CN110527957A - A kind of aluminium chromium-boron alloy target and preparation method thereof - Google Patents
A kind of aluminium chromium-boron alloy target and preparation method thereof Download PDFInfo
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- CN110527957A CN110527957A CN201910766038.2A CN201910766038A CN110527957A CN 110527957 A CN110527957 A CN 110527957A CN 201910766038 A CN201910766038 A CN 201910766038A CN 110527957 A CN110527957 A CN 110527957A
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0408—Light metal alloys
- C22C1/0416—Aluminium-based alloys
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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Abstract
The present invention provides a kind of aluminium chromium-boron alloy targets, and with atomic percentage, ingredient includes aluminium 30-80at%, chromium 10-50%, boron 5-30at%.The present invention also provides a kind of preparation method of aluminium chromium-boron alloy target, step includes: to mix aluminium powder and boron powder under vacuum or high-purity argon gas protective condition；Powder sintered by mixing obtains aluminum-boron alloy block；Aluminum-boron alloy block is broken into aluminum-boron alloy powder；Chromium powder and aluminum-boron alloy powder are mixed under vacuum or high-purity argon gas protective condition, isostatic cool pressing suppresses to obtain metal blocks again；Metal blocks are fitted into jacket after degassing process the sintering compacting in hot isostatic apparatus and obtain alloy ingot blank；Finally alloy ingot blank is machined, cleans to obtain finished product target.Aluminium chromium-boron alloy target produced by the present invention, compactness is good, pore-free, without it is loose and segregation, ingredient is uniform, and crystal grain is tiny, and specification is big.
Description
Technical field
The present invention relates to target material technical field, in particular to a kind of aluminium chromium-boron alloy target and preparation method thereof.
Background technique
Hard coat is an important kind in protective coating, plays increasingly important role.By ganoine thin film
Material is sputtered at metal cutting tool surface, has adapted to modern manufacturing industry to the requirements at the higher level of metal cutting tool.
TiAlN thin film is successfully applied on cutter from u s company, the research work of transition metal nitride ganoine thin film is
Carried out nearly 40 years, experienced by simple binary nitride film to tri compound film, then to multiple elements design film and
The development process of plural layers.
Rapid development with modern manufacturing industry and the requirements at the higher level to cutting speed, single TiAlN thin film is not
Industrial requirement is adapted to, in order to improve the oxidation resistance of film and corrosive power and further improve its hardness,
Other elements are added in people in TiN, and the use or addition of these elements form solution strengthening or there are the second phase, improve
The mechanical performance of film layer.In order to solve the problems, such as that TiAlN thin film oxidation resistance temperature is too low, people add Al wherein, form TiAlN
Film, oxidation resistance temperature reach 800 DEG C.The antioxygenic property ratio TiN of CrN is superior, then adds Al into CrN and is expected into one
Step improves antioxygenic property, and the oxidation resistance temperature of discovery CrAlN film reaches 900 DEG C.
By experiment, B alloying element is added in CrAlN coating, can further increase the mechanical performance of film layer for discovery
And cutter life, B are added in Cr-Al-N film layer, form Al-Cr-B-N nano composite structure, it is brilliant comprising Al-Cr- (B)-N
Body phase and amorphous BNx phase, such a construction increases the hardness of film layer, improve the binding force of grain boundary, reduce film layer
Residual stress.
The method for being able to produce aluminium chromium-boron alloy target at present mainly has the methods of vacuum melting casting and hot pressing.Using vacuum
When melting casting method manufactures aluminium chromium-boron alloy target, the fusing point of boron is up to 2180 DEG C, density 2.34g/cm3, and three kinds of alloys are molten
Point and density all difference are bigger, and vacuum melting causes product to be processed it is difficult to ensure that product is uniform, and generates a variety of brittlement phases
It is easy cracking.When manufacturing aluminium chromium boron target using pressure sintering, target production is difficult to realize in large size while close inside hot pressing target
Degree is unevenly distributed, and middle part and marginal density difference are up to 5%, it is difficult to obtain the highdensity target of high quality.
Summary of the invention
It is good that technical problem to be solved by the invention is to provide a kind of compactness, pore-free, without loose and segregation, and ingredient is equal
Even, crystal grain is tiny, the big aluminium chromium-boron alloy target and preparation method thereof of specification.
In order to solve the above technical problems, the present invention provides a kind of aluminium chromium-boron alloy target, with atomic percentage, at
Divide includes aluminium 30-80at%, chromium 10-50%, boron 5-30at%.
The present invention also provides a kind of preparation methods of aluminium chromium-boron alloy target, include the following steps:
Aluminium powder and boron powder are mixed under vacuum or high-purity argon gas protective condition；
It is sintered uniformly mixed aluminium boron mixed-powder to obtain aluminum-boron alloy block；
Aluminum-boron alloy block is broken into aluminum-boron alloy powder；
Chromium powder and aluminum-boron alloy powder are mixed under vacuum or high-purity argon gas protective condition；
The mixed-powder isostatic cool pressing of uniformly mixed chromium powder and aluminum-boron alloy powder is suppressed into obtain metal blocks；
The metal blocks are fitted into degassing process in jacket；
It suppresses HIP sintering after the jacket soldering and sealing of degassing process to obtain alloy ingot blank；
By alloy ingot blank machining, finished product target is cleaned to obtain, for the target with atomic percentage, ingredient includes aluminium
30-80at%, chromium 10-50%, boron 5-30at%.
Further, the purity of the aluminium powder is 99.5% or more, average grain diameter in 10-30um, the purity of the boron powder
It is 99.5% or more, average grain diameter in 10-15um, the purity of the chromium powder is 99.5% or more, and average grain diameter is in 45-106um.
Further, the sintering method of the aluminium boron mixed-powder includes that aluminium boron mixed-powder is packed into vacuum sintering furnace,
1200-1600 DEG C are warming up to, heating rate control keeps the temperature 3-5h, be finally cooled to room temperature with furnace in 100-150 DEG C/h.
Further, the mixing of the mixing of the aluminium powder and boron powder and chromium powder and aluminum-boron alloy powder is in V-type mixing
4-6h is mixed in machine or three-dimensional material mixer.
Further, the aluminum-boron alloy block is broken into the aluminum-boron alloy powder of 150um-45um.
Further, the isostatic cool pressing compacting of the mixed-powder of the chromium powder and aluminum-boron alloy powder is in isostatic cool pressing mould
It is suppressed in tool, pressure 20-100MPa, dwell time 10-30min.
Further, the degassing process method of the metal blocks includes that first metal blocks are processed into and are made ready beforehand for
Metal blocks, are then fitted into the jacket by the matched shape in jacket inner cavity, then the jacket is placed in degasification furnace to gold
Belong to block degassing process, degassing temperature is 300-500 DEG C, degassing time 4h-10h.
Further, HIP sintering compacting includes that the jacket soldering and sealing equipped with metal blocks is placed on heat etc. is quiet
It presses to be sintered metal blocks in equipment and suppress, holding temperature is 400-600 DEG C, time 2-5h, pressure 120-150MPa.
A kind of aluminium chromium-boron alloy target provided by the invention and preparation method thereof, aluminium chromium-boron alloy target have consistency
The advantages that high, pore-free and segregation, even tissue, crystal grain is tiny, and specification is more.Its relative density is greater than 99%, average hole
Gap rate is lower than 1%；Ingredient is uniform, and target average grain size is less than 150um, and monolithic maximum length is up to 1800mm.
Detailed description of the invention
Fig. 1 is the flow chart of aluminium chromium-boron alloy target preparation method provided in an embodiment of the present invention.
Specific embodiment
A kind of aluminium chromium-boron alloy target provided in an embodiment of the present invention, with atomic percentage, ingredient includes aluminium 30-
80at%, chromium 10-50%, boron 5-30at%.
Referring to Fig. 1, the present invention also provides a kind of aluminium chromium-boron alloy target preparation method, include the following steps:
The preparation of step 1) powder: aluminium powder and purity of the purity for 99.5% or more, average grain diameter in 10-30um is used to be
99.5% or more, the boron powder of average grain diameter 10-15um mixes 4-6h in V-type batch mixer or three-dimensional material mixer by proper proportion,
Mixing process is under vacuum or high-purity argon gas protective condition into prevent powder raw material in mixing process to be oxidized.
Step 2) sintering: being packed into vacuum sintering furnace for uniformly mixed aluminium boron mixed-powder, be warming up to 1200-1600 DEG C,
Heating rate control keeps the temperature 3-5h, is then cooled to room temperature with furnace, obtains aluminum-boron alloy block in 100-150 DEG C/h.
Step 3) is crushed powder processed: the aluminum-boron alloy block sintered being carried out to be crushed powder processed, is broken into the aluminium of 150um-45um
Boron alloy powder.
Step 4) mixes powder: using the purity for 99.5% or more, chromium powder and 45-150um of the average grain diameter in 45-106um
Aluminum-boron alloy powder mixes 4-6h by proper proportion in V-type batch mixer or three-dimensional material mixer, and mixing process is in vacuum or high-purity
It is carried out under argon gas protective condition, powder raw material in mixing process is prevented to be oxidized.
Step 5) molding: the powder mixed is fitted into cold isostatic mould, is carried out under 20-100MPa pressure cold etc.
Static pressure suppression, dwell time 10-30min, obtains metal blocks.
Step 6) degassing: then the matched shape in jacket inner cavity that gained metal blocks are processed into and are made ready beforehand for will
Metal blocks are fitted into jacket, then jacket is placed in degasification furnace to metal blocks degassing process, degassing temperature 300-500
DEG C, degassing time is changed according to filling amount difference between 4h-10h.
Step 7) HIP sintering: it will be put into hot isostatic apparatus after the jacket soldering and sealing that finishes of degassing in jacket
Metal blocks are sintered compacting, and holding temperature is 400-600 DEG C, time 2-5h, pressure 120-150MPa and finally obtains alloy
Ingot blank.
Step 8) processing: the alloy ingot blank of sintering compression moulding is machined out according to drawing, needed for being obtained after cleaning
The finished product target wanted, for gained target with atomic percentage, ingredient includes aluminium 30-80at%, chromium 10-50%, boron 5-30at%.
It is illustrated below by preparation method of the embodiment to aluminium chromium-boron alloy target provided by the invention.
Embodiment 1
Aluminium chromium-boron alloy target provided in an embodiment of the present invention is made of the raw material of following atomic percent: aluminium 60%, chromium
30%, boron 10%.Preparation method includes the following steps:
Weigh that purity is 99.5%, average grain diameter is 10 μm of boron powder and purity is 99.5%, average grain diameter is 30um's
Aluminium powder, according to aluminium powder: boron powder=15:1wt% mass ratio ingredient mixes 4 hours in three-dimensional material mixer, in mixed process
High-purity argon gas is poured to be protected.
The powder mixed is packed into vacuum sintering furnace, 1400 DEG C of temperature, keeps the temperature 2h.
The aluminum-boron alloy block sintered is crushed, ball milling, 100 mesh powder are made.
Purity 99.5%, average grain diameter are weighed in the chromium powder of 106um and the aluminium boron powder of 100 mesh, according to chromium powder: aluminium boron powder
The mass ratio ingredient of=0.9:1wt% mixes 4h in three-dimensional material mixer, is filled with high-purity argon gas in mixed process and is protected
Shield.
The powder mixed is fitted into cold isostatic compaction mould, isostatic cool pressing pressure 100MPa pressure maintaining 10 minutes, is obtained
To metal blocks.
Metal blocks are processed into shape identical with low-carbon steel or stainless steel jacket inner cavity, are then packed into metal blocks
In low-carbon steel or stainless steel jacket, jacket is placed in degasification furnace and is deaerated to metal blocks, 350 DEG C of heating temperature, vacuum degree
2x10-2Pa, soaking time 8h.
It will be put into hot isostatic apparatus to the metal blocks sintering compacting in jacket, protect after the jacket soldering and sealing that finishes of degassing
Temperature is 450 DEG C, time 3h, pressure 120MPa and obtains alloy ingot blank.
The alloy ingot blank of sintering compression moulding is machined out according to drawing finally, required finished product is obtained after cleaning
Target, gained target include aluminium 60%, chromium 30%, boron 10% with atomic percentage.
The target relative density that the present embodiment obtains reaches 99.2%, and 110 μm of average grain size.
Embodiment 2
Aluminium chromium-boron alloy target provided in an embodiment of the present invention is made of the raw material of following atomic percent: aluminium 52%, chromium
28%, boron 20%.Preparation method includes the following steps:
Weigh that purity is 99.5%, average grain diameter is 10 μm of boron powder and purity is 99.5%, average grain diameter is in 20um aluminium
Powder, according to aluminium powder: boron powder=6.5:1wt% mass ratio ingredient mixes 4 hours in three-dimensional material mixer, rushes in mixed process
Enter high-purity argon gas to be protected.
The powder mixed is packed into vacuum sintering furnace, 1300 DEG C of temperature, keeps the temperature 3h.
The aluminum-boron alloy block sintered is crushed, ball milling, 100 mesh powder are made.
Purity 99.5%, average grain diameter are weighed in the chromium powder of 75um and the aluminium boron powder of 100 mesh, according to chromium powder: aluminium boron powder=
The mass ratio ingredient of 0.9:1wt% mixes 4h in three-dimensional material mixer, is filled with high-purity argon gas in mixed process and is protected.
The powder mixed is fitted into cold isostatic compaction mould, isostatic cool pressing pressure 100MPa pressure maintaining 10 minutes, is obtained
To metal blocks.
Metal blocks are processed into shape identical with fine aluminium jacket inner cavity, metal blocks are then packed into fine aluminium jacket
In, jacket is placed in degasification furnace and is deaerated to metal blocks, 350 DEG C of heating temperature, vacuum degree 2x10-2Pa, soaking time 8h.
It will be put into hot isostatic apparatus to the metal blocks sintering compacting in jacket, protect after the jacket soldering and sealing that finishes of degassing
Temperature is 550 DEG C, time 3h, pressure 130MPa and obtains alloy ingot blank.
The alloy ingot blank of sintering compression moulding is machined out according to drawing finally, required finished product is obtained after cleaning
Target, gained target include aluminium 52%, chromium 28%, boron 20% with atomic percentage.
The target relative density that the present embodiment obtains reaches 99.7%, and 100 μm of average grain size.
Embodiment 3
Aluminium chromium-boron alloy target provided in an embodiment of the present invention is made of the raw material of following atomic percent: aluminium 45%, chromium
25%, boron 30%.Preparation method includes the following steps:
It in 10 μm of boron powder and purity is 99.5%, average grain diameter 15um's that weigh purity, which be 99.5%, average grain diameter,
Aluminium powder, according to aluminium powder: boron powder=3.7:1wt% mass ratio ingredient mixes 4 hours, mixed process in three-dimensional material mixer
In pour high-purity argon gas and protected.
The powder mixed is packed into vacuum sintering furnace, 1200 DEG C of temperature, keeps the temperature 4h.
The aluminum-boron alloy block sintered is crushed, ball milling, 100 mesh powder are made.
Purity 99.5%, average grain diameter are weighed in the chromium powder of 45um and the aluminium boron powder of 100 mesh, according to chromium powder: aluminium boron powder=
The mass ratio ingredient of 0.84:1wt% mixes 4h in three-dimensional material mixer, is filled with high-purity argon gas in mixed process and is protected.
The powder mixed is fitted into cold isostatic compaction mould, isostatic cool pressing pressure 100MPa pressure maintaining 10 minutes, is obtained
To metallized metal block.
Metal blocks are processed into shape identical with fine aluminium jacket inner cavity, metal blocks are then packed into fine aluminium jacket
In, jacket is placed in degasification furnace and is deaerated to metal blocks, 350 DEG C of heating temperature, vacuum degree 2x10-2Pa, soaking time 8h.
It will be put into hot isostatic apparatus to the metal blocks sintering compacting in jacket, protect after the jacket soldering and sealing that finishes of degassing
Temperature is 600 DEG C, time 3h, pressure 140MPa and obtains alloy ingot blank.
The alloy ingot blank of sintering compression moulding is machined out according to drawing finally, required finished product is obtained after cleaning
Target, gained target include aluminium 45%, chromium 25%, boron 30% with atomic percentage.
The target relative density that the present embodiment obtains reaches 99.8%, and 60 μm of average grain size.
It should be noted last that the above specific embodiment is only used to illustrate the technical scheme of the present invention and not to limit it,
Although being described the invention in detail referring to example, those skilled in the art should understand that, it can be to the present invention
Technical solution be modified or replaced equivalently, without departing from the spirit and scope of the technical solution of the present invention, should all cover
In the scope of the claims of the present invention.
Claims (9)
1. a kind of aluminium chromium-boron alloy target, it is characterised in that: with atomic percentage, ingredient includes aluminium 30-80at%, chromium 10
- 50%, boron 5-30at%.
2. a kind of preparation method of aluminium chromium-boron alloy target described in claim 1, which comprises the steps of:
Aluminium powder and boron powder are mixed under vacuum or high-purity argon gas protective condition；
It is sintered uniformly mixed aluminium boron mixed-powder to obtain aluminum-boron alloy block；
Aluminum-boron alloy block is broken into aluminum-boron alloy powder；
Chromium powder and aluminum-boron alloy powder are mixed under vacuum or high-purity argon gas protective condition；
The mixed-powder isostatic cool pressing of uniformly mixed chromium powder and aluminum-boron alloy powder is suppressed into obtain metal blocks；
The metal blocks are fitted into degassing process in jacket；
It suppresses HIP sintering after the jacket soldering and sealing of degassing process to obtain alloy ingot blank；
By alloy ingot blank machining, finished product target is cleaned to obtain, for the target with atomic percentage, ingredient includes aluminium 30-
80at%, chromium 10-50%, boron 5-30at%.
3. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the purity of the aluminium powder is
99.5% or more, average grain diameter is 99.5% or more, average grain diameter in 10-15um, institute in 10-30um, the purity of the boron powder
The purity for stating chromium powder is 99.5% or more, and average grain diameter is in 45-106um.
4. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the aluminium boron mixed-powder
Sintering method include that aluminium boron mixed-powder is packed into vacuum sintering furnace, be warming up to 1200-1600 DEG C, heating rate control exists
100-150 DEG C/h, 3-5h are kept the temperature, are finally cooled to room temperature with furnace.
5. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the aluminium powder and boron powder
Mixing and the mixing of chromium powder and aluminum-boron alloy powder are to mix 4-6h in V-type batch mixer or three-dimensional material mixer.
6. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the aluminum-boron alloy block is broken
It is broken into the aluminum-boron alloy powder of 150um -45um.
7. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the chromium powder and aluminium boron close
The isostatic cool pressing compacting of the mixed-powder at bronze end is suppressed in cold isostatic mould, pressure 20-100MPa, the dwell time
10-30min。
8. the preparation method of aluminium chromium-boron alloy target according to claim 2, it is characterised in that: the metal blocks take off
Gas disposal method includes the matched shape in jacket inner cavity that first metal blocks are processed into and are made ready beforehand for, then by metal blocks
It is fitted into the jacket, then the jacket is placed in degasification furnace to metal blocks degassing process, degassing temperature 300-500
DEG C, degassing time 4h-10h.
9. the preparation method of aluminium chromium-boron alloy target according to claim 8, it is characterised in that: the HIP sintering
Compacting includes that the jacket soldering and sealing equipped with metal blocks is placed in hot isostatic apparatus to be sintered metal blocks to suppress, heat preservation temperature
Degree is 400-600 DEG C, time 2-5h, pressure 120-150MPa.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020475A (en) * | 2019-12-16 | 2020-04-17 | 苏州星蓝纳米技术有限公司 | Novel AT coating |
| CN111304610A (en) * | 2020-03-19 | 2020-06-19 | 河北宏靶科技有限公司 | Titanium-silicon-molybdenum alloy target material and preparation method thereof |
| CN111394705A (en) * | 2020-03-19 | 2020-07-10 | 河北宏靶科技有限公司 | Titanium-aluminum-molybdenum alloy target material and preparation method thereof |
| CN114262872A (en) * | 2021-12-31 | 2022-04-01 | 北京安泰六九新材料科技有限公司 | Chromium-aluminum-boron alloy composite target material and preparation method thereof |
| CN114318257A (en) * | 2021-12-31 | 2022-04-12 | 北京安泰六九新材料科技有限公司 | Preparation method of aluminum-based powder alloy target |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1348776A1 (en) * | 2002-03-29 | 2003-10-01 | Kabushiki Kaisha Kobe Seiko Sho | Target for arc ion plating and method of manufacturing the same |
| CN100351424C (en) * | 2002-07-23 | 2007-11-28 | 黑罗伊斯有限公司 | Fabrication of B/C/N/O/Si doped sputtering targets |
| CN102806353A (en) * | 2012-08-17 | 2012-12-05 | 苏州晶纯新材料有限公司 | Production method of molybdenum alloy tube target |
| WO2013156131A1 (en) * | 2012-04-16 | 2013-10-24 | Oerlikon Trading Ag, Trübbach | High performance tools exhibiting reduced crater wear in particular by dry machining operations |
| CN104416156A (en) * | 2013-09-11 | 2015-03-18 | 安泰科技股份有限公司 | Chromium-aluminum alloy target and preparation method thereof |
| CN104451277A (en) * | 2014-12-30 | 2015-03-25 | 山东昊轩电子陶瓷材料有限公司 | Chromium-aluminum alloy target and manufacturing method thereof |
| CN105331939A (en) * | 2014-08-15 | 2016-02-17 | 安泰科技股份有限公司 | Silicon-alloy-containing target material and preparation method thereof |
| CN105925865A (en) * | 2016-06-07 | 2016-09-07 | 安泰科技股份有限公司 | Boron-containing alloy target material and preparation method thereof |
-
2019
- 2019-08-19 CN CN201910766038.2A patent/CN110527957A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1348776A1 (en) * | 2002-03-29 | 2003-10-01 | Kabushiki Kaisha Kobe Seiko Sho | Target for arc ion plating and method of manufacturing the same |
| CN100351424C (en) * | 2002-07-23 | 2007-11-28 | 黑罗伊斯有限公司 | Fabrication of B/C/N/O/Si doped sputtering targets |
| WO2013156131A1 (en) * | 2012-04-16 | 2013-10-24 | Oerlikon Trading Ag, Trübbach | High performance tools exhibiting reduced crater wear in particular by dry machining operations |
| CN102806353A (en) * | 2012-08-17 | 2012-12-05 | 苏州晶纯新材料有限公司 | Production method of molybdenum alloy tube target |
| CN104416156A (en) * | 2013-09-11 | 2015-03-18 | 安泰科技股份有限公司 | Chromium-aluminum alloy target and preparation method thereof |
| CN105331939A (en) * | 2014-08-15 | 2016-02-17 | 安泰科技股份有限公司 | Silicon-alloy-containing target material and preparation method thereof |
| CN104451277A (en) * | 2014-12-30 | 2015-03-25 | 山东昊轩电子陶瓷材料有限公司 | Chromium-aluminum alloy target and manufacturing method thereof |
| CN105925865A (en) * | 2016-06-07 | 2016-09-07 | 安泰科技股份有限公司 | Boron-containing alloy target material and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 陈文革等编著: "《粉末冶金工艺及材料》", 31 July 2011 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111020475A (en) * | 2019-12-16 | 2020-04-17 | 苏州星蓝纳米技术有限公司 | Novel AT coating |
| CN111304610A (en) * | 2020-03-19 | 2020-06-19 | 河北宏靶科技有限公司 | Titanium-silicon-molybdenum alloy target material and preparation method thereof |
| CN111394705A (en) * | 2020-03-19 | 2020-07-10 | 河北宏靶科技有限公司 | Titanium-aluminum-molybdenum alloy target material and preparation method thereof |
| CN114262872A (en) * | 2021-12-31 | 2022-04-01 | 北京安泰六九新材料科技有限公司 | Chromium-aluminum-boron alloy composite target material and preparation method thereof |
| CN114318257A (en) * | 2021-12-31 | 2022-04-12 | 北京安泰六九新材料科技有限公司 | Preparation method of aluminum-based powder alloy target |
| CN114262872B (en) * | 2021-12-31 | 2024-03-08 | 北京安泰六九新材料科技有限公司 | Chromium-aluminum-boron alloy composite target material and preparation method thereof |
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