JP2860064B2 - Method for producing Ti-Al alloy target material - Google Patents
Method for producing Ti-Al alloy target materialInfo
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- JP2860064B2 JP2860064B2 JP27829794A JP27829794A JP2860064B2 JP 2860064 B2 JP2860064 B2 JP 2860064B2 JP 27829794 A JP27829794 A JP 27829794A JP 27829794 A JP27829794 A JP 27829794A JP 2860064 B2 JP2860064 B2 JP 2860064B2
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、耐摩耗性及び耐酸化性
が優れた薄膜を、切削工具又は摺動部品等にコーティン
グする際に使用されるＴｉ−Ａｌ合金ターゲット材の製
造方法に関するBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a Ti-Al alloy target material used for coating a thin film having excellent wear resistance and oxidation resistance on a cutting tool or a sliding part.
【０００２】[0002]
【従来の技術】Ｔｉ−Ａｌ系合金を使用したターゲット
材は、従来、溶解法と粉末法により製造されている。溶
解法は組成が均一であるが、凝固時に引け巣が発生しや
すく、また焼結時に割れが生じやすいという問題点があ
り、更に歩留まりが悪い。また、この溶解法により得ら
れたターゲット材は、切削性も悪く、加工費が高くなる
ことから、高級品にしか適用できない。2. Description of the Related Art A target material using a Ti-Al alloy has been conventionally produced by a melting method and a powder method. Although the melting method has a uniform composition, it has a problem that shrinkage cavities are easily generated during solidification and cracks are easily generated during sintering, and the yield is further poor. Further, the target material obtained by this melting method has poor machinability and requires high processing cost, and therefore can be applied only to high-grade products.
【０００３】一方、粉末ターゲットは合金粉を用いる場
合と、金属粉を用いる場合の二通りがある。合金粉を利
用する場合は、溶解材と同様の問題があり、焼結時に割
れが発生する。また、使用中に発生する熱応力によって
も割れが発生し、トラブルの原因となっている。On the other hand, there are two types of powder targets, one using alloy powder and the other using metal powder. When an alloy powder is used, there is a problem similar to that of a molten material, and cracks occur during sintering. In addition, cracks are also generated due to thermal stress generated during use, which causes trouble.
【０００４】また、金属粉末同士を混合し、これを原料
としてターゲットを製造する方法は、組成の均一性に問
題があること、密度が低く、かけやすい等の問題点があ
る。このため、近時、ターゲット材の製造には、溶解法
か、合金粉末を使用した粉末法が使用されている。[0004] In addition, the method of producing a target by mixing metal powders with each other as a raw material has problems such as a problem in uniformity of composition, a low density, and easy application. For this reason, in recent years, a melting method or a powder method using an alloy powder has been used for manufacturing a target material.
【０００５】なお、これらの粉末法によりターゲット材
を製造する場合には、粉末を冷間静水圧加圧処理（ＣＩ
Ｐ）した後、熱間圧延（ホットプレスＨＰ）するか、又
はＣＩＰ処理した後、熱間静水圧加圧処理（ＨＩＰ）す
る。When a target material is manufactured by these powder methods, the powder is subjected to cold isostatic pressing (CI
After P), hot rolling (hot press HP) or CIP processing and then hot isostatic pressing (HIP) are performed.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前述の
如く、この溶解法及び合金粉末を使用した粉末法は、タ
ーゲット材料費が製品一個当たりに占める割合が高くな
ることから、その使用が高級品に限定されている。However, as described above, in the melting method and the powder method using the alloy powder, the target material cost occupies a high percentage of each product, so that its use is limited to high-grade products. Limited.
【０００７】また、金属粉末を混合したものを原料とす
る場合には、前述の如く、組成の均一性が悪いと共に、
密度が低く、かけやすい等の問題点がある。[0007] When a mixture of metal powders is used as a raw material, the composition is not uniform as described above,
There are problems such as low density and easy application.
【０００８】更に、従来のように、ＣＩＰ＋ＨＰ又はＣ
ＩＰ＋ＨＰで焼結した場合、この方法では、ＣＩＰの状
態でほぼ密度が決定されてしまい、ターゲット材の高密
度化が達成できない。このため、従来のターゲット材は
密度が低いことから、水を通して使用中に異常放電が発
生したりすることがあり、そうすると成膜ができなくな
る。このため、従来のターゲット材は銅基盤にボンディ
ングすることにより使用しており、このため交換頻度が
多いと共に、ターゲットの使用効率が低いという欠点を
有する。Further, as in the prior art, CIP + HP or C
In the case of sintering by IP + HP, according to this method, the density is almost determined in the state of CIP, and it is not possible to achieve a high density of the target material. For this reason, since the density of the conventional target material is low, abnormal discharge may occur during use through water, and film formation cannot be performed. For this reason, the conventional target material is used by bonding it to a copper substrate, which has the disadvantage that the replacement frequency is high and the use efficiency of the target is low.
【０００９】本発明はかかる問題点に鑑みてなされたも
のであって、金属粉末を使用した場合にも均一な組成が
得られ、密度が高く、かけやすいという欠点が解消され
たＴｉ−Ａｌ合金ターゲット材を提供することを目的と
する。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and a uniform composition can be obtained even when a metal powder is used. The purpose is to provide a target material.
【００１０】[0010]
【課題を解決するための手段】本発明に係るＴｉ−Ａｌ
合金ターゲット材は、Ｔｉを３０〜７０原子％含有する
Ｔｉ−Ａｌ合金ターゲット材を製造する方法において、
１００メッシュ以下のＴｉ粉末と２４０メッシュ以下の
Ａｌ又はＡｌ合金粉末とを混合したものであって、且
つ、Ｔｉ粉末の平均粒径がＡｌ又はＡｌ合金粉末の平均
粒径の１．６倍を超え、２．４倍以下であるものを原料
とすることを特徴とする。SUMMARY OF THE INVENTION According to the present invention, there is provided a Ti-Al alloy.
In the method for producing a Ti—Al alloy target material containing 30 to 70 atomic% of Ti,
It is a mixture of 100 mesh or less of Ti powder and 240 mesh or less of Al or Al alloy powder,且
The average particle size of Ti powder is the average of Al or Al alloy powder.
It is characterized in that the raw material has a particle diameter of more than 1.6 times and not more than 2.4 times .
【００１１】この場合に、前記原料粉末に前記Ｔｉ粉末
及びＡｌ粉末の外に、Ｓｉ、Ｂ、Ｎｂ、Ｃｒ、Ｙ及びＣ
ｅからなる群から選択された少なくとも１種の第３元素
の粉末を１０原子％以下添加することにより、それを使
用して形成したコーティング膜の性能を更に一層向上さ
せることができる。In this case, in addition to the Ti powder and the Al powder, Si, B, Nb, Cr, Y and C are added to the raw material powder.
By adding 10 atomic% or less of at least one third element powder selected from the group consisting of e, the performance of a coating film formed using the same can be further improved.
【００１２】本発明においては、上記原料粉末を混合し
た後、これを蛇腹カプセルに充填し、温度が５００〜６
００℃、圧力が７００ｋｇｆ／ｃｍ2以上の条件で熱間
静水圧加圧処理を行うことにより、ターゲット材を得る
ことができる。In the present invention, after mixing the above-mentioned raw material powder, it is filled into a bellows capsule, and the temperature is set to 500-6.
The target material can be obtained by performing hot isostatic pressing under conditions of 00 ° C. and a pressure of 700 kgf / cm 2 or more.
【００１３】[0013]
【作用】ターゲット材には、先ず第１に、それを使用し
て形成したコーティング膜の性能を落とさずに、ターゲ
ット材の製造コストを低減することが要求される。ま
た、そのコーティング膜の性能を更に向上するために、
第３元素を添加することも考慮する必要がある。First, the target material is required to reduce the production cost of the target material without deteriorating the performance of the coating film formed using the target material. Also, in order to further improve the performance of the coating film,
It is also necessary to consider adding a third element.
【００１４】このような観点から、本願発明者は、Ｔｉ
粉末とＡｌ合金粉末との混合粉末又はＴｉ粉末とＡｌ合
金粉末との混合粉末を使用してターゲット材を製造する
方法に着目した。しかし、この原料の適用については、
組成の均質化と高密度化が実用化を阻む要因となってい
る。従来、この金属粉末を混合した粉末が原料粉末とし
て利用されていない主原因はこの組成の均質化及び高密
度化が困難であることに起因する。[0014] From such a viewpoint, the present inventor has proposed that Ti
Attention was paid to a method of manufacturing a target material using a mixed powder of a powder and an Al alloy powder or a mixed powder of a Ti powder and an Al alloy powder. However, regarding the application of this raw material,
The homogenization and high density of the composition are factors that hinder practical application. Conventionally, the main reason why the powder mixed with the metal powder is not used as the raw material powder is that it is difficult to homogenize and increase the density of the composition.
【００１５】組成の均質化が得られない主たる原因は、
両金属粉末は当然に比重が異なり、このため混合条件に
よって組成のばらつきが多いことによる。この組成不均
質に影響する因子として、粉末の形状及び粒度がある
が、本願発明者による実験研究の結果、粉末の形状は組
成の不均一に対して大きな影響はなく、粒度による影響
が大であることが判明した。そこで、この知見に基づ
き、本願発明者が種々実験研究した結果、Ｔｉ粉末の粒
度に比して、Ａｌ又はＡｌ合金粉末の粒度を大きくする
ことにより、組成の不均質を改善することができること
を知見した。The main reasons why the composition cannot be homogenized are:
The specific gravity of the two metal powders is naturally different, and thus the composition varies greatly depending on the mixing conditions. Factors affecting the composition inhomogeneity include the shape and particle size of the powder, but as a result of experimental studies by the present inventors, the shape of the powder has no significant effect on the non-uniformity of the composition, and the effect of the particle size is large. It turned out to be. Therefore, based on this finding, the present inventor has conducted various experimental studies and found that, by increasing the particle size of Al or Al alloy powder as compared with the particle size of Ti powder, it is possible to improve the heterogeneity of the composition. I learned.
【００１６】粉末の粒度は、混合後の焼結工程において
も、その焼結特性に影響する。本発明においてはターゲ
ット材の高密度化も目的の一つであることから、バイン
ダーの役目を果たすＡｌ又はＡｌ合金粉末の粒径を小さ
く抑制した。これは以下の理由による。焼結の温度条件
は低融点であるＡｌ又はＡｌ合金粉末で決まり、焼結温
度が６００℃を超えると、Ａｌ又はＡｌ合金粉末が溶融
してしまう。このため、焼結温度は６００℃以下にする
が、この場合に焼結温度が低い場合でもＨＩＰ処理時に
変形しやすくするために、粒度を細かくする。このた
め、先ず、組成の均質化及び燒結特性の双方の観点か
ら、粒度の最適化を行った。その結果、得られた最適粒
度が、Ａｌ粉末が２４０メッシュ以下、Ｔｉ粉末が１０
０メッシュ以下である。Ａｌ又はＡｌ合金粉末を２４０
メッシュ以下とするのは、焼結性を確保するためであ
る。また、Ｔｉ粉末の粒度を１００メッシュ以下とする
のは、組成の均質化のために、Ｔｉ粉末はＡｌ又はＡｌ
合金粉末の粒度の約２倍の平均粒径を持つことが必要で
あるからである。The particle size of the powder affects the sintering characteristics even in the sintering step after mixing. In the present invention, since one of the objects is to increase the density of the target material, the particle size of the Al or Al alloy powder serving as a binder is suppressed to a small value. This is for the following reason. The sintering temperature condition is determined by the low melting point Al or Al alloy powder. If the sintering temperature exceeds 600 ° C., the Al or Al alloy powder is melted. For this reason, the sintering temperature is set to 600 ° C. or lower. In this case, even when the sintering temperature is low, the particle size is made fine in order to easily deform during the HIP treatment. Therefore, first, the particle size was optimized from the viewpoints of both homogenization of the composition and sintering characteristics. As a result, the obtained optimum particle size was 240 mesh or less for Al powder and 10 for Ti powder.
0 mesh or less. 240 Al or Al alloy powder
The reason why the mesh size is smaller than the mesh size is to secure sinterability. Further, the reason why the particle size of the Ti powder is set to 100 mesh or less is that, for homogenization of the composition, the Ti powder is made of Al or Al.
This is because it is necessary to have an average particle size that is about twice the particle size of the alloy powder.
【００１７】Ｔｉ粉末の隙間をＡｌ粉末で充填し均質化
を得るため、Ａｌ粉末の粒度を小さくする必要がある。
しかし、Ａｌ粉末があまり細か過ぎると充填密度があが
らないこと、Ｔｉ粉末のすき間を埋めることが困難とな
ること等の要因によりかえって不均質な組成となる。こ
のため、Ｔｉ粉末はＡｌ及びＡｌ合金粉末の約２倍の平
均粒径をもつようにした。In order to fill the gaps of the Ti powder with the Al powder and obtain homogeneity, it is necessary to reduce the particle size of the Al powder.
However, if the Al powder is too fine, the composition will be rather heterogeneous due to factors such as a lack of packing density and difficulty in filling the gaps of the Ti powder. For this reason, the Ti powder was made to have an average particle size about twice that of Al and Al alloy powder.
【００１８】Ｔｉ−Ａｌ合金系ターゲット材の組成をＴ
ｉ量が３０〜７０原子％であることに限定したのは、こ
のターゲット材を使用して窒化物膜を形成するに際し、
生成膜の硬さがこの範囲内でＴｉＮ膜よりも著しく高く
なり、耐摩耗性が向上するためである。即ち、本発明の
ターゲット材を使用して形成する膜の性能、即ち、耐摩
耗性を十分なものとするためである。The composition of the Ti—Al alloy target material is T
The reason why the amount of i is limited to 30 to 70 atomic% is that when forming a nitride film using this target material,
This is because the hardness of the resulting film is significantly higher than that of the TiN film within this range, and the wear resistance is improved. That is, the performance of the film formed using the target material of the present invention, that is, the abrasion resistance is made sufficient.
【００１９】また、Ｓｉ、Ｂ、Ｎｂ、Ｃｒ、Ｙ又はＣｅ
等の第３元素の添加は、特にターゲット材の高温での酸
化を防止するのに有効である。これらの元素は単独で、
又は複数種を複合して添加することができるが、その添
加量が総量で１０原子％を超えると、有害層が形成さ
れ、耐摩耗性が劣化する。このため、その添加量の上限
を総量で１０原子％にした。Further, Si, B, Nb, Cr, Y or Ce
Addition of a third element such as is effective in preventing oxidation of the target material at high temperatures. These elements alone,
Alternatively, a plurality of types can be added in combination, but if the total amount exceeds 10 atomic%, a harmful layer is formed, and the wear resistance is deteriorated. For this reason, the upper limit of the amount added is set to 10 atomic% in total.
【００２０】次に、ターゲット材の機械加工時のかけの
問題を回避するために、ターゲット材を高密度化する必
要があるが、このために、温度が５００〜６００℃、圧
力が７００ｋｇｆ／ｃｍ2以上の条件で熱間静水圧加圧
処理を行うことが好ましい。これにより、本発明により
製造されるターゲット材は著しく高密度化される。ＨＩ
Ｐ条件が処理温度：５００〜６００℃、加圧力：７００
ｋｇｆ／ｃｍ2以上であるのは、処理後のターゲット材
の密度を９９％以上にするためである。このようにター
ゲット材が高密度化されると、膜形成に使用した後、タ
ーゲット材を水冷することが可能となり、膜形成後に次
順の膜形成工程を速やかに実施することが可能となり、
膜形成装置の使用効率が向上する。また、ターゲット材
を高密度化することにより、単位時間当たりの積層量で
表す成膜速度が向上する。Next, it is necessary to increase the density of the target material in order to avoid the problem of splintering during the machining of the target material. For this reason, the temperature is 500 to 600 ° C. and the pressure is 700 kgf / cm. It is preferable to perform hot isostatic pressing under two or more conditions. Thereby, the density of the target material manufactured according to the present invention is significantly increased. HI
P condition is processing temperature: 500-600 ° C, pressure: 700
The reason why it is not less than kgf / cm 2 is to make the density of the target material after the treatment 99% or more. When the target material is densified in this way, it is possible to water-cool the target material after using it for film formation, and it is possible to quickly perform the next film forming step after film formation,
The use efficiency of the film forming apparatus is improved. In addition, by increasing the density of the target material, the film forming speed represented by the amount of lamination per unit time is improved.
【００２１】本発明の原料のように、充填密度が低い粉
末を、焼結工程において加圧時に均一に変形させること
は極めて困難である。この課題を解決するために、本発
明は混合粉末を収納するカプセルに蛇腹管を使用した。
ＨＩＰ自体は、本来的に材料に等方的に力を印加する。
しかし、本発明においては、カプセルに蛇腹管を使用す
ることにより、加圧時に混合粉末に一方向の力を付与す
るようにする。これにより、充填密度が低い混合粉末を
焼結工程の加圧時に均一に変形させることができ、得ら
れたターゲット材の形状が均一になる。It is extremely difficult to uniformly deform a powder having a low packing density, such as the raw material of the present invention, when pressurized in the sintering step. In order to solve this problem, the present invention uses a bellows tube as a capsule for storing the mixed powder.
HIP itself inherently applies force to a material.
However, in the present invention, by using a bellows tube for the capsule, a unidirectional force is applied to the mixed powder at the time of pressurization. Thereby, the mixed powder having a low filling density can be uniformly deformed at the time of pressing in the sintering step, and the shape of the obtained target material becomes uniform.
【００２２】[0022]
【実施例】以下、本発明の実施例について説明する。実施例１ ＴｉとＡｌとの組成比が１：１となるターゲット材を製
造した。その製造工程を図１に示す。即ち、２４０メッ
シュのＡｌ粉末と、１００メッシュのＴｉ粉末とを混合
し、この混合粉末を蛇腹管内に充填した。次いで、蛇腹
管内部を脱気した後、ＨＩＰ処理した。このＨＩＰ条件
は、温度：５５０℃、圧力：１５００ｋｇｆ／ｃｍ2、
保持時間：３時間である。ＨＩＰ処理後、切断し、ター
ゲット加工した。Embodiments of the present invention will be described below. Example 1 A target material having a composition ratio of Ti to Al of 1: 1 was manufactured. The manufacturing process is shown in FIG. That is, 240 mesh Al powder and 100 mesh Ti powder were mixed, and this mixed powder was filled in a bellows tube. Next, after degassing the inside of the bellows tube, HIP treatment was performed. The HIP conditions are as follows: temperature: 550 ° C., pressure: 1500 kgf / cm 2 ,
Retention time: 3 hours. After the HIP treatment, it was cut and processed into a target.
【００２３】蛇腹管内部で成形された成形体は、直径が
１３０ｍｍの円柱であり、その円柱状成形体の頭部と底
部において、中心を通る線上で、一端部（位置）と、
中心部（位置）と、他端部（位置）とから試料を採
取した。この試料を基に組成及び密度を測定した。その
結果を下記表１に示す。また、ＨＩＰによる焼結後のミ
クロ組織写真を図２に示す。The molded body formed inside the bellows tube is a cylinder having a diameter of 130 mm. One end (position) is formed on a line passing through the center at the head and bottom of the cylindrical body.
Samples were taken from the center (position) and the other end (position). The composition and density were measured based on this sample. The results are shown in Table 1 below. FIG. 2 shows a microstructure photograph after sintering by HIP.
【００２４】[0024]
【表１】 [Table 1]
【００２５】この表１から明らかなように、Ｔｉの組成
目標値は５０原子％であるのに対し、測定値は５０±
０．７原子％の範囲にあり、溶解材の組成範囲と大差な
く、均質なものとなっている。また、密度も計算された
値（理論値）とほとんど変わらず、ほぼ１００％となっ
ている。このような組成の均質度及び高密度は、図２に
示す光学顕微鏡組織上にも表われている。このため、本
実施例により製造されたターゲット材は機械加工時にも
かけが発生せず、水漏れの問題もなかった。また、膜性
能も溶解材と同等であり、製造コストは溶解材及び合金
粉末材の１／２であり、極めて低コストで高品質のター
ゲット材を製造することができた。実施例２ 実施例１と同様の方法で、Ｔｉ；４５原子％、Ａｌ；４
５原子％、Ｃｒ；５原子％の組成になるように、ターゲ
ット材を製造した。製造方法は、図１に示すものと同一
であり、実施例１のＡｌ粉末の替わりに、ガスアトマイ
ズ法により製造したＡｌ−Ｃｒ合金粉末を使用した。As is clear from Table 1, the target composition of Ti is 50 atomic%, whereas the measured value is 50 ±
It is in the range of 0.7 atomic%, and is homogeneous without much difference from the composition range of the dissolving material. Further, the density is almost the same as the calculated value (theoretical value), and is almost 100%. Such homogeneity and high density of the composition are also shown on the optical microscope structure shown in FIG. For this reason, the target material manufactured according to the present example did not generate spatter during machining, and had no problem of water leakage. Further, the film performance was equivalent to that of the molten material, and the production cost was half of that of the molten material and the alloy powder material. Thus, a high quality target material could be produced at extremely low cost. Example 2 In the same manner as in Example 1, Ti: 45 at%, Al: 4
A target material was manufactured to have a composition of 5 atomic% and Cr; 5 atomic%. The production method was the same as that shown in FIG. 1, and an Al—Cr alloy powder produced by a gas atomization method was used instead of the Al powder of Example 1.
【００２６】ＨＩＰによる焼結後の成形体の組成及び密
度を下記表２に示す。The composition and density of the compact after sintering by HIP are shown in Table 2 below.
【００２７】[0027]
【表２】 [Table 2]
【００２８】この表２に示すように、本実施例において
も、組成の均一性が良好であり、密度もほぼ論理値に近
い値を示していた。実施例３ Ａｌ粉末＋Ｔｉ粉末の混合粉末の粒度分布を変えた場合
の組成の均質性及び焼結性について調べた。その結果を
図３に横軸に粒度をとり、縦軸に焼結後のＴｉ組成の変
動幅をとって示す。Ａｌ粉末とＴｉ粉末との平均粒径の
比が１：２となるように設定した。但し、ターゲット材
の組成は、５０原子％Ｔｉ−５０原子％Ａｌである。As shown in Table 2, also in this example, the uniformity of the composition was good, and the density was almost a logical value. Example 3 The homogeneity of the composition and the sinterability when the particle size distribution of the mixed powder of Al powder + Ti powder was changed were examined. The results are shown in FIG. 3 in which the horizontal axis represents the particle size and the vertical axis represents the fluctuation range of the Ti composition after sintering. The ratio was set such that the ratio of the average particle size of the Al powder to the Ti powder was 1: 2. However, the composition of the target material is 50 atomic% Ti-50 atomic% Al.
【００２９】この図３から明らかなように、組成の均一
性については最適な粒度の組み合わせがあることがわか
り、密度の向上にはＡｌ粉末の粒度を−２４０メッシュ
にすることが必要である。実施例４ ＣＩＰ＋ＨＩＰ材（従来方法）と、蛇腹管を用いたＨＩ
Ｐ材（本発明方法）との焼結後の密度を比較した結果を
下記表３に示す。ＣＩＰ＋ＨＩＰ材の密度は９０％であ
るのに対し、本発明材では１００％まで密度が向上して
いる。As is apparent from FIG. 3, it can be seen that there is an optimum combination of particle sizes for the uniformity of the composition, and it is necessary to make the particle size of the Al powder −240 mesh in order to improve the density. Example 4 HI using CIP + HIP material (conventional method) and bellows tube
Table 3 below shows the result of comparing the density after sintering with the P material (the method of the present invention). While the density of the CIP + HIP material is 90%, the density of the material of the present invention is improved to 100%.
【００３０】[0030]
【表３】 [Table 3]
【００３１】[0031]
【発明の効果】以上説明したように、本発明により、低
コストで、高品質のＴｉ−Ａｌ合金ターゲット材を製造
することが可能となり、この本発明により製造したター
ゲット材を使用することにより、切削工具及び摺動部品
等へのコーティングの適用が可能となって、適用範囲が
拡大され、切削工具及び摺動部品の大幅な寿命の延長が
可能となる。このように、本発明はこの種の技術分野に
おいて、多大の貢献をなす。As described above, according to the present invention, a low-cost, high-quality Ti-Al alloy target material can be manufactured. By using the target material manufactured according to the present invention, The coating can be applied to cutting tools, sliding parts, and the like, so that the application range is expanded, and the life of the cutting tools and sliding parts can be significantly extended. Thus, the present invention makes a great contribution in this type of technical field.
【図１】本発明の実施例方法を示すフローチャート図で
ある。FIG. 1 is a flowchart illustrating a method according to an embodiment of the present invention.
【図２】試料から採取した光学顕微鏡による金属組織を
示す写真である。FIG. 2 is a photograph showing a metal structure by an optical microscope taken from a sample.
【図３】粒度とＴｉ組成の変動幅との関係を示すグラフ
図である。FIG. 3 is a graph showing a relationship between a particle size and a variation width of a Ti composition.
フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｃ２２Ｆ 1/04 Ｃ２２Ｆ 1/04 Ａ 1/18 1/18 Ｈ (56)参考文献 特開 平４−268074（ＪＰ，Ａ) 特開 平２−118065（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) C23C 14/34 C22C 1/04 C22C 14/00 C22C 21/00 C22F 1/04 C22F 1/18Continuation of the front page (51) Int.Cl. 6 Identification symbol FI C22F 1/04 C22F 1/04 A 1/18 1/18 H (56) References JP-A-4-268074 (JP, A) JP-A-Hei. 2-118065 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) C23C 14/34 C22C 1/04 C22C 14/00 C22C 21/00 C22F 1/04 C22F 1/18
Claims (3)
Ａｌ合金ターゲット材を製造する方法において、１００
メッシュ以下のＴｉ粉末と２４０メッシュ以下のＡｌ又
はＡｌ合金粉末とを混合したものであって、且つ、Ｔｉ
粉末の平均粒径がＡｌ又はＡｌ合金粉末の平均粒径の
１．６倍を超え、２．４倍以下であるものを原料とする
ことを特徴とするＴｉ−Ａｌ合金ターゲット材の製造方
法。1. Ti— containing 30 to 70 atomic% of Ti
In the method of manufacturing an Al alloy target material, 100
A mixture of Ti powder of mesh or less and Al or Al alloy powder of 240 mesh or less , and Ti
The average particle size of the powder is the average particle size of the Al or Al alloy powder.
A method for producing a Ti-Al alloy target material, wherein a material having a ratio of more than 1.6 times and not more than 2.4 times is used as a raw material.
はＡｌ合金粉末の外に、Ｓｉ、Ｂ、Ｎｂ、Ｃｒ、Ｙ及び
Ｃｅからなる群から選択された少なくとも１種の第３元
素の粉末を１０原子％以下添加したことを特徴とする請
求項１に記載のＴｉ−Ａｌ合金ターゲット材の製造方
法。2. A powder of at least one third element selected from the group consisting of Si, B, Nb, Cr, Y and Ce, in addition to the Ti powder and Al or Al alloy powder, as the raw material powder. The method for producing a Ti-Al alloy target material according to claim 1, wherein 10% by atom or less is added.
した後、これを蛇腹カプセルに充填し、温度が５００〜
６００℃、圧力が７００ｋｇｆ／ｃｍ2以上の条件で熱
間静水圧加圧処理を行うことを特徴とするＴｉ−Ａｌ合
金ターゲット材の製造方法。3. After mixing the raw material powder according to claim 1 or 2, the mixture is filled in a bellows capsule, and the temperature is 500 to 500.
A method for producing a Ti—Al alloy target material, wherein hot isostatic pressing is performed at 600 ° C. and a pressure of 700 kgf / cm 2 or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27829794A JP2860064B2 (en) | 1994-10-17 | 1994-10-17 | Method for producing Ti-Al alloy target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27829794A JP2860064B2 (en) | 1994-10-17 | 1994-10-17 | Method for producing Ti-Al alloy target material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08120445A JPH08120445A (en) | 1996-05-14 |
| JP2860064B2 true JP2860064B2 (en) | 1999-02-24 |
Family
ID=17595393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27829794A Expired - Lifetime JP2860064B2 (en) | 1994-10-17 | 1994-10-17 | Method for producing Ti-Al alloy target material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2860064B2 (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2001275184A1 (en) * | 2000-08-15 | 2002-02-25 | Honeywell International, Inc. | Sputtering target |
| US6833058B1 (en) | 2000-10-24 | 2004-12-21 | Honeywell International Inc. | Titanium-based and zirconium-based mixed materials and sputtering targets |
| EP1219723B1 (en) * | 2000-12-28 | 2006-10-25 | Kabushiki Kaisha Kobe Seiko Sho | Hard film for cutting tools |
| DE10212383A1 (en) * | 2002-03-20 | 2003-10-16 | Guehring Joerg | Anti-wear layer for rotating machining tools consists of nitrides containing chromium, titanium and aluminum and preferably a small amount of elements for grain refining |
| JP4097972B2 (en) * | 2002-03-29 | 2008-06-11 | 株式会社神戸製鋼所 | Target for physical vapor deposition and method for producing the same |
| JP4216518B2 (en) * | 2002-03-29 | 2009-01-28 | 株式会社神戸製鋼所 | Cathode discharge type arc ion plating target and method of manufacturing the same |
| US6906295B2 (en) * | 2003-02-20 | 2005-06-14 | National Material L.P. | Foodware with multilayer stick resistant ceramic coating and method of making |
| JP2005271190A (en) * | 2003-12-05 | 2005-10-06 | Sumitomo Electric Hardmetal Corp | Surface coated cutting tool |
| JP5060714B2 (en) | 2004-09-30 | 2012-10-31 | 株式会社神戸製鋼所 | Hard coating excellent in wear resistance and oxidation resistance, and target for forming the hard coating |
| GB0616566D0 (en) * | 2006-08-19 | 2006-09-27 | Rolls Royce Plc | An alloy and method of treating titanium aluminide |
| JP2009270141A (en) * | 2008-05-01 | 2009-11-19 | Daido Steel Co Ltd | METHOD FOR PRODUCING Ti-Al BASED ALLOY TARGET MATERIAL |
| US8021768B2 (en) | 2009-04-07 | 2011-09-20 | National Material, L.P. | Plain copper foodware and metal articles with durable and tarnish free multiplayer ceramic coating and method of making |
| US8440328B2 (en) | 2011-03-18 | 2013-05-14 | Kennametal Inc. | Coating for improved wear resistance |
| CN104419847A (en) * | 2013-09-11 | 2015-03-18 | 安泰科技股份有限公司 | Titanium-aluminum-chromium alloy target material and preparation method thereof |
| CN104416157B (en) * | 2013-09-11 | 2019-03-19 | 安泰科技股份有限公司 | The preparation method of titanium aluminum silicon alloy target |
| AT15596U1 (en) | 2017-02-28 | 2018-03-15 | Plansee Composite Mat Gmbh | Sputtering target and method for producing a sputtering target |
| CN108220700B (en) * | 2018-01-17 | 2020-06-30 | 长沙迅洋新材料科技有限公司 | Aluminum-titanium-niobium ternary alloy target and preparation method thereof |
| CN112813326A (en) * | 2020-12-29 | 2021-05-18 | 有研工程技术研究院有限公司 | Titanium-aluminum-chromium alloy target and preparation method thereof |
| CN113981388B (en) * | 2021-10-25 | 2022-10-28 | 北京安泰六九新材料科技有限公司 | Preparation method of high-density TiAl and TiAlMe target material |
| CN116855902B (en) * | 2023-07-21 | 2024-04-16 | 苏州六九新材料科技有限公司 | Low-aluminum-content titanium-based target material and preparation method thereof |
-
1994
- 1994-10-17 JP JP27829794A patent/JP2860064B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08120445A (en) | 1996-05-14 |
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