WO2014035068A1 - Procédé de fabrication de graphène, ledit graphène et appareil pour le fabriquer - Google Patents

Procédé de fabrication de graphène, ledit graphène et appareil pour le fabriquer Download PDF

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Publication number
WO2014035068A1
WO2014035068A1 PCT/KR2013/006955 KR2013006955W WO2014035068A1 WO 2014035068 A1 WO2014035068 A1 WO 2014035068A1 KR 2013006955 W KR2013006955 W KR 2013006955W WO 2014035068 A1 WO2014035068 A1 WO 2014035068A1
Authority
WO
WIPO (PCT)
Prior art keywords
catalyst metal
metal layer
tension
graphene
chamber
Prior art date
Application number
PCT/KR2013/006955
Other languages
English (en)
Korean (ko)
Inventor
문진산
노종현
박수범
김태형
홍병희
박원배
정명희
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020130046060A external-priority patent/KR102083960B1/ko
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to US14/423,463 priority Critical patent/US9764956B2/en
Priority to CN201380045441.7A priority patent/CN104603052B/zh
Publication of WO2014035068A1 publication Critical patent/WO2014035068A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18—Stationary reactors having moving elements inside
    • B01J19/22—Stationary reactors having moving elements inside in the form of endless belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

La présente invention concerne un procédé de fabrication de graphène, ledit graphène et un appareil pour le fabriquer. Le procédé de fabrication de graphène comprend les étapes suivantes : chargement d'une couche de métal catalytique dans une chambre ; application d'une force de tension à la couche de métal catalytique ; et formation de graphène sur la couche de métal catalytique par apport d'une source de carbone dans la chambre tout en appliquant la tension à la couche de métal catalytique. Ainsi, la taille des grains sur la couche de métal catalytique peut être augmentée par l'application de la tension à la couche de métal catalytique, et un graphène uniforme de haute qualité peut être développé par l'utilisation de la couche de métal catalytique.
PCT/KR2013/006955 2012-08-30 2013-08-01 Procédé de fabrication de graphène, ledit graphène et appareil pour le fabriquer WO2014035068A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/423,463 US9764956B2 (en) 2012-08-30 2013-08-01 Method for manufacturing graphene, said graphene, and apparatus for manufacturing same
CN201380045441.7A CN104603052B (zh) 2012-08-30 2013-08-01 制造石墨烯的方法、所述石墨烯及制造所述石墨烯的设备

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20120095624 2012-08-30
KR10-2012-0095624 2012-08-30
KR10-2013-0046060 2013-04-25
KR1020130046060A KR102083960B1 (ko) 2012-08-30 2013-04-25 그래핀의 제조 방법 및 그 그래핀과 그 제조 장치

Publications (1)

Publication Number Publication Date
WO2014035068A1 true WO2014035068A1 (fr) 2014-03-06

Family

ID=50183830

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2013/006955 WO2014035068A1 (fr) 2012-08-30 2013-08-01 Procédé de fabrication de graphène, ledit graphène et appareil pour le fabriquer

Country Status (1)

Country Link
WO (1) WO2014035068A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011006265A (ja) * 2009-06-23 2011-01-13 Oki Data Corp グラフェン層の剥離方法、グラフェンウエハの製造方法、グラフェンウエハ、及び、グラフェン素子の製造方法
KR20110092417A (ko) * 2010-02-09 2011-08-18 주식회사 엔씨디 그래핀 제조장치 및 그래핀 제조방법
KR20120061224A (ko) * 2010-12-03 2012-06-13 에스케이이노베이션 주식회사 수직형 롤투롤 화학 기상 증착법을 이용한 그래핀 필름 제조 장치 및 방법
KR101168259B1 (ko) * 2012-03-05 2012-07-30 한국기계연구원 롤투롤 기반의 그래핀 연속 합성 장치
KR20120088524A (ko) * 2011-01-31 2012-08-08 삼성테크윈 주식회사 그래핀 합성장치 및 합성방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011006265A (ja) * 2009-06-23 2011-01-13 Oki Data Corp グラフェン層の剥離方法、グラフェンウエハの製造方法、グラフェンウエハ、及び、グラフェン素子の製造方法
KR20110092417A (ko) * 2010-02-09 2011-08-18 주식회사 엔씨디 그래핀 제조장치 및 그래핀 제조방법
KR20120061224A (ko) * 2010-12-03 2012-06-13 에스케이이노베이션 주식회사 수직형 롤투롤 화학 기상 증착법을 이용한 그래핀 필름 제조 장치 및 방법
KR20120088524A (ko) * 2011-01-31 2012-08-08 삼성테크윈 주식회사 그래핀 합성장치 및 합성방법
KR101168259B1 (ko) * 2012-03-05 2012-07-30 한국기계연구원 롤투롤 기반의 그래핀 연속 합성 장치

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