WO2013083671A1 - Procédé de revêtement d'un substrat - Google Patents

Procédé de revêtement d'un substrat Download PDF

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Publication number
WO2013083671A1
WO2013083671A1 PCT/EP2012/074594 EP2012074594W WO2013083671A1 WO 2013083671 A1 WO2013083671 A1 WO 2013083671A1 EP 2012074594 W EP2012074594 W EP 2012074594W WO 2013083671 A1 WO2013083671 A1 WO 2013083671A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
substrate
pretreatment
coating
same
Prior art date
Application number
PCT/EP2012/074594
Other languages
German (de)
English (en)
Inventor
Peter Ernst
Jürg WIPF
Thomas LÖHKEN
Original Assignee
Sulzer Metco Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sulzer Metco Ag filed Critical Sulzer Metco Ag
Priority to JP2014545249A priority Critical patent/JP2015503031A/ja
Priority to US14/362,552 priority patent/US20140335282A1/en
Priority to EP12797907.8A priority patent/EP2788520A1/fr
Priority to CN201280060284.2A priority patent/CN104136651A/zh
Priority to KR1020147018693A priority patent/KR20140133499A/ko
Publication of WO2013083671A1 publication Critical patent/WO2013083671A1/fr

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06Metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134Plasma spraying

Definitions

  • the invention relates to a method for coating a substrate according to the preamble of the independent claim.
  • Thermal coating processes such as plasma spraying are frequently used today for coating substrates.
  • High-speed flame spraying HVOF
  • arc spraying or
  • the substrate is, for example, metallic and the coating can be metallic, ceramic or even a mixture of the two.
  • the coating comprises several individual layers, which are arranged one above the other and usually have different functionalities.
  • TBC Thermal protection layers
  • Coating material is used here usually a ceramic substance, for example a hydroxyapatite.
  • a ceramic substance for example a hydroxyapatite.
  • the layer produced by means of thermal spraying adheres as well as possible and permanently to the substrate.
  • the surface to be coated is usually subjected to a pre-treatment before the thermal spraying, which also as
  • Activation is called. This activation can be carried out, for example, by sandblasting, corundum blasting, chilled cast iron, high-pressure water jets, various laser methods or other activation methods known per se.
  • the pretreatment is usually very time consuming and also requires special substances such as corundum, sand or example
  • Hip joint prostheses can have serious consequences. But even if no corundum particles remain on the surface, the surface roughness produced by the roughening process can lead to the formation of fatigue cracks, especially in the case of high-strength substances.
  • thermal spraying suggest, in which the pretreatment or activation of the surface to be coated is very easy, with contamination of the surface to be coated should be avoided as possible.
  • the object of the invention solving this problem is characterized by the independent claim.
  • Starting material is sprayed onto a surface of the substrate in the form of a process beam, wherein first the surface of the substrate is pretreated with a plasma flame of a plasma sprayer without material application and then the surface with the
  • the plasma sprayer is operated with substantially the same parameters as it does
  • the inventive method is particularly suitable for those applications in which the substrate is metallic.
  • the starting material is preferably a metallic or a
  • ceramic material or a mixture of such materials, because it allows the desired properties of the coating can be adapted very well to the particular application.
  • metal matrix composite materials such as MMC or cermet.
  • the thermal spraying is a plasma spraying.
  • the inventive method is particularly suitable for thermal spraying in the low pressure region, which means that the spraying is carried out at a process pressure which is smaller than that
  • the invention is also especially suitable for vacuum plasma spraying (VPS) or for low-pressure plasma spraying processes such as LPPS (low pressure plasma spraying) or LPPS-TF (LPPS thin film).
  • VPS vacuum plasma spraying
  • LPPS-TF low-pressure plasma spraying
  • LPPS-TF low-pressure plasma spraying
  • Spray device for generating the process beam
  • Plasmaspritzcroft moved temporally or spatially offset relative to the surface of the substrate, such that first the plasma flame pretreated a portion of the surface and then after a predetermined period of time the same area is acted upon by the process beam.
  • This measure makes it possible to carry out the process in a particularly simple and inexpensive manner, since the pretreatment and the thermal spraying take place successively one after the other without any intermediate steps or the change from one apparatus to another being necessary.
  • the thermal spray device and the plasma spray gun for example, on a common axis or a
  • the two devices are, for example, mounted one behind the other with a predeterminable distance on the arm, so that in a linear movement of the arm first the plasma spray gun and then the thermal sprayer to the same
  • a second plasma torch is arranged so that it back to back with is the first plasma torch, so offset with respect to the circumferential direction by 180 degrees.
  • the first plasma torch for pretreatment then passes first an area and then the second plasma torch for coating the same area.
  • Such rotatable plasma torches are used, for example, for the coating of curved surfaces, such as cylinder surfaces used by internal combustion engines.
  • Plasma spraying device pretreated the surface of the substrate without material application and then generated with the same plasma spray gun, the process beam for coating. In this embodiment, therefore, only a plasma spray gun is needed, which is why this embodiment is particularly simple and economical. With the plasma sprayer, the pretreatment is then first carried out, wherein the supply of the
  • Starting material is switched off. Subsequently, the supply of the starting material is turned on and coated the previously pretreated area.
  • the distance between an outlet nozzle of the plasma spraying device and the surface of the substrate for the pretreatment and the application of the process beam is the same size.
  • Pretreatment and the application of the same area with the process jet (2) is a maximum of five minutes. It is particularly favorable if the time span between the pretreatment and the application of the same area to the process jet (2) is at most one minute.
  • Fig. 1 is a schematic representation of an apparatus for
  • Fig. 2 is a schematic representation of an apparatus for
  • the inventive method for coating a substrate 10 by means of thermal spraying is characterized in particular by first pretreating the surface of the substrate with a plasma flame.
  • the invention is suitable for all thermal spraying processes such as e.g. all plasma spraying processes, high-speed flame spraying HVOF), arc spraying or electric arc wire spraying.
  • thermal spraying also encompasses spraying processes in which the process gas is "cold" compared to conventional plasma spraying, for example only a few hundred Kelvin, these processes in which the particles adhere to the substrate primarily due to their kinetic energy , are commonly referred to as cold gas spraying or kinetic gas spraying.
  • thermal spraying is a plasma spraying. This can be both a
  • Plasma spraying process under normal pressure or atmospheric pressure APS: Atmospheric Plasma Spraying
  • APS Atmospheric Plasma Spraying
  • Fig. 1 shows a very schematic representation of a
  • Plasma spray device the entire by the reference numeral 1
  • FIG. 1 schematically shows a substrate 10 on which a coating in the form of a layer 11 is deposited.
  • the inventive method preferably comprises a plasma spraying, which in the generic manner in WO-A-03/087422 or in the
  • This plasma spraying method is a thermal spraying for producing a so-called LPPS (Low Pressure Plasma Spraying) thin film.
  • LPPS Low Pressure Plasma Spraying
  • the plasma spraying device 1 shown in FIG. 1 comprises as a thermal spraying device a plasma spraying device 3 known per se with a plasma torch (not shown) for generating a plasma.
  • a plasma spraying device 3 known per se with a plasma torch (not shown) for generating a plasma.
  • This may be, for example, a type F4 plasma sprayer available from Sulzer Metco AG (Switzerland).
  • a process jet 2 is generated with the plasma spraying device 3 from a starting material P, a process gas mixture G and electrical energy E.
  • the supply of these components E, G and P is symbolized in Fig. 1 by the arrows 4, 5, 6.
  • the generated process beam 2 exits through an outlet nozzle 7 and transports the starting material P in the form of the process jet 2 in the material particles 21, 22 are dispersed in a plasma. This transport is symbolized by the arrow 24.
  • the starting material P may comprise several different material particles, but of course not.
  • the material particles 21, 22 are usually powder particles.
  • the starting material is in the form of a wire.
  • the plasma spraying device 1 further comprises a second plasma spraying device 3 ', which may be of the same type but need not be like that
  • Plasma spraying device 3 This second plasma spraying device 3 'is used to generate a plasma flame 2' from a process gas mixture G 'and electrical energy E' which exits through an outlet nozzle T and to which a region B of the surface of the substrate 10 to be coated can be acted upon.
  • the supply of the components E 'and G' is symbolized in Fig. 1 by the arrows 4 'and 5'.
  • the two plasma spraying devices 3 and 3 ' are mounted on a common arm 8, so that they are fixed relative to each other at a predeterminable distance A.
  • the arm 8 may be movable, for example, by a treatment robot, not shown, as indicated by the arrow V in Fig. 1.
  • the two plasma spraying devices are mounted on the arm 8, the spray distance, that is, the distance D between the outlet nozzle 7 and the substrate 10 is the same size as the distance between the outlet nozzle 7 'of the second plasma spraying device 3' and the substrate 10, d.
  • the pretreatment takes place with the same distance between the plasma spraying device 3 'and the substrate 10 as the thermal spraying.
  • Plasma parameters for generating the plasma flame 2 ' are substantially the same as the plasma parameters for generating the process beam 2.
  • the plasma parameters are thus primarily the current for generating the plasma and the composition and flow rate of the plasma
  • the procedure is as follows.
  • the two plasma spraying devices 3, 3 ' are activated, so that the
  • Plasma spray gun 3 generates the process beam 2 and the second
  • Plasma sprayer 3 'the plasma flame 2' it may be advantageous to activate the plasma spraying device 3 for generating the process jet 2 a little later than the plasma spraying device 3 'for the pretreatment, because the latter has a certain flow.
  • the plasma spraying device 3 which generates the process jet 2 reaches the preselected region B a predetermined time later than the pretreatment by the plasma flame 2'. This period of time depends on the speed with which the two plasma spraying devices 3, 3 'are moved and on the spatial distance A of the two
  • Plasma spraying devices 3, 3 ' typically, this is the time span of up to a few tens of seconds. If the plasma sprayer 3 passes the previously pretreated area B, this is in a conventional manner with the
  • Plasma flame 2 'a very good adhesion of the layer 1 1 can be realized to the substrate 10, without the need for a prior treatment with corundum, sand, - high pressure water jets or the like is necessary.
  • adhesion strengths of at least up to 40 MPa can be achieved.
  • the inventive method is of course also suitable for multi-layer systems, for example, can first with the
  • an adhesion or adhesion-promoting layer can be applied to the substrate 10, onto which one or more other layers are subsequently sprayed.
  • the substrate 10 can be metallic or even made of a ceramic, a plastic or mixtures of these materials.
  • starting material P all materials are suitable which are used in thermal spraying processes.
  • the starting material P is generally present as a powder, which is conveyed by means of a carrier gas into the plasma flame.
  • a variant of the device shown in Fig. 1 is that the two plasma sprayers 3 and 3 'are not arranged on a common arm 8, but that they are independent
  • Moving devices can be moved independently, for example, two treatment robots can be provided, each of which moves one of the two plasma sprayers 3 and 3 '. Then it can be realized via the control of the two movement devices, that the plasma spraying device 3 for generating the process beam 2 the
  • Plasma sprayer 3 ' for generating the plasma flame 2' for the
  • Pre-treatment at a predeterminable distance follows, so that first the pretreatment of the area B takes place and then after a predetermined period of time the coating.
  • This variant has the advantage that even more complex, in particular curvilinear movements of
  • Plasma spraying devices 3, 3 ' can be performed.
  • a further variant consists in that only a plasma spraying device, for example the plasma spraying device 3 in FIG. 1, is used for carrying out the method.
  • a plasma spraying device for example the plasma spraying device 3 in FIG. 1, is used for carrying out the method.
  • the feed 6 of the starting material P is switched off so that the region B is initially charged only with the plasma flame.
  • this variant with only one plasma spraying device 3 can be carried out either by first pretreating the entire surface to be coated with the plasma flame and then by blanketing the entire surface
  • Process beam 2 is coated. But it is also possible initially only one area, z. B. pretreat a strip of the surface to be coated with the plasma flame, then coat this area with the process beam 2, then pretreat the next area and then coat and continue this in some areas until the entire surface of the substrate 10 with the layer 1 1 is provided.
  • the time interval between the plasma flame pretreatment and the thermal spraying can be several seconds to several minutes. Of course, this also depends on from the substrate to be coated. In general, it is advantageous if this time interval does not exceed five minutes and preferably one minute.
  • Cylinder surface with very good lubrication, friction and running properties can be generated.
  • Another example of application is the coating of prostheses made of titanium with hydroxyapatite. Especially here is the renunciation of a previous blasting with corundum or sand a very significant advantage.
  • Fig. 2 shows a schematic representation of an apparatus for
  • This is a rotatable plasma sprayer, for example, a device that has a combination of the under
  • the darg Congress in Fig. 2 plasma spray device 1 comprises only one
  • the substrate 10 is here a cylinder bore whose curved inner surface is to be provided with the layer 1 1 as a coating.
  • the plasma spraying device 3 (burner) for generating the process jet 2 or the plasma flame 2 'is provided on a burner shaft 30 of the plasma spraying device 1.
  • Plasma spray gun 3 for coating the curved inner surface of the substrate 10 is arranged rotatable about a shaft axis C.
  • the burner shaft 30 itself rotates, as indicated by the arrow U.
  • the burner shaft 30 in the direction of the shaft axis C is linearly movable, ie movable up and down as shown, so that the entire inner surface of the cylinder bore can be coated by the rotation about the shaft axis C and the up and down movement of the plasma spray gun 3.
  • the procedure is as follows. First, the plasma spray gun 3 is activated, wherein the feed 6 of the starting material P is not yet turned on, so that the plasma spray gun 3 generates a plasma flame containing no coating material. Now, by the rotation U about the shaft axis C and the illustration downwards or
  • the plasma sprayer is moved out of the cylinder bore or at the upper end according to the representation and the feed 6 of the starting material P is activated, so now the
  • Plasma spray gun 3 generates the process beam 2. With this, the layer 1 1 is then sprayed onto the substrate 10 by one or more upward and downward movement of the plasma spray gun 3 with simultaneous rotation U about the shaft axis A.
  • the maximum is 10,000 Pa and preferably at most
  • defocusing plasma is injected and partially or completely melted or at least plasticized therein.
  • the starting material may also be vaporized or converted into the vapor phase, especially in the case of the LPPS-TF process.
  • a plasma is generated with sufficiently high specific enthalpy, so that a very dense and thin layer 11 is formed on the substrate.
  • the variation of the microstructure is due to the coating conditions, in particular of process enthalpy, working pressure in the coating chamber and the process beam significantly influenced and controlled.
  • Process beam 2 Properties determined by controllable process parameters are determined by controllable process parameters.
  • a variant of this method is to provide on the burner shaft 30, a second plasma spraying device, which with respect to the
  • Circumferential direction of the burner shaft 30 is arranged offset to the plasma spray gun 3, for example, offset by 180 °, so that the two
  • Plasmaspritzetti are arranged back to back. Then, the second plasma spray gun for generating the plasma flame for
  • Burner shaft 30 then happens first the plasma jet to
  • the process beam 2 passes this pretreated area. It is advantageous in practice, when the two plasma spraying additionally offset with respect to the axial direction, ie at different heights, are arranged
  • Plasma flame specified in each case a cylinder bore was coated.
  • the coating - as the pretreatment by means of the plasma flame and the subsequent thermal spraying - is carried out in each case with a plasma sprayer type F210 of Sulzer Metco AG (Switzerland) as an atmospheric plasma spraying process, as described in
  • Plasma sprayer 3 was removed and stored in the cylinder bore, while a repetition is a complete down and up movement.
  • Example 1 The pretreatment is carried out with the following plasma parameters:
  • Example 2 The pretreatment takes place with the following plasma parameters:
  • Process gas argon 60 SLPM (standard liters per minute), hydrogen 5 SPLM, nitrogen 4 SPLM.
  • a jacket gas is used to cover the plasma flame with 16 SLPM.
  • the coating thus produced shows a very good adhesion.
  • Example 3 The pretreatment takes place with the following plasma parameters:
  • Process gas Argon 60 SLPM (standard liters per minute), Hydrogen 6 SPLM, Nitrogen 4 SPLM.
  • a jacket gas is used to cover the plasma flame with 16 SLPM.
  • a ceramic eg Al 2 O 3 / ZrO 2 in the ratio 80 to 20.
  • the coating thus produced shows a very good adhesion.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

L'invention concerne un procédé de revêtement d'un substrat selon lequel une matière de départ (P) est projetée sous forme de jet de processus (2) sur une surface du substrat (10) par projection thermique. La surface du substrat (10) est d'abord prétraitée sans dépôt de matière au moyen d'une flamme plasma (2') d'un dispositif de projection plasma (3, 3'), puis la surface est soumise au jet de processus (2) contenant la matière de départ (2).
PCT/EP2012/074594 2011-12-09 2012-12-06 Procédé de revêtement d'un substrat WO2013083671A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2014545249A JP2015503031A (ja) 2011-12-09 2012-12-06 基材を被覆する方法
US14/362,552 US20140335282A1 (en) 2011-12-09 2012-12-06 Method for coating a substrate
EP12797907.8A EP2788520A1 (fr) 2011-12-09 2012-12-06 Procédé de revêtement d'un substrat
CN201280060284.2A CN104136651A (zh) 2011-12-09 2012-12-06 用于对基质进行涂覆的方法
KR1020147018693A KR20140133499A (ko) 2011-12-09 2012-12-06 기재의 코팅 방법

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP11192846.1 2011-12-09
EP11192846 2011-12-09
EP12168281.9 2012-05-16
EP12168281 2012-05-16

Publications (1)

Publication Number Publication Date
WO2013083671A1 true WO2013083671A1 (fr) 2013-06-13

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PCT/EP2012/074594 WO2013083671A1 (fr) 2011-12-09 2012-12-06 Procédé de revêtement d'un substrat

Country Status (6)

Country Link
US (1) US20140335282A1 (fr)
EP (1) EP2788520A1 (fr)
JP (1) JP2015503031A (fr)
KR (1) KR20140133499A (fr)
CN (1) CN104136651A (fr)
WO (1) WO2013083671A1 (fr)

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JP2016089275A (ja) * 2014-11-07 2016-05-23 ジーエム・グローバル・テクノロジー・オペレーションズ・エルエルシー シリンダボアの溶射被覆のためのプラズマ噴射による表面活性化

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EP3463678B1 (fr) * 2016-05-27 2020-07-15 Oerlikon Metco AG, Wohlen Procede de revetement
WO2019055310A1 (fr) * 2017-09-14 2019-03-21 Atmospheric Plasma Solutions, Inc. Procédé et système pour favoriser l'adhérence de revêtements par pulvérisation à l'arc
US20190300999A1 (en) * 2018-04-02 2019-10-03 Tokyo Electron Limited Method of forming metallic film
JP7379844B2 (ja) * 2018-04-02 2023-11-15 富士電機株式会社 金属膜の形成方法
US20210384016A1 (en) * 2018-10-24 2021-12-09 Atmospheric Plasma Solutions, Inc. Plasma source and method for preparing and coating surfaces using atmospheric plasma pressure waves
JP7285667B2 (ja) * 2019-03-22 2023-06-02 株式会社栗本鐵工所 鋳鉄管の製造方法および鋳鉄管の表面防食方法
JP7312064B2 (ja) * 2019-09-10 2023-07-20 日本特殊陶業株式会社 溶射膜被覆部材の製造方法
CN110777320A (zh) * 2019-10-23 2020-02-11 福建阿石创新材料股份有限公司 一种旋转铌残靶的修复方法

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US5853815A (en) 1994-08-18 1998-12-29 Sulzer Metco Ag Method of forming uniform thin coatings on large substrates
WO2003087422A1 (fr) 2002-04-12 2003-10-23 Sulzer Metco Ag Procede de projection au plasma
EP1524061A2 (fr) * 2003-10-08 2005-04-20 General Electric Company Dispositif de revêtement à arc plasma avec une unité locale ayant un anneau avec des passages pour fluides et procédés à arc plasma pour réaliser des revêtements à faible teneur en oxydes
WO2008131837A2 (fr) * 2007-04-25 2008-11-06 Man Diesel Filial Af Man Diesel Se, Tyskland Élément de machine appartenant à une paire coulissante et son procédé de production
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Publication number Priority date Publication date Assignee Title
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US20140335282A1 (en) 2014-11-13
EP2788520A1 (fr) 2014-10-15
KR20140133499A (ko) 2014-11-19
JP2015503031A (ja) 2015-01-29
CN104136651A (zh) 2014-11-05

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