WO2014040834A3 - Method for improving the adhesion of plated metal layers to silicon - Google Patents

Method for improving the adhesion of plated metal layers to silicon Download PDF

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Publication number
WO2014040834A3
WO2014040834A3 PCT/EP2013/067450 EP2013067450W WO2014040834A3 WO 2014040834 A3 WO2014040834 A3 WO 2014040834A3 EP 2013067450 W EP2013067450 W EP 2013067450W WO 2014040834 A3 WO2014040834 A3 WO 2014040834A3
Authority
WO
WIPO (PCT)
Prior art keywords
plated metal
adhesion
silicon
improving
metal layers
Prior art date
Application number
PCT/EP2013/067450
Other languages
French (fr)
Other versions
WO2014040834A2 (en
Inventor
Richard Russell
Loic TOUS
Original Assignee
Imec
Katholieke Universiteit Leuven
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec, Katholieke Universiteit Leuven filed Critical Imec
Priority to JP2015531510A priority Critical patent/JP2015528645A/en
Priority to EP13753849.2A priority patent/EP2896070A2/en
Priority to CN201380046688.0A priority patent/CN104603956A/en
Publication of WO2014040834A2 publication Critical patent/WO2014040834A2/en
Publication of WO2014040834A3 publication Critical patent/WO2014040834A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433—Particular geometry of the grid contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

A method is disclosed for fabricating photovoltaic cells, the method comprising providing plated metal contacts with a contact pattern comprising a plurality of fingers and at least one first pinning element at the free ends of each of the plurality of fingers; and associated photovoltaic cells.
PCT/EP2013/067450 2012-09-17 2013-08-22 Method for improving the adhesion of plated metal layers to silicon WO2014040834A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015531510A JP2015528645A (en) 2012-09-17 2013-08-22 A method for improving the adhesion of plated metal layers to silicon.
EP13753849.2A EP2896070A2 (en) 2012-09-17 2013-08-22 Method for improving the adhesion of plated metal layers to silicon
CN201380046688.0A CN104603956A (en) 2012-09-17 2013-08-22 Method for improving the adhesion of plated metal layers to silicon

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261701843P 2012-09-17 2012-09-17
US61/701,843 2012-09-17

Publications (2)

Publication Number Publication Date
WO2014040834A2 WO2014040834A2 (en) 2014-03-20
WO2014040834A3 true WO2014040834A3 (en) 2014-06-26

Family

ID=49083661

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/067450 WO2014040834A2 (en) 2012-09-17 2013-08-22 Method for improving the adhesion of plated metal layers to silicon

Country Status (4)

Country Link
EP (1) EP2896070A2 (en)
JP (1) JP2015528645A (en)
CN (1) CN104603956A (en)
WO (1) WO2014040834A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8969122B2 (en) * 2011-06-14 2015-03-03 International Business Machines Corporation Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom
JP6706849B2 (en) 2016-03-30 2020-06-10 パナソニックＩｐマネジメント株式会社 Solar cell, solar cell module, and method for manufacturing solar cell
KR101894582B1 (en) * 2016-11-17 2018-10-04 엘지전자 주식회사 Solar cell and solar cell panel including the same
CN106914671A (en) * 2017-03-13 2017-07-04 南京日托光伏科技股份有限公司 A kind of MWT photovoltaic modulies draw welding method
WO2018207312A1 (en) * 2017-05-11 2018-11-15 三菱電機株式会社 Solar cell and method for manufacturing solar cell
EP3569769B1 (en) 2018-05-18 2021-08-11 BAUER Spezialtiefbau GmbH Foundation pile
CN110335905A (en) * 2019-08-20 2019-10-15 通威太阳能（安徽）有限公司 A kind of structure and its method improving double-side cell back up
WO2024048332A1 (en) * 2022-09-02 2024-03-07 京セラ株式会社 Solar cell element and solar cell module

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686036A (en) * 1966-08-26 1972-08-22 Telefunken Patent Solar cell with metal layered contact and method of manufacture
US4751191A (en) * 1987-07-08 1988-06-14 Mobil Solar Energy Corporation Method of fabricating solar cells with silicon nitride coating
JPH0621501A (en) * 1992-03-31 1994-01-28 Canon Inc Solar cell module and manufacture thereof
JPH06283736A (en) * 1993-03-29 1994-10-07 Sharp Corp Solar cell
JP2004266023A (en) * 2003-02-28 2004-09-24 Sharp Corp Solar battery and method of manufacturing the same
JP2005136148A (en) * 2003-10-30 2005-05-26 Kyocera Corp Solar cell device and method of manufacturing the same
JP2009272405A (en) * 2008-05-02 2009-11-19 Mitsubishi Electric Corp Solar battery element and manufacturing method therefor
US20110168255A1 (en) * 2010-03-29 2011-07-14 Neo Solar Power Corp. Electrode structure of solar cell
WO2011162406A1 (en) * 2010-06-25 2011-12-29 京セラ株式会社 Solar cell element, process for producing same, and solar cell module
JP2012054442A (en) * 2010-09-02 2012-03-15 Shin Etsu Chem Co Ltd Method of manufacturing solar cell and screen plate making process for use therein

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5301758B2 (en) * 2005-05-19 2013-09-25 信越半導体株式会社 Solar cell
WO2009122977A1 (en) * 2008-03-31 2009-10-08 シャープ株式会社 Solar cell, solar cell string and solar cell module
CN101447531A (en) * 2008-12-22 2009-06-03 上海晶澳太阳能光伏科技有限公司 Preparation method for front electrode of solar cell

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686036A (en) * 1966-08-26 1972-08-22 Telefunken Patent Solar cell with metal layered contact and method of manufacture
US4751191A (en) * 1987-07-08 1988-06-14 Mobil Solar Energy Corporation Method of fabricating solar cells with silicon nitride coating
JPH0621501A (en) * 1992-03-31 1994-01-28 Canon Inc Solar cell module and manufacture thereof
JPH06283736A (en) * 1993-03-29 1994-10-07 Sharp Corp Solar cell
JP2004266023A (en) * 2003-02-28 2004-09-24 Sharp Corp Solar battery and method of manufacturing the same
JP2005136148A (en) * 2003-10-30 2005-05-26 Kyocera Corp Solar cell device and method of manufacturing the same
JP2009272405A (en) * 2008-05-02 2009-11-19 Mitsubishi Electric Corp Solar battery element and manufacturing method therefor
US20110168255A1 (en) * 2010-03-29 2011-07-14 Neo Solar Power Corp. Electrode structure of solar cell
WO2011162406A1 (en) * 2010-06-25 2011-12-29 京セラ株式会社 Solar cell element, process for producing same, and solar cell module
JP2012054442A (en) * 2010-09-02 2012-03-15 Shin Etsu Chem Co Ltd Method of manufacturing solar cell and screen plate making process for use therein

Also Published As

Publication number Publication date
CN104603956A (en) 2015-05-06
EP2896070A2 (en) 2015-07-22
WO2014040834A2 (en) 2014-03-20
JP2015528645A (en) 2015-09-28

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