WO2013151147A1 - Filtre de filtration - Google Patents

Filtre de filtration Download PDF

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Publication number
WO2013151147A1
WO2013151147A1 PCT/JP2013/060409 JP2013060409W WO2013151147A1 WO 2013151147 A1 WO2013151147 A1 WO 2013151147A1 JP 2013060409 W JP2013060409 W JP 2013060409W WO 2013151147 A1 WO2013151147 A1 WO 2013151147A1
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Prior art keywords
filtration
filter
film
hydrophilic
dlc
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PCT/JP2013/060409
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English (en)
Japanese (ja)
Inventor
剛 守屋
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東京エレクトロン株式会社
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Publication of WO2013151147A1 publication Critical patent/WO2013151147A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/021—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2068—Other inorganic materials, e.g. ceramics
    • B01D39/2072—Other inorganic materials, e.g. ceramics the material being particulate or granular
    • B01D39/2075—Other inorganic materials, e.g. ceramics the material being particulate or granular sintered or bonded by inorganic agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0083—Thermal after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0093—Chemical modification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/38—Hydrophobic membranes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis

Definitions

  • the present invention relates to a filter for filtration.
  • Filtration filters are often used when purifying fresh water by removing pollutants and impurities from wastewater (sewage) from factories and households, or purifying fresh water by removing salt from seawater.
  • a reverse osmosis membrane using a polymer material for example, a methyl acetate polymer membrane is known.
  • a reverse osmosis membrane has innumerable through holes with a diameter of several nanometers, and when water is passed through the reverse osmosis membrane by applying pressure to sewage or seawater, one water molecule of about 0.38 nm passes through the through hole.
  • molecules of contaminants with a size of several tens of nanometers and sodium ions coordinated with water molecules around by hydration do not pass through the through holes.
  • the reverse osmosis membrane has a polymer membrane as its main component, so its strength is low, and it will be broken if a pressure is applied to the sewage or seawater (primary pressure) to increase the purification efficiency and a load is applied. There is a problem.
  • the porous ceramic body consists of an aggregate of polycrystalline bodies called grains, and a filter for filtration made of a porous ceramic body performs purification by flowing sewage or seawater through the gaps between the grains.
  • a filter for filtration which consists of a porous ceramic body is used, since the intensity
  • the aperture ratio of the filter for filtration cannot be set to a predetermined value or more, and a decrease in filtration efficiency becomes a problem.
  • An object of the present invention is to provide a filter for filtration that can prevent a decrease in filtration efficiency.
  • a filtration filter for passing a filtration target medium in a thickness direction, wherein the filtration target medium inflow side surface is covered with a hydrophobic film.
  • the hydrophobic film is preferably formed by ALD or CVD.
  • the hydrophobic film is preferably made of DLC.
  • silicon is injected into the hydrophobic film.
  • fluorine is further injected into the hydrophobic film.
  • the hydrophobic film is preferably heat-treated with a laser.
  • fluorine is injected into the hydrophobic film.
  • a filtration flow path through which the filtration target medium passes, and at least a part of the inner surface of the filtration flow path is covered with a hydrophilic film.
  • the hydrophilic film covering at least a part of the inner surface of the filtration channel is formed by passing atoms, molecules, or plasma through the filtration channel.
  • a filtration filter for passing a filtration target medium in a thickness direction, wherein the filtration target medium inflow side surface is covered with a hydrophilic film.
  • the hydrophilic film is preferably formed by ALD or CVD.
  • the hydrophilic film is preferably composed of a modified film in which at least the surface layer of the film made of DLC is modified to be hydrophilic.
  • the modified film is preferably formed by injecting fluorine into the DLC film.
  • a filtration flow path through which the filtration target medium passes is provided, and at least a part of the inner surface of the filtration flow path is covered with the hydrophilic film.
  • the hydrophilic film covering at least a part of the inner surface of the filtration channel is formed by passing atoms, molecules, or plasma through the filtration channel.
  • the surface on the filtration target medium inflow side of the filtration filter is covered with the hydrophobic film.
  • the hydrophobic membrane has a low affinity for foreign matter and prevents bacteria and foreign matter from adhering to it, so that bacteria and foreign matter remain on the surface of the filter for filtration, and bacteria and foreign matter remain inside the filter for filtration. Can be prevented from flowing in. As a result, it is possible to prevent clogging caused by bacteria and foreign matters and prevent a decrease in filtration efficiency.
  • the surface of the filtration filter on the filtration target medium inflow side is covered with the hydrophilic film.
  • the hydrophilic membrane has a high affinity with various media and can easily draw the medium to be filtered, so that the amount of the medium to be filtered flowing into the filter for filtration can be increased, thereby preventing a decrease in filtration efficiency. be able to.
  • FIG. 1 is a perspective view schematically showing a configuration of a filter for filtration according to a first embodiment of the present invention.
  • 2 is a cross-sectional view taken along line AA in FIG.
  • FIG. 3 is an enlarged cross-sectional view of a portion B in FIG.
  • FIG. 4 is an enlarged cross-sectional view schematically showing a configuration of a modification of the filter for filtration according to the present embodiment.
  • FIG. 5 is an enlarged cross-sectional view schematically showing a configuration of a filter for filtration according to a second embodiment of the present invention.
  • FIG. 6 is an enlarged cross-sectional view schematically showing a configuration of a modification of the filter for filtration according to the present embodiment. [FIGS. 7A to 7E] FIGS.
  • FIGS. 8A and 8E are diagrams schematically showing a configuration of a filter for filtration according to a third embodiment of the present invention
  • FIG. 7A is a perspective view
  • FIG. 7B is a line CC in FIG. 7C is a cross-sectional view of a first modification of the filter for filtration according to the present embodiment
  • FIG. 7D is a cross-section of a second modification of the filter for filtration according to the present embodiment
  • FIG. 7E is a cross-sectional view of a third modification of the filter for filtration according to the present embodiment.
  • FIGS. 8A and 8E are views schematically showing a configuration of a filter for filtration according to a fourth embodiment of the present invention, FIG.
  • FIG. 8A is a perspective view
  • FIG. 8B is a line CC in FIG. 8C is a cross-sectional view of a first modification of the filter for filtration according to the present embodiment
  • FIG. 8D is a cross-section of a second modification of the filter for filtration according to the present embodiment
  • FIG. 8E is a cross-sectional view of a third modification of the filter for filtration according to the present embodiment.
  • FIG. 1 is a perspective view schematically showing a configuration of a filter for filtration according to the present embodiment
  • FIG. 2 is a cross-sectional view taken along line AA in FIG.
  • a filter 10 for filtration includes a rectangular parallelepiped filter body 11 made of a porous ceramic body, a post-filtration medium chamber 12 disposed so as to cover one end 11a of the filter body 11, and the filtration filter 10. And a discharge pipe 13 provided so as to protrude from the rear medium chamber 12.
  • each drain channel 14 is formed in parallel with each other along the longitudinal direction of the filter body 11, and each drain channel 14 has only one end 11a covered with the medium chamber 12 after filtration. Open at.
  • the post-filtration medium chamber 12 is formed of a box-like member that covers one end of the filter body 11, and the inside of the post-filtration medium chamber 12 communicates with each drain flow path 14 and also with the discharge pipe 13.
  • FIG. 3 is an enlarged cross-sectional view of a portion B in FIG.
  • the filter body 11 is made of a porous ceramic body formed by sintering a large number of grains 15, and a gap between the grains 15 passes through a medium to be filtered, such as sewage, seawater, and blood.
  • the filtration flow path 16 is configured.
  • the width W of the cross section of each filtration flow channel 16 is, for example, several tens of nm, and bacteria and foreign matters having a size of several hundred nm or more in the filtration target medium cannot pass through the filtration flow channel 16.
  • bacteria and foreign matters having a size of several hundred nm or more can be removed from the filtration target medium, and thus the filtration target medium can be filtered.
  • the width W of the cross section of each filtration channel 16 that is the size of the gap between each grain 15 can be controlled by adjusting the size of each grain 15 and the sintering time. It can be set between several hundred ⁇ m.
  • the width W of the cross section of the filtration channel 16 is the size of bacteria or foreign substances (hereinafter referred to as “desired size”) to be removed from the medium to be filtered. ) To a smaller value.
  • the filtration target medium is directed from the surface of the filter body 11 (surface on the filtration target medium inflow side) toward each drain flow path 14. Let it flow.
  • the width W of the cross section of each filtration flow channel 16 is set to a value smaller than the desired size, so that the filtration target medium (hereinafter, “ Medium after filtration ”) flows into each drain channel 14.
  • the filtered medium that has flowed into each drain channel 14 gathers in the filtered medium chamber 12 and is discharged from the discharge pipe 13.
  • the surface of each grain 15 is rough, and bacteria and foreign substances are likely to remain on the surface.
  • the surface of the filter body 11 is covered with a hydrophobic film correspondingly.
  • a portion of the surface of the filter body 11 exposed to the outside of each grain 15 is covered with a hydrophobic film, for example, a DLC (Diamond-Like Carbon) film 17.
  • the DLC film 17 is an amorphous hard film mainly composed of hydrocarbon or carbon isotopes, and there are almost no dangling bonds in atoms and molecules constituting the DLC film, and polar molecules in the DLC film Is almost nonexistent. Therefore, the DLC film 17 has a low affinity with water and foreign matter and exhibits hydrophobicity.
  • the DLC film 17 repels bacteria 18 and foreign matter 19 from the surface of the filter body 11 and prevents them from adhering to the surface, so that the bacteria 18 and foreign matter 19 flow into the respective filtration flow paths 16 inside the filter body 11. Can be prevented.
  • the filter 10 for filtration according to the present embodiment can prevent clogging caused by the bacteria 18 and the foreign matter 19 and prevent a reduction in filtration efficiency.
  • the DLC film 17 has few unbonded hands that bind to the bacteria 18 or foreign matter 19, and attracts the bacteria 18 and foreign matter 19. Since there are almost no polar molecules, the attached bacteria 18 and foreign matter 19 can be easily removed from the surface of the filter body 11 by a general cleaning method such as bubbling, laser vibration or ultrasonic vibration.
  • each filtration flow path 16 is provided in the filtration target medium.
  • the filtration efficiency in each filtration channel 16 can be improved, and a high-purity filtered medium can be obtained.
  • pure water can be obtained from sewage or sewage.
  • the filtration channel 16 may be blocked.
  • the grain 15 may be exposed on a part of the surface of the filter body 11. Is preferably set.
  • the DLC film 17 is formed on the filter body 11 by, for example, ALD (Atomic Layer Deposition), CVD, or coating. Since ALD and CVD form a film with scattered atoms and plasma, the film can be formed isotropically. Therefore, even if the unevenness of the surface of the filter body 11 is severe, the DLC film 17 having a substantially uniform thickness can be formed on the surface.
  • ALD Atomic Layer Deposition
  • CVD Chemical Vaporous Layer Deposition
  • coating coating. Since ALD and CVD form a film with scattered atoms and plasma, the film can be formed isotropically. Therefore, even if the unevenness of the surface of the filter body 11 is severe, the DLC film 17 having a substantially uniform thickness can be formed on the surface.
  • the DLC film 17 is formed on the surface of the filter body 11 so that hydrophobicity can be easily imparted to the filter 10 for filtration.
  • the hydrophobicity in the present embodiment corresponds to a case where the contact angle measured by a contact angle meter manufactured by Kyowa Interface Science Co., Ltd. is 65 degrees or more, preferably 100 degrees or more.
  • FIG. 4 is an enlarged cross-sectional view schematically showing a configuration of a modification of the filter for filtration according to the present embodiment.
  • each filtration flow path 16 in the filter body 11 of the filtration filter 10 is covered with a hydrophilic film 20, for example, a silica glass (silicon dioxide) film.
  • a hydrophilic film 20 covering the inner surface of each filtration flow channel 16 is easy to draw the filtration target medium, and each filtration flow channel 16 is applied to the filtration target medium from which the bacteria 18 and the foreign matter 19 are removed by the DLC film 17 on the surface. Can be efficiently passed, and a reduction in filtration efficiency can be reliably prevented.
  • the hydrophilic film 20 exists inside the filter body 11 and it is not necessary to strongly consider peeling and wear.
  • the film thickness of 20 may be smaller than the film thickness of the DLC film 17.
  • the thickness of the hydrophilic film 20 may be determined according to the width W of the cross section of each filtration flow channel 16. For example, if the width W is about 100 nm, the film thickness of the hydrophilic film 20 is 10 nm. If the width W is about 10 nm, the film thickness of the hydrophilic film 20 is set to several nm.
  • the hydrophilic film 20 allows atoms to be scattered in ALD, molecules and plasma to be scattered in CVD to pass through each filtration flow channel 16, or atoms in the paint on the inner surface of each filtration flow channel 16 during coating application. Or by attaching molecules. Thereby, the hydrophilic film
  • membrane 20 can be uniformly formed in the whole inner surface of each flow path 16 for filtration. Further, by evacuating each drain channel 14, it is possible to increase the flow rate of atoms, molecules, and plasma in each filtering channel 16, thereby improving the formation efficiency of the hydrophilic film 20. it can.
  • the second embodiment is different from the first embodiment in that the surface of the filter body 11 is covered with a hydrophilic film. Therefore, the description of the duplicated configuration and operation is omitted, and the description of the different configuration and operation is given below.
  • FIG. 5 is an enlarged cross-sectional view schematically showing the configuration of the filter for filtration according to the present embodiment.
  • FIG. 5 shows the configuration in part B of FIG.
  • the surface of the filter body 11 is covered with a hydrophilic film 21. Specifically, a portion of the surface of the filter body 11 exposed to the outside of each grain 15 is covered with the hydrophilic film 21.
  • the hydrophilic film 21 is made of, for example, a DLC film whose surface layer is modified to be hydrophilic. Although the DLC film exhibits hydrophobicity as described above, hydrophilicity can be imparted by performing a modification treatment.
  • a modification treatment a treatment that generates dangling bonds, polar groups, polar molecules, and the like in the surface layer of the DLC film is preferable.
  • hydrogen in hydrocarbons hereinafter referred to as “containing hydrogen” contained in the DLC film formed on the surface of the filter body 11 is replaced with boron by ion beam sputtering.
  • B 4 C having polarity hydrogen is bonded to carbon contained in the DLC film (hereinafter referred to as “containing carbon”) to generate a polar CH group, and nitrogen is bonded to the containing carbon.
  • containing carbon carbon contained in the DLC film
  • nitrogen is bonded to the containing carbon.
  • polar C 3 N 4 to bond oxygen to the contained carbon to produce a polar CO group, to bind fluorine to the contained carbon to produce a polar CF group, or to contain hydrogen Is replaced with a metal such as titanium, beryllium, chromium, zirconium, niobium, molybdenum, hafnium, tantalum, or tungsten.
  • the hydrophilic film 21 made of the DLC film whose surface layer is modified generates dangling bonds, polar groups and polar molecules, and therefore the binding energy with various media increases, The affinity is increased, and hydrophilicity is exhibited. Since the hydrophilic membrane 21 exhibiting hydrophilicity draws the filtration target medium as shown by the arrows in the figure, the amount of the filtration target medium flowing into the filter body 11 can be increased, and the filtration efficiency is lowered. Can be prevented.
  • membrane 21 is formed in the filter main body 11 by ALD or CVD, for example.
  • the modification treatment used in this embodiment is not limited to the above-described one.
  • the DLC film is irradiated with ultraviolet light, or the plasma is brought into contact with the DLC film to bond molecules between molecules or bonds between atoms.
  • the treatment includes generating a dangling bond by cutting and generating a dangling bond by performing mechanical polishing on the surface layer of the DLC film to break bonds between molecules and atoms in the surface layer.
  • the hydrophilic film 21 is not limited to a film obtained by modifying the surface layer of the DLC film, and a stable silicon compound such as silicon nitride (SiN) or silicon fluoride (SiF) can be used. Further, a silicon dioxide (SiO 2 ) film covering the surface of the filter body 11 is formed, one oxygen atom is removed from the silicon dioxide to generate silicon monoxide, and the silicon monoxide exists in the atmosphere. Alternatively, the hydrophilic film 21 may be formed by bonding OH groups having polarity from water.
  • the thickness of the hydrophilic membrane 21 is too large, the filtration flow path 16 may be blocked. On the other hand, if the thickness is small, the grain 15 may be exposed on a part of the surface of the filter body 11. It is preferably set to 100 nm.
  • the hydrophilicity can be easily imparted to the filtration filter 10 by forming the hydrophilic film 21 on the surface of the filter body 11.
  • the hydrophilicity in the present embodiment corresponds to a case where the contact angle measured by a contact angle meter manufactured by Kyowa Interface Science Co., Ltd. is 30 degrees or less, preferably 15 degrees or less.
  • FIG. 6 is an enlarged cross-sectional view schematically showing a configuration of a modification of the filter for filtration according to the present embodiment.
  • each filtration flow path 16 in the filter main body 11 of the filtration filter 10 is also covered with the hydrophilic film 21. That is, the entire surface of each grain 15 is covered with the hydrophilic film 21.
  • the hydrophilic film 21 does not need to have the same film thickness. However, the hydrophilic film 21 covering the inner surface of the filtration flow path 16 does not need to consider peeling and wear strongly, so that it is for filtration.
  • the film thickness of the hydrophilic film 21 covering the inner surface of the flow path 16 may be smaller than the film thickness of the hydrophilic film 21 exposed to the outside. Further, the thickness of the hydrophilic film 21 may be determined according to the width W of the cross section of each filtration flow channel 16. For example, if the width W is about 100 nm, the film thickness of the hydrophilic film 21 is 10 nm. If the width W is about 10 nm, the film thickness of the hydrophilic film 21 is set to several nm.
  • the hydrophilic film 21 is formed by allowing atoms, molecules, and plasma generated from the film forming gas to pass through the filtration channels 16. Thereby, the hydrophilic film
  • membrane 21 can be uniformly formed in the whole inner surface of each flow path 16 for filtration. Further, by evacuating each drain channel 14, it is possible to increase the flow rate of atoms, molecules and plasma in each filtering channel 16, thereby improving the formation efficiency of the hydrophilic film 21. it can.
  • the filter for filtration on which the DLC film 17 and the hydrophilic film 21 are formed is not limited to the filter for filtration made of a porous ceramic body, but the filter for filtration 22 made of a reverse osmosis membrane using a polymer film or a laminated film.
  • the filter 23 for filtration which consists of a made silicon substrate may be sufficient.
  • the filtration filter 22 is made of a polymer film having a large number of filtration channels 24 made of through holes (FIG. 7A).
  • the DLC film 17 covers only the surface of the polymer film (FIG. 7B). 17 covers the surface of the polymer membrane, and the hydrophilic membrane 20 covers the inner surface of the filtration channel 24 (FIG. 7C), and the hydrophilic membrane 21 covers only the surface of the polymer membrane (FIG. 7D).
  • the hydrophilic membrane 21 covers not only the surface of the polymer membrane but also the inner surface of the filtration flow path 24 (FIG. 7E).
  • the filtering filter 23 is formed by laminating a plurality of silicon substrates 26 (FIG. 8A).
  • a plurality of slits having a width and a height of several tens to several hundreds of nanometers are formed in parallel with each other on the upper surface of each silicon substrate 26 by a plasma etching process or a wet etching process using a photolithography technique.
  • each slit constitutes a filtration flow path 25 that penetrates the filtration filter 23.
  • the DLC film 17 covers only the surface of the silicon substrate 26 (FIG. 8B), the DLC film 17 covers the surface of the silicon substrate 26, and the hydrophilic film 20 is the flow path 25 for filtration. That covers the inner surface (FIG. 8C), the hydrophilic film 21 that covers only the surface of the silicon substrate 26 (FIG. 8D), and the hydrophilic film 21 that covers not only the surface of the silicon substrate 26 but also the inside of the filtration flow path 25. This also covers the surface (FIG. 8E).
  • a filter 10 in which the surface of the filter body 11 is not covered with a DLC film is prepared as a filter for a comparative example.
  • 20 ⁇ l of water droplets are attached to the surface of the filter of the comparative example, and the water droplets are comparative examples.
  • the time to be filtered by the filter was measured.
  • 20 ⁇ l of oil droplets were attached to the surface of the filter of the comparative example, and the time for which the oil droplets were filtered by the filter of the comparative example was also measured.
  • the surface of the filter body 11 is covered with a DLC film, and fluorine is injected into the DLC film by ion beam sputtering as a filter of Example 1.
  • a filter of Example 1 As in the comparative example, 20 ⁇ l The time for water droplets to be filtered by the filter of Example 1 was measured, and the time for 20 ⁇ l of oil droplets to be filtered by the filter of Example 1 was also measured.
  • the surface of the filter body 11 is covered with a DLC film, fluorine is injected into the DLC film by ion beam sputtering, and the DLC film is further subjected to heat treatment with a laser according to the second embodiment.
  • the time for 20 ⁇ l of water droplets to be filtered by the filter of Example 2 was measured, and the time for which 20 ⁇ l of oil droplets were filtered by the filter of Example 2 was also measured. .
  • the surface of the filter body 11 is covered with a DLC film, and silicon is injected into the DLC film by ion beam sputtering as a filter of Example 3, and 20 ⁇ l as in the comparative example.
  • the time for water droplets to be filtered through the filter of Example 3 was measured, and the time for 20 ⁇ l of oil droplets to be filtered through the filter of Example 3 was also measured.
  • the surface of the filter body 11 is covered with a DLC film, and silicon and fluorine are implanted into the DLC film by ion beam sputtering as a filter of Example 4, and as in the comparative example
  • the time for 20 ⁇ l of water droplets to be filtered by the filter of Example 4 was measured, and the time for 20 ⁇ l of oil droplets to be filtered by the filter of Example 4 was also measured.
  • the surface of the filter main body 11 is covered with a DLC film in the filter 10 for filtration, and the DLC film subjected to heat treatment with a laser is prepared as a filter of Example 5.
  • a DLC film in the filter 10 for filtration As in the comparative example, 20 ⁇ l The time for water droplets to be filtered by the filter of Example 5 was measured, and the time for 20 ⁇ l of oil droplets to be filtered by the filter of Example 5 was also measured.
  • Example 1 both the water droplet filtration time and the oil droplet filtration time were shorter than the comparative example. This is considered to be because a CF group having polarity was generated by fluorine injection into the DLC film, and the DLC film was modified to be hydrophilic. Moreover, since Example 1 has hydrophilicity, if Example 1 was applied to the filter 10 for filtration, it was guessed that the inflow amount to the inside of the filter main body 11 of the filter object medium could be increased.
  • Example 2 it was found that the water droplet filtration time in Example 2 was longer than that in the comparative example, although the oil droplet filtration time was almost the same as that in the comparative example. This is because, although CF groups having polarity are generated by fluorine injection into the DLC film, the surface of the DLC film becomes smoother by the heat treatment of the laser to the DLC film, and as a result, the hydrophobicity of the DLC film is maintained. It was thought that it was because of. Moreover, since Example 2 has hydrophobicity, it was guessed that if Example 2 was applied to the filter 10 for filtration, inflow of bacteria and foreign substances into the filter body 11 could be prevented.
  • Example 3 both the water droplet filtration time and the oil droplet filtration time were longer than those in the comparative example. This was thought to be because the silicon atoms were bonded to the few dangling bonds in the DLC film by silicon injection into the DLC film, and the dangling bonds were further reduced, resulting in an increase in the hydrophobicity of the DLC film.
  • Example 3 since Example 3 has hydrophobicity, it can be inferred that if Example 3 is applied to the filter 10 for filtration, inflow of bacteria and foreign matters into the filter body 11 can be prevented as in Example 2. It was done. Furthermore, in Example 3, it was presumed that the oil was also difficult to filter, that is, the oil was repelled, so that the inflow of oil into the filter body 11 could be prevented, and therefore clogging due to oil and fat could be prevented.
  • Example 4 both the water droplet filtration time and the oil droplet filtration time were longer than those in the comparative example. This is considered to be because the effect of increasing the hydrophobicity of the DLC film by injecting silicon into the DLC film exceeded the effect of modifying the hydrophilicity by injecting fluorine into the DLC film.
  • the fourth embodiment since the fourth embodiment has hydrophobicity and repels oil as in the third embodiment, if the fourth embodiment is applied to the filter 10 for filtration, the filter main body 11 is similar to the third embodiment. It was speculated that bacteria, foreign matter and oil could be prevented from entering the inside.
  • Example 5 it was found that although the oil droplet filtration time was almost the same as that of the comparative example, water droplets were not filtered at all (contact angle was about 90 degrees). This is considered to be because the hydrophobicity of the DLC film was greatly increased by the smoothing of the surface of the DLC film by the heat treatment of the laser on the DLC film. Since Example 5 does not filter water at all, it can be inferred that if Example 5 is applied to the filter 10 for filtration, water and gas can be separated, for example, methane gas can be separated from sewage. It was. Moreover, in Example 5, since water was filtered while not filtering water at all, if Example 5 was applied to the filter 10 for filtration, it was guessed that water and oil could be isolate

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Filtering Materials (AREA)

Abstract

L'invention concerne un filtre de filtration par lequel une réduction de l'efficacité de filtration peut être empêchée. L'invention concerne un filtre de filtration (10) avec un corps principal de filtre (11) comprenant un corps céramique poreux formé par frittage de nombreux grains (15) entre eux, six canaux de drain (14) formés parallèlement les uns aux autres à travers le corps principal de filtre (11) dans le sens longitudinal de celui-ci, et un canal de filtration (16) configuré à partir des espaces entre les grains (15), une surface du corps principal de filtre (11) étant recouverte par un film de DLC.
PCT/JP2013/060409 2012-04-05 2013-03-29 Filtre de filtration WO2013151147A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-086269 2012-04-05
JP2012086269 2012-04-05

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