WO2013156131A1 - High performance tools exhibiting reduced crater wear in particular by dry machining operations - Google Patents

High performance tools exhibiting reduced crater wear in particular by dry machining operations Download PDF

Info

Publication number
WO2013156131A1
WO2013156131A1 PCT/EP2013/001098 EP2013001098W WO2013156131A1 WO 2013156131 A1 WO2013156131 A1 WO 2013156131A1 EP 2013001098 W EP2013001098 W EP 2013001098W WO 2013156131 A1 WO2013156131 A1 WO 2013156131A1
Authority
WO
WIPO (PCT)
Prior art keywords
coating system
nanolayers
coating
deposited
layers
Prior art date
Application number
PCT/EP2013/001098
Other languages
French (fr)
Inventor
Mirjam ARND
Markus Lechthaler
Sebastian Stein
Anders Olof ERIKSSON
Original Assignee
Oerlikon Trading Ag, Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to ES13720781T priority Critical patent/ES2702247T3/en
Priority to CN201380020487.3A priority patent/CN104508171B/en
Priority to US14/394,483 priority patent/US9464347B2/en
Priority to EP13720781.7A priority patent/EP2839051B1/en
Priority to PL13720781T priority patent/PL2839051T3/en
Priority to MX2014012538A priority patent/MX2014012538A/en
Application filed by Oerlikon Trading Ag, Trübbach filed Critical Oerlikon Trading Ag, Trübbach
Priority to IN8669DEN2014 priority patent/IN2014DN08669A/en
Priority to SI201331261T priority patent/SI2839051T1/en
Priority to KR1020147032145A priority patent/KR102172628B1/en
Priority to JP2015506114A priority patent/JP6249452B2/en
Publication of WO2013156131A1 publication Critical patent/WO2013156131A1/en
Priority to PH12014502311A priority patent/PH12014502311A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0647—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3492—Variation of parameters during sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • the present invention relates to a coating system for reducing crater wear of cutting tools by machining operations, particularly beneficial in dry machining operations such as hobbing, and being able to be removed from the cutting tool using uncomplicated decoating processes. Further, the present invention relates to a method for coating surfaces with the coating system according to the invention.
  • Cutting tools are subjected to very different wear conditions when they are used by dry or wet machining operations.
  • crater wear is often observed as a first sign of wear by dry machining operations at high cutting speeds. Particularly by hobbing it has been observed that crater wear limits drastically the cutting tool life time.
  • AICrN-based coatings are nowadays well-established coating systems for increasing cutting performance and life time of cutting tools used by dry machining operations.
  • AICrN-based coatings consists in its ability to be removed from the cutting tools by means of uncomplicated decoating processes which are easier, cheaper and often less prejudicial for the cutting tool surface than for example those that must be used for removing AITiN-based coatings.
  • the objective of the present invention is to provide an AICrN- based coating system that in comparison to the state of the art allows a significant reduction of crater wear and consequently of flank wear and consequently significantly increasing cutting performance and life time of cutting tools used in dry machining operations, particularly by hobbing. Further, the coating system provided according to the present invention should be able to be removed from the cutting tools by means of uncomplicated decoating processes. Furthermore, it is an objective of the present invention to provide a method for the production of the coating system according to the present invention which should be applicable for coating of cutting tools.
  • the objective of the present invention was achieved by providing a coating system containing a multi-layered film formed of aluminium chromium boron nitride (Al-Cr-B- N) and aluminium chromium nitride (Al-Cr-N) nano-layers, the multi-layered film exhibiting a particular combination of low thermal conductivity coefficient, low abrasive wear coefficient, high hardness and excellent adhesion strength.
  • Al-Cr-B- N aluminium chromium boron nitride
  • Al-Cr-N aluminium chromium nitride
  • a preferred embodiment of a coating system according to the present invention is characterized by exhibiting a thermal conductivity coefficient lower than 3.0 W/m-K, preferably lower than 2.5 W/m-K.
  • the multi-layered film is formed of Al-Cr-B-N and Al-Cr-N nano-layers which are deposited alternatingly one on each other.
  • the ratio of the thickness of the Al-Cr-N nano-layers to the thickness of the Al-Cr-B-N nano-layers (thickness A icrN / thickness A icrBN) in the multi-layered film is ⁇ 2, preferably about 1.
  • the thickness of two on each other deposited Al-Cr-N and Al-Cr-B-N nano- layers (thicknessAicrN + thickness A icrBN) in the multi-layered film is ⁇ 200 nm, preferably ⁇ 100, more preferably ⁇ 50 nm, particularly about 10 - 30 nm.
  • the ratio of the thickness of the base layer to the thickness of the multi-layered film is preferentially between 2 and 5, more preferentially about 3 and 4.
  • Coatings systems according to the present invention can be produced particularly well by means of physical vapour deposition (PVD) methods.
  • PVD physical vapour deposition
  • a preferred embodiment of a coating method for production of coating systems according to the present invention is an arc ion plating method in which the material for forming the coating on the substrate surfaces is provided by arc evaporation of Al- Cr and Al-Cr-B targets in a nitrogen atmosphere.
  • a further preferred embodiment of a coating method for production of coating systems according to the present invention includes a plasma etching step previous to coating deposition which is carried out in a nitrogen, or in a nitrogen/hydrogen, or in a nitrogen/hydrogen/argon atmosphere for creating a diffusion zone in the substrate.
  • Al-Cr-B and Al-Cr alloyed targets having respectively for example following element compositions in atomic percentage: AI 52 Cr28B2o and AI 5 oCr 5 o or AI 52 Cr 2 8B2o and AI 7 oCr 3 o or AI 7 oCr 2 oB 0 and AI 5 oCr 5 o or AI 7 oCr 2 oBi 0 and AI 7 oCr 30 .
  • the base layers only material from the Al-Cr targets were evaporated.
  • the Al-Cr-B and Al-Cr alloyed targets were placed strategically in the coating machine in order to deposit the respective Al-Cr-B-N and Al-Cr-N nano-layers alternated one on each other by rotational movement of the substrates in the coating chamber.
  • the arc current for the evaporation of the Al-Cr-B-N and Al-Cr-N targets was selected accordingly in order to obtain the most efficient process and the desired thickness relations regarding the different layers and/or respectively nano-layers and at the same time appropriate mechanical properties.
  • Al-Cr-B-N layers having most suitable properties for defined applications regarding density, thermal coefficient and compressive stress by adjusting bias voltage and boron content.
  • Al-Cr-B-N layers from AI 52 Cr28B2o targets which exhibit a very low thermal conductivity coefficient of about 2.0 W/m-K.
  • the substrate bias voltage can be increased continuously or stepwise.
  • a further embodiment of a coating method for depositing a coating system according to the present invention involves a deposition of the base layer varying the substrate bias voltage during deposition from a lower bias voltage to the higher bias voltage gradually or stepwise. For example, in at least two steps and preferably wherein
  • a comparative coating 2 coating system according to the state of the art consisting of a multi-layered coating containing (AI 7 oCr 3 o)N and Al-Cr-Si-W-N layers, and
  • coating system having a base layer of essentially Al-Cr-N deposited from AI 70 Cr3o targets in an atmosphere comprising essentially nitrogen, and a multi-layered film formed essentially of Al-Cr-N and Al-Cr-B-N nano-layers deposited alternated one on each other, the Al-Cr-N nano-layers deposited from AI oCr 30 targets and the
  • a bias voltage greater than 70 V was applied at substrate.
  • the cutting tools coated with the comparative coating 1 , comparative coating 2 and the inventive coating described above were tested by fly hobbing of 16MnCr5 (hardness: 160 HB) by following cutting conditions:
  • thermal conductivity coefficients of different coating layers were measured according to the measuring technique proposed and described by Prof. David G. Cahill in his paper titled “Analysis of heat flow in layered structures for time-domain thermoreflectance” published in Rev. Sci. Instrum. 75, 5119 (2004).
  • abrasive wear coefficients of the same coating layers were determined using an abrasive wear tester of the type kaloMAX NT according to the DIN V ENV 1071.
  • a ball is driven by a shaft with rubber wheels and slides along the sample.
  • the angle of the sample holder to the horizontal axis and the ball size determine the applied load between the ball and the sample surface.
  • a slurry is fed on the ball centre and is moved into the contact area and the ball grinds a crater into the sample.
  • the amount of the removed material is calculated by measuring the craters diameter and the wear coefficient is calculated from load, sliding distance and volume of the wear crater.
  • the thermal conductivity coefficients, Vickers hardness values and abrasive wear coefficients of the comparative coating 1 , the comparative coating 2, the inventive coating, a monolayer Al-Cr-B-N coating and a monolayer Ti- AI-N coating The monolayer Al-Cr-B-N coating was deposited from Al-Cr-B targets having element composition in atomic per cent 52:28:20 in an atmosphere comprising essentially nitrogen and using a bias voltage greater than 70 V.
  • the monolayer Ti-AI-N coating was deposited from Ti-AI targets having element composition in atomic per cent 50:50 in an atmosphere comprising essentially nitrogen.
  • the inventive coating exhibits a very good combination of film properties, which are surprisingly very similar to the film properties of the monolayer Al-Cr-B-N coating in despite of the different coating constitution.
  • Coatings deposited according to the present invention which comprise a multi- layered AI-Cr-N/AI-Cr-B-N film and/or which comprise a multi-layered Cr-AI-N/Cr-AI- B-N film and a base Cr-AI-N layer exhibit nevertheless better cutting performance than monolayer Al-Cr-B-N coatings.
  • each individual nanolayer A and B is preferably not greater than 200 nm, more preferably not greater than 100 nm.
  • the highest boron concentration in the (AlxCrl-x-zBz)N layers according to the present invention could be also lower than 5 at% but preferably not lower than 2 at.% in order to produce boron containing layers having a low thermal conductivity coefficient as possible.
  • a coating having a low thermal conductivity coefficient according to the present invention is very advantageously for diminishing thermal load in cutting tools exposed to high temperatures which are results during cutting processes at high cutting speeds (Vc > 200 m/min). This attribute of the coatings produced according to the present invention is particularly beneficial for diminishing crater wear in cutting tools made of high speed steel such as HSS-hobs, because crater wear is produced in these kinds of cutting tools basically because of too high thermal loads.
  • the aluminium chromium boron nitride (Al-Cr- B-N) nano-layers will be referred to as Ananolayers and the aluminium chromium nitride (Al-Cr-N) nano-layers will be referred to as B-nanolayers.
  • the A- and B- nanolayers contain essentially aluminium, chromium, boron and nitrogen or aluminium chromium and nitrogen, respectively.
  • the A- and B-nanolayers may comprise small amounts of other elements but the small amounts of other elements in these A- and B layers should not be higher than 5% of the total concentration in atomic percentage of the sum of aluminium, chromium and boron in the A-layers and/or of the total concentration in atomic percentage of the sum of aluminium and chromium in the B-layers.
  • A- and B-nanolayers forming the multi-layered film are produced by means of a PVD-reactive process carried out in such a manner that the substrate surfaces to be coated are rotated in the coating chamber in such a manner that the surfaces are alternately exposed to the AICrB-containing targets and to the AlCr-containing targets in order to produce the A- and B-nanolayes, respectively, it is understood that:
  • the ratio of the aluminium content to the chromium content in atomic percentage is maintained constant along the thickness of the multi-layered film formed of alternated A- and B-nanolayers containing essentially aluminium chromium boron nitride and aluminium chromium nitride, respectively.
  • the coating system according to the present embodiment of the present invention comprises also a base layer containing also aluminium and chromium, the base layer is produced in order to have the same ratio of aluminium content to chromium content like in the multi- layered film.
  • a very good cutting performance can be also attained by using cutting tools coated with a coating system according to the present invention having a ratio of the thickness of the base layer to the thickness of the multi-layered film (thicknessbasejayer / thickness mu iti-iayered_fiim) of about 0.25 or higher, preferably of about 0.5 or higher.
  • a further preferred embodiment of a coating system according to the present invention comprises more than one multi-layered film made of A- and B-nanolayers along the total thickness of the coating system.
  • the coating system is deposited on a surface of a cutting tool, the coating system comprising a base layer made of aluminium chromium nitride which is deposited on substrate surface and a multilayer-structured film deposited on the base layer, wherein the multilayer-structured film is formed by C- and D-layers deposited alternate one on each other, wherein the C-layers are AlCrN-layers which don't contain boron, and D-layers are multi-layered films made of alternated A- and B- nanolayers.
  • the surface of the cutting tool on which the coating system is deposited is a nitrogen-enriched zone.
  • the creation of a nitrogen-enriched zone in the tool substrate surface to be coated according to the present invention contributes significantly for reducing tools crater wear.
  • a preferred method for producing coating systems according to the present invention is a PVD-method at which the elements aluminium, chromium and boron for the production of the A- and B-nanolayers come from targets having an element composition in atomic percentage (AljCri-i)i-jBj and (AljCn-j), respectively, and where: - i is preferably not lower than 50 at.-% and not greater than 80 at, more preferably i is 70 at.-%.
  • - j is preferably not lower than 2 at.-% and not greater than 30 at.-%
  • magnetron sputtering processes particularly including high power impulse magnetron sputtering (HIPIMS) techniques suitable.
  • targets made by powder metallurgy are particularly suitable for the production of coating systems according to the present invention.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Laminated Bodies (AREA)
  • Gear Processing (AREA)

Abstract

The present invention relates to a coating system comprising at least one multi- layered film formed of alternated A- and B-nanolayers deposited one on each other characterized in that the A-nanolayers contain essentially aluminium chromium boron nitride and the B-nanolayers contain essentially aluminium chromium nitride.

Description

High performance tools exhibiting reduced crater wear in particular by dry machining operations
The present invention relates to a coating system for reducing crater wear of cutting tools by machining operations, particularly beneficial in dry machining operations such as hobbing, and being able to be removed from the cutting tool using uncomplicated decoating processes. Further, the present invention relates to a method for coating surfaces with the coating system according to the invention.
State of the art
Cutting tools are subjected to very different wear conditions when they are used by dry or wet machining operations.
For example, crater wear is often observed as a first sign of wear by dry machining operations at high cutting speeds. Particularly by hobbing it has been observed that crater wear limits drastically the cutting tool life time.
AICrN-based coatings are nowadays well-established coating systems for increasing cutting performance and life time of cutting tools used by dry machining operations.
However, in despite of the current improvements attained by using AICrN-based coatings according to the state of the art, everyday new increased requirements are created that need to be met.
Another advantage of AICrN-based coatings consists in its ability to be removed from the cutting tools by means of uncomplicated decoating processes which are easier, cheaper and often less prejudicial for the cutting tool surface than for example those that must be used for removing AITiN-based coatings. Objective of the present invention
The objective of the present invention is to provide an AICrN- based coating system that in comparison to the state of the art allows a significant reduction of crater wear and consequently of flank wear and consequently significantly increasing cutting performance and life time of cutting tools used in dry machining operations, particularly by hobbing. Further, the coating system provided according to the present invention should be able to be removed from the cutting tools by means of uncomplicated decoating processes. Furthermore, it is an objective of the present invention to provide a method for the production of the coating system according to the present invention which should be applicable for coating of cutting tools.
Description of the invention The objective of the present invention was achieved by providing a coating system containing a multi-layered film formed of aluminium chromium boron nitride (Al-Cr-B- N) and aluminium chromium nitride (Al-Cr-N) nano-layers, the multi-layered film exhibiting a particular combination of low thermal conductivity coefficient, low abrasive wear coefficient, high hardness and excellent adhesion strength.
A preferred embodiment of a coating system according to the present invention is characterized by exhibiting a thermal conductivity coefficient lower than 3.0 W/m-K, preferably lower than 2.5 W/m-K. In a preferred embodiment of the coating system according to the present invention, the multi-layered film is formed of Al-Cr-B-N and Al-Cr-N nano-layers which are deposited alternatingly one on each other. The Al-Cr-B-N nano-layers having element composition (AlxCr1-x-zBz)N wherein x = 50 - 80 at-% and z = 5 - 30 at-% and x+z < 90 at-%, preferably x = 50 - 70 at-% and z = 10 - 20 at-% and x+z < 80 at- %, where x and z being the concentration of Al and the concentration of B, respectively, in atomic percentage if the total quantity of atoms of Al, Cr and B present in each Al-Cr-B-N nano-layer is considered as 100 atomic per cent. The Al- Cr-N nano-layers having element composition (AlyCri-y)N wherein y = 50 - 80 at-%, preferably 60 - 70 at-%, and y being the concentration of Al in atomic percentage if the total quantity of atoms of Al and Cr present in each Al-Cr-N nano-layer is considered as 100 atomic per cent.
In a further preferred embodiment of the coating system according to the present invention, the ratio of the thickness of the Al-Cr-N nano-layers to the thickness of the Al-Cr-B-N nano-layers (thicknessAicrN / thicknessAicrBN) in the multi-layered film is≤ 2, preferably about 1.
In a further preferred embodiment of the coating system according to the present invention, the thickness of two on each other deposited Al-Cr-N and Al-Cr-B-N nano- layers (thicknessAicrN + thicknessAicrBN) in the multi-layered film is < 200 nm, preferably < 100, more preferably < 50 nm, particularly about 10 - 30 nm.
One more preferred embodiment of the coating system according to the present invention includes a base layer under the multi-layered film, the base layer having element composition (AlwCri-w)N wherein w = 50 - 80 at-%, preferably 60 - 70 at-% and w being the concentration of Al in atomic percentage if the total quantity of atoms of Al and Cr present in the base layer is considered as 100 atomic per cent. The ratio of the thickness of the base layer to the thickness of the multi-layered film (thicknessbase_iayer / thicknessmuiti-iayered_fiim) is preferentially between 2 and 5, more preferentially about 3 and 4.
Coatings systems according to the present invention can be produced particularly well by means of physical vapour deposition (PVD) methods.
Special advantageous for the production of coating systems according to the present invention are the arc ion plating (AIP) deposition methods.
A preferred embodiment of a coating method for production of coating systems according to the present invention is an arc ion plating method in which the material for forming the coating on the substrate surfaces is provided by arc evaporation of Al- Cr and Al-Cr-B targets in a nitrogen atmosphere. A further preferred embodiment of a coating method for production of coating systems according to the present invention includes a plasma etching step previous to coating deposition which is carried out in a nitrogen, or in a nitrogen/hydrogen, or in a nitrogen/hydrogen/argon atmosphere for creating a diffusion zone in the substrate.
Experimental examples: Hobbing tools were coated in an arc ion plating coating machine according to the present invention. The substrates were introduced in the coating chamber, the coating chamber was pumped down to less than 0.4 Pa, the substrates were heated and etched in argon or argon/hydrogen atmosphere respectively, a coating system consisting of a base layer and a multi-layered film according to the present invention were deposited on the substrates. For the coating deposition were used Al-Cr-B and Al-Cr alloyed targets having respectively for example following element compositions in atomic percentage: AI52Cr28B2o and AI5oCr5o or AI52Cr28B2o and AI7oCr3o or AI7oCr2oB 0 and AI5oCr5o or AI7oCr2oBi0 and AI7oCr30. In some cases it was deposited first the Al-Cr-N base layer and afterwards the multi-layered Al-Cr-B-N film, in other cases only the multi-layered Al-Cr-B-N film. For the deposition of the base layers only material from the Al-Cr targets were evaporated. The Al-Cr-B and Al-Cr alloyed targets were placed strategically in the coating machine in order to deposit the respective Al-Cr-B-N and Al-Cr-N nano-layers alternated one on each other by rotational movement of the substrates in the coating chamber. The arc current for the evaporation of the Al-Cr-B-N and Al-Cr-N targets was selected accordingly in order to obtain the most efficient process and the desired thickness relations regarding the different layers and/or respectively nano-layers and at the same time appropriate mechanical properties. The inventors found that Al-Cr-B-N coatings exhibit lower compressive stress than Al-Cr-N coatings and the Al-Cr-B-N coatings are in some degree porous. Furthermore, by increasing the boron-content in the Al-Cr-B-N coatings a reduction of the compressive stress was observed. However, too low compressive stresses can also be disadvantageous for applications in machining operations. For this reason the inventors applied a bias voltage at substrate in order to increase the compressive stress in the films. Surprisingly the inventors found that by applying substrate bias voltages of at least 70 V, but preferably greater than 70 V, during deposition of the Al-Cr-B-N layers, it is possible to produce particularly interesting Al-Cr-B-N layers having an especially high density (avoiding porosity), a stupendously low thermal conductivity coefficient and a suitable compressive stress at the same time. Consequently the inventors could deposit Al-Cr-B-N layers having most suitable properties for defined applications regarding density, thermal coefficient and compressive stress by adjusting bias voltage and boron content. Thus, it was for example possible to deposit Al-Cr-B-N layers from AI52Cr28B2o targets which exhibit a very low thermal conductivity coefficient of about 2.0 W/m-K.
The inventors found also, that by varying the substrate bias voltage from a lower value UBias_iow up to a higher value Usiasjitgh by depositing the Al-Cr-N base layer according to the present invention, especially good coating mechanical properties and adhesion strength can be obtained. The substrate bias voltage can be increased continuously or stepwise.
A further embodiment of a coating method for depositing a coating system according to the present invention involves a deposition of the base layer varying the substrate bias voltage during deposition from a lower bias voltage to the higher bias voltage gradually or stepwise. For example, in at least two steps and preferably wherein
UBiasJowest— 4-L)Bias_highest. The very impressible improvement in cutting tool life time that can be attained using coating systems according to the present invention will be further shown by presenting the results of an exemplary cutting test.
Exemplary cutting test:
PM-HSS hob s390 Bohler for synchronous milling having modulus mn = 2.557 mm, pressure angle απο = 17.5° and diameter dao = 110 mm were coated with three different coating systems: - a comparative coating 1 : coating system according to the state of the art consisting fundamentally of (Al7oCr30)N,
a comparative coating 2: coating system according to the state of the art consisting of a multi-layered coating containing (AI7oCr3o)N and Al-Cr-Si-W-N layers, and
- an inventive coating: coating system according to the present invention having a base layer of essentially Al-Cr-N deposited from AI70Cr3o targets in an atmosphere comprising essentially nitrogen, and a multi-layered film formed essentially of Al-Cr-N and Al-Cr-B-N nano-layers deposited alternated one on each other, the Al-Cr-N nano-layers deposited from AI oCr30 targets and the
Al-Cr-B-N layers deposited from AI70Cr2oBio targets in an atmosphere comprising essentially nitrogen, for the deposition of the Al-Cr-B-N layers. For the deposition of the Al-Cr-B-N layers a bias voltage greater than 70 V was applied at substrate.
The cutting tools coated with the comparative coating 1 , comparative coating 2 and the inventive coating described above were tested by fly hobbing of 16MnCr5 (hardness: 160 HB) by following cutting conditions:
- dry
- Vc = 240 m/min
- fa = 4.8 mm
HCUi max according to SPARTA = 0.25 mm
- Tool life criterion: crater wear depth (KT) or flank wear VBmax > 150 pm As it is shown in figure 1 , by using coatings according to the present invention it is possible to improve significantly the cutting performance and to attain a formidable increment of the tool life in comparison with established state of the art coatings.
Thermal conductivity, abrasive wear resistance and hardness:
Within the scope of the present invention thermal conductivity coefficients of different coating layers were measured according to the measuring technique proposed and described by Prof. David G. Cahill in his paper titled "Analysis of heat flow in layered structures for time-domain thermoreflectance" published in Rev. Sci. Instrum. 75, 5119 (2004).
Additionally, abrasive wear coefficients of the same coating layers were determined using an abrasive wear tester of the type kaloMAX NT according to the DIN V ENV 1071. According to this method a ball is driven by a shaft with rubber wheels and slides along the sample. The angle of the sample holder to the horizontal axis and the ball size determine the applied load between the ball and the sample surface. A slurry is fed on the ball centre and is moved into the contact area and the ball grinds a crater into the sample. The amount of the removed material is calculated by measuring the craters diameter and the wear coefficient is calculated from load, sliding distance and volume of the wear crater. Since this measuring technique is extremely dependent on humidity and temperature, the test was carried out in a climate controlled room at a room temperature of 20 °C and humidity of 39% using a ball having a diameter of 30 mm, slurry containing aluminium oxide particles having a grain size of 1 pm, at a sliding velocity of 100 rpm.
In the table 1 are shown the thermal conductivity coefficients, Vickers hardness values and abrasive wear coefficients of the comparative coating 1 , the comparative coating 2, the inventive coating, a monolayer Al-Cr-B-N coating and a monolayer Ti- AI-N coating. The monolayer Al-Cr-B-N coating was deposited from Al-Cr-B targets having element composition in atomic per cent 52:28:20 in an atmosphere comprising essentially nitrogen and using a bias voltage greater than 70 V. The monolayer Ti-AI-N coating was deposited from Ti-AI targets having element composition in atomic per cent 50:50 in an atmosphere comprising essentially nitrogen.
As it can be observed in table 1 , the inventive coating exhibits a very good combination of film properties, which are surprisingly very similar to the film properties of the monolayer Al-Cr-B-N coating in despite of the different coating constitution.
Coatings deposited according to the present invention, which comprise a multi- layered AI-Cr-N/AI-Cr-B-N film and/or which comprise a multi-layered Cr-AI-N/Cr-AI- B-N film and a base Cr-AI-N layer exhibit nevertheless better cutting performance than monolayer Al-Cr-B-N coatings.
Table 1 : Measured thermal conductivity coefficients, Vickers hardness values and abrasive wear coefficients
Figure imgf000009_0001
In the context of the present invention the thickness of each individual nanolayer A and B is preferably not greater than 200 nm, more preferably not greater than 100 nm.
The highest boron concentration in the (AlxCrl-x-zBz)N layers according to the present invention could be also lower than 5 at% but preferably not lower than 2 at.% in order to produce boron containing layers having a low thermal conductivity coefficient as possible. A coating having a low thermal conductivity coefficient according to the present invention is very advantageously for diminishing thermal load in cutting tools exposed to high temperatures which are results during cutting processes at high cutting speeds (Vc > 200 m/min). This attribute of the coatings produced according to the present invention is particularly beneficial for diminishing crater wear in cutting tools made of high speed steel such as HSS-hobs, because crater wear is produced in these kinds of cutting tools basically because of too high thermal loads. In the context of the present invention the aluminium chromium boron nitride (Al-Cr- B-N) nano-layers will be referred to as Ananolayers and the aluminium chromium nitride (Al-Cr-N) nano-layers will be referred to as B-nanolayers. The A- and B- nanolayers contain essentially aluminium, chromium, boron and nitrogen or aluminium chromium and nitrogen, respectively. However, the A- and B-nanolayers may comprise small amounts of other elements but the small amounts of other elements in these A- and B layers should not be higher than 5% of the total concentration in atomic percentage of the sum of aluminium, chromium and boron in the A-layers and/or of the total concentration in atomic percentage of the sum of aluminium and chromium in the B-layers.
If the A- and B-nanolayers forming the multi-layered film are produced by means of a PVD-reactive process carried out in such a manner that the substrate surfaces to be coated are rotated in the coating chamber in such a manner that the surfaces are alternately exposed to the AICrB-containing targets and to the AlCr-containing targets in order to produce the A- and B-nanolayes, respectively, it is understood that:
- between the A- and B-nanolayers having essentially an element concentration corresponding to the formulas (AlxCr1-x-zBz)N and (AlyCri-y)N, as it was described before, there could be areas which contain aluminium chromium boron and nitrogen but which have a lower boron concentration, most probably the boron concentration in these areas is graded. In this areas the boron concentration can be lower than 3 at.-%. But in this cases the condition z > 3%, preferably z > 5% in the formula (AlxCr1-x-zBz)N is referred to the areas of the A-nanolayers having the highest boron content. In a further preferred embodiment of a coating system according to the present invention the ratio of the aluminium content to the chromium content in atomic percentage is maintained constant along the thickness of the multi-layered film formed of alternated A- and B-nanolayers containing essentially aluminium chromium boron nitride and aluminium chromium nitride, respectively. If the coating system according to the present embodiment of the present invention comprises also a base layer containing also aluminium and chromium, the base layer is produced in order to have the same ratio of aluminium content to chromium content like in the multi- layered film.
For some cutting operations a very good cutting performance can be also attained by using cutting tools coated with a coating system according to the present invention having a ratio of the thickness of the base layer to the thickness of the multi-layered film (thicknessbasejayer / thicknessmuiti-iayered_fiim) of about 0.25 or higher, preferably of about 0.5 or higher.
A further preferred embodiment of a coating system according to the present invention comprises more than one multi-layered film made of A- and B-nanolayers along the total thickness of the coating system.
In one preferred variant of this preferred embodiment comprising more than one multi-layered film, the coating system is deposited on a surface of a cutting tool, the coating system comprising a base layer made of aluminium chromium nitride which is deposited on substrate surface and a multilayer-structured film deposited on the base layer, wherein the multilayer-structured film is formed by C- and D-layers deposited alternate one on each other, wherein the C-layers are AlCrN-layers which don't contain boron, and D-layers are multi-layered films made of alternated A- and B- nanolayers. In one more preferred variant of this preferred embodiment the surface of the cutting tool on which the coating system is deposited is a nitrogen-enriched zone.
The creation of a nitrogen-enriched zone in the tool substrate surface to be coated according to the present invention contributes significantly for reducing tools crater wear.
A preferred method for producing coating systems according to the present invention is a PVD-method at which the elements aluminium, chromium and boron for the production of the A- and B-nanolayers come from targets having an element composition in atomic percentage (AljCri-i)i-jBj and (AljCn-j), respectively, and where: - i is preferably not lower than 50 at.-% and not greater than 80 at, more preferably i is 70 at.-%.
- j is preferably not lower than 2 at.-% and not greater than 30 at.-% For coating substrates with a coating system according to the present invention are also magnetron sputtering processes, particularly including high power impulse magnetron sputtering (HIPIMS) techniques suitable.
Furthermore, targets made by powder metallurgy are particularly suitable for the production of coating systems according to the present invention.
Particularly, the most preferred embodiments of coating systems, coated substrates and methods for coating substrates with coating systems according to the present invention are described in the following claims 1 to 15.

Claims

Claims
1. Coating system deposited on a surface of a substrate comprising at least one multi-layered film formed of alternated A- and B-nanolayers deposited one on each other characterized in that the A-nanolayers contain aluminium chromium boron nitride and the B-nanolayers also contain aluminium chromium nitride but not contain boron.
2. Coating system according to claim 1 characterized in that the A-nanolayers have a region with highest boron content and a region with lower boron content, wherein the region having lower boron content is the region which is adjacent to the B-nanolayers.
3. Coating system according to at least one of the claims 1 to 2 characterized in that
- the element composition of the A-nanolayers, or if given in the region of the A- nanolayers having highest boron content, is essentially defined by the formula (AlxCri-x-zBz)N wherein:
o x and z are respectively the concentration of Al and the concentration of B in atomic per cent if only the elements Al, Cr and B are considered for the calculation, with
o x = 50 - 80 at-% and z = 2 - 30 at-% and x+z < 90 at-%, preferably
x = 50 - 70 at-% and z = 5 - 20 at-% or z = 5 - 20 at-% and x+z≤ 80 at-%,
and/or
- the element composition of the B-nanolayers is essentially defined by the
formula (AlyCri-y)N wherein:
o y is the concentration of Al in atomic per cent if only the elements Al and Cr are considered for the calculation, with
o y = 50 - 80 at-%, preferably 60 - 70 at-%.
4. Coating system according to at least one of the claims 1 to 3 characterized in that the coating system exhibits a thermal conductivity coefficient lower than
3.0 W/m.K, preferably lower than 2.5 W/m.K.
5. Coating system according to at least one of the claims 1 to 4 characterized in that the sum of the thickness of an A-nanolayer and the thickness of a B-nanolayer deposited one on each other in the multi-layered film is not greater than 200 nm, preferably is not greater than 100 nm, more preferably is not greater than 50 nm, particularly is not greater than 30 nm.
6. Coating system according to at least one of the claims 1 to 5 characterized in that the ratio of the thickness of a B-nanolayer to the thickness of an A-nanolayer deposited one on each other in the multi-layered film is not greater than 2, preferably is about !
7. Coating system according to at least one of the claims 1 to 6 characterized in that the coating system comprises a base layer deposited between the substrate surface and the multi-layered film, preferably the element composition of the base layer is essentially defined by the formula (AlwCri-w)N wherein:
- w is the concentration of Al in atomic per cent if only the elements Al and Cr are considered for the calculation, with
- w = 50 - 80 at-%, preferably 60 - 70 at-%.
8. Coating system according to claim 7 characterized in that the coating system comprises a multilayer-structured film deposited on the base layer, wherein the multilayer-structured film is formed by C- and D-layers deposited alternate one on each other, wherein the C-layers are AlCrN-layers don't containing boron, and the D- layers are multi-layered films formed of alternated A- and B-nanolayers..
9. Coating system according to at least one of the claims 1 to 8 characterized in that the ratio of the aluminium content to the chromium content is maintained constant along the total thickness of the multi-layered film and/or if given along the total thickness of the base layer.
10. Coated substrate with a coating system according to at least one of the claims 1 to 9 characterized in that the substrate comprises a nitrogen-enriched diffusion zone at the interface with the coating system.
11. Method for coating a surface of a substrate with a coating system according to at least one of the claims 1 to 9 characterized in that at least the multi-layered film is deposited by means of physical vapour deposition techniques, such as cathodic arc PVD and/or magnetron sputtering techniques, particularly including high power impulse magnetron sputtering techniques,
preferably the material for forming the multi-layered film is provided by cathodic arc ion plating evaporation of at least one target, preferably a powder metallurgy made target, containing aluminium chromium and boron for producing the A-nanolayers and at least one target, preferably a powder metallurgy made target, containing aluminium and chromium for producing the B-nanolayers in a nitrogen containing atmosphere, and
at least by depositing the B-containing layers a negative bias voltage at the substrate is applied which is preferably not lower than 70 V in absolute value.
12. Method according to claim 11 characterized in that the at least one target for forming the A-nanolayers has an element composition in atomic percentage given by the formula (AljCri-j)i.jBj and the at least one target for forming the B-nanolayers has an element composition in atomic percentage given by the formula (AliCn.,), where:
- i is preferably not lower than 50 at.-% and not greater than 80 at.-%, more preferably i is 70 at.-%.
- j is preferably not lower than 2 at.-% and not greater than 30 at.-%
13. Method according to at least one of the claims 11 to 12 for coating a surface of a substrate with a coating system according to at least one of the claims 7 to 9 characterized in that the base layer is deposited by means of physical vapour deposition techniques, preferably by means of reactive cathodic arc ion plating PVD techniques applying a negative bias voltage at the substrate at least during a part of the deposition time.
14. Method according to claim 13 characterized in that the bias voltage applied during the deposition of the base layer is varied during deposition and increased from a lowest value UBias_iowest up to a highest value UBias_highest, preferably UBias_iowest is not greater than 4 times UBias_highest in absolute value.
15. Method according to at least one of the claims 1 1 to 14 for producing a coated substrate according to claim 10 characterized in that the diffusion zone is produced by accomplishing a plasma etching step prior to coating deposition which is carried out in a nitrogen, or in a nitrogen/hydrogen, or in a nitrogen/hydrogen/argon atmosphere.
PCT/EP2013/001098 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations WO2013156131A1 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
CN201380020487.3A CN104508171B (en) 2012-04-16 2013-04-15 Coat system, the matrix of coating and the method with coat system coating matrix surface
US14/394,483 US9464347B2 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
EP13720781.7A EP2839051B1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
PL13720781T PL2839051T3 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
MX2014012538A MX2014012538A (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations.
ES13720781T ES2702247T3 (en) 2012-04-16 2013-04-15 High performance tools that exhibit reduced crater wear particularly in dry machining operations
IN8669DEN2014 IN2014DN08669A (en) 2012-04-16 2013-04-15
SI201331261T SI2839051T1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
KR1020147032145A KR102172628B1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
JP2015506114A JP6249452B2 (en) 2012-04-16 2013-04-15 Coating system and high performance tool exhibiting reduced wear due to machining operations, and coating method with the coating system
PH12014502311A PH12014502311A1 (en) 2012-04-16 2014-10-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261624487P 2012-04-16 2012-04-16
US61/624,487 2012-04-16

Publications (1)

Publication Number Publication Date
WO2013156131A1 true WO2013156131A1 (en) 2013-10-24

Family

ID=48325567

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/001098 WO2013156131A1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations

Country Status (15)

Country Link
US (1) US9464347B2 (en)
EP (1) EP2839051B1 (en)
JP (1) JP6249452B2 (en)
KR (1) KR102172628B1 (en)
CN (1) CN104508171B (en)
ES (1) ES2702247T3 (en)
HU (1) HUE042494T2 (en)
IN (1) IN2014DN08669A (en)
MX (1) MX2014012538A (en)
MY (1) MY169727A (en)
PH (1) PH12014502311A1 (en)
PL (1) PL2839051T3 (en)
SI (1) SI2839051T1 (en)
TR (1) TR201819368T4 (en)
WO (1) WO2013156131A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013019691A1 (en) 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hard material layer for reducing heat input into the coated substrate
DE102014018915A1 (en) 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-based coating for improved resistance to crater wear
WO2018215558A1 (en) * 2017-05-23 2018-11-29 Oerlikon Surface Solutions Ag, Pfäffikon Thick TiAlTaN/AlCrN multilayer coating films on turbine components
CN109097731A (en) * 2018-07-27 2018-12-28 广东工业大学 A kind of AlCrN/AlCrYN multi-component multi-layer coating and its preparation method and application
CN110527957A (en) * 2019-08-19 2019-12-03 河北宏靶科技有限公司 A kind of aluminium chromium-boron alloy target and preparation method thereof
WO2022129094A1 (en) * 2020-12-14 2022-06-23 Oerlikon Surface Solutions Ag, Pfäffikon Wear resistant coating produced from at least two different alcr-based targets

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10583493B2 (en) * 2015-04-27 2020-03-10 Tungaloy Corporation Coated cutting tool
CN106191772B (en) * 2016-08-09 2018-07-31 上海理工大学 A kind of high rigidity CrAlN coatings and preparation method thereof containing AlCrN nanometers of insert layers of multiphase
CN106835036B (en) * 2016-08-16 2019-02-19 兰州空间技术物理研究所 A method of modulation high-power impulse magnetron sputtering prepares AlCrN coating
CN107299330A (en) * 2017-04-07 2017-10-27 苏州星蓝纳米技术有限公司 A kind of low internal stress coating and preparation method thereof
KR102421533B1 (en) * 2018-05-30 2022-07-14 가부시키가이샤 몰디노 Covered cutting tool and manufacturing method thereof
CN108950480B (en) * 2018-08-22 2020-08-14 中国科学院力学研究所 High-toughness wear-resistant composite coating and method for depositing same on hot-working male die
KR102299610B1 (en) * 2019-01-30 2021-09-08 연세대학교 산학협력단 Transparent Nanolayered Structure Having Improved Wear-resistant and Flexibility
CN111020475A (en) * 2019-12-16 2020-04-17 苏州星蓝纳米技术有限公司 Novel AT coating
WO2022129644A1 (en) * 2020-12-18 2022-06-23 Oerlikon Surface Solutions Ag, Pfäffikon Hard alcr-based multilayer coating system, coated article and method for manufacturing the same
CN113416926A (en) * 2021-05-17 2021-09-21 湖南泰嘉新材料科技股份有限公司 Nano multilayer structure transition metal nitride coating and preparation method and application thereof
CN113817985B (en) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 Nano multilayer composite coating and preparation method and application thereof
CN115747718A (en) * 2022-12-26 2023-03-07 常州夸克涂层科技有限公司 Coating process for hobbing cutter

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008037556A2 (en) * 2006-09-26 2008-04-03 Oerlikon Trading Ag, Truebbach Workpiece with hard coating
WO2010003902A1 (en) * 2008-07-09 2010-01-14 Oerlikon Trading Ag, Truebbach Coating system, coated workpiece and method for manufacturing the same
WO2011058636A1 (en) * 2009-11-12 2011-05-19 オーエスジー株式会社 Tool coated with hard coating
WO2011095292A1 (en) * 2010-02-04 2011-08-11 Oerlikon Trading Ag, Trübbach CUTTING TOOLS WITH Al-Cr-B-N / Ti-Al-N MULTILAYER COATINGS

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3341846B2 (en) * 1991-04-04 2002-11-05 住友電気工業株式会社 Ion nitriding-ceramic coating continuous treatment method
JP4185172B2 (en) * 1997-06-19 2008-11-26 住友電工ハードメタル株式会社 Coated hard tool
US20050112019A1 (en) * 2003-10-30 2005-05-26 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Aluminum-alloy reflection film for optical information-recording, optical information-recording medium, and aluminum-alloy sputtering target for formation of the aluminum-alloy reflection film for optical information-recording
JP2005153126A (en) * 2003-11-28 2005-06-16 Nachi Fujikoshi Corp Tool coated with plasma nitriding ceramic hard film
JP2004256922A (en) * 2004-05-19 2004-09-16 Hitachi Tool Engineering Ltd Hard film
JP4756445B2 (en) * 2005-02-16 2011-08-24 三菱マテリアル株式会社 Surface-coated cermet cutting tool with excellent wear resistance due to high-speed cutting of heat-resistant alloys
JP4950499B2 (en) * 2006-02-03 2012-06-13 株式会社神戸製鋼所 Hard coating and method for forming the same
JP4844884B2 (en) * 2006-07-28 2011-12-28 三菱マテリアル株式会社 A surface-coated cutting tool that exhibits excellent chipping resistance and wear resistance due to its excellent hard coating layer in high-speed cutting of heat-resistant alloys
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
AT9748U1 (en) * 2007-04-02 2008-03-15 Ceratizit Austria Gmbh MULTILAYER CVD LAYER
JP2009012139A (en) * 2007-07-06 2009-01-22 Mitsubishi Materials Corp Surface coated cutting tool having hard coating layer exerting excellent lubricity and wear resistance in high speed cutting
JP4413958B2 (en) * 2007-08-31 2010-02-10 ユニオンツール株式会社 Hard coating for cutting tools
JP2009101490A (en) * 2007-10-25 2009-05-14 Mitsubishi Materials Corp Surface-coated cutting tool having hard coating layer exerting excellent lubricity and wear resistance in high-speed cutting
US8389108B2 (en) * 2008-04-30 2013-03-05 Sumitomo Electric Industries, Ltd. Surface coated cutting tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008037556A2 (en) * 2006-09-26 2008-04-03 Oerlikon Trading Ag, Truebbach Workpiece with hard coating
WO2010003902A1 (en) * 2008-07-09 2010-01-14 Oerlikon Trading Ag, Truebbach Coating system, coated workpiece and method for manufacturing the same
WO2011058636A1 (en) * 2009-11-12 2011-05-19 オーエスジー株式会社 Tool coated with hard coating
US20120213990A1 (en) * 2009-11-12 2012-08-23 Osg Corporation Hard film and hard film coated tool
WO2011095292A1 (en) * 2010-02-04 2011-08-11 Oerlikon Trading Ag, Trübbach CUTTING TOOLS WITH Al-Cr-B-N / Ti-Al-N MULTILAYER COATINGS

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DAVID G. CAHILL: "Analysis of heat flow in layered structures for time-domain thermoreflectance", REV. SCI. INSTRUM., vol. 75, 2004, pages 5119, XP012071934, DOI: doi:10.1063/1.1819431

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013019691A1 (en) 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hard material layer for reducing heat input into the coated substrate
WO2015078570A1 (en) 2013-11-26 2015-06-04 Oerlikon Surface Solutions Ag, Trübbach Hard material layer for reducing heat input into a coated substrate
US9950406B2 (en) 2013-11-26 2018-04-24 Oerlikon Surface Solutions Ag, Pfäffikon Hard material layer for reducing heat input into a coated substrate
CN107002252A (en) * 2014-12-22 2017-08-01 欧瑞康表面处理解决方案股份公司普费菲孔 The AlCrN base coatings of enhanced crater wear resistance energy are provided
RU2712329C2 (en) * 2014-12-22 2020-01-28 Ёрликон Серфис Сольюшнс Аг, Пфеффикон AlCrN-BASED COATING, WHICH PROVIDES HIGH RESISTANCE TO CRATER WEAR
KR20170097768A (en) * 2014-12-22 2017-08-28 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 AlCrN-based coatings provide improved crater wear resistance
US20180044773A1 (en) * 2014-12-22 2018-02-15 Oerlikon Surface Solutions Ag, Pfäffikon AlCrN-Based Coating Providing Enhanced Crater Wear Resistance
JP2018505310A (en) * 2014-12-22 2018-02-22 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン AlCrN-based coating for enhanced crater wear resistance
DE102014018915A1 (en) 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-based coating for improved resistance to crater wear
KR102464789B1 (en) * 2014-12-22 2022-11-08 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 AlCrN-based coatings provide improved crater wear resistance
JP7080056B2 (en) 2014-12-22 2022-06-03 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン AlCrN-based coatings that provide enhanced crater wear resistance and methods of producing such coatings
CN107002252B (en) * 2014-12-22 2019-05-31 欧瑞康表面处理解决方案股份公司普费菲孔 The AlCrN base coating of the crater wear resistance energy of enhancing is provided
US11035035B2 (en) 2014-12-22 2021-06-15 Oerlikon Surface Solutions Ag, Pfäffikon AlCrN-based coating providing enhanced crater wear resistance
WO2016102170A1 (en) * 2014-12-22 2016-06-30 Oerlikon Surface Solutions Ag, Pfäffikon Alcrn-based coating providing enhanced crater wear resistance
WO2018215558A1 (en) * 2017-05-23 2018-11-29 Oerlikon Surface Solutions Ag, Pfäffikon Thick TiAlTaN/AlCrN multilayer coating films on turbine components
CN109097731A (en) * 2018-07-27 2018-12-28 广东工业大学 A kind of AlCrN/AlCrYN multi-component multi-layer coating and its preparation method and application
CN110527957A (en) * 2019-08-19 2019-12-03 河北宏靶科技有限公司 A kind of aluminium chromium-boron alloy target and preparation method thereof
WO2022129094A1 (en) * 2020-12-14 2022-06-23 Oerlikon Surface Solutions Ag, Pfäffikon Wear resistant coating produced from at least two different alcr-based targets

Also Published As

Publication number Publication date
IN2014DN08669A (en) 2015-05-22
EP2839051A1 (en) 2015-02-25
HUE042494T2 (en) 2019-07-29
EP2839051B1 (en) 2018-09-26
MX2014012538A (en) 2015-08-14
JP2015514870A (en) 2015-05-21
SI2839051T1 (en) 2019-02-28
MY169727A (en) 2019-05-14
US9464347B2 (en) 2016-10-11
TR201819368T4 (en) 2019-01-21
PH12014502311B1 (en) 2014-12-22
US20150056431A1 (en) 2015-02-26
JP6249452B2 (en) 2017-12-20
CN104508171B (en) 2016-10-19
KR102172628B1 (en) 2020-11-03
KR20140146203A (en) 2014-12-24
ES2702247T3 (en) 2019-02-28
CN104508171A (en) 2015-04-08
PH12014502311A1 (en) 2014-12-22
PL2839051T3 (en) 2019-02-28

Similar Documents

Publication Publication Date Title
US9464347B2 (en) High performance tools exhibiting reduced crater wear in particular by dry machining operations
CN102099138B (en) Coated member and manufacture method thereof, coating cutting tool including the coated memeber
JP6268530B2 (en) Surface coated cutting tool with excellent chipping resistance due to hard coating layer
CN100449034C (en) Nanolayered coated cutting tool and method for making the same
EP2276874B1 (en) A coated cutting tool and a method of making thereof
EP2636764A1 (en) Nanolaminated coated cutting tool
JP4427271B2 (en) Alumina protective film and method for producing the same
JP4388582B2 (en) Hard coating layer and method for forming the same
JP6525310B2 (en) Coated tools
KR20160050056A (en) A coated cutting tool and a method for coating the cutting tool
KR20140129009A (en) Coated cutting tool and method of making the same
WO2019098363A1 (en) Coated cutting tool
CN107190233A (en) A kind of preparation technology of the Si dopen Nano composite coatings with ultrahigh hardness
SE532049C2 (en) Oxide coated cutting tool cutter for chip separating machining of steel
Deeleard et al. Structure and composition of TiVN thin films deposited by reactive DC magnetron co-sputtering
CN109576662B (en) PVD (physical vapor deposition) technology-based bulk cermet/metal/cermet bidirectional nano gradient material and preparation method thereof
CN109898056B (en) PVD (physical vapor deposition) technology-based bulk metal/metal ceramic nanometer gradient material as well as preparation method and application thereof
KR101727420B1 (en) Laminated coating film having excellent abrasion resistance
CN108103454B (en) A kind of high smooth coated cutting tool and preparation method thereof
JP2004230515A (en) Tool for highly functional processing
JP3934263B2 (en) Hard film and hard film coated member with excellent wear resistance
Vopát et al. Observation of Coating-Substrate Adhesion of Nanocomposite Hard Coating with Respect to the Deposition Parameters and Surface Finishing of Cemented Carbide Substrate
CN117620238A (en) Coated cutting tool
KR20210143274A (en) clad cutting tool
JP6062623B2 (en) Cutting tools

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13720781

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2013720781

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2015506114

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 14394483

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: MX/A/2014/012538

Country of ref document: MX

ENP Entry into the national phase

Ref document number: 20147032145

Country of ref document: KR

Kind code of ref document: A