WO2013166874A1 - Nanogénérateur, ensemble à nanogénérateur et système à alimentation autonome - Google Patents

Nanogénérateur, ensemble à nanogénérateur et système à alimentation autonome Download PDF

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Publication number
WO2013166874A1
WO2013166874A1 PCT/CN2013/071767 CN2013071767W WO2013166874A1 WO 2013166874 A1 WO2013166874 A1 WO 2013166874A1 CN 2013071767 W CN2013071767 W CN 2013071767W WO 2013166874 A1 WO2013166874 A1 WO 2013166874A1
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Prior art keywords
nanogenerator
insulating layer
oxidized
conductive film
nanowire array
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PCT/CN2013/071767
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English (en)
Chinese (zh)
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王中林
胡又凡
张岩
许晨
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纳米新能源（唐山）有限责任公司
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Publication of WO2013166874A1 publication Critical patent/WO2013166874A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H10N30/306—Cantilevers

Definitions

  • Nanogenerators Nanogenerators, nanogenerators and self-powered systems
  • the present invention relates to the field of nanotechnology, and in particular to a nanogenerator, a nanogenerator, and a self-powered system. Background technique
  • the power supply system uses hydroelectric power, thermal power generation, etc., and the power supply control system is installed to control their use.
  • the large-area nano-power supply system composed of nano-generators does not propose a remote, automatic power supply control system, resulting in low efficiency of the nano-power supply system and automatic remote control.
  • Emerging developments in nanotechnology today have shifted from inventing individual components to integrated systems that can perform one or more design functions by integrating a set of nanocomponents with modern microelectronics.
  • a general integrated system is a combination of various components such as sensors, transducers, data processors, controllers, and communication systems. When the size of these devices is reduced to the nanometer or micron level, the energy consumption is also reduced to a very low level.
  • a commercial Bluetooth headset has an energy consumption of only a few microwatts (data transfer rate of up to 500 kbits/s and energy consumption of 10 nW/bit).
  • the energy consumption of nanodevices is even smaller.
  • it is entirely possible to drive equipment by looking for energy from environmental resources such as mild airflow, vibration, sound waves, sunlight, chemical energy and/or heat.
  • a power supply control system comprising: a control module (1), an output input module (2), a display module (3), Communication module (4), sensor module (5) and nano power supply system (6); control module (1) is connected to output input module (2) and / or display module (3) and / or communication module (4) and / or Sensor module (5) embedded (integrated) / external (connector) nano power supply system (6); and control module (1) includes processor, control circuit, data / program storage, sensor comparison program and remote start program And output input module (2) for processing button, voice, control signal output input and remote / timing / automatic / query / switch nano power supply system (6) settings; display module (3) processing image, voice output Input, display and remote / timing / automatic / query / switch nano power supply system (6) status display; communication module (4) handles wired/wireless communication functions with external devices including modem (MODE
  • the invention combines the nano power supply system with the control module, the communication module and the sensor module, and has the advantages of improving the safety, remote control, use range and energy saving of the nano power supply system.
  • the voltage and current generated by the power supply control system are still relatively small, and the structure is too complicated and high in cost.
  • Self-powered systems will play a very important role in the independent, continuous, maintenance-free operation of implantable biosensors, remote mobile environmental sensors, nanobots, MEMS, and even portable/wearable personal electronics.
  • the present invention provides a nanogenerator, a nanogenerator, and a self-powered system for remote data transmission and driven by a wirelessly independent nanogenerator.
  • a technical solution of the present invention is a nano-generator comprising a supporting substrate and upper and lower electrodes disposed on two sides of the upper and lower surfaces of the supporting substrate, wherein the upper electrode comprises a first oxidized nanowire array layer and a first polymer An insulating layer and a first conductive film, wherein the oxidized nanowire array corresponding to the first oxidized nanowire array layer is vertically grown on the support substrate, and the first polymer insulating layer is coated on the oxidized word
  • the first conductive film is disposed on the first polymer insulating layer;
  • the lower electrode includes a second oxide nanowire array layer and a second polymer insulation a layer and a second conductive film, an oxidized nanowire array corresponding to the second oxidized nanowire array layer is vertically grown on the support substrate, and the second polymer insulating layer is coated on the oxidized nanometer
  • the second conductive film is disposed on the second polymer insulating layer; the first conductive film
  • the oxidized nanowire arrays in the upper electrode and the lower electrode are respectively grown in a plurality of regions, and a gap exists between the regions and the regions, the first polymer insulating layer and The second polymer insulating layer is coated on the corresponding oxidized nanowire array, and the gap is filled to divide and coat the oxidized nanowire array.
  • the materials of the first polymer insulating layer and the second polymer insulating layer are respectively selected from the group consisting of decyl phthalate, polydisiloxane, and p-type polymer materials. .
  • the material of the first polymer insulating layer is the same as the material of the second polymer insulating layer.
  • the materials of the first conductive film and the second conductive film are respectively selected from the group consisting of indium tin metal oxide, graphene and silver nanowire film coating, or are selected from gold, silver and platinum. , one of aluminum, nickel, copper, titanium, iron, selenium and its alloys.
  • the material of the first conductive film is the same as the material of the second conductive film.
  • the support substrate is one selected from the group consisting of a silicon substrate, a gallium nitride substrate, a conductive metal plate substrate, a conductive ceramic substrate, and a polymer material substrate plated with a metal electrode.
  • the nano-generator further comprises a package casing, wherein the package casing is made of a polymer insulating material.
  • Another technical solution of the present invention is a nanogenerator set consisting of the above-mentioned nanogenerators in parallel or in series.
  • a further technical solution of the present invention is a self-powered system, comprising the nano-generator or the nano-generator set, further comprising a rectifying circuit, a storage unit and an electric energy using unit, wherein the nano-generator is connected to the rectifying circuit
  • the rectifying circuit is connected to the storage unit, the electric energy using unit is connected to the storage unit to use the stored electric energy thereof; the rectifying circuit converts a current output by the generator into a direct current; and the storage unit includes a direct current for storing Capacitors and / or batteries.
  • the superior effect of the nano-generator provided by the invention is: Since the polymer insulating layer is used on the oxidized nanowire array layer, the existence of the insulating layer provides an infinitely high barrier, preventing the pressure on the oxidized nanowire The electro-electrons are derived from the interior of the oxidized/metal contact surface to form a piezoelectric electric field; the piezoelectric electric field further forms an induced charge at the first electrode and the second electrode, and the induced charge forms a current loop when the external circuit is turned on.
  • the polymer insulating layer is dispersedly filled in the voids of the nanowires and forms a covering layer on the topmost layer.
  • the stress can be transmitted to the nanowires under all the force applying regions through the covering layer, thereby greatly enhancing the nanometer.
  • the efficiency of the generator at the same time, the cover layer is also wrapped around the top and the periphery of the nanowire array, which plays a certain degree of buffering effect when the nanowire is subjected to external force, and strengthens the contact between the nanowire array and the first electrode, thereby improving The stability of the nanogenerator.
  • the radio signal sent by the system after the external wireless signal transmitter is connected can be detected by commercial stations within a distance of 5-10 meters. This study demonstrates the feasibility of constructing a self-powered system with an oxidized nanowire generator and shows its potential for applications in radio biosensing, environmental/infrastructure monitoring, sensor networks, personal electronics, and even national security.
  • the nanogenerator relies on a piezoelectric potential generated in the nanowire when the nanowire is dynamically tensioned with a very small force; the transient flow of electrons in the external load, because the piezoelectric drive drives the two contact ends
  • the Fermi level is the basic mechanism of nanogenerators.
  • the power generated by the nanogenerator may not be sufficient to continuously drive the device, but the accumulation of charge generated over a period of time is sufficient to drive the device to operate for a few seconds. This is ideal for applications in sensing, infrastructure monitoring, and sensor networking. A common feature of these applications is that there are so many sensors in the system, each of which expects to operate independently and wirelessly, but they will all be connected via the network/Internet. Each sensor is not required to continue to operate at the same time.
  • the standby state is usually longer and the active mode is shorter.
  • the energy found and stored in the standby state can be used to drive it in active mode. This means that these sensors periodically sample from their working environment and transmit data in a fraction of a second.
  • nanogenerators can be used to extract energy from very small forces in the environment and store most of the energy while the sensor is in standby mode. The collected energy is then used in active mode to trigger the sensor to quickly process and transmit the data.
  • FIG. 1 is a schematic view showing the configuration of a nanogenerator according to an embodiment of the present invention
  • 2 is a cross-sectional view showing the structure of an upper electrode of a nano-generator according to another embodiment of the present invention
  • FIG. 3 is a schematic view showing the growth of an oxidized nanowire of the present invention
  • FIG. 4 is a schematic view showing the working mechanism of the piezoelectric generator generating a piezoelectric potential
  • FIG. 5 is a scanning electron micrograph of a cross section of a nanowire film of the nanogenerator;
  • FIG. 6 is a schematic diagram showing a circuit design of a self-powered system according to an embodiment of the present invention.
  • Figure 7 (a) shows the output voltage of the nanogenerator of the present invention
  • Figure 7 (b) shows the output current of the nanogenerator of the present invention.
  • Fig. 1 is a view showing the configuration of a nanogenerator according to an embodiment of the present invention.
  • 2 is a cross-sectional view showing the structure of an upper electrode of a nanogenerator according to another embodiment of the present invention.
  • Fig. 3 is a schematic view showing the growth of the oxidized nanowires in the present invention.
  • 4 is a schematic view showing the working mechanism of the piezoelectric potential generated by the nano-generator, which shows the distribution of the piezoelectric potential in the design structure.
  • the lateral center line in the supporting substrate 1 represents the tension neutral surface, and the oxidized nanowire forms a continuous medium.
  • FIG. 5 is a scanning electron micrograph of a cross section of a nanowire film supporting the growth of a particular structure on a substrate.
  • Figure 6 is a schematic diagram showing the circuit design of the self-powered system. The "NG" on the left side of Figure 6 represents the nano-generator, and the "U” on the right side represents the output voltage of the self-powered system. For the wireless transmitter part, the photoelectric system is used.
  • the transistor acts as a sensor to detect light from the light emitting diode.
  • the signal detected by the sensor is transmitted wirelessly through a single-transistor radio frequency transmitter.
  • Figure 7 (a) shows the output voltage of the nanogenerator
  • 7(b) shows the output current of the nanogenerator, when the voltage reaches At 10V, the current exceeds 0.6 ⁇ .
  • the unit for integrating energy in a self-powered system of the present invention includes an energy harvesting storage module (not shown).
  • the energy collector captures some energy (solar, thermal, mechanical, and/or chemical) from the environment and stores it in an energy harvesting storage module.
  • the sensor detects changes in the environment, and the data processor and controller perform information analysis.
  • the signal is then transmitted by the data transmission transmitter while receiving feedback.
  • a self-powered system made of a nano-generator for harvesting mechanical energy, a low-loss full-wave rectifying bridge rectifier, a capacitor for storing energy, an infrared photodetector, and a radio data transmitter is exemplified. Prototype (not shown).
  • the successful operation of the system is the first evidence of the use of nanogenerators as a self-powered wireless sensor network.
  • the nano-generator used in the self-generating integrated system is configured to have a first oxidized nanowire array layer 22 including a support substrate 1 and densely packed with a specific structure, and a second oxidized nanowire array layer 32.
  • the nanogenerator is made by an upper electrode 2 formed on an upper surface of a flexible polyester (PS) supporting substrate (Dura-Lar film, thickness 220 ⁇ m) 1 and a lower electrode 3 formed on a lower surface, the supporting substrate 1
  • PS flexible polyester
  • a lower electrode 3 formed on a lower surface
  • the supporting substrate 1 A material consisting of silicon, gallium nitride, a conductive metal plate, a conductive ceramic, or a polymer material coated with a metal electrode.
  • Figure 1 A material consisting of silicon, gallium nitride, a conductive metal plate, a conductive ceramic, or a polymer material coated with a metal
  • a 5 nm thick chrome adhesion layer having a 50 nm thick first oxidized seed layer 21 and a second oxidized seed layer 31 was placed on a selected 1 cm x l cm rectangular region on the upper and lower surfaces of the substrate.
  • the first oxidized seed layer 21 and the second oxidized seed layer 31 are respectively used to grow densely packed first oxidized nanowires and second oxidized nanowires by chemical wet separation.
  • the culture solution used in the chemical growth of the first oxidized nanowire array layer 22 and the second oxidized nanowire array layer 32 densely packed with a specific structure is composed of an equimolar aqueous solution of ⁇ ( ⁇ 0 3 ) 2 ⁇ 63 ⁇ 40 and
  • the culture medium consisting of urotropine ( ⁇ ) has a concentration of 0.1 ⁇ .
  • the first oxidized nanowire array layer 22 and the second oxidized nanowire array layer 32 of the upper and lower surfaces of the PS support substrate 1 are grown by placing the substrate on top of the culture solution while facing downward. Due to the surface tension, the substrate floats on the surface of the culture solution.
  • Oxidation nanowires were grown in a mechanical convection oven (model Yamato DKN400, Santa Clara, Calif.) at 95 °C for 5 hours.
  • Figure 5 is a scanning electron micrograph (SEM) image showing the oxidized nanowires grown on the substrate. The size of the nanowire is approximately 150 nm in diameter and 2 ⁇ m in length. As can be seen from the cross-sectional view, the oxidized nanowire passes through the first oxidized species on the substrate.
  • the sub-layer 21 or the second oxidized seed layer 31 is grown vertically from the substrate at a high packing density. To confirm that the top surfaces of these nanowires were also tightly bonded together in a uniform film, tweezers were used to sandwich the top surface of these nanowires.
  • the entire oxidized structure can be regarded as the upper electrode 2 and the lower electrode 3 having a specific structure composed of an array sufficiently filled between two parallel oxidized films.
  • a thin layer of decyl methacrylate (PMMA) (MicroChem 950k Al 1 ) was spin-coated at 3000 rpm to coat the oxidized nanowire array layer, followed by deposition of a chromium or gold coating in the rectangular region of the PMMA.
  • PMMA decyl methacrylate
  • the upper electrode 2 and the lower electrode 3 on the upper and lower surfaces of the substrate respectively include the first oxidized nanowire array layer 22, the second oxidized nanowire array layer 32, the first polymer insulating layer 23, and the second polymer
  • the insulating layer 33 and the first conductive film 24 and the second conductive film 34 correspond to the oxidized nanowire array of the first oxidized nanowire array layer 22 and the second oxidized nanowire array layer 32
  • the oxidized nanowire array is vertically grown on the support substrate 1, and the first polymer insulating layer 23 and the second polymer insulating layer 33 are respectively applied to the first oxidized nanowire array layer 22, and the second On the oxidized nanowire array layer 32, the first conductive film 24 and the second conductive film 34 are respectively disposed on the first polymer insulating layer 23 and the second polymer insulating layer 33.
  • the upper electrode 2 on both sides of the upper and lower surfaces of the support substrate 1 and the first conductive film 24 and the second conductive film 34 in the lower electrode 3 serve as output
  • the first oxidized seed layer 21 for fabricating the upper electrode 2 is sputtered by radio frequency on a pre-cleaned chrome-plated layer. Supporting the substrate 1. Then, the photoresist material is covered on the upper electrode 2, and a regular square window array is formed on the photoresist material by micromachining lithography. As shown in FIG. 3 of the specification, the area inside the square window is exposed with oxidized words. As the region 5 in which the oxidized nanowire array is grown, a photoresist material exists in the square window gap to prevent the oxidized nanowire from growing.
  • the photoresist material is equivalent to a zoned mold during the subsequent oxidation of the nanowires, so that the oxidized nanowires are only grown on the regions where the oxidized words are exposed, thereby achieving sub-regional growth of the oxidized nanowire array.
  • all remaining photoresist material is peeled off and the nanowire array is thermally annealed.
  • a polymer insulating layer composed of decyl acrylate is coated on the oxidized nanowire array, and the filling portion 4 is formed in the oxidized nanowire region to be filled, which divides the oxidized nanowire into a predetermined The area set.
  • the shell is encapsulated with another poly(mercapto acrylate) coating.
  • the upper electrode 2 and the lower electrode 3 serve as voltage and current output electrodes of the nanogenerator. Local high magnification scan Electron micrographs are shown in Figure 5 of the specification.
  • the oxidized nanowires are semiconductors with a certain degree of conductivity. When the oxidized nanowires are in contact with each other, the charges carried by the oxidized nanowires will interact with each other during the deformation power generation process, thereby offsetting part of the piezoelectric charge and causing power generation. The output power is reduced, which reduces the power generation performance of the nanogenerator. In the present invention, however, the oxidized nanowire array grows only in a designated region or a regular region, and has little influence on each other.
  • the piezoelectric charge-generating nanowire is not directly pressed without generating piezoelectric.
  • a shield division is formed between the charged nanowires, thereby preventing the piezoelectric potential from being lowered, thereby increasing the amount of power generation.
  • the entire unit is fully encapsulated with polydisiloxane (PDMS) to increase mechanical strength and flexibility.
  • PDMS polydisiloxane
  • the size of the effective working area of the nanogenerator is 1 cmx l cm.
  • the two leads are connected to the top and bottom electrodes, respectively. It must be noted that the operating temperature is quite low ( ⁇ 100 °C) so that the entire process can accommodate flexible electronics.
  • the first oxidized seed layer 21 and the second oxidized seed layer 31 are made of the same material, and the first oxidized nanowire array layer 22 and the second oxidized nanowire array layer 32 are composed of the same material.
  • the first polymer insulating layer 23 and the second polymer insulating layer 33 are made of the same material, and the first conductive film 24 and the second conductive film 34 are also made of the same material.
  • the materials of the first polymer insulating layer and the second polymer insulating layer are each selected from the group consisting of polydecyl acrylate, polydithiosiloxane, and p-type polymer.
  • the material of the first conductive film 24 and the second conductive film 34 can be one of indium tin metal oxide, graphene and silver nanowire film coating, or gold, silver, platinum, aluminum, nickel, copper, titanium , a material in the grouping, selenium and its alloys.
  • the support substrate 1 can be one of a silicon substrate, a gallium nitride substrate, a conductive metal plate substrate, a conductive ceramic substrate, and a substrate coated with a metal electrode.
  • the distribution of the piezoelectric potential in the nanowire film was first calculated.
  • the entire structure of the nanogenerator mimics a cantilever beam with a nanowire film having a specific structure on a common substrate.
  • the films on the top and bottom surfaces each have a uniaxial structure.
  • the potential difference across the top and bottom electrodes as the entire structure is bent is calculated.
  • the nanogenerator unit was modeled by a rectangular box measuring 500 ⁇ m 500 ⁇ m ⁇ 224 ⁇ .
  • the tension distribution in the cantilever is uneven.
  • the uniform tension in the beam parallel to the substrate along the y-axis is 0.2%.
  • the top and bottom surfaces of the structure are set to an equipotential plane by grounding the bottom. In the case of an open circuit, the total charge on the top and bottom surfaces must be zero. It is assumed that the oxidized film is essentially undoped. From the calculation results, an induced potential difference of 83.8 V across the two electrodes was predicted. Such a potential across the top and bottom electrodes will be the driving force for transient flow of electrons in the external load.
  • the oxidized film is composed of densely packed nanowires
  • the nanogenerator is bent, considering that the neutral plane of tension is at the centerline of the substrate, as shown in Figure 4, the nanowire film on the stretched surface of the substrate is subjected to tensile strain, while the nanowires on the surface being compressed The film is subjected to compressive stress.
  • the growth direction of the nanowire is along the c-axis (the growth direction of the oxidized word)
  • the bonding between the nanowires is very strong, a solid film can be formed, and the tensile stress perpendicular to the nanowire leads to the direction along the c-axis.
  • the single nano-generators described in the above embodiments form a nano-generator in parallel or in series. A self-generating system is formed by a nanogenerator.
  • the bond between the oxidized nanowires is very weak, and in the case of the possibility of sliding/slit between lines, the piezoelectric potential is not generated by the film on the top and bottom surfaces of the substrate under tensile stress.
  • the piezoelectric potential will pass through the basis of the compressive stress.
  • the underlying surface film is produced (see Figure 4), although there is some reduction. Therefore, the potential will be available between the top and bottom electrodes, but the size is less than half the size of the first case. The actual combination of nanowires should be between the two cases discussed above.
  • the grown oxidized nanowires have an n-type doping which can significantly block the higher side of the piezoelectric potential, while the low side of the piezoelectric potential hardly changes. Therefore, for the reasons listed above, the observed output voltage of the nanogenerator will be smaller than the theoretically calculated value.
  • a lateral mechanical trigger force acts on the edge of the nanogenerator structure.
  • the measured output voltage reaches 10V, and the output current exceeds 0.6 ⁇ (corresponding volume current density is 1 mA/cm 3 , power density is 10 mW/cm). 3 ), as shown in Figures 7 (a) and 7 (b).
  • the observed voltage is significantly smaller than the theoretical calculation.
  • the energy harvested is achieved by using a low loss full wave bridge rectifier integrated between the nanogenerator and capacitor (model 1210, 22 ⁇ ⁇ 10%, AVX).
  • the inventors used a single-transistor radio frequency (RF) transmitter to emit detected electrical signals.
  • the oscillation frequency was adjusted to approximately 90 MHz and a commercial portable AM/FM radio (CX-39, Coby) was used to receive the transmitted signal.
  • CX-39, Coby a commercial portable AM/FM radio
  • the radio receives interference noise (see the video for support information). Due to the low power consumption of the transmitter ( ⁇ l mW ), the energy generated and stored during the three strain cycles of the nanogenerator is sufficient to transmit the signal. Due to the limitation of the quality of the receiver, the maximum transmission distance of the transmitter is more than 5 meters.
  • the phototransistor in the slotted optical switch (model OPB 825, OPTEK Technology) is added to the system as a photon detection sensor to demonstrate that the self-powered system can operate independently and wirelessly.
  • the optical switch consists of an infrared light-emitting diode (LED) and a pair of NPN-type silicon phototransistors mounted in a low-cost black plastic cover with 4 mm wide slots.
  • the LED is activated by an integrated function generator (model DS345, from the Stanford Research System) that illuminates the phototransistor, which has a programmed voltage that operates sequentially as an external input source.
  • the photocurrent signal generated by the phototransistor is periodically emitted using the energy stored in the capacitor.
  • the performance of the nanogenerator is shown in Figure 7(a)).
  • the energy obtained by 1000 strain cycles together powers the phototransistor and the transmitter ( Driving time 20-25ms).
  • the phototransistor receives the signal, then modulates the signal, and the signal is received.
  • the demodulated signal is recorded from the headphone jack.
  • Each cycle of starting the voltage sequence of the LED includes an on (16ms) / off (5ms) / on (5ms) / off (10ms) state sequence.
  • the radio is tuned to operate at a frequency of approximately 90 MHz to avoid commercial radio signals.
  • the length of the nanowire the thickness of the substrate, and the shape of the nanogenerator.
  • the nanogenerator there are two modes that trigger nanogenerators, which depends on the form of mechanical energy that the nanogenerators find in the environment.
  • the nanogenerator is started under constant stress, such as gas flow
  • the calculation results show that the piezoelectric potential between the two electrodes increases as the length of the nanowire increases or the thickness of the substrate decreases.
  • the applied tension is constant, such as when the nanogenerator is driven by the vibration of a rigid trigger source bridge, the piezoelectric potential changes in the opposite direction relative to the previous case.
  • the device is optimized by maximizing the power harvesting efficiency for a particular working environment based on the energy characteristics sought from the environment.
  • the increased tension also significantly increases the output voltage.
  • oxidation is a biocompatible environmentally friendly material.
  • the nanowire film can grow on any substrate and any shape of substrate at a temperature of 4 ⁇ ( ⁇ 100 °c).
  • oxidized nanowire films densely grown on polymer substrates by specific techniques by low temperature chemistry has been demonstrated as an effective method for harvesting low frequency mechanical energy.
  • the fabrication of a nanogenerator having a free cantilever beam configuration consists of a flexible polymer substrate, a nanoseed layer, an oxidized nanowire film having a specific structure, a polymer insulating layer, and a conductive film layer.
  • a nano-generator of size lcm 2 where the strain rate is 3.56 %, when it is strained to 0.12%, the measured output voltage reaches 10V and the output current exceeds 0.6 ⁇ (corresponding to a power density of 10 mW/ Cm 3 ).
  • a self-powered system that can operate independently and wirelessly is presented.
  • the system consists of a nanogenerator, a rectifier circuit, a capacitor that stores energy, a sensor, and a radio frequency data transmission transmitter.
  • the radio signal from the system is detected by commercial stations within a distance of 5-10 meters. This study proved to be constructed by oxidation of nanowire generators.
  • the feasibility of a self-powered system with long-distance data transmission capabilities clearly demonstrates its potential applications in radio biosensing, environmental/infrastructure monitoring, sensor networks, personal electronics, and even national security.
  • the present invention provides a nanogenerator, a nanogenerator, and a self-powered system capable of using nanogenerators to extract energy from a very small force in the environment and store most of the energy; and to quickly process and transmit using the collected energy Data; great potential for applications in radio biosensing, environmental/infrastructure monitoring, sensor networks, personal electronics, and even national security.

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Abstract

Cette invention concerne un nanogénérateur, un ensemble à nanogénérateur et un système à alimentation autonome. Ledit nanogénérateur comprend un substrat de support (1) ainsi qu'une électrode supérieure (2) et une électrode inférieure (3) qui sont disposées sur deux côtés des surfaces supérieure et inférieure du substrat de support (1). L'électrode comprend une couche de réseau de nanofils d'oxyde de zinc (22, 32), une couche isolante polymère (23, 33) et un film conducteur (24, 34). Un réseau de nanofils d'oxyde de zinc croît verticalement sur un substrat de support. La couche isolante polymère est déposée sur la couche de réseau de nanofils d'oxyde de zinc. Le film conducteur est agencé sur la couche isolante polymère. Enfin, les fils conducteurs forment les électrodes de sortie de tension et de courant du nanogénérateur. Le système à alimentation autonome selon l'invention permet d'obtenir de l'énergie à partir d'une très petite force dans un environnement par mise en œuvre du nanogénérateur et il peut emmagasiner la plus grande partie de cette énergie quand un capteur est en mode veille. L'énergie recueillie est utilisée pour mettre le capteur en mode actif afin de traiter et de transmettre des données rapidement.
PCT/CN2013/071767 2012-05-09 2013-02-22 Nanogénérateur, ensemble à nanogénérateur et système à alimentation autonome WO2013166874A1 (fr)

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CN2012101423875A CN102683573A (zh) 2012-05-09 2012-05-09 纳米发电机、纳米发电机组及其自供电系统

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683573A (zh) * 2012-05-09 2012-09-19 纳米新能源（唐山）有限责任公司 纳米发电机、纳米发电机组及其自供电系统
CN102684546B (zh) * 2012-05-15 2015-03-18 纳米新能源（唐山）有限责任公司 一种摩擦发电机
CN103023371B (zh) 2012-12-10 2015-04-29 北京大学 一种微纳集成发电机及其制备方法
CN103859678B (zh) * 2012-12-14 2016-03-02 纳米新能源（唐山）有限责任公司 发光鞋
CN203043555U (zh) * 2012-12-27 2013-07-10 纳米新能源（唐山）有限责任公司 儿童玩具
CN103780121B (zh) * 2013-01-08 2015-12-02 北京纳米能源与系统研究所 一种基于摩擦电纳米发电机的超声和声波探测仪
CN103944443B (zh) * 2013-01-21 2016-09-07 北京大学科技开发部 一种级联结构发电机
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CN103368452B (zh) * 2013-03-08 2016-03-30 北京纳米能源与系统研究所 静电脉冲发电机和直流脉冲发电机
CN104064361B (zh) * 2013-03-20 2017-05-24 纳米新能源（唐山）有限责任公司 自充电超级电容器
CN104056352B (zh) * 2013-03-20 2016-06-08 纳米新能源（唐山）有限责任公司 电针灸仪
CN103364444B (zh) * 2013-03-25 2017-08-11 北京纳米能源与系统研究所 利用基于纳米压电半导体材料的纳米发电机进行气体探测的方法
CN104076084B (zh) * 2013-03-28 2017-08-25 北京纳米能源与系统研究所 一种摩擦电纳米传感器
CN104104122B (zh) * 2013-04-12 2016-10-19 纳米新能源（唐山）有限责任公司 发电系统
CN104167950B (zh) * 2013-05-16 2017-03-08 纳米新能源（唐山）有限责任公司 摩擦发电机
CN104283456B (zh) * 2013-07-04 2016-10-12 纳米新能源（唐山）有限责任公司 自充电储能装置
CN103777803B (zh) * 2013-08-12 2017-04-19 北京纳米能源与系统研究所 一种单电极触摸传感器及其制备方法
CN103779885B (zh) * 2013-09-26 2015-12-23 北京纳米能源与系统研究所 恒压自充电能量供给设备及其制造方法
CN103550864B (zh) * 2013-10-29 2015-07-08 北京纳米能源与系统研究所 一种混合驱动的起搏器和混合驱动起搏器电极的方法
CN103787259A (zh) * 2014-01-26 2014-05-14 西安电子科技大学 基于石墨烯用于获取微弱能量的柔性微结构及其制造方法
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CN111504523B (zh) * 2020-04-15 2021-07-20 深圳第三代半导体研究院 一种自发光式压光电器件及制备方法
CN112786775B (zh) * 2021-01-04 2022-11-11 国网内蒙古东部电力有限公司电力科学研究院 无源自供能用压电纳米阵列传感器及其制备方法
CN113691162B (zh) * 2021-09-09 2023-09-19 西南交通大学 一种基于纳流体二极管的水伏器件及其制备方法
CN114806207B (zh) * 2022-04-26 2023-06-20 厦门大学 一种正交取向化二维复合材料、制备方法与柔性纳米发电机
CN117334764B (zh) * 2023-09-15 2024-06-18 深圳深安医疗科技有限公司 光信号响应发电片

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101295941A (zh) * 2007-04-23 2008-10-29 万里兮 交流纳米发电机及升压方法
CN101656486A (zh) * 2009-09-18 2010-02-24 上海理工大学 氧化锌纳米线/聚合物纳米复合能量转换器件及其制备方法
US20100139750A1 (en) * 2008-12-04 2010-06-10 Electronics And Telecommunications Research Institute Flexible energy conversion device and method of manufacturing the same
CN102646788A (zh) * 2012-04-19 2012-08-22 纳米新能源（唐山）有限责任公司 纳米发电机及其制造方法
CN102683573A (zh) * 2012-05-09 2012-09-19 纳米新能源（唐山）有限责任公司 纳米发电机、纳米发电机组及其自供电系统

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101295941A (zh) * 2007-04-23 2008-10-29 万里兮 交流纳米发电机及升压方法
US20100139750A1 (en) * 2008-12-04 2010-06-10 Electronics And Telecommunications Research Institute Flexible energy conversion device and method of manufacturing the same
CN101656486A (zh) * 2009-09-18 2010-02-24 上海理工大学 氧化锌纳米线/聚合物纳米复合能量转换器件及其制备方法
CN102646788A (zh) * 2012-04-19 2012-08-22 纳米新能源（唐山）有限责任公司 纳米发电机及其制造方法
CN102683573A (zh) * 2012-05-09 2012-09-19 纳米新能源（唐山）有限责任公司 纳米发电机、纳米发电机组及其自供电系统

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HU, YOUFAN ET AL.: "Self-Powered System with Wireless Data Transmission", NANOLETT., vol. 11, 23 May 2011 (2011-05-23), pages 2572 - 2576 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113996552A (zh) * 2021-10-25 2022-02-01 深圳市广达电子材料有限公司 一种电子材料电性能检测设备
CN113996552B (zh) * 2021-10-25 2024-01-12 浙江方圆电气设备检测有限公司 一种电子材料电性能检测设备
WO2024136830A1 (fr) * 2022-12-22 2024-06-27 Hacettepe Universitesi Rektorluk Nano-générateur sans contact pouvant être entraîné par un champ magnétique

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