CN108103454B - A kind of high smooth coated cutting tool and preparation method thereof - Google Patents
A kind of high smooth coated cutting tool and preparation method thereof Download PDFInfo
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- CN108103454B CN108103454B CN201711241605.XA CN201711241605A CN108103454B CN 108103454 B CN108103454 B CN 108103454B CN 201711241605 A CN201711241605 A CN 201711241605A CN 108103454 B CN108103454 B CN 108103454B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of high smooth coated cutting tool and preparation method thereof, the coating is the high smooth coating formed using arc ion plating, and coating surface droplet density is less than 5 × 105A/mm2, which includes Ti1‑x‑yCrxMoyThe metal component and B that (wherein, x, y meet 0≤x≤0.1,0≤y≤0.1 with atomic ratio measuring) indicatesαCβOγN1‑α‑β‑γ(wherein, α, β, γ are in terms of atom than meeting 0.1≤α≤0.6,0≤β≤0.2,0≤γ≤0.2) indicate Non-metallic components, the coating have etc. shaft-like ultrafine-grained (UFG) microstructure, the shaft-like such as this ultrafine-grained (UFG) microstructure has the multilayered structure being made of the different multiple layers of boron content, can be detected simultaneously by cubic structure phase and hexagonal structure phase diffraction maximum in the XRD spectrum of the coating.The features such as coating of the invention has high smooth, high hard, high-ductility, high abrasion and good lubricity, and the resistance to aluminium adhesion performance special due to the boride of Ti in coating, especially suitable for processing albronze.
Description
Technical field
The present invention relates to a kind of coated cutting tools, more particularly to a kind of high smooth coating knife prepared with arc ion plating
Tool and preparation method thereof.
Background technique
With the continuous development of the advanced cutting technology such as high-speed cutting, DRY CUTTING, the performance of cutter also proposed more
High requirement.PVD coating technology is to improve the important channel of cutting performance and service life, and have been widely used for bite
Tool field.Magnetron sputtering and arc ion plating are most common two kinds of PVD coating technologies.Wherein, magnetron sputtering is caused with film layer
Close property is good, and coating surface is smooth, and without apparent hole and the advantages that bulky grain, but its deposition rate is slower, film-substrate cohesion
It is low.Arc ion plating has the advantages that ionization level is high (up to 90%), and deposition rate is fast, and film-substrate cohesion is outstanding, but prepare
Coating contains bulky grain (also referred to as " drop "), influences Coating Surface Roughness, destroys coutinuity of coating.Coarse drop is being cut
When cutting, it is easy to peel off, becomes crack initiation point.
There are mainly three types of the Basic Ways for reducing or removing electric arc ion coating plating drop: one, reducing or inhibit coating mistake
The generation of drop in journey, such as using suitable target, magnetic field and technological parameter.Two, it prevents on droplet transport to matrix, mainly
Gravity or Magnetic filter system are set before target, but coating deposition rate can be significantly reduced.Three, coating post-processes, rear etching etc.,
This method can form pit at original drop, these pits are likely to become the failpoint in cutting process.
Chinese patent CN1632905A discloses a kind of vacuum cathode arc straight tube filter, using second level straight tube Magnetic filter and
Baffle shielding in conjunction with method carry out the bulky grain of filtering cathode, but sacrifice the efficiency of transmission of plasma, make deposition rate
It substantially reduces.
CN101691654B discloses a kind of method for manufacturing coated cutting tool, in cathodic arc evaporation PVD coating mistake
Cheng Zhong, coating undergo more than one Ion Etching step.This method is proposed using ion(ic) etching as intermediate steps and deposition steps
Suddenly alternately, the final step that in addition executes after or as coating, to reduce the drop of coat inside and surface.It should
Although method can reduce coating amount of droplets, its technique is cumbersome, substantially prolongs manufacturing cycle.
High smooth coating is prepared using arc ion plating and do not use cathode filter, need coating currently, yet there are no
The relevant report of the additional steps such as etching after post-processing or coating.
Summary of the invention
It is an object of the invention to overcome the deficiency of the prior art, provides a kind of high smooth coated cutting tool and its production side
The features such as method, which has high smooth, high hard, high-ductility, high abrasion and good lubricity.
The technical solution adopted by the present invention to solve the technical problems is: a kind of high smooth coated cutting tool, including matrix and
Coating on matrix；The coating is the high smooth coating formed by arc ion plating, and coating surface droplet density is less than 5
×105A/mm2, which includes Ti1-x-yCrxMoyThe metal component and B of expressionαCβOγN1-α-β-γThe Non-metallic components of expression,
Wherein, x, y with atomic ratio measuring meet 0≤x≤0.1,0≤y≤0.1, α, β, γ in terms of atom than meet 0.1≤α≤0.6,0≤
β≤0.2,0≤γ≤0.2；The coating have etc. shaft-like ultrafine-grained (UFG) microstructure, the shaft-like such as this ultrafine-grained (UFG) microstructure have by boron content not
With multiple layers of composition multilayered structures, cubic structure phase and hexagonal structure can be detected simultaneously by the XRD spectrum of the coating
Phase diffraction maximum.
The peak intensity in (111) face of cubic structure phase and the ratio between the peak intensity in (200) face are in the XRD spectrum of the coating
0.8~1.2；Hexagonal structure mutually only has an apparent diffraction maximum, and halfwidth is 0.2~0.8 °.
The coating is at least made of the A layer and B layers being sequentially distributed outward from matrix, in A layers the content of boron be 2~
The content of boron is that 25~50at% adds A layers and B when tool haves three layers above between the bottom and outermost layer in 15at%, B layers
Multiple alternative stackeds of layer.
The total coating thickness be 0.5~2um, the bottom with a thickness of 50~300nm.
The modulation period of the alternative stacked < 100nm.
The crystallite dimension of the shaft-like such as described coating ultrafine-grained (UFG) microstructure is 0.3~1 μm.
The hardness H of the coating at room temperature is 25~40GPa, and elastic recovery rate δ is 10~20%, the hardness and bullet
Property response rate is measured by nano hardness.
The material of described matrix is high-speed steel, cermet or hard alloy.
A kind of production method of high smooth coated cutting tool is to deposit the painting using physical gas-phase deposite method on matrix
Layer, the coating use arc ion plating to generate under the following conditions: gross pressure is 0.5~1.5Pa；Target current be 150~
200A；Target material surface magnetic field strength is 200~400 Gausses；Substrate bias is 30~﹣ of ﹣ 200V；Depositing temperature is 300~500
℃。
The beneficial effects of the present invention are:
The present invention come prepares coating, overcomes that magnetron sputtering deposition rate is slow, and coated film base junction is closed using arc ion plating
The problems such as power is lower, and have with surface quality similar in magnetic sputtering coating, surface is smooth, and drop is few, especially
It is suitable as finishing tool coating.The production method of coated cemented carbide endmill of the invention, easy to operate, short preparation period, nothing
Coating such as is needed to post-process, the additional steps such as rear etching, reproducibility is good, is easy to implement industrialized production.
Invention is further described in detail with reference to the accompanying drawings and embodiments；But a kind of high smooth coating of the invention
Cutter and preparation method thereof is not limited to the embodiment.
Detailed description of the invention
Fig. 1 is the XRD spectrum of 1 sample of the embodiment of the present invention, 4 coating；
Fig. 2 is the surface SEM pattern of 1 sample of the embodiment of the present invention, 4 coating；
Fig. 3 is the surface SEM pattern of magnetron sputtering Ti-B system coating；
Fig. 4 is the surface SEM pattern of arc ion plating TiAlN coating.
Specific embodiment
Embodiment
The present invention uses arc ion plating (aip), has height by reasonably combined prepare of target and coating process parameter
Firmly, high-ductility, the high smooth coating for the features such as high abrasion and lubricity are good.
Coating of the present invention has the multilayered structure being made of the different multiple layers of boron content.A small amount of boron can increase in A layers
Strong film hardness and peel resistance, when boron content is higher than 15at%, it is excessive to will lead to internal stress, peel resistance decline, because
This, the boron content upper limit is preferably 15at% in A layers.The content of boron element is preferably 25~50at% in B layers, in outermost layer
B element content cannot be guaranteed the hardness and wearability of coating when being lower than 25at%.
Further, it is possible to A layers and B layers of multiple alternative stackeds be arranged between the bottom and outermost layer, by coating
The change of gradient of boron content keeps the content of the boride of titanium in from the bottom to outermost layer higher and higher, helps to alleviate
Coating internal stress increases coating toughness.
C and O can be improved coating hardness and lubricity, and the content of C can reduce the hardness of coating and resistance to when being more than 10at%
Oxidisability, the content of O will lead to coating hardness and wearability decline, therefore, C and O constituent content in coating when being more than 10at%
The upper limit be both preferably 10at%.C and O element can import carbon containing by using the alloys target containing C, O and/or in the coating
Gas, oxygen are added.
Cr and Mo can refine coated grains, enhance coating heat resistance and wear resistance, Cr and Mo content is upper in coating
Limit is both preferably 5%.
Coating of the present invention have etc. shaft-like ultrafine-grained (UFG) microstructure, crystallite dimension to coating performance have great influence, work as crystalline substance
When particle size is greater than 1 μm, it cannot be guaranteed that the hardness and wearability of coating；When crystallite dimension is less than 0.3 μm, due to crystal boundary ratio
Excessively high, oxygen is easy to be enriched with by grain boundary decision and in grain boundaries when processing, causes grain-boundary strength to decline, and then cause coating broken
It is bad.Therefore, the crystallite dimension of coating of the present invention is preferably 0.3~1 μm, and more preferably 0.4~0.7 μm.
The present invention can obtain the optimal of strength of coating and toughness by the ratio of cubic phase and hexagonal phase in control coating
Change, the ratio of cubic phase and hexagonal phase is mainly controlled by N content in coating, and nitrogen pressure when N content is mainly deposited
It influences.When nitrogen pressure is lower, hexagonal phase is on the high side in coating, and brittleness is larger；When nitrogen pressure is excessive, the ratio of cubic phase in coating
Example is excessively high, will lead to the decline of coating hardness and wearability.Therefore, nitrogen pressure preferably 0.5~1.1Pa when coating.Work as use
When carbonaceous gas and/or oxygen carry out coating, preferably the gross pressure of itself and the nitrogen as main body is controlled in 0.7~1.5Pa.
By controlling the magnetic field strength of target material surface when coating in 200~400 Gausses, arc spot can be accelerated in target table
The movement in face makes its motion range be expanded to the 80% of entire target surface, and arc spot residence time at certain point is avoided too long to cause
Target surface hot-spot sprays a large amount of particle or drop.
Hardness the H preferably 25~40GPa, elastic recovery rate δ preferably 10~20% of coating of the invention at room temperature.δ is small
When 10%, coating abrasion performance lacks, and when δ is more than 20%, coating and basal body binding force deficiency are easy to cause inordinate wear.Coating
Consistency and elasticity response rate is measured by FISCHERSCOPE HM2000 type nanoindenter, and elastic recovery rate δ is defined as
δ=(1- contacts compression distance when depth/maximum load) × 100%.
Embodiment 1
The alloy target material for having respective element ratio is selected according to the composition of target coating using arc ion plating apparatus,
Select N2As reaction gas, the gross pressure 0.8Pa in equipment, substrate temperature is 400 DEG C, and substrate bias is 30~﹣ of ﹣ 150V,
Deposition coating of the present invention under conditions of target current is 150~200A.A layers are deposited using the lower target 1 of boron content, is contained using boron
It measures higher target 2 and deposits B layers；When depositing A layers and B layers of alternative stacked, then target 1 and target 2 are used simultaneously.Coating target
Material and coating structure are as shown in table 1.
Table 1
| Sample No. | Target 1 | Target 2 | Total film thickness | The number of plies |
| 1 | Ti0.7B0.2C0.1 | Ti0.3B0.6C0.1 | 0.8μm | 2 |
| 2 | Ti0.7B0.2C0.1 | Ti0.3B0.6C0.1 | 1.2μm | 8 |
| 3 | Ti0.6B0.2O0.1C0.1 | Ti0.3B0.5O0.1C0.1 | 1.2μm | 8 |
| 4 | Ti0.6Cr0.025Mo0.025B0.15O0.1C0.1 | Ti0.25Cr0.025Mo0.025B0.5O0.1C0.1 | 1.5μm | 10 |
Note: 3 layers or more of situation adds A layers and B layers of multiple alternative stackeds between the bottom and outermost layer.
Cubic structure phase and hexagonal structure phase diffraction are shown in the XRD spectrum of 1~No. 4 sample of the present embodiment simultaneously
The ratio between the peak intensity in peak, the peak intensity in (111) face of cubic structure phase and (200) face is between 0.8~1.2, hexagonal structure
For the halfwidth in the face of phase between 0.3~0.7 °, Fig. 1 is the XRD spectrum of No. 4 samples of the present embodiment.The present embodiment 1~4
Sample coatings hardness H is between 26~32GPa, and elastic recovery rate δ is between 12~16%.
Using Hitachi S-3700N type scanning electron microscope, in 1000 times of amplification factor lower observation coated cutting tool flanks
Surface topography simultaneously counts amount of droplets, is detected 1~No. 4 sample coatings surface droplet density of the present embodiment and is respectively less than 4 × 105
A/mm2.Fig. 2 is the surface topography of No. 4 sample coatings of the present embodiment, and droplet density is 3.5 × 105A/mm2.Fig. 3 is magnetic control
The surface topography for sputtering Ti-B system coating, being detected its droplet density is 3 × 105A/mm2.Fig. 4 is arc ion plating TiAlN painting
The surface topography of layer, being detected its droplet density is 3 × 106A/mm2.It can be seen that electric arc ion coating plating surface of the invention
It is smooth, have with surface quality similar in magnetic sputtering coating, and amount of droplets and size be far smaller than conventional electric arc from
Sub- plating coating.
By the cutter of the present embodiment, with the non-coated tool of the present embodiment geometry having the same and matrix and should
Cutting ability evaluation is carried out under conditions of the relevant competition grade technology (prior art) in field is below, the results are shown in Table 2.
Cutter title: 2 sword square end mill D1*3
Cutting way: side milling
Workpiece: mobile phone center patch slot
Workpiece material: Al 6063, hardness 100HB
Linear velocity: Vc=47.1m/min
Revolving speed: N=15000r/min
Feeding: F=1500mm/min
Cutting depth: ap=1.5mm
Cutting width: ae=0.05mm
The type of cooling: emulsion
2 working durability of table
| Cutter | Working durability (workpieces processing quantity) |
| Non-coated tool | 300 |
| It competes grade technology (magnetron sputtering Ti-B system coating) | 900 |
| The present embodiment (No. 1 sample) | 998 |
| The present embodiment (No. 2 samples) | 1150 |
| The present embodiment (No. 3 samples) | 1195 |
| The present embodiment (No. 4 samples) | 1253 |
It can be seen that under current machining condition from upper table result, the present embodiment coated cutting tool service life is above competition grade
Technology improves about 233~318% compared to the non-coated tool service life.
Embodiment 2
The alloy target material for having respective element ratio is selected according to the composition of target coating using arc ion plating apparatus,
Select N2With Ar, O2、C2H2One of or it is a variety of be used as reaction gas, substrate temperature be 400 DEG C, substrate bias be ﹣ 30
~﹣ 150V, deposition coating of the present invention under conditions of target current is 150~200A.A layers are deposited using the lower target 1 of boron content,
B layers are deposited using the higher target 2 of boron content；When depositing A layers and B layers of alternative stacked, then target 1 and target are used simultaneously
2.Coating target and coating structure are as shown in table 3.
Table 3
Note: 3 layers or more of situation adds A layers and B layers of multiple alternative stackeds between the bottom and outermost layer.
Cubic structure phase and hexagonal structure phase diffraction are shown in the XRD spectrum of 5~No. 8 samples of the present embodiment simultaneously
The ratio between the peak intensity in peak, the peak intensity in (111) face of cubic structure phase and (200) face is between 0.8~1.2, hexagonal structure
The halfwidth in the face of phase is between 0.2~0.7 °.5~No. 8 sample coatings hardness H of the present embodiment between 28~35GPa,
Elastic recovery rate δ is between 10~18%.Using Hitachi S-3700N type scanning electron microscope, at 1000 times of amplification factor
Lower observation coated cutting tool flank surface topography simultaneously counts amount of droplets, is detected 5~No. 8 sample coatings surface liquid of the present embodiment
Drop density is respectively less than 4 × 105A/mm2。
By non-coated tool, the neck of the cutter of the present embodiment and the present embodiment geometry having the same and matrix
Cutting ability evaluation is carried out under conditions of the relevant competition grade technology (prior art) in domain is below, the results are shown in Table 4.
Cutter title: 2 sword square end mill D1.2*3.5
Cutting way: side milling
Workpiece: mobile phone center side opening
Workpiece material: Al 6063, hardness 100HB
Linear velocity: Vc=56.5m/min
Revolving speed: N=15000r/min
Feeding: F=1500mm/min
Cutting depth: ap=1.5mm
Cutting width: ae=0.05mm
The type of cooling: emulsion
Table 4
| Cutter | Working durability (workpieces processing quantity) |
| Non-coated tool | 2400 |
| It competes grade technology (magnetron sputtering Ti-B system coating) | 4500 |
| The present embodiment (No. 5 samples) | 4590 |
| The present embodiment (No. 6 samples) | 4655 |
| The present embodiment (No. 7 samples) | 4830 |
| The present embodiment (No. 8 samples) | 5000 |
It can be seen that under current machining condition from upper table result, the present embodiment coated cutting tool service life is above competition grade
Technology improves about 91~108% compared to the non-coated tool service life.
Above-mentioned only presently preferred embodiments of the present invention, is not intended to limit the present invention in any form.Although of the invention
It has been disclosed in a preferred embodiment above, however, it is not intended to limit the invention.Anyone skilled in the art is not taking off
In the case where from technical solution of the present invention range, all technical solution of the present invention is made perhaps using the technology contents of the disclosure above
Mostly possible changes and modifications, or it is revised as equivalents equivalent embodiment.Therefore, all without departing from technical solution of the present invention
Content, technical spirit any simple modifications, equivalents, and modifications made to the above embodiment, should all fall according to the present invention
In the range of technical solution of the present invention protection.
Claims (8)
1. a kind of high smooth coated cutting tool, it is characterised in that: including the coating on matrix and matrix；The coating is to pass through electric arc
The high smooth coating that ion plating method is formed, coating surface droplet density is less than 5 × 105A/mm2, which includes Ti1-x- yCrxMoyThe metal component and B of expressionαCβOγN1-α-β-γThe Non-metallic components of expression, wherein x, y meet 0≤x with atomic ratio measuring
≤ 0.1,0≤y≤0.1, α, β, γ are in terms of atom than meeting 0.1≤α≤0.6,0≤β≤0.2,0≤γ≤0.2；Coating tool
You Deng shaft-like ultrafine-grained (UFG) microstructure, the shaft-like such as this ultrafine-grained (UFG) microstructure have the multilayered structure being made of the different multiple layers of boron content,
Cubic structure phase and hexagonal structure phase diffraction maximum can be detected simultaneously by the XRD spectrum of the coating；The coating at least by from
A layer that matrix is sequentially distributed outward and B layer are constituted, and the content of boron is 2~15at% in A layers, in B layers the content of boron for 25~
50at% adds multiple alternative stackeds of A layers He B layers when tool haves three layers above between the bottom and outermost layer.
2. high smooth coated cutting tool according to claim 1, it is characterised in that: cube knot in the XRD spectrum of the coating
The ratio between the peak intensity and the peak intensity in (200) face in (111) face of structure phase are 0.8~1.2；Hexagonal structure mutually only has one significantly
Diffraction maximum, halfwidth are 0.2~0.8 °.
3. high smooth coated cutting tool according to claim 1, it is characterised in that: the total coating thickness is 0.5~2um,
The bottom with a thickness of 50~300nm.
4. high smooth coated cutting tool according to claim 1, it is characterised in that: the modulation period of the alternative stacked <
100nm。
5. high smooth coated cutting tool according to claim 1, it is characterised in that: the shaft-like such as described coating ultrafine-grained (UFG) microstructure
Crystallite dimension is 0.3~1 μm.
6. high smooth coated cutting tool according to claim 1, it is characterised in that: the hardness H of the coating at room temperature is
25~40GPa, elastic recovery rate δ are 10~20%, and the consistency and elasticity response rate is measured by nano hardness.
7. high smooth coated cutting tool according to claim 1, it is characterised in that: the material of described matrix is high-speed steel, gold
Belong to ceramics or hard alloy.
8. a kind of production method of the high smooth coated cutting tool as described in any claim in claim 1 to 7, feature exist
In: be that the coating is deposited using physical gas-phase deposite method on matrix, the coating use under the following conditions electric arc from
Son plating generates: gross pressure is 0.5~1.5Pa；Target current is 150~200A；Target material surface magnetic field strength is 200~400 Gausses；
Substrate bias is 30~﹣ of ﹣ 200V；Depositing temperature is 300~500 DEG C.
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| CN101691654A (en) * | 2007-09-26 | 2010-04-07 | 山特维克知识产权股份有限公司 | Method of making a coated cutting tool |
| CN103737092A (en) * | 2013-11-13 | 2014-04-23 | 厦门金鹭特种合金有限公司 | Miniature PVD coat miller cutter for PCB, and making method thereof |
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Address after: No. 69 Xinglong Road, Huli District, Xiamen City, Fujian Province, 361000 Applicant after: Xiamen Golden Egret Special Alloy Co., Ltd. Address before: No. 52-60 Tianyang Road, North Jimei Industrial Zone, Xiamen City, Fujian Province, 361000 Applicant before: Xiamen Golden Egret Special Alloy Co., Ltd. |
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