged below the measurement object 5 resting on a transparent measuring table 11. If the radiation runs along the arrow 7a as indicated in FIG. 4 and the radiation is coupled in by means of a deflection device 3a, the illumination source 2a also acts as incident illumination for a second optical sensor 4a arranged below the measurement object 5 (FIG. 4).
  • the illumination source 2 shown in Figure 1 acts for this second optical sensor 4a, as well as the alternative illumination source 2b of Figure 4, as transmitted light illumination.
  • the measuring object 5 can be observed and measured with the arrangement shown in Figure 4 from two opposite directions, wherein for both directions Incident light and transmitted light can be used. In that regard, the figures are self-explanatory. This also applies to the other drawings.
  • FIG. 2 shows a possible extension of the coupling of the radiation of the illumination source 2 through a lens 12.
  • This makes it possible to adapt the size of the irradiated surface of the measurement object 5 to the field of view of the optical sensor.
  • a focusing of the radiation in the object plane, ie the plane of the surface of the measurement object 5, as in sensors with structured illumination, does not take place because the measurement object 5 should be illuminated as uniformly as possible in order to enable location-independent image processing.
  • the image field can still be limited by aperture.
  • apertures 14 and / or 15 are arranged in front of or behind the lens 12.
  • An optical sensor 4 or 4a has not been shown for the sake of simplicity.
  • FIG. 3 shows a further possible extension of the coupling of the radiation of the illumination source 2 into the optical axis 8 through an arrangement 16 for limiting the emission angle.
  • the arrangement 16 represents a filter which, by means of tubular or honeycomb-shaped and juxtaposed, transparent elements such as openings 17 in the radiation direction 7, effects a parallelization of the radiation since, depending on the diameter and the length of the openings, only radiation will pass up to a certain boundary wave can. This is useful, for example, when used together with the illumination source 2 as bright field incident light or in conjunction with the illumination source 2a as transmitted light illumination according to FIG.
  • FIG. 1 A second embodiment of the device according to the invention with coupling of the radiation of the illumination source 2b into the beam path of the optical sensor 4 will be shown with reference to FIG.
  • an opening 18 is provided laterally of the optical sensor 4, through which the radiation in the direction of arrow 7 transverse to the optical axis 8b of the sensor 4 on the deflection 3b meets and in the direction of arrow 8b, ie in the direction of the optical axis to the measurement object. 5 is diverted.
  • the deflecting device 3b again a partially transmissive mirror, is arranged between the lenses 9 and the receiver 10 of the sensor 4.
  • the radiation of the illumination source 2b thus passes through the lenses 9 of the optical sensor 4, wherein the Distance between the lenses 9 and the illumination source 2b is chosen so that in turn no focusing of the radiation on the measuring object 5 takes place.
  • FIG. 4 shows the already mentioned second optical sensor 4 a, which can be arranged opposite the optical sensor 4 on the opposite side of the object 5.
  • the coupling takes place analogously to the optical sensor 4 in Figure 1 between the sensor and the object to be measured.
  • FIG. 5 shows the use of the inventive method for generating bright field incident light.
  • a central area for example in the form of a circular area 19 is used for illumination, so only the elements located within the hatched area 19 shown hatched and turned on.
  • the illumination source is shown in plan view. As a result, only with respect to the axis of the optical sensor 4 near-axis rays reach the measurement object 5, whereby a bright field illumination is achieved.
  • FIGS. 6 to 8 show different dark-field incident light illuminations.
  • the circular ring 20 is part of the areally formed illumination source 2. This results in a dark field incident illumination with a relatively steep angle of incidence of the radiation on the measurement object 5. If a further outward circular ring 21, as shown in Figure 7, turned on, a flatter dark field illumination is achieved , In order to illuminate directed structures with particularly high contrast, a certain direction of the darkfield incident illumination may be necessary.
  • the segment 22 of the circular ring 20 is switched on in FIG.
  • Figure 9 shows the application of the inventive method for generating transmitted light.
  • all elements of the illumination source are turned on.
  • only the elements in the field of view of the optical sensor are switched on.
  • the flat illumination sources 2 shown in FIGS. 5 to 9 can emit colored radiation in addition to white.
  • the elements have different colors, as is implemented for example in RGB matrices in the form of Bayer patterns.
  • RGB matrices in the form of Bayer patterns.
  • you can switch between the different colors and, for example, bright field and dark field can be realized with different colors.
  • FIG. 10 An alternative illumination source for generating bright field incident light is shown in FIG.
  • a tilting mirror array 23 that is to say a multiplicity of tiltable micromirrors 24a or 24b, which are arranged two-dimensionally, and an additional light source 25 are used.
  • the illustration in Figure 10 shows a simplified view from the side.
  • 24a is an example of a non-tilted micromirror denotes, with 24b a micromirror in the tilted state.
  • the micromirrors can be individually tilted electronically.
  • the light emitted by the light source 25 in the direction of the arrows 26 is coupled depending on the tilted position of the micromirrors either in the direction of arrow 7 in the beam path (optical axis 8) of the optical sensor and along the beam path and by means of the deflection device 3 on the measurement object. 5 directed, or directed in the direction of arrow 7a to a so-called light trap 27. If only the micromirrors 24b are tilted in the center of the tilting mirror array 23, only objects near the axis reach the measuring object 5 and a bright field illumination ensues.
  • FIG. 12 The KippLitearray can also be used for transmitted light illumination, as shown in Figures 12 and 13.
  • the radiation of the light source 25 is directed onto the light trap 27 in the direction of the arrow 7a. If, however, the micromirrors are all set in the tilted state, as shown in FIG. 13, the radiation in the direction of the arrow 7 is reflected onto the measurement object 5 and a transmitted light illumination results.
  • FIG. 14 shows a further arrangement according to the invention similar to the arrangement of FIG. 1, but without the need for a deflection, without this resulting in a limitation of the teaching according to the invention.
  • the arrangement consists at least of the areally executed illumination source 2a, consisting of a plurality of luminous elements 6, the measurement object 5 and the optical sensor 4 in two exemplary positions 4-1 and 4-2.
  • the individual light-emitting elements 6 are separately switchable or adjustable, ie separately switched on and off, as well as controllable in intensity and represent a transmitted light.
  • the direction of the image is chosen arbitrarily and can just as easily be the other way round, so that the illumination source 2a is located above and the optical sensor 4 below the measurement object 5. Likewise, a lateral arrangement of the three components 2 a, 4 and 5 is possible.
  • the angle Phi which should amount to a maximum of 10 °, more preferably a maximum of 3 ° or a maximum of 1 °, includes the optical axis 8 of the sensor 4 and the direction of the direct connecting line between the luminous element 6 and the sensor 4.
  • the corresponding straight line is marked 6 'in FIG. It runs between the middle of the surface of the Luminous element and the center of the object side foremost optical element, the front lens 9, the optical sensor 4.
  • the angle Phi is set according to the present at the respective optical sensor 4 numerical aperture.
  • Phi is chosen by a safety margin of, for example, 1 ° or 3 ° or 5 ° greater than the angle resulting from the numerical aperture, also called the acceptance angle.
  • the numerical aperture of the sensors 4 used is, for example, 0.1 to 0.5, so that an acceptance angle to the optical axis of about 6 ° to 30 ° results.
  • FIG. 15 shows an inventive method which should be particularly emphasized, in which initially illumination with the arrangement according to the invention, for example according to FIG. 14, is controlled in such a way that all controllable elements 6, the illumination source 2 a are switched on and a pre-measurement with the optical sensor 4 in transmitted light , as shown here, or in reflected light. If the position and dimension of the measurement object 5 are known, a restricted area of the controllable elements 6, which completely illuminates the measurement object 5, can be switched on.
  • the pre-measurement the rough determination of the position of the contours on the measurement object 5 with the optical sensor 4, preferably in several relative positions between sensor 4 and object 5, as shown in Figure 14 by way of example for two relative positions.
  • FIG. 14 shows an inventive method which should be particularly emphasized, in which initially illumination with the arrangement according to the invention, for example according to FIG. 14, is controlled in such a way that all controllable elements 6, the illumination source 2 a are switched on and a pre-measurement with the optical sensor 4 in transmitted light , as shown here, or in
  • the ascertained contour is shown in dashed lines and identified by the reference numeral 28.
  • This determination is initially coarse, so the position of the contours so not exactly because light from relatively large angles to the optical axis for laterally shifted edge locations or a blurred image provides, as already explained above, especially on high objects under test in transmitted light.
  • the roughly determined position of the edges or contour 28 is now used for targeted illumination for the actual, accurate measurement.
  • only the controllable elements 6 are switched on for this second measurement per relative position between sensor 4 and object 5, which contribute to illuminate the roughly determined edge locations respectively detected by sensor 4 along contour 28 at the predefinable maximum angle Phi.
  • the corresponding regions of the controllable elements 6 are designated by 29.
  • the angle Phi fiction according to the numerical aperture plus a security surcharge can be selected. This is exemplary in one dimension by the Dashed lines 30 and 31 indicated, with a security surcharge was not considered.
  • FIGS. 16 a to d the different patterns are shown by way of example, which are set one after the other in order to illuminate the entire area of the object 5 piece by piece on the surface of the object 5.
  • the receiver 10 consists of a plurality of photosensitive elements, which are individually readable.
  • the receiver elements surrounding the respective areas illuminated by the pattern must not be read in order to not use the light reflected by the measurement object 5 for the purpose of evaluation.
  • the receiver 10 is therefore read out by means of a corresponding pattern which fundamentally corresponds to the illumination pattern.
  • the receiver elements which are assigned to the regions of the light source which are illuminated in accordance with the currently set pattern are read out.
  • the patterns shown in FIGS. 9a to 9d are used in succession. Under certain circumstances, it makes sense to maintain larger distances between the illuminated elements 32 in order to achieve a better separation. The number of patterns then increases accordingly.
  • the illumination and readout of the corresponding subareas must each run synchronously.
  • the camera 10 used for reading out the image and the light source 2 used for illumination are activated, for example, with known trigger functions or lines.
  • the assignment of the lighting elements 6 to the receiver elements can, for example, be carried out in advance experimentally, ie by measuring.
  • the respective illuminated areas of the object 5 are thus imaged on the receiver 10 and thereby the respectively illuminated partial areas and possibly additionally the directly surrounding areas, of the receiver 10 to determine the multiple surface points. Thereafter, the next pattern is set to determine the next surface points.
  • the distance between sensor 4 and object 5 is varied in order to determine the position of the highest intensity or the highest contrast, and thus the distance of the respective surface point to the sensor 4, by means of a focus method. So that the change in distance does not have to be repeated, it is preferably provided to switch the patterns alternately during the change of state.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un procédé et un dispositif pour éclairer par lumière incidente et/ou par lumière transmise un objet (5) au moyen d'une source d'éclairage (2), le rayonnement sortant de la source d'éclairage pouvant être injecté dans la trajectoire des rayons d'un capteur optique (4) et reproduit sur l'objet ou la source d'éclairage étant disposée sur le côté de l'objet opposé au capteur optique. Pour permettre une commutation rapide et avec des moyens simples entre différents types d'éclairage tels que lumière incidente claire, lumière incidente sombre, différents angles d'inclinaison et directions et lumière transmise, il est prévu que la source d'éclairage (2) soit une source d'éclairage de conception plane et qu'elle comprenne au moins une pluralité d'éléments d'éclairage (6) qui peuvent être commutés indépendamment les uns des autres.
PCT/EP2013/070592 2012-10-05 2013-10-02 Procédé et dispositif pour éclairer et mesurer un objet WO2014053573A1 (fr)

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DE102017204302A1 (de) 2017-03-15 2018-09-20 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zur Abbildung eines Objektes mittels Schattenwurf
DE102018105794A1 (de) 2017-03-15 2018-09-20 Carl Zeiss Industrielle Messtechnik Gmbh Abbildung eines Objektes mittels Schattenwurf
CN108603812A (zh) * 2015-12-28 2018-09-28 倍耐力轮胎股份公司 用于检查轮胎的装置
CN109431439A (zh) * 2018-12-17 2019-03-08 深圳开立生物医疗科技股份有限公司 一种光源反馈装置及控制方法、内窥镜
CN110998406A (zh) * 2017-07-12 2020-04-10 卡尔蔡司显微镜有限责任公司 角度可变的照明时的闪烁
CN118237280A (zh) * 2024-05-27 2024-06-25 南昌大学 一种光学影像测量装置

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DE102015209455A1 (de) 2015-05-22 2016-11-24 Sac Sirius Advanced Cybernetics Gmbh Vorrichtung und Verfahren zur optischen Erfassung von Innenwandungen
DE102017203391A1 (de) 2017-03-02 2018-09-06 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Koordinatenmessgerät zur metrologischen Vermessung von Werkstücken mit Hilfe eines Leuchttischs
DE102017110080B4 (de) * 2017-05-10 2019-07-18 5Micron Gmbh Verfahren und Vorrichtung zur Detektion von Oberflächendefekten einer Oberfläche
DE102021128444B4 (de) 2021-11-02 2023-06-15 MarWeTec GmbH Verfahren zur optischen Vermessung von technischen Oberflächen und Vorrichtung zur Durchführung des Verfahrens

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DE102015110289A1 (de) 2015-06-26 2016-12-29 Werth Messtechnik Gmbh Verfahren zur Bestimmung von Messpunkten auf der Oberfläche eines Werkzeugstücks mit einem optischen Sensor
CN108603812A (zh) * 2015-12-28 2018-09-28 倍耐力轮胎股份公司 用于检查轮胎的装置
DE102017204302A1 (de) 2017-03-15 2018-09-20 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zur Abbildung eines Objektes mittels Schattenwurf
DE102018105794A1 (de) 2017-03-15 2018-09-20 Carl Zeiss Industrielle Messtechnik Gmbh Abbildung eines Objektes mittels Schattenwurf
DE102017204302B4 (de) * 2017-03-15 2020-10-15 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zur Abbildung eines Objektes mittels Schattenwurf
DE102018105794B4 (de) 2017-03-15 2022-08-04 Carl Zeiss Industrielle Messtechnik Gmbh Abbildung eines Objektes mittels Schattenwurf
CN110998406A (zh) * 2017-07-12 2020-04-10 卡尔蔡司显微镜有限责任公司 角度可变的照明时的闪烁
CN109431439A (zh) * 2018-12-17 2019-03-08 深圳开立生物医疗科技股份有限公司 一种光源反馈装置及控制方法、内窥镜
CN118237280A (zh) * 2024-05-27 2024-06-25 南昌大学 一种光学影像测量装置

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