WO2014010516A1 - Imprint method, and imprinting device - Google Patents

Imprint method, and imprinting device Download PDF

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Publication number
WO2014010516A1
WO2014010516A1 PCT/JP2013/068430 JP2013068430W WO2014010516A1 WO 2014010516 A1 WO2014010516 A1 WO 2014010516A1 JP 2013068430 W JP2013068430 W JP 2013068430W WO 2014010516 A1 WO2014010516 A1 WO 2014010516A1
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WO
WIPO (PCT)
Prior art keywords
roll
mold
glass sheet
rolls
layer
Prior art date
Application number
PCT/JP2013/068430
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French (fr)
Japanese (ja)
Inventor
寛 坂本
公介 高山
海田 由里子
Original Assignee
旭硝子株式会社
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Filing date
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Application filed by 旭硝子株式会社 filed Critical 旭硝子株式会社
Publication of WO2014010516A1 publication Critical patent/WO2014010516A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/10Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation for articles of indefinite length
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0822Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0833Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using actinic light

Definitions

  • the present invention relates to an imprint method and an imprint apparatus.
  • the imprint method is attracting attention as a technology that can produce a fine concavo-convex structure at low cost and in large quantities.
  • the concavo-convex pattern of the mold is continuously transferred to the surface of the molding material layer while rotating a roll-shaped mold (so-called gravure roll) having the concavo-convex pattern on the outer periphery (see, for example, Patent Document 1). ).
  • FIG. 11 is a side view of a conventional imprint apparatus.
  • the glass sheet 1 and the layer of the molding material are fed between the transfer roll 3 and the gravure roll 4, and the uneven pattern of the gravure roll 4 is transferred to the layer of the molding material.
  • the layer of the molding material is attached to the gravure roll 4 by the tension applied to the glass sheet 1, and gradually hardens while rotating together with the gravure roll 4 to form an uneven layer.
  • the uneven layer is separated from the gravure roll 4 by passing between the separation roll 5 and the gravure roll 4.
  • a laminated sheet composed of a glass sheet and an uneven layer is obtained.
  • the glass sheet 1 is sometimes bent and deformed by the transfer roll 3 or the separation roll 5, and the glass sheet 1 may be damaged.
  • This invention was made in view of the said subject, Comprising: It aims at provision of the imprint method and imprint apparatus which can reduce the failure
  • an imprint method includes: Passing the glass sheet between a plurality of sets of rotating rolls and nip rolls in a flat state, and rotating the endless belt-shaped molds wound around the plurality of rotating rolls, The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, The uneven pattern of the mold is transferred to the layer of the molding material.
  • an imprint apparatus according to another aspect of the present invention.
  • Multiple sets of rotating rolls and nip rolls that allow the glass sheet to pass in a flat state An endless belt-shaped mold that is wound around a plurality of the rotating rolls and rotated, The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, The uneven pattern of the mold is transferred to the layer of the molding material.
  • an imprint method and an imprint apparatus that can reduce breakage of a glass sheet are provided.
  • FIG. 2 is a cross-sectional view taken along line II-II in FIG.
  • FIG. 3 is a sectional view taken along line III-III in FIG.
  • FIG. 4 is a cross-sectional view taken along IV-IV in FIG.
  • FIG. 5 is a cross-sectional view taken along line VV in FIG. 1.
  • FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 6.
  • FIG. 7 is a cross-sectional view taken along line VIII-VIII in FIG. 6.
  • FIG. 7 is a sectional view taken along line IX-IX in FIG. 6.
  • FIG. 7 is a cross-sectional view taken along line XX in FIG. 6. It is a side view of the conventional imprint apparatus.
  • FIG. 1 is a side view of an imprint apparatus according to a first embodiment of the present invention.
  • 2 to 5 are explanatory diagrams of the imprint method according to the first embodiment of the present invention.
  • 2 is a sectional view taken along the line II-II in FIG. 1
  • FIG. 3 is a sectional view taken along the line III-III in FIG. 1
  • FIG. 4 is a sectional view taken along the line IV-IV in FIG.
  • FIG. 5 is a cross-sectional view taken along line VV in FIG. 1.
  • the imprint apparatus 10 continuously or intermittently forms the uneven layer 17 (see FIG. 5) on the belt-shaped glass sheet 11.
  • a laminated sheet 19 is constituted by the glass sheet 11 and the uneven layer 17.
  • the uneven layer 17 has an uneven pattern in which convex portions are periodically arranged.
  • Examples of the glass of the glass sheet 11 include non-alkali glass, borosilicate glass, soda lime glass, high silica glass, and other oxide-based glasses mainly composed of silicon oxide.
  • the thickness of the glass sheet 11 is, for example, 0.3 mm or less, preferably 0.2 mm or less, more preferably 0.1 mm or less, and even more preferably 0.05 mm or less. Further, the thickness of the glass sheet 11 is preferably 0.0001 mm or more, more preferably 0.001 mm or more, and further preferably 0.005 mm or more from the viewpoint of glass moldability.
  • the imprint apparatus 10 is a roll-to-roll system, and includes, for example, an unwinding roll 21, a separation roll 22, a collection roll 23, an unwinding roll 24, an overlapping roll 25, and a winding roll 26.
  • the unwinding roll 21 is fitted with a glass roll formed by winding the glass sheet 11 and the glass protective sheet 12 in a spiral shape.
  • the glass protective sheet 12 is made of a resin film, paper, or the like, and prevents the glass surface from getting foreign matter (for example, dust) or scratches. When the unwinding roll 21 rotates, the glass sheet 11 and the glass protective sheet 12 are unwound from the glass roll.
  • the outermost layer of the glass roll is preferably a glass protective sheet 12.
  • the unwinding roll 21 stops temporarily, it can prevent that the glass sheet 11 gets a foreign material or a damage
  • the glass protective sheet 12 may have a pressure-sensitive adhesive and may be bonded to the glass sheet 11 or may simply contact without being bonded.
  • the glass protective sheet 12 may protect the surface of the glass sheet 11 on which the layer 15 of the molding material is formed until it is separated from the glass sheet 11 by the separation roll 22.
  • the separation roll 22 separates the glass sheet 11 and the glass protective sheet 12 fed out from the glass roll. Separation is performed smoothly by the glass protective sheet 12 being bent and deformed along the separation roll 22.
  • the glass protective sheet 12 has an adhesive layer, since the adhesive layer and the glass sheet are gradually peeled off, the force required for peeling can be reduced.
  • the collection roll 23 winds the glass protective sheet 12 separated from the glass sheet 11.
  • a protection sheet roll formed by winding the uneven protection sheet 13 in a spiral shape is attached to the feeding roll 24.
  • the uneven protective sheet 13 is fed from the protective sheet roll.
  • the unevenness protection sheet 13 is composed of a resin film, paper, or the like.
  • the superimposing roll 25 superimposes the uneven protective sheet 13 fed from the protective sheet roll and the laminated sheet 19. Since the concave / convex protective sheet 13 is bent and deformed along the overlapping roll 25, the concave / convex protective sheet 13 and the laminated sheet 19 gradually merge to suppress generation of wrinkles or air entrainment during the overlapping. it can.
  • the concave / convex protective sheet 13 is provided with an adhesive and may be bonded to the laminated sheet 19 or may be simply contacted without being bonded.
  • the concave / convex protective sheet 13 covers the concave / convex layer 17 of the laminated sheet 19 and prevents the concave / convex layer 17 from being damaged (for example, dust) or scratched.
  • the take-up roll 26 rolls up the laminated sheet 19 and the unevenness protection sheet 13 to produce a product roll.
  • the outermost layer of the product roll is preferably an uneven protective sheet 13.
  • the product roll may be covered with another protective sheet during storage.
  • the imprint apparatus 10 is, for example, an optical imprint apparatus, and includes an applicator 31, an endless belt-shaped mold 33, a light source 35, a plurality of (for example, two) rotating rolls 41 and 42, and a plurality of (for example, two) nip rolls. 43, 44, a guide roll 45, a drawer roll 46, and a plurality of (for example, two) auxiliary rolls 51, 52 are further provided.
  • the applicator 31 applies the molding material onto the glass sheet 11 after the glass protective sheet 12 is separated, and forms the molding material layer 15 as shown in FIG.
  • Examples of the applicator 31 include a die coater, a roll coater, a gravure coater, a spray coater, a flow coater, and a blade coater.
  • the glass sheet 11 may be subjected to a surface treatment in advance in order to improve the adhesion between the glass surface and the molding material.
  • a surface treatment examples include primer treatment, ozone treatment, plasma etching treatment, and the like.
  • primer a silane coupling agent, silazane or the like is used.
  • Molding material includes a photo-curable resin.
  • a photocurable resin the general thing used for the photoimprint method can be used.
  • the photocurable resin is composed of a monomer, a photopolymerization initiator, and the like. Examples of the monomer include an acrylic monomer and a vinyl monomer in the case of the radical polymerization type, and an epoxy monomer and a vinyl ether monomer in the case of the ionic polymerization type.
  • the photocurable resin is prepared in a liquid state, and is applied onto the glass sheet 11 as shown in FIG. 2, for example.
  • the molding material may include metal oxide particles and the like.
  • the mold 33 has a concavo-convex pattern transferred to the surface of the layer 15 of the molding material on the outer periphery.
  • the mold 33 may be subjected to a release treatment in order to improve the release property between the mold surface and the molding material.
  • examples of the mold release treatment include fluorine coat treatment and silicone coat treatment.
  • the mold 33 is wound around a plurality of rotating rolls 41 and 42 and a plurality of auxiliary rolls 51 and 52, and is rotated.
  • the mold 33 is made of, for example, metal (for example, nickel or chromium) or resin (for example, polycarbonate, cyclic olefin resin, or polyester resin), and has flexibility. Note that all or some of the plurality of auxiliary rolls 51 and 52 may be omitted.
  • the mold 33 is produced by welding both ends of a belt-like sheet molded using a master mold, and can be duplicated many times. Examples of the duplication method include an imprint method and an electroforming method.
  • the master mold is manufactured by processing a substrate by, for example, a photolithography method or an electron beam drawing method.
  • the light source 35 irradiates the molding material layer 15 sandwiched between the glass sheet 11 and the mold 33 with light to solidify (harden) the molding material layer 15.
  • the uneven layer 17 formed by curing the molding material layer 15 has an uneven pattern in which the uneven pattern of the mold 33 is substantially inverted.
  • Examples of light that cures the photocurable resin include ultraviolet light, visible light, and infrared light.
  • Examples of the ultraviolet light source include ultraviolet fluorescent lamps, ultraviolet LEDs, low-pressure mercury lamps, high-pressure mercury lamps, ultrahigh-pressure mercury lamps, xenon lamps, and carbon arc lamps.
  • As a light source for visible light a visible light fluorescent lamp, a visible light incandescent lamp, a visible light LED, or the like is used.
  • At least one of the mold 33 and the glass sheet 11 is made of a light transmissive material.
  • the light emitted from the light source 35 passes through the transparent glass sheet 11 and enters the layer 15 of the molding material, for example.
  • the light emitted from the light source 35 may pass through the transparent mold 33 and enter the layer 15 of the molding material.
  • the molding material layer 15 may be heated.
  • the pair of rotating rolls 41 and nip rolls 43 feeds the glass sheet 11, the molding material layer 15, and the mold 33 in this order from the nip roll 43 side.
  • the rotary roll 41 and the nip roll 43 are relatively separable, and one of them may be pressed toward the other by a fluid pressure cylinder or the like.
  • At least one of the rotating roll 41 and the nip roll 43 may be a roll in which the outer periphery of the metal roll is covered with rubber. By elastically deforming the rubber, it is possible to suppress stress concentration due to biting of foreign matters such as dust and stress concentration due to variation in the thickness of the glass sheet 11.
  • Either one of the rotating roll 41 and the nip roll 43 may be rotated in accordance with the other rotation driven to rotate by a rotating motor or the like. If either one is rotated passively, the peripheral speed difference between the rotating roll 41 and the nip roll 43 is small, and the shear stress is small.
  • FIG. 1 After the glass sheet 11 and the mold 33 are inserted between the pair of rotating rolls 41 and the nip rolls 43, until the glass sheet 11 and the mold 33 are pulled out from between the other pair of rotating rolls 42 and the nip rolls 44, FIG. As shown, the molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the mold 33 and moves integrally with the molding material layer 15. In the meantime, the layer 15 of the molding material receives light from the light source 35 and gradually cures to become the uneven layer 17.
  • the direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11. Further, the direction of tension of the mold 33 is the moving direction (rotating direction) of the mold 33.
  • the other set of rotating rolls 42 and nip rolls 44 feeds the glass sheet 11, the concavo-convex layer 17 and the mold 33 in this order from the nip roll 44 side.
  • the rotating roll 42 and the nip roll 44 can be relatively moved toward and away from each other, and one of them may be pressed toward the other by a fluid pressure cylinder or the like.
  • At least one of the rotating roll 42 and the nip roll 44 may be a roll in which the outer circumference of the metal roll is covered with rubber.
  • Either one of the rotating roll 42 and the nip roll 44 may be driven to rotate in accordance with the other rotation driven to rotate by a rotating motor or the like. If either one is rotated passively, the peripheral speed difference between the rotating roll 42 and the nip roll 44 is small, and the shear stress is small.
  • the plurality of rotating rolls 41 and 42 and the plurality of nip rolls 43 and 44 may have the same outer diameter or different outer diameters.
  • the guide roll 45 changes the direction of the glass sheet 11 fed from the glass roll according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the rotating roll 41 and the nip roll 43 in a flat state.
  • the direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
  • the drawer roll 46 pulls out the laminated sheet 19 in a flat state from between the rotary roll 42 and the nip roll 44, and changes the direction of the laminated sheet 19 according to the roll diameter of the product roll.
  • the direction of the laminated sheet 19 is changed by bending the laminated sheet 19 along the pulling roll 46.
  • the unwinding roll 21 rotates, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roll.
  • the glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roll 22 and the guide roll 45.
  • the guide roll 45 changes the direction of the glass sheet 11 according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the pair of rotating rolls 41 and nip rolls 43 in a flat state.
  • the direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
  • the applicator 31 applies a molding material on the glass sheet 11 to form a layer 15 of the molding material.
  • the rotating roll 41 and the nip roll 43 feed out the glass sheet 11, the molding material layer 15, and the mold 33 in this order from the nip roll 43 side.
  • the glass sheet 11 and the molding material layer 15 are inserted between the rotating roll 41 and the nip roll 43 in a flat state.
  • the mold 33 is inserted between the rotary roll 41 and the nip roll 43 while being bent and deformed along the rotary roll 41 so that air is not caught between the mold material layer 15 and the mold material layer 15. Close to 15.
  • the glass sheet 11 and the mold 33 are inserted between a pair of rotating rolls 41 and a nip roll 43, and then pulled out from between another pair of rotating rolls 42 and a nip roll 44.
  • the layer 15 of the molding material is sandwiched by the tension of the glass sheet 11 and the tension of the mold 33 and moves integrally with the layer 15 of the molding material.
  • the layer 15 of the molding material receives light from the light source 35 and gradually cures to become the uneven layer 17.
  • the rotating roll 42 and the nip roll 44 feed out the glass sheet 11, the concavo-convex layer 17, and the mold 33 in this order from the nip roll 44 side.
  • the glass sheet 11 and the concavo-convex layer 17 are pulled out from between the rotating roll 42 and the nip roll 44 in a flat state.
  • the mold 33 is bent and deformed along the rotary roll 42 so as to be smoothly separated from the uneven layer 17.
  • the unevenness protection sheet 13 is composed of a resin film, paper, or the like.
  • the concave / convex protective sheet 13 is overlapped with the concave / convex layer 17 of the laminated sheet 19 to prevent the concave / convex layer 17 from being damaged (for example, dust) or scratched.
  • the drawer roll 46 pulls out the laminated sheet 19 in a flat state from between the rotary roll 42 and the nip roll 44, and changes the direction of the laminated sheet 19 according to the roll diameter of the product roll.
  • the winding roll 26 overlaps the laminated sheet 19 and the unevenness protection sheet 13 and winds up to produce a product roll.
  • the laminated sheet 19 is unwound from a product roll at the time of use, cut into a predetermined size, and used for manufacturing an optical panel such as a liquid crystal panel or an organic EL panel.
  • the concave / convex protective sheet 13 may be separated from the laminated sheet 19 during the manufacturing process of the optical panel, and does not have to be a component of the optical panel.
  • the laminated sheet 19 can be used as a moth-eye type antireflection sheet, a polarizing sheet, a microlens array sheet, a lenticular lens array sheet, and the like when used for manufacturing an optical panel.
  • the laminated sheet 19 may be used for manufacturing an immunoassay chip, a DNA analysis chip, a DNA separation chip, a microreactor, and the like, and the use of the laminated sheet 19 is not particularly limited.
  • the glass sheet 11 passes between the plurality of sets of rotating rolls 41 and 42 and the nip rolls 43 and 44 while being in a flat state. Therefore, since the fragile glass sheet 11 is held flat at the time of transferring the concavo-convex pattern of the mold 33 or separating the mold 33 and the concavo-convex layer 17, damage to the glass sheet 11 can be suppressed.
  • the support sheet which supports the glass sheet 11 may be provided in the surface on the opposite side to the surface which forms the uneven
  • the support sheet is detachably joined to the glass sheet 11.
  • a support sheet is comprised by the adhesion layer formed, for example on a base material and a base material, and is joined with the glass sheet 11 with the adhesive force of the adhesion layer.
  • the substrate for example, homopolymers such as polyethylene, polypropylene, polyvinyl chloride, polystyrene, polyester, polyamide, polyimide, and copolymers can be used.
  • the adhesive for the adhesive layer include vinyl acetate, acetal, acrylic, polyamide, polyester, polyurethane, and rubber.
  • the support sheet reinforces the glass sheet 11 and suppresses breakage of the glass sheet 11 while passing between the plurality of sets of rotating rolls 41 and 42 and the nip rolls 43 and 44.
  • the support sheet may be unwound together with the glass sheet 11 from a glass roll attached to the unwinding roll 21, and taken up by the take-up roll 26 together with the glass sheet 11.
  • a support sheet may be comprised only with an adhesive resin film, and the structure of a support sheet is not specifically limited.
  • FIG. 6 is a side view of the imprint apparatus according to the second embodiment of the present invention.
  • 7 to 10 are explanatory diagrams of the imprint method according to the second embodiment of the present invention.
  • 7 is a sectional view taken along line VII-VII in FIG. 6
  • FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 6
  • FIG. 9 is a sectional view taken along line IX-IX in FIG. 10 is a cross-sectional view taken along line XX of FIG.
  • the imprint apparatus 10A forms the first and second uneven layers 17 and 18 (see FIG. 10) on the glass sheet 11 continuously or intermittently.
  • the first and second uneven layers 17 and 18 are formed on opposite sides of the glass sheet 11.
  • the glass sheet 11 and the first and second uneven layers 17 and 18 constitute a laminated sheet 19A.
  • corrugated layers 17 and 18 have an uneven
  • the uneven pattern of the first uneven layer 17 and the uneven pattern of the second uneven layer 18 may be the same pattern or different patterns.
  • the imprint apparatus 10A is a roll-to-roll system, and includes, for example, an unwinding roll 21, a separation roll 22, two collection rolls 23, two unwinding rolls 24, an overlapping roll 25, and a winding roll 26. Is provided.
  • the unwinding roll 21 is equipped with a glass roll formed by, for example, stacking the glass sheet 11 and the two glass protective sheets 12 in a spiral shape.
  • the glass protective sheet 12 protects the surfaces of the glass sheet 11 on which the layers 15 and 16 of the first and second molding materials are formed until the glass sheet 11 is separated from the glass sheet 11 by the separation roll 22 and the guide roll 45.
  • the glass roll attached to the unwinding roll 21 may be formed by stacking the glass sheet 11 and one glass protective sheet 12 and winding them in a spiral shape.
  • the take-up roll 26 rolls up the laminated sheet 19A and the two uneven protective sheets 13 to produce a product roll.
  • the imprint apparatus 10A is, for example, an optical imprint apparatus, and includes first and second applicators 31, 32, first and second molds 33, 34, a light source 35, and a plurality of (for example, two) rotating rolls. 41, 42, a plurality (for example, two) of nip rolls 43, 44, a guide roll 45, a drawing roll 46, and a plurality (for example, four) of auxiliary rolls 51 to 54.
  • the first and second applicators 31 and 32 apply the molding material on both sides of the glass sheet 11 after the glass protective sheet 12 is separated, and the first and second molding material layers 15 as shown in FIG. , 16 are formed.
  • the first and second molding material layers 15 and 16 include a photocurable resin.
  • the first mold 33 has a concavo-convex pattern transferred to the surface of the first molding material layer 15.
  • the second mold 34 has an uneven pattern that is transferred to the surface of the layer 16 of the second molding material.
  • the first and second molds 33 and 34 may be subjected to a mold release process in order to improve the mold release property between the mold surface and the molding material.
  • the first mold 33 has an endless belt shape, is wound around a plurality of rotating rolls 41 and 42 and a plurality of auxiliary rolls 51 and 52, and is rotated. Note that all or some of the plurality of auxiliary rolls 51 and 52 may be omitted.
  • the second mold 34 has an endless belt shape, and is wound around a plurality of nip rolls 43 and 44 and a plurality of auxiliary rolls 53 and 54, and is rotated.
  • the auxiliary rolls 53 and 54 may be omitted.
  • the light source 35 irradiates light to the first molding material layer 15 sandwiched between the glass sheet 11 and the first mold 33 to cure the first molding material layer 15. Further, the light source 35 irradiates the second molding material layer 16 sandwiched between the glass sheet 11 and the second mold 34 to cure the second molding material layer 16.
  • the light emitted from the light source 35 passes through the transparent second mold 34, the second molding material layer 16, and the transparent glass sheet 11 in this order, and enters the first molding material layer 15. .
  • the light emitted from the light source 35 passes through the transparent first mold 33, the first molding material layer 15, and the transparent glass sheet 11 in this order, and enters the second molding material layer 16. It may be incident.
  • a plurality of light sources may be used.
  • the pair of rotating rolls 41 and nip rolls 43 includes, from the nip roll 43 side, the second mold 34, the second molding material layer 16, the glass sheet 11, and the first molding material layer 15. , And the first mold 33 is fed in this order.
  • the glass sheet 11 and the first mold 33 are inserted between the pair of rotating rolls 41 and the nip roll 43, and then between the other pair of rotating rolls 42 and the nip roll 44.
  • the first molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the first mold 33 and moved integrally with the first molding material layer 15. Meanwhile, the first molding material layer 15 is gradually cured by receiving light from the light source 35, and becomes the first uneven layer 17.
  • the direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11. Further, the direction of tension of the first mold 33 is the moving direction (rotation direction) of the first mold 33.
  • the glass sheet 11 and the second mold 34 are inserted between the pair of rotating rolls 41 and the nip roll 43, the glass sheet 11 and the second mold 34 are pulled out from between the other pair of rotating rolls 42 and the nip roll 44.
  • the second molding material layer 16 is sandwiched by the tension of the glass sheet 11 and the tension of the second mold 34, and moves together with the second molding material layer 16.
  • the second molding material layer 16 is gradually cured by receiving light from the light source 35 to become the second uneven layer 18.
  • the direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11.
  • the direction of the tension of the second mold 34 is the moving direction (rotation direction) of the second mold 34.
  • Another set of rotating rolls 42 and nip rolls 44 sandwich the second mold 34, the second uneven layer 18, the glass sheet 11, the first uneven layer 17, and the first mold 33 from the nip roll 44 side. Send out.
  • the guide roll 45 changes the direction of the glass sheet 11 fed from the glass roll according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the rotating roll 41 and the nip roll 43 in a flat state.
  • the direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
  • the drawer roll 46 pulls out the laminated sheet 19A from between the rotary roll 42 and the nip roll 44 in a flat state, and changes the direction of the laminated sheet 19A according to the roll diameter of the product roll.
  • the direction change of the laminated sheet 19 ⁇ / b> A is performed by bending and deforming the laminated sheet 19 ⁇ / b> A along the pulling roll 46.
  • the unwinding roll 21 rotates, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roll.
  • the glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roll 22 and the guide roll 45.
  • the guide roll 45 changes the direction of the glass sheet 11 according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the pair of rotating rolls 41 and nip rolls 43 in a flat state.
  • the direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
  • the first and second applicators 31 and 32 apply the molding material on both sides of the glass sheet 11 to form the first and second molding material layers 15 and 16.
  • the pair of rotating rolls 41 and nip rolls 43 are arranged from the nip roll 43 side with the second mold 34, the second molding material layer 16, the glass sheet 11, and the first molding material.
  • the layer 15 and the first mold 33 are sandwiched in this order and sent out.
  • the glass sheet 11 and the first molding material layer 15 are inserted between a pair of rotating rolls 41 and nip rolls 43 in a flat state.
  • the first mold 33 is inserted between the rotary roll 41 and the nip roll 43 while being bent and deformed along the rotary roll 41 so that air is not caught between the first molding material layer 15. And is in intimate contact with the first molding material layer 15.
  • the glass sheet 11 and the first mold 33 are inserted between the pair of rotating rolls 41 and the nip roll 43, and then between the other pair of rotating rolls 42 and the nip roll 44.
  • the first molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the first mold 33 and moved integrally with the first molding material layer 15. Meanwhile, the first molding material layer 15 is gradually cured by receiving light from the light source 35, and becomes the first uneven layer 17.
  • the glass sheet 11 and the second molding material layer 16 are inserted between the pair of rotating rolls 41 and the nip rolls 43 in a flat state.
  • the second mold 34 is inserted between the rotating roll 41 and the nip roll 43 while being bent and deformed along the nip roll 43 so that air does not get caught between the second molding material layer 16. , In close contact with the second molding material layer 16.
  • the glass sheet 11 and the second mold 34 are inserted between the pair of rotating rolls 41 and the nip rolls 43, and then between the other pair of rotating rolls 42 and the nip rolls 44. Until it is pulled out, the second molding material layer 16 is sandwiched by the tension of the glass sheet 11 and the tension of the second mold 34 and moves integrally with the second molding material layer 16. In the meantime, the second molding material layer 16 is gradually cured by receiving light from the light source 35 to become the second uneven layer 18.
  • the rotating roll 42 and the nip roll 44 are fed out from the nip roll 44 side with the second mold 34, the second uneven layer 18, the glass sheet 11, the first uneven layer 17, and the first mold 33 interposed therebetween.
  • the glass sheet 11 and the first concavo-convex layer 17 are drawn out from between the rotating roll 42 and the nip roll 44 in a flat state.
  • the first mold 33 is bent and deformed along the rotary roll 42 so as to be smoothly separated from the first uneven layer 17.
  • the glass sheet 11 and the second concavo-convex layer 18 are pulled out from between the rotating roll 42 and the nip roll 44 in a flat state.
  • the second mold 34 is bent and deformed along the nip roll 44 so as to be smoothly separated from the second uneven layer 18.
  • the unevenness protection sheet 13 is composed of a resin film, paper, or the like.
  • the two concavo-convex protective sheets 13 cover both the first and second concavo-convex layers 17 and 18, and prevent the first and second concavo-convex layers 17 and 18 from being contaminated (for example, dust) or scratches. .
  • the drawer roll 46 pulls out the laminated sheet 19A from between the rotary roll 42 and the nip roll 44 in a flat state, and changes the direction of the laminated sheet 19A according to the roll diameter of the product roll.
  • the winding roll 26 overlaps and winds the laminated sheet 19A and the two uneven protective sheets 13 sandwiching the laminated sheet 19A to produce a product roll.
  • the number of the uneven protective sheets 13 may be one.
  • the concave / convex protective sheet 13 may be stacked only on the first concave / convex layer 17 serving as the radially outer layer in the laminated sheet 19 ⁇ / b> A when wound in a spiral.
  • One uneven protective sheet 13 can protect both the first and second uneven layers 17 and 18, the roll diameter of the product roll is reduced, and the product roll can be easily stored.
  • corrugated protective sheet 13 may be overlaid only on the 2nd uneven
  • the first and second molding material layers 15 and 16 are formed on the opposite sides of the glass sheet 11, so that the glass sheet 11 is unlikely to warp when the molding material is cured. Moreover, since the force which isolate
  • the imprint apparatus of the above embodiment is a roll-to-roll system, but the present invention is not limited to this.
  • the imprint apparatus may cut the laminated sheet into a predetermined size with a cutting machine without winding the laminated sheet on a winding roll.
  • the laminated sheet may not be bent and deformed along the drawing roll.
  • the imprint apparatus is a glass that is continuously supplied from a glass forming apparatus (for example, a float forming apparatus, a fusion forming apparatus, a redraw forming apparatus, etc.) instead of forming an uneven layer on a glass sheet fed from a glass roll. An uneven layer may be formed on the sheet.
  • a glass forming apparatus for example, a float forming apparatus, a fusion forming apparatus, a redraw forming apparatus, etc.
  • the imprint apparatus is an optical imprint apparatus, but may be a thermal imprint apparatus.
  • the molding material contains a thermoplastic resin instead of the photocurable resin.
  • the thermoplastic resin a general resin used in the thermal imprinting method can be used, and examples thereof include an acrylic resin, a polycarbonate resin, an olefin resin, and a polyester resin.
  • the thermoplastic resin may be prepared in the form of a sheet and affixed on the glass sheet, or may be prepared in the form of a solution and applied onto the glass sheet and dried. In addition, the thermoplastic resin may be softened by heating and then coated on a glass sheet and cooled.
  • a concavo-convex layer is formed by softening a layer of a molding material containing a thermoplastic resin by heating, pressing the mold against the surface of the softened molding material layer, and cooling and solidifying the molding material layer.
  • a heating source a light source (for example, a halogen lamp or a laser) that emits heating light, a heater, or the like is used.
  • the heating temperature is equal to or higher than the glass transition temperature of the thermoplastic resin. Either the step of pressing the mold and the step of heating the layer of the molding material may be performed first or simultaneously.
  • the layer of molding material may be heated by heating the mold.
  • the glass roll of the said embodiment overlaps a glass sheet and a glass protective sheet and is wound spirally, it may be formed by winding only a glass sheet spirally. In this case, a separation roll and a collection roll are not necessary.
  • the product roll of the above embodiment is formed by stacking the laminated sheet and the uneven protective sheet and winding them in a spiral shape, but it may be formed by winding only the laminated sheet in a spiral shape. In this case, the feeding roll and the overlapping roll are not necessary.
  • the molding material is applied on the glass sheet, but the molding material may be applied on the mold.
  • the layer of the molding material is sandwiched between the glass sheet and the mold in the transfer process, and the uneven pattern of the mold is transferred to the surface of the layer of the molding material.

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Abstract

Provided is an imprint method having a step in which a glass sheet is passed in a flat state between a plurality of sets of a rotary roller and a nip roller, and an endless belt-shaped mold that is looped around a plurality of the rotary rollers is made to revolve. After the glass sheet and the mold are inserted between one set of a rotary roller and a nip roller, and before the glass sheet and the mold have been drawn from between another set of a rotary roller and a nip roller, a molding material layer is pinched between the rollers, and a relief pattern from the mold is transferred to the molding material layer.

Description

インプリント方法、及びインプリント装置Imprint method and imprint apparatus
 本発明は、インプリント方法、及びインプリント装置に関する。 The present invention relates to an imprint method and an imprint apparatus.
 微細な凹凸構造を安価に且つ大量に製造できる技術として、インプリント法が注目されている。インプリント法では、例えば凹凸パターンを外周に有するロール状のモールド(所謂グラビアロール)を回転させながら、モールドの凹凸パターンを成形材料の層の表面に連続的に転写する(例えば、特許文献1参照)。 The imprint method is attracting attention as a technology that can produce a fine concavo-convex structure at low cost and in large quantities. In the imprint method, for example, the concavo-convex pattern of the mold is continuously transferred to the surface of the molding material layer while rotating a roll-shaped mold (so-called gravure roll) having the concavo-convex pattern on the outer periphery (see, for example, Patent Document 1). ).
 図11は、従来のインプリント装置の側面図である。ガラスシート1及び成形材料の層が転写ロール3とグラビアロール4とで挟んで送り出され、グラビアロール4の凹凸パターンが成形材料の層に転写する。成形材料の層は、ガラスシート1に加わる張力でグラビアロール4に抱き付き、グラビアロール4と共に回転しながら徐々に硬化し、凹凸層となる。凹凸層は、分離ロール5とグラビアロール4との間を通過することにより、グラビアロール4から分離する。そうして、ガラスシート及び凹凸層で構成される積層シートが得られる。 FIG. 11 is a side view of a conventional imprint apparatus. The glass sheet 1 and the layer of the molding material are fed between the transfer roll 3 and the gravure roll 4, and the uneven pattern of the gravure roll 4 is transferred to the layer of the molding material. The layer of the molding material is attached to the gravure roll 4 by the tension applied to the glass sheet 1, and gradually hardens while rotating together with the gravure roll 4 to form an uneven layer. The uneven layer is separated from the gravure roll 4 by passing between the separation roll 5 and the gravure roll 4. Thus, a laminated sheet composed of a glass sheet and an uneven layer is obtained.
国際公開第2010/090085号International Publication No. 2010/090085
 従来、図11に示すようにガラスシート1が転写ロール3や分離ロール5で曲げ変形され、ガラスシート1が破損することがあった。 Conventionally, as shown in FIG. 11, the glass sheet 1 is sometimes bent and deformed by the transfer roll 3 or the separation roll 5, and the glass sheet 1 may be damaged.
 本発明は、上記課題に鑑みてなされたものであって、ガラスシートの破損を低減できるインプリント方法、及びインプリント装置の提供を目的とする。 This invention was made in view of the said subject, Comprising: It aims at provision of the imprint method and imprint apparatus which can reduce the failure | damage of a glass sheet.
 上記課題を解決するため、本発明の一態様によるインプリント方法は、
 ガラスシートを平坦な状態で複数組の回転ロールとニップロールとの間を通過させると共に、複数の前記回転ロールに架け回されるエンドレスベルト状のモールドを輪転させる工程を有し、
 前記ガラスシート及び前記モールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、成形材料の層を挟み込み、該成形材料の層に前記モールドの凹凸パターンが転写する。
In order to solve the above problem, an imprint method according to an aspect of the present invention includes:
Passing the glass sheet between a plurality of sets of rotating rolls and nip rolls in a flat state, and rotating the endless belt-shaped molds wound around the plurality of rotating rolls,
The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, The uneven pattern of the mold is transferred to the layer of the molding material.
 また、本発明の他の一態様によるインプリント装置は、
 ガラスシートを平坦な状態で通過させる回転ロール及びニップロールの組を複数組と、
 複数の前記回転ロールに架け回され、輪転されるエンドレスベルト状のモールドとを備え、
 前記ガラスシート及び前記モールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、成形材料の層を挟み込み、該成形材料の層に前記モールドの凹凸パターンが転写する。
Moreover, an imprint apparatus according to another aspect of the present invention is provided.
Multiple sets of rotating rolls and nip rolls that allow the glass sheet to pass in a flat state,
An endless belt-shaped mold that is wound around a plurality of the rotating rolls and rotated,
The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, The uneven pattern of the mold is transferred to the layer of the molding material.
 本発明によれば、ガラスシートの破損を低減できるインプリント方法、及びインプリント装置が提供される。 According to the present invention, an imprint method and an imprint apparatus that can reduce breakage of a glass sheet are provided.
本発明の第1実施形態によるインプリント装置の側面図である。It is a side view of the imprint apparatus by 1st Embodiment of this invention. 図1のII-II線に沿った断面図である。FIG. 2 is a cross-sectional view taken along line II-II in FIG. 図1のIII-III線に沿った断面図である。FIG. 3 is a sectional view taken along line III-III in FIG. 図1のIV-IVに沿った断面図である。FIG. 4 is a cross-sectional view taken along IV-IV in FIG. 図1のV-V線に沿った断面図である。FIG. 5 is a cross-sectional view taken along line VV in FIG. 1. 本発明の第2実施形態によるインプリント装置の側面図である。It is a side view of the imprint apparatus by 2nd Embodiment of this invention. 図6のVII-VII線に沿った断面図である。FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 6. 図6のVIII-VIII線に沿った断面図である。FIG. 7 is a cross-sectional view taken along line VIII-VIII in FIG. 6. 図6のIX-IX線に沿った断面図である。FIG. 7 is a sectional view taken along line IX-IX in FIG. 6. 図6のX-X線に沿った断面図である。FIG. 7 is a cross-sectional view taken along line XX in FIG. 6. 従来のインプリント装置の側面図である。It is a side view of the conventional imprint apparatus.
 以下、本発明を実施するための形態について図面を参照して説明する。各図面において、同一の又は対応する構成には、同一の又は対応する符号を付して、説明を省略する。 Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and description thereof is omitted.
 [第1実施形態]
 図1は、本発明の第1実施形態によるインプリント装置の側面図である。図2~図5は本発明の第1実施形態によるインプリント方法の説明図である。図2は図1のII-II線に沿った断面図、図3は図1のIII-III線に沿った断面図、図4は図1のIV-IVに沿った断面図、図5は図1のV-V線に沿った断面図である。
[First Embodiment]
FIG. 1 is a side view of an imprint apparatus according to a first embodiment of the present invention. 2 to 5 are explanatory diagrams of the imprint method according to the first embodiment of the present invention. 2 is a sectional view taken along the line II-II in FIG. 1, FIG. 3 is a sectional view taken along the line III-III in FIG. 1, FIG. 4 is a sectional view taken along the line IV-IV in FIG. FIG. 5 is a cross-sectional view taken along line VV in FIG. 1.
 インプリント装置10は、帯状のガラスシート11上に凹凸層17(図5参照)を連続的又は間欠的に形成する。ガラスシート11及び凹凸層17で積層シート19が構成される。凹凸層17は、凸部が周期的に配列される凹凸パターンを有する。 The imprint apparatus 10 continuously or intermittently forms the uneven layer 17 (see FIG. 5) on the belt-shaped glass sheet 11. A laminated sheet 19 is constituted by the glass sheet 11 and the uneven layer 17. The uneven layer 17 has an uneven pattern in which convex portions are periodically arranged.
 ガラスシート11のガラスとしては、例えば無アルカリガラス、ホウケイ酸ガラス、ソーダライムガラス、高シリカガラス、その他の酸化ケイ素を主な成分とする酸化物系ガラス等が挙げられる。 Examples of the glass of the glass sheet 11 include non-alkali glass, borosilicate glass, soda lime glass, high silica glass, and other oxide-based glasses mainly composed of silicon oxide.
 ガラスシート11の厚さは、フレキシブル性の観点から、例えば0.3mm以下、好ましくは0.2mm以下、より好ましくは0.1mm以下、さらに好ましくは0.05mm以下である。また、ガラスシート11の厚さは、ガラス成形性の観点から、好ましくは0.0001mm以上、より好ましくは0.001mm以上、さらに好ましくは0.005mm以上である。 From the viewpoint of flexibility, the thickness of the glass sheet 11 is, for example, 0.3 mm or less, preferably 0.2 mm or less, more preferably 0.1 mm or less, and even more preferably 0.05 mm or less. Further, the thickness of the glass sheet 11 is preferably 0.0001 mm or more, more preferably 0.001 mm or more, and further preferably 0.005 mm or more from the viewpoint of glass moldability.
 インプリント装置10は、ロール・ツー・ロール方式であって、例えば巻き出しロール21、分離ロール22、回収ロール23、繰り出しロール24、重ね合わせロール25、及び巻き取りロール26を備える。 The imprint apparatus 10 is a roll-to-roll system, and includes, for example, an unwinding roll 21, a separation roll 22, a collection roll 23, an unwinding roll 24, an overlapping roll 25, and a winding roll 26.
 巻き出しロール21には、ガラスシート11及びガラス保護シート12を重ねて渦巻き状に巻回してなるガラスロールが装着される。ガラス保護シート12は、樹脂フィルム、紙等で構成され、ガラス面に異物(例えばホコリ)や傷が付くのを防止する。巻き出しロール21が回転すると、ガラスロールからガラスシート11及びガラス保護シート12が繰り出される。 The unwinding roll 21 is fitted with a glass roll formed by winding the glass sheet 11 and the glass protective sheet 12 in a spiral shape. The glass protective sheet 12 is made of a resin film, paper, or the like, and prevents the glass surface from getting foreign matter (for example, dust) or scratches. When the unwinding roll 21 rotates, the glass sheet 11 and the glass protective sheet 12 are unwound from the glass roll.
 ガラスロールの最外層はガラス保護シート12であることが好ましい。巻き出しロール21が一時停止するとき、ガラスシート11に異物や傷が付くのを防止できる。 The outermost layer of the glass roll is preferably a glass protective sheet 12. When the unwinding roll 21 stops temporarily, it can prevent that the glass sheet 11 gets a foreign material or a damage | wound.
 ガラス保護シート12は、粘着剤付きであってガラスシート11と接合されていてもよいし、接合されずに単に接触するだけでもよい。 The glass protective sheet 12 may have a pressure-sensitive adhesive and may be bonded to the glass sheet 11 or may simply contact without being bonded.
 ガラス保護シート12は、分離ロール22でガラスシート11と分離されるまで、ガラスシート11における成形材料の層15を形成する面を保護してよい。 The glass protective sheet 12 may protect the surface of the glass sheet 11 on which the layer 15 of the molding material is formed until it is separated from the glass sheet 11 by the separation roll 22.
 分離ロール22は、ガラスロールから繰り出されるガラスシート11及びガラス保護シート12を分離する。ガラス保護シート12が分離ロール22に沿って曲げ変形されることで、分離が円滑に行われる。ガラス保護シート12が粘着層を有する場合、粘着層とガラスシートとが徐々に剥離されるので、剥離に要する力が軽減できる。 The separation roll 22 separates the glass sheet 11 and the glass protective sheet 12 fed out from the glass roll. Separation is performed smoothly by the glass protective sheet 12 being bent and deformed along the separation roll 22. When the glass protective sheet 12 has an adhesive layer, since the adhesive layer and the glass sheet are gradually peeled off, the force required for peeling can be reduced.
 回収ロール23は、ガラスシート11から分離したガラス保護シート12を巻き取る。 The collection roll 23 winds the glass protective sheet 12 separated from the glass sheet 11.
 繰り出しロール24には、凹凸保護シート13を渦巻き状に巻回してなる保護シートロールが装着される。繰り出しロール24が回転すると、保護シートロールから凹凸保護シート13が繰り出される。凹凸保護シート13は、樹脂フィルム、紙等で構成される。 A protection sheet roll formed by winding the uneven protection sheet 13 in a spiral shape is attached to the feeding roll 24. When the feed roll 24 rotates, the uneven protective sheet 13 is fed from the protective sheet roll. The unevenness protection sheet 13 is composed of a resin film, paper, or the like.
 重ね合わせロール25は、保護シートロールから繰り出される凹凸保護シート13と、積層シート19とを重ね合わせる。凹凸保護シート13が重ね合わせロール25に沿って曲げ変形されることで、凹凸保護シート13と積層シート19とが徐々に合流するので、重ね合わせ時のしわの発生や空気の噛み込みなどが抑制できる。 The superimposing roll 25 superimposes the uneven protective sheet 13 fed from the protective sheet roll and the laminated sheet 19. Since the concave / convex protective sheet 13 is bent and deformed along the overlapping roll 25, the concave / convex protective sheet 13 and the laminated sheet 19 gradually merge to suppress generation of wrinkles or air entrainment during the overlapping. it can.
 凹凸保護シート13は、粘着剤付きであって積層シート19と接合されてもよいし、接合されずに単に接触するだけでもよい。 The concave / convex protective sheet 13 is provided with an adhesive and may be bonded to the laminated sheet 19 or may be simply contacted without being bonded.
 凹凸保護シート13は、積層シート19の凹凸層17を覆い、凹凸層17に異物(例えばホコリ)や傷が付くのを防止する。 The concave / convex protective sheet 13 covers the concave / convex layer 17 of the laminated sheet 19 and prevents the concave / convex layer 17 from being damaged (for example, dust) or scratched.
 巻き取りロール26は、積層シート19及び凹凸保護シート13を重ねて巻き取り、製品ロールを作製する。製品ロールの最外層は、凹凸保護シート13であることが好ましい。製品ロールの最外層がガラスシートの場合、製品ロールは保管時に、別の保護シートで覆われてよい。 The take-up roll 26 rolls up the laminated sheet 19 and the unevenness protection sheet 13 to produce a product roll. The outermost layer of the product roll is preferably an uneven protective sheet 13. When the outermost layer of the product roll is a glass sheet, the product roll may be covered with another protective sheet during storage.
 インプリント装置10は、例えば光インプリント装置であって、塗布器31、エンドレスベルト状のモールド33、光源35、複数(例えば2本)の回転ロール41、42、複数(例えば2本)のニップロール43、44、ガイドロール45、引き出しロール46、及び複数(例えば2本)の補助ロール51、52をさらに備える。 The imprint apparatus 10 is, for example, an optical imprint apparatus, and includes an applicator 31, an endless belt-shaped mold 33, a light source 35, a plurality of (for example, two) rotating rolls 41 and 42, and a plurality of (for example, two) nip rolls. 43, 44, a guide roll 45, a drawer roll 46, and a plurality of (for example, two) auxiliary rolls 51, 52 are further provided.
 塗布器31は、ガラス保護シート12の分離後に、ガラスシート11上に成形材料を塗布し、図2に示すように成形材料の層15を形成する。塗布器31としては、ダイコータ、ロールコータ、グラビアコータ、スプレーコータ、フローコータ、ブレードコータ等が挙げられる。 The applicator 31 applies the molding material onto the glass sheet 11 after the glass protective sheet 12 is separated, and forms the molding material layer 15 as shown in FIG. Examples of the applicator 31 include a die coater, a roll coater, a gravure coater, a spray coater, a flow coater, and a blade coater.
 ガラスシート11は、ガラス面と成形材料との密着性を高めるため、予め表面処理が施されたものであってよい。表面処理としては、プライマー処理、オゾン処理、プラズマエッチング処理等が挙げられる。プライマーとしては、シランカップリング剤、シラザン等が用いられる。 The glass sheet 11 may be subjected to a surface treatment in advance in order to improve the adhesion between the glass surface and the molding material. Examples of the surface treatment include primer treatment, ozone treatment, plasma etching treatment, and the like. As the primer, a silane coupling agent, silazane or the like is used.
 成形材料は、光硬化性樹脂を含む。光硬化性樹脂としては、光インプリント法に用いられる一般的なものが使用できる。光硬化性樹脂は、モノマー、光重合開始剤等で構成される。モノマーとしては、ラジカル重合タイプの場合、アクリルモノマー、ビニルモノマー等があり、イオン重合タイプの場合、エポキシモノマー、ビニルエーテルモノマー等がある。光硬化性樹脂は、液状の状態で用意され、例えば図2に示すようにガラスシート11上に塗布される。成形材料は、金属酸化物の粒子等を含んでもよい。 Molding material includes a photo-curable resin. As a photocurable resin, the general thing used for the photoimprint method can be used. The photocurable resin is composed of a monomer, a photopolymerization initiator, and the like. Examples of the monomer include an acrylic monomer and a vinyl monomer in the case of the radical polymerization type, and an epoxy monomer and a vinyl ether monomer in the case of the ionic polymerization type. The photocurable resin is prepared in a liquid state, and is applied onto the glass sheet 11 as shown in FIG. 2, for example. The molding material may include metal oxide particles and the like.
 モールド33は、成形材料の層15の表面に転写される凹凸パターンを外周に有する。モールド33は、モールド表面と成形材料との離型性を高めるため、離型処理が施されたものであってよい。離型処理としては、例えばフッ素コート処理、シリコーンコート処理等が挙げられる。 The mold 33 has a concavo-convex pattern transferred to the surface of the layer 15 of the molding material on the outer periphery. The mold 33 may be subjected to a release treatment in order to improve the release property between the mold surface and the molding material. Examples of the mold release treatment include fluorine coat treatment and silicone coat treatment.
 モールド33は、複数の回転ロール41、42、及び複数の補助ロール51、52に架け回され、輪転される。モールド33は、例えば金属(例えばニッケル、クロム)、又は樹脂(例えばポリカーボネート、環状オレフィン樹脂、ポリエステル樹脂)で構成され、フレキシブル性を有する。尚、複数の補助ロール51、52の全部又は一部が無くてもよい。 The mold 33 is wound around a plurality of rotating rolls 41 and 42 and a plurality of auxiliary rolls 51 and 52, and is rotated. The mold 33 is made of, for example, metal (for example, nickel or chromium) or resin (for example, polycarbonate, cyclic olefin resin, or polyester resin), and has flexibility. Note that all or some of the plurality of auxiliary rolls 51 and 52 may be omitted.
 モールド33は、マスターモールドを用いて成型される帯状シートの両端部を溶着して作製され、何度も複製可能となっている。複製方法には、例えばインプリント法、電鋳法などがある。マスターモールドは、例えばフォトリソグラフィ法又は電子線描画法で基材を加工して作製される。 The mold 33 is produced by welding both ends of a belt-like sheet molded using a master mold, and can be duplicated many times. Examples of the duplication method include an imprint method and an electroforming method. The master mold is manufactured by processing a substrate by, for example, a photolithography method or an electron beam drawing method.
 光源35は、ガラスシート11とモールド33との間に挟み込まれた成形材料の層15に光を照射し、成形材料の層15を固化(硬化)させる。成形材料の層15を硬化してなる凹凸層17は、モールド33の凹凸パターンが略反転した凹凸パターンを有する。 The light source 35 irradiates the molding material layer 15 sandwiched between the glass sheet 11 and the mold 33 with light to solidify (harden) the molding material layer 15. The uneven layer 17 formed by curing the molding material layer 15 has an uneven pattern in which the uneven pattern of the mold 33 is substantially inverted.
 光硬化性樹脂を硬化させる光としては、例えば紫外光、可視光、赤外光等が挙げられる。紫外光の光源としては、紫外線蛍光灯、紫外線LED、低圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノン灯、炭素アーク灯等が挙げられる。可視光の光源としては、可視光蛍光灯、可視光白熱灯、可視光LED等が用いられる。 Examples of light that cures the photocurable resin include ultraviolet light, visible light, and infrared light. Examples of the ultraviolet light source include ultraviolet fluorescent lamps, ultraviolet LEDs, low-pressure mercury lamps, high-pressure mercury lamps, ultrahigh-pressure mercury lamps, xenon lamps, and carbon arc lamps. As a light source for visible light, a visible light fluorescent lamp, a visible light incandescent lamp, a visible light LED, or the like is used.
 光インプリント法では、モールド33及びガラスシート11の少なくとも一方が光透過性の材料で構成される。光源35から出射した光は、例えば、透明なガラスシート11を透過して、成形材料の層15に入射する。尚、光源35から出射した光は、透明なモールド33を透過して、成形材料の層15に入射してもよい。 In the optical imprint method, at least one of the mold 33 and the glass sheet 11 is made of a light transmissive material. The light emitted from the light source 35 passes through the transparent glass sheet 11 and enters the layer 15 of the molding material, for example. The light emitted from the light source 35 may pass through the transparent mold 33 and enter the layer 15 of the molding material.
 光インプリント法では、室温での成型が可能であり、モールド33とガラスシート11との線膨張係数差による歪みが発生しにくく、転写精度が良い。尚、硬化反応の促進のため、成形材料の層15は加熱されてもよい。 In the optical imprint method, molding at room temperature is possible, distortion due to a difference in linear expansion coefficient between the mold 33 and the glass sheet 11 hardly occurs, and transfer accuracy is good. In order to accelerate the curing reaction, the molding material layer 15 may be heated.
 一組の回転ロール41及びニップロール43は、図3に示すように、ニップロール43側から、ガラスシート11、成形材料の層15、及びモールド33をこの順で挟んで送り出す。回転ロール41及びニップロール43は相対的に接離可能であって、いずれか一方は他方に向けて流体圧シリンダ等で押圧されてよい。回転ロール41及びニップロール43の少なくとも一方は金属ロールの外周をゴムで被覆したロールであってよい。ゴムが弾性変形することで、ホコリなどの異物の噛み込みによる応力集中やガラスシート11の厚さのばらつきによる応力集中を抑制できる。回転ロール41及びニップロール43のいずれか一方は、回転モータ等で回転駆動される他方の回転に伴って従動的に回転してよい。いずれか一方が従動的に回転すれば、回転ロール41と、ニップロール43との間の周速差が小さく、せん断応力が小さい。 As shown in FIG. 3, the pair of rotating rolls 41 and nip rolls 43 feeds the glass sheet 11, the molding material layer 15, and the mold 33 in this order from the nip roll 43 side. The rotary roll 41 and the nip roll 43 are relatively separable, and one of them may be pressed toward the other by a fluid pressure cylinder or the like. At least one of the rotating roll 41 and the nip roll 43 may be a roll in which the outer periphery of the metal roll is covered with rubber. By elastically deforming the rubber, it is possible to suppress stress concentration due to biting of foreign matters such as dust and stress concentration due to variation in the thickness of the glass sheet 11. Either one of the rotating roll 41 and the nip roll 43 may be rotated in accordance with the other rotation driven to rotate by a rotating motor or the like. If either one is rotated passively, the peripheral speed difference between the rotating roll 41 and the nip roll 43 is small, and the shear stress is small.
 ガラスシート11及びモールド33は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、図4に示すように、ガラスシート11の張力及びモールド33の張力で成形材料の層15を挟み込み、成形材料の層15と一体的に移動する。その間に、成形材料の層15は光源35からの光を受けて徐々に硬化し、凹凸層17となる。ガラスシート11の張力の方向はガラスシート11の移動方向である。また、モールド33の張力の方向は、モールド33の移動方向(輪転方向)である。 After the glass sheet 11 and the mold 33 are inserted between the pair of rotating rolls 41 and the nip rolls 43, until the glass sheet 11 and the mold 33 are pulled out from between the other pair of rotating rolls 42 and the nip rolls 44, FIG. As shown, the molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the mold 33 and moves integrally with the molding material layer 15. In the meantime, the layer 15 of the molding material receives light from the light source 35 and gradually cures to become the uneven layer 17. The direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11. Further, the direction of tension of the mold 33 is the moving direction (rotating direction) of the mold 33.
 他の一組の回転ロール42及びニップロール44は、ニップロール44側から、ガラスシート11、凹凸層17、及びモールド33をこの順で挟んで送り出す。回転ロール42及びニップロール44は相対的に接離可能であって、いずれか一方は他方に向けて流体圧シリンダ等で押圧されてよい。回転ロール42及びニップロール44の少なくとも一方は金属ロールの外周をゴムで被覆したロールであってよい。回転ロール42及びニップロール44のいずれか一方は、回転モータ等で回転駆動される他方の回転に伴って従動的に回転してよい。いずれか一方が従動的に回転すれば、回転ロール42と、ニップロール44との間の周速差が小さく、せん断応力が小さい。 The other set of rotating rolls 42 and nip rolls 44 feeds the glass sheet 11, the concavo-convex layer 17 and the mold 33 in this order from the nip roll 44 side. The rotating roll 42 and the nip roll 44 can be relatively moved toward and away from each other, and one of them may be pressed toward the other by a fluid pressure cylinder or the like. At least one of the rotating roll 42 and the nip roll 44 may be a roll in which the outer circumference of the metal roll is covered with rubber. Either one of the rotating roll 42 and the nip roll 44 may be driven to rotate in accordance with the other rotation driven to rotate by a rotating motor or the like. If either one is rotated passively, the peripheral speed difference between the rotating roll 42 and the nip roll 44 is small, and the shear stress is small.
 複数の回転ロール41、42及び複数のニップロール43、44は、同じ外径でも異なる外径でもよい。 The plurality of rotating rolls 41 and 42 and the plurality of nip rolls 43 and 44 may have the same outer diameter or different outer diameters.
 ガイドロール45は、ガラスロールから繰り出されるガラスシート11をガラスロールのロール径に応じて方向転換し、ガラスシート11を平坦な状態で回転ロール41とニップロール43との間に挿入する。ガラスシート11の方向転換は、ガラスシート11をガイドロール45に沿って曲げ変形させることで行われる。 The guide roll 45 changes the direction of the glass sheet 11 fed from the glass roll according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the rotating roll 41 and the nip roll 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
 引き出しロール46は、回転ロール42とニップロール44との間から積層シート19を平坦な状態で引き出し、製品ロールのロール径に応じて積層シート19を方向転換する。積層シート19の方向転換は、積層シート19を引き出しロール46に沿って曲げ変形させることで行われる。 The drawer roll 46 pulls out the laminated sheet 19 in a flat state from between the rotary roll 42 and the nip roll 44, and changes the direction of the laminated sheet 19 according to the roll diameter of the product roll. The direction of the laminated sheet 19 is changed by bending the laminated sheet 19 along the pulling roll 46.
 次に、上記構成のインプリント装置10の動作(インプリント方法)について説明する。インプリント装置10の各種動作は、マイクロコンピュータ等で構成されるコントローラによる制御下で行われる。以下の説明では、便宜上、主にガラスシート11の一部分に着目して、インプリント装置10の各種動作を説明する。 Next, the operation (imprint method) of the imprint apparatus 10 configured as described above will be described. Various operations of the imprint apparatus 10 are performed under the control of a controller including a microcomputer. In the following description, for convenience, various operations of the imprint apparatus 10 will be described mainly focusing on a part of the glass sheet 11.
 先ず、巻き出しロール21が回転し、ガラスロールからガラスシート11及びガラス保護シート12が連続的に繰り出される。ガラスシート11及びガラス保護シート12は、分離ロール22及びガイドロール45の間を通過することにより分離される。 First, the unwinding roll 21 rotates, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roll. The glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roll 22 and the guide roll 45.
 ガイドロール45は、ガラスロールのロール径に応じてガラスシート11を方向転換し、ガラスシート11を平坦な状態で一組の回転ロール41とニップロール43との間に挿入する。ガラスシート11の方向転換は、ガラスシート11をガイドロール45に沿って曲げ変形させることで行われる。 The guide roll 45 changes the direction of the glass sheet 11 according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the pair of rotating rolls 41 and nip rolls 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
 次いで、図2に示すように、塗布器31がガラスシート11上に成形材料を塗布し、成形材料の層15を形成する。 Then, as shown in FIG. 2, the applicator 31 applies a molding material on the glass sheet 11 to form a layer 15 of the molding material.
 次いで、図3に示すように、回転ロール41及びニップロール43が、ニップロール43側から、ガラスシート11、成形材料の層15、及びモールド33をこの順で挟んで送り出す。 Next, as shown in FIG. 3, the rotating roll 41 and the nip roll 43 feed out the glass sheet 11, the molding material layer 15, and the mold 33 in this order from the nip roll 43 side.
 図1に示すように、ガラスシート11及び成形材料の層15は、平坦な状態で、回転ロール41とニップロール43との間に挿入される。一方、モールド33は、成形材料の層15との間に空気が噛み込まないように回転ロール41に沿って曲げ変形されながら、回転ロール41とニップロール43との間に挿入され、成形材料の層15と密接する。 As shown in FIG. 1, the glass sheet 11 and the molding material layer 15 are inserted between the rotating roll 41 and the nip roll 43 in a flat state. On the other hand, the mold 33 is inserted between the rotary roll 41 and the nip roll 43 while being bent and deformed along the rotary roll 41 so that air is not caught between the mold material layer 15 and the mold material layer 15. Close to 15.
 図4に示すように、ガラスシート11及びモールド33は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、ガラスシート11の張力及びモールド33の張力で成形材料の層15を挟み込み、成形材料の層15と一体的に移動する。その間に、成形材料の層15は光源35からの光を受けて徐々に硬化し、凹凸層17となる。 As shown in FIG. 4, the glass sheet 11 and the mold 33 are inserted between a pair of rotating rolls 41 and a nip roll 43, and then pulled out from between another pair of rotating rolls 42 and a nip roll 44. In the meantime, the layer 15 of the molding material is sandwiched by the tension of the glass sheet 11 and the tension of the mold 33 and moves integrally with the layer 15 of the molding material. In the meantime, the layer 15 of the molding material receives light from the light source 35 and gradually cures to become the uneven layer 17.
 次いで、回転ロール42及びニップロール44が、ニップロール44側から、ガラスシート11、凹凸層17、及びモールド33をこの順で挟んで送り出す。 Next, the rotating roll 42 and the nip roll 44 feed out the glass sheet 11, the concavo-convex layer 17, and the mold 33 in this order from the nip roll 44 side.
 図1に示すように、ガラスシート11及び凹凸層17は、平坦な状態のまま回転ロール42とニップロール44との間から引き出される。一方、モールド33は、凹凸層17と円滑に分離するように回転ロール42に沿って曲げ変形される。 As shown in FIG. 1, the glass sheet 11 and the concavo-convex layer 17 are pulled out from between the rotating roll 42 and the nip roll 44 in a flat state. On the other hand, the mold 33 is bent and deformed along the rotary roll 42 so as to be smoothly separated from the uneven layer 17.
 このようにして、図5に示すように、ガラスシート11及び凹凸層17を含む積層シート19が得られる。 Thus, as shown in FIG. 5, a laminated sheet 19 including the glass sheet 11 and the concavo-convex layer 17 is obtained.
 次いで、引き出しロール46及び重ね合わせロール25が、積層シート19と凹凸保護シート13とを重ね合せる。凹凸保護シート13は、樹脂フィルム、紙等で構成される。凹凸保護シート13は、積層シート19の凹凸層17と重ねられ、凹凸層17に異物(例えばホコリ)や傷が付くのを防止する。 Next, the drawer roll 46 and the overlapping roll 25 overlap the laminated sheet 19 and the unevenness protection sheet 13. The unevenness protection sheet 13 is composed of a resin film, paper, or the like. The concave / convex protective sheet 13 is overlapped with the concave / convex layer 17 of the laminated sheet 19 to prevent the concave / convex layer 17 from being damaged (for example, dust) or scratched.
 引き出しロール46は、回転ロール42とニップロール44との間から積層シート19を平坦な状態で引き出し、製品ロールのロール径に応じて積層シート19を方向転換する。 The drawer roll 46 pulls out the laminated sheet 19 in a flat state from between the rotary roll 42 and the nip roll 44, and changes the direction of the laminated sheet 19 according to the roll diameter of the product roll.
 次いで、巻き取りロール26が、積層シート19と凹凸保護シート13とを重ねて巻き取り、製品ロールを作製する。 Next, the winding roll 26 overlaps the laminated sheet 19 and the unevenness protection sheet 13 and winds up to produce a product roll.
 積層シート19は、使用時に製品ロールから繰り出され、所定のサイズに切断され、例えば液晶パネルや有機ELパネル等の光学パネルの製造に用いられる。凹凸保護シート13は、光学パネルの製造工程の途中で積層シート19から分離されてよく、光学パネルの構成部品とはならなくてよい。 The laminated sheet 19 is unwound from a product roll at the time of use, cut into a predetermined size, and used for manufacturing an optical panel such as a liquid crystal panel or an organic EL panel. The concave / convex protective sheet 13 may be separated from the laminated sheet 19 during the manufacturing process of the optical panel, and does not have to be a component of the optical panel.
 積層シート19は、光学パネルの製造に用いられる場合、モスアイ型の反射防止シート、偏光シート、マイクロレンズアレイシート、レンチキュラーレンズアレイシート等として使用できる。尚、積層シート19は、免疫分析チップ、DNA分析チップ、DNA分離チップ、マイクロリアクター等の製造に用いられてもよく、積層シート19の用途は特に限定されない。 The laminated sheet 19 can be used as a moth-eye type antireflection sheet, a polarizing sheet, a microlens array sheet, a lenticular lens array sheet, and the like when used for manufacturing an optical panel. The laminated sheet 19 may be used for manufacturing an immunoassay chip, a DNA analysis chip, a DNA separation chip, a microreactor, and the like, and the use of the laminated sheet 19 is not particularly limited.
 以上説明したように、本実施形態によれば、図1に示すようにガラスシート11が平坦な状態のまま複数組の回転ロール41、42とニップロール43、44との間を通過する。そのため、モールド33の凹凸パターンの転写時や、モールド33と凹凸層17との分離時に、脆いガラスシート11が平坦に保持されているので、ガラスシート11の破損を抑制できる。 As described above, according to this embodiment, as shown in FIG. 1, the glass sheet 11 passes between the plurality of sets of rotating rolls 41 and 42 and the nip rolls 43 and 44 while being in a flat state. Therefore, since the fragile glass sheet 11 is held flat at the time of transferring the concavo-convex pattern of the mold 33 or separating the mold 33 and the concavo-convex layer 17, damage to the glass sheet 11 can be suppressed.
 尚、本実施形態のガラスシート11における凹凸層17を形成する面と反対側の面には、ガラスシート11を支持する支持シートが設けられてもよい。支持シートは、ガラスシート11と剥離可能に接合されている。支持シートは、例えば基材及び基材上に形成される粘着層で構成され、粘着層の粘着力でガラスシート11と接合されている。基材としては、例えばポリエチレン、ポリプロピレン、ポリ塩化ビニル、ポリスチレン、ポリエステル、ポリアミド、ポリイミド等のホモポリマー、コポリマー等が使用できる。粘着層の粘着剤としては、例えば、酢酸ビニル系、アセタール系、アクリル系、ポリアミド系、ポリエステル系、ポリウレタン系、ゴム系等が使用できる。支持シートは、複数組の回転ロール41、42とニップロール43、44との間を通過する間、ガラスシート11を補強し、ガラスシート11の破損を抑制する。支持シートは、例えば巻き出しロール21に装着されるガラスロールからガラスシート11と共に繰り出され、ガラスシート11と共に巻き取りロール26で巻き取られてよい。尚、支持シートは粘着性の樹脂フィルムのみで構成されてもよく、支持シートの構成は特に限定されない。 In addition, the support sheet which supports the glass sheet 11 may be provided in the surface on the opposite side to the surface which forms the uneven | corrugated layer 17 in the glass sheet 11 of this embodiment. The support sheet is detachably joined to the glass sheet 11. A support sheet is comprised by the adhesion layer formed, for example on a base material and a base material, and is joined with the glass sheet 11 with the adhesive force of the adhesion layer. As the substrate, for example, homopolymers such as polyethylene, polypropylene, polyvinyl chloride, polystyrene, polyester, polyamide, polyimide, and copolymers can be used. Examples of the adhesive for the adhesive layer include vinyl acetate, acetal, acrylic, polyamide, polyester, polyurethane, and rubber. The support sheet reinforces the glass sheet 11 and suppresses breakage of the glass sheet 11 while passing between the plurality of sets of rotating rolls 41 and 42 and the nip rolls 43 and 44. For example, the support sheet may be unwound together with the glass sheet 11 from a glass roll attached to the unwinding roll 21, and taken up by the take-up roll 26 together with the glass sheet 11. In addition, a support sheet may be comprised only with an adhesive resin film, and the structure of a support sheet is not specifically limited.
 [第2実施形態]
 図6は、本発明の第2実施形態によるインプリント装置の側面図である。図7~図10は、本発明の第2実施形態によるインプリント方法の説明図である。図7は、図6のVII-VII線に沿った断面図、図8は図6のVIII-VIII線に沿った断面図、図9は図6のIX-IX線に沿った断面図、図10は図6のX-X線に沿った断面図である。
[Second Embodiment]
FIG. 6 is a side view of the imprint apparatus according to the second embodiment of the present invention. 7 to 10 are explanatory diagrams of the imprint method according to the second embodiment of the present invention. 7 is a sectional view taken along line VII-VII in FIG. 6, FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 6, and FIG. 9 is a sectional view taken along line IX-IX in FIG. 10 is a cross-sectional view taken along line XX of FIG.
 インプリント装置10Aは、ガラスシート11上に第1及び第2の凹凸層17、18(図10参照)を連続的又は間欠的に形成する。第1及び第2の凹凸層17、18は、ガラスシート11を挟んで互いに反対側に形成される。ガラスシート11並びに第1及び第2の凹凸層17、18で積層シート19Aが構成される。第1及び第2の凹凸層17、18は、凸部が周期的に配列される凹凸パターンを有する。第1の凹凸層17の凹凸パターンと、第2の凹凸層18の凹凸パターンとは、同じパターンでも異なるパターンでもよい。 The imprint apparatus 10A forms the first and second uneven layers 17 and 18 (see FIG. 10) on the glass sheet 11 continuously or intermittently. The first and second uneven layers 17 and 18 are formed on opposite sides of the glass sheet 11. The glass sheet 11 and the first and second uneven layers 17 and 18 constitute a laminated sheet 19A. The 1st and 2nd uneven | corrugated layers 17 and 18 have an uneven | corrugated pattern by which a convex part is arranged periodically. The uneven pattern of the first uneven layer 17 and the uneven pattern of the second uneven layer 18 may be the same pattern or different patterns.
 インプリント装置10Aは、ロール・ツー・ロール方式であって、例えば巻き出しロール21、分離ロール22、2本の回収ロール23、2本の繰り出しロール24、重ね合わせロール25、及び巻き取りロール26を備える。 The imprint apparatus 10A is a roll-to-roll system, and includes, for example, an unwinding roll 21, a separation roll 22, two collection rolls 23, two unwinding rolls 24, an overlapping roll 25, and a winding roll 26. Is provided.
 巻き出しロール21には、例えばガラスシート11及び2枚のガラス保護シート12を重ねて渦巻き状に巻回してなるガラスロールが装着される。ガラス保護シート12は、分離ロール22及びガイドロール45でガラスシート11と分離されるまで、ガラスシート11における第1及び第2の成形材料の層15、16を形成する面を保護する。 The unwinding roll 21 is equipped with a glass roll formed by, for example, stacking the glass sheet 11 and the two glass protective sheets 12 in a spiral shape. The glass protective sheet 12 protects the surfaces of the glass sheet 11 on which the layers 15 and 16 of the first and second molding materials are formed until the glass sheet 11 is separated from the glass sheet 11 by the separation roll 22 and the guide roll 45.
 尚、巻き出しロール21に装着されるガラスロールは、ガラスシート11及び1枚のガラス保護シート12を重ねて渦巻状に巻回してなるものでもよい。 In addition, the glass roll attached to the unwinding roll 21 may be formed by stacking the glass sheet 11 and one glass protective sheet 12 and winding them in a spiral shape.
 巻き取りロール26は、積層シート19A及び2枚の凹凸保護シート13を重ねて巻き取り、製品ロールを作製する。 The take-up roll 26 rolls up the laminated sheet 19A and the two uneven protective sheets 13 to produce a product roll.
 インプリント装置10Aは、例えば光インプリント装置であって、第1及び第2の塗布器31、32、第1及び第2のモールド33、34、光源35、複数(例えば2本)の回転ロール41、42、複数(例えば2本)のニップロール43、44、ガイドロール45、引き出しロール46、及び複数(例えば4本)の補助ロール51~54をさらに備える。 The imprint apparatus 10A is, for example, an optical imprint apparatus, and includes first and second applicators 31, 32, first and second molds 33, 34, a light source 35, and a plurality of (for example, two) rotating rolls. 41, 42, a plurality (for example, two) of nip rolls 43, 44, a guide roll 45, a drawing roll 46, and a plurality (for example, four) of auxiliary rolls 51 to 54.
 第1及び第2の塗布器31、32は、ガラス保護シート12の分離後に、ガラスシート11の両側に成形材料を塗布し、図7に示すように第1及び第2の成形材料の層15、16を形成する。第1及び第2の成形材料の層15、16は、光硬化性樹脂を含む。 The first and second applicators 31 and 32 apply the molding material on both sides of the glass sheet 11 after the glass protective sheet 12 is separated, and the first and second molding material layers 15 as shown in FIG. , 16 are formed. The first and second molding material layers 15 and 16 include a photocurable resin.
 第1のモールド33は、第1の成形材料の層15の表面に転写される凹凸パターンを有する。同様に、第2のモールド34は、第2の成形材料の層16の表面に転写される凹凸パターンを有する。第1及び第2のモールド33、34は、モールド表面と成形材料との離型性を高めるため、離型処理が施されたものであってよい。 The first mold 33 has a concavo-convex pattern transferred to the surface of the first molding material layer 15. Similarly, the second mold 34 has an uneven pattern that is transferred to the surface of the layer 16 of the second molding material. The first and second molds 33 and 34 may be subjected to a mold release process in order to improve the mold release property between the mold surface and the molding material.
 第1のモールド33は、エンドレスベルト状であって、複数の回転ロール41、42、及び複数の補助ロール51、52に架け回され、輪転される。尚、複数の補助ロール51、52の全部又は一部が無くてもよい。 The first mold 33 has an endless belt shape, is wound around a plurality of rotating rolls 41 and 42 and a plurality of auxiliary rolls 51 and 52, and is rotated. Note that all or some of the plurality of auxiliary rolls 51 and 52 may be omitted.
 第2のモールド34は、エンドレスベルト状であって、複数のニップロール43、44、及び複数の補助ロール53、54に架け回され、輪転される。尚、補助ロール53、54は、無くてもよい。 The second mold 34 has an endless belt shape, and is wound around a plurality of nip rolls 43 and 44 and a plurality of auxiliary rolls 53 and 54, and is rotated. The auxiliary rolls 53 and 54 may be omitted.
 光源35は、ガラスシート11と第1のモールド33との間に挟み込まれた第1の成形材料の層15に光を照射し、第1の成形材料の層15を硬化させる。また、光源35は、ガラスシート11と第2のモールド34との間に挟み込まれた第2の成形材料の層16に光を照射し、第2の成形材料の層16を硬化させる。 The light source 35 irradiates light to the first molding material layer 15 sandwiched between the glass sheet 11 and the first mold 33 to cure the first molding material layer 15. Further, the light source 35 irradiates the second molding material layer 16 sandwiched between the glass sheet 11 and the second mold 34 to cure the second molding material layer 16.
 光源35から出射した光は、透明な第2のモールド34、第2の成形材料の層16、及び透明なガラスシート11をこの順で透過して、第1の成形材料の層15に入射する。尚、光源35から出射した光は、透明な第1のモールド33、第1の成形材料の層15、及び透明なガラスシート11をこの順で透過して、第2の成形材料の層16に入射してもよい。また、複数の光源が用いられてもよい。 The light emitted from the light source 35 passes through the transparent second mold 34, the second molding material layer 16, and the transparent glass sheet 11 in this order, and enters the first molding material layer 15. . The light emitted from the light source 35 passes through the transparent first mold 33, the first molding material layer 15, and the transparent glass sheet 11 in this order, and enters the second molding material layer 16. It may be incident. A plurality of light sources may be used.
 一組の回転ロール41及びニップロール43は、図8に示すように、ニップロール43側から、第2のモールド34、第2の成形材料の層16、ガラスシート11、第1の成形材料の層15、及び第1のモールド33をこの順で挟んで送り出す。 As shown in FIG. 8, the pair of rotating rolls 41 and nip rolls 43 includes, from the nip roll 43 side, the second mold 34, the second molding material layer 16, the glass sheet 11, and the first molding material layer 15. , And the first mold 33 is fed in this order.
 図9に示すように、ガラスシート11及び第1のモールド33は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、ガラスシート11の張力及び第1のモールド33の張力で第1の成形材料の層15を挟み込み、第1の成形材料の層15と一体的に移動する。その間に、第1の成形材料の層15は光源35からの光を受けて徐々に硬化し、第1の凹凸層17となる。ガラスシート11の張力の方向はガラスシート11の移動方向である。また、第1のモールド33の張力の方向は、第1のモールド33の移動方向(輪転方向)である。 As shown in FIG. 9, the glass sheet 11 and the first mold 33 are inserted between the pair of rotating rolls 41 and the nip roll 43, and then between the other pair of rotating rolls 42 and the nip roll 44. The first molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the first mold 33 and moved integrally with the first molding material layer 15. Meanwhile, the first molding material layer 15 is gradually cured by receiving light from the light source 35, and becomes the first uneven layer 17. The direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11. Further, the direction of tension of the first mold 33 is the moving direction (rotation direction) of the first mold 33.
 同様に、ガラスシート11及び第2のモールド34は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、ガラスシート11の張力及び第2のモールド34の張力で第2の成形材料の層16を挟み込み、第2の成形材料の層16と一体的に移動する。その間に、第2の成形材料の層16は光源35からの光を受けて徐々に硬化し、第2の凹凸層18となる。ガラスシート11の張力の方向はガラスシート11の移動方向である。また、第2のモールド34の張力の方向は、第2のモールド34の移動方向(輪転方向)である。 Similarly, after the glass sheet 11 and the second mold 34 are inserted between the pair of rotating rolls 41 and the nip roll 43, the glass sheet 11 and the second mold 34 are pulled out from between the other pair of rotating rolls 42 and the nip roll 44. During this time, the second molding material layer 16 is sandwiched by the tension of the glass sheet 11 and the tension of the second mold 34, and moves together with the second molding material layer 16. In the meantime, the second molding material layer 16 is gradually cured by receiving light from the light source 35 to become the second uneven layer 18. The direction of the tension of the glass sheet 11 is the moving direction of the glass sheet 11. The direction of the tension of the second mold 34 is the moving direction (rotation direction) of the second mold 34.
 他の一組の回転ロール42及びニップロール44は、ニップロール44側から、第2のモールド34、第2の凹凸層18、ガラスシート11、第1の凹凸層17、及び第1のモールド33を挟んで送り出す。 Another set of rotating rolls 42 and nip rolls 44 sandwich the second mold 34, the second uneven layer 18, the glass sheet 11, the first uneven layer 17, and the first mold 33 from the nip roll 44 side. Send out.
 ガイドロール45は、ガラスロールから繰り出されるガラスシート11をガラスロールのロール径に応じて方向転換し、ガラスシート11を平坦な状態で回転ロール41とニップロール43との間に挿入する。ガラスシート11の方向転換は、ガラスシート11をガイドロール45に沿って曲げ変形させることで行われる。 The guide roll 45 changes the direction of the glass sheet 11 fed from the glass roll according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the rotating roll 41 and the nip roll 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
 引き出しロール46は、回転ロール42とニップロール44との間から積層シート19Aを平坦な状態で引き出し、製品ロールのロール径に応じて積層シート19Aを方向転換する。積層シート19Aの方向転換は、積層シート19Aを引き出しロール46に沿って曲げ変形させることで行われる。 The drawer roll 46 pulls out the laminated sheet 19A from between the rotary roll 42 and the nip roll 44 in a flat state, and changes the direction of the laminated sheet 19A according to the roll diameter of the product roll. The direction change of the laminated sheet 19 </ b> A is performed by bending and deforming the laminated sheet 19 </ b> A along the pulling roll 46.
 次に、上記構成のインプリント装置10Aの動作(インプリント方法)について説明する。インプリント装置10Aの各種動作は、マイクロコンピュータ等で構成されるコントローラによる制御下で行われる。以下の説明では、便宜上、主にガラスシート11の一部分に着目して、インプリント装置10Aの各種動作を説明する。 Next, the operation (imprint method) of the imprint apparatus 10A having the above configuration will be described. Various operations of the imprint apparatus 10A are performed under the control of a controller configured by a microcomputer or the like. In the following description, for convenience, various operations of the imprint apparatus 10 </ b> A will be described mainly focusing on a part of the glass sheet 11.
 先ず、巻き出しロール21が回転し、ガラスロールからガラスシート11及びガラス保護シート12が連続的に繰り出される。ガラスシート11及びガラス保護シート12は、分離ロール22及びガイドロール45の間を通過することにより分離される。 First, the unwinding roll 21 rotates, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roll. The glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roll 22 and the guide roll 45.
 ガイドロール45は、ガラスロールのロール径に応じてガラスシート11を方向転換し、ガラスシート11を平坦な状態で一組の回転ロール41とニップロール43との間に挿入する。ガラスシート11の方向転換は、ガラスシート11をガイドロール45に沿って曲げ変形させることで行われる。 The guide roll 45 changes the direction of the glass sheet 11 according to the roll diameter of the glass roll, and inserts the glass sheet 11 between the pair of rotating rolls 41 and nip rolls 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roll 45.
 次いで、図7に示すように、第1及び第2の塗布器31、32がガラスシート11の両側に成形材料を塗布し、第1及び第2の成形材料の層15、16を形成する。 Next, as shown in FIG. 7, the first and second applicators 31 and 32 apply the molding material on both sides of the glass sheet 11 to form the first and second molding material layers 15 and 16.
 次いで、図8に示すように、一組の回転ロール41及びニップロール43が、ニップロール43側から、第2のモールド34、第2の成形材料の層16、ガラスシート11、第1の成形材料の層15、及び第1のモールド33をこの順で挟んで送り出す。 Next, as shown in FIG. 8, the pair of rotating rolls 41 and nip rolls 43 are arranged from the nip roll 43 side with the second mold 34, the second molding material layer 16, the glass sheet 11, and the first molding material. The layer 15 and the first mold 33 are sandwiched in this order and sent out.
 図6に示すように、ガラスシート11及び第1の成形材料の層15は、平坦な状態で、一組の回転ロール41とニップロール43との間に挿入される。一方、第1のモールド33は、第1の成形材料の層15との間に空気が噛み込まないように回転ロール41に沿って曲げ変形されながら、回転ロール41とニップロール43との間に挿入され、第1の成形材料の層15と密接する。 As shown in FIG. 6, the glass sheet 11 and the first molding material layer 15 are inserted between a pair of rotating rolls 41 and nip rolls 43 in a flat state. On the other hand, the first mold 33 is inserted between the rotary roll 41 and the nip roll 43 while being bent and deformed along the rotary roll 41 so that air is not caught between the first molding material layer 15. And is in intimate contact with the first molding material layer 15.
 図9に示すように、ガラスシート11及び第1のモールド33は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、ガラスシート11の張力及び第1のモールド33の張力で第1の成形材料の層15を挟み込み、第1の成形材料の層15と一体的に移動する。その間に、第1の成形材料の層15は光源35からの光を受けて徐々に硬化し、第1の凹凸層17となる。 As shown in FIG. 9, the glass sheet 11 and the first mold 33 are inserted between the pair of rotating rolls 41 and the nip roll 43, and then between the other pair of rotating rolls 42 and the nip roll 44. The first molding material layer 15 is sandwiched by the tension of the glass sheet 11 and the tension of the first mold 33 and moved integrally with the first molding material layer 15. Meanwhile, the first molding material layer 15 is gradually cured by receiving light from the light source 35, and becomes the first uneven layer 17.
 また、図6に示すように、ガラスシート11及び第2の成形材料の層16は、平坦な状態で、一組の回転ロール41とニップロール43との間に挿入される。一方、第2のモールド34は、第2の成形材料の層16との間に空気が噛み込まないようにニップロール43に沿って曲げ変形されながら、回転ロール41とニップロール43との間に挿入され、第2の成形材料の層16と密接する。 Further, as shown in FIG. 6, the glass sheet 11 and the second molding material layer 16 are inserted between the pair of rotating rolls 41 and the nip rolls 43 in a flat state. On the other hand, the second mold 34 is inserted between the rotating roll 41 and the nip roll 43 while being bent and deformed along the nip roll 43 so that air does not get caught between the second molding material layer 16. , In close contact with the second molding material layer 16.
 図9に示すように、ガラスシート11及び第2のモールド34は、一組の回転ロール41とニップロール43との間に挿入された後、他の一組の回転ロール42とニップロール44との間から引き出されるまでの間、ガラスシート11の張力及び第2のモールド34の張力で第2の成形材料の層16を挟み込み、第2の成形材料の層16と一体的に移動する。その間に、第2の成形材料の層16は光源35からの光を受けて徐々に硬化し、第2の凹凸層18となる。 As shown in FIG. 9, the glass sheet 11 and the second mold 34 are inserted between the pair of rotating rolls 41 and the nip rolls 43, and then between the other pair of rotating rolls 42 and the nip rolls 44. Until it is pulled out, the second molding material layer 16 is sandwiched by the tension of the glass sheet 11 and the tension of the second mold 34 and moves integrally with the second molding material layer 16. In the meantime, the second molding material layer 16 is gradually cured by receiving light from the light source 35 to become the second uneven layer 18.
 次いで、回転ロール42及びニップロール44は、ニップロール44側から、第2のモールド34、第2の凹凸層18、ガラスシート11、第1の凹凸層17、及び第1のモールド33を挟んで送り出す。 Next, the rotating roll 42 and the nip roll 44 are fed out from the nip roll 44 side with the second mold 34, the second uneven layer 18, the glass sheet 11, the first uneven layer 17, and the first mold 33 interposed therebetween.
 ガラスシート11及び第1の凹凸層17は、平坦な状態のまま回転ロール42とニップロール44との間から引き出される。一方、第1のモールド33は、第1の凹凸層17と円滑に分離するように回転ロール42に沿って曲げ変形される。 The glass sheet 11 and the first concavo-convex layer 17 are drawn out from between the rotating roll 42 and the nip roll 44 in a flat state. On the other hand, the first mold 33 is bent and deformed along the rotary roll 42 so as to be smoothly separated from the first uneven layer 17.
 ガラスシート11及び第2の凹凸層18は、平坦な状態のまま回転ロール42とニップロール44との間から引き出される。一方、第2のモールド34は、第2の凹凸層18と円滑に分離するようにニップロール44に沿って曲げ変形される。 The glass sheet 11 and the second concavo-convex layer 18 are pulled out from between the rotating roll 42 and the nip roll 44 in a flat state. On the other hand, the second mold 34 is bent and deformed along the nip roll 44 so as to be smoothly separated from the second uneven layer 18.
 このようにして、図10に示すように、ガラスシート11及び第1及び第2の凹凸層17、18を含む積層シート19Aが得られる。 Thus, as shown in FIG. 10, a laminated sheet 19A including the glass sheet 11 and the first and second uneven layers 17 and 18 is obtained.
 次いで、引き出しロール46及び重ね合わせロール25が、2つの保護シートロールから繰り出される凹凸保護シート13と、積層シート19Aとを重ね合せる。凹凸保護シート13は、樹脂フィルム、紙等で構成される。2枚の凹凸保護シート13は、第1及び第2の凹凸層17、18の両方を覆い、第1及び第2の凹凸層17、18に異物(例えばホコリ)や傷が付くのを防止する。 Next, the pull-out roll 46 and the superimposing roll 25 superimpose the uneven protective sheet 13 fed out from the two protective sheet rolls and the laminated sheet 19A. The unevenness protection sheet 13 is composed of a resin film, paper, or the like. The two concavo-convex protective sheets 13 cover both the first and second concavo- convex layers 17 and 18, and prevent the first and second concavo- convex layers 17 and 18 from being contaminated (for example, dust) or scratches. .
 引き出しロール46は、回転ロール42とニップロール44との間から積層シート19Aを平坦な状態で引き出し、製品ロールのロール径に応じて積層シート19Aを方向転換する。 The drawer roll 46 pulls out the laminated sheet 19A from between the rotary roll 42 and the nip roll 44 in a flat state, and changes the direction of the laminated sheet 19A according to the roll diameter of the product roll.
 次いで、巻き取りロール26が積層シート19A及び積層シート19Aを挟む2枚の凹凸保護シート13を重ねて巻き取り、製品ロールを作製する。 Next, the winding roll 26 overlaps and winds the laminated sheet 19A and the two uneven protective sheets 13 sandwiching the laminated sheet 19A to produce a product roll.
 尚、凹凸保護シート13の数は1枚であってもよい。例えば、渦巻き状に巻回されるときに積層シート19Aにおける径方向外側層となる第1の凹凸層17のみに凹凸保護シート13が重ねられてよい。一枚の凹凸保護シート13が第1及び第2の凹凸層17、18の両方を保護でき、製品ロールのロール径が小さくなり、製品ロールの保管が容易になる。また、渦巻き状に巻回されるときに積層シート19Aにおける内側層となる第2の凹凸層18のみに凹凸保護シート13が重ねられていてもよい。この場合、製品ロールは、専用の保護シートで覆われて保管される。 In addition, the number of the uneven protective sheets 13 may be one. For example, the concave / convex protective sheet 13 may be stacked only on the first concave / convex layer 17 serving as the radially outer layer in the laminated sheet 19 </ b> A when wound in a spiral. One uneven protective sheet 13 can protect both the first and second uneven layers 17 and 18, the roll diameter of the product roll is reduced, and the product roll can be easily stored. Moreover, the uneven | corrugated protective sheet 13 may be overlaid only on the 2nd uneven | corrugated layer 18 used as the inner layer in the lamination sheet 19A, when winding in a spiral shape. In this case, the product roll is covered and stored with a dedicated protective sheet.
 以上説明したように、本実施形態によれば、第1の実施形態と同様に、図6に示すようにガラスシート11が平坦な状態のまま複数組の回転ロール41、42とニップロール43、44との間を通過する。そのため、第1及び第2のモールド33、34の凹凸パターンの転写時や、第1及び第2のモールド33、34と第1及び第2の凹凸層17、18との分離時に、脆いガラスシート11が平坦に保持されているので、ガラスシート11の破損を抑制できる。 As described above, according to this embodiment, similarly to the first embodiment, a plurality of sets of rotating rolls 41 and 42 and nip rolls 43 and 44 with the glass sheet 11 in a flat state as shown in FIG. Pass between. Therefore, a brittle glass sheet at the time of transferring the concavo-convex pattern of the first and second molds 33 and 34, or at the time of separation between the first and second molds 33 and 34 and the first and second concavo- convex layers 17 and 18. Since 11 is held flat, breakage of the glass sheet 11 can be suppressed.
 また、本実施形態によれば、ガラスシート11を挟んで互いに反対側に第1及び第2の成形材料の層15、16が形成されるので、成形材料の硬化時にガラスシート11が反りにくい。また、第1の凹凸層17と第1のモールド33とを分離する力、及び第2の凹凸層18と第2のモールド34とを分離する力が互いに反対方向に作用するので、ガラスシート11の状態が安定化する。また、第1の凹凸層17と第2の凹凸層18とが同時に形成されるので、別々に形成される場合と異なり、位置合わせが不要である。 Also, according to the present embodiment, the first and second molding material layers 15 and 16 are formed on the opposite sides of the glass sheet 11, so that the glass sheet 11 is unlikely to warp when the molding material is cured. Moreover, since the force which isolate | separates the 1st uneven | corrugated layer 17 and the 1st mold 33, and the force which isolate | separates the 2nd uneven | corrugated layer 18 and the 2nd mold 34 act on mutually opposite directions, the glass sheet 11 The state of becomes stable. Moreover, since the 1st uneven | corrugated layer 17 and the 2nd uneven | corrugated layer 18 are formed simultaneously, unlike the case where it forms separately, alignment is unnecessary.
 以上、インプリント方法、及びインプリント装置を第1~第2実施形態で説明したが、本発明は上記実施形態に制限されない。特許請求の範囲に記載された本発明の要旨の範囲内において、種々の変形、変更が可能である。 Although the imprint method and the imprint apparatus have been described in the first and second embodiments, the present invention is not limited to the above embodiment. Various modifications and changes are possible within the scope of the gist of the present invention described in the claims.
 例えば、上記実施形態のインプリント装置は、ロール・ツー・ロール方式であるが、本発明はこれに限定されない。例えば、インプリント装置は、積層シートを巻き取りロールに巻き取らずに、切断機で所定のサイズに切断してもよい。巻き取りロールで積層シートを巻き取らない場合、積層シートは引き出しロールに沿って曲げ変形されなくてもよい。また、インプリント装置は、ガラスロールから繰り出されるガラスシート上に凹凸層を形成する代わりに、ガラス成形装置(例えばフロート成形装置、フュージョン成形装置、リドロー成形装置等)から連続的に供給されるガラスシート上に凹凸層を形成してもよい。ガラスシートがガラス成形装置から供給される場合、ガラスシートはガイドロールに沿って曲げ変形されなくてもよい。 For example, the imprint apparatus of the above embodiment is a roll-to-roll system, but the present invention is not limited to this. For example, the imprint apparatus may cut the laminated sheet into a predetermined size with a cutting machine without winding the laminated sheet on a winding roll. When the laminated sheet is not taken up by the take-up roll, the laminated sheet may not be bent and deformed along the drawing roll. Moreover, the imprint apparatus is a glass that is continuously supplied from a glass forming apparatus (for example, a float forming apparatus, a fusion forming apparatus, a redraw forming apparatus, etc.) instead of forming an uneven layer on a glass sheet fed from a glass roll. An uneven layer may be formed on the sheet. When the glass sheet is supplied from the glass forming apparatus, the glass sheet may not be bent and deformed along the guide roll.
 また、上記実施形態のインプリント装置は、光インプリント装置であるが、熱インプリント装置であってもよい。この場合、成形材料は、光硬化性樹脂の代わりに、熱可塑性樹脂を含む。熱可塑性樹脂には、熱インプリント法に用いられる一般的なものが使用でき、例えばアクリル樹脂、ポリカーボネート樹脂、オレフィン系樹脂、ポリエステル系樹脂等が挙げられる。熱可塑性樹脂は、シートの形態で用意されガラスシート上に貼り付けてもよいし、溶液の形態で用意されガラスシート上に塗布し、乾燥してもよい。また、熱可塑性樹脂は、加熱軟化したうえでガラスシート上に塗布して冷却してもよい。熱インプリント法では、熱可塑性樹脂を含む成形材料の層を加熱により軟化し、軟化した成形材料の層の表面にモールドを押し付け、成形材料の層を冷却して固化させることで、凹凸層を形成する。加熱源としては、加熱光を照射する光源(例えばハロゲンランプ、レーザ)、ヒータ等が用いられる。加熱温度は、熱可塑性樹脂のガラス転移温度以上である。モールドを押し付ける工程と、成形材料の層を加熱する工程とは、どちらの工程が先であってもよく、同時に行ってもよい。モールドを加熱することで成形材料の層を加熱してもよい。 The imprint apparatus according to the above embodiment is an optical imprint apparatus, but may be a thermal imprint apparatus. In this case, the molding material contains a thermoplastic resin instead of the photocurable resin. As the thermoplastic resin, a general resin used in the thermal imprinting method can be used, and examples thereof include an acrylic resin, a polycarbonate resin, an olefin resin, and a polyester resin. The thermoplastic resin may be prepared in the form of a sheet and affixed on the glass sheet, or may be prepared in the form of a solution and applied onto the glass sheet and dried. In addition, the thermoplastic resin may be softened by heating and then coated on a glass sheet and cooled. In the thermal imprint method, a concavo-convex layer is formed by softening a layer of a molding material containing a thermoplastic resin by heating, pressing the mold against the surface of the softened molding material layer, and cooling and solidifying the molding material layer. Form. As the heating source, a light source (for example, a halogen lamp or a laser) that emits heating light, a heater, or the like is used. The heating temperature is equal to or higher than the glass transition temperature of the thermoplastic resin. Either the step of pressing the mold and the step of heating the layer of the molding material may be performed first or simultaneously. The layer of molding material may be heated by heating the mold.
 また、上記実施形態のガラスロールは、ガラスシートとガラス保護シートとを重ねて渦巻き状に巻回してなるものであるが、ガラスシートのみを渦巻き状に巻回してなるものであってもよい。この場合、分離ロール及び回収ロールは不要である。 Moreover, although the glass roll of the said embodiment overlaps a glass sheet and a glass protective sheet and is wound spirally, it may be formed by winding only a glass sheet spirally. In this case, a separation roll and a collection roll are not necessary.
 また、上記実施形態の製品ロールは、積層シートと凹凸保護シートとを重ねて渦巻き状に巻回してなるものであるが、積層シートのみを渦巻き状に巻回してなるものであってもよい。この場合、繰り出しロール及び重ね合わせロールは不要である。 In addition, the product roll of the above embodiment is formed by stacking the laminated sheet and the uneven protective sheet and winding them in a spiral shape, but it may be formed by winding only the laminated sheet in a spiral shape. In this case, the feeding roll and the overlapping roll are not necessary.
 また、上記実施形態の塗布器は、ガラスシート上に成形材料を塗布するが、モールド上に成形材料を塗布してもよい。成形材料の層は、転写工程でガラスシートとモールドとの間に挟み込まれ、モールドの凹凸パターンが成形材料の層の表面に転写する。 In the applicator of the above embodiment, the molding material is applied on the glass sheet, but the molding material may be applied on the mold. The layer of the molding material is sandwiched between the glass sheet and the mold in the transfer process, and the uneven pattern of the mold is transferred to the surface of the layer of the molding material.
 本出願は、2012年7月10日に日本国特許庁に出願された特願2012-154509号に基づく優先権を主張するものであり、特願2012-154509号の全内容を本出願に援用する。 This application claims priority based on Japanese Patent Application No. 2012-154509 filed with the Japan Patent Office on July 10, 2012. The entire contents of Japanese Patent Application No. 2012-154509 are incorporated herein by reference. To do.
10 インプリント装置
11 ガラスシート
15 成形材料の層(第1の成形材料の層)
16 第2の成形材料の層
17 凹凸層(第1の凹凸層)
18 第2の凹凸層
33 モールド(第1のモールド)
34 第2のモールド
41、42 回転ロール
43、44 ニップロール
DESCRIPTION OF SYMBOLS 10 Imprint apparatus 11 Glass sheet 15 Molding material layer (1st molding material layer)
16 Second molding material layer 17 Concavity and convexity layer (first concavity and convexity layer)
18 Second uneven layer 33 Mold (first mold)
34 Second mold 41, 42 Rotating roll 43, 44 Nip roll

Claims (6)

  1.  ガラスシートを平坦な状態で複数組の回転ロールとニップロールとの間を通過させると共に、複数の前記回転ロールに架け回されるエンドレスベルト状のモールドを輪転させる工程を有し、
     前記ガラスシート及び前記モールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、成形材料の層を挟み込み、該成形材料の層に前記モールドの凹凸パターンが転写するインプリント方法。
    Passing the glass sheet between a plurality of sets of rotating rolls and nip rolls in a flat state, and rotating the endless belt-shaped molds wound around the plurality of rotating rolls,
    The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, An imprint method in which an uneven pattern of the mold is transferred to a layer of the molding material.
  2.  ガラスシートを平坦な状態で複数組の回転ロールとニップロールとの間を通過させると共に、複数の前記回転ロールに架け回されるエンドレスベルト状の第1のモールドを輪転させ、複数の前記ニップロールに架け回されるエンドレスベルト状の第2のモールドを輪転させる工程を有し、
     前記ガラスシート及び前記第1のモールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、第1の成形材料の層を挟み込み、該第1の成形材料の層に前記第1のモールドの凹凸パターンが転写し、
     前記ガラスシート及び前記第2のモールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、第2の成形材料の層を挟み込み、該第2の成形材料の層に前記第2のモールドの凹凸パターンが転写するインプリント方法。
    The glass sheet is passed between a plurality of sets of rotating rolls and nip rolls in a flat state, and the endless belt-shaped first mold wound around the plurality of rotating rolls is rotated to hang on the plurality of nip rolls. Rotating the endless belt-shaped second mold to be rotated,
    The glass sheet and the first mold are inserted between a pair of rotating rolls and nip rolls until being drawn from between another pair of rotating rolls and nip rolls. Sandwiching a layer of material, the uneven pattern of the first mold is transferred to the layer of the first molding material,
    The glass sheet and the second mold are inserted between the pair of rotating rolls and the nip rolls until being drawn from between the other pair of rotating rolls and the nip rolls. An imprint method in which a layer of material is sandwiched and an uneven pattern of the second mold is transferred to the layer of the second molding material.
  3.  ガラスロールからガラスシートを繰り出す工程をさらに有し、
     前記ガラスロールから繰り出されたガラスシートを平坦な状態で複数組の回転ロールとニップロールとの間を通過させる、請求項1又は2に記載のインプリント方法。
    The method further includes a step of drawing out the glass sheet from the glass roll,
    The imprint method according to claim 1 or 2, wherein the glass sheet fed from the glass roll is passed between a plurality of sets of rotating rolls and nip rolls in a flat state.
  4.  ガラスシートを平坦な状態で通過させる回転ロール及びニップロールの組を複数組と、
     複数の前記回転ロールに架け回され、輪転されるエンドレスベルト状のモールドとを備え、
     前記ガラスシート及び前記モールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、成形材料の層を挟み込み、該成形材料の層に前記モールドの凹凸パターンが転写するインプリント装置。
    Multiple sets of rotating rolls and nip rolls that allow the glass sheet to pass in a flat state,
    An endless belt-shaped mold that is wound around a plurality of the rotating rolls and rotated,
    The glass sheet and the mold sandwich a layer of molding material from being inserted between a pair of rotating rolls and nip rolls until being drawn out between the other set of rotating rolls and nip rolls, An imprint apparatus in which a concave / convex pattern of the mold is transferred to a layer of the molding material.
  5.  ガラスシートを平坦な状態で通過させる回転ロール及びニップロールの組を複数組と、
     複数の前記回転ロールに架け回され、輪転されるエンドレスベルト状の第1のモールドと、
     複数の前記ニップロールに架け回され、輪転されるエンドレスベルト状の第2のモールドとを備え、
     前記ガラスシート及び前記第1のモールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、第1の成形材料の層を挟み込み、該第1の成形材料の層に前記第1のモールドの凹凸パターンが転写し、
     前記ガラスシート及び前記第2のモールドは、一組の回転ロールとニップロールとの間に挿入されてから、他の一組の回転ロールとニップロールとの間から引き出されるまでの間、第2の成形材料の層を挟み込み、該第2の成形材料の層に前記第2のモールドの凹凸パターンが転写するインプリント装置。
    Multiple sets of rotating rolls and nip rolls that allow the glass sheet to pass in a flat state,
    An endless belt-shaped first mold that is wound around and rotated around the plurality of rotating rolls;
    An endless belt-shaped second mold that is wound around and rotated around the plurality of nip rolls,
    The glass sheet and the first mold are inserted between a pair of rotating rolls and nip rolls until being drawn from between another pair of rotating rolls and nip rolls. Sandwiching a layer of material, the uneven pattern of the first mold is transferred to the layer of the first molding material,
    The glass sheet and the second mold are inserted between the pair of rotating rolls and the nip rolls until being drawn from between the other pair of rotating rolls and the nip rolls. An imprint apparatus in which a layer of material is sandwiched and an uneven pattern of the second mold is transferred to the layer of second molding material.
  6.  ガラスロールを装着する巻き出しロールをさらに備え、
     前記ガラスロールから繰り出されるガラスシートを平坦な状態で複数組の回転ロールとニップロールとの間を通過させる、請求項4又は5に記載のインプリント装置。
    Further equipped with an unwinding roll to which a glass roll is attached,
    The imprint apparatus according to claim 4 or 5, wherein the glass sheet fed from the glass roll is passed between a plurality of sets of rotating rolls and nip rolls in a flat state.
PCT/JP2013/068430 2012-07-10 2013-07-04 Imprint method, and imprinting device WO2014010516A1 (en)

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WO2016208353A1 (en) * 2015-06-23 2016-12-29 東レ株式会社 Method and apparatus for manufacturing surface-structured film
KR20180019064A (en) * 2015-06-23 2018-02-23 도레이 카부시키가이샤 Method and apparatus for manufacturing surface structure film
JPWO2016208353A1 (en) * 2015-06-23 2018-04-12 東レ株式会社 Method and apparatus for producing surface structure film
KR102454079B1 (en) * 2015-06-23 2022-10-14 도레이 카부시키가이샤 Manufacturing method and manufacturing apparatus of surface structure film
JP2017030160A (en) * 2015-07-29 2017-02-09 東芝機械株式会社 Apparatus for transferring pattern of film and method for transferring pattern of film
CN113573898A (en) * 2019-03-25 2021-10-29 二村化学株式会社 Method for producing thin-plate laminate having film-shaped resin layer

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