WO2013171896A1 - 回転軸保持機構及びこれを用いた回転粘度計 - Google Patents
回転軸保持機構及びこれを用いた回転粘度計 Download PDFInfo
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- WO2013171896A1 WO2013171896A1 PCT/JP2012/062789 JP2012062789W WO2013171896A1 WO 2013171896 A1 WO2013171896 A1 WO 2013171896A1 JP 2012062789 W JP2012062789 W JP 2012062789W WO 2013171896 A1 WO2013171896 A1 WO 2013171896A1
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- rotating shaft
- hinge
- holding mechanism
- shaft holding
- deformation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/02—Sliding-contact bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C1/00—Flexible shafts; Mechanical means for transmitting movement in a flexible sheathing
- F16C1/02—Flexible shafts; Mechanical means for transmitting movement in a flexible sheathing for conveying rotary movements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C11/00—Pivots; Pivotal connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C11/00—Pivots; Pivotal connections
- F16C11/04—Pivotal connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C11/00—Pivots; Pivotal connections
- F16C11/04—Pivotal connections
- F16C11/12—Pivotal connections incorporating flexible connections, e.g. leaf springs
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
Definitions
- the present invention relates to a rotating shaft holding mechanism that can be used for a mechanism and a device that require a rotating shaft and that requires a small amount of rotation.
- the rotating shaft holding mechanism has been devised to solve the problems in the field where high-precision torque measurement is required.
- a rotating viscometer or a rotational viscometer type rheometer hereinafter simply referred to as “rotating”.
- the term "viscosimeter” refers to both of them.) Since it has been devised assuming that it is used for torque measurement in (2), it relates to a viscometer having a rotating shaft holding mechanism.
- the air pressure supplied to the air bearing is a source of torque in some cases, and is a matter requiring attention when using the air bearing as a bearing for high-accuracy torque measurement.
- a holding mechanism that allows an object that translates within a limited range by deformation of a spring has been known (see Patent Documents 1 to 4).
- the present invention (1) uses a plurality of parallel springs, (2) sets the length h and angle of the side of the parallel spring to be deformed, and determines the connection point between the parallel spring and the rotating shaft.
- a structure matched with the distance h from the rotation axis in the direction was used.
- the present invention provides a movable side connected to the shaft by a hinge at a connection point at a distance h in the radial direction from the rotation center of the rotating shaft, a plurality of parallel deformed sides, and one end of each deformed side as a movable side.
- the rotary shaft holding mechanism having a plurality of parallel spring links each comprising a hinge connected to the hinge and a hinge connecting multiple ends of each deformation side to the fixed portion, by setting the effective length of each deformation side to h,
- the rotation of the shaft connected to the movable side by the hinge at a connecting point at a distance h in the radial direction from the center of rotation is allowed within a finite angle range
- the plurality of parallel spring links include at least two parallel spring links having different directions. It is characterized by containing two or more.
- the rotating shaft holding mechanism of the present invention is characterized in that the sum of the spring constants of the hinges at both ends of each of the deformation sides is made equal to the spring constant of the hinge at the connection point.
- the hinges at both ends of each of the deformation sides have the same spring constant and the same length L, and the hinge at the connection point is a hinge.
- the length is 2L.
- the present invention also relates to a rotational viscometer using the rotational shaft holding mechanism as a torque measuring shaft retaining mechanism of the rotational viscometer.
- the conventional ball bearing or air bearing can be made more compact, there is no friction resistance in the ball bearing or disturbance due to rolling of the rotating body, and there is no influence of air pressure in the air bearing.
- High precision bearings can be realized.
- the rotary shaft holding mechanism of the present invention is employed in a bearing of a rotary viscometer, a compact and highly accurate viscometer can be realized.
- maintenance mechanism of this invention Theoretical explanatory drawing of optimization of the rotating shaft holding mechanism of the present invention.
- FIG. 1 is a conceptual diagram for explaining the principle of the rotating shaft holding mechanism of the present invention.
- the parallel spring has a structure in which only the angle of the apex of the parallelogram changes, and one side is fixed, and the two sides connected to it are deformed to translate the other side. Since objects do not move, they can move very smoothly, and are used for mechanical parts where high-precision measurement is required.
- the movement of the movable side is viewed in detail, it is a circular motion with the radius of the deformed side, and an arbitrary point fixed to the movable side is centered on a point determined by the length and orientation of the deformed side. Move around the circle.
- A is a movable side
- B is a fixed part
- C1 and C2 are deformation sides
- D is a hinge
- O is a rotating shaft (not deformed from O to D).
- the movable side A of the parallel spring draws an arc having a radius h.
- a hinge D that joins the rotary shaft O and the movable side A is provided at a point where the inclination and length of the parallel spring coincide with each other from a place where the center of the rotary shaft O is desired.
- O constitutes a rotation axis that follows the arcuate motion of A. Since the position of D is not specified, the position of the rotation axis O can be set freely.
- the position of O is not fixed by the hinge D if there is only one link to the rotating system by the parallel spring of FIG. However, the position of the rotation axis O can be determined by combining links of two or more parallel springs having different directions.
- the link shown in FIG. 1 deals with ideal deformation in which only the vertex of the parallelogram is deformed, but the angle actually changes within a certain range of the deformed side. As a result, the effective length of the deformed side changes and the movable side deviates from the circular motion.
- the parallel spring the parallelism can be maintained by making the shape of the deformed side the same, but in the rotational motion, a mechanism for compensating for the change in the effective radius is necessary.
- the hinge part of the deformed side is considered to be a leaf spring having a length L
- the hinge that forms the rotating shaft is a leaf spring having a length of 2L. It corresponds to the change of the effective length of the deformation side.
- the spring constants of the hinges at the four deformation sides and the hinge at the connection point are set to 1: 4, and both are similar deformations.
- the structure is such that In the case of being connected by a leaf spring, the deformed side is inclined to be apparently long. This length effect can be compensated by matching the length of the leaf spring of the coupling portion with the rotating shaft to the sum of the lengths of the leaf springs of the two coupling portions on the deformation side. From the balance of force, it is also necessary to make the rotational elastic coefficient of the leaf spring on the deformed side coincide with the coefficient of the rotational axis.
- FIG. 2 is a diagram for theoretically explaining the optimization of deformation of the parallel spring of the present invention.
- A is a movable side
- B is a fixed part
- C is a deformed side
- D is a leaf spring (hinge)
- O is a rotation axis
- the left deformed side C is drawn as a state before deformation.
- it is actually deformed in the same manner as the deformation side C on the right side, and a parallelogram link is formed by the two deformation sides C.
- the vertex of the virtual parallelogram is an extension of the angle ⁇ from the center point of the arc.
- the spring constant needs to be four times the rotation axis side of D as compared to the deformation side of E. (If the spring constants do not match, the arc will not be deformed and the deviation from the ideal length will not be canceled out accurately.)
- FIG. 3 is a view showing an embodiment of the rotating shaft holding mechanism of the present invention
- FIG. 4 is an enlarged view of a main part thereof.
- FIG. 3 shows an example in which the rotating shaft holding mechanism of the present invention is realized using wire cutting or the like.
- four links by parallel springs are introduced every 90 °.
- the portion A in FIG. 3 constitutes a movable portion of the parallel spring
- the portion B constitutes a fixed portion of the parallel spring
- O is a rotating shaft.
- FIG. 4 is an enlarged view of one of the links formed by the parallel springs provided at four locations in FIG. In FIG.
- A is a movable part of the parallel spring
- B is a fixed part of the parallel spring (strictly, it does not coincide with the shape of FIG. 3 but is simplified for explanation)
- D is a hinge
- E is a hinge of a parallel spring
- O is a shaft.
- the hinge part D has a wire cut radius twice that of the hinge part E.
- the thickness of the hinge part is also D twice that of E.
- the hinge D is provided at a position h from the rotation center of the shaft O, the shaft O rotates without difficulty and the center of rotation does not shift.
- the rotatable finite angle range corresponds to the movable range of the parallel spring, and in this example is about ⁇ 0.1 radians.
- the hinge portion can be made using a leaf spring.
- links by parallel springs are provided at a total of four locations every approximately 90 ° around the shaft, but the center of the shaft can be determined if provided at at least two locations with different directions. .
- the center of the shaft can be determined if provided at at least two locations with different directions.
- three locations may be provided every 120 °.
- Example 2 Since the rotating shaft holding mechanism of the present invention has a parallel spring structure, the torque and the rotation angle are theoretically proportional. Therefore, if the rotation angle is measured, it can be used as a torque meter. By utilizing this fact, a torque measuring unit of a rotational viscometer can be obtained. Alternatively, when the torque measuring shaft is rotationally displaced, the torque measuring shaft is loaded with a torque sufficient to cancel the rotational displacement, and the value of the loaded torque can be calculated and used as a torque meter. FIG.
- FIG. 5 shows a conventional rotational viscometer (coaxial double cylinder type), where a, e, and f are torque detection mechanisms, b is an air bearing, c is an inner cylinder / outer cylinder, d is a thermostatic bath, g H is a rotating mechanism of the outer cylinder, and i is an elevating mechanism of the thermostatic bath.
- the rotating cylindrical shaft (outer cylinder) is different from the cylindrical shaft (inner cylinder) for measuring torque, and the rotating shaft on the inner cylinder side hardly rotates.
- an air bearing having a small rotational load variation has been used.
- the conventional air bearing b is replaced with the rotational viscometer replaced by the rotating shaft holding mechanism of the first embodiment, so that the rotational viscometer can be more excellent in both cost and ease of handling.
- the torque meter of the rotational viscometer thus obtained is ideal as a torque meter for the rotational viscometer because the shaft rigidity is high and the moment of inertia can be reduced. Thereby, the measurable area can be expanded. The small moment of inertia increases the response speed, and in particular contributes to the expansion of the rheometer frequency range.
- Example 2 As an application of the rotary shaft holding mechanism of the present invention, an example of a rotational viscometer is shown in Example 2, but the present invention can also be applied to devices having other rotary shafts.
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Abstract
Description
また、上記回転軸保持機構は、高精度のトルク測定が必要な分野の課題解決に向けて考案されたもので、特に、回転粘度計、或いは、回転粘度計型レオメータ(以下では、単に「回転粘度計」と記してもこの両者を指す。)におけるトルク測定に利用することを想定して考案されていることから、回転軸保持機構を有する粘度計に関するものである。
一方、並進運動する物体をバネの変形によって限られた範囲内で許容する保持機構は従来から知られている(特許文献1~4参照)。
静的なトルク測定では、回転させる必要はないのでこの方法を用いることが出来る(回転しなくても、軸の回りに働くトルクだけを取り出すために、回転軸が固定される必要がある。)。複数の板バネを用いて、軸を懸架すれば、擬似的に回転軸を作ることが出来るが、しかし、単純な方法では、回転軸がバネの変形と共に移動し、回転に伴うトルク応力が大きな直線性からずれてしまうという問題ある。また、回転方向とそれ以外の方向の変形に対する応力係数の比を高めるための限界にもなり、高い軸精度を求めることは困難である。
また、本発明の回転軸保持機構は、上記各変形辺の両端のヒンジのバネ定数の総和を、上記接続点のヒンジのバネ定数に等しくしたことを特徴とする。
また、本発明の回転軸保持機構は、上記各変形辺の両端のヒンジは、バネ定数が同じであり、かつ、ヒンジの長さが同じ長さLであり、上記接続点のヒンジは、ヒンジの長さが2Lであることを特徴とする。
また、本発明は、上記回転軸保持機構を回転粘度計のトルク測定軸の保持機構として用いた回転粘度計。
また、本発明の回転軸保持機構を回転粘度計の軸受けに採用すれば、コンパクトで高精度な粘度計が実現できる。
平行バネは、理想的には、平行四辺形の頂点の角度のみ変わる構造で、一辺が固定され、それに繋がっている二辺が変形して、他の一辺を平行移動させるものである。物がずれ動くことが無いので、非常になめらかな移動が可能であり、高精度な計測が必要なところで、機構部品に使われている。可動側の辺の動きは、詳細に見ると、変形辺を半径とする円運動になっており、可動辺に固定された任意の一点は、変形辺の長さと向きによって定められる一点を中心とする円周上を動く。従って、この位置に、角度可変のヒンジを配置すれば、回転軸を構成する要素となることが分かる。この、任意の点は、可動辺上に存在する必要はなく、可動辺に相対位置が固定されていることのみが必要で、理論的には距離がいくら離れていてもよい。これにより構造設計の自由度が大きく向上する。但し、平行バネが一つでは、ヒンジの角度は自由であるため、回転軸を規定できない。2つ以上の場所から、同一の軸上に円運動の中心を持つヒンジを平行バネによって配置すれば、これらのヒンジを繋ぐ物体は、この軸に一致する回転軸を構成する。
図1において、Aは可動辺、Bは固定部、C1、C2は変形辺、Dはヒンジ、Oは回転軸(OからDに至る間は変形しない)である。そうすると、
(1)平行バネの可動辺Aは、半径hの弧を描く。
(2)回転軸Oの中心としたい場所より、平行バネに傾きと長さが一致する地点に回転軸Oと可動辺Aを接合するヒンジDを設ける。すると、OはAの円弧状の運動に従う回転軸を構成する。Dの位置に規定はないので、回転軸Oの位置は自由に設定できる。
(3)図1の平行バネによる回転系へのリンクが一つだけだと、ヒンジDによりOの位置は固定されない。しかし、方向の異なる二つ以上の平行バネによるリンクを組み合わせることで、回転軸Oの位置を決定できる。
板バネで結合している場合、変形辺は、傾くことで、見かけ上長くなる。回転軸との結合部の板バネの長さを変形辺の二つの結合部の板バネの長さの合計と合致させることで、この長さ効果を補償できる。
力の釣り合いから、変形辺の板バネの回転弾性係数と回転軸の係数を一致させることも必要である。
図2において、Aは可動辺、Bは固定部、Cは変形辺、Dは板バネ(ヒンジ)、Oは回転軸であり、図では、左側の変形辺Cは変形前の状態として描かれているが、実際には右側の変形辺Cと同様に変形して、2つの変形辺Cで平行四辺形リンクを構成するものである。
変形辺Cでは両端にそれぞれ長さ2a(=L)の板バネが角度2θだけ円弧状に曲がるとする。このとき、仮想的な平行四辺形の頂点は、円弧の中心点からθの角度の延長上にある。この点と接続点までの距離は、円弧の半径をRとおいて、Rtanθと表すことが出来る。実際の長さは、a=Rθなので、この差がずれとなる。回転軸側はヒンジが一つなので、一つで変形辺の二つ分の変化があるようにすればこれらのずれを相殺することが出来る。θは共通であるから、単純に、接続点のヒンジの有効長を2倍(=2L)にすることで、これが達成される。可動部(回転軸O)に力が働いていないと仮定すると(通常の使用方法)、回転軸からの力と、平行バネの固定側からの力は釣り合っている。これらは、ヒンジ部分の曲げモーメントとして働く、変形辺のヒンジは4つあり、これに対して、回転軸側のヒンジは一つで、これが同じ曲げ角で釣り合っている。そのためには、バネ定数はDの回転軸側が、Eの変形辺側の4倍である必要がある。(バネ定数が一致しない場合は、円弧状の変形でなくなり、理想長からのずれが正確に相殺されない。)
図3は、本発明の回転軸保持機構の一実施例を示す図であり、図4はその主要部を拡大した図である。
図3に、ワイヤカット加工等を用いて、本発明の回転軸保持機構を実現させた一例を示す。図3に示した例では、平行バネによるリンクが90°おきに4箇所導入されている。図3のAの部分が平行バネの可動部、Bの部分が平行バネの固定部を構成し、Oが回転軸である。図4は、図3で4箇所設けられた平行バネによるリンクの一つを拡大して示して説明するための図である。図4において、Aは平行バネの可動部、Bは平行バネの固定部(厳密には図3の形状と一致しないが説明のために簡略化して描いたものである)、Dはヒンジ、Eは平行バネのヒンジ、Oは軸である。
ヒンジ部Dはワイヤカットの半径がヒンジ部Eの2倍である。またヒンジ部の厚みも、DはEの2倍になっている。平行バネによるリンクが半径hの回転を行うと、可動部A上の任意の点も同様に半径hの回転を行いA上に設けられたヒンジDも半径hの回転を行う。このとき、ヒンジDが軸Oの回転中心からhの位置に設けられているので、軸Oが無理なく回転し、回転の中心がずれることがない。回転可能な有限角度範囲は、平行バネの可動範囲に一致し、この例では、±0.1ラジアン程度である。
回転に対する応力トルクを小さくする目的等には、ヒンジ部分を板バネを用いて制作することも可能である。
本発明の回転軸保持機構は平行バネ構造であるので、トルクと回転角度は、理論的には比例関係にある。よって、回転角度を測定すれば、トルクメータとして使用が可能である。このことを利用して、回転粘度計のトルク測定ユニットとすることができる。或いは、トルク測定軸が回転変位したときその回転変位を相殺するだけのトルクをトルク測定軸に負荷し、負荷したトルクの値を算出することによっても、トルクメータとして使用が可能である。
図5に従来の回転粘度計(共軸二重円筒型)を示し、図のa・e・fはトルク検出機構、bはエアベアリング、cは内筒・外筒、dは恒温槽、g・hは外筒の回転機構、iは恒温槽の昇降機構である。図5の回転粘度計では、回転させる円筒軸(外筒)とトルクを測定する円筒軸(内筒)が異なっており、内筒側の回転軸は殆ど回転しない。しかし、軸に掛かるトルクを精密に測定するためには、回転の負荷変動が小さいエアベアリングが使用されてきた。
そこで、本発明では、従来のエアベアリングbを、実施例1の回転軸保持機構で置き換えた回転粘度計とすることにより、コストと扱いやすさの両面でより優れた回転粘度計とすることが可能である。
このようにして得られた回転粘度計のトルクメータは、軸の剛性を高く、且つ、慣性モーメントを小さくできるので、回転粘度計のトルクメータとしては理想的である。これにより、測定可能な領域を広げることが出来る。慣性モーメントが小さいことで、応答速度が上昇し、特に、レオメータの周波数領域拡大に貢献する。高精度な回転粘度計では、これまで、トルク測定軸の保持に高価なエアベアリングが用いられてきたが、本発明の回転軸保持機構に置き換えることで、価格面だけでなく、性能の向上、メンテナンスの軽減や扱いやすさの向上が見込める。
Claims (4)
- 回転する軸の回転中心から半径方向に距離hの接続点でヒンジにより軸に接続された可動辺と、互いに平行な複数の変形辺と、各変形辺の一端を可動辺に接続するヒンジと、各変形辺の多端を固定部に接続するヒンジとからなる平行バネリンクを複数備えた回転軸保持機構において、
前記各変形辺の実行長をhとすることにより、軸の回転中心から半径方向に距離hの接続点でヒンジにより可動辺に接続された軸の回転を有限角度範囲内で許容するとともに、
前記複数の平行バネリンクは、方向の異なる平行バネリンクを少なくとも2つ以上含んでいることを特徴とする回転軸保持機構。 - 前記各変形辺の両端のヒンジのバネ定数の総和を、前記接続点のヒンジのバネ定数に等しくしたことを特徴とする請求項1記載の回転軸保持機構。
- 前記各変形辺の両端のヒンジは、バネ定数が同じであり、かつ、ヒンジの長さが同じ長さLであり、前記接続点のヒンジは、ヒンジの長さが2Lであることを特徴とする請求項2記載の回転軸保持機構。
- 請求項1~3のいずれか1項記載の回転軸保持機構を、回転粘度計のトルク測定軸の保持機構として用いた回転粘度計。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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US14/401,578 US9163663B2 (en) | 2012-05-18 | 2012-05-18 | Rotating shaft holding mechanism and rotational viscometer with same |
EP12877072.4A EP2851573B1 (en) | 2012-05-18 | 2012-05-18 | Rotating shaft holding mechanism and rotational viscometer with same |
CN201280074299.4A CN104379949B (zh) | 2012-05-18 | 2012-05-18 | 回转轴保持机构及使用该机构的回转粘度计 |
KR1020147035031A KR101560702B1 (ko) | 2012-05-18 | 2012-05-18 | 회전축 유지 기구 및 이를 이용한 회전축 점도계 |
PCT/JP2012/062789 WO2013171896A1 (ja) | 2012-05-18 | 2012-05-18 | 回転軸保持機構及びこれを用いた回転粘度計 |
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US (1) | US9163663B2 (ja) |
EP (1) | EP2851573B1 (ja) |
KR (1) | KR101560702B1 (ja) |
CN (1) | CN104379949B (ja) |
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US9464896B2 (en) | 2012-06-22 | 2016-10-11 | National Institute Of Advanced Industrial Science And Technology | Device for measuring rotation angle acceleration |
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FR3090612B1 (fr) * | 2018-12-20 | 2021-01-22 | Commissariat Energie Atomique | Articulation hors-plan pour systemes micro et nanoelectromecaniques a non-linearite reduite |
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- 2012-05-18 EP EP12877072.4A patent/EP2851573B1/en not_active Not-in-force
- 2012-05-18 CN CN201280074299.4A patent/CN104379949B/zh not_active Expired - Fee Related
- 2012-05-18 US US14/401,578 patent/US9163663B2/en active Active
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KR101560702B1 (ko) | 2015-10-15 |
US9163663B2 (en) | 2015-10-20 |
CN104379949A (zh) | 2015-02-25 |
KR20150010785A (ko) | 2015-01-28 |
CN104379949B (zh) | 2016-10-12 |
EP2851573A4 (en) | 2016-01-20 |
EP2851573B1 (en) | 2017-07-19 |
EP2851573A1 (en) | 2015-03-25 |
US20150159691A1 (en) | 2015-06-11 |
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