WO2013056482A1 - 玻璃基板存储搬运系统以及玻璃基板存储平台 - Google Patents

玻璃基板存储搬运系统以及玻璃基板存储平台 Download PDF

Info

Publication number
WO2013056482A1
WO2013056482A1 PCT/CN2011/082015 CN2011082015W WO2013056482A1 WO 2013056482 A1 WO2013056482 A1 WO 2013056482A1 CN 2011082015 W CN2011082015 W CN 2011082015W WO 2013056482 A1 WO2013056482 A1 WO 2013056482A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
storage
transport
platform
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2011/082015
Other languages
English (en)
French (fr)
Inventor
王贇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US13/379,009 priority Critical patent/US9004839B2/en
Publication of WO2013056482A1 publication Critical patent/WO2013056482A1/zh
Anticipated expiration legal-status Critical
Priority to US14/613,373 priority patent/US9487354B2/en
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Definitions

  • the present invention relates to the field of storage and handling of glass substrates, and more particularly to a glass substrate storage and handling system and a glass substrate storage platform capable of improving space utilization and reducing contamination of particles on a glass substrate.
  • the traditional glass substrate storage handling system is transported by a stocker (Stocker) and a stacker crane (Cassette), and the stacker crane transports the glass cassette in each storage rack. , the glass substrate is transported.
  • the production capacity becomes larger, which means that the storage rack needs to carry more and larger glass cassettes, and the increased storage rack takes up more space.
  • the problem of particle contamination inside the storage rack is serious. Since the glass plate is used to store the glass substrate in the conventional manner, the glass substrate is horizontally placed, and it is easy to cause dust particles to fall on the glass substrate to be difficult to remove, and it is easy to cause pollution when placed for a long time. At the same time, when the stacking crane is moving, it is easy to cause dust due to its heavy weight. According to past experience, the proportion of defective products due to internal contamination of the storage rack will increase over time.
  • the invention provides a glass substrate storage and handling system for storing a glass substrate in a vertical storage manner and a glass substrate storage platform, so as to solve the problem that the space utilization rate of the existing glass substrate storage and handling system is low and the particles inside the storage rack are liable to cause product defects.
  • Technical problem is to solve the problem that the space utilization rate of the existing glass substrate storage and handling system is low and the particles inside the storage rack are liable to cause product defects.
  • An object of the present invention is to provide a glass substrate storage and transportation system and a glass substrate storage platform that store a glass substrate in a vertical storage manner, thereby improving the space utilization rate of the glass substrate storage and transportation system and preventing contamination of the glass substrate.
  • the present invention adopts the following technical solutions.
  • a glass substrate storage handling system comprising: a storage platform for storing a glass substrate; and a handling platform for loading the glass substrate into and out of the storage platform; the storage platform comprising a plurality of vertical placements a storage slot of the glass substrate; the storage platform further includes a storage board for fixing the storage slot; the storage slot includes a fixed support plate, a movable support plate, and a bottom plate for fixing the glass substrate; a telescopic rail connected to the storage board; the telescopic rail can perform a telescopic movement in a direction in which the glass substrate is carried in and out of the storage platform; and the movable support panel includes the movable support panel and the carrying a movable rotating shaft of the platform relative to rotation; the movable supporting plate and the conveying platform are rotated at an angle of 0 to 90 degrees; the conveying platform comprises a conveying unit for conveying the glass substrate and for determining the conveying unit a conveying guide in the conveying direction; the movable supporting plate includes at least two supporting portions
  • a glass substrate storage handling system comprising a storage platform for storing a glass substrate; and a handling platform for loading the glass substrate into and out of the storage platform; the storage platform comprising a plurality of vertically placed glass The storage slot of the substrate.
  • the storage platform further includes a storage board for fixing the storage tank, the storage tank including a fixed support plate for fixing the glass substrate, a movable support plate, and a bottom plate
  • the bottom plate is connected to the storage plate by a telescopic rail; the telescopic rail can perform a telescopic movement in a direction in which the glass substrate is carried in and out of the storage platform.
  • the movable support plate includes a movable rotating shaft that can rotate the movable support plate relative to the transport platform; the movable support plate and the transport platform have a relative rotation angle of 0. Degree to 90 degrees.
  • the transport platform includes a transport unit for transporting the glass substrate and a transport guide for determining a transport direction of the transport unit.
  • the movable support plate includes at least two support portions and a gap portion between the support portions; the transport unit is provided at a corresponding position of the gap portion for Fixing the fixing portion of the glass substrate.
  • the movable support plate includes at least two support portions and a gap portion between the support portions; the transport unit is provided at a corresponding position of the gap portion for A fine adjustment roller that fixes the glass substrate and adjusts the position of the glass substrate.
  • the transport platform specifically includes a carry-out transport unit for carrying the glass substrate out of the storage platform, and a carry-out transport guide for specifying a transport direction of the carry-out transport unit, A loading and unloading unit for loading the glass substrate into the storage platform and a loading and transporting guide rail for removing the transport direction of the loading and unloading unit.
  • the number of the transport platforms is two, and a layer structure is formed, and a vertical rail is disposed between the two transport platforms, and the vertical rails are located at the end of the transport rails of the two transport platforms.
  • the memory board includes a plurality of vent holes provided in a lower portion of the storage tank.
  • a glass substrate storage platform including a storage board, a plurality of retractable rails fixed to the storage board, and a plurality of A storage slot for a glass substrate.
  • the plurality of storage slots are in one-to-one correspondence with the plurality of retractable rails, and each storage slot is fixed to a corresponding retractable rail thereof, and each storage slot includes a fixing for fixing and supporting the glass substrate.
  • the fixed support plate and the movable support plate are both perpendicular to the storage plate, the bottom plate is parallel to the storage plate, and the bottom plate is connected to the corresponding telescopic rail.
  • the memory board includes a plurality of vent holes disposed at a lower portion of the storage tank.
  • the glass substrate storage and handling system and the glass substrate storage platform of the present invention store the glass substrate in a vertical storage manner and adopt a telescopic conveying method, thereby solving the problem of low space utilization rate of the existing glass substrate storage and handling system and particles inside the storage rack. It is easy to cause technical problems of defective products.
  • FIG. 1 is a schematic structural view of a preferred embodiment of a glass substrate storage platform of the present invention
  • FIG. 2A and FIG. 2B are schematic diagrams showing the structure of a first preferred embodiment of the glass substrate storage and handling system of the present invention, wherein FIG. 2A is a schematic view of a glass substrate of the present invention when the glass substrate is carried out, wherein the glass substrate remains in an upright state; FIG. 2B Schematic diagram of laying flat on the transport platform for rotating the glass substrate of FIG. 2A;
  • FIG. 3A-3D are schematic views showing the structure of a second preferred embodiment of the glass substrate storage and handling system of the present invention, wherein FIG. 3A is a schematic view of a glass substrate of the present invention when the glass substrate is carried out, and the glass substrate is kept in an upright state; FIG. FIG. 3C is a schematic view showing a glass substrate of the present invention placed in a flat state when the glass substrate is rotated in FIG. 3A; FIG. 3D is a state in which the glass substrate is kept in a flat state; FIG. a schematic view of the glass substrate being erected on the handling platform after being rotated 90 degrees;
  • FIG. 4 is a schematic view showing the structure of a third preferred embodiment of the glass substrate storage and handling system of the present invention.
  • FIG. 1 is a schematic structural view of a glass substrate storage platform used in the glass substrate storage and handling system of the present invention, wherein the storage platform 100 includes: a storage board 120, and a plurality of retractable rails 112 fixed to the storage board 120. And a plurality of storage slots 110 for vertically placing the glass substrate 130.
  • the plurality of storage slots 110 are in one-to-one correspondence with the plurality of telescopic rails 112, and each storage slot 110 is fixed to one of the corresponding telescopic rails 112, such that the telescopic rails 112 are It can be located on the memory board 120.
  • Each storage slot 110 includes a fixed support plate 1101 for fixing the supporting glass substrate 130, a movable supporting plate 1102 disposed in parallel with the fixed supporting plate 1101 and for supporting the glass substrate, and connecting the fixed supporting plate 1101 with The bottom plate 1103 of the movable support plate 1102.
  • the fixed support plate 1101 and the movable support plate 1102 are both perpendicular to the storage plate 120, and the bottom plate 1103 is parallel to the storage plate 120, and the bottom plate 1103 is fixed to the retractable rail 112 while the storage slot 110 is fixed to the telescopic guide rail. 112 on.
  • a plurality of vent holes 121 are provided in the memory board 120.
  • the glass substrate 130 is vertically placed in the storage tank 110. Since the storage slot 110 can be extended or retracted by the telescopic rail 112, the corresponding glass substrate 130 can be taken out or put back. Therefore, in the present invention, it is not necessary to carry out the unloading operation of the glass substrate 130 specifically for the robot arm that carries out the glass substrate 130, and the operation space is reserved.
  • the pitch of the glass substrate 130 can be reduced to 10 mm, while the size of the original glass cassette is 30 mm. For example, a glass substrate 130 having a size of 2500 mm*2200 mm is taken as an example, and 20 glass substrates 130 are one batch.
  • the length of the glass substrate storage platform of the present invention needs only 250 mm (considering the thickness of the glass substrate 130), and the volume is 2500 mm*2200 mm. *250mm.
  • the original glass cassette requires 2500mm*2200mm*600mm. It is also necessary to consider the height of the glass cassette of the stacker crane up to 300mm and the height of the frame of the glass cassette itself.
  • the height of the glass cassette is generally at least 1000mm. It can be seen that the glass substrate storage platform using the present invention can save about 3/4 of the space volume compared to the conventional glass cassette.
  • the glass substrate 130 may be stored in a non-perpendicular manner (for example, at an angle of 70-85 degrees from the horizontal). It rests on the movable support plate 1102. If the coated surface of the glass substrate 130 has been bonded, it can be stored in a completely vertical manner.
  • the memory board 120 of the glass substrate storage platform of the present invention is further provided with a plurality of vent holes 121.
  • the vent holes 121 are located at the lower portion of the storage slot 110. Since the glass substrate 130 is vertically placed, the dust particles are not easily adhered to the surface of the glass substrate 130; at the same time, the airflow between the glass substrates 130 is aligned with the direction in which the glass substrate 130 is placed, so that the dust particles on the surface of the glass substrate 130 are more easily removed; When the telescopic guide rail 112 moves the storage tank 110 to take out the glass substrate 130, the drop of the dust particles does not affect the other glass substrate 130. Therefore, the glass substrate storage platform of the present invention can greatly reduce the defects of the glass substrate product caused by dust particles inside the platform.
  • FIG. 2A and 2B are schematic views showing the structure of a first preferred embodiment of the glass substrate storage and handling system of the present invention, wherein FIG. 2A is a schematic view of a glass substrate of the present invention when it is carried out, but the glass substrate is kept upright.
  • FIG. 2B is a view in which the glass substrate of FIG. 2A is rotated and laid flat on the transport platform.
  • the glass substrate storage and transport system includes a storage platform 100 for storing the glass substrate 130, and a transport platform 200 for loading and unloading the glass substrate 130 into and out of the storage platform 100.
  • the storage platform 100 includes a storage board 120, a plurality of retractable rails 112, and a plurality of storage slots 110.
  • Each storage slot 110 includes a fixed support plate 1101, a movable support plate 1102, and a bottom plate 1103. The storage slot 110 can successfully follow the telescoping rail 112 from the storage panel 120 by securing the bottom plate 1103 to the telescoping rail 112.
  • the retractable rail 112 can perform a telescopic movement in a direction in which the glass substrate 130 is carried into and out of the storage platform 100 (direction A as shown in FIG. 2A).
  • the movable support plate 1102 includes a movable rotating shaft (not shown) that can rotate the movable supporting plate 1102 with respect to the bottom plate 1103, and the relative rotation angle is 0 to 90 degrees.
  • the transport platform 200 includes a transport unit 210 for transporting the glass substrate 130 and a transport guide 220 for determining the transport direction of the transport unit 210.
  • the movable support plate 1102 includes at least two support portions 1104 and a gap portion 1105 between the support portions 1104.
  • the transport unit 210 is provided with a fixing portion 211 for fixing the glass substrate 130 at a corresponding position of the gap portion 1105.
  • the retractable rail 112 on the storage board 120 carries the storage slot 110 and the glass substrate 130 fixed in the storage slot 110, it protrudes toward the transport platform 200, exits the storage board 120, and reaches the transport rail 220 of the transport platform 200.
  • the movable support plate 1102 of the storage slot 110 rotates relative to the transport platform 200. Since the glass substrate 130 abuts against the movable support plate 1102, the glass substrate 130 rotates following the movable support plate 1102 until The glass substrate 130 is laid flat on the fixing portion 211 of the transport unit 210 of the transport platform 200, and then the glass substrate 130 is transported to a position required by the worker by the transport unit 210.
  • the retractable rails 112 on the memory board 120 protrude toward the handling platform 200 with the free storage slots 110, leaving the storage board 120 and reaching the handling platform.
  • the upper surface of the conveying guide 220 of the 200 rotates the movable supporting plate 1102 to lie on the conveying guide 220, and then conveys the glass substrate 130 to the movable supporting plate 1102 by using the conveying unit 210 and its fixing portion 211, and then rotates again.
  • the movable supporting plate 1102 allows the glass substrate 130 to be erected in the storage tank 110, and finally returns to the storage board 120 by the storage rail 110 carrying the glass substrate 130 by the telescopic rail 112.
  • the specific embodiment and the beneficial effects of the storage platform 100 are the same as those of the glass substrate storage platform shown in FIG. 1 .
  • the handling platform 200 does not use a stacking crane, but uses the conveying unit 210 and the conveying guide 220, which greatly reduces the failure rate of the equipment.
  • FIG. 3A-3D are schematic structural views of a second preferred embodiment of the glass substrate storage and handling system of the present invention, wherein FIG. 3A is a schematic view of a glass substrate of the present invention when it is carried out, but the glass substrate is maintained in an upright state; FIG. 3B 3C is a schematic view of the glass substrate of FIG. 3A when it is rotated; FIG. 3C is a schematic view of a glass substrate of the present invention when it is carried in, but the glass substrate is kept in a flat state; and FIG. 3D is a view of FIG. 3C A schematic view of the glass substrate being erected on the transport platform after being rotated 90 degrees.
  • the main difference from the first embodiment shown in FIG. 2A and FIG. 2B is that in the second embodiment shown in FIG. 3A to FIG. 3B, two transport platforms 200, 200' are respectively responsible for moving out and moving in. The operation of the glass substrate 130.
  • the storage slot 110 carrying the corresponding glass substrate 130 extends the glass substrate 130 through the telescopic rail 112.
  • the telescopic rail 112 is fixed in the drawer type cabinet, the fixed end is connected to the storage board 120, and the movable end is connected to the bottom plate 1103.
  • the movable supporting plate 1102 When telescopic, only the movable ends of the two sides extend the guide rails, the fixed ends do not move, the telescopic expansion of the guide rails can be pushed by the cylinders; the telescopic guide rails can extend outwards in one piece and have a certain strength enough to support the weight of the glass substrate 130. Then, the movable supporting plate 1102 is rotated by 90 degrees through the movable rotating shaft, so that the glass substrate 130 on the movable supporting plate 1102 is placed on the conveying unit 210 of the conveying platform 200 (as shown in FIG. 3B), and the servo motor can be set to control the rotating shaft of the rotating shaft.
  • the angle and precision of the movable support plate 1102 are changed by the mechanism such as a coupling to drive the movable support plate 1102 to rotate.
  • the fixing portion 211 on the conveying unit 210 of the conveying platform 200 fixes the corresponding glass substrate 130 through the gap portion 1105 of the movable supporting plate 1102.
  • the transport unit 210 transports the corresponding glass substrate 130 to the inlet and outlet along the transport rail 220, so that the relevant worker can remove the glass substrate 130.
  • the glass substrate 130 when the glass substrate 130 needs to be carried in, the glass substrate 130 is placed on the corresponding transport unit 210 of the transport platform 200', and transported.
  • the unit 210 fixes the glass substrate 130 by the fixing portion 211.
  • the movable supporting plate 1102 is parallel to the conveying platform 200 ′, and the conveying unit 210 sends the glass substrate 130 to the upper side of the movable supporting plate 1102 along the conveying guide 220 .
  • the fixing portion 211 of the conveying unit 210 is located in the gap of the movable supporting plate 1102 . Part 1105.
  • the movable supporting plate 1102 is rotated by 90 degrees through the movable rotating shaft, so that the glass substrate 130 on the conveying unit 210 is vertically fixed in the storage slot 110 of the storage platform 100 (as shown in FIG. 3D), where the servo motor can be set to control the movable rotating shaft.
  • the angle and precision of the movable support plate 1102 are changed by the mechanism such as a coupling to drive the movable support plate 1102 to rotate.
  • the storage tank 110 carrying the glass substrate 130 carries the glass substrate 130 from the transport platform 200' into the storage platform 100 through the telescopic rails 112, thereby completing the loading operation of the glass substrate 130.
  • the loading and unloading of the glass substrate 130 of the present invention can be performed on the same transport platform 200 as shown in Figs. 2A and 2B, or can be performed on different transport platforms 200, 200' as shown in Figs. 3A to 3D.
  • the transport unit 210 is provided at a corresponding position of the gap portion 1105 with a fine adjustment roller for fixing the position of the glass substrate 130 and the adjustment glass substrate 130 (not shown, the position is as described above).
  • the fixing portion 211 is the same).
  • the placement position of the glass substrate 130 can be adjusted by using the fine adjustment roller on the conveying unit 210, so that the loading and unloading of the glass substrate 130 is more convenient and safe.
  • the transport platform specifically includes a carry-out transport unit for carrying the glass substrate out of the storage platform,
  • the carry-out transport guide for determining the transport direction of the carry-out transport unit
  • the carry-in transport unit for loading the glass substrate into the storage platform
  • the carry-in transport guide for determining the transport direction of the carry-in transport unit.
  • the glass substrate storage and transportation system of the present invention enables the loading and unloading of the glass substrate to be performed simultaneously, and the outlet and the inlet of the glass substrate may not be together to avoid operational errors, thereby greatly improving the production of the glass substrate manufacturer. effectiveness.
  • FIG. 4 is a schematic structural view of a third preferred embodiment of the glass substrate storage and handling system of the present invention, which is different from the second embodiment shown in FIG. 3 in that the handling platform 400 shown in FIG. 400' forms a layer structure, and a vertical rail 430 is further disposed between the handling platforms 400, 400', and the vertical rail 430 is disposed at the end of the conveying rail 420 of the handling platform 400, 400' for the conveying unit 410 up and down movement. Due to the arrangement of the vertical rails 430, all of the transport units 410 can be moved up and down.
  • a multi-layered glass substrate storage and handling system can be arranged in the same area, the transfer platforms of each layer are connected by vertical rails 430, and the entrance and exit of the glass substrates are arranged at appropriate positions of the vertical rails 430 so that the relevant staff can Move in or out the corresponding glass substrate.
  • the glass substrate storage and handling system of the present invention adopts a spatial three-dimensional, multi-layer and multi-row structure to maximize the storage amount through the design of the vertical guide rail 430, thereby further saving the plant area occupied by the glass substrate storage and handling system and increasing the utility area of the plant area. .
  • the glass substrate storage handling system of the present invention can pass CIM (Computer Integrated Manu-facturing: computerized manufacturing) computerized management of storage and handling of glass substrates. If the system receives a request to remove the glass substrate, it will retrieve the position of the glass substrate on the storage platform according to the previous storage record and pass The telescopic rail sends the glass substrate at the position to the transport platform, and the corresponding transport platform automatically sends the glass substrate to the inlet and outlet of the glass substrate.
  • CIM realizes the collaborative work between production planning and control, computer-aided design, computer-aided manufacturing, computer-aided engineering, and computer-aided quality management, realizing unified computer unified management and greatly improving production management efficiency.
  • the glass substrate storage platform of the present invention can save about 3/4 of the volume of space compared to conventional glass cassettes. At the same time, the glass substrate storage platform of the invention can greatly reduce the defects of the glass substrate product caused by dust particles inside the platform.
  • the glass substrate storage handling system please refer to the specific embodiment of the above glass substrate storage handling system.

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

公开了一种玻璃基板存储搬运系统，该系统包括存储平台（100）和搬运平台（200），该存储平台（100）包括多个用于垂直放置玻璃基板的存储槽（110）。该系统采用垂直式收纳的方式存储玻璃基板，能够提高玻璃基板存储搬运系统的空间利用率，并防止玻璃基板被污染。还公开了一种玻璃基板存储平台。

Description

玻璃基板存储搬运系统以及玻璃基板存储平台 技术领域
本发明涉及玻璃基板存储搬运领域，特别是涉及一种可以提高空间利用率以及减少颗粒对玻璃基板的污染的玻璃基板存储搬运系统以及玻璃基板存储平台。
 背景技术
传统的玻璃基板存储搬运系统是通过存储架（Stocker）和堆高式起重机（crane）进行搬运，以玻璃卡匣（Cassette）为单位，堆高式起重机通过搬送每个存储架中的玻璃卡匣，来进行玻璃基板的搬送。
随着玻璃基板的尺寸越来越大，生产能力越来越大，意味着存储架需要承载更多更大的玻璃卡匣，并且体积增大的存储架占用更多的空间。
同时由于机械磨损或者其它因素造成存储架内部的颗粒污染问题严重。由于传统方式采用玻璃卡匣收纳玻璃基板，玻璃基板水平放置，往往容易造成灰尘颗粒落在玻璃基板上难以清除，长时间放置容易造成污染。同时堆高式起重机在移动时，由于本身较重，容易引起扬尘。根据以往经验，因存储架的内部污染，造成制品不良的比例会随着时间的推移而不断上升。
因此，有必要提供一种玻璃基板存储搬运系统以及玻璃基板存储平台，以解决现有技术所存在的问题。
 技术问题
本发明提供一种采用垂直式收纳的方式存储玻璃基板的玻璃基板存储搬运系统以及玻璃基板存储平台，以解决现有的玻璃基板存储搬运系统空间利用率低以及存储架内部的颗粒易造成制品不良的技术问题。
 技术解决方案
本发明的目的在于提供一种玻璃基板存储搬运系统以及玻璃基板存储平台，其采用垂直式收纳的方式存储玻璃基板，能够提高玻璃基板存储搬运系统的空间利用率，并防止玻璃基板被污染。
为实现上述目的或其它目的，本发明采用以下技术方案，
一种玻璃基板存储搬运系统，包括：用于存放玻璃基板的存储平台；以及用于将所述玻璃基板搬入搬出所述存储平台的搬运平台；所述存储平台包括多个用于垂直放置所述玻璃基板的存储槽；所述存储平台还包括用于固定所述存储槽的存储板；所述存储槽包括用于固定所述玻璃基板的固定支撑板、活动支撑板以及底板；所述底板通过可伸缩导轨与所述存储板连接；所述可伸缩导轨可在所述玻璃基板搬入搬出所述存储平台的方向做伸缩运动；所述活动支撑板包括可使所述活动支撑板与所述搬运平台相对转动的活动转轴；所述活动支撑板与所述搬运平台相对转动角度为0度至90度；所述搬运平台包括用于输送所述玻璃基板的输送单元以及用于确定所述输送单元的输送方向的输送导轨；所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部；所述搬运平台具体包括用于将所述玻璃基板搬出所述存储平台的搬出输送单元、用于确定所述搬出输送单元的输送方向的搬出输送导轨、用于将所述玻璃基板搬入所述存储平台的搬入输送单元以及用于确定所述搬入输送单元的输送方向的搬入输送导轨；所述搬运平台的数量为二，并形成层结构，在两搬运平台之间还设置有一垂直导轨，所述垂直导轨位于两搬运平台的输送导轨末端、用于使所述输送单元上下运动的垂直导轨；所述存储板包括多个设置在所述存储槽下部的通气孔。
一种玻璃基板存储搬运系统，包括用于存放玻璃基板的存储平台；以及用于将所述玻璃基板搬入搬出所述存储平台的搬运平台；所述存储平台包括多个用于垂直放置所述玻璃基板的存储槽。
在本发明的玻璃基板存储搬运系统中，所述存储平台还包括用于固定所述存储槽的存储板，所述存储槽包括用于固定所述玻璃基板的固定支撑板、活动支撑板以及底板；所述底板通过可伸缩导轨与所述存储板连接；所述可伸缩导轨可在所述玻璃基板搬入搬出所述存储平台的方向做伸缩运动。
在本发明的玻璃基板存储搬运系统中，所述活动支撑板包括可使所述活动支撑板与所述搬运平台相对转动的活动转轴；所述活动支撑板与所述搬运平台相对转动角度为0度至90度。
在本发明的玻璃基板存储搬运系统中，所述搬运平台包括用于输送所述玻璃基板的输送单元以及用于确定所述输送单元的输送方向的输送导轨。
在本发明的玻璃基板存储搬运系统中，所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部。
在本发明的玻璃基板存储搬运系统中，所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板和调整所述玻璃基板的位置的微调滚轮。
在本发明的玻璃基板存储搬运系统中，所述搬运平台具体包括用于将所述玻璃基板搬出所述存储平台的搬出输送单元、用于确定所述搬出输送单元的输送方向的搬出输送导轨、用于将所述玻璃基板搬入所述存储平台的搬入输送单元以及用于去顶所述搬入输送单元的输送方向的搬入输送导轨。
在本发明的玻璃基板存储搬运系统中，所述搬运平台的数量为二，并形成层结构，在两搬运平台之间还设置有一垂直导轨，所述垂直导轨位于两搬运平台的输送导轨末端、用于使所述输送单元上下运动的垂直导轨。
在本发明的玻璃基板存储搬运系统中，所述存储板包括多个设置在所述存储槽下部的通气孔。
为实现上述目的或其它目的，本发明还采用以下技术方案，一种玻璃基板存储平台，包括一存储板、多个固定至所述存储板上的可伸缩导轨、多个用于垂直放置所述玻璃基板的存储槽。所述多个存储槽与所述多个可伸缩导轨一一对应，且每一存储槽均固定至与其对应的可伸缩导轨上，每一存储槽均包括用于固定支撑所述玻璃基板的固定支撑板、用于活动支撑所述玻璃基板的并面对所述固定支撑板的活动支撑板以及用于连接所述固定支撑板与所述活动支撑板的底板。所述固定支撑板和所述活动支撑板均垂直于所述存储板，所述底板则平行于所述存储板，且所述底板与所述对应的可伸缩导轨连接。
在本发明的玻璃基板存储平台中，所述存储板包括多个设置在所述存储槽下部的通气孔。
 有益效果
本发明的玻璃基板存储搬运系统以及玻璃基板存储平台采用垂直式收纳的方式存储玻璃基板并采用伸缩式的搬运方式，解决了现有的玻璃基板存储搬运系统空间利用率低以及存储架内部的颗粒易造成制品不良的技术问题。
附图说明
图1为本发明的玻璃基板存储平台的优选实施例的结构示意图；
图2A和图2B为本发明的玻璃基板存储搬运系统的第一优选实施例的结构示意图，其中图2A是本发明其中一玻璃基板被搬出时的示意图，此时玻璃基板保持直立状态；图2B为将图2A中的玻璃基板旋转而平放于搬运平台上的示意图；
图3A-图3D为本发明的玻璃基板存储搬运系统的第二优选实施例的结构示意图，其中图3A是本发明其中一玻璃基板被搬出时的示意图，此时玻璃基板保持直立状态；图3B为将图3A中的玻璃基板旋转而平放于搬运平台上的示意图；图3C是本发明其中一玻璃基板被搬入时的示意图，此时玻璃基板保持平放状态；图3D为将图3C中的玻璃基板被旋转90度后直立于搬运平台上的示意图；
图4为本发明的玻璃基板存储搬运系统的第三优选实施例的结构示意图。
 本发明的最佳实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
图1所示为用于本发明的玻璃基板存储搬运系统中的玻璃基板存储平台的结构示意图，其中存储平台100包括：存储板120、多个固定至所述存储板120上的可伸缩导轨112、以及多个用于垂直放置玻璃基板130的存储槽110。所述的多个存储槽110与所述的多个可伸缩导轨112一一对应，且每一存储槽110均固定至其中一个与其对应的可伸缩导轨112上，这样使得所述可伸缩导轨112可以位于所述存储板120上。每一存储槽110均包括用于固定支撑玻璃基板130的固定支撑板1101、与所述固定支撑板1101平行设置且用于活动支撑玻璃基板的活动支撑板1102以及连接所述固定支撑板1101与所述活动支撑板1102的底板1103。固定支撑板1101和活动支撑板1102均垂直于存储板120，而底板1103则平行于所述存储板120，并且底板1103固定至所述可伸缩导轨112上，同时存储槽110固定至可伸缩导轨112上。在存储板120上设置有多个通气孔121。
如图1所示，本发明的玻璃基板存储平台使用时，玻璃基板130垂直放置在存储槽110中。由于可以通过所述可伸缩导轨112而将存储槽110伸出或缩回，从而将相应的玻璃基板130取出或放回。因此本发明不需要专门为搬出玻璃基板130的机械臂进行玻璃基板130的搬出操作而保留操作空间。玻璃基板130的间距可以减少到10mm，而原有的玻璃卡匣的尺寸为30mm。如以尺寸为2500mm*2200mm的玻璃基板130为例，20块玻璃基板130为一个批次，本发明的玻璃基板存储平台的长度仅需要250mm（考虑玻璃基板130的厚度），体积为2500mm*2200mm*250mm。而采用原有的玻璃卡匣则需要2500mm*2200mm*600mm，还需要考虑堆高式起重机托起玻璃卡匣的高度300mm和玻璃卡匣本身框架的高度，玻璃卡匣的高度一般至少为1000mm。可见采用本发明的玻璃基板存储平台比传统的玻璃卡匣可以节省大约3/4的空间体积。这里的玻璃基板130若是单板，为了避免玻璃基板130的镀膜面与固定支撑板接触，可以采用非完全垂直的方式（如与水平成70-85度角）进行存放，使玻璃基板130的背面靠在活动支撑板1102上。若玻璃基板130的镀膜面已经被贴合，则可以采用完全垂直的方式进行存放。
同时本发明的玻璃基板存储平台的存储板120上还设置有多个通气孔121，当存储槽110设置于存储板120上时，这些通气孔121会位于存储槽110的下部。由于玻璃基板130垂直放置，灰尘颗粒不易粘贴到玻璃基板130表面；同时玻璃基板130之间的气流与玻璃基板130的放置方向一致，使得玻璃基板130表面的灰尘颗粒更加容易清除；再则通过可伸缩导轨112带动存储槽110运动而取出玻璃基板130时，灰尘颗粒的掉落不会影响到其它的玻璃基板130。因此本发明的玻璃基板存储平台可以大大降低平台内部的灰尘颗粒造成的玻璃基板制品不良。
在图2A和图2B所示本发明的玻璃基板存储搬运系统的第一优选实施例的结构示意图中，其中图2A是本发明其中一玻璃基板被搬出时的示意图，但该玻璃基板保持直立状态；图2B为将图2A中的玻璃基板旋转而平放于搬运平台上。所述玻璃基板存储搬运系统包括存储平台100以及搬运平台200，存储平台100用于存放玻璃基板130，搬运平台200用于将玻璃基板130搬入搬出存储平台100。
图2A和图2B所采用的存储平台100结构与图1所示存储平台100相同，因此相同组件采用相同的标号，且在图2A和图2B中未表现出的组件可参考图1中所示的组件及其标号。简单来讲，在图2A和图2B所示的实施例中，存储平台100包括：存储板120、多个可伸缩导轨112、以及多个存储槽110。每一存储槽110均包括固定支撑板1101、活动支撑板1102以及底板1103。所述存储槽110通过将底板1103固定至可伸缩导轨112上，从而能够成功地跟随可伸缩导轨112从所述存储板120上伸出或缩回。可伸缩导轨112可朝着玻璃基板130搬入搬出存储平台100的方向（如图2A中所示的方向A）做伸缩运动。活动支撑板1102包括可使活动支撑板1102相对于底板1103转动的活动转轴（图中未示出），且相对转动角度为0度至90度。
搬运平台200包括用于输送玻璃基板130的输送单元210以及用于确定输送单元210的输送方向的输送导轨220。活动支撑板1102包括至少两个支撑部1104以及在支撑部1104之间的间隙部1105，输送单元210在间隙部1105的相应位置上设置有用于固定玻璃基板130的固定部211。
当位于存储板120上的可伸缩导轨112带着存储槽110及固定在存储槽110内的玻璃基板130朝着搬运平台200伸出、离开存储板120并到达搬运平台200的输送导轨220上的输送单元210表面时，存储槽110的活动支撑板1102相对于搬运平台200转动，由于玻璃基板130贴靠于活动支撑板1102上，所以此时玻璃基板130就会跟随活动支撑板1102转动，直至玻璃基板130平躺于搬运平台200的输送单元210的固定部211上，然后再通过输送单元210将玻璃基板130搬至工作人员所需要的位置。
相反地，当需要将玻璃基板130搬至存储板120上时，位于存储板120上的可伸缩导轨112带着空闲的存储槽110朝着搬运平台200伸出，离开存储板120并到达搬运平台200的输送导轨220的上表面，转动活动支撑板1102使其平躺于输送导轨220上，然后利用输送单元210及其固定部211将玻璃基板130输送至活动支撑板1102上，此时再转动活动支撑板1102使得玻璃基板130直立固定于存储槽110内，最后利用可伸缩导轨112带着装载着玻璃基板130的存储槽110返回存储板120。
本发明的玻璃基板存储搬运系统使用时，存储平台100的具体实施方式和有益效果与图1所示的玻璃基板存储平台的相同，具体请参见图1所示的玻璃基板存储平台的具体实施例。搬运平台200不采用堆高式起重机，而采用输送单元210和输送导轨220，大大降低了设备的故障率。
在图3A-3D为本发明的玻璃基板存储搬运系统的第二优选实施例的结构示意图，其中图3A是本发明其中一玻璃基板被搬出时的示意图，但该玻璃基板保持直立状态；图3B为将图3A中的玻璃基板旋转而平放于搬运平台上；图3C是本发明其中一玻璃基板被搬入时的示意图，但该玻璃基板保持平放状态；以及图3D为将图3C中的玻璃基板被旋转90度后直立于搬运平台上的示意图。其与图2A和图2B所示的第一实施例的主要不同之处在于：在图3A至图3B所示的第二实施例中采用了两个搬运平台200、200’分别负责搬出、搬入玻璃基板130的操作。
请参照图3A与图3B所示并同时结合图1、2中构件的细部结构，当玻璃基板130需要被搬出时，承载相应玻璃基板130的存储槽110通过可伸缩导轨112将玻璃基板130伸出到搬运平台200上，可伸缩导轨112固定在抽屉式的箱体内，固定端与存储板120连接，活动端与底板1103连接。伸缩时仅两边的活动端伸长导轨，固定端不运动，导轨的伸缩可以利用气缸推动；伸缩导轨可一截一截的向外伸展，并且具有一定的强度，足以支撑玻璃基板130的重量。随后通过活动转轴将活动支撑板1102旋转90度，使得活动支撑板1102上的玻璃基板130放置在搬运平台200的输送单元210上（如图3B所示），这里可以设置伺服马达控制活动转轴旋转的角度和精度，通过联轴器等机构变换活动支撑板1102的轴旋转方向，从而带动活动支撑板1102旋转。此时搬运平台200的输送单元210上的固定部211通过活动支撑板1102的间隙部1105固定相应的玻璃基板130。最后输送单元210沿着输送导轨220将相应的玻璃基板130输送到进出口，使得相关工作人员可以取下玻璃基板130。
请参照图3C与图3D所示，并同时结合图1、2中构件的细部结构，当玻璃基板130需要被搬入时，玻璃基板130放置到搬运平台200’的相应的输送单元210上，输送单元210通过固定部211固定住玻璃基板130。此时活动支撑板1102与搬运平台200’平行，输送单元210沿着输送导轨220将玻璃基板130送至活动支撑板1102的上方，此时输送单元210的固定部211位于活动支撑板1102的间隙部1105。随后通过活动转轴将活动支撑板1102旋转90度，使得输送单元210上的玻璃基板130垂直固定在存储平台100的存储槽110中（如图3D所示），这里可以设置伺服马达控制活动转轴旋转的角度和精度，通过联轴器等机构变换活动支撑板1102的轴旋转方向，从而带动活动支撑板1102旋转。最后，承载玻璃基板130的存储槽110通过可伸缩导轨112将玻璃基板130从搬运平台200’搬入到存储平台100内，从而完成玻璃基板130的搬入操作。
由此可见，本发明玻璃基板130的搬入搬出可以如图2A和图2B所示在同一搬运平台200上完成，也可以如图3A至3D所示在不同的搬运平台200、200’上完成。
作为本发明的玻璃基板存储搬运系统的优选实施例，输送单元210在间隙部1105的相应位置上设置有用于固定玻璃基板130和调整玻璃基板130的位置的微调滚轮（未示出，位置与上述的固定部211相同）。这里在输送单元210上采用微调滚轮可以对玻璃基板130的放置位置进行调整，使得玻璃基板130的搬入搬出更加方便和安全。
在图3A至图3D所示的本发明的玻璃基板存储搬运系统的第二优选实施例的结构示意图中，搬运平台具体包括用于将所述玻璃基板搬出所述存储平台的搬出输送单元、用于确定所述搬出输送单元的输送方向的搬出输送导轨、用于将所述玻璃基板搬入所述存储平台的搬入输送单元以及用于确定所述搬入输送单元的输送方向的搬入输送导轨。本实施例中的玻璃基板的搬入通过搬入输送单元和搬入输送导轨完成，玻璃基板的搬出通过搬出输送单元和搬出输送导轨完成。在第二优选实施例中本发明的玻璃基板存储搬运系统使得玻璃基板的搬入搬出可同时进行，并且玻璃基板的出口和入口可以不在一起，以避免操作失误，大大提高了玻璃基板生产企业的生产效率。
在图4所示本发明的玻璃基板存储搬运系统的第三优选实施例的结构示意图中，其与图3所示的第二实施例的不同之处在于：图4所示的搬运平台400、400’形成层结构，而且在搬运平台400、400’之间还设置有垂直导轨430，所述垂直导轨430设置在搬运平台400、400’的所述输送导轨420末端用于使所述输送单元410上下运动。由于垂直导轨430的设置，使得所有的输送单元410可以上下运动。这样可以在相同面积的区域内设置多层的玻璃基板存储搬运系统，每层的搬运平台之间通过垂直导轨430连接，在垂直导轨430的适当位置设置有玻璃基板的进出口使得相关工作人员可以搬入或搬出相应的玻璃基板。本发明的玻璃基板存储搬运系统通过垂直导轨430的设计采用空间立体、多层多排结构达到储存量最大化，可以进一步节省玻璃基板存储搬运系统所占用的厂房面积，提高厂房面积的体用率。
本发明的玻璃基板存储搬运系统可以通过CIM（Computer Integrated Manu-facturing：计算机集成制造）做到玻璃基板的存储搬运的电脑化管理，如系统接收到搬出玻璃基板的请求，会根据之前的存储记录调取该玻璃基板在存储平台上的位置，并通过可伸缩导轨将该位置的玻璃基板送至搬运平台，然后相应的搬运平台将该玻璃基板自动送至玻璃基板的进出口。CIM实现了生产计划和控制、计算机辅助设计、计算机辅助制造、计算机辅助工程以及计算机辅助质量管理之间的协同工作，实现了真正的计算机统一管理，极大地提高了生产管理效率。
本发明的玻璃基板存储平台比传统的玻璃卡匣可以节省大约3/4的空间体积。同时本发明的玻璃基板存储平台可以大大降低平台内部的灰尘颗粒造成的玻璃基板制品不良。具体实施方式和有益效果请参见上述玻璃基板存储搬运系统的具体实施例。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
 本发明的实施方式
工业实用性
序列表自由内容

Claims (16)

  1. 一种玻璃基板存储搬运系统，其特征在于，包括：
    用于存放玻璃基板的存储平台；以及
    用于将所述玻璃基板搬入搬出所述存储平台的搬运平台；
    所述存储平台包括多个用于垂直放置所述玻璃基板的存储槽；
    所述存储平台还包括用于固定所述存储槽的存储板；
    所述存储槽包括用于固定所述玻璃基板的固定支撑板、活动支撑板以及底板；
    所述底板通过可伸缩导轨与所述存储板连接；
    所述可伸缩导轨可在所述玻璃基板搬入搬出所述存储平台的方向做伸缩运动；
    所述活动支撑板包括可使所述活动支撑板与所述搬运平台相对转动的活动转轴；
    所述活动支撑板与所述搬运平台相对转动角度为0度至90度；
    所述搬运平台包括用于输送所述玻璃基板的输送单元以及用于确定所述输送单元的输送方向的输送导轨；
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部；
    所述搬运平台具体包括用于将所述玻璃基板搬出所述存储平台的搬出输送单元、用于确定所述搬出输送单元的输送方向的搬出输送导轨、用于将所述玻璃基板搬入所述存储平台的搬入输送单元以及用于确定所述搬入输送单元的输送方向的搬入输送导轨；
    所述搬运平台的数量为二，并形成层结构，在两搬运平台之间还设置有一垂直导轨，所述垂直导轨位于两搬运平台的输送导轨末端、用于使所述输送单元上下运动的垂直导轨；
    所述存储板包括多个设置在所述存储槽下部的通气孔。
  2. 一种玻璃基板存储搬运系统，其特征在于，包括：
    用于存放玻璃基板的存储平台；以及
    用于将所述玻璃基板搬入搬出所述存储平台的搬运平台；
    所述存储平台包括多个用于垂直放置所述玻璃基板的存储槽。
  3. 根据权利要求2所述的玻璃基板存储搬运系统，其特征在于，
    所述存储平台还包括用于固定所述存储槽的存储板；
    所述存储槽包括用于固定所述玻璃基板的固定支撑板、活动支撑板以及底板；
    所述底板通过可伸缩导轨与所述存储板连接；
    所述可伸缩导轨可在所述玻璃基板搬入搬出所述存储平台的方向做伸缩运动。
  4. 根据权利要求3所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括可使所述活动支撑板与所述搬运平台相对转动的活动转轴；
    所述活动支撑板与所述搬运平台相对转动角度为0度至90度。
  5. 根据权利要求4所述的玻璃基板存储搬运系统，其特征在于，
    所述搬运平台包括用于输送所述玻璃基板的输送单元以及用于确定所述输送单元的输送方向的输送导轨。
  6. 根据权利要求5所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部。
  7. 根据权利要求5所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板和调整所述玻璃基板的位置的微调滚轮。
  8. 根据权利要求5所述的玻璃基板存储搬运系统，其特征在于，
    所述搬运平台具体包括用于将所述玻璃基板搬出所述存储平台的搬出输送单元、用于确定所述搬出输送单元的输送方向的搬出输送导轨、用于将所述玻璃基板搬入所述存储平台的搬入输送单元以及用于确定所述搬入输送单元的输送方向的搬入输送导轨。
  9. 根据权利要求8所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述搬出输送单元和所述搬入输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部。
  10. 根据权利要求8所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述搬出输送单元和所述搬入输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板和调整所述玻璃基板的位置的微调滚轮。
  11. 根据权利要求5所述的玻璃基板存储搬运系统，其特征在于，所述搬运平台的数量为二，并形成层结构，在两搬运平台之间还设置有一垂直导轨，所述垂直导轨位于两搬运平台的输送导轨末端、用于使所述输送单元上下运动的垂直导轨。
  12. 根据权利要求11所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板的固定部。
  13. 根据权利要求11所述的玻璃基板存储搬运系统，其特征在于，
    所述活动支撑板包括至少两个支撑部以及在所述支撑部之间的间隙部；
    所述输送单元在所述间隙部的相应位置上设置有用于固定所述玻璃基板和调整所述玻璃基板的位置的微调滚轮。
  14. 根据权利要求3所述的玻璃基板存储搬运系统，其特征在于，
    所述存储板包括多个设置在所述存储槽下部的通气孔。
  15. 一种玻璃基板存储平台，其特征在于：包括：
    存储板、多个固定至所述存储板上的可伸缩导轨、多个用于垂直放置所述玻璃基板的存储槽；
    所述多个存储槽与所述多个可伸缩导轨一一对应，且每一存储槽均固定至与其对应的可伸缩导轨上，每一存储槽均包括用于固定支撑所述玻璃基板的固定支撑板、用于活动支撑所述玻璃基板的并面对所述固定支撑板的活动支撑板以及用于连接所述固定支撑板与所述活动支撑板的底板；
    所述固定支撑板和所述活动支撑板均垂直于所述存储板，所述底板则平行于所述存储板，且所述底板与所述对应的可伸缩导轨连接。
  16. 根据权利要求15所述的玻璃基板存储平台，其特征在于，
    所述存储板包括多个设置在所述存储槽下部的通气孔。
PCT/CN2011/082015 2011-10-18 2011-11-10 玻璃基板存储搬运系统以及玻璃基板存储平台 Ceased WO2013056482A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US13/379,009 US9004839B2 (en) 2011-10-18 2011-11-10 Glass substrate storage and transportation system and a glass substrate storage platform
US14/613,373 US9487354B2 (en) 2011-10-18 2015-02-04 Glass substrate storage platform

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201110316090.1 2011-10-18
CN 201110316090 CN102502260B (zh) 2011-10-18 2011-10-18 玻璃基板存储搬运系统以及玻璃基板存储平台

Publications (1)

Publication Number Publication Date
WO2013056482A1 true WO2013056482A1 (zh) 2013-04-25

Family

ID=46214411

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2011/082015 Ceased WO2013056482A1 (zh) 2011-10-18 2011-11-10 玻璃基板存储搬运系统以及玻璃基板存储平台

Country Status (2)

Country Link
CN (1) CN102502260B (zh)
WO (1) WO2013056482A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103662379A (zh) * 2012-09-10 2014-03-26 佛山市欣创装饰材料有限公司 装饰板存储单元
CN102963578B (zh) * 2012-11-23 2015-07-01 深圳市华星光电技术有限公司 面板解包方法及解包装置
CN103231899B (zh) * 2013-05-06 2015-04-15 哈尔滨工业大学 一种用于档案传送的自动导引小车
CN109051686B (zh) * 2018-09-29 2020-08-04 苏州精濑光电有限公司 一种工件运转方法
CN110104432A (zh) * 2019-04-22 2019-08-09 浙江大学 网格架式玻璃片材存储仓
CN110482220A (zh) * 2019-07-26 2019-11-22 蚌埠凯盛工程技术有限公司 一种玻璃基板存储工艺、装置及应用
CN111399700B (zh) * 2020-05-08 2024-05-10 安徽方兴光电新材料科技有限公司 一种玻璃盖板与玻璃功能片贴合装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0506198A1 (fr) * 1991-03-29 1992-09-30 Antonio Piazza Elément-support mobile pour locaux de stockage de produits
JP2002261144A (ja) * 2001-03-01 2002-09-13 Micronics Japan Co Ltd 基板の受け渡し方法及び装置
CN1409156A (zh) * 2001-09-28 2003-04-09 安内华股份有限公司 基板输送室及基板处理装置
JP2004071859A (ja) * 2002-08-07 2004-03-04 Sharp Corp ディスプレイ用基板収納用ボックス及びディスプレイ用基板の取り出し方法
DE202010013635U1 (de) * 2010-09-25 2010-11-25 Coenen, Eric Schubfachmagazin für aufrecht stehende Glasscheiben

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1474595A (en) * 1974-05-08 1977-05-25 Dean Res Corp Routing and conveying apparatus
KR100956807B1 (ko) * 2005-06-17 2010-05-11 샤프 가부시키가이샤 기판 반송 장치 및 그를 사용한 기판 반송 방법
JP5273479B2 (ja) * 2009-10-23 2013-08-28 株式会社ダイフク 基板用収納容器、及び、それを搬送する搬送設備

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0506198A1 (fr) * 1991-03-29 1992-09-30 Antonio Piazza Elément-support mobile pour locaux de stockage de produits
JP2002261144A (ja) * 2001-03-01 2002-09-13 Micronics Japan Co Ltd 基板の受け渡し方法及び装置
CN1409156A (zh) * 2001-09-28 2003-04-09 安内华股份有限公司 基板输送室及基板处理装置
JP2004071859A (ja) * 2002-08-07 2004-03-04 Sharp Corp ディスプレイ用基板収納用ボックス及びディスプレイ用基板の取り出し方法
DE202010013635U1 (de) * 2010-09-25 2010-11-25 Coenen, Eric Schubfachmagazin für aufrecht stehende Glasscheiben

Also Published As

Publication number Publication date
CN102502260B (zh) 2013-11-06
CN102502260A (zh) 2012-06-20

Similar Documents

Publication Publication Date Title
WO2013056482A1 (zh) 玻璃基板存储搬运系统以及玻璃基板存储平台
JP5913572B2 (ja) 収納容器、収納容器のシャッター開閉ユニット、及びこれらを用いたウエハストッカー
CN108190345B (zh) 一种用于smt料盘的自动存储设备
US10801103B2 (en) Evaporation device and evaporation method using the same
WO2019010944A1 (zh) 一种石墨舟自动装卸片设备
CN102320472B (zh) 基板传送系统及传送方法
CN110626798B (zh) 一种模组转盘设备
WO2015089968A1 (zh) 自动化测试平台
CN112786504B (zh) 基板处理装置和基板收纳容器保管方法
EP2224499A1 (en) Thin-film solar cell manufacturing system and common substrate storage rack
JP4298238B2 (ja) 基板処理装置および基板処理システム
CN103828034B (zh) 用于洁净室材料传输系统的狭窄宽度加载端口机构
CN114054297B (zh) 自动贴合设备
JP2000077499A (ja) 基板処理装置
CN210914354U (zh) 一种模组转盘设备
TWM634002U (zh) 三軸手臂自動化設備
CN119115634A (zh) 一种新型机床多托盘自动化生产线
CN211594151U (zh) 一种pcb自动收放板机
CN218511288U (zh) 直列式制造设备
CN216807292U (zh) 一种自动化pcb等离子体处理pcb流转系统
CN1170747C (zh) 库存传输系统
CN115561968B (zh) 接近式曝光装置及曝光方法
KR101069537B1 (ko) 기판 제조 장치
CN219172471U (zh) 一种带固定机构的绝缘胶带转运装置
WO2020042306A1 (zh) 一种显示面板的搬运系统和搬运方法

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 13379009

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11874213

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11874213

Country of ref document: EP

Kind code of ref document: A1