WO2014019399A1 - Filtre optique accordable à intervalles de fréquences fixes et sortie monomode - Google Patents

Filtre optique accordable à intervalles de fréquences fixes et sortie monomode Download PDF

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Publication number
WO2014019399A1
WO2014019399A1 PCT/CN2013/076163 CN2013076163W WO2014019399A1 WO 2014019399 A1 WO2014019399 A1 WO 2014019399A1 CN 2013076163 W CN2013076163 W CN 2013076163W WO 2014019399 A1 WO2014019399 A1 WO 2014019399A1
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Prior art keywords
light
reflector
fabry
optically transparent
passing surface
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PCT/CN2013/076163
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English (en)
Chinese (zh)
Inventor
高培良
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天津奇谱光电技术有限公司
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Publication of WO2014019399A1 publication Critical patent/WO2014019399A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/07—Polarisation dependent

Definitions

  • the invention belongs to the field of optoelectronics, in particular to a tunable optical filter with fixed frequency spacing and single mode output. Background technique
  • the traditional optical Fabry-Perot etalon is a filter element made by the principle of multi-beam interference. There are two main types: one is air-spaced and the other is optical glass-spaced.
  • the multi-wavelength interference output of the Fabry-Perot cavity formed by the high reflectivity of the multilayer dielectric film on the two light-passing surfaces enables multi-wavelength narrow-band filtering output over a wide spectral range, with stable performance and clear light. It has wide aperture, high optical power destruction threshold, simple structure and low cost. Therefore, it is widely used in various types of lasers, optical measuring instruments and optical fiber communication devices. Tuning of the transmitted optical frequency can also be achieved using conventional optical Fabry-Perot etalon.
  • tuning can be done by changing the angle of incidence of the light, but the tuning range of this method is small, or the Fabry-Perot is changed mechanically (such as a stepper motor)
  • the cavity length of the etalon is realized.
  • This method can realize a large tuning range, but the tuning precision is low, and the precision of the mechanical components is high and the stability is not good.
  • PZT piezoelectric ceramics (lead zirconate titanate) technology high-precision displacement can be achieved.
  • Using this technique to change the cavity length of the Fabry-Perot etalon can improve the tuning accuracy and speed, but it is not easy to miniaturize and the drive source is complicated.
  • a wide range of tuning can be achieved by changing the temperature of the etalon, the disadvantage of this method is that it is slow.
  • the output of a single Fabry-Perot etalon or a single Fabry-Perot filter is a multi-frequency or multi-mode output with an interval period of its free spectral range, for example, a free spectral range of 100 GHz at 1000 GHz Within the range, there are 10 narrowband multimode outputs with a spacing of 100 GHz.
  • a single frequency output can only be achieved when the frequency range is less than the free spectral range. If you want to increase the free spectral range, reduce the thickness of the Fabry-Perot etalon. For example, for 1500 nm light waves, if ordinary fused silica glass is used, the 100 GHz and 1000 GHz free spectral ranges correspond to the thicknesses.
  • the object of the present invention is to overcome the deficiencies of the prior art and to provide a tunable optical filter with fixed frequency spacing and single mode output, which passes the free spectral range of the Fabry-Perot etalon and the tunable method
  • the intrinsic free spectral range of the Ley-Perot filter differs by a certain interval and is tunable using the tunable Fabry-Perot filter transmission frequency
  • the tunable single-mode output function is achieved in the same spectral range as the Fabry-Perot etalon's free spectral range.
  • a tunable optical filter with fixed frequency spacing and single mode output consisting of a Fabry-Perot etalon set up front and rear and a tunable Fabry-Perot filter with a transmission frequency, the Fabry
  • the Perot etalon has the same spectral response range as the transmission frequency tunable Fabry-Perot filter and the transmission frequency tunable Fabry-Perot filter is only effective for linearly polarized light having a particular polarization direction.
  • the Fabry-Perot etalon has a certain free spectral range and sharpness coefficient; the transmission frequency tunable Fabry-Perot filter has an intrinsic free spectral range smaller than the method when no electric field is applied The free spectral range of the Brill-Perot etalon, and the difference is greater than the sharpness factor of the Fabry-Perot etalon or greater than the sharpness factor of the tunable Fabry-Perot filter of the transmission frequency.
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and the first mirror has a high reflectivity outside the light-passing surface a layer dielectric film, an optical antireflection film is disposed on a first layer inside the light-passing surface of the first mirror, a transparent electrode is disposed on the optical anti-reflection film; and a high-reflectivity multilayer dielectric film is disposed on an outer side of the second mirror, An optical antireflection film is disposed on the inner first layer of the second mirror, and a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode to cover the light a portion other than the aperture and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a thickness of several micrometers to ten micrometer
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and an optical antireflection film is disposed outside the light passing surface of the first mirror a first layer on the inner side of the light-passing surface of the first mirror is provided with a high-reflectivity multilayer dielectric film, and a transparent electrode is disposed on the high-reflectivity multilayer dielectric film; and a high-reflectivity multilayer is disposed on the outer side of the second mirror a dielectric film, an inner first layer of the second mirror is provided with an optical antireflection film, a transparent electrode is disposed on the optical antireflection film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode, covering a portion other than the clear aperture and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a thickness of several micro
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a liquid crystal material, a second mirror, and a driving circuit, and an optical antireflection film is disposed outside the light passing surface of the first mirror , in the light-passing surface of the first mirror a high-reflectivity multilayer dielectric film is disposed on the first layer, a transparent electrode is disposed on the high-reflectivity multilayer dielectric film; an optical antireflection film is disposed on an outer side of the second mirror, and an inner first layer of the second mirror is disposed Providing a high-reflectivity multilayer dielectric film, wherein a transparent electrode is disposed on the high-reflectivity multilayer dielectric film, and a non-conductive material film having a thickness of several micrometers to ten micrometers is disposed on the transparent electrode, covering a pass-through aperture a portion and a channel extending to the edge of the mirror by a width of about one millimeter and forming a cavity having a
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror;
  • a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the mirror, and an inner side of the light-passing surface of the first mirror is an optically polished surface;
  • the first optically transparent glass sheet is disposed inside the first mirror, and the first optically transparent glass sheet is An outer side of the light-transmitting surface is an optically polished surface, and an inner surface of the light-transmitting surface of the first optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film;
  • a light-passing surface of the second mirror A high-reflectivity multilayer dielectric film is disposed on the outer side, and an inner side of the light-passing surface of the second mirror is an optically polished surface;
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror;
  • An optical antireflection film is disposed outside the light passing surface of the mirror, and a high reflectivity multilayer dielectric film is disposed inside the light passing surface of the first mirror;
  • the first optical transparent glass sheet is disposed inside the first mirror, and the first optical transparent glass sheet
  • the outer side of the light-transmitting surface is an optical polishing surface or an optical anti-reflection film is disposed.
  • the first layer of the light-transmitting surface of the first optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film;
  • a high-reflectivity multilayer dielectric film is disposed outside the light-passing surface of the second mirror, and an inner side of the light-passing surface of the second mirror is an optically polished surface;
  • a second optically transparent glass sheet is disposed inside the second mirror, and the second optically transparent glass
  • the outer side of the light-passing surface of the sheet is an optically polished surface, and the first inner layer of the second optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film, and the transparent electrode is disposed on the transparent electrode a film of non-conductive material having a degree of a few micrometers to a dozen micrometers, covering a portion other than the light-passing aperture and a channel having a width of about one millimeter to
  • the transmissive frequency tunable Fabry-Perot filter includes a first mirror, a first optically transparent glass sheet, a liquid crystal material, a second optically transparent glass sheet, and a second mirror;
  • An optical antireflection film is disposed outside the light passing surface of the mirror, and a high reflectivity multilayer dielectric film is disposed inside the light passing surface of the first mirror;
  • the first optical transparent glass sheet is disposed inside the first mirror, and the first optical transparent glass sheet
  • the outer side of the light-transmitting surface is an optical polishing surface or an optical anti-reflection film is disposed.
  • the first layer of the light-transmitting surface of the first optically transparent glass sheet is provided with an optical anti-reflection film, and a transparent electrode is disposed on the optical anti-reflection film;
  • An optical antireflection film is disposed outside the light passing surface of the two mirrors, and a first layer of the second reflecting mirror is provided with a high reflectivity multilayer dielectric film;
  • the second optical transparent glass sheet is disposed inside the second mirror,
  • the outer surface of the light-transmitting surface of the optically transparent glass sheet is an optical polishing surface or an optical anti-reflection film, and the first inner layer of the second optical transparent glass sheet is provided with an optical anti-reflection film, and the optical anti-reflection film is disposed on the optical anti-reflection film.
  • a bright electrode on which a thin film of a non-conductive material having a thickness of several micrometers to ten micrometers is provided, covering a portion other than the light-passing aperture and a channel having a width of about one millimeter to the edge of the mirror and the first optical
  • the inside of the glass sheet forms a cavity having a thickness of several micrometers to ten micrometers, and the liquid crystal material is placed in the cavity;
  • the driving circuit is connected to the transparent electrode of the first optically transparent glass sheet and the second optically transparent glass sheet
  • the inner side of the light-passing surface of the first mirror and the inner side of the light-passing surface of the second mirror are kept parallel and constitute a Fabry-Perot multi-beam interference cavity.
  • the liquid crystal material is a nematic liquid crystal having a thickness of several micrometers to ten micrometers.
  • the first mirror and the second mirror are both optically transparent materials and have the same refractive index of light.
  • the driving circuit is a square wave pulse circuit having a frequency of 1 kHz to 10 kHz, and the pulse voltage amplitude is adjustable from 0 volts to 5 volts.
  • the inner side of the first mirror is bonded to the outer side of the first optically transparent glass sheet by an optically transparent index matching glue or the assembly method of the glue on the light path of the industry is generally used:
  • the joints other than the optical path are bonded by glue;
  • the inner side of the second mirror is bonded to the outer side of the second optically transparent glass sheet by an optically transparent index matching glue or the glue is not used in the industrially used light path.
  • Assembly method that is, bonding at a joint other than the light path; the first mirror, the second mirror, the first optical transparent glass sheet and the second optical transparent glass sheet are all optically transparent materials and Having the same or substantially the same refractive index of light; the refractive index of the optically transparent index matching glue is substantially the same as the refractive index of the optically transparent material.
  • incident light enters the transmission frequency tunable Fabry-Perot filter from the light-passing surface of the Fabry-Perot etalon.
  • the invention is reasonably designed to effectively combine a Fabry-Perot etalon with a transmission frequency tunable Fabry-Perot filter to place the liquid crystal in Fabry-Perot.
  • the cavity of the etalon uses the electronically controlled birefringence effect of the liquid crystal and optical phase modulation of the linearly polarized light incident on a particular polarization direction to achieve linearly polarized light transmitted through the Fabry-Perot filter. Continuous, fast and precise tuning of frequency.
  • the thickness of the liquid crystal layer is very thin, a wide-bandwidth tunable Fabry-Perot filter having a small size and a large free spectral range can be fabricated, and at the same time, fast and precise tuning of the optical frequency over a wide spectral range can be realized.
  • the invention has the characteristics of no mechanical moving parts, stable and reliable performance, simple structure, low cost, small size, easy installation and production, and can meet the requirements of small size and extremely reliable operation under extreme working conditions, in laser, optical test, optical fiber. Wide range of applications in communications, biology, medical devices and fiber optic sensor networks.
  • Figure 1 is a schematic view of a conventional Fabry-Perot etalon
  • FIG. 2 is a schematic structural view of a tunable Fabry-Perot filter including a nematic liquid crystal material layer
  • FIG. 3 is a schematic diagram showing a phase of light transmission through a liquid crystal material according to an applied electric field
  • FIG. 4 is a schematic view of another structure of a tunable Fabry-Perot filter including a nematic liquid crystal material layer;
  • FIG. 5 is a schematic diagram of a transmission spectrum of a Fabry-Perot etalon;
  • Figure 6 is a schematic diagram of the transmission spectrum of a tunable Fabry-Perot filter
  • Figure 7 is a schematic structural view of the present invention.
  • Figure 8 is a schematic diagram of the intrinsic transmission spectrum of the present invention.
  • Figure 9 is a schematic illustration of the tunable transmission spectra of the fixed interval and single mode output of the present invention.
  • FIG. 1 is a schematic illustration of a conventional Fabry-Perot etalon 100.
  • the material of the Fabry-Perot etalon 100 is generally optical glass such as fused silica or BK7 in the near-infrared and visible-light bands, assuming that the material has a refractive index n and both light-passing surfaces 2 and 4 are plated high.
  • the free spectral range FSR of the optical etalon 100 is inversely proportional to the thickness h.
  • FSRl 100 GHz and a thickness of mm are to be achieved.
  • the frequency broadband of the transmitted light is mainly related to the reflectance R. The higher the reflectance, the smaller the frequency broadband or the finesse.
  • the Fabry-Perot etalon's transmission spectrum is characterized by a very narrow bandwidth per transmission spectrum, a uniform frequency spacing of the transmission spectrum and a very wide optical band width, typically covering more than 100 nm.
  • Light spectrum band Figure 5 shows a schematic of the Fabry-Perot optical etalon 100 output spectrum.
  • Figure 2 shows a tunable Fabry-Perot filter designed to change the refractive index of linearly polarized light by a nematic liquid crystal under the action of an electric field.
  • Liquid crystal materials generally used as photovoltaic devices have high resistivity. Therefore, it can be considered as an ideal dielectric material.
  • the liquid crystal has anisotropic dielectric properties and uniaxial symmetry due to the ordered orientation of the constituent molecules and the stretched morphology. Like a uniaxial crystal, the direction of the optical axis coincides with the alignment of the molecules. When the liquid crystal molecules act under the external electric field, an electric dipole is formed.
  • the orientation of the liquid crystal molecules is turned to the direction of the electric field, and the direction of the optical axis of the liquid crystal can be changed by changing the strength of the electric field. Therefore, this characteristic of the liquid crystal can be utilized to fabricate an optical phase modulator, a tunable filter, or other optoelectronic devices such as an optical switch and a light emphasizer.
  • the thickness of the liquid crystal film layer generally used as a photovoltaic device is from several micrometers to ten micrometers.
  • a tunable Fabry-Perot filter 200 includes a first mirror 10, a liquid crystal material 18, a second mirror 20, and a driving circuit 14, a first mirror 10 and a second mirror. 20 are optically transparent materials.
  • the tunable Fabry-Perot filter 200 has three different configurations, which are described below:
  • the first structure of the tunable Fabry-Perot filter 200 is: a high-reflectivity multilayer dielectric film is plated on the outer surfaces 8 and 22 of the light-passing surfaces of the first mirror 10 and the second mirror 20, respectively. Forming a Fabry-Perot cavity between two high-reflectivity multilayer dielectric films; an optical anti-reflection film 12 is disposed in order from the inside to the outside of the light-passing surface of the first mirror 10; a transparent electrode film layer 16; an optical anti-reflection film 24, a transparent electrode 26, and a non-conductive material film 19, an optical anti-reflection film 12 and an optical anti-reflection film are sequentially disposed from the inside to the outside on the inner side of the light-passing surface of the second mirror 20.
  • the non-conductive material film 19 has a thickness of several micrometers to ten micrometers, covers other portions except the light-passing aperture, and a channel extending to the edge of the mirror by a width of about one millimeter, in order to provide a liquid crystal for injecting excess liquid in the cavity. Export channel.
  • the non-conductive material film 19 and the inner side of the first mirror 10 form a cavity having a thickness of several micrometers and a few micrometers for arranging the liquid crystal material 18, and the liquid crystal material 18 is a nematic liquid crystal.
  • the thickness of the liquid crystal material is from about several micrometers to ten micrometers. Since the thickness of the liquid crystal is small (several micrometers to ten micrometers), tunable Fabry-Perot can be made in the intrinsic free spectral range (ie, the free spectral range of the tunable filter without an applied electric field) filter.
  • Two transparent electrodes are connected to the driving circuit 14, and a driving signal generated by the driving circuit forms a driving electric field between the two transparent electrode film layers; the Fabri is adjusted by changing the effective refractive index n of the liquid crystal in the Fabry-Perot cavity by the electric field.
  • a typical driving electric field is a square wave signal having a voltage of several volts and a frequency of 1 kHz to several kilohertz.
  • the light beam 6 incident on the filter 200 is a beam traveling in the z direction, and the polarization axis is linearly polarized light in the X direction, assuming that the refractive index of the optically transparent material is n, the two light passing surfaces 8 and 22 Both are highly reflective films.
  • Figure 3 shows the phase change of a light phase with a wavelength of 1550 nm for a nematic liquid crystal with a thickness of 10 ⁇ m driven by a 2 kHz square wave voltage.
  • a maximum optical phase delay of about 2 ⁇ can be achieved.
  • the tunable Fabry-Perot filter 200 can obtain a tuning range of the transmitted optical frequency of about 100 GHz for linearly polarized light incident at near zero degrees.
  • the change in the band width ⁇ ⁇ 1/2 of the free spectral range ⁇ ⁇ and the transmitted light is much smaller.
  • Figure 6 is a schematic diagram of the transmission spectrum of the tunable Fabry-Perot filter 200.
  • the tunable Fabry-Perot filter 200 can achieve a wide range of transmission optical frequency tuning under the action of an applied electric field without substantially changing the frequency broadband and free spectral range of the transmitted light. This feature is important for many applications of the tunable Fabry-Perot filter 200, such as lasers and spectrum instruments.
  • the second structure of the tunable Fabry-Perot filter 200 is: plating an optical antireflection film on the outer surface 8 of the light-passing surface of the first mirror 10; from the inside to the inner side of the light-passing surface of the first mirror 10
  • the high-reflectivity multilayer dielectric film 12 and the transparent electrode film layer 16 are sequentially disposed outside, and the other structure is the same as that of the tunable Fabry-Perot filter 200.
  • the second structure of the tunable Fabry-Perot filter 200 is characterized by a greater free spectral range than the first.
  • the third structure of the tunable Fabry-Perot filter 200 is: plating an optical antireflection film on the outside of the light-passing surface of the second mirror 20; from the inside to the inside of the light-passing surface of the second mirror 20 A high-reflectivity multilayer dielectric film 24, a transparent electrode 26, and a non-conductive material film 19 are sequentially disposed.
  • the other structure is the same as the second structure of the tunable Fabry-Perot filter 200.
  • the third structure of the tunable Fabry-Perot filter 200 is characterized by the ability to achieve a larger free spectral range than the second structure.
  • the tunable Fabry-Perot filter 300 includes a first mirror 32, a first optical glass sheet 36, a liquid crystal material 41, and a second optical glass sheet. 50. Second mirror 46 and drive circuit 56.
  • the difference between the filter 300 and the filter 200 is that, in the filter 300, the liquid crystal material 41 is first placed between two optically transparent glass sheets 36 and 50, and the light passing through the two optically transparent glass sheets 36 and 50 The inner side of the face is respectively coated with optical anti-reflection layers 38 and 52, transparent electrodes 40 and 54, and a film layer 41 of non-conductive material is disposed on the optically transparent glass piece 50 and the inner side of the first optically transparent glass piece 36 is formed. A cavity having a thickness of a few micrometers and a few micrometers is used to place the liquid crystal material.
  • the other light-passing surfaces of the above two optically transparent glass sheets 36 and 50 are not coated or coated with an optical antireflection film, and the optically transparent glass sheets 36 and 50 and the liquid crystal material 42 constitute a liquid crystal cell.
  • the above liquid crystal cell is assembled, it is not necessary to keep the light-transmitting surfaces of the optically transparent glass sheets 36 and 50 strictly parallel, which makes it easier to handle at the time of assembly.
  • the tunable Fabry-Perot filter 300 also has three different configurations, which are described below:
  • the first configuration of the tunable Fabry-Perot filter 300 is such that the outer light-passing surface 30 of the first mirror 32 is plated with a high-reflectance film, and the inner light-passing surface is a polished surface having no coating.
  • the inner side of the first reflecting mirror 32 is bonded to the outer side of the optically transparent glass piece 36 on the above liquid crystal cell by the index matching adhesive 34.
  • the outer light-passing surface 44 of the second mirror 46 is plated with a high-reflectance film, and the inner light-passing surface is a polished surface having no plating film.
  • the inner light-passing surface of the second mirror 46 is bonded to the outer side of the optically transparent glass sheet 50 on the liquid crystal cell by the index matching glue 48, in the process, the two mirrors 32 and The faces 30 and 44 of the two plated high reflectivity films of 46 are closely aligned to achieve the multi-beam interference effect of the Fabry-Perot etalon.
  • the index matching glue 48 and the index matching glue 34 are identical or nearly identical.
  • the disadvantage of the structure of the filter 300 is that it is thicker than the filter 200 because of the use of four optically transparent materials.
  • the second structure of the tunable Fabry-Perot filter 300 is such that the outer light-passing surface 30 of the first mirror 32 is plated with an optical antireflection film, and the inner light-passing surface is plated with a high reflectivity film.
  • the outer side of the optically transparent glass piece 36 on the above liquid crystal cell may be coated with an optical antireflection film or a non-coated polishing surface.
  • the inner side of the first reflecting mirror 32 and the outer side of the optical transparent glass sheet 36 on the liquid crystal cell are bonded together by the index matching adhesive 34, and the assembly method of the optical path without glue in the industry can be used, that is, only two The optical parts are bonded with glue outside the light path.
  • the other structure is the same as the first structure of the filter 300.
  • the Fabry-Perot cavity is composed of the inner light-passing surface of the first mirror 32 and the high-reflectivity film on the outer light-passing surface of the second mirror 46, the characteristic of the structure is that the ratio can be achieved.
  • the first structure of filter 300 has a larger free spectral range.
  • the third structure of the tunable Fabry-Perot filter 300 is such that the structure differs from the second structure of the filter 300 in that the outer light-passing surface 44 of the second mirror 46 is optically plated.
  • the outer light-passing surface of the optically transparent glass sheet 50 on the liquid crystal cell may be coated with an optical antireflection film or a non-coated polishing surface.
  • the inner side of the second reflection 46 is bonded to the outer side of the optically transparent glass sheet 50 on the liquid crystal cell by an index matching glue, and an assembly method of the optical path without glue in the industry is generally used, that is, only two opticals are used. The parts outside the light path are glued together.
  • the other structure is the same as the second structure of the filter 300. Since the Fabry-Perot cavity is composed of the inner light-passing surface of the first mirror 32 and the high-reflectivity film on the inner light-passing surface of the second mirror 46, the structure is characterized in that the ratio can be achieved.
  • the second structure of filter 300 has a larger free spectral range.
  • a tunable optical filter 400 with fixed frequency spacing and single mode output is comprised of a Fabry-Perot etalon 100 and a tunable Fabry-Perot filter 200 or 300.
  • the Fabry-Perot etalon 100 has a free spectral range of FSR1
  • the tunable Fabry-Perot filter 200 or 300 has a free spectral range of FSR2
  • FSR2 has a smaller ⁇ f than FSR1, as shown in Figures 5 and 6. Show.
  • FSR2 and FSR1 can be adjusted as needed.
  • FSR3 can be adjusted, but the minimum difference should be equal to or greater than twice the ⁇ ⁇ 1/2 to ensure the single-mode output characteristics of the tunable filter 400.
  • the tunable range of the transmission spectrum of the filter 200 or 300 is equal to or close to FSR1, and the tunable filter 400 enables an equally spaced single mode tunable output with a frequency interval of FSR1 in the spectral FSR3 range, the tunable transmission spectrum As shown in Figure 9.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne un filtre optique accordable à intervalles de fréquences fixes et sortie monomode, constitué d'un étalon de Fabry-Pérot (100) et d'un filtre de Fabry-Pérot accordable en fréquence de transmission (200) disposés selon un agencement en opposition avant/arrière. L'étalon de Fabry-Pérot (100) et le filtre de Fabry-Pérot accordable en fréquence de transmission (200) présentent une même plage de réponse spectrale, mais le filtre de Fabry-Pérot accordable en fréquence de transmission (200) n'est efficace que par rapport à une lumière linéaire polarisée ayant une direction de polarisation spécifique. Le filtre optique accordable a pour caractéristiques de ne comporter aucune partie mécanique, d'être de petite taille et de présenter une grande plage spectrale libre.
PCT/CN2013/076163 2012-07-30 2013-05-23 Filtre optique accordable à intervalles de fréquences fixes et sortie monomode WO2014019399A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201210265873.6 2012-07-30
CN201210265873.6A CN102798987B (zh) 2012-07-30 2012-07-30 一种固定频率间隔和单模输出的可调谐光学滤波器

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CN102798987B (zh) * 2012-07-30 2015-01-21 天津奇谱光电技术有限公司 一种固定频率间隔和单模输出的可调谐光学滤波器
KR102049373B1 (ko) * 2015-07-30 2019-11-27 테크놀로지 이노베이션 모멘텀 펀드 (이스라엘) 리미티드 파트너쉽 스펙트럼 영상처리 방법, 스펙트럼 영상처리 시스템 및 제어 유닛
WO2022000243A1 (fr) * 2020-06-30 2022-01-06 深圳市海谱纳米光学科技有限公司 Système d'imagerie basé sur une cavité de fabry-perot

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