WO2013114313A3 - Creuset pour la solidification de lingot de silicium et son procede de fabrication - Google Patents

Creuset pour la solidification de lingot de silicium et son procede de fabrication Download PDF

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Publication number
WO2013114313A3
WO2013114313A3 PCT/IB2013/050825 IB2013050825W WO2013114313A3 WO 2013114313 A3 WO2013114313 A3 WO 2013114313A3 IB 2013050825 W IB2013050825 W IB 2013050825W WO 2013114313 A3 WO2013114313 A3 WO 2013114313A3
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
solidifying
silicon ingot
production method
method therefor
Prior art date
Application number
PCT/IB2013/050825
Other languages
English (en)
Other versions
WO2013114313A2 (fr
Inventor
Charles Huguet
Séverine BAILLY
Virginie Brize
Original Assignee
Commissariat A L'energie Atomique Et Aux Energies Alternatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat A L'energie Atomique Et Aux Energies Alternatives filed Critical Commissariat A L'energie Atomique Et Aux Energies Alternatives
Priority to CN201380015883.7A priority Critical patent/CN104185696A/zh
Priority to EP13712346.9A priority patent/EP2809836B1/fr
Priority to US14/375,757 priority patent/US9428844B2/en
Publication of WO2013114313A2 publication Critical patent/WO2013114313A2/fr
Publication of WO2013114313A3 publication Critical patent/WO2013114313A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C04B41/5066—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00—Production of homogeneous polycrystalline material with defined structure
    • C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/0087—Uses not provided for elsewhere in C04B2111/00 for metallurgical applications
    • C04B2111/00879—Non-ferrous metallurgy

Abstract

La présente invention concerne un creuset utile pour la solidification d'un lingot de silicium à partir de silicium fondu,caractérisé en ce qu'il est revêtu au moins partiellement sur sa surface interne d'une couche externe se présentant sous la forme d'un empilement de strates, chaque strate possédant une épaisseur variant de 5 à 150 µm, et étant formée d'un matériau obtenu par décomposition thermique de polysilazane(s) et/ou de polysiloxane(s) et dans lequel sont intégrées des particules inorganiques dont la taille varie de 50 nm à 200 µm. Elle vise en outre un procédé de préparation de tels creusets.
PCT/IB2013/050825 2012-01-31 2013-01-31 Creuset pour la solidification de lingot de silicium WO2013114313A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201380015883.7A CN104185696A (zh) 2012-01-31 2013-01-31 硅锭凝固用坩埚及其制造方法
EP13712346.9A EP2809836B1 (fr) 2012-01-31 2013-01-31 Creuset pour la solidification de lingot de silicium et son procede de fabrication
US14/375,757 US9428844B2 (en) 2012-01-31 2013-01-31 Crucible for solidifying a silicon ingot

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1250903 2012-01-31
FR1250903A FR2986228B1 (fr) 2012-01-31 2012-01-31 Creuset pour la solidification de lingot de silicium.

Publications (2)

Publication Number Publication Date
WO2013114313A2 WO2013114313A2 (fr) 2013-08-08
WO2013114313A3 true WO2013114313A3 (fr) 2013-10-31

Family

ID=47997615

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2013/050825 WO2013114313A2 (fr) 2012-01-31 2013-01-31 Creuset pour la solidification de lingot de silicium

Country Status (5)

Country Link
US (1) US9428844B2 (fr)
EP (1) EP2809836B1 (fr)
CN (1) CN104185696A (fr)
FR (1) FR2986228B1 (fr)
WO (1) WO2013114313A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2986228B1 (fr) 2012-01-31 2014-02-28 Commissariat Energie Atomique Creuset pour la solidification de lingot de silicium.
CN104016713B (zh) * 2014-05-20 2016-03-02 潘东海 一种氯化氢合成炉石墨燃烧室耐高温浸渍处理方法
CN112624782A (zh) * 2020-12-11 2021-04-09 包头美科硅能源有限公司 一种埚帮涂层的使用方法
CN115058131A (zh) * 2022-07-01 2022-09-16 徐州协鑫太阳能材料有限公司 一种用于降低铸锭底部红区涂层的制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0411611A1 (fr) * 1989-08-01 1991-02-06 Nkk Corporation Méthode pour produire un matériau de carbone ayant une bonne résistance à l'oxydation
WO2012025905A1 (fr) * 2010-08-27 2012-03-01 Commissariat A L'energie Atomique Et Aux Energies Alternatives Creuset pour la solidification de lingot de silicium

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5322825A (en) * 1992-05-29 1994-06-21 Allied-Signal Inc. Silicon oxycarbonitride by pyrolysis of polycyclosiloxanes in ammonia
DE10342042A1 (de) * 2003-09-11 2005-04-07 Wacker-Chemie Gmbh Verfahren zur Herstellung eines Si3N4 beschichteten SiO2-Formkörpers
DE102005032790A1 (de) * 2005-06-06 2006-12-07 Deutsche Solar Ag Behälter mit Beschichtung und Herstellungsverfahren
DE102005042944A1 (de) * 2005-09-08 2007-03-22 Clariant International Limited Polysilazane enthaltende Beschichtungen für Metall- und Polymeroberflächen
JP2010053008A (ja) * 2008-08-29 2010-03-11 Kyocera Corp 坩堝及びその製造方法、並びに結晶シリコン粒子の製造装置
FR2986228B1 (fr) 2012-01-31 2014-02-28 Commissariat Energie Atomique Creuset pour la solidification de lingot de silicium.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0411611A1 (fr) * 1989-08-01 1991-02-06 Nkk Corporation Méthode pour produire un matériau de carbone ayant une bonne résistance à l'oxydation
WO2012025905A1 (fr) * 2010-08-27 2012-03-01 Commissariat A L'energie Atomique Et Aux Energies Alternatives Creuset pour la solidification de lingot de silicium

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BILL J ET AL: "Polymer-Derived Ceramic Coatings on C/C-SiC Composites", JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, vol. 16, no. 10, 1 January 1996 (1996-01-01), ELSEVIER SCIENCE PUBLISHERS, BARKING, ESSEX, GB, pages 1115 - 1120, XP004047417, ISSN: 0955-2219, DOI: 10.1016/0955-2219(96)00025-8 *
KROKE E: "Silazane derived ceramics and related materials", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, vol. 26, no. 4-6, 1 April 2000 (2000-04-01), ELSEVIER SEQUOIA S.A., LAUSANNE, CH, pages 97 - 199, XP004198439, ISSN: 0927-796X, DOI: 10.1016/S0927-796X(00)00008-5 *

Also Published As

Publication number Publication date
EP2809836A2 (fr) 2014-12-10
WO2013114313A2 (fr) 2013-08-08
FR2986228B1 (fr) 2014-02-28
CN104185696A (zh) 2014-12-03
EP2809836B1 (fr) 2017-05-10
US9428844B2 (en) 2016-08-30
US20150020545A1 (en) 2015-01-22
FR2986228A1 (fr) 2013-08-02

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