WO2013108643A1 - Compressed soft magnetic powder body - Google Patents

Compressed soft magnetic powder body Download PDF

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Publication number
WO2013108643A1
WO2013108643A1 PCT/JP2013/050033 JP2013050033W WO2013108643A1 WO 2013108643 A1 WO2013108643 A1 WO 2013108643A1 JP 2013050033 W JP2013050033 W JP 2013050033W WO 2013108643 A1 WO2013108643 A1 WO 2013108643A1
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powder
soft magnetic
magnetic material
iron
oxidation
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PCT/JP2013/050033
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French (fr)
Japanese (ja)
Inventor
和也 西
青野 泰久
憲一 相馬
今川 尊雄
北条 啓文
友綱 上條
大脇 武史
三谷 宏幸
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株式会社日立産機システム
株式会社神戸製鋼所
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Publication of WO2013108643A1 publication Critical patent/WO2013108643A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/22Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H01F1/24Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B22F1/102Metallic powder coated with organic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/16Metallic particles coated with a non-metal
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C33/00Making ferrous alloys
    • C22C33/02Making ferrous alloys by powder metallurgy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/33Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials mixtures of metallic and non-metallic particles; metallic particles having oxide skin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F3/00Cores, Yokes, or armatures
    • H01F3/08Cores, Yokes, or armatures made from powder

Definitions

  • the present invention relates to a powder soft magnetic material produced by compression molding soft magnetic powder.
  • a powder soft magnetic material produced by compression molding soft magnetic powder represented by iron powder or the like at a high pressure is used for a magnetic core of a motor, a reactor for a power supply circuit, or the like.
  • the advantage of dust cores is that the magnetic properties are isotropic and the fabrication of three-dimensional shaped cores is easy. For this reason, when applied to a motor such as a motor core, the dust core is expected to contribute to downsizing and weight reduction of the motor as compared with a laminated core manufactured by laminating silicon steel plates.
  • a powder soft magnetic material using pure iron as soft magnetic powder is inexpensive and has high ductility of iron powder and high density of magnetic material, and has an advantage of increasing magnetic flux density. Development towards the target has been activated.
  • iron loss In addition to the high magnetic flux density, it is important that the energy loss due to heat generation under the fluctuation of an alternating magnetic field called iron loss is small as the characteristics required for the powder magnetic soft magnetic material.
  • Iron loss is mainly represented by the sum of eddy current loss and hysteresis loss.
  • the cause of the eddy current loss is the heat generated by the eddy current flowing between the particles of iron powder constituting the powder soft magnetic material.
  • the cause of the hysteresis loss is heat generation caused by the movement of the domain wall inside the iron powder.
  • Hysteresis loss is lattice distortion inside iron powder, that is, vacancies that are structural defects that generate distortion, interstitial atoms, dislocations, lattice defects such as dislocations and grain boundaries, and impurities atoms other than Fe and precipitates composed of them. It is strongly influenced by To reduce hysteresis loss, it is necessary to perform heat treatment on the soft magnetic material after compression molding in order to reduce distortion inside iron powder introduced by molding.
  • strain reduction heat treatment Heat treatment of a molded body for the purpose of strain reduction (hereinafter, referred to as “strain reduction heat treatment”) is generally performed in an inert gas atmosphere such as nitrogen gas in many cases.
  • an inert gas atmosphere such as nitrogen gas
  • the insulating film on the powder surface constituting the powder soft magnetic material is partially destroyed to increase the eddy current loss, or the inside of the iron powder
  • the iron loss increases due to the diffusion of oxygen to the metal and the increase in hysteresis loss.
  • the strain reduction heat treatment in the air which does not require atmosphere control can simplify the heat treatment equipment and shorten the treatment time, and is advantageous from the viewpoint of reducing the process cost in manufacturing.
  • the compacted soft magnetic material is subjected to heat treatment in a high temperature atmosphere at 500 ° C. or higher, there is a problem that the iron loss is increased due to the above-mentioned oxidation.
  • Patent Documents 1 and 2 disclose a technology in which iron powder coated with a phosphoric acid inorganic insulating layer on its surface is mixed with an organic lubricant, compacted, and heat-treated in an oxidizing atmosphere.
  • Patent Literatures 1 and 2 describe heat treatment in a steam atmosphere at 300 to 600 ° C. for the purpose of strengthening, and prior to this heat treatment, Patent Literature 1 is performed at 250 to 550 ° C. in the air.
  • heat treatment in an inert gas at 500 ° C. or lower or in the air is carried out for the purpose of removing the lubricant of the compact.
  • the phosphoric acid inorganic insulating layer used here has high adhesion and is excellent in the deformation followability of the powder surface at the time of molding, but has a disadvantage that the oxidation resistance in a high temperature oxidizing atmosphere is low.
  • the iron powder surface is easily oxidized after the heat treatment in an oxidizing atmosphere such as air or water vapor, the insulating layer is destroyed, and the iron loss increases.
  • An object of the present invention is to provide a powder soft magnetic material having excellent magnetic properties without an increase in iron loss.
  • the powder soft magnetic material according to the present invention has the following features.
  • an oxidation-influenced layer which is a layer containing an iron oxide and a layered Si oxide, is formed at the boundary between the iron powders (iron powder interface).
  • FIG. 1 It is a cross-sectional schematic diagram of the powder-powder soft-magnetic body by this embodiment. It is a schematic diagram of the iron powder interface of an oxidation influence layer. It is a schematic diagram which shows the microstructure of the iron powder interface of an unoxidized area
  • the inventors conducted technical studies based on the problems described above, and even after heat treatment in an oxidizing atmosphere such as the air, iron loss of the powder soft magnetic material does not increase, and it has excellent magnetic properties and low process cost.
  • iron loss of the powder soft magnetic material does not increase, and it has excellent magnetic properties and low process cost.
  • the powder soft magnetic material according to the present invention uses the composite powder produced as follows as a raw material. First, the surface of a metal powder containing iron powder as a main component is covered with an Fe-P-based composite oxide as an inorganic insulating layer by a phosphorylation treatment. Further, an organic layer containing Si is applied in the form of a solution to the upper layer portion, and dried. A lubricant is mixed with the metal powder to prepare a composite powder as a raw material of the powder soft magnetic material. The composite powder is compacted into a soft magnetic material, and the subsequent strain reduction heat treatment is carried out in an oxidizing atmosphere under appropriate temperature and time conditions. According to the present invention, it is possible to prevent an increase in iron loss of the powder soft magnetic material by suppressing the growth of the oxide film generated on the surface of the iron powder and the influence of oxidation to the inside of the iron powder.
  • the particle size of iron powder constituting the powder soft magnetic material is further controlled, and the proportion of relatively fine iron powder having a particle size of less than 100 ⁇ m is made less than 30% by weight.
  • the volume ratio occupied by the boundary between iron powder (hereinafter referred to as "iron powder interface") inside the magnetic body is reduced to prevent the progress of oxidation inside the magnetic body.
  • the iron powder interface is narrowed to prevent the progress of oxidation inside the magnetic material.
  • the powder soft magnetic material according to the present embodiment comprises an inorganic insulating layer containing phosphoric acid, an organic layer containing Si, and an iron powder (composite iron powder) compounded with a lubricant as raw materials. Do.
  • the composite iron powder is compacted into a soft magnetic material, and the subsequent strain reduction heat treatment is carried out in an oxidizing atmosphere under appropriate temperature and time conditions to obtain the surface area of the powder soft magnetic material (surface And an oxidation affected layer) in the region including the vicinity of the surface.
  • the oxidation-influenced layer in the present embodiment is a region in which an oxide of iron and an oxide of Si are formed at the interface between iron powders (the boundary between iron powders) constituting the powder soft magnetic material. And formed on the surface area of the powder soft magnetic material. Iron oxide and Si oxide in the oxidation affected layer are formed as the iron powder, the insulation coating, the forming aid, and the lubricant are denatured by heating and oxidation reaction.
  • FIG. 1 is a schematic cross-sectional view of the powder soft magnetic material according to the present embodiment, showing a cross-sectional texture.
  • the powder compact soft magnetic body 1 is constituted by the bonding of a large number of iron powders 2, and in FIG. 1 has a ring shape and shows a cross section perpendicular to the circumferential direction.
  • the powder soft magnetic body 1 is composed of a surface area including the surface and the vicinity of the surface, and an inner area which is an inner portion of the powder soft magnetic body 1, the surface area is an oxidation affected layer 3, and the inner area is oxidized.
  • the unoxidized region 4 is not formed.
  • the powder soft magnetic body 1 of the present embodiment is characterized in that the influence of oxidation is limited only to the oxidation affected layer 3 formed in the surface area, and the internal area is made an unoxidized area 4 which is in an unoxidized state. is there.
  • the surface of the iron powder is coated with an inorganic material having a chemical composition close to that of the complex oxide containing Fe and P, or an inorganic layer as the insulating layer.
  • the coating treatment of the insulating layer is performed by phosphate chemical conversion treatment.
  • the surface of the iron powder of the substrate is dissolved by oxidation and reacted with phosphoric acid, whereby a composite oxide layer mainly composed of Fe-P is formed on the surface of the iron powder.
  • the Fe-P complex oxide layer while having very high adhesion to the pure iron of the base material, is more resistant to deformation of iron powder compared with other oxide systems such as SiO 2 and Al 2 O 3 .
  • the ability to follow is very good. For this reason, the Fe—P-based composite oxide layer does not receive any damage that would cause the insulation deterioration such as peeling or breakage even during surface deformation during compacting.
  • the Fe—P-based composite oxide layer has a glass (amorphous) structure up to about 550 ° C., and crystallizes by heating at a high temperature exceeding 550 ° C. However, even after crystallization, the insulating property of the Fe—P-based composite oxide layer is maintained as long as the insulating layer is stably present on the surface of the iron powder and significant damage such as peeling does not occur.
  • the upper layer portion of the Fe—P-based composite oxide layer is covered with an organic layer containing Si in an overlapping manner.
  • the organic layer containing Si can be coated with an organic substance such as a silicone resin in the form of a solution, uniformly coated on the iron powder surface and then dried.
  • an oxidation suppression layer mainly composed of Si is formed on the iron powder interface of the oxidation affected layer. Be done.
  • the oxidation suppressing layer has an effect of reducing the iron loss of the powder soft magnetic material.
  • a lubricant is preferably added to the iron powder coated with the two insulating layers of the Fe—P-based composite oxide layer and the organic layer containing Si of the present embodiment for the purpose of imparting formability.
  • the material of the lubricant is not particularly limited, but conventionally known ones may be used. Specific examples thereof include metal salts such as zinc stearate and lithium stearate, and other waxes.
  • the lubricant is preferably added in the range of 0.05 to 0.8% by mass.
  • the above-described composite iron powder is compacted into a soft magnetic material, and a heat treatment for reducing strain is performed in an oxidizing atmosphere. At this time, the heat treatment is carried out under appropriate temperature and time conditions to form an oxidation-influenced layer on the surface area of the powder soft magnetic material.
  • oxygen (O) passes through and diffuses through the Fe-P-based composite oxide layer, and easily oxidizes with the pure Fe in the base, An oxide mainly composed of Fe such as 3 O 4 is formed.
  • pure Fe reacts with O to form an oxide, an increase in volume occurs, and the Fe—P-based composite oxide layer and the organic layer containing Si undergo excessive deformation.
  • the adhesion between the two insulating layers and the base material is sharply reduced, and the insulating layer is peeled off and decomposed, whereby the formation of the oxide mainly composed of Fe further progresses.
  • the “Fe-based oxide” in 1) is mainly produced by the oxidation of iron powder.
  • the “Fe—Si complex oxide” in 2) is formed by complex oxidation of Si in the organic layer with the Fe oxide.
  • the “Fe—P—Si complex oxide” in 3) is produced by peeling off the insulating layer on the surface of the iron powder and reacting / aggregating with Fe.
  • the “Fe-based oxide” containing almost no Fe in 4) is generated by oxidizing, aggregating, and rearranging Si contained in the organic layer containing Si by a thermal reaction.
  • FIG. 2 is a schematic view of the iron powder interface of the oxidation affected layer.
  • the iron powder interface 10 is formed of Fe-based oxide 11 (Fe 3 O 4 ) and Fe—Si composite oxide 12, and massive Fe—P—Si composite oxidation. things 13, and an oxide of layered that the Si mainly contains almost no Fe 14 is composed of 3 tissue named (SiO 2).
  • the oxidation reaction of the powder soft magnetic material at the time of heat treatment proceeds by the diffusion of oxygen atoms entering from the surface of the soft magnetic material into the interior of the powder soft magnetic material through the iron powder interface. That is, the iron powder interface is a diffusion path of oxygen at the time of heat treatment.
  • the role of the oxide 14 (for example, SiO 2 ) mainly containing Si, which does not substantially contain Fe in 4) present at the iron powder interface 10 of the oxidation affected layer, is important.
  • the Si-based oxide 14 is reacted and generated simultaneously with the Fe-based oxides 11 and 2) of the 1) Fe-Si composite oxide 12.
  • the structure of the oxide 14 mainly composed of Si becomes a layer having a thickness of several tens of nm, and is arranged so as to divide the iron powder interface 10 longitudinally and laterally.
  • the Fe-based oxide 11 (Fe 3 O 4 etc.) of 1) and the Fe-Si complex oxide 12 of 2) have a thickness of several tens of nm and a gap of the Si-based oxide 14 of mainly Si. It is formed to fill the
  • the layered oxide 14 mainly composed of Si in 4) is very excellent in oxidation resistance as compared with the oxides 1) to 3) containing Fe. It is presumed that this layered oxide mainly composed of Si functions as an oxidation suppressing layer that blocks the diffusion of oxygen during heat treatment by dividing and arranging the iron powder interface 10. It is a major feature of the powder soft magnetic material according to the present embodiment that an oxide mainly composed of Si not containing Fe is present in the oxidation affected layer as an oxidation suppression layer.
  • the microstructure of the lower part of these oxidation-influenced layers has a different appearance from the oxidation-influenced layers.
  • a dense composite oxide layer containing Fe, P and Si is formed as an insulating layer on the surface of the iron powder in the inner region of the powder soft magnetic material.
  • This composite oxide layer has a two-layer structure consisting of a lower layer in contact with the iron powder surface and an upper layer on the upper side thereof, and the compounding ratio of P to Si is different in each layer.
  • P is relatively abundant together with Fe, but the content of Si is small.
  • the upper layer is characterized in that the content of P is small and Si is contained more than in the lower layer.
  • Such a two-layered composite oxide layer consisting of a "Fe-P-based lower layer” rich in Fe and P and a "Si-rich upper layer” rich in Si is initially present on the surface of iron powder.
  • a structure in which the Fe—P-based composite oxide layer and the organic layer containing Si are stacked is changed by heating and formed.
  • the insulating layer having a two-layer structure on the surface of the iron powder preferably has a total thickness of 10 to 200 nm. If the total thickness of the insulating layers is less than 10 nm, the insulation property is unfavorably reduced. If the total thickness of the two layers exceeds 200 nm, the distance between the iron powders increases, which is not preferable because it leads to a decrease in magnetic flux density.
  • the outer interface (the interface which is not in contact with the iron powder) of the two-layered insulating layer is filled with an organic substance mainly containing C and O and containing some Si.
  • the organic substance filling the interface is presumed to be a structure in which chemical components such as metal soap or wax of the organic layer containing Si and the lubricant before heat treatment are changed by heating.
  • the interface microstructure in the inner region of the powder soft magnetic material is the structure found in the oxidation affected layer (ie, an oxide mainly composed of Fe, an Fe-Si composite oxide, an Fe-P-Si composite) It shows a different aspect from the structure of oxide) and a structure containing an oxide mainly containing Si and containing almost no Fe.
  • the oxidation affected layer ie, an oxide mainly composed of Fe, an Fe-Si composite oxide, an Fe-P-Si composite
  • Such an inner region of the powder soft magnetic material is referred to as an "unoxidized region" because oxidation hardly occurs. In the unoxidized region, almost no reaction with oxygen which penetrates and diffuses from the outside through the iron powder interface occurs. This unoxidized region is shown as unoxidized region 4 in FIG.
  • FIG. 3 is a schematic view showing the microstructure of the iron powder interface in the unoxidized region.
  • a lower layer 21 mainly composed of Fe-P is an inorganic insulating covering layer
  • the Si-rich upper layer 22 is an oxide insulating layer, so these two layers are dense insulating layers.
  • an organic layer 23 mainly composed of C and O and containing Si is present between the insulating layers, and fills the iron powder interface 10. As a result, the insulation between the iron powder is maintained in the unoxidized region, and the eddy current loss is reduced.
  • the insulating layer on the surface of the iron powder is broken, and the eddy current loss increases. If the effect of oxidation during atmospheric heat treatment affects the entire compacted soft magnetic material, the unoxidized tissue disappears. As a result, the iron loss of the powder soft magnetic material increases, leading to the deterioration of the magnetic properties. Therefore, it is not preferable that the whole of the powder soft magnetic material is affected by oxidation.
  • the formation of the oxidation affected layer is limited to the surface region of the powder soft magnetic material only, and the internal region of the powder soft magnetic material is not oxidized It is important to keep the condition.
  • diffusion of oxygen to the inner region of the powder soft magnetic material can be achieved by forming an oxidation suppression layer of an oxide mainly composed of Si in the iron powder interface of the oxidation affected layer. It is possible to suppress the internal region into an unoxidized state (to be an unoxidized region).
  • the iron powder as the raw material of the powder soft magnetic material has a content of elements other than Fe such as Mn, Cr, Si, P and S. Iron powder as low as possible is preferred.
  • water atomization or gas atomization treatment Since the iron powder after atomization treatment contains many gas impurities such as O, C, N, etc., it is necessary to carry out a heat treatment in a reducing atmosphere containing hydrogen at 800 to 1000 ° C. to purify the iron powder. .
  • the size (particle size) of the iron powder constituting the powder soft magnetic material affects the magnetic properties after the strain reduction heat treatment.
  • the proportion of fine iron powder having a particle size of less than 100 ⁇ m is large, the volume proportion of the iron powder interface increases in the inside of the powder soft magnetic material.
  • the iron powder interface serves as a diffusion path of oxygen to the inside of the powder soft magnetic material at the time of strain reduction heat treatment. For this reason, in the case of a powder soft magnetic material having the same density, when the volume ratio of the interface portion is high, the oxidation-affected layer easily grows to the inside, and the core loss increases.
  • the proportion in the range of 100 to 400 ⁇ m is 70% or more by weight, and the proportion of the fine iron powder below 100 ⁇ m is less than 30% by weight. If it is such a ratio, the growth to the inside of the oxidation influence layer at the time of distortion reduction heat processing will be suppressed, and an iron loss will fall.
  • the average particle size of the entire iron powder is preferably 120 to 250 ⁇ m from the viewpoint of core loss reduction. An excessively large particle size of the iron powder is not preferable because it leads to an increase in eddy current loss.
  • the proportion of coarse iron powder having a particle size of more than 400 ⁇ m is preferably less than 30% by weight.
  • the composite powder as a raw material of the powder soft magnetic material obtained by the above method is subjected to excessive plastic deformation under high pressure by die molding, It is magnetic.
  • the molding pressure is usually 800 MPa or more, and it is preferable to increase the density so that the ratio of metal Fe to the powder soft magnetic material is 94% or more in volume ratio.
  • the density of the powder soft magnetic material When the density of the powder soft magnetic material is low, the distance between the iron powders constituting the magnetic body, that is, the width of the iron powder interface is increased.
  • oxygen is contained in the gaps of the oxidation-inhibited layer of the oxidation-affected layer (an oxide distributed in a thin layer containing mostly Fe and containing Si). It diffuses inside the compacted soft magnetic material. As a result, the core loss increases as the proportion of the unoxidized area inside the dusted soft magnetic material decreases. Therefore, making the density of the powder soft magnetic material sufficiently high to narrow the width of the iron powder interface is effective in reducing iron loss.
  • the density of the powder soft magnetic material is preferably at least 7.45 g / cm 3 or more, preferably 7.50 g / cm 3 or more.
  • the ratio of metal Fe to the powder soft magnetic material is more preferably 94.0% or more, preferably 95.0% or more in volume ratio.
  • the proportion of the iron powder itself is less than 94.0% by volume, it is not preferable because it causes an increase in iron loss of the powder soft magnetic material after heat treatment. It is difficult in terms of molding process to increase the density of powder soft magnetic material to over 7.75 g / cm 3 , and there is also the possibility of an increase in eddy current loss due to breakage of the insulating layer, so the density is 7.75 g It is preferable to set it as / cm ⁇ 3 > or less.
  • the occupancy rate of the iron powder itself is preferably 98.5% or less.
  • the “thickness” of the powder soft magnetic material is defined. At any point on the surface of the powder soft magnetic material, a straight line is drawn in the direction perpendicular to the surface toward the inside of the powder soft magnetic material. In this straight line, the length of a line segment from the surface to the other surface on the opposite side of the powder soft magnetic material (the back side of the powder soft magnetic material) is the powder softness at any given location. It is defined as the thickness of the magnetic body. When explaining using FIG. 1, the thickness of the powder soft magnetic material is D. When the surface of the powder soft magnetic material is a curved surface, a straight line is drawn in the direction perpendicular to the contact surface on the surface to define the thickness. That is, the thickness at any place of the powder soft magnetic material is the length of the powder soft magnetic material at that place in the direction perpendicular to the surface of the place.
  • the length of the oxidation affected layer in the above-mentioned line segment is referred to as "thickness".
  • the thickness of the oxidation-influenced layer is not defined where the above-mentioned line segment passes only the surface area, but is defined as where the above-mentioned line segment passes through the inner area and the two surface areas sandwiching the inner area. Do. The two surface areas are located on opposite sides of the soft magnetic powder body. As described with reference to FIG. 1, the thickness of the oxidation affected layer is d1 and d2, and d3 is not the thickness of the oxidation affected layer.
  • the thickness (length of the above-mentioned line segment) of the powder soft magnetic material may differ depending on the measurement site.
  • the thickness of the oxidation-influenced layer may be different from the thickness at an arbitrary position and the thickness at a position on the opposite side of the dusted soft magnetic material (the back side of the dusted soft magnetic material) with respect to this position. If it demonstrates using FIG. 1, d1 and d2 do not need to be equal. That is, the thickness of the oxidation affected layer may not be uniform.
  • the thickness of the oxidation-influenced layer is preferably in the following ratio with respect to the thickness of the powder soft magnetic material in the case of a simple ring-shaped powder soft magnetic material having a circular or rectangular cross section, etc. .
  • the thickness of the oxidation-influenced layer is the thickness (d1 in FIG. 1) at any location of the powder soft magnetic material and the opposite side of the powder soft magnetic material with respect to this location (the back side of the powder soft magnetic material
  • the total of the thickness (d2 in FIG. 1) and the thickness of the portion at 1) is 1/16 or more and 1 ⁇ 2 or less of the thickness (D in FIG. 1) of the powder soft magnetic material It is optimal from the magnetic properties of the soft magnetic material.
  • this arbitrary place the place where d1 in FIG. 1 is defined
  • place on the opposite side of the powder soft magnetic material with respect to this place place where d2 in FIG. 1 is defined
  • the total thickness of the oxidation-affected layer at a point opposite to any part of the powder soft magnetic material is less than 1/16 of the thickness of the powder soft magnetic material, it is estimated that the heat treatment time is short It is not preferable because strain reduction is insufficient to cause an increase in iron loss.
  • this total exceeds 1 ⁇ 2 of the thickness of the powder soft magnetic material, the ratio of the volume of the unoxidized region in the powder soft magnetic material decreases. In this case, the core loss of the powder soft magnetic material is increased to deteriorate the magnetic properties, which is not preferable.
  • the cross section may not have a simple ring shape such as a circle or a rectangle, but may have a three-dimensional complex shape having a projection such as a claw.
  • the difference in the shape causes a difference in thickness in the powder soft magnetic material.
  • the proportion of the oxidation-influenced layer relatively increases to exceed 1/2 at portions where the thickness of the powder soft magnetic material is small.
  • the total thickness of the oxidation affected layer is the thickness of the powder soft magnetic material at a location where the thickness of the powder soft magnetic material is averaged. It is preferable that it is 1/16 or more and 1/2 or less.
  • the thickness of the oxidation affected layer of the powder soft magnetic material it is also possible to evaluate by observing the microstructure of the cross section of the powder soft magnetic material.
  • SEM scanning electron microscope
  • EDS energy dispersive X-ray spectroscopy
  • the width from the surface of the powder soft magnetic material is measured at a plurality of points in the region where the oxide containing Fe is present at the iron powder interface. It becomes possible to evaluate the thickness of the oxidation affected layer directly.
  • the strain reduction heat treatment of the powder soft magnetic material is preferably carried out mainly in an air atmosphere from the viewpoint of reduction of the process cost.
  • a steam atmosphere or an oxidation atmosphere in which a pure oxygen gas of 20% or less (preferably 0.5 to 20%) by volume ratio is added to an inert gas such as nitrogen, argon or helium, The same effect is obtained.
  • the maximum holding temperature of the heat treatment is preferably in the range of 500 ° C. or more and less than 650 ° C.
  • the holding temperature is less than 500 ° C., the strain reduction of the iron powder constituting the powder soft magnetic material becomes insufficient, and the iron loss increases, which is not preferable.
  • the holding temperature is 650 ° C. or more, it is not preferable because the iron powder is excessively oxidized and the ratio of the unoxidized region inside the green compact is decreased to increase iron loss.
  • the holding time at the maximum temperature should be at least 5 minutes in the above temperature range. If the holding time is less than 5 minutes, the strain reduction of the iron powder becomes insufficient, and the iron loss of the powder soft magnetic material increases, which is not preferable. If the retention is excessive for a long time, the oxidation of iron powder is promoted and the iron loss is increased.
  • the optimum holding time depends on the heat treatment temperature.
  • the maximum heat treatment time is preferably 2 hours. If it exceeds 2 hours, the iron powder is excessively oxidized, and the proportion of the unoxidized region inside the green compact decreases, which is not preferable because iron loss increases.
  • the heat treatment temperature is preferably 1 hour at maximum. When it exceeds 1 hour, it is not preferable because the iron powder is excessively oxidized and iron loss increases.
  • the maximum heat treatment time is preferably 30 minutes. If it exceeds 30 minutes, it is not preferable because the iron powder is excessively oxidized to increase iron loss.
  • the heat-treated body After the end of the holding, it is preferable to take out the heat-treated body from the heating furnace to room temperature and air-cool as soon as possible. When it is placed in a heating furnace and cooled, it is not preferable because oxidation of iron powder becomes excessive and iron loss increases.
  • the pure iron ingot material was pulverized by water atomizing treatment after being dissolved in air.
  • the atomized iron powder was purified by repeating the hydrogen reduction heat treatment at 950 ° C. for 2 hours twice.
  • the oxygen concentration contained as an impurity after purification was 500 mass ppm or less.
  • the iron powder after purification was sieved to a particle size of 100 to 300 ⁇ m by a mesh, and then the Fe—P-based composite oxide layer was coated on the iron powder surface as an insulating layer by a phosphorylation treatment.
  • the thickness of the Fe—P based composite oxide layer was in the range of 20 to 50 nm.
  • Example material 1 A silicone resin solution was applied to iron powder coated with Fe—P based composite oxide and dried to prepare iron powder (Example material 1).
  • iron powder of Example Material 1 0.4% by mass of a zinc stearate based lubricant was added, and mixed by a V mixer to obtain a soft magnetic composite powder.
  • an iron powder (comparative material 1) coated with only the Fe-P based composite oxide layer was prepared, and 0.4 mass% of zinc stearate based lubricant was added to the iron powder of comparative material 1
  • a mixed powder was also prepared.
  • the above soft magnetic composite powder was pressed at a molding pressure of 1200 MPa to form a ring-shaped powder soft magnetic material having an outer diameter of 50 mm, an inner diameter of 40 mm, and a thickness of 5 mm.
  • the density of the ring-shaped powdery soft magnetic material measured by the Archimedes method was 7.50 to 7.54 g / cm 3 .
  • the compacted soft magnetic material after molding was subjected to strain reduction heat treatment in a box-shaped air heat treatment furnace.
  • the holding temperature of the heat treatment was 550 ° C., the temperature was raised from room temperature to 550 ° C. at a heating rate of 5 ° C./min, and after holding for 30 minutes, it was taken out of the furnace and air cooled.
  • the surface of the soft magnetic powder after heat treatment had a black color overall due to the influence of oxidation.
  • Example Wound 1 was 37 W / kg, and Comparative Wound 1 was 53 W / kg. From the above results, it was found that Example Material 1 had a core loss of 16 W / kg lower than that of Comparative Material 1 and exhibited excellent magnetic properties.
  • the microstructure of the cross section of the powder soft magnetic material was observed using a transmission electron microscope (TEM).
  • TEM transmission electron microscope
  • the ring-shaped test piece of the example material 1 after magnetic property evaluation was used for TEM observation.
  • Thin film test pieces were collected from two points of the oxidation affected layer 3 in the surface area of the powder soft magnetic body 1 and the unoxidized area 4 in the inner area shown in FIG. 1 using the FIB (focused ion beam) method.
  • a TEM apparatus FE-TEM having an electron emission type of electron emission type and capable of reducing the diameter of a probe of an electron beam to 1 nm level was used.
  • FIG. 4 is a TEM image (bright field image) at the iron powder interface of the oxidation affected layer of the example material 1.
  • FIG. 4 shows two different iron powders and an interface 10 between these iron powders.
  • the width of the iron powder interface 10 is about 200 to 500 nm.
  • a white network 31 exists inside the iron powder interface 10, and the gray tissue 32 is filling the gaps.
  • the white network 31 inside the iron powder interface 1 has a width of 5 to 100 nm.
  • EDS compositional analysis by EDS that only Si and O were detected from the white network 31 and Fe was not present. From this result, it is presumed that the white network 31 present inside the iron powder interface 10 is an Si oxide having an amorphous structure, probably SiO 2 .
  • the gray structure 32 was Fe 3 O 4 , an oxide mainly composed of Fe, and Fe 2 SiO 4 of a composite oxide containing Fe and Si. Since the probe diameter of the electron beam is several nm, the gray structure 32 filling the gaps of the network structure 31 is Fe 3 O 4 and Fe 2 SiO 4 composed of nano-sized fine crystal grains. I understand.
  • a massive oxide having a diameter of several tens to several hundreds of nm containing Fe and P was present at the iron powder interface 10. It is inferred that this massive oxide is formed as the Fe—P based complex oxide coated on the surface of iron powder is detached and aggregated by oxidation.
  • FIG. 5 is a TEM image in the iron powder interface of the unoxidized area
  • the white part is the iron powder interface 10
  • the dark part is the iron powder.
  • the structure of the unoxidized region is different from the structure of the oxidation affected layer shown in FIG. 2 and FIG.
  • a surface layer having a thickness of less than 100 nm was present on the surface of the iron powder, and Fe, P, Si and O were detected from this surface layer by EDS analysis.
  • a relatively large amount of P was detected on the iron powder side (lower layer) of this surface layer, and a small amount of Si was detected.
  • P was small and Si was detected more than in the lower layer.
  • this distinction between lower and upper layers can not be seen due to the resolution of the picture.
  • an oxide-based insulating layer containing Fe, P, Si and O is present on the surface of the iron powder in the unoxidized region, and this insulating layer consists of two layers of different chemical compositions It has been found that it is composed of a layer and a Si-rich upper layer).
  • the two layers are the lower layer 21 mainly composed of Fe-P and the upper layer 22 of Si-rich described with reference to FIG.
  • the white portion is the organic layer 23 mainly composed of C, O, and Si described with reference to FIG.
  • the two insulating layers on the surface of the iron powder in the unoxidized region shown in FIG. 5 do not exist at the iron powder interface 10 of the oxidation affected layer of FIG. From the comparison of the structure of each region in FIGS. 4 and 5 by TEM observation, in the surface region of the ring-shaped test piece of the example material 1 subjected to the strain reduction heat treatment in the atmosphere, the iron powder is oxidized and the insulating coating layer is broken. It was found that an oxidation affected layer was formed. At the iron powder interface of the oxidation affected layer, oxides such as Fe 3 O 4 , Fe 2 SiO 4 and SiO 2 were formed. On the other hand, it was found that oxidation did not reach the inner region of the ring-shaped test piece, and an insulating layer having a two-layer structure different in chemical composition was present on the surface of the iron powder.
  • Example 2 In the same manner as in Example 2, TEM observation of the cross-sectional portion was performed on the ring-shaped test piece of the comparative material 1 after the magnetic property evaluation. As in the second embodiment, the observation position was set to two parts, the surface area and the inner area of the powder soft magnetic material. As a result of observation of the surface area of the comparative material 1, it was found that most of the iron powder interface was filled with an oxide mainly composed of Fe. At the iron powder interface, in addition to this, massive oxides of several tens to several hundreds nm in diameter containing Fe and P were present. It is inferred that this massive oxide is formed as the Fe—P based complex oxide coated on the surface of iron powder is detached and aggregated by oxidation. At the iron powder interface in the surface region of Comparative Example 1, the network-like oxidized layer containing Si, which was seen in Example material 1, did not exist.
  • Example 2 the structure of the iron powder interface in the inner region is almost the same structure as that of the surface region, and the iron powder interface is filled with Fe-based oxide, and Fe, P It has been found that massive oxides of several tens to several hundreds of nm in diameter are present.
  • the inner region of Example material 1 was in the unoxidized state, and the insulating layer having a two-layer structure was present on the surface of the iron powder.
  • the iron powder was oxidized similarly to the surface region, and the insulating layer on the surface of the iron powder was detached and aggregated.
  • Example material 1 From the TEM observation results of Examples 2 and 3, in Example material 1, the SiO 2 layer distributed in the form of a mesh at the iron powder interface of the oxidation affected layer functions as an oxidation suppression layer, It was found that the iron loss is reduced by suppressing the progress of the oxidation to the inside and stably holding the insulating layer on the surface of the iron powder. On the other hand, it is considered that in Comparative Material 1, the network-like SiO 2 layer was not present at the iron powder interface, and the oxidation preventing effect as in Example Material 1 did not work. As a result, in the comparative material 1, the internal area of the powder soft magnetic material is affected by the oxidation, and it is presumed that the core loss is increased by the falling off and aggregation of the insulating layer on the surface of the iron powder.
  • the iron powder subjected to the water atomizing treatment and the hydrogen reduction heat treatment under the same conditions as in Example 1 was sieved using meshes having different openings to prepare a plurality of iron powder samples having different particle sizes.
  • the insulation coating of Fe-P based complex oxide layer and Si resin is carried out in the same manner as in Example 1 and 0.4% of zinc stearate based lubricant is added.
  • a plurality of composite powders with different particle sizes were produced.
  • press molding, heat treatment in air, winding, and magnetic property evaluation were performed under the same conditions as in Example 1 to compare the properties of the respective powder soft magnetic materials.
  • Table 1 shows the average particle diameter and particle size of the powder soft magnetic material obtained by forming and heat treating five types of iron powder (example materials 1, 2, 3 and comparative materials 2 and 3) having different particle sizes.
  • the ratio of iron powder having a diameter of less than 100 ⁇ m, the evaluation result of iron loss (iron loss value), and the thickness of the oxidation affected layer are shown.
  • the average particle diameter of the iron powder decreases in the order of the example materials 1, 2, 3 and the comparative materials 2, 3.
  • the proportion (weight%) containing fine iron powder having a particle size of less than 100 ⁇ m is compared, the proportion of iron powder having a particle size of less than 100 ⁇ m tends to increase as the average particle size decreases.
  • the iron powder having a particle size of less than 100 ⁇ m is 20% or less.
  • iron powder having a particle size of less than 100 ⁇ m is about half in Comparative Material 2 and iron powder having a particle size of less than 100 ⁇ m occupies 80% or more in Comparative Material 3.
  • the core loss value after heat treatment in vacuum is almost the same as that of heat treatment in the atmosphere (the reduction of 1 to 2 W / kg by vacuum heat treatment).
  • the comparative materials 2 and 3 it was found that the core loss after the heat treatment in vacuum was significantly reduced (a reduction of 12 to 15 W / kg) than the heat treatment in air.
  • the iron loss value of the powder soft magnetic material tends to increase reflecting the increase in the coercive force as the iron powder particle size becomes finer.
  • the iron loss value after heat treatment in vacuum in Table 1 is presumed to reflect the tendency of iron powder particle size. Further, it can be seen from Table 1 that, in the case of heat treatment in the atmosphere, the increase in iron loss accompanying the miniaturization of iron powder tends to be further promoted.
  • the powder soft magnetic material after five types of heat treatments shown in Table 1 was cut, resin embedding and polishing were performed on the cross section, and the thickness of the oxidation affected layer was measured by SEM observation and EDS analysis.
  • the thickness of the oxidation affected layer was as thin as less than 1 mm.
  • Comparative Material 2 the thickness of the oxidation affected layer increased to 1.6 mm.
  • Comparative Material 3 it was found that the influence of oxidation was applied to almost the entire cross section. From the above results, as the iron powder constituting the powder soft magnetic material becomes finer, the effect of oxidation at the time of heat treatment in the atmosphere proceeds to the inside of the powder soft magnetic material, and the iron loss increases was shown to promote.
  • Example materials 4 to 6 After preparing five sets of the same iron powder as Example material 1, changing the pressure to 1400MPa, 1300MPa, 1000MPa, 700MPa and 600MPa respectively, heat treatment in the atmosphere at 550 ° C, five types of powder soft Magnetic materials were produced (Example materials 4 to 6, comparative materials 4 and 5). Then, the iron loss of the example materials 4 to 6 and the comparative materials 4 and 5 was evaluated.
  • Table 2 shows the evaluation results of molding pressure, density and iron loss (iron loss value) for six types of powder soft magnetic materials (example materials 1, 4 to 6 and comparative materials 4 and 5) having different molding pressures. And the thickness of the oxidation affected layer.
  • the density of the powder soft magnetic material is 7.62 g / cm 3 (example material 4), 7.59 g / cm 3 (example material 5), 7.54 g / cm 3 (example examples) as the molding pressure decreases.
  • Material 1) decreases to 7.47 g / cm 3 (example material 6), 7.39 g / cm 3 (comparative material 4), and 7.33 g / cm 3 (comparative material 5).
  • the core loss value is 35 W / kg (example materials 4 and 5), 37 W / kg (example material 1), 41 W / kg (example material 6), 46 W / kg (comparative material 4) as the molding pressure decreases. ), 51 W / kg (comparative material 5) was found to increase.
  • Example 4 the cross section of the powder soft magnetic material was observed by SEM observation and EDS analysis to determine the thickness of the oxidation affected layer. As a result, it was found that the thickness of the oxidation affected layer increased as the density of the powder soft magnetic material decreased. Since the comparative materials 4 and 5 have lower density than the example materials 1 and 4 to 6, the distance between the iron powder interfaces is wide, and as a result, the oxidation through the iron powder interface at the time of heat treatment is promoted. It is thought that the loss increased.
  • Example material 1 Nine sets of iron powder identical to Example material 1 were prepared, and a powder soft magnetic material molded at the same molding pressure (1200 MPa) was subjected to heat treatment in air at different temperatures and times respectively to evaluate core loss. .
  • Table 3 shows the evaluation results of the heat treatment temperature, the holding time, and the iron loss for 10 types of powder soft magnetic materials (example materials 1, 7 to 10, and comparative materials 6 to 10) having different heat treatment temperatures and holding times The core loss value) and the thickness of the oxidation affected layer are shown.
  • the heat treatment temperature is 500 ° C.
  • the holding time is 30 minutes and 120 minutes, respectively.
  • the heat treatment temperature of the example materials 1 and 7 is 550 degreeC, and holding time is respectively 30 minutes and 60 minutes.
  • the example material 10 has a heat treatment temperature of 600 ° C. and a holding time of 30 minutes.
  • the comparative material 10 has a heat treatment temperature of 450 ° C. and a holding time of 30 minutes.
  • the comparative material 7 has a heat treatment temperature of 500 ° C. and a holding time of 180 minutes.
  • the comparative material 6 has a heat treatment temperature of 550 ° C. and a holding time of 120 minutes.
  • the comparative material 8 has a heat treatment temperature of 600 ° C. and a holding time of 60 minutes.
  • the comparative material 9 has a heat treatment temperature of 650 ° C. and a holding time of 30 minutes.
  • the powder soft magnetic materials of Examples 1 and 7 to 10 were heat-treated at the heat treatment temperature and the holding time described above in “6) Best mode of heat treatment process”.
  • the dusted soft magnetic bodies of Comparative Materials 6 to 10 were heat-treated outside the range of the heat-treatment temperature and the holding time.
  • the core loss value is relatively small at 35 to 40 W / kg.
  • the core loss value was a large value exceeding 40 W / kg.
  • the core loss of the comparative material 9 held for 30 minutes at a heat treatment temperature of 650 ° C. also had a large value of 52 W / kg.
  • the thickness of the oxidation affected layer is 0.6 mm or less.
  • the thickness of the oxidation affected layer is 1 mm or more, and the influence of oxidation is greater than that of Example materials 1 and 7 to 10 to the inside of the powder soft magnetic material. It is estimated that the iron loss has been increased by promoting it.
  • the powder soft magnetic material of the comparative material 10 was subjected to a heat treatment for 30 minutes at a temperature lower than the temperature range of the example materials 1 and 7 to 10 at 450 ° C.
  • the powder soft magnetic material of the comparative material 10 had a very small thickness of 0.1 mm for the oxidation affected layer, but the core loss was a relatively large value of 48 W / kg. Although the effect of oxidation is small, the powder soft magnetic material of the comparative material 10 is presumed to have failed to sufficiently reduce iron loss since the heat treatment temperature is low and the reduction in strain in the iron powder is not sufficient.
  • the powder soft magnetic material according to the present invention can be used for electromagnetic components in general, and for example, can be used for a rotor core and a stator core of a motor, an electromagnetic valve, a reactor, and the like.
  • SYMBOLS 1 Powdered-powder soft-magnetic body, 2 ... Iron powder, 3 ... Oxidation affected layer, 4 ... Unoxidized area

Abstract

Provided is a compressed soft magnetic powder body which does not suffer from an increase in iron loss and which exhibits excellent magnetic characteristics. A compressed soft magnetic powder body produced by applying insulating coatings to the surfaces of metal powder particles which comprise iron powder particles as the main component and then compression-molding the resulting metal powder particles, wherein an oxidation -affected layer that contains iron oxides (11, 12, 13) and a layer-shaped Si oxide (14) is present in each iron-particle interface (10) which is the boundary between iron powder particles, said oxidation-affected layer being formed by heat treatment conducted in an oxidizing atmosphere after the compression molding.

Description

圧粉軟磁性体Powdered soft magnetic material
 本発明は、軟磁性粉末を圧縮成形して製造する圧粉軟磁性体に関する。 The present invention relates to a powder soft magnetic material produced by compression molding soft magnetic powder.
 鉄粉等に代表される軟磁性粉末を高圧力で圧縮成形して製造する圧粉軟磁性体は、モータや電源回路用リアクトル等の磁心に利用されている。圧粉磁心の利点は、磁気特性が等方的で、3次元形状コアの作製が容易なことにある。このため圧粉磁心は、モータコア等の電動機用に適用した場合、珪素鋼板を積層して製造する積層型磁心に比べて、電動機の小型化、軽量化に寄与すると期待されている。特に、軟磁性粉末として純鉄を使った圧粉軟磁性体は、安価であるとともに、鉄粉の延性が高く磁性体が高密度となり、磁束密度が増加する長所があるため、近年実用化に向けての開発が活発化している。 BACKGROUND ART A powder soft magnetic material produced by compression molding soft magnetic powder represented by iron powder or the like at a high pressure is used for a magnetic core of a motor, a reactor for a power supply circuit, or the like. The advantage of dust cores is that the magnetic properties are isotropic and the fabrication of three-dimensional shaped cores is easy. For this reason, when applied to a motor such as a motor core, the dust core is expected to contribute to downsizing and weight reduction of the motor as compared with a laminated core manufactured by laminating silicon steel plates. In particular, a powder soft magnetic material using pure iron as soft magnetic powder is inexpensive and has high ductility of iron powder and high density of magnetic material, and has an advantage of increasing magnetic flux density. Development towards the target has been activated.
 圧粉軟磁性体に必要な特性としては、磁束密度が高いことに加えて、鉄損と呼ばれる交流磁場の変動下での発熱によるエネルギー損失が小さいことが重要である。鉄損は、主として渦電流損失とヒステリシス損失の和で表される。渦電流損失の原因は、圧粉軟磁性体を構成する鉄粉の粒子間を流れる渦電流により生じる発熱である。渦電流損失を低下させる工夫として、鉄粉表面への絶縁層のコーティングが必要となる。 In addition to the high magnetic flux density, it is important that the energy loss due to heat generation under the fluctuation of an alternating magnetic field called iron loss is small as the characteristics required for the powder magnetic soft magnetic material. Iron loss is mainly represented by the sum of eddy current loss and hysteresis loss. The cause of the eddy current loss is the heat generated by the eddy current flowing between the particles of iron powder constituting the powder soft magnetic material. In order to reduce the eddy current loss, it is necessary to coat the insulating layer on the iron powder surface.
 一方、ヒステリシス損失の原因は、鉄粉内部の磁壁の移動に伴い生じる発熱である。ヒステリシス損失は、鉄粉内部の格子歪、すなわち歪を発生させる構造欠陥である空孔、格子間原子、転位及び粒界等の格子欠陥、またFe以外の不純物原子やそれらで構成される析出物に強く影響される。ヒステリシス損失の低減には、成形加工で導入された鉄粉内部の歪を低減する目的から、圧縮成形後の軟磁性体への熱処理を行う必要がある。 On the other hand, the cause of the hysteresis loss is heat generation caused by the movement of the domain wall inside the iron powder. Hysteresis loss is lattice distortion inside iron powder, that is, vacancies that are structural defects that generate distortion, interstitial atoms, dislocations, lattice defects such as dislocations and grain boundaries, and impurities atoms other than Fe and precipitates composed of them. It is strongly influenced by To reduce hysteresis loss, it is necessary to perform heat treatment on the soft magnetic material after compression molding in order to reduce distortion inside iron powder introduced by molding.
 歪低減を目的とした成形体の熱処理(以下、「歪低減熱処理」と称する)は、一般に、窒素ガス中等の不活性ガス雰囲気下で実施されることが多い。大気または水蒸気等の酸化雰囲気中で成形体を熱処理する際には、圧粉軟磁性体を構成する粉末表面の絶縁皮膜が部分的に破壊され、渦電流損失が増加すること、または鉄粉内部に酸素が拡散してヒステリシス損失が増加すること等が原因で、鉄損の増加が生じる。不活性ガス中で成形体を熱処理することで、酸化による鉄損増加を低減することができる。 Heat treatment of a molded body for the purpose of strain reduction (hereinafter, referred to as “strain reduction heat treatment”) is generally performed in an inert gas atmosphere such as nitrogen gas in many cases. During heat treatment of the compact in the atmosphere or in an oxidizing atmosphere such as water vapor, the insulating film on the powder surface constituting the powder soft magnetic material is partially destroyed to increase the eddy current loss, or the inside of the iron powder The iron loss increases due to the diffusion of oxygen to the metal and the increase in hysteresis loss. By heat-treating the compact in an inert gas, it is possible to reduce the increase in iron loss due to oxidation.
 一方、雰囲気制御を必要としない大気中での歪低減熱処理は、熱処理設備の簡略化、処理時間の短縮が可能であり、製造の際のプロセスコスト低減の観点から有利である。しかし、圧粉成形した軟磁性体に対して500℃以上での高温大気中で熱処理を行う場合は、前述の酸化による鉄損増加が生じる課題がある。 On the other hand, the strain reduction heat treatment in the air which does not require atmosphere control can simplify the heat treatment equipment and shorten the treatment time, and is advantageous from the viewpoint of reducing the process cost in manufacturing. However, when the compacted soft magnetic material is subjected to heat treatment in a high temperature atmosphere at 500 ° C. or higher, there is a problem that the iron loss is increased due to the above-mentioned oxidation.
 圧粉軟磁性体への歪低減を目的とした大気熱処理を行った報告として、特許文献1、2に記載されているような例がある。 As a report which performed atmospheric heat processing for the purpose of distortion reduction to a powder compact soft magnetic material, there are examples which are indicated in patent documents 1 and 2.
 特許文献1、2では、表面にリン酸無機絶縁層を被覆した鉄粉を有機潤滑剤と混合して圧粉成形し、酸化雰囲気中で熱処理する技術を開示している。特許文献1、2には、高強度化を目的とした300~600℃での水蒸気雰囲気中の熱処理が記載されており、この熱処理の前に、特許文献1では大気中で250~550℃での圧粉体の熱処理、特許文献2では成形体の脱潤滑剤を目的とした500℃以下での不活性ガスまたは大気中での熱処理をそれぞれ実施する。ここで用いられるリン酸無機絶縁層は、密着性が高く、成形時の粉末表面の変形追随性に優れる一方で、高温酸化雰囲気中での耐酸化性が低いという欠点がある。これらの発明では、大気、水蒸気等の酸化雰囲気中での熱処理後に、鉄粉表面が容易に酸化して絶縁層が破壊されて鉄損が増大する懸念がある。 Patent Documents 1 and 2 disclose a technology in which iron powder coated with a phosphoric acid inorganic insulating layer on its surface is mixed with an organic lubricant, compacted, and heat-treated in an oxidizing atmosphere. Patent Literatures 1 and 2 describe heat treatment in a steam atmosphere at 300 to 600 ° C. for the purpose of strengthening, and prior to this heat treatment, Patent Literature 1 is performed at 250 to 550 ° C. in the air. In Patent Document 2, heat treatment in an inert gas at 500 ° C. or lower or in the air is carried out for the purpose of removing the lubricant of the compact. The phosphoric acid inorganic insulating layer used here has high adhesion and is excellent in the deformation followability of the powder surface at the time of molding, but has a disadvantage that the oxidation resistance in a high temperature oxidizing atmosphere is low. In these inventions, there is a concern that the iron powder surface is easily oxidized after the heat treatment in an oxidizing atmosphere such as air or water vapor, the insulating layer is destroyed, and the iron loss increases.
特表2007-535134号公報Japanese Patent Application Publication No. 2007-535134 特表2008-544520号公報Japanese Patent Publication No. 2008-544520
 上述したように、圧粉軟磁性体を大気等の酸化雰囲気中で歪低減熱処理する場合、従来報告された技術には課題が多い。特許文献1、2にて示されるように、リン酸無機絶縁層を被覆する場合、絶縁層は耐酸化性が低いため、熱処理中に容易に破壊され鉄損が増加する。SiO、Al等の耐熱性の高い物質を絶縁被膜に用いることもできる。しかし、これらの絶縁層は非常に脆く、鉄粉の変形に対する追随性が低いため、純鉄粉のような延性の高い粉末に適用する場合は、絶縁層が容易に破壊され、鉄損が増加する課題がある。 As described above, in the case of subjecting the powder soft magnetic material to heat treatment for reducing strain in an oxidizing atmosphere such as the atmosphere, there are many problems with the techniques reported so far. As shown in Patent Documents 1 and 2, when the phosphoric acid inorganic insulating layer is coated, since the insulating layer has low oxidation resistance, it is easily broken during heat treatment and iron loss increases. A highly heat-resistant substance such as SiO 2 or Al 2 O 3 can also be used for the insulating film. However, since these insulating layers are very brittle and have a low ability to follow deformation of iron powder, when applied to highly ductile powders such as pure iron powder, the insulating layer is easily destroyed and iron loss increases. Have a challenge to
 本発明は、鉄損が増加せず、優れた磁気特性を備える圧粉軟磁性体を提供することを目的とする。 An object of the present invention is to provide a powder soft magnetic material having excellent magnetic properties without an increase in iron loss.
 本発明による圧粉軟磁性体は、次のような特徴を有する。鉄粉を主成分とする金属粉末の表面に絶縁被覆処理を施し、この金属粉末を圧粉成形することで作製される圧粉軟磁性体であって、前記圧粉成形の後の酸化雰囲気中での熱処理によって、前記鉄粉間の境界(鉄粉界面)に、鉄の酸化物と層状のSiの酸化物とを含む層である酸化影響層が形成されている。 The powder soft magnetic material according to the present invention has the following features. A powder soft magnetic material produced by subjecting the surface of a metal powder containing iron powder as a main component to an insulation coating treatment and compacting this metal powder, and in the oxidizing atmosphere after the compacting. As a result of the heat treatment in step (b), an oxidation-influenced layer, which is a layer containing an iron oxide and a layered Si oxide, is formed at the boundary between the iron powders (iron powder interface).
 本発明によると、鉄損が増加せず、優れた磁気特性を備える圧粉軟磁性体を提供することができる。 According to the present invention, it is possible to provide a powder soft magnetic material having excellent magnetic properties without an increase in iron loss.
本実施形態による圧粉軟磁性体の断面模式図である。It is a cross-sectional schematic diagram of the powder-powder soft-magnetic body by this embodiment. 酸化影響層の鉄粉界面の模式図である。It is a schematic diagram of the iron powder interface of an oxidation influence layer. 未酸化領域の鉄粉界面のミクロ組織を示す模式図である。It is a schematic diagram which shows the microstructure of the iron powder interface of an unoxidized area | region. 実施例材1の酸化影響層の鉄粉界面におけるTEM像である。It is a TEM image in the iron powder interface of the oxidation influence layer of Example material 1. FIG. 実施例材1の未酸化領域の鉄粉界面におけるTEM像である。It is a TEM image in the iron powder interface of the unoxidized area | region of Example material 1. FIG.
 本発明者は、上述した課題を踏まえて技術検討を行い、大気等の酸化雰囲気中の熱処理後でも、圧粉軟磁性体の鉄損が増加せず、優れた磁気特性と低プロセスコストを兼ね備えた、新規な圧粉軟磁性体を得るための技術を見出した。 The inventors conducted technical studies based on the problems described above, and even after heat treatment in an oxidizing atmosphere such as the air, iron loss of the powder soft magnetic material does not increase, and it has excellent magnetic properties and low process cost. In addition, we have found a technology for obtaining a novel powder soft magnetic material.
 本発明による圧粉軟磁性体は、以下のように作製した複合粉末を原料とする。まず、鉄粉を主成分とする金属粉末の表面に、リン酸化成処理によりFe-Pを主体とする複合酸化物を無機絶縁層として被覆する。更に上層部に、Siを含む有機層を溶液状にして塗布し、乾燥させる。この金属粉末に潤滑剤を混合して、圧粉軟磁性体の原料となる複合粉末を作製する。この複合粉末を圧粉成形して軟磁性体とし、その後の歪低減熱処理を酸化雰囲気中にて適切な温度と時間の条件下で実施する。本発明によると、鉄粉表面に生じる酸化皮膜の成長と、鉄粉内部への酸化の影響を抑制することで、圧粉軟磁性体の鉄損の増加を防ぐことが可能である。 The powder soft magnetic material according to the present invention uses the composite powder produced as follows as a raw material. First, the surface of a metal powder containing iron powder as a main component is covered with an Fe-P-based composite oxide as an inorganic insulating layer by a phosphorylation treatment. Further, an organic layer containing Si is applied in the form of a solution to the upper layer portion, and dried. A lubricant is mixed with the metal powder to prepare a composite powder as a raw material of the powder soft magnetic material. The composite powder is compacted into a soft magnetic material, and the subsequent strain reduction heat treatment is carried out in an oxidizing atmosphere under appropriate temperature and time conditions. According to the present invention, it is possible to prevent an increase in iron loss of the powder soft magnetic material by suppressing the growth of the oxide film generated on the surface of the iron powder and the influence of oxidation to the inside of the iron powder.
 本発明では、更に、圧粉軟磁性体を構成する鉄粉の粒度を統制し、粒径が100μm未満の比較的微細な鉄粉の比率を、重量比で30%未満とする。この鉄粉粒度の統制により、磁性体内部における鉄粉間の境界(以下、「鉄粉界面」と称する)が占める体積比率を減少させて、磁性体内部への酸化進行を防止する。また、圧粉軟磁性体の密度を高めることで、鉄粉界面を狭小化して、磁性体内部への酸化進行を防止する。以上の特徴を有することで、本発明によると、優れた磁気特性と低コストを両立した圧粉軟磁性体を得ることが可能になる。 In the present invention, the particle size of iron powder constituting the powder soft magnetic material is further controlled, and the proportion of relatively fine iron powder having a particle size of less than 100 μm is made less than 30% by weight. By controlling the particle size of iron powder, the volume ratio occupied by the boundary between iron powder (hereinafter referred to as "iron powder interface") inside the magnetic body is reduced to prevent the progress of oxidation inside the magnetic body. Further, by increasing the density of the powder soft magnetic material, the iron powder interface is narrowed to prevent the progress of oxidation inside the magnetic material. By having the above features, according to the present invention, it is possible to obtain a dusted soft magnetic material having both excellent magnetic properties and low cost.
 以下、本発明の実施形態による圧粉軟磁性体について説明する。以下では最良の形態について説明するが、本発明による圧粉軟磁性体は、この形態に限るものではない。 Hereinafter, a powder soft magnetic material according to an embodiment of the present invention will be described. Although the best mode will be described below, the powder soft magnetic material according to the present invention is not limited to this mode.
 1)絶縁被膜層の最良の形態
 本実施形態による圧粉軟磁性体は、リン酸を含む無機絶縁層、Siを含む有機層及び潤滑剤と複合化した鉄粉(複合鉄粉)を原料とする。この複合鉄粉を圧粉成形して軟磁性体とし、その後の歪低減熱処理を酸化雰囲気中にて適切な温度と時間の条件下で実施することで、圧粉軟磁性体の表面領域(表面と表面近傍を含む領域)に酸化影響層を形成する。
1) Best Mode of Insulating Coating Layer The powder soft magnetic material according to the present embodiment comprises an inorganic insulating layer containing phosphoric acid, an organic layer containing Si, and an iron powder (composite iron powder) compounded with a lubricant as raw materials. Do. The composite iron powder is compacted into a soft magnetic material, and the subsequent strain reduction heat treatment is carried out in an oxidizing atmosphere under appropriate temperature and time conditions to obtain the surface area of the powder soft magnetic material (surface And an oxidation affected layer) in the region including the vicinity of the surface.
 本実施形態における酸化影響層とは、圧粉軟磁性体を構成する鉄粉同士の界面(鉄粉間の境界)に、鉄の酸化物とSiの酸化物とが形成されている領域のことであり、圧粉軟磁性体の表面領域に形成される。酸化影響層での鉄の酸化物とSiの酸化物は、鉄粉、絶縁被覆、成形助剤、及び潤滑剤が、加熱及び酸化反応により変質して形成される。 The oxidation-influenced layer in the present embodiment is a region in which an oxide of iron and an oxide of Si are formed at the interface between iron powders (the boundary between iron powders) constituting the powder soft magnetic material. And formed on the surface area of the powder soft magnetic material. Iron oxide and Si oxide in the oxidation affected layer are formed as the iron powder, the insulation coating, the forming aid, and the lubricant are denatured by heating and oxidation reaction.
 図1は、本実施形態による圧粉軟磁性体の断面模式図であり、断面の組織を示している。圧粉軟磁性体1は、多数の鉄粉2の結合により構成され、図1ではリング形状であり周方向に垂直な断面を示している。圧粉軟磁性体1は、表面と表面近傍を含む表面領域と、圧粉軟磁性体1の内部である内部領域とから成り、表面領域は酸化影響層3となっており、内部領域は酸化されていない未酸化領域4となっている。本実施形態の圧粉軟磁性体1は、表面領域に形成された酸化影響層3のみに酸化の影響を限定し、内部領域を未酸化の状態である未酸化領域4とすることに特徴がある。 FIG. 1 is a schematic cross-sectional view of the powder soft magnetic material according to the present embodiment, showing a cross-sectional texture. The powder compact soft magnetic body 1 is constituted by the bonding of a large number of iron powders 2, and in FIG. 1 has a ring shape and shows a cross section perpendicular to the circumferential direction. The powder soft magnetic body 1 is composed of a surface area including the surface and the vicinity of the surface, and an inner area which is an inner portion of the powder soft magnetic body 1, the surface area is an oxidation affected layer 3, and the inner area is oxidized. The unoxidized region 4 is not formed. The powder soft magnetic body 1 of the present embodiment is characterized in that the influence of oxidation is limited only to the oxidation affected layer 3 formed in the surface area, and the internal area is made an unoxidized area 4 which is in an unoxidized state. is there.
 本実施形態では、鉄粉の表面に、Fe及びPを含む複合酸化物か、それに近い化学組成の無機系材料を絶縁層として被覆する。絶縁層の被覆処理は、リン酸塩化成処理により行う。リン酸塩化成処理の段階で、基材の鉄粉表面が酸化により溶解し、リン酸と反応することで、鉄粉表面にはFe-Pを主体とする複合酸化層が形成される。 In this embodiment, the surface of the iron powder is coated with an inorganic material having a chemical composition close to that of the complex oxide containing Fe and P, or an inorganic layer as the insulating layer. The coating treatment of the insulating layer is performed by phosphate chemical conversion treatment. At the stage of the phosphate chemical conversion treatment, the surface of the iron powder of the substrate is dissolved by oxidation and reacted with phosphoric acid, whereby a composite oxide layer mainly composed of Fe-P is formed on the surface of the iron powder.
 Fe-P系の複合酸化層は、基材の純鉄との密着性が非常に高い一方で、SiO、Al等の他の酸化物系と比較して、鉄粉の変形に対する追随性が非常に優れている。
このためFe-P系複合酸化層は、圧粉成形時の表面変形の際にも、剥離、破壊などの絶縁低下を招くような損傷を受けることはない。Fe-P系複合酸化層は、約550℃まではガラス(非晶質)構造を有しており、550℃を超える高温加熱により結晶化する。しかし、結晶化した後も、絶縁層が鉄粉表面に安定に存在し、剥離等の著しい損傷が生じない限り、Fe-P系複合酸化層の絶縁性は保持される。
The Fe-P complex oxide layer, while having very high adhesion to the pure iron of the base material, is more resistant to deformation of iron powder compared with other oxide systems such as SiO 2 and Al 2 O 3 . The ability to follow is very good.
For this reason, the Fe—P-based composite oxide layer does not receive any damage that would cause the insulation deterioration such as peeling or breakage even during surface deformation during compacting. The Fe—P-based composite oxide layer has a glass (amorphous) structure up to about 550 ° C., and crystallizes by heating at a high temperature exceeding 550 ° C. However, even after crystallization, the insulating property of the Fe—P-based composite oxide layer is maintained as long as the insulating layer is stably present on the surface of the iron powder and significant damage such as peeling does not occur.
 本実施形態では、Fe-P系複合酸化層の上層部に、Siを含む有機層を重ねて被覆する。Siを含む有機層は、シリコーン樹脂等の有機系物質を溶液状にして、鉄粉表面に均一に塗布後に乾燥する等の手法で被覆することができる。鉄粉表面にSiを含む有機層を被覆することで、圧粉軟磁性体を酸化雰囲気中で歪低減熱処理する際に、酸化影響層の鉄粉界面にSiを主体とする酸化抑制層が形成される。この酸化抑制層は、圧粉軟磁性体の鉄損を低減する効果がある。 In the present embodiment, the upper layer portion of the Fe—P-based composite oxide layer is covered with an organic layer containing Si in an overlapping manner. The organic layer containing Si can be coated with an organic substance such as a silicone resin in the form of a solution, uniformly coated on the iron powder surface and then dried. By covering the iron powder surface with the organic layer containing Si, when heat treating the powder soft magnetic material in a reducing atmosphere to reduce strain, an oxidation suppression layer mainly composed of Si is formed on the iron powder interface of the oxidation affected layer. Be done. The oxidation suppressing layer has an effect of reducing the iron loss of the powder soft magnetic material.
 本実施形態の、Fe-P系複合酸化層とSiを含む有機層の2層の絶縁層を被覆した鉄粉には、成形性を付与する目的から、潤滑剤を添加することが好ましい。潤滑剤の材質は、特に規定しないが、従来からの公知のものを使用すればよい。具体的な例としては、ステアリン酸亜鉛、ステアリン酸リチウム等の金属塩粉末及びその他のワックス等が挙げられる。潤滑剤の添加量を過度に増やすと、圧粉軟磁性体の密度が低下して磁気特性を阻害する要因となる。また添加量が少ないと、圧縮成形後の抜出しが困難になり成形性が低下する。潤滑剤は、0.05~0.8質量%の範囲での添加が好ましい。 A lubricant is preferably added to the iron powder coated with the two insulating layers of the Fe—P-based composite oxide layer and the organic layer containing Si of the present embodiment for the purpose of imparting formability. The material of the lubricant is not particularly limited, but conventionally known ones may be used. Specific examples thereof include metal salts such as zinc stearate and lithium stearate, and other waxes. When the amount of lubricant added is excessively increased, the density of the powder soft magnetic material is reduced, which causes the inhibition of the magnetic characteristics. In addition, when the addition amount is small, extraction after compression molding becomes difficult, and the formability is reduced. The lubricant is preferably added in the range of 0.05 to 0.8% by mass.
 2)耐酸化性を考慮した圧粉体組織の最良の形態
 本実施形態では、上述した複合鉄粉を圧粉成形して軟磁性体とし、酸化雰囲気中にて歪低減の熱処理を実施する。その際に、熱処理を適切な温度と時間の条件下で実施することで、圧粉軟磁性体の表面領域に酸化影響層を形成する。
2) Best mode of green compact structure considering oxidation resistance In the present embodiment, the above-described composite iron powder is compacted into a soft magnetic material, and a heat treatment for reducing strain is performed in an oxidizing atmosphere. At this time, the heat treatment is carried out under appropriate temperature and time conditions to form an oxidation-influenced layer on the surface area of the powder soft magnetic material.
 熱処理の初期過程において、圧粉軟磁性体の表面領域の鉄粉では、酸素(O)がFe-P系複合酸化層を通過、拡散して、下地の純Feと容易に酸化反応し、Fe等のFeを主体とする酸化物を形成する。純FeがOと反応して酸化物に変化する過程で体積の増加が生じ、Fe-P系複合酸化層とSiを含む有機層は過度の変形を受ける。同時に、これらの2層の絶縁層と基材との密着性は急激に低下し、絶縁層は剥離、分解することで、Feを主体とする酸化物の形成は更に進行する。この過程で、当初鉄粉同士の界面に充填されていた潤滑剤は、酸化によってほとんどが気化、消失する。Feを主体とする酸化物は、潤滑剤が消失した界面の隙間を埋めるとともに、剥離、分解した2層の絶縁層の残部を取り込みながら成長する。 In the initial process of heat treatment, in the iron powder in the surface area of the powder soft magnetic material, oxygen (O) passes through and diffuses through the Fe-P-based composite oxide layer, and easily oxidizes with the pure Fe in the base, An oxide mainly composed of Fe such as 3 O 4 is formed. As pure Fe reacts with O to form an oxide, an increase in volume occurs, and the Fe—P-based composite oxide layer and the organic layer containing Si undergo excessive deformation. At the same time, the adhesion between the two insulating layers and the base material is sharply reduced, and the insulating layer is peeled off and decomposed, whereby the formation of the oxide mainly composed of Fe further progresses. In this process, most of the lubricant initially charged at the interface between the iron powders is vaporized and disappears by oxidation. The oxide mainly composed of Fe fills the gap of the interface where the lubricant disappeared and grows while taking in the remaining part of the peeled and decomposed two insulating layers.
 上記の結果として、酸化影響層の鉄粉界面に形成される主な物質として、
1)Feを主体とする酸化物(例えばFe等)
2)FeがSiと結合した複合酸化物(Fe-Si複合酸化物、例えばFeSiO等)
3)FeがP、Si等の絶縁層を構成する元素と結合した複合酸化物(Fe-P-Si複合酸化物)
4)Feをほとんど含まずSiを主体とする酸化物(例えばSiO
が生成される。
As a result of the above, as the main substance formed at the iron powder interface of the oxidation affected layer,
1) Oxide mainly composed of Fe (eg Fe 3 O 4 etc.)
2) Complex oxides in which Fe is bonded to Si (Fe-Si complex oxides such as Fe 2 SiO 4 etc.)
3) Complex oxides in which Fe is combined with elements constituting the insulating layer such as P and Si (Fe-P-Si complex oxides)
4) An oxide mainly containing Si (eg SiO 2 ) containing almost no Fe
Is generated.
 1)の「Feを主体とする酸化物」は、主に鉄粉の酸化により生成される。2)の「Fe-Si複合酸化物」は、有機層中のSiがFe酸化物と複合酸化して生成される。3)の「Fe-P-Si複合酸化物」は、鉄粉表面の絶縁層が剥離し、Feと反応・凝集することで生成される。4)のFeをほとんど含まず「Siを主体とする酸化物」は、Siを含む有機層に含まれるSiが熱反応により酸化、凝集、再配列して生成される。 The “Fe-based oxide” in 1) is mainly produced by the oxidation of iron powder. The “Fe—Si complex oxide” in 2) is formed by complex oxidation of Si in the organic layer with the Fe oxide. The “Fe—P—Si complex oxide” in 3) is produced by peeling off the insulating layer on the surface of the iron powder and reacting / aggregating with Fe. The “Fe-based oxide” containing almost no Fe in 4) is generated by oxidizing, aggregating, and rearranging Si contained in the organic layer containing Si by a thermal reaction.
 図2は、酸化影響層の鉄粉界面の模式図である。図2に示すように、酸化影響層では、鉄粉界面10は、Feを主体とする酸化物11(Fe)及びFe-Si複合酸化物12、塊状のFe-P-Si複合酸化物13、及びFeをほとんど含まずSiを主体とする層状の酸化物14(SiO)という3つの組織から構成されている。 FIG. 2 is a schematic view of the iron powder interface of the oxidation affected layer. As shown in FIG. 2, in the oxidation-influenced layer, the iron powder interface 10 is formed of Fe-based oxide 11 (Fe 3 O 4 ) and Fe—Si composite oxide 12, and massive Fe—P—Si composite oxidation. things 13, and an oxide of layered that the Si mainly contains almost no Fe 14 is composed of 3 tissue named (SiO 2).
 熱処理時における圧粉軟磁性体の酸化反応は、軟磁性体の表面から進入した酸素原子が、鉄粉界面を通過して圧粉軟磁性体の内部へ拡散することで進行する。すなわち、鉄粉界面は、熱処理時の酸素の拡散経路となる。本実施形態では、酸化影響層の鉄粉界面10に存在する4)のFeをほとんど含まずSiを主体とする酸化物14(例えばSiO)の役割が重要となる。 The oxidation reaction of the powder soft magnetic material at the time of heat treatment proceeds by the diffusion of oxygen atoms entering from the surface of the soft magnetic material into the interior of the powder soft magnetic material through the iron powder interface. That is, the iron powder interface is a diffusion path of oxygen at the time of heat treatment. In the present embodiment, the role of the oxide 14 (for example, SiO 2 ) mainly containing Si, which does not substantially contain Fe in 4) present at the iron powder interface 10 of the oxidation affected layer, is important.
 このSiを主体とする酸化物14は、1)のFeを主体とする酸化物11及び2)のFe-Si複合酸化物12と同時に反応、生成される。生成された結果、Siを主体とする酸化物14の組織は、厚さ数十nmの層状となり、鉄粉界面10を縦横に分断するように配列する。1)のFeを主体とする酸化物11(Fe等)及び2)のFe-Si複合酸化物12は、この厚さ数十nmの層状のSiを主体とする酸化物14の隙間を充填するように形成される。 The Si-based oxide 14 is reacted and generated simultaneously with the Fe-based oxides 11 and 2) of the 1) Fe-Si composite oxide 12. As a result, the structure of the oxide 14 mainly composed of Si becomes a layer having a thickness of several tens of nm, and is arranged so as to divide the iron powder interface 10 longitudinally and laterally. The Fe-based oxide 11 (Fe 3 O 4 etc.) of 1) and the Fe-Si complex oxide 12 of 2) have a thickness of several tens of nm and a gap of the Si-based oxide 14 of mainly Si. It is formed to fill the
 4)のSiを主体とする層状酸化物14は、Feを含む1)~3)の酸化物に比べて耐酸化性に非常に優れている。このSiを主体とする層状酸化物が、鉄粉界面10を分断して配列することで、熱処理時の酸素の拡散をブロックする酸化抑制層として機能すると推測される。Feを含まないSiを主体とする酸化物が、酸化影響層に酸化抑制層として存在することが、本実施形態による圧粉軟磁性体の大きな特徴である。 The layered oxide 14 mainly composed of Si in 4) is very excellent in oxidation resistance as compared with the oxides 1) to 3) containing Fe. It is presumed that this layered oxide mainly composed of Si functions as an oxidation suppressing layer that blocks the diffusion of oxygen during heat treatment by dividing and arranging the iron powder interface 10. It is a major feature of the powder soft magnetic material according to the present embodiment that an oxide mainly composed of Si not containing Fe is present in the oxidation affected layer as an oxidation suppression layer.
 これらの酸化影響層の下部、即ち圧粉軟磁性体の内部領域のミクロ組織は、酸化影響層とは異なる様相を呈す。圧粉軟磁性体の内部領域において、鉄粉表面にはFe、P、及びSiを含む緻密な複合酸化層が絶縁層として形成される。この複合酸化層は、鉄粉表面に接する下部層とその上側の上部層とからなる2層構造を有し、各層ではPとSiの配合比が異なる。下部層では、Feと共にPが比較的多く含まれるが、Siの含有量は少ない。
一方、上部層では、Pの含有量は少なく、Siが下部層よりも多く含まれることが特徴である。FeとPが多い「Fe-Pを主体とする下部層」とSiが多い「Si-richな上部層」とからなる、このような2層構造の複合酸化層は、鉄粉表面に当初存在した、Fe-P系複合酸化層とSiを含む有機層を重ねた組織が、加熱により変化して形成される。
The microstructure of the lower part of these oxidation-influenced layers, that is, the internal region of the powder soft magnetic material, has a different appearance from the oxidation-influenced layers. A dense composite oxide layer containing Fe, P and Si is formed as an insulating layer on the surface of the iron powder in the inner region of the powder soft magnetic material. This composite oxide layer has a two-layer structure consisting of a lower layer in contact with the iron powder surface and an upper layer on the upper side thereof, and the compounding ratio of P to Si is different in each layer. In the lower layer, P is relatively abundant together with Fe, but the content of Si is small.
On the other hand, the upper layer is characterized in that the content of P is small and Si is contained more than in the lower layer. Such a two-layered composite oxide layer consisting of a "Fe-P-based lower layer" rich in Fe and P and a "Si-rich upper layer" rich in Si is initially present on the surface of iron powder. A structure in which the Fe—P-based composite oxide layer and the organic layer containing Si are stacked is changed by heating and formed.
 圧粉軟磁性体の内部領域において、鉄粉表面における2層構造の絶縁層は、厚さが2層を合わせて10~200nmであることが好ましい。絶縁層の厚さが2層を合わせて10nmを下回ると、絶縁性が低下するため好ましくない。厚さが2層を合わせて200nmを越える場合は、鉄粉同士の間隔が広がり、磁束密度の低下につながるため好ましくない。 In the inner region of the powder soft magnetic material, the insulating layer having a two-layer structure on the surface of the iron powder preferably has a total thickness of 10 to 200 nm. If the total thickness of the insulating layers is less than 10 nm, the insulation property is unfavorably reduced. If the total thickness of the two layers exceeds 200 nm, the distance between the iron powders increases, which is not preferable because it leads to a decrease in magnetic flux density.
 2層構造の絶縁層の外側の界面(鉄粉と接しない方の界面)は、CとOを主体として若干のSiを含む有機物質により充填されている。この界面を充填する有機物質は、熱処理前のSiを含む有機層と潤滑剤の金属石鹸あるいはワックス等の化学成分が、加熱により変化した組織と推測される。 The outer interface (the interface which is not in contact with the iron powder) of the two-layered insulating layer is filled with an organic substance mainly containing C and O and containing some Si. The organic substance filling the interface is presumed to be a structure in which chemical components such as metal soap or wax of the organic layer containing Si and the lubricant before heat treatment are changed by heating.
 上記のように、圧粉軟磁性体の内部領域における界面ミクロ組織は、酸化影響層で見られる組織(すなわち、Feを主体とする酸化物、Fe-Si複合酸化物、Fe-P-Si複合酸化物、及びFeをほとんど含まずSiを主体とする酸化物を含む組織)とは異なる様相を示す。このような圧粉軟磁性体の内部領域は、酸化がほとんど生じないので、「未酸化領域」と呼ぶ。未酸化領域においては、外部から鉄粉界面を通じて進入、拡散する酸素との反応がほとんど生じない。この未酸化領域は、図1では、未酸化領域4として示している。 As described above, the interface microstructure in the inner region of the powder soft magnetic material is the structure found in the oxidation affected layer (ie, an oxide mainly composed of Fe, an Fe-Si composite oxide, an Fe-P-Si composite) It shows a different aspect from the structure of oxide) and a structure containing an oxide mainly containing Si and containing almost no Fe. Such an inner region of the powder soft magnetic material is referred to as an "unoxidized region" because oxidation hardly occurs. In the unoxidized region, almost no reaction with oxygen which penetrates and diffuses from the outside through the iron powder interface occurs. This unoxidized region is shown as unoxidized region 4 in FIG.
 図3は、未酸化領域の鉄粉界面のミクロ組織を示す模式図である。図3に示すように、未酸化領域では、鉄粉の表面に、Fe-Pを主体とする下部層21とSi-richな上部層22という2層が形成される。Fe-Pを主体とする下部層21は無機絶縁被覆層であり、Si-richな上部層22は酸化物絶縁層であるので、この2層は緻密な絶縁層となっている。更に、この絶縁層の間には、C及びOを主体としSiを含む有機層23が存在し、鉄粉界面10を充填する。この結果として、未酸化領域では鉄粉間の絶縁が保持され、渦電流損失は低下する。 FIG. 3 is a schematic view showing the microstructure of the iron powder interface in the unoxidized region. As shown in FIG. 3, in the unoxidized region, two layers of a lower layer 21 mainly composed of Fe-P and a Si-rich upper layer 22 are formed on the surface of the iron powder. The lower layer 21 mainly composed of Fe-P is an inorganic insulating covering layer, and the Si-rich upper layer 22 is an oxide insulating layer, so these two layers are dense insulating layers. Furthermore, an organic layer 23 mainly composed of C and O and containing Si is present between the insulating layers, and fills the iron powder interface 10. As a result, the insulation between the iron powder is maintained in the unoxidized region, and the eddy current loss is reduced.
 一方で、圧粉軟磁性体の表面領域の酸化影響層では、鉄粉表面の絶縁層が破壊されており、渦電流損失が増加する。大気熱処理の際の酸化の影響が、圧粉軟磁性体の全体に及んだ場合は、未酸化の組織は消失する。その結果、圧粉軟磁性体の鉄損は増加し、磁気特性の低下を招く。ゆえに、圧粉軟磁性体の全体が酸化の影響を受けるのは、好ましくない。 On the other hand, in the oxidation-influenced layer on the surface area of the powder soft magnetic material, the insulating layer on the surface of the iron powder is broken, and the eddy current loss increases. If the effect of oxidation during atmospheric heat treatment affects the entire compacted soft magnetic material, the unoxidized tissue disappears. As a result, the iron loss of the powder soft magnetic material increases, leading to the deterioration of the magnetic properties. Therefore, it is not preferable that the whole of the powder soft magnetic material is affected by oxidation.
 したがって、熱処理後の圧粉軟磁性体の鉄損を低減するには、酸化影響層の生成を圧粉軟磁性体の表面領域のみに限定し、圧粉軟磁性体の内部領域は未酸化の状態を保つことが重要である。本実施形態では、前述のように、酸化影響層の鉄粉界面部にSiを主体とする酸化物による酸化抑制層を形成することで、圧粉軟磁性体の内部領域への酸素の拡散を抑制し、内部領域を未酸化の状態とする(未酸化領域とする)ことが可能となる。 Therefore, in order to reduce the iron loss of the powder soft magnetic material after heat treatment, the formation of the oxidation affected layer is limited to the surface region of the powder soft magnetic material only, and the internal region of the powder soft magnetic material is not oxidized It is important to keep the condition. In the present embodiment, as described above, diffusion of oxygen to the inner region of the powder soft magnetic material can be achieved by forming an oxidation suppression layer of an oxide mainly composed of Si in the iron powder interface of the oxidation affected layer. It is possible to suppress the internal region into an unoxidized state (to be an unoxidized region).
 3)鉄粉の組成、粒径の最良の形態
 本実施形態では、圧粉軟磁性体の原料となる鉄粉は、Mn、Cr、Si、P、S等のFe以外の元素の含有量ができる限り少ない鉄粉が好ましい。粉末製造プロセスには、水アトマイズ、またはガスアトマイズ処理を用いることが好ましい。アトマイズ処理後の鉄粉は、O、C、N等のガス不純物を多く含むことから、水素を含む還元雰囲気における熱処理を800~1000℃で実施して、鉄粉を純化するプロセスが必要となる。鉄粉中のO含有量を500ppm以下に低減することが、鉄損の増加を防ぐ目的から好ましい。同様に、C含有量を30ppm以下、N含有量を10ppm以下にそれぞれ低減することが、鉄損の増加を防ぐ目的から好ましい。
3) Best form of composition and particle size of iron powder In the present embodiment, the iron powder as the raw material of the powder soft magnetic material has a content of elements other than Fe such as Mn, Cr, Si, P and S. Iron powder as low as possible is preferred. In the powder production process, it is preferable to use water atomization or gas atomization treatment. Since the iron powder after atomization treatment contains many gas impurities such as O, C, N, etc., it is necessary to carry out a heat treatment in a reducing atmosphere containing hydrogen at 800 to 1000 ° C. to purify the iron powder. . It is preferable to reduce the content of O in the iron powder to 500 ppm or less for the purpose of preventing an increase in iron loss. Similarly, it is preferable to reduce the C content to 30 ppm or less and the N content to 10 ppm or less for the purpose of preventing an increase in iron loss.
 圧粉軟磁性体を構成する鉄粉の大きさ(粒径)は、歪低減熱処理後の磁気特性に影響を及ぼす。粒径が100μmを下回る微細な鉄粉の占める割合が大きい場合、圧粉軟磁性体の内部では、鉄粉界面部の占める体積比率が増加する。鉄粉界面は、歪低減熱処理時において、圧粉軟磁性体の内部への酸素の拡散経路となる。このため、同一密度の圧粉軟磁性体では、界面部の体積比率が高い方が、酸化影響層は内部まで成長し易くなり、鉄損は増加する。 The size (particle size) of the iron powder constituting the powder soft magnetic material affects the magnetic properties after the strain reduction heat treatment. When the proportion of fine iron powder having a particle size of less than 100 μm is large, the volume proportion of the iron powder interface increases in the inside of the powder soft magnetic material. The iron powder interface serves as a diffusion path of oxygen to the inside of the powder soft magnetic material at the time of strain reduction heat treatment. For this reason, in the case of a powder soft magnetic material having the same density, when the volume ratio of the interface portion is high, the oxidation-affected layer easily grows to the inside, and the core loss increases.
 このため、鉄粉の粒径は、100~400μmの範囲の割合が重量比で70%以上、100μmを下回る微細鉄粉の占める割合が重量比で30%未満であるのが好ましい。このような割合であれば、歪低減熱処理時の酸化影響層の内部への成長が抑制され、鉄損は低下する。鉄粉全体の平均粒径は、120~250μmであるのが、鉄損低減の観点から好ましい。鉄粉の粒径が過度に大きい場合は、渦電流損失の増加につながるため好ましくない。粒径が400μmを超える粗大鉄粉の占める割合は、重量比で30%未満とすることが好ましい。 For this reason, as for the particle size of the iron powder, it is preferable that the proportion in the range of 100 to 400 μm is 70% or more by weight, and the proportion of the fine iron powder below 100 μm is less than 30% by weight. If it is such a ratio, the growth to the inside of the oxidation influence layer at the time of distortion reduction heat processing will be suppressed, and an iron loss will fall. The average particle size of the entire iron powder is preferably 120 to 250 μm from the viewpoint of core loss reduction. An excessively large particle size of the iron powder is not preferable because it leads to an increase in eddy current loss. The proportion of coarse iron powder having a particle size of more than 400 μm is preferably less than 30% by weight.
 4)成形条件、成形体密度の最良の形態
 上記の方法で得られた、圧粉軟磁性体の原料となる複合粉末を、金型成形により高圧下で過度の塑性変形をさせ、圧粉軟磁性体とする。成形圧力は通常800MPa以上とし、圧粉軟磁性体に占める金属Feの割合が体積比で94%以上までに、密度を高めることが好ましい。
4) Best mode of molding conditions and compact density The composite powder as a raw material of the powder soft magnetic material obtained by the above method is subjected to excessive plastic deformation under high pressure by die molding, It is magnetic. The molding pressure is usually 800 MPa or more, and it is preferable to increase the density so that the ratio of metal Fe to the powder soft magnetic material is 94% or more in volume ratio.
 圧粉軟磁性体の密度が低い場合は、磁性体を構成する鉄粉間の距離、即ち鉄粉界面の幅が広がることになる。鉄粉界面の幅が広い場合は、歪低減熱処理の際に、酸化影響層の酸化抑制層(Feをほとんど含まずSiを主体とする、薄い層状に分布する酸化物)の隙間から、酸素が圧粉軟磁性体の内部へ拡散する。結果として、圧粉軟磁性体の内部の未酸化領域の割合が減少することで、鉄損は増加する。このため、圧粉軟磁性体の密度を十分に高くして、鉄粉界面の幅を狭小化することが、低鉄損化に有効となる。 When the density of the powder soft magnetic material is low, the distance between the iron powders constituting the magnetic body, that is, the width of the iron powder interface is increased. When the width of the iron powder interface is wide, during the strain reduction heat treatment, oxygen is contained in the gaps of the oxidation-inhibited layer of the oxidation-affected layer (an oxide distributed in a thin layer containing mostly Fe and containing Si). It diffuses inside the compacted soft magnetic material. As a result, the core loss increases as the proportion of the unoxidized area inside the dusted soft magnetic material decreases. Therefore, making the density of the powder soft magnetic material sufficiently high to narrow the width of the iron powder interface is effective in reducing iron loss.
 圧粉軟磁性体の密度は、少なくとも7.45g/cm以上、好ましくは7.50g/cm以上であることが好ましい。圧粉軟磁性体に占める金属Feの割合は、体積比で94.0%以上、好ましくは95.0%以上であることがより好ましい。圧粉軟磁性体の密度が7.45g/cmを下回る場合は、熱処理時に圧粉軟磁性体の内部への酸素の拡散が促進され、酸化影響層の占める割合が増加し、圧粉軟磁性体の鉄損の増加を招くため、好ましくない。同様の理由で、鉄粉自身の割合が体積比で94.0%を下回る場合も、熱処理後の圧粉軟磁性体の鉄損増加を招くため、好ましくない。圧粉軟磁性体の密度を7.75g/cmを越えるまで高めるのは、成形プロセス上困難であり、絶縁層の破損による渦電流損失の増加の可能性もあるため、密度は7.75g/cm以下とすることが好ましい。鉄粉自身の占有率(圧粉軟磁性体に占める鉄粉の割合を体積比で表したもの)は、98.5%以下とすることが好ましい。 The density of the powder soft magnetic material is preferably at least 7.45 g / cm 3 or more, preferably 7.50 g / cm 3 or more. The ratio of metal Fe to the powder soft magnetic material is more preferably 94.0% or more, preferably 95.0% or more in volume ratio. When the density of the powder soft magnetic material is less than 7.45 g / cm 3 , the diffusion of oxygen to the inside of the powder soft magnetic material is promoted during heat treatment, and the proportion of the oxidation affected layer increases, and the powder soft magnetic material This is not preferable because it causes an increase in iron loss of the magnetic substance. For the same reason, even when the proportion of the iron powder itself is less than 94.0% by volume, it is not preferable because it causes an increase in iron loss of the powder soft magnetic material after heat treatment. It is difficult in terms of molding process to increase the density of powder soft magnetic material to over 7.75 g / cm 3 , and there is also the possibility of an increase in eddy current loss due to breakage of the insulating layer, so the density is 7.75 g It is preferable to set it as / cm < 3 > or less. The occupancy rate of the iron powder itself (the ratio of the iron powder to the powder soft magnetic material represented by the volume ratio) is preferably 98.5% or less.
 5)酸化影響層の最適な厚さについて
 圧粉軟磁性体における酸化影響層の最適な厚さについて、以下に説明する。
5) Optimal Thickness of Oxidation Affected Layer The optimum thickness of the oxidation affected layer in the dusted soft magnetic material will be described below.
 まず、圧粉軟磁性体の「厚さ」について定義する。圧粉軟磁性体の表面の任意の箇所において、圧粉軟磁性体の内部に向かって、表面に垂直な方向に直線を引く。この直線において、表面から、圧粉軟磁性体の反対側(圧粉軟磁性体の裏側)にあるもう一方の表面を貫通するまでの線分の長さを、その任意の箇所における圧粉軟磁性体の厚さと定義する。
図1を用いて説明すると、圧粉軟磁性体の厚さはDである。圧粉軟磁性体の表面が曲面である場合は、表面における接面に対し垂直な方向に直線を引いて厚さを定義する。すなわち、圧粉軟磁性体の任意の箇所における厚さとは、その箇所の表面に垂直な方向の、その箇所の圧粉軟磁性体の長さである。
First, the “thickness” of the powder soft magnetic material is defined. At any point on the surface of the powder soft magnetic material, a straight line is drawn in the direction perpendicular to the surface toward the inside of the powder soft magnetic material. In this straight line, the length of a line segment from the surface to the other surface on the opposite side of the powder soft magnetic material (the back side of the powder soft magnetic material) is the powder softness at any given location. It is defined as the thickness of the magnetic body.
When explaining using FIG. 1, the thickness of the powder soft magnetic material is D. When the surface of the powder soft magnetic material is a curved surface, a straight line is drawn in the direction perpendicular to the contact surface on the surface to define the thickness. That is, the thickness at any place of the powder soft magnetic material is the length of the powder soft magnetic material at that place in the direction perpendicular to the surface of the place.
 酸化影響層についても同様に、上述の線分における、酸化影響層の長さのことを「厚さ」と呼ぶ。ただし、酸化影響層の厚さは、上述の線分が表面領域だけを通る箇所については定義せず、上述の線分が内部領域とこの内部領域を挟む2つの表面領域とを通る箇所について定義する。この2つの表面領域は、互いに圧粉軟磁性体の反対側に位置する。図1を用いて説明すると、酸化影響層の厚さはd1、d2であり、d3は酸化影響層の厚さではない。 Similarly for the oxidation affected layer, the length of the oxidation affected layer in the above-mentioned line segment is referred to as "thickness". However, the thickness of the oxidation-influenced layer is not defined where the above-mentioned line segment passes only the surface area, but is defined as where the above-mentioned line segment passes through the inner area and the two surface areas sandwiching the inner area. Do. The two surface areas are located on opposite sides of the soft magnetic powder body. As described with reference to FIG. 1, the thickness of the oxidation affected layer is d1 and d2, and d3 is not the thickness of the oxidation affected layer.
 圧粉軟磁性体の厚さ(上述の線分の長さ)は、測定部位により異なる場合もある。 The thickness (length of the above-mentioned line segment) of the powder soft magnetic material may differ depending on the measurement site.
 酸化影響層は、任意の箇所での厚さと、この箇所に対して圧粉軟磁性体の反対側(圧粉軟磁性体の裏側)にある箇所での厚さとが、異なっていてもよい。図1を用いて説明すると、d1とd2が等しくなくてもよい。すなわち、酸化影響層の厚さは、均一でなくてもよい。 The thickness of the oxidation-influenced layer may be different from the thickness at an arbitrary position and the thickness at a position on the opposite side of the dusted soft magnetic material (the back side of the dusted soft magnetic material) with respect to this position. If it demonstrates using FIG. 1, d1 and d2 do not need to be equal. That is, the thickness of the oxidation affected layer may not be uniform.
 酸化影響層の厚さは、断面が円形や矩形などの単純なリング形状の圧粉軟磁性体の場合、圧粉軟磁性体の厚さに対して、次のような割合であるのが好ましい。酸化影響層の厚さは、圧粉軟磁性体の任意の箇所での厚さ(図1のd1)と、この箇所に対して圧粉軟磁性体の反対側(圧粉軟磁性体の裏側)にある箇所での厚さ(図1のd2)との合計が、圧粉軟磁性体の厚さ(図1のD)の1/16以上で1/2以下であることが、圧粉軟磁性体の磁気特性から最適である。このとき、この任意の箇所(図1のd1が定義されている箇所)と、この箇所に対して圧粉軟磁性体の反対側にある箇所(図1のd2が定義されている箇所)は、上述の直線上にある。 The thickness of the oxidation-influenced layer is preferably in the following ratio with respect to the thickness of the powder soft magnetic material in the case of a simple ring-shaped powder soft magnetic material having a circular or rectangular cross section, etc. . The thickness of the oxidation-influenced layer is the thickness (d1 in FIG. 1) at any location of the powder soft magnetic material and the opposite side of the powder soft magnetic material with respect to this location (the back side of the powder soft magnetic material The total of the thickness (d2 in FIG. 1) and the thickness of the portion at 1) is 1/16 or more and 1⁄2 or less of the thickness (D in FIG. 1) of the powder soft magnetic material It is optimal from the magnetic properties of the soft magnetic material. At this time, this arbitrary place (the place where d1 in FIG. 1 is defined) and the place on the opposite side of the powder soft magnetic material with respect to this place (place where d2 in FIG. 1 is defined) , On the straight line mentioned above.
 圧粉軟磁性体の任意の箇所と反対側の箇所における酸化影響層の厚さの合計が、圧粉軟磁性体の厚さの1/16未満である場合は、熱処理時間が短いことが推測され、歪低減が不十分となり鉄損増加を招くことから、好ましくない。また、この合計が、圧粉軟磁性体の厚さの1/2を越える場合は、圧粉軟磁性体に占める未酸化領域の体積の比率が小さくなる。この場合は、圧粉軟磁性体の鉄損が増加して磁気特性が低下することから、好ましくない。 If the total thickness of the oxidation-affected layer at a point opposite to any part of the powder soft magnetic material is less than 1/16 of the thickness of the powder soft magnetic material, it is estimated that the heat treatment time is short It is not preferable because strain reduction is insufficient to cause an increase in iron loss. In addition, when this total exceeds 1⁄2 of the thickness of the powder soft magnetic material, the ratio of the volume of the unoxidized region in the powder soft magnetic material decreases. In this case, the core loss of the powder soft magnetic material is increased to deteriorate the magnetic properties, which is not preferable.
 圧粉軟磁性体をモータのロータコアやステータコアに適用する際には、断面が円形、矩形などの単純なリング形状ではなく、爪などの突起を有する三次元の複雑形状を有する場合もある。複雑形状の圧粉軟磁性体では、形状の違いにより、圧粉軟磁性体における厚さに差が生じる。この場合、圧粉軟磁性体における厚さが小さい部分では、酸化影響層の割合が相対的に増加して1/2を越える場合が考えられる。断面が円形、矩形以外の複雑形状の圧粉軟磁性体では、圧粉軟磁性体の厚さが平均となる個所において、酸化影響層の厚さの合計が圧粉軟磁性体の厚さの1/16以上で1/2以下であることが好ましい。 When the powder soft magnetic material is applied to a rotor core or a stator core of a motor, the cross section may not have a simple ring shape such as a circle or a rectangle, but may have a three-dimensional complex shape having a projection such as a claw. In the powder soft magnetic material of complicated shape, the difference in the shape causes a difference in thickness in the powder soft magnetic material. In this case, it is conceivable that the proportion of the oxidation-influenced layer relatively increases to exceed 1/2 at portions where the thickness of the powder soft magnetic material is small. In the powder soft magnetic material having a complex cross section other than a circular or rectangular cross section, the total thickness of the oxidation affected layer is the thickness of the powder soft magnetic material at a location where the thickness of the powder soft magnetic material is averaged. It is preferable that it is 1/16 or more and 1/2 or less.
 本実施形態では、圧粉軟磁性体の酸化影響層の厚さの評価方法として、圧粉軟磁性体の断面のミクロ組織を観察することによる評価も可能である。圧粉軟磁性体の任意の箇所を切断し、断面部に対して樹脂埋込みと研磨を実施後に、断面組織をEDS(エネルギー分散X線分光)分析機能を備えたSEM(走査型電子顕微鏡)等で観察することで、酸化影響層と未酸化領域との組織を明瞭に区別できる。酸化影響層では、鉄粉界面にFeを主体とする酸化物が形成されている一方で、未酸化領域の鉄粉界面には、Feを主体とする酸化物は存在しない。このため、圧粉軟磁性体の断面のミクロ組織観察において、鉄粉界面にFeを含む酸化物が存在する領域について、圧粉軟磁性体の表面からの幅を複数個所で測定することで、酸化影響層の厚さを直接評価することが可能となる。 In the present embodiment, as a method of evaluating the thickness of the oxidation affected layer of the powder soft magnetic material, it is also possible to evaluate by observing the microstructure of the cross section of the powder soft magnetic material. SEM (scanning electron microscope) equipped with EDS (energy dispersive X-ray spectroscopy) analysis function for cross-sectional structure after cutting any part of the powder soft magnetic material and performing resin embedding and polishing on the cross-sectional part By observing with, it is possible to clearly distinguish the structure of the oxidation affected layer and the unoxidized region. In the oxidation affected layer, an oxide mainly composed of Fe is formed at the iron powder interface, while an oxide mainly composed of Fe does not exist at the iron powder interface in the unoxidized region. Therefore, in the observation of the microstructure of the cross section of the powder soft magnetic material, the width from the surface of the powder soft magnetic material is measured at a plurality of points in the region where the oxide containing Fe is present at the iron powder interface. It becomes possible to evaluate the thickness of the oxidation affected layer directly.
 6)熱処理プロセスの最良の形態
 圧粉軟磁性体の歪低減熱処理は、プロセスコスト低減の観点から、主に大気雰囲気中での実施が好ましい。他の熱処理雰囲気としては、水蒸気雰囲気、または窒素、アルゴン、ヘリウム等の不活性ガスに体積比で20%以下(好ましくは、0.5~20%)の純酸素ガスを加えた酸化雰囲気でも、同様の効果が得られる。
6) Best Mode of Heat Treatment Process The strain reduction heat treatment of the powder soft magnetic material is preferably carried out mainly in an air atmosphere from the viewpoint of reduction of the process cost. As another heat treatment atmosphere, a steam atmosphere or an oxidation atmosphere in which a pure oxygen gas of 20% or less (preferably 0.5 to 20%) by volume ratio is added to an inert gas such as nitrogen, argon or helium, The same effect is obtained.
 熱処理の最高保持温度は、500℃以上650℃未満の範囲とすることが好ましい。保持温度が500℃未満の場合、圧粉軟磁性体を構成する鉄粉の歪低減が不十分となり、鉄損が増加するため、好ましくない。保持温度が650℃以上の場合は、鉄粉の酸化が過剰となり、圧粉体内部の未酸化領域の割合が低下して鉄損が増加することから、好ましくない。 The maximum holding temperature of the heat treatment is preferably in the range of 500 ° C. or more and less than 650 ° C. When the holding temperature is less than 500 ° C., the strain reduction of the iron powder constituting the powder soft magnetic material becomes insufficient, and the iron loss increases, which is not preferable. When the holding temperature is 650 ° C. or more, it is not preferable because the iron powder is excessively oxidized and the ratio of the unoxidized region inside the green compact is decreased to increase iron loss.
 最高温度での保持時間は、上記の温度範囲で、最短でも5分以上が必要である。保持時間が5分未満の場合は、鉄粉の歪低減が不十分となり、圧粉軟磁性体の鉄損が増加するため、好ましくない。保持が過剰に長時間となる場合、鉄粉の酸化が促進され鉄損の増加を招く。最適な保持時間は、熱処理温度により異なる。 The holding time at the maximum temperature should be at least 5 minutes in the above temperature range. If the holding time is less than 5 minutes, the strain reduction of the iron powder becomes insufficient, and the iron loss of the powder soft magnetic material increases, which is not preferable. If the retention is excessive for a long time, the oxidation of iron powder is promoted and the iron loss is increased. The optimum holding time depends on the heat treatment temperature.
 熱処理温度が500℃以上550℃未満で保持する場合は、最長2時間とすることが好ましい。2時間を越える場合は、鉄粉の酸化が過剰となり、圧粉体内部の未酸化領域の割合が低下して鉄損が増加するため、好ましくない。熱処理温度が550℃以上600℃未満で保持する場合は、最長1時間とすることが好ましい。1時間を越える場合は、鉄粉の酸化が過剰となり、鉄損が増加するため、好ましくない。熱処理温度が600℃以上650℃未満で保持する場合は、最長30分とすることが好ましい。30分を越える場合は、鉄粉の酸化が過剰となり、鉄損が増加するため、好ましくない。 When the heat treatment temperature is maintained at 500 ° C. or more and less than 550 ° C., the maximum heat treatment time is preferably 2 hours. If it exceeds 2 hours, the iron powder is excessively oxidized, and the proportion of the unoxidized region inside the green compact decreases, which is not preferable because iron loss increases. When the heat treatment temperature is maintained at 550 ° C. or more and less than 600 ° C., the heat treatment temperature is preferably 1 hour at maximum. When it exceeds 1 hour, it is not preferable because the iron powder is excessively oxidized and iron loss increases. When the heat treatment temperature is maintained at 600 ° C. or more and less than 650 ° C., the maximum heat treatment time is preferably 30 minutes. If it exceeds 30 minutes, it is not preferable because the iron powder is excessively oxidized to increase iron loss.
 保持の終了後には、できるだけ早く、熱処理体を加熱炉から室温中に取り出して、空冷することが好ましい。加熱炉中に入れて炉冷した場合は、鉄粉の酸化が過剰となり、鉄損が増加するため、好ましくない。 After the end of the holding, it is preferable to take out the heat-treated body from the heating furnace to room temperature and air-cool as soon as possible. When it is placed in a heating furnace and cooled, it is not preferable because oxidation of iron powder becomes excessive and iron loss increases.
 以下、実施例で、本発明による圧粉軟磁性体を更に詳細に説明する。 Hereinafter, the powder soft magnetic material according to the present invention will be described in more detail by way of examples.
 純鉄インゴット素材を、大気溶解後に水アトマイズ処理することで、粉末化した。アトマイズ後の鉄粉を、950℃にて2時間の水素還元熱処理を2回繰り返すことで、純化した。純化後に不純物として含まれる酸素濃度は、500質量ppm以下であった。純化後の鉄粉をメッシュにより100~300μmの粒度に篩分けした後、リン酸化成処理により、Fe-P系複合酸化物層を絶縁層として鉄粉表面に被覆した。Fe-P系複合酸化物層の厚さは、20~50nmの範囲とした。 The pure iron ingot material was pulverized by water atomizing treatment after being dissolved in air. The atomized iron powder was purified by repeating the hydrogen reduction heat treatment at 950 ° C. for 2 hours twice. The oxygen concentration contained as an impurity after purification was 500 mass ppm or less. The iron powder after purification was sieved to a particle size of 100 to 300 μm by a mesh, and then the Fe—P-based composite oxide layer was coated on the iron powder surface as an insulating layer by a phosphorylation treatment. The thickness of the Fe—P based composite oxide layer was in the range of 20 to 50 nm.
 Fe-P系複合酸化物を被覆した鉄粉に、シリコーン樹脂溶液を塗布して乾燥させて、鉄粉(実施例材1)を作製した。実施例材1の鉄粉に、ステアリン酸亜鉛系の潤滑剤を0.4質量%添加して、Vミキサーにより混合し、軟磁性複合粉末とした。比較材として、Fe-P系複合酸化物層のみを被覆した鉄粉(比較材1)を作製し、比較材1の鉄粉に、ステアリン酸亜鉛系の潤滑剤を0.4質量%添加して混合した複合粉末も作製した。 A silicone resin solution was applied to iron powder coated with Fe—P based composite oxide and dried to prepare iron powder (Example material 1). To the iron powder of Example Material 1, 0.4% by mass of a zinc stearate based lubricant was added, and mixed by a V mixer to obtain a soft magnetic composite powder. As a comparative material, an iron powder (comparative material 1) coated with only the Fe-P based composite oxide layer was prepared, and 0.4 mass% of zinc stearate based lubricant was added to the iron powder of comparative material 1 A mixed powder was also prepared.
 上記の軟磁性複合粉末を成形圧1200MPaにてプレスして、外径50mm、内径40mm、厚さ5mmのリング形状の圧粉軟磁性体とした。アルキメデス法により測定したリング状の圧粉軟磁性体の密度は、7.50~7.54g/cmであった。成形後の圧粉軟磁性体に対し、箱形の大気熱処理炉にて歪低減熱処理を実施した。熱処理の保持温度は550℃とし、昇温速度5℃/分で室温から550℃まで昇温し、30分保持後に炉から取り出して空冷した。熱処理後の圧粉軟磁性体の表面は、酸化による影響で全体に黒色を帯びていた。 The above soft magnetic composite powder was pressed at a molding pressure of 1200 MPa to form a ring-shaped powder soft magnetic material having an outer diameter of 50 mm, an inner diameter of 40 mm, and a thickness of 5 mm. The density of the ring-shaped powdery soft magnetic material measured by the Archimedes method was 7.50 to 7.54 g / cm 3 . The compacted soft magnetic material after molding was subjected to strain reduction heat treatment in a box-shaped air heat treatment furnace. The holding temperature of the heat treatment was 550 ° C., the temperature was raised from room temperature to 550 ° C. at a heating rate of 5 ° C./min, and after holding for 30 minutes, it was taken out of the furnace and air cooled. The surface of the soft magnetic powder after heat treatment had a black color overall due to the influence of oxidation.
 熱処理後の圧粉軟磁性体に対して、0.5mmの銅線を用いて1次側200ターン、2次側60ターンの巻線を実施して、周波数400Hzにおける鉄損(W/kg)を求めた。鉄損の測定結果は、実施例材1は37W/kg、比較材1は53W/kgとなった。以上の結果から、実施例材1は、比較材1よりも16W/kg鉄損が低く、優れた磁気特性を示すことがわかった。 Conduct the winding of 200 turns on the primary side and 60 turns on the secondary side using 0.5 mm copper wire to the powder soft magnetic material after heat treatment, and iron loss at a frequency of 400 Hz (W / kg) I asked for. As a result of measurement of iron loss, Example Wound 1 was 37 W / kg, and Comparative Wound 1 was 53 W / kg. From the above results, it was found that Example Material 1 had a core loss of 16 W / kg lower than that of Comparative Material 1 and exhibited excellent magnetic properties.
 実施例材1のミクロ組織の状況を詳細に調べる目的から、透過型電子顕微鏡(TEM)を用いて、圧粉軟磁性体の断面のミクロ組織を観察した。TEM観察には、磁気特性評価後の実施例材1のリング状試験片を使用した。図1に示した圧粉軟磁性体1の表面領域の酸化影響層3と内部領域の未酸化領域4の2箇所より、FIB(集束イオンビーム)法を用いて薄膜試験片を採取した。観察には、電解放出型の電子線源を有し、電子線のプローブ径が1nmレベルまで絞れるTEM装置(FE-TEM)を用いた。 For the purpose of examining the state of the microstructure of the example material 1 in detail, the microstructure of the cross section of the powder soft magnetic material was observed using a transmission electron microscope (TEM). The ring-shaped test piece of the example material 1 after magnetic property evaluation was used for TEM observation. Thin film test pieces were collected from two points of the oxidation affected layer 3 in the surface area of the powder soft magnetic body 1 and the unoxidized area 4 in the inner area shown in FIG. 1 using the FIB (focused ion beam) method. For observation, a TEM apparatus (FE-TEM) having an electron emission type of electron emission type and capable of reducing the diameter of a probe of an electron beam to 1 nm level was used.
 図4は、実施例材1の酸化影響層の鉄粉界面におけるTEM像(明視野像)である。図4には、異なる2個の鉄粉と、これらの鉄粉間の界面10が表示されている。鉄粉界面10の幅は、200~500nm程度である。鉄粉界面10の内部には、白色の網目状組織31が存在し、その隙間を灰色の組織32が充填している様子がわかる。鉄粉界面1の内部の白色の網目状組織31は、5~100nmの幅である。電子線プローブを数nmとして電子線回折を行った結果、白色の網目状組織31は非晶質構造であることがわかった。
また、EDSによる組成分析より、白色の網目状組織31からはSiとOのみが検出され、Feは存在しないことがわかった。この結果から、鉄粉界面10の内部に存在する白色の網目状組織31は、非晶質構造を有するSi酸化物であり、おそらくはSiOと推測される。
FIG. 4 is a TEM image (bright field image) at the iron powder interface of the oxidation affected layer of the example material 1. FIG. 4 shows two different iron powders and an interface 10 between these iron powders. The width of the iron powder interface 10 is about 200 to 500 nm. It can be seen that a white network 31 exists inside the iron powder interface 10, and the gray tissue 32 is filling the gaps. The white network 31 inside the iron powder interface 1 has a width of 5 to 100 nm. As a result of electron diffraction performed with an electron beam probe being several nm, it was found that the white network 31 had an amorphous structure.
Further, it was found from the compositional analysis by EDS that only Si and O were detected from the white network 31 and Fe was not present. From this result, it is presumed that the white network 31 present inside the iron powder interface 10 is an Si oxide having an amorphous structure, probably SiO 2 .
 同様に、鉄粉界面10の内部の白色の網目状組織31の隙間を充填する灰色の組織32について、同様の電子線回折を実施した結果、リング状の回折パターンが観察された。回折パターンの解析から、灰色の組織32は、Feを主体とする酸化物のFe、及びFeとSiを含む複合酸化物のFeSiOであることがわかった。電子線のプローブ径が数nmであることから、網目状組織31の隙間を充填する灰色の組織32は、ナノサイズの微細結晶粒で構成されるFe及びFeSiOであることがわかった。 Similarly, as a result of carrying out the same electron beam diffraction for the gray tissue 32 filling the gaps of the white network 31 inside the iron powder interface 10, a ring-like diffraction pattern was observed. From the analysis of the diffraction pattern, it was found that the gray structure 32 was Fe 3 O 4 , an oxide mainly composed of Fe, and Fe 2 SiO 4 of a composite oxide containing Fe and Si. Since the probe diameter of the electron beam is several nm, the gray structure 32 filling the gaps of the network structure 31 is Fe 3 O 4 and Fe 2 SiO 4 composed of nano-sized fine crystal grains. I understand.
 鉄粉界面10には、この他に、Fe、Pを含む直径数十~数百nmの塊状の酸化物が存在していた。この塊状の酸化物は、鉄粉表面に被覆されたFe-P系複合酸化物が、酸化により脱落、凝集することで成形されたと推測される。 At the iron powder interface 10, in addition to this, a massive oxide having a diameter of several tens to several hundreds of nm containing Fe and P was present. It is inferred that this massive oxide is formed as the Fe—P based complex oxide coated on the surface of iron powder is detached and aggregated by oxidation.
 図5は、実施例材1の未酸化領域の鉄粉界面におけるTEM像であり、図3の一部(1個の鉄粉とその界面)を示している。図5において、白色の部位は鉄粉界面10であり、暗い部位は鉄粉である。未酸化領域の組織は、図2や図4に示した酸化影響層の組織とは異なる。図5に示すように、鉄粉の表面には厚さが100nm未満の表面層が存在し、EDS分析によりこの表面層からFe、P、Si及びOが検出された。この表面層の鉄粉側(下部層)ではPが比較的多く検出され、Siの検出量は少なかった。一方、この表面層の界面側(上部層)では、Pが少なく、Siが下層より多く検出された。図5では、写真の解像度のために、この下部層と上部層の区別を見ることができない。 FIG. 5: is a TEM image in the iron powder interface of the unoxidized area | region of the example material 1, and shows a part (one iron powder and its interface) of FIG. In FIG. 5, the white part is the iron powder interface 10, and the dark part is the iron powder. The structure of the unoxidized region is different from the structure of the oxidation affected layer shown in FIG. 2 and FIG. As shown in FIG. 5, a surface layer having a thickness of less than 100 nm was present on the surface of the iron powder, and Fe, P, Si and O were detected from this surface layer by EDS analysis. A relatively large amount of P was detected on the iron powder side (lower layer) of this surface layer, and a small amount of Si was detected. On the other hand, on the interface side (upper layer) of this surface layer, P was small and Si was detected more than in the lower layer. In FIG. 5 this distinction between lower and upper layers can not be seen due to the resolution of the picture.
 この結果から、未酸化領域の鉄粉の表面には、Fe、P、Si及びOを含む酸化物系の絶縁層が存在し、この絶縁層は、化学組成の異なる2層(Pが多い下部層とSiが多い上部層)から構成されることがわかった。この2層は、図3を用いて説明した、Fe-Pを主体とする下部層21とSi-richな上部層22である。 From this result, an oxide-based insulating layer containing Fe, P, Si and O is present on the surface of the iron powder in the unoxidized region, and this insulating layer consists of two layers of different chemical compositions It has been found that it is composed of a layer and a Si-rich upper layer). The two layers are the lower layer 21 mainly composed of Fe-P and the upper layer 22 of Si-rich described with reference to FIG.
 また、図5に示した白色の部位(未酸化領域の鉄粉界面10)からは、C及びOが検出された。金属元素は、低濃度のSiが検出されたが、Feは未検出であった。この結果から、未酸化領域の鉄粉界面10は、C及びOを含む物質で充填されており、この物質は、おそらくは潤滑剤のステアリン酸亜鉛系の物質が、熱処理時に変質して形成されたものと推測される。この白色の部位は、図3を用いて説明したC、O、及びSiを主体とする有機層23である。 Moreover, C and O were detected from the white site | part (iron powder interface 10 of an unoxidized area | region) shown in FIG. As for the metal element, low concentration of Si was detected, but Fe was not detected. From this result, the iron powder interface 10 in the unoxidized region is filled with a substance containing C and O, and this substance is probably formed during the heat treatment of the zinc stearate-based substance that is a lubricant. It is guessed that. The white portion is the organic layer 23 mainly composed of C, O, and Si described with reference to FIG.
 図5で見られる未酸化領域の鉄粉表面の2層の絶縁層は、図4の酸化影響層の鉄粉界面10には存在しない。TEM観察による図4、5の各領域の組織の比較から、大気中で歪低減熱処理を施した実施例材1のリング状試験片の表面領域では、鉄粉の酸化と絶縁被覆層の破壊により酸化影響層が形成されることがわかった。酸化影響層の鉄粉界面では、Fe、FeSiO及びSiO等の酸化物が形成されていた。一方で、リング状試験片の内部領域には酸化が及ばず、鉄粉の表面には化学組成の異なる2層構造の絶縁層が存在することがわかった。 The two insulating layers on the surface of the iron powder in the unoxidized region shown in FIG. 5 do not exist at the iron powder interface 10 of the oxidation affected layer of FIG. From the comparison of the structure of each region in FIGS. 4 and 5 by TEM observation, in the surface region of the ring-shaped test piece of the example material 1 subjected to the strain reduction heat treatment in the atmosphere, the iron powder is oxidized and the insulating coating layer is broken. It was found that an oxidation affected layer was formed. At the iron powder interface of the oxidation affected layer, oxides such as Fe 3 O 4 , Fe 2 SiO 4 and SiO 2 were formed. On the other hand, it was found that oxidation did not reach the inner region of the ring-shaped test piece, and an insulating layer having a two-layer structure different in chemical composition was present on the surface of the iron powder.
 実施例2と同様の手法により、磁気特性評価後の比較材1のリング状試験片に対し、断面部のTEM観察を行った。観察位置は、実施例2と同じく、圧粉軟磁性体の表面領域と内部領域の2箇所とした。比較材1の表面領域の観察の結果、鉄粉界面の大部分は、Feを主体とする酸化物で充填されていることがわかった。鉄粉界面には、この他に、Fe、Pを含む直径数十~数百nmの塊状の酸化物が存在していた。この塊状の酸化物は、鉄粉表面に被覆されたFe-P系複合酸化物が、酸化により脱落、凝集することで成形されたと推測される。比較例1の表面領域の鉄粉界面では、実施例材1で見られた、Siを含む網目状の酸化層は存在しなかった。 In the same manner as in Example 2, TEM observation of the cross-sectional portion was performed on the ring-shaped test piece of the comparative material 1 after the magnetic property evaluation. As in the second embodiment, the observation position was set to two parts, the surface area and the inner area of the powder soft magnetic material. As a result of observation of the surface area of the comparative material 1, it was found that most of the iron powder interface was filled with an oxide mainly composed of Fe. At the iron powder interface, in addition to this, massive oxides of several tens to several hundreds nm in diameter containing Fe and P were present. It is inferred that this massive oxide is formed as the Fe—P based complex oxide coated on the surface of iron powder is detached and aggregated by oxidation. At the iron powder interface in the surface region of Comparative Example 1, the network-like oxidized layer containing Si, which was seen in Example material 1, did not exist.
 比較材2の内部領域の観察の結果、内部領域の鉄粉界面の組織は、表面領域とほぼ同様の組織であり、鉄粉界面はFeを主体とする酸化物で充填され、Fe、Pを含む直径数十~数百nmの塊状の酸化物が存在することがわかった。実施例2では、実施例材1の内部領域は未酸化の状態であり、鉄粉の表面には2層構造の絶縁層が存在していた。一方、比較材2の内部領域では、表面領域と同じく鉄粉の酸化が生じ、鉄粉の表面の絶縁層は脱落、凝集していることがわかった。 As a result of observation of the inner region of the comparative material 2, the structure of the iron powder interface in the inner region is almost the same structure as that of the surface region, and the iron powder interface is filled with Fe-based oxide, and Fe, P It has been found that massive oxides of several tens to several hundreds of nm in diameter are present. In Example 2, the inner region of Example material 1 was in the unoxidized state, and the insulating layer having a two-layer structure was present on the surface of the iron powder. On the other hand, in the inner region of the comparative material 2, it was found that the iron powder was oxidized similarly to the surface region, and the insulating layer on the surface of the iron powder was detached and aggregated.
 実施例2、3のTEM観察結果より、実施例材1においては、酸化影響層の鉄粉界面に網目状に分布するSiO層が酸化抑制層として機能することで、圧粉軟磁性体の内部への酸化の進行を抑制するとともに、鉄粉の表面の絶縁層を安定に保持することで、鉄損が低下することがわかった。一方、比較材1では、鉄粉界面に網目状のSiO層が存在せず、実施例材1のような酸化防止効果が作用しなかったと考えられる。結果として、比較材1では、圧粉軟磁性体の内部領域まで酸化の影響が及んでおり、鉄粉の表面の絶縁層が脱落、凝集することで鉄損が増加したと推測される。 From the TEM observation results of Examples 2 and 3, in Example material 1, the SiO 2 layer distributed in the form of a mesh at the iron powder interface of the oxidation affected layer functions as an oxidation suppression layer, It was found that the iron loss is reduced by suppressing the progress of the oxidation to the inside and stably holding the insulating layer on the surface of the iron powder. On the other hand, it is considered that in Comparative Material 1, the network-like SiO 2 layer was not present at the iron powder interface, and the oxidation preventing effect as in Example Material 1 did not work. As a result, in the comparative material 1, the internal area of the powder soft magnetic material is affected by the oxidation, and it is presumed that the core loss is increased by the falling off and aggregation of the insulating layer on the surface of the iron powder.
 実施例1と同じ条件で水アトマイズ処理と水素還元熱処理を実施した鉄粉に対して、目開きの異なるメッシュを用いて篩分けを行い、粒度の異なる複数の鉄粉試料を作製した。
篩分け後の各鉄粉試料に対し、実施例材1と同様にFe-P系複合酸化物層とSi樹脂の絶縁被覆処理を行い、ステアリン酸亜鉛系の潤滑剤を0.4%添加・混合して、粒度の異なる複数の複合粉末を作製した。その後、実施例1と同じ条件でプレス成形、大気中熱処理、巻線、磁気特性評価を実施して、それぞれの圧粉軟磁性体の特性を比較した。
The iron powder subjected to the water atomizing treatment and the hydrogen reduction heat treatment under the same conditions as in Example 1 was sieved using meshes having different openings to prepare a plurality of iron powder samples having different particle sizes.
For each iron powder sample after sieving, the insulation coating of Fe-P based complex oxide layer and Si resin is carried out in the same manner as in Example 1 and 0.4% of zinc stearate based lubricant is added. By mixing, a plurality of composite powders with different particle sizes were produced. Thereafter, press molding, heat treatment in air, winding, and magnetic property evaluation were performed under the same conditions as in Example 1 to compare the properties of the respective powder soft magnetic materials.
 表1は、粒度の異なる5種の鉄粉(実施例材1、2、3、及び比較材2、3)を成形、熱処理して得られた圧粉軟磁性体について、平均粒径、粒径が100μm未満の鉄粉の比率、鉄損の評価結果(鉄損値)、及び酸化影響層の厚さを示している。 Table 1 shows the average particle diameter and particle size of the powder soft magnetic material obtained by forming and heat treating five types of iron powder (example materials 1, 2, 3 and comparative materials 2 and 3) having different particle sizes. The ratio of iron powder having a diameter of less than 100 μm, the evaluation result of iron loss (iron loss value), and the thickness of the oxidation affected layer are shown.
 表1において、実施例材1、2、3、比較材2、3の順に、鉄粉の平均粒径は小さくなる。一方で、粒径が100μm未満の微細な鉄粉を含む比率(重量%)を比較すると、平均粒径の減少につれて、粒径が100μm未満の鉄粉の比率が増す傾向にある。実施例材1、2、3においては、粒径が100μm未満の鉄粉は20%以下である。一方、比較材2では、粒径が100μm未満の鉄粉は約半分、比較材3では、粒径が100μm未満の鉄粉は8割以上の比率を占めることがわかる。 In Table 1, the average particle diameter of the iron powder decreases in the order of the example materials 1, 2, 3 and the comparative materials 2, 3. On the other hand, when the proportion (weight%) containing fine iron powder having a particle size of less than 100 μm is compared, the proportion of iron powder having a particle size of less than 100 μm tends to increase as the average particle size decreases. In the example materials 1, 2 and 3, the iron powder having a particle size of less than 100 μm is 20% or less. On the other hand, it can be seen that iron powder having a particle size of less than 100 μm is about half in Comparative Material 2 and iron powder having a particle size of less than 100 μm occupies 80% or more in Comparative Material 3.
 表1では、鉄損値として、大気中で550℃にて熱処理した結果と、これと同一温度、同一時間にて真空中で熱処理した結果を併記した。大気中での熱処理後の鉄損値は、実施例材3は41W/kgと実施例材1の37W/kgに近い値である。これに対し、比較材2は59W/kg、比較材3は83W/kgであり、これらの鉄損値は、実施例材3との比較で約20~40W/kgも増加する結果となった。 In Table 1, as the core loss value, the result of heat treatment at 550 ° C. in the air and the result of heat treatment in vacuum at the same temperature and for the same time are also described. The core loss value after heat treatment in the atmosphere is 41 W / kg for Example Material 3 and 37 W / kg of Example Material 1 or so. On the other hand, Comparative Material 2 had 59 W / kg, Comparative Material 3 had 83 W / kg, and these iron loss values increased by about 20 to 40 W / kg as compared with Example Material 3. .
 一方、真空中での熱処理後の鉄損値は、実施例材1、2、3の値は、大気中での熱処理とほぼ同等(真空熱処理により1~2W/kgの低下)である。これに対し、比較材2、3では、真空中での熱処理後の鉄損は、大気中での熱処理よりも大きく低下すること(12~15W/kgの低下)がわかった。圧粉軟磁性体の鉄損値は、絶縁が保たれる場合は、鉄粉粒径が微細になるほど保磁力の増加を反映して増加する傾向がある。表1の真空中での熱処理後の鉄損値は、鉄粉粒度の傾向を反映すると推測される。また、表1より、大気中での熱処理の場合は、鉄粉の微細化に伴う鉄損の増加が、より促進される傾向があることがわかる。 On the other hand, the core loss value after heat treatment in vacuum is almost the same as that of heat treatment in the atmosphere (the reduction of 1 to 2 W / kg by vacuum heat treatment). On the other hand, in the comparative materials 2 and 3, it was found that the core loss after the heat treatment in vacuum was significantly reduced (a reduction of 12 to 15 W / kg) than the heat treatment in air. When the insulation is maintained, the iron loss value of the powder soft magnetic material tends to increase reflecting the increase in the coercive force as the iron powder particle size becomes finer. The iron loss value after heat treatment in vacuum in Table 1 is presumed to reflect the tendency of iron powder particle size. Further, it can be seen from Table 1 that, in the case of heat treatment in the atmosphere, the increase in iron loss accompanying the miniaturization of iron powder tends to be further promoted.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 表1に示した5種の熱処理後の圧粉軟磁性体を切断し、断面部に対して樹脂埋込みと研磨を実施して、SEM観察とEDS分析により酸化影響層の厚さを測定した。実施例材1、2、3では、酸化影響層の厚さは1mm未満と薄かった。一方、比較材2では、酸化影響層の厚さは1.6mmと増加した。比較材3では、断面のほぼ全体に酸化の影響が及んでいることがわかった。以上の結果から、圧粉軟磁性体を構成する鉄粉が微細化するにつれて、大気中での熱処理時の酸化の影響が、圧粉軟磁性体のより内部まで進行して、鉄損の増加を促進することが示された。 The powder soft magnetic material after five types of heat treatments shown in Table 1 was cut, resin embedding and polishing were performed on the cross section, and the thickness of the oxidation affected layer was measured by SEM observation and EDS analysis. In the example materials 1, 2 and 3, the thickness of the oxidation affected layer was as thin as less than 1 mm. On the other hand, in Comparative Material 2, the thickness of the oxidation affected layer increased to 1.6 mm. In Comparative Material 3, it was found that the influence of oxidation was applied to almost the entire cross section. From the above results, as the iron powder constituting the powder soft magnetic material becomes finer, the effect of oxidation at the time of heat treatment in the atmosphere proceeds to the inside of the powder soft magnetic material, and the iron loss increases Was shown to promote.
 実施例材1と同じ鉄粉を5組用意し、それぞれ圧力を1400MPa、1300MPa、1000MPa、700MPa、及び600MPaに変えて成形した後、550℃の大気中で熱処理して、5種類の圧粉軟磁性体を作製した(実施例材4~6、比較材4、5)。そして、実施例材4~6と比較材4、5の鉄損を評価した。 After preparing five sets of the same iron powder as Example material 1, changing the pressure to 1400MPa, 1300MPa, 1000MPa, 700MPa and 600MPa respectively, heat treatment in the atmosphere at 550 ° C, five types of powder soft Magnetic materials were produced (Example materials 4 to 6, comparative materials 4 and 5). Then, the iron loss of the example materials 4 to 6 and the comparative materials 4 and 5 was evaluated.
 表2は、成形圧の異なる6種の圧粉軟磁性体(実施例材1、4~6、及び比較材4、5)について、成形圧、密度、鉄損の評価結果(鉄損値)、及び酸化影響層の厚さを示している。 Table 2 shows the evaluation results of molding pressure, density and iron loss (iron loss value) for six types of powder soft magnetic materials (example materials 1, 4 to 6 and comparative materials 4 and 5) having different molding pressures. And the thickness of the oxidation affected layer.
 圧粉軟磁性体の密度は、成形圧の低下につれて、7.62g/cm(実施例材4)、7.59g/cm(実施例材5)、7.54g/cm(実施例材1)、7.47g/cm(実施例材6)、7.39g/cm(比較材4)、7.33g/cm(比較材5)と減少する。鉄損値は、成形圧の低下につれて、35W/kg(実施例材4、5)、37W/kg(実施例材1)、41W/kg(実施例材6)、46W/kg(比較材4)、51W/kg(比較材5)と増加することがわかった。 The density of the powder soft magnetic material is 7.62 g / cm 3 (example material 4), 7.59 g / cm 3 (example material 5), 7.54 g / cm 3 (example examples) as the molding pressure decreases. Material 1) decreases to 7.47 g / cm 3 (example material 6), 7.39 g / cm 3 (comparative material 4), and 7.33 g / cm 3 (comparative material 5). The core loss value is 35 W / kg (example materials 4 and 5), 37 W / kg (example material 1), 41 W / kg (example material 6), 46 W / kg (comparative material 4) as the molding pressure decreases. ), 51 W / kg (comparative material 5) was found to increase.
 実施例4と同じく、SEM観察とEDS分析により、圧粉軟磁性体の断面を観察して酸化影響層の厚さを求めた。この結果、圧粉軟磁性体の密度の低下につれて、酸化影響層の厚さが増加することがわかった。比較材4、5は、実施例材1、4~6に比べて低密度であるので、鉄粉界面の間隔が広く、その結果として熱処理時の鉄粉界面を通じた酸化が促進されて、鉄損が増加したと考えられる。 As in Example 4, the cross section of the powder soft magnetic material was observed by SEM observation and EDS analysis to determine the thickness of the oxidation affected layer. As a result, it was found that the thickness of the oxidation affected layer increased as the density of the powder soft magnetic material decreased. Since the comparative materials 4 and 5 have lower density than the example materials 1 and 4 to 6, the distance between the iron powder interfaces is wide, and as a result, the oxidation through the iron powder interface at the time of heat treatment is promoted. It is thought that the loss increased.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 実施例材1と同じ鉄粉を9組用意し、同じ成形圧(1200MPa)で成形した圧粉軟磁性体を、それぞれ異なる温度と時間で大気中で熱処理を実施して、鉄損を評価した。 Nine sets of iron powder identical to Example material 1 were prepared, and a powder soft magnetic material molded at the same molding pressure (1200 MPa) was subjected to heat treatment in air at different temperatures and times respectively to evaluate core loss. .
 表3は、熱処理温度と保持時間の異なる10種の圧粉軟磁性体(実施例材1、7~10、及び比較材6~10)について、熱処理温度、保持時間、鉄損の評価結果(鉄損値)、及び酸化影響層の厚さを示している。 Table 3 shows the evaluation results of the heat treatment temperature, the holding time, and the iron loss for 10 types of powder soft magnetic materials (example materials 1, 7 to 10, and comparative materials 6 to 10) having different heat treatment temperatures and holding times The core loss value) and the thickness of the oxidation affected layer are shown.
 実施例材8、9は、熱処理温度が500℃で、保持時間がそれぞれ30分と120分である。実施例材1、7は、熱処理温度が550℃で、保持時間がそれぞれ30分と60分である。実施例材10は、熱処理温度が600℃で、保持時間が30分である。比較材10は、熱処理温度が450℃で、保持時間が30分である。比較材7は、熱処理温度が500℃で、保持時間が180分である。比較材6は、熱処理温度が550℃で、保持時間が120分である。比較材8は、熱処理温度が600℃で、保持時間が60分である。比較材9は、熱処理温度が650℃で、保持時間が30分である。実施例材1、7~10の圧粉軟磁性体は、「6)熱処理プロセスの最良の形態」で前述した熱処理温度と保持時間の範囲で熱処理をした。比較材6~10の圧粉軟磁性体は、この熱処理温度と保持時間の範囲外で熱処理をした。 In the example materials 8 and 9, the heat treatment temperature is 500 ° C., and the holding time is 30 minutes and 120 minutes, respectively. The heat treatment temperature of the example materials 1 and 7 is 550 degreeC, and holding time is respectively 30 minutes and 60 minutes. The example material 10 has a heat treatment temperature of 600 ° C. and a holding time of 30 minutes. The comparative material 10 has a heat treatment temperature of 450 ° C. and a holding time of 30 minutes. The comparative material 7 has a heat treatment temperature of 500 ° C. and a holding time of 180 minutes. The comparative material 6 has a heat treatment temperature of 550 ° C. and a holding time of 120 minutes. The comparative material 8 has a heat treatment temperature of 600 ° C. and a holding time of 60 minutes. The comparative material 9 has a heat treatment temperature of 650 ° C. and a holding time of 30 minutes. The powder soft magnetic materials of Examples 1 and 7 to 10 were heat-treated at the heat treatment temperature and the holding time described above in “6) Best mode of heat treatment process”. The dusted soft magnetic bodies of Comparative Materials 6 to 10 were heat-treated outside the range of the heat-treatment temperature and the holding time.
 実施例材1、7~10の圧粉軟磁性体では、鉄損値は、35~40W/kgと比較的小さい。一方、保持時間が長い比較材6~8の圧粉軟磁性体では、鉄損値が40W/kgを超える大きな値となった。650℃の熱処理温度で30分保持した比較材9も、鉄損が52W/kgと大きな値となった。実施例材1、7~10の圧粉軟磁性体は、酸化影響層の厚さが0.6mm以下である。比較材6~9の圧粉軟磁性体は、酸化影響層の厚さがいずれも1mm以上であり、実施例材1、7~10に比べて酸化の影響が圧粉軟磁性体の内部まで促進されて、鉄損が増加したと推測される。 In the powder soft magnetic material of each of the example materials 1 and 7 to 10, the core loss value is relatively small at 35 to 40 W / kg. On the other hand, in the case of the soft magnetic powder bodies of comparative materials 6 to 8 having a long holding time, the core loss value was a large value exceeding 40 W / kg. The core loss of the comparative material 9 held for 30 minutes at a heat treatment temperature of 650 ° C. also had a large value of 52 W / kg. In the pressed soft magnetic material of each of the example materials 1 and 7 to 10, the thickness of the oxidation affected layer is 0.6 mm or less. In the powder soft magnetic material of Comparative materials 6 to 9, the thickness of the oxidation affected layer is 1 mm or more, and the influence of oxidation is greater than that of Example materials 1 and 7 to 10 to the inside of the powder soft magnetic material. It is estimated that the iron loss has been increased by promoting it.
 比較材10の圧粉軟磁性体は、450℃という実施例材1、7~10の温度範囲より低温で、保持時間30分の熱処理を実施した。比較材10の圧粉軟磁性体は、酸化影響層の厚さが0.1mmと非常に薄いが、鉄損は48W/kgと比較的大きな値となった。比較材10の圧粉軟磁性体は、酸化の影響は小さいものの、熱処理温度が低くて鉄粉中の歪の低減が十分でないため、鉄損が十分に低減できなかったと推測される。 The powder soft magnetic material of the comparative material 10 was subjected to a heat treatment for 30 minutes at a temperature lower than the temperature range of the example materials 1 and 7 to 10 at 450 ° C. The powder soft magnetic material of the comparative material 10 had a very small thickness of 0.1 mm for the oxidation affected layer, but the core loss was a relatively large value of 48 W / kg. Although the effect of oxidation is small, the powder soft magnetic material of the comparative material 10 is presumed to have failed to sufficiently reduce iron loss since the heat treatment temperature is low and the reduction in strain in the iron powder is not sufficient.
 以上の結果から、本発明による圧粉軟磁性体の特性を有効に引出すためには、大気熱処理の温度と保持時間の条件を適切な範囲に設定することが重要であるという知見が得られた。 From the above results, it was found that it is important to set the conditions of the temperature and holding time of the atmospheric heat treatment in an appropriate range in order to effectively extract the characteristics of the powder soft magnetic material according to the present invention .
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 本発明による圧粉軟磁性体は、電磁部品一般に利用することができ、例えば、モータのロータコア及びステータコア、電磁弁、及びリアクトルなどに利用することができる。 INDUSTRIAL APPLICABILITY The powder soft magnetic material according to the present invention can be used for electromagnetic components in general, and for example, can be used for a rotor core and a stator core of a motor, an electromagnetic valve, a reactor, and the like.
 1…圧粉軟磁性体、2…鉄粉、3…酸化影響層、4…未酸化領域、10…鉄粉界面、11…Feを主体とする酸化物、12…Fe-Si複合酸化物、13…塊状のFe-P-Si複合酸化物、14…Siを主体とする層状の酸化物、21…Fe-Pを主体とする下部層、22…Si-richな上部層、23…C、O、及びSiを主体とする有機層、31…白色の網目状組織、32…灰色の組織。 DESCRIPTION OF SYMBOLS 1 ... Powdered-powder soft-magnetic body, 2 ... Iron powder, 3 ... Oxidation affected layer, 4 ... Unoxidized area | region, 10 ... Iron powder interface, 11 ... Oxide mainly containing Fe, 12 ... Fe-Si complex oxide, 13: massive Fe-P-Si complex oxide, 14: layered oxide mainly composed of Si, 21: lower layer mainly composed of Fe-P, 22: upper layer of Si-rich, 23: C, Organic layer mainly composed of O and Si, 31: white network, 32: gray structure.

Claims (10)

  1.  鉄粉を主成分とする金属粉末の表面に絶縁被覆処理を施し、この金属粉末を圧粉成形することで作製される圧粉軟磁性体であって、
     前記圧粉成形の後の酸化雰囲気中での熱処理によって、前記鉄粉間の境界に、鉄の酸化物と層状のSiの酸化物とを含む層である酸化影響層が形成されている、
    ことを特徴とする圧粉軟磁性体。
    A powder soft magnetic material produced by subjecting the surface of a metal powder containing iron powder as a main component to an insulation coating treatment and compacting the metal powder,
    By heat treatment in an oxidizing atmosphere after the compacting, an oxidation affected layer which is a layer containing an iron oxide and a layered Si oxide is formed at the boundary between the iron powders.
    Powdered soft magnetic material characterized by
  2.  請求項1記載の圧粉軟磁性体であって、
     前記鉄粉は、表面がリン酸を含む無機絶縁層で被覆され、更に前記無機絶縁層がSiを含む有機層で被覆されることで前記絶縁被覆処理が施され、
     潤滑剤を混合して前記金属粉末を前記圧粉成形することで作製される圧粉軟磁性体。
    The powder soft magnetic material according to claim 1, wherein
    The surface of the iron powder is coated with an inorganic insulating layer containing phosphoric acid, and the inorganic insulating layer is further coated with an organic layer containing Si, whereby the insulating coating process is performed.
    A dusted soft magnetic material produced by mixing a lubricant and compacting the metal powder.
  3.  請求項1または2記載の圧粉軟磁性体であって、
     前記酸化影響層は、前記鉄の酸化物としてFeSiO及びFeを含み、前記層状のSiの酸化物として厚さ5~100nmのSiOの非晶質構造の層を含む圧粉軟磁性体。
    It is a dust-powder soft-magnetic body of Claim 1 or 2, Comprising:
    The oxidation-influenced layer contains Fe 2 SiO 4 and Fe 3 O 4 as oxides of iron and a layer of amorphous structure of SiO 2 with a thickness of 5 to 100 nm as oxides of layered Si. Powdered soft magnetic material.
  4.  請求項1から3のいずれか1項記載の圧粉軟磁性体であって、
     表面を含む表面領域と前記表面領域よりも内部にある内部領域とから構成され、
     前記表面領域には前記酸化影響層が形成されており、前記内部領域には前記酸化影響層が形成されておらず、
     前記圧粉軟磁性体の表面の任意の箇所であり、且つ前記表面に垂直な直線が前記内部領域とこの内部領域を挟む2つの前記表面領域とを通る箇所において、前記直線方向の前記酸化影響層の厚さの合計は、前記直線方向の前記圧粉軟磁性体の厚さの1/16以上1/2以下である圧粉軟磁性体。
    It is a powder-powder soft-magnetic body of any one of Claim 1 to 3, Comprising:
    It comprises a surface area including a surface and an inner area inside the surface area,
    The oxidation affected layer is formed in the surface region, and the oxidation affected layer is not formed in the inner region,
    The oxidation effect in the linear direction at an arbitrary point on the surface of the powder soft magnetic material and at a point where a straight line perpendicular to the surface passes through the inner area and the two surface areas sandwiching the inner area The powder soft magnetic material, wherein the total thickness of the layers is 1/16 or more and 1/2 or less of the thickness of the powder soft magnetic material in the linear direction.
  5.  請求項1から4のいずれか1項記載の圧粉軟磁性体であって、
     前記酸化影響層は、大気雰囲気、水蒸気雰囲気、または不活性ガスに体積比で20%以下の酸素を加えた酸化雰囲気において、温度が500℃以上550℃未満の場合は保持時間が5分以上120分以下、温度が550℃以上600℃未満の場合は保持時間が5分以上60分以下、及び温度が600℃以上650℃未満の場合は保持時間が5分以上30分以下という条件の前記熱処理によって形成される圧粉軟磁性体。
    It is a powder-powder soft-magnetic body of any one of Claim 1 to 4, Comprising:
    When the temperature is 500 ° C. or more and less than 550 ° C., the oxidation influence layer has a holding time of 5 minutes or more 120 in an air atmosphere, a water vapor atmosphere, or an oxidation atmosphere in which 20% or less by volume of oxygen is added to an inert gas. The heat treatment under the condition that the holding time is 5 minutes or more and 60 minutes or less when the temperature is 550 ° C. or more and less than 600 ° C., and the holding time is 5 minutes or more and 30 minutes or less when the temperature is 600 ° C. or more and less than 650 ° C. Powdered soft magnetic material formed by
  6.  請求項4項記載の圧粉軟磁性体であって、
     前記内部領域では、前記鉄粉は表面にFeとPを含む絶縁被覆層を有し、前記鉄粉間の境界にはCとOを含む有機層が形成されている圧粉軟磁性体。
    It is a powder-powder soft-magnetic body of Claim 4, Comprising:
    In the inner region, the iron powder has an insulating covering layer containing Fe and P on the surface, and an organic layer containing C and O is formed at the boundary between the iron powders.
  7.  請求項1から6のいずれか1項記載の圧粉軟磁性体であって、
     密度が7.45g/cm以上7.75g/cm以下である圧粉軟磁性体。
    A powder soft magnetic material according to any one of claims 1 to 6, wherein
    Density 7.45 g / cm 3 or more 7.75 g / cm 3 or less is powder soft magnetic material.
  8.  請求項1から7のいずれか1項記載の圧粉軟磁性体であって、
     前記圧粉軟磁性体に占める前記鉄粉の割合は、体積比で94.0%以上98.5%以下である圧粉軟磁性体。
    It is a powder-powder soft-magnetic body of any one of Claim 1 to 7, Comprising:
    The powder soft magnetic material, wherein a ratio of the iron powder in the powder soft magnetic material is 94.0% to 98.5% by volume ratio.
  9.  請求項1から8のいずれか1項記載の圧粉軟磁性体であって、
     前記圧粉軟磁性体に占める、粒径が100μm以上400μm以下の前記鉄粉の割合は、重量比で70%以上であり、粒径が100μm未満の前記鉄粉の割合は、重量比で30%未満である圧粉軟磁性体。
    It is a powder-powder soft-magnetic body of any one of Claim 1 to 8, Comprising:
    The ratio of the iron powder having a particle size of 100 μm to 400 μm in the powder magnetic powder is 70% or more by weight, and the iron powder having a particle size of less than 100 μm is 30 by weight Powdered soft magnetic material which is less than 10%.
  10.  請求項1から9のいずれか1項記載の圧粉軟磁性体を、ロータコア及びステータコアの少なくとも一方に用いることを特徴とするモータ。 A motor using the powder soft magnetic material according to any one of claims 1 to 9 as at least one of a rotor core and a stator core.
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