TW201505812A - Second mold to which irregular first mold pattern has been transferred, second mold manufacturing method, method for manufacturing article using second mold, optical panel manufacturing method and optical element manufacturing method - Google Patents

Abstract

A second mold to which an irregular first mold pattern has been transferred, wherein: the second mold has a substrate and an irregular layer, which is formed on the substrate and on which the irregular first mold pattern has been transferred; and the substrate comprises sheet glass.

Description

Second mold for transferring the concave-convex pattern of the first mold, method for producing the second mold, method for producing the article using the second mold, method for producing an optical panel, and method for producing an optical element Field of invention

The present invention relates to a second mold for transferring a concave-convex pattern of a first mold, a method for producing the second mold, a method for producing an article using the second mold, a method for producing an optical panel, and a method for producing an optical element.

Background of the invention

The imprint method is a method in which a molding material is interposed between a mold and a substrate, and a concavo-convex layer in which a concavo-convex pattern of a mold is transferred is formed on the substrate (see, for example, Patent Document 1). The mold may be a second mold that transfers the concave-convex pattern of the first mold by an imprint method. It is possible to reduce the frequency of use of the first mode. Since the second mold is produced by an imprint method, it has a base material and an uneven layer formed on the base material. The uneven pattern of the uneven layer is a pattern in which the concave-convex pattern of the first mold is reversed.

Prior technical literature Patent literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-313880

Summary of invention

Heretofore, the base material of the second mold is a resin sheet excellent in flexibility. Therefore, when the temperature changes, the size of the resin sheet varies greatly, and the dimensional change of the concave-convex pattern of the uneven layer formed on the resin sheet is also large.

The present invention has been made in view of the above problems, and a main object thereof is to provide a second mold which can reduce dimensional changes of a concavo-convex pattern which changes with temperature.

In order to solve the above problems, according to an aspect of the present invention, a second mold which is a second mold to which a concave-convex pattern of a first mold is transferred, which has a base material and is formed on the base material, can be provided. The uneven layer of the concave-convex pattern of the first mold is printed, and the base material includes a thin plate glass.

According to an aspect of the present invention, it is possible to provide a second mold which can reduce a dimensional change of a concavo-convex pattern which changes with temperature.

10‧‧‧1st model

12‧‧‧Rotating roller

14‧‧‧Rotating roller

20‧‧‧2nd mode

21‧‧‧Substrate

22‧‧‧Forming materials

23‧‧‧Uneven layer

30‧‧‧ Items (optical components)

31‧‧‧Substrate

32‧‧‧Forming materials

33‧‧‧Concave layer

40‧‧‧Laminated panels

41‧‧‧Filter substrate

42‧‧‧Liquid layer

43‧‧‧Array substrate

50‧‧‧Optical panel

52‧‧‧Next layer

1(a) to 1(d) are cross-sectional views showing a method of manufacturing a second mold according to an embodiment of the present invention.

2(a) to 2(d) are cross-sectional views showing a method of manufacturing an article using the second mold according to an embodiment of the present invention.

3(a) to 3(c) are cross-sectional views showing a method of manufacturing an optical panel according to an embodiment of the present invention.

Form for implementing the invention

Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In the drawings, the same or corresponding symbols are attached to the same or corresponding components, and the description is omitted.

Fig. 1 is a cross-sectional view showing a method of manufacturing a second mold according to an embodiment of the present invention. The second mold 20 is a mold to which the uneven pattern of the first mold 10 is transferred. The first mold 10 can be referred to as a master mold, and the second mold 20 can also be referred to as a child mold. The manufacturing method of the second mold 20 includes a step of preparing the first mold 10 (Fig. 1 (a)), a coating step (Fig. 1 (b)), a transfer step (Fig. 1 (c)), and a separation step ( Figure 1 (d)). Further, the steps of preparing the first mold 10 and the coating step may be performed at the same time or at the same time.

The first mold 10 has a concave-convex pattern on the surface. The first mold 10 is formed of, for example, tantalum, a hafnium oxide film, quartz glass, a resin, a metal, or the like. The first mold 10 is produced by, for example, photolithography, electron beam etching, or the like.

Further, although the first mold 10 of the present embodiment is produced by photolithography, electron beam etching, or the like, it may be embossed or electroformed according to a prototype produced by photolithography, electron beam etching, or the like. Law to make.

The first mold 10 may have a plate shape as shown in FIG. 1 or may have a ring shape. The endless belt mold is obtained by welding both end portions of a plate-shaped mold. The belt-shaped mold is suitable for continuous production.

In order to improve the demolding of the first mold 10 in the separation step (Fig. 1 (d)) Sex, can be applied to the surface of the mold release treatment. The mold release treatment may, for example, be a fluorine coating treatment or a enamel coating treatment.

In the coating step, a liquid molding material 22 is applied onto the substrate 21. Further, the molding material 22 may be applied to the first mold 10 in the coating step. The molding material 22 is sandwiched between the first mold 10 and the substrate 21 in the transfer step, regardless of which of the first mold 10 and the substrate 21 is applied.

The substrate 21 may be a substrate to which a surface treatment for improving the adhesion between the substrate 21 and the molding material 22 is applied. The surface treatment may, for example, be a primer treatment, an ozone treatment, a plasma etching treatment, or the like. The primer can be used: decane coupling agent, decazane, and the like.

The coating method of the molding material 22 may be a general coating method, and examples thereof include a die-casting coating method, a roll coating method, a gravure coating method, an inkjet printing method, a spray coating method, a spin coating method, a shower coating method, and a knife coating method. Dip coating method and the like.

In the transfer step, the molding material 22 is interposed between the first mold 10 and the substrate 21, and the uneven layer 23 on which the uneven pattern of the first mold 10 is transferred is formed on the substrate 21. In the uneven layer 23, the molding material 22 is cured in a state in which the molding material 22 is interposed between the first mold 10 and the substrate 21 . Here, the curing comprises hardening.

The forming material 22 is selected in accordance with the type of the imprint method. The types of imprinting methods include photo imprinting and hot imprinting.

Photoimprinting is a method of utilizing a photohardening reaction. In the case of the photoimprint method, the molding material 22 contains a photopolymerizable compound, and further contains a photopolymerization initiator as needed. The photopolymerizable compound may, for example, have a radical polymerization bond (for example, a carbon-carbon unsaturated double bond) and/or a cation in the molecule. A monomer, an oligomer, a reactive polymer or the like of an ionomer bond. The molding material 22 may further contain an unreacted polymer, a solvent, or the like.

In the case of the photoimprint method, the molding material 22 is prepared in a liquid state, and is applied onto the substrate 21 as shown in, for example, FIG. 1(b).

In the case of the photoimprint method, the molding material 22 is cured by irradiating light onto the molding material 22. Examples of the light used to cure the molding material 22 include ultraviolet light, visible light, infrared light, and the like.

In the case of the photoimprint method, at least one of the first mold 10 and the base material 21 sandwiching the molding material 22 is made of a light transmissive material. The light emitted from the light source may be irradiated to the molding material 22 through the transparent first mold 10, for example, or may be irradiated to the molding material 22 through the transparent substrate 21. As long as at least one of the substrate 21 and the first mold 10 is transparent, photoimprinting can be applied.

The photoimprint method can harden the molding material 22 at room temperature. Therefore, the strain due to the difference in linear expansion coefficient between the first mold 10 and the base material 21 is less likely to occur, and the transfer accuracy is good. Further, in order to promote the hardening reaction, the molding material 22 may be heated.

The hot stamping method can be roughly classified into a hot stamping method using a heat hardening reaction and a hot stamping method using a thermoplasticity of a material.

In the case of utilizing a thermosetting reaction, the molding material 22 contains a thermally polymerizable compound, and further contains a thermal polymerization initiator as needed. Examples of the thermally polymerizable compound include a monomer having a radical polymerization bond (for example, a carbon-carbon unsaturated double bond) and/or a cationic polymerization bond in a molecule, an oligomer, a reactive polymer, and the like. The forming material 22 may also further contain unreactive polymerization. Things, solvents, etc.

In the case of utilizing the thermosetting reaction, the molding material 22 is in a liquid state, and is applied to the substrate 21 as shown in, for example, FIG. 1(b).

In the case of utilizing the thermosetting reaction, the molding material 22 is cured by heating the molding material 22. As the heating source for heating the molding material 22, a light source (for example, a halogen lamp or a laser) that irradiates the heating light, an electric heater, or the like can be used. The electric heating device may heat the molding material 22, or may heat the molding material 22 via any of the first mold 10 and the base material 21.

On the other hand, in the case of utilizing the thermoplasticity of the material, the molding material 22 contains a thermoplastic resin. The thermoplastic resin is prepared in the form of a solution, and is applied onto the substrate 21 to be dried. Further, the thermoplastic resin may be applied to the substrate 21 to be cooled after being softened by heating. Further, the thermoplastic resin may be prepared in a sheet form and attached to the substrate 21.

When the thermal plasticity of the material is utilized, the uneven pattern of the first mold 10 is transferred to the molding material 22 which is softened by heating. The forming material 22 solidifies as the temperature becomes lower. As the heating source for heating the molding material 22, a light source (for example, a halogen lamp or a laser) that irradiates heating light, an electric heater, or the like can be used. The heating temperature of the molding material 22 is equal to or higher than the glass transition temperature of the thermoplastic resin.

In the transfer step, for example, one of the base materials 21 can be partially bent, and the base material 21 can be brought into contact with the first mold 10 with the molding material 22 interposed therebetween. Air easily escapes from between the first mold 10 and the substrate 21, and the inclusion of air can be suppressed, and the transfer accuracy can be improved. In order to prevent the inclusion of air, the transfer step can be carried out under a reduced pressure atmosphere.

In the transfer step, when a part of the substrate 21 is bent, the first mold 10 is preferably supported flat. It is suitable for the case where the first mold 10 is less likely to be bent than the base material 21. Moreover, it is also effective when it is intended to suppress damage of the first mold 10.

In the transfer step, a part of the substrate 21 is bent along the rotating roll 12 which is a pressure-bonding member that presses the base material 21 against the molding material 22. In this state, the rotating roller 12 moves relative to the first die 10, whereby the first die 10 and the base material 21 are slowly brought into contact with each other via the molding material 22.

In the transfer step, a part of the substrate 21 is caused to adhere to the rotating roller 12 by applying tension to the substrate 21, and is bent along the rotating roller 12. The radius of curvature of the curved portion of the base material 21 is easily constant, and the stress applied to the base material 21 is also likely to be constant.

The separation step separates the first mold 10 from the uneven layer 23. In the separation step, for example, the concave-convex layer 23 and the first mold 10 can be gradually separated while partially bending one of the base materials 21 on which the uneven layer 23 is formed. The force required for the separation is weak, and the damage of the first mold 10 or the breakage of the uneven layer 23 can be suppressed.

In the separating step, when a part of the substrate 21 is bent, the first mold 10 is preferably supported flat. It is suitable for the case where the first mold 10 is less likely to be bent than the base material 21. Moreover, it is also effective when it is intended to suppress damage of the first mold 10.

In the separation step, a part of the substrate 21 is bent along the rotating roll 12 which is a pressure-bonding member that presses the base material 21 against the uneven layer 23. In this state, the rotating roller 12 moves relative to the first die 10, whereby the uneven layer 23 and the first die 10 are gradually separated.

In the separation step, a part of the substrate 21 is caused to adhere to the rotating roller 12 by applying tension to the substrate 21, and is bent along the rotating roller 12. Substrate 21 The radius of curvature of the curved portion is easily fixed, and the stress applied to the substrate 21 is also easily fixed.

In this way, the substrate 21 can be obtained and formed on the substrate 21 The second mold 20 of the upper uneven layer 23 is formed. The uneven pattern of the uneven layer 23 is a pattern in which the uneven pattern of the first mold 10 is reversed.

Further, when the second mold 20 is manufactured, the temperature of the substrate 21 may be Variety. For example, when the hot stamping method is used to manufacture the second mold 20, the temperature of the substrate 21 rises or falls because heat treatment is performed. Further, when the photoimprint method is used for the production of the second mold 20, the temperature of the substrate 21 rises or falls because of the heat treatment for promoting the photohardening reaction. Further, in the photoimprint method, the temperature of the substrate 21 may increase due to light irradiation. As described above, when the temperature of the substrate 21 changes, the size of the substrate 21 also changes. When the temperature change of the substrate 21 is the same, the larger the size of the substrate 21, the larger the dimensional change of the substrate 21. The dimensional change of the substrate 21 is related to the dimensional change of the uneven layer 23 formed on the substrate 21.

Therefore, in the present embodiment, instead of using a resin sheet, A thin plate glass is used as the substrate 21. Thereby, the dimensional change of the substrate 21 caused by the temperature change can be reduced. The coefficient of linear expansion of the glass is smaller than the coefficient of linear expansion of the resin. Further, the heat shrinkage of the glass is also smaller than the heat shrinkage of the stretched resin sheet. Since the dimensional change of the substrate 21 due to temperature change can be reduced, the transfer accuracy of the uneven pattern when the second mold 20 is manufactured is good.

The method for forming the sheet glass as the substrate 21 can be as follows One type: floating method, melting down method, nozzle down method, and re-drawing method. also, Examples of the glass of the thin glass include an alkali-free glass, a borosilicate glass, a soda lime glass, a sorghum glass, and other oxide-based glass containing cerium oxide as a main component.

The linear expansion coefficient of the sheet glass as the substrate 21 is, for example, 0.5 × 10 ^-6 / ° C to 12 × 10 ^-6 / ° C, preferably 2 × 10 ^-6 / ° C to 10 × 10 ^-6 / ° C. Here, the "linear expansion coefficient" means an average linear expansion coefficient at 20 ° C to 300 ° C.

The linear expansion coefficient between the thin glass of the substrate 21 and the first mold 10 is preferably 50 × 10 ^-6 / ° C or less, more preferably 20 × 10 ^-6 / ° C or less.

The thickness of the thin plate glass as the substrate 21 is, for example, 0.3 mm. Next, it is preferably 0.2 mm or less, more preferably 0.1 mm or less, and more preferably 50 μm or less. Moreover, the thickness of the thin glass as the substrate 21 is preferably 0.1 μm or more, more preferably 1 μm or more, and still more preferably 5 μm or more. A thin plate glass having a plate thickness of 0.3 mm or less has good flexibility and can be bent in a transfer step or a separation step. When the sheet glass having a thickness of 0.3 mm or less is bent to have a radius of curvature of 200 mm, for example, it can be bent without being broken. However, when the thickness is more than 0.3 mm, when it is bent to a radius of curvature of 200 mm, there is a crack. .

Further, the base material 21 of the second mold 20 of the present embodiment is composed only of The thin plate glass is used, but it may contain a thin plate glass, and may further include a resin layer. When the base material 21 is formed only from the resin sheet, the dimensional change of the concave-convex pattern due to the temperature change may be small.

Figure 2 is a view showing a second mold using an embodiment of the present invention; A cross-sectional view of the manufacturing method of the product. The method for producing an article includes a step of preparing the second mold 20 (Fig. 2 (a)), a coating step (Fig. 2 (b)), a transfer step (Fig. 2 (c)), and a separation step (Fig. 2 (Fig. 2 d)). Further, in the step of preparing the second mold 20 and the coating step, which step may be performed first or simultaneously.

The second mold 20 has a concave-convex pattern on the surface. The second mold 20 can be as shown in FIG. 2 It is generally plate-shaped as shown, and may also be in the form of a ring. In order to improve the mold release property of the second mold 20 in the separation step (Fig. 2 (d)), it may be that a mold release process is applied. The mold release treatment may, for example, be a fluorine coating treatment or a enamel coating treatment.

Coating a liquid forming material on the substrate 31 in the coating step 32. Further, the molding material 32 may be applied to the second mold 20 in the coating step. The molding material 32 is applied to any of the second mold 20 and the base material 31, and may be sandwiched between the second mold 20 and the base material 31 in the transfer step. The molding material 32 may be a general material used for a photoimprint method or a thermal imprint method, and may be the same type of material as the molding material 22 used in the production of the second mold 20, or may be a different type of material.

The substrate 31 is selected from at least glass, resin, and metal. One type of material is formed, but from the viewpoint of transfer accuracy, it is preferable to form the glass having a small difference in linear expansion coefficient from the base material 21 of the second mold 20.

The base material 31 may be made of resin, metal, or the like in addition to glass. Formed, but preferably formed only of glass. The base material 31 can be formed from the same kind of glass as the base material 21 from the viewpoint of the difference in linear expansion coefficient between the base material 21 of the second mold 20 .

The substrate 31 may be provided with the substrate 31 and the forming material 32 A surface processor that closely follows the degree. Surface treatment can be exemplified by: primer Treatment, ozone treatment, plasma etching treatment, etc. The primer can be used: decane coupling agent, decazane, and the like.

In the transfer step, for example, the base material 31 and the second mold 20 can be brought into contact with each other while the one of the second molds 20 is partially bent while being separated by the molding material 32. Air easily escapes from between the second mold 20 and the substrate 31, and the inclusion of air can be suppressed, and the transfer accuracy can be improved. In order to prevent the inclusion of air, the transfer step can be carried out under a reduced pressure atmosphere.

In the transfer step, when a part of the second mold 20 is bent, the substrate 31 is preferably supported flat. Damage to the substrate 31 which is a part of the product can be suppressed.

In the transfer step, a part of the second mold 20 is bent along the rotating roll 14 which is a pressure-bonding member that presses the second mold 20 against the molding material 32. In this state, the rotating roller 14 moves relative to the base material 31, whereby the second mold 20 and the base material 31 are slowly brought into contact with each other via the molding material 32.

In the transfer step, a part of the second mold 20 is caused to adhere to the rotating roller 14 by applying tension to the second mold 20, and is bent along the rotating roller 14. The radius of curvature of the curved portion of the second die 20 is easily constant, and the stress applied to the second die 20 is also likely to be constant.

The separation step separates the second mold 20 from the uneven layer 33. In the separation step, for example, the second mold 20 and the uneven layer 33 can be gradually separated while the part of the second mold 20 is bent. The force required for the separation is weak, and the damage of the second mold 20 or the breakage of the uneven layer 33 can be suppressed.

In the separating step, when a part of the second mold 20 is bent, the article 30 is preferably supported flat. Damage to the article 30 can be suppressed.

In the separation step, a part of the second mold 20 will be written along the The second mold 20 is pressed against the rotating roller 14 of the pressure-bonding member of the molding material 32 to be bent. In this state, the rotating roller 14 moves relative to the base material 31, whereby the uneven layer 33 and the second mold 20 are gradually separated.

In the separation step, by applying tension to the second mold 20, the second is made A portion of the die 20 is attached to the rotating roller 14 and is bent along the rotating roller 14. The radius of curvature of the curved portion of the second die 20 is easily constant, and the stress applied to the second die 20 is also likely to be constant.

In this way, the substrate 31 can be obtained and formed on the substrate 31. An article (for example, an optical member) 30 of the upper uneven layer 33. The uneven pattern of the uneven layer 33 is a pattern in which the concave-convex pattern of the second mold 20 is reversed, and is the same pattern as the concave-convex pattern of the first mold 10.

In addition, when the article 30 is manufactured, sometimes the temperature of the second mold 20 will The size of the substrate 21 of the second mold 20 changes. The dimensional change of the substrate 21 is related to the dimensional change of the uneven layer 23 formed on the substrate 21.

Therefore, in the present embodiment, instead of using a resin sheet, A thin plate glass is used as the substrate 21. Thereby, the dimensional change of the substrate 21 caused by the temperature change can be reduced. The coefficient of linear expansion of the glass is smaller than the coefficient of linear expansion of the resin. Further, the heat shrinkage of the glass is also smaller than the heat shrinkage of the stretched resin sheet. Since the dimensional change of the substrate 21 due to temperature change can be reduced, the transfer precision of the uneven pattern at the time of manufacturing the article 30 is good.

The difference in linear expansion coefficient between the thin glass of the base material 21 of the second mold 20 and the base material 31 of the article 30 is preferably 50 × 10 ^-6 / ° C or less, and more preferably 20 × 10 ^-6 / ° C or less. good. As described above, the base material 31 of the article 30 is preferably formed of the same type of glass as the base material 21 from the viewpoint of the difference in linear expansion coefficient from the base material 21 of the second mold 20.

The article 30 manufactured using the second die 20 may, for example, be flat. An optical member such as a bean lens member, a moth-eye reflection preventing member, or a wire grid type polarizing member.

The uneven layer of the lentil lens member has a plurality of planes arranged on the plane The construction of a number of convex cylindrical lenses. Each of the stud lenses condenses the light of the image for the left eye to the left eye of the user, and condenses the light of the image for the right eye to the right eye of the user. The pitch of the stud lenses is several tens of μm to several hundreds of μm.

In addition, each of the stud lenses can also function to make light from the light source For the role of parallel light. At this time, a microlens may be arranged two-dimensionally instead of a cylindrical lens in which the ribs are arranged one-dimensionally.

The uneven layer of the moth-eye type reflection preventing member has a structure in which a plurality of tapered convex portions are protruded from the plane. The convex portions are, for example, periodically arranged in a hexagonal lattice shape, a quasi-hexagonal lattice shape, a square lattice shape, or a quasi-tetragonal lattice shape. The adjacent convex portions may be connected to each other or may be separated, or may be arranged such that the lower hem portions of the convex portions overlap. The pitch of the convex portions is set to be equal to or less than the wavelength of visible light. A too large wavelength range will reduce the light reflectivity.

The uneven layer of the wire-grid polarizing member has a strip-like structure in which a plurality of ridge portions are arranged on the plane with a space therebetween. The pitch of the ridge portions is set to be equal to or less than the wavelength of visible light. A metal wire is formed at the front end portion of each of the ridge portions. The metal wire is formed by, for example, vapor-depositing a metal material from an oblique upper side of the ridge portion. a plurality of metal wires that are vibrated in a direction parallel to the metal wire The polarized reflection of the electric field vector transmits polarized light having an electric field vector vibrating in a direction orthogonal to the metal line. Thereby, linear polarization can be obtained.

3 is a view showing the manufacture of an optical panel according to an embodiment of the present invention; A cross-sectional view of the method. The manufacturing method of the optical panel includes, for example, a step of preparing the optical member 30 (FIG. 3 (a)), a step of preparing the laminated panel 40 (FIG. 3 (b)), and a step of bonding the optical member 3 and the laminated panel 40 ( Figure 3 (c)).

As shown in FIG. 2, the optical member 30 is embossed using the second mold 20. A component made by law. As shown in FIGS. 2(d) and 3(a), the optical member 30 has a base material 31 and an uneven layer 33 formed on the base material 31.

As shown in FIG. 3(b), the laminated panel 40 includes a filter substrate 41, a liquid crystal layer 42, and an array substrate 43. The filter substrate 41 has a filter, a transparent electrode, and the like inside. The array substrate 43 has an active element such as a TFT, an electrode serving as a sub-pixel, and the like. The surface of the array substrate 43 opposite to the liquid crystal layer 42 and the surface of the filter substrate 41 opposite to the liquid crystal layer 42 can be bonded to a polarizing plate or an optical film for viewing angle correction.

As shown in FIG. 3(c), the optical member 30 is attached to, for example, the front surface (surface opposite to the backlight) of the laminated panel 40 via the adhesive layer 52, and is attached to the filter substrate 41, for example.

In this way, the optical panel 50 including the optical member 30 and the laminated panel 40 can be obtained. Further, the optical member 30 of the present embodiment is provided separately from the laminated panel 40, but may be provided as a part of the laminated panel 40. For example, the filter substrate or the array substrate may include an optical member.

Although the embodiment in which the second mode or the like of the concave-convex pattern of the first mold is transferred has been described above, the present invention is not limited to the above-described embodiment and the like. Various modifications and improvements can be made within the scope of the gist of the invention as described in the appended claims.

For example, the optical panel 50 of the above embodiment is a liquid crystal panel. However, it can also be an organic EL panel or an electronic paper. Further, the optical panel 50 of the above embodiment is an image display panel that displays an image, but may be an illumination panel that does not display an image.

Further, in the above embodiment, the forming material is formed in the transfer step. After the materials 22, 32 are cured, the separation step is carried out, but the shaped material may also be cured after the separation step.

Moreover, in the above embodiment, the second mold 20 is used for manufacture. The optical member 30 may be used, but the second mold may be used to manufacture the third mold. The third mold can be used to manufacture the optical member 30, or to manufacture another mold or the like.

Moreover, in the above embodiment, the second mold 20 is used for manufacture. Although the optical member 30 is used, the kind of articles manufactured using the second mold can be various. For example, an immunoassay wafer, a DNA analysis wafer, a DNA separation wafer, a microreactor, a third mold, etc. are mentioned. The third mold can be used to make other items. The third mold can be the same as the second mold, and the substrate contains thin plate glass.

Further, in the above embodiment, the optical member is manufactured using the optical member 30, but the optical member 30 may be used to manufacture the optical element. The optical element can be exemplified by an imaging element or the like.

The present application claims priority based on Japanese Patent Application No. 2013-152298, filed on Jan. 23, 2013.

10‧‧‧1st model

12‧‧‧Rotating roller

20‧‧‧2nd mode

21‧‧‧Substrate

22‧‧‧Forming materials

23‧‧‧Uneven layer

Claims (10)

A second mold which is a second mold to which a concave-convex pattern of a first mold is transferred, and includes: a base material; and a concave-convex layer formed on the base material and having a concave-convex pattern of the first mold transferred thereto, The aforementioned substrate comprises a thin plate glass. The second mold of claim 1, wherein the sheet glass has a thickness of 0.3 mm or less. A method for producing a second mold, which is a method for producing a second mold to which a concave-convex pattern of a first mold is transferred, and includes a transfer step of forming a sandwich between the first mold and the substrate The material forms an uneven layer on which the uneven pattern of the first mold is transferred, and the base material includes a thin plate glass. A method of producing a second mold according to claim 3, wherein the sheet glass has a thickness of 0.3 mm or less. A method for producing an article using a second mold in which a concave-convex pattern of a first mold is transferred, comprising a transfer step of transferring a concave-convex pattern of the second mold, and the second mold a base material and an uneven layer formed on the base material, wherein the uneven layer is a concave-convex pattern on which the first mold is transferred, and The aforementioned substrate comprises a thin plate glass. The method of producing the article of claim 5, wherein the sheet glass has a thickness of 0.3 mm or less. An optical panel manufacturing method for manufacturing an optical panel using an optical member obtained by the method of producing the article of claim 5 or 6. The method of manufacturing an optical panel according to claim 7, wherein the optical panel is a liquid crystal panel, an organic EL panel, or an electronic paper. A method of producing an optical element, which comprises producing an optical element using an optical member obtained by the method of producing the article of claim 5 or 6. A method of manufacturing an optical element according to claim 9, wherein the optical element is an imaging element.