WO2013051147A1 - Procédé d'ajustement d'appareil d'acquisition d'images, appareil d'acquisition d'images et procédé de fabrication d'appareil d'acquisition d'images - Google Patents

Procédé d'ajustement d'appareil d'acquisition d'images, appareil d'acquisition d'images et procédé de fabrication d'appareil d'acquisition d'images Download PDF

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Publication number
WO2013051147A1
WO2013051147A1 PCT/JP2011/073173 JP2011073173W WO2013051147A1 WO 2013051147 A1 WO2013051147 A1 WO 2013051147A1 JP 2011073173 W JP2011073173 W JP 2011073173W WO 2013051147 A1 WO2013051147 A1 WO 2013051147A1
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WIPO (PCT)
Prior art keywords
imaging
image acquisition
image
acquisition apparatus
test sample
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PCT/JP2011/073173
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English (en)
Japanese (ja)
Inventor
勝士 矢野
通雄 柳澤
幸夫 徳田
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キヤノン株式会社
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Priority to PCT/JP2011/073173 priority Critical patent/WO2013051147A1/fr
Publication of WO2013051147A1 publication Critical patent/WO2013051147A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/34—Microscope slides, e.g. mounting specimens on microscope slides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/362—Mechanical details, e.g. mountings for the camera or image sensor, housings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N17/00—Diagnosis, testing or measuring for television systems or their details
    • H04N17/002—Diagnosis, testing or measuring for television systems or their details for television cameras
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction

Definitions

  • the present invention relates to the adjustment of an image acquisition device having a plurality of imaging elements.
  • Patent Document 1 in a microscope in which a specimen is enlarged and imaged by an imaging optical system (objective lens) and imaged using a plurality of imaging elements, an image of a large specimen which does not fit within the field of view of the imaging optical system can be acquired.
  • the system configuration is disclosed.
  • an image of a large area of a large sample is acquired by moving either the sample or the imaging element in the horizontal direction, imaging a plurality of times, and performing stitching processing to connect acquired images.
  • Patent Document 2 discloses a method of adjusting the position (the position in the optical axis direction or the inclination with respect to the optical axis) of the imaging element in the imaging device. Specifically, after temporarily arranging the imaging optical system and the imaging device, one of them is moved in the optical axis direction, and the test samples arranged on the optical axis are captured and acquired at a plurality of predetermined positions. The adjustment is performed by calculating the optimum position of the position of the imaging element based on the imaging information.
  • the surface shape has a waviness
  • the respective image sensors are individually driven according to the waviness.
  • the whole area can be well focused.
  • the positions of the respective imaging elements fluctuate with respect to the design values, as described above. Even if the focusing operation is performed by driving each imaging element, blurring occurs in the acquired image.
  • Patent Document 2 does not disclose a calibration method for positional deviation of a plurality of imaging devices in consideration of such a stitching process.
  • an object of the present invention is to perform calibration with high accuracy for positional deviation of each imaging device in an image acquisition apparatus having a plurality of imaging devices.
  • an adjustment method of an image acquisition device is an image acquisition device for imaging different regions of an object formed by an imaging optical system with a plurality of imaging elements.
  • An adjustment method comprising: a first step of imaging a test sample with the image acquisition device to acquire a captured image; and a position of the plurality of imaging elements based on a reference image of the test sample and the captured image. It has a second step of acquiring a calibration value, and a third step of performing calibration on the positions of the plurality of imaging elements based on the calibration value.
  • FIG. 1 is a schematic view of an image acquisition apparatus 100 according to an embodiment of the present invention.
  • BRIEF DESCRIPTION OF THE DRAWINGS The schematic of the preparation 20 which concerns on embodiment of this invention.
  • FIG. 2 is a top view of an imaging unit 23 according to an embodiment of the present invention. Explanatory drawing of the imaging operation which concerns on embodiment of this invention. Explanatory drawing of the stitching process which concerns on embodiment of this invention.
  • FIG. 2 is a schematic view of an imaging unit 26 according to an embodiment of the present invention.
  • FIG. 2 is a schematic view of an imaging unit 26 according to an embodiment of the present invention.
  • 6 is a flowchart showing an adjustment method of the image acquisition device according to the embodiment of the present invention.
  • FIG. 2 is a schematic view of a test sample 28 according to an embodiment of the present invention.
  • FIG. 2 is a schematic view of a test sample 28 according to an embodiment of the present invention.
  • FIG. 2 is a schematic view of a test sample 28 according to an embodiment of the present invention.
  • FIG. 5 is a diagram of an image acquisition apparatus 100 including a re-imaging unit 42 according to a second embodiment of the present invention. Schematic of the re-imaging unit 42 which concerns on Example 2 of this invention. Schematic of the re-imaging unit 42 which concerns on Example 2 of this invention.
  • FIG. 1 is a schematic view of an image acquisition apparatus 100 according to the present embodiment.
  • the image acquisition apparatus 100 controls the microscope unit 1 for imaging the preparation 20 as a subject, the preliminary measurement unit 2 for performing preliminary measurement of the preparation 20, and controls the microscope unit 1 and the preliminary measurement unit 2 and processes the acquired image.
  • Control and processing means 3 for In the image acquisition apparatus 100, after the preliminary measurement unit 2 performs preliminary measurement of the preparation 20 to determine the imaging conditions, the stage device 15 transports the preparation 20 to the microscope unit 1, and the preparation 20 is obtained based on the obtained imaging conditions.
  • the image acquisition apparatus 100 according to the present embodiment includes storage means 4 for storing in advance the reference image of the test sample 28 used for calibration (the details will be described later).
  • the microscope unit 1 includes an imaging light source 10 for illuminating the preparation 20 via the illumination optical system 11, an imaging optical system 21 for imaging the preparation 20, and an imaging unit 26 for imaging the preparation 20.
  • the stage device 15 is a member that holds and moves the slide 20.
  • a white light source, an LED light source or the like can be used as the imaging light source 10, and a combination of a white light source and a color filter is used to generate light of each wavelength of RGB or an LED having each wavelength is switchable It is good also as composition.
  • the stage device 15 includes a holding unit 12 for holding the preparation 20, a fine movement stage 13 for adjusting the preparation 20 in the XYZ directions, and a coarse movement stage 14 for moving the preparation 20 between the microscope unit 1 and the preliminary measurement unit 2.
  • a holding unit 12 for holding the preparation 20
  • a fine movement stage 13 for adjusting the preparation 20 in the XYZ directions
  • a coarse movement stage 14 for moving the preparation 20 between the microscope unit 1 and the preliminary measurement unit 2.
  • the Z direction corresponds to the optical axis direction of the imaging optical system 21
  • the XY direction corresponds to the direction perpendicular to the optical axis.
  • the holding unit 12, the fine movement stage 13 and the coarse movement stage 14 are provided with openings for passing the light from the imaging light source 10.
  • the imaging optical system 21 is arranged such that the preparation 20 and the imaging surface of the imaging unit 26 are optically conjugate so as to magnify the preparation 20 at a predetermined magnification and form an image on the imaging surface of the imaging unit 26. It is done. Further, by providing the NA stop 22 in the imaging optical system 21, it is desirable that the NA (numerical aperture) on the imaging surface side can be adjusted (details will be described later).
  • FIG. 2 is a view showing the upper surface and the cross section of the preparation 20.
  • the preparation 20 which is an example of the test object, has a configuration in which the sample 18 (such as a biological sample such as a tissue section) disposed on the slide glass 19 is sealed with the cover glass 17 and an adhesive (not shown). There is. Further, even if a label (bar code) 29 on which information necessary for managing the preparation 20 such as the identification number of the specimen 18 and the thickness of the cover glass 17 are recorded is attached on the slide glass 19. Good.
  • the slide 20 is illustrated as the test object to be an image acquisition target, for example, a substrate or the like is used as a test object for the purpose of performing an appearance inspection (foreign substance attachment, flaw inspection, etc.) It is also good.
  • the imaging unit 26 includes an adjustment means 25 and an imaging unit 23.
  • a top view of the imaging unit 23 viewed from the Z direction is shown in FIG.
  • the imaging unit 23 is configured of a plurality of imaging elements 24 arranged in a two-dimensional array, and each imaging element 24 images a different area of the slide 20 to obtain a plurality of images at one time. It can be acquired.
  • a CCD, a CMOS, or the like can be used as the imaging device 24.
  • the arrangement and the number of the plurality of imaging elements 24 are not limited to those shown in FIG. 3, and are appropriately determined depending on the shape and area of the field of view of the imaging optical system 21 and the shape and configuration of the imaging element 24.
  • the imaging unit 26 is held by a main body frame (not shown) or a lens barrel of the imaging optical system 21.
  • the specimen 18 is imaged in a plurality of steps while moving at least one of the slide 20 or the imaging unit 23 in the horizontal direction to change the relative position.
  • region of the test object 18 can be acquired by carrying out the stitching process of the several image acquired without clearance.
  • the preliminary measurement unit 2 measures the presence area of the specimen 18 in the preparation 20 and measures the surface shape of the cover glass 17 (specimen 18).
  • light from the preliminary measurement light source 31 is shaped into parallel light by the collimator lens 32, and this parallel light is deflected by the beam splitter 33 and enters the preparation 20.
  • An LED light source or a semiconductor laser can be used as the preliminary measurement light source 31, and at least the entire cover glass 17 is illuminated.
  • the parallel light incident on the preparation 20 is divided into a transmission light T transmitted through the preparation 20 and a reflection light R reflected by the surface of the cover glass 17.
  • the transmitted light T is incident on the camera 30 for measuring the region where the subject 18 is present, and the reflected light R is transmitted through the beam splitter 33 and is incident on the Shack-Hartmann sensor 35 for measuring the surface shape of the subject 18 .
  • the transmitted light T is used to measure the presence area of the specimen 18, and the reflected light R is used to measure the surface shape of the specimen 18.
  • the reflected light R is used to measure the presence region,
  • the transmitted light T may be used to measure the surface shape.
  • the camera 30 on which the transmitted light T is incident is, for example, a CCD camera, and is configured to image at least the entire area of the cover glass 17.
  • the amount of light transmitted through the subject 18 is smaller than the amount of light not transmitted through the subject 18. Therefore, the presence area of the specimen 18 in the preparation 20 is determined using the contrast difference between the light transmitted through the cover glass 17, the specimen 18 and the slide glass 19, and the light transmitted only through the cover glass 17 and the slide glass 19. be able to.
  • the image information captured by the camera 30 is input to the control and processing means 3, and the control and processing means 3 performs an operation of recognizing an area where the luminance is equal to or less than a predetermined threshold L as the existence area of the specimen 18.
  • the reflected light R enters the Shack-Hartmann sensor 35 that measures the wave front of the incident light through the afocal system 34.
  • the preparation 20 and the Shack-Hartmann sensor 35 are disposed at optically conjugate positions.
  • the wavefront of the reflected light R has a shape corresponding to the waviness of the surface of the cover glass 17. Therefore, the surface shape of the cover glass 17 can be measured at high speed and accurately by detecting the surface of the cover glass 17 at once by the Shack-Hartmann sensor 35.
  • an interferometer for example, a shearing interferometer or the like
  • the control / processing means 3 is configured by a computer including a CPU, a memory, a hard disk and the like, and performs control at the time of preliminary measurement and imaging, and processing digital data of the prepared slide 20 to create digital images. Do. Specifically, the control / processing means 3 captures an image of the sample 18 a plurality of times while moving the stage device 15 in the X and Y directions, and performs alignment between the images and a stitching process to obtain an image of the entire sample 18 Control and process when acquiring
  • the control and processing means 3 controls the microscope unit 1 and the preliminary measurement unit 2 so that the microscope unit 1 captures an image of the preparation 20 based on the measurement result of the preparation 20 by the preliminary measurement unit 2. That is, the control / processing means 3 determines the range to be imaged by the microscope unit 1 based on the presence area of the specimen 18 obtained using the preliminary measurement unit 2 and performs control to image only the imaging range. As a result, only an area necessary for pathological diagnosis and the like can be imaged, and the volume of digital image data of the slide 20 can be reduced, so that data handling becomes easy. Usually, the imaging range is determined so as to be equal to the region where the sample 18 is present. Further, the control / processing means 3 calculates the in-focus plane of the image of the subject 18 based on the surface shape of the cover glass 17 and the magnification of the imaging optical system 21 obtained using the preliminary measurement unit 2.
  • the focusing surface of the specimen 18 is also a curved surface corresponding to the undulation.
  • the image of the subject 18 is captured in a state where the imaging surfaces of the imaging unit 23 are arranged on the same plane, a part of the imaging surface does not fall within the focal depth of the image of the subject 18.
  • the image of the subject 18 projected on a part of the imaging plane is blurred. Therefore, in order to suppress the influence of the waviness of the preparation 20, a focusing operation by individually adjusting each of the plurality of imaging elements 24 in accordance with the surface shape of the sample is required.
  • the image acquisition apparatus 100 performs calibration on the positional deviation of the plurality of imaging elements 24 before performing the image acquisition operation of the slide 20, and the positional deviation. Reduce the impact of
  • the adjustment unit 25 in the imaging unit 26 has a plurality of driving units 40, which drive the respective positions of the plurality of imaging elements 24. It is configured to adjust.
  • the drive unit 40 is provided on a surface plate 39, and is configured to be able to drive the position of each imaging element 24 in the optical axis direction (Z direction) and the rotational direction in the imaging surface.
  • the drive unit 41 may be provided for the drive unit 40 so that the inclination of the imaging device 24 with respect to the optical axis can also be adjusted.
  • Examples of the adjustment means 25 include a mechanism using a linear actuator having a linear motor, an air cylinder, a stepping motor, an ultrasonic motor, and the like.
  • a mechanism or the like capable of performing adjustment with a screw by applying a preload by a spring or the like to fix each imaging element 24.
  • each image sensor 24 is adjusted by the adjustment unit 25 based on the surface shape measured by the preliminary measurement unit 2. Specifically, by adjusting the position of the imaging element of the plurality of imaging elements 24 in which the imaging surface and the focusing surface of the specimen 18 are separated, the imaging surface of the imaging element is brought closer to the focusing surface. The influence of the swell of the preparation 20 can be suppressed. However, as described above, even if the position of the imaging device fluctuates from the design value before imaging, even if adjustment is made to drive each of the imaging devices 24 based on the imaging conditions and approach the focusing plane, Blurring occurs in the acquired image.
  • a reference image of the test sample 28 used for calibration is acquired by another device and stored in the storage unit 4 in advance.
  • the reason for using the reference image is that, at the time of calibration, it is not clear how much each of the imaging elements 24 fluctuates with respect to the design value, so a reference image is set, It is because it is necessary to grasp via information.
  • this standard is obtained by imaging the test sample 28 under a stable temperature environment by a normal apparatus other than the image acquisition apparatus 100 to be adjusted and in which no deviation occurs in the imaging device. I have acquired an image.
  • the other devices described above also have a plurality of imaging devices, which correspond to the respective imaging devices 24 in the image acquisition device 100 as a reference imaging device.
  • the control / processing means 3 by comparing the reference image with the captured image acquired by the image acquisition device 100 by the control / processing means 3, the amount of displacement of the imaging device 24 with respect to this reference imaging device can be grasped, and a calibration value is acquired. (Details will be described later).
  • the reference image may be generated by creating image data serving as a reference with no deviation using an image simulator or the like and storing the image data in the storage unit 4 without using another device as described above.
  • the reference image may be stored in a server on a network connected to the image acquisition apparatus 100 without providing the storage unit 4 in the image acquisition apparatus 100 itself.
  • the test sample 28 by using a pattern having a lattice pattern or a circle mark as shown in FIGS. 7A, 7B and 7C, the amount of displacement of the position of the imaging element 24 and the distortion value of the image are calculated from the captured image. can do.
  • step S601 is a preparation stage of adjustment of the image acquisition apparatus 100, and may be performed each time the adjustment is performed, or may be performed only at the first adjustment such as at the time of manufacturing.
  • the preliminary measurement unit 2 in the image acquisition device 100 to be adjusted performs preliminary measurement of the test sample 28 used in step S601.
  • the focal plane and the imaging range of the test sample 28 at the time of imaging are determined.
  • a transport unit (not shown) may be used.
  • step S603 the stage device 15 holding the test sample 28 is moved to the microscope unit 1.
  • the test sample 28 is positioned to correspond to the focal position of the imaging optical system 21, and this position is used as the reference position in the optical axis direction of the stage device 15.
  • a position where the focal position of the imaging optical system 21 is at the center of the slide 20 may be obtained in advance, and it may be used as a reference position in the horizontal direction of the stage device 15.
  • step S604 imaging processing is performed with the test sample 28 as a test object.
  • the control / processing means 3 controls the adjustment means 25 as shown in FIGS. 5A and 5B, for example, to drive the position of each imaging element based on the preliminary measurement result in step S602.
  • imaging is performed multiple times while changing the positions of the plurality of imaging elements 24 by a method such as wobbling.
  • the position referred to here indicates at least one of the position in the optical axis direction (Z direction) of each imaging element 24 and the inclination with respect to the optical axis.
  • control / processing means 3 acquires, as a calibration curve, the relationship between the parameter indicating the image quality such as contrast and the position of each imaging device 24 at the time of imaging from the plurality of captured images acquired in each imaging device 24 .
  • a curve as shown in FIG. 8 is obtained for certain imaging devices A and B among the plurality of imaging devices 24, and this is acquired for all the imaging devices 24.
  • a calibration value for the position of each imaging device 24 is acquired based on the reference image of the test sample 28 and the captured image.
  • the control and processing unit 3 derives the position of the image sensor 24 at the highest image quality from the calibration curves for the plurality of image sensors 24 acquired in step S604.
  • imaging having the same image quality value as the image quality of the reference image
  • the position of the imaging device 24 with respect to the image may be derived.
  • the position of the image sensor 24 derived in this manner is used as a calibration position of the position in the optical axis direction or the inclination with respect to the optical axis, and a calibration value for adjusting positional deviation with respect to this calibration position is controlled and processed. Acquired by means 3.
  • control / processing means 3 compares the one at the calibration position among the captured images obtained in step S604 with the corresponding reference image acquired in step S601, and selects the imaging surface of each imaging element 24.
  • the position shift amount in the rotation direction in the inside is acquired.
  • the amount of positional deviation in the rotational direction of each captured image with respect to the reference image is acquired by comparing the patterns of the test samples 28 of the respective images.
  • the calibration value of the position in the rotational direction of the imaging device 24 can be acquired from the positional displacement amount of each captured image.
  • the calibration value for the position (optical axis direction, inclination, rotation direction) of each imaging element 24 can be acquired.
  • step S606 calibration for positional deviation of each image sensor 24 is performed based on the calibration value obtained in step S605.
  • the control / processing means 3 controls the adjustment means 25 to drive the position of each imaging device 24 in the optical axis direction, the inclination with respect to the optical axis and the position in the rotational direction. Perform calibration by positioning the at the calibration position.
  • a sequence may be adopted in which the test sample is imaged again after calibration, and the adjustment of the image acquisition apparatus 100 is ended if the value of the image quality of the acquired captured image is a predetermined value for obtaining a good image.
  • the stage device 15 is deformed due to a temperature change or the like and the position of the test sample 28 in step S603 fluctuates from the focal position of the imaging optical system 21, a good image is obtained by one adjustment. It is effective when not possible.
  • FIG. 9A a method of adjusting the image acquisition apparatus 100 having a system configuration in which the reflection member 43 and the re-imaging system 44 are provided on the light path will be described.
  • the description of the same or equivalent parts as in the first embodiment will be simplified or omitted.
  • each of the plurality of imaging elements 24 is separately disposed, and each one is configured as an imaging unit 26. Furthermore, each imaging unit 26 transmits a different region of the slide 20 and reflects a plurality of light fluxes formed through the imaging optical system 21, and the light fluxes from the respective reflection members 43 as respective imaging elements And a plurality of re-imaging systems 44 for forming images on 24 imaging planes.
  • a plurality of re-imaging units 42 are configured by each imaging unit 26 and each reflecting member 43 and each re-imaging system 44 corresponding to each imaging unit 26.
  • each re-imaging unit 42 may be adjusted by providing a drive system 45 in each re-imaging unit 42 and controlling each with the control / processing means 3.
  • the drive system 45 can also use the same mechanism as the adjustment unit 25 in the first embodiment.
  • each re-imaging system 44 is provided with the correction optical element 46, and the focal position can be changed by driving each correction optical element 46 in the optical axis direction (Y direction) by a drive mechanism (not shown). There is.
  • the drive unit 40 as the adjustment means 25 in each imaging unit 26, the position of the optical axis direction (Y direction) of each imaging element 24 and the rotational direction in the imaging plane are driven. It can be configured as possible. Furthermore, as shown in FIG. 9C, the drive unit 41 may be provided for the drive unit 40 so that the inclination of each image sensor 24 with respect to the optical axis can also be adjusted. In the present embodiment, the drive unit 40 may not be driven in the optical axis direction (Y direction) (details will be described later).
  • step S601 as in the first embodiment, the reference image of the test sample 28 is stored in the storage unit 4 in advance.
  • the test optical system is moved to the focal position of the imaging optical system 21.
  • step S604 an imaging process of the test sample 28 is performed.
  • imaging is performed a plurality of times while changing the positions of the plurality of imaging elements 24.
  • imaging is performed only once based on the preliminary measurement result in step S602. Acquire a captured image.
  • a calibration value for the position of each imaging device 24 is acquired based on the reference image of the test sample 28 and the captured image.
  • a reference image by each imaging device serving as a reference in another apparatus acquired in step S601 is compared with a captured image acquired in step S604 corresponding to each of the reference images.
  • the control / processing means 3 derives the shift amount of the image quality (contrast etc.) value between the reference image and the captured image and the positional shift amount in the rotational direction.
  • control / processing means 3 calibrates the optical axis direction and the rotational direction of each image sensor 24 corresponding to each image based on the amount of displacement of the image quality value derived from each image and the positional displacement amount in the rotational direction. Calculate the position. Based on the calibration position obtained in this manner, the calibration value with respect to the position (optical axis direction, rotation direction) of each imaging element in the image acquisition device 100 can be acquired by the control and processing means 3.
  • the image acquisition apparatus 100 is adjusted based on the calibration value obtained in step S605. That is, based on the calibration value, the control / processing means 3 controls the adjustment means 25 to drive the position of each imaging element 24 in the optical axis direction (Y direction) and rotational direction, It is possible to perform calibration for positional deviation.
  • the focus adjustment by driving the imaging device 24 in the Y direction may be performed by driving the re-imaging unit 42 in the Z direction, or the correction optical element 46.
  • driving in the Y direction That is, in the image acquisition apparatus 100 according to the present embodiment, calibration is performed for positional deviation of each imaging element 24 in the optical axis direction without driving each imaging element 24 itself in the optical axis direction (Y direction). be able to.
  • step S605 based on the calculated calibration value of each imaging element 24 in the Y direction, the calibration value in the Z direction of each reimaging unit 42 corresponding to each or each correction optical element 46 Get the calibration value in the Y direction of.
  • step S606 the control / processing means 3 controls the drive system 45 or a drive mechanism (not shown) to adjust the position of each reimaging unit 42 (Z direction) or adjust the position of each correction optical element 46 (Y Direction).
  • the position adjustment of each re-imaging unit 42 or the focus adjustment of each re-imaging system 44 is performed by the control / processing means 3 to calibrate the positional deviation of each image sensor 24 in the Y direction. be able to.
  • each image sensor 24 is rotated based on the calibration value.
  • calibration using image processing is performed. You may That is, for the displacement of each captured image caused by the positional displacement in the rotational direction of each imaging element 24, the control / processing means 3 calculates the correction amount by image processing based on the calibration value obtained in step S605. The correction amount is obtained as an offset value.
  • the control / processing means 3 performs correction with the offset value taken into consideration, so that the influence of the positional deviation of the imaging device 24 is suppressed. Can. Therefore, by using image processing, calibration can be performed for positional deviation in the rotational direction of each imaging element without driving each imaging element.
  • the adjustment method of the image acquisition apparatus it is highly accurate to set the NA of the imaging optical system 21 to different values at the time of imaging of the test sample 28 and at the time of imaging of the slide 20. It is an effective means for performing calibration.
  • a higher resolution image can be obtained by setting the NA to a higher NA than when imaging the preparation 20 having a wave, so that high accuracy is achieved.
  • Calibration values can be obtained.
  • adjusting the NA can be considered as an effective means. In order to calculate the distortion correction amount, it is necessary to detect the barycentric position of the round mark in each captured image when capturing a test sample as shown in FIGS. 7B and 7C. At this time, the NA can be changed by the NA stop 22 to adjust the contrast of the captured image, and the detection accuracy of the center-of-gravity position of the round mark can be enhanced.
  • adjusting the NA stop 22 according to the application can be said to be an effective means to realize high-precision calibration of the image acquisition apparatus.
  • the NA stop 22 for adjusting the NA it is possible to use one capable of arranging a field blocking plate with a plurality of different apertures according to the application, an iris diaphragm comprising a plurality of field blocking blades, or the like.
  • Control / Processing Means 5 Storage Means 20 Preparate 21 Imaging Optical System 22 NA Aperture 24 Imaging Element 25 Adjustment Means 28 Test Sample 100 Image Acquisition Device

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  • Microscoopes, Condenser (AREA)

Abstract

La présente invention vise à étalonner de manière précise des déviations de position de dispositifs d'imagerie sur un appareil d'acquisition d'images ayant une pluralité de dispositifs d'imagerie. Un procédé d'ajustement d'appareil d'acquisition d'images pour atteindre l'objectif susmentionné, selon un aspect de la présente invention, est un procédé pour ajuster un appareil d'acquisition d'images qui utilise une pluralité de dispositifs d'imagerie pour capturer des images de différentes régions d'un sujet projeté par un système optique d'imagerie, ledit procédé étant caractérisé en ce qu'il comprend une première étape pour capturer une image d'un échantillon d'essai avec l'appareil d'acquisition d'images, une deuxième étape pour acquérir des valeurs d'étalonnage pour des positions de la pluralité de dispositifs d'imagerie sur la base d'une image de référence et de l'image capturée de l'échantillon d'essai, et une troisième étape pour étalonner les positions de la pluralité de dispositifs d'imagerie sur la base des valeurs d'étalonnage.
PCT/JP2011/073173 2011-10-07 2011-10-07 Procédé d'ajustement d'appareil d'acquisition d'images, appareil d'acquisition d'images et procédé de fabrication d'appareil d'acquisition d'images WO2013051147A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180102509A (ko) * 2017-03-07 2018-09-17 일루미나, 인코포레이티드 이미지화된 샘플들에 대한 광학적 왜곡 보정
CN115460399A (zh) * 2022-10-26 2022-12-09 荣耀终端有限公司 摄像头模组的测试设备及测试方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11249021A (ja) * 1998-03-03 1999-09-17 Nikon Corp 画像表示システム
JP2002098901A (ja) * 2000-09-22 2002-04-05 Olympus Optical Co Ltd 走査型レーザ顕微鏡
JP2005136743A (ja) * 2003-10-30 2005-05-26 Kyocera Corp 撮像素子の位置調整装置及び位置調整方法
JP2005310942A (ja) * 2004-04-20 2005-11-04 Canon Inc 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP2009003016A (ja) * 2007-06-19 2009-01-08 Nikon Corp 顕微鏡、画像取得システム
JP2009015047A (ja) * 2007-07-05 2009-01-22 Nikon Corp 顕微鏡装置、及び観察方法
JP2009063657A (ja) * 2007-09-04 2009-03-26 Nikon Corp 顕微鏡システム
JP2009063658A (ja) * 2007-09-04 2009-03-26 Nikon Corp 顕微鏡システム
JP2009099879A (ja) * 2007-10-19 2009-05-07 Canon Inc 照明光学系、露光装置及びデバイス製造方法
WO2009113647A1 (fr) * 2008-03-14 2009-09-17 株式会社ニコン Système de microscope

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11249021A (ja) * 1998-03-03 1999-09-17 Nikon Corp 画像表示システム
JP2002098901A (ja) * 2000-09-22 2002-04-05 Olympus Optical Co Ltd 走査型レーザ顕微鏡
JP2005136743A (ja) * 2003-10-30 2005-05-26 Kyocera Corp 撮像素子の位置調整装置及び位置調整方法
JP2005310942A (ja) * 2004-04-20 2005-11-04 Canon Inc 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP2009003016A (ja) * 2007-06-19 2009-01-08 Nikon Corp 顕微鏡、画像取得システム
JP2009015047A (ja) * 2007-07-05 2009-01-22 Nikon Corp 顕微鏡装置、及び観察方法
JP2009063657A (ja) * 2007-09-04 2009-03-26 Nikon Corp 顕微鏡システム
JP2009063658A (ja) * 2007-09-04 2009-03-26 Nikon Corp 顕微鏡システム
JP2009099879A (ja) * 2007-10-19 2009-05-07 Canon Inc 照明光学系、露光装置及びデバイス製造方法
WO2009113647A1 (fr) * 2008-03-14 2009-09-17 株式会社ニコン Système de microscope

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180102509A (ko) * 2017-03-07 2018-09-17 일루미나, 인코포레이티드 이미지화된 샘플들에 대한 광학적 왜곡 보정
JP2018173943A (ja) * 2017-03-07 2018-11-08 イラミーナ インコーポレーテッド 撮像試料用の光学歪み補正
US10152776B2 (en) 2017-03-07 2018-12-11 Illumina, Inc. Optical distortion correction for imaged samples
KR102072232B1 (ko) * 2017-03-07 2020-01-31 일루미나, 인코포레이티드 이미지화된 샘플들에 대한 광학적 왜곡 보정
KR20200012006A (ko) * 2017-03-07 2020-02-04 일루미나, 인코포레이티드 이미지화된 샘플들에 대한 광학적 왜곡 보정
US10909666B2 (en) 2017-03-07 2021-02-02 Illumina, Inc. Optical distortion correction for imaged samples
KR102455926B1 (ko) * 2017-03-07 2022-10-17 일루미나, 인코포레이티드 이미지화된 샘플들에 대한 광학적 왜곡 보정
US11568522B2 (en) 2017-03-07 2023-01-31 Illumina, Inc. Optical distortion correction for imaged samples
US11816816B2 (en) 2017-03-07 2023-11-14 Illumina, Inc. Optical distortion correction for imaged samples
CN115460399A (zh) * 2022-10-26 2022-12-09 荣耀终端有限公司 摄像头模组的测试设备及测试方法

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