CN115747718A - Coating process for hobbing cutter - Google Patents
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- CN115747718A CN115747718A CN202211674806.XA CN202211674806A CN115747718A CN 115747718 A CN115747718 A CN 115747718A CN 202211674806 A CN202211674806 A CN 202211674806A CN 115747718 A CN115747718 A CN 115747718A
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- 238000000576 coating method Methods 0.000 title claims abstract description 56
- 239000011248 coating agent Substances 0.000 claims abstract description 36
- 239000010410 layer Substances 0.000 claims description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 39
- 239000002052 molecular layer Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 35
- 238000004140 cleaning Methods 0.000 claims description 21
- 238000007747 plating Methods 0.000 claims description 21
- 238000005086 pumping Methods 0.000 claims description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 238000012360 testing method Methods 0.000 claims description 20
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 238000000151 deposition Methods 0.000 claims description 17
- 238000001704 evaporation Methods 0.000 claims description 17
- 230000008020 evaporation Effects 0.000 claims description 17
- 239000002346 layers by function Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 12
- 239000013077 target material Substances 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 9
- 230000000087 stabilizing effect Effects 0.000 claims description 9
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 6
- 230000001133 acceleration Effects 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 abstract description 6
- 239000013078 crystal Substances 0.000 abstract description 3
- 239000006104 solid solution Substances 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229910018509 Al—N Inorganic materials 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011056 performance test Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The invention relates to the technical field of hard coatings, in particular to a coating process of a hobbing cutter. The presence of c-BN and hcp-BN phases in the AlCrBN coating has also been found to improve the tribological properties of the coating. The doping of W element can generate WN or W with higher hardness 2 And the N phase and the W atoms are dissolved in the CrN crystal lattice to form a substitutional solid solution, so that the composite material has more outstanding mechanical property and wear resistance. The doping of Si element can make the coating have a certain amorphous structure to form a crystal-amorphous composite structure, and endows the coating with higher plastic deformation resistance, high hardness and wear resistance, thereby obtaining good high-temperature wear resistance.
Description
Technical Field
The invention relates to the technical field of hard coatings, in particular to a coating process of a hobbing cutter.
Background
The hobbing cutter is a tool for machining gears, and has the machining characteristics of high requirements on hardness, wear resistance and high-temperature oxidation resistance of the cutter. CrAlN, as a typical single layer coating, has been the coating of choice for gear hobbing tools due to its high hardness, wear resistance and corrosion resistance characteristics. Nevertheless, the high temperature oxidation resistance of the CrAlN coating still presents certain limitations in some application scenarios where the processing conditions are extremely harsh, such as dry high speed cutting at 1000 ℃ or even higher.
With the continuous development of the cutter coating technology, researchers gradually find that in single-layer nitride hard film layers of binary, multi-element and the like, the bonding strength between the film layer and a substrate is low, through adopting multi-element multi-layer and gradient film layer design, the advantages of various single-layer film materials can be integrated, meanwhile, the interface of the multi-layer film effectively interrupts the growth of columnar crystals, the movement of dislocation is blocked, the development direction of cracks is changed, the matching between the film layer and the substrate is increased, the film layer has higher impact toughness, the gradient design reduces the residual stress in the film layer, the bonding force between the substrate and the film layer can be greatly improved, and the film has higher comprehensive performance and longer service life. The patent CN 102922052a provides a method for preparing an AlTiN-AlCrN superhard nano multilayer composite coating applied to a hobbing cutter, which has certain advantages in wear resistance and adhesion compared with the conventional single-layer coating, but the high-temperature oxidation resistance of the coating still needs to be further improved.
To further improve the mechanical and thermal stability properties of the coating, the W element may be added to the multi-component coating. Research shows that in a Cr-Al-N coating system, W2N serving as a sublayer exists in a multilayer system structure and can obviously improve the mechanical property, the high-temperature oxidation resistance and the corrosion resistance of the coating. And the doping of Si can form an interface phase SiN to form a nanocrystalline composite structure wrapping nanocrystalline Cr-Al-N, so that the strengthening effect of remarkably improved coating hardness is obtained, and meanwhile SiO2 generated by Si element at high temperature can effectively prevent the diffusion of oxygen element, so that the oxidation resistance of the Cr-Al-N coating can be improved. On the other hand, the B element is doped into the coating to generate the effects of solid solution strengthening, grain refining and the like, so that the hardness and the frictional wear performance of the coating are obviously improved.
Under the above-mentioned thinking, it is necessary to provide an effective process method to realize the doping of W, si, B and other elements in a Cr-Al-N coating system and to fully utilize the structural advantages of the multilayer composite coating, thereby applying to the hobbing cutter and improving the cutting performance thereof.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a coating process of a hobbing cutter.
The technical scheme for realizing the purpose of the invention is as follows: a coating process of a hobbing cutter comprises the following steps:
firstly, pretreating a substrate, ultrasonically cleaning the test piece substrate by absolute ethyl alcohol, and drying the test piece substrate by cold air;
step two, furnace charging and vacuumizing, wherein rough vacuumizing is performed firstly, and then fine vacuumizing is performed until the vacuum is achieved;
heating, namely heating to the temperature of 450-550 ℃ by starting a heater;
step four, cleaning the lamp filament, introducing argon, keeping the vacuum degree, turning on a power supply of the lamp filament, and cleaning;
step five, plating a bonding layer, introducing nitrogen, keeping the vacuum degree, opening a target material, and setting arc current and bias voltage;
step six, plating a functional layer, introducing argon, maintaining the vacuum degree, alternately depositing a Cr-Al-B-N layer and a Cr-Al-Si-W-N layer,
the Cr-Al-B-N layer comprises the following elements in percentage by weight: 10-20% of Cr, 20-30% of AL, 5-10% of B and 40-65% of N;
the Cr-Al-Si-W-N layer comprises the following elements in percentage by weight: 5-20% of Cr, 10-20% of AL, 2-5% of Si, 2-5% of W and 50-81% of N;
and step seven, cooling along with the furnace, turning off the heater, and breaking the space to take out the coated test piece substrate after cooling.
In the first step of the above technical solution, the substrate of the test piece is high-speed steel of 20mm × 5mm, the surface of the substrate is ground by #400, #800, #1200, #1600, and #2000 sandpaper, and then the surface of the substrate is polished to a mirror surface by diamond polishing paste with a grain size of 2.5 μm.
In the first step of the technical scheme, the time for ultrasonic cleaning by using absolute ethyl alcohol is 30min.
In the second step of the technical scheme, a mechanical pump and a rough pumping valve are used for rough pumping of the coating cavity, and meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, a front-stage valve and a gate valve are opened for fine pumping.
In the second step of the above technical scheme, the vacuum degree of the vacuum is 2 x 10 -2 Pa～7*10 -2 Pa。
In the fourth step of the technical scheme, the argon flow is 60-100 sccm, and the vacuum degree is 3 × 10 -2 Pa～5*10 -2 Pa, the bias voltage of the filament power supply is 50-900V, gradually increasing or stepwise increasing, and the cleaning time is 30min.
In the fifth step of the above technical scheme, the nitrogen flow is 60-100 sccm, and the vacuum degree is 3 × 10 -2 Pa～5*10 -2 Pa, the target material is one of Cr or Ti, the arc current is 60-100A, and the bias voltage is 500-800V.
In the fifth step of the technical scheme, the thickness of the plating bonding layer is 30-50 nm.
In the sixth step of the technical scheme, the functional layer plating method comprises the following steps: mounting a CrAlB target and a CrAlSiW target, setting the nitrogen flow at 100-300 sccm, stabilizing the vacuum degree at 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame at 1-2 hz, simultaneously starting all evaporation sources, controlling the current at 120-180A, alternately depositing in the multilayer film, wherein the sum of the thickness of the CrAlBN nano layer and the thickness of the CrAlSiWN nano layer is less than or equal to 100nm, and the ratio of the thickness of the CrAlBN nano layer to the thickness of the CrAlSiWN nano layer is not more than 2.
In the sixth step of the technical scheme, the functional layer plating method comprises the following steps: mounting a CrAlB target and a CrAlSiW target, setting the nitrogen flow at 100-300 sccm, stabilizing the vacuum degree at 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame at 1-2 hz, starting the CrAlB evaporation source, then closing the CrAlB evaporation source, starting the CrAlSiW evaporation source, alternately depositing for 5-15 times, alternately depositing CrAlBN nano-layer thickness and the sum of CrAlSiWN nano-layer thickness in a multilayer film to be less than or equal to 100nm, and setting the ratio of the CrAlBN nano-layer thickness to the CrAlSiWN nano-layer thickness to be not more than 2.
After the technical scheme is adopted, the invention has the following positive effects:
(1) The invention adds B element toCrAlN forms a thin BNx phase wrapping around the nano fcc-AlCrN grains, so that the coating has ultrahigh hardness. In addition, c-BN and hcp-BN phases are also found in AlCrBN coatings. The c-BN phase has ultrahigh hardness, high wear resistance and high temperature hardness, and the hcp-BN phase has a self-lubricating effect and can improve the friction performance of the coating. The doping of W element can generate WN or W with higher hardness 2 And the N phase and the W atoms are dissolved in CrN crystal lattices to form a substitutional solid solution, so that the high-temperature wear-resistant steel has more outstanding wear resistance and high-temperature oxidation resistance. The doping of Si element can make the coating have a certain amorphous structure to form a crystal-amorphous composite structure, and endows the coating with higher plastic deformation resistance, high hardness and wear resistance, thereby obtaining good high-temperature wear resistance.
(2) The functional layer adopts a multilayer structure design, effectively inhibits the growth of grains to refine the grains, reduces the plastic deformation generated by dislocation behavior, and has stable and low wear rate in high-speed cutting.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments.
Thus, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a coating process of a hobbing cutter, which comprises the following steps:
firstly, pretreating a substrate, ultrasonically cleaning the test piece substrate by absolute ethyl alcohol, and drying the test piece substrate by cold air;
step two, furnace charging and vacuumizing, wherein rough vacuumizing is performed firstly, and then fine vacuumizing is performed until the vacuum is achieved;
heating, namely heating to 450-550 ℃ by using a heater;
step four, cleaning the lamp filament, introducing argon, keeping the vacuum degree, turning on a power supply of the lamp filament, and cleaning;
step five, plating a bonding layer, introducing nitrogen, keeping the vacuum degree, opening the target material, and setting arc current and bias voltage;
step six, plating a functional layer, introducing nitrogen, maintaining the vacuum degree, alternately depositing a CrAlBN layer and a CrAlSiWN layer,
the CrAlBN layer comprises the following elements in percentage by weight: 10-20% of Cr, 20-30% of AL, 5-10% of B and 40-65% of N;
the CrAlSiWN layer comprises the following elements in percentage by weight: 5-20% of Cr, 10-20% of AL, 2-5% of Si, 2-5% of W and 50-81% of N;
and step seven, cooling along with the furnace, turning off the heater, and breaking the space to take out the coated test piece substrate after cooling.
In the first step, the test piece substrate is made of 20mm-5mm high-speed steel, the surface of the substrate is ground by #400, #800, #1200, #1600, #2000 sandpaper, and then the surface of the substrate is ground and polished to a mirror surface by diamond polishing paste with the grain size of 2.5 mu m.
In the first step, the time for ultrasonic cleaning by using absolute ethyl alcohol is 30min.
In the second step, a mechanical pump and a rough pumping valve are used for rough pumping of the coating cavity, meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, a front-stage valve and a gate valve are opened for fine pumping. The model of the coating equipment used in the application of the invention is Quark A500C, and the mechanical pump, the roughing valve, the molecular pump, the gate valve and the like are all general parts of the coating equipment, and are not explained in more detail herein, so that the understanding of the technicians in the field can not be influenced.
In the second step, the vacuum degree of the vacuum is 2 x 10 -2 Pa～7*10 -2 Pa。
In the fourth step, the argon flow is 60-100 sccm, and the vacuum degree is 3 × 10 -2 Pa～5*10 -2 Pa, the bias voltage of the filament power supply is 50-900V, gradually increasing or stepwise increasing, and the cleaning time is 30min.
In the fifth step, the nitrogen flow is 60-100 sccm, and the vacuum condition is adoptedDegree 3 x 10 -2 Pa～5*10 -2 Pa, the target material is one of Cr or Ti, the arc current is 60-100A, and the bias voltage is 500-800V.
In the fifth step, the thickness of the plating bonding layer is 30-50 nm.
In the sixth step, the functional layer plating comprises the following steps of installing a CrAlB target and a CrAlSiW target, controlling the nitrogen flow to be 100-300 sccm, stabilizing the vacuum degree to be 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame to be 1-2 hz, simultaneously starting all evaporation sources, controlling the current to be 120-180A, alternately depositing in a multilayer film, and controlling the sum of the thickness of the CrAlBN nano layer and the thickness of the CrAlSiWN nano layer to be less than or equal to 100nm, preferably less than or equal to 50nm, and most preferably 10-30nm. The ratio of the thickness of the CrAlBN nanolayer to the thickness of the CrAlSiWN nanolayer is not more than 2, preferably 1.
In the sixth step, the functional layer plating comprises the following steps: mounting a CrAlB target and a CrAlSiW target, setting the nitrogen flow at 100-300 sccm, stabilizing the vacuum degree at 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame at 1-2 hz, starting the CrAlB evaporation source, then closing the CrAlB evaporation source, starting the CrAlSiW evaporation source, and alternately depositing for 5-15 times, wherein the sum of the thickness of the CrAlBN nano layer and the thickness of the CrAlSiWN nano layer in the multilayer film is less than or equal to 100nm, preferably less than or equal to 50nm, and most preferably 10-30nm. The ratio of the thickness of the CrAlBN nano-layer to the thickness of the CrAlSiWN nano-layer is not more than 2, preferably 1.
Example 1
Step one, selecting high-speed steel of 20mm x 5mm as a test piece substrate, grinding the surface of the substrate by using #400, #800, #1200, #1600 and #2000 abrasive paper, then grinding and polishing the surface of the substrate to a mirror surface by using diamond polishing paste with the grain size of 2.5 mu m, ultrasonically cleaning the test piece substrate for 30min by using absolute ethyl alcohol, and drying by cold air;
step two, furnace loading and vacuum pumping are carried out, a mechanical pump and a rough pumping valve are firstly used for rough pumping of the coating cavity, meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, the front-stage valve and the gate valve are opened for fine pumping until the vacuum degree reaches 2.5 x 10 -2 Pa；
Heating, namely starting a heater to heat to the temperature of 460 ℃;
step four, cleaning the filament, introducing argon with the flow of 60sccm, and keeping the vacuum of 3 × 10 -2 Pa, turning on a filament power supply to enable the bias voltage to gradually increase or increase step by step at 50-900V, and cleaning for 30min;
plating a 33nm bonding layer, introducing nitrogen with the flow of 64sccm, and keeping the vacuum degree at 3 x 10 -2 Pa, opening the target Cr, setting the arc current to be 60A and the bias voltage to be 500V;
step six, plating a functional layer, alternately depositing a CrAlBN layer and a CrAlSiWN layer,
the CrAlBN layer comprises the following elements in percentage by weight: 11% of Cr, 20% of AL, 5% of B and 44% of N;
the CrAlSiWN layer comprises the following elements in percentage by weight: cr 6%, AL 10%, si 2%, W2%, N51%;
and (3) mounting a CrAlB target material and a CrAlSiW target material, introducing nitrogen with the flow rate of 120sccm, stabilizing the vacuum degree at 2.5Pa, setting the rotating speed frequency of a workpiece frame to be 1hz, simultaneously starting all evaporation sources, controlling the current to be 120A, alternately depositing in the multilayer film, and optimally setting the sum of the thickness of the CrAlBN nano layer and the thickness of the CrAlSiWN nano layer to be 10nm. The ratio of the thickness of the CrAlBN nano layer to the thickness of the CrAlSiWN nano layer is 1.2.
And step seven, cooling along with the furnace, turning off the heater, cooling to 120 ℃, breaking the space, and taking out the coated test piece substrate.
Finally, the coating passed the performance test with a thickness of 3.3 um, a hardness of HV 2245.37, and a coefficient of friction of 0.579.
Example 2
Step one, selecting high-speed steel of 20mm x 5mm as a test piece substrate, grinding the surface of the substrate by using #400, #800, #1200, #1600 and #2000 abrasive paper, then grinding and polishing the surface of the substrate to a mirror surface by using diamond polishing paste with the grain size of 2.5 mu m, ultrasonically cleaning the test piece substrate for 30min by using absolute ethyl alcohol, and drying by cold air;
step two, furnace loading and vacuum pumping are carried out, firstly, a mechanical pump and a rough pumping valve are used for rough pumping of the coating cavity, meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, the front-stage valve and the gate valve are opened for fine pumping until the vacuum degree reaches 4.5 × 10 -2 Pa；
Heating, namely starting a heater to heat to 500 ℃;
step four, cleaning the filament, introducing argon with the flow of 80sccm, and keeping the vacuum of 4sccm and 10 sccm -2 Pa, turning on a filament power supply to enable the bias voltage to gradually increase or increase step by step at 50-900V, and cleaning for 30min;
step five, plating a 40nm bonding layer, introducing nitrogen with the flow of 85sccm, and keeping the vacuum degree at 4 x 10 -2 Pa, opening the target Ti, setting the arc current to be 80A and the bias voltage to be 600V;
step six, plating a functional layer, alternately depositing a CrAlBN layer and a CrAlSiWN layer,
the CrAlBN layer comprises the following elements in percentage by weight: 15% of Cr, 25% of AL, 8% of B and 50% of N;
the CrAlSiWN layer comprises the following elements in percentage by weight: 15% of Cr, 15% of AL, 4% of Si, 4% of W and 60% of N;
and (3) mounting a CrAlB target material, mounting a CrAlSiW target material, introducing nitrogen with the flow rate of 180sccm, stabilizing the vacuum degree at 3Pa, setting the rotating speed frequency of the workpiece frame to be 2hz, simultaneously starting all evaporation sources, controlling the current to be 150A, alternately depositing in the multilayer film, and enabling the total thickness of the CrAlBN nano layer and the CrAlSiWN nano layer to be 20nm. The ratio of the thickness of the CrAlBN nano-layer to the thickness of the CrAlSiWN nano-layer was 1.5.
And step seven, cooling along with the furnace, turning off the heater, cooling to 120 ℃, breaking the space, and taking out the coated test piece substrate.
Finally, the coating passed the performance test with a thickness of 4.7um, a hardness of HV3141.15, and a coefficient of friction of 0.514.
Example 3
Step one, selecting high-speed steel of 20mm x 5mm as a test piece substrate, grinding the surface of the substrate by using #400, #800, #1200, #1600 and #2000 abrasive paper, then grinding and polishing the surface of the substrate to a mirror surface by using diamond polishing paste with the grain size of 2.5 mu m, ultrasonically cleaning the test piece substrate for 30min by using absolute ethyl alcohol, and drying by cold air;
step two, furnace loading and vacuum pumping are carried out, firstly, a mechanical pump and a rough pumping valve are used for rough pumping of the coating cavity, meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, the front-stage valve and the gate valve are opened for fine pumping till the vacuum degree is vacuumDegree 7 x 10 -2 Pa；
Step three, heating, namely, turning on a heater to heat to the temperature of 550 ℃;
step four, cleaning the filament, introducing argon with the flow of 100sccm, and keeping vacuum 5 x 10 -2 Pa, turning on a filament power supply to enable the bias voltage to gradually increase or increase step by step at 50-900V, and cleaning for 30min;
step five, plating a 48nm bonding layer, introducing nitrogen with the flow of 90sccm, and keeping the vacuum degree at 5 x 10 -2 Pa, opening the target Ti, setting the arc current to be 95A and the bias voltage to be 750V;
step six, plating a functional layer, alternately depositing a CrAlBN layer and a CrAlSiWN layer,
the CrAlBN layer comprises the following elements in percentage by weight: 20% of Cr, 30% of AL, 10% of B and 65% of N;
the CrAlSiWN layer comprises the following elements in percentage by weight: 20% of Cr, 20% of AL, 5% of Si, 5% of W and 80% of N;
mounting a CrAlB target material and a CrAlSiW target material, introducing nitrogen gas with the flow rate of 240sccm, stabilizing the vacuum degree at 2.5-4 Pa by controlling the opening angle of a flashboard valve, setting the rotating speed frequency of a workpiece frame at 1-2 hz, starting the CrAlB evaporation source, then closing the CrAlB evaporation source, starting the CrAlSiW evaporation source, and alternately depositing for 5-15 times, wherein the sum of the thickness of CrAlBN nano layer and the thickness of CrAlSiWN nano layer in the multilayer film is 28nm. The ratio of the thickness of the CrAlBN nano-layer to the thickness of the CrAlSiWN nano-layer was 1.8.
And step seven, cooling along with the furnace, turning off the heater, cooling to 120 ℃, breaking the space, and taking out the coated test piece substrate.
Finally, the coating passed the performance test with a thickness of 4.5um, a hardness of HV3744.081, and a coefficient of friction of 0.456.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A coating process of a hobbing cutter is characterized by comprising the following steps:
firstly, pretreating a substrate, ultrasonically cleaning the test piece substrate by absolute ethyl alcohol, and drying by cold air;
step two, furnace loading and vacuumizing, wherein rough vacuumizing is performed firstly, and then fine vacuumizing is performed until the vacuum is achieved;
heating, namely heating to 450-550 ℃ by using a heater;
step four, cleaning the lamp filament, introducing argon, keeping the vacuum degree, turning on a power supply of the lamp filament, and cleaning;
step five, plating a bonding layer, introducing nitrogen, keeping the vacuum degree, opening the target material, and setting arc current and bias voltage;
step six, plating a functional layer, introducing nitrogen, keeping the vacuum degree, and alternately depositing a CrAlBN layer and a CrAlSiWN layer;
the CrAlBN layer comprises the following elements in percentage by weight: 10-20% of Cr, 20-30% of AL, 5-10% of B and 40-65% of N;
the CrAlSiWN layer comprises the following elements in percentage by weight: 5-20% of Cr, 10-20% of AL, 2-5% of Si, 2-5% of W and 50-81% of N;
and step seven, cooling along with the furnace, turning off the heater, and breaking the space to take out the coated test piece substrate after cooling.
2. The hobbing cutter coating process of claim 1, wherein: in the first step, the test piece matrix is high-speed steel of 20mm × 5mm, the surface of the matrix is ground by using #400, #800, #1200, #1600 and #2000 sandpaper, and then the surface of the matrix is ground and polished to a mirror surface by using diamond polishing paste with the grain size of 2.5 μm.
3. The roll slotting cutter coating process according to claim 1, wherein: in the first step, the time for ultrasonic cleaning by using absolute ethyl alcohol is 30min.
4. The hobbing cutter coating process of claim 1, wherein: in the second step, a mechanical pump and a rough pumping valve are used for rough pumping of the coating cavity, meanwhile, a molecular pump is started for acceleration, and a gate valve is closed; when the vacuum degree reaches 2.9Pa, a front-stage valve and a gate valve are opened for fine pumping.
5. The hobbing cutter coating process of claim 1, wherein: in the second step, the vacuum degree of the vacuum is 2 x 10 -2 Pa～7*10 -2 Pa。
6. The hobbing cutter coating process of claim 1, wherein: in the fourth step, the argon flow is 60-100 sccm, and the vacuum degree is 3 x 10 -2 Pa～5*10 -2 Pa, the bias voltage of the filament power supply is 50-900V, gradually increasing or stepwise increasing, and the cleaning time is 30min.
7. The hobbing cutter coating process of claim 1, wherein: in the fifth step, the nitrogen flow is 60-100 sccm, and the vacuum degree is 3 × 10 -2 Pa～5*10 -2 Pa, the target material is one of Cr or Ti, the arc current is 60-100A, and the bias voltage is 500-800V.
8. The hobbing cutter coating process of claim 1, wherein: in the fifth step, the thickness of the plating bonding layer is 30-50 nm.
9. The coating process of claim 1, wherein in step six, the step of plating the functional layer comprises the steps of: mounting a CrAlB target and a CrAlSiW target, setting the nitrogen flow at 100-300 sccm, stabilizing the vacuum degree at 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame at 1-2 hz, simultaneously starting all evaporation sources, controlling the current at 120-180A, alternately depositing in the multilayer film, wherein the sum of the thickness of the CrAlBN nano layer and the thickness of the CrAlSiWN nano layer is less than or equal to 100nm, optimally 10-30nm, and the ratio of the thickness of the CrAlBN nano layer to the thickness of the CrAlSiWN nano layer is not more than 2.
10. The coating process of claim 1, wherein in step six, the step of plating the functional layer comprises the steps of: mounting a CrAlB target and a CrAlSiW target, setting the nitrogen flow at 100-300 sccm, stabilizing the vacuum degree at 2.5-4 Pa, setting the rotating speed frequency of a workpiece frame at 1-2 hz, starting the CrAlB evaporation source, then closing the CrAlB evaporation source, starting the CrAlSiW evaporation source, alternately depositing for 5-15 times, alternately depositing CrAlBN nano-layer thickness and the sum of CrAlSiWN nano-layer thickness in a multilayer film to be less than or equal to 100nm, and setting the ratio of the CrAlBN nano-layer thickness to the CrAlSiWN nano-layer thickness to be not more than 2.
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102922052A (en) * | 2012-09-28 | 2013-02-13 | 武汉大学 | AlTiN-AlCrN super hard nano multilayer composite coating hob and preparation method thereof |
| CN104508171A (en) * | 2012-04-16 | 2015-04-08 | 欧瑞康贸易股份公司(特吕巴赫) | High performance tools exhibiting reduced crater wear in particular by dry machining operations |
| CN108690956A (en) * | 2018-04-28 | 2018-10-23 | 广东工业大学 | Arc ion plating-magnetron sputtering composite deposition high-temperature wearable antifriction AlTiN nano laminated coatings and its preparation method and application |
| CN108754415A (en) * | 2018-04-28 | 2018-11-06 | 广东工业大学 | A kind of periodic multilayer nanostructure AlTiN/AlCrSiN hard coats and its preparation method and application |
| CN110042350A (en) * | 2019-03-05 | 2019-07-23 | 科汇纳米技术（深圳）有限公司 | A kind of multi-layer nano compound tool coating and preparation method thereof |
| CN210596234U (en) * | 2019-07-31 | 2020-05-22 | 江苏苏德涂层有限公司 | PVD (physical vapor deposition) coating drill bit |
| CN111690901A (en) * | 2020-07-22 | 2020-09-22 | 常州夸克涂层科技有限公司 | TiAlSiN gradient hard coating and preparation method thereof |
| CN111690900A (en) * | 2020-07-22 | 2020-09-22 | 常州夸克涂层科技有限公司 | TiAlSiN symmetrical multi-gradient hard coating and preparation method thereof |
| CN112359327A (en) * | 2020-10-29 | 2021-02-12 | 国宏工具系统（无锡）股份有限公司 | Preparation method of titanium alloy cutting tool coating, coating and tool |
| CN113564539A (en) * | 2021-07-15 | 2021-10-29 | 科汇工业机械有限公司 | Nitride coating preparation method, nitride coating and application thereof |
-
2022
- 2022-12-26 CN CN202211674806.XA patent/CN115747718A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104508171A (en) * | 2012-04-16 | 2015-04-08 | 欧瑞康贸易股份公司(特吕巴赫) | High performance tools exhibiting reduced crater wear in particular by dry machining operations |
| CN102922052A (en) * | 2012-09-28 | 2013-02-13 | 武汉大学 | AlTiN-AlCrN super hard nano multilayer composite coating hob and preparation method thereof |
| CN108690956A (en) * | 2018-04-28 | 2018-10-23 | 广东工业大学 | Arc ion plating-magnetron sputtering composite deposition high-temperature wearable antifriction AlTiN nano laminated coatings and its preparation method and application |
| CN108754415A (en) * | 2018-04-28 | 2018-11-06 | 广东工业大学 | A kind of periodic multilayer nanostructure AlTiN/AlCrSiN hard coats and its preparation method and application |
| CN110042350A (en) * | 2019-03-05 | 2019-07-23 | 科汇纳米技术（深圳）有限公司 | A kind of multi-layer nano compound tool coating and preparation method thereof |
| CN210596234U (en) * | 2019-07-31 | 2020-05-22 | 江苏苏德涂层有限公司 | PVD (physical vapor deposition) coating drill bit |
| CN111690901A (en) * | 2020-07-22 | 2020-09-22 | 常州夸克涂层科技有限公司 | TiAlSiN gradient hard coating and preparation method thereof |
| CN111690900A (en) * | 2020-07-22 | 2020-09-22 | 常州夸克涂层科技有限公司 | TiAlSiN symmetrical multi-gradient hard coating and preparation method thereof |
| CN112359327A (en) * | 2020-10-29 | 2021-02-12 | 国宏工具系统（无锡）股份有限公司 | Preparation method of titanium alloy cutting tool coating, coating and tool |
| CN113564539A (en) * | 2021-07-15 | 2021-10-29 | 科汇工业机械有限公司 | Nitride coating preparation method, nitride coating and application thereof |
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