WO2013099702A1 - Dispositif de traitement thermique sur place - Google Patents

Dispositif de traitement thermique sur place Download PDF

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Publication number
WO2013099702A1
WO2013099702A1 PCT/JP2012/082810 JP2012082810W WO2013099702A1 WO 2013099702 A1 WO2013099702 A1 WO 2013099702A1 JP 2012082810 W JP2012082810 W JP 2012082810W WO 2013099702 A1 WO2013099702 A1 WO 2013099702A1
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WO
WIPO (PCT)
Prior art keywords
magnetic field
heat treatment
superconducting coil
treatment apparatus
cylindrical
Prior art date
Application number
PCT/JP2012/082810
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English (en)
Japanese (ja)
Inventor
量一 広瀬
Original Assignee
ジャパンスーパーコンダクタテクノロジー株式会社
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Publication date
Application filed by ジャパンスーパーコンダクタテクノロジー株式会社 filed Critical ジャパンスーパーコンダクタテクノロジー株式会社
Publication of WO2013099702A1 publication Critical patent/WO2013099702A1/fr

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00Furnaces of a kind not covered by any preceding group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • H01F6/04Cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67109Apparatus for thermal treatment mainly by convection

Definitions

  • the present invention relates to a heat treatment apparatus in a magnetic field that performs heat treatment while applying a magnetic field to a member to be treated.
  • a heat treatment apparatus in a magnetic field that performs heat treatment while applying a parallel magnetic field to a member to be processed is used.
  • a superconducting magnet is disposed around a cylindrical furnace vessel that accommodates a member to be treated, thereby forming a parallel magnetic field in the furnace vessel and heating the member to be treated in the furnace vessel.
  • What provided heating means such as a heater, is used (for example, refer to patent documents 1).
  • a heat treatment apparatus in a magnetic field that forms a magnetic field with a superconducting magnet has an advantage that it can form a magnetic field with low power consumption and a strong magnetic field strength as compared with an apparatus using an ordinary electromagnet.
  • the above-mentioned heat treatment apparatus in a magnetic field used for manufacturing the semiconductor element is often installed in a clean room.
  • superconducting magnets There are two types of superconducting magnets: a refrigerant type that cools the superconducting coil by immersing it in a liquid refrigerant such as liquid helium, and a non-refrigerant type that cools the superconducting coil at the cooling end of the refrigerator.
  • the non-refrigerant type is suitable for a heat treatment apparatus in a magnetic field installed in a clean room because there is no risk of releasing a refrigerant gas such as helium gas.
  • the heat treatment apparatus in a magnetic field described in Patent Document 1 is a refrigerant-free type that forms a parallel magnetic field in a furnace container in a cylindrical vacuum heat insulating container provided with a through hole in which a cylindrical furnace container is arranged vertically.
  • the superconducting magnet is disposed, the refrigerator is disposed vertically upward on the lower surface side of the cylindrical vertical vacuum heat insulating container, and the cooling end is connected to the superconducting coil in the vacuum heat insulating container.
  • a magnetic field heat treatment apparatus using a refrigerant-free superconducting magnet described in Patent Document 1 has a refrigerator placed vertically upward on the lower surface side of a cylindrical vertical vacuum insulation container, and the superconductivity in the vacuum insulation container Since it is connected to the coil, there is a problem that the entire height dimension including the mechanism for loading the member to be processed into the furnace vessel becomes large, and the height dimension restriction when installing in the clean room becomes severe.
  • an object of the present invention is to make it possible to design the height dimension of a heat treatment apparatus in a magnetic field using a refrigerant-free superconducting magnet in a compact manner.
  • the present invention provides a cylindrical vertical vacuum insulation container provided with a through-hole into which a cylindrical furnace container containing a member to be processed is inserted in the vertical direction.
  • a superconducting coil for forming a parallel magnetic field is arranged in the arranged furnace vessel, a heating means for heating a member to be treated in the furnace vessel is provided, and a heat treatment in a magnetic field for cooling the superconducting coil at a cooling end of a refrigerator
  • a protruding portion is formed at a side portion of the cylindrical vertically insulated vacuum insulating container, and a heat conductive member of a good thermal conductor connected to the superconducting coil is extended into the protruding portion, and the protruding portion of the vacuum insulating container
  • part and extended the cooling end in the said protrusion part was employ
  • a protruding portion is formed on the side of the cylindrical vertical vacuum heat insulating container, and a heat conductive member of a good thermal conductor connected to the superconducting coil is extended into the protruding portion, and the protruding portion of the vacuum insulating container is frozen.
  • the superconducting coil is a combination of a plurality of cylindrical coils arranged coaxially in the vertical direction, and forms a vertical parallel magnetic field in the furnace vessel. At least a pair of coils of the plurality of coils Is arranged symmetrically with respect to a plane perpendicular to the magnetic field axis including the magnetic field center inside the superconducting coil, a parallel magnetic field can be more favorably formed in the furnace vessel.
  • the superconducting coil is a combination of a plurality of cylindrical coils arranged coaxially in the vertical direction, and forms a vertical parallel magnetic field in the furnace vessel. At least one of the plurality of coils is The outer coil that generates the magnetic field in the opposite direction is disposed by the outer coil side of the other coil that generates the forward magnetic field so as to generate the magnetic field in the opposite direction to the magnetic field inside the superconducting coil. The leakage magnetic field on the outer peripheral side of the superconducting coil can be reduced.
  • the refrigerator is preferably a two-stage pulse tube refrigerator. Since the pulse tube refrigerator fixes the regenerator material without reciprocating, maintenance can be facilitated.
  • the heat treatment apparatus in a magnetic field forms a protrusion on the side of a cylindrical vertical vacuum heat insulating container, and extends a heat conductive member of a good thermal conductor connected to the superconducting coil in the protrusion to Since the refrigerator is arranged vertically at the projecting part of the container and its cooling end is connected to the heat conducting member extended into the projecting part, it is in a magnetic field using a refrigerant-free superconducting magnet.
  • the height dimension of the heat treatment apparatus can be designed compactly.
  • a vertically-oriented solenoid type superconducting coil 2 is arranged in a radiation shield 1 having a vertically-oriented cylindrical shape and a central hole 1a, and the radiation shield 1 penetrates vertically.
  • a cylindrical vacuum heat insulating container 3 having a hole 3a is accommodated in the center hole 1a through the through hole 3a.
  • a cylindrical vacuum furnace vessel 21 containing a workpiece M to be heat-treated is arranged vertically in the through hole 3a of the vacuum heat insulating vessel 3 and is uniformly distributed in the cylinder axis direction in the furnace vessel 21 by the superconducting coil 2.
  • a parallel magnetic field is formed.
  • the furnace vessel 21 is provided with a heater 22 that heats the workpiece M from the surroundings.
  • the outer peripheral side is water-cooled.
  • Protrusions 1b and 3b are formed on the side portions of the radiation shield 1 and the vacuum heat insulating container 3, respectively, and a two-stage pulse tube refrigerator 4 is placed vertically downward on the upper surface of the protrusion 3b of the vacuum heat insulating container 3. It is attached.
  • a heat conducting member 5 formed of copper as a good thermal conductor is connected to the lower end surface of the superconducting coil 2 and extends into the protruding portion 1b of the radiation shield 1 in the protruding portion 3b of the vacuum heat insulating container 3.
  • the first stage cooling end 4a of the refrigerator 4 is connected to the protruding portion 1b of the radiation shield 1, and the second stage cooling end 4b is connected to the heat conducting member 5 extending into the protruding portion 1b.
  • the refrigerator 4 does not protrude greatly in the height direction, and the height of the entire apparatus is designed to be compact.
  • the first stage cooling end 4 a of the refrigerator 4 cools the radiation shield 1 to about 40 K, and the second stage cooling end 4 b cools the superconducting coil 2 to about 4 K via the heat conducting member 5.
  • FIG. 2 shows the superconducting coil 2.
  • the superconducting coil 2 has a main coil 2a extending over its entire length, a pair of collection coils 2b arranged symmetrically with respect to a plane perpendicular to the magnetic field axis S including the magnetic field center O inside the superconducting coil 2. Consists of.
  • the main coil 2 a generates a convex magnetic field G 1 at the magnetic field center O inside the superconducting coil 2, and the pair of collection coils 2 b generates a concave magnetic field G 2 at the magnetic field center O.
  • the reactor vessel 21 is arranged these fields G1, G2 uniform parallel magnetic field G T that is synthesized is formed.
  • the main coil 2a can be omitted, and a pair of coils arranged symmetrically with respect to the magnetic field center O can be used as the main coil.
  • the parallelism of the magnetic field is lower than that of the embodiment, but the parallelism of the magnetic field can be improved as compared with the case where only the main coil 2a is arranged.
  • FIG. 3 shows a modification of the superconducting coil 2.
  • two shield coils 2c for generating a magnetic field G3 opposite to the magnetic field G1 generated by the main coil 2a are arranged on the outer peripheral side of the main coil 2a.
  • the magnetic field G1 of the main coil 2a on the outer peripheral side of the superconducting coil 2 is canceled by the reverse magnetic field G3 of the shield coil 2c, and the leakage magnetic field on the outer peripheral side of the superconducting coil 2 is reduced.
  • the inner periphery of the superconducting coil 2, the amount cancellation of the magnetic field G1 of the main coil 2a is small since the shield coil 2c is disposed farther outer peripheral side, a sufficiently large magnetic field G T is formed.
  • the number of shield coils 2c arranged is not limited to two.
  • the refrigerator is a pulse tube refrigerator, and is attached vertically downward to the protrusion of the vacuum heat insulating container, but the refrigerator can be of other types such as a Gifford McMahon refrigerator, It can also be mounted upwards or horizontally.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)

Abstract

Cette invention a pour but de permettre une conception telle que les dimensions en hauteur d'un dispositif de traitement thermique sur place utilisant un aimant supraconducteur de type non à refroidissement sont rendues plus compactes. Les dimensions en hauteur du dispositif de traitement thermique sur place utilisant un aimant supraconducteur de type non à réfrigérant sont capables d'être conçues de façon plus compacte en : formant une section en saillie (3b) sur une section latérale d'un contenant d'isolation thermique sous vide tourné de façon perpendiculaire, cylindrique (3) ; amenant un élément conducteur de la chaleur (5) dans un conducteur transcalent connecté à une bobine supraconductrice (2) pour s'étendre à l'intérieur d'une section en saillie (1b) dans une protection contre le rayonnement (1) à l'intérieur de la section en saillie (3b) ; disposant, en tournant perpendiculairement vers le bas, une machine de réfrigération à deux étages (4) au site de la section en saillie (1b) dans la protection contre le rayonnement (1) ; et en connectant l'extrémité de réfrigération à deux étages (4b) de celle-ci à l'élément conducteur de la chaleur (5) qui a été étendu à l'intérieur de la section en saillie (1b).
PCT/JP2012/082810 2011-12-28 2012-12-18 Dispositif de traitement thermique sur place WO2013099702A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-287424 2011-12-28
JP2011287424A JP2013137131A (ja) 2011-12-28 2011-12-28 磁場中熱処理装置

Publications (1)

Publication Number Publication Date
WO2013099702A1 true WO2013099702A1 (fr) 2013-07-04

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WO (1) WO2013099702A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017011236A (ja) 2015-06-26 2017-01-12 株式会社神戸製鋼所 多層磁気シールド
KR101969593B1 (ko) * 2018-12-10 2019-08-13 케이. 에이. 티. (주) 무냉매 전자석 장치
KR102682549B1 (ko) * 2022-07-12 2024-07-09 한국재료연구원 이방성 벌크 영구자석 제조용 자장열처리 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878737A (ja) * 1994-08-31 1996-03-22 Mitsubishi Electric Corp 超電導マグネット
JP2001102211A (ja) * 1999-09-28 2001-04-13 Sumitomo Heavy Ind Ltd 磁界中熱処理装置
JP2008177183A (ja) * 2007-01-16 2008-07-31 Mitsubishi Electric Corp 超電導電磁石装置およびそれを用いたmri装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4236404B2 (ja) * 2001-11-19 2009-03-11 財団法人鉄道総合技術研究所 超電導コイルの冷却装置
JP2006261335A (ja) * 2005-03-16 2006-09-28 Kobe Steel Ltd 超電導マグネット装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878737A (ja) * 1994-08-31 1996-03-22 Mitsubishi Electric Corp 超電導マグネット
JP2001102211A (ja) * 1999-09-28 2001-04-13 Sumitomo Heavy Ind Ltd 磁界中熱処理装置
JP2008177183A (ja) * 2007-01-16 2008-07-31 Mitsubishi Electric Corp 超電導電磁石装置およびそれを用いたmri装置

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