TWI656981B - Screen printing - Google Patents

Abstract

An object of the present invention is to provide a screen printing plate for use in a screen printing plate using a metal foil mesh member having an opening in a metal foil having a thickness of 5 μm or more and 25 μm or less, so that damage to the metal foil mesh member is unlikely to occur.

The screen printing plate for a solution is characterized in that it includes a plurality of openings arranged along one direction of a metal foil having a thickness of 5 μm or more and 25 μm or less, and a metal foil having a pattern for finger electrodes for providing finger electrodes. Mesh member and resin covering a part of the plurality of openings; metal foil mesh member so that tension in one direction extending along the opening of the pattern for a finger electrode is greater than tension in a direction perpendicular to one direction Big way supporter.

Description

Screen printing

The present invention relates to the formation of collector electrodes on the front and back of solar cells, or screen printing plates used for screen printing in other applications.

In solar cells, the more electron / positive hole pairs generated by sunlight, the higher the power generation performance. In order to increase the generation of electron / positive hole pairs, it is necessary for solar cells to increase the amount of sunlight received. On the other hand, in order to collect the generated electrons and positive holes, it is necessary to arrange a collector electrode called a finger electrode on the light receiving surface of sunlight. However, the sunlight in the place where the finger electrodes are arranged here will be blocked, so it is necessary to make the width of the finger electrodes as small as possible to reduce the light-shielding area of the sunlight.

For the above reasons, thinning of the finger electrodes has been pursued for the high performance of solar cells. A screen printing plate using a rolled metal foil mesh member to narrow the width of the finger electrodes must not only achieve the thinning of the pattern opening width, but also reduce the transmission volume of the paste. In short, even if the opening width of the emulsion for a pattern for a finger electrode is narrowed, if the rolled metal foil is kept thick, the transmission volume will be large, so the amount of paste discharged will increase, and the finger electrode cannot be made thin. Here, for thinning, the gold is rolled The thickness of the foil mesh members must also be reduced.

On the other hand, the present inventor also found that when the thickness of the rolled metal foil mesh member is reduced, there is a concern that the rolled metal foil mesh member may be damaged in the XY plane direction and the Z direction tension. .

In addition, in the past, a metal mask having a thickness of 20 to 100 μm in a thick film region has been proposed that a metal mask alone cannot maintain a specific size and shape (for example, refer to Patent Document 1). For this problem, it is known to maintain the size and shape of the metal mask and the combination mask of the circuit pattern by maintaining the anisotropy while performing anisotropy in each of the XY directions of the screen mesh. technology.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2003-64468

However, in the aforementioned technique of combining masks, only the anisotropy is maintained in the XY direction of the screen mesh while maintaining the specific size and shape while being stretched. In addition, in the aforementioned technology, the problem of damage is not considered, and in order to avoid damage, the technology of increasing or reducing the tension in a certain direction does not have any suggestion.

An object of the present invention is to provide a screen printing plate, which is formed by using a metal foil having an opening at a thickness of 5 μm or more and 25 μm or less. For the screen printing plate of the metal foil mesh member, it is difficult for the metal foil mesh member to be damaged.

A screen printing plate according to the present invention includes a plurality of openings arranged along one direction of a metal foil having a thickness of 5 μm or more and 25 μm or less, and a metal foil mesh having a pattern for finger electrodes for providing finger electrodes. A member, and a resin covering a part of the plurality of openings; the metal foil mesh member such that the tension ratio in the one direction extending along the opening in the finger electrode pattern is perpendicular to the direction in the one direction The tension is even greater in the way supporters.

According to the screen printing plate according to the present invention, a screen printing plate using a metal foil mesh member provided with an opening in a metal foil having a thickness of 5 μm or more and 25 μm or less is unlikely to cause damage to the metal foil mesh member.

2‧‧‧Patterns for finger electrodes

4‧‧‧ Busbar electrode pattern

10‧‧‧ Rolled metal foil mesh member

12‧‧‧ ribs

14‧‧‧ opening (hole)

16‧‧‧Resin (photosensitive emulsion)

18‧‧‧ line pattern

20‧‧‧ Screen printing

22‧‧‧ aluminum frame

24‧‧‧ polyester mesh

42‧‧‧Scraper

43‧‧‧Silver paste

44‧‧‧ scraper

46‧‧‧ Silicon Wafer

47‧‧‧Scraper surface

48‧‧‧print side

FIG. 1 is a plan view showing an outline of a screen printing plate according to a first embodiment.

FIG. 2 is a schematic cross-sectional view seen in the direction A-A of FIG. 1. FIG.

FIG. 3A is a partially enlarged plan view of region I of the finger electrode pattern of the screen printing plate of FIG. 1, FIG. 3B is a schematic cross-sectional view viewed in the BB direction of FIG. 3A, and FIG. 3C is a schematic cross-sectional view viewed in the CC direction of FIG. 3A. Illustration.

FIG. 4 is an enlarged view of a corner portion of the finger electrode pattern and the bus bar electrode pattern of the screen printing plate of FIG. 1.

5A is an enlarged view of a region II of the finger electrode pattern of the screen printing plate of FIG. 4, and FIG. 5B is an enlarged view of a region V of the finger electrode pattern of FIG. 5A.

FIG. 6 is a partial enlarged view of a region III of a finger electrode pattern and a bus bar electrode pattern of the screen printing plate of FIG. 4.

FIG. 7 is a partial enlarged view of a region IV of a finger electrode pattern and a bus bar electrode pattern of the screen printing plate of FIG. 4.

FIG. 8 is a schematic diagram showing the outline of screen printing.

FIG. 9 shows the maximum tension (Tx (N / cm)) in one direction of the pattern of finger electrodes for screen printing plates and the maximum tension (Ty1 (N / cm), Ty2 (N / cm)).

The screen printing plate related to the first aspect includes a metal having a plurality of openings arranged along one direction of a metal foil having a thickness of 5 μm or more and 25 μm or less, and a metal having a pattern for finger electrodes for providing finger electrodes. A foil mesh member, and a resin covering a part of the plurality of openings; the metal foil mesh member so as to follow the pattern for the finger electrode The tension in the one direction extending from the opening portion is greater than the tension in the direction perpendicular to the one direction.

The screen printing plate related to the second aspect is in the first aspect, the tension of the metal foil mesh member supported in the vertical direction is 2.4ah / pw (N / cm) or less, and the a is the foregoing Value of (upper bottom + lower bottom) (in upper + lower bottom) the cross section of the ribs constituting the opening in the depth direction intersecting with the extending one direction of the pattern for the finger electrode of the metal foil mesh member (μm + bottom) ), H is the height (μm) of the approximate rectangular shape of the cross section of the fin, and pw may be the pitch (μm) of the fin in the one direction.

The screen printing plate related to the third aspect is the first or second aspect. The tension of the pattern of the finger electrode pattern in the aforementioned metal foil mesh member is 20 N / cm or more. Also, a range of 30 N / cm or less is acceptable.

The screen printing plate related to the fourth aspect is any one of the first to third aspects. The metal foil mesh member is provided with a plurality of openings in a direction perpendicular to the one direction. The bus bar electrode pattern for a bus bar electrode extending in a direction perpendicular to the finger electrode is directed to the ribs constituting the opening portion of the bus bar electrode pattern along the vertical direction per unit length. Section of ribs The cross-sectional area of the ribs per unit length along the one direction may be larger than the ribs constituting the openings in the pattern for the finger electrode.

Hereinafter, the screen printing plate related to the embodiment will be described with reference to the drawings. In the drawings, the same symbols are assigned to substantially the same members.

(Implementation Mode 1) <Screen printing plate>

FIG. 1 is a plan view showing an outline of a screen printing plate 20 related to Embodiment 1. FIG. 2 is a schematic cross-sectional view seen in the direction A-A of FIG. 1. FIG. 3A is a partially enlarged plan view of a region I of a finger electrode pattern of the screen printing plate of FIG. 1.

As shown in FIGS. 1 and 2, the screen printing plate 20 is provided with the aforementioned rolled metal foil mesh member 10 through a mesh fabric 24 such as a woven polyester thread in an aluminum frame 22. This screen printing plate 20 has the aforementioned rolled metal foil mesh member, as shown in FIG. 3A, a resin 16 covering a plurality of openings 14 arranged along one direction, and a wide opening resin 16 in a range of 10 μm to 60 μm. Drawn into a line pattern 18. The line pattern 18 is provided in a direction in which the longitudinal direction is one direction and is provided across the opening portion 14 drawn between the ribs 12. The width of the line pattern 18 is a direction that intersects the longitudinal direction. The wide width may be, for example, a direction intersecting the longitudinal direction with an angle therebetween. Alternatively, the width may be a direction perpendicular to the longitudinal direction.

This screen printing plate 20 has a thickness of 5 μm or more, The rolled metal foil mesh member 10 having the plurality of openings 14 and the resin 16 covering a part of the plurality of openings 14 are arranged in one direction of the rolled metal foil of 25 μm or less. The rolled metal foil mesh member 10 has a plurality of openings arranged along one of the directions, and has a finger electrode pattern 2 for providing a finger electrode. Further, on the screen printing plate 20, the metal foil mesh member 10 is rolled so that the tension Tx in one direction extending along the opening portion of the finger electrode pattern 2 is larger than the tension Ty in a direction perpendicular to the one direction. Way supporter.

<Effects>

When forming the screen printing plate 20, in the bonding step of rolling the rolled metal foil mesh member 10 to a fiber cloth such as polyester resin, the tension applied to the rolled metal foil mesh member 10 in the XY plane direction is generally 24 N / cm ~ 28N / cm degree.

FIG. 9 shows the maximum tension (Tx (N / cm)) in one direction of the pattern of finger electrodes for screen printing plates and the maximum tension (Ty1 (N / cm), Ty2 (N / cm)). The tensile test performed by the inventors of the present invention revealed that the fracture resistance of the rolled metal foil mesh member 10 is different in the parallel direction Tx and the vertical direction Ty (Ty1, Ty2) of the finger electrode pattern 2. In short, the results are obtained in which the parallel direction Tx is 78.3 N / cm or more, the vertical direction Ty1 is broken above 58.1 N / cm, and the Ty2 is about 24.7 N / cm (N1) or 36 N / cm (N2).

In addition, Ty1 is a test piece for the area II shown in FIG. 4, and Ty2 is a needle. For the test piece in the region III shown in FIG. 4, Tx is obtained by a tensile test described later with respect to the test piece in the region IV shown in FIG. 4. In addition, the breakage should be a relatively weak portion such as the thin ribs 12 constituting the opening portion of the pattern for a finger electrode.

For a normal tension (24 N / cm to 28 N / cm) applied to the rolled metal foil mesh member 10 in the XY plane direction, the direction Tx parallel to the finger electrode pattern 2 of the rolled metal foil mesh member 10 is 78.3 N / Damage tolerance below cm. On the other hand, the damage resistance of Ty2 in the vertical direction is only the same as the applied load (24.7N / cm, 36N / cm). There is a concern that the rolled metal foil mesh member 10 is damaged during the combined process or printing use. . This is a problem to be solved by the present invention.

According to this screen printing plate 20, the metal foil mesh member 10 is rolled so that the tension in one direction extending along the opening of the finger electrode pattern 2 is greater than the tension in a direction perpendicular to the one direction. Big way supporter. In short, the tension Ty in the extending direction of the thin ribs 12 constituting the openings of the finger electrode pattern 2 constituting the rolled metal foil mesh member 10 is set to correspond to the cross-sectional area of the ribs 12 along one direction. The maximum tension is even smaller. Thereby, the thin fins 12 are not easily broken. Here, even if the screen printing plate 20 having a thin rolled metal foil thickness of 25 μm or less is used, the effect that the finger electrode pattern 2 of the rolled metal foil mesh member 10 is hard to break can be obtained.

<Metal foil>

The metal foil is a rolled metal foil. It is not limited to rolled metal foil, Can be electroformed metal foil. The metal foil may contain, for example, at least one selected from the group consisting of stainless steel (for example, SUS301, SUS304, SUS316, etc.), titanium, titanium alloy, nickel, nickel alloy, copper, copper alloy, and aluminum alloy.

The thickness of the metal foil is 5 μm or more and 25 μm or less. It is preferably 20 μm or less.

Furthermore, most of the openings 14 provided in the metal foil may be formed by a chemical etching, a mechanical opening process, or an electroforming method.

<Pattern for finger electrode and pattern for bus bar electrode>

FIG. 4 is a partial enlarged view of the corner portions of the finger electrode pattern 2 and the bus bar electrode pattern 4 of the screen printing plate 20 of FIG. 1. FIG. 5A is a partially enlarged view of a region II of the finger electrode pattern 2 of the screen printing plate 20 of FIG. 4. FIG. 5B is a partially enlarged view of a region V of the finger electrode pattern 2 of FIG. 5A. FIG. 6 is a partially enlarged view of region III of the finger electrode pattern 2 and the bus bar electrode pattern 4 of the screen printing plate 20 of FIG. 4. FIG. 7 is a partial enlarged view of region IV of finger electrode pattern 2 and bus bar electrode pattern 4 of screen printing plate 20 of FIG. 4. Fig. 3B is a schematic cross-sectional view taken along the line B-B in Fig. 3A. Fig. 3C is a schematic cross-sectional view taken along the line C-C in Fig. 3A.

The finger electrode pattern 2 is for a user who provides a finger electrode, and as shown in FIG. 3A, a plurality of openings 14 are arranged along one direction. Because the resin 16 is arranged in one direction in this way, and the resin 16 is opened along the one direction, a line pattern 18 can be drawn across the plurality of openings 14. In addition, the planar shape of the opening portion 14 is not limited to a rectangular shape, and may be an oval shape or other shapes.

Furthermore, the width of the line pattern 18, that is, the width of the emulsion opening, corresponds to the width of the finger electrode formed, and is, for example, in the range of 10 μm or more and 60 μm or less.

As shown in FIG. 3B, the openings 14 are drawn between the ribs 12. The cross-sectional shape of the fins 12 is approximately an inverse trapezoidal shape, the upper bottom is UL, the lower bottom is BL, and the height (thickness) is h.

The cross-sectional shape of the ribs 12 is not limited to a reverse trapezoidal shape, and may be, for example, a parallelogram. In addition, the ribs 12 are arranged at substantially constant intervals pw.

The bus bar electrode pattern 4 is for a user who installs a bus bar electrode. A plurality of openings 14 are arranged along a direction perpendicular to one direction of the finger electrode pattern 2.

In addition, the size of the opening width of the line pattern 18 across the plurality of openings 14 may be different from the user who provides the finger electrodes. Furthermore, the planar shape of the opening 14 may be different from a user who provides a finger electrode.

In addition, the bus bar electrodes are provided for the purpose of collecting the finger electrodes, and the number of the bus bar electrode patterns 4 is smaller than the number of the finger electrode patterns 2.

In addition, the cross-sectional area of the ribs 12 constituting the openings 14 per unit length along the vertical direction of the ribs 12 constituting the openings 14 of the bus bar electrode pattern 4 is larger than that of the ribs constituting the openings 14 of the finger electrode pattern 2. The sheet 12 may have a larger cross-sectional area per unit length of the rib 12 along one direction. Thereby, the maximum tension in the vertical direction extending along the opening portion 14 of the bus bar electrode pattern 4 can be increased, and the damage resistance in one direction can be improved. Sex.

The cross-sectional area per unit length of the ribs 12 constituting the openings 14 of the bus bar electrode pattern 4 can be increased by narrowing the pitch pw of the ribs 12. Compared with the finger electrode, the bus bar electrode can increase its width, so the emulsion opening can be widened. Here, even if the pitch of the ribs 12 is narrowed, a sufficient opening area can be secured.

<Resin>

As shown in FIG. 3A, the resin 16 covers a part of the plurality of openings 14 arranged along one direction.

This resin 16 is, for example, a photo-hardened photosensitive emulsion.

<Line pattern>

The line pattern 18 is formed by opening the resin 16 with two spaced apart straight lines. The line pattern 18 is provided in such a manner that the longitudinal direction of the line pattern 18 crosses the plurality of openings 14. In addition, the aforementioned wide width refers to a direction intersecting with the longitudinal direction.

<For the relationship between the cross-sectional area and tension of ribs>

From the results of tensile strength measurement, the inventors of the present application found that the allowable value of the tensile strength of the rolled metal foil mesh member 10 having a foil thickness of 20 μm or less is different in the XY direction. The present invention has been completed by taking advantage of this situation to a screen printing plate and considering the means for improving the damage resistance of the entire rolled metal foil mesh member. The inventors of the present invention performed a screen printing plate test under the condition that the cross-sectional area of the fins 12 of the rolled metal foil mesh member 10 per unit length (mm) was 5800 μm ² / mm, and the tension was 28 N / cm. Neither will break results.

Here, when the cross section of the fins 12 of the rolled metal foil mesh member 10 has a rectangular shape, the value (μm) of (upper bottom UL + lower bottom BL) is a, and the height (μm) of the rectangular shape of the cross section of the fin 12 ) Is h, and the pitch (μm) of the fins 12 is pw. In this case, the cross-sectional area of the fins 12 of the rolled metal foil mesh member 10 per unit length (mm) along one direction can be expressed as 500ah / p (μm ² / mm).

The cross-sectional area per unit length (mm) of the fins 12 is proportional to the maximum tension. That is, the cross-sectional area (μm ² ) of the fins 12 of the rolled metal foil mesh member 10 per unit length (mm) along one direction (x direction) is perpendicular to the rolled metal foil mesh member 10 applied thereto. The maximum tension T (N / cm) in the direction (y direction) holds the following relationship.

5800: 28 = 500ah / pw: T

Therefore, the maximum tension value T is expressed as T = 2.4138ah / pw (N / cm).

That is, by setting the tension T (N / cm) in the vertical direction to support the rolled metal foil mesh member 10 to T ≦ 2.4ah / pw (N / cm), the damage resistance in the vertical direction can be improved.

The step of manufacturing the screen printing plate 20 includes a bonding step of attaching the rolled metal foil mesh member 10 to a fiber cloth such as a polyester resin. Here, the screen printing plate 20 is applied to a rolled metal foil mesh in a bonding step. The tension in the XY plane of the member 10 is stretched so that the tension Tx in one direction of the finger electrode pattern 2 is different from the tension Ty in the vertical direction. Specifically, the rolled metal foil mesh member 10 is supported so that the tension Tx in one direction of the finger electrode pattern 2 is larger than the tension Ty in the vertical direction.

In the aforementioned tensile test, as shown in FIG. 4, a test piece (area II, area III, and area IV) having a width of 10 mm and a surface distance of 10 mm was cut from the rolled metal foil mesh member 10 having a thickness of 20 μm. A tensile test was performed using a tensile tester (manufactured by Instron) at a tensile speed of 1 mm / minute.

The tension of the screen printing plate is read out as a tension gauge (for example, STG-75NA manufactured by PROTEK Corporation) for measuring the tension value. There are two types of marking methods: Newton scale and load drop metric scale. . In this patent specification, the tension value according to the Newton scale is described. Tables 1 to 3 describe the conversion table between the Newton scale and the load drop metric scale when using STG-75NA (published by (PROTEK Corporation)).

Table 1 is the conversion table of the Newton scale (N / cm) and the load drop metric scale (mm) for the tensiometer (when using STG-75NA manufactured by PROTEK), and table 2 is for the tensiometer. Conversion table of read value Newton scale (N / cm) and load drop metric scale (mm) (when using STG-75NA manufactured by PROTEK), Table 3 Newton scale of read value of tensiometer (N / cm) and load drop metric scale (mm) conversion table (when using STG-75NA manufactured by PROTEK).

<Manufacturing method of rolled metal foil mesh member>

The opening 14 of the rolled metal foil mesh member 10 can be formed by etching from one or both sides of the metal foil. What is necessary is just to perform appropriate etching according to the desired shape, area, and distribution of the openings 14. For example, a metal foil is coated with a resist, a plurality of openings are arranged in a desired size and arrangement, and exposed using a mask on which a printed pattern is drawn, followed by development. Thereafter, the metal foil in which the opening portion is opened is removed by etching, and the rolled metal foil mesh member 10 in which the metal foil opens the opening portion 14 can be manufactured.

In addition, as a method for manufacturing the rolled metal foil mesh member 10, the manufacturing method is not limited to the etching to the metal foil, and for example, a mechanical hole-opening process may be used, and the manufacturing method may be by electroforming.

<Manufacturing method of screen printing plate>

The steps of manufacturing the screen printing plate 20 are as follows.

1) A woven cloth is attached to a frame made of aluminum with a fiber such as a polyester resin (the yarn applying step).

2) The rolled metal foil mesh member 10 is adhered to the fiber cloth, and after drying, the fiber cloth overlapping the rolled metal foil mesh member is cut (combining step). In this bonding step, the rolled metal foil mesh member 10 is supported such that the tension Tx in one direction extending from the opening portion of the finger electrode pattern 2 is larger than the tension Ty in a direction perpendicular to the one direction.

3) Comprehensive application of a photosensitive emulsion to the rolled metal foil mesh member 10 (Emulsion application step).

4) Pattern a desired line pattern on the photosensitive emulsion (exposure step). For example, a portion corresponding to the line pattern that is opened is covered with a mask, and a portion other than the place covered with the mask is exposed. Thereby, the resin (photosensitive emulsion) of the exposed space is hardened.

5) The unnecessary emulsion is removed (development step). For example, the resin (photosensitive emulsion) in the opening portion of the space covered with the mask is removed.

As described above, the screen printing plate 20 can be produced. In addition, the aforementioned manufacturing method is merely an example, and is not limited thereto.

<For screen printing>

FIG. 8 is a schematic diagram showing the outline of screen printing.

As shown in FIGS. 3A and 8, this screen printing plate 20 has a printing surface 48 provided with a line pattern 18 drawn by opening the resin 16, and a printing paste 43 for abutting the printed paste 43 through the pattern for printing. A scraper surface 47 for the scraper 42.

During printing, the squeegee surface 47 of the screen printing plate 20 is set to a vertical upper surface, and the printing surface 48 is set to a vertical lower surface. The printing surface 48 is made to face the printing target 46 which is screen-printed. On the other hand, while the squeegee surface carries the paste 43, the squeegee 42 is moved from the left to the right in FIG. 8. Thereby, the opening 43 (hole) 14 of the line pattern 18 is filled with the paste 43 and the paste 43 is adhered to the printing target 46. After the squeegee 42 passes, the screen printing plate is separated from the printing target 46 by the tension of the screen printing plate. The other side On the surface, the paste 43 remains on the printing target 46. Thereby, screen printing is performed, and paste 43 corresponding to the arrangement of the openings 14 exposed to the line pattern 18 is printed. Thereafter, the paste 43 having unevenness from the arrangement of the openings 14 is subjected to a planarization process to form a finger electrode.

(Example)

As a result of using a screen printing plate implemented in the means suggested by the present invention, the tension Tx in one direction of the finger electrode pattern 2 on the XY plane of the metal foil mesh member 10 is rolled larger than the vertical tension Ty In the case where the rolled metal foil mesh member 10 was stretched in this manner, it was also confirmed that there was no effect on the printing performance.

In the printing test, a printing machine manufactured by Micro Tech was used, and other conditions were a blade speed: 200 mm / sec, a printing pressure: 80 N, a blade angle: 60 °, and a clearance: 1.5 mm.

In addition, the type of emulsion used for the plate making of the screen printing plate is ERS-2P manufactured by Huying Chemical Co., the emulsion thickness is 10 μm, and the emulsion opening width is 30 μm to 45 μm.

Moreover, in the present disclosure, any of the aforementioned implementation modes and / or embodiments including any of the implementation modes and / or an appropriate combination of embodiments can exert the effects of the respective implementation modes and / or embodiments. .

[Industrial use possibility]

According to the screen printing plate according to the present invention, the opening is provided by using a rolled metal foil having a thickness of 5 μm or more and 25 μm or less. The screen printing plate of the rolled metal foil mesh member is difficult to break the rolled metal foil mesh member.

Claims (3)

A screen printing plate comprising a plurality of openings arranged along one direction of a metal foil having a thickness of 5 μm or more and 25 μm or less, and a metal foil mesh member having a pattern for finger electrodes for providing finger electrodes. And a resin covering a part of the plurality of openings; the metal foil mesh member is configured such that the tension in the one direction extending from the opening of the finger electrode pattern is greater than the tension in a direction perpendicular to the one direction The large-scale supporter; the aforementioned metal foil mesh member is supported in a vertical direction with a tension of 2.4ah / pw (N / cm) or less, and the a is the pattern and extension of the aforementioned finger electrode pattern of the metal foil mesh member The value (μm) when the cross section of the ribs constituting the opening in the depth direction crossing the one direction is approximated by a rectangular shape (μm), and h is an approximate rectangle of the cross section of the rib. The height (μm) of the shape, and the pw is the pitch (μm) of the fins along the one direction. For example, the screen printing plate of the first patent application range, wherein the tension of the aforementioned metal foil mesh member and the pattern of the finger electrode pattern in the aforementioned direction is in the range of 20 N / cm to 30 N / cm. For example, the screen printing plate of the first patent application range, wherein the metal foil mesh member is provided with a plurality of openings along a direction perpendicular to the one direction, and has a bus for extending in a direction perpendicular to the finger electrode. For a bus bar electrode pattern for a strip electrode, the cross-sectional area of the rib per unit length along the vertical direction of the ribs constituting the opening portion of the bus bar electrode pattern is larger than that of the finger electrode. The ribs constituting the openings with a pattern have a larger cross-sectional area per unit length along the one direction.