WO2013191194A1 - Mesh member for screen printing and screen printing plate - Google Patents

Mesh member for screen printing and screen printing plate Download PDF

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Publication number
WO2013191194A1
WO2013191194A1 PCT/JP2013/066785 JP2013066785W WO2013191194A1 WO 2013191194 A1 WO2013191194 A1 WO 2013191194A1 JP 2013066785 W JP2013066785 W JP 2013066785W WO 2013191194 A1 WO2013191194 A1 WO 2013191194A1
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WO
WIPO (PCT)
Prior art keywords
screen printing
bus bar
electrode corresponding
mesh member
opening area
Prior art date
Application number
PCT/JP2013/066785
Other languages
French (fr)
Japanese (ja)
Inventor
啓吾 高岡
孝泰 大日
一男 吉川
古保里　隆
Original Assignee
株式会社コベルコ科研
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社コベルコ科研 filed Critical 株式会社コベルコ科研
Priority to KR1020177006459A priority Critical patent/KR101756069B1/en
Priority to KR1020147035297A priority patent/KR101717337B1/en
Priority to CN201380032179.2A priority patent/CN104411504B/en
Publication of WO2013191194A1 publication Critical patent/WO2013191194A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/24—Stencils; Stencil materials; Carriers therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/14—Forme preparation for stencil-printing or silk-screen printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/24—Stencils; Stencil materials; Carriers therefor
    • B41N1/247—Meshes, gauzes, woven or similar screen materials; Preparation thereof, e.g. by plasma treatment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • H05K3/1225—Screens or stencils; Holders therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • the present invention relates to a screen printing plate used for screen printing of a surface electrode of a solar cell, and a mesh member (mesh member for screen printing) for constituting such a screen printing plate, and in particular, printing of a surface electrode of a solar cell.
  • a mesh member mesh member for screen printing
  • it can reduce the amount of silver paste for surface electrodes to be used and promote effective utilization of precious metal resources without reducing the conversion efficiency of solar cells.
  • the present invention relates to a mesh member and a screen printing plate.
  • the surface electrode of the solar battery cell includes a current collecting main electrode (referred to as “bus bar electrode”) and a current collecting grid electrode (referred to as “finger electrode”). These surface electrodes are formed by screen-printing a conductive silver paste in the solar cell manufacturing process.
  • 1A to 1B (drawing substitute photos) show configuration examples of surface electrodes (bus bar electrodes and finger electrodes) of solar cells.
  • FIG.1 (b) is an enlarged view of the principal part A in Fig.1 (a).
  • a mesh fabric knitted with fine polyester wires is joined to the periphery (also called a combination mask), and finally fixed to an aluminum frame, and a printing pattern is formed to form a screen printing plate (hereinafter simply referred to as “printing plate”).
  • printing plate hereinafter simply referred to as “printing plate”.
  • Fig. 2 Recently, metal foil mesh members in which holes are formed in a rolled metal foil by an etching method have begun to be used (for example, Patent Document 1).
  • FIGS. 3 (a) to 3 (b) are partially enlarged explanatory views of a general-purpose printing plate used for screen printing.
  • a fine wire mesh member [FIG. 3 (a)] or a metal foil mesh member [FIG. 3 (b)] is stretched on a screen frame (not shown)
  • a resin photosensitive emulsion
  • Only the portion that is not covered and printed (for example, the portion “4” in FIGS. 3A to 3B) is exposed to cure the photosensitive emulsion, and then the portion to be printed (for example, FIGS. 3A to 3B).
  • the photosensitive emulsion of “(3)” in (b) is removed, and the screen printing plate 5 is prepared leaving only the portion of 4 (in the figure, 1 is a line portion, 2 is an opening (hole) of a mesh member) Showing).
  • the portion 3 from which the photosensitive emulsion has been removed is called a print pattern portion.
  • FIG. 4 schematically shows a state when screen printing is performed using a fine wire mesh member or a metal foil mesh member.
  • the printing plate used for the formation of the surface electrode of the solar cell is a photosensitive emulsion of the electrode part through which the silver paste penetrates after exposing and developing the wiring shape of the finger electrode and busbar electrode after applying the photosensitive emulsion to the mesh member.
  • the emulsion is removed to produce a printed pattern.
  • FIG. 5A to FIG. 5B show a configuration example of a printing plate in which a printed pattern of finger electrodes and bus bar electrodes is formed by a rolled metal foil mesh member.
  • FIG.5 (b) is an enlarged view of the principal part B in Fig.5 (a).
  • the conversion efficiency of solar cells depends greatly on the surface electrode area and resistance value. That is, the conversion efficiency improves as the electrode area (area in plan view) is smaller and the resistance value is smaller.
  • the electrode part Since there are many finger electrodes and the electrode part blocks sunlight, it is necessary to print more finely in order to increase the light receiving area and increase the conversion efficiency of the solar cell. In addition, if the electrode resistance value is reduced by making the electrode thinner, the conversion efficiency of the solar cell is reduced. Therefore, the electrode is made thicker by reducing the width, so that the cross-sectional area of the electrode is kept constant and the resistance value is not lowered. It is necessary to devise.
  • a copper ribbon (called “tab”) is soldered on the bus bar electrode to form a low resistance electrode body as a whole.
  • the width of the tab is substantially constant for each number of bus bar electrodes. For example, when it is composed of four, about 1000 ⁇ m per line, when it is composed of three, about 1500 ⁇ m per line, In the case of two lines, the width is set to about 1800 ⁇ m per line, and the width of the bus bar electrode is printed in accordance with the width of the tab.
  • FIGS. 6A and 6B schematically show a state in which the bus bar electrode is tabbed and connected to the back electrode of the adjacent solar battery cell.
  • FIG. 6B is an enlarged view of a main part C in FIG.
  • the opening area ratio of the finger electrode corresponding portion of the printing plate using the fine line mesh member is set to about 60% (for example, Patent Document 2). If the aperture area ratio is further increased with the fine-line mesh member, the mesh member strength at the bus bar electrode corresponding part (shown as “bus bar electrode part” in FIGS. 5 (a) to 5 (b)) is insufficient and printing is performed. Sometimes mesh breaks occur. For this reason, it is common for the fine wire mesh member to suppress the opening area ratio to about 60% at the maximum.
  • the fine wire mesh member is formed by knitting fine wires at a constant interval, the opening area ratio in all regions of the mesh member is constant, and the opening area ratio cannot be changed depending on the region. For this reason, if the finger electrode is made thicker by increasing the opening area ratio of the finger electrode corresponding portion, the bus bar electrode inevitably becomes thicker. The bus bar electrode is not so thick because the tab is soldered, and if the bus bar electrode is printed with a printing plate having a large opening area ratio, the amount of silver used will be unnecessarily increased. At present, the amount of silver contained in the silver paste used in solar cells is said to be less than 10% of the world's silver production. There is concern about the depletion.
  • the ratio of silver paste to the manufacturing cost of a solar cell (the manufacturing cost of a solar cell with an electrode attached to a silicon wafer) is about 10%.
  • the present invention has been made in view of such circumstances, and its purpose is to effectively use precious metal resources by reducing the amount of silver paste for surface electrodes to be used without degrading the performance as a solar cell.
  • Another object of the present invention is to provide a screen printing mesh member and a screen printing plate that can reduce the manufacturing cost.
  • the mesh member for screen printing of the present invention that has achieved the above object is a mesh member for screen printing used when forming finger electrodes and bus bar electrodes that serve as surface electrodes of solar cells by screen printing.
  • the mesh member is formed by etching holes in a rolled metal foil.
  • individual holes formed in a horizontally long shape are arranged in a direction perpendicular to the horizontally long direction of the hole.
  • the length in the horizontal direction is larger than the width of the planned print pattern portion, and its end extends to the outside of the planned print pattern portion.
  • the opening area ratio in the finger electrode corresponding part is larger than the opening area ratio in the bus bar electrode corresponding part. And wherein the hearing.
  • the opening area ratio of the finger electrode corresponding portion is preferably 65 to 85%, and the opening area ratio of the bus bar electrode corresponding portion is preferably 25 to 70%.
  • the ratio of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion is preferably 0.30 to 0.80.
  • the screen printing plate provided with the mesh member for screen printing as described above, in the screen printing used for printing the surface electrode of the solar cell, the usage amount of the silver paste for the surface electrode to be used without degrading the performance as the solar cell. As well as promoting effective utilization of precious metal resources, manufacturing costs can be reduced.
  • the width of the printed pattern of the finger electrode corresponding portion is preferably 35 to 75 ⁇ m.
  • the mesh member of the present invention it was assumed that the rolled metal foil was perforated by etching, and the relationship between the opening area ratios in the finger electrode corresponding part and the bus bar electrode corresponding part was defined.
  • a screen printing mesh member that can reduce the amount of paste used without degrading performance, and a screen printing plate that includes such a screen printing mesh member can be realized.
  • FIGS. 1A and 1B are photographs, which substitute for a drawing, showing a configuration example of surface electrodes (bus bar electrodes and finger electrodes) of a solar battery cell.
  • FIG.1 (b) is an enlarged view of the principal part A in Fig.1 (a).
  • FIG. 2 is a schematic explanatory diagram illustrating a configuration example of a screen printing plate used for screen printing.
  • 3A and 3B are partially enlarged explanatory views of a general-purpose printing plate used for screen printing.
  • FIG. 4 is an explanatory view schematically showing a state when screen printing is performed using a fine wire mesh member or a rolled metal foil mesh member.
  • FIGS. 5A to 5B are schematic explanatory views showing a configuration example of a printing plate in which a printed pattern of finger electrode corresponding portions and bus bar electrode corresponding portions is formed by a rolled metal foil mesh member.
  • FIG.5 (b) is an enlarged view of the principal part B in Fig.5 (a).
  • FIGS. 6A and 6B are explanatory views schematically showing a state where a tab is attached to the bus bar electrode and connected to the back electrode of the adjacent solar battery cell.
  • FIG. 6B is an enlarged view of a main part C in FIG.
  • FIGS. 7A to 7B are schematic explanatory views showing examples of hole shapes formed in the finger electrode corresponding portions.
  • FIGS. 8A to 8D are schematic explanatory views showing examples of hole shapes formed in the bus bar electrode corresponding part.
  • FIGS. 9A and 9B are diagrams (corresponding explanatory diagrams of FIGS. 7A and 7B) for explaining the aperture area ratio.
  • FIG. 10 is a graph showing the relationship between the aperture ratio (open area ratio) and the paste weight.
  • the present inventors examined from various angles in order to achieve the above object.
  • the opening area ratio of the finger electrode corresponding part in the mesh member is made larger than the opening area ratio of the bus bar electrode corresponding part, that is, while increasing the permeation amount of the silver paste and printing the finger electrode thinly and thickly, and the bus bar electrode
  • the inventors have found that the amount of paste used can be reduced without degrading the performance as a solar cell by controlling the silver paste permeation amount from the corresponding part so as not to be higher than necessary, and the present invention has been completed.
  • the finger electrode corresponding part is formed so that the opening area ratio is larger than the opening area ratio of the bus bar electrode part.
  • the etching pattern can be freely set, so that the opening area ratio can be changed between the finger electrode corresponding part and the bus bar electrode corresponding part.
  • the opening area ratio cannot be partially changed in the thin wire mesh member, and the rolled metal foil mesh member is used to change the opening area ratio between the finger electrode corresponding portion and the bus bar electrode corresponding portion.
  • any material that can be formed into a foil shape such as a titanium alloy, a nickel alloy, and a copper alloy in addition to stainless steel may be used.
  • SUS304H is used for stainless steel
  • JISH4600 80 is used for a titanium alloy.
  • JISCS2520 (1986) NCHRW1 or the like is used for a nickel alloy
  • JIS3130 C1720R-H or the like is used.
  • the thickness of the mesh member is not particularly limited, but is preferably 5 ⁇ m or more and 30 ⁇ m or less. From the viewpoint of strength, it is more preferably 10 ⁇ m or more.
  • the finger electrode corresponding portion means a mesh member portion corresponding to a portion to be a finger electrode after screen printing
  • the bus bar electrode corresponding portion is a mesh member portion corresponding to a portion to be a bus bar electrode after screen printing.
  • the print pattern scheduled portion means a mesh member portion corresponding to a portion where a print pattern is set at the stage of screen printing, and this portion may be referred to as a “print pattern portion” for convenience of explanation.
  • each hole formed in a horizontally long shape in the finger electrode corresponding portion is arranged in a direction perpendicular to the horizontally long direction of the hole, and the length in the horizontally long direction is set.
  • FIGS. 7A to 7B Such hole shapes (opening shapes) are shown in FIGS. 7A to 7B [FIG. 7A shows a substantially rectangular shape, and FIG. 7B shows an elliptical shape].
  • compatible part should just satisfy said requirements, and is not limited to the substantially rectangular shape or ellipse shape shown in figure.
  • the width of the line portion can be used only with the width of the thin printed pattern portion of 75 ⁇ m or less.
  • the width of the printed pattern portion of the finger electrode corresponding portion is 35 ⁇ m or less, the discharge of the paste is suppressed, and as a result, the disconnection of the electrode becomes a practical problem. Therefore, the width of the printed pattern portion of the finger electrode corresponding portion is 35 It is preferable that the thickness be ⁇ 75 ⁇ m. More preferably, it is 40 ⁇ m or more and 70 ⁇ m or less.
  • a plurality of holes having the same shape are arranged side by side in the vertical direction and the horizontal direction.
  • the hole shape at this time may be a square, a rectangle, a hexagon or a circle generally used in mesh members, but is not limited thereto. Examples of such hole shapes (opening shape) are shown in FIGS. FIGS. 8A to 8D show the above-mentioned square, rectangle, hexagon and circle, which are typical hole shapes, respectively.
  • the mesh member having the hole shape as described above in the bus bar electrode corresponding portion is satisfactory in strength, even if the opening area ratio is 25 to 70% (more preferably 30 to 65%), Even if the width of the bus bar electrode is about 1000 to 2000 ⁇ m, it can be used without any inconvenience.
  • the opening area ratio at the bus bar electrode corresponding portion is larger than 70%, the mesh member is easily broken during printing. If the opening area ratio is smaller than 25%, the printed bus bar electrode will be blurred, and the connection with the finger electrode will become unstable and the soldering of the tab will also be defective.
  • the opening area ratio is, for example, as shown in FIGS. 9A to 9B (FIGS. 7A to 7B corresponding explanatory views), a region in which holes (openings) are formed, and other regions. Is defined with reference to the end of the hole as a reference, and means the area ratio (area ratio in plan view:%) of the hole (opening) in the region surrounded by the dotted line.
  • 9A to 9B show the case of the opening area ratio at the finger electrode corresponding portion (indicated by “finger electrode portion” in the figure), the opening area ratio at the busper electrode corresponding portion is shown. In the case, the same calculation is performed.
  • the opening area ratio of the finger electrode corresponding part can be larger than the opening area ratio of the bus bar electrode corresponding part, but the ratio of the opening area ratio of the bus bar electrode part to the opening area ratio of the finger electrode corresponding part (“Bus bar / finger”, hereinafter simply referred to as “aperture ratio”) is preferably 0.30 to 0.80.
  • this aperture ratio is smaller than 0.30, the amount of silver paste becomes too small during screen printing, and printing blur tends to occur.
  • the aperture ratio is larger than 0.80, it is difficult to obtain the effect of reducing the amount of silver paste.
  • the aperture ratio is more preferably 0.40 or more, and more preferably 0.70 or less.
  • a stainless steel rolled foil manufactured by Nippon Metal Co., Ltd., SUS301
  • a thickness of 25 ⁇ m was used as the rolled metal foil for the mesh member.
  • a resist is applied to the rolled metal foil, the holes are arranged so that the hole shape and the opening area ratio are changed in the finger electrode corresponding part and the bus bar electrode corresponding part, and after exposure using a glass mask on which a printed pattern is drawn, development is performed. . Thereafter, the rolled metal foil was melted by etching to form a mesh member having holes formed in the rolled metal foil.
  • the shape of the hole of the mesh member was a substantially rectangular shape with rounded corners at the finger electrode corresponding parts (see FIG. 7A), and the bus bar electrode corresponding parts were rounded at the corners.
  • the distance (pitch) between the holes was 100 ⁇ m for both the finger electrode corresponding part and the bus bar electrode corresponding part.
  • a plurality of mesh members (rolled metal foil mesh members) were produced in which the opening area ratio of the finger electrode corresponding part and the opening area ratio of the bus bar electrode corresponding part were independently changed.
  • the size of the hole in the finger electrode corresponding part (the length of the long side of the substantially rectangular shape shown in FIG. 7A) is larger than the print pattern width (Tables 1 and 2 below) in the finger electrode corresponding part. It was set in the range of 75 to 350 ⁇ m so as to increase.
  • the average opening area ratio was defined as the opening area ratio.
  • the measurement of the opening area ratio is performed at five locations so as to be uniform in any region (finger electrode corresponding portion and bus bar electrode corresponding portion) (for example, at the finger electrode corresponding portion, four locations at the center and four corners). ) was measured and averaged in the same manner as described above.
  • a combination mask with a resin mesh attached to the periphery of the mesh member was applied, and after applying the photosensitive emulsion, a printing pattern portion was formed on the finger electrode corresponding portion and the bus bar electrode corresponding portion to prepare a printing plate. Screen printing was performed using these printing plates, and the weight of the printed paste was measured.
  • a silver paste for a surface electrode of a solar cell (product name: DD-1200M-200, manufactured by Kyoto Elex Co., Ltd.) was used.
  • a screen printing device (model SSA-PC250) manufactured by Tokai Seiki Co., Ltd. is used.
  • the printing conditions are a printing pressure of 10 kgf, a clearance of 1 mm, a printing speed of 200 mm / sec, and a polycrystalline wafer for solar cells (external dimensions 156 ⁇ 156 mm). ).
  • the weight of the solar cell wafer was measured with an electronic balance (manufactured by Kensei Kogyo Co., Ltd., model HR-120), and the weight of the printed paste was determined.
  • the width of the printed pattern portion of the finger electrode corresponding portion and the bus bar electrode corresponding portion on the printing plate was measured with a microscope (manufactured by Keyence Corporation, model VHX-2000).
  • the opening area ratio at the finger electrode corresponding portion was set in the range of 66 to 84% so as to be as large as possible.
  • the width of the printed pattern portion of the finger electrode corresponding portion was set to 30 to 71 ⁇ m.
  • the number of finger electrodes was set to 72 to 100, which is a range normally used in solar cells.
  • the opening area ratio in the bus bar electrode corresponding part was set to 20% or more and 72% or less from the viewpoint of making it as small as possible.
  • the width of the printed pattern portion in the bus bar electrode corresponding portion is set to 1700 to 1800 ⁇ m per one when the number of bus bar electrodes is two, and 1450 to 1500 ⁇ m per one when the number of bus bar electrodes is three. .
  • Tables 1 and 2 The results are shown in Tables 1 and 2 below.
  • Tables 1 and 2 below in the order of the ratio (opening ratio) of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion, the test No. Is attached. Based on this result, the relationship between the aperture ratio and the paste weight is shown in FIG. In Table 1, the column indicated by “ ⁇ ” means that mesh breakage occurred in the bus bar electrode corresponding portion (indicated as “bus bar electrode portion” in FIG. 10).
  • the aperture ratio is from 1 to 0.80
  • the paste weight is almost constant.
  • the aperture ratio is less than 0.80
  • the paste weight is reduced, and a cost reduction effect can be expected.
  • the aperture ratio was smaller than 0.30 (Test Nos. 40 and 41)
  • print fading was observed on the bus bar electrodes.
  • Test No. 40 the opening area ratio of the bus bar electrode corresponding part is 20%.
  • the opening area ratio corresponding to the bus bar electrode is 21%, and it is difficult to avoid blurring of printing with these opening area ratios.
  • the opening area ratio of the bus bar electrode corresponding part is 70% or less.
  • each electrode finger electrode and bus bar electrode
  • each electrode was formed using a printing plate having an aperture ratio of 0.91.
  • each electrode is formed using a printing plate having an aperture ratio of 0.57.
  • the paste weights differ greatly from 232.0 mg (Test No. 42) and 190.1 mg (Test No. 43), respectively, but the conversion efficiencies are approximately the same as 16.4% and 16.5%, respectively. It can be seen that the performance as a solar cell is maintained in a state where is reduced.
  • the width and thickness of the finger electrode are substantially the same for both, and the width of the bus bar electrode is substantially the same and the thickness is greatly different. That is, the usefulness of the printing plate using the rolled metal foil mesh member that can change the hole shape and the opening area ratio between the finger electrode corresponding part and the bus bar electrode corresponding part is clearly recognized.
  • the mesh member of the present invention it was assumed that the rolled metal foil was perforated by etching, and the relationship between the opening area ratios in the finger electrode corresponding part and the bus bar electrode corresponding part was defined.
  • a screen printing mesh member that can reduce the amount of paste used without degrading performance, and a screen printing plate that includes such a screen printing mesh member can be realized.

Abstract

A mesh member for screen printing is used when a finger electrode and a bus bar electrode are formed by screen printing. This mesh member is processed by making holes in rolled metallic foil by etching. In a finger electrode-associated portion, individual holes each formed in an oblong shape are lined up in the direction orthogonal to the oblong direction of the hole, the length in the oblong direction thereof is larger than the width of a scheduled printing pattern portion, and the ends thereof are formed to extend to the outside of the scheduled printing pattern portion. The opening area rate in the finger electrode-associated portion is larger than the opening area rate in a bus bar electrode-associated portion.

Description

スクリーン印刷用メッシュ部材およびスクリーン印刷版Screen printing mesh member and screen printing plate
　本発明は、太陽電池の表面電極のスクリーン印刷に用いられるスクリーン印刷版およびこうしたスクリーン印刷版を構成するためのメッシュ部材（スクリーン印刷用メッシュ部材）に関するものであり、特に太陽電池の表面電極の印刷に用いられるスクリーン印刷において、太陽電池における変換効率を落とすことなく、使用する表面電極用銀ペーストの使用量を削減して貴金属資源の有効活用を促進すると共に、製造コストを抑えることのできるスクリーン印刷用メッシュ部材およびスクリーン印刷版に関するものである。 The present invention relates to a screen printing plate used for screen printing of a surface electrode of a solar cell, and a mesh member (mesh member for screen printing) for constituting such a screen printing plate, and in particular, printing of a surface electrode of a solar cell. In screen printing used for printing, it can reduce the amount of silver paste for surface electrodes to be used and promote effective utilization of precious metal resources without reducing the conversion efficiency of solar cells. The present invention relates to a mesh member and a screen printing plate.
　太陽電池セルの表面電極には、集電用メイン電極（「バスバー電極」と呼ばれる）と集電用グリッド電極（「フィンガー電極」と呼ばれる）がある。これらの表面電極は、太陽電池セルの製造工程において導電性銀ペーストをスクリーン印刷することにより形成される。図１（ａ）～（ｂ）（図面代用写真）に、太陽電池セルの表面電極（バスバー電極およびフィンガー電極）の構成例を示す。図１（ｂ）は、図１（ａ）中の要部Ａの拡大図である。 The surface electrode of the solar battery cell includes a current collecting main electrode (referred to as “bus bar electrode”) and a current collecting grid electrode (referred to as “finger electrode”). These surface electrodes are formed by screen-printing a conductive silver paste in the solar cell manufacturing process. 1A to 1B (drawing substitute photos) show configuration examples of surface electrodes (bus bar electrodes and finger electrodes) of solar cells. FIG.1 (b) is an enlarged view of the principal part A in Fig.1 (a).
　スクリーン印刷に使われるスクリーン印刷版には、金属または樹脂（例えば、ポリエステル）からなる細線を編んだメッシュ部材（以下、「細線メッシュ部材」と称す）が広く使用されており、この細線メッシュ部材の周縁に、ポリエステル細線を編んだメッシュ織物を接合させ（コンビネーションマスクとも呼ばれる）、最終的にはアルミ枠に固定し、更に印刷パターンを形成してスクリーン印刷版（以下、単に「印刷版」と呼ぶことがある）としている（図２）。また最近では、圧延金属箔にエッチング法で孔を開けた金属箔メッシュ部材も使用され始めている（例えば、特許文献１）。 Screen printing plates used for screen printing widely use mesh members knitted with fine wires made of metal or resin (for example, polyester) (hereinafter referred to as “fine wire mesh members”). A mesh fabric knitted with fine polyester wires is joined to the periphery (also called a combination mask), and finally fixed to an aluminum frame, and a printing pattern is formed to form a screen printing plate (hereinafter simply referred to as “printing plate”). (Fig. 2). Recently, metal foil mesh members in which holes are formed in a rolled metal foil by an etching method have begun to be used (for example, Patent Document 1).
　図３（ａ）～（ｂ）は、スクリーン印刷に用いられている汎用印刷版の一部拡大説明図である。細線メッシュ部材[図３（ａ）]あるいは金属箔メッシュ部材［図３（ｂ）］をスクリーン枠（図示せず）に張った後、全面に樹脂（感光性乳剤）を塗布してからマスクで覆い、印刷しない部分（例えば、図３（ａ）～（ｂ）の「４」の部分）のみに露光して、感光性乳剤を硬化させ、次いで印刷したい部分（例えば、図３（ａ）～（ｂ）の「３」の部分）の感光性乳剤を除去し、４の部分のみを残しスクリーン印刷版５を作製する（図中、１は線部、２はメッシュ部材の開口部（孔）を示す）。この感光性乳剤を除去した部分３を印刷パターン部と呼ぶ。 3 (a) to 3 (b) are partially enlarged explanatory views of a general-purpose printing plate used for screen printing. After a fine wire mesh member [FIG. 3 (a)] or a metal foil mesh member [FIG. 3 (b)] is stretched on a screen frame (not shown), a resin (photosensitive emulsion) is applied to the entire surface and then masked. Only the portion that is not covered and printed (for example, the portion “4” in FIGS. 3A to 3B) is exposed to cure the photosensitive emulsion, and then the portion to be printed (for example, FIGS. 3A to 3B). The photosensitive emulsion of “(3)” in (b) is removed, and the screen printing plate 5 is prepared leaving only the portion of 4 (in the figure, 1 is a line portion, 2 is an opening (hole) of a mesh member) Showing). The portion 3 from which the photosensitive emulsion has been removed is called a print pattern portion.
　図４に、細線メッシュ部材あるいは金属箔メッシュ部材を用いてスクリーン印刷を行うときの状態を模式的に示す。スキージ６を図の右から左へ移動させることにより、印刷パターン部３（前記図３（ａ）～（ｂ）参照）の開口部（孔）２にペースト７を充填すると共に、印刷対象物８にペースト７を付着させる。スキージ６が通過した後は、印刷版の張力(テンション)によりスクリーン印刷版５(前記図３（ａ）～（ｂ）参照)と印刷対象物８が離れるが、ペースト７は印刷対象物８に残り、感光性乳剤が除去された印刷パターン通りに印刷される。 FIG. 4 schematically shows a state when screen printing is performed using a fine wire mesh member or a metal foil mesh member. By moving the squeegee 6 from the right to the left in the figure, the paste (7) is filled in the opening (hole) 2 of the print pattern portion 3 (see FIGS. 3 (a) to 3 (b)), and the print object 8 Paste 7 is adhered to the surface. After the squeegee 6 passes, the screen printing plate 5 (see FIGS. 3A and 3B) and the printing object 8 are separated from the printing object 8 by the tension of the printing plate. The rest is printed according to the printed pattern from which the photosensitive emulsion has been removed.
　太陽電池の表面電極の形成に使用される印刷版は、メッシュ部材に感光性乳剤を塗布後、フィンガー電極とバスバー電極の配線形状を露光、現像し、次いで銀ペーストが透過する電極部分の感光性乳剤を除去して印刷パターンが作製される。圧延金属箔メッシュ部材にてフィンガー電極とバスバー電極の印刷パターンを形成した印刷版の構成例を図５（ａ）～（ｂ）に示す。図５（ｂ）は、図５（ａ）中の要部Ｂの拡大図である。 The printing plate used for the formation of the surface electrode of the solar cell is a photosensitive emulsion of the electrode part through which the silver paste penetrates after exposing and developing the wiring shape of the finger electrode and busbar electrode after applying the photosensitive emulsion to the mesh member. The emulsion is removed to produce a printed pattern. FIG. 5A to FIG. 5B show a configuration example of a printing plate in which a printed pattern of finger electrodes and bus bar electrodes is formed by a rolled metal foil mesh member. FIG.5 (b) is an enlarged view of the principal part B in Fig.5 (a).
　太陽電池の変換効率（光エネルギーから電気エネルギーへの変換効率）は、表面電極の面積と抵抗値に大きく左右されることになる。即ち、電極面積（平面視面積）は小さいほど、また抵抗値は小さいほど変換効率は向上する。 The conversion efficiency of solar cells (conversion efficiency from light energy to electrical energy) depends greatly on the surface electrode area and resistance value. That is, the conversion efficiency improves as the electrode area (area in plan view) is smaller and the resistance value is smaller.
　フィンガー電極は本数が多く、また電極部分は太陽光を遮るため、受光面積を大きくして太陽電池の変換効率を高めるためには、より細く印刷する必要がある。また電極を細くすることにより電極の抵抗値が下がると、太陽電池の変換効率が低下するため、幅を狭くした分だけ厚くして、電極の断面積を一定に保ち、抵抗値を低下させないように工夫する必要がある。 Since there are many finger electrodes and the electrode part blocks sunlight, it is necessary to print more finely in order to increase the light receiving area and increase the conversion efficiency of the solar cell. In addition, if the electrode resistance value is reduced by making the electrode thinner, the conversion efficiency of the solar cell is reduced. Therefore, the electrode is made thicker by reducing the width, so that the cross-sectional area of the electrode is kept constant and the resistance value is not lowered. It is necessary to devise.
　バスバー電極はフィンガー電極よりも更に低い抵抗値が求められるため、バスバー電極上に銅製のリボン（「タブ」と呼ばれている）をはんだ付けし、全体として低抵抗の電極体としている。タブの幅はバスバー電極の本数ごとにほぼ一定の幅となっており、例えば４本で構成される場合には１本当たり１０００μｍ程度、３本で構成される場合には１本当たり１５００μｍ程度、２本で構成される場合には１本当たり１８００μｍ程度の幅に設定され、バスバー電極の幅はタブの幅に合わせて印刷される。 Since the bus bar electrode is required to have a lower resistance value than the finger electrode, a copper ribbon (called “tab”) is soldered on the bus bar electrode to form a low resistance electrode body as a whole. The width of the tab is substantially constant for each number of bus bar electrodes. For example, when it is composed of four, about 1000 μm per line, when it is composed of three, about 1500 μm per line, In the case of two lines, the width is set to about 1800 μm per line, and the width of the bus bar electrode is printed in accordance with the width of the tab.
　バスバー電極では、タブにより低抵抗が実現されるため、印刷厚さは必要なく、タブがはんだ付けできる最低限の厚さがあれば良い。このタブは、太陽電池同士を直列につないで太陽電池モジュールとする際に、隣接する太陽電池間をつなぐ役割も担っている。バスバー電極にタブを付け、隣の太陽電池セルの裏面電極に接続した状態を模式的に図６（ａ）～（ｂ）に示す。図６（ｂ）は、図６（ａ）中の要部Ｃの拡大図である。 In the bus bar electrode, since the low resistance is realized by the tab, the printing thickness is not necessary, and a minimum thickness that the tab can be soldered is sufficient. This tab also plays a role of connecting adjacent solar cells when the solar cells are connected in series to form a solar cell module. FIGS. 6A and 6B schematically show a state in which the bus bar electrode is tabbed and connected to the back electrode of the adjacent solar battery cell. FIG. 6B is an enlarged view of a main part C in FIG.
　フィンガー電極を細くより厚く印刷するには、印刷版のフィンガー電極対応部（前記図５（ａ）～（ｂ）では「フィンガー電極部」と表示）での開口面積率を高くする必要があり、細線メッシュ部材を用いた印刷版のフィンガー電極対応部の開口面積率は６０％程度に設定されている（例えば、特許文献２）。細線メッシュ部材で開口面積率をこれ以上大きくすると、幅が大きいバスバー電極対応部（前記図５（ａ）～（ｂ）では「バスバー電極部」と表示）でのメッシュ部材強度が不足し、印刷時にメッシュ破れが生じる。このため細線メッシュ部材では開口面積率を最大６０％程度に抑えることが一般的である。 In order to print the finger electrode thinner and thicker, it is necessary to increase the opening area ratio at the finger electrode corresponding part of the printing plate (shown as “finger electrode part” in FIGS. 5A to 5B). The opening area ratio of the finger electrode corresponding portion of the printing plate using the fine line mesh member is set to about 60% (for example, Patent Document 2). If the aperture area ratio is further increased with the fine-line mesh member, the mesh member strength at the bus bar electrode corresponding part (shown as “bus bar electrode part” in FIGS. 5 (a) to 5 (b)) is insufficient and printing is performed. Sometimes mesh breaks occur. For this reason, it is common for the fine wire mesh member to suppress the opening area ratio to about 60% at the maximum.
日本国特開２０１１－１９４８８５号公報Japanese Unexamined Patent Publication No. 2011-194485 日本国特開２００７－６２０７９号公報Japanese Unexamined Patent Publication No. 2007-62079
　細線メッシュ部材は、細線を一定の間隔で編んだものであるため、メッシュ部材の全ての領域での開口面積率が一定であり、領域によって開口面積率は変えられない。このためフィンガー電極対応部の開口面積率を大きくしてフィンガー電極を厚くしようとすると、必然的にバスバー電極も厚くなる。バスバー電極は、タブをはんだ付けするため厚さはそれほど必要なく、開口面積率の大きな印刷版でバスバー電極を印刷すると、いたずらに銀の使用量を増やすこととなる。現在、太陽電池で使用される銀ペーストに含まれる銀の量は、世界の銀の産出量の１０％弱といわれており、将来太陽電池の採算量が現在の１０倍以上となると、銀資源の枯渇が懸念される。 Since the fine wire mesh member is formed by knitting fine wires at a constant interval, the opening area ratio in all regions of the mesh member is constant, and the opening area ratio cannot be changed depending on the region. For this reason, if the finger electrode is made thicker by increasing the opening area ratio of the finger electrode corresponding portion, the bus bar electrode inevitably becomes thicker. The bus bar electrode is not so thick because the tab is soldered, and if the bus bar electrode is printed with a printing plate having a large opening area ratio, the amount of silver used will be unnecessarily increased. At present, the amount of silver contained in the silver paste used in solar cells is said to be less than 10% of the world's silver production. There is concern about the depletion.
　貴金属資源の有効活用の観点から、銀ペーストの使用量を減らすこと、すなわちバスバー電極の厚さを抑えて銀ペーストの使用量を減らすことが新たな課題となっている。銀ペーストの使用量を減らすことは、太陽電池の製造コストの低減にも結びつくため、発電コストの低減で太陽電池の普及にも大いに貢献することが期待される。太陽電池の製造コスト（シリコンウエハに電極を付けた太陽電池セルの製造コスト）に占める銀ペーストの比率は１０％程度と言われている。 From the viewpoint of effective use of precious metal resources, reducing the amount of silver paste used, that is, reducing the amount of silver paste used by reducing the thickness of the bus bar electrode is a new issue. Reducing the amount of silver paste used also leads to a reduction in the manufacturing cost of solar cells, so it is expected to greatly contribute to the popularization of solar cells by reducing power generation costs. It is said that the ratio of silver paste to the manufacturing cost of a solar cell (the manufacturing cost of a solar cell with an electrode attached to a silicon wafer) is about 10%.
　本発明はこのような状況に鑑みてなされたものであって、その目的は、太陽電池としての性能を落とすことなく、使用する表面電極用銀ペーストの使用量を削減して貴金属資源の有効活用を促進すると共に、製造コストを抑えることのできるスクリーン印刷用メッシュ部材、およびスクリーン印刷版を提供することにある。 The present invention has been made in view of such circumstances, and its purpose is to effectively use precious metal resources by reducing the amount of silver paste for surface electrodes to be used without degrading the performance as a solar cell. Another object of the present invention is to provide a screen printing mesh member and a screen printing plate that can reduce the manufacturing cost.
　上記目的を達成することのできた本発明のスクリーン印刷用メッシュ部材は、太陽電池の表面電極となるフィンガー電極およびバスバー電極をスクリーン印刷で形成するときに用いられるスクリーン印刷用メッシュ部材であって、このメッシュ部材は圧延金属箔にエッチングで孔開け加工されたものであり、フィンガー電極対応部では、横長型に形成された個々の孔が当該孔の横長方向と直交する方向に列設され、当該孔の横長方向の長さが、印刷パターン予定部の幅より大きく、その端部が印刷パターン予定部の外側まで延びて形成されており、バスバー電極対応部では、同一形状の孔が縦方向および横方向に複数並んで配設されており、且つ、フィンガー電極対応部における開口面積率がバスバー電極対応部における開口面積率よりも大きいことを特徴とする。 The mesh member for screen printing of the present invention that has achieved the above object is a mesh member for screen printing used when forming finger electrodes and bus bar electrodes that serve as surface electrodes of solar cells by screen printing. The mesh member is formed by etching holes in a rolled metal foil. In the finger electrode corresponding part, individual holes formed in a horizontally long shape are arranged in a direction perpendicular to the horizontally long direction of the hole. The length in the horizontal direction is larger than the width of the planned print pattern portion, and its end extends to the outside of the planned print pattern portion. Are arranged side by side in the direction, and the opening area ratio in the finger electrode corresponding part is larger than the opening area ratio in the bus bar electrode corresponding part. And wherein the hearing.
　本発明のスクリーン印刷用メッシュ部材においては、フィンガー電極対応部の開口面積率が６５～８５％であり、バスバー電極対応部の開口面積率が２５～７０％であることが好ましい。また、フィンガー電極対応部の開口面積率に対するバスバー電極対応部の開口面積率の比が、０．３０～０．８０であることが好ましい。 In the screen printing mesh member of the present invention, the opening area ratio of the finger electrode corresponding portion is preferably 65 to 85%, and the opening area ratio of the bus bar electrode corresponding portion is preferably 25 to 70%. The ratio of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion is preferably 0.30 to 0.80.
　上記のようなスクリーン印刷用メッシュ部材を備えるスクリーン印刷版では、太陽電池の表面電極の印刷に用いられるスクリーン印刷において、太陽電池としての性能を落とすことなく、使用する表面電極用銀ペーストの使用量を削減して貴金属資源の有効活用を促進すると共に、製造コストを抑えるこができるものとなる。このスクリーン印刷版においては、フィンガー電極対応部の印刷パターンの幅が３５～７５μｍであることが好ましい。 In the screen printing plate provided with the mesh member for screen printing as described above, in the screen printing used for printing the surface electrode of the solar cell, the usage amount of the silver paste for the surface electrode to be used without degrading the performance as the solar cell. As well as promoting effective utilization of precious metal resources, manufacturing costs can be reduced. In this screen printing plate, the width of the printed pattern of the finger electrode corresponding portion is preferably 35 to 75 μm.
　本発明のメッシュ部材によれば、圧延金属箔にエッチングで孔開け加工されたものとし、フィンガー電極対応部およびバスバー電極対応部における開口面積率の関係を規定するようにしたので、太陽電池としての性能を落とすことなく、ペースト使用量の削減を実現するスクリーン印刷用メッシュ部材、およびこうしたスクリーン印刷用メッシュ部材を備えて構成されるスクリーン印刷版が実現できる。 According to the mesh member of the present invention, it was assumed that the rolled metal foil was perforated by etching, and the relationship between the opening area ratios in the finger electrode corresponding part and the bus bar electrode corresponding part was defined. A screen printing mesh member that can reduce the amount of paste used without degrading performance, and a screen printing plate that includes such a screen printing mesh member can be realized.
図１（ａ）～（ｂ）は、太陽電池セルの表面電極（バスバー電極およびフィンガー電極）の構成例を示す図面代用写真である。図１（ｂ）は、図１（ａ）中の要部Ａの拡大図である。FIGS. 1A and 1B are photographs, which substitute for a drawing, showing a configuration example of surface electrodes (bus bar electrodes and finger electrodes) of a solar battery cell. FIG.1 (b) is an enlarged view of the principal part A in Fig.1 (a). 図２は、スクリーン印刷に使われるスクリーン印刷版の構成例を示す概略説明図である。FIG. 2 is a schematic explanatory diagram illustrating a configuration example of a screen printing plate used for screen printing. 図３（ａ）～（ｂ）は、スクリーン印刷に用いられている汎用印刷版の一部拡大説明図である。3A and 3B are partially enlarged explanatory views of a general-purpose printing plate used for screen printing. 図４は、細線メッシュ部材あるいは圧延金属箔メッシュ部材を用いてスクリーン印刷を行うときの状態を模式的に示す説明図である。FIG. 4 is an explanatory view schematically showing a state when screen printing is performed using a fine wire mesh member or a rolled metal foil mesh member. 図５（ａ）～（ｂ）は、圧延金属箔メッシュ部材にてフィンガー電極対応部とバスバー電極対応部の印刷パターンを形成した印刷版の構成例を示す概略説明図である。図５（ｂ）は、図５（ａ）中の要部Ｂの拡大図である。FIGS. 5A to 5B are schematic explanatory views showing a configuration example of a printing plate in which a printed pattern of finger electrode corresponding portions and bus bar electrode corresponding portions is formed by a rolled metal foil mesh member. FIG.5 (b) is an enlarged view of the principal part B in Fig.5 (a). 図６（ａ）～（ｂ）は、バスバー電極にタブを付け、隣の太陽電池セルの裏面電極に接続した状態を模式的に示す説明図である。図６（ｂ）は、図６（ａ）中の要部Ｃの拡大図である。FIGS. 6A and 6B are explanatory views schematically showing a state where a tab is attached to the bus bar electrode and connected to the back electrode of the adjacent solar battery cell. FIG. 6B is an enlarged view of a main part C in FIG. 図７（ａ）～（ｂ）は、フィンガー電極対応部に形成される孔形状例を示す概略説明図である。FIGS. 7A to 7B are schematic explanatory views showing examples of hole shapes formed in the finger electrode corresponding portions. 図８（ａ）～（ｄ）は、バスバー電極対応部に形成される孔形状例を示す概略説明図である。FIGS. 8A to 8D are schematic explanatory views showing examples of hole shapes formed in the bus bar electrode corresponding part. 図９（ａ）～（ｂ）は、開口面積率を説明するための図（図７（ａ）～（ｂ）対応説明図）である。FIGS. 9A and 9B are diagrams (corresponding explanatory diagrams of FIGS. 7A and 7B) for explaining the aperture area ratio. 図１０は、開口率比（開口面積率比）とペースト重量との関係を示すグラフである。FIG. 10 is a graph showing the relationship between the aperture ratio (open area ratio) and the paste weight.
　本発明者らは、上記目的を達成すべく、様々な角度から検討した。その結果、メッシュ部材でのフィンガー電極対応部の開口面積率をバスバー電極対応部の開口面積率よりも大きくし、すなわち銀ペーストの透過量を高めてフィンガー電極を細く厚く印刷しながら、且つバスバー電極対応部からの銀ペースト透過量を制御して必要以上に高くならないようにすることにより、太陽電池としての性能を落とすことなく、ペースト使用量の削減を実現できることを見出し、本発明を完成した。 The present inventors examined from various angles in order to achieve the above object. As a result, the opening area ratio of the finger electrode corresponding part in the mesh member is made larger than the opening area ratio of the bus bar electrode corresponding part, that is, while increasing the permeation amount of the silver paste and printing the finger electrode thinly and thickly, and the bus bar electrode The inventors have found that the amount of paste used can be reduced without degrading the performance as a solar cell by controlling the silver paste permeation amount from the corresponding part so as not to be higher than necessary, and the present invention has been completed.
　フィンガー電極とバスバー電極の印刷厚さを変えるためには、メッシュ部材の段階でフィンガー電極対応部とバスバー電極対応部の開口面積率を変える必要がある。すなわちフィンガー電極対応部は、開口面積率をバスバー電極部の開口面積率よりも大きく形成する。圧延金属箔にエッチングで孔開けして得られるメッシュ部材では、エッチングのパターンを自由に設定できるため、フィンガー電極対応部とバスバー電極対応部で開口面積率を変えることが可能となる。既に述べたように、細線メッシュ部材では、部分的に開口面積率を変えることはできず、フィンガー電極対応部とバスバー電極対応部で開口面積率を変えることは、圧延金属箔のメッシュ部材を用いたスクリーン印刷版を使用することにより初めて可能となる。
　圧延金属箔の素材としては、ステンレス鋼の他、チタン合金、ニッケル合金、銅合金などの箔状にできるものであればよく、例えば、ステンレス鋼であればＳＵＳ３０４Ｈ等、チタン合金であればＪＩＳＨ４６００ ８０種等、ニッケル合金であればＪＩＳＣＳ２５２０（１９８６）ＮＣＨＲＷ１等、銅合金であればＪＩＳＨ３１３０　Ｃ１７２０Ｒ－Ｈ等が挙げられる。また、このような圧延金属箔は、一般的に市販されており、容易に入手できる。
　メッシュ部材の厚さ（圧延金属箔の厚さ）は特に限定されないが、５μｍ以上３０μｍ以下が好ましい。強度の観点から、より好ましくは１０μｍ以上である。 In order to change the printing thickness of the finger electrode and the bus bar electrode, it is necessary to change the opening area ratio of the finger electrode corresponding part and the bus bar electrode corresponding part at the stage of the mesh member. That is, the finger electrode corresponding part is formed so that the opening area ratio is larger than the opening area ratio of the bus bar electrode part. In the mesh member obtained by perforating the rolled metal foil by etching, the etching pattern can be freely set, so that the opening area ratio can be changed between the finger electrode corresponding part and the bus bar electrode corresponding part. As already mentioned, the opening area ratio cannot be partially changed in the thin wire mesh member, and the rolled metal foil mesh member is used to change the opening area ratio between the finger electrode corresponding portion and the bus bar electrode corresponding portion. This is possible only by using a screen printing plate.
As a material of the rolled metal foil, any material that can be formed into a foil shape such as a titanium alloy, a nickel alloy, and a copper alloy in addition to stainless steel may be used. For example, SUS304H is used for stainless steel, and JISH4600 80 is used for a titanium alloy. In the case of a nickel alloy, JISCS2520 (1986) NCHRW1 or the like is used for a nickel alloy, and in the case of a copper alloy, JIS3130 C1720R-H or the like is used. Moreover, such a rolled metal foil is generally commercially available and can be easily obtained.
The thickness of the mesh member (the thickness of the rolled metal foil) is not particularly limited, but is preferably 5 μm or more and 30 μm or less. From the viewpoint of strength, it is more preferably 10 μm or more.
　尚、フィンガー電極対応部とは、スクリーン印刷した後にフィンガー電極となる部分に対応するメッシュ部材部分を意味し、バスバー電極対応部は、スクリーン印刷した後にバスバー電極となる部分に対応するメッシュ部材部分を意味する。また印刷パターン予定部とは、スクリーン印刷する段階で印刷パターンが設定される部分に対応するメッシュ部材部分を意味するが、この部分を説明の便宜上「印刷パターン部」と呼ぶことがある。 The finger electrode corresponding portion means a mesh member portion corresponding to a portion to be a finger electrode after screen printing, and the bus bar electrode corresponding portion is a mesh member portion corresponding to a portion to be a bus bar electrode after screen printing. means. Further, the print pattern scheduled portion means a mesh member portion corresponding to a portion where a print pattern is set at the stage of screen printing, and this portion may be referred to as a “print pattern portion” for convenience of explanation.
　高い開口面積率を達成するためには、印刷パターン部内（即ち、印刷パターン予定部内）にできるだけメッシュの線部が存在しない形とする必要がある。本発明のメッシュ部材では、フィンガー電極対応部での孔形状を横長型に形成された個々の孔が当該孔の横長方向と直交する方向に列設されたもののとし、この横長方向の長さを印刷パターン予定部の幅より大きく形成し、その端部が印刷パターン予定部の外側まで延びで形成することにより、６５～８５％の高い開口面積率を得ることを実現した。こうした孔形状（開口形状）を図７（ａ）～（ｂ）に示す［図７（ａ）は、略長方形のもの、図７（ｂ）は、楕円形のものを示す］。尚、フィンガー電極対応部での孔形状は、上記の要件を満足するものであればよく、図示した略長方形または楕円形に限定されない。 In order to achieve a high aperture area ratio, it is necessary to make the mesh line portion as small as possible in the print pattern portion (that is, in the print pattern planned portion). In the mesh member of the present invention, each hole formed in a horizontally long shape in the finger electrode corresponding portion is arranged in a direction perpendicular to the horizontally long direction of the hole, and the length in the horizontally long direction is set. By forming the print pattern to be larger than the width of the planned print pattern portion and extending the end portion to the outside of the print pattern planned portion, it was possible to obtain a high aperture area ratio of 65 to 85%. Such hole shapes (opening shapes) are shown in FIGS. 7A to 7B [FIG. 7A shows a substantially rectangular shape, and FIG. 7B shows an elliptical shape]. In addition, the hole shape in a finger electrode corresponding | compatible part should just satisfy said requirements, and is not limited to the substantially rectangular shape or ellipse shape shown in figure.
　図７（ａ）～（ｂ）に示した孔形状は、印刷パターンの長手方向（図７（ａ）～（ｂ）の上下方向）にメッシュの線部が存在しないため、メッシュが変形しやすく、線部の幅を７５μｍ以下の細い印刷パターン部の幅でのみ使用することができる。但し、フィンガー電極対応部の印刷パターン部の幅が３５μｍ以下となるとペーストの吐出が抑えられ、その結果として電極の断線が実用上問題となるため、フィンガー電極対応部の印刷パターン部の幅は３５～７５μｍとすることが好ましい。より好ましくは、４０μｍ以上、７０μｍ以下である。 In the hole shapes shown in FIGS. 7A and 7B, there is no mesh line portion in the longitudinal direction of the print pattern (the vertical direction in FIGS. 7A and 7B), so the mesh is easily deformed. The width of the line portion can be used only with the width of the thin printed pattern portion of 75 μm or less. However, when the width of the printed pattern portion of the finger electrode corresponding portion is 35 μm or less, the discharge of the paste is suppressed, and as a result, the disconnection of the electrode becomes a practical problem. Therefore, the width of the printed pattern portion of the finger electrode corresponding portion is 35 It is preferable that the thickness be ~ 75 μm. More preferably, it is 40 μm or more and 70 μm or less.
　一方、バスバー電極対応部では、同一形状の孔が縦方向および横方向に複数並んで配設される。このときの孔形状は、一般的にメッシュ部材で使用されている正方形、長方形、六角形あるいは円形であればよいが、これらに限定されない。こうした孔形状（開口部形状）の例を、図８（ａ）～（ｄ）に示す。図８（ａ）～（ｄ）には、代表的な孔形状である上記した正方形、長方形、六角形および円形を夫々示した。 On the other hand, in the bus bar electrode corresponding part, a plurality of holes having the same shape are arranged side by side in the vertical direction and the horizontal direction. The hole shape at this time may be a square, a rectangle, a hexagon or a circle generally used in mesh members, but is not limited thereto. Examples of such hole shapes (opening shape) are shown in FIGS. FIGS. 8A to 8D show the above-mentioned square, rectangle, hexagon and circle, which are typical hole shapes, respectively.
　バスバー電極対応部で上記のような孔形状を持つメッシュ部材では、強度的に満足できるものとなるため、開口面積率を２５～７０％（より好ましくは３０～６５％）としても、一般的なバスバー電極の幅である１０００～２０００μｍ程度に作製しても不都合なく使用可能である。バスバー電極対応部での開口面積率が７０％よりも大きくとなると、印刷時にメッシュ部材の破れが発生しやすくなる。また開口面積率が２５％よりも小さくなると、印刷後のバスバー電極に印刷かすれが生じ、フィンガー電極との接続が不安定になると共に、タブのはんだ付けにも不具合が生じる。 Since the mesh member having the hole shape as described above in the bus bar electrode corresponding portion is satisfactory in strength, even if the opening area ratio is 25 to 70% (more preferably 30 to 65%), Even if the width of the bus bar electrode is about 1000 to 2000 μm, it can be used without any inconvenience. When the opening area ratio at the bus bar electrode corresponding portion is larger than 70%, the mesh member is easily broken during printing. If the opening area ratio is smaller than 25%, the printed bus bar electrode will be blurred, and the connection with the finger electrode will become unstable and the soldering of the tab will also be defective.
　上記開口面積率とは、例えば図９（ａ）～（ｂ）（図７（ａ）～（ｂ）対応説明図）に示すように、孔（開口部）を形成した領域とそれ以外の領域との境界（点線で示す）を、孔の端部を基準として設定し、点線で囲まれた領域内での孔（開口部）の面積割合（平面視面積率：％）を意味する。尚、図９（ａ）～（ｂ）では、フィンガー電極対応部（図では「フィンガー電極部」と表示）での開口面積率の場合を示したが、バスパー電極対応部での開口面積率の場合においても同様にして計算する。 The opening area ratio is, for example, as shown in FIGS. 9A to 9B (FIGS. 7A to 7B corresponding explanatory views), a region in which holes (openings) are formed, and other regions. Is defined with reference to the end of the hole as a reference, and means the area ratio (area ratio in plan view:%) of the hole (opening) in the region surrounded by the dotted line. 9A to 9B show the case of the opening area ratio at the finger electrode corresponding portion (indicated by “finger electrode portion” in the figure), the opening area ratio at the busper electrode corresponding portion is shown. In the case, the same calculation is performed.
　本発明のメッシュ部材では、フィンガー電極対応部の開口面積率をバスバー電極対応部の開口面積率よりも大きくできるのであるが、フィンガー電極対応部の開口面積率に対するバスバー電極部の開口面積率の比（「バスバー／フィンガー」、以下単に「開口率比」と呼ぶことがある）は、０．３０～０．８０であることが好ましい。この開口率比が０．３０よりも小さくなると、スクリーン印刷の際に銀ペーストの量が少なくなり過ぎて、印刷かすれが生じやすくなる。また開口率比が０．８０よりも大きくなると、銀ペースト量の低減効果が得られにくくなる。開口率比は、より好ましくは０．４０以上であり、より好ましくは０．７０以下である。 In the mesh member of the present invention, the opening area ratio of the finger electrode corresponding part can be larger than the opening area ratio of the bus bar electrode corresponding part, but the ratio of the opening area ratio of the bus bar electrode part to the opening area ratio of the finger electrode corresponding part (“Bus bar / finger”, hereinafter simply referred to as “aperture ratio”) is preferably 0.30 to 0.80. When this aperture ratio is smaller than 0.30, the amount of silver paste becomes too small during screen printing, and printing blur tends to occur. On the other hand, when the aperture ratio is larger than 0.80, it is difficult to obtain the effect of reducing the amount of silver paste. The aperture ratio is more preferably 0.40 or more, and more preferably 0.70 or less.
　フィンガー電極対応部の開口面積率とバスバー電極対応部の開口面積率を変えてメッシュ部材を作製し、これらを備えて印刷版を構成し、この印刷版を用いて印刷試験を行ったときの電極に形成された銀ペーストの重量を測定した。 Electrodes when a mesh member is prepared by changing the opening area ratio of the finger electrode corresponding portion and the opening area ratio of the bus bar electrode corresponding portion, and a printing plate is configured by using these to perform a printing test using the printing plate The weight of the silver paste formed was measured.
　このときメッシュ部材には、厚さ２５μｍのステンレス圧延箔（日本金属株式会社製、ＳＵＳ３０１）を圧延金属箔として使用した。圧延金属箔にレジストを塗布し、フィンガー電極対応部とバスバー電極対応部で孔形状および開口面積率が変わるように孔を配列し、印刷したパターンを描画したガラスマスクを使って露光後、現像した。その後エッチングにより、孔を開ける部分の圧延金属箔を溶かし、圧延金属箔に孔を開けたメッシュ部材を作製した。 At this time, a stainless steel rolled foil (manufactured by Nippon Metal Co., Ltd., SUS301) having a thickness of 25 μm was used as the rolled metal foil for the mesh member. A resist is applied to the rolled metal foil, the holes are arranged so that the hole shape and the opening area ratio are changed in the finger electrode corresponding part and the bus bar electrode corresponding part, and after exposure using a glass mask on which a printed pattern is drawn, development is performed. . Thereafter, the rolled metal foil was melted by etching to form a mesh member having holes formed in the rolled metal foil.
　メッシュ部材の孔の形状は、フィンガー電極対応部ではコーナー部に丸みを帯びた略長方形とし（前記図７（ａ）参照）、バスバー電極対応部ではコーナー部に丸みを帯びた正方形とした。孔と孔の間隔（ピッチ）は、フィンガー電極対応部とバスバー電極対応部ともに１００μｍとした。フィンガー電極対応部の開口面積率とバスバー電極対応部の開口面積率を夫々独立して変えた複数のメッシュ部材（圧延金属箔メッシュ部材）を作製した。このときフィンガー電極対応部での孔の大きさ（図７（ａ）に示した略長方形の長辺の長さ）は、フィンガー電極対応部での印刷パターン幅（後記表１、２）よりも大きくなるように７５～３５０μｍの範囲で設定した。 The shape of the hole of the mesh member was a substantially rectangular shape with rounded corners at the finger electrode corresponding parts (see FIG. 7A), and the bus bar electrode corresponding parts were rounded at the corners. The distance (pitch) between the holes was 100 μm for both the finger electrode corresponding part and the bus bar electrode corresponding part. A plurality of mesh members (rolled metal foil mesh members) were produced in which the opening area ratio of the finger electrode corresponding part and the opening area ratio of the bus bar electrode corresponding part were independently changed. At this time, the size of the hole in the finger electrode corresponding part (the length of the long side of the substantially rectangular shape shown in FIG. 7A) is larger than the print pattern width (Tables 1 and 2 below) in the finger electrode corresponding part. It was set in the range of 75 to 350 μm so as to increase.
　メッシュ部材のスキージ面側と印刷面側の開口の面積をマイクロスコープ（株式会社キーエンス製、型式ＶＨＸ－２０００）で測定し（孔の形態によっては、両面で開口面積率が異なる）、各面での開口面積率を平均したものを開口面積率とした。また、開口面積率の測定は、いずれの領域（フィンガー電極対応部およびバスバー電極対応部）においても、均等となるように５箇所（例えばフィンガー電極対応部では、中央１箇所と４隅の４箇所）について、上記と同様に測定し、平均化した。 Measure the area of the mesh member opening on the squeegee surface side and the printing surface side with a microscope (manufactured by Keyence Co., Ltd., model VHX-2000). The average opening area ratio was defined as the opening area ratio. In addition, the measurement of the opening area ratio is performed at five locations so as to be uniform in any region (finger electrode corresponding portion and bus bar electrode corresponding portion) (for example, at the finger electrode corresponding portion, four locations at the center and four corners). ) Was measured and averaged in the same manner as described above.
　樹脂メッシュをメッシュ部材の周辺に付けたコンビネーションマスクとし、感光性乳剤を塗布後、フィンガー電極対応部とバスバー電極対応部に印刷パターン部を形成して印刷版を作製した。これらの印刷版を用いてスクリーン印刷を行い、印刷されたペースト重量を測定した。ペーストは、太陽電池の表面電極用銀ペースト（京都エレックス株式会社製、品名ＤＤ－１２００Ｍ－２００）を使用した。印刷は、東海精機株式会社製スクリーン印刷装置（型式ＳＳＡ－ＰＣ２５０）を使用し、印刷条件を印圧１０ｋｇｆ、クリアランス１ｍｍ、印刷速度２００ｍｍ／ｓｅｃとして、太陽電池用多結晶ウエハ（外形寸法１５６×１５６ｍｍ）に印刷した。 A combination mask with a resin mesh attached to the periphery of the mesh member was applied, and after applying the photosensitive emulsion, a printing pattern portion was formed on the finger electrode corresponding portion and the bus bar electrode corresponding portion to prepare a printing plate. Screen printing was performed using these printing plates, and the weight of the printed paste was measured. As the paste, a silver paste for a surface electrode of a solar cell (product name: DD-1200M-200, manufactured by Kyoto Elex Co., Ltd.) was used. For printing, a screen printing device (model SSA-PC250) manufactured by Tokai Seiki Co., Ltd. is used. The printing conditions are a printing pressure of 10 kgf, a clearance of 1 mm, a printing speed of 200 mm / sec, and a polycrystalline wafer for solar cells (external dimensions 156 × 156 mm). ).
　スクリーン印刷前および印刷後に、太陽電池ウエハの重量を電子天秤（研精工業株式会社製、型式ＨＲ－１２０）で測定し、印刷されたペースト重量を求めた。印刷版でのフィンガー電極対応部およびバスバー電極対応部の印刷パターン部の幅をマイクロスコープ（株式会社キーエンス製、型式ＶＨＸ－２０００）で測定した。 Before and after screen printing, the weight of the solar cell wafer was measured with an electronic balance (manufactured by Kensei Kogyo Co., Ltd., model HR-120), and the weight of the printed paste was determined. The width of the printed pattern portion of the finger electrode corresponding portion and the bus bar electrode corresponding portion on the printing plate was measured with a microscope (manufactured by Keyence Corporation, model VHX-2000).
　このときペーストの透過性を確保するため、フィンガー電極対応部での開口面積率はできるだけ大きくなるように、６６～８４％の範囲に設定した。またフィンガー電極対応部の印刷パターン部の幅は３０～７１μｍに設定した。フィンガー電極の本数は、太陽電池で標準的に使われている範囲である７２～１００本に設定した。 At this time, in order to ensure the permeability of the paste, the opening area ratio at the finger electrode corresponding portion was set in the range of 66 to 84% so as to be as large as possible. The width of the printed pattern portion of the finger electrode corresponding portion was set to 30 to 71 μm. The number of finger electrodes was set to 72 to 100, which is a range normally used in solar cells.
　バスバー電極対応部での開口面積率は、できるだけ小さくするとの観点から、２０％以上、７２％以下に設定した。バスバー電極対応部での印刷パターン部の幅は、バスバー電極の本数が２本の場合に１本当たり１７００～１８００μｍに、バスバー電極の数が３本の場合に１本当たり１４５０～１５００μｍに設定した。 The opening area ratio in the bus bar electrode corresponding part was set to 20% or more and 72% or less from the viewpoint of making it as small as possible. The width of the printed pattern portion in the bus bar electrode corresponding portion is set to 1700 to 1800 μm per one when the number of bus bar electrodes is two, and 1450 to 1500 μm per one when the number of bus bar electrodes is three. .
　その結果を、下記表１、２に示す。下記表１、２では、フィンガー電極対応部の開口面積率に対するバスバー電極対応部の開口面積率の比（開口率比）の順に、試験Ｎｏ．を付けている。また、この結果に基づき、開口率比とペースト重量との関係を図１０に示す。尚、表１において「－」で示した欄は、バスバー電極対応部（図１０では「バスバー電極部」と表示）でメッシュ破れが生じたことを意味する。 The results are shown in Tables 1 and 2 below. In Tables 1 and 2 below, in the order of the ratio (opening ratio) of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion, the test No. Is attached. Based on this result, the relationship between the aperture ratio and the paste weight is shown in FIG. In Table 1, the column indicated by “−” means that mesh breakage occurred in the bus bar electrode corresponding portion (indicated as “bus bar electrode portion” in FIG. 10).
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
　これらの結果から、次のように考察できる。開口率比が１から０．８０まではペースト重量はほぼ一定値となるが、開口率比が０．８０より小さくなるとペースト重量は減少し、コストダウン効果が期待でできる。更に、好ましくは開口率比を０．７０以下とすることで、大きなコストダウン効果を得ることが可能となる。但し、開口率比が０．３０よりも小さくなると（試験Ｎｏ．４０、４１）、バスバー電極に印刷かすれが認められた。試験Ｎｏ．４０でバスバー電極対応部の開口面積率が２０％、試験Ｎｏ．４１でバスバー電極対応の開口面積率が２１％となっており、これらの開口面積率では印刷かすれが避けがたい。 From these results, it can be considered as follows. When the aperture ratio is from 1 to 0.80, the paste weight is almost constant. However, when the aperture ratio is less than 0.80, the paste weight is reduced, and a cost reduction effect can be expected. Furthermore, it is possible to obtain a large cost reduction effect, preferably by setting the aperture ratio to 0.70 or less. However, when the aperture ratio was smaller than 0.30 (Test Nos. 40 and 41), print fading was observed on the bus bar electrodes. Test No. 40, the opening area ratio of the bus bar electrode corresponding part is 20%. In 41, the opening area ratio corresponding to the bus bar electrode is 21%, and it is difficult to avoid blurring of printing with these opening area ratios.
　開口率比が０．８０を超え、且つバスバー電極対応部の開口面積率が７０％を超えると、スクリーン印刷時に印刷版のバスバー電極対応部のメッシュ部材に破れが生じ（試験Ｎｏ．２、５）、印刷実験が行えない印刷版があった。こうした観点から、バスバー電極対応部の開口面積率は７０％以下とすることが好ましい。 If the aperture ratio exceeds 0.80 and the opening area ratio of the bus bar electrode corresponding portion exceeds 70%, the mesh member of the bus bar electrode corresponding portion of the printing plate is torn during screen printing (Test Nos. 2, 5). ), There was a printing plate that could not be printed. From such a viewpoint, it is preferable that the opening area ratio of the bus bar electrode corresponding part is 70% or less.
　これに対し、開口率比を０．３０～０．８０の範囲とするメッシュ部材（試験Ｎｏ．１０～３９）では、フィンガー電極対応部でのメッシュの断線は観察されず、またバスバー電極のかすれも観察されず良好な電極となっている。加えて印刷時のバスバー電極対応部におけるメッシュ部材の破れも見られない。 On the other hand, in mesh members (test Nos. 10 to 39) having an aperture ratio in the range of 0.30 to 0.80, no mesh breakage was observed at the finger electrode corresponding portions, and the bus bar electrodes were blurred. Is not observed and is a good electrode. In addition, the mesh member is not broken at the bus bar electrode corresponding portion during printing.
　以下、本発明を実施例によって更に詳細に説明するが、下記実施例は本発明を限定する性質のものではなく、前・後記の趣旨に適合し得る範囲で適当に変更して実施することも可能であり、それらはいずれも本発明の技術的範囲に含まれる。 Hereinafter, the present invention will be described in more detail with reference to examples. However, the following examples are not intended to limit the present invention, and may be implemented with appropriate modifications within a range that can meet the purpose described above and below. These are all possible and are within the scope of the present invention.
　下記表３に示した仕様のスクリーン印刷版（試験Ｎｏ．４２、４３）を用いて、実際の太陽電池を作製して変換効率を測定した。作製した太陽電池のフィンガー電極およびバスバー電極の実際の幅と厚さをレーザ顕微鏡（株式会社キーエンス製、型式ＶＫ９７００）により測定した。その結果を、下記表４に示す。 Using the screen printing plates (test Nos. 42 and 43) having the specifications shown in Table 3 below, actual solar cells were produced and the conversion efficiency was measured. The actual width and thickness of the finger electrode and bus bar electrode of the produced solar cell were measured with a laser microscope (manufactured by Keyence Corporation, model VK9700). The results are shown in Table 4 below.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
　試験Ｎｏ．４２では、開口率比が０．９１の印刷版を用いて各電極（フィンガー電極およびバスバー電極）を形成しており、試験Ｎｏ．４３では、開口率比０．５７の印刷版を用いて各電極を形成している。ペースト重量は夫々２３２．０ｍｇ（試験Ｎｏ．４２）、１９０．１ｍｇ（試験Ｎｏ．４３）と大きく異なるが、変換効率は夫々１６．４％、１６．５％とほぼ同レベルであり、ペースト重量が削減された状態で太陽電池としての性能を維持していることが分かる。 Test No. 42, each electrode (finger electrode and bus bar electrode) was formed using a printing plate having an aperture ratio of 0.91. In 43, each electrode is formed using a printing plate having an aperture ratio of 0.57. The paste weights differ greatly from 232.0 mg (Test No. 42) and 190.1 mg (Test No. 43), respectively, but the conversion efficiencies are approximately the same as 16.4% and 16.5%, respectively. It can be seen that the performance as a solar cell is maintained in a state where is reduced.
　これはフィンガー電極の幅、厚さが両者でほぼ同じであることと、バスバー電極の幅がほぼ同一で厚さが大きく異なることで実現されている。すなわちフィンガー電極対応部とバスバー電極対応部で、孔形状および開口面積率を変えることができる圧延金属箔メッシュ部材を用いた印刷版の有用性が明確に認められる。 This is realized by the fact that the width and thickness of the finger electrode are substantially the same for both, and the width of the bus bar electrode is substantially the same and the thickness is greatly different. That is, the usefulness of the printing plate using the rolled metal foil mesh member that can change the hole shape and the opening area ratio between the finger electrode corresponding part and the bus bar electrode corresponding part is clearly recognized.
　本出願を詳細にまた特定の実施態様を参照して説明したが、本発明の精神と範囲を逸脱することなく様々な変更や修正を加えることができることは当業者にとって明らかである。
　本出願は、2012年6月19日出願の日本特許出願（特願2012－138165）に基づくものであり、その内容はここに参照として取り込まれる。 Although this application has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention.
This application is based on a Japanese patent application filed on June 19, 2012 (Japanese Patent Application No. 2012-138165), the contents of which are incorporated herein by reference.
　本発明のメッシュ部材によれば、圧延金属箔にエッチングで孔開け加工されたものとし、フィンガー電極対応部およびバスバー電極対応部における開口面積率の関係を規定するようにしたので、太陽電池としての性能を落とすことなく、ペースト使用量の削減を実現するスクリーン印刷用メッシュ部材、およびこうしたスクリーン印刷用メッシュ部材を備えて構成されるスクリーン印刷版が実現できる。 According to the mesh member of the present invention, it was assumed that the rolled metal foil was perforated by etching, and the relationship between the opening area ratios in the finger electrode corresponding part and the bus bar electrode corresponding part was defined. A screen printing mesh member that can reduce the amount of paste used without degrading performance, and a screen printing plate that includes such a screen printing mesh member can be realized.
１ 線部
２ 孔（開口部）
３ 印刷パターン部
５ スクリーン印刷版
６ スキージ
８ 印刷対象物 1 Line 2 Hole (Opening)
3 Print Pattern Section 5 Screen Printing Plate 6 Squeegee 8 Print Object

Claims (6)

  1. 　太陽電池の表面電極となるフィンガー電極およびバスバー電極をスクリーン印刷で形成するときに用いられるスクリーン印刷用メッシュ部材であって、
    　このメッシュ部材は圧延金属箔にエッチングで孔開け加工されたものであり、
    　フィンガー電極対応部では、横長型に形成された個々の孔が当該孔の横長方向と直交する方向に列設され、当該孔の横長方向の長さが、印刷パターン予定部の幅より大きく、その端部が印刷パターン予定部の外側まで延びて形成されており、
    　バスバー電極対応部では、同一形状の孔が縦方向および横方向に複数並んで配設されており、且つ、
    　フィンガー電極対応部における開口面積率がバスバー電極対応部における開口面積率よりも大きいことを特徴とするスクリーン印刷用メッシュ部材。     A mesh member for screen printing used when forming finger electrodes and bus bar electrodes to be surface electrodes of a solar cell by screen printing,
    This mesh member has been punched into the rolled metal foil by etching,
    In the finger electrode corresponding portion, the individual holes formed in the horizontally long shape are arranged in a direction orthogonal to the horizontally long direction of the hole, and the length of the hole in the horizontally long direction is larger than the width of the print pattern planned portion. The end is formed to extend to the outside of the print pattern planned part,
    In the bus bar electrode corresponding part, a plurality of holes having the same shape are arranged in the vertical direction and the horizontal direction, and
    A mesh member for screen printing, wherein an opening area ratio in a finger electrode corresponding part is larger than an opening area ratio in a bus bar electrode corresponding part.
  2. 　フィンガー電極対応部の開口面積率が６５～８５％であり、バスバー電極対応部の開口面積率が２５～７０％である請求項１に記載のスクリーン印刷用メッシュ部材。 The mesh member for screen printing according to claim 1, wherein the opening area ratio of the finger electrode corresponding portion is 65 to 85% and the opening area ratio of the bus bar electrode corresponding portion is 25 to 70%.
  3. 　フィンガー電極対応部の開口面積率に対するバスバー電極対応部の開口面積率の比が、０．３０～０．８０である請求項１に記載のスクリーン印刷用メッシュ部材。 The screen printing mesh member according to claim 1, wherein the ratio of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion is 0.30 to 0.80.
  4. 　フィンガー電極対応部の開口面積率に対するバスバー電極対応部の開口面積率の比が、０．３０～０．８０である請求項２に記載のスクリーン印刷用メッシュ部材。 The mesh member for screen printing according to claim 2, wherein the ratio of the opening area ratio of the bus bar electrode corresponding portion to the opening area ratio of the finger electrode corresponding portion is 0.30 to 0.80.
  5. 　請求項１～４のいずれか一項に記載のスクリーン印刷用メッシュ部材を備えるスクリーン印刷版。 A screen printing plate comprising the mesh member for screen printing according to any one of claims 1 to 4.
  6. 　フィンガー電極対応部の印刷パターンの幅が３５～７５μｍである請求項５に記載のスクリーン印刷版。 6. The screen printing plate according to claim 5, wherein the width of the printed pattern of the finger electrode corresponding part is 35 to 75 μm.
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CN115431628A (en) * 2021-06-03 2022-12-06 仓和精密制造(苏州)有限公司 Method for manufacturing screen printing plate without net knots
CN115431628B (en) * 2021-06-03 2024-04-30 仓和精密制造(苏州)有限公司 Method for manufacturing net-knot-free screen printing plate

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KR101717337B1 (en) 2017-03-16
CN104411504A (en) 2015-03-11
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JP2014000740A (en) 2014-01-09
CN104411504B (en) 2016-07-06

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