WO2014049772A1

WO2014049772A1 - Component mounting device

Info

Publication number: WO2014049772A1
Application number: PCT/JP2012/074868
Authority: WO
Inventors: 仁哉井村
Original assignee: 富士機械製造株式会社
Priority date: 2012-09-27
Filing date: 2012-09-27
Publication date: 2014-04-03
Also published as: JPWO2014049772A1; JP6320925B2

Abstract

The rotation stop position of a nozzle holder (12) is measured when a θ-axis driving mechanism (20) is rotated in a normal rotation direction by a predetermined angle so as to exceed backlash in the normal rotation direction while an R-axis driving mechanism (15) is stopped. A backlash correction value for normal rotation is set on the basis of the measured value. Further, the rotation stop position of a nozzle holder (12) is measured when the θ-axis driving mechanism (20) is rotated in a reverse rotation direction by a predetermined angle so as to exceed backlash in the reverse rotation direction while the R-axis driving mechanism (15) is stopped. A backlash correction value for reverse rotation is set on the basis of the measured value. A backlash correction value for normal rotation and a backlash correction value for reverse rotation are selectively used in accordance with the backlash correction direction of the rotation stop position for the nozzle holder (12). Thereby, the displacement of the rotation stop position for the nozzle holder (12) due to backlash can be accurately corrected.

Description

Component mounter

The present invention relates to a component mounter in which a plurality of nozzle holders are provided on a rotary head (rotary head) so as to be lowered at predetermined intervals in the circumferential direction.

In a component mounting machine of a rotary head (rotary head) type, for example, as described in Patent Document 1 (Japanese Patent Application Laid-Open No. 2004-39818), a plurality of nozzle holders are arranged on the rotary head in the circumferential direction at a predetermined interval. The suction nozzles are held downward by the nozzle holders, and the rotary head is rotated around the R axis (vertical axis) by the R axis drive mechanism. The rotating head is swung in the circumferential direction integrally with a plurality of sucking nozzles held on the head, and at a predetermined position of the swiveling track, one nozzle holder is lowered by a Z-axis drive mechanism to suck and mount components. And rotate each nozzle holder around its axis (θ-axis) by the θ-axis drive mechanism to attract each suction nozzle held by each nozzle holder. There is one that corrects the direction (angle) of each part.

On the other hand, in a component mounter having a configuration in which the head does not rotate, for example, as described in Patent Document 2 (Patent No. 46088772), a plurality of suction nozzles are rotatably held by the head, and There is one in which the direction (angle) of each part sucked by each suction nozzle is corrected by collectively rotating the suction nozzle by a toothed belt. Furthermore, the component mounting machine described in Patent Document 2 measures the deviation of the rotation stop position (angle) of the suction nozzle due to the pitch error of the toothed belt that rotates each suction nozzle, and stores the measured value in the storage unit. It is stored as a pitch error correction value, and the rotation stop position of the suction nozzle is corrected with the pitch error correction value during component mounting work. Since the toothed belt is made of an elastic material such as resin, a pitch error occurs due to expansion and contraction of the toothed belt stretched between the driving pulley on the motor side and the driven pulley on the suction nozzle side. This is because a deviation occurs in the rotation stop position of the driven pulley (the rotation stop position of the suction nozzle).

JP 2004-39818 A Japanese Patent No. 4,608,772

By the way, in the rotating head type component mounting machine described in Patent Document 1, the θ-axis drive mechanism that rotates the nozzle holder is composed of a metal gear mechanism. Although there is no problem with the belt pitch error, there is a backlash in the gear mechanism that constitutes the θ-axis drive mechanism. Therefore, an error corresponding to the backlash occurs at the rotation stop position of the nozzle holder (suction nozzle). In addition, since the backlash size differs between forward rotation and reverse rotation of the nozzle holder, the amount of deviation of the rotation stop position of the nozzle holder due to backlash also differs between forward rotation and reverse rotation.

However, since the conventional rotary head type component mounting machine is not equipped with a function for correcting the deviation of the rotation stop position of the nozzle holder due to the backlash of the θ-axis drive mechanism, the deviation of the rotation stop position of the nozzle holder due to the backlash. Could not be corrected with high accuracy.

Therefore, the problem to be solved by the present invention is to make it possible to accurately correct the deviation of the rotation stop position of the nozzle holder due to the backlash of the θ-axis drive mechanism in the rotary head type component mounting machine.

In order to solve the above-described problems, the present invention provides a rotary head that is provided so as to be rotatable around an R axis that extends in the vertical direction, and a plurality of rotary heads that are provided on the rotary head so as to be lowered at predetermined intervals in the circumferential direction. Nozzle holders, a plurality of suction nozzles respectively held downward by the plurality of nozzle holders, and the plurality of nozzle holders integrated with the plurality of suction nozzles by rotating the rotary head around the R axis. Each of the suction nozzles held by each nozzle holder by rotating the plurality of nozzle holders around the axis of each nozzle holder. In a component mounter comprising a θ-axis drive mechanism for correcting the orientation of each sucked component and a Z-axis drive mechanism for individually lowering the plurality of nozzle holders, Backlash correction means for correcting a deviation of the rotation stop position of the nozzle holder due to backlash with a backlash correction value, and the backlash correction means includes a backlash correction value for normal rotation according to a backlash correction direction of the rotation stop position of the nozzle holder. The reverse backlash correction value for reverse rotation is used properly.

In this configuration, the backlash correction value for forward rotation and the backlash correction value for reverse rotation are selectively used according to the backlash correction direction of the rotation stop position of the nozzle holder. Therefore, in either case of forward rotation / reverse rotation of the θ-axis drive mechanism Even if it exists, the shift | offset | difference of the rotation stop position of the nozzle holder by backlash can be correct | amended accurately, and component mounting precision can be improved.

In this case, the operator may previously measure the deviation amount of the rotation stop position of the nozzle holder due to backlash at the time of forward rotation / reverse rotation and set each backlash correction value for forward rotation / reverse rotation. Thus, the backlash correction value for forward rotation / reverse rotation may be set automatically. Specifically, it comprises backlash correction value setting means for setting backlash correction values for forward rotation / reverse rotation, and the backlash correction value setting means moves the θ-axis drive mechanism while the R-axis drive mechanism is stopped. Measure the rotation stop position of the nozzle holder when it is rotated forward by a predetermined angle so as to exceed the backlash in the forward direction, set the forward backlash correction value for forward rotation based on the measured value, and drive the R axis The rotation stop position of the nozzle holder is measured when the θ-axis drive mechanism is reversed by a predetermined angle so as to exceed the backlash in the reverse rotation direction with the mechanism stopped, and the reverse rotation position is measured based on the measured value. A backlash correction value may be set. Thus, when the θ-axis drive mechanism is rotated forward / reverse by a predetermined angle so as to exceed the backlash in the forward / reverse direction while the R-axis drive mechanism is stopped, the rotation stop position of the nozzle holder becomes the target stop. Since the position is deviated from the position by the amount of backlash, if the rotation stop position of the nozzle holder is measured, the backlash correction value for forward rotation / reverse rotation can be set based on the measured value.

Further, according to the present invention, before measuring the rotation stop position of the nozzle holder, the nozzle holder is held with a directional rotation stop position measuring jig capable of measuring the rotation stop position, and the rotation of the nozzle holder is stopped. When measuring the position, the rotation stop position of the rotation stop position measuring jig may be measured as the rotation stop position of the nozzle holder. In this way, even if the nozzle holder (suction nozzle) has a non-directional shape, the rotation stop position of the nozzle holder can be determined by holding the directional rotation stop position measuring jig in the nozzle holder. It can measure with high accuracy.

In general, since a component mounting machine is equipped with a camera that captures an image of a component sucked by a suction nozzle, the rotation stop position measuring jig is rotated based on an image of the rotation stop position measuring jig captured by the camera. It is better to measure the stop position. In this way, the present invention can be applied to existing component mounters at a low cost without the need for a measuring instrument such as a camera dedicated to rotation stop position measurement.

In addition, since the amount of deviation of the rotation stop position due to backlash varies among the nozzle holders, the forward rotation backlash correction value and the reverse rotation backlash correction value are assigned to each nozzle holder. It is better to set. In this way, even when the amount of deviation of the rotation stop position due to backlash varies greatly between the nozzle holders, the deviation of the rotation stop position due to backlash can be accurately corrected for each nozzle holder.

FIG. 1 is a perspective view showing a configuration of a rotary head driving apparatus according to an embodiment of the present invention. FIG. 2 is a plan view for explaining the arrangement of the nozzle holder. FIG. 3 is a block diagram showing the configuration of the control system of the component mounter. FIG. 4 is a diagram illustrating a method for obtaining the reference position of the nozzle holder. FIG. 5 is a diagram for explaining a method of obtaining the forward rotation backlash correction value. FIG. 6 is a diagram for explaining a method of obtaining the reverse backlash correction value.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments embodying the modes for carrying out the present invention will be described below with reference to the drawings.
First, the configuration of the rotary head driving device 10 of the component mounter will be described with reference to FIG.

A plurality of nozzle holders 12 are supported by the rotary head 11 so as to be able to descend at predetermined intervals in the circumferential direction, and suction nozzles 13 for sucking components are held downward and replaceable in each nozzle holder 12. Yes. In FIG. 1, only two nozzle holders 12 (suction nozzles 13) are shown, and the other nozzle holders 12 (suction nozzles 13) are not shown.

The rotary head 11 is fitted to the lower end of the R-axis 14 extending in the vertical direction, and the R-axis gear 16 of the R-axis drive mechanism 15 is fitted to the upper end of the R-axis 14. A gear 19 fixed to the rotation shaft 18 of the R-axis motor 17 is engaged with the R-axis gear 16, and the R-axis gear 16 is rotated by the rotation of the gear 19 of the R-axis motor 17. By rotating around 14, the plurality of nozzle holders 12 are rotated together with the plurality of suction nozzles 13 in the circumferential direction of the rotary head 11.

The R-axis 14 is rotatably inserted into two upper and lower θ-

axis gears

21 and 22 of the θ-axis drive mechanism 20, and the lower θ-axis gear 22 is a gear fitted to the upper end of each nozzle holder 12. 23 is engaged. A gear 26 fixed to the rotary shaft 25 of the θ-axis motor 24 is engaged with the upper θ-axis gear 21, and the θ-

axis gears

21 and 22 are integrally rotated by the rotation of the gear 26 of the θ-axis motor 24. Each component sucked by each suction nozzle 13 held by each nozzle holder 12 by rotating the gear 23 and causing each nozzle holder 12 to rotate about the axis (θ axis) of each nozzle holder 12. The direction (angle) is corrected.

Further, a Z-axis drive mechanism 28 for individually lowering the nozzle holder 12 is provided at a predetermined position around the rotary head 11, and the nozzle holder is moved by the Z-axis drive mechanism 28 at a predetermined position on the orbit of the nozzle holder 12. 12 is lowered individually. The Z-axis drive mechanism 28 may be arranged at only one place around the rotary head 11, or may be arranged at four places at a pitch of 90 °, or may be arranged at two places at a pitch of 180 °. Also good. In the case where the Z-axis drive mechanism 28 is arranged at four positions at a 90 ° pitch, the Z-axis drive mechanism 28 is positioned at 0 °, 90 °, 180 °, and 270 ° with respect to the rotation angle of the rotary head 11. It ’s fine. Here, 0 ° and 180 ° are the X direction (substrate transport direction) and the opposite direction, and 90 ° and 270 ° are the Y direction (direction perpendicular to the substrate transport direction) and the opposite direction. Hereinafter, as shown in FIG. 2, a description will be given of a configuration in which four nozzle holders 12 (A to D) are arranged at a 90 ° pitch, but four or more (for example, eight or twelve) nozzle holders 12 are arranged. It is good also as the structure which carried out.

The Z-axis drive mechanism 28 is provided at the upper end of the nozzle holder 12 by using a Z-axis motor 29 as an actuator and rotating the feed screw 30 by the Z-axis motor 29 to move the Z-axis slide 31 in the vertical direction. The nozzle holder 12 is moved up and down by engaging the Z-axis slide 31 with the engaging piece 32. A Z-axis slide 31 may be moved in the vertical direction using a linear motor as the Z-axis motor 29. Alternatively, a linear solenoid, an air cylinder, or the like may be used instead of the linear motor.

The rotary head driving device 10 configured as described above is supported by the XY direction moving device 33 (see FIG. 3) of the component mounting machine and moves in the X direction and the Y direction. As shown in FIG. 3, the control device 34 (control means) of the component mounting machine includes an input device 35 such as a keyboard, a mouse, and a touch panel, a display device 36 such as a liquid crystal display and a CRT, a component mounting control program, and the like. A storage device 37 and the like for storing a backlash correction value for forward rotation / reverse rotation and the like are connected. In addition, the component mounter includes a substrate transport device 38 that transports the circuit board, a component supply device 39 that supplies components to be mounted on the circuit board, and a camera 40 that captures the components sucked by the suction nozzle 13 from the lower surface side. Etc. are provided.

The component mounting machine controller 34 controls the XY direction moving device 33, the R-axis motor 17, the θ-axis motor 24, and the Z-axis motor 29 of the rotary head driving device 10 according to a production program (production job) to supply components. While controlling the operation of picking up the component supplied from the device 39 to the component picking area and mounting it on the component mounting area on the circuit board, the part picked up by the picking nozzle 13 is moved to the circuit board. Is picked up by the camera 40 from the lower surface side, and the picked-up image is processed to recognize the suction position / angle of the component.

Incidentally, since the backlash exists in the θ-axis drive mechanism 20 constituted by the gear mechanism, an error corresponding to the backlash occurs at the rotation stop position of the nozzle holder 12 (suction nozzle 13). In addition, since the backlash size differs between forward rotation and reverse rotation of the nozzle holder 12, the amount of deviation of the rotation stop position of the nozzle holder 12 due to backlash also differs between forward rotation and reverse rotation.

Hereinafter, cases 1 and 2 in which the accuracy of the rotation stop position of the nozzle holder 12 (suction nozzle 13) deteriorates due to backlash will be described.

[Case 1]
When an additional operation of the θ-axis drive mechanism 20 occurs due to a delay in image processing of the captured image of the camera 40, first, after the R-axis 14 and the θ-axis rotate at the same time, the movements of both axes are temporarily stopped. Since only the θ axis is rotated forward or reverse alone again, an error corresponding to backlash occurs at the rotation stop position between forward rotation and reverse rotation.

[Case 2]
When the θ-axis drive mechanism 20 completes the operation before the R-axis drive mechanism 15,
The “axis drive mechanism 20 stopped first” is moved in the reverse direction by the amount of backlash by the shaft drive mechanism 15 ”. Conversely, when the θ-axis drive mechanism 20 completes operation later than the R-axis drive mechanism 15, the “operating θ-axis drive mechanism 20” is only the backlash by the “stopped R-axis drive mechanism 15”. Moved in the forward direction. For this reason, an error corresponding to backlash occurs at the rotation stop position of the nozzle holder 12.

Therefore, in the present embodiment, the control device 34 of the component mounting machine is equipped with a function (backlash correction means) that corrects the deviation of the rotation stop position of the nozzle holder 12 due to the backlash of the θ-axis drive mechanism 20 with the backlash correction value. The forward rotation backlash correction value and the reverse rotation backlash correction value are selectively used according to the backlash correction direction of the rotation stop position of the nozzle holder 12. For example, when an additional operation of the θ-axis drive mechanism 20 occurs due to image processing delay, the forward rotation backlash correction value and the reverse rotation backlash correction value are used separately for forward rotation and reverse rotation. The forward rotation backlash correction value and the reverse rotation backlash correction value are used separately depending on whether the operation completion of the θ-axis drive mechanism 20 is earlier or later than the operation completion of the R-axis drive mechanism 15.

In this case, the operator measures the amount of deviation of the rotation stop position of the nozzle holder 12 due to backlash at the time of forward rotation / reverse rotation, sets the backlash correction value for forward rotation / reverse rotation, and stores it in the storage device 37. However, in the present embodiment, a function (backlash correction value setting means) for automatically setting the backlash correction value for normal rotation / reverse rotation is mounted in the control device 34 of the component mounting machine.

Specifically, the rotation stop position of the nozzle holder 12 is measured when the θ-axis drive mechanism 20 is rotated forward by a predetermined angle so as to exceed the backlash in the forward rotation direction while the R-axis drive mechanism 15 is stopped. Based on the measured value, the forward rotation backlash correction value is set and stored in the storage device 37, and the θ-axis drive mechanism 20 is rotated in the reverse direction with the R-axis drive mechanism 15 stopped. It is also possible to measure the rotation stop position of the nozzle holder 12 when it is reversely rotated by a predetermined angle so as to exceed, and to set a reverse backlash correction value for reverse rotation based on the measured value and store it in the storage device 37. Thus, when the θ-axis drive mechanism 20 is rotated forward / reverse by a predetermined angle so as to exceed the backlash in the forward / reverse direction while the R-axis drive mechanism 15 is stopped, the rotation stop position of the nozzle holder 12 is reached. Therefore, when the rotation stop position of the nozzle holder 12 is measured, the backlash correction value for forward rotation / reverse rotation can be set based on the measured value.

Further, in this embodiment, before measuring the rotation stop position of the nozzle holder 12, a rotation stop position measuring jig (not shown) having a directivity capable of measuring the rotation stop position is held in the nozzle holder 12. In addition, when the rotation stop position of the nozzle holder 12 is measured, the rotation stop position of the rotation stop position measuring jig is measured as the rotation stop position of the nozzle holder 12. In this way, even if the nozzle holder 12 (suction nozzle 13) has a non-directional shape, the nozzle holder 12 holds the directional rotation stop position measuring jig so that the nozzle holder 12 The rotation stop position can be accurately measured.

Any method may be used to measure the rotation stop position (rotation stop position of the nozzle holder 12) of the rotation stop position measurement jig. For example, the rotation stop position measurement jig may be measured from the lower surface side with a camera. The rotation stop position of the rotation stop position measuring jig may be measured by imaging and image processing. As a camera used for this measurement, a dedicated camera may be mounted on the component mounter. Generally, however, the component mounter is equipped with a camera 40 that captures an image of the component sucked by the suction nozzle 13 from its lower surface side. Therefore, it is preferable to take an image of the rotation stop position measuring jig using the camera 40 and process the picked-up image to measure the rotation stop position of the rotation stop position measuring jig. In this way, the present invention can be applied to existing component mounters at a low cost without the need for a measuring instrument such as a camera dedicated to rotation stop position measurement.

In addition, since a plurality of nozzle holders 12 held by the rotary head 11 vary in rotation stop position due to backlash between the nozzle holders 12, each nozzle holder 12 has a normal backlash correction value and a reverse rotation value. A backlash correction value is set. In this way, even when the amount of deviation of the rotation stop position due to backlash varies greatly between the nozzle holders 12, it is possible to accurately correct the deviation of the rotation stop position due to backlash for each nozzle holder 12.

Hereinafter, the method for setting the backlash correction value for forward rotation / reverse rotation according to the present embodiment will be described with reference to FIGS. 4 to 6, four nozzle holders 12 are indicated by A, B, C, and D, respectively.

First, a method for measuring the reference position of the nozzle holder 12 will be described with reference to FIG. FIG. 4 shows a procedure for measuring the reference position of the nozzle holder A. First, the operation of rotating the R axis 14 by 90 ° (1/4 rotation) and the operation of rotating the θ axis by 360 ° (1 rotation) are interlocked, and the R axis 14 is rotated by 4 pitches (1 rotation) to make a nozzle holder. Return A to its original position. In this state, the rotation stop position measurement jig held by the nozzle holder A is imaged by the camera 40 from the lower surface side, and the rotation stop position (angle) of the rotation stop position measurement jig is measured by image processing technology. The measured value is stored in the storage device 37 as the reference position of the nozzle holder A. The reference positions of the other nozzle holders B, C, and D are also measured by the same method.

Next, a method for measuring the forward rotation backlash correction value will be described with reference to FIG. FIG. 5 shows a procedure for measuring the backlash correction value for normal rotation of the nozzle holder A. First, in conjunction with the operation of rotating the R axis 14 by 90 ° (1/4 rotation) and the operation of rotating the θ axis by 360 ° (1 rotation), the R axis 14 is rotated by 3 pitches (3/4 rotation). The nozzle holder A is moved to the position of the original nozzle holder B.

Thereafter, the operation of rotating the R-axis 14 by 90 ° (1/4 rotation) and the operation of rotating the θ-axis by 357 ° (rotating to a position 3 ° before one rotation) are linked to each other so that the R-axis 14 is 1 Turn the pitch (1/4 rotation) to move the nozzle holder A to the top (original nozzle holder A position). As a result, the position of the θ-axis becomes −3 °. Thereafter, the θ-axis is rotated forward by 3 ° independently with the R-axis 14 stopped. Here, 3 ° is an angle sufficiently larger than the backlash. The angle at which the θ-axis is normally rotated independently is not limited to 3 °, and may be an angle sufficiently larger than the backlash.

After the θ-axis is stopped, the rotation stop position measuring jig held by the nozzle holder A is imaged by the camera 40 from the lower surface side, and the rotation stop position (angle) of the rotation stop position measuring jig is measured by image processing technology. Then, the measured value is obtained as the forward rotation correction position. Thereafter, the reference position is subtracted from the forward rotation correction position of the nozzle holder A, and the subtraction value is stored in the storage device 37 as the forward rotation backlash correction value of the nozzle holder A.
Forward rotation backlash correction value = Forward rotation correction position-Reference position

The forward rotation backlash correction values for the other nozzle holders B, C, and D are set in the same manner as the forward rotation backlash correction values for the nozzle holder A.

Next, a method for measuring the backlash correction value for reverse rotation will be described with reference to FIG. FIG. 6 shows a procedure for measuring the backlash correction value for reverse rotation of the nozzle holder A. First, in conjunction with the operation of rotating the R axis 14 by 90 ° (1/4 rotation) and the operation of rotating the θ axis by 360 ° (1 rotation), the R axis 14 is rotated by 3 pitches (3/4 rotation). The nozzle holder A is moved to the position of the original nozzle holder B.

Thereafter, the operation of rotating the R-axis 14 by 90 ° (1/4 rotation) and the operation of rotating the θ-axis by 363 ° (rotating to a position exceeding 3 ° from one rotation) are linked to each other so that the R-axis 14 is 1 Turn the pitch (1/4 rotation) to move the nozzle holder A to the top (original nozzle holder A position). As a result, the position of the θ-axis becomes + 3 °. Thereafter, with the R-axis 14 stopped, the θ-axis is independently rotated by −3 ° (that is, reversed by 3 °). Here, 3 ° is an angle sufficiently larger than the backlash. The angle at which the θ axis is reversed independently is not limited to 3 °, and may be any angle that is sufficiently larger than the backlash.

After the θ-axis is stopped, the rotation stop position measuring jig held by the nozzle holder A is imaged by the camera 40 from the lower surface side, and the rotation stop position (angle) of the rotation stop position measuring jig is measured by image processing technology. Then, the measured value is obtained as the reverse correction position. Thereafter, the reference position is subtracted from the reverse rotation correction position of the nozzle holder A, and the subtraction value is stored in the storage device 37 as the reverse backlash correction value for reverse rotation of the nozzle holder A.
Reverse backlash correction value = Reverse correction position-Reference position

The backlash correction values for reverse rotation of the other nozzle holders B, C, and D are set in the same manner.

Using the forward / reverse backlash correction values set as described above, the θ-axis correction value (correction value for the target rotation position of the θ-axis motor 24) is set as follows.

(1) Use different backlash correction values for forward rotation and reverse rotation during the additional operation of the θ-axis.
When the forward rotation of the θ axis occurs in the additional operation, the θ axis correction value is obtained by adding the forward rotation backlash correction value to the θ axis reference correction value.
θ-axis correction value = θ-axis reference correction value + forward rotation backlash correction value

On the other hand, when the θ-axis reverse rotation occurs in the additional operation, the reverse-axis backlash correction value is added to the θ-axis reference correction value to obtain the θ-axis correction value.
θ-axis correction value = θ-axis reference correction value + reverse backlash correction value

(2) The backlash correction value for forward rotation and the backlash correction value for reverse rotation are used separately depending on whether the operation completion of the θ-axis is earlier or later than the operation completion of the R-axis 14.

When the operation of the θ-axis is completed earlier than the operation of the R-axis 14, the reverse backlash correction value for reverse rotation is added to the θ-axis reference correction value to obtain the θ-axis correction value.
θ-axis correction value = θ-axis reference correction value + reverse backlash correction value

On the other hand, when the operation completion of the θ-axis is later than the operation completion of the R-axis 14, the forward rotation backlash correction value is added to the θ-axis reference correction value to obtain the θ-axis correction value.
θ-axis correction value = θ-axis reference correction value + forward rotation backlash correction value

According to the present embodiment described above, the forward rotation backlash correction value and the reverse rotation backlash correction value are selectively used according to the backlash correction direction of the rotation stop position of the nozzle holder 12. In either case of rotation / reverse rotation, a deviation of the rotation stop position of the nozzle holder 12 due to backlash (deviation of the rotation stop position of the θ axis) can be accurately corrected. As a result, if the accuracy of the θ axis is increased, the accuracy of XY is increased as a result, so that the component mounting accuracy can be improved.

It should be noted that the present invention is not limited to the present embodiment, and various modifications may be made without departing from the scope of the invention, such as the configuration of the R-axis drive mechanism, the θ-axis drive mechanism, the Z-axis drive mechanism, and the like may be appropriately changed. Needless to say, this can be done.

DESCRIPTION OF SYMBOLS 10 ... Rotary head drive device, 11 ... Rotary head, 12 ... Nozzle holder, 13 ... Adsorption nozzle, 14 ... R axis, 15 ... R axis drive mechanism, 16 ... R axis gear, 17 ... R axis motor, 20 ... θ axis Drive mechanism, 21, 22 ... θ axis gear, 24 ... θ axis motor, 28 ... Z axis drive mechanism, 29 ... Z axis motor (actuator), 31 ... Z axis slide, 32 ... engagement piece, 33 ... XY direction movement Device 34 ... Control device (control means) 37 ... Storage device 38 ... Substrate transfer device 39 ... Component supply device 40 ... Camera

Claims

A rotary head provided to be rotatable around an R axis extending in the vertical direction;
A plurality of nozzle holders provided on the rotating head so as to be lowered at predetermined intervals in the circumferential direction;
A plurality of suction nozzles which are respectively held downward by the plurality of nozzle holders and suck parts;
An R-axis drive mechanism for rotating the plurality of nozzle holders in the circumferential direction of the rotary head integrally with the plurality of suction nozzles by rotating the rotary head around the R-axis;
A θ-axis drive mechanism that corrects the orientation of each component sucked by each suction nozzle held by each nozzle holder by rotating the plurality of nozzle holders around the axis of each nozzle holder;
In a component mounter comprising a Z-axis drive mechanism that individually lowers the plurality of nozzle holders,
Backlash correction means for correcting a shift of the rotation stop position of the nozzle holder due to backlash of the θ-axis drive mechanism with a backlash correction value;
The component mounter according to claim 1, wherein the backlash correction means uses a forward rotation backlash correction value and a reverse rotation backlash correction value in accordance with the backlash correction direction of the rotation stop position of the nozzle holder.
Backlash correction value setting means for setting the forward rotation backlash correction value and the reverse rotation backlash correction value;
The backlash correction value setting means is a rotation stop position of the nozzle holder when the θ-axis drive mechanism is rotated forward by a predetermined angle so as to exceed the backlash in the forward rotation direction while the R-axis drive mechanism is stopped. And the forward rotation backlash correction value is set based on the measured value, and the θ-axis drive mechanism is reversed by a predetermined angle so as to exceed the reverse-direction backlash while the R-axis drive mechanism is stopped. 2. The component mounting machine according to claim 1, wherein the rotation stop position of the nozzle holder when measured is measured, and the backlash correction value for reverse rotation is set based on the measured value.
Before measuring the rotation stop position of the nozzle holder, hold a rotation stop position measuring jig with directionality capable of measuring the rotation stop position in the nozzle holder,
The backlash correction value setting means measures the rotation stop position of the rotation stop position measuring jig as the rotation stop position of the nozzle holder when measuring the rotation stop position of the nozzle holder. The component mounting machine described in 1.
A camera for imaging the component sucked by the suction nozzle;
The said backlash correction value setting means measures the rotation stop position of this rotation stop position measurement jig based on the image which imaged the said rotation stop position measurement jig with the said camera. Component mounter.
5. The component mounting machine according to claim 1, wherein the backlash correction value setting means sets the forward rotation backlash correction value and the reverse rotation backlash correction value for each nozzle holder.