WO2014019398A1 - Filtre optique monomode accordable en continu - Google Patents

Filtre optique monomode accordable en continu Download PDF

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Publication number
WO2014019398A1
WO2014019398A1 PCT/CN2013/076159 CN2013076159W WO2014019398A1 WO 2014019398 A1 WO2014019398 A1 WO 2014019398A1 CN 2013076159 W CN2013076159 W CN 2013076159W WO 2014019398 A1 WO2014019398 A1 WO 2014019398A1
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Prior art keywords
reflector
light
optically transparent
passing surface
optical
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PCT/CN2013/076159
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English (en)
Chinese (zh)
Inventor
高培良
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天津奇谱光电技术有限公司
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Publication of WO2014019398A1 publication Critical patent/WO2014019398A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates

Definitions

  • the invention belongs to the field of optoelectronics, in particular to a single mode continuous tunable optical filter.
  • the traditional optical Fabry-Perot etalon is a filter element made by the principle of multi-beam interference. There are two main types: one is air-spaced and the other is optical glass-spaced.
  • the multi-wavelength interference output of the Fabry-Perot cavity formed by the high reflectivity of the multilayer dielectric film on the two light-passing surfaces enables multi-wavelength narrow-band filtering output over a wide spectral range, with stable performance and clear light. It has wide aperture, high optical power destruction threshold, simple structure and low cost. Therefore, it is widely used in various types of lasers, optical measuring instruments and optical fiber communication devices. Tuning of the transmitted optical frequency can also be achieved using conventional optical Fabry-Perot etalon.
  • tuning can be done by changing the angle of incidence of the light, but the tuning range of this method is small, or the Fabry-Perot is changed mechanically (such as a stepper motor)
  • the cavity length of the etalon is realized.
  • This method can realize a large tuning range, but the tuning precision is low, and the precision of the mechanical components is high and the stability is not good.
  • PZT piezoelectric ceramics (lead zirconate titanate) technology high-precision displacement can be achieved.
  • Using this technique to change the cavity length of the Fabry-Perot etalon can improve the tuning accuracy and speed, but it is not easy to miniaturize and the drive source is complicated.
  • a wide range of tuning can be achieved by changing the temperature of the etalon, the disadvantage of this method is that it is slow.
  • the output of a single Fabry-Perot etalon or a single Fabry-Perot filter is a multi-frequency or multi-mode output with an interval period of its free spectral range, for example, a free spectral range of 100 GHz at 1000 GHz Within the range, there are 10 narrowband multimode outputs with a spacing of 100 GHz.
  • a single frequency output can only be achieved when the frequency range is less than the free spectral range. If you want to increase the free spectral range, reduce the thickness of the Fabry-Perot etalon. For example, for 1500 nm light waves, if ordinary fused silica glass is used, the 100 GHz and 1000 GHz free spectral ranges correspond to the thicknesses.
  • a single mode continuous tunable optical filter consisting of two transmission frequency tunable Fabry-Perot filters arranged oppositely before and after, two transmission frequency tunable Fabry-Perot filters having the same spectrum
  • the response range is only valid for linearly polarized light with a specific polarization direction.
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and the first mirror has a high reflectivity outside the light-passing surface a layer dielectric film, an optical antireflection film is disposed on a first layer inside the light-passing surface of the first mirror, a transparent electrode is disposed on the optical anti-reflection film; and a high-reflectivity multilayer dielectric film is disposed on an outer side of the second mirror, An optical antireflection film is disposed on the inner first layer of the second mirror, and a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode to cover the light a portion other than the aperture and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a thickness of several micrometers to ten micrometer
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and an optical antireflection film is disposed outside the light passing surface of the first mirror a first layer on the inner side of the light-passing surface of the first mirror is provided with a high-reflectivity multilayer dielectric film, and a transparent electrode is disposed on the high-reflectivity multilayer dielectric film; and a high-reflectivity multilayer is disposed on the outer side of the second mirror a dielectric film, an inner first layer of the second mirror is provided with an optical antireflection film, a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode, covering a portion other than the clear aperture and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a thickness of several micro
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and an optical antireflection film is disposed outside the light passing surface of the first mirror a first layer on the inner side of the light-passing surface of the first mirror is provided with a high-reflectivity multilayer dielectric film, and a transparent electrode is disposed on the high-reflectivity multilayer dielectric film; an optical anti-reflection film is disposed on an outer side of the second mirror;
  • the inner first layer of the second mirror is provided with a high-reflectivity multilayer dielectric film, and a transparent electrode is disposed on the high-reflectivity multilayer dielectric film, and a non-conductive material having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode a film covering a portion other than the clear aperture and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically clear glass a sheet, a liquid crystal material, a second optically transparent glass sheet and a second mirror; a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the first mirror, and an optical polishing surface is inside the light-passing surface of the first mirror
  • the first optically transparent glass piece is disposed inside the first reflecting mirror, the outer side of the light passing surface of the first optical transparent glass piece is an optical polishing surface, and the first layer of the light transmitting surface of the first optical transparent glass piece is provided with an optical antireflection film a transparent electrode is disposed on the optical antireflection film; a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the second mirror, and an inner side of the light-passing surface of the second mirror is an optically polished surface;
  • the glass sheet is disposed on the inner side of the second mirror, the outer side of the light-
  • the channel of the edge and the inner side of the first optical glass sheet form a cavity having a thickness of several micrometers to ten micrometers, the liquid crystal material is placed in the cavity;
  • the driving circuit is connected to the first optical transparent glass sheet and the second On the transparent electrode of the optically transparent glass piece, the outer side of the light-passing surface of the first mirror and the outer side of the light-transmitting surface of the second mirror are kept parallel and constitute a Fabry-Perot multi-beam interference cavity.
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror;
  • An optical antireflection film is disposed outside the light passing surface of the mirror, and a high reflectivity multilayer dielectric film is disposed inside the light passing surface of the first mirror;
  • the first optical transparent glass sheet is disposed inside the first mirror, and the first optical transparent glass sheet
  • the outer side of the light-transmitting surface is an optical polishing surface or an optical anti-reflection film is disposed.
  • the first layer of the light-transmitting surface of the first optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film;
  • a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the second mirror, and an inner side of the light-passing surface of the second mirror is an optically polished surface;
  • a second optically transparent glass sheet is disposed inside the second mirror, and the second optically transparent glass
  • the outer side of the light-transmitting surface of the sheet is an optically polished surface, and the first inner layer of the second optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the transparent anti-reflection film.
  • a film of a non-conductive material having a thickness of several micrometers to ten micrometers, covering a portion other than the light-passing aperture and a channel having a width of about one millimeter to the edge of the mirror and forming a thickness with respect to the inner side of the first optical glass sheet a cavity of micrometers to ten micrometers in which a liquid crystal material is placed;
  • a driving circuit is connected to the transparent electrodes of the first optically transparent glass sheet and the second optically transparent glass sheet, the inner side of the light passing surface of the first mirror The outer side of the light-passing surface of the second mirror remains parallel and constitutes a Fabry-Perot beam interference cavity.
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror;
  • An optical antireflection film is disposed outside the light passing surface of the mirror, and a high reflectivity multilayer dielectric film is disposed inside the light passing surface of the first mirror;
  • the first optical transparent glass sheet is disposed inside the first mirror, and the first optical transparent glass sheet
  • the outer side of the light-transmitting surface is an optical polishing surface or an optical anti-reflection film is disposed.
  • the first layer of the light-transmitting surface of the first optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film;
  • An optical antireflection film is disposed outside the light-passing surface of the second mirror, and the first layer of the light-passing surface of the second mirror is disposed a high-reflectivity multilayer dielectric film;
  • a second optically transparent glass sheet disposed on the inner side of the second mirror; the outer side of the light-transmitting surface of the second optically transparent glass sheet is an optically polished surface or an optical anti-reflection film, and the second optically transparent glass sheet is disposed
  • An optical antireflection film is disposed on the inner first layer, a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode to cover a portion other than the clear aperture And a cavity having a width of
  • the liquid crystal material is a nematic liquid crystal having a thickness of several micrometers to ten micrometers.
  • the first mirror and the second mirror are both optically transparent materials and have the same refractive index of light.
  • the driving circuit is a square wave pulse circuit having a frequency of 1 kHz to 10 kHz, and the pulse voltage amplitude is adjustable from 0 volts to 5 volts.
  • the inner side of the first mirror is bonded to the outer side of the first optically transparent glass sheet by an optically transparent index matching glue or the assembly method of the glue on the light path of the industry is generally used:
  • the joints other than the optical path are bonded by glue;
  • the inner side of the second mirror is bonded to the outer side of the second optically transparent glass sheet by an optically transparent index matching glue or the glue is not used in the industrially used light path.
  • Assembly method that is, bonding at a joint other than the light path; the first mirror, the second mirror, the first optical transparent glass sheet and the second optical transparent glass sheet are all optically transparent materials and Having the same or substantially the same refractive index of light; the refractive index of the optically transparent index matching glue is substantially the same as the refractive index of the optically transparent material.
  • the invention is reasonable in design, and effectively combines two transmissive frequency tunable Fabry-Perot filters, and places the liquid crystal in the cavity of the Fabry-Perot etalon and utilizes the electronically controlled birefringence of the liquid crystal.
  • the effect and optical phase modulation of the linearly polarized light incident on a particular polarization direction achieves continuous, fast and precise tuning of the frequency of the linearly polarized light transmitted through the Fabry-Perot filter.
  • the thickness of the liquid crystal layer is very thin, a wide-bandwidth tunable Fabry-Perot filter having a small size and a large free spectral range can be fabricated, and at the same time, fast and precise tuning of the optical frequency over a wide spectral range can be realized.
  • the invention has the characteristics of no mechanical moving parts, stable and reliable performance, simple structure, low cost, small size, easy installation and production, and can meet the requirements of small size and extremely reliable operation under extreme working conditions, in laser, optical test, optical fiber. Wide range of applications in communications, biology, medical devices and fiber optic sensor networks.
  • Figure 1 is a schematic view of a conventional Fabry-Perot etalon
  • FIG. 2 is a schematic diagram of the output spectrum of a conventional Fabry-Perot etalon; 3 is a schematic structural view of a tunable Fabry-Perot filter including a nematic liquid crystal material layer; FIG. 4 is a schematic diagram showing a phase of light transmission through a liquid crystal material according to an applied electric field;
  • FIG. 5 is a schematic structural view of another tunable Fabry-Perot filter including a nematic liquid crystal material layer;
  • FIG. 6 is a schematic structural view of the present invention.
  • Figure 7 is a schematic view showing the transmission spectrum of the tunable Fabry-Perot filter shown in Figure 3;
  • Figure 8 is a schematic view showing the transmission spectrum of the tunable Fabry-Perot filter shown in Figure 5;
  • Figure 9 is a schematic diagram of the intrinsic transmission spectrum of the present invention.
  • Figure 10 is a schematic illustration of the continuous single mode tunable transmission spectrum of the present invention.
  • FIG. 1 is a schematic illustration of a conventional Fabry-Perot etalon 100.
  • the material of the Fabry-Perot etalon 100 is generally optical glass such as fused silica or BK7 in the near-infrared and visible-light bands, assuming that the material has a refractive index n and both light-passing surfaces 2 and 4 are plated high.
  • the Fabry-Perot etalon's transmission spectrum is characterized by a very narrow bandwidth per transmission spectrum, a uniform frequency spacing of the transmission spectrum and a very wide optical band width, typically covering more than 100 nm.
  • Light spectrum band Figure 2 shows a schematic of the Fabry-Perot optical etalon 100 output spectrum.
  • Figure 3 shows a tunable Fabry-Perot filter designed to change the refractive index of linearly polarized light by a nematic liquid crystal under the action of an electric field.
  • Liquid crystal materials generally used as photovoltaic devices have high resistivity. Therefore, it can be considered as an ideal dielectric material.
  • the liquid crystal has anisotropic dielectric properties and uniaxial symmetry due to the ordered orientation of the constituent molecules and the stretched morphology. Like a uniaxial crystal, the direction of the optical axis coincides with the alignment of the molecules. When the liquid crystal molecules act under the external electric field, an electric dipole is formed.
  • liquid crystal Under the action of the moment formed by the electric dipole, the orientation of the liquid crystal molecules is turned to the direction of the electric field, and the direction of the optical axis of the liquid crystal can be changed by changing the strength of the electric field. Therefore, this characteristic of liquid crystal can be utilized to fabricate an optical phase modulator, a tunable filter, or other Optoelectronic devices, such as optical switches and light-emphasis devices.
  • the thickness of the liquid crystal film layer generally used as a photovoltaic device is from several micrometers to ten micrometers.
  • a tunable Fabry-Perot filter 200 includes a first mirror 10, a liquid crystal material 18, a second mirror 20, and a driving circuit 14, a first mirror 10 and a second mirror. 20 are optically transparent materials.
  • the tunable Fabry-Perot filter 200 has three different configurations.
  • the first configuration is: high reflection on the outer surfaces 8 and 22 of the light-passing surfaces of the first mirror 10 and the second mirror 20, respectively.
  • a multi-layer dielectric film, a Fabry-Perot cavity is formed between two high-reflectivity multilayer dielectric films; and an inner side of the light-passing surface of the first mirror 10 is provided from the inside to the outside.
  • the optical antireflection film 12 and the transparent electrode film layer 16 are provided with an optical antireflection film 24, a transparent electrode 26, and a non-conductive material film 19 in this order from the inside to the outside of the light-passing surface of the second mirror 20.
  • the non-conductive material film 19 has a thickness of several micrometers to ten micrometers, covers other portions except the light-passing aperture, and a channel extending to the edge of the mirror by a width of about one millimeter, in order to provide a liquid crystal for injecting excess liquid in the cavity. Export channel.
  • the non-conductive material film 19 and the inner side of the first mirror 10 form a cavity having a thickness of several micrometers and a few micrometers for arranging the liquid crystal material 18, and the liquid crystal material 18 is a nematic liquid crystal.
  • the thickness of the liquid crystal material is from about several micrometers to ten micrometers. Since the thickness of the liquid crystal is small (several micrometers to ten micrometers), tunable Fabry-Perot can be made in the intrinsic free spectral range (ie, the free spectral range of the tunable filter without an applied electric field) filter.
  • Two transparent electrodes are connected to the driving circuit 14, and a driving signal generated by the driving circuit forms a driving electric field between the two transparent electrode film layers; the Fabri is adjusted by changing the effective refractive index n of the liquid crystal in the Fabry-Perot cavity by an electric field.
  • a typical driving electric field is a square wave signal having a voltage of several volts and a frequency of 1 kHz to several kilohertz.
  • the light beam 6 incident on the filter 200 is a beam traveling in the z direction, and the polarization axis is linearly polarized light in the X direction, assuming that the refractive index of the optically transparent material is n, the two light passing surfaces 8 and 22 Both are highly reflective films.
  • Figure 4 shows the phase change of a light wave with a wavelength of 1550 nm driven by a 2 Hz square wave voltage of a nematic liquid crystal with a thickness of 10 ⁇ m.
  • a maximum optical phase delay of about 2 ⁇ can be achieved.
  • the tunable Fabry-Perot filter 200 can obtain a tuning range of the transmitted optical frequency of about 100 GHz for linearly polarized light incident near zero.
  • the change in the band width ⁇ V 1/2 of the free spectral range ⁇ ⁇ and the transmitted light is much smaller.
  • 7 is a schematic diagram of the transmission spectrum of the tunable Fabry-Perot filter 200.
  • the tunable Fabry-Perot filter 200 can achieve a wide range of transmission optical frequency tuning without substantially changing the frequency broadband and free spectral range of the transmitted light under the action of an applied electric field. This feature is important for many applications in tunable Fabry-Perot filter 200, such as lasers and spectrum instruments.
  • a second structure of the tunable Fabry-Perot filter 200 an optical antireflection film is plated on the outer surface 8 of the light-passing surface of the first mirror 10; from the inside to the inside of the light-passing surface of the first mirror 10
  • the high-reflectivity multilayer dielectric film 12 and the transparent electrode film layer 16 are sequentially provided, and the other structure is the same as that of the tunable Fabry-Perot filter 200.
  • the second structure of the tunable Fabry-Perot filter 200 is characterized by a larger free spectral range than the first.
  • a third structure of the tunable Fabry-Perot filter 200 an optical antireflection film is plated on the outside of the light-passing surface of the second mirror 20; inwardly from the inside to the outside of the light-passing surface of the second mirror 20 A high-reflectivity multilayer dielectric film 24, a transparent electrode 26, and a film 19 of a non-conductive material are provided.
  • the other structure is the same as the second structure of the tunable Fabry-Perot filter 200.
  • the third structure of the tunable Fabry-Perot filter 200 is characterized by the ability to achieve a larger free spectral range than the second structure.
  • the tunable Fabry-Perot filter 300 includes a first mirror 32, a first optical glass sheet 36, a liquid crystal material 41, a second optical glass sheet 50, a second mirror 46, and a drive circuit 56.
  • the difference between the filter 300 and the filter 200 is that, in the filter 300, the liquid crystal material 41 is first placed between two optically transparent glass sheets 36 and 50, and the light passing through the two optically transparent glass sheets 36 and 50 The inner side of the face is respectively coated with optical anti-reflection layers 38 and 52, transparent electrodes 40 and 54, and a film layer 41 of non-conductive material is disposed on the optically transparent glass piece 50 and the inner side of the first optically transparent glass piece 36 is formed. A cavity having a thickness of a few micrometers and a few micrometers is used to place the liquid crystal material.
  • the other light-passing surfaces of the above two optically transparent glass sheets 36 and 50 are not coated or coated with an optical antireflection film, and the optically transparent glass sheets 36 and 50 and the liquid crystal material 42 constitute a liquid crystal cell.
  • the above liquid crystal cell is assembled, it is not necessary to keep the light-transmitting surfaces of the optically transparent glass sheets 36 and 50 strictly parallel, which makes it easier to handle at the time of assembly.
  • the tunable Fabry-Perot filter 300 also has three different structures.
  • the first structure is:
  • the outer light-passing surface 30 of the first mirror 32 is plated with a high-reflectance film, and the inner light-passing surface is a polished surface without a plating film.
  • the inner side of the first reflecting mirror 32 and the outer side of the optically transparent glass piece 36 on the above liquid crystal cell are bonded together by the index matching adhesive 34.
  • the outer light-passing surface 44 of the second mirror 46 is plated with a high-reflectance film, and the inner light-passing surface is a polished surface having no plating film.
  • the inner light-passing surface of the second mirror 46 is bonded to the outer side of the optically transparent glass sheet 50 on the liquid crystal cell by the index matching glue 48, in the process, the two mirrors 32 and Two of 46
  • the faces 30 and 44 of the plated high reflectivity film are adjusted to be strictly parallel to achieve the multi-beam interference effect of the Fabry-Perot etalon.
  • the index matching glue 48 and the index matching glue 34 are also identical or nearly identical.
  • a disadvantage of this configuration of filter 300 is that it is thicker than filter 200 due to the use of four optically transparent materials.
  • the second structure of the tunable Fabry-Perot filter 300 is such that the outer light-passing surface 30 of the first mirror 32 is plated with an optical antireflection film, and the inner light-passing surface is plated with a high reflectivity film.
  • the outer side of the optically transparent glass piece 36 on the above liquid crystal cell may be coated with an optical antireflection film or a non-coated polishing surface.
  • the inner side of the first reflecting mirror 32 and the outer side of the optical transparent glass sheet 36 on the liquid crystal cell are bonded together by the index matching adhesive 34, and the assembly method of the optical path without glue in the industry can be used, that is, only two The optical parts are bonded with glue outside the light path.
  • the other structure is the same as the first structure of the filter 300.
  • the Fabry-Perot cavity is composed of the inner light-passing surface of the first mirror 32 and the high-reflectivity film on the outer light-passing surface of the second mirror 46, the characteristic of the structure is that the ratio can be achieved.
  • the first structure of filter 300 has a larger free spectral range.
  • a third structure of the tunable Fabry-Perot filter 300 differs from the second structure of the filter 300 in that the outer light-passing surface 44 of the second mirror 46 is optically plated.
  • the film, the inner light-passing surface is coated with a high reflectivity film.
  • the outer light-passing surface of the optically transparent glass sheet 50 on the above liquid crystal cell may be coated with an optical antireflection film or a non-coated polishing surface.
  • the inner side of the second reflection 46 is bonded to the outer side of the optically transparent glass sheet 50 on the liquid crystal cell by an index matching glue, and an assembly method of the optical path without glue in the industry is generally used, that is, only two opticals are used. The parts outside the light path are glued together.
  • the other structure is the same as the second structure of the filter 300. Since the Fabry-Perot cavity is composed of the inner light-passing surface of the first mirror 32 and the high-reflectivity film on the inner light-passing surface of the second mirror 46, the structure is characterized in that the ratio can be achieved.
  • the second structure of filter 300 has a larger free spectral range.
  • a single mode continuous tunable optical filter 600 is comprised of two tunable Fabry-Perot filters 400 and 500.
  • the tunable Fabry-Perot filter 400 can be tunable according to actual needs.
  • the structure of the ri-Perot filter 200 or the tunable Fabry-Perot filter 300, the tunable Fabry-Perot filter 500 can also be tunable Fabry-Perot filter 200 or tunable The structure of the Fabry-Perot filter 300.
  • the tunable Fabry-Perot filter 400 has an intrinsic free spectral range of FSR1
  • the tunable Fabry-Perot filter 500 has an intrinsic free spectral range of FSR2
  • FSR2 is smaller than FSR1 by ⁇ f
  • FSR2 and FSR1 can be adjusted as needed.
  • FSR3 can be adjusted, but the minimum difference should be equal to or greater than twice the ⁇ ⁇ 1/2 to ensure the single-mode output characteristics of the tunable filter 600.
  • the tuning process of the present invention will now be described. Referring to Figures 7 and 8, when the tunable filter 400 and the tunable filter 500 are synchronously tuned from V1 to V2, the tunable filter 600 is at V1 to ⁇ 4. Within the scope, there is only one transmission mode. To achieve tuning from V 2 to V 3 , the V 2a mode of tunable filter 500 is first tuned to coincide with the V 2 mode of tunable filter 400, which is ⁇ f. The tunable filter 400 and the tunable filter 500 are then tuned to V3. According to the foregoing analysis, the variation of the free spectral range with respect to the transmission frequency during the tuning of the tunable filter 400 and the tunable filter 500 is negligible.
  • the same single-mode and continuous-frequency tunable output can be achieved when incident light enters the tunable optical filter 600 from the light-passing surface of the tunable Fabry-Perot filter 500.
  • the output spectrum width may vary in different applications.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)

Abstract

La présente invention concerne un filtre optique monomode accordable en continu (600) dont la principale caractéristique technique est qu'il comprend deux filtres de Fabry-Pérot accordables en fréquence de transmission (400 et 500) disposés selon un agencement en opposition avant/arrière. Quand la plage spectrale libre du premier filtre de Fabry-Pérot accordable en fréquence de transmission (400) est espacée selon un certain intervalle de la plage spectrale libre intrinsèque du second filtre de Fabry-Pérot accordable en fréquence de transmission (500), la caractéristique des fréquences de transmission accordables des deux filtres de Fabry-Pérot accordables en fréquence de transmission (400 et 500) est utilisée pour obtenir une sortie monomode accordable dans une certaine plage spectrale. Un filtre optique monomode accordable en continu (600) est conçu de manière rationnelle. Il a pour caractéristiques de ne comporter aucune partie mécanique mobile, d'être stable, de présenter des performances fiables ainsi qu'une structure simplifiée, des coûts réduits et une taille réduite, d'être facile à installer et à fabriquer, de répondre aux impératifs de taille réduite et de fonctionnement fiable dans des conditions de fonctionnement extrêmes et de trouver de larges applications dans d'autres domaines tels que les lasers, les essais optiques, les communications par fibres optiques, la biologie, les dispositifs médicaux et les réseaux de détection à fibres optiques.
PCT/CN2013/076159 2012-07-30 2013-05-23 Filtre optique monomode accordable en continu WO2014019398A1 (fr)

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CN2012102659758A CN102798998A (zh) 2012-07-30 2012-07-30 一种单模连续可调谐光学滤波器
CN201210265975.8 2012-07-30

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CN107894283B (zh) * 2017-10-24 2019-09-27 中国科学院上海技术物理研究所 宽光谱范围f-p可调谐滤波器多级透射峰的抑制方法
CN111856786A (zh) * 2019-04-30 2020-10-30 福州高意通讯有限公司 一种宽带电光可调滤波结构
CN113614633B (zh) * 2020-06-30 2023-03-10 深圳市海谱纳米光学科技有限公司 基于法布里珀罗腔的成像系统

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US5321539A (en) * 1991-02-04 1994-06-14 Nippon Telegraph And Telephone Corporation Liquid crystal Fabry-Perot etalon with glass spacer
US5719654A (en) * 1993-04-30 1998-02-17 Videojet Systems International, Inc. Liquid crystal fabry perot filter device having a peak operating wavelength of 10.6 microns
US5592314A (en) * 1993-12-02 1997-01-07 Yazaki Corporation Tunable wavelength filter formed by 2 lcds in series having opposite twist angles of n*π/2 and a dielectric mirror layer on each substrate
JPH10300974A (ja) * 1997-04-22 1998-11-13 Yazaki Corp 可変波長選択フィルタ
WO2005036241A1 (fr) * 2003-10-10 2005-04-21 Shoei Kataoka Filtre variable en longueur d'onde et procede de production de ce filtre

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