WO2014040100A1 - Rohrförmiges target - Google Patents

Rohrförmiges target Download PDF

Info

Publication number
WO2014040100A1
WO2014040100A1 PCT/AT2013/000152 AT2013000152W WO2014040100A1 WO 2014040100 A1 WO2014040100 A1 WO 2014040100A1 AT 2013000152 W AT2013000152 W AT 2013000152W WO 2014040100 A1 WO2014040100 A1 WO 2014040100A1
Authority
WO
WIPO (PCT)
Prior art keywords
target
target body
connecting piece
locking means
target according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AT2013/000152
Other languages
German (de)
English (en)
French (fr)
Inventor
Walter MUTSCHLECHNER
André Dronhofer
Christian Linke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Original Assignee
Plansee SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee SE filed Critical Plansee SE
Priority to CN201380048331.6A priority Critical patent/CN104641449B/zh
Priority to KR1020157005831A priority patent/KR102111817B1/ko
Priority to EP13785810.6A priority patent/EP2896064B1/de
Priority to US14/428,837 priority patent/US20150221485A1/en
Priority to JP2015531400A priority patent/JP6341917B2/ja
Publication of WO2014040100A1 publication Critical patent/WO2014040100A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/342—Hollow targets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Definitions

  • Connecting pieces 10a protrude from the target body 4a (Fig. 2) to connect the target 2a to a plant.
  • the connecting pieces 10a are respectively inserted into one end of the target body 4a, so that, for example, a flange or other protruding elements may be formed for attachment to a system at the outer or exposed ends of the connecting pieces 10a.
  • FIG. 3 shows a plan view of a target 2b according to a second embodiment.
  • the elements and functions of the target 2b correspond to the elements described above in relation to the first embodiment of the target 2a and FIG
  • flange element may be provided or a plurality of flange elements in order to produce a torsion-proof connection between the connection piece and the target body.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Connection Of Plates (AREA)
PCT/AT2013/000152 2012-09-17 2013-09-13 Rohrförmiges target Ceased WO2014040100A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201380048331.6A CN104641449B (zh) 2012-09-17 2013-09-13 管状靶件
KR1020157005831A KR102111817B1 (ko) 2012-09-17 2013-09-13 관형 타겟
EP13785810.6A EP2896064B1 (de) 2012-09-17 2013-09-13 Rohrförmiges target
US14/428,837 US20150221485A1 (en) 2012-09-17 2013-09-13 Tubular target
JP2015531400A JP6341917B2 (ja) 2012-09-17 2013-09-13 管状ターゲット

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATGM365/2012U AT13609U1 (de) 2012-09-17 2012-09-17 Rohrförmiges Target
ATGM365/2012 2012-09-17

Publications (1)

Publication Number Publication Date
WO2014040100A1 true WO2014040100A1 (de) 2014-03-20

Family

ID=50277396

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2013/000152 Ceased WO2014040100A1 (de) 2012-09-17 2013-09-13 Rohrförmiges target

Country Status (8)

Country Link
US (1) US20150221485A1 (https=)
EP (1) EP2896064B1 (https=)
JP (1) JP6341917B2 (https=)
KR (1) KR102111817B1 (https=)
CN (1) CN104641449B (https=)
AT (1) AT13609U1 (https=)
TW (1) TWI550116B (https=)
WO (1) WO2014040100A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014102407A1 (de) * 2014-02-25 2015-08-27 Sindlhauser Materials Gmbh Sputtertargetanordnung
CN107969159A (zh) * 2015-05-06 2018-04-27 攀时奥地利公司 管靶
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11158491B2 (en) * 2017-06-01 2021-10-26 Oerlikon Surface Solutions Ag, Pfäffikon Target assembly for safe and economic evaporation of brittle materials
CN108486540B (zh) * 2018-05-16 2019-07-02 上海大学 一种旋转靶材绑定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040159539A1 (en) * 2003-02-13 2004-08-19 Crowley Daniel T. Cylindrical magnetron target and spindle apparatus
DE102006017455A1 (de) * 2006-04-13 2007-10-25 Applied Materials Gmbh & Co. Kg Rohrkathode
US20090208280A1 (en) * 2008-02-15 2009-08-20 Bekaert Advanced Coatings Multiple grooved vacuum coupling
EP1225249B1 (de) 2001-01-19 2009-12-02 W.C. Heraeus GmbH Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5738921A (en) * 1993-08-10 1998-04-14 E. Khashoggi Industries, Llc Compositions and methods for manufacturing sealable, liquid-tight containers comprising an inorganically filled matrix
US5591314A (en) * 1995-10-27 1997-01-07 Morgan; Steven V. Apparatus for affixing a rotating cylindrical magnetron target to a spindle
US6551477B2 (en) * 2000-09-25 2003-04-22 Isoflux, Inc. Interlocking cylindrical magnetron cathodes and targets
US20060096855A1 (en) * 2004-11-05 2006-05-11 Richard Newcomb Cathode arrangement for atomizing a rotatable target pipe
DE202006018079U1 (de) * 2006-03-02 2007-03-29 FNE Forschungsinstitut für Nichteisen-Metalle Freiberg GmbH Targetanordnung
DE102006009749A1 (de) * 2006-03-02 2007-09-06 FNE Forschungsinstitut für Nichteisen-Metalle Freiberg GmbH Targetanordnung
JP5572710B2 (ja) * 2010-06-28 2014-08-13 アルバックテクノ株式会社 ターゲット取付機構
RU2013103041A (ru) * 2010-07-12 2014-08-20 Мэтиреон Эдвансд Мэтириэлз Текнолоджиз Энд Сервисез Инк. Узел соединения опорной трубки с вращающейся мишенью

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1225249B1 (de) 2001-01-19 2009-12-02 W.C. Heraeus GmbH Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets
US20040159539A1 (en) * 2003-02-13 2004-08-19 Crowley Daniel T. Cylindrical magnetron target and spindle apparatus
DE102006017455A1 (de) * 2006-04-13 2007-10-25 Applied Materials Gmbh & Co. Kg Rohrkathode
US20090208280A1 (en) * 2008-02-15 2009-08-20 Bekaert Advanced Coatings Multiple grooved vacuum coupling

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014102407A1 (de) * 2014-02-25 2015-08-27 Sindlhauser Materials Gmbh Sputtertargetanordnung
DE102014102407B4 (de) * 2014-02-25 2024-07-18 Sindlhauser Materials Gmbh Sputtertargetanordnung
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts
CN107969159A (zh) * 2015-05-06 2018-04-27 攀时奥地利公司 管靶
CN107969159B (zh) * 2015-05-06 2020-06-19 攀时奥地利公司 管靶
US11367599B2 (en) 2015-05-06 2022-06-21 Plansee Se Tubular target

Also Published As

Publication number Publication date
AT13609U1 (de) 2014-04-15
TW201413028A (zh) 2014-04-01
CN104641449B (zh) 2018-10-23
JP6341917B2 (ja) 2018-06-13
EP2896064B1 (de) 2020-02-26
EP2896064A1 (de) 2015-07-22
TWI550116B (zh) 2016-09-21
KR102111817B1 (ko) 2020-05-18
CN104641449A (zh) 2015-05-20
KR20150056768A (ko) 2015-05-27
JP2015533940A (ja) 2015-11-26
US20150221485A1 (en) 2015-08-06

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