WO2013189108A1 - Filtre fabry-pérot accordable - Google Patents

Filtre fabry-pérot accordable Download PDF

Info

Publication number
WO2013189108A1
WO2013189108A1 PCT/CN2012/078336 CN2012078336W WO2013189108A1 WO 2013189108 A1 WO2013189108 A1 WO 2013189108A1 CN 2012078336 W CN2012078336 W CN 2012078336W WO 2013189108 A1 WO2013189108 A1 WO 2013189108A1
Authority
WO
WIPO (PCT)
Prior art keywords
reflector
optically transparent
light
liquid crystal
glass sheet
Prior art date
Application number
PCT/CN2012/078336
Other languages
English (en)
Chinese (zh)
Inventor
高培良
Original Assignee
天津奇谱光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 天津奇谱光电技术有限公司 filed Critical 天津奇谱光电技术有限公司
Publication of WO2013189108A1 publication Critical patent/WO2013189108A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type

Definitions

  • the invention belongs to the field of optoelectronic technology, in particular to a tunable Fabry-Perot filter.
  • the traditional optical Fabry-Perot etalon is a filter element fabricated using the principle of multi-beam interference.
  • the multi-wavelength interference effect of the Fabry-Perot cavity formed by the high reflectivity of the multilayer dielectric film on the two light-passing surfaces enables multi-wavelength narrow-band filtering output over a wide spectral range, and has stable performance. It has wide optical aperture, high optical power destruction threshold, simple structure and low cost. Therefore, it is widely used in various types of lasers, optical measuring instruments and optical fiber communication devices.
  • the tuning function of the transmitted optical frequency can be achieved using a conventional optical Fabry-Perot etalon.
  • tuning can be done by changing the angle of incidence of the light, but the tuning range of this method is small; it is also possible to change the Fabry by mechanical means (such as stepper motors).
  • the cavity length of the Perot etalon is tuned. This method can achieve a large tuning range, but the tuning accuracy is low, and the precision of the mechanical components is high and the stability is not good.
  • the PZT piezoelectric ceramic (lead zirconate titanate) technology can improve the tuning accuracy and speed by changing the cavity length of the Fabry-Perot etalon, but it is not easy to miniaturize and the drive circuit is complicated. Changing the temperature of the etalon can also achieve a wider range of tuning, but the disadvantage of this method is that it is slow.
  • An object of the present invention is to overcome the deficiencies of the prior art and to provide a tunable Fabry-Perot filter with high stability, high tuning accuracy, fast speed and small volume.
  • a tunable Fabry-Perot filter comprising a first mirror, a liquid crystal material, a second mirror and a driving circuit, wherein a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the first mirror, An optical antireflection film is disposed on a first layer inside the light-passing surface of the first mirror, and a transparent electrode is disposed on the optical anti-reflection film; a high-reflectivity multilayer dielectric film is disposed outside the second mirror, and the second mirror is disposed An optical antireflection film is disposed on the inner first layer, a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode to cover a portion other than the clear aperture And a channel extending to the edge of the mirror by a width of about one millimeter, and forming a cavity having a thickness of several micrometers to ten micrometers from the
  • the first mirror and the second mirror are both optically transparent materials and have the same refractive index of light.
  • the driving circuit is a square wave pulse circuit having a frequency of several hundred hertz to several kilohertz, and the pulse voltage amplitude can be adjusted from 0 volts to 5 volts.
  • a tunable Fabry-Perot filter comprising a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror; the first mirror is permeable to light
  • a high-reflectivity multilayer dielectric film is disposed on the outer side of the surface, and the inner side of the light-passing surface of the first mirror is an optically polished surface;
  • the first optically transparent glass sheet is disposed inside the first mirror, and the outer side of the light-transmitting surface of the first optically transparent glass sheet
  • An optically polished surface, an optical antireflection film is disposed on a first inner side of the light-transmitting surface of the first optically transparent glass sheet, and a transparent electrode is disposed on the optical anti-reflection film; and a high reflection is disposed outside the light-transmitting surface of the second mirror a multi-layer dielectric film, the inner side of the light-passing surface of the second mirror is an optically polished surface;
  • An inner first layer of the second optically transparent glass sheet is provided with an optical antireflection film, and a transparent electrode is disposed on the optical antireflection film, and a non-conductive layer having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode a film of material covering a portion other than the light-passing aperture and forming a cavity having a thickness of several micrometers to ten micrometers from the inner side of the first optical glass sheet, in which the liquid crystal material is placed; the driving circuit is connected to the first optical On the transparent electrodes of the transparent glass sheet and the second optically transparent glass sheet, the outer side of the light-passing surface of the first mirror and the outer side of the light-transmitting surface of the second mirror are kept parallel and constitute a Fabry-Perot multi-beam interference cavity.
  • the liquid crystal material is a nematic liquid crystal.
  • the inner side of the first mirror and the outer side of the first optically transparent glass sheet are bonded together by an optically transparent index matching glue; the inner side of the second mirror and the outer side of the second optically transparent glass sheet are optically The transparent index matching glue is bonded together.
  • first mirror, the second mirror, the first optically transparent glass sheet, and the second optically transparent glass sheet are all optically transparent materials and have the same refractive index of light.
  • the refractive index of the optically transparent index matching glue is the same as the refractive index of the optically transparent material.
  • the driving circuit is a square wave pulse circuit having a frequency of several hundred hertz to several kilohertz, and the pulse voltage amplitude can be adjusted from 0 volts to 5 volts.
  • the invention has reasonable design, and the liquid crystal is placed in the cavity of the Fabry-Perot etalon and utilizes the electronically controlled birefringence effect of the liquid crystal and the optical phase modulation of the linearly polarized light incident on a specific polarization direction to realize the transparent Continuous, fast and precise tuning of the linearly polarized light frequency through the Fabry-Perot filter, as well as fast and precise tuning of the optical frequency over a wide spectral range. Since the thickness of the liquid crystal material is very thin, a wideband tunable Fabry-Perot filter having a small size and a large free spectral range can be fabricated.
  • the filter has no mechanical moving parts, stable and reliable performance, low cost, small size and easy Features such as installation and production for reliable operation in demanding small size and extreme operating environments, and are widely used in lasers, optical testing, fiber optic communications, biological, medical devices and fiber optic sensor networks.
  • Figure 1 is a schematic view of a conventional Fabry-Perot etalon
  • Figure 2 is a schematic structural view of the present invention
  • Figure 3 is a graph showing the phase of light transmitted through the liquid crystal material as a function of an applied electric field
  • Figure 4 is a schematic view showing another structure of the present invention.
  • Figure 5 is a schematic diagram of the transmission spectrum of a common Fabry-Perot etalon
  • Figure 6 is a schematic diagram of the transmission spectrum of the present invention.
  • FIG. 1 A schematic of a conventional Fabry-Perot light etalon 100 is shown in FIG.
  • the material of the Fabry-Perot etalon 100 is generally optical glass such as fused silica or BK7 in the near-infrared and visible-light bands, assuming that the material has a refractive index n and both light-passing surfaces 2 and 4 are plated high.
  • the reflective film has a reflectance R and a thickness h.
  • the Fabry-Perot optical etalon's transmission spectrum is characterized by a very narrow bandwidth for each transmission spectrum, a uniform frequency spacing of the transmission spectrum and a very wide optical bandwidth, typically covering an optical spectrum of 100 nm. Belt, as shown in Figure 5.
  • a liquid crystal material generally used as a photovoltaic device has a high electrical resistivity, it can be considered as an ideal dielectric material.
  • the liquid crystal has anisotropic dielectric properties and uniaxial symmetry due to the ordered orientation of the molecules and the stretched morphology. Like a uniaxial crystal, the direction of the optical axis coincides with the alignment of the molecules.
  • an electric dipole is formed. Under the action of the moment formed by the electric dipole, the orientation of the liquid crystal molecules is turned to the direction of the electric field, and the direction of the optical axis of the liquid crystal can be changed by changing the strength of the electric field.
  • this characteristic of the liquid crystal can be utilized to fabricate an optical phase modulator, a tunable filter or other optoelectronic device such as an optical switch and a light emphasizer.
  • the thickness of the liquid crystal film layer generally used as a photovoltaic device is from several micrometers to ten micrometers.
  • Formal utilization liquid of the invention The crystal is designed to change the refractive index of linearly polarized light under the action of an electric field.
  • a tunable Fabry-Perot filter 200 includes a first mirror 10, a liquid crystal material 18, a second mirror 20, and a driving circuit 14, a first mirror 10 and a second mirror.
  • 20 are optically transparent materials and are coated with a high-reflectivity multilayer dielectric film on the outer surfaces 8 and 22 of the light-passing surface to form Fabry-Perot between two high-reflectivity multilayer dielectric films.
  • a cavity; an optical anti-reflection film 12 and a transparent electrode film layer 16 are disposed in order from the outside to the inside of the light-passing surface of the first mirror 10; and the inside of the light-passing surface of the second mirror 20 is sequentially arranged from the outside to the inside.
  • An optical antireflection film 24, a transparent electrode 26 and a film 19 of non-conductive material, the optical anti-reflection film 12 and the optical anti-reflection film 24 are respectively plated on the inner surface of the light-passing surface of the first mirror 10 and the second mirror 20 The inner surface of the light-passing surface.
  • the non-conductive material film 19 has a thickness of several micrometers to ten micrometers, covers other portions except the light-passing aperture, and a channel extending to the edge of the mirror by a width of about one millimeter, in order to provide a liquid crystal for injecting excess liquid in the cavity. Export channel.
  • the non-conductive material film and the inner side of the first transparent optical material form a cavity having a thickness of several micrometers and a few micrometers for arranging the liquid crystal material 18, and the liquid crystal material 18 is a nematic liquid crystal.
  • the thickness of the liquid crystal material is from about several micrometers to ten micrometers. Since the thickness of the liquid crystal is small (several micrometers to ten micrometers), tunable Fabry-Perot can be made in the intrinsic free spectral range (ie, the free spectral range of the tunable filter without an applied electric field) filter.
  • Two transparent electrodes are connected to the driving circuit 14, and a driving signal generated by the driving circuit forms a driving electric field between the two transparent electrode film layers; the Fabri is adjusted by changing the effective refractive index n of the liquid crystal in the Fabry-Perot cavity by the electric field.
  • a typical driving electric field is a square wave signal having a voltage of several volts and a frequency of several hertz to several kilohertz.
  • the light beam 6 incident on the filter 200 is a beam traveling in the z direction, and the polarization axis is linearly polarized light in the X direction, assuming that the refractive index of the optically transparent material is n, and both of the light passing surfaces 8 and 22 are The highly reflective film is plated.
  • Figure 3 shows the relationship between the phase change of a light-wavelength phase of a nematic liquid crystal with a thickness of 10 ⁇ m and a wavelength of 1550 nm.
  • a maximum optical phase delay of about 6 ⁇ can be achieved.
  • the tunable Fabry-Perot filter 200 can obtain a tuning range of the transmitted optical frequency of about 100 GHz for linearly polarized light incident at near zero degrees.
  • the change of the free spectral range ⁇ and the frequency band of the transmitted light is much smaller.
  • a schematic diagram of the transmission spectrum of the tunable Fabry-Perot filter is shown in Fig. 6.
  • the tunable Fabry-Perot filter 200 can achieve a larger range under the action of an applied electric field.
  • the tuning of the transmitted light peak frequency does not substantially change the frequency broadband and free spectral range of the transmitted light. This feature is important for many applications in tunable Fabry-Perot filter 200, such as lasers and spectrum instruments.
  • the tunable Fabry-Perot filter 300 includes a first mirror 32, a first optical glass sheet 36, a liquid crystal material 41, a second optical glass sheet 50, a second mirror 46, and a drive circuit 56.
  • the difference between the filter 300 and the filter 200 is that, in the filter 300, the liquid crystal material 41 is first placed between two optically transparent glass sheets 36 and 50, and the light passing through the two optically transparent glass sheets 36 and 50 The inner side of the face is respectively coated with optical anti-reflection layers 38 and 52, transparent electrodes 40 and 54, and a film layer 41 of non-conductive material is disposed on the optically transparent glass piece 50 and the inner side of the first optically transparent glass piece 36 is formed. A cavity having a thickness of a few micrometers and a few micrometers is used to place the liquid crystal material.
  • the other light-passing surfaces of the above two optically transparent glass sheets 36 and 50 are not coated, and the optically transparent glass sheets 36 and 50 and the liquid crystal material 42 constitute a liquid crystal cell.
  • the light-passing surface 30 of the first mirror 32 is plated with a high-reflectance film, and the other light-passing surface is not coated.
  • the first mirror 32 and the optically transparent glass sheet 36 are bonded together by an index matching adhesive 34.
  • the light-passing surface 44 of the second mirror 46 is plated with a high-reflectance film, and the other light-passing surface is not coated.
  • the second mirror 46 is then bonded to the optically clear glass sheet 50 by the index matching glue 48.
  • the two highly reflective film faces of the two optically transparent glass sheets 32 and 46 are required.
  • the 30 and 44 adjustments are strictly parallel to achieve the effect of multi-beam interference of the Fabry-Perot etalon.
  • the index matching adhesive 48 and the refractive index matching adhesive 34 are also the same due to the same optically transparent material employed. This technical solution is more convenient to assemble than the first design.

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention porte sur un filtre Fabry-Pérot accordable, comprenant un premier réflecteur (10), une matière de cristaux liquides (18), un second réflecteur (20) et un circuit de commande (14), la matière de cristaux liquides (18) étant agencée à l'intérieur d'une cavité Fabry-Pérot formée par le premier réflecteur (10) et le second réflecteur (20), et le circuit de commande (14) accordant le filtre par commande de l'indice de réfraction efficace de la matière de cristaux liquides (18) à l'intérieur de la cavité Fabry-Pérot. Dans le filtre, les cristaux liquides sont répartis à l'intérieur de la cavité standard Fabry-Pérot de manière à atteindre en accord continu, rapide et de précision de la fréquence d'une lumière polarisée linéairement traversant le filtre Fabry-Pérot, permettant ainsi au filtre d'utiliser des parties mobiles non mécaniques et d'être stable, fiable, faible en coût, petit en dimension, facile à installer et à produire, etc. Le filtre satisfait des exigences de fonctionnement fiable dans des environnements de travail petits et extrêmes, et peut être largement appliqué dans des lasers, un essai optique, des communications par fibre optique, la biologie, des instruments médicaux, des réseaux de capteur à fibre optique et d'autres tels domaines.
PCT/CN2012/078336 2012-06-18 2012-07-09 Filtre fabry-pérot accordable WO2013189108A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2012102002290A CN102955279A (zh) 2012-06-18 2012-06-18 一种可调谐法布里-珀罗滤波器
CN201210200229.0 2012-06-18

Publications (1)

Publication Number Publication Date
WO2013189108A1 true WO2013189108A1 (fr) 2013-12-27

Family

ID=47764292

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2012/078336 WO2013189108A1 (fr) 2012-06-18 2012-07-09 Filtre fabry-pérot accordable

Country Status (2)

Country Link
CN (1) CN102955279A (fr)
WO (1) WO2013189108A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014150243A (ja) * 2013-01-08 2014-08-21 Canon Inc 波長可変レーザおよびそれを用いた光音響装置
CN109343027B (zh) * 2018-10-18 2022-11-25 华北水利水电大学 一种激光雷达多维扫描控制装置与控制方法
CN112097680B (zh) * 2020-09-15 2022-11-08 安徽大学 一种基于多腔fp干涉仪的表面形貌测试装置及测试方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5113275A (en) * 1991-07-03 1992-05-12 Bell Communications Research, Inc. Temperature compensation of liquid-crystal etalon filters
JPH04140714A (ja) * 1990-10-02 1992-05-14 Nippon Telegr & Teleph Corp <Ntt> 可変波長フィルタモジュール
US5710655A (en) * 1993-07-21 1998-01-20 Apeldyn Corporation Cavity thickness compensated etalon filter
US5719654A (en) * 1993-04-30 1998-02-17 Videojet Systems International, Inc. Liquid crystal fabry perot filter device having a peak operating wavelength of 10.6 microns
CN1325502A (zh) * 1998-11-02 2001-12-05 斯马特显示器株式会社 非偏振敏感型向列液晶法布里－珀罗波长调谐滤波器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100480747C (zh) * 2006-04-26 2009-04-22 胜华科技股份有限公司 彩色滤光片

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04140714A (ja) * 1990-10-02 1992-05-14 Nippon Telegr & Teleph Corp <Ntt> 可変波長フィルタモジュール
US5113275A (en) * 1991-07-03 1992-05-12 Bell Communications Research, Inc. Temperature compensation of liquid-crystal etalon filters
US5719654A (en) * 1993-04-30 1998-02-17 Videojet Systems International, Inc. Liquid crystal fabry perot filter device having a peak operating wavelength of 10.6 microns
US5710655A (en) * 1993-07-21 1998-01-20 Apeldyn Corporation Cavity thickness compensated etalon filter
CN1325502A (zh) * 1998-11-02 2001-12-05 斯马特显示器株式会社 非偏振敏感型向列液晶法布里－珀罗波长调谐滤波器

Also Published As

Publication number Publication date
CN102955279A (zh) 2013-03-06

Similar Documents

Publication Publication Date Title
US10418775B2 (en) External cavity tunable laser with dual beam outputs
CN102709799B (zh) 一种宽带连续可调谐激光器
WO2014036844A1 (fr) Filtre fabry-perot accordable sans rapport avec une polarisation
WO2014036842A1 (fr) Laser accordable pour délivrer une lumière non polarisée
WO2014036843A1 (fr) Dispositif d&#39;analyse de spectre
WO2015101049A1 (fr) Système laser ajustable
WO2011120246A1 (fr) Laser réglable
US9244266B2 (en) Tunable optical filter and method of manufacture thereof
JPH04229817A (ja) 所望のバンド幅を有する可調光フィルタ
CN201984180U (zh) 光纤法布里-珀罗可调滤波器
WO2011134177A1 (fr) Laser accordable
WO2013189108A1 (fr) Filtre fabry-pérot accordable
US7002696B1 (en) Band pass interferometer with tuning capabilities
WO2014036845A1 (fr) Filtre optique accordable sans rapport avec un état de polarisation de lumière incidente
WO2014019399A1 (fr) Filtre optique accordable à intervalles de fréquences fixes et sortie monomode
WO2012145551A2 (fr) Filtres optiques accordables à résonateurs à cristaux liquides
WO2014019398A1 (fr) Filtre optique monomode accordable en continu
US20140198388A1 (en) Fabry-perot device with a movable mirror
US9207516B1 (en) Hybrid tunable filter capable of outputting a single spectral peak
WO2013016886A1 (fr) Laser accordable à large bande du type à cavité externe, à filtre d&#39;onde couplant un milieu à gain à double laser
KR20180095756A (ko) 온도안정화 파장 가변 필터
WO2005036241A1 (fr) Filtre variable en longueur d&#39;onde et procede de production de ce filtre
JP2010175785A (ja) 波長可変フィルタ
WO2021077396A1 (fr) Dispositif de filtrage optique accordable
JP4639663B2 (ja) 波長可変ミラーおよび波長可変レーザ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12879506

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12879506

Country of ref document: EP

Kind code of ref document: A1