WO2021077396A1 - Dispositif de filtrage optique accordable - Google Patents

Dispositif de filtrage optique accordable Download PDF

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Publication number
WO2021077396A1
WO2021077396A1 PCT/CN2019/113254 CN2019113254W WO2021077396A1 WO 2021077396 A1 WO2021077396 A1 WO 2021077396A1 CN 2019113254 W CN2019113254 W CN 2019113254W WO 2021077396 A1 WO2021077396 A1 WO 2021077396A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric actuator
mirror surface
transparent
tunable optical
filter device
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Application number
PCT/CN2019/113254
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English (en)
Chinese (zh)
Inventor
郭斌
Original Assignee
深圳市海谱纳米光学科技有限公司
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Application filed by 深圳市海谱纳米光学科技有限公司 filed Critical 深圳市海谱纳米光学科技有限公司
Priority to CN201980087770.5A priority Critical patent/CN113260897A/zh
Priority to PCT/CN2019/113254 priority patent/WO2021077396A1/fr
Publication of WO2021077396A1 publication Critical patent/WO2021077396A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements

Definitions

  • the invention relates to the field of filters, in particular to a tunable optical filter device.
  • the Fabry-Perot interference filter is composed of two flat plates placed in parallel. In order to improve the reflectivity of the end face, a multilayer dielectric film or a metal film is plated on the two flat plates. If the interval between two parallel planes is fixed (usually using quartz or Invar as the interval), the instrument becomes an F-P etalon; if the interval between the two parallel planes can be changed, the instrument becomes an F-P interferometer. Compared with the Michelson interferometer, the F-P interferometer based on multi-beam interference produces much sharper fringes. Therefore Fabry-Perot cavity (Fabry-Perot cavity) has been widely used in spectral fine structure analysis, laser resonant cavity, optical filter and so on.
  • Fabry-Perot cavity Fabry-Perot cavity
  • Fabry-Perot cavity is used in optical filters. Under normal incidence, if the optical thickness of the cavity length is an integer multiple of the half wavelength of the incident light, the light at this wavelength can be transmitted through with low loss, while the wavelength that does not meet this condition is Reflected to achieve the filtering function.
  • Tunable filter devices (FPI) based on Fabry-Perot (Fabry-Perot cavity) interference can be applied to miniature spectrometers and miniature or even miniature hyperspectral cameras.
  • the Fabry-Perot cavity provides the simplest system structure and optical path, so it can greatly reduce the cost, volume and cost of hyperspectral cameras. Power consumption.
  • FPI devices in the visible-near infrared range usually use optical glass (such as synthetic quartz glass) as a substrate, and form a mirror chip through optical and semiconductor processing, and then assemble two mirror chips and an external piezoelectric actuator to form a Fabry -Perot cavity module, by adjusting the driving voltage of the piezoelectric actuator, the relative position between the two mirror chips can be adjusted, so as to realize the light of different bands on the gating spectrum.
  • optical glass such as synthetic quartz glass
  • an external piezoelectric actuator to form a Fabry -Perot cavity module
  • Fabry-Perot cavity devices made by micromachining can further realize miniaturization, mass production and cost reduction.
  • the main manufacturing methods are body craft type and surface craft type.
  • the essential feature of the two processes is to form a cantilever beam structure on the substrate of the mirror structure itself, or the mirror film itself is the elastic support of the device.
  • the current micro-machined Fabry-Perot cavity devices all adopt the capacitive drive mode.
  • the advantage of the capacitive drive is that the structure is relatively simple, but it will be restricted by problems such as pull-in, which may lead to film displacement. Less than 1/3 of the gap.
  • Integrating the piezoelectric film with the movable mirror can realize the mirror displacement in the positive and negative directions and the required driving voltage is usually smaller than that of the capacitor drive, and the voltage signal is not directly loaded on the movable film spring structure when the piezoelectric film is driven Therefore, the pull-in effect caused by the capacitor drive can be completely avoided, thereby increasing the movable range of the film, that is, the adjustable spectral range of the Fabry-Perot cavity can be expanded accordingly.
  • the micro-machined Fabry-Perot cavity device has problems such as capacitive drive and the inability to isolate the elastic structure from the mirror surface, which leads to intrinsic stress and pull-in effect, which limits the application range of this type of device.
  • the embodiments of the present application provide a tunable optical filter device, including a transparent fixed substrate provided with a first mirror surface and a transparent film substrate provided with a second mirror surface, on the transparent fixed substrate
  • a spacer layer is arranged around the outer periphery of the first mirror surface, and a piezoelectric actuator is arranged on the side of the spacer layer away from the transparent fixed substrate.
  • the transparent film substrate is erected on the piezoelectric actuator to connect the first mirror surface and the second mirror surface.
  • a cavity is formed between, so that the piezoelectric actuator can drive the second mirror surface to move relative to the first mirror surface.
  • the edge of the transparent film substrate is connected with a piezoelectric actuator to form a movable optical film. Therefore, a certain voltage can be applied to the piezoelectric actuator to drive the transparent film substrate to move in the positive and negative directions, thereby forming a movable optical film.
  • the spacer layer is made of a sacrificial material, and the sacrificed portion of the spacer layer forms a cavity.
  • the Fabry-Perot cavity can be formed by etching the sacrificial material.
  • the piezoelectric actuator is partially suspended on the surface of the spacer layer. Since the spacer layer is partially sacrificed, the piezoelectric actuator is arranged on the surface of the spacer layer and is in a partially suspended state, which is more conducive to driving the transparent film substrate to move.
  • the edge of the transparent film substrate is mounted on the suspended part of the piezoelectric actuator. Therefore, the movement range of the transparent film substrate can be expanded.
  • the piezoelectric actuator is disposed on the spacer layer by deposition or bonding.
  • the method of deposition or bonding is simple and easy to process.
  • the piezoelectric actuator includes a piezoelectric film structure and electrodes on the upper and lower surfaces of the piezoelectric film structure.
  • the piezoelectric actuator can be driven to drive the transparent film substrate to move by applying voltage on the upper and lower surfaces of the piezoelectric film structure.
  • the material of the transparent film substrate includes alumina.
  • Alumina facilitates micromachining to make the substrate into a thin film, and has high transparency.
  • the first mirror surface and the second mirror surface include a silver layer or a distributed Bragg reflector formed by superimposing silicon, silicon dioxide, and silicon.
  • the first mirror surface, the second mirror surface, and the cavity in the middle form a Fabry-Perot cavity. Therefore, a silver layer or a distributed Bragg reflector formed by superimposing silicon, silicon dioxide and silicon is selected to reflect light.
  • the material of the transparent fixed substrate includes glass or aluminum oxide.
  • the use of glass or alumina as the transparent fixed substrate is beneficial for micro-processing in industry.
  • the embodiment of the present application discloses a tunable optical filter device, which includes a transparent fixed substrate provided with a first mirror surface and a transparent film substrate provided with a second mirror surface.
  • the transparent fixed substrate is located outside the first mirror surface.
  • a spacer layer is arranged around the spacer layer, and a piezoelectric actuator is arranged on the side of the spacer layer away from the transparent fixed substrate.
  • the transparent film substrate is erected on the piezoelectric actuator to form a cavity between the first mirror surface and the second mirror surface,
  • the piezoelectric actuator can drive the second mirror surface to move relative to the first mirror surface.
  • the piezoelectric actuator can cause the transparent film substrate to be displaced relative to the transparent fixed substrate.
  • the voltage applied to the piezoelectric actuator is not directly applied to the movable optical film structure, so it can completely avoid the drive caused by the capacitor.
  • the pull-in effect improves the movable range of the transparent film substrate and expands the adjustable spectrum range of the Fabry-Perot cavity.
  • the Fabry-Perot cavity is formed by micromachining and sacrificial layer corrosion, the manufacturing process is simple, the cost is reduced, and industrial mass production can be realized.
  • FIG. 1 is a schematic cross-sectional view I of the tunable optical filter device according to the embodiment of the application;
  • FIG. 2 is a schematic cross-sectional view II of the tunable optical filter device according to the embodiment of the application.
  • Fig. 1 shows a cross-sectional view of a tunable optical filter device according to one of the embodiments of the present invention.
  • the tunable optical filter device includes a transparent fixed substrate 101 provided with a first mirror surface 111 and a transparent film substrate 102 provided with a second mirror surface 112, wherein the first mirror surface 111 and the second mirror surface 112 are opposite to each other.
  • a spacer layer 301 is arranged on the transparent fixed substrate 101 outside the first mirror surface 111, a piezoelectric actuator 121 is arranged on the side of the spacer layer 301 away from the transparent fixed substrate 101, and the transparent film substrate 102 is erected On the piezoelectric actuator 121, a cavity is formed between the first mirror surface 111 and the second mirror surface 112, that is, a Fabry-Perot cavity is formed, so that the piezoelectric actuator 121 can drive the second mirror surface 112 relative to The first mirror 111 moves to change the relative distance of the Fabry-Perot cavity to realize the adjustable filtering function.
  • the result of the whole device is relatively simple, the cost is low, and the processing technology is very simple and mature, which can realize mass production and is convenient Popularize and apply to various small-scale hyperspectral optical equipment.
  • the edge of the transparent film substrate 102 is connected with the piezoelectric actuator 121 to form a movable optical film.
  • the transparent film substrate 102 can be driven to move in the positive and negative directions.
  • the transparent film substrate 102 and the piezoelectric actuator 121 are always in a connected state, and the second mirror 112 is connected to the transparent film substrate 102, so the transparent film substrate 102 is driven to move by the piezoelectric actuator 121, so the first mirror can be controlled
  • the distance between 111 and the second mirror 112, that is, the gap of the Fabry-Perot cavity is adjusted to realize the function of adjustable optical filtering.
  • the movable optical film formed by the transparent film substrate 102 and the piezoelectric actuator 121 is disposed on the side of the spacer layer 301 away from the transparent fixed substrate 101.
  • the spacer layer 301 is made of a sacrificial material, and the sacrificed portion of the spacer layer 301 forms a cavity. Therefore, in the process, the sacrificial material can be etched to leave a part of the spacer layer 301 that is not etched to support the transparent film substrate 102 and the transparent fixed substrate 101 to form a Fabry-Perot cavity.
  • the process of etching the spacer layer 301 can make the first mirror surface 111 and the second mirror surface 112 have relatively parallel surfaces during processing.
  • the first mirror surface 111 is deposited on the transparent fixed substrate 101 and the spacer layer 121 is then deposited.
  • the mirror 112, the piezoelectric actuator 301 and the transparent film substrate 102, and finally the spacer layer 301 is etched to form a Fabry-Perot cavity between the first mirror 111 and the second mirror 112.
  • a through hole 103 is provided on the suspended portion of the transparent film substrate 102 and/or the piezoelectric actuator 301 to corrode the sacrificial material.
  • other methods may also be used to corrode the sacrificial material.
  • the whole process is simple and convenient, and it adopts the very mature technology in the current micromachining manufacturing process, so the whole device is suitable for mass production in industry, and the production through micromachining can further realize miniaturization and reduce costs.
  • the piezoelectric actuator 121 is disposed on the spacer layer 301 by deposition or bonding.
  • the piezoelectric actuator 121 specifically includes a piezoelectric film structure 1211 and electrodes 1212 and 1213 arranged on the upper and lower surfaces of the piezoelectric film structure 1211.
  • the material of the piezoelectric film structure 1211 can be lead zirconate titanate film, nitride Aluminum film or zinc oxide film.
  • lead zirconate titanate film has higher piezoelectric, dielectric and heat release properties than non-ferroelectric films (such as aluminum nitride film or zinc oxide film).
  • the piezoelectric actuator 121 is partially suspended on the surface of the spacer layer 301.
  • the piezoelectric actuator 121 is arranged on the surface of the spacer layer 301 and is in a partially suspended state, it is more advantageous to drive the transparent film substrate 102 to move.
  • the edge of the transparent film substrate 102 is mounted on the suspended part of the piezoelectric actuator 301, that is, the edge of the transparent film substrate 102 is arranged on the other side of the suspended part of the piezoelectric actuator 301 away from the cavity.
  • applying a certain range of voltage to the piezoelectric actuator 301 can drive the transparent film substrate 102 to move, and compared to other piezoelectric actuators 301 that are not suspended, in this case the transparent film
  • the movable range of the substrate 102 is significantly improved, thereby further expanding the spectral adjustable range of the Fabry-Perot cavity.
  • the piezoelectric actuator 121 and the second mirror 112 are respectively located on both sides of the transparent film substrate 102 at this time, which is to separate the piezoelectric actuator 121 and the second mirror 112, which can reduce the intrinsic stress and absorption. ⁇ effect.
  • the first mirror surface 111 and the second mirror surface 112 may be silver layers.
  • the first mirror surface 111 and the second mirror surface 112 may also be made of silicon, Distributed Bragg reflector formed by superposition of silicon and silicon.
  • the first mirror surface 111, the second mirror surface 112 and the cavity in the middle form a Fabry-Perot cavity. Therefore, a silver layer or a distributed layer formed by superimposing silicon, silicon dioxide and silicon is selected in the Fabry-Perot cavity.
  • the Bragg reflector reflects the light, and it can also be other reflective materials. Specifically, the appropriate mirror material can be selected according to the actual needs of hyperspectral imaging to achieve the best filtering effect.
  • the material of the transparent film substrate 102 includes alumina.
  • alumina Using alumina as the substrate can ensure the transmittance of visible light-near infrared light (400-1000nm). It should be realized that other materials other than alumina, such as silicon or zinc selenide, can also be used to achieve the technical effects of the present invention.
  • alumina is easy to process, and the substrate can be made into a very thin film, which can further miniaturize the device and expand the moving range of the movable film.
  • the material of the transparent fixed substrate 101 includes glass or alumina. Glass or alumina is convenient for micro-processing in industrial production. In other optional embodiments, the transparent fixed substrate 101 can also be selected from other materials to also achieve the technical effects of the present invention.
  • the tunable optical filter device of the present application is provided with a transparent fixed substrate with a first mirror surface and a transparent film substrate with a second mirror surface.
  • a spacer layer is provided on the transparent fixed substrate around the outer periphery of the first mirror surface.
  • the side of the layer away from the transparent fixed substrate is provided with a piezoelectric actuator, and the transparent film substrate is erected on the piezoelectric actuator to form a cavity between the first mirror surface and the second mirror surface, so that the piezoelectric actuator can be driven
  • the second mirror surface moves relative to the first mirror surface.
  • the piezoelectric actuator can cause the transparent film substrate to be displaced relative to the transparent fixed substrate.
  • the voltage applied to the piezoelectric actuator is not directly applied to the movable optical film structure, so it can completely avoid the drive caused by the capacitor.
  • Intrinsic effect and pull-in effect thereby increasing the movable range of the transparent film substrate and expanding the adjustable range of the spectrum of the Fabry-Perot cavity.
  • the tunable filter device manufactured by the micromachining process has a simple structure and a mature process, which can realize batch size, miniaturization and cost reduction, which is beneficial to popularize and apply to small hyperspectral optical equipment such as microspectrometers.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif de filtrage optique accordable, comprenant un substrat fixe transparent pourvu d'une première face de miroir et d'un substrat de film mince transparent pourvu d'une seconde face de miroir, sur le substrat fixe transparent, une couche d'espacement étant disposée autour de l'extérieur de la première face de miroir ; la face de la couche d'espacement à l'opposé du substrat fixe transparent est pourvue d'un actionneur piézoélectrique ; et le substrat de film mince transparent est érigé sur l'actionneur piézoélectrique pour former un corps de cavité entre la première face de miroir et la seconde face de miroir, de telle sorte que l'actionneur piézoélectrique peut entraîner la seconde face de miroir à se déplacer par rapport à la première face de miroir. Au moyen de l'actionneur piézoélectrique, le substrat à film mince transparent peut effectuer un déplacement par rapport au substrat fixe transparent, de telle sorte qu'un effet intrinsèque et un effet de traction provoqués par une commande de condensateur peuvent être complètement évités, ce qui élargit la plage mobile du substrat en film mince transparent et la plage accordable en spectre d'une cavité de Fabry-Perot. De plus, le dispositif de filtrage accordable produit et fabriqué au moyen d'un procédé de micro-usinage a une structure simple, le procédé est mature, à la fois la production de masse et la miniaturisation peuvent être réalisées, et le coût peut être réduit.
PCT/CN2019/113254 2019-10-25 2019-10-25 Dispositif de filtrage optique accordable WO2021077396A1 (fr)

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Application Number Priority Date Filing Date Title
CN201980087770.5A CN113260897A (zh) 2019-10-25 2019-10-25 一种可调光学滤波器件
PCT/CN2019/113254 WO2021077396A1 (fr) 2019-10-25 2019-10-25 Dispositif de filtrage optique accordable

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PCT/CN2019/113254 WO2021077396A1 (fr) 2019-10-25 2019-10-25 Dispositif de filtrage optique accordable

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Cited By (1)

* Cited by examiner, † Cited by third party
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EP4375628A1 (fr) * 2022-11-25 2024-05-29 Murata Manufacturing Co., Ltd. Interféromètre piézoélectrique

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