WO2013114952A1 - Sheet-detaching device and detaching method - Google Patents

Sheet-detaching device and detaching method Download PDF

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Publication number
WO2013114952A1
WO2013114952A1 PCT/JP2013/050733 JP2013050733W WO2013114952A1 WO 2013114952 A1 WO2013114952 A1 WO 2013114952A1 JP 2013050733 W JP2013050733 W JP 2013050733W WO 2013114952 A1 WO2013114952 A1 WO 2013114952A1
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WIPO (PCT)
Prior art keywords
plate
sheet
adhesive sheet
peeling
wafer
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PCT/JP2013/050733
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French (fr)
Japanese (ja)
Inventor
芳昭 杉下
Original Assignee
リンテック株式会社
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Publication date
Application filed by リンテック株式会社 filed Critical リンテック株式会社
Priority to CN201380007456.4A priority Critical patent/CN104094396B/en
Priority to KR1020147024247A priority patent/KR102038813B1/en
Publication of WO2013114952A1 publication Critical patent/WO2013114952A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape

Definitions

  • the present invention relates to a sheet peeling apparatus and a peeling method for peeling an adhesive sheet affixed to a plate member.
  • Patent Literature 1 Japanese Patent Literature 1
  • the sheet peeling apparatus described in Patent Literature 1 includes a table that sucks and holds a wafer to which an adhesive sheet is stuck, and a tape sticking unit that sticks a strip-shaped peeling tape to the held wafer. By relatively moving the table, the adhesive sheet can be peeled from the wafer.
  • the support means is provided horizontally, impurities such as dust and dirt in the air easily fall on the wafer, and when such impurities adhere, circuits formed around the adhering portion and the periphery thereof. Therefore, there is a problem in that the yield of wafer manufacturing is reduced.
  • the objective of this invention is providing the sheet
  • Another object of the present invention is to provide a sheet peeling apparatus and a peeling method capable of reducing impurities from adhering to a plate member as much as possible.
  • the sheet peeling apparatus of the present invention includes a supporting means for supporting a plate-like member having an inclined surface inclined with respect to a horizontal plane and having an adhesive sheet affixed on one surface thereof from the other surface side with the inclined surface, A feeding means for feeding out the tape, a sticking means for sticking the peeling tape fed by the feeding means to the adhesive sheet, and a relative movement of the support means and the sticking means in the in-plane direction of the inclined surface. And a moving means for peeling the adhesive sheet from the plate-like member.
  • the support unit includes a first positioning unit that contacts an outer edge of the plate-like member and positions the plate-like member at a predetermined position on the inclined surface.
  • the sheet peeling apparatus of the present invention includes a receiving unit that receives the plate member when the support of the plate member by the support unit is released.
  • the feeding means is provided so that the peeling tape can be fed in a state where a width direction perpendicular to the feeding direction of the peeling tape is parallel to the inclined surface. It is preferable to include meandering preventing means for preventing the tape from meandering in the width direction.
  • the sheet peeling apparatus of the present invention includes second positioning means for positioning the peeling tape with respect to the adhesive sheet by relatively moving the support means and the feeding means in the width direction of the feeding object. It is preferable.
  • a plate-like member having an adhesive sheet affixed on one surface is supported from the other surface side by an inclined surface inclined with respect to a horizontal plane, and a peeling tape is fed and fed. Affixing the peeled tape to the adhesive sheet by an attaching means, and moving the plate-like member and the attaching means relative to each other in the in-plane direction of the inclined surface to peel the adhesive sheet from the plate-like member.
  • the adhesive sheet can be peeled from the plate member in a state where the plate member is inclined with respect to the horizontal plane, the area occupied by the support means can be reduced, As a result, the area including the moving space when the support means moves can be reduced, and an increase in the installation area accompanying the increase in the size of the plate-like member can be suppressed as much as possible.
  • the possibility that impurities in the atmosphere will fall on the plate-like member is reduced, and even if it falls on the plate-like member, it is easy to fall off the plate-like member due to gravity, so the impurities are on the plate-like member. It can suppress remaining.
  • the plate-like member can be positioned only by bringing the plate-like member into contact with the contact portion. For this reason, since the time required for positioning the plate-like member can be shortened, the processing capacity per unit time can be improved. Moreover, if a receiving means is provided, even if support of a plate-shaped member is cancelled
  • seat peeling apparatus of FIG. The front view of the sheet peeling apparatus of FIG.
  • the X axis, Y axis, and Z axis in this specification are orthogonal to each other, the X axis and Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane.
  • “+” is the direction of the arrow of each axis, and “ ⁇ ” is the direction opposite to the arrow.
  • a sheet peeling apparatus 1 feeds a peeling tape PT and a supporting means 2 that supports a wafer WF as a plate-like member having an adhesive sheet AS attached to one surface from the other surface side.
  • the feeding means 3 the tape positioning means 4 as the second positioning means for positioning the peeling tape PT with respect to the adhesive sheet AS, and the sticking means 5 for sticking the peeling tape PT fed by the feeding means 3 to the adhesive sheet AS.
  • a moving means 6 for separating the adhesive sheet AS from the wafer WF by moving the supporting means 2 and the attaching means 5 relative to each other, and receiving the wafer WF when the support means 2 releases the support of the wafer WF.
  • Means 7 are provided.
  • the support means 2 includes a table 22 having a support surface 21 as an inclined surface capable of sucking and holding the wafer WF by suction holding means (not shown) such as a decompression pump and a vacuum ejector, and a direct drive device provided in the table 22.
  • suction holding means such as a decompression pump and a vacuum ejector
  • a direct drive device provided in the table 22.
  • Abutting portion 25 (FIG. 2).
  • the support surface 21 is a surface parallel to a plane including the X axis and the Z axis, and is disposed in a state inclined with respect to a horizontal plane (inclination angle 90 °).
  • the feeding means 3 peels between the driving roller 32 and the supporting roller 31 that winds and supports the peeling tape PT on the receiving plate 31A, the driving roller 32 that is driven by the rotation motor 32A as a driving device, and the driving roller 32.
  • the feeding means 3 is configured so that the peeling tape PT can be fed in a state where the width direction perpendicular to the feeding direction of the peeling tape PT is parallel to the support surface 21 (a state in which the peeling tape PT is in the Z-axis direction).
  • the meandering prevention means 35 includes a bottom surface portion 36, a pair of upright portions 37 erected from both ends of the bottom surface portion 36 in the short width direction, and one end side of the upright portion 37 in the long width direction. And an expanding portion 38 that expands toward the one end side.
  • the receiving plate 31A and the meandering preventing means 35 are provided so as to be movable up and down in the Z-axis direction in accordance with the width of the peeling tape PT and the position where the peeling tape PT is attached to the adhesive sheet AS.
  • the tape positioning unit 4 includes a linear motion motor 41 as a driving device in which an output shaft (not shown) is fixed to the base frame 30, and the base frame 30 is moved in the Z-axis direction by the linear motion motor 41, thereby supporting means. 2 and the feeding means 3 are configured to be relatively movable in the in-plane direction of the support surface 21 and in the width direction of the peeling tape PT.
  • the sticking means 5 includes a pressing plate 51 supported in a posture extending in the Z-axis direction, and a heating means 52 such as a heater provided in the pressing plate 51 (FIG. 2).
  • the moving means 6 includes a linear motion motor 62 as a drive device extending in the X-axis direction, and the slider 61 supports the table 22 and is configured to be movable in the X-axis direction.
  • the receiving means 7 is arranged below the range in which the table 22 moves, and in parallel with the support surface 21 in the range in which the table 22 moves, and the housing member 71 having a U-shaped cross section provided along the X-axis direction. And two tilting prevention plates 72 are provided. Buffering means 73 and 74 made of an elastic member such as rubber, resin, or sponge are provided on the surface of the accommodation member 71 where the wafer WF is accommodated and the table 22 side of the tilt prevention plate 72. In addition, a gap 72 ⁇ / b> A that allows the pressing plate 51 to press the adhesive sheet AS against the wafer WF is provided between the tilt prevention plates 72.
  • the transport means 8 includes an articulated robot 81 as a driving device and a suction tool 82 provided at the tip of the articulated robot 81, and connects the suction tool 82 to suction means such as a suction pump (not shown).
  • suction means such as a suction pump (not shown).
  • the articulated robot 81 is a so-called six-axis robot having joints that can rotate at six locations, and is configured such that the suction tool 82 can be displaced at any position and at any angle within the work range of the articulated robot 81. ing.
  • the peeling tape PT is set as shown in FIG. Further, the linear motion motor 41 is driven to move the base frame 30 in the Z-axis direction, thereby positioning the application position of the peeling tape PT with respect to the adhesive sheet AS.
  • the transfer means 8 drives the articulated robot 81 to take out the wafer WF from the wafer storage cassette CT via the suction tool 82, and the support surface of the table 22 waiting at the position indicated by the double chain line in FIG.
  • the wafer WF is brought into contact with 21.
  • the transport unit 8 contacts the two points on the outer edge of the wafer WF with the contact portion 25 protruding from the support surface 21, and positions the wafer WF at a predetermined position on the support surface 21.
  • the support means 2 drives a suction holding means (not shown) to suck and hold the wafer WF on the support surface 21 and drives the linear motion motor 23 to bring the contact portion 25 into the table 22 as shown in FIG. Evacuate.
  • the moving means 6 drives the linear motor 62 to move the table 22 in the + X axis direction.
  • the detection means (not shown) detects that the wafer WF has reached a predetermined position
  • the feeding means 3 drives the rotation motor 32A in synchronization with the movement of the table 22 and the peeling tape via the drive roller 32. Extend PT. Accordingly, the peeling tape PT is pressed against the adhesive sheet AS by the pressing plate 51, and the peeling tape PT is folded back to the driving roller 32 side by the pressing plate 51, whereby the adhesive sheet AS is peeled from the wafer WF.
  • the peeling tape PT is prevented from meandering by restricting the movement of the peeling tape PT to the ⁇ Z axis side and the out-of-plane direction of the peeling tape PT by the meander prevention means 35.
  • the adhesive of the peeling tape PT is softened, and the degree of adhesion of the adhesive to the surface of the adhesive sheet AS is increased, so that the adhesive sheet AS is surely secured. Can be peeled off.
  • the moving unit 6 stops driving the linear motor 62. Thereafter, when the transfer unit 8 drives the articulated robot 81 and sucks and holds the wafer WF with the suction tool 82, the support unit 2 stops driving the suction holding unit (not shown). Then, the transfer unit 8 drives the articulated robot 81 to store the wafer WF in the wafer storage cassette CT. Thereafter, the moving means 6 drives the linear motion motor 62 to move the table 22 in the ⁇ X axis direction to return it to the position indicated by the chain double-dashed line in FIG. 1, and thereafter the same operation as described above is repeated.
  • the wafer WF falls and is damaged.
  • the suction holding by the suction holding means is canceled, the wafer WF is supported by the accommodation member 71 and the tilt prevention plate 72 as shown by the double chain line in FIG. Therefore, there is no inconvenience that the wafer WF is damaged.
  • the buffering means 73 of the housing member 71 and the buffering means 74 of the tilt prevention plate 72 absorb the impact when the wafer WF falls, damage to the wafer WF can be more reliably suppressed.
  • the support means 2 supports the wafer WF with the support surface 21 inclined with respect to the horizontal plane
  • the moving means 6 moves the support means 2 and the pasting means 5 relative to each other in the in-plane direction of the support surface 21 to move from the wafer WF.
  • the adhesive sheet AS is peeled off. Therefore, an increase in the installation area of the apparatus accompanying an increase in the size of the wafer WF can be suppressed as much as possible.
  • the support surface 21 is inclined with respect to the horizontal plane, the possibility of impurities in the atmosphere falling on the wafer WF is reduced, and even if it falls on the wafer WF, it falls from the wafer WF due to gravity. Since it becomes easy, it can suppress that an impurity remains on the wafer WF.
  • the support surface 21 has an inclination angle of 90 °.
  • the support surface 21 may be arranged to be inclined with respect to the horizontal plane.
  • the inclination angle is 90 °. Is set to be smaller (so that the support surface 21 can be seen from above in the direction of gravity) or larger than 90 ° (so that the support surface 21 cannot be seen from above in the direction of gravity).
  • the inclination angle is preferably 45 ° to 135 ° with respect to the horizontal plane.
  • the wafer WF mounted on the ring frame via the mount sheet may be configured so that the support means 2 can support the sheet affixed to the wafer WF.
  • the contact portion 25 is projected and retracted from the support surface 21, but the contact portion 25 is formed in a shape protruding from the support surface 21, and the contact portion 25 always protrudes from the support surface 21. It may be in a state (impossible to sink).
  • the tape positioning means 4 may move the support means 2 with the feeding means 3 stopped, or both the supporting means 2 and the feeding means 3 may be moved.
  • the moving means 6 may move the sticking means 5 while the support means 2 is stopped, or may move both the support means 2 and the sticking means 5.
  • the receiving means 7 may be configured as a single member in which the housing member 71 and the tilt prevention plate 72 are continuous, or the receiving means 7 may not be provided.
  • the sticking means 5 can employ a pressing member made of a roller, rubber, resin, sponge, or the like instead of the pressing plate 51, and can also employ a configuration in which pressing is performed by air blowing.
  • the plate-like member can be a glass plate, a steel plate, or another plate-like member such as a resin plate, or a member other than the plate-like member.
  • the wafer WF can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, and the like.
  • the adhesive sheet AS attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, Sheets of arbitrary uses and shapes, such as films and tapes, can be applied.
  • the type and material of the adhesive sheet AS are not particularly limited.
  • the adhesive sheet AS has three or more layers such as those having an intermediate layer provided between the base sheet and the adhesive layer, and other layers.
  • a single adhesive layer without a base sheet may be used.
  • the plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting a recording layer.
  • the plate-like member any form of member, article, or the like can be targeted.
  • a pressure-sensitive adhesive sheet, a heat-sensitive adhesive sheet, or the like can be used as the peeling tape PT.
  • the drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder.
  • an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot
  • an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

This sheet-detaching device (1) is equipped with: a supporting means (2) that has a tilted surface (21) which is tilted with respect to a horizontal plane and is for supporting a plate-like member (WF), which has an adhesive sheet (AS) applied to one surface, from the other surface side by means of the tilted surface (21); a feeding means (3) for feeding a detaching tape (PT); an application means (5) for applying the detaching tape (PT), which is fed by the feeding means (3), to the adhesive sheet (AS); and a moving means (6) for moving the supporting means (2) and the application means (5) relative to each other in the in-plane direction of the tilted surface (21) in order to detach the adhesive sheet (AS) from the plate-like member (WF).

Description

シート剥離装置および剥離方法Sheet peeling apparatus and peeling method
 本発明は、板状部材に貼付された接着シートを剥離するシート剥離装置および剥離方法に関する。 The present invention relates to a sheet peeling apparatus and a peeling method for peeling an adhesive sheet affixed to a plate member.
 従来、半導体製造工程において、板状部材である半導体ウェハ(以下、単に「ウェハ」という場合がある)の表面に貼付された保護シート等の接着シートを剥離するシート剥離装置が知られている(例えば、特許文献1参照)。
 特許文献1に記載のシート剥離装置は、接着シートが貼付されたウェハを吸着保持するテーブルと、保持されたウェハに帯状の剥離用テープを貼付するテープ貼付部とを備え、当該テープ貼付部とテーブルとを相対移動させることにより、ウェハから接着シートを剥離可能に構成されている。
2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, there has been known a sheet peeling apparatus that peels an adhesive sheet such as a protective sheet affixed to the surface of a semiconductor wafer that is a plate-like member (hereinafter sometimes simply referred to as “wafer”) ( For example, see Patent Document 1).
The sheet peeling apparatus described in Patent Literature 1 includes a table that sucks and holds a wafer to which an adhesive sheet is stuck, and a tape sticking unit that sticks a strip-shaped peeling tape to the held wafer. By relatively moving the table, the adhesive sheet can be peeled from the wafer.
特開2009-70837号公報JP 2009-70837 A
 ところで、近年はウェハの大径化が進み、大きなものでは18インチサイズ(ウェハ外径が約450mm)のものまで処理対象となっている。特許文献1に記載されたような従来のシート剥離装置では、重力方向上方から見たときのウェハの支持面やウェハの搬送経路、ウェハのストック領域等の専有面積が大きくなる。このため、従来のシート剥離装置では、ウェハが大きくなるほど、装置の設置面積(装置設置のための水平投影面積)が大きくなるという不都合がある。
 また、支持手段が水平に設けられているので、大気中の塵や埃等の不純物がウェハ上に落下しやすくなり、このような不純物が付着すると、当該付着部分及びその周囲に形成された回路をも検査又は廃棄するといった工程を踏む必要があり、ウェハ製造の歩留り低下を招くという不具合がある。
By the way, in recent years, the diameter of a wafer has been increased, and even a large wafer having a size of 18 inches (wafer outer diameter of about 450 mm) is a processing target. In the conventional sheet peeling apparatus as described in Patent Document 1, a dedicated area such as a wafer support surface, a wafer transfer path, and a wafer stock area when viewed from above in the direction of gravity increases. For this reason, in the conventional sheet peeling apparatus, there exists a problem that the installation area (horizontal projection area for apparatus installation) of an apparatus becomes large, so that a wafer becomes large.
Further, since the support means is provided horizontally, impurities such as dust and dirt in the air easily fall on the wafer, and when such impurities adhere, circuits formed around the adhering portion and the periphery thereof. Therefore, there is a problem in that the yield of wafer manufacturing is reduced.
 本発明の目的は、板状部材のサイズの増加に伴う設置面積の増加を極力抑制することができるシート剥離装置および剥離方法を提供することにある。
 また本発明の別の目的は、不純物が板状部材上に付着することを極力低減することができるシート剥離装置および剥離方法を提供することにある。
The objective of this invention is providing the sheet | seat peeling apparatus and peeling method which can suppress the increase in the installation area accompanying the increase in the size of a plate-shaped member as much as possible.
Another object of the present invention is to provide a sheet peeling apparatus and a peeling method capable of reducing impurities from adhering to a plate member as much as possible.
 本発明のシート剥離装置は、水平面に対して傾斜した傾斜面を有し、一方の面に接着シートが貼付された板状部材を当該傾斜面で他方の面側から支持する支持手段と、剥離用テープを繰り出す繰出手段と、前記繰出手段で繰り出された剥離用テープを前記接着シートに貼付する貼付手段と、前記支持手段と前記貼付手段とを前記傾斜面の面内方向に相対移動させて前記板状部材から前記接着シートを剥離する移動手段とを備えていることを特徴とする。 The sheet peeling apparatus of the present invention includes a supporting means for supporting a plate-like member having an inclined surface inclined with respect to a horizontal plane and having an adhesive sheet affixed on one surface thereof from the other surface side with the inclined surface, A feeding means for feeding out the tape, a sticking means for sticking the peeling tape fed by the feeding means to the adhesive sheet, and a relative movement of the support means and the sticking means in the in-plane direction of the inclined surface. And a moving means for peeling the adhesive sheet from the plate-like member.
 本発明のシート剥離装置において、前記支持手段は、前記板状部材の外縁に当接して当該板状部材を前記傾斜面の所定位置に位置決めする第1位置決め手段を備えていることが好ましい。
 また、本発明のシート剥離装置は、前記支持手段による板状部材の支持が解除されたときに当該板状部材を受け止める受止手段を備えていることが好ましい。
 また、本発明のシート剥離装置において、前記繰出手段は、前記剥離用テープの繰出方向に直交する幅方向が前記傾斜面と平行となる状態で当該剥離用テープを繰出可能に設けられ、前記剥離用テープが前記幅方向に蛇行することを防止する蛇行防止手段を備えていることが好ましい。
 さらに、本発明のシート剥離装置は、前記支持手段と前記繰出手段とを前記繰出対象物の幅方向に相対移動させて、前記接着シートに対する前記剥離用テープの位置決めを行う第2位置決め手段を備えていることが好ましい。
In the sheet peeling apparatus according to the aspect of the invention, it is preferable that the support unit includes a first positioning unit that contacts an outer edge of the plate-like member and positions the plate-like member at a predetermined position on the inclined surface.
Moreover, it is preferable that the sheet peeling apparatus of the present invention includes a receiving unit that receives the plate member when the support of the plate member by the support unit is released.
Further, in the sheet peeling apparatus of the present invention, the feeding means is provided so that the peeling tape can be fed in a state where a width direction perpendicular to the feeding direction of the peeling tape is parallel to the inclined surface. It is preferable to include meandering preventing means for preventing the tape from meandering in the width direction.
Furthermore, the sheet peeling apparatus of the present invention includes second positioning means for positioning the peeling tape with respect to the adhesive sheet by relatively moving the support means and the feeding means in the width direction of the feeding object. It is preferable.
 一方、本発明のシート剥離方法は、一方の面に接着シートが貼付された板状部材を、水平面に対して傾斜した傾斜面で他方の面側から支持し、剥離用テープを繰り出し、繰り出された剥離用テープを貼付手段により前記接着シートに貼付し、前記板状部材と前記貼付手段とを前記傾斜面の面内方向に相対移動させて前記板状部材から前記接着シートを剥離することを特徴とする。 On the other hand, in the sheet peeling method of the present invention, a plate-like member having an adhesive sheet affixed on one surface is supported from the other surface side by an inclined surface inclined with respect to a horizontal plane, and a peeling tape is fed and fed. Affixing the peeled tape to the adhesive sheet by an attaching means, and moving the plate-like member and the attaching means relative to each other in the in-plane direction of the inclined surface to peel the adhesive sheet from the plate-like member. Features.
 以上のような本発明によれば、板状部材を水平面に対して傾けた状態で当該板状部材から接着シートを剥離することができるので、支持手段が専有する面積を低減することができ、延いては、支持手段が移動する場合の移動スペースをも含めた面積を低減することができ、板状部材のサイズの増加に伴う設置面積の増加を極力抑制することができる。
 また、大気中の不純物が板状部材上に落下する可能性を低減し、仮に板状部材上に落下したとしても、重力により板状部材上から落ちやすくなるため、不純物が板状部材上に残存することを抑制することができる。
According to the present invention as described above, since the adhesive sheet can be peeled from the plate member in a state where the plate member is inclined with respect to the horizontal plane, the area occupied by the support means can be reduced, As a result, the area including the moving space when the support means moves can be reduced, and an increase in the installation area accompanying the increase in the size of the plate-like member can be suppressed as much as possible.
In addition, the possibility that impurities in the atmosphere will fall on the plate-like member is reduced, and even if it falls on the plate-like member, it is easy to fall off the plate-like member due to gravity, so the impurities are on the plate-like member. It can suppress remaining.
 この際、第1位置決め手段を設ければ、板状部材を傾斜面に支持させる場合でも、板状部材を当接部に当接させるだけで板状部材を位置決めすることができる。このため、板状部材の位置決めに要する時間を短縮することができるので、単位時間あたりの処理能力を向上させることができる。
 また、受止手段を設ければ、万が一板状部材の支持が解除されたとしても、当該板状部材が落下して破損することを防止することができる。
 また、蛇行防止手段を設ければ、剥離用テープが蛇行することを防止することができ、接着シートに対する剥離用テープの貼付位置がずれてしまうような不都合を防止することができる。
 さらに、第2位置決め手段を設ければ、接着シートに対する剥離用テープの貼付位置を任意に変更することができる。
At this time, if the first positioning means is provided, even when the plate-like member is supported on the inclined surface, the plate-like member can be positioned only by bringing the plate-like member into contact with the contact portion. For this reason, since the time required for positioning the plate-like member can be shortened, the processing capacity per unit time can be improved.
Moreover, if a receiving means is provided, even if support of a plate-shaped member is cancelled | released, it can prevent the said plate-shaped member falling and damaging.
In addition, if the meandering prevention means is provided, it is possible to prevent the peeling tape from meandering, and it is possible to prevent an inconvenience that the attaching position of the peeling tape to the adhesive sheet is shifted.
Furthermore, if the 2nd positioning means is provided, the sticking position of the peeling tape with respect to an adhesive sheet can be changed arbitrarily.
本発明の第1実施形態に係るシート剥離装置を示す斜視図。The perspective view which shows the sheet | seat peeling apparatus which concerns on 1st Embodiment of this invention. 図1のシート剥離装置の平面図。The top view of the sheet | seat peeling apparatus of FIG. 図1のシート剥離装置の正面図。The front view of the sheet peeling apparatus of FIG.
 以下、本発明の一実施形態を図面に基づいて説明する。
 なお、本明細書におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸及びY軸は、水平面内の軸とし、Z軸は、水平面に直交する軸とする。また、各軸において方向を示す場合、「+」は各軸の矢印方向、「-」は矢印の反対方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, Y axis, and Z axis in this specification are orthogonal to each other, the X axis and Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Further, when indicating the direction in each axis, “+” is the direction of the arrow of each axis, and “−” is the direction opposite to the arrow.
 図1および図2において、シート剥離装置1は、一方の面に接着シートASが貼付された板状部材としてのウェハWFを他方の面側から支持する支持手段2と、剥離用テープPTを繰り出す繰出手段3と、接着シートASに対する剥離用テープPTの位置決めを行う第2位置決め手段としてのテープ位置決め手段4と、繰出手段3で繰り出された剥離用テープPTを接着シートASに貼付する貼付手段5と、支持手段2と貼付手段5とを相対移動させてウェハWFから接着シートASを剥離する移動手段6と、支持手段2によるウェハWFの支持が解除されたときに当該ウェハWFを受け止める受止手段7とを備えている。 1 and 2, a sheet peeling apparatus 1 feeds a peeling tape PT and a supporting means 2 that supports a wafer WF as a plate-like member having an adhesive sheet AS attached to one surface from the other surface side. The feeding means 3, the tape positioning means 4 as the second positioning means for positioning the peeling tape PT with respect to the adhesive sheet AS, and the sticking means 5 for sticking the peeling tape PT fed by the feeding means 3 to the adhesive sheet AS. And a moving means 6 for separating the adhesive sheet AS from the wafer WF by moving the supporting means 2 and the attaching means 5 relative to each other, and receiving the wafer WF when the support means 2 releases the support of the wafer WF. Means 7 are provided.
 支持手段2は、減圧ポンプや真空エジェクタ等の図示しない吸着保持手段によってウェハWFを吸着保持可能な傾斜面としての支持面21を有するテーブル22と、テーブル22内に設けられた駆動機器としての直動モータ23(図2)と、直動モータ23に支持されて支持面21の開口24から突没可能とされるとともに、支持面21から突出した状態でウェハWFを位置決めする第1位置決め手段としての当接部25(図2)とを備えている。支持面21は、X軸及びZ軸を含む平面と平行な面とされ、水平面に対して傾斜した状態(傾斜角90°)で配置されている。 The support means 2 includes a table 22 having a support surface 21 as an inclined surface capable of sucking and holding the wafer WF by suction holding means (not shown) such as a decompression pump and a vacuum ejector, and a direct drive device provided in the table 22. As a first positioning means for positioning the wafer WF in a state of being protruded from the support surface 21 while being supported by the moving motor 23 (FIG. 2) and the opening 24 of the support surface 21 supported by the linear motion motor 23. Abutting portion 25 (FIG. 2). The support surface 21 is a surface parallel to a plane including the X axis and the Z axis, and is disposed in a state inclined with respect to a horizontal plane (inclination angle 90 °).
 繰出手段3は、受け板31A上で剥離用テープPTを巻回して支持する支持ローラ31と、駆動機器としての回動モータ32Aによって駆動される駆動ローラ32と、駆動ローラ32との間に剥離用テープPTを挟み込むピンチローラ33と、駆動機器としての回動モータ34Aによって駆動され、剥離用テープPTおよび当該剥離用テープPTに貼付された接着シートASを回収する回収ローラ34と、剥離用テープPTの蛇行を防止する蛇行防止手段35とを備え、その全体がベースフレーム30に支持されている。繰出手段3は、剥離用テープPTの繰出方向に直交する幅方向が支持面21と平行となる状態(Z軸方向となる状態)で当該剥離用テープPTを繰出可能に構成されている。 The feeding means 3 peels between the driving roller 32 and the supporting roller 31 that winds and supports the peeling tape PT on the receiving plate 31A, the driving roller 32 that is driven by the rotation motor 32A as a driving device, and the driving roller 32. A pinch roller 33 for sandwiching the adhesive tape PT, a recovery roller 34 that is driven by a rotation motor 34A as a driving device and collects the release tape PT and the adhesive sheet AS attached to the release tape PT, and an exfoliation tape Meandering prevention means 35 for preventing PT meandering, and the whole is supported by the base frame 30. The feeding means 3 is configured so that the peeling tape PT can be fed in a state where the width direction perpendicular to the feeding direction of the peeling tape PT is parallel to the support surface 21 (a state in which the peeling tape PT is in the Z-axis direction).
 蛇行防止手段35は、図2に示すように、底面部36と、底面部36の短寸幅方向の両端部から起立した一対の起立部37と、起立部37の長寸幅方向の一端側に設けられ、当該一端側に向かうに従って拡開する拡開部38とを備えている。受け板31A及び蛇行防止手段35は、剥離用テープPTの幅や、剥離用テープPTを接着シートASに貼付する位置に合わせてZ軸方向に昇降可能に設けられている。 As shown in FIG. 2, the meandering prevention means 35 includes a bottom surface portion 36, a pair of upright portions 37 erected from both ends of the bottom surface portion 36 in the short width direction, and one end side of the upright portion 37 in the long width direction. And an expanding portion 38 that expands toward the one end side. The receiving plate 31A and the meandering preventing means 35 are provided so as to be movable up and down in the Z-axis direction in accordance with the width of the peeling tape PT and the position where the peeling tape PT is attached to the adhesive sheet AS.
 テープ位置決め手段4は、図示しない出力軸がベースフレーム30に固定された駆動機器としての直動モータ41を備え、当該直動モータ41によりベースフレーム30をZ軸方向に移動させることで、支持手段2と繰出手段3とを支持面21の面内方向であって剥離用テープPTの幅方向に相対移動可能に構成されている。 The tape positioning unit 4 includes a linear motion motor 41 as a driving device in which an output shaft (not shown) is fixed to the base frame 30, and the base frame 30 is moved in the Z-axis direction by the linear motion motor 41, thereby supporting means. 2 and the feeding means 3 are configured to be relatively movable in the in-plane direction of the support surface 21 and in the width direction of the peeling tape PT.
 貼付手段5は、Z軸方向に延びた姿勢で支持された押圧板51と、押圧板51内に設けられたヒータ等の加熱手段52(図2)とを備えている。 The sticking means 5 includes a pressing plate 51 supported in a posture extending in the Z-axis direction, and a heating means 52 such as a heater provided in the pressing plate 51 (FIG. 2).
 移動手段6は、X軸方向に延設された駆動機器としての直動モータ62を備え、そのスライダ61がテーブル22を支持してX軸方向に移動可能に構成されている。 The moving means 6 includes a linear motion motor 62 as a drive device extending in the X-axis direction, and the slider 61 supports the table 22 and is configured to be movable in the X-axis direction.
 受止手段7は、テーブル22の移動する範囲の下方で、X軸方向に沿って設けられた断面U字形状の収容部材71と、テーブル22の移動する範囲で支持面21に平行に配置された2つの傾倒防止板72とを備えている。収容部材71におけるウェハWFの収容部および傾倒防止板72におけるテーブル22側の面には、ゴム、樹脂、スポンジ等の弾性部材で構成された緩衝手段73,74が設けられている。また、傾倒防止板72同士の間には、押圧板51が接着シートASをウェハWFに押圧することを許容する隙間72Aが設けられている。 The receiving means 7 is arranged below the range in which the table 22 moves, and in parallel with the support surface 21 in the range in which the table 22 moves, and the housing member 71 having a U-shaped cross section provided along the X-axis direction. And two tilting prevention plates 72 are provided. Buffering means 73 and 74 made of an elastic member such as rubber, resin, or sponge are provided on the surface of the accommodation member 71 where the wafer WF is accommodated and the table 22 side of the tilt prevention plate 72. In addition, a gap 72 </ b> A that allows the pressing plate 51 to press the adhesive sheet AS against the wafer WF is provided between the tilt prevention plates 72.
 搬送手段8は、駆動機器としての多関節ロボット81と、この多関節ロボット81の先端部に設けられた吸着ツール82とを備え、図示しない吸引ポンプ等の吸引手段に吸着ツール82を接続することでウェハWFを吸着保持可能に構成されている。多関節ロボット81は、6箇所に回転可能な関節を有する所謂6軸ロボットであり、当該多関節ロボット81の作業範囲内において吸着ツール82を何れの位置、何れの角度にでも変位可能に構成されている。 The transport means 8 includes an articulated robot 81 as a driving device and a suction tool 82 provided at the tip of the articulated robot 81, and connects the suction tool 82 to suction means such as a suction pump (not shown). Thus, the wafer WF can be sucked and held. The articulated robot 81 is a so-called six-axis robot having joints that can rotate at six locations, and is configured such that the suction tool 82 can be displaced at any position and at any angle within the work range of the articulated robot 81. ing.
 以上のシート剥離装置1において、ウェハWFから接着シートASを剥離する手順を説明する。
 先ず、剥離用テープPTを図1に示すようにセットする。また、直動モータ41を駆動してベースフレーム30をZ軸方向に移動させ、接着シートASに対する剥離用テープPTの貼付位置の位置決めを行う。
In the above sheet peeling apparatus 1, the procedure for peeling the adhesive sheet AS from the wafer WF will be described.
First, the peeling tape PT is set as shown in FIG. Further, the linear motion motor 41 is driven to move the base frame 30 in the Z-axis direction, thereby positioning the application position of the peeling tape PT with respect to the adhesive sheet AS.
 次に、搬送手段8が多関節ロボット81を駆動し、吸着ツール82を介してウェハ収納カセットCTからウェハWFを取り出し、図1中二転鎖線で示す位置に待機しているテーブル22の支持面21にウェハWFを当接させる。このとき、搬送手段8は、支持面21から突出された当接部25にウェハWFの外縁の2点を当接させ、当該ウェハWFを支持面21の所定位置に位置決めする。次いで、支持手段2が図示しない吸着保持手段を駆動し、ウェハWFを支持面21で吸着保持するとともに、直動モータ23を駆動し、図3に示すように、当接部25をテーブル22内に退避させる。 Next, the transfer means 8 drives the articulated robot 81 to take out the wafer WF from the wafer storage cassette CT via the suction tool 82, and the support surface of the table 22 waiting at the position indicated by the double chain line in FIG. The wafer WF is brought into contact with 21. At this time, the transport unit 8 contacts the two points on the outer edge of the wafer WF with the contact portion 25 protruding from the support surface 21, and positions the wafer WF at a predetermined position on the support surface 21. Next, the support means 2 drives a suction holding means (not shown) to suck and hold the wafer WF on the support surface 21 and drives the linear motion motor 23 to bring the contact portion 25 into the table 22 as shown in FIG. Evacuate.
 そして、移動手段6が直動モータ62を駆動し、テーブル22を+X軸方向に移動させる。ウェハWFが所定の位置に到達したことが図示しない検知手段に検知されると、テーブル22の移動に同期して繰出手段3が回動モータ32Aを駆動し、駆動ローラ32を介して剥離用テープPTを繰り出す。これにより、剥離用テープPTが押圧板51によって接着シートASに押圧されるとともに、当該剥離用テープPTが押圧板51によって駆動ローラ32側に折り返されることで、ウェハWFから接着シートASが剥離される。この際、剥離用テープPTは、蛇行防止手段35により-Z軸側および剥離用テープPTの面外方向への移動が規制されることで、剥離用テープPTの蛇行が防止される。また、加熱手段52により剥離用テープPTを加熱することで、剥離用テープPTの接着剤を軟化させ、当該接着剤を接着シートASの表面に密着させる度合いを大きくして、接着シートASを確実に剥離させることができる。 Then, the moving means 6 drives the linear motor 62 to move the table 22 in the + X axis direction. When the detection means (not shown) detects that the wafer WF has reached a predetermined position, the feeding means 3 drives the rotation motor 32A in synchronization with the movement of the table 22 and the peeling tape via the drive roller 32. Extend PT. Accordingly, the peeling tape PT is pressed against the adhesive sheet AS by the pressing plate 51, and the peeling tape PT is folded back to the driving roller 32 side by the pressing plate 51, whereby the adhesive sheet AS is peeled from the wafer WF. The At this time, the peeling tape PT is prevented from meandering by restricting the movement of the peeling tape PT to the −Z axis side and the out-of-plane direction of the peeling tape PT by the meander prevention means 35. In addition, by heating the peeling tape PT by the heating means 52, the adhesive of the peeling tape PT is softened, and the degree of adhesion of the adhesive to the surface of the adhesive sheet AS is increased, so that the adhesive sheet AS is surely secured. Can be peeled off.
 ウェハWFからの接着シートASの剥離が完了すると、移動手段6が直動モータ62の駆動を停止する。その後、搬送手段8が多関節ロボット81を駆動し、吸着ツール82でウェハWFを吸着保持すると、支持手段2が図示しない吸着保持手段の駆動を停止する。そして、搬送手段8が多関節ロボット81を駆動し、ウェハWFをウェハ収納カセットCTに収納する。
 その後、移動手段6は、直動モータ62を駆動し、テーブル22を-X軸方向に移動させて、図1中二転鎖線で示す位置に復帰させ、以降上記同様の動作が繰り返される。
When the peeling of the adhesive sheet AS from the wafer WF is completed, the moving unit 6 stops driving the linear motor 62. Thereafter, when the transfer unit 8 drives the articulated robot 81 and sucks and holds the wafer WF with the suction tool 82, the support unit 2 stops driving the suction holding unit (not shown). Then, the transfer unit 8 drives the articulated robot 81 to store the wafer WF in the wafer storage cassette CT.
Thereafter, the moving means 6 drives the linear motion motor 62 to move the table 22 in the −X axis direction to return it to the position indicated by the chain double-dashed line in FIG. 1, and thereafter the same operation as described above is repeated.
 ここで、ウェハWFがテーブル22に支持されているときに、何らかの要因で吸着保持手段での吸着保持が解除されてしまうと、ウェハWFが落下して損傷してしまう。本実施形態の場合、万が一吸着保持手段での吸着保持が解除されてしまった場合でも、図3中二転鎖線で示すように、ウェハWFは、収容部材71及び傾倒防止板72で支持されるのでウェハWFが損傷してしまうような不都合は発生しない。まして、収容部材71の緩衝手段73および傾倒防止板72の緩衝手段74が、ウェハWFが落下したときの衝撃を吸収するため、ウェハWFの損傷をより確実に抑制することができる。 Here, when the wafer WF is supported on the table 22 and the suction holding by the suction holding means is released for some reason, the wafer WF falls and is damaged. In the case of the present embodiment, even if the suction holding by the suction holding means is canceled, the wafer WF is supported by the accommodation member 71 and the tilt prevention plate 72 as shown by the double chain line in FIG. Therefore, there is no inconvenience that the wafer WF is damaged. Moreover, since the buffering means 73 of the housing member 71 and the buffering means 74 of the tilt prevention plate 72 absorb the impact when the wafer WF falls, damage to the wafer WF can be more reliably suppressed.
 以上のような本実施形態によれば、次のような効果がある。
 すなわち、支持手段2が水平面に対して傾斜した支持面21でウェハWFを支持し、移動手段6が支持手段2と貼付手段5とを支持面21の面内方向に相対移動させてウェハWFから接着シートASを剥離する。従って、ウェハWFのサイズの増加に伴う装置の設置面積の増加を極力抑制することができる。
 また、支持面21が水平面に対して傾斜しているので、大気中の不純物がウェハWF上に落下する可能性を低減し、仮にウェハWF上に落下したとしても、重力によりウェハWF上から落ちやすくなるため、不純物がウェハWF上に残存することを抑制することができる。
According to this embodiment as described above, the following effects are obtained.
That is, the support means 2 supports the wafer WF with the support surface 21 inclined with respect to the horizontal plane, and the moving means 6 moves the support means 2 and the pasting means 5 relative to each other in the in-plane direction of the support surface 21 to move from the wafer WF. The adhesive sheet AS is peeled off. Therefore, an increase in the installation area of the apparatus accompanying an increase in the size of the wafer WF can be suppressed as much as possible.
In addition, since the support surface 21 is inclined with respect to the horizontal plane, the possibility of impurities in the atmosphere falling on the wafer WF is reduced, and even if it falls on the wafer WF, it falls from the wafer WF due to gravity. Since it becomes easy, it can suppress that an impurity remains on the wafer WF.
 以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。 As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.
 例えば、前記実施形態では、支持面21の傾斜角を90°としたものを例示したが、支持面21は、水平面に対して傾斜して配置されていればよく、例えば、傾斜角が90°よりも小さくなるように(支持面21が重力方向上方から見える向きとなるように)設定したり、90°よりも大きくなるように(支持面21が重力方向上方から見えない向きとなるように)設定したりしてもよいが、装置の設置面積の増加を抑制する観点から、傾斜角は、水平面に対して45°~135°であることが好ましい。 For example, in the above-described embodiment, the support surface 21 has an inclination angle of 90 °. However, the support surface 21 may be arranged to be inclined with respect to the horizontal plane. For example, the inclination angle is 90 °. Is set to be smaller (so that the support surface 21 can be seen from above in the direction of gravity) or larger than 90 ° (so that the support surface 21 cannot be seen from above in the direction of gravity). However, from the viewpoint of suppressing an increase in the installation area of the apparatus, the inclination angle is preferably 45 ° to 135 ° with respect to the horizontal plane.
 また、マウント用シートを介してリングフレームにマウントされたウェハWFを支持手段2が支持できるように構成し、当該ウェハWFに貼付されたシートを剥離できる構成としてもよい。 Alternatively, the wafer WF mounted on the ring frame via the mount sheet may be configured so that the support means 2 can support the sheet affixed to the wafer WF.
 さらに、当接部25は、支持面21から突没可能とされたていたが、当接部25を支持面21から突出した形状に形成し、当接部25が常に支持面21から突出した状態(突没不能)にしてもよい。 Further, the contact portion 25 is projected and retracted from the support surface 21, but the contact portion 25 is formed in a shape protruding from the support surface 21, and the contact portion 25 always protrudes from the support surface 21. It may be in a state (impossible to sink).
 また、テープ位置決め手段4は、繰出手段3を停止させた状態で支持手段2を移動させてもよいし、支持手段2と繰出手段3との両方を移動させてもよい。
 さらに、移動手段6は、支持手段2を停止させた状態で貼付手段5を移動させてもよいし、支持手段2と貼付手段5との両方を移動させてもよい。
Further, the tape positioning means 4 may move the support means 2 with the feeding means 3 stopped, or both the supporting means 2 and the feeding means 3 may be moved.
Furthermore, the moving means 6 may move the sticking means 5 while the support means 2 is stopped, or may move both the support means 2 and the sticking means 5.
 また、受止手段7は、収容部材71と傾倒防止板72とを連続させた1つの部材として構成してもよいし、受止手段7を設けなくてもよい。
 さらに、貼付手段5は、押圧板51に替えて、ローラ、ゴム、樹脂、スポンジ等による押圧部材を採用することができ、エア噴き付けにより押圧する構成も採用することができる。
Further, the receiving means 7 may be configured as a single member in which the housing member 71 and the tilt prevention plate 72 are continuous, or the receiving means 7 may not be provided.
Furthermore, the sticking means 5 can employ a pressing member made of a roller, rubber, resin, sponge, or the like instead of the pressing plate 51, and can also employ a configuration in which pressing is performed by air blowing.
 また、板状部材は、ウェハWF以外にガラス板、鋼板、または、樹脂板等、その他の板状部材などや、板状部材以外のものも対象とすることができる。そして、ウェハWFは、シリコン半導体ウェハや化合物半導体ウェハ等が例示でき、このような半導体ウェハに貼付する接着シートASは、保護シート、ダイシングテープ、ダイアタッチフィルムに限らず、その他の任意のシート、フィルム、テープ等、任意の用途、形状のシート等が適用できる。 In addition to the wafer WF, the plate-like member can be a glass plate, a steel plate, or another plate-like member such as a resin plate, or a member other than the plate-like member. The wafer WF can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, and the like. The adhesive sheet AS attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, Sheets of arbitrary uses and shapes, such as films and tapes, can be applied.
 さらに、接着シートASの種別や材質などは、特に限定されず、例えば、基材シートと接着剤層との間に設けられる中間層を有するものや、他の層を有する等3層以上のものでもよいし、基材シートを有さない接着剤層単体のものでもよい。
 また、板状部材が光ディスクの基板であって、接着シートが記録層を構成する樹脂層を有したものであってもよい。以上のように、板状部材としては、任意の形態の部材や物品なども対象とすることができる。
 さらに、剥離用テープPTは、感圧接着性の接着シートや感熱接着性の接着シート等を採用することができる。
Furthermore, the type and material of the adhesive sheet AS are not particularly limited. For example, the adhesive sheet AS has three or more layers such as those having an intermediate layer provided between the base sheet and the adhesive layer, and other layers. Alternatively, a single adhesive layer without a base sheet may be used.
The plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting a recording layer. As described above, as the plate-like member, any form of member, article, or the like can be targeted.
Further, a pressure-sensitive adhesive sheet, a heat-sensitive adhesive sheet, or the like can be used as the peeling tape PT.
 前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。 The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).
 1     シート剥離装置
 2     支持手段
 3     繰出手段
 4     テープ位置決め手段(第2位置決め手段)
 5     貼付手段
 6     移動手段
 7     受止手段
 21    支持面(傾斜面)
 25    当接部(第1位置決め手段)
 35    蛇行防止手段
 AS    接着シート
 PT    剥離用テープ
 WF    ウェハ(板状部材)
DESCRIPTION OF SYMBOLS 1 Sheet peeling apparatus 2 Support means 3 Feeding means 4 Tape positioning means (2nd positioning means)
5 sticking means 6 moving means 7 receiving means 21 support surface (inclined surface)
25 Contact part (first positioning means)
35 Meandering prevention means AS adhesive sheet PT peeling tape WF wafer (plate-like member)

Claims (6)

  1.  水平面に対して傾斜した傾斜面を有し、一方の面に接着シートが貼付された板状部材を当該傾斜面で他方の面側から支持する支持手段と、
     剥離用テープを繰り出す繰出手段と、
     前記繰出手段で繰り出された剥離用テープを前記接着シートに貼付する貼付手段と、
     前記支持手段と前記貼付手段とを前記傾斜面の面内方向に相対移動させて前記板状部材から前記接着シートを剥離する移動手段とを備えていることを特徴とするシート剥離装置。
    Support means for supporting a plate-like member having an inclined surface inclined with respect to a horizontal plane and having an adhesive sheet attached to one surface from the other surface side with the inclined surface;
    A feeding means for feeding out the peeling tape;
    A sticking means for sticking the peeling tape fed by the feeding means to the adhesive sheet;
    A sheet peeling apparatus comprising: a moving means for moving the support means and the sticking means relative to each other in an in-plane direction of the inclined surface to peel the adhesive sheet from the plate-like member.
  2.  前記支持手段は、前記板状部材の外縁に当接して当該板状部材を前記傾斜面の所定位置に位置決めする第1位置決め手段を備えていることを特徴とする請求項1に記載のシート剥離装置。 2. The sheet peeling device according to claim 1, wherein the supporting unit includes a first positioning unit that contacts an outer edge of the plate-shaped member and positions the plate-shaped member at a predetermined position of the inclined surface. apparatus.
  3.  前記支持手段による板状部材の支持が解除されたときに当該板状部材を受け止める受止手段を備えていることを特徴とする請求項1または請求項2に記載のシート剥離装置。 3. The sheet peeling apparatus according to claim 1 or 2, further comprising receiving means for receiving the plate member when the support of the plate member by the support means is released.
  4.  前記繰出手段は、前記剥離用テープの繰出方向に直交する幅方向が前記傾斜面と平行となる状態で当該剥離用テープを繰出可能に設けられ、
     前記剥離用テープが前記幅方向に蛇行することを防止する蛇行防止手段を備えていることを特徴とする請求項1から請求項3のいずれかに記載のシート剥離装置。
    The feeding means is provided such that the peeling tape can be fed in a state where a width direction perpendicular to the feeding direction of the peeling tape is parallel to the inclined surface,
    The sheet peeling apparatus according to any one of claims 1 to 3, further comprising meandering preventing means for preventing the peeling tape from meandering in the width direction.
  5.  前記支持手段と前記繰出手段とを前記繰出対象物の幅方向に相対移動させて、前記接着シートに対する前記剥離用テープの位置決めを行う第2位置決め手段を備えていることを特徴とする請求項1から請求項4のいずれかに記載のシート剥離装置。 2. A second positioning means for positioning the peeling tape with respect to the adhesive sheet by moving the supporting means and the feeding means relative to each other in the width direction of the feeding object. The sheet peeling apparatus according to claim 4.
  6.  一方の面に接着シートが貼付された板状部材を、水平面に対して傾斜した傾斜面で他方の面側から支持し、
     剥離用テープを繰り出し、
     繰り出された剥離用テープを貼付手段により前記接着シートに貼付し、
     前記板状部材と前記貼付手段とを前記傾斜面の面内方向に相対移動させて前記板状部材から前記接着シートを剥離することを特徴とするシート剥離方法。
    A plate-like member having an adhesive sheet attached to one surface is supported from the other surface side with an inclined surface inclined with respect to the horizontal plane,
    Pull out the peeling tape,
    Affixing the peeled tape that has been unwound to the adhesive sheet by an attaching means,
    A sheet peeling method, wherein the adhesive sheet is peeled from the plate member by relatively moving the plate member and the sticking means in an in-plane direction of the inclined surface.
PCT/JP2013/050733 2012-01-31 2013-01-17 Sheet-detaching device and detaching method WO2013114952A1 (en)

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JP6825951B2 (en) * 2017-03-23 2021-02-03 信越ポリマー株式会社 Support jig peeling device and peeling method
TWI620690B (en) * 2017-06-19 2018-04-11 緯士登科技股份有限公司 A plastic sheets supplying device, and an automatic filling system using the device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697209A (en) * 1992-09-10 1994-04-08 Toshiba Seiki Kk Semiconductor pellet bonding method
JP2001345368A (en) * 2000-05-31 2001-12-14 Fujitsu Ltd Method and apparatus for releasing and conveying semiconductor chip
JP2005136305A (en) * 2003-10-31 2005-05-26 Lintec Corp Table for sticking device
JP2006069735A (en) * 2004-09-02 2006-03-16 Matsushita Electric Ind Co Ltd Winding device and its method
JP2010157584A (en) * 2008-12-26 2010-07-15 Sumco Corp Method of transporting silicon wafer for analysis
JP2011044538A (en) * 2009-08-20 2011-03-03 Tesetsuku:Kk Apparatus and method for transfer of wafer frame
JP2011114029A (en) * 2009-11-24 2011-06-09 Tsubakuro Electrical Machinery Inc Sheet sticking device
JP2011210857A (en) * 2010-03-29 2011-10-20 Lintec Corp Mounting apparatus and method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4964070B2 (en) 2007-09-10 2012-06-27 日東電工株式会社 Protective tape peeling method and protective tape peeling apparatus
JP5412226B2 (en) * 2009-10-01 2014-02-12 日東電工株式会社 Adhesive tape pasting device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697209A (en) * 1992-09-10 1994-04-08 Toshiba Seiki Kk Semiconductor pellet bonding method
JP2001345368A (en) * 2000-05-31 2001-12-14 Fujitsu Ltd Method and apparatus for releasing and conveying semiconductor chip
JP2005136305A (en) * 2003-10-31 2005-05-26 Lintec Corp Table for sticking device
JP2006069735A (en) * 2004-09-02 2006-03-16 Matsushita Electric Ind Co Ltd Winding device and its method
JP2010157584A (en) * 2008-12-26 2010-07-15 Sumco Corp Method of transporting silicon wafer for analysis
JP2011044538A (en) * 2009-08-20 2011-03-03 Tesetsuku:Kk Apparatus and method for transfer of wafer frame
JP2011114029A (en) * 2009-11-24 2011-06-09 Tsubakuro Electrical Machinery Inc Sheet sticking device
JP2011210857A (en) * 2010-03-29 2011-10-20 Lintec Corp Mounting apparatus and method

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JP5993578B2 (en) 2016-09-14

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